TW201309565A - A method for storing a pellicle - Google Patents
A method for storing a pellicle Download PDFInfo
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- TW201309565A TW201309565A TW101110675A TW101110675A TW201309565A TW 201309565 A TW201309565 A TW 201309565A TW 101110675 A TW101110675 A TW 101110675A TW 101110675 A TW101110675 A TW 101110675A TW 201309565 A TW201309565 A TW 201309565A
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- bag
- pellicle
- container
- antistatic
- clean room
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- General Physics & Mathematics (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Description
本發明是有關於一種對無塵室內所製造的產品(特別是防塵薄膜組件)進行收納的防塵薄膜組件收納方法。 The present invention relates to a pellicle assembly method for housing a product (particularly a pellicle assembly) manufactured in a clean room.
在無塵室內製造的光微影(lithography)用防塵薄膜組件是在專用的容器中被收納後，再收納在樹脂製的袋中。為了防止防塵薄膜組件容器(箱)或防塵薄膜組件帶有靜電，一般該袋使用抗靜電類型的袋。 The pellicle for lithography manufactured in a clean room is housed in a dedicated container and stored in a resin bag. In order to prevent static electricity of the pellicle container (box) or the pellicle assembly, the bag is generally an antistatic type bag.
於抗靜電類型的袋的情形時，為了讓袋具有導電性，要將抗靜電劑摻入，或在表面上蒸鍍金屬薄膜，這些都成為灰塵發生的原因，防塵薄膜組件容器的輸送狀態或環境使袋中所收納的防塵薄膜組件容器被污染，或者，將防塵薄膜組件容器從袋中拿出且打開蓋時，防塵薄膜組件容器的蓋等上所附著的抗靜電劑等，會使在袋內部收納的防塵薄膜組件被污染。 In the case of an antistatic type bag, in order to make the bag electrically conductive, an antistatic agent is incorporated, or a metal film is vapor-deposited on the surface, which is a cause of dust generation, a conveyance state of the pellicle container or The environment causes the pellicle film container contained in the bag to be contaminated, or the antistatic agent attached to the cover of the pellicle film container or the like when the pellicle container is taken out of the bag and the cover is opened, The pellicle assembly housed inside the bag is contaminated.
鑒於以上的情況，本發明的課題是提供一種即使在保管、輸送及開封時，也灰塵發生少且在袋中收納的產品，特別是提供一種不污染在防塵薄膜組件容器的內部所收納的防塵薄膜組件的防塵薄膜組件收納方法。 In view of the above circumstances, an object of the present invention is to provide a product which is less likely to be dusted and stored in a bag even during storage, transportation, and unsealing, and particularly provides a dustproof which is not contaminated in the interior of the pellicle container. A method of accommodating a pellicle of a film module.
本發明是用以解決這樣的課題的發明，本發明的防塵薄膜組件收納方法的特徵在於：將收納防塵薄膜組件的容器放入清潔規格的第一袋中，且將其開口密封，接著將其 放入具有抗靜電功能的第二袋，且將其開口密封，進一步放入具有抗靜電功能的第三袋，且進行密封。 The present invention is an invention for solving such a problem, and a method for accommodating a pellicle according to the present invention is characterized in that a container for accommodating a pellicle assembly is placed in a first bag of a clean gauge, and an opening thereof is sealed, and then A second bag having an antistatic function was placed, and its opening was sealed, and a third bag having an antistatic function was further placed and sealed.
上述清潔規格的袋是在至少清潔度1000以下的無塵室內製造且進行清潔度管理的產品，上述具有抗靜電功能的袋至少具有9.9×1011 Ω/cm2以下的表面電阻，從而具有抗靜電特性。並且，上述密封的操作為在清潔度為1以上的無塵室內進行。 The bag of the above-mentioned cleaning specification is a product which is manufactured in a clean room having a cleanliness degree of at least 1000 or less and is subjected to cleanliness management, and the bag having the antistatic function has a surface resistance of at least 9.9 × 10 11 Ω/cm 2 or less, thereby having resistance Static properties. Further, the above sealing operation is performed in a clean room having a cleanliness of 1 or more.
根據本發明，最內側的第一袋使用清潔袋，第二袋、第三袋使用抗靜電類型的袋，藉此，可以防止收納產品(防塵薄膜組件)的容器以及產品上附著異物，並且可以將靜電保持為最小限度至將容器從袋中取出為止，從而防止產品的污染。 According to the present invention, the innermost first bag uses a cleaning bag, and the second bag and the third bag use an antistatic type bag, whereby the container for storing the product (dusting film assembly) and the foreign matter attached to the product can be prevented, and Keep the static electricity to a minimum until the container is removed from the bag to prevent contamination of the product.
本發明是有關於在無塵室內，將收納防塵薄膜組件的防塵薄膜組件容器收納於袋中的防塵薄膜組件收納方法，其基本在於：其是將收納防塵薄膜組件的防塵薄膜組件容器，從內側算起，以非抗靜電的清潔袋、抗靜電袋以及抗靜電袋的順序進行3重收納、包裝。藉由使防塵薄膜組件容器不與加入抗靜電劑的袋直接接觸，從而防止防塵薄膜組件容器以及內部所收納的防塵薄膜組件的污染，同時藉由最內側的清潔袋來防止由於袋的靜電而產生的靜電危害。 The present invention relates to a method for accommodating a pellicle film container in which a pellicle film container accommodating a pellicle film assembly is housed in a bag in a clean room, which is basically a pellicle film container that houses the pellicle film assembly from the inside. In the order of non-antistatic cleaning bags, antistatic bags, and antistatic bags, they are stored and packaged in three steps. By preventing the pellicle container from coming into direct contact with the bag to which the antistatic agent is added, contamination of the pellicle container and the pellicle assembly contained therein is prevented, and the static electricity of the bag is prevented by the innermost cleaning bag. The resulting electrostatic hazard.
以下，使用圖對本發明來進行進一步詳細說明。 Hereinafter, the present invention will be described in further detail using the drawings.
圖1中，將防塵薄膜組件1收納於其內部的防塵薄膜 組件容器2，收納於清潔規格的第一袋3，接著收納於其外側具有抗靜電功能的第二袋4，進一步收納於其外側具有抗靜電功能的第三袋5。 In Fig. 1, a pellicle film in which the pellicle film assembly 1 is housed The component container 2 is housed in the first bag 3 of the cleaning specification, and then housed in the second bag 4 having an antistatic function on the outer side thereof, and further housed in the third bag 5 having an antistatic function on the outer side.
關於本發明中使用的袋的尺寸，只要為可以收納防塵薄膜組件的收納容器(箱)，並且外側的袋可以收納內部所收納的袋的尺寸，則沒有特別的限制。關於厚度，對各袋的開口進行密封時，例如，由熱封進行密封時，較佳的是要不軟化過度而破損以及斷裂的某種程度的厚度。相反地，若具有難以熔融的程度的厚度，則密封無法充分進行，所以，厚度較佳的是50 μm~200 μm。 The size of the bag used in the present invention is not particularly limited as long as it is a storage container (box) in which the pellicle assembly can be housed, and the outer bag can accommodate the size of the bag housed inside. Regarding the thickness, when sealing the opening of each bag, for example, when sealing by heat sealing, it is preferable not to soften a certain thickness which is excessively broken and broken. On the other hand, if the thickness is such that it is difficult to melt, the sealing cannot be sufficiently performed. Therefore, the thickness is preferably 50 μm to 200 μm.
袋的材質沒有特別限制，最內側的與防塵薄膜組件容器接觸的袋(第一袋)，較佳的是使用僅包含聚乙烯、尼龍、聚丙烯、聚酯等的樹脂，或者使用將該些樹脂適當地積層而成者。第一袋直接與收納產品的容器相接觸，因此必須使用清潔規格的袋，需要在清潔度1000以下的無塵室內製造且進行清潔度管理者。 The material of the bag is not particularly limited, and the innermost bag (first bag) that is in contact with the pellicle container is preferably made of a resin containing only polyethylene, nylon, polypropylene, polyester, or the like. The resin is laminated as appropriate. Since the first bag is in direct contact with the container in which the product is stored, it is necessary to use a bag of a clean size, and it is necessary to manufacture it in a clean room having a cleanliness of 1000 or less and perform a cleanliness manager.
該第一袋被第二袋收納。關於該第二袋，與第一袋同樣地包含聚乙烯、尼龍、聚丙烯、聚酯等的樹脂，可以列舉於這些樹脂上進行金屬薄膜蒸鍍而成者，或添加抗靜電劑而成者，進一步可以列舉於積層有上述樹脂而成者上賦予抗靜電功能之物而成者等。作為抗靜電性能，具有一般使用的程度的抗靜電性能即可，但是理想的是具有作為抗靜電袋一般的性能的至少9.9×1011 Ω/cm2以下的表面電阻。 The first bag is received by the second bag. The second bag contains a resin such as polyethylene, nylon, polypropylene, or polyester in the same manner as the first bag, and may be a metal film deposited on these resins or an antistatic agent. Further, it may be a product obtained by laminating the resin with the above-mentioned resin and imparting an antistatic function. The antistatic property may have an antistatic property to the extent that it is generally used, but it is preferable to have a surface resistance of at least 9.9 × 10 11 Ω/cm 2 or less as a general performance of the antistatic bag.
裝入該第二袋的防塵薄膜組件容器，進一步在第三袋 進行收納。該第三袋，是與外部直接接觸，所以在快要運入無塵室內時才開封，這是為了不讓外部的髒污被帶入無塵室內。 The pellicle assembly container loaded into the second bag, further in the third bag Store it. The third bag is in direct contact with the outside, so it is opened when it is about to be transported into the clean room, in order to prevent external dirt from being carried into the clean room.
因此，根據所運入的無塵室的清潔度，該第三袋也可以裝入第四袋，再裝入第五袋等，可以進一步增加收納袋。 Therefore, depending on the cleanliness of the clean room to be carried in, the third bag can be placed in the fourth bag, and then placed in the fifth bag or the like, and the storage bag can be further added.
第三袋的材質與第二袋同樣地包含聚乙烯、尼龍、聚丙烯、聚酯等的樹脂，可以列舉於這些樹脂上進行蒸鍍金屬薄膜而成者或添加抗靜電劑而成者，進一步可以列舉於積層有上述樹脂而成者上賦予抗靜電功能而成者等。 The material of the third bag is similar to the second bag, and includes a resin such as polyethylene, nylon, polypropylene, or polyester, and may be a vapor-deposited metal film or an antistatic agent. For example, those in which the above resin is laminated and an antistatic function is provided may be mentioned.
第四袋以上的袋亦相同。 The bags above the fourth bag are also the same.
以下，對實例進行描述。另外，以下的實例、參考例以及比較例中使用的清潔規格的袋為在清潔度1000以下的無塵室內製造洗浄而成的聚乙烯製的袋，抗靜電袋為使用於聚乙烯中添加抗靜電劑而具有抗靜電功能(至少為9.9×1011 Ω/cm2以下的表面電阻的抗靜電特性)的聚乙烯製的袋。 Hereinafter, an example will be described. In addition, the bag of the cleaning specification used in the following examples, reference examples, and comparative examples is a polyethylene bag which is washed and cleaned in a clean room having a cleanliness of 1000 or less, and the antistatic bag is used for adding polyethylene to polyethylene. A polyethylene bag having an antistatic function (at least an antistatic property of a surface resistance of at least 9.9 × 10 11 Ω/cm 2 or less).
首先，在厚度為70 μm的清潔規格的第一袋，將收納有防塵薄膜組件的防塵薄膜組件容器放入袋的最底部，將袋的口用熱封進行密封。接著，將收納有防塵薄膜組件容器的第一袋放入厚度70 μm的抗靜電袋的第二袋中，將袋的口用熱封進行密封。 First, in a first bag of a clean gauge having a thickness of 70 μm, a pellicle container container containing a pellicle assembly is placed at the bottom of the bag, and the mouth of the bag is sealed with a heat seal. Next, the first bag containing the pellicle container was placed in a second bag of an antistatic bag having a thickness of 70 μm, and the mouth of the bag was sealed by heat sealing.
最後，將該第二袋放入厚度為100 μm的抗靜電袋的 第三袋，將袋的口用熱封進行密封。再將第三袋放入具有緩衝材料的瓦楞紙箱中，密封而置於振動試驗機，以10 Hz、上下方向為1 G的加速度進行24小時的振動。 Finally, the second bag is placed in an antistatic bag having a thickness of 100 μm. The third bag is sealed with a heat seal at the mouth of the bag. Then, the third bag was placed in a corrugated cardboard box having a cushioning material, sealed, placed in a vibration tester, and vibrated for 24 hours at an acceleration of 10 Hz in the vertical direction at 1 G.
接著，將進行了上述步驟之物運入無塵室內開封，結果第二袋、第三袋的表面漏出有白色而被認為是抗靜電劑之物。該物亦附著於第一袋表面上，但是在其中的容器表面是清潔的，在無塵室內的暗室，用30萬勒克司的集光燈進行檢査，沒有發現附著異物等。 Then, the object subjected to the above steps was carried into a clean room to be opened, and as a result, the surface of the second bag and the third bag was leaked with white and was considered to be an antistatic agent. The object was also attached to the surface of the first bag, but the surface of the container therein was clean, and the dark room in the clean room was inspected with a spotlight of 300,000 lux, and no foreign matter was observed.
另外，將收納容器打開，對產品(防塵薄膜組件)用上述方法進行了檢査，產品表面也沒有附著物。 Further, the storage container was opened, and the product (dust-proof film assembly) was inspected by the above method, and there was no deposit on the surface of the product.
參考例1中，第一袋、第二袋使用厚度為70 μm的清潔規格的袋，第三袋使用厚度為100 μm的抗靜電袋。參考例2中，第一袋、第二袋、第三袋均使用厚度為70 μm的清潔規格的袋。除此以外，與實施例1同樣地將袋的口熱封，進行24小時的振動試驗後，在無塵室內開封，打開收納容器，將產品(防塵薄膜組件)取出，在無塵室內的暗室用30萬勒克司的集光燈進行檢査，結果於各個產品上均發現異物的增加。將該結果與實施例1的結果一起匯整於表1。 In Reference Example 1, the first bag and the second bag were bags of a clean gauge having a thickness of 70 μm, and the third bag was an antistatic bag having a thickness of 100 μm. In Reference Example 2, the first bag, the second bag, and the third bag each used a bag of a clean gauge having a thickness of 70 μm. In the same manner as in Example 1, the mouth of the bag was heat-sealed in the same manner as in Example 1, and after a vibration test for 24 hours, the container was opened in a clean room, the container was opened, and the product (dust-proof film assembly) was taken out, and the dark room in the clean room was removed. Examination with a spotlight of 300,000 lux was carried out, and as a result, an increase in foreign matter was observed on each product. This result is summarized in Table 1 together with the results of Example 1.
第一袋使用厚度為70 μm的抗靜電袋，第二袋、第三袋除了將抗靜電袋或清潔袋進行適宜地組合而使用以外，以與實例1相同的構成進行試驗(參照表1)。將進行了試 驗之物運入無塵室內開封，結果第一袋、第二袋、第三袋的各表面均漏出有白色而被認為是抗靜電劑之物。 The first bag was an antistatic bag having a thickness of 70 μm, and the second bag and the third bag were tested in the same configuration as in Example 1 except that the antistatic bag or the cleaning bag was appropriately combined (refer to Table 1). . Will be tested The test object was transported into the clean room to open the seal, and as a result, the surface of the first bag, the second bag, and the third bag leaked white and was considered to be an antistatic agent.
進一步，在容器表面確認到有白色粉狀物附著。在無塵室內的暗室用30萬勒克司的集光燈進行檢査，容器表面具有白色的粉狀的附著物。另外，打開收納容器，將產品用上述方法檢査，具有附著異物，藉由顯微IR分光分析而確認到該附著物與第一袋含有的抗靜電劑為相同的成分。將該結果匯整示於表1。 Further, it was confirmed that white powder adhered to the surface of the container. The dark room in the clean room was inspected with a spotlight of 300,000 lux, and the surface of the container had a white powdery deposit. Further, the storage container was opened, and the product was inspected by the above method, and foreign matter was adhered thereto. It was confirmed by microscopic IR spectroscopic analysis that the adherend was the same component as the antistatic agent contained in the first bag. The results are summarized in Table 1.
此為僅使用往常所用的抗靜電袋的例子，將收納防塵薄膜組件的防塵薄膜組件容器放入厚度為100 μm的抗靜電袋，將袋的口用熱封進行密封後，與實例1同樣地進行24小時的振動試驗後，在無塵室內開封，打開收納容器，將產品(防塵薄膜組件)取出，在無塵室內的暗室用30萬勒克司的集光燈進行檢査，結果確認到產品上異物的增加。將該結果與上述實例、參考例的結果一起示於表1。 This is an example of using only the conventional antistatic bag, and the pellicle container container that houses the pellicle assembly is placed in an antistatic bag having a thickness of 100 μm, and the mouth of the bag is sealed by heat sealing, and the same as in Example 1. After the vibration test for 24 hours, the product was opened in a clean room, the storage container was opened, and the product (dust-proof film assembly) was taken out, and it was inspected in a dark room in a clean room with a spotlight of 300,000 lux, and the product was confirmed. The increase in foreign bodies. This result is shown in Table 1 together with the results of the above examples and reference examples.
1‧‧‧防塵薄膜組件 1‧‧‧Plastic membrane assembly
2‧‧‧防塵薄膜組件容器 2‧‧‧Plastic membrane assembly container
3‧‧‧第一袋 3‧‧‧ first bag
4‧‧‧第二袋 4‧‧‧ second bag
5‧‧‧第三袋 5‧‧‧ third bag
圖1是表示本發明的防塵薄膜組件的收納方法的模式的實施方式的概略說明圖。 FIG. 1 is a schematic explanatory view showing an embodiment of a mode of a method of housing a pellicle according to the present invention.
1‧‧‧防塵薄膜組件 1‧‧‧Plastic membrane assembly
2‧‧‧防塵薄膜組件容器 2‧‧‧Plastic membrane assembly container
3‧‧‧第一袋 3‧‧‧ first bag
4‧‧‧第二袋 4‧‧‧ second bag
5‧‧‧第三袋 5‧‧‧ third bag
Claims (4)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011071582A JP5349519B2 (en) | 2011-03-29 | 2011-03-29 | Pellicle storage method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201309565A true TW201309565A (en) | 2013-03-01 |
| TWI460111B TWI460111B (en) | 2014-11-11 |
Family
ID=46925417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101110675A TWI460111B (en) | 2011-03-29 | 2012-03-28 | A method for storing a pellicle |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20120247069A1 (en) |
| JP (1) | JP5349519B2 (en) |
| KR (1) | KR20120112002A (en) |
| CN (1) | CN102736403A (en) |
| TW (1) | TWI460111B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI608969B (en) * | 2015-11-09 | 2017-12-21 | 信越化學工業股份有限公司 | Dust film assembly storage container packaging structure and its packaging method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3025450B1 (en) * | 2014-09-08 | 2016-12-23 | Thales Sa | REPAIR UNIT FOR NACELLE |
| JP2020019520A (en) * | 2018-07-31 | 2020-02-06 | 住友電気工業株式会社 | Packaging structure of silicon carbide substrate |
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|---|---|---|---|---|
| JPH01149646A (en) * | 1987-12-07 | 1989-06-12 | Nec Corp | Wave detecting circuit with level fluctuation correcting function |
| JP2630040B2 (en) * | 1990-08-29 | 1997-07-16 | 富士通株式会社 | Packing method |
| JP3143337B2 (en) * | 1994-10-12 | 2001-03-07 | 信越ポリマー株式会社 | Pellicle storage container |
| US5863496A (en) * | 1996-11-25 | 1999-01-26 | Prepared Media Laboratory, Inc. | Sterile packaging |
| KR100360404B1 (en) * | 2000-07-11 | 2002-11-13 | 삼성전자 주식회사 | Method for packing wafers preventing surface degradation on wafer |
| TW464792B (en) * | 2000-09-29 | 2001-11-21 | United Microelectronics Corp | A structure of optical mask |
| TWI231376B (en) * | 2004-01-06 | 2005-04-21 | Optimax Tech Corp | Package for a optical sheet and a packing method for the same |
| JP2005298037A (en) * | 2004-04-15 | 2005-10-27 | Toppan Printing Co Ltd | Packaging bag and electronic component package |
| JP2006096851A (en) * | 2004-09-29 | 2006-04-13 | Toppan Printing Co Ltd | Clean film and wrapping bag using the same |
| JP4856371B2 (en) * | 2004-11-10 | 2012-01-18 | 昭和電工パッケージング株式会社 | Laminated body for packaging, packaging bag body using the same, and packaging body for electronic material products |
| JP2008090206A (en) * | 2006-10-05 | 2008-04-17 | Hoya Corp | Management system for mask blank |
| JP5052106B2 (en) * | 2006-11-22 | 2012-10-17 | 旭化成イーマテリアルズ株式会社 | How to store the pellicle |
| JP5051840B2 (en) * | 2007-11-22 | 2012-10-17 | 信越化学工業株式会社 | Method for storing a pellicle in a pellicle storage container |
| JP5198043B2 (en) * | 2007-11-30 | 2013-05-15 | アイセロ化学株式会社 | Double bag for clean packaging |
| JP5133229B2 (en) * | 2008-12-05 | 2013-01-30 | 信越ポリマー株式会社 | Pellicle storage container |
| JP2011007827A (en) * | 2009-06-23 | 2011-01-13 | Shin Etsu Polymer Co Ltd | Storage container for large precision member |
| JP2011030727A (en) * | 2009-07-31 | 2011-02-17 | Manii Kk | Packaging bag for medical supplies, packaging bag containing medical supplies, and method for packaging medical supplies |
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- 2012-02-23 KR KR1020120018494A patent/KR20120112002A/en not_active Application Discontinuation
- 2012-03-26 US US13/430,110 patent/US20120247069A1/en not_active Abandoned
- 2012-03-28 TW TW101110675A patent/TWI460111B/en active
- 2012-03-29 CN CN2012100886418A patent/CN102736403A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI608969B (en) * | 2015-11-09 | 2017-12-21 | 信越化學工業股份有限公司 | Dust film assembly storage container packaging structure and its packaging method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI460111B (en) | 2014-11-11 |
| CN102736403A (en) | 2012-10-17 |
| JP2012208158A (en) | 2012-10-25 |
| JP5349519B2 (en) | 2013-11-20 |
| US20120247069A1 (en) | 2012-10-04 |
| KR20120112002A (en) | 2012-10-11 |
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