TWI598701B - Reticle transferring device - Google Patents
Reticle transferring device Download PDFInfo
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- TWI598701B TWI598701B TW105120140A TW105120140A TWI598701B TW I598701 B TWI598701 B TW I598701B TW 105120140 A TW105120140 A TW 105120140A TW 105120140 A TW105120140 A TW 105120140A TW I598701 B TWI598701 B TW I598701B
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Description
本發明係關於光罩傳載裝置，特別係關於具有線路整束結構於機械手臂中之光罩傳載裝置。 The present invention relates to a reticle transfer device, and more particularly to a reticle transfer device having a line bundle structure in a robotic arm.
在積體電路製程中，隨著對產量及良率與日漸增的需求，而發展出高度專業化與自動化的系統來傳送光罩。光罩通常儲存在光罩卡匣(reticle library)內，且根據不同流程，例如光罩檢測流程(IRIS inspection reticle flow path)、光罩區至曝光處理區流程(reticle move to lens flow path)、以及由內部光罩卡匣移除光罩流程(removal of reticle from IRL flow path)等，光罩需要藉由機械手臂(Robot)在各個卡匣與區域間傳輸。 In the integrated circuit process, with the increasing demand for output and yield, a highly specialized and automated system has been developed to transmit the reticle. The reticle is typically stored in a reticle library and, depending on the process, such as the IRIS inspection reticle flow path, the reticle move to lens flow path, And the removal of the reticle from the IRL flow path, etc., the mask needs to be transferred between the respective cassettes and the area by a robot.
本發明某些實施例提供一種光罩傳載裝置，其包含控制器、機械手臂、固持部、以及線路整束結構。該機械手臂之一端連接該控制器，另一端連接於固持部。該機械手臂包含第一垂直部與第一水平部，該第一垂直部與該固持部相連。該線路整束結構包含收納管以及纏繞部，其中該收納管之直徑小於該纏繞部之直徑。 Certain embodiments of the present invention provide a reticle transfer device that includes a controller, a robotic arm, a retaining portion, and a wire bundle structure. One end of the robot arm is connected to the controller, and the other end is connected to the holding portion. The robot arm includes a first vertical portion and a first horizontal portion, and the first vertical portion is coupled to the holding portion. The whole bundle structure of the line comprises a receiving tube and a winding portion, wherein the diameter of the receiving tube is smaller than the diameter of the winding portion.
本發明某些實施例提供一種用於光罩傳載裝置的線路整束結 構，包含具有第一直徑之收納管；具有第二直徑之纏繞部，固定於該收納管之上；具有第三直徑之抵頂部，固定於該纏繞部之上。該第一直徑小於該第二直徑，且該第二直徑小於該第三直徑。 Some embodiments of the present invention provide a line beam junction for a photomask transfer device The structure comprises a receiving tube having a first diameter; a winding portion having a second diameter fixed to the receiving tube; and a top portion having a third diameter fixed to the winding portion. The first diameter is smaller than the second diameter, and the second diameter is smaller than the third diameter.
本發明某些實施例提供一種光罩傳載裝置，其包括控制器、機械手臂、固持部、扭力感測器、線路整束結構、以及電線。該機械手臂之一端連接該控制器，另一端連接於固持部。該機械手臂包含垂直部與水平部，該垂直部與該固持部相連。該扭力感測器置於該機械手臂之垂直部與該固持器之間。該線路整束結構置放於該水平部，包含收納管、固定於該收納管之上之纏繞部、以及固定於該纏繞部之上之抵頂部，其中該收納管之直徑小於該纏繞部之直徑。其中該電線通過該收納管、纏繞於該纏繞部、並抵止於該抵頂部。 Certain embodiments of the present invention provide a reticle transfer device that includes a controller, a robotic arm, a retaining portion, a torsion sensor, a line bundle structure, and an electrical wire. One end of the robot arm is connected to the controller, and the other end is connected to the holding portion. The robot arm includes a vertical portion and a horizontal portion, and the vertical portion is coupled to the holding portion. The torque sensor is placed between the vertical portion of the robot arm and the holder. The whole bundle structure is placed on the horizontal portion, and includes a receiving tube, a winding portion fixed on the receiving tube, and a top portion fixed on the winding portion, wherein the diameter of the receiving tube is smaller than the winding portion diameter. The electric wire passes through the receiving tube, is wound around the winding portion, and is abutted against the abutting portion.
10‧‧‧光罩傳載裝置 10‧‧‧Photomask transfer device
10A‧‧‧光罩處置模組 10A‧‧‧Photomask Disposal Module
10B‧‧‧曝光模組 10B‧‧‧Exposure Module
100‧‧‧機械手臂裝置 100‧‧‧Machine arm device
101‧‧‧傳送盒1 101‧‧‧Transfer box 1
102‧‧‧傳送盒2 102‧‧‧Transport box 2
103‧‧‧內部光罩匣 103‧‧‧Internal mask 匣
105‧‧‧內部光罩檢測區 105‧‧‧Internal mask detection area
107‧‧‧預備區 107‧‧‧Preparation area
107'‧‧‧曝光槽 107'‧‧‧Exposure slot
20‧‧‧光罩傳載裝置 20‧‧‧Photomask transfer device
201‧‧‧控制器 201‧‧‧ Controller
202‧‧‧第一機械手臂 202‧‧‧First robotic arm
2041‧‧‧固持部輪緣 2041‧‧‧holding rim
θ 1‧‧‧角度 θ 1‧‧‧ angle
θ 2‧‧‧角度 θ 2‧‧‧ angle
θ 3‧‧‧角度 θ 3‧‧‧ angle
205‧‧‧扭力感測器 205‧‧‧Torque sensor
400‧‧‧線路整束結構 400‧‧‧ line bundle structure
401A‧‧‧收納管 401A‧‧‧ 收纳 tube
401B‧‧‧纏繞部 401B‧‧‧ winding department
401C‧‧‧抵頂部 401C‧‧‧ arrives at the top
401D‧‧‧墊片 401D‧‧‧shims
4011‧‧‧螺孔 4011‧‧‧ screw hole
4011'‧‧‧螺孔 4011'‧‧‧ screw hole
4013‧‧‧螺孔 4013‧‧‧ screw hole
203‧‧‧第二機械手臂 203‧‧‧Second robotic arm
2031‧‧‧第一水平部 2031‧‧‧First horizontal department
2033‧‧‧第一垂直部 2033‧‧‧First vertical part
2035‧‧‧第一垂直部輪緣 2035‧‧‧First vertical rim
204‧‧‧固持部 204‧‧‧ Holding Department
403‧‧‧電線 403‧‧‧Wire
407‧‧‧通孔 407‧‧‧through hole
50‧‧‧線路整束結構 50‧‧‧Line bundle structure
60‧‧‧線路整束結構 60‧‧‧ line bundle structure
由以下詳細說明與附隨圖式得以最佳了解本申請案揭示內容之各方面。注意，根據產業之標準實施例，各種特徵並非依比例繪示。實際上，為了清楚討論，可任意增大或縮小各種特徵的尺寸。 The aspects of the disclosure of the present application are best understood from the following detailed description and the accompanying drawings. It is noted that various features are not drawn to scale in accordance with standard embodiments of the industry. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.
圖1係根據一些實施例說明一種光罩傳載裝置之例示佈局示意圖。 1 is a schematic diagram showing an exemplary layout of a reticle transfer device in accordance with some embodiments.
圖2係根據一些實施例說明的一種光罩傳載裝置之上視圖。 2 is a top plan view of a reticle transfer device, in accordance with some embodiments.
圖3係根據一些實施例說明的一種機械手臂與固持部之橫切面示意圖。 3 is a schematic cross-sectional view of a mechanical arm and a retaining portion, according to some embodiments.
圖4係根據一些實施例說明的一種用於光罩傳載裝置的線路整束結構之橫切面示意圖。 4 is a cross-sectional view of a line bundle structure for a reticle transfer device, in accordance with some embodiments.
圖5係根據一些實施例說明的一種線路整束結構之立體圖。 Figure 5 is a perspective view of a line bundle structure illustrated in accordance with some embodiments.
圖6係根據一些實施例說明的一種線路整束結構之***圖。 6 is an exploded view of a line bundle structure illustrated in accordance with some embodiments.
以下揭示內容提供許多不同的實施例或範例，用於實施本申請案之不同特徵。元件與配置的特定範例之描述如下，以簡化本申請案之揭示內容。當然，這些僅為範例，並非用於限制本申請案。例如，以下描述在第二特徵上或上方形成第一特徵可包含形成直接接點的第一與第二特徵之實施例，亦可包含在該第一與第二特徵之間形成其他特徵的實施例，因而該第一與第二特徵並非直接接點。此外，本申請案可在不同範例中重複元件符號與/或字母。此重複係為了簡化與清楚之目的，而非支配不同實施例與/或所討論架構之間的關係。再者，本申請案所述之一些方法實施例係以特定順序進行；然而，其他方法實施例可考量以任何邏輯順序進行。 The following disclosure provides many different embodiments or examples for implementing the various features of the present application. Specific examples of components and configurations are described below to simplify the disclosure of the present application. Of course, these are merely examples and are not intended to limit the application. For example, the following description of forming a first feature on or over a second feature can include embodiments of first and second features that form a direct contact, and can also include implementation of forming other features between the first and second features. For example, the first and second features are therefore not direct contacts. Furthermore, the application may repeat the component symbols and/or letters in different examples. This repetition is for the purpose of simplicity and clarity, and is not intended to govern the relationship between the various embodiments and/or the structures discussed. Furthermore, some of the method embodiments described herein are performed in a particular order; however, other method embodiments can be considered in any logical order.
再者，本申請案可使用空間對應語詞，例如「之下」、「低於」、「較低」、「高於」、「較高」等類似語詞之簡單說明，以描述圖式中一元件或特徵與另一元件或特徵的關係。空間對應語詞係用以包括除了圖式中描述的位向之外，裝置於使用或操作中之不同位向。裝置或可被定位(旋轉90度或是其他位向)，並且可相應解釋本申請案使用的空間對應描述。 Furthermore, the present application may use spatially corresponding words, such as "lower", "lower", "lower", "higher", "higher" and the like, to describe one of the patterns. The relationship of an element or feature to another element or feature. Spatially corresponding words are used to include different orientations of the device in use or operation in addition to the orientations depicted in the drawings. The device may be positioned (rotated 90 degrees or other orientations) and the spatially corresponding description used in this application may be interpreted accordingly.
本申請案所描述的實施例係關於堆疊與/或接合結構，更特別地係關於具有至少延伸穿過半導體基板之通路的堆疊與/接合結構。該技藝中具有通常技術者可輕易理解本申請案實施例的各種修飾，該些修飾亦可用於其他實施例中。 Embodiments described herein relate to stacked and/or bonded structures, and more particularly to stacked and/or bonded structures having vias extending at least through the semiconductor substrate. Various modifications of the embodiments of the present application can be readily understood by those skilled in the art, and such modifications may be used in other embodiments.
機械手臂(Robot)具有移動與轉動之功能，然而，機械手臂頻繁的轉動會造成內部電線(cable)過度扭曲，進而造成感測器將產生的錯誤訊號傳至控制器(controller)，致使機械手臂於轉動時瞬間停止。瞬間停止可能造成置放於機械手臂固持器(gripper)上的光罩破損，因此增加生產成本。再者，修繕過度扭曲的內部電線約需停止晶 圓傳輸裝置之操作達數小時，降低生產效能。 The robot has the function of moving and rotating. However, the frequent rotation of the robot arm causes the internal cable to be excessively twisted, which causes the sensor to transmit an error signal to the controller, causing the robot arm. Stops instantly when turning. An instantaneous stop may cause damage to the reticle placed on the gripper of the robot, thus increasing production costs. Moreover, repairing the excessively twisted internal wires requires stopping the crystal The operation of the circular transfer device lasts for several hours, reducing production efficiency.
本申請案係為解決用於光罩傳輸裝置中的機械手臂內部電線(cable)過度扭曲之問題。由於光罩傳輸需要較晶圓傳輸具有更精準的控制機制，用於光罩傳輸裝置中的機械手臂通常會設置扭力感測器(torque force sensor)於機械手臂與固持器之間。當固持器相對機械手臂轉動，連接固持器與控制器的電線也一併扭轉。該電線的一端連接固持器，通過機械手臂本體，另一端連接控制器。由於機械手臂本體內容納電線的空間有限，致使電線常因頻繁的固持器旋轉動作而過度扭曲。該扭力感測器針對機械手臂本體內電線扭曲產生錯誤訊號並傳送給控制器，控制器接收到錯誤訊號後會直接停止固持器的作動以避免機械手臂損壞。然而，瞬間停止固持器的作動容易造成其上的光罩因外力而破損。 This application is to solve the problem of excessive distortion of the cable inside the robot arm used in the reticle transmission device. Since the reticle transmission requires a more precise control mechanism than the wafer transfer, the robotic arm used in the reticle transfer device usually has a torque force sensor between the robot arm and the holder. When the holder rotates relative to the robot arm, the wires connecting the holder to the controller are also twisted together. One end of the wire is connected to the holder, through the body of the robot, and the other end is connected to the controller. Due to the limited space of the wires contained in the body of the robot, the wires are often excessively distorted by frequent rotation of the holder. The torque sensor generates an error signal for the wire distortion in the body of the robot arm and transmits it to the controller. When the controller receives the error signal, it will directly stop the action of the holder to avoid damage to the robot arm. However, the momentary stop of the action of the holder tends to cause the reticle thereon to be damaged by an external force.
圖1係根據一些實施例說明一種光罩傳載裝置10之例示佈局示意圖。光罩傳載裝置10至少包含光罩處置模組10A與相鄰的曝光模組10B。一機械手臂裝置100包含機械手臂本體、控制器、以及固持部(詳見圖3)。固持部夾取光罩來回運送於光罩處置模組10A的傳送盒1(load port 1)101或傳送盒2(load port 2)102、內部光罩匣103(Internal Reticle Library)、內部光罩檢測區105(Internal Reticle Inspection，IRIS)、以及曝光模組10B的預備區107(Turret)之間。某些實施例中，預備區107(Turret)與曝光槽107'(Reticle Slot)之間係由另一個機械機構(未繪示)互換光罩。 1 is a schematic diagram showing an exemplary layout of a reticle transfer device 10 in accordance with some embodiments. The mask transfer device 10 includes at least a mask disposal module 10A and an adjacent exposure module 10B. A robotic arm device 100 includes a robot arm body, a controller, and a retaining portion (see FIG. 3 for details). The holding portion picks up the reticle to be transported back and forth to the transport port 1 101 or the load port 2 102 of the reticle handling module 10A, the internal reticle library 103, and the internal reticle. The detection area 105 (Internal Reticle Inspection, IRIS) and the preparation area 107 (Turret) of the exposure module 10B. In some embodiments, the reticle is exchanged between the preparation zone 107 (Turret) and the exposure slot 107' (Reticle Slot) by another mechanical mechanism (not shown).
由於來回運送光罩涉及控制器發出訊號，操控機械手臂本體的移動、轉動，以及固持部的轉動，位於固持部以及機械手臂本體中的電線如果未妥善固定，容易扭曲損壞。圖2係根據一些實施例說明的一種光罩傳載裝置20之上視圖。控制器201連接第一機械手臂202，進行相對於X方向產生θ 1角度的旋轉。第一機械手臂202連接第二機械 手臂203，進行相對於第一機械手臂202延伸方向產生θ 2角度的旋轉。第二機械手臂203連接固持器204，進行相對於第二機械手臂203延伸方向產生θ 3角度的旋轉。某些實施例中，θ 3角度可達到90度至180度之間，有時甚至可接近360度。某些實施例中，來回運送光罩於上述區域之間，係第一機械手臂202、第二機械手臂203、以及固持部204之間相對轉動配合所造成。如圖2所示，第一機械手臂202之一端連接於控制器201，另一端連接於第二機械手臂203。第二機械手臂203之一端連接於第一機械手臂202，另一端連接於固持器204。 Since the transport of the reticle back and forth involves the controller issuing a signal, manipulating the movement, rotation of the robot body, and the rotation of the holding portion, the wires located in the holding portion and the body of the robot arm are easily distorted and damaged if not properly fixed. 2 is a top plan view of a reticle transfer device 20, in accordance with some embodiments. The controller 201 is coupled to the first robot arm 202 to perform a rotation of an angle θ 1 with respect to the X direction. The first robot arm 202 is connected to the second machine The arm 203 performs a rotation of an angle θ 2 with respect to the direction in which the first robot arm 202 extends. The second robot arm 203 is coupled to the holder 204 to perform a rotation of an angle θ 3 with respect to the direction in which the second robot arm 203 extends. In some embodiments, the angle θ 3 can be between 90 and 180 degrees, and sometimes even close to 360 degrees. In some embodiments, transporting the reticle back and forth between the regions is caused by a relative rotational fit between the first robot arm 202, the second robot arm 203, and the retaining portion 204. As shown in FIG. 2, one end of the first robot arm 202 is connected to the controller 201, and the other end is connected to the second robot arm 203. One end of the second robot arm 203 is coupled to the first robot arm 202 and the other end is coupled to the holder 204.
圖3係根據一些實施例說明的一種機械手臂203與固持部204之橫切面示意圖。圖3僅繪示圖2中第二機械手臂203以及固持部204的橫切面。如圖3所示，第二機械手臂203具有第一垂直部2033與第一水平部2031。某些實施例中，第一機械手臂202具有第二垂直部與第二水平部。第二機械手臂203的第一垂直部2033與固持部204相連，其間可另外放置第一垂直部輪緣(flange)2035以及扭力感測器205。固持部204底部可具有固持部輪緣2041。某些實施例中，固持部204具有彈簧裝置(未繪示)以消除夾取光罩時的震動外力。 FIG. 3 is a cross-sectional view of a mechanical arm 203 and a retaining portion 204, according to some embodiments. FIG. 3 only shows a cross section of the second robot arm 203 and the retaining portion 204 of FIG. As shown in FIG. 3, the second robot arm 203 has a first vertical portion 2033 and a first horizontal portion 2031. In some embodiments, the first robot arm 202 has a second vertical portion and a second horizontal portion. The first vertical portion 2033 of the second robot arm 203 is coupled to the retaining portion 204, and a first vertical portion flange 2035 and a torque sensor 205 may be additionally disposed therebetween. The bottom of the retaining portion 204 can have a retaining portion rim 2041. In some embodiments, the retaining portion 204 has a spring means (not shown) to eliminate external shock forces when the reticle is gripped.
當固持部204相對於第一垂直部2033的扭力過大時會觸發扭力感測器205將錯誤訊號經由扭力感測器電線傳給控制器201，控制器201遂藉由通訊電線傳送off訊號，以啟動保護機械手臂的停止作動機制。扭力感測器電線以及通訊電線皆通過第一垂直部2033並進入第一水平部2031，進而經過第一機械手臂202而延伸至控制器201。習知技術中容許扭力感測器電線及通訊電線通過的第一垂直部2033具有一狹長中空腔體，該中空腔體設計剛好能夠容納需要通過之電線數量，因此，當處於第一水平部2031的複數條電線為靜止，而連接至固持部204的複數條電線隨固持部204旋轉時，會造成第一垂直部2033中複數條電線的互相摩擦扭曲，而觸發扭力感測器205產生錯誤訊號。 When the torque of the holding portion 204 relative to the first vertical portion 2033 is too large, the torque sensor 205 is triggered to transmit an error signal to the controller 201 via the torque sensor wire, and the controller 201 transmits the off signal through the communication wire to Start the mechanism to stop the protection of the robot arm. The torsion sensor wires and the communication wires pass through the first vertical portion 2033 and enter the first horizontal portion 2031, and then extend through the first robot arm 202 to the controller 201. The first vertical portion 2033 of the prior art that allows the torque sensor wires and the communication wires to pass has a narrow hollow cavity that is designed to accommodate the number of wires that need to pass, and therefore, when in the first horizontal portion 2031 The plurality of wires are stationary, and the plurality of wires connected to the holding portion 204 rotate with the holding portion 204, causing mutual frictional distortion of the plurality of wires in the first vertical portion 2033, and the triggering torque sensor 205 generates an error signal. .
圖4係根據一些實施例說明的一種用於光罩傳載裝置的線路整束結構400之橫切面示意圖。線路整束結構400包含收納管401A、纏繞部401B、以及抵頂部401C。某些實施例中，收納管401A、纏繞部401B、以及抵頂部401C彼此藉由螺絲固定，進而達到無相對運動而可共同旋轉之功效。如圖4所示，纏繞部401B以及抵頂部401C係放置於第一水平部2031，而收納管401A上段亦置於第一水平部2031，下段則延伸至第一垂直部2033，並與固持部204相連。某些實施例中，線路整束結構400進一步具有一固定於收納管401A之墊片401D抵住固持部204。電線403穿過收納管401A以及纏繞部401B之中空腔體，並藉由纏繞部401B之一通孔(詳見圖5)由中空腔體延伸至纏繞部401B外側，纏繞於纏繞部401B之側表面上。纏繞於纏繞部401B之側表面的電線403抵止於抵頂部401C係為了防止電線403由纏繞部401B脫落。 4 is a cross-sectional view of a wire bundle structure 400 for a reticle transfer device, in accordance with some embodiments. The line bundle structure 400 includes a housing tube 401A, a winding portion 401B, and a top portion 401C. In some embodiments, the receiving tube 401A, the winding portion 401B, and the abutting top portion 401C are fixed to each other by screws, thereby achieving the effect of co-rotating without relative motion. As shown in FIG. 4, the winding portion 401B and the abutting top portion 401C are placed on the first horizontal portion 2031, and the upper portion of the receiving tube 401A is also placed in the first horizontal portion 2031, and the lower portion extends to the first vertical portion 2033, and the holding portion is 204 is connected. In some embodiments, the wire bundle structure 400 further has a gasket 401D fixed to the receiving tube 401A against the holding portion 204. The electric wire 403 passes through the hollow body of the receiving tube 401A and the winding portion 401B, and is extended from the hollow cavity to the outside of the winding portion 401B by a through hole (see FIG. 5) of one of the winding portions 401B, and is wound around the side surface of the winding portion 401B. on. The electric wire 403 wound around the side surface of the winding portion 401B abuts against the top portion 401C in order to prevent the electric wire 403 from coming off by the winding portion 401B.
圖5係根據一些實施例說明的一種線路整束結構50之立體圖。某些實施例中，收納管401A及纏繞部401B皆包含中空腔體，且該等中空腔體互相對準，致使電線可以不彎曲的方式穿過收納管401A及纏繞部401B的中空腔體。由圖5可知，抵頂部401C上表面具有複數個螺孔4011，可藉由螺拴作為抵頂部401C及纏繞部401B的固定機制。纏繞部401B之上表面，亦即與抵頂部401C之下表面接觸之表面，具有一通孔407。通孔407係於纏繞部401B上表面之一凹槽，容許通過收納管401A及纏繞部401B之中空腔體的電線由通孔407拉出，並纏繞於纏繞部401B之側表面。某些實施例中，電線於纏繞部401B之側表面纏繞多於一圈，例如纏繞四圈或五圈較能達到電線整束之效果。抵頂部401C係作為纏繞於纏繞部401B之側表面的電線之止抵機制，防止側表面的電線於固持部轉動時脫離纏繞部401B之側表面。某些實施例中，抵頂部401C亦具有一中空腔體，對準於收納管401A及纏繞部 401B之中空腔體。 FIG. 5 is a perspective view of a line bundle structure 50, in accordance with some embodiments. In some embodiments, the receiving tube 401A and the winding portion 401B each include a hollow cavity, and the hollow bodies are aligned with each other such that the electric wire can pass through the hollow tube body of the receiving tube 401A and the winding portion 401B without bending. As can be seen from FIG. 5, the upper surface of the top portion 401C has a plurality of screw holes 4011, which can be used as a fixing mechanism for the top portion 401C and the winding portion 401B. The upper surface of the winding portion 401B, that is, the surface in contact with the lower surface of the top portion 401C, has a through hole 407. The through hole 407 is recessed in one of the upper surfaces of the winding portion 401B, and the electric wire passing through the hollow body among the receiving tube 401A and the winding portion 401B is allowed to be pulled out by the through hole 407 and wound around the side surface of the winding portion 401B. In some embodiments, the electric wire is wound more than one turn on the side surface of the winding portion 401B, for example, four or five turns are wound to achieve the effect of the entire wire bundle. The abutting top portion 401C serves as a stopper mechanism for the electric wires wound around the side surface of the winding portion 401B, and prevents the electric wires of the side surface from being separated from the side surface of the winding portion 401B when the holding portion is rotated. In some embodiments, the abutting top 401C also has a hollow cavity aligned with the receiving tube 401A and the winding portion. The hollow body in 401B.
如圖5所示，收納管401A與纏繞部401B之間存在一連接部405，具有不連續之管徑寬度(詳見圖6)。收納管401A底部固接於一墊片401D，墊片401D上可具有複數個螺孔4013，藉由螺栓通過該複數個螺孔4013與固持部(詳見圖4)相接。經由上述固定機制，收納管401A、纏繞部401B、以及抵頂部401C彼此不做相對運動。隨著固持部之轉動，收納管401A、纏繞部401B、以及抵頂部401C做相同程度之轉動。 As shown in Fig. 5, there is a connecting portion 405 between the receiving tube 401A and the winding portion 401B, which has a discontinuous tube diameter (see Fig. 6 for details). The bottom of the receiving tube 401A is fixed to a gasket 401D. The gasket 401D can have a plurality of screw holes 4013 through which the bolts are connected to the holding portion (see FIG. 4). The accommodation tube 401A, the winding portion 401B, and the abutting top portion 401C are not moved relative to each other via the above-described fixing mechanism. As the holding portion rotates, the receiving tube 401A, the winding portion 401B, and the abutting top portion 401C are rotated to the same extent.
圖6係根據一些實施例說明的一種線路整束結構60之***圖。如圖6所示，收納管401A具有一直徑A，纏繞部401B具有一直徑B，抵頂部401C具有一直徑C。此處所述之直徑係由量測各部件之外表面相距180度的兩點而得。某些實施例中，收納管401A的直徑A小於纏繞部401B的直徑B。若收納管401A的直徑A大於纏繞部401B的直徑B，代表纏繞部401B之中空腔體較收納管401A之中空腔體更窄，對於垂直穿過中空腔體之電線轉動產生更多限制，因此本揭露不採取直徑A大於直徑B的態樣。某些實施例中，纏繞部401B的直徑B小於抵頂部401C的直徑C。若纏繞部401B的直徑B大於抵頂部401C的直徑C，抵頂部401C將失去止抵作用，亦即纏繞於纏繞部401B側表面的電線容易自該側表面脫落。某些實施例中，抵頂部401C的直徑C至少大於纏繞部401B的直徑B加上電線的直徑，以有效抵止固持部轉動時電線在纏繞部401B側表面所產生的位移。 FIG. 6 is an exploded view of a line bundle structure 60, in accordance with some embodiments. As shown in FIG. 6, the receiving tube 401A has a diameter A, the winding portion 401B has a diameter B, and the top portion 401C has a diameter C. The diameters described herein are obtained by measuring two points at 180 degrees apart from the outer surface of each component. In some embodiments, the diameter A of the receiving tube 401A is smaller than the diameter B of the winding portion 401B. If the diameter A of the receiving tube 401A is larger than the diameter B of the winding portion 401B, the hollow body in the winding portion 401B is narrower than the hollow body in the receiving tube 401A, and there is more restriction on the rotation of the wire passing through the hollow hollow body. The disclosure does not take the aspect that the diameter A is larger than the diameter B. In some embodiments, the diameter B of the wrap 401B is less than the diameter C of the top 401C. If the diameter B of the winding portion 401B is larger than the diameter C of the top portion 401C, the abutting top portion 401C will lose the abutting action, that is, the electric wire wound around the side surface of the winding portion 401B easily falls off from the side surface. In some embodiments, the diameter C of the abutting top portion 401C is at least larger than the diameter B of the winding portion 401B plus the diameter of the wire to effectively resist the displacement of the wire on the side surface of the winding portion 401B when the retaining portion is rotated.
參見圖6，抵頂部401C具有複數個螺孔4011，某些實施例中，纏繞部401B的上表面亦具有複數個相應的螺孔4011'，藉由螺栓通過該複數個螺孔4011、4011'將抵頂部401C與纏繞部401B相接。通孔407置於纏繞部401B的上表面，位於兩螺孔4011'之間。通孔407可視為纏繞部401B上表面之一缺口，與纏繞部401B之中空腔體相通。某些實施 例中，扭力感測器電線經過收納管401A與纏繞部401B的中空腔體，通過通孔407到達纏繞部401B的側表面，由側表面的上部往側表面的下部纏繞4至5圈，並往機械手臂的水平部延伸，連接至控制器。 Referring to FIG. 6, the abutting top portion 401C has a plurality of screw holes 4011. In some embodiments, the upper surface of the winding portion 401B also has a plurality of corresponding screw holes 4011' through which the plurality of screw holes 4011, 4011' are passed by bolts. The top portion 401C is brought into contact with the winding portion 401B. The through hole 407 is placed on the upper surface of the winding portion 401B between the two screw holes 4011'. The through hole 407 can be regarded as a notch of the upper surface of the winding portion 401B, and communicates with the hollow body in the winding portion 401B. Some implementations In the example, the torsion sensor wire passes through the hollow tube body of the receiving tube 401A and the winding portion 401B, passes through the through hole 407 to the side surface of the winding portion 401B, and is wound by the lower portion of the side surface to the lower portion of the side surface by 4 to 5 turns, and Extend to the horizontal part of the robot arm and connect to the controller.
參見圖2與圖6，某些實施例中，當固持器204相對於第二機械手臂203延伸方向產生θ 3角度的旋轉時，扭力感測器電線會向固持器204方向拉扯，使得位於纏繞部401B側表面的電線收緊。此時收納管401A、纏繞部401B、以及抵頂部401C皆與固持器204一同產生前述θ 3角度的旋轉。當固持器204對準於第二機械手臂203延伸方向時(意即產生的θ 3角度為0)，位於纏繞部401B側表面的扭力感測器電線會回到原本纏繞時的放鬆狀態。藉由線路整束結構對電線導引式的收緊與放鬆，穿過收納管401A的扭力感測器電線只會產生沿著收納管401A兩端方向的位移，而本身不會產生扭曲，造成破損或觸發錯誤訊號。 Referring to Figures 2 and 6, in some embodiments, when the holder 204 produces a rotation of θ 3 angle with respect to the direction in which the second robot arm 203 extends, the torsion sensor wire is pulled toward the holder 204, so that it is wound. The wires on the side surface of the portion 401B are tightened. At this time, the storage tube 401A, the winding portion 401B, and the abutting top portion 401C all generate rotation of the aforementioned θ 3 angle together with the holder 204. When the holder 204 is aligned with the extending direction of the second robot arm 203 (that is, the angle of θ 3 generated is 0), the torsion sensor wire located on the side surface of the winding portion 401B returns to the relaxed state at the time of winding. By wire-tightening and loosening by the wire bundle structure, the torque sensor wire passing through the receiving tube 401A only generates displacement along the direction of both ends of the receiving tube 401A, and does not cause distortion itself, resulting in Broken or triggered an error signal.
一實施例係提供一種光罩傳載裝置，其包含控制器、機械手臂、固持部、以及線路整束結構。該機械手臂之一端連接該控制器，另一端連接於固持部。該機械手臂包含第一垂直部與第一水平部，該第一垂直部與該固持部相連。該線路整束結構包含收納管以及纏繞部，其中該收納管之直徑小於該纏繞部之直徑 An embodiment provides a reticle transfer device that includes a controller, a robotic arm, a retaining portion, and a wire bundle structure. One end of the robot arm is connected to the controller, and the other end is connected to the holding portion. The robot arm includes a first vertical portion and a first horizontal portion, and the first vertical portion is coupled to the holding portion. The whole beam structure of the line comprises a receiving tube and a winding portion, wherein the diameter of the receiving tube is smaller than the diameter of the winding portion
另一實施例係提供一種用於光罩傳載裝置的線路整束結構，包含具有第一直徑之收納管；具有第二直徑之纏繞部，固定於該收納管之上；具有第三直徑之抵頂部，固定於該纏繞部之上。該第一直徑小於該第二直徑，且該第二直徑小於該第三直徑。 Another embodiment provides a wire bundle structure for a reticle transfer device, comprising a accommodating tube having a first diameter; a winding portion having a second diameter fixed to the accommodating tube; having a third diameter The top is fixed to the winding portion. The first diameter is smaller than the second diameter, and the second diameter is smaller than the third diameter.
另一實施例係提供一種光罩傳載裝置，其包括控制器、機械手臂、固持部、扭力感測器、線路整束結構、以及電線。該機械手臂之一端連接該控制器，另一端連接於固持部。該機械手臂包含垂直部與水平部，該垂直部與該固持部相連。該扭力感測器置於該機械手臂之 垂直部與該固持器之間。該線路整束結構置放於該水平部，包含收納管、固定於該收納管之上之纏繞部、以及固定於該纏繞部之上之抵頂部，其中該收納管之直徑小於該纏繞部之直徑。其中該電線通過該收納管、纏繞於該纏繞部、並抵止於該抵頂部。 Another embodiment provides a reticle transfer device that includes a controller, a robotic arm, a retaining portion, a torsion sensor, a line bundle structure, and an electrical wire. One end of the robot arm is connected to the controller, and the other end is connected to the holding portion. The robot arm includes a vertical portion and a horizontal portion, and the vertical portion is coupled to the holding portion. The torque sensor is placed in the robot arm Between the vertical portion and the holder. The whole bundle structure is placed on the horizontal portion, and includes a receiving tube, a winding portion fixed on the receiving tube, and a top portion fixed on the winding portion, wherein the diameter of the receiving tube is smaller than the winding portion diameter. The electric wire passes through the receiving tube, is wound around the winding portion, and is abutted against the abutting portion.
前述內容概述一些實施例的特徵，因而熟知此技藝之人士可更加理解本申請案揭示內容之各方面。熟知此技藝之人士應理解可輕易使用本申請案揭示內容作為基礎，用於設計或修飾其他製程與結構而實現與本申請案所述之實施例具有相同目的與/或達到相同優點。熟知此技藝之人士亦應理解此均等架構並不脫離本申請案揭示內容的精神與範圍，以及熟知此技藝之人士可進行各種變化、取代與替換，而不脫離本申請案揭示內容之精神與範圍。 The foregoing is a summary of the features of the embodiments, and those skilled in the art can understand the various aspects of the disclosure. Those skilled in the art will appreciate that the disclosure of the present application can be readily utilized as a basis for designing or modifying other processes and structures to achieve the same objectives and/or the same advantages as the embodiments described herein. It should be understood by those skilled in the art that the present invention is not limited by the spirit and scope of the present disclosure, and that various changes, substitutions and substitutions can be made by those skilled in the art without departing from the spirit of the disclosure. range.
400‧‧‧線路整束結構 400‧‧‧ line bundle structure
401A‧‧‧收納管 401A‧‧‧ 收纳 tube
401B‧‧‧纏繞部 401B‧‧‧ winding department
401C‧‧‧抵頂部 401C‧‧‧ arrives at the top
401D‧‧‧墊片 401D‧‧‧shims
403‧‧‧電線 403‧‧‧Wire
2031‧‧‧第一水平部 2031‧‧‧First horizontal department
2033‧‧‧第一垂直部 2033‧‧‧First vertical part
2035‧‧‧第一垂直部輪緣 2035‧‧‧First vertical rim
204‧‧‧固持部 204‧‧‧ Holding Department
205‧‧‧扭力感測器 205‧‧‧Torque sensor
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| TW105120140A TWI598701B (en) | 2016-06-27 | 2016-06-27 | Reticle transferring device |
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| TW105120140A TWI598701B (en) | 2016-06-27 | 2016-06-27 | Reticle transferring device |
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|---|---|---|---|---|
| JP2001024045A (en) * | 1999-07-08 | 2001-01-26 | Nikon Corp | Transfer apparatus and exposing apparatus using the same |
| CN101327586A (en) * | 2007-06-20 | 2008-12-24 | 发那科株式会社 | Industrial robot |
| CN104215372A (en) * | 2013-05-31 | 2014-12-17 | 中国科学院沈阳自动化研究所 | Mechanical arm joint torque measuring device |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001024045A (en) * | 1999-07-08 | 2001-01-26 | Nikon Corp | Transfer apparatus and exposing apparatus using the same |
| CN101327586A (en) * | 2007-06-20 | 2008-12-24 | 发那科株式会社 | Industrial robot |
| CN104215372A (en) * | 2013-05-31 | 2014-12-17 | 中国科学院沈阳自动化研究所 | Mechanical arm joint torque measuring device |
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