CN107544212B - Light shield posting device - Google Patents
Light shield posting device Download PDFInfo
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- CN107544212B CN107544212B CN201610482102.0A CN201610482102A CN107544212B CN 107544212 B CN107544212 B CN 107544212B CN 201610482102 A CN201610482102 A CN 201610482102A CN 107544212 B CN107544212 B CN 107544212B
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- wound portion
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- mechanical arm
- containing tube
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Abstract
The present invention provides a kind of light shield posting device, and it includes controller, mechanical arm, holding parts and the whole binding structures of electric wire.One end of the mechanical arm connects the controller, and the other end of the mechanical arm is connected to holding parts.The whole binding structure of electric wire includes containing tube and wound portion, wherein the diameter of the containing tube is less than the diameter of the wound portion.
Description
Technical field
The present invention relates to light shield posting devices, in particular to have light shield posting of the whole binding structure of electric wire in mechanical arm
Device.
Background technique
In integrated circuit technology, with the demand cumulative to yield and qualification rate and day, and highly-specialised is developed
Light shield is transmitted with the system of automation.Light shield is generally stored inside in light shield library (reticle library), and according to not cocurrent flow
Journey, such as light shield testing process (IRIS inspection reticle flow path), reticle field to exposure-processed area process
(reticle move to lens flow path) and light shield process (removal of reticle is removed by internal light shield library
From IRL flow path) etc., light shield is needed through mechanical arm (Robot) in each library and interregional transmission.
Summary of the invention
Certain embodiments of the invention provide a kind of light shield posting device, and it includes controller, mechanical arm, holding parts and electricity
The whole binding structure of line.One end of the mechanical arm connects the controller, and the other end is connected to holding parts.The mechanical arm packet
Containing the first vertical component effect and first horizontal portion, first vertical component effect is connected with the holding parts.The whole binding structure of electric wire includes
Containing tube and wound portion, wherein the diameter of the containing tube is less than the diameter of the wound portion.
Certain embodiments of the invention provide a kind of whole binding structure of the electric wire for light shield posting device, comprising straight with first
The containing tube of diameter；Wound portion with second diameter is fixed on the containing tube；Top with third diameter, Gu
On the wound portion.The first diameter is less than the second diameter, and the second diameter is straight less than the third
Diameter.
Certain embodiments of the invention provide a kind of light shield posting device comprising controller, mechanical arm, holding parts, torsion
The whole binding structure of force snesor, electric wire and electric wire.One end of the mechanical arm connects the controller, and the other end is connected to fixing
Portion.The mechanical arm includes vertical part and horizontal part, and the vertical component effect is connected with the holding parts.The torsion sensor is set
Between the vertical component effect and the holder of the mechanical arm.The whole binding structure of electric wire is placed in the horizontal part, includes
Containing tube, the wound portion being fixed on the containing tube and the top being fixed on the wound portion, wherein the receipts
Receive pipe diameter be less than the wound portion diameter.Wherein the electric wire by the containing tube, be wound in the wound portion simultaneously
To terminating in the top.
Detailed description of the invention
It is able to most preferably understand the various aspects of present application disclosure with subsidiary schema by described further below.Note that root
According to the standards Example of industry, various features are not shown to scale.In fact, arbitrarily can increase or contract for clear discussion
The size of small various features.
Fig. 1 is the illustration schematic layout pattern for illustrating light shield posting device according to some embodiments.
Fig. 2 is the top view of the light shield posting device illustrated according to some embodiments.
Fig. 3 is the cross-sectional view of the mechanical arm and holding parts that are illustrated according to some embodiments.
Fig. 4 is the cross section signal of the whole binding structure of electric wire for light shield posting device illustrated according to some embodiments
Figure.
Fig. 5 is the perspective view of the whole binding structure of electric wire illustrated according to some embodiments.
Fig. 6 is the exploded view of the whole binding structure of electric wire illustrated according to some embodiments.
Specific embodiment
Content disclosed below provides many different embodiments or example, for implementing the different characteristic of present application.Member
The particular example of part and arrangement is described as follows, to simplify the disclosure of present application.Certainly, these are only example, not
For limiting present application.For example, being described below formation fisrt feature above second feature may include being formed directly to connect
The embodiment of first and second feature of point can also reside between first and second described feature and form the implementation of other feature
Example, thus first and second described feature and indirect contact.In addition, present application can in different examples repeat element symbol
And/or letter.This repeats to be in order to simplified with clear purpose, and between non-dominant different embodiments and/or discussed framework
Relationship.Furthermore certain methods embodiment described in present application is carried out with particular order；However, other embodiments of the method
It can consider with the progress of any logical order.
Furthermore space can be used to correspond to words and phrases for present application, such as " under ", " being lower than ", " lower ", " being higher than ", " compared with
The simple declaration of the similar words and phrases such as height ", to describe the relationship of an elements or features and another elements or features in schema.Space
Corresponding words and phrases be to include the different positions that are installed on other than in use or operation of the position described in the schema to.Device or
It can be positioned (be rotated by 90 ° or other positions to), and can the corresponding description in space that uses of respective explanations present application.
Present application described embodiment be related to stack and/or connected structure, relate more particularly to have at least extend
Across the stacking and/connected structure of the access of semiconductor substrate.The those skilled in the art in the field are readily appreciated that the application
The various modifications of case embodiment, the modification can also be used in other embodiments.
Mechanical arm (Robot) has the function of mobile and rotation, however, mechanical arm, which frequently rotates, will cause inside
Electric wire (cable) excessive distortion in turn results in sensor for the error signal of generation and passes to controller (controller), causes
Mechanical arm moment when rotation stops.Moment stopping may cause the light being placed on mechanical arm holder (gripper)
Cover is damaged, therefore increases production cost.Furthermore the internal wire for repairing excessive distortion about needs to stop the operation of wafer transmission set
Up to a few hours, production performance is reduced.
Present application is to solve for mechanical arm internal wire (cable) excessive distortion in light shield transmitting device
Problem.Since light shield transmission needs to have more accurately control mechanism compared with chip transmission, for the machinery in light shield transmitting device
Torsion sensor (torque force sensor) would generally be arranged between mechanical arm and holder in arm.Work as holder
Relative mechanical is rolled over, and the electric wire for connecting holder and controller also reverses together.One end of the electric wire connects holder,
By robot body, the other end connects controller.Since the space for accommodating electric wire in robot body is limited, cause electricity
Normal excessive distortion due to frequent holder spinning movement of line.The torsion sensor is for electric wire distortion in robot body
Generate error signal and simultaneously send controller to, controller receive can directly stop after error signal the actuation of holder to avoid
Mechanical arm damage.However, the actuation that moment stops holder be easy to causeing light shield thereon damaged due to external force.
Fig. 1 is the illustration schematic layout pattern for illustrating light shield posting device 10 according to some embodiments.Light shield posting device 10
Including at least light shield disposition module 10A and adjacent exposure module 10B.Mechanical arm device 100 includes robot body, control
Device and holding parts (being detailed in Fig. 3) processed.Holding parts clamping light shield is transported back and forth in the 1 (load of load port of light shield disposition module 10A
Port 1) 101 or load port 2 (load port 2) 102, internal light shield library 103 (Internal Reticle Library),
The turntable 107 of internal light shield detection zone 105 (Internal Reticle Inspection, IRIS) and exposure module 10B
(Turret) between.In some embodiments, turntable 107 (Turret) and light shield slot 107'(Reticle Slot) between by another
A mechanical mechanism exchange light shield (not shown).
It is related to controller sending signal due to transporting light shield back and forth, manipulates the movement of robot body, rotates and consolidate
The rotation in portion is held, if the electric wire in holding parts and robot body is not properly fixed, is easy distortion damage.
Fig. 2 is the top view of the light shield posting device 20 illustrated according to some embodiments.Controller 201 connects the first mechanical arm 202,
Carry out the rotation that 1 angle of θ is generated relative to X-direction.First mechanical arm 202 connect the second mechanical arm 203, carry out relative to
The rotation of first mechanical arm, 202 extending direction generation 2 angle of θ.Second mechanical arm 203 connects holder 204, carries out opposite
The rotation of 3 angle of θ is generated in 203 extending direction of the second mechanical arm.In some embodiments, 3 angle of θ can reach 90 degree to 180
Between degree, it is even close to 360 degree sometimes.In some embodiments, light shield is transported back and forth between above-mentioned zone, is the first machinery
It is relatively rotated caused by cooperation between arm 202, the second mechanical arm 203 and holding parts 204.As shown in figure 3, the first manipulator
One end of arm 202 is connected to controller 201, and the other end is connected to the second mechanical arm 203.One end of second mechanical arm 203
It is connected to the first mechanical arm 202, the other end is connected to holder 204.
Fig. 3 is the mechanical arm 203 illustrated according to some embodiments and the cross-sectional view of holding parts 204.Fig. 3 is only opened up
The cross section of second mechanical arm 203 and holding parts 204 in diagram 2.As shown in figure 3, the second mechanical arm 203 has first
Vertical component effect 2033 and first horizontal portion 2031.In some embodiments, the first mechanical arm 202 has the second vertical component effect and the second water
Flat portion.First vertical component effect 2033 of the second mechanical arm 203 is connected with holding parts 204, can in addition place the first vertical component effect therebetween
Flange (flange) 2035 and torsion sensor 205.204 bottom of holding parts can have holding parts flange 2041.Certain implementations
Vibration external force in example, when there is holding parts 204 spring arrangement (not shown) to clamp light shield to eliminate.
Torsion sensor 205 can be triggered by mistake when holding parts 204 are excessive relative to the torsion of the first vertical component effect 2033
Signal is transmitted to controller 201 via torsion sensor electric wire, and controller 201 transmits off signal by communication wire then, with activation
Protect the stopping actuation mechanism of mechanical arm.Torsion sensor electric wire and communication wire all pass through the first vertical component effect 2033 and go forward side by side
Enter first horizontal portion 2031, and then extends to controller 201 by the first mechanical arm 202.Torsion is allowed in routine techniques
The first vertical component effect 2033 that sensor wire and communication wire pass through has long and narrow hollow cavity, and the hollow cavity design is just
It can accommodate and need the number of electrical lines that passes through, therefore, when a plurality of electric wire in first horizontal portion 2031 is static, and be connected to
When a plurality of electric wire of holding parts 204 is rotated with holding parts 204, the rubs mutually of a plurality of electric wire in the first vertical component effect 2033 will cause
Distortion, and trigger torsion sensor 205 and generate error signal.
Fig. 4 is that the cross section of the whole binding structure 400 of electric wire for light shield posting device illustrated according to some embodiments shows
It is intended to.The whole binding structure 400 of electric wire includes containing tube 401A, wound portion 401B and top 401C.In some embodiments, containing tube
401A, wound portion 401B and top 401C fix each other by screw, and then reaches no relative motion and can rotate jointly
Effect.As shown in figure 4, wound portion 401B and top 401C are placed in first horizontal portion 2031, and containing tube 401A upper section
It is also placed in first horizontal portion 2031, lower section then extends to the first vertical component effect 2033, and is connected with holding parts 204.Some embodiments
In, the whole binding structure 400 of electric wire further there is the gasket 401D for being fixed on containing tube 401A to resist holding parts 204.Electric wire 403 is worn
The hollow cavity of containing tube 401A and wound portion 401B are crossed, and by the through-hole (being detailed in Fig. 5) of wound portion 401B by hollow cavity
Body extends on the outside of wound portion 401B, is wound on the side surface of wound portion 401B.It is wound in the side surface of wound portion 401B
It is that electric wire 403 is fallen off by wound portion 401B in order to prevent that electric wire 403, which supports and terminates in top 401C,.
Fig. 5 is the perspective view of the whole binding structure 50 of electric wire illustrated according to some embodiments.In some embodiments, containing tube
401A and wound portion 401B includes hollow cavity, and the hollow cavity is aligned with each other, and causes electric wire can be with unbending side
Formula passes through the hollow cavity of containing tube 401A and wound portion 401B.As shown in Figure 5, the upper surface top 401C has multiple screw holes
4011, it can fixed mechanism by bolt as top 401C and wound portion 401B.Wound portion 401B upper surface (that is, with
The surface of the following table face contact of top 401C) there is through-hole 407.Through-hole 407 is the groove in the upper surface wound portion 401B, is held
Perhaps it is pulled out by the electric wire of the hollow cavity of containing tube 401A and wound portion 401B by through-hole 407, and is wound in wound portion 401B
Side surface.In some embodiments, electric wire is enclosed in the winding of the side surface of wound portion 401B more than one, for example, four circle of winding or five
Circle is compared with can achieve the effect that the whole beam of electric wire.Top 401C is only supporting for the electric wire as the side surface for being wound in wound portion 401B
Mechanism prevents the electric wire of side surface to be detached from the side surface of wound portion 401B when holding parts rotation.In some embodiments, top
401C also has hollow cavity, in alignment with the hollow cavity of containing tube 401A and wound portion 401B.
As shown in figure 5, there are interconnecting pieces 405 between containing tube 401A and wound portion 401B, have discontinuous caliber wide
It spends (being detailed in Fig. 6).The bottom containing tube 401A is fixed in gasket 401D, can have multiple screw holes 4013 on gasket 401D, pass through spiral shell
Bolt is connected by the multiple screw hole 4013 with holding parts (being detailed in Fig. 4).Via above-mentioned fixed mechanism, containing tube 401A, winding
Portion 401B and top 401C do not do relative motion each other.With the rotation of holding parts, containing tube 401A, wound portion 401B and support
Top 401C does the rotation of same degree.
Fig. 6 is the exploded view of the whole binding structure 60 of electric wire illustrated according to some embodiments.As shown in fig. 6, containing tube 401A
With diameter A, wound portion 401B there is diameter B, top 401C to have diameter C.Diameter described herein is each by measuring
The outer surface of component at a distance of 180 degree two o'clock and obtain.In some embodiments, the diameter A of containing tube 401A is less than wound portion 401B
Diameter B.If the diameter A of containing tube 401A is greater than the diameter B of wound portion 401B, represent the hollow cavity of wound portion 401B compared with
The hollow cavity of containing tube 401A is narrower, and the electric wire for passing perpendicularly through hollow cavity, which rotates, generates more limitations, therefore originally takes off
The aspect that dew does not take diameter A to be greater than diameter B.In some embodiments, the diameter B of wound portion 401B is straight less than top 401C
Diameter C.If the diameter B of wound portion 401B is greater than the diameter C of top 401C, top 401C, which will lose, only instead to be used, that is, is twined
The electric wire for being around in the side surface wound portion 401B is easy to fall off from the side surface.In some embodiments, the diameter C of top 401C
Diameter B at least more than wound portion 401B adds the diameter of electric wire, and electric wire is in wound portion when effectively supporting only holding parts rotation
Displacement caused by the side surface 401B.
Referring to Fig. 6, top 401C has multiple screw holes 4011, in some embodiments, the upper surface of wound portion 401B
With multiple corresponding screw hole 4011', by top 401C and wound by bolt by the multiple screw hole 4011,4011'
Portion 401B connects.Through-hole 407 is placed in the upper surface of wound portion 401B, between two screw hole 4011'.Through-hole 407, which can be considered, to be twined
Notch around the portion upper surface 401B is communicated with the hollow cavity of wound portion 401B.In some embodiments, torsion sensor electric wire warp
The hollow cavity for crossing containing tube 401A Yu wound portion 401B reaches the side surface of wound portion 401B by through-hole 407, by side surface
Top toward side surface lower part winding 4 to 5 circle, and toward mechanical arm horizontal part extend, be connected to controller.
Referring to fig. 2 with Fig. 6, in some embodiments, when holder 204 is produced relative to 203 extending direction of the second mechanical arm
When the rotation of raw 3 angle of θ, torsion sensor electric wire can be pullled to 204 direction of holder, so that being located at the side surface wound portion 401B
Electric wire tightening.Containing tube 401A, wound portion 401B and top 401C generate 3 jiaos of aforementioned θ together with holder 204 at this time
The rotation of degree.When holder 204 is in alignment with 203 extending direction of the second mechanical arm (that is, 3 angle of θ generated is 0), it is located at
The torsion sensor electric wire of the side surface wound portion 401B can return to relaxation state when winding originally.Pass through the whole binding structure pair of electric wire
The tightening of Line guidance formula with loosen, the torsion sensor electric wire across containing tube 401A can only be generated along containing tube 401A two
The displacement of extreme direction, and itself will not generate distortion, cause damaged or triggering error signal.
Embodiment provides a kind of light shield posting device, and it includes controller, mechanical arm, holding parts and the whole bindings of electric wire
Structure.One end of the mechanical arm connects the controller, and the other end is connected to holding parts.The mechanical arm includes first vertical
Straight portion and first horizontal portion, first vertical component effect are connected with the holding parts.The whole binding structure of electric wire include containing tube and
Wound portion, wherein the diameter of the containing tube is less than the diameter of the wound portion
Another embodiment provides a kind of whole binding structure of the electric wire for light shield posting device, includes the receipts with first diameter
Receive pipe；Wound portion with second diameter is fixed on the containing tube；Institute is fixed in top with third diameter
It states on wound portion.The first diameter is less than the second diameter, and the second diameter is less than the third diameter.
Another embodiment provides a kind of light shield posting device comprising controller, mechanical arm, holding parts, torsion sensing
The whole binding structure of device, electric wire and electric wire.One end of the mechanical arm connects the controller, and the other end is connected to holding parts.Institute
Stating mechanical arm includes vertical part and horizontal part, and the vertical component effect is connected with the holding parts.The torsion sensor is placed in institute
It states between the vertical component effect of mechanical arm and the holder.The whole binding structure of electric wire is placed in the horizontal part, includes storage
The wound portion manage, being fixed on the containing tube and the top being fixed on the wound portion, wherein the containing tube
Diameter be less than the wound portion diameter.Wherein the electric wire by the containing tube, be wound in the wound portion and support only
In the top.
Foregoing teachings summarize the feature of some embodiments, thus those skilled in the art can more understand present application
The various aspects of disclosure.Those skilled in the art will appreciate that based on present application disclosure being used easily,
Realize there is identical purpose with present application the embodiment described and/or reach for designing or modifying other techniques and structure
Same advantage.Those skilled in the art it is also contemplated that this impartial framework without departing from present application disclosure spirit with
Range, and those skilled in the art can carry out various change, substitution and replacement, without departing from present application disclosure
Spirit and scope.
Symbol description
10 light shield posting devices
10A light shield disposes module
10B exposure module
100 mechanical arm devices
101 load ports 1
102 load ports 2
103 inside light shield library
105 inside light shield detection zones
107 turntables
107' light shield slot
20 light shield posting devices
201 controllers
202 first mechanical arms
203 second mechanical arms
2031 first horizontal portions
2033 first vertical component effects
2035 first vertical component effect flanges
204 holding parts
2041 holding parts flanges
1 angle of θ
2 angle of θ
3 angle of θ
205 torsion sensors
The whole binding structure of 400 electric wires
401A containing tube
401B wound portion
The top 401C
401D gasket
4011 screw holes
4011' screw hole
4013 screw holes
403 electric wires
407 through-holes
The whole binding structure of 50 electric wires
The whole binding structure of 60 electric wires
Claims (10)
1. a kind of light shield posting device comprising:
Controller；
Mechanical arm, one end connect the controller；
Holding parts are connected to the other end of the mechanical arm；Wherein the mechanical arm includes the first vertical component effect and the first water
Flat portion, first vertical component effect are connected with the holding parts；
The whole binding structure of electric wire, is placed in the first horizontal portion, includes:
Containing tube；And
Wound portion is fixed on the containing tube,
Wherein the diameter of the containing tube is less than the diameter of the wound portion.
2. the apparatus according to claim 1, wherein the containing tube and the wound portion all include hollow cavity.
3. the apparatus according to claim 1, wherein the upper surface of the wound portion includes notch into one, with wound portion
Hollow cavity communicates.
4. the apparatus according to claim 1 is placed in described twine wherein the whole binding structure of the electric wire further includes top
On portion, the diameter of the top is greater than the diameter of the wound portion.
5. device according to claim 3, further includes electric wire, described in the upper surface by the wound portion
Notch.
6. a kind of whole binding structure of electric wire for light shield posting device, includes:
Containing tube has first diameter；
Wound portion is fixed on the containing tube, has second diameter；And
Top is fixed on the wound portion, has third diameter,
Wherein the first diameter is less than the second diameter, and the second diameter is less than the third diameter.
7. the whole binding structure of electric wire according to claim 6, wherein the containing tube, the wound portion, the top are all
With the hollow cavity being mutually aligned, and there is notch to communicate with the hollow cavity for the upper surface of the wound portion.
8. the whole binding structure of electric wire according to claim 7, wherein the side surface winding of the wound portion passes through the notch
Electric wire.
9. a kind of light shield posting device comprising:
Controller；
Mechanical arm, one end connect the controller；
Holding parts are connected to the other end of the mechanical arm；Wherein the mechanical arm includes vertical part and horizontal part, described
Vertical component effect is connected with the holding parts；
Torsion sensor is placed between the vertical component effect of the mechanical arm and the holding parts；
The whole binding structure of electric wire, is placed in the horizontal part, includes:
Containing tube；
Wound portion is fixed on the containing tube；And
Top is fixed on the wound portion,
Wherein the diameter of the containing tube is less than the diameter of the wound portion；And
Electric wire, by the containing tube, be wound in the wound portion and support terminate in the top.
10. device according to claim 9, wherein be wound in the electric wire of the wound portion with the holding parts relative to
The relative rotation of the mechanical arm vertical component effect and unclamp or tighten.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610482102.0A CN107544212B (en) | 2016-06-27 | 2016-06-27 | Light shield posting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610482102.0A CN107544212B (en) | 2016-06-27 | 2016-06-27 | Light shield posting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107544212A CN107544212A (en) | 2018-01-05 |
| CN107544212B true CN107544212B (en) | 2019-12-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610482102.0A Active CN107544212B (en) | 2016-06-27 | 2016-06-27 | Light shield posting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN107544212B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB802431A (en) * | 1955-01-05 | 1958-10-08 | Ernest Morf | Motor-spring winding mechanism |
| US6736386B1 (en) * | 2001-04-10 | 2004-05-18 | Dupont Photomasks, Inc. | Covered photomask holder and method of using the same |
| JP4138674B2 (en) * | 2004-01-19 | 2008-08-27 | 矢崎総業株式会社 | Wire harness surplus length absorption structure and wire harness |
| CN101241311B (en) * | 2008-03-06 | 2010-06-09 | 上海微电子装备有限公司 | Superimposed motor based material transmission system possessing mask station function and its method |
| CN102873678B (en) * | 2012-09-25 | 2014-10-29 | 江苏科技大学 | Device and method for controlling attitude and space displacement of welding smoke air inlet |
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2016
- 2016-06-27 CN CN201610482102.0A patent/CN107544212B/en active Active
Also Published As
| Publication number | Publication date |
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| CN107544212A (en) | 2018-01-05 |
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