TWI593982B - Probe card inspection equipment - Google Patents
Probe card inspection equipment Download PDFInfo
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- TWI593982B TWI593982B TW105106705A TW105106705A TWI593982B TW I593982 B TWI593982 B TW I593982B TW 105106705 A TW105106705 A TW 105106705A TW 105106705 A TW105106705 A TW 105106705A TW I593982 B TWI593982 B TW I593982B
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Description
本發明是關於一種探針卡檢測設備，特別是關於一種具有側掀式的母板組件之探針卡檢測設備。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a probe card detecting apparatus, and more particularly to a probe card detecting apparatus having a side panel type mother board assembly.
請參照第1圖，其顯示一種習知探針卡檢測設備100之示意圖。該探針卡檢測設備100包含一基座110、一背板120、一可翻轉平台130、和一後掀式的母板組件140。該母板組件140包含一下母板142和一上母板144，該母板組件140係組裝在該可翻轉平台130上，其中該下母板142和該上母板144係以固定式絞鍊結構以及固定式氣壓棒系統(未繪示於圖中)連接，使得該上母板144可朝一接近該背板120的可樞轉方向A(即後掀式的可樞轉方向)並相對該下母板142樞轉。如第1圖所示，在該上母板144上設置有一針盤150，該針盤150係用於承載複數個彈性測試探針(pogo pin)。並且，在該下母板142對應於該上母板144上之該針盤150的位置係放置一待檢測的探針卡160，藉由將該上母板144樞轉至與該下母板142疊合時，使得該針盤150上的該等彈性測試探針電性接觸該等探針卡160上之相對應的接觸墊以形成電氣迴路，進而使該探針卡160與該探針卡檢測設備100產生連結，因而能檢測該探針卡160是否有異常。 Please refer to FIG. 1, which shows a schematic diagram of a conventional probe card detecting device 100. The probe card detecting device 100 includes a base 110, a backing plate 120, a reversible platform 130, and a rear-mounted motherboard assembly 140. The motherboard assembly 140 includes a lower motherboard 142 and an upper motherboard 144. The motherboard assembly 140 is assembled on the reversible platform 130, wherein the lower motherboard 142 and the upper motherboard 144 are fixed hinges. The structure and the fixed pneumatic bar system (not shown) are connected such that the upper motherboard 144 can be oriented toward a pivotable direction A of the backing plate 120 (ie, the rearward pivoting direction) and The lower mother board 142 is pivoted. As shown in Fig. 1, a dial 150 is provided on the upper motherboard 144 for carrying a plurality of pogo pins. And, a probe card 160 to be detected is placed at a position corresponding to the dial 150 on the upper motherboard 144, by pivoting the upper motherboard 144 to the lower motherboard. When the 142 is overlapped, the elastic test probes on the dial 150 are electrically contacted with the corresponding contact pads on the probe cards 160 to form an electrical circuit, thereby making the probe card 160 and the probe The card detecting device 100 generates a link, and thus can detect whether or not the probe card 160 is abnormal.
然而，習知該探針卡檢測設備100具有以下缺點： However, it is known that the probe card detecting device 100 has the following disadvantages:
(1)由於該等彈性測試探針係設置在該上母板144，當將該上母板144向下與該下母板142蓋合時，該等彈性測試探針係以一斜向的角度與該探針卡160上的接觸墊接觸，因而導致該彈性測試探針的下壓位置與其對應接觸墊的接觸位置產生偏移，使得該接觸墊的點位無法產生正確迴路進而造成誤判。此外，由於在每次蓋合時此蓋合的動作都會對該等彈性測試探針施加一側向力，導致該等彈性測試探針容易產生歪斜或損壞。再者，當將該上母板144向下蓋合時，靠近該母板組件140內部(即靠近該上母板144與該下母板142之間的樞接端的位置)的彈性測試探針的活動行程最短，而靠近該母板組件140外部(即遠離該上母板144與該下母板142之間的樞接端的位置)的彈性測試探針的活動行程最長，導致該等彈性測試探針施加在該探針卡160上的針壓不平均，進而影響該探針卡160之檢測結果的準確性。 (1) Since the elastic test probes are disposed on the upper mother board 144, when the upper mother board 144 is downwardly covered with the lower mother board 142, the elastic test probes are obliquely oriented. The angle is in contact with the contact pad on the probe card 160, thereby causing the position of the pressing position of the elastic test probe to be offset from the contact position of the corresponding contact pad, so that the position of the contact pad cannot generate a correct circuit and cause a misjudgment. In addition, since the action of the capping exerts a lateral force on the elastic test probes each time the capping is performed, the elastic test probes are prone to skew or damage. Moreover, when the upper motherboard 144 is covered downward, the elastic test probe is located near the inside of the motherboard assembly 140 (ie, the position near the pivotal end between the upper motherboard 144 and the lower motherboard 142). The activity stroke is the shortest, and the elastic test probe near the outside of the motherboard assembly 140 (i.e., the position away from the pivotal end between the upper motherboard 144 and the lower motherboard 142) has the longest active stroke, resulting in the elastic test. The needle pressure applied to the probe card 160 by the probe is not uniform, thereby affecting the accuracy of the detection result of the probe card 160.
(2)習知後掀式的母板組件140僅適用於單一型號的探針卡160，若要檢測另一型號的探針卡時，必須將整組的母板組件140進行替換。然而，該母板組件140具有一定的重量，在搬運和拆裝上容易造成人員的不便且在過程中容易造成意外傷害。 (2) The conventional rear-plate type motherboard assembly 140 is only applicable to a single model of the probe card 160. To detect another type of probe card, the entire set of motherboard assemblies 140 must be replaced. However, the motherboard assembly 140 has a certain weight, which is liable to cause inconvenience to personnel during handling and disassembly, and is liable to cause accidental injury during the process.
(3)由於該母板組件140係採用後掀式的結構，故該上母板144會因該背板120的阻擋以及受到該下母板142和該上母板144之間的固定式絞鍊結構與固定式氣壓棒系統的限制，導致該下母板142和該上母板144之間的可樞轉角度僅可為一銳角(即該可樞轉角度小於90度)。意味著，由於人員的操作空間會受到該上母板144的可樞轉角度的限制，使得在靠近該母板組件140內部(即樞接端)的空間無法被有效的利用。 (3) Since the motherboard assembly 140 is of a rear cymbal structure, the upper motherboard 144 is blocked by the backplane 120 and is subjected to a fixed twist between the lower motherboard 142 and the upper motherboard 144. The chain structure and the fixed pneumatic bar system are limited such that the pivotable angle between the lower motherboard 142 and the upper motherboard 144 can only be an acute angle (i.e., the pivotable angle is less than 90 degrees). This means that since the operating space of the person is limited by the pivotable angle of the upper motherboard 144, the space near the inside of the motherboard assembly 140 (i.e., the pivoting end) cannot be effectively utilized.
(4)當要藉由一架設在該可翻轉平台130上方的顯微鏡(未繪 示於圖中)觀測該探針卡160之下表面的針腳時，必須將該可翻轉平台130朝側掀方向翻轉以進行觀測。然而，若是設置在該母板組件140上的電路板(未繪示於圖中)的尺寸過大時，會因該探針卡檢測設備100的機台結構限制，導致不可將該可翻轉平台130進行側向翻轉，否則會造成該電路板與該探針卡檢測設備100產生結構上的干涉。 (4) When a microscope is placed over the reversible platform 130 (not drawn) When the pins of the lower surface of the probe card 160 are observed, the reversible platform 130 must be turned in the side turn direction for observation. However, if the size of the circuit board (not shown) disposed on the motherboard assembly 140 is too large, the platform structure of the probe card detecting device 100 may be limited, so that the reversible platform 130 may not be used. Performing a lateral flip will otherwise cause structural interference between the board and the probe card detecting device 100.
(5)該母板組件140係直接地放置且固定在該可翻轉平台130的檯面上，並且係以該下母板142的整個大面積的底面作為承靠面。然而，由於在該母板組件140搬運和更換過程中容易造成該下母板142的底面產生刮傷或磨損，導致該下母板142的基準面產生歪斜，致使無法精確地傳達該探針卡160的針位水平。再者，由於係採用單一個且大面積的底面作為承靠面，基於加工製造的極限，大面積的底面在尺寸上的公差難以精確地控制在微米等級，因此也會導致無法精確地傳達該探針卡160的針位水平。 (5) The mother board assembly 140 is directly placed and fixed on the table top of the reversible platform 130, and the bottom surface of the entire large area of the lower mother board 142 is used as the bearing surface. However, since the bottom surface of the lower motherboard 142 is easily scratched or worn during the handling and replacement of the motherboard assembly 140, the reference surface of the lower motherboard 142 is skewed, so that the probe card cannot be accurately conveyed. The needle level of 160. Moreover, since a single and large-area bottom surface is used as the bearing surface, the dimensional tolerance of the large-area bottom surface is difficult to accurately control at the micrometer level based on the limit of the manufacturing process, and thus the accuracy cannot be accurately conveyed. The needle position of the probe card 160.
(6)部分型號的探針卡在進行檢測時必須搭載在一機框(stiffener)上。然而，在該母板組件140上並無設置與探針卡之機框的相對承靠位置。因此當將該上母板144與該下母板142蓋合時，探針卡的承靠位置並非與實際探針卡之機框的相對承靠位置相同。此外，由於該探針卡160大多係以可繞性的材料製成，故若單以探針卡160與該上母板144做承靠，容易因該探針卡160的繞曲而導致彈性測試探針無法成功地與對應的接觸墊電性接觸。 (6) Some models of probe cards must be mounted on a speaker when testing. However, the relative bearing position of the frame of the probe card is not provided on the motherboard assembly 140. Therefore, when the upper mother board 144 is covered with the lower mother board 142, the bearing position of the probe card is not the same as the relative bearing position of the actual probe card frame. In addition, since the probe card 160 is mostly made of a material that can be wound, if the probe card 160 is supported by the upper motherboard 144, the elasticity of the probe card 160 is easily caused. The test probe was not able to successfully make electrical contact with the corresponding contact pad.
有鑑於此，有必要提供一種探針卡檢測設備，以解決習知技術所存在的問題。 In view of the above, it is necessary to provide a probe card detecting device to solve the problems of the prior art.
為解決上述技術問題，本發明之目的在於提供一種探針卡檢測設備，藉由將習知後掀式母板組件改變為側掀式的母板組件，使得上母板可相對下母板樞轉180度而不會與該探針卡檢測設備的背板互相干涉。此外，通過將本發明之該母板組件設計為將下母板固定設置在該探針卡檢測設備的可翻轉平台上，並搭配使用一快拆結構連接該上母板和該下母板兩者。因此，當該上母板展開而與該下母板一起呈水平置放時，可輕易且安全地將該上母板與該下母板快速分離。另一方面，由於本發明之該上母板可完全展開至水平狀態，故可將探針卡設計為組裝在該上母板上。並且，可採用將該探針卡先與該上母板的針盤平行並列之後再將該探針卡垂直下壓的方式使該探針卡與該上母板的針盤組裝，使得該針盤上的每一彈性測試探針具有相同的下壓行程，且施加在該探針板上各處的針壓也較為平均。 In order to solve the above technical problem, an object of the present invention is to provide a probe card detecting apparatus, which can change the upper rear motherboard to the lower mother board by changing the conventional rear type mother board assembly to the side type mother board assembly. It is rotated 180 degrees without interfering with the back plate of the probe card detecting device. In addition, by designing the motherboard assembly of the present invention to fix the lower motherboard on the reversible platform of the probe card detecting device, and using a quick release structure to connect the upper motherboard and the lower motherboard By. Therefore, when the upper mother board is unfolded and placed horizontally together with the lower mother board, the upper mother board and the lower mother board can be quickly and easily separated. On the other hand, since the upper mother board of the present invention can be fully deployed to a horizontal state, the probe card can be designed to be assembled on the upper mother board. Moreover, the probe card can be assembled with the dial of the upper motherboard by first juxtaposing the probe card in parallel with the dial of the upper motherboard, and then the probe card is vertically pressed down, so that the probe is assembled. Each of the elastic test probes on the disc has the same downstroke stroke, and the needle pressure applied throughout the probe plate is also relatively even.
本發明之另一目的在於提供一種探針卡檢測設備，其較佳地適用於當檢測搭載有機框的探針卡時使用。該探針卡檢測設備藉由提供一平行塊，且將該平行塊壓疊在母板組件的上方，使得該平行塊與機框的上承靠面互相抵靠，進而使得該探針卡獲得較佳地穩定性。 Another object of the present invention is to provide a probe card detecting apparatus which is preferably used when detecting a probe card carrying an organic frame. The probe card detecting device provides a parallel block and presses the parallel block over the motherboard assembly such that the parallel block and the upper bearing surface of the frame abut each other, thereby obtaining the probe card Better stability.
為達成上述目的，本發明提供一種探針卡檢測設備，包含：一基座，具有一可翻轉平台；一背板，與該基座連接；以及一母板組件，包含一下母板和一與該下母板可樞轉連接之上母板，其中該下母板固定在該可翻轉平台上，且該上母板具有一對應該下母板及該背板的可樞轉方向，使該上母板相對於該下母板的一可樞轉角度大於90度。 To achieve the above object, the present invention provides a probe card detecting apparatus comprising: a base having a reversible platform; a backing plate coupled to the base; and a motherboard assembly including a lower motherboard and a The lower motherboard is pivotally connected to the upper motherboard, wherein the lower motherboard is fixed on the reversible platform, and the upper motherboard has a pair of pivoting directions of the lower motherboard and the back panel, so that the lower motherboard A pivotable angle of the upper motherboard relative to the lower motherboard is greater than 90 degrees.
於本發明其中之一較佳實施例當中，該可樞轉方向平行於該背板。 In one preferred embodiment of the invention, the pivotable direction is parallel to the backing plate.
於本發明其中之一較佳實施例當中，該可樞轉角度為180度。 In one preferred embodiment of the invention, the pivotable angle is 180 degrees.
於本發明其中之一較佳實施例當中，該上母板用於與一針盤和一探針卡組裝，並且該針盤係位在該上母板與該探針卡之間。 In one preferred embodiment of the invention, the upper motherboard is for assembly with a dial and a probe card, and the dial is positioned between the upper motherboard and the probe card.
於本發明其中之一較佳實施例當中，該母板組件還包含至少一連接件，用於連接該下母板和該上母板，該至少一連接件包含一樞接座、一樞接臂以及一樞接軸，其中該樞接座具有一第一連接孔且固定在該下母板之一側邊，以及該樞接臂具有一第二連接孔且固定在該上母板之另一側邊，且該樞接軸用於穿設入該第一連接孔和該第二連接孔以可樞轉地連接該下母板與該上母板。 In a preferred embodiment of the present invention, the motherboard assembly further includes at least one connecting member for connecting the lower motherboard and the upper motherboard, the at least one connecting member includes a pivoting seat and a pivoting An arm and a pivoting shaft, wherein the pivoting seat has a first connecting hole and is fixed to one side of the lower motherboard, and the pivoting arm has a second connecting hole and is fixed to the upper motherboard One side, and the pivot shaft is configured to pass through the first connecting hole and the second connecting hole to pivotally connect the lower motherboard and the upper motherboard.
於本發明其中之一較佳實施例當中，當該樞接軸分別與該第一連接孔和該第二連接孔分離後，使該上母板與該下母板互相分離。 In a preferred embodiment of the present invention, when the pivoting shaft is separated from the first connecting hole and the second connecting hole, the upper mother board and the lower mother board are separated from each other.
於本發明其中之一較佳實施例當中，探針卡檢測設備還包含一平面板，設置該上母板之上，且該平面板抵靠在用於搭載一探針卡之一機框上。 In a preferred embodiment of the present invention, the probe card detecting device further includes a flat plate disposed on the upper mother board, and the flat plate is abutted on a frame for mounting a probe card.
於本發明其中之一較佳實施例當中，該下母板具有一活動式承靠組件，該活動式承靠組件包含一用於與該可翻轉平台互相抵靠的下承靠面，當該上母板樞轉至與該下母板疊合時，該活動式承靠組件之該下承靠面抵靠在該可翻轉平台上，以及當該上母板朝遠離該下母板的方向樞轉時，該活動式承靠組件向上抬升，使得該下承靠面與該可翻轉平台相距一縱向距離。 In a preferred embodiment of the present invention, the lower motherboard has a movable bearing assembly, and the movable bearing assembly includes a lower bearing surface for abutting against the reversible platform. When the upper motherboard is pivoted to overlap the lower motherboard, the lower bearing surface of the movable bearing assembly abuts against the reversible platform, and when the upper motherboard faces away from the lower motherboard Upon pivoting, the movable bearing assembly is raised upwardly such that the lower bearing surface is at a longitudinal distance from the reversible platform.
於本發明其中之一較佳實施例當中，該可翻轉平台包含至少 一承靠塊用於承靠一探針卡。 In a preferred embodiment of the present invention, the reversible platform comprises at least A bearing block is used to bear a probe card.
100、200、300‧‧‧探針卡檢測設備 100, 200, 300‧‧‧ probe card testing equipment
110、210、310‧‧‧基座 110, 210, 310‧‧‧ base
120、220、320‧‧‧背板 120, 220, 320‧‧‧ Backplane
130、230、230’、330‧‧‧可翻轉平台 130, 230, 230’, 330‧‧‧ fliptable platform
140、240、340‧‧‧母板組件 140, 240, 340‧‧‧ motherboard components
142、242、342‧‧‧下母板 142, 242, 342‧‧‧ Motherboard
144、244、344‧‧‧上母板 144, 244, 344‧‧‧ mother board
150、250‧‧‧針盤 150, 250‧‧ ‧ dial
252‧‧‧彈性測試探針 252‧‧‧Flexible test probe
160、260、360‧‧‧探針卡 160, 260, 360‧‧ ‧ probe card
270‧‧‧連接件 270‧‧‧Connecting parts
272‧‧‧樞接座 272‧‧‧ pivoting seat
274‧‧‧樞接臂 274‧‧‧ pivot arm
276‧‧‧樞接軸 276‧‧‧ pivot shaft
2722‧‧‧第一連接孔 2722‧‧‧First connection hole
2742‧‧‧第二連接孔 2742‧‧‧Second connection hole
280、380‧‧‧機框 280, 380‧‧‧ machine frame
282‧‧‧下凸緣 282‧‧‧ Lower flange
382‧‧‧上凸緣 382‧‧‧Upper flange
2422‧‧‧中央開口 2422‧‧‧Central opening
2424‧‧‧活動式承靠組件 2424‧‧‧Active bearing components
2424A‧‧‧下承靠面 2424A‧‧‧ under the bearing surface
2424B‧‧‧上承靠面 2424B‧‧‧上上面
232‧‧‧承靠塊 232‧‧‧Received block
232’‧‧‧第一承靠塊 232’‧‧‧First Block
234’‧‧‧第二承靠塊 234’‧‧‧Second reliance block
390‧‧‧平面板 390‧‧‧flat board
392‧‧‧鎖扣機構 392‧‧‧Locking mechanism
θ‧‧‧可樞轉角度 Θ‧‧‧ pivotable angle
A‧‧‧可樞轉方向 A‧‧‧ pivotable direction
B‧‧‧可樞轉方向 B‧‧‧ pivotable direction
D‧‧‧橫向距離 D‧‧‧ lateral distance
H‧‧‧縱向距離 H‧‧‧Longitudinal distance
第1圖顯示習知探針卡檢測設備之示意圖；第2圖顯示根據本發明之第一較佳實施例之探針卡檢測設備之示意圖；第3圖顯示第2圖之側掀式母板組件之立體***圖；第4圖顯示第2圖之探針卡檢測設備之上視示意圖；第5圖顯示根據本發明之二較佳實施例之探針卡檢測設備之可翻轉平台之示意圖；第6A與第6B圖分別繪示第3圖之活動式承靠組件之作動示意圖。第7圖顯示根據本發明之第三較佳實施例之探針卡檢測設備之示意圖；以及第8圖顯示將第7圖之平面板疊置在母板組件上之示意圖。 1 is a schematic view showing a conventional probe card detecting device; FIG. 2 is a schematic view showing a probe card detecting device according to a first preferred embodiment of the present invention; and FIG. 3 is a side view showing a side plate of a second embodiment; 3D exploded view of the component; FIG. 4 is a top view of the probe card detecting device of FIG. 2; FIG. 5 is a schematic view showing the fliptable platform of the probe card detecting device according to the second preferred embodiment of the present invention; 6A and 6B are respectively schematic diagrams showing the operation of the movable bearing assembly of Fig. 3. Fig. 7 is a view showing a probe card detecting device according to a third preferred embodiment of the present invention; and Fig. 8 is a view showing a plan of stacking the flat plate of Fig. 7 on a mother board assembly.
為了讓本發明之上述及其他目的、特徵、優點能更明顯易懂，下文將特舉本發明較佳實施例，並配合所附圖式，作詳細說明如下。 The above and other objects, features and advantages of the present invention will become more <RTIgt;
請參照第2圖和第3圖，其中第2圖顯示根據本發明之第一較佳實施例之探針卡檢測設備200之示意圖，以及第3圖顯示第2圖之側掀式母板組件之立體***圖。該探針卡檢測設備200包含一基座210、一背板220、一可翻轉平台230、和一側掀式的母板組件240。該背板220係與該基座210之一側壁連接，且該基座210係用於承載該可翻轉平台230和該母板組件 240。該母板組件240包含一下母板242、一上母板244和至少一連接件270。該下母板242係固定設置在該可翻轉平台230上，並於本實施例中，係藉由三個連接件270與該上母板244連接，但該連接件270的數量僅係作為示例，數量不侷限於此，可依實際需求設置。 Please refer to FIG. 2 and FIG. 3, wherein FIG. 2 is a schematic view showing the probe card detecting device 200 according to the first preferred embodiment of the present invention, and FIG. 3 is a side view showing the side plate motherboard assembly of FIG. The three-dimensional explosion map. The probe card detecting device 200 includes a base 210, a backing plate 220, a reversible platform 230, and a side-mounted motherboard assembly 240. The back plate 220 is coupled to a sidewall of the base 210, and the base 210 is configured to carry the reversible platform 230 and the motherboard assembly 240. The motherboard assembly 240 includes a lower motherboard 242, an upper motherboard 244, and at least one connector 270. The lower motherboard 242 is fixedly disposed on the reversible platform 230, and in the embodiment, is connected to the upper motherboard 244 by three connectors 270, but the number of the connectors 270 is only an example. The number is not limited to this, and can be set according to actual needs.
如第3圖所示，每一該連接件270包含具有一對第一連接孔2722的一樞接座272、具有一第二連接孔2742的一樞接臂274、以及一樞接軸276，其中該樞接座272係固定在該下母板242之一側邊，以及該樞接臂274係固定在該上母板244之相對的一側邊。藉由將每一該樞接軸276穿設入該對第一連接孔2722和該第二連接孔2742後，使得該上母板244與該下母板242形成可樞轉連接；反之，當將每一該樞接軸276從該對第一連接孔2722和該第二連接孔2742抽離後，即使該上母板244與該下母板242互相分離。可以理解的是，可通過在該連接件270設置簡易的栓鎖機制，使得僅需按壓或扭轉該樞接軸276即可解除該樞接軸276與該對第一連接孔2722和該第二連接孔2742之間的扣合，因而達到使該上母板244與該下母板242快速拆裝的目的。應當注意的是，在本發明之第一較佳實施例中的該連接件270的結構僅係作為示例，在其他實施例中亦可採用不同的快拆結構取代該連接件270，例如採用鉸鍊扣件的結構。 As shown in FIG. 3, each of the connecting members 270 includes a pivoting seat 272 having a pair of first connecting holes 2722, a pivoting arm 274 having a second connecting hole 2742, and a pivoting shaft 276. The pivoting seat 272 is fixed to one side of the lower motherboard 242, and the pivoting arm 274 is fixed to the opposite side of the upper motherboard 244. After the pivoting shaft 276 is inserted into the pair of first connecting holes 2722 and the second connecting hole 2742, the upper motherboard 244 is pivotally connected with the lower motherboard 242; After the pivoting shaft 276 is pulled away from the pair of first connecting holes 2722 and the second connecting hole 2742, even the upper mother board 244 and the lower mother board 242 are separated from each other. It can be understood that the pivoting shaft 276 and the pair of first connecting holes 2722 and the second can be released by simply providing a simple latching mechanism on the connecting member 270 so that only the pivoting shaft 276 needs to be pressed or twisted. The fastening between the connecting holes 2742 is achieved, so that the upper mother board 244 and the lower mother board 242 are quickly disassembled. It should be noted that the structure of the connecting member 270 in the first preferred embodiment of the present invention is merely an example, and in other embodiments, a different quick-release structure may be used instead of the connecting member 270, for example, using a hinge. The structure of the fastener.
請參照第4圖，其顯示第2圖之探針卡檢測設備200之上視示意圖。在本發明的探針卡檢測設備200中，由習知後掀式的母板組件改設為該側掀式的母板組件240，亦即該上母板244具有一相對於該下母板242的側掀式可樞轉方向B且該側掀式可樞轉方向B是平行於該背板220(而第1圖所示的習知上母板144的可樞轉方向A是朝向該背板120)，因此能使該上母板 244相對該下母板242的可樞轉角度θ可大於90度，並且較佳地樞轉到180度，即將該上母板244可完全展開至與該下母板242一同呈水平狀態。相應的，當將該上母板244相對該下母板242進行樞轉時，該上母板244始終與該背板220保持一相同的橫向距離D。也就是說，該上母板244不會與該探針卡檢測設備200的該背板220產生任何結構上的干涉。 Please refer to FIG. 4, which shows a top view of the probe card detecting device 200 of FIG. In the probe card detecting device 200 of the present invention, the conventional rear plate type mother board assembly is changed to the side type mother board assembly 240, that is, the upper mother board 244 has a relative to the lower mother board. The side pivotal pivoting direction B of the 242 and the side pivotal pivoting direction B are parallel to the backing plate 220 (and the pivotable direction A of the conventional upper mother board 144 shown in FIG. 1 is toward the Back plate 120), thus enabling the upper motherboard The pivotable angle θ of the 244 relative to the lower motherboard 242 can be greater than 90 degrees, and preferably pivoted to 180 degrees, ie, the upper motherboard 244 can be fully deployed to be horizontal with the lower motherboard 242. Correspondingly, when the upper motherboard 244 is pivoted relative to the lower motherboard 242, the upper motherboard 244 is always maintained at the same lateral distance D from the back panel 220. That is, the upper motherboard 244 does not create any structural interference with the backing plate 220 of the probe card detecting device 200.
如第2圖和第3圖所示，由於本發明之該探針卡檢測設備200可將該上母板244相對該下母板242展開至一水平狀態，故可方便使用者直接將一探針卡260組裝在該上母板244上。更詳言之，該上母板244係用於依序組裝一針盤250和一探針卡260。該針盤250係用於承載複數個彈性測試探針(pogo pin)252。該探針卡260包含相對的一第一面和一第二面，該第一面具有複數個接觸墊以及該第二面具有複數個突出該第二面的針腳。當將該探針卡260組裝至該上母板244上時，係將具有複數個接觸墊的該第一面面對該針盤250的方向進行組裝。藉由將該探針卡260與該針盤250對應組裝，使得該針盤250上的該等彈性測試探針252電性接觸該探針卡260上之相對應的接觸墊以產生迴路，進而使該探針卡260與該探針卡檢測設備200產生連結，因而可檢測該探針卡260是否有異常。應當注意的是，在將該探針卡260與該針盤250對應組裝時，先將該探針卡260與該上母板244的該針盤250平行並列之後再將該探針卡260垂直下壓使該探針卡260與該上母板244的該針盤250組裝，使得該針盤250上之每一彈性測試探針252具有相同的活動行程，進而讓施加在該探針卡260上各處的針壓平均。此外，由於該探針卡260係以水平地放置在該針盤250上，即每一彈性測試探針252係以垂直的方向進行伸縮，進而避免該彈性測試探針252因側向施壓而導致歪斜或磨耗的 問題。此外，由於係先將該探針卡260與該針盤250組裝後，才將該上母板244樞轉至與該下母板242疊合以進行該探針卡260的檢測。因此，即使將該上母板244進行多次開合也不會造成該針盤250上之該等彈性測試探針252反覆的釋放與收縮，故可有效地減少該等彈性測試探針252的壓放次數，進而增加該彈性測試探針252的使用壽命。 As shown in FIG. 2 and FIG. 3, the probe card detecting device 200 of the present invention can expand the upper motherboard 244 to a horizontal state relative to the lower motherboard 242, so that the user can directly probe the device. A needle card 260 is assembled on the upper motherboard 244. More specifically, the upper motherboard 244 is used to sequentially assemble a dial 250 and a probe card 260. The dial 250 is used to carry a plurality of elastic test probes (pogo pins) 252. The probe card 260 includes an opposite first surface and a second surface, the first surface having a plurality of contact pads and the second surface having a plurality of pins protruding from the second surface. When the probe card 260 is assembled to the upper motherboard 244, the first face having a plurality of contact pads is assembled in the direction of the dial 250. By assembling the probe card 260 correspondingly to the dial 250, the elastic test probes 252 on the dial 250 electrically contact the corresponding contact pads on the probe card 260 to generate a loop. The probe card 260 is coupled to the probe card detecting device 200, so that it is possible to detect whether the probe card 260 is abnormal. It should be noted that when the probe card 260 is assembled correspondingly to the dial 250, the probe card 260 is first parallel to the dial 250 of the upper motherboard 244, and then the probe card 260 is vertical. Pressing down causes the probe card 260 to be assembled with the dial 250 of the upper motherboard 244 such that each of the elastic test probes 252 on the dial 250 has the same active travel and is then applied to the probe card 260. The needle pressure averaged everywhere. In addition, since the probe card 260 is horizontally placed on the dial 250, that is, each elastic test probe 252 is stretched in a vertical direction, thereby preventing the elastic test probe 252 from being pressed laterally. Cause skew or wear problem. In addition, since the probe card 260 is assembled with the dial 250 first, the upper motherboard 244 is pivoted to overlap with the lower motherboard 242 to perform detection of the probe card 260. Therefore, even if the upper mother board 244 is opened and closed a plurality of times, the release and contraction of the elastic test probes 252 on the dial 250 are not caused, so that the elastic test probes 252 can be effectively reduced. The number of presses, which in turn increases the useful life of the elastic test probe 252.
另一方面，在習知技術中(如第1圖所示)，由於探針卡160係組裝在該下母板142上，因此為了使用架設在該可翻轉平台130上方的顯微鏡(未繪示於圖中)觀察位於該探針卡160之針腳時，必須將整個該可翻轉平台130側向翻轉以將該探針卡160的針腳面朝向顯微鏡的方向。然而，上述方法存在當母板組件140的電路板的尺寸過大時會造成與該探針卡檢測設備100產生結構上的干涉。相較於習知技術，本發明係藉由將該探針卡260直接組裝在該上母板244上，並且組裝後該探針卡260的該第一面(即針腳面)就是直接地面向顯微鏡的方向。因此，不需藉由側向樞轉該可翻轉平台230即可進行該探針卡260之針腳的觀測，進而避免因翻轉該可翻轉平台230造成與該探針卡檢測設備200產生結構上的干涉的問題。 On the other hand, in the prior art (as shown in FIG. 1), since the probe card 160 is assembled on the lower motherboard 142, in order to use a microscope mounted above the reversible platform 130 (not shown) When viewing the pins located on the probe card 160, the entire fliptable platform 130 must be flipped laterally to direct the pin faces of the probe card 160 toward the microscope. However, the above method has a structural interference with the probe card detecting device 100 when the size of the circuit board of the motherboard assembly 140 is too large. Compared with the prior art, the present invention directly assembles the probe card 260 on the upper motherboard 244, and the first face (ie, the stitch face) of the probe card 260 is directly facing after assembly. The direction of the microscope. Therefore, the pin of the probe card 260 can be observed without laterally pivoting the reversible platform 230, thereby avoiding structural damage with the probe card detecting device 200 caused by flipping the reversible platform 230. The problem of interference.
由上可知，由於在本發明之該探針卡檢測設備200中，該探針卡260係組裝在該上母板244上，因此該下母板242僅係作為承載抵靠的平台，而不受限於檢測的探針卡的型號的限制，故可永久地鎖固在該探針卡檢測設備200的該可翻轉平台230上。意味著，當要更換檢測不同型號的探針卡時，只需要更換上母板244即可檢測不同型號的探針卡。更明確地說，本發明僅需要將該上母板244展開呈水平狀態，並且搭配可達到快速拆裝的該連接件270的使用，就可輕易且安全地將該上母板244和該下母板242快速 分離以達到更換不同型號的探針卡之母板的功效。相較於習知技術中為了檢測不同型號的探針卡必需將整組的母板組件進行替換，本發明採用只更換上母板244的方式，有效地減輕人員在搬運和更換上的負擔。 As can be seen from the above, since the probe card 260 is assembled on the upper motherboard 244 in the probe card detecting device 200 of the present invention, the lower motherboard 242 is only used as a platform for bearing abutment, and Limited by the type of probe card that is detected, it can be permanently locked to the reversible platform 230 of the probe card inspection device 200. This means that when you want to replace the probe card of different models, you only need to replace the upper motherboard 244 to detect different types of probe cards. More specifically, the present invention only needs to unfold the upper mother board 244 in a horizontal state, and with the use of the connecting member 270 which can be quickly disassembled, the upper mother board 244 and the lower side can be easily and safely used. Mother board 242 fast Separate to achieve the effect of replacing the motherboard of different types of probe cards. Compared with the prior art, in order to detect different types of probe cards, it is necessary to replace the entire set of motherboard components. The present invention adopts the method of replacing only the mother board 244, thereby effectively reducing the burden on the personnel in handling and replacement.
如第3圖所示，該下母板242包含一中央開口2422，該中央開口2422的下方為該可翻轉平台230的檯面，該可翻轉平台230上設置有至少一個承靠塊232用於提供該探針卡260的承靠以穩定該探針卡260，並將該探針卡260保持在一較佳的檢測基準面。可以理解的是，在不同的實施例中，可根據檢測的探針卡的單一點位的厚度(即根據探針卡與可翻轉平台的檯面的相距之高度)在該可翻轉平台上設置模組化的承靠塊。舉例來說，請參照第5圖，其顯示根據本發明之二較佳實施例之探針卡檢測設備之可翻轉平台230’的示意圖。為了搭配具有不同厚度的探針卡的檢測，該可翻轉平台230’在厚度相對較薄的點位設置有4個高度較高的第一承靠塊232’，以及在厚度相對較厚的點位設置4個高度較低的第二承靠塊234’。 As shown in FIG. 3, the lower motherboard 242 includes a central opening 2422. The lower surface of the central opening 2422 is a mesa of the reversible platform 230. The reversible platform 230 is provided with at least one bearing block 232 for providing The probe card 260 bears against the probe card 260 and holds the probe card 260 at a preferred detection reference surface. It can be understood that, in different embodiments, the mode can be set on the reversible platform according to the thickness of the single point of the detected probe card (ie, the height of the probe card from the mesa of the flippable platform). Grouped anchor blocks. For example, please refer to FIG. 5, which shows a schematic diagram of a reversible platform 230' of a probe card detecting device in accordance with a preferred embodiment of the present invention. In order to cooperate with the detection of probe cards having different thicknesses, the reversible platform 230' is provided with four higher-height first bearing blocks 232' at relatively thinner thickness points, and at relatively thicker thickness points. The position is set to 4 lower second bearing blocks 234'.
請參照第3圖和第6A與第6B圖，其中第6A與第6B圖分別繪示第3圖之活動式承靠組件2424的作動示意圖。如第3圖所示，在檢測特定型號的探針卡260時需搭配一用於加固該探針卡260整體結構的機框(stiffener)280一起使用。由於該機框280係採用鋼性材料構成，相較於採用可繞性材質的該探針卡260，該機框280可提供該探針卡260結合該機框280所形成之整體組件較佳的穩定性以及保持在較佳的檢測基準面。因此，本發明除了提供該承靠塊232以提供該探針卡260的承靠以外，還進一步提供與該機框280抵靠的元件。如第3圖所示，在該機框280與該下母板242對應接觸的位置設置至少一下凸緣282(如第3圖所示之4個下凸緣282)，藉由該等 下凸緣282與該下母板242的抵靠，進而使得在檢測該探針卡260時能獲得較佳的穩定性。 Please refer to FIG. 3 and FIGS. 6A and 6B , wherein FIGS. 6A and 6B respectively illustrate the operation of the movable bearing assembly 2424 of FIG. 3 . As shown in FIG. 3, a probe card 260 of a particular type is used in conjunction with a speaker 280 for reinforcing the overall structure of the probe card 260. Since the frame 280 is made of a steel material, the frame 280 can provide the integral component formed by the probe card 260 in combination with the frame 280, compared to the probe card 260 using the splicable material. The stability is maintained at the preferred test level. Accordingly, in addition to providing the abutment block 232 to provide the abutment of the probe card 260, the present invention further provides an element that abuts the frame 280. As shown in FIG. 3, at least a lower flange 282 (such as the four lower flanges 282 shown in FIG. 3) is provided at a position where the frame 280 is in contact with the lower motherboard 242, by the same. The lower flange 282 abuts against the lower motherboard 242, thereby enabling better stability when detecting the probe card 260.
另一方面，如同習知技術中所述，假若採用將下母板之大面積的底板作為整體母板組件的承靠面，容易因加工製造上的限制，導致下母板之底板的平整度無法被控制在微米的等級，進而造成當探針卡承靠在底板後產生歪斜的問題，因而影響檢測的精確度。故，本發明採用小面積且多件式的活動式承靠組件2424作為承靠該機框280之該等下凸緣282的元件。在製造上，可藉由將一中型的板塊進行精密研磨以使得整個板塊的平整度和厚度皆被控制在精準的塊規公差等級後，再將該板塊裁切成多個小型的板塊以作為本發明之該機框280之該等下凸緣282或該等活動式承靠組件2424，因而確保每一承靠面的水平。此外，為了防止在將該下母板242裝設至該可翻轉平台230上因撞擊或磨擦而導致該活動式承靠組件2424之該下承靠面2424A的損傷，故如第6A圖所示，本發明將該活動式承靠組件2424設計為當無施加外力於該活動式承靠組件2424之該上承靠面2424B時(即當該上母板244朝遠離該下母板242的方向樞轉)，該活動式承靠組件2424向上抬升，使得該活動式承靠組件2424之該下承靠面2424A與該可翻轉平台230相距一縱向距離H。另外，如第6B圖所示，當該上母板244樞轉至與該下母板242疊合時，該機框280之該等下凸緣282會壓疊在該等活動式承靠組件2424之該上承靠面2424B上，使得每一活動式承靠組件2424之該下承靠面2424A抵靠在該可翻轉平台230上，進而提供探針卡260與該機框280所形成之整體組件較佳的穩定性以及保持在較佳的檢測基準面。 On the other hand, as described in the prior art, if the large-area bottom plate of the lower mother board is used as the bearing surface of the integral mother board assembly, the flatness of the bottom board of the lower mother board is easily caused by the limitation of processing and manufacturing. Can not be controlled to the micron level, which causes the problem of skewing when the probe card bears against the bottom plate, thus affecting the accuracy of the detection. Accordingly, the present invention utilizes a small area and multi-piece movable bearing assembly 2424 as an element that bears against the lower flanges 282 of the frame 280. In manufacturing, a medium-sized plate can be precisely ground so that the flatness and thickness of the entire plate are controlled to a precise block gauge tolerance level, and then the plate is cut into a plurality of small plates to serve as a plurality of small plates. The lower flanges 282 of the frame 280 of the present invention or the movable bearing members 2424 thereby ensure the level of each bearing surface. In addition, in order to prevent the lower bearing plate 242 from being attached to the reversible platform 230, the lower bearing surface 2424A of the movable bearing member 2424 is damaged by impact or friction, as shown in FIG. 6A. The movable bearing assembly 2424 of the present invention is designed such that when no external force is applied to the upper bearing surface 2424B of the movable bearing assembly 2424 (ie, when the upper motherboard 244 faces away from the lower motherboard 242) Pivoting, the movable bearing assembly 2424 is raised upwardly such that the lower bearing surface 2424A of the movable bearing assembly 2424 is at a longitudinal distance H from the reversible platform 230. In addition, as shown in FIG. 6B, when the upper motherboard 244 is pivoted to overlap the lower motherboard 242, the lower flanges 282 of the frame 280 are superimposed on the movable bearing components. The upper bearing surface 2424B of the 2424 is such that the lower bearing surface 2424A of each movable bearing member 2424 abuts against the reversible platform 230, thereby providing the probe card 260 and the frame 280. The overall assembly is preferably stable and maintained at a preferred test level.
請參照第7圖和第8圖，其中第7圖顯示根據本發明之第三較 佳實施例之探針卡檢測設備300之示意圖，以及第8圖顯示將第7圖之平面板疊置在母板組件上之示意圖。該探針卡檢測設備300包含一基座310、一背板320、一可翻轉平台330和一側掀式的母板組件340。該背板320係與該基座310之一側壁連接，且該基座310係用於承載該可翻轉平台330和該母板組件340。該母板組件240包含一下母板342、一上母板344和至少一連接件(未標號)。可以理解的是，本發明之第三較佳實施例之探針卡檢測設備300包含第一較佳實施例之探針卡檢測設備200的所有元件，故在此不加以贅述。第三較佳實施例之該探針卡檢測設備300相較於第一較佳實施例之該探針卡檢測設備200差別在於，該探針卡檢測設備300進一步包含一平面板390，用於放置在該母板組件340之該上母板344之上，以提供搭載探針卡360之機框380向上的承靠面。該平面板390與該下母板342樞轉連接。具體而言，該上母板344和該平面板390係分別與該下母板342兩相對的側邊樞轉連接，使得該上母板344和該平面板390皆可相對該下母板342進行樞轉運動。 Please refer to FIG. 7 and FIG. 8 , wherein FIG. 7 shows the third comparison according to the present invention. A schematic diagram of the probe card detecting device 300 of the preferred embodiment, and FIG. 8 shows a schematic view of the planar plate of FIG. 7 stacked on the motherboard assembly. The probe card detecting device 300 includes a base 310, a back plate 320, a reversible platform 330, and a side-mounted motherboard assembly 340. The backplane 320 is coupled to one of the sidewalls of the base 310, and the base 310 is configured to carry the reversible platform 330 and the motherboard assembly 340. The motherboard assembly 240 includes a lower motherboard 342, an upper motherboard 344, and at least one connector (not labeled). It is to be understood that the probe card detecting device 300 of the third preferred embodiment of the present invention includes all the components of the probe card detecting device 200 of the first preferred embodiment, and thus will not be described herein. The probe card detecting device 300 of the third preferred embodiment is different from the probe card detecting device 200 of the first preferred embodiment in that the probe card detecting device 300 further includes a flat plate 390 for placing Above the upper mother board 344 of the motherboard assembly 340, an upward bearing surface of the frame 380 on which the probe card 360 is mounted is provided. The planar plate 390 is pivotally coupled to the lower motherboard 342. Specifically, the upper motherboard 344 and the planar panel 390 are pivotally connected to opposite sides of the lower motherboard 342, respectively, such that the upper motherboard 344 and the planar panel 390 are opposite to the lower motherboard 342. Perform a pivotal movement.
如第7圖和第8圖所示，搭載該探針卡360之該機框380在相對於該下母板342之另一表面具有複數個上凸緣382。如同前述，該等上凸緣382係藉由精密的加工而形成之具有塊規公差等級的承靠平面。當檢測該探針卡360時，係先將該上母板344蓋合在該下母板342之上，接著才將該平面板390壓疊在該上母板344之上，並且藉由一鎖扣機構392將該平面板390與該母板組件340鎖扣組合，使得探針卡360得以維持在一較佳地檢測基準面上，進而獲得較為精確的檢測值。 As shown in FIGS. 7 and 8, the frame 380 on which the probe card 360 is mounted has a plurality of upper flanges 382 on the other surface of the lower motherboard 342. As before, the upper flanges 382 are bearing planes having a block gauge tolerance level formed by precision machining. When the probe card 360 is detected, the upper motherboard 344 is first overlaid on the lower motherboard 342, and then the planar panel 390 is overlaid on the upper motherboard 344, and by a The latching mechanism 392 latches the flat panel 390 with the motherboard assembly 340 such that the probe card 360 is maintained on a preferred detection reference surface to obtain a more accurate detection value.
綜上所述，在本發明之探針卡檢測設備中，藉由將習知的後掀式母板組件改變為側掀式的母板組件，使得上母板可相對下母板樞轉180 度且不會與該探針卡檢測設備的背板互相干涉。此外，通過將本發明之該母板組件設計為將下母板固定設置在該探針卡檢測設備的可翻轉平台上，並搭配使用一快拆結構連接該上母板和該下母板。因此，當該上母板展開呈水平時，可輕易且安全地將該上母板與該下母板快速分離。另一方面，由於本發明之該上母板可完全展開至水平狀態，故可將探針卡設計為組裝在該上母板上。也就是說，可採用將該探針卡先與該上母板的針盤平行並列之後再將該探針卡垂直下壓的方式使該探針卡與該上母板的針盤組裝，使得該針盤上的每一彈性測試探針具有相同的下壓行程，且施加在該探針板上各處的針壓也較為平均。再者，藉由在下母板設置活動式承靠組件，使得實際提供探針卡檢測時的下方承靠面可得到保護，進而獲得較精確的檢測值。又，當檢測搭載有機框的探針卡時，藉由提供一平行塊，用於壓疊在母板組件的上方，使得該平行塊與機框的上承靠面互相抵靠，進而使得該探針卡獲得較佳地穩定性。 In summary, in the probe card detecting device of the present invention, the upper mother board can be pivoted relative to the lower mother board by changing the conventional rear slab type mother board assembly to the side sill type mother board assembly. And does not interfere with the back plate of the probe card detecting device. Further, by designing the motherboard assembly of the present invention to fix the lower motherboard on the reversible platform of the probe card detecting device, and using a quick release structure to connect the upper motherboard and the lower motherboard. Therefore, when the upper mother board is unfolded horizontally, the upper mother board and the lower mother board can be quickly and easily separated. On the other hand, since the upper mother board of the present invention can be fully deployed to a horizontal state, the probe card can be designed to be assembled on the upper mother board. In other words, the probe card can be assembled with the dial of the upper motherboard by first juxtaposing the probe card in parallel with the dial of the upper motherboard, and then pressing the probe card vertically downward. Each of the elastic test probes on the dial has the same depression stroke and the needle pressure applied across the probe plate is also relatively even. Furthermore, by providing the movable bearing assembly on the lower mother board, the lower bearing surface when the probe card is actually provided can be protected, thereby obtaining a more accurate detection value. Moreover, when detecting the probe card with the organic frame, by providing a parallel block for being laminated on the upper side of the motherboard assembly, the parallel block and the upper bearing surface of the frame abut each other, thereby making the The probe card achieves better stability.
雖然本發明已用較佳實施例揭露如上，然其並非用以限定本發明，本發明所屬技術領域中具有通常知識者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 While the invention has been described above in terms of the preferred embodiments, the invention is not intended to limit the invention, and the invention may be practiced without departing from the spirit and scope of the invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.
200‧‧‧探針卡檢測設備 200‧‧‧Probe card testing equipment
210‧‧‧基座 210‧‧‧Base
220‧‧‧背板 220‧‧‧ Backplane
230‧‧‧可翻轉平台 230‧‧‧Fliptable platform
240‧‧‧母板組件 240‧‧‧ Motherboard components
242‧‧‧下母板 242‧‧‧Lower motherboard
244‧‧‧上母板 244‧‧‧Upper motherboard
260‧‧‧探針卡 260‧‧‧ probe card
θ‧‧‧可樞轉角度 Θ‧‧‧ pivotable angle
B‧‧‧可樞轉方向 B‧‧‧ pivotable direction
Claims (8)
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| TW105106705A TWI593982B (en) | 2016-03-04 | 2016-03-04 | Probe card inspection equipment |
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| TW105106705A TWI593982B (en) | 2016-03-04 | 2016-03-04 | Probe card inspection equipment |
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| TW201732307A TW201732307A (en) | 2017-09-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114137386A (en) * | 2021-11-10 | 2022-03-04 | 河南裕展精密科技有限公司 | Test device, test method and test equipment |
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| US20050231222A1 (en) * | 2003-05-01 | 2005-10-20 | Diorio Mark L | Wafer probing that conditions devices for flip-chip bonding |
| TWM420702U (en) * | 2011-06-17 | 2012-01-11 | Dimond Shamrock Entpr Co Ltd | Chip testing tool |
| TWM432835U (en) * | 2011-12-20 | 2012-07-01 | Pleader-Yamaichi Co Ltd | Dual-window liftable probe card turnover jig |
| TW201245741A (en) * | 2011-03-16 | 2012-11-16 | Formfactor Inc | Wireless probe card verification system and method |
| US8531202B2 (en) * | 2007-10-11 | 2013-09-10 | Veraconnex, Llc | Probe card test apparatus and method |
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|---|---|---|---|---|
| US20050231222A1 (en) * | 2003-05-01 | 2005-10-20 | Diorio Mark L | Wafer probing that conditions devices for flip-chip bonding |
| US8531202B2 (en) * | 2007-10-11 | 2013-09-10 | Veraconnex, Llc | Probe card test apparatus and method |
| TW201245741A (en) * | 2011-03-16 | 2012-11-16 | Formfactor Inc | Wireless probe card verification system and method |
| TWM420702U (en) * | 2011-06-17 | 2012-01-11 | Dimond Shamrock Entpr Co Ltd | Chip testing tool |
| TWM432835U (en) * | 2011-12-20 | 2012-07-01 | Pleader-Yamaichi Co Ltd | Dual-window liftable probe card turnover jig |
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| CN114137386A (en) * | 2021-11-10 | 2022-03-04 | 河南裕展精密科技有限公司 | Test device, test method and test equipment |
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