TWI589904B

TWI589904B - Probe card automatic detection and correction methods and devices

Info

Publication number: TWI589904B
Application number: TW105143592A
Authority: TW
Inventors: Jin-Yuan Wang
Priority date: 2016-12-28
Filing date: 2016-12-28
Publication date: 2017-07-01
Also published as: TW201823763A

Description

探針卡自動檢測與校正方法及裝置Probe card automatic detection and correction method and device

本發明與探針卡之檢測有關，尤指一種自動檢測及校正探針卡之裝置及方法。The invention relates to the detection of a probe card, and more particularly to an apparatus and method for automatically detecting and correcting a probe card.

按，本案申請人先前曾就探針卡之檢測方法及應用該方法之裝置申請發明專利，現已核准為I525327號專利在案。該專利之技術內容揭露有一檢測裝置，其包括有一工作平台，該工作平台上設有一量測部、一校正部及一輸送部，而待測之探針卡先經由該量測部辨識並標示出錯誤腳位，再藉由該輸送部將探針卡移動至該校正部處，接著利用該校正部校正該錯誤腳位，過程中無須拆裝探針卡，而具有節省時間且提升檢測準確行之優點。According to the application, the applicant of the present invention has previously applied for a patent for the detection method of the probe card and the device applying the method, and has been approved as the patent of I525327. The technical content of the patent discloses a detecting device, which includes a working platform. The working platform is provided with a measuring portion, a correcting portion and a conveying portion, and the probe card to be tested is first identified and marked by the measuring portion. The wrong position is generated, and the probe card is moved to the correction portion by the conveying portion, and then the error portion is corrected by the correction portion, and the probe card is not required to be disassembled in the process, thereby saving time and improving detection accuracy. The advantages of the line.

惟上述習知裝置中，該校正部仍須以人工操作，因而除了機器的維護成本以外，尚須支出人力成本，相對地壓縮商業上的利潤空間。有鑑於此，開發一種可兼顧自動化檢測及校正的探針卡檢測裝置及方法即為本發明所欲解決之首要課題。However, in the above conventional device, the correction unit still has to be manually operated, so that in addition to the maintenance cost of the machine, it is necessary to spend labor costs and relatively compress the commercial profit margin. In view of this, the development of a probe card detecting device and method capable of both automatic detection and correction is the primary problem to be solved by the present invention.

本發明目的之一在於提供一種探針卡檢測方法及裝置，其利用量測部對探針卡進行檢測，進而標記出位置偏離之腳位，再將所標記之腳位直接輸送至校正部進行校正，藉以縮短檢測及校正的時間，提升工作效率。One of the objects of the present invention is to provide a probe card detecting method and apparatus, which use a measuring unit to detect a probe card, thereby marking a position deviation position, and then transmitting the marked foot directly to the correction unit. Correction to shorten the time of detection and correction and improve work efficiency.

本發明目的之二在於使探針卡之檢測及校正工作形成自動化作業，藉以降低成本進而提高獲利。The second object of the present invention is to automate the detection and correction of the probe card, thereby reducing costs and increasing profit.

為達前述之目的，本發明提供一種探針卡自動檢測與校正方法，其包括有：　　以一量測部辨識一探針卡之各腳位的位置；　　比對上述各腳位的位置與一標準位置，判斷二者之偏差情形；　　若前述二者具有偏差，則將出現偏差之腳位標記為一錯誤腳位；　　計算該錯誤腳位之位置與該標準位置之差距的一位移向量；　　以一輸送部將該探針卡輸送至一校正部；其中該校正部具有一工作位置，而該探針卡之錯誤腳位被該輸送部直接輸送至該校正部之工作位置；　　以該校正部控制該錯誤腳位，並藉由該輸送部與該校正部之間依該位移向量的相對移動進行該錯誤腳位之校正；　　該探針卡之一個錯誤腳位校正完成後，下一個錯誤腳位被該輸送部直接輸送至該校正部之工作位置。For the purpose of the foregoing, the present invention provides a method for automatically detecting and correcting a probe card, comprising: identifying a position of each pin of a probe card by a measuring portion; comparing the positions of the above-mentioned respective positions with a The standard position is used to determine the deviation between the two; if the two have deviations, the deviation pin is marked as an error pin; and a displacement vector of the difference between the position of the wrong pin and the standard position is calculated; a conveying portion transports the probe card to a correction portion; wherein the correction portion has a working position, and the wrong position of the probe card is directly sent to the working position of the correction portion by the conveying portion; Controlling the error pin, and correcting the error pin by the relative movement of the displacement vector between the transport portion and the correction portion; after the error pin correction of the probe card is completed, the next error pin The position is directly conveyed by the conveying portion to the working position of the correction portion.

於一實施例中更包括有：若該探針卡之腳位的位置與該標準位置出現偏差，且偏差超出公差值，則將此腳位標記為一錯誤腳位。In an embodiment, the pin position is marked as an error pin if the position of the pin of the probe card deviates from the standard position and the deviation exceeds the tolerance value.

於一實施例中更包括有：該標準位置由一於該量測部中預先建置之教導檔提供，包括有各腳位之位置及高度資訊。In an embodiment, the standard position is provided by a pre-established teaching file in the measuring unit, and includes position and height information of each foot position.

於一實施例中更包括有：該探針卡之錯誤腳位校正完成後，將該探針卡送回該量測部重行檢測，且僅對先前被標記之錯誤腳位進行檢測。In an embodiment, after the error pin correction of the probe card is completed, the probe card is sent back to the measuring portion for re-detection, and only the previously marked wrong pin is detected.

本發明更提供一種應用上述方法之探針卡自動檢測與校正裝置，其包括有：　　一工作平台，其設有一立柱，該立柱設有一可沿高度方向移動之滑塊；　　一量測部，其設於該滑塊上；該量測部包括有一影像擷取單元及一影像比對單元，其中該影像擷取單元用以擷取一探針卡之影像，而該影像比對單元內建一包含該探針卡各腳位之標準位置的教導檔，該影像比對單元依該影像辨識該探針卡之各腳位；該量測部更包括有一標示單元及一計算單元，其中該標示單元用以標記該探針卡之腳位的位置，該計算單元用以將各腳位之位置與該標準位置比較，並計算二者投影於該工作平台上之差距的一位移向量；　　一校正部，其設於該滑塊上；該校正部設有一控制件，其可隨該滑塊產生沿高度方向之位移，用以控制該探針卡之腳位；該控制件於該工作平台上對應有一工作位置；　　一輸送部，其設於該工作平台上；該輸送部設有一載台，用以承載該探針卡；該輸送部可帶動該載台沿該工作平台進行二維方向之位移，以將該探針卡被該標示單元標記之位置直接輸送至該工作位置，且該輸送部與該校正部之間可依該位移向量產生相對移動，藉此校正該探針卡之腳位。The invention further provides a probe card automatic detecting and correcting device applying the above method, comprising: a working platform, which is provided with a column, the column is provided with a slider movable in the height direction; a measuring portion, The image capturing unit includes an image capturing unit and an image comparing unit, wherein the image capturing unit is configured to capture an image of a probe card, and the image matching unit has a built-in a teaching file that includes a standard position of each pin of the probe card, the image matching unit identifies each pin of the probe card according to the image; the measuring portion further includes a marking unit and a calculating unit, wherein the marking The unit is used to mark the position of the pin of the probe card, and the calculating unit is configured to compare the position of each pin with the standard position, and calculate a displacement vector of the difference between the two projections on the working platform; a portion disposed on the slider; the correction portion is provided with a control member for generating a displacement along the height direction of the slider for controlling the position of the probe card; the control member is on the working platform There should be a working position; a conveying portion disposed on the working platform; the conveying portion is provided with a loading platform for carrying the probe card; the conveying portion can drive the loading table to perform the two-dimensional direction along the working platform Displacement, to directly transmit the position of the probe card marked by the marking unit to the working position, and the relative movement between the conveying portion and the correcting portion can be performed according to the displacement vector, thereby correcting the foot of the probe card Bit.

於一實施例中，該工作平台設有光學尺，用以產生該標示單元所標記之位置的座標，並利用此座標令該輸送部將該探針卡被該標示單元標記之位置直接輸送至該校正部之工作位置。In an embodiment, the working platform is provided with an optical scale for generating a coordinate of the position marked by the marking unit, and the coordinate is used to cause the conveying portion to directly convey the position of the probe card marked by the marking unit to The working position of the correction unit.

而本發明之上述目的與優點，不難從下述所選用實施例之詳細說明與附圖中獲得深入了解。The above objects and advantages of the present invention will be readily understood from the following detailed description of the embodiments of the invention.

請參閱第１圖，所示者為本發明提供之探針卡自動檢測與校正方法，本方法是以一探針卡自動檢測與校正裝置實施，該裝置如第２、３圖所示，其包括有一工作平台１，且於工作平台１上設有一立柱１２，其中該立柱１２設有一可沿高度方向移動之滑塊１３，且該滑塊１３上設有一量測部２及一校正部４。該量測部２包括有一影像擷取單元２１及一影像比對單元２２，其中該影像擷取單元２１正對該工作平台１，用以擷取探針卡５之影像，而該影像比對單元２２設於該量測部２中，其內建有一包含探針卡各腳位之標準位置的教導檔，包括有各腳位之位置及高度資訊，而該影像比對單元２２乃依該影像擷取單元２１所擷取之影像辨識該探針卡５之各腳位的位置。據此，該影像比對單元２２可將各腳位的位置比對於該教導檔，進而辨識各腳位的位置是否出現偏差；其中關於各腳位之位置可透過觀察影像中之各腳位是否偏離於教導檔中的標準位置而得，而關於各腳位之高度則可透過觀察影像中之各腳位是否位於影像對焦之焦點判定之。例如第４圖所示，於此探針卡５之Ａ區塊中有一偏離於標準位置之腳位（以下稱為錯誤腳位５１），此腳位５１可透過該影像比對單元經比較於教導檔而辨識出來，俾利於後續的校正作業。Please refer to FIG. 1 , which is a method for automatically detecting and correcting a probe card provided by the present invention. The method is implemented by a probe card automatic detection and correction device, as shown in FIGS. 2 and 3 . The utility model 1 includes a working platform 1 and a column 12 disposed on the working platform 1. The column 12 is provided with a slider 13 movable in the height direction, and the slider 13 is provided with a measuring portion 2 and a correcting portion 4 . The measuring unit 2 includes an image capturing unit 21 and an image comparing unit 22, wherein the image capturing unit 21 is facing the working platform 1 for capturing an image of the probe card 5, and the image is compared. The unit 22 is disposed in the measuring unit 2, and has a teaching file including a standard position of each pin of the probe card, including position and height information of each foot position, and the image matching unit 22 is configured according to the image. The image captured by the capture unit 21 identifies the position of each pin of the probe card 5. According to this, the image comparison unit 22 can compare the position of each pin with respect to the teaching file, and further recognize whether the position of each pin is deviated; wherein the position of each pin can be observed through the position of each pin in the image. Deviation from the standard position in the teaching file, and the height of each foot can be determined by observing whether the feet in the image are at the focus of the image focus. For example, as shown in FIG. 4, in the A block of the probe card 5, there is a pin which deviates from the standard position (hereinafter referred to as the error pin 51), and the pin 51 can be compared with the image comparing unit. It is recognized by the teaching file, which is beneficial to the subsequent correction work.

承上，該量測部２更包括有一標示單元２３，用以標記探針卡５之腳位的位置。於本發明中，該標示單元２３乃針對被該影像比對單元２２辨識為錯誤之腳位進行標記。於本實施例中，該工作平台１設有光學尺１１，用以產生該標示單元２３所標記之位置的座標，其中該工作平台１上設有沿相互垂直且定義為Ｘ軸及Ｙ軸延伸之兩個光學尺１１，分別產生此二個軸向的座標資訊，而該錯誤腳位之座標被該標示單元２３所記錄。The measuring unit 2 further includes a marking unit 23 for marking the position of the pin of the probe card 5. In the present invention, the labeling unit 23 marks the foot recognized as an error by the image matching unit 22. In this embodiment, the working platform 1 is provided with an optical scale 11 for generating coordinates of the position marked by the marking unit 23, wherein the working platform 1 is provided with an axis extending perpendicular to each other and defined as an X-axis and a Y-axis. The two optical scales 11 respectively generate the coordinate information of the two axial directions, and the coordinates of the wrong foot position are recorded by the marking unit 23.

此外，該量測部２又設有一計算單元２４，該計算單元２４用以將被該影像比對單元２２辨識為錯誤之腳位的位置與該標準位置比較，並計算二者投影於該工作平台１上之差距的位移向量。如第４圖所示，該計算單元可計算該錯誤腳位５１與標準位置之位置差距，而得一位移向量Ｄ。In addition, the measuring unit 2 is further provided with a calculating unit 24 for comparing the position of the foot recognized as the wrong position by the image comparing unit 22 with the standard position, and calculating the projection of the two in the work. The displacement vector of the gap on platform 1. As shown in FIG. 4, the calculation unit can calculate the position difference between the error pin 51 and the standard position, and obtain a displacement vector D.

另一方面，該校正部４設於該滑塊１３上，且該校正部４設有一用以控制探針卡５之腳位的控制件４１，其可隨該滑塊１３產生沿高度方向之位移。該控制件４１之尖端具有可抵接探針卡５腳位且可對其形成控制之結構，並於該工作平台１上對應有一工作位置。On the other hand, the correcting portion 4 is disposed on the slider 13, and the correcting portion 4 is provided with a control member 41 for controlling the position of the probe card 5, which can be generated along the height direction of the slider 13. Displacement. The tip end of the control member 41 has a structure that can abut the probe card 5 and can be controlled, and has a working position on the working platform 1.

再者，該工作平台１上設有一輸送部３，該輸送部３設有一用以承載探針卡５之載台３１，而該輸送部３可帶動該載台３１於該工作平台１上進行沿Ｘ軸及Ｙ軸之二維方向的位移，藉此帶動該載台３１上之探針卡５於該量測部２與該校正部４之間移動。於本實施例中，標示單元２３於探針卡５上標記出錯誤腳位並記錄其座標後，該輸送部３即利用此座標將探針卡５被標記之位置直接輸送至該校正部４之工作位置，令該校正部４可立即對該錯誤腳位進行校正。In addition, the working platform 1 is provided with a transporting portion 3, and the transporting portion 3 is provided with a loading platform 31 for carrying the probe card 5, and the transporting portion 3 can drive the loading platform 31 on the working platform 1. The displacement in the two-dimensional direction along the X-axis and the Y-axis causes the probe card 5 on the stage 31 to move between the measuring unit 2 and the correction unit 4. In this embodiment, after the marking unit 23 marks the wrong foot on the probe card 5 and records the coordinates thereof, the conveying portion 3 uses the coordinates to directly convey the position where the probe card 5 is marked to the correcting portion 4 The working position allows the correcting section 4 to immediately correct the wrong foot.

而本發明之探針卡檢測方法應用上述裝置，其步驟如第１圖所示，包括有：　　將探針卡置於載台上，並移動至量測部處；　　以影像擷取單元擷取探針卡之影像，且以影像比對單元加以辨識探針卡之腳位的位置；　　以標示單元針對各個位置偏離於標準位置的腳位進行標記；　　以計算單元計算偏離之腳位與標準位置之差距的位移向量；　　以輸送部將載台上之探針卡輸送至校正部；其中輸送部將探針卡被標示單元標記之位置直接輸送至該校正部之工作位置；　　以該校正部控制該錯誤腳位，並藉由該輸送部與該校正部之間依該位移向量的相對移動進行該錯誤腳位之校正；　　以輸送部將探針卡被標示單元標記之另一個位置直接輸送至該校正部之工作位置，並以校正部校正被標記之腳位。The probe card detecting method of the present invention uses the above device, and the steps thereof are as shown in FIG. 1 , including: placing the probe card on the stage and moving to the measuring portion; capturing by the image capturing unit The image of the probe card, and the position of the probe card is identified by the image comparison unit; the marking unit is marked for each position deviating from the standard position; the calculating unit calculates the deviation position and the standard position a displacement vector of the gap; conveying the probe card on the stage to the correction portion by the conveying portion; wherein the conveying portion directly conveys the position of the probe card marked by the marking unit to the working position of the correction portion; controlling by the correction portion The wrong foot position is corrected by the relative movement of the displacement vector between the transporting portion and the correcting portion; and the other position of the probe card marked by the marking unit is directly transmitted to the transporting portion The working position of the correcting unit is corrected by the correcting unit.

於本實施例中，上述檢測方法於開始進行之前，更包括先於量測部輸入關於探針卡腳位之標準位置的教導檔，以作為影像比對單元之比對基礎，藉此在後續擷取待檢測之探針卡的影像後，由該影像比對單元將其比對於該教導檔，進而辨識探針卡之腳位的位置是否出現偏差，若有如第４圖所示出現錯誤腳位５１的情形，則該標示單元即加以標記。其中更進一步地界定，該標示單元乃針對各個位置偏離於標準位置且超出公差值的腳位進行標記，再透過輸送部輸送至校正部加以校正。而當該標示單元標記出錯誤腳位後，將記錄其位置，其中於本實施例中可藉由光學尺產生該位置之座標資訊，而該輸送部即利用此座標將探針卡被標記之位置直接輸送至該校正部之工作位置，令該校正部可立即對該錯誤腳位進行校正。In this embodiment, before the start of the detecting method, the teaching file corresponding to the standard position of the probe card position is input before the measuring unit is used as a comparison basis of the image comparing unit, thereby After capturing the image of the probe card to be detected, the image comparison unit compares it with respect to the teaching file, thereby identifying whether the position of the probe card is deviated, and if there is an error foot as shown in FIG. In the case of bit 51, the labeling unit is marked. Further, it is further defined that the marking unit marks the foot position whose position is deviated from the standard position and exceeds the tolerance value, and then is sent to the correction unit through the conveying unit for correction. When the marking unit marks the wrong foot, the position is recorded. In this embodiment, the coordinate information of the position can be generated by the optical ruler, and the conveying unit uses the coordinate to mark the probe card. The position is directly sent to the working position of the correction unit, so that the correction unit can immediately correct the wrong foot.

上述探針卡之腳位的校正如第５圖所示，其係利用該輸送部３將該探針卡５之錯誤腳位５１移動至該校正部之工作位置後，該滑塊帶動該控制件４１往下移動，使該控制件４１抵接該錯誤腳位５１並加以控制，接著藉由該輸送部３與該校正部４之間依該位移向量Ｄ的相對移動進行該錯誤腳位５１之校正；於本實施例中，係由該輸送部３依該計算單元計算該錯誤腳位５１與標準位置之差距的位移向量Ｄ帶動該載台３１及該探針卡５移動，而該校正部４之控制件４１不動，藉以相對地扳動該錯誤腳位５１，使其回到標準位置而完成校正。The correction of the position of the probe card is as shown in FIG. 5, and after the moving portion 3 moves the wrong foot 51 of the probe card 5 to the working position of the correction portion, the slider drives the control. The member 41 moves downward to make the control member 41 abut against the wrong foot 51 and is controlled, and then the wrong foot 51 is performed by the relative movement of the displacement vector D between the transport portion 3 and the correcting portion 4. In the present embodiment, the displacement vector D calculated by the transport unit 3 according to the calculation unit to calculate the difference between the wrong foot 51 and the standard position drives the stage 31 and the probe card 5 to move, and the correction is performed. The control member 41 of the portion 4 does not move, thereby relatively pulling the wrong foot 51 to return it to the standard position to complete the correction.

接著，上述之檢測方法於校正部對探針卡之腳位進行校正後，更包括有以輸送部將探針卡輸送至量測部重行檢測之步驟，其中此步驟僅對探針卡先前被標示單元標記之腳位進行檢測，藉此可縮小檢測範圍以縮短檢測所需的時間，且同時兼顧檢測結果的正確性。而本方法將持續循環地進行，直至探針卡上已無錯誤腳位被標記出來，即可完成探針卡的檢測。Then, after the correction unit corrects the position of the probe card, the detection method further includes the step of transporting the probe card to the measurement unit for re-detection by the transport unit, wherein the step is only for the probe card previously The foot of the marking unit is detected, thereby narrowing the detection range to shorten the time required for the detection, and at the same time taking into account the correctness of the detection result. The method will continue to be performed cyclically until the probe card has been marked with no error pin, and the probe card can be detected.

惟，以上實施例之揭示僅用以說明本發明，並非用以限制本發明，故舉凡等效元件之置換仍應隸屬本發明之範疇。However, the above description of the embodiments is merely illustrative of the invention and is not intended to limit the invention, and the replacement of equivalent elements is still within the scope of the invention.

綜上所述，可使熟知本項技藝者明瞭本發明確可達成前述目的，實已符合專利法之規定，爰依法提出申請。In summary, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objectives and is in accordance with the provisions of the Patent Law.

１‧‧‧工作平台
１１‧‧‧光學尺
１２‧‧‧立柱
１３‧‧‧滑塊
２‧‧‧量測部
２１‧‧‧影像擷取單元
２２‧‧‧影像比對單元
２３‧‧‧標示單元
２４‧‧‧計算單元
３‧‧‧輸送部
３１‧‧‧載台
４‧‧‧校正部
４１‧‧‧控制件
５‧‧‧探針卡
５１‧‧‧錯誤腳位
Ｄ‧‧‧位移向量1‧‧‧Working Platform 11‧‧‧Optical Ruler 12‧‧‧Post 13‧‧‧Slider 2‧‧‧Measurement Unit 21‧‧‧Image Capture Unit 22‧‧‧Image Comparison Unit 23‧‧‧ Marking unit 24‧‧‧Computing unit 3‧‧‧Transporting unit 31‧‧‧Moving station 4‧‧‧Correcting unit 41‧‧‧Controls 5‧‧‧Probe card 51‧‧‧Error foot D‧‧‧ Displacement vector

第１圖為本發明之方法的流程圖；第２圖為本發明之裝置的立體示意圖；第３圖為本發明之裝置的架構方塊示意圖；第４圖為具有錯誤腳位之探針卡的示意圖；第５圖為本發明之裝置校正探針卡的使用狀態示意圖。1 is a flow chart of the method of the present invention; FIG. 2 is a schematic perspective view of the device of the present invention; FIG. 3 is a schematic block diagram of the device of the present invention; FIG. 5 is a schematic view showing the state of use of the calibration probe card of the device of the present invention.

Claims

一種探針卡自動檢測與校正方法，其包括有：　　以一量測部辨識一探針卡之各腳位的位置；　　比對上述各腳位的位置與一標準位置，判斷二者之偏差情形；　　若前述二者具有偏差，則將出現偏差之腳位標記為一錯誤腳位；　　以一計算單元計算該錯誤腳位之位置與該標準位置之差距的一位移向量；　　以一輸送部將該探針卡輸送至一校正部；其中該校正部具有一工作位置，而該探針卡之錯誤腳位被該輸送部直接輸送至該工作位置；　　以該校正部控制該錯誤腳位，並藉由該輸送部與該校正部之間依該位移向量的相對移動進行該錯誤腳位之校正；　　該探針卡之一個錯誤腳位校正完成後，下一個錯誤腳位被該輸送部直接輸送至該校正部之工作位置。A method for automatically detecting and correcting a probe card, comprising: identifying a position of each pin of a probe card by a measuring unit; comparing the position of each pin and a standard position, determining a deviation between the two If the two have deviations, the deviation pin is marked as an error pin; a calculation unit calculates a displacement vector of the difference between the position of the wrong pin and the standard position; The probe card is sent to a correction portion; wherein the correction portion has a working position, and the wrong position of the probe card is directly delivered to the working position by the delivery portion; the error portion is controlled by the correction portion, and The error pin is corrected by the relative movement of the displacement vector between the transporting portion and the correcting portion; after the error pin correction of the probe card is completed, the next wrong pin is directly sent to the transport portion to the transport portion. The working position of the correction unit.

如請求項１所述之探針卡自動檢測與校正方法，其中，該錯誤腳位之校正係由該輸送部依該位移向量帶動該探針卡移動而達成。The probe card automatic detection and correction method according to claim 1, wherein the correction of the error pin is achieved by the transport unit driving the probe card according to the displacement vector.

如請求項１所述之探針卡自動檢測與校正方法，其中，若該探針卡之腳位的位置與該標準位置出現偏差，且偏差超出公差值，則將此腳位標記為一錯誤腳位。The method for automatically detecting and correcting a probe card according to claim 1, wherein if the position of the pin of the probe card deviates from the standard position and the deviation exceeds the tolerance value, the pin is marked as a Wrong foot.

如請求項１所述之探針卡自動檢測與校正方法，其中，該標準位置由一於該量測部中預先建置之教導檔提供，包括有各腳位之位置及高度資訊。The probe card automatic detection and correction method according to claim 1, wherein the standard position is provided by a pre-established teaching file in the measuring unit, and includes position and height information of each foot position.

如請求項１所述之探針卡自動檢測與校正方法，其中更包括有：該探針卡之錯誤腳位校正完成後，將該探針卡送回該量測部重行檢測，且僅對先前被標記之錯誤腳位進行檢測。The probe card automatic detection and correction method according to claim 1, further comprising: after the error pin correction of the probe card is completed, returning the probe card to the measuring portion for re-detection, and only The previously marked wrong foot is detected.

一種應用如請求項１所述之探針卡自動檢測與校正方法之探針卡自動檢測與校正裝置，其包括有：　　一工作平台，其設有一立柱，該立柱設有一可沿高度方向移動之滑塊；　　一量測部，其設於該滑塊上；該量測部包括有一影像擷取單元及一影像比對單元，其中該影像擷取單元用以擷取一探針卡之影像，而該影像比對單元內建一包含該探針卡各腳位之標準位置的教導檔，該影像比對單元依該影像辨識該探針卡之各腳位；該量測部更包括有一標示單元及一計算單元，其中該標示單元用以標記該探針卡之腳位的位置，該計算單元用以將各腳位之位置與該標準位置比較，並計算二者投影於該工作平台上之差距的一位移向量；　　一校正部，其設於該滑塊上；該校正部設有一控制件，其可隨該滑塊產生沿高度方向之位移，用以控制該探針卡之腳位；該控制件於該工作平台上對應有一工作位置；　　一輸送部，其設於該工作平台上；該輸送部設有一載台，用以承載該探針卡；該輸送部可帶動該載台沿該工作平台進行二維方向之位移，以將該探針卡被該標示單元標記之位置直接輸送至該工作位置，且該輸送部與該校正部之間可依該位移向量產生相對移動，藉此校正該探針卡之腳位。An apparatus for automatically detecting and correcting a probe card for an automatic detection and correction method of a probe card according to claim 1, comprising: a working platform provided with a column, the column being provided with a movable position in a height direction a slider; a measuring unit is disposed on the slider; the measuring unit includes an image capturing unit and an image comparing unit, wherein the image capturing unit is configured to capture an image of a probe card. And the image comparison unit has a teaching file including a standard position of each pin of the probe card, and the image comparison unit identifies each pin of the probe card according to the image; the measuring unit further includes an indication a unit and a computing unit, wherein the marking unit is used to mark the position of the pin of the probe card, and the calculating unit is configured to compare the position of each pin with the standard position, and calculate the projection on the working platform a displacement vector of the gap; a correction portion disposed on the slider; the correction portion is provided with a control member for generating a displacement along the height direction of the slider for controlling the position of the probe card ; The workpiece has a working position on the working platform; a conveying portion is disposed on the working platform; the conveying portion is provided with a loading platform for carrying the probe card; the conveying portion can drive the loading platform along the The working platform is displaced in a two-dimensional direction to directly transport the position of the probe card marked by the marking unit to the working position, and a relative movement between the conveying portion and the correcting portion is generated according to the displacement vector, thereby Correct the pin position of the probe card.

如請求項６所述之探針卡自動檢測與校正裝置，其中，該工作平台設有光學尺，用以產生該標示單元所標記之位置的座標，並利用此座標令該輸送部將該探針卡被該標示單元標記之位置直接輸送至該校正部之工作位置。The probe card automatic detecting and correcting device of claim 6, wherein the working platform is provided with an optical scale for generating a coordinate of the position marked by the marking unit, and using the coordinate to make the conveying portion The needle card is directly conveyed to the working position of the correction unit by the position marked by the marking unit.