TW201823763A - Method and device for automatic detection and correction of probe card capable of shortening the time required for detection and correction, so as to reduce maintenance cost and labor cost while increasing the working efficiency - Google Patents
Method and device for automatic detection and correction of probe card capable of shortening the time required for detection and correction, so as to reduce maintenance cost and labor cost while increasing the working efficiency Download PDFInfo
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Abstract
Description
本發明與探針卡之檢測有關,尤指一種自動檢測及校正探針卡之裝置及方法。The invention relates to the detection of a probe card, and more particularly to a device and method for automatically detecting and correcting a probe card.
按,本案申請人先前曾就探針卡之檢測方法及應用該方法之裝置申請發明專利,現已核准為I525327號專利在案。該專利之技術內容揭露有一檢測裝置,其包括有一工作平台,該工作平台上設有一量測部、一校正部及一輸送部,而待測之探針卡先經由該量測部辨識並標示出錯誤腳位,再藉由該輸送部將探針卡移動至該校正部處,接著利用該校正部校正該錯誤腳位,過程中無須拆裝探針卡,而具有節省時間且提升檢測準確行之優點。According to the applicant, the applicant of this case has previously applied for an invention patent on the detection method of the probe card and the device applying the method, and has now been approved as the patent of I525327. The technical content of the patent discloses a detection device, which includes a working platform. The working platform is provided with a measuring section, a calibration section and a conveying section, and the probe card to be tested is first identified and marked by the measuring section. When the wrong pin is found, the probe card is moved to the correction section by the conveying section, and then the wrong pin is corrected by the correction section. There is no need to disassemble the probe card in the process, which saves time and improves detection accuracy Good advantages.
惟上述習知裝置中,該校正部仍須以人工操作,因而除了機器的維護成本以外,尚須支出人力成本,相對地壓縮商業上的利潤空間。有鑑於此,開發一種可兼顧自動化檢測及校正的探針卡檢測裝置及方法即為本發明所欲解決之首要課題。However, in the above-mentioned conventional device, the correction unit still needs to be operated manually, so in addition to the maintenance cost of the machine, it also needs to expend manpower costs, which relatively reduces the commercial profit space. In view of this, the development of a probe card detection device and method that can take into account both automatic detection and calibration is the primary problem to be solved by the present invention.
本發明目的之一在於提供一種探針卡檢測方法及裝置,其利用量測部對探針卡進行檢測,進而標記出位置偏離之腳位,再將所標記之腳位直接輸送至校正部進行校正,藉以縮短檢測及校正的時間,提升工作效率。One object of the present invention is to provide a method and device for detecting a probe card, which uses a measuring unit to detect the probe card, and then marks the feet that are out of position, and then directly conveys the marked feet to the calibration unit. Calibration to shorten the time of detection and calibration and improve work efficiency.
本發明目的之二在於使探針卡之檢測及校正工作形成自動化作業,藉以降低成本進而提高獲利。The second purpose of the present invention is to make the detection and calibration of the probe card an automated operation, thereby reducing the cost and increasing the profit.
為達前述之目的,本發明提供一種探針卡自動檢測與校正方法,其包括有: 以一量測部辨識一探針卡之各腳位的位置; 比對上述各腳位的位置與一標準位置,判斷二者之偏差情形; 若前述二者具有偏差,則將出現偏差之腳位標記為一錯誤腳位; 計算該錯誤腳位之位置與該標準位置之差距的一位移向量; 以一輸送部將該探針卡輸送至一校正部;其中該校正部具有一工作位置,而該探針卡之錯誤腳位被該輸送部直接輸送至該校正部之工作位置; 以該校正部控制該錯誤腳位,並藉由該輸送部與該校正部之間依該位移向量的相對移動進行該錯誤腳位之校正; 該探針卡之一個錯誤腳位校正完成後,下一個錯誤腳位被該輸送部直接輸送至該校正部之工作位置。In order to achieve the foregoing object, the present invention provides a method for automatically detecting and correcting a probe card, which includes: 辨识 identifying a position of each foot of a probe card by a measuring unit; comparing the position of each of the above foot positions with a Standard position to determine the deviation between the two; If the two mentioned above have a deviation, mark the foot with the deviation as an incorrect foot; Calculate a displacement vector of the difference between the position of the wrong foot and the standard position; A conveying part conveys the probe card to a correction part; wherein the correction part has a working position, and the wrong foot position of the probe card is directly conveyed by the conveying part to the working position of the correction part; Control the wrong foot, and correct the wrong foot by the relative movement between the conveying part and the correction part according to the displacement vector; 后 After the correction of one wrong foot of the probe card, the next wrong foot The position is directly conveyed to the working position of the correction part by the conveying part.
於一實施例中更包括有:若該探針卡之腳位的位置與該標準位置出現偏差,且偏差超出公差值,則將此腳位標記為一錯誤腳位。In an embodiment, the method further includes: if the position of the pin of the probe card deviates from the standard position, and the deviation exceeds the tolerance value, marking the pin as an incorrect pin.
於一實施例中更包括有:該標準位置由一於該量測部中預先建置之教導檔提供,包括有各腳位之位置及高度資訊。In one embodiment, the standard position is provided by a teaching file pre-built in the measuring section, and includes position and height information of each foot position.
於一實施例中更包括有:該探針卡之錯誤腳位校正完成後,將該探針卡送回該量測部重行檢測,且僅對先前被標記之錯誤腳位進行檢測。In an embodiment, the method further includes: after the correction of the incorrect pin position of the probe card is completed, the probe card is returned to the measuring section for re-detection, and only the previously marked incorrect pin position is detected.
本發明更提供一種應用上述方法之探針卡自動檢測與校正裝置,其包括有: 一工作平台,其設有一立柱,該立柱設有一可沿高度方向移動之滑塊; 一量測部,其設於該滑塊上;該量測部包括有一影像擷取單元及一影像比對單元,其中該影像擷取單元用以擷取一探針卡之影像,而該影像比對單元內建一包含該探針卡各腳位之標準位置的教導檔,該影像比對單元依該影像辨識該探針卡之各腳位;該量測部更包括有一標示單元及一計算單元,其中該標示單元用以標記該探針卡之腳位的位置,該計算單元用以將各腳位之位置與該標準位置比較,並計算二者投影於該工作平台上之差距的一位移向量; 一校正部,其設於該滑塊上;該校正部設有一控制件,其可隨該滑塊產生沿高度方向之位移,用以控制該探針卡之腳位;該控制件於該工作平台上對應有一工作位置; 一輸送部,其設於該工作平台上;該輸送部設有一載台,用以承載該探針卡;該輸送部可帶動該載台沿該工作平台進行二維方向之位移,以將該探針卡被該標示單元標記之位置直接輸送至該工作位置,且該輸送部與該校正部之間可依該位移向量產生相對移動,藉此校正該探針卡之腳位。The invention further provides a probe card automatic detection and calibration device applying the above method, which includes: (1) a working platform provided with a column, the column provided with a slider that can be moved in a height direction; (1) a measurement section, which The measuring unit includes an image capture unit and an image comparison unit, wherein the image capture unit is used to capture an image of a probe card, and the image comparison unit has a built-in A teaching file containing the standard positions of the pins of the probe card. The image comparison unit identifies the pins of the probe card according to the image. The measurement unit further includes a labeling unit and a computing unit. The labeling unit The unit is used to mark the position of the foot of the probe card, and the calculation unit is used to compare the position of each foot with the standard position, and calculate a displacement vector of the difference between the two projected on the working platform; The control unit is provided on the slider; the correction unit is provided with a control member that can generate a displacement in the height direction with the slider to control the foot position of the probe card; the control member is on the working platform There should be a work position; (1) a conveying section, which is set on the working platform; the conveying section is provided with a carrier for carrying the probe card; the conveying section can drive the carrier to perform two-dimensional direction along the work platform; Displacement to directly transport the position where the probe card is marked by the marking unit to the working position, and a relative movement can be generated between the conveying part and the correction part according to the displacement vector, thereby correcting the foot of the probe card Bit.
於一實施例中,該工作平台設有光學尺,用以產生該標示單元所標記之位置的座標,並利用此座標令該輸送部將該探針卡被該標示單元標記之位置直接輸送至該校正部之工作位置。In an embodiment, the working platform is provided with an optical ruler for generating the coordinates of the position marked by the marking unit, and using the coordinates to cause the conveying section to directly transfer the position of the probe card to the position marked by the marking unit to The working position of the correction section.
而本發明之上述目的與優點,不難從下述所選用實施例之詳細說明與附圖中獲得深入了解。The above-mentioned objects and advantages of the present invention can be easily understood from the detailed description and accompanying drawings of selected embodiments below.
請參閱第1圖,所示者為本發明提供之探針卡自動檢測與校正方法,本方法是以一探針卡自動檢測與校正裝置實施,該裝置如第2、3圖所示,其包括有一工作平台1,且於工作平台1上設有一立柱12,其中該立柱12設有一可沿高度方向移動之滑塊13,且該滑塊13上設有一量測部2及一校正部4。該量測部2包括有一影像擷取單元21及一影像比對單元22,其中該影像擷取單元21正對該工作平台1,用以擷取探針卡5之影像,而該影像比對單元22設於該量測部2中,其內建有一包含探針卡各腳位之標準位置的教導檔,包括有各腳位之位置及高度資訊,而該影像比對單元22乃依該影像擷取單元21所擷取之影像辨識該探針卡5之各腳位的位置。據此,該影像比對單元22可將各腳位的位置比對於該教導檔,進而辨識各腳位的位置是否出現偏差;其中關於各腳位之位置可透過觀察影像中之各腳位是否偏離於教導檔中的標準位置而得,而關於各腳位之高度則可透過觀察影像中之各腳位是否位於影像對焦之焦點判定之。例如第4圖所示,於此探針卡5之A區塊中有一偏離於標準位置之腳位(以下稱為錯誤腳位51),此腳位51可透過該影像比對單元經比較於教導檔而辨識出來,俾利於後續的校正作業。Please refer to FIG. 1, which shows the probe card automatic detection and calibration method provided by the present invention. This method is implemented by a probe card automatic detection and calibration device, which is shown in FIGS. 2 and 3. It includes a work platform 1 and a post 12 is provided on the work platform 1, wherein the post 12 is provided with a slider 13 capable of moving in the height direction, and a measurement section 2 and a correction section 4 are provided on the slider 13. . The measuring section 2 includes an image capturing unit 21 and an image comparing unit 22, wherein the image capturing unit 21 is directly opposite to the work platform 1 for capturing an image of the probe card 5, and the image is compared The unit 22 is set in the measuring unit 2. It has a built-in teaching file containing the standard position of each foot of the probe card, including the position and height information of each foot. The image comparison unit 22 is based on the image. The image captured by the capturing unit 21 identifies the positions of the pins of the probe card 5. According to this, the image comparison unit 22 can compare the position of each foot to the teaching file, and then identify whether there is a deviation in the position of each foot; among them, the position of each foot can be observed by observing whether each foot in the image is It is obtained by deviating from the standard position in the teaching file, and the height of each foot position can be determined by observing whether each foot position in the image is in the focus of the image focus. For example, as shown in Figure 4, there is a pin that deviates from the standard position in block A of the probe card 5 (hereinafter referred to as the wrong pin 51). This pin 51 can be compared with the image comparison unit through It can be identified by the teaching file, which is conducive to subsequent calibration operations.
承上,該量測部2更包括有一標示單元23,用以標記探針卡5之腳位的位置。於本發明中,該標示單元23乃針對被該影像比對單元22辨識為錯誤之腳位進行標記。於本實施例中,該工作平台1設有光學尺11,用以產生該標示單元23所標記之位置的座標,其中該工作平台1上設有沿相互垂直且定義為X軸及Y軸延伸之兩個光學尺11,分別產生此二個軸向的座標資訊,而該錯誤腳位之座標被該標示單元23所記錄。The measuring unit 2 further includes a marking unit 23 for marking the position of the foot of the probe card 5. In the present invention, the labeling unit 23 is used to mark the pin identified by the image comparison unit 22 as an error. In this embodiment, the working platform 1 is provided with an optical ruler 11 for generating coordinates of the position marked by the marking unit 23, and the working platform 1 is provided with extending along the mutually perpendicular and defined as the X axis and the Z axis. The two optical scales 11 respectively generate coordinate information of the two axes, and the coordinates of the wrong foot positions are recorded by the marking unit 23.
此外,該量測部2又設有一計算單元24,該計算單元24用以將被該影像比對單元22辨識為錯誤之腳位的位置與該標準位置比較,並計算二者投影於該工作平台1上之差距的位移向量。如第4圖所示,該計算單元可計算該錯誤腳位51與標準位置之位置差距,而得一位移向量D。In addition, the measuring unit 2 is provided with a calculation unit 24 for comparing the position of the foot identified as an error by the image comparison unit 22 with the standard position, and calculating the projection of the two onto the work. The displacement vector of the gap on platform 1. As shown in FIG. 4, the calculation unit can calculate the position difference between the wrong foot position 51 and the standard position to obtain a displacement vector D.
另一方面,該校正部4設於該滑塊13上,且該校正部4設有一用以控制探針卡5之腳位的控制件41,其可隨該滑塊13產生沿高度方向之位移。該控制件41之尖端具有可抵接探針卡5腳位且可對其形成控制之結構,並於該工作平台1上對應有一工作位置。On the other hand, the correction section 4 is provided on the slider 13, and the correction section 4 is provided with a control member 41 for controlling the foot position of the probe card 5, which can generate a height along the slider 13 along the height direction. Displacement. The tip of the control member 41 has a structure that can abut the 5-pin position of the probe card and can control it, and has a working position corresponding to the working platform 1.
再者,該工作平台1上設有一輸送部3,該輸送部3設有一用以承載探針卡5之載台31,而該輸送部3可帶動該載台31於該工作平台1上進行沿X軸及Y軸之二維方向的位移,藉此帶動該載台31上之探針卡5於該量測部2與該校正部4之間移動。於本實施例中,標示單元23於探針卡5上標記出錯誤腳位並記錄其座標後,該輸送部3即利用此座標將探針卡5被標記之位置直接輸送至該校正部4之工作位置,令該校正部4可立即對該錯誤腳位進行校正。Furthermore, the work platform 1 is provided with a conveying section 3, and the conveying section 3 is provided with a carrier 31 for carrying the probe card 5, and the conveying section 3 can drive the carrier 31 to be carried on the work platform 1. The two-dimensional displacement along the X-axis and the Z-axis causes the probe card 5 on the stage 31 to move between the measurement section 2 and the correction section 4. In this embodiment, after the marking unit 23 marks the wrong pin position on the probe card 5 and records its coordinates, the conveying unit 3 uses this coordinate to directly convey the marked position of the probe card 5 to the correcting unit 4 The working position allows the correction section 4 to immediately correct the wrong foot position.
而本發明之探針卡檢測方法應用上述裝置,其步驟如第1圖所示,包括有: 將探針卡置於載台上,並移動至量測部處; 以影像擷取單元擷取探針卡之影像,且以影像比對單元加以辨識探針卡之腳位的位置; 以標示單元針對各個位置偏離於標準位置的腳位進行標記; 以計算單元計算偏離之腳位與標準位置之差距的位移向量; 以輸送部將載台上之探針卡輸送至校正部;其中輸送部將探針卡被標示單元標記之位置直接輸送至該校正部之工作位置; 以該校正部控制該錯誤腳位,並藉由該輸送部與該校正部之間依該位移向量的相對移動進行該錯誤腳位之校正; 以輸送部將探針卡被標示單元標記之另一個位置直接輸送至該校正部之工作位置,並以校正部校正被標記之腳位。The probe card detection method of the present invention applies the above-mentioned device, and the steps thereof are as shown in FIG. 1, including: placing the probe card on a stage and moving it to the measuring section; 撷 capturing with an image capturing unit The image of the probe card, and the position of the foot of the probe card is identified by the image comparison unit; the marking unit is used to mark the positions of the feet that deviate from the standard position; the calculation unit is used to calculate the deviated feet and the standard position The displacement vector of the gap; The probe card on the stage is conveyed to the correction section by the conveying section; wherein the conveyance section directly conveys the position marked by the labeling unit of the probe card to the working position of the correction section; 控制 is controlled by the correction section The wrong foot position is corrected by the relative movement of the displacement vector between the conveying part and the correction part according to the displacement vector; The conveying part directly conveys another position of the probe card marked by the marking unit to the The working position of the correction unit, and the marked foot position is corrected by the correction unit.
於本實施例中,上述檢測方法於開始進行之前,更包括先於量測部輸入關於探針卡腳位之標準位置的教導檔,以作為影像比對單元之比對基礎,藉此在後續擷取待檢測之探針卡的影像後,由該影像比對單元將其比對於該教導檔,進而辨識探針卡之腳位的位置是否出現偏差,若有如第4圖所示出現錯誤腳位51的情形,則該標示單元即加以標記。其中更進一步地界定,該標示單元乃針對各個位置偏離於標準位置且超出公差值的腳位進行標記,再透過輸送部輸送至校正部加以校正。而當該標示單元標記出錯誤腳位後,將記錄其位置,其中於本實施例中可藉由光學尺產生該位置之座標資訊,而該輸送部即利用此座標將探針卡被標記之位置直接輸送至該校正部之工作位置,令該校正部可立即對該錯誤腳位進行校正。In this embodiment, before the above detection method is started, the method further includes inputting a teaching file about the standard position of the probe card pin position before the measurement section as the comparison basis of the image comparison unit, so as to follow up After capturing the image of the probe card to be detected, the image comparison unit will compare it to the teaching file, and then identify whether the position of the probe card's foot position is misaligned. If there is an incorrect foot as shown in Figure 4 In the case of bit 51, the marking unit is marked. It is further defined that the marking unit marks the positions of the feet whose positions deviate from the standard position and exceed the tolerance value, and then conveyed to the correction section for correction by the conveying section. When the marking unit marks the wrong pin position, its position will be recorded. In this embodiment, the coordinate information of the position can be generated by an optical ruler, and the conveyance unit uses this coordinate to mark the probe card with The position is directly transferred to the working position of the correction section, so that the correction section can immediately correct the wrong foot position.
上述探針卡之腳位的校正如第5圖所示,其係利用該輸送部3將該探針卡5之錯誤腳位51移動至該校正部之工作位置後,該滑塊帶動該控制件41往下移動,使該控制件41抵接該錯誤腳位51並加以控制,接著藉由該輸送部3與該校正部4之間依該位移向量D的相對移動進行該錯誤腳位51之校正;於本實施例中,係由該輸送部3依該計算單元計算該錯誤腳位51與標準位置之差距的位移向量D帶動該載台31及該探針卡5移動,而該校正部4之控制件41不動,藉以相對地扳動該錯誤腳位51,使其回到標準位置而完成校正。The above-mentioned correction of the foot position of the probe card is shown in FIG. 5. After the wrong foot position 51 of the probe card 5 is moved to the working position of the correction part by the conveying part 3, the slider drives the control. The piece 41 moves downwards, so that the control piece 41 abuts the wrong foot position 51 and controls it, and then the wrong foot position 51 is performed by the relative movement between the conveying part 3 and the correction part 4 according to the displacement vector D. In this embodiment, the conveyance unit 3 calculates the displacement vector D of the difference between the wrong foot position 51 and the standard position according to the calculation unit to drive the stage 31 and the probe card 5 to move, and the correction The control part 41 of the part 4 does not move, so that the wrong foot position 51 is relatively pulled to return it to the standard position to complete the correction.
接著,上述之檢測方法於校正部對探針卡之腳位進行校正後,更包括有以輸送部將探針卡輸送至量測部重行檢測之步驟,其中此步驟僅對探針卡先前被標示單元標記之腳位進行檢測,藉此可縮小檢測範圍以縮短檢測所需的時間,且同時兼顧檢測結果的正確性。而本方法將持續循環地進行,直至探針卡上已無錯誤腳位被標記出來,即可完成探針卡的檢測。Next, the above-mentioned detection method further includes the step of transporting the probe card to the measuring section and re-detecting it after the calibration section corrects the foot position of the probe card. This step is only for the probe card that was previously The feet of the marking unit mark are tested, thereby reducing the detection range to shorten the time required for the detection, while taking into account the accuracy of the detection results. The method will continue to be performed in a loop until the error-free pins on the probe card are marked, and then the detection of the probe card can be completed.
惟,以上實施例之揭示僅用以說明本發明,並非用以限制本發明,故舉凡等效元件之置換仍應隸屬本發明之範疇。However, the disclosure of the above embodiments is only used to illustrate the present invention and is not intended to limit the present invention. Therefore, the replacement of equivalent components should still belong to the scope of the present invention.
綜上所述,可使熟知本項技藝者明瞭本發明確可達成前述目的,實已符合專利法之規定,爰依法提出申請。In summary, those skilled in the art can understand that the present invention can indeed achieve the aforementioned purpose, and it has indeed complied with the provisions of the Patent Law, and filed an application in accordance with the law.
1‧‧‧工作平台 ‧‧‧Working Platform
11‧‧‧光學尺 11‧‧‧ optical ruler
12‧‧‧立柱 12‧‧‧ post
13‧‧‧滑塊 13‧‧‧ slider
2‧‧‧量測部 ‧‧‧Measurement Department
21‧‧‧影像擷取單元 21‧‧‧Image Acquisition Unit
22‧‧‧影像比對單元 22‧‧‧Image Comparison Unit
23‧‧‧標示單元 23‧‧‧Marking unit
24‧‧‧計算單元 24‧‧‧ Computing Unit
3‧‧‧輸送部 ‧‧‧ Conveying Department
31‧‧‧載台 31‧‧‧ carrier
4‧‧‧校正部 4‧‧‧ Calibration Department
41‧‧‧控制件 41‧‧‧Control
5‧‧‧探針卡 5‧‧‧ Probe Card
51‧‧‧錯誤腳位 51 · ‧‧ wrong foot position
D‧‧‧位移向量 D‧‧‧ displacement vector
第1圖為本發明之方法的流程圖; 第2圖為本發明之裝置的立體示意圖; 第3圖為本發明之裝置的架構方塊示意圖; 第4圖為具有錯誤腳位之探針卡的示意圖; 第5圖為本發明之裝置校正探針卡的使用狀態示意圖。Figure 1 is a flowchart of the method of the present invention; Figure 2 is a schematic perspective view of the device of the present invention; Figure 3 is a schematic block diagram of the device of the present invention; Figure 4 is a probe card with an incorrect pin position Schematic diagram; Figure 5 is a schematic diagram of the use of the device calibration probe card of the present invention.
Claims (7)
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