TWI535650B - Ozone generating device - Google Patents
Ozone generating device Download PDFInfo
- Publication number
- TWI535650B TWI535650B TW102144641A TW102144641A TWI535650B TW I535650 B TWI535650 B TW I535650B TW 102144641 A TW102144641 A TW 102144641A TW 102144641 A TW102144641 A TW 102144641A TW I535650 B TWI535650 B TW I535650B
- Authority
- TW
- Taiwan
- Prior art keywords
- reaction chamber
- tube
- ozone generating
- space
- generating device
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
Description
本揭露是有關於一種臭氧(O3)產生裝置，且特別是有關於一種具有進氣緩衝空間的臭氧產生裝置。 The present disclosure relates to an ozone (O 3 ) generating device, and more particularly to an ozone generating device having an intake buffer space.
臭氧具有強氧化特性，是世界公認的高效殺菌劑，可分解或消除對環境或健康有危險的物質。目前在許多國家和地區，臭氧都受到廣泛的應用，如用在飲用水消毒、醫用水消毒等領域。 Ozone has strong oxidizing properties and is recognized as a highly effective fungicide in the world. It can decompose or eliminate substances that are dangerous to the environment or health. At present, ozone is widely used in many countries and regions, such as disinfection in drinking water and disinfection of medical water.
現今的臭氧產生機產生臭氧的方式主要可分為以下兩種。(1)電暈放電(corona discharge)：將氣體通入二電極板間，使電子在電極之間移動，這些電子提供能量，游離氧分子，以產生臭氧，其原理類似自然界的電擊現象。當通入的氣體為一般空氣時，由於空氣中含有許多的氮，因此除了產生臭氧外也會產生許多氮化合物(NOx，如二氧化氮等)，此類氮化合物具有腐蝕性，對人體有害，是電暈放電法最大的缺點。此外，用於此法的裝置，放電氣體會直接接觸到金屬電極，易使金屬電極腐蝕，其可能產生金屬鏽蝕的粉塵而混入O3之中，不利於後續的臭氧應用。(2)UV光化學式：低壓汞燈的紫外光(UV)，在波長小於243nm時，可將空氣中的氧分子解離形成臭氧，但由於汞燈的放射光譜中，波長185nm的比例較低，只佔整體光譜能量的7%~15%，因此大部份汞燈的能量都無法用來將氧分子解離為臭氧，因此目前市面上UV光化學式的臭氧產 生器只適用於製造少量臭氧，濃度例如大致介於100到200ppm。此外，用於此法的裝置往往需要比較長的暖機時間，因此O3的生成量不易控制，且生成的O3會吸收波長254nm的紫外光還原成O2。凡此種種，構成了對更進步的臭氧產生裝置的迫切需求。 The way in which ozone generators produce ozone today is mainly divided into the following two types. (1) Corona discharge: The gas is introduced between the two electrode plates to move electrons between the electrodes. These electrons provide energy and free oxygen molecules to generate ozone. The principle is similar to the electric shock phenomenon in nature. When the feed gas is generally air, since the air contains a lot of nitrogen, so in addition to the generation of ozone will be generated outside of many nitrogen compounds (NO x, such as nitrous oxide, etc.), a nitrogen compound such corrosive to human Harmful is the biggest drawback of corona discharge. In addition, in the device used in this method, the discharge gas directly contacts the metal electrode, which easily corrodes the metal electrode, which may cause metal rust dust to be mixed into O 3 , which is disadvantageous for subsequent ozone application. (2) UV photochemical formula: ultraviolet light (UV) of a low-pressure mercury lamp, when the wavelength is less than 243 nm, the oxygen molecules in the air can be dissociated to form ozone, but due to the lower ratio of the wavelength of 185 nm in the emission spectrum of the mercury lamp, It only accounts for 7% to 15% of the total spectral energy. Therefore, most of the mercury lamp energy cannot be used to dissociate oxygen molecules into ozone. Therefore, the current UV photochemical ozone generator on the market is only suitable for producing a small amount of ozone. For example, it is roughly between 100 and 200 ppm. In addition, the apparatus used in this method often requires a relatively long warm-up time, so the amount of O 3 generated is not easily controlled, and the generated O 3 absorbs ultraviolet light having a wavelength of 254 nm to be reduced to O 2 . All of this constitutes an urgent need for more advanced ozone generating devices.
本揭露提供一種臭氧產生裝置，可以提高臭氧的濃度和產率。 The present disclosure provides an ozone generating device that can increase the concentration and yield of ozone.
本揭露的臭氧產生裝置包括反應腔體、紫外光源和第一燈管保護套。反應腔體包括第一端面、第二端面以及與第一及第二端面連接的側壁。紫外光源置於反應腔體內，且與反應腔體的側壁之間形成氣體反應空間。第一燈管保護套具有底部和套體以定義出一容置空間，其中紫外光源的一端置於該容置空間內，且第一燈管保護套的底部、反應腔體的第一端面和反應腔體的側壁的一部分共同定義出進氣緩衝空間。當氣體經由進氣口通入反應腔體時，先流入進氣緩衝空間，再流入氣體反應空間。 The ozone generating device of the present disclosure includes a reaction chamber, an ultraviolet light source, and a first lamp protection cover. The reaction chamber includes a first end surface, a second end surface, and side walls connected to the first and second end surfaces. The ultraviolet light source is placed in the reaction chamber and a gas reaction space is formed between the side walls of the reaction chamber. The first lamp protection sleeve has a bottom portion and a sleeve body to define an accommodation space, wherein one end of the ultraviolet light source is disposed in the accommodation space, and the bottom of the first lamp tube protection sleeve, the first end surface of the reaction cavity body, and A portion of the sidewall of the reaction chamber collectively defines an intake buffer space. When the gas is introduced into the reaction chamber through the air inlet, it first flows into the air intake buffer space and then flows into the gas reaction space.
基於上述，本揭露提供的臭氧產生裝置具有特別的氣體流場設計。透過在第一燈管保護套和反應腔體的第一端面之間形成進氣緩衝空間，可以讓氣體的分布更為均勻，藉此，產生的臭氧濃度相當高。 Based on the above, the ozone generating device provided by the present disclosure has a special gas flow field design. By forming an intake buffer space between the first lamp protection cover and the first end surface of the reaction chamber, the gas distribution can be made more uniform, whereby the ozone concentration generated is relatively high.
為讓本揭露的上述特徵和優點能更明顯易懂，下文特舉實施例作詳細說明如下。 The above features and advantages of the present invention will become more apparent from the following detailed description.
100、600‧‧‧臭氧產生裝置 100, 600‧‧‧Ozone generating device
102‧‧‧反應腔體 102‧‧‧Reaction chamber
102a‧‧‧第一端面 102a‧‧‧ first end face
102b‧‧‧第二端面 102b‧‧‧second end face
102c‧‧‧側壁 102c‧‧‧ side wall
102d‧‧‧進氣口 102d‧‧‧air inlet
102e‧‧‧排氣口 102e‧‧‧Exhaust port
104、304、404‧‧‧紫外光源 104, 304, 404‧‧‧ ultraviolet light source
106、206、207、217、306、606‧‧‧第一燈管保護套 106, 206, 207, 217, 306, 606‧‧‧ first lamp protection cover
106a、122a‧‧‧底部 106a, 122a‧‧‧ bottom
106b、122b‧‧‧套體 106b, 122b‧‧‧
106c、122c‧‧‧容置空間 106c, 122c‧‧‧ accommodating space
108‧‧‧氣體反應空間 108‧‧‧ gas reaction space
110、210‧‧‧進氣緩衝空間 110, 210‧‧‧ intake buffer space
112、212‧‧‧進氣通道 112, 212‧‧‧ intake passage
114‧‧‧放電氣體 114‧‧‧discharge gas
116‧‧‧燈管 116‧‧‧Light tube
118、418‧‧‧外電極 118, 418‧‧‧ external electrodes
119‧‧‧高電壓源 119‧‧‧High voltage source
120、420‧‧‧內電極 120, 420‧‧‧ internal electrodes
121‧‧‧排氣緩衝空間 121‧‧‧Exhaust buffer space
122、322、622‧‧‧第二燈管保護套 122,322,622‧‧‧Second lamp protection cover
124‧‧‧排氣通道 124‧‧‧Exhaust passage
200、201‧‧‧溝槽 200, 201‧‧‧ trench
203‧‧‧貫穿孔 203‧‧‧through holes
219‧‧‧間隔構件 219‧‧‧ spacer members
302a、602a‧‧‧第一端蓋 302a, 602a‧‧‧ first end cap
302b、602b‧‧‧第二端蓋 302b, 602b‧‧‧ second end cap
302c、602c‧‧‧腔體外殼 302c, 602c‧‧‧ cavity shell
303‧‧‧支撐件 303‧‧‧Support
415‧‧‧內管 415‧‧‧ inner tube
416‧‧‧外管 416‧‧‧External management
622a、622b、622c‧‧‧組件 622a, 622b, 622c‧‧‧ components
623‧‧‧氣密構件 623‧‧‧ airtight components
625‧‧‧絕緣層 625‧‧‧Insulation
D1‧‧‧寬度 D 1 ‧‧‧Width
L1‧‧‧長度 L 1 ‧‧‧ length
R‧‧‧滯留區 R‧‧‧ detention area
圖1是根據本揭露第一實施例所繪示的臭氧產生裝置的剖面示意圖。 1 is a schematic cross-sectional view of an ozone generating apparatus according to a first embodiment of the present disclosure.
圖2A是根據本揭露的第二實施例繪示的一種臭氧產生裝置的局部放大圖。 2A is a partial enlarged view of an ozone generating device according to a second embodiment of the present disclosure.
圖2B和圖2C分別是圖2A的燈管保護套的上視圖和透視圖。 2B and 2C are top and perspective views, respectively, of the lamp guard of Fig. 2A.
圖3A是根據本揭露的第二實施例繪示的另一種臭氧產生裝置的局部放大圖。 FIG. 3A is a partial enlarged view of another ozone generating apparatus according to a second embodiment of the present disclosure.
圖3B和圖3C分別是圖3A的燈管保護套的上視圖和透視圖。 3B and 3C are top and perspective views, respectively, of the lamp guard of Fig. 3A.
圖4A是又一種臭氧產生裝置的局部放大圖。 4A is a partial enlarged view of still another ozone generating device.
圖4B和圖4C分別是圖4A的燈管保護套的上視圖和透視圖。 4B and 4C are top and perspective views, respectively, of the lamp guard of Fig. 4A.
圖5A是根據本揭露第三實施例所繪示的臭氧產生裝置的零件分解圖。 FIG. 5A is an exploded perspective view of an ozone generating apparatus according to a third embodiment of the present disclosure.
圖5B是圖5A的臭氧產生裝置的第一燈管保護套及其鄰近構件的剖面圖。 Figure 5B is a cross-sectional view of the first tube guard of the ozone generating device of Figure 5A and its adjacent members.
圖6是另一種由零件組裝而成的臭氧產生裝置的剖面示意圖。 Fig. 6 is a schematic cross-sectional view showing another ozone generating apparatus assembled from parts.
圖7是根據第四實施例所繪示的臭氧產生裝置的示意圖。 Fig. 7 is a schematic view of an ozone generating apparatus according to a fourth embodiment.
圖8A呈現了比較例1、比較例2和實驗例1的三種臭氧產生裝置在工作時，產生的臭氧濃度和時間的關係。 Fig. 8A shows the relationship between the concentration of ozone generated and the time during operation of the three ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1.
圖8B是比較例1、比較例2和實驗例1的臭氧產生裝置在不同流速條件下表現的產率。 Fig. 8B is a graph showing the yields of the ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1 under different flow rates.
圖8C是比較例2的臭氧產生裝置的剖面示意圖。 8C is a schematic cross-sectional view of the ozone generating apparatus of Comparative Example 2.
圖9A和圖9B呈現了實驗例2和實驗例3的臭氧產生裝置在工作時，產生的臭氧濃度和時間的關係。 9A and 9B show the relationship between the concentration of ozone generated and the time of the ozone generating apparatus of Experimental Example 2 and Experimental Example 3 during operation.
圖1是根據本揭露的第一實施例所繪示的臭氧產生裝置的剖面 示意圖。 1 is a cross section of an ozone generating apparatus according to a first embodiment of the present disclosure. schematic diagram.
請參照圖1，臭氧產生裝置100包括反應腔體102、紫外光源104和第一燈管保護套106。以下，將分別詳述這些構件的內部細節和相互作用關係。 Referring to FIG. 1, the ozone generating device 100 includes a reaction chamber 102, an ultraviolet light source 104, and a first tube protective cover 106. Hereinafter, the internal details and interaction relationships of these members will be separately described.
在本實施例中，反應腔體102包括第一端面102a、第二端面102b以及與第一端面102a及第二端面102b連接的側壁102c，其中，第一端面102a上設置有進氣口102d，第二端面102b上設有排氣口102e。在臭氧產生裝置100工作時，含有氧氣的氣體從進氣口102d進入反應腔體102，被紫外光源104照射激發，從而產生臭氧，再經由排氣口102e排出反應腔體102，以供下一步的利用。為了說明的清楚起見，在圖1中另以箭頭表示氣體的流向。 In this embodiment, the reaction chamber 102 includes a first end surface 102a, a second end surface 102b, and a sidewall 102c connected to the first end surface 102a and the second end surface 102b. The first end surface 102a is provided with an air inlet 102d. The second end surface 102b is provided with an exhaust port 102e. When the ozone generating device 100 is in operation, the oxygen-containing gas enters the reaction chamber 102 from the air inlet 102d, is excited by the ultraviolet light source 104, thereby generating ozone, and then exits the reaction chamber 102 through the exhaust port 102e for the next step. Use. For the sake of clarity of illustration, the flow direction of the gas is indicated by an arrow in FIG.
反應腔體102可以由任意的已知方法和任意的已知材料形成，舉例來說，其側壁102c可以由透明材料製成，例如玻璃或石英，也可以由金屬製成，而其第一端面102a和第二端面102b可以由金屬或其他材料製成。在這種例子裡，第一端面102a、第二端面102b和側壁102c可以是獨立構件，在各自成形之後才組裝在一起，這種組裝零件而構成反應腔體的例子將在後文舉例說明。當然，在其他的例子裡，一體成形的製程也是有可能的。 The reaction chamber 102 can be formed by any known method and any known material. For example, the side wall 102c can be made of a transparent material such as glass or quartz, or can be made of metal, and the first end face thereof. The 102a and second end faces 102b may be made of metal or other materials. In this example, the first end face 102a, the second end face 102b, and the side wall 102c may be separate members that are assembled after being formed separately. Examples of such a component to constitute a reaction cavity will be exemplified hereinafter. Of course, in other cases, an integrally formed process is also possible.
紫外光源104置於反應腔體102內，與反應腔體102的側壁102c之間形成氣體反應空間108。通入反應腔體102的氣體在氣體反應空間108中被紫外光源104照射而產生臭氧。氣體反應空間108的大小，亦即，紫外光源104和反應腔體102的側壁102c的距離，通常沒有特別限制。然而此距離可以經過調整，以達到最佳的臭氧產生效果。這種調整和紫外光源104光源的種類、空氣中氧氣的濃度有關，茲說明如下。 The ultraviolet light source 104 is placed within the reaction chamber 102 to form a gas reaction space 108 with the side wall 102c of the reaction chamber 102. The gas introduced into the reaction chamber 102 is irradiated by the ultraviolet light source 104 in the gas reaction space 108 to generate ozone. The size of the gas reaction space 108, that is, the distance between the ultraviolet light source 104 and the side wall 102c of the reaction chamber 102, is generally not particularly limited. However, this distance can be adjusted to achieve the best ozone production. This adjustment is related to the type of light source of the ultraviolet light source 104 and the concentration of oxygen in the air, as explained below.
紫外光源104可以是準分子燈(excimer lamp)。準分子燈是一種先進紫外光源，根據所使用的放電氣體種類不同，它可以產生不同波長之紫外光，其波長可分別落於紫外波段(ultraviolet，UV)和真空紫外波段(vacuum ultraviolet，VUV)，例如產生波長172nm的紫外光。由於準分子燈可以產生能量均一的紫外光，相較於一般電暈放電(corona discharge)的能量分布廣泛的電子，更不易激發空氣中的氮氣，這將使得臭氧產物的純度提高。此外，準分子燈也可提高臭氧的產率，並使點燈滅燈的時間加快至微秒(μs)等級。然而，172nm的紫外光在空氣中的穿透距離是有限的，如果紫外光源104和反應腔體102的側壁102c的距離太大，紫外光源104可能不足以讓離它太遠的氧氣轉變為臭氧，以至於一部分處於氣體反應空間108中的氧氣不起反應，這就降低了臭氧產生效率。因此，在紫外光源104是放射波長172nm的紫外光的準分子燈的例子裡，紫外光源104和反應腔體102的側壁102c之間的距離，較佳是控制成小於特定距離，例如小於3mm。如果通入反應腔體102的空氣中的氧濃度更高，例如通入的是純氧，則此距離或許還可進一步減小至1mm。 The ultraviolet light source 104 can be an excimer lamp. The excimer lamp is an advanced ultraviolet light source. It can generate different wavelengths of ultraviolet light depending on the type of discharge gas used. The wavelength can be in the ultraviolet (UV) and vacuum ultraviolet (VUV). For example, ultraviolet light having a wavelength of 172 nm is generated. Since the excimer lamp can generate uniform energy ultraviolet light, it is less likely to excite nitrogen in the air than the general energy distribution of the corona discharge, which will increase the purity of the ozone product. In addition, excimer lamps can also increase the yield of ozone and speed up the time to turn off the lights to the microsecond (μs) level. However, the penetration distance of 172 nm ultraviolet light in air is limited. If the distance between the ultraviolet light source 104 and the side wall 102c of the reaction chamber 102 is too large, the ultraviolet light source 104 may not be sufficient to convert oxygen which is too far away into ozone. So that a part of the oxygen in the gas reaction space 108 does not react, which reduces the ozone generation efficiency. Thus, in the example where the ultraviolet source 104 is an excimer lamp that emits ultraviolet light having a wavelength of 172 nm, the distance between the ultraviolet source 104 and the sidewall 102c of the reaction chamber 102 is preferably controlled to be less than a certain distance, such as less than 3 mm. If the concentration of oxygen in the air passing into the reaction chamber 102 is higher, such as pure oxygen, the distance may be further reduced to 1 mm.
以下以紫外光源104是準分子燈為例，對其進行更詳細的說明。在此例中，紫外光源104包括燈管116、外電極118、內電極120以及充填於燈管116中之放電氣體114。外電極118可以是網狀的金屬電極，且因此在剖面圖中被繪示成多個分離的線段。外電極118配置於燈管116的外壁上。內電極120可以是位於燈管116內的線狀電極。燈管116中填充有放電氣體114，例如氙氣(Xe)，其可以在被施予高電壓時產生氣體放電反應而放射出紫外光線。外電極118的一部分(圖1中的右側部分)和第一燈管保護套106接觸，且兩者電性連接，換言之，在本實施例中，外電極118藉由和第一燈管保護套106接觸而和反應腔體102電性連 接。至於內電極120則穿出反應腔體102，和反應腔體102電性絕緣。外電極118(以及與其電性連接的反應腔體102)可以接地(grounded)，而內電極120可連接到高電壓源119，藉此，得以對燈管116內的放電氣體114施予高電壓。 Hereinafter, the ultraviolet light source 104 is an excimer lamp as an example, and will be described in more detail. In this example, the ultraviolet light source 104 includes a bulb 116, an outer electrode 118, an inner electrode 120, and a discharge gas 114 that is filled in the bulb 116. The outer electrode 118 can be a meshed metal electrode and is thus depicted as a plurality of separate line segments in cross-section. The outer electrode 118 is disposed on the outer wall of the bulb 116. The inner electrode 120 can be a linear electrode located within the tube 116. The bulb 116 is filled with a discharge gas 114, such as helium (Xe), which can generate a gas discharge reaction to emit ultraviolet light when a high voltage is applied. A portion of the outer electrode 118 (the right portion in FIG. 1) is in contact with the first tube protective cover 106, and the two are electrically connected. In other words, in the present embodiment, the outer electrode 118 is protected by the first tube. 106 contacts and electrically connected to the reaction chamber 102 Pick up. As for the inner electrode 120, it passes through the reaction chamber 102 and is electrically insulated from the reaction chamber 102. The outer electrode 118 (and the reaction chamber 102 electrically connected thereto) may be grounded, and the inner electrode 120 may be connected to the high voltage source 119, whereby a high voltage is applied to the discharge gas 114 in the bulb 116. .
第一燈管保護套106固定在反應腔體102中，可以收納、支撐並保護紫外光源104，其材料沒有特別限制，但在本實施例中可以是鋁。第一燈管保護套106具有底部106a和套體106b，底部106a和套體106b定義出一容置空間106c，而紫外光源104的一端(在圖1中為右端)就置於容置空間106c內。套體106b的高度沒有特別限制，以足以收納紫外光源104為宜，當然，如果套體106b是由不透光的材料製成，則其高度不宜過大，以免遮蔽了紫外光源104產生的紫外光。至於套體106b的厚度也沒有特別限制，在一實例中，可以薄到約1mm左右。 The first lamp protection cover 106 is fixed in the reaction chamber 102, and can house, support and protect the ultraviolet light source 104. The material thereof is not particularly limited, but may be aluminum in this embodiment. The first lamp protection cover 106 has a bottom portion 106a and a sleeve body 106b. The bottom portion 106a and the sleeve body 106b define an accommodation space 106c, and one end of the ultraviolet light source 104 (the right end in FIG. 1) is placed in the accommodation space 106c. Inside. The height of the sleeve 106b is not particularly limited, so that it is sufficient to accommodate the ultraviolet light source 104. Of course, if the sleeve 106b is made of an opaque material, the height thereof should not be too large, so as to shield the ultraviolet light generated by the ultraviolet light source 104. . The thickness of the sleeve 106b is also not particularly limited, and in one example, it may be as thin as about 1 mm.
第一燈管保護套106的底部106a、反應腔體102第一端面102a和反應腔體102的側壁102c的一部分(在圖1中是最靠近第一端面102a的部分)共同定義出進氣緩衝空間110。從圖1可以清楚地看出，當氣體經由進氣口102d通入反應腔體102時，會先流入進氣緩衝空間110，在進氣緩衝空間110中均勻散布，再流入氣體反應空間108。這可以避免反應腔體102中產生氣體的滯留區，且由於改善了氣體的滯留現象，本實施例的臭氧產生裝置100可以提高臭氧的產率。此結果在下文將以實驗證實之。進氣緩衝空間110的長度L1不受特別限制，可以根據臭氧產生裝置100整體和各部件的尺寸加以調整，例如可以介於0.5mm到6mm之間。 The bottom portion 106a of the first tube protective cover 106, the first end surface 102a of the reaction chamber 102, and a portion of the side wall 102c of the reaction chamber 102 (the portion closest to the first end surface 102a in Fig. 1) collectively define an intake buffer Space 110. As is clear from FIG. 1, when the gas is introduced into the reaction chamber 102 via the intake port 102d, it flows into the intake buffer space 110 first, is evenly dispersed in the intake buffer space 110, and flows into the gas reaction space 108. This can avoid the retention zone in which the gas is generated in the reaction chamber 102, and the ozone generating apparatus 100 of the present embodiment can increase the yield of ozone due to the improvement of the gas retention phenomenon. This result will be confirmed experimentally below. The length L 1 of the intake buffer space 110 is not particularly limited and may be adjusted according to the overall size of the ozone generating apparatus 100 and the size of each component, and may be, for example, between 0.5 mm and 6 mm.
雖然在圖1中將進氣口102d繪示為配置在第一端面102a上，但本揭露其實不限於此。例如，進氣口102d也可以配置在側壁102c上比較靠近第一端面102a的位置，只要氣體經由進氣口102d進入反應腔體 102時，會先進入進氣緩衝空間110，再流入氣體反應空間108即可。 Although the air inlet 102d is illustrated as being disposed on the first end surface 102a in FIG. 1, the present disclosure is not limited thereto. For example, the air inlet 102d may also be disposed on the side wall 102c at a position closer to the first end surface 102a as long as the gas enters the reaction chamber via the air inlet 102d. At 102 o'clock, the air intake buffer space 110 is first entered and then flows into the gas reaction space 108.
此外，第一燈管保護套106的套體106b與反應腔體102的側壁102c之間構成進氣通道112。當氣體由進氣口102d通入反應腔體102時，氣體先流入進氣緩衝空間110，而後經由進氣通道112流入氣體反應空間108。進氣通道112的寬度，亦即套體106b和反應腔體102的側壁102c之間的距離，通常可以任意調整，在本實施例中，進氣通道112的寬度D1小於3mm。 In addition, an intake passage 112 is formed between the sleeve 106b of the first tube cover 106 and the side wall 102c of the reaction chamber 102. When the gas is introduced into the reaction chamber 102 from the intake port 102d, the gas first flows into the intake buffer space 110 and then flows into the gas reaction space 108 via the intake passage 112. An intake passage 112 has a width, i.e. the distance between the side walls 102c 106b and sleeve reaction chamber body 102, generally can be adjusted, in the present embodiment, the intake channel width D 1 112 is less than 3mm.
再者，臭氧產生裝置100還包括第二燈管保護套122。第二燈管保護套122的功能、材料、結構和位置可以和第一燈管保護套106相似或相應，其具有底部122a和套體122b，且由底部122a和套體122b定義出容置空間122c。紫外光源104的另一端(圖1中為左端)置於容置空間122c內。類似地，第二燈管保護套122的底部122a和反應腔體102的第二端面102b之間形成排氣緩衝空間121，排氣緩衝空間121和排氣口102e直接相通。同樣地，第二燈管保護套122的套體122b與反應腔體102的側壁102c間形成排氣通道124。因此，當氣體由進氣口102d通入反應腔體102時，氣體依序流入進氣緩衝空間110、進氣通道112、氣體反應空間108、排氣通道124和排氣緩衝空間121，最後經由排氣口102e流出反應腔體102。排氣緩衝空間121的存在可使氣體流場速度較為均一與平順，此有助於將含有高濃度臭氧的氣體排出反應腔體102，如果沒有排氣緩衝空間121的設置，含高濃度臭氧的氣體可能會滯留在反應腔體中流速較慢或亂流的區域，在短時間後又轉變回氧氣，而且即使再度被激發為臭氧，也會因被排出反應腔體的機率降低，因而降低臭氧的產率和濃度。 Furthermore, the ozone generating device 100 further includes a second tube protective cover 122. The function, material, structure and position of the second lamp protection cover 122 may be similar or corresponding to the first lamp tube cover 106, having a bottom portion 122a and a sleeve body 122b, and the accommodation space defined by the bottom portion 122a and the sleeve body 122b. 122c. The other end (left end in Fig. 1) of the ultraviolet light source 104 is placed in the accommodating space 122c. Similarly, an exhaust buffer space 121 is formed between the bottom portion 122a of the second tube protective cover 122 and the second end surface 102b of the reaction chamber 102, and the exhaust buffer space 121 and the exhaust port 102e are in direct communication. Similarly, an exhaust passage 124 is formed between the sleeve 122b of the second tube cover 122 and the side wall 102c of the reaction chamber 102. Therefore, when the gas is introduced into the reaction chamber 102 from the air inlet 102d, the gas sequentially flows into the intake buffer space 110, the intake passage 112, the gas reaction space 108, the exhaust passage 124, and the exhaust buffer space 121, and finally The exhaust port 102e flows out of the reaction chamber 102. The presence of the exhaust buffer space 121 allows the gas flow field velocity to be relatively uniform and smooth, which helps to discharge the gas containing the high concentration of ozone out of the reaction chamber 102. If there is no exhaust buffer space 121, the ozone concentration is high. The gas may stay in the reaction chamber where the flow rate is slow or turbulent, and after a short time, it will return to oxygen, and even if it is excited again, it will reduce the probability of being discharged from the reaction chamber. Yield and concentration.
其他屬於本實施例的特徵亦一併說明如下。在圖1中，紫外光 源104和反應腔體102的中心軸重合。在本實施例中，反應腔體102呈管狀，因此，如果對進氣緩衝空間110取一和前述中心軸垂直的截面，此截面會是圓形截面；如果對進氣通道112取一和前述中心軸垂直的截面，此截面是環形截面。在本實施例中，圓形截面的面積可以大於或等於環形截面的面積，以促進氣體緩衝和氣體分布的效果。 Other features pertaining to the present embodiment are also described below. In Figure 1, ultraviolet light The source 104 coincides with the central axis of the reaction chamber 102. In the present embodiment, the reaction chamber 102 has a tubular shape. Therefore, if the intake buffer space 110 is taken to have a cross section perpendicular to the central axis, the cross section may be a circular cross section; if the intake passage 112 is taken one and the foregoing A section perpendicular to the central axis, which is a circular section. In this embodiment, the area of the circular cross section may be greater than or equal to the area of the annular cross section to promote the effects of gas buffering and gas distribution.
圖1雖然繪示了第一燈管保護套106和第二燈管保護套122的一種可能態樣，但這只是多種可能中的一種而已。只要第一燈管保護套的實體結構能夠提供進氣緩衝空間，且又能讓氣體均勻地流入氣體反應空間，就能滿足本揭露的目的。以下舉例說明數種其他的可能態樣。 Although FIG. 1 illustrates one possible aspect of the first lamp protector 106 and the second lamp protector 122, this is only one of many possibilities. As long as the physical structure of the first lamp protection cover can provide an air intake buffer space and allow gas to flow uniformly into the gas reaction space, the object of the present disclosure can be satisfied. The following examples illustrate several other possible aspects.
圖2A是根據本揭露的第二實施例繪示的一種臭氧產生裝置的局部放大圖。圖2A著重繪示了第一燈管保護套以及其附近的構件，亦即，僅繪出反應腔體102、其第一端面102a和側壁102c、紫外光源104、進氣口102d以及第一燈管保護套206。 2A is a partial enlarged view of an ozone generating device according to a second embodiment of the present disclosure. 2A is a schematic view of the first lamp protection cover and the components in the vicinity thereof, that is, only the reaction cavity 102, the first end surface 102a and the side wall 102c, the ultraviolet light source 104, the air inlet 102d, and the first lamp are depicted. Tube protector 206.
圖2A和圖1所繪示的實施例的差異在於，圖2A中的第一燈管保護套206緊貼著第一端面102a和反應腔體102的側壁102c。儘管如此，仍可以透過結構上的設計，使進氣緩衝空間和進氣通道得以實現，茲說明如下。 The difference between the embodiment illustrated in Figures 2A and 1 is that the first tube guard sleeve 206 of Figure 2A abuts the first end face 102a and the side wall 102c of the reaction chamber 102. Nevertheless, the intake buffer space and the intake passage can be realized through the structural design, as explained below.
圖2B和圖2C分別是圖2A的第一燈管保護套206的上視圖和透視圖。 2B and 2C are top and perspective views, respectively, of the first tube guard 206 of FIG. 2A.
請參照圖2A、圖2B和圖2C，在此例中，第一燈管保護套206上形成有多個溝槽200，該些溝槽200自第一燈管保護套206的底部起始，放射狀地延伸至其套體。雖然圖中繪示了八道溝槽，但是溝槽的數量其實沒有特別限制。在第一燈管保護套206底部的溝槽200會和第一端面102a共同形成進氣緩衝空間210，在其套體上的溝槽200和反應腔體102 的側壁102c構成多條進氣通道212。當氣體由進氣口102d通入反應腔體102時，氣體流入進氣緩衝空間210，再經由進氣通道212流入氣體反應空間。每一溝槽200的深度可以相同或互不相同，且也沒有特別限制，只要氣體可以通過即可，例如可以小於1mm。 Referring to FIG. 2A, FIG. 2B and FIG. 2C, in this example, the first lamp protection cover 206 is formed with a plurality of grooves 200 starting from the bottom of the first lamp protection cover 206. Radially extends to its casing. Although eight grooves are illustrated in the drawings, the number of grooves is not particularly limited. The groove 200 at the bottom of the first tube protection cover 206 and the first end surface 102a together form an intake buffer space 210, the groove 200 on the casing and the reaction chamber 102. The side wall 102c constitutes a plurality of intake passages 212. When the gas is introduced into the reaction chamber 102 from the intake port 102d, the gas flows into the intake buffer space 210, and then flows into the gas reaction space via the intake passage 212. The depth of each of the grooves 200 may be the same or different from each other, and is also not particularly limited as long as the gas can pass, for example, may be less than 1 mm.
圖3A是根據本揭露的第二實施例繪示的另一種臭氧產生裝置的局部放大圖。圖3B和圖3C分別是圖3A的第一燈管保護套的上視圖和透視圖。 FIG. 3A is a partial enlarged view of another ozone generating apparatus according to a second embodiment of the present disclosure. 3B and 3C are top and perspective views, respectively, of the first tube guard of Fig. 3A.
請參照圖3A、圖3B和圖3C，在此例中，第一燈管保護套207的底部形成有多個溝槽201。溝槽201自第一燈管保護套207底部的中心向外放射，延伸至底部的邊緣，從而提供進氣緩衝空間。在第一燈管保護套207的套體中形成有多個貫穿孔203。每一貫穿孔203和其中一條溝槽201相連通。當氣體由進氣口102d通入反應腔體102時，氣體先流入進氣緩衝空間，再經由該些貫穿孔203流入氣體反應空間。 Referring to FIG. 3A, FIG. 3B and FIG. 3C, in this example, a plurality of trenches 201 are formed at the bottom of the first tube protective cover 207. The groove 201 radiates outward from the center of the bottom of the first tube guard 207 and extends to the edge of the bottom to provide an intake buffer space. A plurality of through holes 203 are formed in the casing of the first tube protective cover 207. Each of the through holes 203 is in communication with one of the grooves 201. When the gas is introduced into the reaction chamber 102 from the inlet port 102d, the gas first flows into the intake buffer space, and then flows into the gas reaction space through the through holes 203.
圖4A繪示了另一種臭氧產生裝置的局部放大圖。圖4B和圖4C分別是圖4A的燈管保護套的上視圖和透視圖。 4A is a partial enlarged view of another ozone generating device. 4B and 4C are top and perspective views, respectively, of the lamp guard of Fig. 4A.
請參照圖4A、圖4B和圖4C，在此例中，第一燈管保護套217的底部上設置有間隔構件219。間隔構件219抵靠在腔體102的第一端面102a上，藉此，進氣緩衝空間形成在第一燈管保護套217的底部和第一端面102a之間。換言之，在此例中，進氣緩衝空間的長度是由間隔構件219的高度決定的。和圖3A到圖3C所繪的例子相同的是，在第一燈管保護套217的套體中也形成有多個貫穿孔203。每一貫穿孔203均和進氣緩衝空間相連通。當氣體由進氣口102d通入反應腔體102時，氣體先流入進氣緩衝空間，再經由該些貫穿孔203流入氣體反應空間。 Referring to FIG. 4A, FIG. 4B and FIG. 4C, in this example, a spacer member 219 is disposed on the bottom of the first tube protective cover 217. The spacer member 219 abuts against the first end face 102a of the cavity 102, whereby the intake buffer space is formed between the bottom of the first lamp guard 217 and the first end face 102a. In other words, in this example, the length of the intake buffer space is determined by the height of the spacer member 219. Similar to the example depicted in FIGS. 3A to 3C, a plurality of through holes 203 are also formed in the casing of the first tube cover 217. Each of the through holes 203 is in communication with the intake buffer space. When the gas is introduced into the reaction chamber 102 from the inlet port 102d, the gas first flows into the intake buffer space, and then flows into the gas reaction space through the through holes 203.
請再參照圖1，圖1繪示的是臭氧產生裝置的整體構造，如同前 文描述過的，臭氧產生裝置可以是由多個零件組裝而成的。為此，圖5A和圖6給出了另外兩種實施例，其細節和圖1所繪的可能有些許差異，然而，讓氣體先進入進氣緩衝空間再進入氣體反應空間的效果是一樣的。 Please refer to FIG. 1 again. FIG. 1 shows the overall structure of the ozone generating device, as before. As described herein, the ozone generating device can be assembled from a plurality of parts. To this end, Figures 5A and 6 show two other embodiments, the details of which may differ slightly from those depicted in Figure 1, however, the effect of allowing gas to enter the intake buffer space and then enter the gas reaction space is the same. .
圖5A是根據本揭露第三實施例所繪示的臭氧產生裝置的零件分解圖。由此圖可說明本發明裝置的拆解與組裝之便利性。 FIG. 5A is an exploded perspective view of an ozone generating apparatus according to a third embodiment of the present disclosure. This figure illustrates the ease of disassembly and assembly of the device of the present invention.
請參照圖5A，臭氧產生裝置的零件包括第一端蓋302a、第二端蓋302b、腔體外殼302c、紫外光源304、第一燈管保護套306和第二燈管保護套322。如圖的虛線線框所示，許多構件具有相互對應的螺紋，因此適合以螺紋結合的方式固定在一起。例如，第一端蓋302a、第二端蓋302b和腔體外殼302c就可以結合在一起以構成反應腔體。值得注意的是，在第一燈管保護套306和腔體外殼302c之間有數個球形的支撐件303，用以定位第一燈管保護套306。這和第一實施例中第一燈管保護套106的定位方式是不同的。當然，球形的支撐件303彼此之間是有間隔的，因此不會影響氣體從進氣之處流入反應腔體的中心處。有關此點，還可以參照圖5B，其呈現的是沿著反應腔體的軸向觀察第一燈管保護套306及其鄰近構件所得的側向剖面圖。雖然圖5A繪示了以螺紋將對應的組件結合起來的實施例，但是本發明並不以此為限，在其他實施例中，當然也可以使用任意的其他已知手段來結合臭氧產生裝置的零件。 Referring to FIG. 5A, the components of the ozone generating device include a first end cap 302a, a second end cap 302b, a cavity housing 302c, an ultraviolet light source 304, a first tube guard 306, and a second tube guard 322. As shown by the dashed line frame, many of the members have mutually corresponding threads and are therefore suitable for being secured together in a threaded manner. For example, the first end cap 302a, the second end cap 302b, and the cavity housing 302c can be joined together to form a reaction chamber. It should be noted that there are a plurality of spherical support members 303 between the first lamp tube cover 306 and the cavity housing 302c for positioning the first lamp tube cover 306. This is different from the positioning of the first lamp protection cover 106 in the first embodiment. Of course, the spherical supports 303 are spaced apart from one another so as not to affect the flow of gas from the inlet to the center of the reaction chamber. In this regard, reference is also made to Figure 5B, which is a side cross-sectional view of the first tube guard 306 and its adjacent members as viewed along the axial direction of the reaction chamber. Although FIG. 5A illustrates an embodiment in which the corresponding components are combined by threads, the present invention is not limited thereto. In other embodiments, any other known means may be used in combination with the ozone generating device. Components.
圖6是另一種由零件組裝而成的臭氧產生裝置的剖面示意圖，和圖5A不同的是，圖6繪示的是組裝完成以後的臭氧產生裝置。 Fig. 6 is a schematic cross-sectional view showing another ozone generating apparatus assembled from parts. Unlike Fig. 5A, Fig. 6 shows an ozone generating apparatus after assembly.
請參照圖6，臭氧產生裝置600的基本構件包括第一端蓋602a、第二端蓋602b、腔體外殼602c、紫外光源104(和圖1所繪的相同)、第一燈管保護套606和第二燈管保護套622。第一端蓋602a、腔體外殼602c和第一燈管保護套606是以金屬(例如鋁)製成的，且第一端 蓋602a和腔體外殼602c透過第一燈管保護套606和紫外光源104的外電極118電性連接，使外電極118接地。為了激發氙氣進而產生紫外光，紫外光源104的內電極120和外電極118之間通常要有很高的跨壓，因此，內電極120和外電極118之間必須保持電性絕緣。為此，以絕緣材料製成第二端蓋602b，絕緣材料的例子可以是採用一般的工程塑膠，例如：鐵氟龍(PTFE)或聚醚醚酮(poly(ether-ether-ketone)；PEEK)。 Referring to FIG. 6, the basic components of the ozone generating device 600 include a first end cap 602a, a second end cap 602b, a cavity housing 602c, an ultraviolet light source 104 (same as that depicted in FIG. 1), and a first tube protective cover 606. And a second lamp cover 622. The first end cap 602a, the cavity housing 602c and the first tube protective sleeve 606 are made of metal (for example, aluminum), and the first end The cover 602a and the cavity housing 602c are electrically connected to the outer electrode 118 of the ultraviolet light source 104 through the first lamp tube cover 606 to ground the outer electrode 118. In order to excite the helium gas and thereby generate ultraviolet light, a high voltage across the inner electrode 120 and the outer electrode 118 of the ultraviolet light source 104 is generally required. Therefore, electrical insulation must be maintained between the inner electrode 120 and the outer electrode 118. To this end, the second end cap 602b is made of an insulating material, and an example of the insulating material may be a general engineering plastic such as Teflon (PTFE) or poly(ether-ether-ketone); PEEK. ).
至於第二燈管保護套622，則是採用PEEK等工程塑膠來達到絕緣的效果，然而塑膠的加工性可能沒有金屬那麼優秀。為此，將第二燈管保護套622設計為由組件622a、組件622b和組件622c結合起來的構件。在和紫外光源104接觸的部分，第二燈管保護套622的套體的厚度應該要薄一些，因此使用較利於加工的金屬材料製作組件622a。在和第二端蓋602b接合的部分，由於型態較為複雜，也是用利於加工的金屬材料製作組件622c。兩者之間則以PEEK塑膠材料製作的組件622b區隔開來，以確保絕緣效果。此外，在第二燈管保護套622和第二端蓋602b的接合處還可以設置有氣密構件623(如O-ring)，以免氣體由該處逸出，另外第二燈管保護套622也可全部由金屬材質製成，只要在內電極120與保護套622之間加入一絕緣層625即可。 As for the second lamp protection cover 622, engineering plastics such as PEEK are used to achieve the insulation effect, but the processing property of the plastic may not be as good as that of the metal. To this end, the second lamp guard 622 is designed as a member that is joined by the assembly 622a, the assembly 622b, and the assembly 622c. In the portion in contact with the ultraviolet light source 104, the thickness of the sleeve of the second tube guard 622 should be thinner, so that the component 622a is made of a metal material that is more favorable for processing. In the portion joined to the second end cap 602b, the component 622c is also made of a metal material which is advantageous for processing because of a complicated type. The two are separated by a component 622b made of PEEK plastic material to ensure insulation. In addition, an airtight member 623 (such as an O-ring) may be disposed at the junction of the second lamp tube cover 622 and the second end cover 602b to prevent gas from escaping therefrom, and the second tube protection cover 622 All of them may be made of a metal material as long as an insulating layer 625 is interposed between the inner electrode 120 and the protective cover 622.
請再參照圖1，圖1中所繪示的紫外光源104是單一燈管的準分子燈。如同前文已經提過的，本揭露的紫外光源104不限於此。即使紫外光源104是準分子燈，其也不限於圖1所繪示者。例如，紫外光源104可以是雙層管的準分子燈，如圖7所示。 Referring again to FIG. 1, the ultraviolet light source 104 illustrated in FIG. 1 is an excimer lamp of a single lamp. As already mentioned above, the ultraviolet light source 104 of the present disclosure is not limited thereto. Even though the ultraviolet light source 104 is an excimer lamp, it is not limited to that shown in FIG. For example, the ultraviolet light source 104 can be an excimer lamp of a double tube, as shown in FIG.
圖7是根據第四實施例所繪示的臭氧產生裝置的示意圖，其中臭氧產生裝置大致和圖1所繪示的相同，兩者的差異之處僅在於紫外光源的構造。 FIG. 7 is a schematic diagram of an ozone generating apparatus according to a fourth embodiment, wherein the ozone generating apparatus is substantially the same as that illustrated in FIG. 1, and the difference is only in the configuration of the ultraviolet light source.
參照圖7，紫外光源404包括外管416、內管415、外電極418和內電極420。內管415位於外管416內，其中放電氣體114(例如Xe)填充在外管416以及內管415之間。外電極418配置於外管416的外壁上。內電極420配置於內管415的內壁上。作為一種準分子燈，紫外光源404的運作原理和第一實施例中描述的可以是完全相同的。差異在於，第一實施例中的內電極120必須要穿入燈管116(如圖1)，才能激發放電氣體114。因此在內電極120穿入燈管116處通常必須要進行封合金屬(電極材料)和陶瓷(燈管材料)的步驟，平添製程的困難。在本實施例的這種雙層管的結構中，內電極420不需要穿過燈管，只是配置在內管415的內壁上，可以省去金屬和陶瓷封合的步驟。 Referring to FIG. 7, the ultraviolet light source 404 includes an outer tube 416, an inner tube 415, an outer electrode 418, and an inner electrode 420. The inner tube 415 is located within the outer tube 416 with a discharge gas 114 (e.g., Xe) filled between the outer tube 416 and the inner tube 415. The outer electrode 418 is disposed on the outer wall of the outer tube 416. The inner electrode 420 is disposed on the inner wall of the inner tube 415. As an excimer lamp, the operating principle of the ultraviolet light source 404 can be identical to that described in the first embodiment. The difference is that the inner electrode 120 in the first embodiment has to penetrate the bulb 116 (Fig. 1) to excite the discharge gas 114. Therefore, it is generally necessary to perform a step of sealing the metal (electrode material) and ceramic (light tube material) when the inner electrode 120 penetrates the bulb 116, which makes it difficult to add a process. In the structure of the double tube of this embodiment, the inner electrode 420 does not need to pass through the tube but is disposed on the inner wall of the inner tube 415, and the step of sealing the metal and ceramic can be omitted.
〈實驗〉 <experiment>
下文將參照實驗例，更具體地描述本揭露。雖然描述了以下實驗，但是在不逾越本揭露範疇之情況下，可適當地改變所用材料、其量及比率、處理細節以及處理流程等等。因此，不應根據下文所述的實驗對本揭露作出限制性的解釋。 The disclosure will be described more specifically below with reference to experimental examples. Although the following experiments are described, the materials used, their amounts and ratios, processing details, processing procedures, and the like can be appropriately changed without departing from the scope of the present disclosure. Therefore, the present disclosure should not be construed restrictively based on the experiments described below.
圖8A呈現了比較例1、比較例2和實驗例1的三種臭氧產生裝置在工作時，產生的臭氧濃度和時間的關係。圖8A所示的實驗均是在氣體流速18L/min的條件下進行。 Fig. 8A shows the relationship between the concentration of ozone generated and the time during operation of the three ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1. The experiments shown in Fig. 8A were all carried out under the conditions of a gas flow rate of 18 L/min.
比較例1是傳統的以市售汞燈(功率35W)為紫外光源的臭氧產生裝置(Ozone Technology，型號UV-10)。因為汞是液體，必須等待一段加溫的時間，才會轉變成蒸氣，氣體分子再受電子撞擊才會放出紫外光。因此，比較例1的臭氧產生裝置產生臭氧的速度較慢(圖中斜率較低)。比較例2是以準分子燈為紫外光源的臭氧產生裝置，其結構如圖8C所繪示。圖8C的臭氧產生裝置和圖6所繪示的本揭露的臭氧產生裝置 相似，其差異在於，在比較例2的臭氧產生裝置中，燈管保護套分別抵靠在腔體的兩個端面，而進氣口和排氣口分別設置在腔體的側壁上。氣體從進氣口通入以後，其移動路徑大致如圖8C中的箭頭所示，然而，在此設計下，由於臭氧產生裝置沒有進氣緩衝空間也沒有排氣緩衝空間，因此氣體不能均勻地散布在腔體內，也不能順利地往排氣口流動，反而在進氣處和排氣處都會形成滯留區R，使氣體困在燈管和腔體側壁之間。臭氧是一種半衰期很短的化合物，一旦滯留在反應腔體內，不久就又會轉變為氧氣，使得能量徒然耗費，而使臭氧產生裝置的產效、產能不佳。 Comparative Example 1 is a conventional ozone generating device (Ozone Technology, model UV-10) using a commercially available mercury lamp (power 35 W) as an ultraviolet light source. Because mercury is a liquid, it must wait for a period of warming before it is converted into a vapor. The gas molecules are then hit by electrons to emit ultraviolet light. Therefore, the ozone generating apparatus of Comparative Example 1 generates ozone at a relatively slow rate (the slope in the figure is low). Comparative Example 2 is an ozone generating device using an excimer lamp as an ultraviolet light source, and its structure is as shown in Fig. 8C. The ozone generating device of FIG. 8C and the ozone generating device of the present disclosure illustrated in FIG. Similarly, the difference is that in the ozone generating apparatus of Comparative Example 2, the lamp protective sleeves respectively abut against the two end faces of the cavity, and the intake port and the exhaust port are respectively disposed on the side walls of the cavity. After the gas is introduced from the air inlet, the moving path is substantially as shown by the arrow in FIG. 8C. However, in this design, since the ozone generating device has no intake buffer space and no exhaust buffer space, the gas cannot be uniformly distributed. Dispersed in the cavity, it can not smoothly flow to the exhaust port, but a trap zone R is formed at the intake and exhaust points, so that the gas is trapped between the lamp tube and the sidewall of the cavity. Ozone is a compound with a short half-life. Once it is retained in the reaction chamber, it will soon be converted into oxygen, which makes the energy in vain, and the ozone generator has poor productivity and productivity.
由於採用了準分子燈，和比較例1相較之下，比較例2的臭氧產生裝置產生臭氧的速度快了很多。然而由於前述設計上的缺陷，比較例1和2的最大臭氧濃度卻相去不遠。 Since the excimer lamp was used, the ozone generating device of Comparative Example 2 produced ozone much faster than Comparative Example 1. However, due to the aforementioned design defects, the maximum ozone concentrations of Comparative Examples 1 and 2 are not far behind.
實驗例1使用的是以準分子燈為紫外光源，且結構設計如圖6所示的臭氧產生裝置。就如同圖6和圖8C的差異僅在進氣緩衝空間和排氣緩衝空間的有無一樣，實驗例1和比較例2的差異也僅在於此；臭氧產生裝置的各個構件的材料、尺寸基本上都是相同的。在實驗例1中，準分子燈的燈管是石英管，長度140mm，金屬內電極穿入石英管中，金屬網狀外電極接地。在石英管內充填約300torr的Xe氣。啟動電壓1500V(60kHz)。這種準分子燈產生的就是波長約172nm的紫外光。 In Experimental Example 1, an excimer lamp was used as an ultraviolet light source, and the structure was designed as shown in Fig. 6. Just as the difference between FIG. 6 and FIG. 8C is only the presence or absence of the intake buffer space and the exhaust buffer space, the difference between Experimental Example 1 and Comparative Example 2 is also only here; the materials and dimensions of the respective members of the ozone generating device are basically They are all the same. In Experimental Example 1, the lamp of the excimer lamp was a quartz tube having a length of 140 mm, the metal inner electrode penetrated into the quartz tube, and the metal mesh outer electrode was grounded. The quartz tube was filled with about 300 torr of Xe gas. The starting voltage is 1500V (60kHz). This excimer lamp produces ultraviolet light having a wavelength of about 172 nm.
如圖8A所示，實驗例1的臭氧產生裝置不但產生臭氧的速度很快(在三條曲線中斜率最大)，最後能夠穩定達到的臭氧濃度也遠高於比較例1和比較例2，幾乎達到兩倍以上。這證實了本揭露的效果。 As shown in FIG. 8A, the ozone generating apparatus of Experimental Example 1 not only generates ozone rapidly (the slope is the largest among the three curves), but also the ozone concentration which can be stably achieved is much higher than that of Comparative Example 1 and Comparative Example 2, almost reaching More than twice. This confirms the effect of the present disclosure.
圖8B呈現的則是比較例1、比較例2和實驗例1的臭氧產生裝置在不同流速條件下表現的產率。參照圖8B，和比較例1相比，由於比較例2採用了準分子燈，其可以用相對較低的功率生成濃度相當的臭氧， 因此其產率有所提高。至於實驗例1的臭氧產生裝置，由於它獨特的結構設計(特別是進氣緩衝空間的設置)，其臭氧產率更是遠遠超過比較例1和2。 Fig. 8B shows the yields of the ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1 under different flow rates. Referring to FIG. 8B, in comparison with Comparative Example 1, since Comparative Example 2 employs an excimer lamp, it is possible to generate ozone of a comparable concentration with a relatively low power. Therefore, the yield thereof is improved. As for the ozone generating apparatus of Experimental Example 1, the ozone yield was far more than Comparative Examples 1 and 2 due to its unique structural design (especially the setting of the intake buffer space).
圖9A和圖9B呈現了實驗例2和實驗例3的臭氧產生裝置在工作時，產生的臭氧濃度和時間的關係。實驗均在氣體流速18L/min的條件下進行。實驗例2和實驗例3都使用如同圖6所繪的臭氧產生裝置。差異之處在於進氣緩衝空間的長度L1不同。實驗例2的L1是6mm。實驗例3的L1是0.5mm。由此可見，只要進氣緩衝空間存在，至少在其長度介於0.5mm和6mm之間時都能完成緩衝、均勻分布氣體的效果。 9A and 9B show the relationship between the concentration of ozone generated and the time of the ozone generating apparatus of Experimental Example 2 and Experimental Example 3 during operation. The experiments were all carried out under the conditions of a gas flow rate of 18 L/min. Both Experimental Example 2 and Experimental Example 3 used an ozone generating apparatus as depicted in Fig. 6. The difference is that the length L 1 of the intake buffer space is different. The L 1 of Experimental Example 2 was 6 mm. The L 1 of Experimental Example 3 was 0.5 mm. It can be seen that as long as the intake buffer space exists, at least the length between 0.5 mm and 6 mm can complete the effect of buffering and uniformly distributing the gas.
綜上所述，本揭露著重在臭氧產生裝置的氣體流場設計，且也可以兼顧製作和組裝的便利，亦不需太高成本。本揭露的設計使得外部氣體(例如空氣或是純氧氣)均勻地通過紫外光源的表面，如此，產生的臭氧濃度相當高，解決了當前使用紫外光源的臭氧產生裝置製作複雜、成本高、腔體容易破裂等問題。 In summary, the present disclosure focuses on the gas flow field design of the ozone generating device, and can also take into consideration the convenience of fabrication and assembly, and does not require too high cost. The design of the present disclosure makes the external gas (such as air or pure oxygen) uniformly pass through the surface of the ultraviolet light source, so that the ozone concentration generated is relatively high, and the ozone generating device currently using the ultraviolet light source is complicated to manufacture, and the cavity is complicated. Easy to break and other issues.
雖然已以實施例對本揭露作說明如上，然而，其並非用以限定本揭露。任何所屬技術領域中具有通常知識者，在不脫離本揭露的精神和範圍的前提內，當可作些許的更動與潤飾。故本申請案的保護範圍當以後附的申請專利範圍所界定者為準。 Although the present disclosure has been described above by way of examples, it is not intended to limit the disclosure. Any person having ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of this application is subject to the definition of the scope of the patent application attached.
100‧‧‧臭氧產生裝置 100‧‧‧Ozone generating device
102‧‧‧反應腔體 102‧‧‧Reaction chamber
102a‧‧‧第一端面 102a‧‧‧ first end face
102b‧‧‧第二端面 102b‧‧‧second end face
102c‧‧‧側壁 102c‧‧‧ side wall
102d‧‧‧進氣口 102d‧‧‧air inlet
102e‧‧‧排氣口 102e‧‧‧Exhaust port
104‧‧‧紫外光源 104‧‧‧UV source
106‧‧‧第一燈管保護套 106‧‧‧First lamp cover
106a、122a‧‧‧底部 106a, 122a‧‧‧ bottom
106b、122b‧‧‧套體 106b, 122b‧‧‧
106c、122c‧‧‧容置空間 106c, 122c‧‧‧ accommodating space
108‧‧‧氣體反應空間 108‧‧‧ gas reaction space
110‧‧‧進氣緩衝空間 110‧‧‧Air intake buffer space
112‧‧‧進氣通道 112‧‧‧Intake passage
114‧‧‧放電氣體 114‧‧‧discharge gas
116‧‧‧燈管 116‧‧‧Light tube
118‧‧‧外電極 118‧‧‧External electrode
119‧‧‧高電壓源 119‧‧‧High voltage source
120‧‧‧內電極 120‧‧‧ internal electrodes
121‧‧‧排氣緩衝空間 121‧‧‧Exhaust buffer space
122‧‧‧第二燈管保護套 122‧‧‧Second lamp cover
124‧‧‧排氣通道 124‧‧‧Exhaust passage
D1‧‧‧寬度 D 1 ‧‧‧Width
L1‧‧‧長度 L 1 ‧‧‧ length
Claims (21)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102144641A TWI535650B (en) | 2013-12-05 | 2013-12-05 | Ozone generating device |
| CN201410046945.7A CN104692331B (en) | 2013-12-05 | 2014-02-11 | ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102144641A TWI535650B (en) | 2013-12-05 | 2013-12-05 | Ozone generating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201522206A TW201522206A (en) | 2015-06-16 |
| TWI535650B true TWI535650B (en) | 2016-06-01 |
Family
ID=53339951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102144641A TWI535650B (en) | 2013-12-05 | 2013-12-05 | Ozone generating device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104692331B (en) |
| TW (1) | TWI535650B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6070794B1 (en) * | 2015-08-26 | 2017-02-01 | ウシオ電機株式会社 | Ozone generator |
| JP6288568B2 (en) * | 2016-08-09 | 2018-03-07 | ウシオ電機株式会社 | Ozone generator |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3874361B2 (en) * | 2005-05-25 | 2007-01-31 | 国立大学法人京都大学 | Ozone generation method and apparatus using heteropolar crystal |
| CN100522829C (en) * | 2007-08-07 | 2009-08-05 | 南京工业大学 | Photocatalysis integration device for drinking water deep treatment |
| CN201343446Y (en) * | 2008-12-29 | 2009-11-11 | 河北先河环保科技股份有限公司 | Ozone generator capable of generating ozone with accurate concentration |
| CN102001630A (en) * | 2010-12-28 | 2011-04-06 | 南昌航空大学 | Ultraviolet ozone generator |
-
2013
- 2013-12-05 TW TW102144641A patent/TWI535650B/en active
-
2014
- 2014-02-11 CN CN201410046945.7A patent/CN104692331B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TW201522206A (en) | 2015-06-16 |
| CN104692331A (en) | 2015-06-10 |
| CN104692331B (en) | 2017-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6564663B2 (en) | Excimer lamp device | |
| JP6561881B2 (en) | UV radiation device | |
| JP7087754B2 (en) | Ozone generator and processing system with ozone generator | |
| US9865448B2 (en) | Excimer light source | |
| TWI535650B (en) | Ozone generating device | |
| CN106252194A (en) | Excimer lamp | |
| KR20070033249A (en) | UV light irradiation device and light cleaning device | |
| JP6694595B2 (en) | Ozone generator | |
| JP2005322618A (en) | Dielectric barrier discharge excimer light source | |
| US20080284335A1 (en) | Discharge lamp | |
| JP6736027B2 (en) | Excimer lamp for liquid processing | |
| US20130140471A1 (en) | Enhanced Output Mercury-Free UVC Lamp System | |
| CN203474455U (en) | Ozone generator | |
| US8400059B2 (en) | Mercury-vapor discharge lamp for homogeneous, planar irradiation | |
| RU2347743C2 (en) | Ozone and hydrogen peroxide generator | |
| TWI548588B (en) | Ozone generating devices | |
| TWI825353B (en) | UV irradiation device | |
| JP6452244B2 (en) | Microwave excitation electrodeless lamp and aqueous solution treatment system using the same | |
| JP3158911B2 (en) | Dielectric barrier discharge lamp device | |
| JP2000235840A (en) | Dielectric barrier discharge lamp | |
| UA55726A (en) | Electric-discharge selective excimer lamp with visible radiation |