TWI535495B - Coating apparatus - Google Patents
Coating apparatus Download PDFInfo
- Publication number
- TWI535495B TWI535495B TW102106412A TW102106412A TWI535495B TW I535495 B TWI535495 B TW I535495B TW 102106412 A TW102106412 A TW 102106412A TW 102106412 A TW102106412 A TW 102106412A TW I535495 B TWI535495 B TW I535495B
- Authority
- TW
- Taiwan
- Prior art keywords
- coating liquid
- coating
- substrate
- gas supply
- scanning direction
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/06—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with a blast of gas or vapour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C17/00—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
- B05C17/005—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces for discharging material from a reservoir or container located in or on the hand tool through an outlet orifice by pressure without using surface contacting members like pads or brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
- B05D1/42—Distributing applied liquids or other fluent materials by members moving relatively to surface by non-rotary members
Landscapes
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Nozzles (AREA)
- Electroluminescent Light Sources (AREA)
- Spray Control Apparatus (AREA)
Description
本發明是關於一種塗佈裝置，將塗佈液塗佈至有機電致發光(Electro Luminescence，EL)顯示裝置用玻璃(glass)基板、液晶顯示裝置用玻璃基板、電漿顯示面板(Plasma Display Panels，PDP)用玻璃基板、太陽電池用基板、電子紙(electronic paper)用基板或半導體製造裝置用光罩(mask)基板等基板。 The present invention relates to a coating apparatus for applying a coating liquid to a glass substrate for an organic electroluminescence (EL) display device, a glass substrate for a liquid crystal display device, and a plasma display panel (Plasma Display Panels) A substrate such as a glass substrate, a solar cell substrate, an electronic paper substrate, or a semiconductor manufacturing device mask substrate.
以往使用的塗佈裝置是藉由掃描噴出塗佈液的噴嘴(nozzle)，將塗佈液塗佈至基板，近年來，在將包含圖元形成材料的塗佈液塗佈至平面顯示裝置用的玻璃的基板時，也研究了應用方面。典型的例子是使噴嘴向沿著基板上所形成的間隔壁的主掃描方向移動，每當朝向主掃描方向的移動完成時，使基板向與主掃描方向垂直的副掃描方向移動，藉此，將塗佈液塗佈成以規定的間距(pitch)排列的條紋(stripe)狀。在此種塗佈裝置中，利用具有可撓性的塗佈液管(tube)，將塗佈液的供給源與噴嘴之間予以連接，藉此，能夠總是將塗佈液供給至移動的噴嘴。另外，在塗佈裝置中，也可將多個噴嘴排列設置於噴出部，使噴出部向與噴嘴的排列方向交叉的主掃描方向移動，藉此，在短時間內將塗佈液塗佈至基板上。 In the coating apparatus used in the past, the coating liquid is applied to the substrate by scanning a nozzle that ejects the coating liquid, and in recent years, the coating liquid containing the element forming material is applied to a flat display device. The application of the glass substrate was also studied. A typical example is to move the nozzle in the main scanning direction along the partition wall formed on the substrate, and move the substrate in the sub-scanning direction perpendicular to the main scanning direction every time the movement toward the main scanning direction is completed, whereby The coating liquid is applied to a stripe shape arranged at a predetermined pitch. In such a coating apparatus, the supply liquid of the coating liquid is connected to the nozzle by a flexible coating liquid tube, whereby the coating liquid can always be supplied to the moving nozzle. Further, in the coating apparatus, a plurality of nozzles may be arranged in the discharge portion, and the discharge portion may be moved in the main scanning direction intersecting the arrangement direction of the nozzles, whereby the coating liquid is applied to the coating liquid in a short time. On the substrate.
再者，在專利文獻1中揭示了如下的內容：將多根塗佈液管配置在氣體供給管的周圍，由捆束材緊貼著多根塗 佈液管的整個外周，將該外周予以覆蓋，藉此，捆束所述管而構築管群。藉由以所述方式構築管群，將塗佈液塗佈至基板上時的變形受到抑制，實現了將塗佈液均一地塗佈至基板上。 Further, Patent Document 1 discloses that a plurality of coating liquid pipes are disposed around a gas supply pipe, and a plurality of coating materials are closely attached to the binding material. The entire circumference of the liquid supply tube is covered with the outer circumference, whereby the tube is bundled to construct a tube group. By constructing the tube group in the manner described above, the deformation when the coating liquid is applied onto the substrate is suppressed, and the coating liquid is uniformly applied onto the substrate.
[專利文獻1]日本專利特開2009-131735號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-131735
此外，在專利文獻1所揭示的塗佈裝置中，由於需要柔軟性，因此，構築管群的塗佈液管使用了鐵氟龍(Teflon)(註冊商標)系材料。另外，所述裝置所塗佈的塗佈液使用了有機電致發光(EL，Electro Luminescence)材料，一般而言，有機EL材料存在如下的問題：發光壽命會因與氧發生接觸而縮短。因此，在使用專利文獻1所揭示的裝置來塗佈有機EL材料的情況下，氧會穿透鐵氟龍(註冊商標)系材料所製作的塗佈液管，從而有可能會對有機EL材料產生不良影響(例如使有機EL材料的壽命縮短)。 Further, in the coating device disclosed in Patent Document 1, since flexibility is required, a Teflon (registered trademark)-based material is used for the coating liquid pipe for constructing the tube group. Further, the coating liquid applied to the apparatus uses an organic electroluminescence (EL) material. In general, the organic EL material has a problem that the luminescence lifetime is shortened by contact with oxygen. Therefore, when the organic EL material is applied by using the apparatus disclosed in Patent Document 1, oxygen penetrates the coating liquid tube made of the Teflon (registered trademark) material, and thus it is possible to use the organic EL material. Adverse effects (such as shortening the life of organic EL materials).
本發明是鑒於所述問題而成者，本發明的目的在於在如下的塗佈裝置中，防止供給途中的塗佈液與氧等發生接觸，而所述塗佈裝置一面使包括多個噴出口的噴出部高速地移動，一面進行塗佈。 The present invention has been made in view of the above problems, and an object of the present invention is to prevent a coating liquid in the middle of supply from coming into contact with oxygen or the like in a coating apparatus, and the coating apparatus includes a plurality of discharge ports on one side. The discharge portion is applied while being moved at a high speed.
第一技術方案是將塗佈液塗佈至基板的塗佈裝置，其特徵在於包括：基板保持部，水平地保持著基板；噴出部， 從多個噴出口向基板噴出塗佈液，所述多個噴出口沿著與基板呈平行的副掃描方向排列；主掃描機構，包括：引導部，向與副掃描方向垂直且與基板呈平行的主掃描方向延伸；及滑動件，一面卡合於引導部，一面將氣體噴出至該滑動件與引導部之間，藉此，以非接觸狀態支撐於引導部；且所述主掃描機構使安裝於滑動件的噴出部向主掃描方向移動；副掃描機構，每當噴出部的朝向主掃描方向的移動完成時，使基板相對於噴出部，向副掃描方向相對地移動；管群，以一體地將氣體供給管與多個塗佈液管予以覆蓋的方式，利用捆束材來捆束所述氣體供給管與所述多個塗佈液管而成，所述氣體供給管具有可撓性且將氣體供給至滑動件，所述多個塗佈液管各自具有可撓性且將塗佈液供給至噴出部；連接容器，與管群的處於噴出部相反側的端部連結；供氣部，將惰性氣體供給至連接容器內；塗佈液供給部，將塗佈液供給至塗佈液管；以及氣體供給部，將氣體供給至氣體供給管，供氣部將供給至連接容器內的惰性氣體供給至間隙，該間隙是因捆束氣體供給管與多個塗佈液管而形成的間隙。 A first aspect of the invention is a coating apparatus for applying a coating liquid to a substrate, comprising: a substrate holding portion that horizontally holds the substrate; and a discharge portion, The coating liquid is ejected from the plurality of ejection ports toward the substrate, the plurality of ejection ports being arranged in a sub-scanning direction parallel to the substrate; the main scanning mechanism includes: a guiding portion that is perpendicular to the sub-scanning direction and parallel to the substrate a main scanning direction extending; and a sliding member that is engaged with the guiding portion to eject gas between the sliding member and the guiding portion, thereby supporting the guiding portion in a non-contact state; and the main scanning mechanism enables The ejection portion attached to the slider moves in the main scanning direction, and the sub-scanning mechanism relatively moves the substrate in the sub-scanning direction with respect to the ejection portion every time the movement of the ejection portion in the main scanning direction is completed; The gas supply pipe and the plurality of coating liquid pipes are bundled by a bundle material so as to integrally cover the gas supply pipe and the plurality of coating liquid pipes, and the gas supply pipe is flexible And supplying the gas to the slider, each of the plurality of coating liquid tubes having flexibility and supplying the coating liquid to the discharge portion; and connecting the container to the end portion of the tube group opposite to the discharge portion; Gas department The inert gas is supplied into the connection container; the coating liquid supply unit supplies the coating liquid to the coating liquid pipe; and the gas supply unit supplies the gas to the gas supply pipe, and the gas supply unit supplies the inert gas to the connection container. The gas is supplied to the gap which is a gap formed by the bundled gas supply pipe and the plurality of coating liquid pipes.
在以所述方式構成的發明中，將惰性氣體經由連接容器而供給至具有可撓性的塗佈液管與管群之間所形成的間隙，所述管群是捆束氣體供給管而成的管群，藉此，可在塗佈液管的周圍形成由惰性氣體產生的層，因此，可防止氧穿透塗佈液管而使在該管中流動的塗佈液暴露於氧。藉此，可防止因氧而使塗佈液的壽命縮短等。 In the invention configured as described above, the inert gas is supplied to the gap formed between the flexible coating liquid pipe and the pipe group via the connection container, and the pipe group is bundled with the gas supply pipe. The tube group can thereby form a layer generated by an inert gas around the coating liquid tube, thereby preventing oxygen from penetrating the coating liquid tube and exposing the coating liquid flowing in the tube to oxygen. Thereby, it is possible to prevent the life of the coating liquid from being shortened by oxygen or the like.
第二技術方案是將塗佈液塗佈至基板的塗佈裝置，其特徵在於包括：基板保持部，水平地保持著所述基板；噴出部，從多個噴出口向基板噴出塗佈液，所述多個噴出口沿著與基板呈平行的副掃描方向排列；主掃描機構，包括：引導部，向與副掃描方向垂直且與基板呈平行的主掃描方向延伸；及滑動件，一面卡合於引導部，一面將惰性氣體噴出至滑動件與該引導部之間，藉此，以非接觸狀態支撐於引導部；且所述主掃描機構使安裝於滑動件的噴出部向主掃描方向移動；副掃描機構，每當噴出部的朝向主掃描方向的移動完成時，使基板相對於噴出部，向副掃描方向相對地移動；管群，以一體地將氣體供給管與多個塗佈液管予以覆蓋的方式，利用捆束材來捆束所述氣體供給管與所述多個塗佈液管而成，所述氣體供給管具有可撓性且將惰性氣體供給至滑動件，所述多個塗佈液管各自具有可撓性且將塗佈液供給至噴出部；連接容器，與管群的處於噴出部相反側的端部連結；供氣部，將惰性氣體供給至連接容器內；以及塗佈液供給部，將塗佈液供給至塗佈液管，供氣部將供給至連接容器內的惰性氣體供給至構成管群的氣體供給管與間隙，該間隙是因捆束氣體供給管與多個塗佈液管而形成的間隙。 A second aspect of the invention is a coating apparatus for applying a coating liquid to a substrate, comprising: a substrate holding portion that horizontally holds the substrate; and a discharge portion that ejects a coating liquid from the plurality of ejection ports to the substrate, The plurality of ejection ports are arranged along a sub-scanning direction parallel to the substrate; the main scanning mechanism includes: a guiding portion extending in a main scanning direction perpendicular to the sub-scanning direction and parallel to the substrate; and a slider, a card Incorporating the guiding portion, the inert gas is ejected between the slider and the guiding portion, thereby supporting the guiding portion in a non-contact state; and the main scanning mechanism causes the ejecting portion attached to the slider to face the main scanning direction Moving; the sub-scanning mechanism moves the substrate relative to the ejecting portion relatively in the sub-scanning direction every time the movement of the ejecting portion in the main scanning direction is completed; the tube group integrally coats the gas supply tube and the plurality of tubes a method in which a liquid pipe is covered, and the gas supply pipe and the plurality of coating liquid pipes are bundled by a bundle material, and the gas supply pipe has flexibility and supplies an inert gas to the sliding Each of the plurality of coating liquid tubes has flexibility and supplies the coating liquid to the discharge portion; the connection container is connected to an end portion of the tube group opposite to the discharge portion; and the air supply portion supplies the inert gas to The coating liquid supply unit and the coating liquid supply unit supply the coating liquid to the coating liquid pipe, and the air supply unit supplies the inert gas supplied into the connection container to the gas supply pipe and the gap constituting the pipe group, and the gap is caused by A gap formed by the bundled gas supply pipe and the plurality of coating liquid pipes.
在以所述方式構成的發明中，將惰性氣體經由連接容器而供給至管群，該管群是捆束具有可撓性的塗佈液管、氣體供給管而成的管群，藉此，可將惰性氣體供給至塗佈液管與氣體供給管之間所形成的間隙、與氣體供給管，從 而可在塗佈液管的周圍形成由惰性氣體產生的層，因此，可防止氧穿透塗佈液管而使在該管中流動的塗佈液暴露於氧。藉此，可防止因氧使塗佈液的壽命縮短等。 In the invention configured as described above, the inert gas is supplied to the tube group via the connection container, and the tube group is a tube group obtained by binding a flexible coating liquid tube and a gas supply tube. The inert gas can be supplied to the gap formed between the coating liquid pipe and the gas supply pipe, and the gas supply pipe can be On the other hand, a layer generated by an inert gas can be formed around the coating liquid pipe, thereby preventing oxygen from penetrating the coating liquid pipe and exposing the coating liquid flowing in the pipe to oxygen. Thereby, it is possible to prevent the life of the coating liquid from being shortened by oxygen or the like.
第三技術方案的特徵在於：塗佈液供給部包括塗佈液積存部，積存著塗佈液；以及多根金屬配管，將塗佈液從塗佈液積存部供給至連接容器為止，各個所述金屬配管與從連結於所述連接容器的所述管群伸出各個所述塗佈液管連接。 According to a third aspect of the invention, the coating liquid supply unit includes a coating liquid reservoir, and a coating liquid is accumulated therein, and a plurality of metal pipes are supplied from the coating liquid storage unit to the connection container. The metal pipe is connected to each of the coating liquid pipes from the pipe group connected to the connection container.
在以所述方式構成的發明中，將如下的管設為金屬配管，所述管是將塗佈液從塗佈液積存部供給至連接容器為止的管，藉此，可防止在與塗佈液管連接之前，塗佈液暴露於氧。 In the invention configured as described above, the tube is a metal pipe that is supplied from the coating liquid reservoir to the connection container, thereby preventing and coating the tube. The coating liquid is exposed to oxygen before the liquid pipe is connected.
第四技術方案的特徵在於：在連接容器內，將各個金屬配管與各個塗佈液管予以連接。在以所述方式構成的發明中，在連接容器內，將金屬配管與塗佈液管予以連接，藉此，可確實地防止所述塗佈液在從塗佈液積存部塗佈至基板上為止的期間暴露於氧。 The fourth aspect of the invention is characterized in that each of the metal pipes is connected to each of the coating liquid pipes in the connection container. In the invention configured as described above, the metal pipe and the coating liquid pipe are connected in the connection container, whereby the coating liquid can be surely prevented from being applied to the substrate from the coating liquid reservoir. The period until then is exposed to oxygen.
第五技術方案的特徵在於：供氣部利用高於大氣壓的壓力，將惰性氣體供給至連接容器內。以所述方式構成的發明可確實地將供給至連接容器內的惰性氣體送出至間隙。 The fifth aspect is characterized in that the air supply unit supplies the inert gas into the connection container by using a pressure higher than atmospheric pressure. The invention constructed in the above manner can surely send the inert gas supplied into the connection container to the gap.
第六技術方案的特徵在於：塗佈液包含有機電致發光顯示裝置用的有機電致發光材料或電洞輸送材料。在以所述方式構成的發明中，可防止因塗佈液暴露於氧而壽命縮 短，從而可適用於有機電致發光顯示裝置用的塗佈裝置。 The sixth aspect of the invention is characterized in that the coating liquid contains an organic electroluminescent material or a hole transporting material for an organic electroluminescence display device. In the invention constructed as described above, it is possible to prevent the life of the coating liquid from being exposed to oxygen and shrinking It is short and can be applied to a coating device for an organic electroluminescence display device.
根據第一至第六技術方案中的任一個技術方案，在一面使包括多個噴出口的噴出部高速地移動，一面進行塗佈的塗佈裝置中，將惰性氣體經由連接容器而供給至管群之間所形成的間隙，該管群是捆束具有可撓性的塗佈液管、氣體供給管而成的管群，藉此，可在塗佈液管的周圍形成由惰性氣體產生的層，並防止因氧穿過塗佈液管而使塗佈液暴露於氧。藉此，可防止因氧使塗佈液的壽命縮短等。 According to any one of the first to sixth aspects of the present invention, in the coating device that performs the coating while the ejection portion including the plurality of ejection ports is moved at a high speed, the inert gas is supplied to the tube via the connection container. a gap formed between the groups, the tube group being bundled with a flexible coating liquid pipe and a gas supply pipe, whereby an inert gas can be formed around the coating liquid pipe. The layer is prevented from exposing the coating liquid to oxygen due to the passage of oxygen through the coating liquid tube. Thereby, it is possible to prevent the life of the coating liquid from being shortened by oxygen or the like.
以下，一面參照圖1及圖2，一面對本發明的實施方式進行說明。圖1是本發明的塗佈裝置1的平面圖，圖2是所述塗佈裝置1的正面圖。 Hereinafter, an embodiment of the present invention will be described with reference to Figs. 1 and 2 . 1 is a plan view of a coating apparatus 1 of the present invention, and FIG. 2 is a front view of the coating apparatus 1.
所述塗佈裝置1用以將塗佈液塗佈至矩形狀的玻璃基板(以下僅稱為“基板”)9。更詳細而言，所述塗佈裝置1用以將如下的塗佈液塗佈至主動式矩陣(active matrix)驅動方式的有機EL(Electro Luminescence)顯示裝置用的基板9，所述塗佈液包含：揮發性的溶劑(本實施方式中為芳香族的有機溶劑)、及作為發光材料的有機EL材料。 The coating device 1 is for applying a coating liquid to a rectangular glass substrate (hereinafter simply referred to as "substrate") 9. More specifically, the coating device 1 is for applying a coating liquid to a substrate 9 for an active matrix driving type organic EL (Electro Luminescence) display device, the coating liquid The solvent includes a volatile solvent (an aromatic organic solvent in the present embodiment) and an organic EL material as a light-emitting material.
所述塗佈裝置1主要包括：平臺(stage)10、平臺移動機構20、塗佈頭30、塗佈液供給部32、供氣部33、連接容器40以及塗佈頭移動機構50。平臺10水平地保持著基板9；平臺移動機構20使平臺10移動；塗佈頭30用以將塗佈液塗佈至保持於平臺10的基板9的上表面；塗佈液 供給部32用以將塗佈液供給至塗佈頭30；供氣部33將惰性氣體供給至塗佈頭移動機構50；連接容器40連接著分支管327與氣體供給管331，所述分支管327連接于塗佈液供給部32，所述氣體供給管331連接於供氣部33；塗佈頭移動機構50使塗佈頭30移動。另外，塗佈裝置1包括控制部2，該控制部2與塗佈裝置1所包括的各部分形成電性連接，對所述各部分的動作進行控制。 The coating device 1 mainly includes a stage 10, a stage moving mechanism 20, a coating head 30, a coating liquid supply unit 32, a gas supply unit 33, a connection container 40, and a coating head moving mechanism 50. The platform 10 horizontally holds the substrate 9; the platform moving mechanism 20 moves the platform 10; the coating head 30 is used to apply the coating liquid to the upper surface of the substrate 9 held on the platform 10; The supply unit 32 is for supplying the coating liquid to the coating head 30; the air supply unit 33 supplies the inert gas to the coating head moving mechanism 50; the connection container 40 is connected to the branch pipe 327 and the gas supply pipe 331, the branch pipe 327 is connected to the coating liquid supply unit 32, and the gas supply pipe 331 is connected to the air supply unit 33. The coating head moving mechanism 50 moves the coating head 30. Further, the coating device 1 includes a control unit 2 that is electrically connected to each portion included in the coating device 1, and controls the operation of each of the portions.
平臺10具有平板狀的外形，且作為基板保持部而發揮功能，該基板保持部將基板9以水平姿勢載置保持於其上表面。另外，平臺10的尺寸(size)小於基板9的尺寸。在平臺10的上表面形成有多個抽吸孔(省略圖示)。所述抽吸孔連接於真空泵(vacuum pump)等，藉由使所述真空泵工作，當將基板9載置於平臺10上時，基板9會因來自抽吸孔的抽吸壓而吸附於平臺10的上表面，並保持固定。另外，平臺10在內部包括利用加熱器(heater)的加熱機構(省略圖示)。於是，可將載置於平臺10上的基板9加熱至規定的溫度。 The stage 10 has a flat outer shape and functions as a substrate holding portion that mounts and holds the substrate 9 in a horizontal posture on the upper surface thereof. In addition, the size of the platform 10 is smaller than the size of the substrate 9. A plurality of suction holes (not shown) are formed on the upper surface of the stage 10. The suction hole is connected to a vacuum pump or the like. By operating the vacuum pump, when the substrate 9 is placed on the stage 10, the substrate 9 is adsorbed to the platform by the suction pressure from the suction hole. The upper surface of 10 is kept fixed. Further, the stage 10 internally includes a heating mechanism (not shown) using a heater. Thus, the substrate 9 placed on the stage 10 can be heated to a predetermined temperature.
平臺移動機構20使平臺10向與基板9的主面呈平行的規定的方向(即圖1中的Y方向，以下稱為“副掃描方向”)水平移動。平臺移動機構20包括：旋轉機構24、支撐板23、基台21以及副掃描機構22。旋轉機構24使平臺10旋轉；支撐板23以可旋轉的方式支撐著平臺10；基台21水平地支撐著支撐板23；副掃描機構22使基台21向副掃描方向移動。旋轉機構24、副掃描機構22與控制 部2電性連接，根據來自控制部2的指示，使平臺10移動。 The stage moving mechanism 20 horizontally moves the stage 10 in a predetermined direction parallel to the main surface of the substrate 9 (i.e., the Y direction in Fig. 1, hereinafter referred to as "sub-scanning direction"). The platform moving mechanism 20 includes a rotating mechanism 24, a support plate 23, a base 21, and a sub-scanning mechanism 22. The rotating mechanism 24 rotates the platform 10; the support plate 23 rotatably supports the platform 10; the base 21 horizontally supports the support plate 23; and the sub-scanning mechanism 22 moves the base 21 in the sub-scanning direction. Rotating mechanism 24, sub-scanning mechanism 22 and control The unit 2 is electrically connected, and the platform 10 is moved in accordance with an instruction from the control unit 2.
旋轉機構24包括馬達(motor)，該馬達包含安裝在平臺10的內部的轉子。另外，在平臺10的中央部下表面側與支撐板23之間設置有旋轉軸承機構。因此，若使馬達工作，則轉子會向圍繞Z軸的旋轉方向驅動，平臺10以旋轉軸承機構的旋轉軸為中心，在規定角度的範圍內旋轉。 The rotating mechanism 24 includes a motor including a rotor mounted inside the platform 10. Further, a rotary bearing mechanism is provided between the lower surface side of the central portion of the stage 10 and the support plate 23. Therefore, when the motor is operated, the rotor is driven in the rotation direction around the Z-axis, and the stage 10 is rotated within a predetermined angle around the rotation axis of the rotary bearing mechanism.
副掃描機構22包括：線性馬達(linear motor)221以及一對導軌(guide rail)222。線性馬達221安裝於基台21的下表面，該基台21從下方支撐著支撐板23；一對導軌222沿著副掃描方向延伸。因此，若使線性馬達221驅動，則基台21及平臺10會沿著導軌222，向副掃描方向移動。 The sub-scanning mechanism 22 includes a linear motor 221 and a pair of guide rails 222. The linear motor 221 is attached to the lower surface of the base 21, and the base 21 supports the support plate 23 from below; the pair of guide rails 222 extend in the sub-scanning direction. Therefore, when the linear motor 221 is driven, the base 21 and the stage 10 move in the sub-scanning direction along the guide rail 222.
塗佈頭30包括多個噴嘴31。更具體而言，包括16個噴嘴31。再者，噴嘴31的個數只要為一個以上即可，也可包括多個噴嘴。 The coating head 30 includes a plurality of nozzles 31. More specifically, 16 nozzles 31 are included. Further, the number of the nozzles 31 may be one or more, and a plurality of nozzles may be included.
塗佈頭30向保持於平臺10的基板9的上表面連續地噴出塗佈液，該塗佈液包含有機EL材料。換句話說，塗佈頭30是用以使塗佈液以液柱的狀態從噴嘴31噴出的噴出部。另外，多個噴嘴31在與基板9的主面呈平行且與副掃描方向垂直的方向(即圖1中的與Y方向垂直的X方向，以下稱為“主掃描方向”)上，呈大致直線狀地隔開排列，並且在圖1中的副掃描方向上稍微錯開地配置。在本實施方式中，以使副掃描方向上的鄰接的2根噴嘴31之間的距離等於間隔壁之間的間距(以下稱為“間隔壁間 距”)的3倍的方式進行調整，所述間隔壁預先形成在基板9的塗佈區域91(在圖1中，由虛線包圍地表示)上且向主掃描方向延伸。 The coating head 30 continuously ejects a coating liquid to the upper surface of the substrate 9 held on the stage 10, and the coating liquid contains an organic EL material. In other words, the coating head 30 is a discharge portion for ejecting the coating liquid from the nozzle 31 in the state of the liquid column. Further, the plurality of nozzles 31 are substantially parallel to the main surface of the substrate 9 and perpendicular to the sub-scanning direction (that is, the X direction perpendicular to the Y direction in FIG. 1 , hereinafter referred to as the “main scanning direction”). They are arranged linearly apart and are slightly shifted in the sub-scanning direction in FIG. In the present embodiment, the distance between the adjacent two nozzles 31 in the sub-scanning direction is equal to the distance between the partition walls (hereinafter referred to as "interval between the partition walls". The adjustment is performed in a manner three times from "", which is formed in advance on the application region 91 (indicated by a broken line in FIG. 1) of the substrate 9 and extends in the main scanning direction.
塗佈液供給部32是用以向塗佈頭30供給塗佈液的機構，所述塗佈液包含有機EL材料。 The coating liquid supply unit 32 is a mechanism for supplying a coating liquid to the coating head 30, and the coating liquid contains an organic EL material.
如圖3所示，塗佈液供給部32包括液體供給管322，該液體供給管322的一端連接於容器321，該容器321作為塗佈液積存部而發揮功能且積存著塗佈液，在液體供給管322中，從容器321側起(向另一個端部)依次設置有泵323、質流控制器(mass flow controller)324、壓力計325及篩檢程式(filter)326。液體供給管322的處於容器321相反側的端部分支成多個分支管327，多個分支管327連接於後述的連接容器40。 As shown in FIG. 3, the coating liquid supply unit 32 includes a liquid supply pipe 322, and one end of the liquid supply pipe 322 is connected to the container 321, and the container 321 functions as a coating liquid reservoir and stores a coating liquid. In the liquid supply pipe 322, a pump 323, a mass flow controller 324, a pressure gauge 325, and a filter 326 are sequentially disposed from the container 321 side (to the other end). The end portion of the liquid supply pipe 322 on the opposite side of the container 321 is branched into a plurality of branch pipes 327, and the plurality of branch pipes 327 are connected to a connection container 40 which will be described later.
塗佈液以固定的流量從塗佈液供給部32導入至多個分支管327，且將塗佈液供給至各個噴嘴31。再者，此處，液體供給管322及多個分支管327使用了氧等無法滲入的材質的管。例如可使用不銹鋼等的金屬配管作為此種材質的管。如此，對於液體供給管322、分支管327採用不易引起氧暴露(oxygen exposure)的材質，藉此，可防止有機EL材料因受到氧等的影響而壽命縮短。 The coating liquid is introduced into the plurality of branch pipes 327 from the coating liquid supply unit 32 at a fixed flow rate, and the coating liquid is supplied to the respective nozzles 31. Here, the liquid supply pipe 322 and the plurality of branch pipes 327 are made of a material such as oxygen that cannot penetrate. For example, a metal pipe such as stainless steel can be used as the pipe of such a material. In the liquid supply pipe 322 and the branch pipe 327, a material that is less likely to cause oxygen exposure is used, whereby the organic EL material can be prevented from being shortened in life due to the influence of oxygen or the like.
供氣部33是用以將惰性氣體(例如氮氣等)供給至塗佈頭移動機構50的機構，該供氣部33經由氣體供給管331而連接於後述的連接容器40。供氣部33至少在進行塗佈處理期間供給惰性氣體。再者，在處理停止期間，也可供 給惰性氣體。 The air supply unit 33 is a mechanism for supplying an inert gas (for example, nitrogen gas) to the coating head moving mechanism 50, and the air supply unit 33 is connected to a connection container 40 to be described later via a gas supply pipe 331. The gas supply unit 33 supplies an inert gas at least during the coating process. Furthermore, it is also available during processing stoppage Give inert gas.
塗佈頭移動機構50包括：一對引導部51、滑動件52、一對滑輪(pulley)53以及環狀(endless)的同步帶(synchronous belt)54。滑動件52以能夠相對於引導部51滑動的方式而配設；一對滑輪53配設在一對引導部51的兩端部附近，且能夠以朝向Z軸方向的軸為中心而旋轉；環狀的同步帶54捲繞於滑輪53。 The coating head moving mechanism 50 includes a pair of guiding portions 51, a slider 52, a pair of pulleys 53, and an endless synchronized belt 54. The slider 52 is disposed so as to be slidable relative to the guide portion 51; the pair of pulleys 53 are disposed in the vicinity of both end portions of the pair of guide portions 51, and are rotatable about an axis in the Z-axis direction; The timing belt 54 is wound around the pulley 53.
如圖4所示，滑動件52形成有貫通孔52a，引導部51***至貫通孔52a。實際上如圖1所示，將固定壓力的惰性氣體從供氣部33經由後述的管群42中所含的氣體供給管421，供給至(-Y)側的滑動件52，另外，將固定壓力的惰性氣體從供氣部33經由省略圖示的氣體供給管421，供給至(+Y)側的滑動件52，如圖4所示，惰性氣體在貫通孔52a的內周面與引導部51的外周面之間噴出(在圖4中，利用標記著符號A1的箭頭來表示惰性氣體的噴出方向)，滑動件52一面以非接觸狀態卡合於引導部51，一面以能夠向主掃描方向移動的方式受到支撐。 As shown in FIG. 4, the slider 52 is formed with the through hole 52a, and the guide part 51 is inserted in the through-hole 52a. As shown in Fig. 1, the inert gas of a fixed pressure is supplied from the air supply unit 33 to the slider 52 on the (-Y) side via the gas supply pipe 421 included in the pipe group 42 to be described later, and is fixed. The inert gas of the pressure is supplied from the air supply unit 33 to the slider 52 on the (+Y) side via the gas supply pipe 421 (not shown). As shown in FIG. 4, the inert gas is in the inner circumferential surface of the through hole 52a and the guide portion. The outer peripheral surface of 51 is ejected (in FIG. 4, the direction in which the inert gas is ejected is indicated by an arrow marked with a symbol A1), and the slider 52 is engaged with the guide portion 51 in a non-contact state, so that the main scanning can be performed. The way the direction moves is supported.
在圖1所示的兩個引導部51之間，在引導部51的兩端部的附近分別設置有兩個滑輪53，環狀的同步帶54掛在所述兩個滑輪53上。滑動件52固定於同步帶54(參照圖4)，塗佈頭30安裝於(-Y)側的滑動件52。在塗佈頭移動機構50中，將連接於一個滑輪53的馬達予以驅動，藉此，同步帶54順時針或逆時針地旋轉，塗佈頭30高速且順滑地向(-X)方向或(+X)方向移動。 Between the two guide portions 51 shown in Fig. 1, two pulleys 53 are provided in the vicinity of both end portions of the guide portion 51, and an annular timing belt 54 is hung on the two pulleys 53. The slider 52 is fixed to the timing belt 54 (refer to FIG. 4), and the coating head 30 is attached to the slider 52 on the (-Y) side. In the coating head moving mechanism 50, a motor connected to one pulley 53 is driven, whereby the timing belt 54 is rotated clockwise or counterclockwise, and the coating head 30 is smoothly and smoothly moved in the (-X) direction or Move in the (+X) direction.
塗佈頭移動機構50成為使塗佈頭30向主掃描方向移動的主掃描機構。再者，塗佈頭移動機構50與控制部2電性連接，根據來自控制部2的指示，使塗佈頭30移動。每當塗佈頭30的朝向主掃描方向的移動完成時，使保持著基板9的平臺10向副掃描方向移動，藉此，將塗佈液塗佈至基板9表面的塗佈區域91。再者，在塗佈頭30進行主掃描時，在受液部12的附近完成加速或減速，在基板9的上方，塗佈頭30例如以每秒3 m~5 m左右的固定速度移動。 The coating head moving mechanism 50 serves as a main scanning mechanism that moves the coating head 30 in the main scanning direction. Further, the coating head moving mechanism 50 is electrically connected to the control unit 2, and the coating head 30 is moved in accordance with an instruction from the control unit 2. When the movement of the coating head 30 in the main scanning direction is completed, the stage 10 holding the substrate 9 is moved in the sub-scanning direction, whereby the coating liquid is applied to the coating region 91 on the surface of the substrate 9. Further, when the coating head 30 performs main scanning, acceleration or deceleration is completed in the vicinity of the liquid receiving portion 12, and the coating head 30 is moved at a fixed speed of, for example, about 3 m to 5 m per second above the substrate 9.
控制部2一面執行各種運算處理，一面對塗佈裝置1所具有的各部分的動作進行控制。藉由如下的電腦(computer)來構成控制部2，該電腦例如包括：進行各種運算處理的中央處理器(Central Processing Unit，CPU)、記憶著啟動程式(boot program)等的唯讀記憶體(Read Only Memory，ROM)、成為運算處理的作業區域的隨機存取記憶體(Random Access Memory，RAM)、記憶著程式或各種資料檔案(data file)等的硬碟(hard disk)等記憶部、進行各種顯示的顯示器(display)、鍵盤(keyboard)及滑鼠(mouse)等輸入部、以及經由局域網(Local Area Network，LAN)等而具有資料通訊功能的資料通訊部等。電腦根據安裝(install)在電腦中的程式而工作，藉此，該電腦作為塗佈裝置1的控制部2而發揮功能。再者，控制部2中所實現的各功能部可藉由電腦執行規定的程式來實現，也可藉由專用的硬體(hardware)來實現。 The control unit 2 performs various kinds of arithmetic processing and controls the operation of each part of the coating device 1 . The control unit 2 is configured by a computer including, for example, a central processing unit (CPU) that performs various kinds of arithmetic processing, and a read-only memory that memorizes a boot program (such as a boot program). Read Only Memory (ROM), a memory such as a random access memory (RAM) that is a work area for arithmetic processing, a hard disk such as a memory program or a data file, An input unit such as a display, a keyboard, and a mouse for performing various displays, and a data communication unit having a data communication function via a local area network (LAN) or the like. The computer operates according to a program installed in the computer, whereby the computer functions as the control unit 2 of the coating device 1. Furthermore, each functional unit implemented in the control unit 2 can be realized by executing a predetermined program by a computer, or can be realized by a dedicated hardware.
另外，所述塗佈裝置1包括左右的一對拍攝部11，該左右的一對拍攝部11用以拍攝基板9上所形成的對準標記(alignment mark)(省略圖示)而進行檢測。在所述一對拍攝部11中，分別配設有電荷耦合器件(Charge Coupled Device，CCD)相機(camera)。於是，基於拍攝部11所檢測出的對準標記的位置，將基板9的位置對準。 Further, the coating device 1 includes a pair of right and left imaging units 11 for detecting an alignment mark (not shown) formed on the substrate 9. A charge coupled device (CCD) camera is disposed in each of the pair of imaging units 11. Then, the position of the substrate 9 is aligned based on the position of the alignment mark detected by the imaging unit 11.
另外，在塗佈頭30的往返移動方向(X方向)上，在平臺10的兩側配設有一對受液部12，該一對受液部12接受來自塗佈頭30中的噴嘴31的塗佈液。塗佈頭30即使在不對基板9進行塗佈處理期間(待機期間)，也會連續地噴出塗佈液。受液部12是用以接受此期間所噴出的塗佈液的機構，由於在該受液部12的內部包括多孔性構件，因此，可防止從塗佈頭30噴出的塗佈液濺向周圍。 Further, in the reciprocating direction (X direction) of the coating head 30, a pair of liquid receiving portions 12 are received on both sides of the stage 10, and the pair of liquid receiving portions 12 receive the nozzles 31 from the coating head 30. Coating solution. The coating head 30 continuously ejects the coating liquid even during the coating process (the standby period) of the substrate 9 . The liquid receiving portion 12 is a mechanism for receiving the coating liquid discharged during the period, and the porous member is included in the liquid receiving portion 12, so that the coating liquid discharged from the coating head 30 can be prevented from splashing around. .
圖5是管群42的切斷部端面圖。管群42包括：氣體供給管421以及塗佈液管328。氣體供給管421具有可撓性，將從供氣部33導入的惰性氣體引導至滑動件52；塗佈液管328各自具有可撓性，並且將從塗佈液供給部32導入的塗佈液引導至多個噴嘴31，而塗佈液管328配置在氣體供給管421的周圍。此處，氣體供給管421的內部作為氣體供給路徑422而發揮功能，各個塗佈液管328的內部作為塗佈液供給路徑329而發揮功能。 FIG. 5 is an end view of the cut portion of the tube group 42. The tube group 42 includes a gas supply pipe 421 and a coating liquid pipe 328. The gas supply pipe 421 has flexibility, and guides the inert gas introduced from the gas supply unit 33 to the slider 52. The coating liquid pipe 328 has flexibility and the coating liquid introduced from the coating liquid supply unit 32. The plurality of nozzles 31 are guided, and the coating liquid pipe 328 is disposed around the gas supply pipe 421. Here, the inside of the gas supply pipe 421 functions as the gas supply path 422, and the inside of each of the coating liquid pipes 328 functions as the coating liquid supply path 329.
另外，各個塗佈液管328及氣體供給管421由氟系樹脂形成，可採用四氟乙烯-全氟烷氧基乙烯基醚共聚物(Polyfluoroalkoxy，PFA)等鐵氟龍(註冊商標)系材料 作為此種材料。當然，也可利用其他材料來形成具有可撓性的塗佈液管328及氣體供給管421。 Further, each of the coating liquid pipe 328 and the gas supply pipe 421 is formed of a fluorine-based resin, and a Teflon (registered trademark) material such as a tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA) may be used. As such a material. Of course, other materials may be used to form the flexible coating liquid pipe 328 and the gas supply pipe 421.
實際上，多個塗佈液管328等間隔(即，在以氣體供給管421的中心軸為中心的圓周方向上，以等角度表現)地配置在氣體供給管421的外周上。在本實施方式中，氣體供給管421的外徑(直徑)設為6毫米(mm)(內徑為4 mm)，塗佈液管328的外徑設為1.5毫米(mm)(內徑為0.5 mm)，16根(在圖5中，為了便於圖示，僅記載了8根塗佈液管328)塗佈液管328密集地排列在氣體供給管421的外周上。 Actually, the plurality of coating liquid tubes 328 are disposed on the outer circumference of the gas supply pipe 421 at equal intervals (that is, expressed in equal angles in the circumferential direction around the central axis of the gas supply pipe 421). In the present embodiment, the outer diameter (diameter) of the gas supply pipe 421 is set to 6 millimeters (mm) (the inner diameter is 4 mm), and the outer diameter of the coating liquid pipe 328 is set to 1.5 millimeters (mm) (the inner diameter is 0.5 mm), 16 (in FIG. 5, only eight coating liquid tubes 328 are described for convenience of illustration) The coating liquid tubes 328 are densely arranged on the outer circumference of the gas supply tube 421.
另外，管群42包括捆束材424，該捆束材424緊貼著多個塗佈液管328的整個外周(即，將氣體供給管421的周圍所配置的多個塗佈液管328視為一個構件時的外周)，將該外周予以覆蓋，藉由捆束材424來大致一體地捆束氣體供給管421及多個塗佈液管328。此時，氣體供給管421與多個塗佈液管328被捆束材424捆束，藉此，形成間隙423。 Further, the tube group 42 includes a bundle 424 which is in close contact with the entire outer circumference of the plurality of coating liquid tubes 328 (that is, a plurality of coating liquid tubes 328 disposed around the gas supply tube 421) The outer circumference of one member is covered, and the gas supply pipe 421 and the plurality of coating liquid pipes 328 are bundled substantially integrally by the bundle 424. At this time, the gas supply pipe 421 and the plurality of coating liquid pipes 328 are bundled by the bundled material 424, whereby the gap 423 is formed.
實際上，將多個塗佈液管328配置在氣體供給管421的周圍而成的構件***至捆束材424(鐵氟龍(註冊商標)系材料所形成的管狀的熱收縮性構件)，施加熱來使熱收縮性構件收縮，但無法完全消除間隙423。 In fact, a member in which a plurality of coating liquid pipes 328 are disposed around the gas supply pipe 421 is inserted into a bundled material 424 (a tubular heat-shrinkable member formed of a Teflon (registered trademark) material), Heating is applied to shrink the heat shrinkable member, but the gap 423 cannot be completely eliminated.
藉由捆束著多個塗佈液管328與氣體供給管421的構造，管群42對於變形的剛性變得極大，即使在塗佈頭30高速地移動的情況下，也可保持充分的剛性。 By the structure in which the plurality of coating liquid tubes 328 and the gas supply tube 421 are bundled, the rigidity of the tube group 42 against deformation becomes extremely large, and even when the coating head 30 moves at a high speed, sufficient rigidity can be maintained. .
圖6是用以對連接容器40進行說明的概要圖。連接容器40是在內部具有密閉空間的矩形狀的容器(長方體)，從塗佈液供給部32供給塗佈液的分支管327、用以將惰性氣體供給至氣體供給管421的氣體供給管331、以及用以將塗佈液及惰性氣體供給至噴嘴31及滑動件52的管群42連接於所述連接容器40。 FIG. 6 is a schematic view for explaining the connection container 40. The connection container 40 is a rectangular container (cuboid) having a sealed space therein, a branch pipe 327 for supplying a coating liquid from the coating liquid supply unit 32, and a gas supply pipe 331 for supplying an inert gas to the gas supply pipe 421. And a tube group 42 for supplying the coating liquid and the inert gas to the nozzle 31 and the slider 52 is connected to the connection container 40.
在構成連接容器40的一個壁面中形成有開口部，該開口部用以連結氣體供給管331。所述開口部與氣體供給管331經由連結構件44而被連結。連結構件44具有密封(seal)構造，能夠在將連接容器40的內部保持為密閉狀態下，將氣體供給管331連通連接於連接容器40。氣體供給管331連通連接於連接容器40，藉此，從連通連接于氣體供給管331的遠側的供氣部33供給的惰性氣體，會從近側的氣體供給口332供給至連接容器40內。 An opening portion for connecting the gas supply pipe 331 is formed in one wall surface constituting the connection container 40. The opening and the gas supply pipe 331 are coupled via a connecting member 44. The connection member 44 has a seal structure, and the gas supply pipe 331 can be connected and connected to the connection container 40 while keeping the inside of the connection container 40 in a sealed state. The gas supply pipe 331 is connected and connected to the connection container 40, whereby the inert gas supplied from the gas supply unit 33 connected to the far side of the gas supply pipe 331 is supplied from the proximal gas supply port 332 to the connection container 40. .
另外，在連結著氣體供給管331的連接容器40的壁面中，以與分支管327相同的數量形成有開口部，該開口部用以連結分支管327。圖6為了便於圖示，僅將多根分支管327圖示了4根，但在本實施方式中，成2列地各連結8根分支管327。再者，連接容器40與分支管327的連結並不限定於所述方式，可連結在連接容器40的不同壁面上，另外，可成一列或成多列地適當採用連結方式。 Further, in the wall surface of the connection container 40 to which the gas supply pipe 331 is connected, an opening portion is formed in the same number as the branch pipe 327, and this opening portion is used to connect the branch pipe 327. 6 shows only four of the plurality of branch pipes 327 for convenience of illustration. However, in the present embodiment, eight branch pipes 327 are connected in two rows. Further, the connection between the connection container 40 and the branch pipe 327 is not limited to the above-described embodiment, and may be connected to different wall surfaces of the connection container 40, and may be appropriately connected in a row or in a plurality of rows.
另外，在與連結著氣體供給管331及分支管327的連接容器40的壁面不同的壁面中，形成有用以連結管群42的開口部。該開口部與管群42的處於塗佈頭30相反側的 端部經由連結構件41而連結。連結構件41具有密封構造，能夠在將連接容器40的內部保持為密閉狀態的狀態下，將管群42插通至連接容器40。 Further, an opening portion for connecting the tube group 42 is formed in a wall surface different from the wall surface of the connection container 40 to which the gas supply pipe 331 and the branch pipe 327 are connected. The opening is opposite to the tube group 42 on the opposite side of the coating head 30. The ends are connected via a connecting member 41. The connection member 41 has a sealing structure, and the tube group 42 can be inserted into the connection container 40 while the inside of the connection container 40 is held in a sealed state.
管群42的端部插通至連接容器40內，塗佈液管328從該端部伸出，各個分支管327與各個塗佈液管328經由連結構件43而被連結且被連通連接。如此，能夠將經由分支管327而供給的塗佈液供給至各個塗佈液管328。特別是在連接容器40內，將分支管327與塗佈液管328予以連結。所謂連接容器40內，包含如下的兩個狀態，一個狀態是指在配設於連接容器40的連結構件43中，分支管327與塗佈液管328被連結，另一個狀態是指分支管327經由連結構件43而插通至連接容器40內，在連接容器40內，藉由已知的連結單元來將分支管327與塗佈液管328予以連結。 The end of the tube group 42 is inserted into the connection container 40, and the coating liquid pipe 328 is extended from the end portion, and each of the branch pipes 327 and the respective coating liquid pipes 328 are connected and connected by the connection member 43. In this manner, the coating liquid supplied through the branch pipe 327 can be supplied to each of the coating liquid pipes 328. In particular, in the connection container 40, the branch pipe 327 and the coating liquid pipe 328 are connected. The connection container 40 includes two states. One state means that the branch pipe 327 and the coating liquid pipe 328 are connected to each other in the connection member 43 disposed in the connection container 40, and the other state means the branch pipe 327. The connection member 43 is inserted into the connection container 40, and the branch pipe 327 and the coating liquid pipe 328 are connected to each other in the connection container 40 by a known connection means.
另外，氣體供給管421的端部在連接容器40內形成開口，該氣體供給管421構成插通至連接容器40內的管群42。並且，間隙423也在連接容器40內形成開口，所述間隙423是因氣體供給管421與多個塗佈液管328被捆束材424捆束而形成。因此，從供氣部33經由氣體供給管331而供給至連接容器40內的惰性氣體，被供給至氣體供給管421及間隙423。此時，較佳的是從供氣部33供給的惰性氣體的供給壓高於大氣壓的壓力。原因在於：利用高於大氣壓的壓力來供給惰性氣體，藉此，可確實地將惰性氣體供給至間隙423。 Further, an end portion of the gas supply pipe 421 forms an opening in the connection container 40, and the gas supply pipe 421 constitutes a tube group 42 that is inserted into the connection container 40. Further, the gap 423 is also formed in the connection container 40, and the gap 423 is formed by the gas supply pipe 421 and the plurality of coating liquid pipes 328 being bundled by the bundle 424. Therefore, the inert gas supplied from the air supply unit 33 to the connection container 40 via the gas supply pipe 331 is supplied to the gas supply pipe 421 and the gap 423. At this time, it is preferable that the supply pressure of the inert gas supplied from the gas supply unit 33 is higher than the pressure of the atmospheric pressure. The reason is that the inert gas is supplied by the pressure higher than the atmospheric pressure, whereby the inert gas can be surely supplied to the gap 423.
經由氣體供給管421而將惰性氣體供給至滑動件52，藉此，滑動件52一面以非接觸狀態卡合於引導部51，一面以能夠向主掃描方向移動的方式受到支撐。另外，將惰性氣體供給至間隙423，藉此，在構成管群42的多個塗佈液管328的周圍形成惰性氣體層。 The inert gas is supplied to the slider 52 via the gas supply pipe 421, whereby the slider 52 is supported by the guide portion 51 while being in a non-contact state, so as to be movable in the main scanning direction. Further, an inert gas is supplied to the gap 423, whereby an inert gas layer is formed around the plurality of coating liquid tubes 328 constituting the tube group 42.
如此，在由鐵氟龍(註冊商標)系材料形成的塗佈液管328的周圍形成惰性氣體層，藉此，可防止氧穿透塗佈液管328內部，從而可防止因塗佈液暴露於氧而引起的壽命縮短。 Thus, an inert gas layer is formed around the coating liquid pipe 328 formed of a Teflon (registered trademark)-based material, whereby oxygen can be prevented from penetrating the inside of the coating liquid pipe 328, thereby preventing exposure of the coating liquid. The life caused by oxygen is shortened.
另外，在充滿惰性氣體的連接容器40內，使以所述方式由金屬配管形成的分支管327、與由鐵氟龍(註冊商標)系材料形成的塗佈液管328連結，並且將惰性氣體供給至管群42的間隙423，藉此，在任一個區間內，均可防止塗佈液管328與氧發生接觸。 Further, in the connection container 40 filled with the inert gas, the branch pipe 327 formed of the metal pipe as described above is connected to the coating liquid pipe 328 formed of the Teflon (registered trademark) material, and the inert gas is introduced. The gap 423 is supplied to the tube group 42, whereby the coating liquid pipe 328 can be prevented from coming into contact with oxygen in any of the sections.
接著，一面參照圖7，一面對塗佈裝置1中的具體的塗佈動作進行說明。圖7是表示塗佈裝置1中的塗佈液的塗佈流程的圖。利用平臺10來保持基板9之後，拍攝部11拍攝對準標記，基於來自拍攝部11的輸出，將平臺移動機構20予以驅動，基板9移動及旋轉，並移動至塗佈開始位置(步驟(step)S11)。如上所述，在基板9的主面上排列形成彼此平行的多個間隔壁，主面上的間隔壁之間的區域數的線狀區域以固定的區域間距，沿著與主掃描方向垂直的副掃描方向排列在主面上，以此狀態來準備作為處理物件的基板9。此時，塗佈頭30在副掃描方向上，預 先配置在基板9的(+Y)側的端部附近，且在主掃描方向上，預先配置在待機位置即受液部12的上方。 Next, a specific coating operation in the coating device 1 will be described with reference to Fig. 7 . FIG. 7 is a view showing a coating flow of the coating liquid in the coating device 1. After the substrate 10 is held by the stage 10, the imaging unit 11 captures an alignment mark, drives the stage moving mechanism 20 based on the output from the imaging unit 11, moves and rotates the substrate 9, and moves to the coating start position (step (step) )S11). As described above, a plurality of partition walls which are parallel to each other are arranged on the main surface of the substrate 9, and the linear regions of the number of regions between the partition walls on the main surface are perpendicular to the main scanning direction at a fixed area pitch. The sub-scanning direction is arranged on the main surface, and the substrate 9 as a processing object is prepared in this state. At this time, the coating head 30 is in the sub-scanning direction, First, it is disposed in the vicinity of the end portion on the (+Y) side of the substrate 9, and is disposed in advance in the main scanning direction above the liquid receiving portion 12, which is a standby position.
接著，開始從多個噴嘴31噴出塗佈液(步驟S12)，進而對塗佈頭移動機構50進行控制，塗佈頭30開始向主掃描方向移動(即，從圖1中的(-X)側向(+X)側進行主掃描)。藉此，一面以固定的流量，從多個噴嘴31分別向基板9的主面連續地(不間斷地)噴出塗佈液，一面使塗佈頭30以固定的速度向主掃描方向連續地移動，將塗佈液呈條紋狀地塗佈至基板9的塗佈區域91的16個線狀區域(步驟S13)。 Next, the coating liquid is ejected from the plurality of nozzles 31 (step S12), and the coating head moving mechanism 50 is further controlled, and the coating head 30 starts moving in the main scanning direction (that is, from (-X) in FIG. The main scan is performed on the lateral (+X) side). By this, the coating liquid 30 is continuously moved (continuously) from the plurality of nozzles 31 to the main surface of the substrate 9 at a constant flow rate, and the coating head 30 is continuously moved in the main scanning direction at a constant speed. The coating liquid is applied to the 16 linear regions of the coating region 91 of the substrate 9 in a stripe shape (step S13).
接著，塗佈頭30移動至待機位置即受液部12的上方為止，藉此，利用塗佈液來形成條紋狀的圖案(pattern)。再者，圖1中的塗佈區域91的(-X)側及(+X)側的非塗佈區域(以及根據需要，(+Y)側及(-Y)側的非塗佈區域)被省略圖示的光罩覆蓋，因此，塗佈液不會直接塗佈至基板9上。 Then, the coating head 30 is moved to the standby position, that is, above the liquid receiving portion 12, whereby a stripe pattern is formed by the coating liquid. Further, the (-X) side and the (+X) side non-coating area of the coating region 91 in FIG. 1 (and the (+Y) side and the (-Y) side non-coated region as needed) The mask is covered by a mask (not shown), so that the coating liquid is not directly applied onto the substrate 9.
若塗佈頭30移動至待機位置為止，則將平臺移動機構20予以驅動，基板9與平臺10一起向(+Y)方向(即，副掃描方向)移動與區域間距的48倍相等的距離(步驟S14)。此時，塗佈頭30從多個噴嘴31向受液部12連續地噴出塗佈液。 When the coating head 30 is moved to the standby position, the stage moving mechanism 20 is driven, and the substrate 9 moves together with the stage 10 in the (+Y) direction (ie, the sub-scanning direction) by a distance equal to 48 times the area spacing ( Step S14). At this time, the coating head 30 continuously ejects the coating liquid from the plurality of nozzles 31 to the liquid receiving portion 12 .
若副掃描方向上的基板9的移動結束，則藉由控制部2來確認基板9及平臺10是否已移動至塗佈結束位置(步驟S15)。接著，當尚未移動至塗佈結束位置時，返回至 步驟S13，塗佈頭30一面從多個噴嘴31噴出塗佈液，一面從基板9的(+X)側向(-X)方向(即，主掃描方向)移動，藉此，將塗佈液塗佈至基板9上的線狀區域(步驟S13)。然後，基板9向副掃描方向移動，確認該基板9是否已移動至塗佈結束位置(步驟S14、步驟S15)。 When the movement of the substrate 9 in the sub-scanning direction is completed, it is confirmed by the control unit 2 whether or not the substrate 9 and the stage 10 have moved to the coating end position (step S15). Then, when you have not moved to the coating end position, return to In step S13, the coating head 30 ejects the coating liquid from the plurality of nozzles 31 while moving from the (+X) side (-X) direction of the substrate 9 (that is, the main scanning direction), thereby applying the coating liquid. It is applied to the linear region on the substrate 9 (step S13). Then, the substrate 9 is moved in the sub-scanning direction to confirm whether or not the substrate 9 has moved to the coating end position (steps S14 and S15).
在塗佈裝置1中，每當直至平臺10及基板9位於塗佈結束位置，塗佈頭30的朝向主掃描方向的移動完成時，使基板9相對地向副掃描方向移動(即，反復地進行塗佈頭30在主掃描方向上的移動、及基板9的朝向(+Y)側的步進移動)，藉此，將塗佈液呈條紋狀地塗佈至基板9的塗佈區域91，所述條紋狀是所述塗佈液以與區域間距的3倍相等的間距排列而成的形狀(步驟S13~步驟S15)。在塗佈裝置1中，在副掃描方向上，將塗佈液塗佈至基板9上時的前進方向(即，塗佈頭30相對於基板9的相對移動方向)與利用平臺移動機構20來使基板9移動時的移動方向相反。 In the coating device 1, each time the movement of the coating head 30 in the main scanning direction is completed until the stage 10 and the substrate 9 are at the coating end position, the substrate 9 is relatively moved in the sub-scanning direction (that is, repeatedly) The movement of the coating head 30 in the main scanning direction and the stepwise movement of the orientation (+Y) side of the substrate 9 are performed, whereby the coating liquid is applied to the coating region 91 of the substrate 9 in a stripe shape. The stripe shape is a shape in which the coating liquid is arranged at a pitch equal to three times the pitch of the regions (steps S13 to S15). In the coating apparatus 1, the advancing direction when the coating liquid is applied onto the substrate 9 in the sub-scanning direction (that is, the relative moving direction of the coating head 30 with respect to the substrate 9) and the use of the stage moving mechanism 20 The moving direction when the substrate 9 is moved is reversed.
實際上，在塗佈裝置1中，高速地反復使塗佈頭30向主掃描方向移動，及使基板9向副掃描方向移動(即，高速地反復使塗佈頭30在主掃描方向上進行往返移動)，但由於管群42對於變形的剛性高，因此，當將塗佈液塗佈至基板9上時，管群42幾乎不會變形。因此，在管群42維持著大致固定的形狀的狀態下(在所謂的剛體模式(mode)下)，塗佈頭30進行振動運動。 Actually, in the coating device 1, the coating head 30 is repeatedly moved in the main scanning direction at a high speed, and the substrate 9 is moved in the sub-scanning direction (that is, the coating head 30 is repeatedly repeatedly performed in the main scanning direction at a high speed. Since the tube group 42 has high rigidity for deformation, when the coating liquid is applied onto the substrate 9, the tube group 42 hardly deforms. Therefore, in a state in which the tube group 42 is maintained in a substantially fixed shape (in a so-called rigid body mode), the coating head 30 performs a vibration motion.
接著，若基板9移動至塗佈結束位置，則停止從多個 噴嘴31噴出塗佈液(步驟S15、步驟S16)，塗佈裝置1對於基板9進行的塗佈液的塗佈結束。將利用塗佈裝置1進行的塗佈已結束的基板9搬送至其他塗佈裝置等，塗佈除了塗佈裝置1所塗佈的塗佈液以外的其他的雙色塗佈液。接著，對基板9進行了規定的步驟之後，將該基板9與其他零件加以組合，製造有機EL顯示裝置。再者，在塗佈裝置1中，實際上將塗佈液連續地塗佈至多個基板9。 Next, if the substrate 9 is moved to the coating end position, the stop is stopped from a plurality of The nozzle 31 ejects the coating liquid (steps S15 and S16), and the application of the coating liquid by the coating device 1 to the substrate 9 is completed. The substrate 9 that has been coated by the coating device 1 is transferred to another coating device or the like, and a two-color coating liquid other than the coating liquid applied by the coating device 1 is applied. Next, after the predetermined process of the substrate 9 is performed, the substrate 9 and other components are combined to manufacture an organic EL display device. Further, in the coating device 1, the coating liquid is actually continuously applied to the plurality of substrates 9.
以上，如說明所述，在本發明的塗佈裝置1中，一面使塗佈頭30高速地移動，一面將塗佈液均一地塗佈至基板9上，因此，在塗佈液管328及氣體供給管421中採用具有可撓性的材料，所述塗佈液管328及氣體供給管421用以將塗佈液及惰性氣體供給至塗佈頭30。此時，在連接容器40內將分支管327與塗佈液管328予以連結，將供給至連接容器40內的惰性氣體供給至氣體供給管421及管群42內的間隙423，藉此，氧不會穿透塗佈液管328內，可防止塗佈液的壽命縮短。同時，可利用塗佈頭30的高速移動來進行塗佈。 As described above, in the coating device 1 of the present invention, the coating liquid is uniformly applied to the substrate 9 while the coating head 30 is moved at a high speed. Therefore, the coating liquid pipe 328 and The gas supply pipe 421 is made of a flexible material, and the coating liquid pipe 328 and the gas supply pipe 421 are used to supply the coating liquid and the inert gas to the coating head 30. At this time, the branch pipe 327 and the coating liquid pipe 328 are connected in the connection container 40, and the inert gas supplied into the connection container 40 is supplied to the gap 423 in the gas supply pipe 421 and the pipe group 42, whereby oxygen It does not penetrate the inside of the coating liquid pipe 328, and the life of the coating liquid can be prevented from being shortened. At the same time, coating can be performed by high speed movement of the coating head 30.
接著，對本發明的其他實施方式進行說明。圖8是用以對本發明的第二實施方式的連接容器40進行說明的概要圖。第二實施方式與所述第一實施方式的不同點在於包括：空氣(air)供給部34以及空氣供給管341。空氣供給部34用以將氣體供給至氣體供給管421；空氣供給管341用以將氣體從空氣供給部34供給至連接容器40為止。再者，對與圖6所示的第一實施方式相同的構件標記相同的 符號，且將詳細的說明予以省略。 Next, other embodiments of the present invention will be described. FIG. 8 is a schematic view for explaining the connection container 40 according to the second embodiment of the present invention. The second embodiment is different from the first embodiment in that it includes an air supply unit 34 and an air supply tube 341. The air supply unit 34 supplies gas to the gas supply pipe 421, and the air supply pipe 341 supplies gas from the air supply unit 34 to the connection container 40. Furthermore, the same members as those of the first embodiment shown in FIG. 6 are labeled the same. Symbols, and detailed descriptions will be omitted.
空氣供給部34是用以將氣體供給至塗佈頭移動機構50的機構，該空氣供給部34經由空氣供給管341而連接於連接容器40。空氣供給部34至少在進行塗佈處理期間供給氣體。再者，在處理停止期間，也可供給氣體。另外，空氣供給部34所供給的氣體可為空氣(air)或惰性氣體(例如氮氣等)等，也可為其他氣體。在本實施方式的以下的說明中，對供給空氣的例子進行說明。 The air supply unit 34 is a mechanism for supplying gas to the coating head moving mechanism 50 , and the air supply unit 34 is connected to the connection container 40 via the air supply pipe 341 . The air supply unit 34 supplies a gas at least during the coating process. Further, the gas may be supplied during the stop of the process. Further, the gas supplied from the air supply unit 34 may be air or an inert gas (for example, nitrogen) or the like, or may be other gases. In the following description of the present embodiment, an example of supplying air will be described.
空氣供給管341連結著空氣供給部34與連接容器40，將從空氣供給部34供給的空氣引導至連接容器40。在連接容器40中，形成有用以與空氣供給管341連結的開口部，空氣供給管341經由連結構件45而連結於該開口部。再者，連結構件45具有密封構造。另外，管群42的端部插通在連接容器40內，塗佈液管328與氣體供給管421從該端部伸出，各個分支管327與各個塗佈液管328經由連結構件43而被連結且被連通連接。同樣地，空氣供給管341與氣體供給管421經由連結構件45而被連結且連通連接。 The air supply pipe 341 is connected to the air supply unit 34 and the connection container 40, and guides the air supplied from the air supply unit 34 to the connection container 40. In the connection container 40, an opening for connecting to the air supply pipe 341 is formed, and the air supply pipe 341 is coupled to the opening via the connection member 45. Furthermore, the connecting member 45 has a sealed structure. Further, the end of the tube group 42 is inserted into the connection container 40, and the coating liquid pipe 328 and the gas supply pipe 421 are projected from the end portion, and the respective branch pipes 327 and the respective coating liquid pipes 328 are connected via the connecting member 43. Linked and connected. Similarly, the air supply pipe 341 and the gas supply pipe 421 are connected and connected to each other via the connection member 45.
如此，能夠將經由分支管327而供給的塗佈液供給至各個塗佈液管328。同樣地，能夠將從空氣供給部34供給的空氣供給至氣體供給管421。 In this manner, the coating liquid supplied through the branch pipe 327 can be supplied to each of the coating liquid pipes 328. Similarly, the air supplied from the air supply unit 34 can be supplied to the gas supply pipe 421.
以上，如說明所述，在第二實施方式的塗佈裝置中，一面使塗佈頭30高速地移動，一面將塗佈液均一地塗佈至基板9上，因此，在塗佈液管328及氣體供給管421中採 用具有可撓性的材料，所述塗佈液管328及氣體供給管421用以將塗佈液及空氣供給至塗佈頭30。此時，在連接容器40內將分支管327與塗佈液管328予以連結，並且將從供氣部33供給至連接容器40內的惰性氣體供給至管群42內的間隙423。另外，將從空氣供給部34供給的空氣供給至氣體供給管421。如此，藉由設置用以使塗佈頭30高速地移動的空氣供給部34，可使供給至間隙423的惰性氣體的供給壓力降低，並且藉由將惰性氣體供給至間隙423，氧不會穿透塗佈液管328內，可防止塗佈液的壽命縮短。同時，可利用塗佈頭30的高速移動來進行塗佈。 As described above, in the coating apparatus of the second embodiment, the coating liquid is uniformly applied to the substrate 9 while the coating head 30 is moved at a high speed. Therefore, the coating liquid tube 328 is applied. And the gas supply pipe 421 The coating liquid pipe 328 and the gas supply pipe 421 are used to supply the coating liquid and air to the coating head 30 by using a flexible material. At this time, the branch pipe 327 and the coating liquid pipe 328 are connected in the connection container 40, and the inert gas supplied from the air supply unit 33 to the connection container 40 is supplied to the gap 423 in the pipe group 42. Further, the air supplied from the air supply unit 34 is supplied to the gas supply pipe 421. Thus, by providing the air supply portion 34 for moving the coating head 30 at a high speed, the supply pressure of the inert gas supplied to the gap 423 can be lowered, and by supplying the inert gas to the gap 423, oxygen does not pass through. The inside of the coating liquid pipe 328 can prevent the life of the coating liquid from being shortened. At the same time, coating can be performed by high speed movement of the coating head 30.
以上，對本發明的實施方式進行了說明，但本發明並不限定於所述實施方式，能夠進行各種變形。 Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above, and various modifications can be made.
在管群42中，使氣體供給管421及多個塗佈液管328所***的管狀的收縮性構件收縮，從而形成捆束材424，藉此，能夠牢固且容易地捆束氣體供給管421及多個塗佈液管328，且可容易地製作管群42，但例如也可將膠帶(adhesive tape)無間隙地纏繞在氣體供給管421的周圍所配置的多個塗佈液管328的整個外周，藉此來形成捆束材。即使在此情況下，也可將惰性氣體經由連接容器40，供給至形成在氣體供給管421與塗佈液管328之間的間隙423，因此，可防止塗佈液暴露於氧。 In the pipe group 42, the tubular shrinkage member into which the gas supply pipe 421 and the plurality of coating liquid pipes 328 are inserted is contracted to form the bundle member 424, whereby the gas supply pipe 421 can be bundled firmly and easily. And a plurality of coating liquid tubes 328, and the tube group 42 can be easily produced. However, for example, an adhesive tape may be wound around the plurality of coating liquid tubes 328 disposed around the gas supply tube 421 without a gap. The entire periphery is used to form a bundle of materials. Even in this case, the inert gas can be supplied to the gap 423 formed between the gas supply pipe 421 and the coating liquid pipe 328 via the connection container 40, and therefore, the coating liquid can be prevented from being exposed to oxygen.
對於塗佈裝置而言，例如也可在塗佈頭30中，在Y方向上排列有3α根(α為正整數)噴嘴31，並且設置有分別包含紅色(R)、綠色(G)、及藍色(B)的三種有機 EL材料的三種塗佈液的供給源，將紅色塗佈液供給至從最靠(+Y)側的噴嘴31每隔開兩個噴嘴31而存在的噴嘴31，將綠色塗佈液供給至與被供給了紅色塗佈液的噴嘴31的(-Y)側相鄰接的噴嘴31，將藍色塗佈液供給至剩餘的噴嘴31，藉此，藉由塗佈頭30的一次主掃描，將三種塗佈液同時塗佈至基板9上。 For the coating device, for example, in the coating head 30, 3α (α is a positive integer) nozzle 31 may be arranged in the Y direction, and red (R), green (G), and Blue (B) three organic The supply source of the three coating liquids of the EL material is supplied to the nozzle 31 in which the two coating nozzles 31 are separated from the nozzle 31 closest to the (+Y) side, and the green coating liquid is supplied to The nozzle 31 adjacent to the (-Y) side of the nozzle 31 to which the red coating liquid is supplied supplies the blue coating liquid to the remaining nozzle 31, whereby the primary scanning by the coating head 30 is performed. Three coating liquids were simultaneously applied onto the substrate 9.
另外，在塗佈頭30中，只要噴出塗佈液的噴嘴31設為2根以上，則也可設為任意的根數，但根據如下的觀點，較佳的是將噴嘴31設為3根以上，將塗佈液管328設為3根以上，所述觀點是指將多根塗佈液管328等間隔地配置在氣體供給管421的外周上，使管群42對於變形的剛性在與管群42的延伸方向垂直的全部方向上大致均等地增大。在此情況下，也可一面擰轉多個塗佈液管328，一面將多個塗佈液管328(呈螺旋狀地)捲繞在氣體供給管421的周圍，藉此，進一體提高管群的剛性。另外，也可根據塗佈液管328的數量，將塗佈液管328呈多層地配置在氣體供給管421的周圍(即，將塗佈液管328重疊地配置于氣體供給管421上的塗佈液管328)。如此，即使將塗佈液管328配置在氣體供給管421的周圍，也可將惰性氣體經由連接容器40而供給至管群42的間隙423，因此，可防止氧穿透塗佈液管328，從而可防止塗佈液變差。 In addition, in the coating head 30, if the number of the nozzles 31 for ejecting the coating liquid is two or more, the number of nozzles 31 may be any number. However, it is preferable to set the nozzle 31 to three. In the above, the number of the coating liquid tubes 328 is three or more. The above-mentioned viewpoint is that the plurality of coating liquid tubes 328 are disposed at equal intervals on the outer circumference of the gas supply tube 421, and the rigidity of the tube group 42 with respect to deformation is The direction in which the tube group 42 extends is substantially equally increased in all directions perpendicular to the direction. In this case, the plurality of coating liquid tubes 328 may be wound around the plurality of coating liquid tubes 328, and the plurality of coating liquid tubes 328 (in a spiral shape) may be wound around the gas supply tube 421, thereby integrally raising the tubes. The rigidity of the group. In addition, the coating liquid pipe 328 may be disposed in a plurality of layers around the gas supply pipe 421 in accordance with the number of the coating liquid pipes 328 (that is, the coating liquid pipe 328 may be disposed on the gas supply pipe 421 in an overlapping manner. Cloth tube 328). As described above, even if the coating liquid pipe 328 is disposed around the gas supply pipe 421, the inert gas can be supplied to the gap 423 of the pipe group 42 via the connection container 40, so that oxygen can be prevented from penetrating the coating liquid pipe 328. Thereby, the coating liquid can be prevented from being deteriorated.
另外，將連接容器40設為長方體，但並不限定於此。連接容器40只要為容易連結分支管327或氣體供給管331、管群42等的構造即可，例如也可為多面體構造。 Further, the connection container 40 is a rectangular parallelepiped, but is not limited thereto. The connection container 40 may have a structure in which the branch pipe 327, the gas supply pipe 331, the pipe group 42, and the like are easily connected, and may be, for example, a polyhedral structure.
另外，在所述實施方式中，實現了使用包含發光材料的塗佈液，在基板9上形成發光材料的圖案，但除了揮發性的溶劑(例如水)之外，也可將包含電洞輸送材料(hole transport material)的塗佈液塗佈至基板9。即使在此情況下，塗佈裝置也可將包含電洞輸送材料的塗佈液均一地塗佈至基板9上，而不會使該塗佈液暴露於氧。再者，所謂電洞輸送材料，是指形成有機EL顯示裝置的電洞輸送層的材料，所謂電洞輸送層，並非僅指將電洞輸送至有機EL材料所形成的有機EL層的狹義的電洞輸送層，而是還包含進行電洞注入的電洞注入層。 In addition, in the embodiment, the pattern of the luminescent material is formed on the substrate 9 using the coating liquid containing the luminescent material, but in addition to the volatile solvent (for example, water), the hole-containing transport may be included. A coating liquid of a hole transport material is applied to the substrate 9. Even in this case, the coating device can uniformly apply the coating liquid containing the hole transporting material to the substrate 9 without exposing the coating liquid to oxygen. In addition, the term "hole transport material" refers to a material that forms a hole transport layer of an organic EL display device, and the so-called hole transport layer does not mean only a narrow sense of transporting a hole to an organic EL layer formed of an organic EL material. The hole transport layer, but also includes a hole injection layer for hole injection.
另外，在所述實施方式中，將多個塗佈液管328配置在氣體供給管421的周圍，以利用捆束材424來將多個塗佈液管328的整個外周予以覆蓋的方式進行捆束，藉此來形成管群42，但不限於此。只要一體地捆束氣體供給管421與多個塗佈液管328即可，氣體供給管421與多個塗佈液管328的位置關係並無限定。因此，也可利用捆束材來一體地捆束多個塗佈液管328集合體與氣體供給管421，從而形成管群42。 Further, in the above-described embodiment, the plurality of coating liquid pipes 328 are disposed around the gas supply pipe 421, and the entire outer circumferences of the plurality of coating liquid pipes 328 are covered by the binding material 424. The bundle, thereby forming the tube group 42, is not limited thereto. The gas supply pipe 421 and the plurality of coating liquid pipes 328 may be integrally bundled, and the positional relationship between the gas supply pipe 421 and the plurality of coating liquid pipes 328 is not limited. Therefore, the plurality of coating liquid pipe 328 assemblies and the gas supply pipe 421 can be integrally bundled by the bundling material to form the pipe group 42.
另外，可以說塗佈裝置1特別適合於如下的情況，該情況是指採用塗佈頭移動機構50(滑動件及引導部)，且塗佈頭30的最大移動速度為每秒1 m以上且為10 m以下，所述塗佈頭移動機構50(滑動件及引導部)利用空氣或惰性氣體，使塗佈頭30向主掃描方向移動。原因在於：由於塗佈頭30高速地移動，因此，較佳的是用以將塗佈液 及空氣或惰性氣體供給至該塗佈頭30的塗佈液管328及氣體供給管421具有可撓性。在此情況下，氧有可能會穿透塗佈液管328。因此，經由連接容器40將惰性氣體填充至塗佈液管328的外周，並且將空氣或惰性氣體供給至塗佈頭移動機構50，藉此，可在使塗佈頭30高速地移動的同時，防止塗佈液暴露於氧。 In addition, it can be said that the coating device 1 is particularly suitable for the case where the coating head moving mechanism 50 (slider and guide portion) is employed, and the maximum moving speed of the coating head 30 is 1 m or more per second and When the coating head moving mechanism 50 (slider and guide portion) is 10 m or less, the coating head 30 is moved in the main scanning direction by air or an inert gas. The reason is that since the coating head 30 moves at a high speed, it is preferably used to apply the coating liquid. The coating liquid pipe 328 and the gas supply pipe 421 supplied to the coating head 30 by air or an inert gas have flexibility. In this case, it is possible for oxygen to penetrate the coating liquid pipe 328. Therefore, the inert gas is filled to the outer circumference of the coating liquid pipe 328 via the connection container 40, and air or an inert gas is supplied to the coating head moving mechanism 50, whereby the coating head 30 can be moved at a high speed while being moved at a high speed. Prevent the coating solution from being exposed to oxygen.
1‧‧‧塗佈裝置 1‧‧‧ Coating device
2‧‧‧控制部 2‧‧‧Control Department
9‧‧‧基板 9‧‧‧Substrate
10‧‧‧平臺 10‧‧‧ platform
11‧‧‧拍攝部 11‧‧‧Photography Department
12‧‧‧受液部 12‧‧‧Liquid Department
20‧‧‧平臺移動機構 20‧‧‧ platform moving mechanism
21‧‧‧基台 21‧‧‧Abutment
22‧‧‧副掃描機構 22‧‧‧Sub Scanning Mechanism
23‧‧‧支撐板 23‧‧‧Support board
24‧‧‧旋轉機構 24‧‧‧Rotating mechanism
30‧‧‧塗佈頭 30‧‧‧Coating head
31‧‧‧噴嘴 31‧‧‧Nozzles
32‧‧‧塗佈液供給部 32‧‧‧ Coating Liquid Supply Department
33‧‧‧供氣部 33‧‧‧Air Supply Department
34‧‧‧空氣供給部 34‧‧‧Air Supply Department
40‧‧‧連接容器 40‧‧‧Connected container
41、43、44、45‧‧‧連結構件 41, 43, 44, 45‧‧‧ Linked components
42‧‧‧管群 42‧‧‧
50‧‧‧塗佈頭移動機構 50‧‧‧ Coating head moving mechanism
51‧‧‧引導部 51‧‧‧Guidance Department
52‧‧‧滑動件 52‧‧‧Sliding parts
52a‧‧‧貫通孔 52a‧‧‧through hole
53‧‧‧滑輪 53‧‧‧ pulley
54‧‧‧同步帶 54‧‧‧Synchronous belt
91‧‧‧塗佈區域 91‧‧‧ coated area
221‧‧‧線性馬達 221‧‧‧Linear motor
222‧‧‧導軌 222‧‧‧rails
321‧‧‧容器 321‧‧‧ container
322‧‧‧液體供給管 322‧‧‧Liquid supply tube
323‧‧‧泵 323‧‧‧ pump
324‧‧‧質流控制器 324‧‧‧Quality Flow Controller
325‧‧‧壓力計 325‧‧‧ pressure gauge
326‧‧‧篩檢程式 326‧‧‧ screening program
327‧‧‧分支管 327‧‧‧ branch tube
328‧‧‧塗佈液管 328‧‧‧ coating liquid tube
329‧‧‧塗佈液供給路徑 329‧‧‧ Coating solution supply path
331、421‧‧‧氣體供給管 331, 421‧‧‧ gas supply pipe
332‧‧‧氣體供給口 332‧‧‧ gas supply port
341‧‧‧空氣供給管 341‧‧‧Air supply pipe
422‧‧‧氣體供給路徑 422‧‧‧ gas supply path
423‧‧‧間隙 423‧‧‧ gap
424‧‧‧捆束材 424‧‧‧Bundles
A1‧‧‧箭頭 A1‧‧‧ arrow
S11~S16‧‧‧步驟 S11~S16‧‧‧Steps
X、Y、Z‧‧‧方向 X, Y, Z‧‧ Direction
圖1是塗佈裝置的平面圖。 Figure 1 is a plan view of a coating apparatus.
圖2是塗佈裝置的正面圖。 Figure 2 is a front elevational view of the coating apparatus.
圖3是表示塗佈液供給部的構成的圖。 3 is a view showing a configuration of a coating liquid supply unit.
圖4是塗佈頭移動機構的滑動件(slider)的剖面圖。 4 is a cross-sectional view of a slider of a coating head moving mechanism.
圖5是管群的切斷部端面圖。 Fig. 5 is an end view of a cut portion of the tube group.
圖6是用以對第一實施方式中的連接容器進行說明的概要圖。 Fig. 6 is a schematic view for explaining a connection container in the first embodiment.
圖7是表示塗佈液的塗佈流程的圖。 Fig. 7 is a view showing a coating flow of a coating liquid.
圖8是用以對第二實施方式中的連接容器進行說明的概要圖。 Fig. 8 is a schematic view for explaining a connection container in the second embodiment.
33‧‧‧供氣部 33‧‧‧Air Supply Department
40‧‧‧連接容器 40‧‧‧Connected container
41、43、44‧‧‧連結構件 41, 43, 44‧‧‧ Linked components
42‧‧‧管群 42‧‧‧
327‧‧‧分支管 327‧‧‧ branch tube
328‧‧‧塗佈液管 328‧‧‧ coating liquid tube
331‧‧‧氣體供給管 331‧‧‧ gas supply pipe
332‧‧‧氣體供給口 332‧‧‧ gas supply port
424‧‧‧捆束材 424‧‧‧Bundles
Claims (5)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012040480A JP5750385B2 (en) | 2012-02-27 | 2012-02-27 | Coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201341065A TW201341065A (en) | 2013-10-16 |
| TWI535495B true TWI535495B (en) | 2016-06-01 |
Family
ID=49089966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102106412A TWI535495B (en) | 2012-02-27 | 2013-02-23 | Coating apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5750385B2 (en) |
| KR (1) | KR101466466B1 (en) |
| CN (1) | CN103288356B (en) |
| TW (1) | TWI535495B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016112797B3 (en) * | 2016-07-12 | 2017-12-21 | Eisenmann Se | Apparatus and method for masking mounting holes in rims |
| CN110523558A (en) * | 2019-08-28 | 2019-12-03 | 昆山工研院新型平板显示技术中心有限公司 | A kind of coating mechanism |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842629A (en) * | 1981-09-08 | 1983-03-12 | Showa Electric Wire & Cable Co Ltd | Crosslinking of plastic tube or pipe |
| JPH0771662A (en) * | 1993-09-02 | 1995-03-17 | Nitta Moore Co Ltd | Collective piping for fluid |
| JPH09143670A (en) * | 1995-11-21 | 1997-06-03 | Mitsubishi Materials Corp | Oxide base ceramics coating disk rotor |
| JPH10236140A (en) * | 1997-02-26 | 1998-09-08 | Toyota Autom Loom Works Ltd | Viscous heater |
| JP2000038024A (en) | 1998-07-23 | 2000-02-08 | Toyota Autom Loom Works Ltd | Heat generator |
| JP2005218899A (en) * | 2004-02-03 | 2005-08-18 | Toshiba Corp | Coating device and display device manufacturing apparatus provided with this |
| KR100840482B1 (en) * | 2006-02-27 | 2008-06-20 | 다이니폰 스크린 세이조우 가부시키가이샤 | Applying apparatus and method |
| JP2009131735A (en) * | 2007-11-28 | 2009-06-18 | Dainippon Screen Mfg Co Ltd | Coating apparatus |
| EP2331398B1 (en) * | 2008-09-22 | 2017-05-17 | Caterpillar Propulsion Production AB | An adjustable propeller arrangement and a method of distributing fluid to and/or from such an adjustable propeller arrangement. |
-
2012
- 2012-02-27 JP JP2012040480A patent/JP5750385B2/en not_active Expired - Fee Related
-
2013
- 2013-02-04 CN CN201310044987.2A patent/CN103288356B/en not_active Expired - Fee Related
- 2013-02-23 TW TW102106412A patent/TWI535495B/en not_active IP Right Cessation
- 2013-02-26 KR KR1020130020337A patent/KR101466466B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130098214A (en) | 2013-09-04 |
| KR101466466B1 (en) | 2014-11-28 |
| JP5750385B2 (en) | 2015-07-22 |
| CN103288356B (en) | 2015-06-24 |
| TW201341065A (en) | 2013-10-16 |
| JP2013173123A (en) | 2013-09-05 |
| CN103288356A (en) | 2013-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI321430B (en) | ||
| JP6339909B2 (en) | Substrate processing apparatus and substrate processing method | |
| TW201332410A (en) | Material deposition system for depositing materials on a substrate | |
| TW201330735A (en) | Method for depositing materials on a substrate | |
| TWI535495B (en) | Coating apparatus | |
| JP5798411B2 (en) | Coating device | |
| JP5733636B2 (en) | Nozzle unit, substrate processing apparatus, and substrate processing method | |
| CN107618265B (en) | Droplet discharge device and discharge inspection method | |
| JP2009131735A (en) | Coating apparatus | |
| TWI417497B (en) | Reduced-pressure drying device and reduced-pressure drying method | |
| JP5537223B2 (en) | Coating device | |
| KR101528456B1 (en) | Apparatus and method treating substrate | |
| JP4726124B2 (en) | Application system | |
| CN103537404A (en) | Apparatus for spreading paste | |
| KR101530318B1 (en) | Deposition unit and Apparatus for deposition | |
| JP2005230817A (en) | Organic substance injection device | |
| TWI571305B (en) | Coating device and coating method | |
| JP6208515B2 (en) | Coating apparatus and coating method | |
| JP2006150206A (en) | Functional membrane forming apparatus and functional membrane forming method | |
| JP2005246312A (en) | Coating method and coating apparatus | |
| JP2012208009A (en) | Coating device | |
| JP5554609B2 (en) | Coating device | |
| TWI343282B (en) | Paste dispenser capable of preventing generation of static electricity | |
| JP4821134B2 (en) | Patent application title: APPARATUS AND APPARATUS AND METHOD FOR COATING LIQUID USING THE SAME | |
| JP2009195851A (en) | Coating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |