TWI513918B - Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device - Google Patents

Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device Download PDF

Info

Publication number
TWI513918B
TWI513918B TW102111746A TW102111746A TWI513918B TW I513918 B TWI513918 B TW I513918B TW 102111746 A TW102111746 A TW 102111746A TW 102111746 A TW102111746 A TW 102111746A TW I513918 B TWI513918 B TW I513918B
Authority
TW
Taiwan
Prior art keywords
bearing
static pressure
pressure gas
recess
annular groove
Prior art date
Application number
TW102111746A
Other languages
English (en)
Chinese (zh)
Other versions
TW201348616A (zh
Inventor
Hikaru Sato
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of TW201348616A publication Critical patent/TW201348616A/zh
Application granted granted Critical
Publication of TWI513918B publication Critical patent/TWI513918B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Pivots And Pivotal Connections (AREA)
TW102111746A 2012-04-02 2013-04-01 Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device TWI513918B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012084364A JP5924084B2 (ja) 2012-04-02 2012-04-02 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置

Publications (2)

Publication Number Publication Date
TW201348616A TW201348616A (zh) 2013-12-01
TWI513918B true TWI513918B (zh) 2015-12-21

Family

ID=49300231

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102111746A TWI513918B (zh) 2012-04-02 2013-04-01 Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device

Country Status (5)

Country Link
JP (1) JP5924084B2 (ja)
KR (1) KR101608361B1 (ja)
CN (1) CN104204571A (ja)
TW (1) TWI513918B (ja)
WO (1) WO2013150723A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6237814B2 (ja) * 2016-04-13 2017-11-29 オイレス工業株式会社 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
CN112059902A (zh) * 2020-08-18 2020-12-11 广州市昊志机电股份有限公司 一种气浮电主轴和磨削机床

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127927A (ja) * 1984-11-22 1986-06-16 Ishikawajima Harima Heavy Ind Co Ltd 複式多板クラツチ機構
JPH09296825A (ja) * 1996-04-30 1997-11-18 Kuroda Precision Ind Ltd 静圧気体軸受
JP2005201370A (ja) * 2004-01-15 2005-07-28 Oiles Ind Co Ltd 静圧気体軸受パッド用の隙間調節装置及びこれを用いた静圧気体軸受機構
JP2006510857A (ja) * 2002-12-18 2006-03-30 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 気体軸受装置
JP2008082449A (ja) * 2006-08-31 2008-04-10 Oiles Ind Co Ltd 静圧気体軸受
JP2010060013A (ja) * 2008-09-02 2010-03-18 Ckd Corp 浮上ユニット及びそれを備えた非接触支持装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1083098B (it) * 1977-07-11 1985-05-21 Dea Spa Macchina utensile o macchina di misura con scorrimento a pattini pneumatici e magnetici
JPS61127927U (ja) * 1985-01-29 1986-08-11
JP2006322531A (ja) * 2005-05-18 2006-11-30 Oiles Ind Co Ltd 静圧気体軸受を有したエアスライド装置
DE102007058066A1 (de) * 2006-12-01 2008-06-05 Ntn Corp. Aerostatische Lagerspindel
JP2008138783A (ja) * 2006-12-01 2008-06-19 Ntn Corp 静圧気体軸受スピンドル
US7607647B2 (en) * 2007-03-20 2009-10-27 Kla-Tencor Technologies Corporation Stabilizing a substrate using a vacuum preload air bearing chuck
JP2010096311A (ja) * 2008-10-17 2010-04-30 Ntn Corp 静圧軸受パッド、直動案内装置および回転案内装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127927A (ja) * 1984-11-22 1986-06-16 Ishikawajima Harima Heavy Ind Co Ltd 複式多板クラツチ機構
JPH09296825A (ja) * 1996-04-30 1997-11-18 Kuroda Precision Ind Ltd 静圧気体軸受
JP2006510857A (ja) * 2002-12-18 2006-03-30 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 気体軸受装置
JP2005201370A (ja) * 2004-01-15 2005-07-28 Oiles Ind Co Ltd 静圧気体軸受パッド用の隙間調節装置及びこれを用いた静圧気体軸受機構
JP2008082449A (ja) * 2006-08-31 2008-04-10 Oiles Ind Co Ltd 静圧気体軸受
JP2010060013A (ja) * 2008-09-02 2010-03-18 Ckd Corp 浮上ユニット及びそれを備えた非接触支持装置

Also Published As

Publication number Publication date
JP5924084B2 (ja) 2016-05-25
KR101608361B1 (ko) 2016-04-01
KR20140133896A (ko) 2014-11-20
CN104204571A (zh) 2014-12-10
WO2013150723A1 (ja) 2013-10-10
JP2013213544A (ja) 2013-10-17
TW201348616A (zh) 2013-12-01

Similar Documents

Publication Publication Date Title
TWI513917B (zh) Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
TWI491815B (zh) Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
TWI582314B (zh) Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
TWI513918B (zh) Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
TWI504821B (zh) Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
US9046131B2 (en) Hydrostatic gas bearing and method of manufacturing the same
JP6237814B2 (ja) 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
TW201314069A (zh) 靜壓氣體軸承及其製造方法