TWI513858B - Method for integrating and erecting nanotubes column - Google Patents

Description

奈米碳管直立集束成型方法 Nano carbon tube upright bundle forming method

本發明係關於一種奈米碳管直立集束成型方法，更詳而言，係指一種利用介電泳法集成與集束奈米碳管成為奈米集成束之方法。 The invention relates to a nano carbon tube upright bundling forming method, and more particularly to a method for integrating and integrating a carbon nanotube into a nano integrated beam by using a dielectrophoresis method.

自從奈米碳管為日本物理學家飯島澄男在1991觀察到與報導之後，各個領域對奈米碳管產生前所未有的興趣，進而投入更多的資源來研究奈米技術。請同時參閱1991年11月7日出版之「自然」期刊第354冊第56~58頁。由於物質在奈米尺寸下展現出極為出眾的物理與化學特性，因此奈米科技已成為各個領域所追求與開發的聖杯，各個領域莫不爭先恐後地投入奈米碳管的開發與應用，以期賦予現有產品創新生命。 Since the carbon nanotubes were observed and reported by the Japanese physicist Iijima Shunman in 1991, there has been an unprecedented interest in carbon nanotubes in various fields, and more resources have been devoted to the study of nanotechnology. Please also refer to pages 56 to 58 of Volume 354 of the journal Nature, published on November 7, 1991. Because the material exhibits outstanding physical and chemical properties under the nanometer size, nanotechnology has become the holy grail of pursuit and development in various fields. The development and application of carbon nanotubes in various fields are not to be rushed in order to give existing Product innovation life.

然，奈米碳管在能夠做實體的應用之前，必須先予以處理及組裝。舉例來說，在傳統奈米碳管的領域裡，運用了一種所謂的平面式電泳來處理奈米碳管，以期達到進一步應用的目的，如第一圖所示。基本上，這種方式係以平面電極進行介電泳，以將奈米碳管組裝兩電極間，形成橋接兩電極的二維平面結構。而這種平面結構的奈米碳管，僅適合應用在奈米電子元件、奈米電晶體與一些化學感測器上，不適合其他需要立體結構的應用，如電連接器領域的端子通常需要用來連接晶片模組及印刷電路板，其形態通 常都是立體結構，故採用上述所謂的平面式電泳顯然不能夠方便地將奈米碳管運用在電連接器中。 However, carbon nanotubes must be processed and assembled before they can be used as physical applications. For example, in the field of conventional carbon nanotubes, a so-called planar electrophoresis is used to process the carbon nanotubes for further application, as shown in the first figure. Basically, this method uses a planar electrode for dielectrophoresis to assemble a carbon nanotube between two electrodes to form a two-dimensional planar structure that bridges the two electrodes. The planar carbon nanotubes are only suitable for use in nanoelectronic components, nanocrystals and some chemical sensors, and are not suitable for other applications requiring a three-dimensional structure, such as terminals in the field of electrical connectors. To connect the chip module and the printed circuit board, the form is Often, they are all three-dimensional structures, so it is obviously not easy to apply the carbon nanotubes in the electrical connector by using the above-mentioned so-called planar electrophoresis.

美國專利公告US6,626,684雖然揭露了一種其採用圓柱狀結構的奈米碳管容納於連接器本體之中以傳遞訊號的電連接器，然該專利並未公開如何製備這樣一種電連接器，實際上，如前所述，要得到這樣一種使用圓柱狀結構的奈米碳管絕非易事。 U.S. Patent No. 6,626,684 discloses an electrical connector in which a cylindrical carbon nanotube is housed in a connector body for transmitting signals. However, the patent does not disclose how to prepare such an electrical connector. As mentioned above, it is not easy to obtain such a carbon nanotube using a cylindrical structure.

故，如果要讓奈米碳管以立體形態做全新的應用，則不得不開發出一種全新的方法，使奈米碳管組裝成立體結構的奈米碳管束，以擴大其使用的範圍。 Therefore, if the carbon nanotubes are to be completely applied in a three-dimensional form, a new method has to be developed to assemble the carbon nanotube bundles of the body structure to expand the scope of use.

鑒於上述內容，本發明的目的在於提供一種能夠獲得立體形態的奈米碳管的奈米碳管集束成型方法。 In view of the above, it is an object of the present invention to provide a carbon nanotube bundle forming method capable of obtaining a carbon nanotube in a three-dimensional form.

為達成上述目的，根據本發明精神所提供之一種奈米碳管直立集束成型方法，包括提供一導電層並於該導電層上覆蓋一非導電物質層之第一步驟；在該非導電物質層上至少形成一目標孔洞之第二步驟；在該目標孔洞上方提供一電極之第三步驟；向該目標孔洞滴入含有奈米碳管之分散液之第四步驟；及在導電層與電極間施加一適當交流電場以穿過該碳管分散液，以在該目標孔洞內集成該碳管分散液內之奈米碳管，以形成匯集成束狀之奈米碳管集成束之第五步驟。 In order to achieve the above object, a nano carbon tube upright bundling method according to the spirit of the present invention includes a first step of providing a conductive layer and covering a conductive layer with a non-conductive material layer; on the non-conductive material layer a second step of forming at least one target hole; a third step of providing an electrode above the target hole; a fourth step of dropping a dispersion containing the carbon nanotube into the target hole; and applying between the conductive layer and the electrode A suitable alternating electric field is passed through the carbon tube dispersion to integrate the carbon nanotubes in the carbon tube dispersion in the target pore to form a fifth step of integrating the bunched carbon nanotube integrated bundle.

與先前技術相比，本發明之奈米碳管直立集束成型方法具有以下優點：實質上採用垂直電場作用於目標奈米碳管分散液，從而可以方便地得到立體結構之奈米碳管。 Compared with the prior art, the nano carbon tube upright bundling method of the present invention has the following advantages: a vertical electric field is substantially applied to the target carbon nanotube dispersion, so that a three-dimensional carbon nanotube can be conveniently obtained.

10‧‧‧第一電極 10‧‧‧First electrode

11‧‧‧基板 11‧‧‧Substrate

11a‧‧‧目標孔洞 11a‧‧‧ Target Hole

12‧‧‧第二電極 12‧‧‧Second electrode

13‧‧‧分散液 13‧‧‧Dispersion

13a‧‧‧奈米碳管 13a‧‧‧Nano Carbon Tube

14‧‧‧奈米碳管束 14‧‧‧Nano carbon nanotube bundle

16‧‧‧基底 16‧‧‧Base

第一圖係習知以平面式介電泳處理奈米碳管之示意圖；第二圖(a)，(b)為本發明奈米碳管直立集束成型方法基本原理示意圖；第三A圖及第三B圖為本發明奈米碳管直立集束成型方法之示意圖；第四圖為根據本發明奈米碳管直立集束成型方法所成型集之奈米碳管束之照片。 The first figure is a schematic diagram of a conventional method for processing a carbon nanotube by planar dielectrophoresis; the second drawing (a), (b) is a schematic diagram of the basic principle of the nano carbon tube upright bundling forming method of the present invention; FIG. 3B is a schematic view showing the method for forming the nano carbon tube upright bundling of the present invention; and the fourth drawing is a photograph of the carbon nanotube bundle formed by the nano carbon tube upright bundling forming method according to the present invention.

請參考第二圖(a)，(b)所示，由於奈米碳管在外加的交流電場之影響下會受到不同程度的電偶極化，這種現象被稱為介電特性。而奈米碳管在受到了電偶極化之後，便會被介電力驅動，使電偶極化的奈米碳管在分散液中進行泳動，更會順著外加電場的方向來進行組裝及排列。故，我們稱這種現象為介電泳。 Please refer to the second figure (a), (b), because the carbon nanotubes are subject to different degrees of galvanic polarization under the influence of the applied alternating electric field, this phenomenon is called dielectric property. After being polarized by the galvanic couple, the carbon nanotubes are driven by the dielectric, so that the galvanically polarized carbon nanotubes move in the dispersion and are assembled in the direction of the applied electric field. arrangement. Therefore, we call this phenomenon dielectrophoresis.

第二圖(a)揭示出奈米碳管被電偶化；而第二圖(b)則揭示出被電偶化的奈米碳管在電場的作用下，便順著電場的方向排列。 The second graph (a) reveals that the carbon nanotubes are galvanic; and the second graph (b) reveals that the quaternized carbon nanotubes are aligned in the direction of the electric field under the action of the electric field.

第三A圖則為本發明利用「直立式介電泳」來達成集成與集束奈米碳管成為奈米集成束之方法。所謂「直立式介電泳」係區別於傳統平面式介電泳，利用該方法可得到直立結構的集束奈米碳管。 The third A diagram is a method for achieving integration and clustering of carbon nanotubes into a nano-integrated bundle by using "upright dielectrophoresis". The so-called "upright dielectrophoresis" is distinguished from the conventional planar dielectrophoresis, and a bundled carbon nanotube of an upright structure can be obtained by this method.

根據該方法，當需要得到直立結構的集束奈米碳管時，首先提供一基板11，該基板11上設置有目標孔洞11a，該孔洞可以根據習知技術製成，至於目標孔洞11a的排列，可以依實際的需要排列 成矩陣或任何其他符合實際使用需求的態樣。然後在目標物10兩側分別設置第一電極10、第二電極12，且使兩電極與孔洞11a對應。 According to the method, when it is required to obtain the bundled carbon nanotubes of the upright structure, first, a substrate 11 is provided, and the substrate 11 is provided with a target hole 11a which can be formed according to a conventional technique, as for the arrangement of the target holes 11a, Can be arranged according to actual needs Form a matrix or any other aspect that meets the needs of the actual use. Then, the first electrode 10 and the second electrode 12 are respectively disposed on both sides of the object 10, and the two electrodes are made to correspond to the holes 11a.

根據本發明之較佳實施例，基板11為非導電物質層，該第一電極10係一導電層且覆蓋在非導電物質層下表面上。該第一電極10之材質係金，當然可以為其他適合材料；特別地，根據本發明之較佳實施例，導電層(第一電極10)和非導電物質層(基板11)係佈置於一硅材質之基底16上，例如一晶圓，然後通過在金上以微機電SU8製程，做出微孔洞結構作為目標孔洞。 According to a preferred embodiment of the present invention, the substrate 11 is a non-conductive material layer, and the first electrode 10 is a conductive layer and covers the lower surface of the non-conductive material layer. The material of the first electrode 10 is gold, of course, may be other suitable materials; in particular, according to a preferred embodiment of the present invention, the conductive layer (first electrode 10) and the non-conductive material layer (substrate 11) are arranged in one On the substrate 16 of silicon material, for example, a wafer, a micro-cavity structure is formed as a target hole by a micro-electromechanical SU8 process on gold.

接下來，該方法包括在該目標孔洞11a上方提供一第二電極12之步驟。根據本發明之較佳實施例，該第二電極12為一柱狀或針狀之導體，當然也可以為其他任何的形狀，能配合第一電極10形成電場(或電力線)，而其直徑最好較該目標孔洞11a為小，以用於控制與主導被形成之奈米碳管束之直徑。當然，該第二電極12之截面亦可以為任何幾何形狀，例如環狀或多邊形狀。並且通過這種不同形態截面之第二電極12，來控制所生成之奈米碳管之形狀。第二電極12上方最好設置一平板狀結構，以便於將液滴拉起形成液柱，增加進行介電泳的溶液體積及碳管數量。 Next, the method includes the step of providing a second electrode 12 over the target hole 11a. According to a preferred embodiment of the present invention, the second electrode 12 is a columnar or needle-shaped conductor, and of course any other shape, which can form an electric field (or power line) with the first electrode 10, and has the largest diameter. It is preferably smaller than the target hole 11a for controlling and guiding the diameter of the formed carbon nanotube bundle. Of course, the cross section of the second electrode 12 can also be any geometric shape, such as a ring shape or a polygonal shape. And the shape of the generated carbon nanotube is controlled by the second electrode 12 of the different shape cross section. Preferably, a flat plate structure is disposed above the second electrode 12 to facilitate pulling up the liquid droplets to form a liquid column, increasing the volume of the solution and the number of carbon tubes for performing dielectrophoresis.

需要指出，雖然實施例揭示的第二電極12僅有一支電極，但在實際的運用中，該第二電極12亦可以配合目標孔洞11a的排列的形狀或陣列來排配。例如，當目標孔洞11a排列成標準的矩陣時，則該電二電極12亦可以排列成相對應的矩陣，以同時在每一相對應的目標孔洞11a內形成奈米碳管束14。 It should be noted that although the second electrode 12 disclosed in the embodiment has only one electrode, in actual use, the second electrode 12 can also be arranged in accordance with the shape or array of the arrangement of the target holes 11a. For example, when the target holes 11a are arranged in a standard matrix, the electric two electrodes 12 may also be arranged in a corresponding matrix to simultaneously form the carbon nanotube bundle 14 in each of the corresponding target holes 11a.

接下來，則進行在該目標孔洞11a內滴置含有奈米碳管粉末13a之 分散液13之第三步驟。而該含有奈米碳管13a之分散液13之製備，則容稍後說明。 Next, the carbon nanotube powder 13a containing the carbon nanotubes is dropped in the target hole 11a. The third step of the dispersion 13. The preparation of the dispersion 13 containing the carbon nanotube 13a will be described later.

在完成於該基板11之目標孔洞11a內滴入含有奈米碳管13a之分散液13之後，便在第一與第二電極11,12間施加一適當交流電壓以穿過該分散液13，以在該目標孔洞11a內集成該分散液13內之奈米碳管13a，以形成匯集成束狀之奈米碳管集成束14，如請參考第四圖所示。 After the dispersion 13 containing the carbon nanotube 13a is dropped into the target hole 11a of the substrate 11, an appropriate alternating voltage is applied between the first and second electrodes 11, 12 to pass through the dispersion 13. The carbon nanotube 13a in the dispersion 13 is integrated in the target hole 11a to form a bundle of carbon nanotube integrated bundles 14 as shown in the fourth figure.

而如第三B圖中所示，在過程中，奈米碳管分散液13中的個別奈米碳管13a會如第二圖(a)，(b)所示之方式，漸漸地在介電泳力的作用下，朝中間移動，並且在一定時間後匯集成奈米碳束。可以看到，第三B圖中，對於孔洞內的奈米碳管分散液13而言，該電壓形成之電場係一垂直電場，其電場係沿垂直方向，或者更確切地說，是垂直於待對應的含有奈米碳管粉末13a之分散液。 As shown in the third panel B, in the process, the individual carbon nanotubes 13a in the carbon nanotube dispersion 13 are gradually introduced as shown in the second diagrams (a) and (b). Under the action of the electrophoretic force, it moves toward the middle and, after a certain time, collects into a nano carbon bundle. It can be seen that in the third B diagram, for the carbon nanotube dispersion 13 in the hole, the electric field formed by the voltage is a vertical electric field whose electric field is perpendicular, or more precisely perpendicular to The corresponding dispersion containing the carbon nanotube powder 13a.

如第四圖所示，利用本發明直立式介電泳方法所生成之奈米碳管束，係為一立體結構。與習知使用平面式介電泳方法所生成之二維平面碳管結構有極大的差異，即首次將奈米碳管製作成立體狀。因此可以突破其現有的應用範圍。 As shown in the fourth figure, the carbon nanotube bundle produced by the vertical dielectrophoresis method of the present invention is a three-dimensional structure. There is a great difference from the conventional two-dimensional planar carbon tube structure generated by the planar dielectrophoresis method, that is, the carbon nanotube is first formed into a body shape. Therefore, it can break through its existing application range.

由於奈米碳管在分散的過程中，因為其本身的體積及質量很小，碳管與碳管間的凡德瓦力相較之下變得很強勁，使得碳管很容易糾結在一起。因此要做實際的組裝應用時，最好先予以處理，讓每一支纖細的奈米碳管彼此分散分離。 Since the carbon nanotubes are dispersed, because of their small volume and mass, the van der Waals force between the carbon tubes and the carbon tubes becomes very strong, making the carbon tubes easy to entangle. Therefore, when it comes to actual assembly applications, it is best to treat them first, so that each of the fine carbon nanotubes is dispersed and separated from each other.

根據本發明，該含有分散液13之製備係以50%的蒸餾水+50%的酒精，再加入經過酸洗過之奈米碳管粉末，並且進行超音波震洗 1.5小時。利用前述的方式進行奈米碳管的分散，可以達到極為良好的效果。 According to the present invention, the dispersion 13 is prepared by adding 50% distilled water + 50% alcohol, then adding the acid washed carbon nanotube powder, and performing ultrasonic shock washing. 1.5 hours. By dispersing the carbon nanotubes in the manner described above, extremely good results can be achieved.

本發明的技術內容和技術特點已揭示如上，然而熟悉本領域的技術人員仍可能基於本發明的教示及揭示進行種種不背離本發明精神的替換和修飾。因此，本發明的保護範圍應不限於實施方式所揭示的內容，而包括各種不背離本發明的替換和修飾，均為本專利申請權利要求所涵蓋。 The technical contents and technical features of the present invention have been disclosed as above, but those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of the invention is not to be construed as limited by the scope of

10‧‧‧第一電極 10‧‧‧First electrode

11‧‧‧基板 11‧‧‧Substrate

12‧‧‧第二電極 12‧‧‧Second electrode

13‧‧‧分散液 13‧‧‧Dispersion

13a‧‧‧奈米碳管 13a‧‧‧Nano Carbon Tube

16‧‧‧基底 16‧‧‧Base

Claims (8)

一種奈米碳管直立集束成型方法，包括下列步驟：(1)提供一導電層，並於該導電層上覆蓋一非導電物質層；(2)於非導電物質層上形成有至少一目標孔洞，並在該目標孔洞上方放置一電極，該電極之直徑小於所述目標孔洞之直徑；(3)向孔洞內滴入適量含奈米碳管粉末之分散液，奈米碳管分散液之製備係將奈米碳管粉末與適當之水及酒精混合而成，該水與酒精之體積比係介於1：3與1：1之間；(4)於該導電層和電極之間施加一預定電壓以穿過該分散液，以在該目標孔洞內集成該分散液內之奈米碳管，匯集形成束狀之奈米碳管集成束。 A carbon nanotube upright bundling forming method comprises the following steps: (1) providing a conductive layer and covering the conductive layer with a non-conductive material layer; (2) forming at least one target hole on the non-conductive material layer And placing an electrode above the target hole, the diameter of the electrode is smaller than the diameter of the target hole; (3) dropping a proper amount of the dispersion containing the carbon nanotube powder into the hole, preparing the carbon nanotube dispersion The carbon nanotube powder is mixed with appropriate water and alcohol, and the volume ratio of the water to the alcohol is between 1:3 and 1:1; (4) a layer is applied between the conductive layer and the electrode. A predetermined voltage is passed through the dispersion to integrate the carbon nanotubes in the dispersion into the target pores to form a bundle of bundled carbon nanotubes. 如申請專利範圍第1項所述之奈米碳管直立集束成型方法，其中該導電層之材質為金。 The nano carbon tube upright bundling forming method according to claim 1, wherein the conductive layer is made of gold. 如申請專利範圍第1項或第2項所述之奈米碳管直立集束成型方法，其中導電層和非導電物質層係佈置於一硅材質之基底上。 The nano carbon tube upright bundling forming method according to claim 1 or 2, wherein the conductive layer and the non-conductive material layer are arranged on a substrate made of silicon. 如申請專利範圍第1項所述之奈米碳管直立集束成型方法，其中奈米碳管分散液之製備係以50%的水、50%的酒精及奈米碳管粉末混合而成。 The nano carbon tube upright bundling forming method according to claim 1, wherein the preparation of the carbon nanotube dispersion is prepared by mixing 50% water, 50% alcohol and carbon nanotube powder. 如申請專利範圍第4項所述之奈米碳管直立集束成型方法，其中該水為蒸餾水。 The method for forming a carbon nanotube upright bundle as described in claim 4, wherein the water is distilled water. 如申請專利範圍第1項或第4項所述之奈米碳管直立集束成型方法，其中在製備奈米碳管分散液之前，對該奈米碳管粉末進行酸處理。 The nano carbon tube upright bundling forming method according to claim 1 or 4, wherein the carbon nanotube powder is subjected to an acid treatment before preparing the carbon nanotube dispersion. 如申請專利範圍第1項所述之奈米碳管直立集束成型方法，其中所述電極為針電極，電極上方設置一平板狀結構，電極整體呈“T”字型，以便形 成液柱。 The nano carbon tube upright bundling forming method according to claim 1, wherein the electrode is a needle electrode, and a flat plate structure is arranged above the electrode, and the whole electrode has a “T” shape for shape Liquid column. 如申請專利範圍第6項所述之奈米碳管直立集束成型方法，其中上述奈米碳管分散液經超音波震洗1.5小時後注入孔洞。 The nano carbon tube upright bundling forming method according to claim 6, wherein the carbon nanotube dispersion is injected into the hole after ultrasonic vibration washing for 1.5 hours.