CN102465327B - Forming method of nanotube upright cluster - Google Patents
Forming method of nanotube upright cluster Download PDFInfo
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- CN102465327B CN102465327B CN201010545851.6A CN201010545851A CN102465327B CN 102465327 B CN102465327 B CN 102465327B CN 201010545851 A CN201010545851 A CN 201010545851A CN 102465327 B CN102465327 B CN 102465327B
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- nanotube
- carbon nanotube
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Abstract
The invention provides a kind of forming method of nanotube upright cluster, comprise and provide a conductive layer and the first step covering an electron opaque material layer on this conductive layer; This electron opaque material layer is at least formed the second step of a target hole; The third step of one electrode is provided above this target hole; To the 4th step of the dispersion liquid of this target hole instillation containing carbon nanotube; And between conductive layer and electrode, apply a suitable alternating-electric field with through this carbon pipe dispersion liquid, with the carbon nanotube in this carbon pipe dispersion liquid integrated in this target hole, to form the 5th step of the integrated bundle of the carbon nanotube accumulating pencil.
Description
[technical field]
The present invention is about a kind of forming method of nanotube upright cluster, and espespecially one utilizes the integrated method becoming how meter Ji Cheng bundle with boundling carbon nanotube of dielectrophoresis method.
[background technology]
Since carbon nanotube be Japanese physicist Sumio Iijima 1991 observe with report after, every field produces unprecedented interest to carbon nanotube, and then drops into more resource to study how rice technology.The 354th 56th ~ 58 pages, it " nature " periodical is published please refer on November 7th, 1991.Because material shows very outstanding physics and chemical property how under meter ruler cun, therefore how rice science and technology become every field pursue and the Holy grail developed, every field is there's no one who doesn't or isn't fallen over each other and is dropped into the development & application of carbon nanotube, to giving currently available products innovation life.
But carbon nanotube, before the application can doing entity, must first be processed and be assembled.For example, in the field of traditional carbon nanotube, used a kind of so-called plane formula electrophoresis to process carbon nanotube, to reaching the object of application further, as shown in Figure 1.Substantially, this mode carries out dielectrophoresis with plane electrode, to be assembled by carbon nanotube between two electrodes, forms the two-dimension plane structure of bridge joint two electrode.And the carbon nanotube of this two dimensional structure, only be applicable to being applied in how on rice electronic package, how some chemical sensors of rice transistor AND gate, be not suitable for the application that other need three-dimensional arrangement, terminal as electric connector field needs for chip module connection and printed circuit board (PCB) usually, its form is all three-dimensional arrangement usually, therefore adopts above-mentioned so-called plane formula electrophoresis obviously can not be used in electrical connectors by carbon nanotube easily.
U.S. Patent Bulletin US6,626, be contained among connector body although 684 disclose a kind of carbon nanotube of cylindrical-shaped structure that adopts with the electric connector of transmitting signals, so this patent unexposedly how to prepare so a kind of electric connector, in fact, as previously mentioned, a kind of like this carbon nanotube of cylindrical-shaped structure that uses be obtained by no means easy.
Therefore, if carbon nanotube will be allowed to do brand-new application with solid shape, then have to develop a kind of brand-new method, make carbon nanotube be assembled into the carbon nanotube bundle of three-dimensional arrangement, to expand the scope that it uses.
[summary of the invention]
The technical problem that the present invention will solve is to provide a kind of carbon nanotube boundling forming method that can obtain the carbon nanotube of solid shape.
For solving the problems of the technologies described above, the invention provides a kind of forming method of nanotube upright cluster, comprising and providing a conductive layer and the first step covering an electron opaque material layer on this conductive layer; This electron opaque material layer is at least formed the second step of a target hole; The third step of one electrode is provided above this target hole; To the 4th step of the dispersion liquid of hole instillation containing carbon nanotube; And between conductive layer and electrode, apply a suitable alternating-electric field with through this carbon pipe dispersion liquid, with the carbon nanotube in this carbon pipe dispersion liquid integrated in this target hole, to form the 5th step of the integrated bundle of the carbon nanotube accumulating pencil.
Compared with prior art, the present invention has the following advantages: adopt in fact vertical electric field to act on target carbon nanotube dispersion liquid, thus can obtain the carbon nanotube of three-dimensional arrangement easily.
[accompanying drawing explanation]
Fig. 1 is that prior art is with the schematic diagram of plane formula dielectrophoresis process carbon nanotube.
Fig. 2 (a), (b) is the schematic diagram of forming method of nanotube upright cluster ultimate principle of the present invention.
Fig. 3 A, B are the schematic diagram of forming method of nanotube upright cluster of the present invention.
Fig. 4 is the photo of the carbon nanotube bundle according to the shaping collection of forming method of nanotube upright cluster of the present invention.
[embodiment]
Please refer to Fig. 2 (a), shown in (b), because carbon nanotube can be subject to galvanic couple polarization in various degree under the impact of additional alternating-electric field, this phenomenon is called as dielectric characteristics.And carbon nanotube is after receiving galvanic couple polarization, just can by Jie's driven by power, the carbon nanotube that galvanic couple is polarized carries out swimming in dispersion liquid, more can carry out assembling and arranging along the direction of extra electric field.Therefore we claim this phenomenon to be dielectrophoresis.
Fig. 2 (a) discloses carbon nanotube by galvanic couple; Fig. 2 (b) then discloses by the carbon nanotube of galvanic couple under the effect of electric field, just arranges along the direction of electric field.
Fig. 3 A then integratedly becomes with boundling carbon nanotube the method how meter Ji Cheng restraints for the present invention utilizes " vertical type dielectrophoresis " to reach.So-called " vertical type dielectrophoresis " refers to be different from conventional planar dielectrophoresis, utilizes the method can obtain the boundling carbon nanotube of rising structure.
According to the method, when needing the boundling carbon nanotube obtaining rising structure, first one substrate 11 is provided, this substrate 11 is provided with target hole 11a, this hole can be made according to prior art, as for the arrangement of target hole 11a, can need according to actual the aspect being arranged in matrix or any other realistic user demand.Then the first electrode 10, second electrode 12 is set respectively in target compound 10 both sides, and makes two electrodes corresponding with hole 11a.
According to the preferred embodiment of the present invention, substrate 11 is electron opaque material layer, and this first electrode 10 is a conductive layer and covers on electron opaque material layer lower surface.The material of this first electrode 10 is gold, can be other applicable materials certainly; Especially, according to the preferred embodiment of the present invention, conductive layer (the first electrode 10) and electron opaque material layer (substrate 11) are arranged in the substrate 16 of a silicon material, a such as wafer, then by gold with micro electronmechanical SU8 processing procedure, make microstructure as target hole.
Next, the method is included in the step providing one second electrode 12 above this target hole 11a.According to the preferred embodiment of the present invention, this the second electrode 12 is the conductor of a column or needle-like, can certainly be other any shapes, the first electrode 10 can be coordinated to form electric field (or power line), and its diameter preferably comparatively this target hole 11a be little, for controlling the diameter with the leading carbon nanotube bundle be formed.Certainly, the cross section of this second electrode 12 can also be any geometrical shape, such as ring-type or polygon-shaped.And by second electrode 12 in this different shape cross section, control the shape of carbon nanotube that generates.Above second electrode 12, a plate-like structure is preferably set, so that drop pull-up is formed fluid column, increases liquor capacity and the carbon pipe quantity of carrying out dielectrophoresis.
Although it may be noted that the second electrode 12 that embodiment discloses only has an electrode, in the utilization of reality, this second electrode 12 can also coordinate the shape of the arrangement of target hole 11a or array to carry out deploying.Such as, when target hole 11a is arranged in the matrix of standard, then these electric two electrodes 12 can also be arranged in corresponding matrix, to form carbon nanotube bundle 14 in the target hole 11a that each is corresponding simultaneously.
Next, then the third step dripping the dispersion liquid 13 put containing carbon nanotube powder 13a in this target hole 11a is carried out.And the preparation of the dispersion liquid 13 of carbon nanotube 13a should be contained, then hold and illustrate after a while.
To complete in the target hole 11a of this substrate 11 instillation containing the dispersion liquid 13 of carbon nanotube 13a after, just at first and second electrode 11, a suitable voltage of alternating current is applied to pass this dispersion liquid 13 between 12, with the carbon nanotube 13a in this dispersion liquid 13 integrated in this target hole 11a, to form the integrated bundle 14 of carbon nanotube accumulating pencil, as please refer to shown in Fig. 4.
And as shown in Figure 3 B, during the course, the indivedual carbon nanotube 13a in carbon nanotube dispersion liquid 13 can as Fig. 2 (a), b () be mode shownschematically, gradually under the effect of dielectrophoretic force, move towards centre, and accumulate how rice carbon bundle after a certain time.Can see, in Fig. 3 B, for the carbon nanotube dispersion liquid 13 in hole, the electric field of this voltage formation is a vertical electric field, and its electric field vertically, or or rather, is perpendicular to and treats the corresponding dispersion liquid containing carbon nanotube powder 13a.
As shown in Figure 4, utilizing the carbon nanotube bundle that vertical type dielectrophoresis method of the present invention generates, is a three-dimensional arrangement.The two dimensional surface carbon tubular construction generated with existing use plane formula dielectrophoresis method has great difference, namely first carbon nanotube is made into stereo structure.Therefore its existing range of application can be broken through.
Because carbon nanotube is in the process of dispersion, because the volume of itself and quality are very little, the Fan Dewali between carbon pipe and carbon pipe becomes very powerful in comparison, makes carbon pipe be easy to intertwine.When therefore will do actual assembling application, preferably first processed, the carbon nanotube making each very thin disperses to be separated each other.
According to the present invention, should be with the alcohol of the distilled water+50% of 50% containing preparation of dispersion liquid 13, then add the carbon nanotube powder crossed through overpickling, and carry out ultrasound shake and wash 1.5 hours.Utilize aforesaid mode to carry out the dispersion of carbon nanotube, very good effect can be reached.
Claims (9)
1. a forming method of nanotube upright cluster, comprises the following steps:
(1) conductive layer is provided, and on this conductive layer, covers an electron opaque material layer;
(2) on electron opaque material layer, be formed with at least one target hole, and place an electrode above this target hole;
(3) the appropriate dispersion liquid containing carbon nanotube powder of instillation in hole;
(4) between this conductive layer and electrode, apply voltage with through this dispersion liquid, with the carbon nanotube in this dispersion liquid integrated in this target hole, collect the integrated bundle of carbon nanotube forming pencil.
2. forming method of nanotube upright cluster as claimed in claim 1, is characterized in that: the material of this conductive layer is gold.
3. forming method of nanotube upright cluster as claimed in claim 1 or 2, is characterized in that: conductive layer and electron opaque material series of strata are arranged in the substrate of a silicon material.
4. forming method of nanotube upright cluster as claimed in claim 1, is characterized in that: the preparation of carbon nanotube dispersion liquid is mixed carbon nanotube powder and suitable water and alcohol.
5. forming method of nanotube upright cluster as claimed in claim 4, is characterized in that: the volume ratio of described water and alcohol is between 1:3 and 1:1.
6. the forming method of nanotube upright cluster as described in claim 4 or 5, is characterized in that: described water is distilled water.
7. the forming method of nanotube upright cluster as described in claim 1 or 4, is characterized in that: before preparing carbon nanotube dispersion liquid, carries out acid treatment to this carbon nanotube powder.
8. forming method of nanotube upright cluster as claimed in claim 1, is characterized in that: described electrode is pin electrode, and electrode upper end has a plate-like structure, and electrode integral is " T " font, to form fluid column.
9. forming method of nanotube upright cluster as claimed in claim 8, is characterized in that: above-mentioned carbon nanotube dispersion liquid injects hole after ultrasound shake washes 1.5 hours.
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| CN201010545851.6A CN102465327B (en) | 2010-11-16 | 2010-11-16 | Forming method of nanotube upright cluster |
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| CN201010545851.6A CN102465327B (en) | 2010-11-16 | 2010-11-16 | Forming method of nanotube upright cluster |
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| CN102465327A CN102465327A (en) | 2012-05-23 |
| CN102465327B true CN102465327B (en) | 2016-01-06 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1660696A (en) * | 2004-02-25 | 2005-08-31 | 三星电子株式会社 | Method of horizontally growing carbon nanotubes and device having the same |
| CN1797660A (en) * | 2004-12-18 | 2006-07-05 | 三星Sdi株式会社 | Method of vertically aligning carbon nanotubes using electrophoresis |
| CN101409961A (en) * | 2007-10-10 | 2009-04-15 | 清华大学 | Surface heat light source, preparation method thereof and method for heating object using the same |
| CN101493561A (en) * | 2008-01-21 | 2009-07-29 | 鸿富锦精密工业（深圳）有限公司 | Carbon nanotube driver, lens module using the carbon nanotube driver and camera module |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090001491A1 (en) * | 2006-10-30 | 2009-01-01 | Biomimetics Technologies Inc | Method for producing a microchip that is able to detect infrared light with a semiconductor at room temperature |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1660696A (en) * | 2004-02-25 | 2005-08-31 | 三星电子株式会社 | Method of horizontally growing carbon nanotubes and device having the same |
| CN1797660A (en) * | 2004-12-18 | 2006-07-05 | 三星Sdi株式会社 | Method of vertically aligning carbon nanotubes using electrophoresis |
| CN101409961A (en) * | 2007-10-10 | 2009-04-15 | 清华大学 | Surface heat light source, preparation method thereof and method for heating object using the same |
| CN101493561A (en) * | 2008-01-21 | 2009-07-29 | 鸿富锦精密工业（深圳）有限公司 | Carbon nanotube driver, lens module using the carbon nanotube driver and camera module |
Non-Patent Citations (3)
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| 》.2007,第21卷第95-98页. * |
| Field emissio n from nano tube bundle emitter s at low fields;Wang Q H等;《Appl Phys Lett》;19971231;第70卷(第24期);第3308页 * |
| 周小康等.定向生长碳纳米管阵列的制备及其应用研究进展.《材料导报􀀁 * |
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