TWI506301B - Microlens structure and fabrication method thereof - Google Patents
Microlens structure and fabrication method thereof Download PDFInfo
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Description
本發明是有關於一種微透鏡結構，且特別是關於一種微透鏡結構光照裝置。The present invention relates to a microlens structure, and more particularly to a microlens structure illumination device.
微透鏡指直徑小於1毫米，特別是直徑小於10微米的透鏡，屬於被動光學元件，常用於光學系統中以聚焦或發散光。透過微透鏡尺寸的縮小化，以得到良好的光學質量，並減少不必要的光學衍射。當微透鏡重複排列形成於基材上之時，則形成微透鏡陣列。微透鏡陣列常被應用於發光二極體或有機發光二極體之上以提升光萃取率，降低光在發光二極體內全反射的比率。Microlenses refer to lenses having a diameter of less than 1 mm, in particular less than 10 microns in diameter, and are passive optical components commonly used in optical systems to focus or diverge light. Through the reduction of the size of the microlens, good optical quality is obtained, and unnecessary optical diffraction is reduced. When the microlenses are repeatedly arranged on the substrate, a microlens array is formed. Microlens arrays are often used on light-emitting diodes or organic light-emitting diodes to increase the light extraction rate and reduce the ratio of total light reflection in the light-emitting diode.
由於微透鏡陣列在聚光、對焦、大面積顯示、光效率增強等方面有越來越廣泛的應用，更多人投入於微透鏡的製造方法的研究。而研究方向不外乎縮短製造時間以及提升透鏡品質。常見的微透鏡陣列製造方法包含近接式曝光法、微球排列法、熱熔法、電鑄法、準分子雷射加工，以及聚合物沉積法等。但也都具有各自的優缺點例如近接 式曝光製造速度快、表面品質好，但微透徑之高徑比極低；準分子雷射可以精準加工表面外形，但機台昂貴，微透鏡間具有空隙；電鑄法電鑄層穩固，可進行多次翻模，但表面較粗糙，高徑比低、並且相當耗時。Since microlens arrays are more and more widely used in concentrating, focusing, large-area display, and light efficiency enhancement, more people are investigating the manufacturing methods of microlenses. The research direction is nothing more than shortening the manufacturing time and improving the quality of the lens. Common microlens array manufacturing methods include proximity exposure, microsphere alignment, hot melt, electroforming, excimer laser processing, and polymer deposition. But they all have their own advantages and disadvantages, such as proximity The exposure is fast and the surface quality is good, but the high-diameter ratio of the micro-permeability is extremely low; the excimer laser can precisely process the surface shape, but the machine is expensive, and there is a gap between the microlenses; the electroforming electroforming layer is stable, Multiple molds can be made, but the surface is rough, the height to diameter ratio is low, and it is quite time consuming.
有鑑於此，本發明的實施例中提供一種微透鏡結構以及微透鏡結構的製造方法，透過創新的製程可以縮短製造時間，並製造出具有良好微透鏡填充率、微透鏡高徑比、以及低表面粗糙度之微透鏡陣列。並將此微透鏡陣列加以應用於一微透鏡結構中，使此微透鏡結構應用於光源時可提升光源之光萃取率以及發光視角。In view of this, embodiments of the present invention provide a microlens structure and a manufacturing method of the microlens structure, which can shorten the manufacturing time through an innovative process, and have a good microlens filling ratio, a microlens aspect ratio, and a low Microlens array of surface roughness. The microlens array is applied to a microlens structure, and the light extraction rate and the illuminating angle of view of the light source can be improved when the microlens structure is applied to the light source.
本發明之一態樣為一微透鏡結構，包括一透鏡本體，此透鏡本體具有一第一入光面及一第一出光面，其中，第一出光面為一曲面。複數個微透鏡，每一微透鏡具有一第二入光面及一第二出光面，且第二出光面為一曲面，此些微透鏡分布於透鏡本體之第一出光面上，且此些微透鏡之間互相緊密連接完全覆蓋於透鏡本體之第一出光面上。One aspect of the present invention is a microlens structure including a lens body having a first light incident surface and a first light exit surface, wherein the first light exit surface is a curved surface. a plurality of microlenses, each of the microlenses having a second light incident surface and a second light exiting surface, wherein the second light emitting surface is a curved surface, the microlenses are distributed on the first light emitting surface of the lens body, and the microlenses are The close connection between each other completely covers the first light-emitting surface of the lens body.
本發明之另一態樣為一微透鏡結構光照裝置，包括一微透鏡結構及一光源。微透鏡結構包括一透鏡本體，該透鏡本體具有一第一入光面及一第一出光面，其中，第一出光面為一曲面，且透鏡本體具有一四方外形並在第一出光面與第一入光面間具有一高度，以及複數個微透鏡，每一微透鏡具有一第二入光面及一第二出光面，且第二出光 面為一曲面，此些微透鏡分布於透鏡本體之第一出光面上，且此些微透鏡之間互相緊密連接完全覆蓋於透鏡本體之第一出光面上。光源具有一第三出光面，且第三出光面與透鏡本體之第一入光面相連接，此光源具有一四方外形。Another aspect of the invention is a microlens structure illumination device comprising a microlens structure and a light source. The microlens structure includes a lens body having a first light incident surface and a first light exiting surface, wherein the first light emitting surface is a curved surface, and the lens body has a square shape and is on the first light emitting surface. The first light incident surface has a height, and a plurality of microlenses, each microlens has a second light incident surface and a second light exit surface, and the second light exiting The surface is a curved surface, and the microlenses are distributed on the first light emitting surface of the lens body, and the microlenses are closely connected to each other to completely cover the first light emitting surface of the lens body. The light source has a third light emitting surface, and the third light emitting surface is connected to the first light incident surface of the lens body, and the light source has a square shape.
根據本發明之一實施方式，其中此些微透鏡為一立體結構，其由上方觀測之形狀為三角形、四邊形、五邊形、六邊形或其組合。According to an embodiment of the present invention, the microlenses are a three-dimensional structure, and the shape observed from above is a triangle, a quadrangle, a pentagon, a hexagon, or a combination thereof.
根據本發明之一實施方式，其中此些微透鏡之高徑比大於0.2。According to an embodiment of the invention, wherein the microlenses have an aspect ratio greater than 0.2.
根據本發明之一實施方式，其中此些微透鏡之表面粗糙度RMS(均方根粗糙度)小於5奈米。According to an embodiment of the present invention, the surface roughness RMS (root mean square roughness) of the microlenses is less than 5 nm.
根據本發明之一實施方式，其中此些光源為發光二極體或有機發光二極體。According to an embodiment of the invention, the light sources are light emitting diodes or organic light emitting diodes.
本發明之另一態樣為一微透鏡結構製造方法，包括提供一基板。形成複數個透鏡結構於此基板上。旋轉塗佈一填隙層於此些透鏡結構上形成一第一透鏡陣列。以及沖壓翻模此第一透鏡陣列形成一微透鏡結構。Another aspect of the invention is a method of fabricating a microlens structure comprising providing a substrate. A plurality of lens structures are formed on the substrate. Spin coating an interstitial layer forms a first lens array on the lens structures. And stamping the mold, the first lens array forms a microlens structure.
根據本發明之一實施方式，其中形成複數個透鏡結構於此基板上包含形成一塗佈層於此基板上。曝光顯影此塗佈層形成複數個柱狀結構。以及熱熔此些柱狀結構形成複數個透鏡結構。According to an embodiment of the invention, forming a plurality of lens structures on the substrate comprises forming a coating layer on the substrate. Exposure development This coating layer forms a plurality of columnar structures. And thermally melting the columnar structures to form a plurality of lens structures.
根據本發明之一實施方式，其中沖壓翻模此第一透鏡陣列形成一微透鏡結構包括翻模此第一透鏡陣列結構形成一第一母模。翻模第一母模形成一第二透鏡陣列。準備 一透鏡基底模及一透鏡外模。沖模使透鏡基底模將第二透鏡陣列壓入透鏡外模內形成一透鏡模組。翻模透鏡模組形成一第二母模。以及翻模第二母模形成一微透鏡結構。According to an embodiment of the present invention, wherein the stamping overturning the first lens array to form a microlens structure comprises overturning the first lens array structure to form a first master mold. The first mold of the mold is formed into a second lens array. ready A lens base mold and a lens outer mold. The die causes the lens base mold to press the second lens array into the outer lens mold to form a lens module. The mold lens module forms a second master mold. And the second mold of the mold is formed into a microlens structure.
100‧‧‧微透鏡100‧‧‧Microlens
102‧‧‧第二出光面102‧‧‧Second glazing
104‧‧‧第二入光面104‧‧‧Second entrance
200‧‧‧透鏡本體200‧‧‧ lens body
202‧‧‧第一出光面202‧‧‧The first glazing
204‧‧‧第一入光面204‧‧‧First light entry
210‧‧‧光源210‧‧‧Light source
212‧‧‧第三出光面212‧‧‧The third glazing
220、390‧‧‧微透鏡結構220, 390‧‧‧microlens structure
230‧‧‧微透鏡結構光照裝置230‧‧‧Microlens structure lighting device
300‧‧‧基板300‧‧‧Substrate
310‧‧‧塗佈層310‧‧‧coating layer
312‧‧‧柱狀結構312‧‧‧ Columnar structure
314‧‧‧透鏡結構314‧‧‧ lens structure
320、510、520‧‧‧填隙層320, 510, 520‧‧ ‧ gap layer
330‧‧‧第一透鏡陣列330‧‧‧First lens array
340‧‧‧第一母模340‧‧‧ first mother model
350‧‧‧第二透鏡陣列350‧‧‧Second lens array
360‧‧‧透鏡基底模360‧‧‧Lens base mold
362‧‧‧底板362‧‧‧floor
364‧‧‧本體部364‧‧‧ Body Department
370‧‧‧透鏡外模370‧‧‧ lens outer mould
372‧‧‧中空結構372‧‧‧ hollow structure
376‧‧‧透鏡模組376‧‧‧ lens module
380‧‧‧第二母模380‧‧‧Second master
為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂，所附圖式之詳細說明如下：第1圖繪示根據本發明一實施方式之微透鏡結構之示意圖；第2A至2J圖繪示根據本發明一實施方式之微透鏡結構之製造方法之剖面示意圖；第3圖繪示根據本發明一實施方式之微透鏡陣列之示意圖；第4A與4B圖繪示根據本發明一實施方式之微透鏡結構與用電鑄法製成之微透鏡結構之比較圖；以及第5圖繪示根據本發明一實施方式之微透鏡結構之發光強度比較圖。The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; 2A to 2J are schematic cross-sectional views showing a method of fabricating a microlens structure according to an embodiment of the present invention; FIG. 3 is a schematic view showing a microlens array according to an embodiment of the present invention; and FIGS. 4A and 4B are diagrams according to the present invention; A comparison diagram of a microlens structure according to an embodiment of the invention and a microlens structure made by electroforming; and FIG. 5 is a comparison diagram of luminous intensity of a microlens structure according to an embodiment of the present invention.
以下將以圖式及詳細說明清楚說明本發明之精神，任何所屬技術領域中具有通常知識者在瞭解本發明之較佳實施例後，當可由本發明所教示之技術，加以改變及修飾，其並不脫離本發明之精神與範圍。並為明確說明起見，許多實務上的細節將在以下敘述中一併說明。然而，熟悉本領域之技術人員應當瞭解 到，在本發明部分實施方式中，這些實務上的細節並非必要的，因此不應用以限制本發明。此外，為簡化圖式起見，一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。The spirit and scope of the present invention will be apparent from the following description of the preferred embodiments of the invention. The spirit and scope of the invention are not departed. For the sake of clarity, many of the practical details will be explained in the following description. However, those skilled in the art should understand To the extent that the details of the practice are not necessary in some embodiments of the invention, the invention is not limited thereto. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.
在本發明之部分實施方式中，提供一具有高高徑比，高填充率之微透鏡結構。微透鏡之高h與底面圓形之半徑r之比值即為微透鏡之高徑比，如下式所示。 高徑比=h/r 而填充率為含有微透鏡之表面積/透鏡本體之第一出光面之表面積×100%In some embodiments of the present invention, a microlens structure having a high aspect ratio and a high fill rate is provided. The ratio of the height h of the microlens to the radius r of the bottom surface is the aspect ratio of the microlens, as shown in the following equation. Height to diameter ratio = h / r And the filling rate is the surface area containing the microlens / the surface area of the first light emitting surface of the lens body × 100%
請參閱第1圖，第1圖繪示根據本發明一實施方式之微透鏡結構之示意圖。微透鏡結構220包括一透鏡本體200以及複數個微透鏡100。透鏡本體200具有一第一入光面204及一第一出光面202。在本發明之部分實施例中，透鏡本體200為一平凸透鏡。在本發明之部分實施例中，透鏡本體200具有一四方外型，且在第一入光面204及一第一出光面202之間具有一高度。複數個微透鏡100分布於透鏡本體之第一出光面上，且此些微透鏡100之間互相緊密連接完全覆蓋於透鏡本體200之第一出光面上，具有100%的填充率。此些微透鏡為一立體結構，其由上方觀測之形狀為六邊形，且第二出光面為一曲面。在本發明之部分實施例中，此些微透鏡由上方觀測之形狀亦可為三角形，四邊形，五邊形。在本發明之部分實施例中，微透鏡100之高徑比大於0.2，例如0.2、0.3或0.4。在本發明之部分實施例中，微透鏡100之表面粗糙度RMS(均方根粗糙度)小於5奈米。在本發明之一實施例中，微透鏡結構220類似於昆蟲之複眼結構。在本發明 之部分實施例中，微透鏡結構220之外形可裁切，故微透鏡結構220之外形可為三角形、正方形、長方形、圓形等。在本發明之部分實施例中，亦可配合一電腦模擬來最佳化此微透鏡結構，可調整包括微透鏡及透鏡本體的高度，微透鏡之大小以及透鏡本體之大小，還有微透鏡的排列方式等。Please refer to FIG. 1. FIG. 1 is a schematic view showing the structure of a microlens according to an embodiment of the present invention. The microlens structure 220 includes a lens body 200 and a plurality of microlenses 100. The lens body 200 has a first light incident surface 204 and a first light exit surface 202. In some embodiments of the invention, the lens body 200 is a plano-convex lens. In some embodiments of the present invention, the lens body 200 has a square shape and has a height between the first light incident surface 204 and a first light exit surface 202. A plurality of microlenses 100 are distributed on the first light-emitting surface of the lens body, and the microlenses 100 are closely connected to each other to completely cover the first light-emitting surface of the lens body 200, and have a filling rate of 100%. The microlenses are a three-dimensional structure, and the shape observed from above is a hexagonal shape, and the second light exiting surface is a curved surface. In some embodiments of the present invention, the shape of the microlenses observed from above may also be a triangle, a quadrangle, or a pentagon. In some embodiments of the invention, the microlens 100 has an aspect ratio greater than 0.2, such as 0.2, 0.3, or 0.4. In some embodiments of the invention, the microlens 100 has a surface roughness RMS (root mean square roughness) of less than 5 nanometers. In one embodiment of the invention, the microlens structure 220 is similar to the compound eye structure of an insect. In the present invention In some embodiments, the outer shape of the microlens structure 220 can be cut, so that the outer shape of the microlens structure 220 can be triangular, square, rectangular, circular, or the like. In some embodiments of the present invention, the microlens structure may be optimized by a computer simulation, and the height including the microlens and the lens body, the size of the microlens and the size of the lens body, and the microlens may be adjusted. Arrangement, etc.
繼續參閱第1圖，在第1圖中，更繪示一微透鏡結構光照裝置230，包括一微透鏡結構220及一光源210。微透鏡結構220包括一透鏡本體200，透鏡本體200具有一第一入光面及一第一出光面，其中，第一出光面為一曲面，且透鏡本體200具有一四方外形之側壁。以及複數個微透鏡100，每一微透鏡100具有一第二入光面及一第二出光面，且第二出光面為一曲面，此些微透鏡100分布於透鏡本體200之第一出光面上，且此些微透鏡100之間互相緊密連接完全覆蓋於透鏡本體200之第一出光面上，可達100%的填充率。在本發明之部分實施例中，此些微透鏡100為一立體結構，其由上方觀測之形狀可為三角形，四邊形，五邊形或六邊形。在本發明之部分實施例中，微透鏡100之高徑比大於0.2。微透鏡100之表面粗糙度RMS(均方根粗糙度)小於5奈米。光源210具有一第三出光面，且第三出光面與透鏡本體200之第一入光面相連接，且光源200具有一四方外形。在本發明之部分實施例中，微透鏡結構220之外形可隨光源210之外形而裁切以進行搭配，故微透鏡結構220之外形亦可為正方形、長方形。在本發明之部分實施例中，光源210為發光二極體或有機發光二極體，微透鏡結構可提升光源之光萃取率及發光視角。Continuing to refer to FIG. 1 , in FIG. 1 , a microlens structure illumination device 230 is further illustrated, including a microlens structure 220 and a light source 210 . The lenticular structure 220 includes a lens body 200 having a first light incident surface and a first light exiting surface, wherein the first light emitting surface is a curved surface, and the lens body 200 has a square sidewall. And a plurality of microlenses 100, each of the microlenses 100 has a second light incident surface and a second light exiting surface, and the second light emitting surface is a curved surface, and the microlenses 100 are distributed on the first light emitting surface of the lens body 200. And the microlenses 100 are closely connected to each other to completely cover the first light-emitting surface of the lens body 200, and can achieve a filling rate of 100%. In some embodiments of the present invention, the microlenses 100 are a three-dimensional structure, and the shape observed from above may be a triangle, a quadrangle, a pentagon or a hexagon. In some embodiments of the invention, the microlens 100 has an aspect ratio greater than 0.2. The surface roughness RMS (root mean square roughness) of the microlens 100 is less than 5 nm. The light source 210 has a third light emitting surface, and the third light emitting surface is connected to the first light incident surface of the lens body 200, and the light source 200 has a square shape. In some embodiments of the present invention, the outer shape of the microlens structure 220 may be cut to match the shape of the light source 210, so that the outer shape of the microlens structure 220 may be square or rectangular. In some embodiments of the present invention, the light source 210 is a light emitting diode or an organic light emitting diode, and the microlens structure can improve the light extraction rate and the light emitting angle of the light source.
請參照第2A至第2J圖，第2A至2J圖繪示根據本發明 一實施方式之微透鏡結構之製造方法之示意圖。請參照第2A圖，第2A圖繪示一基板300，以及一塗佈層310形成於基板300之上。包含步驟提供一基板，以及形成一塗佈層於基板上。基板300為一矽晶圓或是其他合適進行黃光微影及選轉塗佈之基板。將基板300經由旋轉塗佈光阻形成厚度均勻之塗佈層310，可以依旋轉塗佈之轉速來控制塗佈層310之厚度。塗佈層310之材料選用硬度、抗拉強度等機械強度良好之光阻，以易於製作高深寬比的結構。在本發明之部分實施例中選用AZ4620正光阻。Please refer to FIGS. 2A to 2J, and FIGS. 2A to 2J are diagrams according to the present invention. A schematic diagram of a method of fabricating a microlens structure of one embodiment. Referring to FIG. 2A , FIG. 2A illustrates a substrate 300 , and a coating layer 310 is formed on the substrate 300 . The inclusive step provides a substrate and forms a coating layer on the substrate. The substrate 300 is a germanium wafer or other substrate suitable for yellow lithography and selective coating. The substrate 300 is formed into a coating layer 310 having a uniform thickness by spin coating, and the thickness of the coating layer 310 can be controlled in accordance with the rotational speed of the spin coating. The material of the coating layer 310 is a photoresist having good mechanical strength such as hardness and tensile strength, so that a structure having a high aspect ratio can be easily produced. AZ4620 positive photoresist is selected in some embodiments of the present invention.
請參照第2B圖，第2B圖為第2A圖之塗佈層經過曝光顯影之後的示意圖。繪示步驟曝光顯影塗佈層形成複數個柱狀結構。將塗佈層310經過軟烤之後，進行曝光顯影形成複數個柱狀結構312。在本發明之部分實施例中，為了得到較佳柱狀結構312之深寬比，使用UV接觸式曝光法。光罩之形狀可依需求設計柱狀結構312之排列方式以及柱狀結構312之形狀，柱狀結構312之形狀可為圓形，三角形，四邊形以及六邊形。在本發明之部分實施例中，光罩設計以直徑100μm的不透光圓，以等中心距112μm的間距交錯排列。Please refer to FIG. 2B. FIG. 2B is a schematic view of the coating layer of FIG. 2A after exposure and development. The step of exposing the developing coating layer to form a plurality of columnar structures is illustrated. After the coating layer 310 is soft baked, exposure and development are performed to form a plurality of columnar structures 312. In some embodiments of the invention, in order to obtain the aspect ratio of the preferred columnar structure 312, a UV contact exposure method is used. The shape of the reticle can be designed according to requirements, and the shape of the columnar structure 312 can be circular, triangular, quadrangular and hexagonal. In some embodiments of the present invention, the reticle is designed to be staggered with an opaque circle having a diameter of 100 μm at a pitch of an isocenter distance of 112 μm.
請參照第2C圖，第2C圖繪示第2B圖之柱狀結構經過步驟熱熔後形成複數個透鏡結構所得之透鏡結構的示意圖。柱狀結構312在經過熱熔後為降低表面能而形成複數個透鏡結構314。熱熔溫度的選擇以超過柱狀結構312所使用之光阻的玻璃轉換溫度即可。在本發明之部分實施例中，熱熔方式為使用100℃之烘箱烘烤5分鐘。Please refer to FIG. 2C. FIG. 2C is a schematic diagram showing the lens structure obtained by forming a plurality of lens structures after the columnar structure of FIG. 2B is thermally melted. The columnar structure 312 forms a plurality of lens structures 314 for reducing surface energy after heat fusion. The hot melt temperature is selected to exceed the glass transition temperature of the photoresist used in the columnar structure 312. In some embodiments of the invention, the hot melt method is baking in an oven at 100 ° C for 5 minutes.
請參照第2D圖，第2D圖包括步驟旋轉塗佈一填隙層 於該些透鏡結構上形成一第一透鏡陣列。一填隙層320經由旋轉塗佈形成於透鏡結構314之上並填滿透鏡結構314與基板300之間之縫隙，形成一第一透鏡陣列330。此一第一透鏡陣列330具有高高徑比，高填充率的特性。填隙層320之材料可為一光阻，或是具有良好均勻覆蓋特性之材質。此次旋塗光阻以高速多階的塗佈方式以確保填隙層320之均勻性。在本發明之部分實施例中，旋塗參數為第1轉200rpm，第2轉800rpm，第3轉2000rpm，第4轉5000rpm，第5轉7000rpm。光阻塗佈完後再進行軟烤使填隙層320能穩固附著於透鏡結構314之上並填滿透鏡結構314間之縫隙。此旋轉塗佈法能快速進行均勻的光阻塗佈，能夠在短時間內製造出高填充率之第一透鏡陣列330。Please refer to FIG. 2D, which includes a step of spin coating a gap layer. A first lens array is formed on the lens structures. An interstitial layer 320 is formed on the lens structure 314 by spin coating and fills a gap between the lens structure 314 and the substrate 300 to form a first lens array 330. The first lens array 330 has a high aspect ratio and a high filling rate characteristic. The material of the interstitial layer 320 can be a photoresist or a material having good uniform coverage characteristics. The spin-on photoresist is coated at a high speed and multi-step to ensure uniformity of the interstitial layer 320. In some embodiments of the invention, the spin coating parameters are first revolution 200 rpm, second revolution 800 rpm, third revolution 2000 rpm, fourth revolution 5000 rpm, and fifth revolution 7000 rpm. After the photoresist is coated, the soft bake is performed so that the interstitial layer 320 can be firmly attached to the lens structure 314 and fill the gap between the lens structures 314. This spin coating method can quickly perform uniform photoresist coating, and can manufacture the first lens array 330 having a high filling rate in a short time.
請參照第2E圖，第2E圖包括步驟翻模第一透鏡陣列結構形成一第一母模，繪示翻模後之第一母模340。在本發明之部分實施例中，第一母模340之材料為聚二甲基矽氧烷(PDMS)或合適之高分子聚合物，將PDMS與固化劑以10：1的比例調製，攪拌後送入真空乾燥器中抽除PDMS內部氣體，以增進翻模品質。翻模方式為將一基材置於旋轉塗佈機上，其中基材為矽晶圓，倒上調置好的PDMS於基材中央進行低速旋轉塗佈。在本發明之部分實施例中，旋轉塗佈條件為第一轉100rpm，第二轉300rpm。旋轉塗佈完後置於烘箱中以100℃烘10分鐘進行固化。PDMS固化後即可以第一透鏡陣列330進行翻模，使PDMS形成第一母模340，其中第一母模340為一凹模。Referring to FIG. 2E, FIG. 2E includes a step of flipping the first lens array structure to form a first master mold, and showing the first master mold 340 after the overmolding. In some embodiments of the present invention, the material of the first master mold 340 is polydimethyl methoxy oxane (PDMS) or a suitable high molecular polymer, and the PDMS and the curing agent are prepared in a ratio of 10:1. It is sent to a vacuum dryer to remove the internal gas of PDMS to improve the quality of the mold. The mold-transforming method is to place a substrate on a spin coater, wherein the substrate is a ruthenium wafer, and the tuned PDMS is poured onto the center of the substrate for low-speed spin coating. In some embodiments of the invention, the spin coating conditions are a first revolution of 100 rpm and a second revolution of 300 rpm. After spin coating, it was placed in an oven and baked at 100 ° C for 10 minutes for curing. After the PDMS is cured, the first lens array 330 can be overturned to form the PDMS into a first master mold 340, wherein the first master mold 340 is a female mold.
請參照第2F圖，第2F圖包括步驟翻模該第一母模形成一第二透鏡陣列，繪示第二透鏡陣列350之示意圖。將第一母模 340置於一基材中央再將基材吸附於旋轉塗佈機上，倒入PDMS於第一母模340內以進行旋轉塗佈。在本發明之一實施例中，旋轉塗佈的條件為第一轉200rpm，第二轉600rpm。塗佈的厚度亦不宜太厚，以利後續沖壓翻模步驟之進行。旋轉塗佈完後將塗佈完PDMS之第一母模340置於烘箱中以100℃烘10分鐘進行固化。固化後即可獲得第二透鏡陣列350，並將其與第一母模340分離。Please refer to FIG. 2F. FIG. 2F includes a step of overturning the first master to form a second lens array, and a schematic diagram of the second lens array 350. First master 340 is placed in the center of a substrate and the substrate is adsorbed on a spin coater, and PDMS is poured into the first master mold 340 for spin coating. In one embodiment of the invention, the conditions for spin coating are a first revolution of 200 rpm and a second revolution of 600 rpm. The thickness of the coating should not be too thick to facilitate the subsequent stamping and overturning step. After the spin coating, the first master mold 340 coated with PDMS was placed in an oven and baked at 100 ° C for 10 minutes for curing. After curing, the second lens array 350 is obtained and separated from the first master mold 340.
請參照第2G圖，第2G圖包括步驟準備一透鏡基底模及一透鏡外模。在本發明之部分實施例中，透鏡基底模360與透鏡外模370之外形可以依所要配合之光源形狀而設計。在本發明之一實施例中，透鏡基底模360與透鏡外模370為四方形外觀，用以配合四方形的有機發光二極體。透鏡基底模360具有一本體部364以及一底板362。本體部364之形狀是依照透鏡本體200之形狀而設計，透鏡本體200的形狀可在製造前以程式模擬出最合適之透鏡本體的半徑及高度。透鏡外模370具有一中空結構372，中空結構372配合透鏡基底模360之大小而設計，使得透鏡基底模360之本體部364與第二透鏡陣列350可同時壓入透鏡外模370之中空結構372中。在本發明之部分實施例中，透鏡基底模360與透鏡外模370皆利用精密銑床進行加工製成。Please refer to FIG. 2G. The 2G diagram includes the steps of preparing a lens base mold and a lens outer mold. In some embodiments of the present invention, the lens base mold 360 and the outer shape of the lens outer mold 370 may be designed according to the shape of the light source to be matched. In one embodiment of the invention, the lens base mold 360 and the lens outer mold 370 have a square appearance for mating with a square organic light emitting diode. The lens base mold 360 has a body portion 364 and a bottom plate 362. The shape of the body portion 364 is designed according to the shape of the lens body 200. The shape of the lens body 200 can be programmed to simulate the radius and height of the most suitable lens body before manufacture. The lens outer mold 370 has a hollow structure 372 which is designed to match the size of the lens base mold 360 such that the body portion 364 of the lens base mold 360 and the second lens array 350 can be simultaneously pressed into the hollow structure 372 of the lens outer mold 370. in. In some embodiments of the present invention, both the lens base mold 360 and the lens outer mold 370 are fabricated using a precision milling machine.
請參照第2H圖，第2H圖包括步驟沖模使該透鏡基底模將該第二透鏡陣列壓入該透鏡外模內形成一透鏡模組，所繪示為透鏡模組之剖面圖。透鏡基底模360將第二透鏡陣列350壓入透鏡外模370中形成透鏡模組376。第二透鏡陣列350經由沖壓而延伸，使得第二透鏡陣列350覆蓋在透鏡基底模360上。此時 透鏡模組376之中空部分可用來翻模。Referring to FIG. 2H, the second embodiment includes a step die for causing the lens base mold to press the second lens array into the lens outer mold to form a lens module, which is a cross-sectional view of the lens module. The lens base mold 360 presses the second lens array 350 into the lens outer mold 370 to form a lens module 376. The second lens array 350 extends via stamping such that the second lens array 350 overlies the lens base mold 360. at this time The hollow portion of the lens module 376 can be used to overturn the mold.
請參照第2I圖，第2I圖包括步驟翻模該透鏡模組形成一第二母模，所繪示即為第二母模之剖面圖。將PDMS倒入透鏡模組376之中空部分，再烘烤固化PDMS。在本發明之部分實施例中，固化之條件為100℃環境下烘烤十分鐘。此時將固化之PDMS取出即為第二母模380。Please refer to FIG. 2I. FIG. 2I includes a step of overmolding the lens module to form a second master mold, which is a cross-sectional view of the second master mold. The PDMS is poured into the hollow portion of the lens module 376 and baked to cure the PDMS. In some embodiments of the invention, the curing conditions are 10 ten minutes of baking at 100 °C. At this time, the cured PDMS is taken out as the second master mold 380.
請參照第2J圖與第1圖，第2J圖包括步驟翻模該第二母模形成一微透鏡結構，所繪示為微透鏡結構之剖面示意圖。第二母模380壓入透鏡外模370中，再將PDMS倒入透鏡外模370之中空部分，烘烤固化後，將固化之PDMS取出，即獲得微透鏡結構390。此處之PDMS亦可以具有良好可塑性及高透光性之高分子材料替換。在本發明之部分實施例中，所製得之微透鏡結構390之透光率達98.69%。第3A圖至第3J圖之方法所製成之微透鏡結構390即為第1圖中之為透鏡結構220。微透鏡結構390包括透鏡本體200以及複數個微透鏡100。且微透鏡100之間互相緊密連接完全覆蓋透鏡本體200之第一出光面202，可達100%的填充率，使微透鏡之第二入光面104與透鏡本體之第一出光面202完全重合。微透鏡100之高徑比大於0.2。微透鏡100之表面粗糙度RMS(均方根粗糙度)小於5奈米。而透鏡本體200在第一入光面與第一出面間具有一厚度更可增加所發出之光線之軸向光強。在本發明之部分實施例中，微透鏡結構390可搭配一光源使用，光源所發出之光線從透鏡本體200之第一入光面204進入，經過微透鏡結構100以增加軸向光強以及發光角度而從微透鏡100之第二出光面102發出。在本發明之部份實施例中，將製 好之微透鏡結構390加在OLED上，檢測出平均的光強增益約為77%，最高可有81.849%的發光效率增加。Please refer to FIG. 2J and FIG. 1 . FIG. 2J includes a step of overmolding the second master mold to form a microlens structure, which is a schematic cross-sectional view of the microlens structure. The second master mold 380 is pressed into the lens outer mold 370, and the PDMS is poured into the hollow portion of the lens outer mold 370. After baking and curing, the solidified PDMS is taken out to obtain the microlens structure 390. The PDMS here can also be replaced by a polymer material having good plasticity and high light transmittance. In some embodiments of the present invention, the prepared microlens structure 390 has a light transmittance of 98.69%. The microlens structure 390 produced by the method of FIGS. 3A to 3J is the lens structure 220 in FIG. The microlens structure 390 includes a lens body 200 and a plurality of microlenses 100. And the microlenses 100 are closely connected to each other to completely cover the first light-emitting surface 202 of the lens body 200, and the filling rate of 100% can be made, so that the second light-incident surface 104 of the micro-lens completely coincides with the first light-emitting surface 202 of the lens body. . The aspect ratio of the microlens 100 is greater than 0.2. The surface roughness RMS (root mean square roughness) of the microlens 100 is less than 5 nm. The lens body 200 has a thickness between the first light incident surface and the first exit surface to increase the axial light intensity of the emitted light. In some embodiments of the present invention, the microlens structure 390 can be used with a light source, and the light emitted by the light source enters from the first light incident surface 204 of the lens body 200, passes through the microlens structure 100 to increase the axial light intensity and emit light. The angle is emitted from the second light exit surface 102 of the microlens 100. In some embodiments of the invention, A good microlens structure 390 is applied to the OLED, and an average light intensity gain of about 77% is detected, and a maximum luminous efficiency of 81.849% is increased.
請參照第3圖，第3圖為光學顯微鏡所拍出之第二透鏡陣列350之表面圖。由圖中可看見，由本方法所製造出之第二透鏡陣列350中之微透鏡皆具有六邊形之出光面，並且微透鏡間皆互相緊密連接。而微透鏡結構390是由第二透鏡陣列350翻模製成，兩者會具有相同之表面形狀。在本發明之部分實施例中，微透鏡結構中微透鏡由上方觀測之形狀可為三角形，四邊形，五邊形，六邊形或其他合適之幾何圖形。而微透鏡由上方觀測時之形狀可在第2B圖中曝光顯影形成柱狀結構312時，由光罩之設計形狀直接顯影成不同形狀之柱狀結構，例如三角形、四邊形、圓形之柱狀結構；或是設計圓形柱狀結構的排列方式，使柱狀結構在熔融成透鏡結構314時互相接觸，使得微透鏡由上方觀測時呈現不同之形狀，例如三角形、四邊形、六邊形等。Please refer to FIG. 3, which is a surface view of the second lens array 350 taken by the optical microscope. As can be seen from the figure, the microlenses in the second lens array 350 manufactured by the method all have a hexagonal light-emitting surface, and the microlenses are closely connected to each other. The microlens structure 390 is overmolded by the second lens array 350, both of which will have the same surface shape. In some embodiments of the present invention, the shape of the microlens in the microlens structure as viewed from above may be a triangle, a quadrangle, a pentagon, a hexagon, or other suitable geometric figure. When the shape of the microlens viewed from above can be exposed and developed in FIG. 2B to form the columnar structure 312, the shape of the reticle is directly developed into a columnar structure of different shapes, such as a triangular shape, a quadrangular shape, or a circular column shape. The structure; or the arrangement of the circular columnar structures, so that the columnar structures are in contact with each other when melted into the lens structure 314, so that the microlenses exhibit different shapes when viewed from above, such as triangles, quadrangles, hexagons, and the like.
請參照第4A、4B及2D圖，第4A及4B圖繪示根據本發明一實施方式之微透鏡結構與用電鑄法製成之微透鏡之結構的比較圖。在第2D圖之步驟中，填隙層320經由旋轉塗佈形成於透鏡結構314之上，以製造高徑比大於0.2，且填充率100%的微透鏡結構。而第4B圖所繪示即為在第2D圖中第一透鏡陣列330的部分放大圖。包括透鏡結構314及覆蓋於其上的填隙層520。與第4A圖用電鑄法所製成的同樣結構相較，電鑄法為利用同樣膜厚的填隙層510層層覆蓋透鏡結構314製成，故所需製程時間很久，並且會降低微透鏡之高徑比，以及表面粗糙度會較高。由圖中所示，在第4A圖中，由電鑄法所形成之微透鏡結構 實際上有效果之透鏡高度僅為圖中所示之h1，小於在第4B圖中由旋轉塗佈法所形成之透鏡高度h2。並且在兩微透鏡交界處，第4A圖中之填隙層510是一尖角，在光學顯微鏡下可看見一明顯的接痕。而在第4B圖，使用旋轉塗佈法之填隙層520在微透鏡之交接處則為一圓弧接面，兩者也不相同。經由一次旋轉塗佈光阻，即可利用光阻的黏滯性將兩微透鏡連接。不但所花製程時間短，並且旋轉塗佈法所得之填隙層的表面粗糙度低於5奈米。Please refer to FIGS. 4A, 4B and 2D. FIGS. 4A and 4B are views showing a comparison of the structure of the microlens structure and the microlens made by electroforming according to an embodiment of the present invention. In the step of FIG. 2D, the interstitial layer 320 is formed over the lens structure 314 via spin coating to fabricate a microlens structure having a high aspect ratio of greater than 0.2 and a fill rate of 100%. 4B is a partial enlarged view of the first lens array 330 in FIG. 2D. A lens structure 314 and a shim layer 520 overlying it are included. Compared with the same structure made by electroforming in FIG. 4A, the electroforming method is formed by laminating the lens structure 314 with a layer of the interstitial layer 510 of the same film thickness, so that the required processing time is long and the micro-machining is lowered. The aspect ratio of the lens and the surface roughness will be higher. As shown in the figure, in Fig. 4A, the microlens structure formed by electroforming The actually effective lens height is only h1 as shown in the figure, and smaller than the lens height h2 formed by the spin coating method in Fig. 4B. And at the junction of the two microlenses, the interstitial layer 510 in Fig. 4A is a sharp corner, and a distinct smear can be seen under an optical microscope. In Fig. 4B, the interstitial layer 520 using the spin coating method is a circular arc junction at the intersection of the microlenses, and the two are different. By applying a photoresist by one rotation, the two microlenses can be connected by the viscosity of the photoresist. Not only is the processing time short, but the surface roughness of the interstitial layer obtained by the spin coating method is less than 5 nm.
請參照第5圖，第5圖繪示根據本發明一實施方式之微透鏡結構之發光強度比較圖。圖的橫座標是發光視角，縱座標是軸向光強(cd)。圖中所繪示，三角形圖示代表OLED加上微透鏡結構，方型圖示為OLED加上單層微透鏡陣列以及圓形圖顯示只有OLED元件未加上任何聚光結構之角度與發光強度的關係。由圖中數據顯示，在0至75度視角內，微透鏡結構可提升OLED的發光效能與發光視角。Referring to FIG. 5, FIG. 5 is a view showing a comparison of luminous intensity of a microlens structure according to an embodiment of the present invention. The abscissa of the figure is the illuminating angle of view, and the ordinate is the axial intensity (cd). As shown in the figure, the triangular diagram represents the OLED plus microlens structure, the square diagram shows the OLED plus a single layer microlens array and the circular diagram shows the angle and luminous intensity of only the OLED element without any concentrating structure. Relationship. The data in the figure shows that the microlens structure can enhance the luminous efficacy and illuminating angle of view of the OLED in a viewing angle of 0 to 75 degrees.
在本發明之部分實施例中，所提供之微透鏡結構以及製造微透鏡結構之方法。可經由對於光源形狀的事先模擬，製造出經過最佳化之微透鏡結構，包含微透鏡及透鏡本體的高度，微透鏡之大小以及透鏡本體之大小，還有微透鏡的排列方式等。藉由模擬出最佳化之數據來設計模具，以進行本發明之製造微透鏡結構的方法。此方法包括提供一基板；形成複數個透鏡結構於該基板上；旋轉塗佈一填隙層於該些透鏡結構上形成一第一透鏡陣列；以及沖壓翻模第一透鏡陣列形成一微透鏡結構。此方法不但能縮短微透鏡結構之製程時間，所製造出來的微透鏡結構更是具有高徑比大於0.2，填充率100%，以及表面粗糙度小於5奈米的 優點。微透鏡結構可應用於發光二極體或有機發光二極體上以增加發光二極體或有機發光二極體之發光強度與發光角度。In some embodiments of the invention, a microlens structure is provided and a method of fabricating a microlens structure. The optimized microlens structure, including the height of the microlens and the lens body, the size of the microlens and the size of the lens body, and the arrangement of the microlenses, etc., can be produced through prior simulation of the shape of the light source. The mold is designed by simulating the optimized data to carry out the method of manufacturing the microlens structure of the present invention. The method includes providing a substrate; forming a plurality of lens structures on the substrate; spin coating an interstitial layer to form a first lens array on the lens structures; and stamping the first lens array to form a microlens structure . The method can not only shorten the processing time of the microlens structure, but also has a high lens ratio of more than 0.2, a filling rate of 100%, and a surface roughness of less than 5 nm. advantage. The microlens structure can be applied to a light emitting diode or an organic light emitting diode to increase the light emitting intensity and the light emitting angle of the light emitting diode or the organic light emitting diode.
雖然本發明已以較佳實施例揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
100‧‧‧微透鏡100‧‧‧Microlens
200‧‧‧透鏡本體200‧‧‧ lens body
202‧‧‧第一出光面202‧‧‧The first glazing
204‧‧‧第一入光面204‧‧‧First light entry
210‧‧‧光源210‧‧‧Light source
212‧‧‧第三出光面212‧‧‧The third glazing
220‧‧‧微透鏡結構220‧‧‧Microlens structure
230‧‧‧微透鏡結構光照裝置230‧‧‧Microlens structure lighting device
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM262739U (en) * | 2004-09-14 | 2005-04-21 | Yung-Chung Chen | Brightness-enhanced film structure |
| TW200700771A (en) * | 2005-06-24 | 2007-01-01 | Ind Tech Res Inst | Optical film with array of microstructures and the light source apparatus utilizing the same |
| TW200909214A (en) * | 2007-01-03 | 2009-03-01 | Physical Optics Corp | Roll-to-roll method and system for micro-replication of a pattern of large relief three-dimensional microstructures |
| TW200949297A (en) * | 2008-05-19 | 2009-12-01 | Visera Technologies Co Ltd | Microlens |
| TWM450736U (en) * | 2012-10-17 | 2013-04-11 | Truelight Corp | Partial microstructure optical lens and light emitting module with the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM262739U (en) * | 2004-09-14 | 2005-04-21 | Yung-Chung Chen | Brightness-enhanced film structure |
| TW200700771A (en) * | 2005-06-24 | 2007-01-01 | Ind Tech Res Inst | Optical film with array of microstructures and the light source apparatus utilizing the same |
| TW200909214A (en) * | 2007-01-03 | 2009-03-01 | Physical Optics Corp | Roll-to-roll method and system for micro-replication of a pattern of large relief three-dimensional microstructures |
| TW200949297A (en) * | 2008-05-19 | 2009-12-01 | Visera Technologies Co Ltd | Microlens |
| TWM450736U (en) * | 2012-10-17 | 2013-04-11 | Truelight Corp | Partial microstructure optical lens and light emitting module with the same |
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