TWI500586B - Cutting method of plate glass and cutting device thereof - Google Patents
Cutting method of plate glass and cutting device thereof Download PDFInfo
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本發明是有關於一種用以藉由沿著板狀玻璃的切割預定線至少進行局部加熱來切割該板狀玻璃的方法及裝置。The present invention relates to a method and apparatus for cutting a sheet glass by at least partial heating along a line to cut of sheet glass.
眾所周知，近年來的影像顯示裝置的主流是以液晶顯示器(Liquid Crystal Display，LCD)、電漿顯示器(Plasma Display Panel，PDP)、場發射顯示器(Field Emission Display，FED)、有機電致發光顯示器(Organic Light-Emitting Diode，OLED)等為代表的平板顯示器(Flat Panel Display，FPD)。由於該些FPD正推進輕量化，因此現狀是該些FPD中所使用的玻璃基板日趨薄板化。As is known, the mainstream of image display devices in recent years is a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED), and an organic electroluminescence display ( Organic Light-Emitting Diode (OLED), etc., represented by Flat Panel Display (FPD). Since these FPDs are being promoted to be lightweight, the current situation is that the glass substrates used in these FPDs are becoming increasingly thin.
另外，有機EL並非如顯示器般藉由薄膜電晶體(Thin Film Transistor，TFT)使微細的三原色明滅，而僅以單色(例如白色)進行發光且亦用作LCD的背光或屋內照明的光源等平面光源。而且，有機EL的照明裝置於玻璃基板具有可撓性時，可使發光面自由地變形，因此就確保充分的可撓性的觀點而言，該照明裝置中所使用的玻璃基板亦正推進大幅度的薄板(玻璃膜)化。In addition, the organic EL does not illuminate the fine three primary colors by a thin film transistor (TFT) as in a display, but emits light only in a single color (for example, white) and is also used as a backlight of an LCD or a light source for indoor illumination. Equal plane light source. Further, when the organic EL illumination device has flexibility in the glass substrate, the light-emitting surface can be freely deformed. Therefore, the glass substrate used in the illumination device is also being pushed forward from the viewpoint of ensuring sufficient flexibility. The thickness of the sheet (glass film).
切割該些FPD或照明裝置等中所使用的玻璃基板的方法一般包括：劃線步驟，於玻璃基板的表面或背面刻設規定深度的劃線；以及斷裂步驟，於執行上述步驟後以跨越劃線的方式施加彎矩，藉此切斷玻璃基板。The method of cutting the glass substrate used in the FPD or the illumination device or the like generally includes: a scribing step of engraving a scribe line of a predetermined depth on the surface or the back surface of the glass substrate; and a splicing step, after performing the above steps The bending moment is applied in a line manner, thereby cutting the glass substrate.
作為此種玻璃基板切斷方法的改良例，根據專利文獻 1，揭示有如下的方法：於玻璃基板的下表面的端部形成初始裂痕，並且藉由對該玻璃基板進行局部加熱的加熱部、及冷卻該經加熱的區域的冷卻部掃描玻璃基板的下表面，而形成自初始裂痕起延伸的劃線，於其後的步驟中，藉由夾持玻璃基板進行轉動的輥以劃線為邊界切斷玻璃基板。As a modified example of such a glass substrate cutting method, according to the patent document 1. A method of forming an initial crack at an end portion of a lower surface of a glass substrate, and scanning the glass substrate by a heating portion that locally heats the glass substrate and a cooling portion that cools the heated region On the surface, a scribe line extending from the initial crack is formed, and in the subsequent step, the glass substrate is cut by a scribe line by a roller that is rotated by sandwiching the glass substrate.
另外，根據專利文獻2，揭示有如下的全身割斷方法：將針對包含脆性材料的工件(例如FPD用的玻璃基板)的熱應力割斷分離成熱應力的分布、及以應力傳播速度為上限的龜裂擴大來進行，並且藉由利用照射雷射光的加熱與利用導熱的冷卻的組合來形成溫度分布。Further, according to Patent Document 2, a whole body cutting method is disclosed in which a thermal stress of a workpiece including a brittle material (for example, a glass substrate for FPD) is separated into a thermal stress distribution and a turtle having an upper limit of the stress propagation speed. The splitting is performed, and the temperature distribution is formed by using a combination of heating of the irradiated laser light and cooling by the heat conduction.
[先前技術文獻][Previous Technical Literature]
[專利文獻][Patent Literature]
[專利文獻1]日本專利特開2006-199553號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-199553
[專利文獻2]日本專利特開2009-40665號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-40665
此外，專利文獻1中所揭示的玻璃基板的割斷方法是如下的方法：將上表面被設定為吸附面的第1平台及第2平台設置成可相互接近及分離，並且以橫跨該兩個平台的上表面的方式載置玻璃基板，然後針對玻璃基板的割斷預定線進行初始龜裂的形成或雷射光束的照射、及冷卻水的噴射。Further, the method of cutting a glass substrate disclosed in Patent Document 1 is a method in which a first stage and a second stage whose upper surface is set as an adsorption surface are disposed so as to be close to each other and separated, and to straddle the two The glass substrate is placed on the upper surface of the stage, and then the formation of the initial crack, the irradiation of the laser beam, and the spraying of the cooling water are performed on the planned cutting line of the glass substrate.
但是，與一般的方法相同，該專利文獻1中所揭示的玻璃基板的割斷方法是於玻璃基板的下表面刻入劃線，並以該劃線為邊界進行所謂的折斷的方法，因此存在割斷端面產生微小裂痕等而導致其面性狀惡化的難點。而且，該 割斷方法需要如下三個步驟，即形成初始龜裂的步驟、使劃線擴展的步驟、以及進行折斷的步驟，因此會導致割斷作業的繁雜化或裝置的複雜化，引起生產性下降或成本高等致命的問題。進而，該割斷方法亦存在如下的難點：若欲連續地割斷被連續地輸送的帶狀的板狀玻璃，則會被強加極其困難的作業。However, in the same manner as the general method, the method for cutting a glass substrate disclosed in Patent Document 1 is a method in which a scribe line is formed on the lower surface of the glass substrate, and a so-called break is performed with the scribe line as a boundary, so that there is a cut. Difficulties in the deterioration of the surface properties caused by minute cracks on the end faces. And, that The cutting method requires the following three steps, namely, a step of forming an initial crack, a step of expanding a scribe line, and a step of breaking, thereby causing a complication of the cutting operation or a complication of the apparatus, causing a decrease in productivity or a high cost. Fatal problem. Further, this cutting method also has a difficulty in that an extremely difficult work is imposed if the strip-shaped sheet glass to be continuously conveyed is continuously cut.
另一方面，根據專利文獻2中所揭示的割斷方法，僅執行如下兩個步驟，即形成初始龜裂的步驟、及藉由熱應力使該初始龜裂擴展來對玻璃基板進行全身切割的步驟，便可結束玻璃基板的割斷，因此可期待使割斷作業迅速化，並且可使割斷端面變成鏡面或以其為標準的面性狀，故可期待使割斷端面適當化。但是，於該公報中，對於玻璃基板是以何種形態得到支撐未進行任何揭示及暗示，欠缺用於適當地進行全身熱應力割斷的方法的具體性。On the other hand, according to the cutting method disclosed in Patent Document 2, only the following two steps are performed, namely, a step of forming an initial crack, and a step of integrally cutting the glass substrate by thermally expanding the initial crack. Since the cutting of the glass substrate can be completed, it is expected that the cutting operation can be speeded up, and the cut end surface can be made into a mirror surface or a surface property as a standard. Therefore, it is expected that the cut end surface can be made appropriate. However, in this publication, it is not disclosed and suggested that the glass substrate is supported in any form, and the specificity of the method for appropriately performing whole body thermal stress cutting is lacking.
即，於更確實地使全身熱應力割斷適當化時，玻璃基板的支撐形態成為極其重要的因素，先前，通常如圖11a所示，於定盤20的上表面載置玻璃基板g，然後如由箭頭z所示般，自其上方進行利用雷射等的局部加熱與利用冷卻水等的加熱區域的冷卻，從而使初始龜裂擴展。再者，此種方法是本發明者等自先前以來長時間實施的方法，未進行發表於刊物等的行為。That is, when the whole body thermal stress is more appropriately cut, the support form of the glass substrate becomes an extremely important factor. Previously, as shown in FIG. 11a, the glass substrate g is placed on the upper surface of the platen 20, and then As shown by the arrow z, local heating by a laser or the like and cooling by a heating region such as cooling water are performed from above to expand the initial crack. In addition, such a method is a method that has been carried out by the inventors for a long time, and has not been published in a publication or the like.
但是，此種簡單的方法會引起如下的事態：當對玻璃基板g進行了局部加熱時，如圖11b所示，該玻璃基板g的加熱部位ga因膨脹而朝上方***，另一方面，當其後對 玻璃基板g進行了冷卻時，如圖11c所示，該玻璃基板g的冷卻部位gb因收縮而凹陷。而且，若於該定盤20上在玻璃基板g上產生伴隨冷卻的凹陷部gb，則定盤20成為障礙而引起初始龜裂蜿蜒或方向性產生紊亂後擴展等事態，因此會產生無法沿著割斷預定線準確地割斷玻璃基板g的問題。而且，因玻璃基板g與定盤20進行面接觸或大致面接觸，故熱被定盤20吸收而無法進行充分的局部加熱，於此種狀態下即便進行冷卻，溫度梯度亦變得不充分，導致熱效率惡化，因此會引起進一步妨礙沿著割斷預定線的準確的割斷這一不良情況。此種事態於玻璃基板g的厚度變薄時變得顯著。However, such a simple method causes a situation in which, when the glass substrate g is locally heated, as shown in FIG. 11b, the heating portion ga of the glass substrate g is bulged upward due to expansion, and on the other hand, Later When the glass substrate g is cooled, as shown in FIG. 11c, the cooling portion gb of the glass substrate g is recessed by shrinkage. Further, when the depressed portion gb accompanying cooling occurs on the glass substrate g in the fixed plate 20, the fixed plate 20 becomes an obstacle, and the initial crack or the directionality is disturbed and then expanded, and the like, The problem that the predetermined line is cut to accurately cut the glass substrate g is cut. Further, since the glass substrate g is in surface contact or substantially in surface contact with the platen 20, heat is absorbed by the platen 20, and sufficient local heating cannot be performed. In this state, even if cooling is performed, the temperature gradient is insufficient. This causes the thermal efficiency to deteriorate, thus causing an undesirable situation that further hinders accurate cutting along the cut line. Such a situation becomes remarkable when the thickness of the glass substrate g becomes thin.
而且，於全身熱應力割斷中，需要大量的熱量，因此局部加熱時的定盤等支撐構件與玻璃基板的接觸狀態變得極其重要，就此種觀點而言，現實情況是尚未採取適當的對策。於此情況下，上述專利文獻1中所揭示的技術因並非進行全身熱應力割斷的技術，而無需採取針對局部加熱時的熱的流失的對策，故其玻璃基板的支撐形態並非企圖解決此種問題的支撐形態。Further, in the whole body thermal stress cutting, a large amount of heat is required. Therefore, the contact state between the supporting member such as the fixing plate and the glass substrate during local heating becomes extremely important. From this point of view, the actual situation has not yet taken appropriate measures. In this case, the technique disclosed in the above Patent Document 1 is not a technique for performing whole-body thermal stress cutting, and it is not necessary to take measures against the loss of heat during local heating, so the support form of the glass substrate is not intended to solve such a problem. The supporting form of the problem.
即，於該公報中所揭示的技術中，支撐構件分離成第1平台與第2平台，為了使用以形成劃線所必需的壓縮應力及拉伸應力作用於玻璃基板的割斷預定線上，而以如下方式構成：第2平台相對於第1平台以10μm以上且100μm以下的相對移動距離接近，並且以10μm以上且50μm以下的相對移動距離分離。That is, in the technique disclosed in the publication, the support member is separated into the first stage and the second stage, and the compressive stress and the tensile stress necessary for forming the scribe line are applied to the planned cutting line of the glass substrate, In the following configuration, the second stage is close to the first stage with a relative movement distance of 10 μm or more and 100 μm or less, and is separated by a relative movement distance of 10 μm or more and 50 μm or less.
因此，該公報中所揭示的玻璃基板的支撐形態並非用以適當地提高玻璃基板的局部加熱時的熱效率的支撐形態，而且亦非用以賦予足以進行全身切割的溫度梯度的支撐形態，因此並非可適當地進行玻璃基板的全身熱應力切割的支撐形態。具體而言，該支撐形態不僅不清楚其能否應付玻璃基板的全身割斷所需的大量的熱量，而且若第2平台相對於第1平台不進行接近移動及分離移動，則無法切割玻璃基板，因此會產生支撐構造甚至支撐裝置複雜化這一致命的問題。Therefore, the support form of the glass substrate disclosed in the publication is not a support form for appropriately improving the thermal efficiency at the time of local heating of the glass substrate, and is not a support form for imparting a temperature gradient sufficient for whole body cutting, and thus is not The support form of the whole body thermal stress cutting of the glass substrate can be suitably performed. Specifically, the support form is not only clear whether it can cope with a large amount of heat required for the whole body of the glass substrate, and the glass substrate cannot be cut if the second stage is not moved and separated from the first stage. This can lead to a fatal problem of supporting the structure and even complicating the support device.
再者，如上所述的問題或類似於此種問題的問題於熔切玻璃基板等時同様亦可能產生。Furthermore, the problems as described above or the problems similar to such problems may also occur when the glass substrate or the like is melted.
鑒於上述情況，本發明將藉由對切割預定線至少進行局部加熱來切割玻璃基板等板狀玻璃時，不引起支撐構造的複雜化或生產性的下降等而可適當地切割該板狀玻璃作為技術性課題。In view of the above, the present invention can appropriately cut the sheet glass by causing the sheet glass such as a glass substrate to be cut by at least partial heating of the planned cutting line without causing complication of the support structure or deterioration in productivity. Technical issues.
為了解決上述技術性課題而創造的本發明是一種藉由沿著板狀玻璃的切割預定線至少進行局部加熱來切割該板狀玻璃的方法，其特徵在於：在以於上述切割預定線的背面側形成空間的方式，將支撐構件相互隔離地配置的狀態下，沿著上述板狀玻璃的切割預定線至少進行局部加熱，藉此對該板狀玻璃進行全身切割，其中上述支撐構件自背面側分別支撐上述板狀玻璃的自切割預定線朝兩側隔離的部位。再者，「板狀玻璃的全身切割」亦包括板狀玻璃的熔 切。The present invention, which has been made to solve the above technical problems, is a method of cutting the sheet glass by at least partial heating along a line to cut of the sheet glass, characterized in that it is on the back side of the above-mentioned cutting line In a state in which the side forms a space, in a state in which the support members are disposed apart from each other, at least partial heating is performed along a line to be cut of the sheet glass, whereby the sheet glass is subjected to whole body cutting, wherein the support member is from the back side The portions of the above-mentioned sheet glass which are separated from the two sides from the predetermined line to be cut are respectively supported. Furthermore, "the whole body cut of sheet glass" also includes the melting of sheet glass. cut.
根據此種構成，板狀玻璃的自切割預定線朝兩側隔離的部位分別由支撐構件自背面側加以支撐，且於得到支撐時，在切割預定線的背面側形成有空間，因此當藉由沿著板狀玻璃的切割預定線的局部加熱來進行全身切割時，不易受到由支撐構件所產生的熱的影響。詳細而言，若欲利用局部加熱對板狀玻璃進行全身切割，則需要大量的熱量，因此若該熱量的大部分被支撐構件吸收，則不僅會產生浪費，而且給圓滑的全身切割帶來障礙。因此，於本發明中，使支撐構件的支撐面與板狀玻璃的接觸部位自切割預定線朝兩側隔離，並於雙方的接觸部位之間形成有空間，故即便以全身切割所需的大量的熱量進行局部加熱，支撐構件對於熱的吸收亦被儘可能地減少。藉此，於熱效率得到改善的狀態下進行板狀玻璃的切割，且伴隨與全身切割的協同作用而推進迅速化，因此於謀求生產性的提昇等方面變得極其有利。而且，即便因產生較大的熱梯度而導致板狀玻璃的切割預定線的周邊產生變形，藉由其背面側的空間的存在，亦不會給板狀玻璃的支撐帶來障礙，因此可進行準確地沿著切割預定線的高精度的全身切割，並且切割面的面性狀變得極其良好。除此以外，若為此種全身切割，則無需使雙方的支撐構件相互進行接近移動及分離移動，從而避免支撐構造或支撐裝置的複雜化。再者，較佳為支撐構件的支撐面是平坦面，另外，較佳為該支撐面是可藉由負壓吸引等而吸附保持板狀玻璃的吸附面。另 外，於板狀玻璃的厚度例如為200μm以下的玻璃膜的情況下，支撐構件的相互間的分離尺寸(空間的寬度方向尺寸)較佳為設定成2mm~50mm，更佳為設定成上限為20mm、下限為5mm。According to such a configuration, the portions of the sheet glass that are separated from the two sides from the predetermined line to be cut are supported by the support member from the back side, and when supported, a space is formed on the back side of the line to be cut, so When the whole body is cut along the local heating of the cut line of the sheet glass, it is less susceptible to the heat generated by the support member. In detail, if the whole body is to be cut by the local heating, a large amount of heat is required, so if most of the heat is absorbed by the supporting member, not only waste is generated, but also obstacles to smooth whole body cutting are caused. . Therefore, in the present invention, the contact portion between the support surface of the support member and the sheet glass is separated from the predetermined line to the both sides, and a space is formed between the contact portions of both sides, so that even a large amount required for whole body cutting is required. The heat is locally heated and the absorption of heat by the support member is also reduced as much as possible. In this way, the slab-shaped glass is cut in a state in which the heat efficiency is improved, and the speed is promoted in accordance with the synergistic action with the whole body dicing. Therefore, it is extremely advantageous in terms of improving productivity. Further, even if a large thermal gradient is generated, the periphery of the line to be cut of the sheet glass is deformed, and the space on the back side does not hinder the support of the sheet glass, so that it can be performed. High-precision whole-body cutting accurately along the line to cut, and the surface properties of the cut surface become extremely good. In addition to this, in the case of such a whole body cutting, it is not necessary to move both the support members and the separation movements, thereby avoiding the complication of the support structure or the support device. Further, it is preferable that the support surface of the support member is a flat surface, and it is preferable that the support surface is an adsorption surface that can hold and hold the sheet glass by suction or the like by suction. another In the case of a glass film having a thickness of, for example, 200 μm or less, the separation dimension of the support members (the width dimension in the space) is preferably set to 2 mm to 50 mm, and more preferably set to an upper limit. 20mm, the lower limit is 5mm.
於此情況下，較佳為在上述板狀玻璃的切割預定線上形成初始龜裂後，藉由伴隨沿著該切割預定線的局部加熱及對該加熱區域的冷卻所產生的應力，而使上述初始龜裂擴展來對上述板狀玻璃進行全身切割。In this case, it is preferable that the initial crack is formed on the planned cutting line of the sheet glass, and the stress caused by the local heating along the line to cut and the cooling of the heating region is preferably The initial crack is expanded to perform a whole body cut on the above plate glass.
若如此，則伴隨沿著切割預定線掃描由針對板狀玻璃的局部加熱所產生的加熱區域、及對應於該加熱區域的冷卻區域，應力(熱應力)的產生區域亦沿著切割預定線移動，藉此初始龜裂沿著切割預定線擴展，從而對板狀玻璃進行全身切割。於此種切割過程中，可充分地確保源自板狀玻璃的上述支撐形態且起因於加熱與冷卻的溫度梯度，因此可儘可能地減少熱量的浪費，並可圓滑且適當地對板狀玻璃進行全身切割。另外，當將厚度為200μm以下等的薄壁的板狀玻璃，即玻璃膜作為對象時，該板狀玻璃的切割預定線附近的背面成為非接觸狀態，且不會因支撐構件的支撐面上的吸附或摩擦而受到約束，因此板狀玻璃可藉由局部加熱而最大限度地膨脹，並藉由其後的冷卻而最大限度地收縮。而且，該膨脹與收縮的差成為用於使初始龜裂擴展來進行全身切割的拉伸應力的主要原因，因此可有效利用由極其高效的加熱及冷卻所產生的最大限度的應變來切割(割斷)板狀玻璃。In this case, the region of the stress (thermal stress) is also moved along the planned cutting line along with the heating region generated by the local heating for the sheet glass along the cutting line and the cooling region corresponding to the heating region. Thereby, the initial crack is expanded along the line to be cut, thereby performing whole body cutting on the sheet glass. In the cutting process, the above-mentioned support form derived from the sheet glass and the temperature gradient due to heating and cooling can be sufficiently ensured, so that waste of heat can be reduced as much as possible, and the plate glass can be smoothly and appropriately Perform a whole body cut. In addition, when a thin-walled sheet glass having a thickness of 200 μm or less, that is, a glass film is used as a target, the back surface near the line to cut of the sheet glass is in a non-contact state, and is not supported by the supporting surface of the supporting member. The adsorption or friction is constrained, so the sheet glass can be maximally expanded by local heating and contracted to the maximum by subsequent cooling. Further, the difference between the expansion and the contraction is a factor of the tensile stress for expanding the initial crack to perform the whole body cutting, so that the maximum strain generated by the extremely efficient heating and cooling can be effectively used for cutting (cutting) ) Plate glass.
於上述構成中，亦可採用如下方法：上述板狀玻璃是被連續地輸送的帶狀的板狀玻璃，並且上述切割預定線沿著該帶狀的板狀玻璃的輸送方向延伸，且沿著上述切割預定線連續地對該帶狀的板狀玻璃進行全身切割。In the above configuration, the plate-shaped glass may be a strip-shaped plate glass that is continuously conveyed, and the line to be cut extends along the conveying direction of the strip-shaped sheet glass, and along The above-described cutting line continuously cuts the strip-shaped sheet glass in a whole body.
若如此，則可進行先前無法實現的沿著被連續地輸送的帶狀的板狀玻璃的輸送方向的全身切割，且無需如先前般於矩形的玻璃基板的一邊的長度受限的狀態下進行切割，因此切割效率大幅度地提昇。即，因藉由上述支撐形態進行全身切割，故可實現此種連續切割，藉此可謀求切割後的板狀玻璃的處理或使用形態的多様化。In this case, it is possible to perform a whole-body cutting along the conveying direction of the strip-shaped sheet glass which is continuously conveyed, which is not previously possible, and it is not necessary to carry out the state in which the length of one side of the rectangular glass substrate is limited as before. Cutting, so the cutting efficiency is greatly improved. In other words, since the whole body is cut by the above-described support form, such continuous cutting can be realized, whereby the treatment of the sheet glass after cutting or the use form can be achieved.
而且，當進行此種連續切割時，較佳為上述支撐構件是以連續地輸送上述帶狀的板狀玻璃的方式受到驅動。Further, when such continuous cutting is performed, it is preferable that the support member is driven to continuously convey the strip-shaped plate glass.
若如此，則伴隨支撐構件的輸送驅動而輸送帶狀的板狀玻璃，因此支撐構件與板狀玻璃之間不易產生滑動等，而不存在該板狀玻璃上產生擦傷等的可能性，並且穩定地進行該板狀玻璃的輸送。藉此，可謀求玻璃品質的優質化，並且亦可謀求切割作業的高速化及圓滑化。In this case, the belt-shaped sheet glass is conveyed by the conveyance drive of the support member, so that the sliding between the support member and the sheet glass is less likely to occur, and there is no possibility of scratching or the like on the sheet glass, and it is stable. The conveyance of the sheet glass is carried out. Thereby, it is possible to improve the quality of the glass, and it is also possible to increase the speed and smoothness of the cutting operation.
另外，當進行此種連續切割時，可使上述切割預定線位於以寬度方向的任意的部位連續地切斷上述帶狀的板狀玻璃的位置。Further, when such continuous cutting is performed, the predetermined line to be cut can be placed at a position where the strip-shaped sheet glass is continuously cut at an arbitrary position in the width direction.
若如此，則能夠以寬度方向(與輸送方向正交的方向)的任意的部位分割帶狀的板狀玻璃，因此可自寬度方向尺寸形成得較長的帶狀的板狀玻璃，獲得多個具有所期望的寬度方向尺寸的帶狀的板狀玻璃。藉此，可提高利用成形 裝置的帶狀的板狀玻璃的成形能力，並可迅速且高效地製作對應於要求的寬度的板狀玻璃。In this way, since the strip-shaped sheet glass can be divided in any part in the width direction (the direction orthogonal to the conveyance direction), the strip-shaped sheet glass having a long dimension can be formed from the width direction, and a plurality of strips can be obtained. A strip-shaped plate glass having a desired width direction dimension. Thereby, the use of forming can be improved The forming ability of the strip-shaped plate glass of the apparatus can quickly and efficiently produce a sheet glass corresponding to the required width.
進而，當進行此種連續切割時，亦可使上述切割預定線位於連續地切除形成於上述帶狀的板狀玻璃的寬度方向兩端的耳部的位置。Further, when such continuous cutting is performed, the predetermined cutting line may be positioned to continuously cut off the ear portions formed at both ends in the width direction of the strip-shaped sheet glass.
若如此，則可於維持利用成形裝置的帶狀的板狀玻璃的充分的成形效率後，連續地進行切除作為該板狀玻璃中的不需要的厚壁部分的耳部的作業，因此可高效且圓滑地進行耳部的切除作業。In this way, it is possible to continuously perform the work of cutting off the ear portion which is an unnecessary thick portion of the sheet glass after maintaining the sufficient molding efficiency of the strip-shaped sheet glass by the molding apparatus. The ear is removed smoothly.
除此以外，當進行如上所述的連續切割時，可將上述被連續地輸送的帶狀的板狀玻璃設定為經過成形裝置的緩冷區域冷卻後的帶狀的板狀玻璃。In addition, when the continuous cutting as described above is performed, the strip-shaped sheet glass which is continuously conveyed can be set as a strip-shaped sheet glass which has been cooled by the slow cooling zone of the molding apparatus.
若如此，則藉由經過熔融玻璃利用成形裝置成形後通過緩冷區域而冷卻的一連串的連續的成形步驟，於已成為帶狀的板狀玻璃被連續地輸送的期間內，伴隨局部加熱而連續地對該板狀玻璃進行全身切割。藉此，利用成形裝置的帶狀的板狀玻璃的成形步驟與針對該板狀玻璃的全身切割作為一連串的連續的作業而進行，作業效率得到大幅度改善。再者，作為成形裝置，較佳為可實施下拉法，特別是溢流下拉法的裝置。但是，並不排除可實施浮式法等的成形裝置。In this case, a series of continuous molding steps which are formed by the molten glass and formed by the molding apparatus and cooled by the slow cooling zone are continuously continuous with the local heating in the period in which the strip-shaped sheet glass is continuously conveyed. The plate glass is subjected to whole body cutting. Thereby, the forming step of the strip-shaped sheet glass by the molding apparatus and the whole body cutting of the sheet glass are performed as a series of continuous operations, and the work efficiency is greatly improved. Further, as the molding apparatus, a device capable of performing a down-draw method, particularly an overflow down-draw method, is preferable. However, a molding apparatus that can perform a floating method or the like is not excluded.
進而，當進行如上所述的連續切割時，亦能夠以如下方式構成：一面沿著上述切割預定線連續地對上述被連續地輸送的帶狀的板狀玻璃進行全身切割，一面將其成輥狀 地捲繞於捲芯的周圍。Further, when the continuous cutting as described above is carried out, it is also possible to form the roll-shaped sheet glass which is continuously conveyed continuously along the line to cut, and roll it into a roll. shape The ground is wound around the core.
若如此，則如上述般切除了耳部後的帶狀的板狀玻璃、或寬度方向尺寸以成為所期望的尺寸的方式被分割後的各個帶狀的板狀玻璃成輥狀地捲繞於捲芯的周圍，因此尤其可精簡且容易地進行帶狀的薄壁板狀玻璃，即玻璃膜的收納或捆包。再者，於該捲繞時，就防止由板狀玻璃彼此的接觸所引起的損傷的觀點而言，較佳為一面於帶狀的板狀玻璃上疊加帶狀的保護片(例如有機樹脂膜)一面捲繞成輥狀。另外，針對於寬度方向上被分割後的各個帶狀的板狀玻璃，較佳為使各板狀玻璃的輸送方向不同並將該些分別成輥狀地捲繞於各個捲芯的周圍。In this manner, the strip-shaped sheet glass which has been cut off after the ear portion or the strip-shaped sheet glass which has been divided so as to have a desired size in the width direction is wound in a roll shape in a roll shape. In addition to the circumference of the core, it is particularly possible to carry out the strip-shaped thin-walled glass, that is, the storage or packaging of the glass film, in a compact and easy manner. Further, at the time of the winding, it is preferable to superimpose a strip-shaped protective sheet (for example, an organic resin film) on the strip-shaped sheet glass from the viewpoint of preventing damage caused by contact between the sheet-like glasses. ) is wound into a roll shape. In addition, it is preferable that each of the strip-shaped plate-shaped glass which is divided in the width direction has a different conveyance direction of each of the sheet-like glasses, and the rolls are wound around the respective winding cores in a roll shape.
於以上的構成中，亦可於上述板狀玻璃的表面側配設按壓構件，該按壓構件與上述支撐構件分別對向地配置，且在其與上述支撐構件之間夾持上述板狀玻璃。In the above configuration, a pressing member may be disposed on the front surface side of the sheet glass, and the pressing member and the supporting member may be disposed to face each other, and the sheet glass may be sandwiched between the pressing member and the supporting member.
若如此，則不僅於板狀玻璃處於平放姿勢的情況下，而且於板狀玻璃處於縱向姿勢的情況下，亦可在藉由支撐構件與按壓構件夾持並保持該板狀玻璃的狀態下進行伴隨局部加熱的全身切割，從而可不論板狀玻璃的姿勢而進行適當的切割。再者，於此情況下，可將按壓構件設定為實質上與支撐構件相同的構件及相同的構造。In this case, not only when the sheet glass is in the flat posture but also in the case where the sheet glass is in the vertical posture, the sheet glass can be held and held by the support member and the pressing member. By performing whole body cutting with local heating, appropriate cutting can be performed regardless of the posture of the sheet glass. Furthermore, in this case, the pressing member can be set to be substantially the same member and the same structure as the supporting member.
於以上的構成中，較佳為使有機層介於上述板狀玻璃的背面與上述支撐構件的支撐面之間，另外，於使用按壓構件時，使有機層介於上述板狀玻璃的表面與上述按壓構件的按壓面之間亦較佳。此處，上述「有機層」包括有機 膜(例如，有機樹脂膜)等。In the above configuration, preferably, the organic layer is interposed between the back surface of the sheet glass and the support surface of the support member, and when the pressing member is used, the organic layer is interposed between the surface of the sheet glass and It is also preferable that the pressing faces of the pressing members are also provided. Here, the above "organic layer" includes organic A film (for example, an organic resin film) or the like.
若如此，則藉由有機層的存在，而抑制針對板狀玻璃的切割預定線的局部加熱時的朝向支撐構件及按壓構件的導熱，並且避免產生伴隨板狀玻璃與支撐構件及按壓構件的接觸的損傷。In this case, by the presence of the organic layer, heat conduction toward the support member and the pressing member at the time of local heating of the line to cut of the sheet glass is suppressed, and contact with the support member and the pressing member is prevented from occurring. Damage.
於以上的構成中，上述板狀玻璃的厚度若為200μm以下，則較合適。In the above configuration, the thickness of the sheet glass is preferably 200 μm or less.
即，若為厚度為200μm以下的薄壁的板狀玻璃，即玻璃膜，則於藉由較弱的按壓力使例如輪式切割機旋轉來刻設劃線時，以不使該板狀玻璃粉碎的方式進行刻設較困難。另外，當上述輪式切割機的按壓力過強時，不僅容易產生折斷所需的垂直裂痕，而且容易產生成為切割端面的強度下降的原因的水平方向的微裂痕。進而，當將厚度為200μm以下的玻璃膜捲繞成輥狀，並沿著於長度方向上延伸的切割預定線進行折斷時，必需長距離地形成劃線，而不得不使作業繁雜化或困難化。如此，欲在厚度為200μm以下的玻璃膜上刻設劃線來進行折斷時的問題可藉由上述本案發明的方法而一下子解決，其結果，作為此種薄壁的玻璃膜，可獲得抗彎強度高且高品質的玻璃膜。再者，玻璃膜的厚度較佳為100μm以下，更佳為50μm以下。In other words, in the case of a thin glass plate having a thickness of 200 μm or less, that is, a glass film, when a scribe line is rotated by, for example, a wheel cutter is rotated by a weak pressing force, the slab glass is not required. It is more difficult to smash the way. Further, when the pressing force of the above-described wheel cutter is too strong, not only vertical cracks required for breaking are likely to occur, but also micro-cracks in the horizontal direction which cause a decrease in strength of the cut end face are likely to occur. Further, when a glass film having a thickness of 200 μm or less is wound into a roll shape and is broken along a line to cut extending in the longitudinal direction, it is necessary to form a scribe line over a long distance, and it is necessary to make the work complicated or difficult. Chemical. As described above, the problem that the scribe line is to be broken when the scribe line is formed to have a thickness of 200 μm or less can be solved at once by the method of the present invention. As a result, as such a thin-walled glass film, resistance can be obtained. A glass film with high bending strength and high quality. Further, the thickness of the glass film is preferably 100 μm or less, more preferably 50 μm or less.
於以上的構成中，較佳為上述局部加熱是藉由二氧化碳雷射來進行。In the above configuration, it is preferred that the local heating is performed by a carbon dioxide laser.
如此，若使用二氧化碳雷射作為針對板狀玻璃的切割預定線的局部加熱機構，則玻璃(特別是無鹼玻璃)可高 效地吸收雷射的能量，因此可於穩定狀態下簡單地進行局部加熱，且成本亦變得低廉。Thus, if a carbon dioxide laser is used as the local heating mechanism for the cutting line of the sheet glass, the glass (especially the alkali-free glass) can be high. Effectively absorbing the energy of the laser, it is possible to simply perform local heating in a steady state, and the cost is also low.
若使用以上的方法，則可獲得至少一邊被切割且厚度為200μm以下的板狀玻璃。When the above method is used, a plate-shaped glass having at least one side cut and having a thickness of 200 μm or less can be obtained.
該板狀玻璃，即玻璃膜因其切割面的抗彎強度高，故可承受由利用較小的曲率半徑的彎曲等所產生的較強的拉伸應力，可於比先前更廣的範圍內使用，並且成為處理性優異者。Since the plate glass, that is, the glass film has high bending strength due to the cut surface thereof, it can withstand strong tensile stress caused by bending or the like with a small radius of curvature, and can be wider than before. It is used and is excellent in handling property.
另外，若使用以上的方法，則可獲得至少一邊被切割且切割面的抗彎強度為200MPa以上，並且厚度為200μm以下的板狀玻璃。Further, when the above method is used, it is possible to obtain a sheet glass having at least one side cut and having a bending strength of the cut surface of 200 MPa or more and a thickness of 200 μm or less.
該板狀玻璃，即玻璃膜因切割面的抗彎強度為200MPa以上，故可確實地承受由利用更小的曲率半徑的彎曲等所產生的更強的拉伸應力，並且抗彎強度以200MPa以上這一較高值而變得明確，藉此能夠以適當的形態使該板狀玻璃的處理具體化。Since the plate glass, that is, the glass film has a bending strength of 200 MPa or more due to the cut surface, it can surely withstand stronger tensile stress caused by bending or the like with a smaller radius of curvature, and the bending strength is 200 MPa. This higher value is clarified, whereby the treatment of the sheet glass can be embodied in an appropriate form.
進而，若使用以上的方法，則可獲得成輥狀地捲繞於捲芯的周圍而成的板狀玻璃纏繞體。Further, when the above method is used, a sheet-shaped glass wound body obtained by winding around the winding core in a roll shape can be obtained.
根據該板狀玻璃纏繞體，使收納或處理容易化，並且輸送效率亦提昇。再者，一面執行自一個板狀玻璃纏繞體抽出帶狀的板狀玻璃，並將其成輥狀地捲繞於其他捲芯的周圍的方法(連續捲繞)，一面沿著於長度方向上延伸的切割預定線進行全身切割時的製程可圓滑且容易地進行。According to the plate-shaped glass wound body, storage or handling is facilitated, and the conveying efficiency is also improved. In addition, a method of extracting a strip-shaped sheet glass from one sheet-like glass winding body and winding it around the other cores in a roll shape (continuous winding) is performed along the longitudinal direction The process of performing the whole body cutting of the extended cutting line can be carried out smoothly and easily.
另外，亦可於藉由以上的方法所獲得的板狀玻璃的切 割面及表背面的至少一面形成有機層。In addition, the cut of the sheet glass obtained by the above method can also be used. At least one side of the cut surface and the back side of the front surface forms an organic layer.
即，當於所獲得的板狀玻璃的切割面或表面或者背面形成有機層時，其切割面或表背面的強度得到提高，因此於例如厚度為200μm以下的板狀玻璃，即玻璃膜中，對撓曲可確保充分的強度，並可有效地活用薄壁的板狀玻璃所具有的可撓性。That is, when the organic layer is formed on the cut surface or the surface or the back surface of the obtained sheet glass, the strength of the cut surface or the front and back surfaces is improved, and thus, for example, in a sheet glass having a thickness of 200 μm or less, that is, a glass film, The deflection ensures sufficient strength and can effectively utilize the flexibility of the thin-walled sheet glass.
為了解決上述技術性課題而創造的本發明的裝置是具備沿著板狀玻璃的切割預定線進行局部加熱的加熱機構的板狀玻璃的切割裝置，其特徵在於：其以如下方式構成，即以於上述切割預定線的背面側形成空間的方式，將支撐構件相互隔離地配置，其中上述支撐構件自背面側分別支撐上述板狀玻璃的自切割預定線朝兩側隔離的部位，並且至少藉由局部加熱機構沿著由該些支撐構件所支撐的上述板狀玻璃的切割預定線進行局部加熱，藉此對該板狀玻璃進行全身切割。The apparatus of the present invention created to solve the above-described technical problems is a sheet-shaped glass cutting device including a heating mechanism that performs local heating along a line to cut of a sheet glass, and is configured as follows. The support members are disposed apart from each other in such a manner that a space is formed on the back side of the cut line, wherein the support members respectively support the portions of the sheet glass that are separated from the cutting line toward the sides from the back side, and at least The local heating mechanism is locally heated along a line to cut of the above-mentioned sheet glass supported by the support members, whereby the sheet glass is subjected to whole body cutting.
包含關於具備該構成的裝置的作用效果的說明事項本質上與針對構成要素實質上與該裝置相同的上述本發明的方法所說明的事項相同。The description of the operation and effect including the device having such a configuration is essentially the same as the matter described in the above-described method of the present invention in which the components are substantially the same as the device.
關於該裝置，亦能夠以如下方式構成，即進而具備於上述板狀玻璃的切割預定線上形成初始龜裂的龜裂形成機構、以及冷卻由上述局部加熱機構所局部加熱的加熱區域的冷卻機構，且藉由上述局部加熱機構及冷卻機構產生應力，藉此使上述初始龜裂擴展來對上述板狀玻璃進行全身切割。Further, the apparatus may be configured to further include a crack forming mechanism that forms an initial crack on a planned cutting line of the sheet glass, and a cooling mechanism that cools a heating region partially heated by the local heating mechanism. Further, stress is generated by the local heating means and the cooling means, whereby the initial crack is expanded to perform whole body cutting of the sheet glass.
包含關於具備該構成的裝置的作用效果的說明事項本質上亦與針對構成要素實質上與該裝置相同的上述本發明的方法所說明的事項相同。The description of the effect of the device having such a configuration is essentially the same as that described above for the method of the present invention in which the components are substantially the same as the device.
如上所述，根據本發明，使支撐構件的支撐面與板狀玻璃的接觸部位自切割預定線朝兩側隔離，並於雙方的接觸部位之間形成有空間，故即便以沿著切割預定線的全身切割所需的大量的熱量進行局部加熱，支撐構件對於熱的吸收亦被儘可能地減少，藉此於熱效率得到改善的狀態下進行板狀玻璃的切割，且伴隨與全身切割的協同作用而推進迅速化，因此於謀求生產性的提昇等方面變得極其有利。而且，即便因產生較大的熱梯度而導致板狀玻璃的切割預定線的周邊產生變形，藉由其背面側的空間的存在，亦不會給板狀玻璃的支撐帶來障礙，因此可進行準確地沿著切割預定線的高精度的全身切割，並且切割面的面性狀變得極其良好。除此以外，若為此種全身切割，則無需使雙方的支撐構件相互進行接近移動及分離移動，從而避免支撐構造或支撐裝置的複雜化。As described above, according to the present invention, the contact portion of the support surface of the support member and the sheet glass is separated from the line to be cut toward the both sides, and a space is formed between the contact portions of both sides, so even along the line to be cut. The large amount of heat required for whole body cutting is locally heated, and the absorption of heat by the supporting member is also reduced as much as possible, whereby the cutting of the sheet glass is performed in a state where the thermal efficiency is improved, and the synergy with the whole body cutting is accompanied. As the promotion progresses rapidly, it is extremely advantageous to seek productivity improvement. Further, even if a large thermal gradient is generated, the periphery of the line to be cut of the sheet glass is deformed, and the space on the back side does not hinder the support of the sheet glass, so that it can be performed. High-precision whole-body cutting accurately along the line to cut, and the surface properties of the cut surface become extremely good. In addition to this, in the case of such a whole body cutting, it is not necessary to move both the support members and the separation movements, thereby avoiding the complication of the support structure or the support device.
以下，參照隨附圖式對本發明的實施形態進行說明。再者，於以下的實施形態中，將FPD或有機EL照明裝置或者太陽電池中所使用的厚度為200μm以下的板狀玻璃，即玻璃膜作為對象。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following embodiments, a glass film having a thickness of 200 μm or less, which is used in an FPD or an organic EL illumination device or a solar cell, is used as a glass film.
圖1是表示形成本發明的基本構造的第1實施形態的 板狀玻璃的切割裝置及其切割方法的實施狀況的概略立體圖。如該圖所示，該切割裝置1包括：一對支撐構件2，相互隔離地配置；局部加熱機構3，自表面側對橫跨該些支撐構件2的支撐面2a上而載置的板狀玻璃G照射雷射光束L來實施局部加熱；以及冷卻機構4，自表面側對由該局部加熱機構3所加熱的加熱區域H噴射冷卻水W。於此情況下，一對支撐構件2分別包含長方體狀的定盤或以其為標準的構件。於該實施形態中，使用二氧化碳雷射作為局部加熱機構3，但亦可為電熱線或熱風噴射等其他可進行局部加熱的機構。另外，冷卻機構4是藉由氣壓等將冷卻水W作為冷媒噴射者，但該冷媒亦可為冷卻水以外的冷卻液、或者空氣或惰性氣體等氣體、或者氣體與液體的混合物、進而乾冰或冰等固體與上述氣體及/或上述液體的混合物等。Fig. 1 is a view showing a first embodiment of the basic structure of the present invention; A schematic perspective view of the state of implementation of the cutting device for sheet glass and the cutting method therefor. As shown in the figure, the cutting device 1 includes a pair of support members 2 which are disposed apart from each other, and a local heating mechanism 3 which is placed on the support surface 2a of the support members 2 from the surface side. The glass G irradiates the laser beam L to perform local heating, and the cooling mechanism 4 ejects the cooling water W from the surface side to the heating region H heated by the local heating mechanism 3. In this case, the pair of support members 2 each include a rectangular parallelepiped fixed plate or a member based thereon. In this embodiment, a carbon dioxide laser is used as the local heating mechanism 3, but it may be another mechanism capable of local heating such as a heating wire or a hot air jet. Further, the cooling mechanism 4 uses the cooling water W as a refrigerant jet by air pressure or the like. However, the refrigerant may be a coolant other than the cooling water, a gas such as air or an inert gas, or a mixture of a gas and a liquid, and further dry ice or a mixture of a solid such as ice and the above gas and/or the above liquid.
一對支撐構件2分別自背面側支撐板狀玻璃G的自切割預定線5朝兩側僅隔離相同尺寸的部位，並且板狀玻璃G的切割預定線5的背面側被設定為空間S，且板狀玻璃G是以不在兩支撐構件2的支撐面2a上相對移動的方式藉由負壓吸引等來保持。於該實施形態中，以使一對支撐構件2以同一速度朝箭頭a方向(沿著切割預定線5的方向)移動的方式構成，並將局部加熱機構3及冷卻機構4固定保持，但亦能夠以將一對支撐構件2固定保持，而使局部加熱機構3及冷卻機構4移動的方式構成。The pair of support members 2 respectively separate only the portions of the same size from the cut-off predetermined line 5 of the sheet glass G from the back side, and the back side of the cut line 5 of the sheet glass G is set to the space S, and The sheet glass G is held by suction or the like without being relatively moved on the support surface 2a of the both support members 2. In this embodiment, the pair of support members 2 are configured to move in the direction of the arrow a (in the direction along the line to cut 5) at the same speed, and the local heating mechanism 3 and the cooling mechanism 4 are fixed and held. The pair of support members 2 can be fixedly held, and the local heating mechanism 3 and the cooling mechanism 4 can be moved.
關於利用局部加熱機構3的雷射照射的加熱區域H與 利用冷卻機構4的冷卻水噴射的冷卻區域C，加熱區域H先行於冷卻區域C，並自板狀玻璃G的一端部側起於切割預定線5上進行掃描。於此情況下，在板狀玻璃G的一端部的切割預定線5上，藉由圖外的龜裂形成機構(裂痕賦予機構)而事先形成有初始龜裂6a，因此藉由上述加熱區域H與冷卻區域C的掃描時所產生的應力(熱應力)而使初始龜裂6a擴展，藉此於切割預定線5上，自表面貫穿至背面的切割面6一面擴展一面形成。於此種形態下，沿著切割預定線5對板狀玻璃G進行全身切割(全身熱應力割斷)。Regarding the heating region H of the laser irradiation using the local heating mechanism 3 The cooling zone C sprayed by the cooling water of the cooling mechanism 4 advances the cooling zone C and scans from the one end side of the sheet glass G on the planned cutting line 5. In this case, the initial crack 6a is formed in advance on the planned cutting line 5 at one end portion of the sheet glass G by the crack forming mechanism (crack providing mechanism) outside the drawing, and thus the heating region H is formed by the above-described heating region H. The initial crack 6a is expanded by the stress (thermal stress) generated during the scanning of the cooling zone C, whereby the cut surface 6 penetrating from the surface to the back surface is formed on the cut line 5 to be expanded. In this form, the plate glass G is subjected to whole body cutting (systemic thermal stress cut) along the line 5 to be cut.
於如上所述的切割過程中，支撐構件2的支撐面2a與板狀玻璃G的接觸部位在切割預定線5的背面側相隔10mm~20mm，且於雙方的接觸部位之間形成有空間S，故即便以沿著切割預定線5的全身切割所需的大量的熱量進行局部加熱，朝向支撐構件的熱的傳導亦被儘可能地減少。藉此，於熱效率得到改善的狀態下進行板狀玻璃G的切割，且伴隨與全身切割的協同作用而推進迅速化，因此於謀求生產性的提昇等方面變得極其有利。而且，即便因產生較大的熱梯度而導致板狀玻璃G的切割預定線5的周邊產生變形，藉由其背面側的空間S的存在，亦不會給板狀玻璃G的支撐帶來障礙，因此可進行準確地沿著切割預定線5的高精度的切割，並且切割面6的面性狀變得極其良好。除此以外，若為此種全身切割，則無需使一對支撐構件2相互進行接近移動及分離移動，從而避免支撐構造 甚至切割裝置1的複雜化。另外，當將厚度為200μm以下等的薄壁的板狀玻璃G作為對象時，該板狀玻璃G的切割預定線5附近的背面成為非接觸狀態，且不會因支撐構件2的支撐面2a上的吸附或摩擦而受到約束，因此板狀玻璃G可藉由局部加熱而最大限度地膨脹，並藉由其後的冷卻而最大限度地收縮。而且，該膨脹與收縮的差成為用於使初始龜裂6a擴展來進行全身切割的拉伸應力的主要原因，因此可有效利用由極其高效的加熱及冷卻所產生的最大限度的拉伸應力來割斷板狀玻璃G。In the cutting process as described above, the contact portion of the support surface 2a of the support member 2 and the sheet glass G is separated by 10 mm to 20 mm on the back side of the cut line 5, and a space S is formed between the contact portions of both sides. Therefore, even if local heating is performed with a large amount of heat required for the whole body cutting along the cutting planned line 5, the heat conduction toward the supporting member is reduced as much as possible. In this way, the slab-shaped glass G is cut in a state in which the heat efficiency is improved, and the speed is promoted by the synergistic action with the whole body dicing. Therefore, it is extremely advantageous in terms of improving productivity. Further, even if a large thermal gradient causes a deformation of the periphery of the planned cutting line 5 of the sheet glass G, the presence of the space S on the back side does not hinder the support of the sheet glass G. Therefore, it is possible to perform cutting with high precision along the line 5 to be cut accurately, and the surface properties of the cut surface 6 become extremely good. In addition to this, if such a whole body is cut, it is not necessary to move the pair of support members 2 to each other and move apart, thereby avoiding the support structure. Even the complication of the cutting device 1 is complicated. In addition, when a thin-walled sheet glass G having a thickness of 200 μm or less is used as a target, the back surface near the line to cut 5 of the sheet glass G is in a non-contact state, and is not supported by the support surface 2a of the support member 2. The upper adsorption or friction is restrained, so the sheet glass G can be maximally expanded by local heating and contracted to the maximum by subsequent cooling. Further, the difference between the expansion and the contraction is a factor of the tensile stress for expanding the initial crack 6a to perform the whole body cutting, and therefore the maximum tensile stress caused by extremely efficient heating and cooling can be effectively utilized. Cut off the sheet glass G.
再者，於支撐構件2與板狀玻璃G之間，就防止由兩者的接觸所引起的板狀玻璃G的損傷的觀點而言，較佳為使有機層(例如有機樹脂膜)介於兩者之間。另外，根據該圖，初始龜裂6a形成於板狀玻璃G的表面的切割預定線5上的一端部，但該初始龜裂6a亦可自板狀玻璃G的表面一端部起橫跨端面而形成。Further, from the viewpoint of preventing damage of the sheet glass G caused by the contact between the support member 2 and the sheet glass G, it is preferred that the organic layer (for example, an organic resin film) is interposed. Between the two. Further, according to the figure, the initial crack 6a is formed at one end portion of the surface of the sheet glass G on the cut line 5, but the initial crack 6a may also straddle the end surface from one end portion of the surface of the sheet glass G. form.
圖2是表示本發明的第2實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的要部立體圖。如該圖所示，於該第2實施形態的切割裝置1中，藉由輸送機7的搬送帶(亦可為滾輪輸送機的多個搬送輥)8而分別構成一對支撐構件，且以於沿著切割預定線5的方向上輸送帶狀的板狀玻璃G的方式，分別以同一速度朝箭頭a方向驅動該些搬送帶8。該些搬送帶8各自的外周面被設定為藉由吸附等來保持帶狀的板狀玻璃G的支撐面8a，且自下方支撐帶狀的板狀玻璃G的自位於寬度方向中央部的切割預 定線5朝兩側隔離的部位，並且於帶狀的板狀玻璃G的切割預定線5的背面側，橫跨輸送機7的長度方向全長而形成有空間S。而且，該切割裝置1於帶狀的板狀玻璃G的切割預定線5上具備藉由雷射光束L而實施局部加熱的局部加熱機構3、以及噴射供給冷卻水W的冷卻機構4。根據如上所述的構成，藉由輸送機7的搬送帶8輸送帶狀的板狀玻璃G，局部加熱機構3的加熱區域H先於冷卻機構4的冷卻區域C在帶狀的板狀玻璃G的切割預定線5上自一端部側起進行掃描。藉此，形成於帶狀的板狀玻璃G的一端部的初始龜裂6a擴展，於切割預定線5上形成自表面貫穿至背面的切割面6，伴隨於此，連續地進行全身切割(全身熱應力割斷)。其他構成及作用效果或補充性的說明事項與上述第1實施形態相同，因此此處省略針對該些的說明，並且對相同的構成要素使用相同的符號。FIG. 2 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a second embodiment of the present invention. As shown in the figure, in the cutting device 1 of the second embodiment, a pair of support members are respectively formed by a conveyor belt (which may be a plurality of conveyance rollers of the roller conveyor) 8 of the conveyor 7 and The conveyor belts 8 are driven in the direction of the arrow a at the same speed so that the strip-shaped sheet glass G is conveyed in the direction along the line 5 to be cut. The outer peripheral surface of each of the conveyor belts 8 is set to support the support surface 8a of the strip-shaped sheet glass G by suction or the like, and to support the cutting of the strip-shaped sheet glass G from the center in the width direction from below. Pre A portion where the alignment line 5 is separated from the both sides, and a space S is formed across the entire lengthwise direction of the conveyor 7 on the back side of the planned cutting line 5 of the strip-shaped sheet glass G. Further, the cutting device 1 includes a local heating mechanism 3 that performs local heating by the laser beam L and a cooling mechanism 4 that supplies the cooling water W to the planned cutting line 5 of the strip-shaped sheet glass G. According to the configuration described above, the strip-shaped sheet glass G is conveyed by the conveyance belt 8 of the conveyor 7, and the heating region H of the local heating mechanism 3 precedes the cooling region C of the cooling mechanism 4 in the strip-shaped sheet glass G. The cutting line 5 is scanned from the side of one end. As a result, the initial crack 6a formed at one end portion of the strip-shaped sheet glass G is expanded, and the cut surface 6 penetrating from the surface to the back surface is formed on the cut line 5, and the whole body is continuously cut (full body) Thermal stress cut). The other configuration, the effect of the operation, or the supplementary explanation are the same as those of the above-described first embodiment. Therefore, the description of the same is omitted here, and the same components are denoted by the same reference numerals.
圖3是表示本發明的第3實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的要部立體圖。如該圖所示，該第3實施形態的切割裝置1是切除位於帶狀的板狀玻璃G的寬度方向兩端的相對較厚的耳部Gx的切割裝置，於該些耳部Gx的略微寬度方向中央側位置分別存在切割預定線5。而且，於自該些切割預定線5的各個朝兩側隔離的部位，配置有自背面側支撐並輸送帶狀的板狀玻璃G的各一對輸送機7，並且於切割預定線5的背面側設置有空間S。另外，於帶狀的板狀玻璃G的表面側，在該些切割預定線5上分別配設有實施局部加熱的局部加熱機 構3與噴射冷卻水W的冷卻機構4。再者，於帶狀的板狀玻璃G的寬度方向中央部區域的背面側，設置有用於防止該板狀玻璃G的下垂的一個或多個(圖例中為1個)輔助輸送機9。再者，當帶狀的板狀玻璃G的寬度方向尺寸較短時，不僅不需要輔助輸送機9，而且亦可為藉由共用兩對輸送機7之中，分別配置於靠近寬度方向中央側的兩個輸送機7，而配置共計三個輸送機7的構成。根據此種構成，於藉由輸送機7(以及輔助輸送機9)來輸送帶狀的板狀玻璃G的期間內，局部加熱機構3的加熱區域H與冷卻機構4的冷卻區域C分別於切割預定線5上進行掃描，藉此伴隨初始龜裂6a的擴展，於有效部Ga與耳部Gx之間分別對帶狀的板狀玻璃G進行全身切割，藉此分別連續地切除耳部Gx。其他構成及作用效果或補充性的說明事項與上述第1實施形態相同，因此此處省略針對該些的說明，並且對相同的構成要素使用相同的符號。3 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a third embodiment of the present invention. As shown in the figure, the cutting device 1 of the third embodiment is a cutting device for cutting relatively thick ear portions Gx located at both ends in the width direction of the strip-shaped sheet glass G, and a slight width of the ear portions Gx. The cutting planned line 5 is respectively present at the center side position of the direction. Further, a pair of conveyors 7 supported from the back side and transporting the strip-shaped sheet glass G are disposed at the portions separated from the respective sides of the cut lines 5, and are cut on the back side of the cut line 5 There is a space S on the side. Further, on the surface side of the strip-shaped sheet glass G, a local heating machine for performing local heating is disposed on each of the planned cutting lines 5 The structure 3 and the cooling mechanism 4 that sprays the cooling water W. In addition, one or a plurality of (one in the illustrated example) auxiliary conveyor 9 for preventing sagging of the sheet glass G are provided on the back side of the central portion of the strip-shaped sheet glass G in the width direction. Further, when the strip-shaped sheet glass G has a short dimension in the width direction, not only the auxiliary conveyor 9 but also the center of the width direction is disposed not only by the auxiliary conveyor 9 but also by the pair of conveyors 7 The two conveyors 7 are configured to have a total of three conveyors 7. According to this configuration, during the conveyance of the strip-shaped sheet glass G by the conveyor 7 (and the auxiliary conveyor 9), the heating region H of the local heating mechanism 3 and the cooling region C of the cooling mechanism 4 are respectively cut. Scanning is performed on the predetermined line 5, whereby the band-shaped sheet glass G is integrally cut between the effective portion Ga and the ear portion Gx in accordance with the expansion of the initial crack 6a, whereby the ear portion Gx is continuously cut out. The other configuration, the effect of the operation, or the supplementary explanation are the same as those of the above-described first embodiment. Therefore, the description of the same is omitted here, and the same components are denoted by the same reference numerals.
圖4是表示本發明的第4實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。如該圖所示，該第4實施形態是在使帶狀的板狀玻璃G成形的成形裝置10與將該成形後的帶狀的板狀玻璃G成輥狀地捲繞於捲芯11a的周圍的捲繞裝置11之間，設置有上述圖3所示的切割裝置1的實施形態。即，該成形裝置10是實施溢流下拉法的成形裝置，且於成形爐內自上方起依次具備具有成形體10x的成形區域10A、具有退火機構(退火裝置)的緩冷區域10B、以及具有冷卻機構的冷卻區域10C。而 且，自該成形裝置10的冷卻區域10C朝下方所抽出的帶狀的板狀玻璃G藉由轉換輥12而平滑地彎曲後於橫方向上得到輸送，成為藉由吸附等而支撐於切割裝置1的輸送機7上的搬送帶8上的狀態。如此，於藉由搬送帶8支撐且在橫方向上輸送帶狀的板狀玻璃G的期間內，利用局部加熱機構3與冷卻機構4於切割預定線5上實施局部加熱及冷卻，藉此在有效部Ga與耳部Gx之間對帶狀的板狀玻璃G進行全身切割。其後，將板狀玻璃G的有效部Ga成輥狀地捲繞於捲繞裝置11的捲芯11a的周圍，於輥外徑達到規定值的時間點，在寬度方向上切割板狀玻璃G。該切割是藉由例如利用切割機於板狀玻璃G的寬度方向刻入劃線後折斷來進行。其結果，可獲得作為最終製品的輥狀的玻璃纏繞體。再者，該實施形態中，於捲繞裝置11的捲芯11a的上方配設保護片纏繞體13，並且將自該保護片纏繞體13所抽出的保護片14在疊加於板狀玻璃G的有效部Ga的表面側的狀態下成輥狀地捲繞於捲芯11a的周圍。另一方面，帶狀的板狀玻璃G的耳部Gx被輸送至下方進行廢棄處理。於此情況下，切割裝置1的構成及其作用效果實質上與上述第3實施形態相同，因此此處省略其說明，並對相同的構成要素使用相同的符號。FIG. 4 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a fourth embodiment of the present invention and a cutting method therefor. As shown in the figure, in the fourth embodiment, the molding apparatus 10 for molding the strip-shaped sheet glass G and the strip-shaped sheet glass G after the molding are wound around the winding core 11a in a roll shape. An embodiment of the cutting device 1 shown in Fig. 3 described above is provided between the surrounding winding devices 11. In other words, the molding apparatus 10 is a molding apparatus that performs an overflow down-draw method, and includes a molding region 10A having a molded body 10x, a slow cooling region 10B having an annealing mechanism (annealing device), and the like in the forming furnace from the top. Cooling zone 10C of the cooling mechanism. and In addition, the strip-shaped sheet glass G which is taken out from the cooling region 10C of the molding apparatus 10 is smoothly bent by the transfer roller 12 and then conveyed in the lateral direction, and is supported by the cutting device by suction or the like. The state on the conveyor belt 8 on the conveyor 7 of 1. In this way, during the period in which the strip-shaped sheet glass G is supported by the conveyor belt 8 and conveyed in the lateral direction, local heating and cooling are performed on the cutting line 5 by the local heating mechanism 3 and the cooling mechanism 4, thereby The band-shaped sheet glass G is integrally cut between the effective portion Ga and the ear portion Gx. Then, the effective portion Ga of the sheet glass G is wound around the winding core 11a of the winding device 11 in a roll shape, and the sheet glass G is cut in the width direction at a time when the outer diameter of the roll reaches a predetermined value. . This cutting is performed by, for example, cutting a scribe line in the width direction of the sheet glass G by a cutter, and then breaking it. As a result, a roll-shaped glass wound body as a final product can be obtained. Further, in this embodiment, the protective sheet wound body 13 is disposed above the winding core 11a of the winding device 11, and the protective sheet 14 extracted from the protective sheet wound body 13 is superposed on the sheet glass G. In the state of the surface side of the effective portion Ga, the periphery of the winding core 11a is wound in a roll shape. On the other hand, the ear portion Gx of the strip-shaped sheet glass G is conveyed to the lower side to be disposed of. In this case, the configuration of the cutting device 1 and the operation and effect thereof are substantially the same as those of the above-described third embodiment. Therefore, the description thereof is omitted here, and the same components are denoted by the same reference numerals.
圖5是表示本發明的第5實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。該第5實施形態與上述第4實施形態的不同點在於：於製作將自成形裝置10的冷卻區域10C所抽出的帶狀的板狀玻璃G在不 切除耳部Gx的狀態下捲繞成輥狀而成的原始玻璃纏繞體15後，於橫方向上輸送自該原始玻璃纏繞體15所抽出的帶狀的板狀玻璃G，並經過利用切割裝置1的耳部Gx的切除步驟而將該板狀玻璃G成輥狀地捲繞於捲繞裝置11的捲芯11a的周圍，藉此獲得作為最終製品的玻璃纏繞體。於此情況下，執行帶狀的板狀玻璃G的耳部Gx的切除步驟的切割裝置1的構成及其作用效果實質上與上述第3實施形態的切割裝置1相同，因此此處省略其說明，並對相同的構成要素使用相同的符號。再者，該第5實施形態中，亦於捲繞裝置11的捲芯11a的上方配設保護片纏繞體13，並且將自該保護片纏繞體13所抽出的保護片14在疊加於板狀玻璃G的有效部Ga的表面側的狀態下成輥狀地捲繞於捲芯11a的周圍，從而獲得作為最終製品的玻璃纏繞體。Fig. 5 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a fifth embodiment of the present invention and a cutting method therefor. The fifth embodiment differs from the above-described fourth embodiment in that a strip-shaped sheet glass G that is taken out from the cooling region 10C of the self-forming apparatus 10 is produced. After the original glass winding body 15 which is wound into a roll shape in a state where the ear portion Gx is cut, the strip-shaped sheet glass G drawn from the original glass winding body 15 is conveyed in the lateral direction, and passes through a cutting device. The sheet glass G is wound around the core 11a of the winding device 11 in a roll-like manner of the ear portion Gx of 1 to obtain a glass wound body as a final product. In this case, the configuration of the cutting device 1 for performing the cutting step of the ear portion Gx of the strip-shaped sheet glass G and the operation and effect thereof are substantially the same as those of the cutting device 1 of the third embodiment, and therefore the description thereof is omitted here. And use the same symbols for the same components. Further, in the fifth embodiment, the protective sheet winding body 13 is disposed above the winding core 11a of the winding device 11, and the protective sheet 14 extracted from the protective sheet winding body 13 is superposed on the plate shape. In the state of the surface side of the effective portion Ga of the glass G, it is wound around the winding core 11a in a roll shape, thereby obtaining a glass wound body as a final product.
圖6是表示本發明的第6實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。該第6實施形態與上述第4實施形態或第5實施形態的不同點在於：於橫方向上輸送自成形裝置10的冷卻區域10C或原始玻璃纏繞體15所抽出的帶狀的板狀玻璃G，並切除板狀玻璃G的耳部Gx後，進而經過利用切割裝置1的二分割步驟，將該板狀玻璃G分別成輥狀地捲繞於捲繞裝置11的兩根捲芯11a的周圍，藉此獲得作為最終製品的兩個玻璃纏繞體。於此情況下，執行帶狀的板狀玻璃G的二分割步驟的切割裝置1的構成及其作用效果實質上與上述第2實施形 態的切割裝置1相同，因此此處省略其說明，並對相同的構成要素使用相同的符號。再者，該第6實施形態中，將自各保護片纏繞體13所抽出的保護片14在分別疊加於板狀玻璃G的有效部Ga的背面側的狀態下成輥狀地捲繞於捲芯11a的周圍。Fig. 6 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a sixth embodiment of the present invention and a cutting method therefor. The sixth embodiment is different from the fourth embodiment or the fifth embodiment in that the strip-shaped sheet glass G extracted from the cooling region 10C of the molding apparatus 10 or the original glass winding body 15 is conveyed in the lateral direction. After the ear portion Gx of the sheet glass G is cut out, the sheet glass G is wound around the two cores 11a of the winding device 11 in a roll shape by the two-division step by the cutting device 1. Thereby, two glass wound bodies as the final product were obtained. In this case, the configuration of the cutting device 1 that performs the two-division step of the strip-shaped sheet glass G and the effect thereof are substantially the same as the second embodiment described above. Since the cutting device 1 of the state is the same, the description thereof is omitted here, and the same components are denoted by the same reference numerals. In the sixth embodiment, the protective sheets 14 which are taken out from the respective protective sheet wound bodies 13 are wound in a roll shape in a state of being superimposed on the back side of the effective portion Ga of the sheet glass G, respectively. Around 11a.
圖7是表示本發明的第7實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。該第7實施形態的切割裝置1與上述第2實施形態~第6實施形態的不同點在於：基本上，藉由一個輸送機7中的作為支撐構件的搬送帶8、及另一個輸送機7z中的作為按壓構件的搬送帶8z於夾持帶狀的板狀玻璃G的狀態下支撐該板狀玻璃G，進一步的不同點在於：以縱向姿勢朝下方輸送帶狀的板狀玻璃G。因此，作為支撐構件的搬送帶8與作為按壓構件的搬送帶8z的構造實質上相同，該兩搬送帶8、8z是對向配置，且分別以同一速度被朝a方向及b方向輸送驅動。再者，當變成作為按壓構件的搬送帶8z接觸帶狀的板狀玻璃G的有效部Ga的形態等時，較佳為使有機膜(例如有機樹脂膜)介於該兩者8z、G的相互間。用以藉由上述切割裝置1對帶狀的板狀玻璃G進行全身切割的構成及其作用效果實質上與上述第2實施形態~第6實施形態相同，因此此處省略其說明，並對相同的構成要素使用相同的符號。再者，帶狀的板狀玻璃G的姿勢並無特別限定，即便為平放姿勢(水平姿勢)，另外，即便板狀玻璃G的長度方向的中心線相對於水平傾斜，亦可應用該構成。FIG. 7 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a seventh embodiment of the present invention and a cutting method therefor. The cutting device 1 according to the seventh embodiment differs from the second embodiment to the sixth embodiment in that basically, the conveyor belt 8 as a supporting member in one conveyor 7 and another conveyor 7z The conveyance belt 8z as the pressing member supports the sheet glass G in a state in which the strip-shaped sheet glass G is sandwiched, and is further different in that the strip-shaped sheet glass G is conveyed downward in the longitudinal direction. Therefore, the conveyor belt 8 as the support member has substantially the same structure as the conveyor belt 8z as the pressing member, and the two conveyor belts 8 and 8z are disposed to face each other and are conveyed in the a direction and the b direction at the same speed. In the case where the transfer belt 8z as the pressing member contacts the effective portion Ga of the strip-shaped sheet glass G, it is preferable to have an organic film (for example, an organic resin film) interposed between the two 8z and G. Intertwined with each other. The configuration for integrally cutting the strip-shaped sheet glass G by the above-described cutting device 1 and the effects thereof are substantially the same as those of the second embodiment to the sixth embodiment. Therefore, the description thereof is omitted here and the same. The constituent elements use the same symbol. In addition, the posture of the strip-shaped sheet glass G is not particularly limited, and even if it is in a flat posture (horizontal posture), even if the center line in the longitudinal direction of the sheet glass G is inclined with respect to the horizontal direction, the configuration can be applied. .
圖8是於藉由以上的實施形態中的切割裝置1所切割的板狀玻璃G(Ga)的切割面6上形成有機層(較佳為有機樹脂層)16的圖。再者，圖例中，因板狀玻璃G(Ga)的寬度方向兩端具有切割面6，故於該兩端形成有機層16，但當僅板狀玻璃G(Ga)的寬度方向一端具有切割面6時，亦可僅於該一端形成有機層16。若如此，則板狀玻璃G的切割面6的強度得到提高，因此於厚度為200μm以下的板狀玻璃G中，對撓曲可確保充分的強度，並可有效地活用薄壁的板狀玻璃G所具有的可撓性。FIG. 8 is a view showing an organic layer (preferably an organic resin layer) 16 formed on the cut surface 6 of the sheet glass G (Ga) cut by the dicing apparatus 1 in the above embodiment. In the example, since the plate-shaped glass G (Ga) has the cut surface 6 at both ends in the width direction, the organic layer 16 is formed at both ends, but only one end of the sheet glass G (Ga) in the width direction is cut. At the time of the surface 6, the organic layer 16 may be formed only at the one end. In this way, the strength of the cut surface 6 of the sheet glass G is improved. Therefore, in the sheet glass G having a thickness of 200 μm or less, sufficient strength can be secured for the deflection, and the thin-walled sheet glass can be effectively utilized. The flexibility that G has.
圖9是於藉由以上的實施形態中的切割裝置1所切割的板狀玻璃G(Ga)的表面形成有機層(較佳為有機樹脂層)16的圖。於此種情況下，板狀玻璃G(Ga)的表面的強度亦得到提高，藉此對撓曲可確保充分的強度，並可有效地活用薄壁的板狀玻璃G(Ga)所具有的可撓性。FIG. 9 is a view showing an organic layer (preferably, an organic resin layer) 16 formed on the surface of the sheet glass G (Ga) cut by the dicing apparatus 1 in the above embodiment. In this case, the strength of the surface of the sheet glass G (Ga) is also improved, whereby sufficient strength can be ensured for the deflection, and the thin-walled sheet glass G(Ga) can be effectively utilized. Flexible.
於以上的實施形態中，藉由所謂的熱應力割斷對板狀玻璃G進行了全身切割，但當藉由熔切對板狀玻璃G進行全身切割時，亦可同様地應用本發明。In the above embodiment, the sheet glass G is subjected to whole body cutting by so-called thermal stress cutting. However, when the sheet glass G is subjected to whole body cutting by fusion cutting, the present invention can also be applied in the same manner.
[實例][Example]
於本發明的[實例1]中，將長邊為460mm、短邊為360mm、厚度為200μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃板經由作為有機層的發泡聚乙烯片材，載置於在其切割預定線的背面側設置寬度為20mm的空間而配置的由不鏽鋼製工作台構成的一對支撐構件的支撐面上(基本上為圖1所示的狀態)。而且，藉由例如超硬合金製刀輪片等於 切割預定線上刻入初始龜裂後，使用二氧化碳雷射作為局部加熱機構，以60w的輸出功率將長度為20mm且寬度為3mm的橢圓形的雷射點照射於切割預定線上，繼而，一面以0.05MPa的氣壓、0.3ml/分的水量吹附作為冷卻機構的混合有空氣與水的冷媒，一面以200mm/秒的速度進行全身切割。藉由於寬度方向上每隔15mm的部位反覆執行上述局部加熱與冷卻，而製成50根由寬度為15mm、長度為360mm的板狀玻璃構成的樣品Sa。其後，如圖10所示，藉由利用兩塊板狀體17夾持且以於50mm/分的速度下在長度方向上產生彎曲的方式按壓彎曲成U字狀的兩點彎曲，依次對該些樣品Sa進行強度評價。該評價是藉由根據因按壓彎曲而斷裂時的兩塊板狀體17的間隔算出斷裂強度(breaking strength)來進行，該斷裂強度獲得了最低值為200MPa，平均值為500MPa的結果。該斷裂強度若與如後述的比較例1般藉由利用超硬合金製刀輪片形成劃線後的折斷所獲得的端面的斷裂強度相比，則獲得了以平均值計為3倍以上的結果。In [Example 1] of the present invention, an alkali-free glass plate having a long side of 460 mm, a short side of 360 mm, a thickness of 200 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C. was passed through a foamed polyethylene sheet as an organic layer. The material is placed on a support surface of a pair of support members made of a stainless steel table which is disposed on the back side of the line to be cut, and has a space of 20 mm (substantially in the state shown in Fig. 1). Moreover, by, for example, a superhard alloy blade is equivalent to the initial crack after the cutting line is cut, a carbon dioxide laser is used as a local heating mechanism, and an elliptical mine having a length of 20 mm and a width of 3 mm is used at an output of 60 W. The spot was irradiated on the line to be cut, and then the refrigerant mixed with air and water as a cooling means was blown at a pressure of 0.05 MPa and a volume of water of 0.3 ml/min, and the whole body was cut at a speed of 200 mm/sec. The sample Sa consisting of a plate glass having a width of 15 mm and a length of 360 mm was produced by repeatedly performing the above-described local heating and cooling every 15 mm in the width direction. Then, as shown in FIG. 10, the two-point bending which is bent in a U shape is pressed by the two plate-like bodies 17 and bent at a speed of 50 mm/min, and sequentially These samples Sa were evaluated for strength. This evaluation was performed by calculating the breaking strength according to the interval between the two plate-like bodies 17 when the film was broken by the press bending, and the breaking strength was found to be the lowest value of 200 MPa and the average value of 500 MPa. When the breaking strength is compared with the breaking strength of the end surface obtained by breaking the scribe line by the squeegee blade of the superhard alloy as in Comparative Example 1 to be described later, the average value is three times or more. result.
於本發明的[實例2]中，針對長邊為460mm、短邊為360mm、厚度為50μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃板，藉由與上述實例1相同的方法，將二氧化碳雷射的輸出功率設定為100w，且將切割速度設定為700mm/秒來實施雷射割斷。其結果，藉由全身切割而可製成50根由寬度為15mm、長度為360mm的板狀玻璃構成的樣品Sa。針對該些樣品Sa，亦藉由與上述實例1相同的方法 依次進行評價，結果該些的斷裂強度的最低值為220MPa，平均值為600MPa，若與後述的比較例1進行對比，則平均值為3倍以上。In [Example 2] of the present invention, an alkali-free glass plate having a long side of 460 mm, a short side of 360 mm, a thickness of 50 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C was used in the same manner as in the above Example 1. The laser cutoff was performed by setting the output power of the carbon dioxide laser to 100 w and setting the cutting speed to 700 mm/sec. As a result, 50 samples Sa composed of a plate glass having a width of 15 mm and a length of 360 mm can be produced by whole body cutting. The sample Sa was also sequentially evaluated by the same method as in the above Example 1, and as a result, the lowest value of the breaking strength was 220 MPa, and the average value was 600 MPa. If compared with the comparative example 1 described later, the average value was obtained. More than 3 times.
於本發明的[實例3]中，針對長邊為460mm、短邊為360mm、厚度為100μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃板，藉由與上述實例1相同的方法，將二氧化碳雷射的輸出功率設定為40w，且將切割速度設定為150mm/秒來實施雷射割斷。其結果，藉由全身切割而可製成50根由寬度為15mm、長度為360mm的板狀玻璃構成的樣品Sa。然後，將紫外線硬化型的丙烯酸樹脂以厚度10μm塗佈於沿著該些樣品Sa的長度方向的切割面上，藉由照射100W的高壓水銀燈1分鐘而使其硬化。於其硬化後，使用#2000的砂紙自紫外線硬化樹脂的上方以1N的負荷使其破損，其後，藉由與上述實例1相同的方法進行評價，結果該些的斷裂強度的最低值為200MPa，平均值為530MPa，未產生切割面的強度下降。In [Example 3] of the present invention, an alkali-free glass plate having a long side of 460 mm, a short side of 360 mm, a thickness of 100 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C was obtained by the same method as in the above Example 1. The laser cutoff was performed by setting the output power of the carbon dioxide laser to 40 W and setting the cutting speed to 150 mm/sec. As a result, 50 samples Sa composed of a plate glass having a width of 15 mm and a length of 360 mm can be produced by whole body cutting. Then, an ultraviolet curable acrylic resin was applied to a cut surface along the longitudinal direction of the samples Sa at a thickness of 10 μm, and was cured by irradiating a 100 W high-pressure mercury lamp for 1 minute. After the hardening, the sandpaper of #2000 was used to break the upper portion of the ultraviolet curable resin under a load of 1 N, and thereafter, evaluation was carried out by the same method as in the above Example 1, and as a result, the minimum value of the breaking strength was 200 MPa. The average value was 530 MPa, and the strength of the cut surface did not decrease.
於本發明的[實例4]中，藉由將由長度為250m、寬度為600mm、厚度為100μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃構成的帶狀的板狀玻璃捲繞於捲芯的周圍來製作玻璃纏繞體，然後，於自該玻璃纏繞體抽出帶狀的板狀玻璃的期間內，藉由與上述圖3所示的形態實質上相同的形態將其寬度方向兩端分別切除50mm。然後，於在由此所獲得的寬度為500mm的帶狀的板狀玻璃上疊加有寬度為550mm、厚度為20μm的聚對苯二甲酸乙二酯 (Polyethylene Terephthalate，PET)膜的狀態下，重新捲繞於直徑為100mm的丙烯酸製的捲芯上。對上述經捲繞的帶狀的板狀玻璃進行抽樣，並藉由與上述實例1相同的方法進行評價，結果該些的斷裂強度的最低值為210MPa，平均值為515MPa，若與後述的比較例1進行對比，則平均值為3倍以上。In [Example 4] of the present invention, a strip-shaped plate glass composed of an alkali-free glass having a length of 250 m, a width of 600 mm, a thickness of 100 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C was wound around A glass-wound body is formed around the core, and then both ends of the width direction are substantially the same as those shown in FIG. 3 during the period in which the strip-shaped sheet glass is taken out from the glass-wound body. Cut 50mm separately. Then, in a state in which a polyethylene terephthalate (PET) film having a width of 550 mm and a thickness of 20 μm was superposed on the strip-shaped plate glass having a width of 500 mm thus obtained, It was wound on a core made of acrylic having a diameter of 100 mm. The above-mentioned wound strip-shaped sheet glass was sampled and evaluated by the same method as in the above Example 1, and as a result, the minimum value of the breaking strength was 210 MPa, and the average value was 515 MPa, if compared with the latter. For comparison in Example 1, the average value was 3 times or more.
於本發明的[實例5]中，針對長邊為460mm、短邊為360mm、厚度為300μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃板，藉由與上述實例1相同的方法，將二氧化碳雷射的輸出功率設定為10w~200w，且將切割速度設定為50mm/秒~700mm/秒而嘗試了雷射割斷。結果發現，由於厚度大，因此難以進行全身切割。但是，若調整二氧化碳雷射的輸出功率或切割速度，則可進行全身切割。In [Example 5] of the present invention, an alkali-free glass plate having a long side of 460 mm, a short side of 360 mm, a thickness of 300 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C was used in the same manner as in the above Example 1. The laser power output of the carbon dioxide laser was set to 10w to 200w, and the cutting speed was set to 50 mm/sec to 700 mm/sec. As a result, it was found that it is difficult to perform whole body cutting due to the large thickness. However, if the output power or cutting speed of the carbon dioxide laser is adjusted, whole body cutting can be performed.
於[比較例1]中，將長邊為460mm、短邊為360mm、厚度為50μm且熱膨脹係數為38×10-7 /℃的無鹼玻璃板設置於單一的定盤上，並且使用刀尖角度為95°的超硬合金製的刀輪片，於2N的按壓力及50mm/秒的速度下，以寬度為15mm的間隔於該玻璃板上刻設劃線，然後以手工作業進行折斷。以上述方式所獲得的50根樣品Sa之中，10根於刻設劃線的途中水平裂痕朝四方擴展而實質上無法進行樣品提取。藉由與上述實例1相同的方法對剩下的40根進行評價。其結果，該些的斷裂強度的最低值為60MPa，平均值為130MPa，顯現出極低的值。In [Comparative Example 1], an alkali-free glass plate having a long side of 460 mm, a short side of 360 mm, a thickness of 50 μm, and a thermal expansion coefficient of 38 × 10 -7 /° C was placed on a single fixed plate, and a tip was used. A blade piece made of a super-hard alloy having an angle of 95° was subjected to a scribing on the glass plate at a width of 15 mm at a pressing force of 2 N and a speed of 50 mm/sec, and then broken by a manual operation. Of the 50 samples Sa obtained in the above manner, 10 horizontal cracks in the middle of the scribe line were expanded toward the square, and sample extraction was substantially impossible. The remaining 40 were evaluated by the same method as in the above Example 1. As a result, the lowest value of the breaking strength was 60 MPa, and the average value was 130 MPa, which showed an extremely low value.
1‧‧‧切割裝置/支撐裝置1‧‧‧Cutting device/support device
2‧‧‧支撐構件2‧‧‧Support members
2a‧‧‧支撐面2a‧‧‧Support surface
3‧‧‧局部加熱機構3‧‧‧Local heating mechanism
4‧‧‧冷卻機構4‧‧‧Cooling mechanism
5‧‧‧切割預定線5‧‧‧ cutting line
6‧‧‧切割面6‧‧‧cut face
6a‧‧‧初始龜裂6a‧‧‧Initial crack
7、7z‧‧‧輸送機7, 7z‧‧‧ conveyor
8、8z‧‧‧搬送帶(支撐構件)8, 8z‧‧‧ conveyor belt (support member)
8a‧‧‧支撐面8a‧‧‧Support surface
9‧‧‧輔助輸送機9‧‧‧Auxiliary conveyor
10‧‧‧成形裝置10‧‧‧Forming device
10A‧‧‧成形區域10A‧‧‧Formed area
10B‧‧‧緩冷區域10B‧‧‧ Slowly cooled area
10C‧‧‧冷卻區域10C‧‧‧Cooling area
10x‧‧‧成形體10x‧‧‧shaped body
11‧‧‧捲繞裝置11‧‧‧Winding device
11a‧‧‧捲芯11a‧‧‧core
12‧‧‧轉換輥12‧‧‧Transfer roller
13‧‧‧保護片捲繞體13‧‧‧Proof sheet winding body
14‧‧‧保護片14‧‧‧Protection film
15‧‧‧原始玻璃纏繞體15‧‧‧Original glass winding body
16‧‧‧有機層16‧‧‧Organic layer
17‧‧‧板狀體17‧‧‧ plate body
20‧‧‧定盤20‧‧ ‧ fixing
a‧‧‧箭頭/方向A‧‧‧arrow/direction
b‧‧‧方向B‧‧‧direction
C‧‧‧冷卻區域C‧‧‧Cooling area
g‧‧‧玻璃基板G‧‧‧glass substrate
ga‧‧‧加熱部位Ga‧‧‧heating parts
gb‧‧‧冷卻部位/凹陷部Gb‧‧‧cooling parts/depressions
G‧‧‧板狀玻璃(玻璃膜)G‧‧‧Plate glass (glass film)
Ga‧‧‧有效部Ga‧‧‧ effective department
Gx‧‧‧耳部Gx‧‧ Ears
H‧‧‧加熱區域H‧‧‧heating area
L‧‧‧雷射光束L‧‧‧Laser beam
S‧‧‧空間S‧‧‧ Space
Sa‧‧‧樣品Sa‧‧ sample
W‧‧‧冷卻水W‧‧‧Cooling water
z‧‧‧箭頭Z‧‧‧ arrow
圖1是表示本發明的第1實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略立體圖。1 is a schematic perspective view showing an implementation state of a dicing apparatus for a sheet glass according to a first embodiment of the present invention and a cutting method therefor.
圖2是表示本發明的第2實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的要部立體圖。FIG. 2 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a second embodiment of the present invention.
圖3是表示本發明的第3實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的要部立體圖。3 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a third embodiment of the present invention.
圖4是表示本發明的第4實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。FIG. 4 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a fourth embodiment of the present invention and a cutting method therefor.
圖5是表示本發明的第5實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。Fig. 5 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a fifth embodiment of the present invention and a cutting method therefor.
圖6是表示本發明的第6實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。Fig. 6 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a sixth embodiment of the present invention and a cutting method therefor.
圖7是表示本發明的第7實施形態的板狀玻璃的切割裝置及其切割方法的實施狀況的概略側視圖。FIG. 7 is a schematic side view showing an implementation state of a dicing apparatus for a sheet glass according to a seventh embodiment of the present invention and a cutting method therefor.
圖8是表示藉由本發明的第1實施形態~第7實施形態中的切割裝置所切割的板狀玻璃的切割面上形成有機層的狀態的剖面圖。FIG. 8 is a cross-sectional view showing a state in which an organic layer is formed on a cut surface of a sheet glass cut by the cutting device according to the first embodiment to the seventh embodiment of the present invention.
圖9是表示藉由本發明的第1實施形態~第7實施形態中的切割裝置所切割的板狀玻璃的表面形成有機層的狀態的剖面圖。FIG. 9 is a cross-sectional view showing a state in which an organic layer is formed on the surface of the sheet glass cut by the cutting device according to the first embodiment to the seventh embodiment of the present invention.
圖10是表示進行板狀玻璃的評價的狀態的概略圖。FIG. 10 is a schematic view showing a state in which evaluation of the sheet glass is performed.
圖11a是表示先前的問題點的概略前視圖。Fig. 11a is a schematic front view showing a prior problem.
圖11b是表示先前的問題點的概略前視圖。Fig. 11b is a schematic front view showing a previous problem.
圖11c是表示先前的問題點的概略前視圖。Fig. 11c is a schematic front view showing a prior problem.
1‧‧‧切割裝置/支撐裝置1‧‧‧Cutting device/support device
2‧‧‧支撐構件2‧‧‧Support members
2a‧‧‧支撐面2a‧‧‧Support surface
3‧‧‧局部加熱機構3‧‧‧Local heating mechanism
4‧‧‧冷卻機構4‧‧‧Cooling mechanism
5‧‧‧切割預定線5‧‧‧ cutting line
6‧‧‧切割面6‧‧‧cut face
6a‧‧‧初始龜裂6a‧‧‧Initial crack
a‧‧‧箭頭/方向A‧‧‧arrow/direction
C‧‧‧冷卻區域C‧‧‧Cooling area
G‧‧‧板狀玻璃(玻璃膜)G‧‧‧Plate glass (glass film)
H‧‧‧加熱區域H‧‧‧heating area
L‧‧‧雷射光束L‧‧‧Laser beam
S‧‧‧空間S‧‧‧ Space
W‧‧‧冷卻水W‧‧‧Cooling water
Claims (18)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100119873A TWI500586B (en) | 2011-06-07 | 2011-06-07 | Cutting method of plate glass and cutting device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100119873A TWI500586B (en) | 2011-06-07 | 2011-06-07 | Cutting method of plate glass and cutting device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201249762A TW201249762A (en) | 2012-12-16 |
| TWI500586B true TWI500586B (en) | 2015-09-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100119873A TWI500586B (en) | 2011-06-07 | 2011-06-07 | Cutting method of plate glass and cutting device thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI500586B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7148837B2 (en) * | 2018-06-22 | 2022-10-06 | 日本電気硝子株式会社 | Glass roll manufacturing method |
| CN112938506B (en) * | 2021-02-01 | 2022-09-02 | 河北光兴半导体技术有限公司 | Slicing device, slicing equipment, slicing system and slicing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0768395A (en) * | 1993-09-01 | 1995-03-14 | Hitachi Cable Ltd | Method and device for cutting glass |
| TWI255803B (en) * | 2000-08-16 | 2006-06-01 | Schott Ag | Method and apparatus for producing individual glass disks |
| TW201022163A (en) * | 2008-10-01 | 2010-06-16 | Nippon Electric Glass Co | Glass roll, manufacturing apparatus of glass roll, and manufacturing method of glass roll |
-
2011
- 2011-06-07 TW TW100119873A patent/TWI500586B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0768395A (en) * | 1993-09-01 | 1995-03-14 | Hitachi Cable Ltd | Method and device for cutting glass |
| TWI255803B (en) * | 2000-08-16 | 2006-06-01 | Schott Ag | Method and apparatus for producing individual glass disks |
| TW201022163A (en) * | 2008-10-01 | 2010-06-16 | Nippon Electric Glass Co | Glass roll, manufacturing apparatus of glass roll, and manufacturing method of glass roll |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201249762A (en) | 2012-12-16 |
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