TWI479078B - 多段式乾式幫浦 - Google Patents
多段式乾式幫浦 Download PDFInfo
- Publication number
- TWI479078B TWI479078B TW097143730A TW97143730A TWI479078B TW I479078 B TWI479078 B TW I479078B TW 097143730 A TW097143730 A TW 097143730A TW 97143730 A TW97143730 A TW 97143730A TW I479078 B TWI479078 B TW I479078B
- Authority
- TW
- Taiwan
- Prior art keywords
- pump
- rotor
- rotor shaft
- cylinder
- stage
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
- F04C2240/52—Bearings for assemblies with supports on both sides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007296014 | 2007-11-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200936885A TW200936885A (en) | 2009-09-01 |
TWI479078B true TWI479078B (zh) | 2015-04-01 |
Family
ID=40638739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097143730A TWI479078B (zh) | 2007-11-14 | 2008-11-12 | 多段式乾式幫浦 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8662869B2 (de) |
EP (1) | EP2221482B1 (de) |
JP (1) | JP5073754B2 (de) |
KR (1) | KR101227033B1 (de) |
CN (1) | CN101855454B (de) |
TW (1) | TWI479078B (de) |
WO (1) | WO2009063890A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI825313B (zh) * | 2019-05-13 | 2023-12-11 | 法商普發真空公司 | 乾式主真空泵 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI518245B (zh) * | 2010-04-19 | 2016-01-21 | 荏原製作所股份有限公司 | 乾真空泵裝置、排氣單元,以及消音器 |
IT1403169B1 (it) * | 2010-10-21 | 2013-10-04 | Tecnodinamica S R L | Impianto per la produzione di manufatti in materiale polimerico, plastico o similare, e relativo procedimento |
GB2510829B (en) * | 2013-02-13 | 2015-09-02 | Edwards Ltd | Pumping system |
CN103352849A (zh) * | 2013-07-31 | 2013-10-16 | 南通龙鹰真空泵业有限公司 | 滑阀罗茨真空泵 |
DE202014007117U1 (de) * | 2014-09-05 | 2015-12-09 | Oerlikon Leybold Vacuum Gmbh | Klauenpumpe |
CN106762650A (zh) * | 2015-11-25 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于真空获得设备的节能控制***及方法 |
CN106762641A (zh) * | 2016-11-28 | 2017-05-31 | 陈琼 | 一种真空联合机组 |
GB201621618D0 (en) * | 2016-12-19 | 2017-02-01 | Edwards Ltd | Pump sealing |
GB201700995D0 (en) * | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump rotor |
GB201701000D0 (en) | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump coupling |
FR3065040B1 (fr) * | 2017-04-07 | 2019-06-21 | Pfeiffer Vacuum | Groupe de pompage et utilisation |
GB2563595B (en) | 2017-06-19 | 2020-04-15 | Edwards Ltd | Twin-shaft pumps |
DE202018000178U1 (de) * | 2018-01-12 | 2019-04-15 | Leybold Gmbh | Kompressor |
JP7141332B2 (ja) * | 2018-12-28 | 2022-09-22 | 株式会社荏原製作所 | 真空ポンプ装置 |
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
KR102258397B1 (ko) * | 2019-08-30 | 2021-06-02 | 코우테크 주식회사 | 압축기와 다단 압축 모듈 및 이를 이용한 학습 지능형 제어 압축 시스템 |
CN110566457B (zh) * | 2019-09-03 | 2020-07-10 | 乐清市芮易经济信息咨询有限公司 | 一种带有三爪转子的气液混合输送装置 |
GB2590665B (en) * | 2019-12-23 | 2022-06-08 | Edwards S R O | Pump configured to mitigate the effect of any rotor and stator clash and its method of manufacture |
US20230096279A1 (en) * | 2021-09-27 | 2023-03-30 | Raymond Zhou Shaw | Vacuum system having condenser and root vacuum pump set |
US20230167822A1 (en) * | 2021-09-27 | 2023-06-01 | Raymond Zhou Shaw | Vacuum system having condenser and root vacuum pump set |
GB2620724A (en) * | 2022-05-18 | 2024-01-24 | Edwards Ltd | Multi-stage vacuum pump with improved low vacuum pressure performance |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167894A (en) * | 1980-05-27 | 1981-12-23 | Matsushita Electric Ind Co Ltd | Compressor |
WO1997015759A1 (en) * | 1995-10-23 | 1997-05-01 | Lysholm Technologies Ab | Transmission including a two-part clutch arrangement |
JP2001329985A (ja) * | 2000-05-22 | 2001-11-30 | Toyota Industries Corp | 真空ポンプにおける冷却構造 |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1531607A (en) * | 1923-01-24 | 1925-03-31 | Thomas W Green | High-pressure rotary pump |
JPS52158908U (de) * | 1976-05-28 | 1977-12-02 | ||
JPS6319090A (ja) | 1986-07-11 | 1988-01-26 | Sumitomo Electric Ind Ltd | 光学文字読取装置 |
JPS6319090U (de) * | 1986-07-23 | 1988-02-08 | ||
US4828467A (en) * | 1988-01-19 | 1989-05-09 | Eaton Corporation | Supercharger and rotor and shaft arrangement therefor |
JPH06505079A (ja) * | 1991-03-04 | 1994-06-09 | バルツァース ウント ライボルト ドイチュラント ホールディング アクチエンゲゼルシャフト | 多段式の乾式運転型の真空ポンプに不活性ガスを供給する不活性ガス供給装置 |
KR100382308B1 (ko) | 1995-03-20 | 2003-07-10 | 가부시키 가이샤 에바라 세이사꾸쇼 | 진공펌프 |
JP2005061421A (ja) * | 1995-03-20 | 2005-03-10 | Ebara Corp | 真空ポンプ |
JP3661885B2 (ja) * | 1995-07-13 | 2005-06-22 | 大亜真空株式会社 | スクリュー真空ポンプ及びねじ歯車 |
JPH11230060A (ja) * | 1998-02-18 | 1999-08-24 | Ebara Corp | 回転式気体機械用ロータ及びその製造方法 |
US6123526A (en) * | 1998-09-18 | 2000-09-26 | Industrial Technology Research Institute | Multistage pump and method for assembling the pump |
JP2003166483A (ja) | 2001-11-29 | 2003-06-13 | Aisin Seiki Co Ltd | 多段式ルーツ型ポンプ |
JP3941484B2 (ja) * | 2001-12-03 | 2007-07-04 | アイシン精機株式会社 | 多段式真空ポンプ |
TW200506217A (en) | 2003-03-19 | 2005-02-16 | Ebara Corp | Positive-displacement vacuum pump |
JP2005098210A (ja) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | 多段ドライポンプ |
JP4767625B2 (ja) * | 2005-08-24 | 2011-09-07 | 樫山工業株式会社 | 多段ルーツ式ポンプ |
-
2008
- 2008-11-12 US US12/742,654 patent/US8662869B2/en active Active
- 2008-11-12 WO PCT/JP2008/070562 patent/WO2009063890A1/ja active Application Filing
- 2008-11-12 TW TW097143730A patent/TWI479078B/zh active
- 2008-11-12 KR KR1020107010275A patent/KR101227033B1/ko active IP Right Grant
- 2008-11-12 CN CN2008801156221A patent/CN101855454B/zh active Active
- 2008-11-12 JP JP2009541145A patent/JP5073754B2/ja active Active
- 2008-11-12 EP EP08850687.8A patent/EP2221482B1/de active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167894A (en) * | 1980-05-27 | 1981-12-23 | Matsushita Electric Ind Co Ltd | Compressor |
WO1997015759A1 (en) * | 1995-10-23 | 1997-05-01 | Lysholm Technologies Ab | Transmission including a two-part clutch arrangement |
JP2001329985A (ja) * | 2000-05-22 | 2001-11-30 | Toyota Industries Corp | 真空ポンプにおける冷却構造 |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI825313B (zh) * | 2019-05-13 | 2023-12-11 | 法商普發真空公司 | 乾式主真空泵 |
Also Published As
Publication number | Publication date |
---|---|
US8662869B2 (en) | 2014-03-04 |
EP2221482B1 (de) | 2015-04-15 |
JPWO2009063890A1 (ja) | 2011-03-31 |
WO2009063890A1 (ja) | 2009-05-22 |
EP2221482A4 (de) | 2012-09-12 |
KR20100081345A (ko) | 2010-07-14 |
JP5073754B2 (ja) | 2012-11-14 |
EP2221482A1 (de) | 2010-08-25 |
KR101227033B1 (ko) | 2013-01-28 |
CN101855454B (zh) | 2012-12-05 |
US20100266433A1 (en) | 2010-10-21 |
TW200936885A (en) | 2009-09-01 |
CN101855454A (zh) | 2010-10-06 |
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