TWI479078B - 多段式乾式幫浦 - Google Patents

多段式乾式幫浦 Download PDF

Info

Publication number
TWI479078B
TWI479078B TW097143730A TW97143730A TWI479078B TW I479078 B TWI479078 B TW I479078B TW 097143730 A TW097143730 A TW 097143730A TW 97143730 A TW97143730 A TW 97143730A TW I479078 B TWI479078 B TW I479078B
Authority
TW
Taiwan
Prior art keywords
pump
rotor
rotor shaft
cylinder
stage
Prior art date
Application number
TW097143730A
Other languages
English (en)
Chinese (zh)
Other versions
TW200936885A (en
Inventor
Toshio Suzuki
Tomonari Tanaka
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200936885A publication Critical patent/TW200936885A/zh
Application granted granted Critical
Publication of TWI479078B publication Critical patent/TWI479078B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW097143730A 2007-11-14 2008-11-12 多段式乾式幫浦 TWI479078B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007296014 2007-11-14

Publications (2)

Publication Number Publication Date
TW200936885A TW200936885A (en) 2009-09-01
TWI479078B true TWI479078B (zh) 2015-04-01

Family

ID=40638739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097143730A TWI479078B (zh) 2007-11-14 2008-11-12 多段式乾式幫浦

Country Status (7)

Country Link
US (1) US8662869B2 (de)
EP (1) EP2221482B1 (de)
JP (1) JP5073754B2 (de)
KR (1) KR101227033B1 (de)
CN (1) CN101855454B (de)
TW (1) TWI479078B (de)
WO (1) WO2009063890A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI825313B (zh) * 2019-05-13 2023-12-11 法商普發真空公司 乾式主真空泵

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
IT1403169B1 (it) * 2010-10-21 2013-10-04 Tecnodinamica S R L Impianto per la produzione di manufatti in materiale polimerico, plastico o similare, e relativo procedimento
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
CN103352849A (zh) * 2013-07-31 2013-10-16 南通龙鹰真空泵业有限公司 滑阀罗茨真空泵
DE202014007117U1 (de) * 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
CN106762650A (zh) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种用于真空获得设备的节能控制***及方法
CN106762641A (zh) * 2016-11-28 2017-05-31 陈琼 一种真空联合机组
GB201621618D0 (en) * 2016-12-19 2017-02-01 Edwards Ltd Pump sealing
GB201700995D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump rotor
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
GB2563595B (en) 2017-06-19 2020-04-15 Edwards Ltd Twin-shaft pumps
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
KR102258397B1 (ko) * 2019-08-30 2021-06-02 코우테크 주식회사 압축기와 다단 압축 모듈 및 이를 이용한 학습 지능형 제어 압축 시스템
CN110566457B (zh) * 2019-09-03 2020-07-10 乐清市芮易经济信息咨询有限公司 一种带有三爪转子的气液混合输送装置
GB2590665B (en) * 2019-12-23 2022-06-08 Edwards S R O Pump configured to mitigate the effect of any rotor and stator clash and its method of manufacture
US20230096279A1 (en) * 2021-09-27 2023-03-30 Raymond Zhou Shaw Vacuum system having condenser and root vacuum pump set
US20230167822A1 (en) * 2021-09-27 2023-06-01 Raymond Zhou Shaw Vacuum system having condenser and root vacuum pump set
GB2620724A (en) * 2022-05-18 2024-01-24 Edwards Ltd Multi-stage vacuum pump with improved low vacuum pressure performance

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
WO1997015759A1 (en) * 1995-10-23 1997-05-01 Lysholm Technologies Ab Transmission including a two-part clutch arrangement
JP2001329985A (ja) * 2000-05-22 2001-11-30 Toyota Industries Corp 真空ポンプにおける冷却構造
JP2004300964A (ja) * 2003-03-28 2004-10-28 Aisin Seiki Co Ltd 真空ポンプ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1531607A (en) * 1923-01-24 1925-03-31 Thomas W Green High-pressure rotary pump
JPS52158908U (de) * 1976-05-28 1977-12-02
JPS6319090A (ja) 1986-07-11 1988-01-26 Sumitomo Electric Ind Ltd 光学文字読取装置
JPS6319090U (de) * 1986-07-23 1988-02-08
US4828467A (en) * 1988-01-19 1989-05-09 Eaton Corporation Supercharger and rotor and shaft arrangement therefor
JPH06505079A (ja) * 1991-03-04 1994-06-09 バルツァース　ウント　ライボルト　ドイチュラント　ホールディング　アクチエンゲゼルシャフト 多段式の乾式運転型の真空ポンプに不活性ガスを供給する不活性ガス供給装置
KR100382308B1 (ko) 1995-03-20 2003-07-10 가부시키 가이샤 에바라 세이사꾸쇼 진공펌프
JP2005061421A (ja) * 1995-03-20 2005-03-10 Ebara Corp 真空ポンプ
JP3661885B2 (ja) * 1995-07-13 2005-06-22 大亜真空株式会社 スクリュー真空ポンプ及びねじ歯車
JPH11230060A (ja) * 1998-02-18 1999-08-24 Ebara Corp 回転式気体機械用ロータ及びその製造方法
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
JP2003166483A (ja) 2001-11-29 2003-06-13 Aisin Seiki Co Ltd 多段式ルーツ型ポンプ
JP3941484B2 (ja) * 2001-12-03 2007-07-04 アイシン精機株式会社 多段式真空ポンプ
TW200506217A (en) 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
JP2005098210A (ja) * 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
WO1997015759A1 (en) * 1995-10-23 1997-05-01 Lysholm Technologies Ab Transmission including a two-part clutch arrangement
JP2001329985A (ja) * 2000-05-22 2001-11-30 Toyota Industries Corp 真空ポンプにおける冷却構造
JP2004300964A (ja) * 2003-03-28 2004-10-28 Aisin Seiki Co Ltd 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI825313B (zh) * 2019-05-13 2023-12-11 法商普發真空公司 乾式主真空泵

Also Published As

Publication number Publication date
US8662869B2 (en) 2014-03-04
EP2221482B1 (de) 2015-04-15
JPWO2009063890A1 (ja) 2011-03-31
WO2009063890A1 (ja) 2009-05-22
EP2221482A4 (de) 2012-09-12
KR20100081345A (ko) 2010-07-14
JP5073754B2 (ja) 2012-11-14
EP2221482A1 (de) 2010-08-25
KR101227033B1 (ko) 2013-01-28
CN101855454B (zh) 2012-12-05
US20100266433A1 (en) 2010-10-21
TW200936885A (en) 2009-09-01
CN101855454A (zh) 2010-10-06

Similar Documents

Publication Publication Date Title
TWI479078B (zh) 多段式乾式幫浦
JP6622527B2 (ja) スクロール流体機械
JP5017052B2 (ja) スクリュ流体機械
GB2487376A (en) Two material pump stator for corrosion resistance and thermal conductivity
JP6377839B2 (ja) ガス圧縮機
WO2006061558A1 (en) Vacuum pump with heat sink on rotor shaft
KR102052254B1 (ko) 스크류 압축기를 위한 압축기 요소 및 그러한 압축기 요소가 적용되는 스크류 압축기
TWI480467B (zh) 乾式幫浦
JP3941484B2 (ja) 多段式真空ポンプ
JP4962212B2 (ja) スクロール圧縮機
JP2008038908A (ja) 極めて大きな運転圧のためのスクリュコンプレッサ
JP3270980B2 (ja) スクリュ圧縮機
US20090191083A1 (en) Rotary blower with isothermal air jacket
JP6873763B2 (ja) スクリュー流体機械
JP2004293377A (ja) 多段式ドライポンプ
US20190195225A1 (en) Rotary blower
KR20080028173A (ko) 공기 압축기
JP6025458B2 (ja) 真空ポンプ
JP2019113064A5 (de)
GB2418958A (en) Vacuum pump with enhanced exhaust heat transfer to stator
JP2008025351A (ja) スクリュー形過給機
JP2007177720A (ja) 多気筒回転式圧縮機の製造方法および冷凍空調システム
JP2007032290A (ja) スクロール式流体機械
JP2007126972A (ja) スクロール式流体機械
JP2008002367A (ja) スクロール式流体機械