TWI464895B - Array of solar cells - Google Patents
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- TWI464895B TWI464895B TW097130956A TW97130956A TWI464895B TW I464895 B TWI464895 B TW I464895B TW 097130956 A TW097130956 A TW 097130956A TW 97130956 A TW97130956 A TW 97130956A TW I464895 B TWI464895 B TW I464895B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
本發明是有關於一種太陽能電池，特別是指一陣列集光式太陽能電池。The present invention relates to a solar cell, and more particularly to an array of photovoltaic solar cells.
太陽能電池的光電轉換效率是指太陽能電池單位受光面積的最大輸出功率與入射太陽光能量密度的百分比，而太陽能電池在工作時的損失，例如：入射光能量小於電子躍遷所需吸收的能量，無法產生載子(電子-電洞對)、所產生的載子(電子-電洞對)部分在電池的表面或內部自己復合(recombination)消失掉、或是投射到電池表面的光線部分被反射，沒有進入電池、...等等因素均會對太陽能電池的光電轉換效率產生影響，而且目前太陽能電池因大都是2維的平面態樣設計，所以產生的光電流需經過較長的路徑才會經由電極傳送出去，而大幅增加載子復合的機率，導致光電流的輸出率大幅地降低；另一方面則因投射到太陽能電池表面的光線，因為被反射而沒有進入電池造成的收光效率損失，亦是影響太陽能電池電流輸出的一大因素。The photoelectric conversion efficiency of a solar cell refers to the percentage of the maximum output power of the solar cell unit to the light-receiving area and the energy density of the incident solar energy, and the loss of the solar cell during operation, for example, the incident light energy is less than the energy absorbed by the electronic transition, and cannot The carrier (electron-hole pair) is generated, and the generated carrier (electron-hole pair) portion is self-recombined on the surface or inside of the battery, or the portion of the light projected onto the surface of the battery is reflected. No factors such as entering the battery, etc. will affect the photoelectric conversion efficiency of the solar cell, and currently the solar cell is mostly designed in a two-dimensional plane state, so the photocurrent generated needs to go through a long path. Transmitting through the electrode greatly increases the probability of carrier recombination, resulting in a significant decrease in the output rate of the photocurrent; on the other hand, the light-emitting efficiency due to the light that is projected onto the surface of the solar cell is not reflected into the cell. It is also a major factor affecting the current output of solar cells.
目前用來提昇電流輸出率的方法，大部分為藉由電極結構設計的改變，增加電極與產生光電流之磊晶膜的接觸面積，縮短電流傳送路徑，降低載子的復合，而提昇光電流的輸出率；而改善太陽能電池收光效率的方法，則大都是在電池表面進行粗化，或塗上一層減低反射的塗膜，當太陽光接觸該減反射膜，或粗化表面時，會因為空氣與該減反射膜之 間的折射率差異，或因不規則表面而使光的反射角改變，而被導引進入太陽能電池中，進而可增加太陽能電池的收光效率。At present, most of the methods for increasing the current output rate are by changing the design of the electrode structure, increasing the contact area between the electrode and the epitaxial film that generates the photocurrent, shortening the current transmission path, reducing the recombination of the carrier, and increasing the photocurrent. The output rate is improved. The method of improving the light-receiving efficiency of the solar cell is mostly to roughen the surface of the battery or apply a coating film that reduces reflection. When the sunlight contacts the anti-reflection film or roughens the surface, Because of the air and the anti-reflection film The difference in refractive index, or the angle of reflection of the light due to the irregular surface, is guided into the solar cell, thereby increasing the light-receiving efficiency of the solar cell.
因此，如何縮短電流傳送路徑提昇電流的輸出率、增加太陽能電池的收光效率，以提昇太陽能電池的光電轉換效率，是太陽能電池領域相關業者所欲解決的重要問題之一。Therefore, how to shorten the current transmission path to increase the current output rate and increase the solar cell's light-receiving efficiency to improve the photoelectric conversion efficiency of the solar cell is one of the important problems that the relevant operators in the field of solar cells want to solve.
因此，本發明之目的，即在提供一種可提升光電流的輸出率及收光效率的陣列集光式太陽能電池。Accordingly, it is an object of the present invention to provide an array concentrating solar cell that can increase the output rate and light collection efficiency of photocurrent.
於是，本發明一種陣列集光式太陽能電池包含一底電極、一集光結構，及一頂電極單元。Thus, an array concentrating solar cell of the present invention comprises a bottom electrode, a light collecting structure, and a top electrode unit.
該集光結構包括一連接於該底電極的載板，及複數個向遠離該底電極方向延伸且彼此間隔成陣列態樣設置排列的作動膜，光可自該每一作動膜的頂面，及由任兩相鄰作動膜彼此的間隙限制而自該作動膜的側面進入該等作動膜中，且該每一作動膜在光進入後以光伏特效應將光轉換電能獨立貢獻光電流。The light collecting structure includes a carrier connected to the bottom electrode, and a plurality of moving films arranged to extend away from the bottom electrode and spaced apart from each other in an array, and the light can be from the top surface of each of the moving films. And entering from the side of the actuating film into the actuating film by the gap between any two adjacent actuating films, and each of the actuating films independently contributes photocurrent to the photoconverting electric energy by the photovoltaic effect after the light enters.
該頂電極設置在該集光結構上，可與該底電極相互配合將該集光結構之多數作動膜轉換的電能輸出。The top electrode is disposed on the light collecting structure, and can cooperate with the bottom electrode to output electrical energy converted by a plurality of moving films of the light collecting structure.
另外，本發明也同時提供另一種陣列集光式太陽能電池，包含一底電極、一載板、一作動膜，及一頂電極。In addition, the present invention also provides another array concentrating solar cell comprising a bottom electrode, a carrier, an operating film, and a top electrode.
該載板，具有一上表面、一相反於該上表面並與該底電極歐姆接觸的底面，及複數由該上表面向下形成的圍繞面，該每一圍繞面界定形成一凹槽The carrier has an upper surface, a bottom surface opposite to the upper surface and in ohmic contact with the bottom electrode, and a plurality of surrounding surfaces formed downwardly from the upper surface, the surrounding surfaces defining a recess
該作動膜對應形成在該上表面，光自該作動膜的頂面及由該作動膜的間隙限制而自該作動膜的側面進入該作動膜中，且該作動膜在光進入後以光伏特效應將光轉換成電能。The actuating film is formed on the upper surface correspondingly, and light enters the moving film from the top surface of the actuating film and from the side surface of the actuating film, and the actuating film is photovoltaic effect after the light enters. Light should be converted into electrical energy.
該頂電極設置在該作動膜上並與該底電極相互配合將該作動膜轉換的電能輸出。The top electrode is disposed on the operating film and cooperates with the bottom electrode to output electrical energy converted by the moving film.
本發明的功效在於：光可自該每一作動膜的頂面，及由任兩相鄰作動膜彼此的間隙限制而自該作動膜的側面進入該等作動膜中，而能有效的提昇該每一作動膜的收光效率；且該每一作動膜獨立貢獻的光電流可直接經由該頂電極彙整收集，降低光電流的傳輸路徑，因此可減少載子於傳輸過程復合的機率而提升光電流的輸出效率。The effect of the invention is that the light can be effectively lifted from the top surface of each of the actuating membranes and from the side of the actuating membrane by the gap between any two adjacent actuating membranes. The light-receiving efficiency of each actuating film; and the photocurrent independently contributed by each of the actuating films can be collected directly through the top electrode to reduce the transmission path of the photocurrent, thereby reducing the probability of the carrier recombining in the transmission process and enhancing the light. Current output efficiency.
有關本發明之前述及其他技術內容、特點與功效，在以下配合參考圖式之三個較佳實施例的詳細說明中，將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of FIG.
在本發明被詳細描述之前，要注意的是，在以下的說明內容中，類似的元件是以相同的編號來表示，另外要說明的是，該圖示中的剖面線為以不同方向的斜線表示不同的層體，並非代表相對應的材質剖面線。Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals, and the hatching in the figure is a diagonal line in different directions. Represents different layers and does not represent the corresponding material profile.
參閱圖1，本發明一種陣列集光式太陽能電池的一第一較佳實施例包含一底電極2、一設置在該底電極2上的集光結構3，及一形成於該集光結構3的頂電極單元4。Referring to FIG. 1, a first preferred embodiment of an array concentrating solar cell of the present invention comprises a bottom electrode 2, a light collecting structure 3 disposed on the bottom electrode 2, and a light collecting structure 3 formed thereon. Top electrode unit 4.
該底電極2可選自金屬(例如：鋁、金、銀)，或是合金 金屬(例如：金鍺鎳合金、金鈹合金)，於本實施例中，該底電極2為由金鍺鎳合金，及金所構成的雙層膜。The bottom electrode 2 may be selected from a metal (for example: aluminum, gold, silver) or an alloy In the present embodiment, the bottom electrode 2 is a two-layer film composed of a gold-nickel alloy and gold.
該集光結構3包括一具有一上表面311的平面載板31，及複數作動膜32。The light collecting structure 3 includes a plane carrier 31 having an upper surface 311, and a plurality of actuating films 32.
該平面載板31以反向於該上表面311的底面連接於該底電極2且與該底電極2成歐姆接觸，該等作動膜32為由該上表面311向遠離該底電極2方向延伸且彼此間隔成陣列態樣設置排列，該每一作動膜32具有一頂面321，且相鄰兩作動膜32的平均距離為不大於100μm。The planar carrier 31 is connected to the bottom electrode 2 and is in ohmic contact with the bottom electrode 2 opposite to the bottom surface of the upper surface 311. The movable film 32 extends from the upper surface 311 away from the bottom electrode 2 And arranged in an array form, each of the actuating films 32 has a top surface 321 and the average distance between the adjacent two operating films 32 is not more than 100 μm.
該載板31可選自砷化鎵、鍺、矽，或磷化銦，該等作動膜32可選自III－V族半導體材料；於本實施例中，該載板31為選自砷化鎵，該每一作動膜32為由一砷化鎵緩衝層、一磷化銦鎵背面電場層(back surface field，BSF)、一砷化鎵基極層、一砷化鎵射極層、一磷化銦鎵窗口層，及一砷化鎵接觸層依序由該上表面311向遠離該底電極2方向堆疊構成。在本發明中，該載板31及該等作動膜32並非本發明之技術重點，於此不再多加贅述，The carrier 31 may be selected from gallium arsenide, germanium, antimony, or indium phosphide, and the actuating film 32 may be selected from a group III-V semiconductor material; in the embodiment, the carrier 31 is selected from arsenic. Gallium, each of the actuating films 32 is composed of a gallium arsenide buffer layer, an indium phosphide back surface field (BSF), a gallium arsenide base layer, a gallium arsenide emitter layer, and a gallium arsenide layer. The indium gallium phosphide window layer and the gallium arsenide contact layer are sequentially stacked from the upper surface 311 away from the bottom electrode 2. In the present invention, the carrier 31 and the actuating films 32 are not the technical focus of the present invention, and will not be further described herein.
該頂電極單元4包括複數配合形成於該每一作動膜32頂面321的頂電極41，及一連接件42，該連接件42為複數個連接相鄰兩頂電極41的連接導線，可使該等頂電極41彼此電導通，於本實施例中，該等頂電極41及該連接件42為由金鈹合金及金為材料所構成的雙層膜。The top electrode unit 4 includes a plurality of top electrodes 41 formed on the top surface 321 of each of the operating films 32, and a connecting member 42. The connecting member 42 is a plurality of connecting wires connecting the adjacent two top electrodes 41. The top electrodes 41 are electrically connected to each other. In the present embodiment, the top electrodes 41 and the connecting member 42 are two-layer films made of a metal alloy and gold.
當光照射到該等作動膜時，與傳統2維平面式設計的太陽能電池結構相較，由於傳統2維平面結構太陽能電池產生 的光電流需經過很長的路徑才可傳送出去，因此載子於傳送過程復合的機率高，而本發明該每一作動膜可獨立貢獻光電流，並可直接經由設置於該頂電極單元直接彙整收集，降低光電流的傳輸路徑；同時，光可從任兩相鄰作動膜的間隙進入，由於進入該間隙時，可經由折射導引光自該作動膜的側面進入該等作動膜中，增加該作動膜整體收光面積，而提昇該等作動膜的收光效率。When the light is irradiated to the moving film, compared with the traditional 2D planar design of the solar cell structure, due to the traditional 2D planar structure solar cell The photocurrent needs to be transmitted through a long path, so that the carrier has a high probability of recombination in the transport process, and each of the actuating films of the present invention can independently contribute photocurrent and can be directly disposed directly on the top electrode unit. Collecting and collecting, reducing the transmission path of the photocurrent; at the same time, the light can enter from the gap between any two adjacent actuating films, and when entering the gap, the light can be guided into the moving film from the side of the actuating film via the refractive guiding light, Increasing the overall light-receiving area of the actuating film increases the light-receiving efficiency of the actuating films.
對固定面積之本發明陣列集光式太陽能電池的第一較佳實施例而言，任相鄰兩作動膜32之間的間距越小，表示有越多的作動膜32數目，而該每一作動膜32就是一個獨立太陽能吸光結構，且該每一作動膜32獨立貢獻的光電流可直接經由該頂電極單元4彙整收集，降低光電流的傳輸路徑，因此可減少載子於傳輸過程復合的機率，而可提升光電流的輸出效率。For a first preferred embodiment of the array-collective solar cell of the present invention having a fixed area, the smaller the spacing between adjacent two operating films 32, the more the number of operating films 32 are present, and each of the moving films 32 is an independent solar light absorbing structure, and the photocurrent independently contributed by each of the operating films 32 can be collected and collected directly through the top electrode unit 4, thereby reducing the transmission path of the photocurrent, thereby reducing the probability of the carrier being combined in the transmission process. It can improve the output efficiency of photocurrent.
本發明該第一較佳實施例的製作方法簡單地說明於下。The manufacturing method of the first preferred embodiment of the present invention will be briefly described below.
首先，以有機金屬化學氣相沉積(MOCVD)方法由該上表面311依序向遠離該載板31方向沉積形成該包括砷化鎵緩衝層、磷化銦鎵背面電場層、砷化鎵基極層、砷化鎵射極層、磷化銦鎵窗口層，及砷化鎵接觸層的磊晶膜，再由該磊晶膜表面沿該載板31方向以微影蝕刻方式將預定部分磊晶膜移除，至該每一對應部分的上表面311裸露出，將該磊晶膜分割形成該複數於該載板31上表面311彼此間隔成陣列態樣設置排列的作動膜32，且任相鄰兩作動膜32的平均距離為不大於100μm。First, the upper surface 311 is deposited in a direction away from the carrier 31 by a metalorganic chemical vapor deposition (MOCVD) method to form the gallium arsenide buffer layer, the indium phosphide back surface electric field layer, and the gallium arsenide base. a layer, a gallium arsenide emitter layer, an indium gallium phosphide window layer, and an epitaxial film of a gallium arsenide contact layer, and then a predetermined portion of the epitaxial film is epitaxially etched in the direction of the carrier 31 by photolithography The film is removed, and the upper surface 311 of each corresponding portion is exposed, and the epitaxial film is divided to form the operating film 32 which is arranged in an array of the upper surface 311 of the carrier 31, and is adjacent to the two. The average distance of the actuating film 32 is not more than 100 μm.
然後，於該載板31反向於該上表面311的另一面，以熱蒸鍍方式沉積由金鍺鎳合金，及金為材料所構成的雙層膜，形成該底電極2。Then, the bottom plate 2 is formed by depositing a two-layer film composed of a gold-nickel alloy and gold as a material on the other side of the upper surface 311 opposite to the upper surface 311 by thermal evaporation.
最後以熱蒸鍍方式於該每一作動膜32頂面321形成以金鈹合金及金的雙層膜構成的頂電極41，及可使該等頂電極41彼此電連接的連接件42，即製得本發明陣列集光式太陽能電池的該第一較佳實施例。Finally, a top electrode 41 composed of a double-layer film of a gold-bismuth alloy and gold is formed on the top surface 321 of each of the operating films 32 by thermal evaporation, and a connecting member 42 that can electrically connect the top electrodes 41 to each other, that is, This first preferred embodiment of the array concentrating solar cell of the present invention is obtained.
參閱圖2，另外，值得一提的是，亦可於該頂電極單元4形成前，先將一透明且具耐熱絕緣特性的高分子膠填滿於任兩相鄰作動膜彼此之間隙形成一支撐部5，並讓該連接件42形成於該支撐部5上，可減低該連接件42因兩相鄰作動膜32的間隙無支撐所導致的變形，而可增加該頂電極單元4的電導通特性，且該支撐部5可以減少載子於傳輸過程中發生在該等作動膜32側壁表面之復合機率，而提升光電流的輸出效率。Referring to FIG. 2, it is also worth mentioning that before the formation of the top electrode unit 4, a transparent and heat-resistant insulating polymer glue is filled in the gap between any two adjacent operating films to form a gap. The support portion 5 is formed on the support portion 5, and the deformation of the connecting member 42 due to the unsupported gap between the two adjacent operating films 32 can be reduced, and the conductance of the top electrode unit 4 can be increased. The pass characteristic, and the support portion 5 can reduce the composite probability that the carrier occurs on the side wall surfaces of the actuating films 32 during the transfer process, thereby improving the output efficiency of the photocurrent.
接著參閱圖3，本發明一種陣列集光式太陽能電池的一第二較佳實施例與該第一較佳實施例大致相同，不同處在於該載板31具有一底部312，及複數由該底部312表面彼此相間隔地向上凸伸的凸部313，該每一凸部313具有一基面314，該每一作動膜32為配合形成於該每一基面314，該頂電極單元4具有複數形成於該每一作動膜32頂面321的頂電極41，及一覆蓋於多數頂電極41且可將該等頂電極41彼此電導通的連接件42，在本例中，該連接件42是一透明導電層(Transparent conductive layer，TCL)。Referring to FIG. 3, a second preferred embodiment of an array concentrating solar cell of the present invention is substantially the same as the first preferred embodiment, except that the carrier 31 has a bottom 312 and a plurality of bottoms. a convex portion 313 having a surface which is upwardly spaced apart from each other, and each of the convex portions 313 has a base surface 314, and each of the operating films 32 is formed in a mating manner on each of the base surfaces 314, and the top electrode unit 4 has a plurality of a top electrode 41 formed on the top surface 321 of each of the operating films 32, and a connecting member 42 covering the plurality of top electrodes 41 and electrically connecting the top electrodes 41 to each other. In this example, the connecting member 42 is A transparent conductive layer (TCL).
本發明該第二較佳實施例之陣列集光式太陽能電池的製作方式，為先在一平面載板覆蓋上一層光阻，經曝光、顯影後，形成一由光阻及平面載板部分裸露的表面所形成的圖案，接著於該光阻及裸露的平面載板表面蒸鍍一層二氧化矽保護層，再將該光阻及覆蓋於該光阻上的保護層移除，讓該對應於該光阻的平面載板表面裸露出，接著再以耦合感應電漿(ICP)方式，由該裸露的平面載板表面向下蝕刻至深度不大於50μm，最後再將其餘的二氧化矽保護層自該平面載板表面去除，即可得到一具有一底部312及多數凸部313的載板31。之後再以磊晶方式於該每一凸部313的基面314形成該作動膜32，並於該底部312反向於該等凸部313的底面沉積該底電極2，接著，於該每一作動膜32頂面321形成該頂電極41，最後形成該覆蓋於該多數頂電極41的連接件42，即可製得本發明陣列集光式太陽能電池的該第二較佳實施例。The array concentrating solar cell of the second preferred embodiment of the present invention is formed by first covering a planar carrier with a layer of photoresist, and after exposure and development, forming a photoresist and a flat carrier portion are exposed. a pattern formed by the surface, and then depositing a protective layer of ruthenium dioxide on the surface of the photoresist and the exposed planar carrier, and removing the photoresist and the protective layer covering the photoresist, so that the corresponding The surface of the planar carrier of the photoresist is exposed, and then the surface of the bare planar carrier is etched down to a depth of not more than 50 μm by coupled inductive plasma (ICP), and finally the remaining cerium oxide protective layer After the surface of the planar carrier is removed, a carrier 31 having a bottom 312 and a plurality of protrusions 313 is obtained. Then, the operating film 32 is formed on the base surface 314 of each convex portion 313 by epitaxy, and the bottom electrode 2 is deposited on the bottom surface 312 opposite to the bottom surface of the convex portions 313, and then The top surface 321 of the actuating film 32 forms the top electrode 41, and finally the connecting member 42 covering the plurality of top electrodes 41 is formed, so that the second preferred embodiment of the array concentrating solar cell of the present invention can be obtained.
要特別說明的是，該等凸部313的平均高度與磊晶製程有較大的關聯，高度越高，從磊晶角度是較理想的，因為於磊晶過程中，無法避免磊晶成膜也會發生在相鄰兩凸部313間而讓兩凸部連成一體，但當該等凸部313的高度夠高時，此效應就影響不大，但高度愈高，所花的製程時間與可能產生的製程間題也會累積增多，因此，較佳地，該等凸部313的平均高度為不大於50μm，且相鄰兩凸部313的間距為不大於100μm。It should be particularly noted that the average height of the convex portions 313 is largely related to the epitaxial process, and the higher the height, the more preferable from the epitaxial angle, because the epitaxial film formation cannot be avoided during the epitaxial process. It also occurs between the adjacent two convex portions 313 to make the two convex portions integrated, but when the height of the convex portions 313 is high enough, the effect is not significant, but the height is higher, and the processing time is spent. The problem may also increase cumulatively with the process that may occur. Therefore, preferably, the convex portions 313 have an average height of not more than 50 μm, and the adjacent two convex portions 313 have a pitch of not more than 100 μm.
參閱圖4，另外，該每一凸部313也可沿該底部312之一縱向方向延伸成長條形，彼此沿該底部之一橫向方向間隔 排列，該每一作動膜32配合形成於該每一凸部313頂面314，且該頂電極41為配合形成於該等作動膜32的頂面321，另外等成長條形的凸部313也可將其一端彼此連接(圖未示)，形成一彼此連通的作動膜，以降低光電流的傳輸路徑，提升光電流的輸出效率。Referring to FIG. 4, in addition, each convex portion 313 may also extend in a longitudinal direction along one longitudinal direction of the bottom portion 312, and are spaced apart from each other in a lateral direction of one of the bottom portions. Arranging, each of the actuating films 32 is formed on the top surface 314 of each of the convex portions 313, and the top electrode 41 is formed on the top surface 321 of the movable film 32, and the convex portion 313 is also formed in a strip shape. One end of each other may be connected to each other (not shown) to form an operating film that communicates with each other to reduce the transmission path of the photocurrent and improve the output efficiency of the photocurrent.
參閱圖5，本發明一種陣列集光式太陽能電池的一第三較佳實施例，包含一底電極2、一載板31、一作動膜32，及一頂電極單元4。Referring to FIG. 5, a third preferred embodiment of an array concentrating solar cell of the present invention comprises a bottom electrode 2, a carrier 31, an operating film 32, and a top electrode unit 4.
該底電極2可選自金屬(例如：鋁、金、銀)，或是合金金屬(例如：金鍺鎳合金)，於本實施例中，底電極2為金鍺鎳合金及金為材料所構成的雙層膜。The bottom electrode 2 may be selected from a metal (for example, aluminum, gold, silver) or an alloy metal (for example, a gold-nickel alloy). In this embodiment, the bottom electrode 2 is a gold-nickel alloy and a gold material. A two-layer membrane formed.
該載板31連接於該底電極2，具有一上表面315、一相反於該上表面315並與該底電極2歐姆接觸的底面316，及複數由該上表面315向下形成的圍繞面317，該每一圍繞面317界定出一凹槽318。The carrier 31 is connected to the bottom electrode 2, and has an upper surface 315, a bottom surface 316 opposite to the upper surface 315 and in ohmic contact with the bottom electrode 2, and a plurality of surrounding surfaces 317 formed downward from the upper surface 315. Each of the surrounding faces 317 defines a recess 318.
較佳地，該等凹槽318的橫截面為實質成矩形，且長、寬均不大於50μm，該等凹槽318沿該上表面315之一縱向方向的間距，及沿該上表面315之一橫向方向的間距均不大於100μm。另外，該等凹槽318的橫截面亦可實質成圓形的態樣，徑長不大於50μm，且該等凹槽317沿該上表面315之一縱向方向的間距及沿該上表面315之一橫向方向的間距均不大於100μm。Preferably, the grooves 318 are substantially rectangular in cross section and have a length and a width of not more than 50 μm, a spacing of the grooves 318 along a longitudinal direction of the upper surface 315, and along the upper surface 315. The spacing in a lateral direction is no more than 100 μm. In addition, the cross-sections of the grooves 318 may also be substantially circular, with a diameter of no more than 50 μm, and the pitch of the grooves 317 along a longitudinal direction of the upper surface 315 and along the upper surface 315 The spacing in a lateral direction is no more than 100 μm.
該作動膜32為對應形成在該上表面315，往遠離該底電極2方向延伸且彼此相連通；藉著該載板31多數凹槽318 的形成，而讓作動膜32亦形成具有多數供光進入之間隙(即對應凹槽的區域)的態樣，而可折射導引光直接進入作動膜32中，增加作動膜32整體收光面積，而提昇收光效率。The actuating film 32 is formed correspondingly on the upper surface 315 and extends away from the bottom electrode 2 and communicates with each other; the plurality of grooves 318 are supported by the carrier 31 The formation of the actuating film 32 also forms a pattern having a plurality of gaps for the light to enter (ie, a region corresponding to the groove), and the refracting guiding light directly enters the actuating film 32 to increase the overall light-receiving area of the actuating film 32. And improve the efficiency of light collection.
該頂電極單元4設置在該作動膜32上並與該底電極2相互配合將該作動膜32轉換的電能輸出The top electrode unit 4 is disposed on the operating film 32 and cooperates with the bottom electrode 2 to output electrical energy converted by the operating film 32.
該底電極2、頂電極單元4、載板31，及該等作動膜32的材料、組成與該第二實施例大致相同於此不再多加說明。The material and composition of the bottom electrode 2, the top electrode unit 4, the carrier 31, and the actuating film 32 are substantially the same as those of the second embodiment, and will not be further described.
該陣列集光式太陽能電池的製作方式為由該載板31表面以微影蝕刻方式進行蝕刻後，即可形成該上表面315，及複數由該上表面315向下形成之由多數圍繞面317分別界定出的多數凹槽318；接著以有機金屬氣相沉積方法由該上表面315向遠離該載板31方向形成該彼此連通的作動膜32，最後於該作動膜32頂面321形成該可配合該底電極2將電能輸出的頂電極單元4，即可製得本發明陣列集光式太陽能電池的該第三較佳實施例。The array concentrating solar cell is formed by etching the surface of the carrier 31 by lithography, and the upper surface 315 is formed, and the plurality of surrounding surfaces 317 formed by the upper surface 315 are formed downward. a plurality of recesses 318 respectively defined; then, the upper surface 315 is formed in the direction away from the carrier 31 by the organometallic vapor deposition method, and finally formed on the top surface 321 of the actuating film 32. The third preferred embodiment of the array concentrating solar cell of the present invention can be obtained by cooperating with the top electrode unit 4 which outputs the electric energy to the bottom electrode 2.
綜上所述，藉由每一作動膜獨立貢獻的光電流可直接經由在頂電極彙整收集，降低光電流的傳輸路徑，因此可減少載子於傳輸過程復合的機率而可提升光電流的輸出效率；且利用呈陣列態樣設置排列的作動膜，讓光自該每一作動膜的頂面，及由任兩相鄰作動膜彼此的間隙限制而自該作動膜的側面進入該等作動膜中，而能有效的提昇該作動膜的收光效率，故確實能達成本發明之目的。In summary, the photocurrent independently contributed by each actuating film can be directly collected through the top electrode to reduce the photocurrent transmission path, thereby reducing the probability of carrier recombination in the transmission process and improving the output of the photocurrent. Efficiency; and using an actuating film arranged in an array manner, allowing light to enter the moving film from the side surface of the actuating film from the top surface of each of the actuating films and the gap between any two adjacent actuating films In addition, the light-receiving efficiency of the actuating film can be effectively improved, so that the object of the present invention can be achieved.
惟以上所述者，僅為本發明之較佳實施例而已，當不能以此限定本發明實施之範圍，即大凡依本發明申請專利範圍 及發明說明內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。However, the above is only the preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the scope of patent application according to the present invention. And the simple equivalent changes and modifications made by the description of the invention are still within the scope of the invention.
2‧‧‧底電極2‧‧‧ bottom electrode
3‧‧‧集光結構3‧‧‧Light collecting structure
31‧‧‧載板31‧‧‧ Carrier Board
311‧‧‧上表面311‧‧‧ upper surface
312‧‧‧底部312‧‧‧ bottom
313‧‧‧凸部313‧‧‧ convex
314‧‧‧基面314‧‧‧ base
315‧‧‧上表面315‧‧‧ upper surface
316‧‧‧底面316‧‧‧ bottom
317‧‧‧圍繞面317‧‧‧ Around the surface
318‧‧‧凹槽318‧‧‧ Groove
32‧‧‧作動膜32‧‧‧acting film
321‧‧‧頂面321‧‧‧ top surface
4‧‧‧頂電極單元4‧‧‧ top electrode unit
41‧‧‧頂電極41‧‧‧ top electrode
42‧‧‧連接件42‧‧‧Connecting parts
5‧‧‧支撐部5‧‧‧Support
圖1是一立體示意圖，說明本發明陣列集光式太陽能電池的第一較佳實施例；圖2是一立體示意圖，說明本發明陣列集光式太陽能電池的第一較佳實施例，於相鄰作動膜間隙形成支撐部；圖3是一立體示意圖，說明本發明陣列集光式太陽能電池的第二較佳實施例；圖4是一立體示意圖，說明該第二較佳實施例，其中，該等凸部為呈長條狀態樣；及圖5是一立體示意圖，說明本發明一種陣列集光式太陽能電池的第三較佳實施例。1 is a perspective view showing a first preferred embodiment of the array concentrating solar cell of the present invention; and FIG. 2 is a perspective view showing a first preferred embodiment of the array concentrating solar cell of the present invention. FIG. 3 is a perspective view showing a second preferred embodiment of the array concentrating solar cell of the present invention; FIG. 4 is a perspective view showing the second preferred embodiment, wherein The convex portions are in a strip shape state; and FIG. 5 is a perspective view showing a third preferred embodiment of the array light collecting solar cell of the present invention.
2‧‧‧底電極2‧‧‧ bottom electrode
3‧‧‧集光結構3‧‧‧Light collecting structure
31‧‧‧載板31‧‧‧ Carrier Board
311‧‧‧上表面311‧‧‧ upper surface
32‧‧‧作動膜32‧‧‧acting film
321‧‧‧頂面321‧‧‧ top surface
4‧‧‧頂電極單元4‧‧‧ top electrode unit
41‧‧‧頂電極41‧‧‧ top electrode
42‧‧‧連接件42‧‧‧Connecting parts
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| US5785768A (en) * | 1994-10-24 | 1998-07-28 | Nakata; Josuke | Photo cells, photo cell arrays, and electrolytic devices using these cells and arrays |
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| US5785768A (en) * | 1994-10-24 | 1998-07-28 | Nakata; Josuke | Photo cells, photo cell arrays, and electrolytic devices using these cells and arrays |
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