TWI463132B - Film defect inspecting method and apparatus - Google Patents
Film defect inspecting method and apparatus Download PDFInfo
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- TWI463132B TWI463132B TW098110357A TW98110357A TWI463132B TW I463132 B TWI463132 B TW I463132B TW 098110357 A TW098110357 A TW 098110357A TW 98110357 A TW98110357 A TW 98110357A TW I463132 B TWI463132 B TW I463132B
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本發明係關於薄膜缺陷檢查方法及裝置，尤其是關於可高精度地檢測傷痕等微細缺陷用之薄膜缺陷檢查方法及裝置，該傷痕等產生在為了製造相位差薄膜之基膜的表面(塗布側面)者。The present invention relates to a film defect inspection method and apparatus, and more particularly to a film defect inspection method and apparatus for accurately detecting fine defects such as scratches, which are generated on the surface of a base film for producing a retardation film (coated side) )By.
相位差薄膜等之光學薄膜的製造，大致可分為二大步驟，包括：製造基膜之製膜步驟；及塗布步驟，進行將配向層塗布液或液晶性塗布液塗布於所製成之基膜上等的處理。The production of an optical film such as a retardation film can be roughly divided into two steps, including: a film forming step of producing a base film; and a coating step of applying an alignment layer coating liquid or a liquid crystal coating liquid to the base formed. Membrane treatment.
即使為在製膜步驟中於基膜表面所產生之極微細的微細缺陷(例如，傷口等之凹凸缺陷)，在塗布步驟中塗布配向層塗布液或液晶性塗布液時，仍有作為塗布缺陷而被發現發現的情況。此基膜之微細缺陷所引起的塗布缺陷，成為使屬最終產品之相位差薄膜等光學薄膜之光學特性降低的致命原因。產生微細缺陷之代表例，如因在於製膜步驟輸送時之帶狀薄膜表面所附著的異物之摩擦，而在薄膜輸送方向產生V字狀傷痕之情況。Even if it is an extremely fine fine defect (for example, a concave-convex defect of a wound or the like) which is generated on the surface of the base film in the film forming step, when the alignment layer coating liquid or the liquid crystal coating liquid is applied in the coating step, it is still a coating defect. And was found to be found. The coating defect caused by the fine defects of the base film is a fatal cause for lowering the optical characteristics of an optical film such as a retardation film which is a final product. A representative example of the occurrence of fine defects is a case where a V-shaped flaw is generated in the film transport direction due to the friction of foreign matter adhering to the surface of the strip-shaped film when the film forming step is transported.
作為檢查此種薄膜表面缺陷之裝置，例如，具有專利文獻1之檢查裝置。此檢查裝置係利用CCD線型感測器接收從棒狀螢光燈照射於薄膜面的光來形成影像信號，並利用影像處理裝置來處理影像信號，藉以檢測薄膜表面之色斑或傷口等的缺陷，其中配置該棒狀螢光燈或與薄膜輸送方向正交。在專利文獻1中，作為該檢查裝置之感度上昇對策，係於薄膜背面配置暗箱。As an apparatus for inspecting the surface defects of such a film, for example, there is an inspection apparatus of Patent Document 1. The inspection device uses a CCD line sensor to receive light from a rod-shaped fluorescent lamp on a film surface to form an image signal, and uses an image processing device to process the image signal, thereby detecting defects such as spots or wounds on the surface of the film. The rod-shaped fluorescent lamp is disposed or orthogonal to the film transport direction. In Patent Document 1, a measure for increasing the sensitivity of the inspection device is to arrange a black box on the back surface of the film.
[專利文獻1]日本特開2003-139524號公報。[Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-139524.
然而，專利文獻1之檢查裝置，具有無法高感度地檢測深度為0.1μm以下之微細缺陷的問題。在相位差薄膜等之光學薄膜的製造中成為問題的微細缺陷，係寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之傷痕，因此需要高精度地檢查此種極微細之傷痕。However, the inspection apparatus of Patent Document 1 has a problem that it is impossible to detect fine defects having a depth of 0.1 μm or less with high sensitivity. A fine defect that is a problem in the production of an optical film such as a retardation film is an extremely fine flaw having a width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm. Therefore, it is necessary to inspect such a high-precision. Very fine scars.
作為用以提高微細缺陷之檢測感度的對策之一，可考慮藉由將輸送來之帶狀薄膜捲繞於輥子上，在矯正了阻礙微細缺陷之檢測的薄膜皺紋或縱皺紋的狀態下進行檢查。但是，當將薄膜捲繞於輥子上時，因輥子周面之彎曲性而使得受光機與薄膜之檢查區域面的距離無法成為恆定，所以會脫離景深範圍，影像反而因為模糊而造成感度降低。As one of the measures for improving the detection sensitivity of the fine defects, it is conceivable to perform inspection by winding the conveyed strip-shaped film on the roller and correcting the wrinkles or wrinkles of the film which prevent the detection of the fine defects. . However, when the film is wound around the roller, the distance between the surface of the inspection area of the light receiver and the film cannot be made constant due to the flexibility of the circumferential surface of the roller, so that the depth of field is deviated, and the image is reduced in sensitivity due to blurring.
因此，輸送來之薄膜的檢查區域面，係浮於容易將景深保持恆定之空中的狀態，而且需要能保持無皺紋或縱皺紋的平面性。Therefore, the inspection area of the film to be conveyed is in a state in which it is easy to keep the depth of field constant, and it is required to maintain the flatness of wrinkles-free or longitudinal wrinkles.
本發明係鑒於此種情況而提出者，其目的在於提供一種薄膜缺陷檢查方法及裝置，就連產生於薄膜表面之微細缺陷，亦可予以高感度地檢測，所以適合於作為製造相位差薄膜等之光學薄膜用的基膜之微細缺陷檢查。The present invention has been made in view of such circumstances, and an object of the present invention is to provide a film defect inspection method and apparatus which can be detected with high sensitivity even in the case of fine defects generated on the surface of a film, and is therefore suitable for use as a retardation film. The fine defect inspection of the base film for the optical film.
為了達成上述目的，本發明之申請專利範圍第1項提供一種薄膜缺陷檢查方法，係利用受光機檢測在薄膜表面反射之反射散亂光，並根據檢測結果來檢查該薄膜表面之微細缺陷，其中該反射散亂光係從投光機照射至薄膜表面的檢查光在薄膜表面反射所產生者，該薄膜缺陷檢查方法之特徵為：一面將該薄膜朝其長度及寬度方向拉伸，保持薄膜之平面性，一面在將該投光機配置為與該微細缺陷之產生方向大致平行的狀態下，將該檢查光照射於該薄膜表面，同時在將該受光機配置為與該微細缺陷之產生方向大致平行的狀態下，接收該反射散亂光。In order to achieve the above object, the first aspect of the present invention provides a film defect inspection method for detecting reflected scattered light reflected on a surface of a film by a light receiver, and inspecting a fine defect of the surface of the film according to the detection result, wherein The reflected scattered light is generated by reflecting light from the projector to the surface of the film, and the film defect inspection method is characterized in that the film is stretched toward the length and the width thereof to maintain the film. In a state where the light projector is disposed substantially parallel to the direction in which the fine defects are generated, the inspection light is irradiated onto the surface of the film, and the light receiver is disposed in a direction in which the fine defects are generated. The reflected scattered light is received in a substantially parallel state.
在此，「與微細缺陷之產生方向大致平行」，係表示相對與微細缺陷完全平行之配置，落在±15°以內為較佳，尤以±10°以內為特佳。Here, "the direction substantially parallel to the direction in which the fine defects are generated" indicates that the arrangement is completely parallel to the fine defects, and it is preferable to fall within ±15°, particularly preferably within ±10°.
根據本發明之第一特徵，從與微細缺陷之產生方向大致平行地配置之投光機照射檢查光於薄膜表面，並在與微細缺陷之產生方向大致平行地配置受光機的狀態下，接收由薄膜面所反射之反射散亂光。藉此，可從與形成於薄膜表面之微細缺陷(例如V字狀的傷口面)大致垂直的方向照射檢查光。因此，比起從與微細缺陷之產生方向正交配置的投光機照射檢查光於薄膜表面，可增大反射散亂光之強度。同樣，利用與微細缺陷之產生方向大致平行地配置受光機，可增大反射散亂光之受光量。作為受光機可適用CCD線型感測器，多數之受光元件被配列為與微細缺陷之產生方向大致平行。According to the first aspect of the present invention, the light projector that is disposed substantially parallel to the direction in which the fine defects are generated is irradiated with the inspection light on the surface of the film, and is placed in a state where the light receiver is disposed substantially in parallel with the direction in which the fine defects are generated. The reflection reflected by the film surface scatters light. Thereby, the inspection light can be irradiated from a direction substantially perpendicular to a fine defect (for example, a V-shaped wound surface) formed on the surface of the film. Therefore, the intensity of the reflected scattered light can be increased by irradiating the inspection light onto the surface of the film from a light projector disposed orthogonally to the direction in which the fine defects are generated. Similarly, by arranging the light receiver substantially in parallel with the direction in which the fine defects are generated, the amount of light received by the scattered scattered light can be increased. A CCD line type sensor is applicable as the light receiver, and most of the light receiving elements are arranged to be substantially parallel to the direction in which the fine defects are generated.
又，在本發明之第2特徵中，一面將薄膜朝其長度及寬度方向拉伸以保持薄膜之平面性，一面進行檢查，所以可在薄膜之檢查面浮於空中的狀態，且在無薄膜之皺紋或縱皺紋的狀態下進行檢查。藉此，不用如習知般為了矯正薄膜之皺紋或縱皺紋而捲繞於輥上，所以亦可解決受光機與薄膜檢查區域面之距離變得不再恆定的問題。Further, in the second aspect of the present invention, the film is stretched in the longitudinal direction and the width direction to maintain the planarity of the film, and the film can be inspected on the inspection surface of the film, and the film can be floated in the air. Check in the state of wrinkles or longitudinal wrinkles. Therefore, it is not necessary to wrap the wrinkles or the longitudinal wrinkles of the film on the roll as is conventionally known, so that the problem that the distance between the photoreceiver and the film inspection region surface becomes no longer constant can be solved.
藉由此等2個特徵，即使為形成於薄膜面寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之缺陷，仍可獲得可檢測之檢測感度。By such two characteristics, a detectable detection sensitivity can be obtained even if it is formed on a very fine defect having a film surface width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm.
申請專利範圍第2項係在申請專利範圍第1項中，其特徵為：該薄膜係作為連續輸送之帶狀薄膜而被製造者，該微細缺陷之產生方向係薄膜輸送方向。The second aspect of the patent application is in the first item of the patent application, characterized in that the film is produced as a strip film which is continuously conveyed, and the direction in which the fine defects are generated is the film conveying direction.
申請專利範圍第2項之特徵為：在薄膜係製造成不是單片狀，而是被連續輸送之帶狀的情況，於薄膜輸送方向形成微細傷痕，所以，與微細缺陷之產生方向大致平行地配置投光機及受光機，在提昇檢測感度上變得越來越重要。The second aspect of the patent application is characterized in that, in the case where the film is produced in a strip shape which is not a single sheet but is continuously conveyed, fine flaws are formed in the film transport direction, and therefore, the direction of generation of the fine defects is substantially parallel. The configuration of the light projector and the light receiver is becoming more and more important in improving the detection sensitivity.
申請專利範圍第3項係在申請專利範圍第1或2項中，其特徵為：該薄膜表面之微細缺陷係寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的傷痕。The third aspect of the patent application is in the first or second aspect of the patent application, characterized in that the fine defect on the surface of the film is a flaw having a width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm.
申請專利範圍第3項係用以規定被要求高精度地檢測的微細缺陷之具體大小者，例如，在如相位差薄膜之光學薄膜的製造中，此程度之極微細的缺陷，係致使光學薄膜之光學特性降低的致命缺陷。The third item of the patent application scope is for specifying the specific size of the fine defects required to be detected with high precision, for example, in the manufacture of an optical film such as a retardation film, the extremely fine defect of this degree causes the optical film A fatal flaw in the reduction of optical properties.
申請專利範圍第4項係在申請專利範圍第1至3項之任一項中，其特徵為：該薄膜係製造相位差薄膜用之基膜。The fourth aspect of the patent application is in any one of claims 1 to 3, characterized in that the film is a base film for producing a retardation film.
申請專利範圍第4項係用以規定本發明尤其是發揮效果之薄膜的用途者，如相位差薄膜，在即使為微細缺陷，仍成為光學特性降低之致命性缺陷的情況，本發明尤其發揮效果。The fourth aspect of the patent application is for the purpose of specifying the film of the present invention, particularly a film having an effect, such as a retardation film, which is a fatal defect in which optical characteristics are reduced even in the case of fine defects, and the present invention particularly exerts an effect. .
為了達成上述目的，本發明之申請專利範圍第5項提供一種薄膜缺陷檢查裝置，係用以檢測在薄膜表面反射之反射散亂光，並根據檢測結果來檢查該薄膜表面之微細缺陷，其中該反射散亂光係被照射至薄膜表面的檢查光在薄膜表面反射所產生者，該薄膜缺陷檢查裝置之特徵為具備：投光機，其被配置為與該微細缺陷之產生方向大致平行，且將該檢查光照射於該薄膜表面；受光機，其被配置為與該微細缺陷之產生方向大致平行，且用以檢測該反射散亂光；及拉伸機構，其將該薄膜朝其長度及寬度方向拉伸，藉以保持薄膜之平面性。In order to achieve the above object, the fifth aspect of the present invention provides a film defect inspection device for detecting reflected scattered light reflected on a surface of a film, and inspecting a fine defect of the surface of the film according to the detection result, wherein The reflected scattered light is generated by reflecting the inspection light on the surface of the film, and the thin film defect inspection device is characterized by comprising: a light projector configured to be substantially parallel to a direction in which the fine defect is generated, and Illuminating the surface of the film with the inspection light; the light receiving device is disposed substantially parallel to the direction in which the fine defect is generated, and is configured to detect the reflected scattered light; and a stretching mechanism that faces the film toward the length thereof Stretching in the width direction to maintain the planarity of the film.
申請專利範圍第5項係將本發明作為裝置構成者，其配置與微細缺陷之產生方向大致平行之投光機及受光機，且在藉由拉伸機構將該薄膜朝其長度及寬度方向拉伸，藉以保持薄膜之平面性的狀態下進行檢查，所以，即使為形成於薄膜面寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之缺陷，仍可獲得可檢測之檢測感度。In the fifth aspect of the patent application, the present invention is a device constituting a light projector and a light receiver which are substantially parallel to the direction in which the fine defects are generated, and the film is pulled toward the length and the width thereof by a stretching mechanism. Since the film is inspected while maintaining the planarity of the film, even if it is formed on a film having a width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm, it can be obtained. The detection sensitivity of the test.
申請專利範圍第6項係在申請專利範圍第5項中，其特徵為：該薄膜係被連續輸送之帶狀薄膜，且在薄膜生產線上連線(on-line)檢查薄膜表面之微細缺陷，同時該投光機及該受光機被配置為與薄膜輸送方向大致平行。Article 6 of the scope of the patent application is in the fifth item of the patent application, characterized in that the film is a strip film continuously conveyed, and on the film production line, the fine defects on the surface of the film are inspected on-line. At the same time, the light projector and the light receiver are arranged to be substantially parallel to the film transport direction.
申請專利範圍第6項之特徵為：在薄膜係製造成不是單片狀，而是形成被連續輸送之帶狀薄膜的情況，於薄膜輸送方向微細傷痕，所以，與微細缺陷之產生方向大致平行地配置投光機及受光機之作業，在提昇檢測感度上變得越來越重要。在依此被輸送之生產線上進行連線檢查的情況，帶狀薄膜之長度方向因輸送而被拉伸，容易產生皺紋或縱皺紋，所以，作為拉伸機構需要朝薄膜之寬度方向拉伸以矯正皺紋或縱皺紋，從而保持平面性。The sixth aspect of the patent application is characterized in that the film is formed into a strip-shaped film that is continuously conveyed instead of a single sheet, and is finely wound in the film transport direction, so that it is substantially parallel to the direction in which the fine defects are generated. The operation of the light projector and the light receiver is becoming more and more important in improving the detection sensitivity. In the case where the connection inspection is performed on the production line thus conveyed, the longitudinal direction of the strip-shaped film is stretched by transportation, and wrinkles or longitudinal wrinkles are likely to occur. Therefore, it is necessary to stretch the film in the width direction of the film as a stretching mechanism. Correct wrinkles or longitudinal wrinkles to maintain flatness.
申請專利範圍第7項係在申請專利範圍第5或6項中，其特徵為：設置橫移裝置，其搭載該投光機及該受光機而於該薄膜之寬度方向移動。Patent Document No. 7 is the fifth or sixth aspect of the patent application, characterized in that a traverse device is provided which is mounted in the width direction of the film by the light projector and the light receiver.
這是因為在配置投光機及受光機與微細缺陷之產生方向大致平行的本發明中，為了檢查連續輸送薄膜時之薄膜的全寬，設置搭載投光機及受光機而一體朝薄膜之寬度方向移動的橫移裝置，對提昇感度而言特佳。This is because in the present invention in which the light projector and the light receiver are arranged substantially parallel to the direction in which the fine defects are generated, in order to inspect the full width of the film when the film is continuously conveyed, a light projector and a light receiver are mounted to integrally extend toward the width of the film. The traverse device that moves in the direction is particularly good for lifting sensitivity.
申請專利範圍第8項係在申請專利範圍第5至7項之任一項中，其特徵為：在該受光機之該薄膜背面側設置透過光反射防止手段，藉以防止透過該薄膜之檢查光的反射。In the eighth aspect of the invention, in the eighth aspect of the invention, the light-reflecting prevention means is disposed on the back side of the film of the light-receiving machine to prevent the inspection light from passing through the film. Reflection.
如申請專利範圍第8項，由於在受光機之薄膜背面側設置透過光反射防止手段，藉以防止透過薄膜之檢查光的反射，所以可抑制薄膜背面之外亂光被受光機接收的情況。因此，利用在上述本發明之特徵加上申請專利範圍第8項的特徵，可進一步提高檢測感度。According to the eighth aspect of the patent application, since the transmitted light reflection preventing means is provided on the back side of the film of the light receiver, the reflection of the inspection light transmitted through the film is prevented, so that it is possible to suppress the light from being received by the light receiver outside the back surface of the film. Therefore, the detection sensitivity can be further improved by using the features of the above-described invention and the feature of the eighth aspect of the patent application.
申請專利範圍第9項係在申請專利範圍第5至8項之任一項中，其特徵為：在設該受光機之光軸與該投光機之正反射光所構成之夾角為θ時，以滿足-20°≦θ≦+20°(除0°以外)的方式配置該投光機及該受光機。The ninth application of the patent application is in any one of items 5 to 8 of the patent application, characterized in that: when the angle between the optical axis of the light receiver and the specular reflection light of the projector is θ The light projector and the light receiver are arranged to satisfy -20 ° ≦ θ ≦ + 20 ° (other than 0 °).
這是因為，微細缺陷所反射之反射散亂光的強度分布中可知，角度越是接近正反射光，越可增加光量，所以，利用以滿足-20°≦θ≦+20°(除0°以外)的方式配置投光機及受光機，可進一步提高微細缺陷之檢測感度。更以角度θ為-10°≦θ≦+10°(除0°以外)為較佳。在此，除角度θ為0°以外，意指去除正反射光直接射入受光機的情況。This is because, in the intensity distribution of the reflected scattered light reflected by the fine defects, the closer the angle is to the specular reflected light, the more the amount of light can be increased. Therefore, it is used to satisfy -20 ° ≦ θ ≦ + 20 ° (except 0 °). In addition to the configuration of the light projector and the light receiver, the detection sensitivity of the fine defects can be further improved. More preferably, the angle θ is -10 ° ≦ θ ≦ + 10 ° (other than 0 °). Here, the case where the angle θ is 0° means that the regular reflection light is directly incident on the light receiver.
申請專利範圍第10項係在申請專利範圍第5至9項之任一項中，其特徵為：該受光機被配置為與該薄膜面正對，且在該受光機之左右兩側配置有2台投光機。The application of claim 10 is in any one of the items 5 to 9 of the patent application, characterized in that the light receiver is disposed opposite to the film surface, and is disposed on the left and right sides of the light receiver 2 projectors.
根據申請專利範圍第10項，由於利用從配置於與薄膜面正對之受光機之左右兩側的2台投光機，照射與微細缺陷之產生方向大致平行的檢查光，因此與微細缺陷之左右形狀的差異無關，而可進行穩定之高感度的檢測。According to the tenth item of the patent application, since the inspection light which is substantially parallel to the direction in which the fine defects are generated is irradiated by two light projectors disposed on the left and right sides of the light receiver facing the film surface, the fine defects are The difference between the left and right shapes is irrelevant, and stable high sensitivity detection can be performed.
申請專利範圍第11項係在申請專利範圍第5至10項之任一項中，其特徵為：該投光機在該薄膜面之照度為30萬Lx以上。The eleventh aspect of the patent application is in any one of items 5 to 10 of the patent application, characterized in that the illuminance of the light projector on the film surface is 300,000 Lx or more.
為了高感度地檢測作為檢查對象寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之缺陷，該薄膜面之照度較佳為30萬Lx以上。In order to detect extremely fine defects having a width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm as high-sensitivity, the illuminance of the film surface is preferably 300,000 Lx or more.
另外，為了高感度地檢測作為檢查對象寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之缺陷，以附加如下之構成為較佳。即，係在受光機與薄膜面之間具備偏光板，而接收僅在反射散亂光之一方向上振動的光的構成。在此情況時，因受光機之受光量降低，所以與投光機之照度的關係變得重要。In addition, in order to detect extremely fine defects having a width of 5 to 30 μm, a length of 30 to 250 μm, and a depth of 0.04 to 0.1 μm as high-sensitivity, it is preferable to add the following configuration. In other words, a polarizing plate is provided between the light receiver and the film surface, and a light that vibrates only in one direction of the scattered scattered light is received. In this case, since the amount of light received by the light receiver is lowered, the relationship with the illuminance of the projector is important.
另外，在投光機或受光機與薄膜面之間設置截波濾波器，並使用檢查光為400nm以下之短波長光。這是因為作為檢查對象之微細缺陷的深度比可視光之波長還小，所以長波長之光對於散亂光派不上用場的緣故。利用選擇性地使用短波長之檢查光，可高感度地檢測微細缺陷。例如，利用使用紫外線作為檢查光，即使是數nm深度之微細缺陷，仍可以高感度進行檢測。Further, a cut filter is provided between the light projector or the light receiver and the film surface, and short-wavelength light having an inspection light of 400 nm or less is used. This is because the depth of the fine defect to be inspected is smaller than the wavelength of the visible light, so that the long-wavelength light does not come into use for the scattered light. By selectively using the inspection light of a short wavelength, fine defects can be detected with high sensitivity. For example, by using ultraviolet rays as the inspection light, even a fine defect having a depth of several nm can be detected with high sensitivity.
根據本發明，就連產生於薄膜表面之微細缺陷，亦可予以高感度地檢測。因此，提供一種薄膜缺陷檢查方法及裝置，其適合於製造相位差薄膜等之光學薄膜用的基膜之微細缺陷之檢查。According to the present invention, even fine defects generated on the surface of the film can be detected with high sensitivity. Accordingly, there is provided a film defect inspection method and apparatus which are suitable for inspection of fine defects of a base film for an optical film such as a retardation film.
以下，參照圖式詳細說明本發明之薄膜缺陷檢查方法及裝置的較佳實施形態。Hereinafter, preferred embodiments of the film defect inspection method and apparatus of the present invention will be described in detail with reference to the drawings.
第1圖為顯示本發明之薄膜缺陷檢查裝置10的一例之概念圖，第1(A)圖為顯示薄膜缺陷檢查裝置10整體之概念圖，第1(B)圖為檢查V字狀微細傷痕14時的局部放大圖。Fig. 1 is a conceptual view showing an example of the film defect inspection device 10 of the present invention. Fig. 1(A) is a conceptual view showing the entire film defect inspection device 10, and Fig. 1(B) is a view showing a V-shaped fine flaw. Partial enlarged view at 14:00.
如第1(A)圖所示，帶狀之透明薄膜12在朝箭頭F方向輸送，並在2根運送輥16,18之間以浮於空中之狀態進行檢查。2根運送輥16,18之間隔(從輥面至輥面)較佳為150～200mm。As shown in Fig. 1(A), the strip-shaped transparent film 12 is conveyed in the direction of the arrow F, and is inspected in a state of being floated in the air between the two transport rollers 16, 18. The interval between the two transport rollers 16, 18 (from the roll surface to the roll surface) is preferably 150 to 200 mm.
薄膜缺陷檢查裝置10組裝於製造透明薄膜12之製造線，或是，亦可被設置作為以離線(off-line)方式檢查在製造線所製造之透明薄膜12的專用裝置。在被設置作為專用裝置的情況，在運送輥16之上游側設置輸送捲繞成輥狀之透明薄膜12的輸送機(未圖示)，並在運送輥18之下游側設置捲繞機(未圖示)，利用捲繞進行透明薄膜12之輸送。The film defect inspection device 10 is assembled in a manufacturing line for manufacturing the transparent film 12, or may be provided as a dedicated device for inspecting the transparent film 12 manufactured in the manufacturing line in an off-line manner. In the case of being provided as a dedicated device, a conveyor (not shown) that conveys the transparent film 12 wound in a roll shape is provided on the upstream side of the conveyance roller 16, and a winder is disposed on the downstream side of the conveyance roller 18 (not shown) As shown in the figure, the conveyance of the transparent film 12 is performed by winding.
在任一情況，透明薄膜12係利用將熔融狀態之樹脂從鑄模(未圖示)呈薄膜狀地延流於冷卻筒(未圖示)而進行成形之方法(熔融製膜法)、或是將屬樹脂溶解於溶劑中之摻雜劑從鑄模呈薄膜狀地延流於冷卻筒而進行成形之方法(溶液製膜法)所製造。因此，容易在延流方向、即透明薄膜12之輸送方向形成微細傷痕14。另外，在將透明薄膜12用作為製造相位差薄膜等之光學薄膜用的基膜的情況，微細傷痕14之大小，即使為寬度為5～30μm、長度為30～250μm、深度為0.04～0.1μm的極微細之傷痕，仍會成為問題。In either case, the transparent film 12 is formed by a method of forming a molten resin from a mold (not shown) in a film form to a cooling cylinder (not shown) (melt film forming method), or A dopant in which a resin is dissolved in a solvent is produced by a method in which a mold is formed into a film shape and is formed by a cooling cylinder and formed by a solution (solution film forming method). Therefore, it is easy to form fine flaws 14 in the direction of the flow direction, that is, the direction in which the transparent film 12 is transported. In addition, when the transparent film 12 is used as a base film for producing an optical film such as a retardation film, the size of the fine flaw 14 is 5 to 30 μm in width, 30 to 250 μm in length, and 0.04 to 0.1 μm in depth. The tiny flaws will still be a problem.
薄膜缺陷檢查裝置10主要包含：投光機22，其被配置為與微細傷痕14之產生方向大致平行，且將檢查光20照射於透明薄膜12表面；受光機24，其被配置為與微細傷痕14之產生方向大致平行，且用以檢測由薄膜表面所反射之反射散亂光；及拉伸機構26，其將透明薄膜12朝其長度及寬度方向拉伸，藉以保持透明薄膜12之檢查區域面的平面性。投光機22及受光機24係配置於透明薄膜12之產生微細傷痕14的薄膜表面之上方位置，並且受光機24係配置於投光機22之正反射光直接射入不會直接射入的位置。The film defect inspection apparatus 10 mainly includes a light projector 22 that is disposed substantially parallel to the direction in which the fine flaws 14 are generated, and irradiates the inspection light 20 to the surface of the transparent film 12; the light receiver 24 is configured to be inferior to the fine flaws The direction of generation 14 is substantially parallel and is used to detect reflected scattered light reflected by the surface of the film; and the stretching mechanism 26 stretches the transparent film 12 toward its length and width to maintain the inspection area of the transparent film 12. The planarity of the surface. The light projector 22 and the light receiver 24 are disposed above the surface of the film of the transparent film 12 where the fine flaws 14 are generated, and the light-receiving machine 24 is disposed directly on the light projector 22 and the direct reflection light is directly incident. position.
投光機22係以被配置為可與微細傷痕14之產生方向大致平行的棒狀者為較佳。在此，「與微細傷痕14之產生方向大致平行」係指在設與微細傷痕14之產生方向完全平行的配置為0度時，以落在±15°以內為較佳，且以落在±10°以內為更佳。藉此，如第1(B)圖所示，因可從與形成於透明薄膜12表面之V字狀的微細傷痕14之傷面14A大致垂直的方向側面照射檢查光20，所以，藉由從與微細傷痕14之產生方向正交的方向照射檢查光，可增大反射散亂光之強度。The light projector 22 is preferably a rod arranged to be substantially parallel to the direction in which the fine flaws 14 are generated. Here, "the direction substantially parallel to the direction in which the fine flaws 14 are generated" means that it is preferable to fall within ±15° when the arrangement is completely parallel to the direction in which the fine flaws 14 are generated, and it is preferable to fall within ±15°. Within 10 ° is better. Therefore, as shown in FIG. 1(B), since the inspection light 20 can be irradiated from the side surface substantially perpendicular to the wound surface 14A of the V-shaped fine flaw 14 formed on the surface of the transparent film 12, Irradiation of the inspection light in a direction orthogonal to the direction in which the fine flaws 14 are generated increases the intensity of the reflected scattered light.
雖可使用螢光燈作為投光機22，但因是微細傷痕14且傷痕之深度極淺(例如，0.1μm以下)，所以，以可照射短波長之檢查光20者為較佳，較佳可使用紫外線照射裝置。藉此，為了從通常之螢光燈僅取出為短波長之檢查光，亦較佳在投光機22與透明薄膜12之間設置截波濾波器(未圖示)。Although a fluorescent lamp can be used as the light projector 22, since the fine flaw 14 is fine and the depth of the flaw is extremely shallow (for example, 0.1 μm or less), it is preferable to irradiate the inspection light 20 of a short wavelength. An ultraviolet irradiation device can be used. Therefore, in order to extract only the inspection light of a short wavelength from a normal fluorescent lamp, a cut filter (not shown) is preferably provided between the light projector 22 and the transparent film 12.
另外，亦以在投光機22或受光機24與透明薄膜12面之間設置偏光板(未圖示)，而使用於一定方向進行振動之檢查光20為較佳。Further, a polarizing plate (not shown) is provided between the light projector 22 or the light receiver 24 and the surface of the transparent film 12, and the inspection light 20 for vibrating in a certain direction is preferable.
投光機22之照度係以在透明薄膜12面之照度為30萬Lx以上為較佳。The illuminance of the projector 22 is preferably such that the illuminance on the surface of the transparent film 12 is 300,000 Lx or more.
受光機24可適合使用CCD線型感測器，並將CCD線型感測器之多個受光元件配置為與微細傷痕14之產生方向大致平行。如此，利用將受光機24配置為與微細傷痕14之產生方向大致平行，可增大反射散亂光之受光量。在此，「大致平行」與在投光機22之說明相同。The light receiver 24 can be suitably used with a CCD line type sensor, and the plurality of light receiving elements of the CCD line type sensor are disposed substantially parallel to the direction in which the fine flaws 14 are generated. In this manner, by arranging the light receiver 24 so as to be substantially parallel to the direction in which the fine flaws 14 are generated, the amount of light received by the scattered scattered light can be increased. Here, "substantially parallel" is the same as that described for the light projector 22.
CCD線型感測器雖可為一個，但以串聯排列複數個為較佳。第1(A)圖中，雖顯示了串列2個CCD線型感測器之情況，但亦可為3個以上。Although the CCD line type sensor can be one, it is preferable to arrange a plurality of them in series. In the first (A) diagram, although two CCD line sensors are arranged in series, they may be three or more.
投光機22與受光機24係被搭載於未圖示之橫移裝置上，並朝第1(A)圖之A-B方向移動。藉此，可於透明薄膜12之全寬進行檢查。又，亦可藉由橫跨於透明薄膜12之全寬且並列配置複數個受光機24，而省略橫移裝置。The light projector 22 and the light receiver 24 are mounted on a traverse device (not shown), and are moved in the A-B direction of the first (A) diagram. Thereby, the inspection can be performed on the full width of the transparent film 12. Further, the traverse device may be omitted by arranging a plurality of light receivers 24 in parallel across the entire width of the transparent film 12.
由受光機24所接收之反射散亂光被轉換為電信號後輸入影像處理裝置28，根據藉由影像處理裝置28所形成之透明薄膜12的影像(例如，起因於微細傷痕14之影像的濃淡)，檢查微細傷痕14之有無。The reflected scattered light received by the light receiver 24 is converted into an electrical signal and input to the image processing device 28, based on the image of the transparent film 12 formed by the image processing device 28 (for example, the shading of the image resulting from the fine flaw 14) ), check for the presence or absence of fine flaws 14.
第2圖為顯示投光機22與受光機24之配置關係的示意圖。Fig. 2 is a schematic view showing the arrangement relationship between the light projector 22 and the light receiver 24.
如第2圖所示，在設受光機24之光軸30與投光機22之正反射光a所構成之夾角為θ時，以滿足-20°≦θ≦+20°(除0°以外)的方式配置投光機22及受光機24為較佳。藉此，可提高檢測感度。這是因為在微細傷痕14所反射之反射散亂光的強度分布中，角度θ越是接近正反射光，越可增加光量，而可更進一步地提高微細傷痕14之檢測感度。又。以角度θ為-10°≦θ≦+10°(除0°以外)為較佳。As shown in Fig. 2, when the angle between the optical axis 30 of the light receiver 24 and the specular reflection light a of the light projector 22 is θ, it is -20 ° ≦ θ ≦ + 20 ° (except 0 °). The light projector 22 and the light receiver 24 are preferably arranged. Thereby, the detection sensitivity can be improved. This is because, in the intensity distribution of the reflected scattered light reflected by the minute flaws 14, the closer the angle θ is to the regular reflection light, the more the amount of light can be increased, and the detection sensitivity of the fine flaws 14 can be further improved. also. It is preferred that the angle θ is -10 ° ≦ θ ≦ + 10 ° (other than 0 °).
當以使受光機24與透明薄膜12面正對之第3圖的例子來說明此反射散亂光的強度分布時，第3(A)圖為滿足角度θ為-20°≦θ≦+20°(除0°以外)的情況，第3(B)圖為不滿足之情況。另外，箭頭a為正反射光，箭頭b為反射於受光機24之光軸方向的反射散亂光，箭頭c為其他之反射散亂光，較長之箭頭表示反射散亂光的強度強。When the intensity distribution of the reflected scattered light is explained by the example of Fig. 3 in which the light receiver 24 and the transparent film 12 face each other, the third (A) diagram satisfies the angle θ of -20 ° ≦ θ ≦ + 20 In the case of ° (other than 0°), the 3(B) diagram is not satisfied. Further, the arrow a is a regular reflection light, the arrow b is a reflection scattered light reflected in the optical axis direction of the light receiver 24, the arrow c is another reflection scattered light, and the longer arrow indicates the intensity of the reflected scattered light.
從第3(A)圖及第3(B)圖之對比可知，受光機24之光軸30與正反射光a之夾角θ越小，則被反射於受光機24之光軸30方向的反射散亂光b的長度越長，且強度越強。As can be seen from the comparison between the third (A) and third (B) diagrams, the smaller the angle θ between the optical axis 30 of the light receiver 24 and the specular reflected light a, the reflection reflected in the direction of the optical axis 30 of the light receiver 24. The longer the length of the scattered light b, the stronger the intensity.
另外，如第4圖所示，以受光機24被配置為與透明薄膜12面正對，且在受光機24之左右兩側配置有2台投光機22為較佳。這是因為利用從與透明薄膜12面正對之受光機24之左右兩側配置的2台投光機22，照射與微細傷痕14之產生方向大致平行的檢查光20，則可在與微細傷痕14之左右形狀(參照第1(B)圖)的差異無關下，進行穩定之高感度的檢測。Further, as shown in Fig. 4, it is preferable that the light receiver 24 is disposed so as to face the transparent film 12, and two light projectors 22 are disposed on the left and right sides of the light receiver 24. This is because the inspection light 20 that is substantially parallel to the direction in which the fine flaws 14 are generated is irradiated by the two light projectors 22 disposed on the left and right sides of the light receiver 24 facing the transparent film 12, and the scratches 20 can be scratched. Regardless of the difference between the shape of the left and right 14 (see Fig. 1(B)), stable high sensitivity detection is performed.
第5圖為拉伸機構26之一例，透明薄膜12之長度方向(輸送方向)係藉由薄膜輸送而被賦以張力，所以，其是用以拉伸薄膜寬度方向的拉伸機構26。Fig. 5 is an example of the stretching mechanism 26. The longitudinal direction (conveying direction) of the transparent film 12 is imparted with tension by film transport, and therefore, it is a stretching mechanism 26 for stretching the width direction of the film.
如第5圖所示，拉伸機構26主要由一對之挾持裝置32及張力裝置34所構成，挾持裝置32係用以夾入透明薄膜12之寬度方向兩端部；張力裝置34係支撐一對挾持裝置32且以相互分離之方式進行移動，從而對透明薄膜12賦予寬度方向之張力。As shown in Fig. 5, the stretching mechanism 26 is mainly composed of a pair of holding devices 32 and a tensioning device 34 for sandwiching both end portions in the width direction of the transparent film 12; the tension device 34 is for supporting one. The holding device 32 is moved and separated from each other to impart tension in the width direction to the transparent film 12.
為了一面輸送透明薄膜12一面使拉伸機構26動作，需要使張力裝置34與透明薄膜12之輸送一起移動，在此適合採用第6圖使薄膜橫向延伸之拉幅裝置的移動機構36。亦即，如第6圖所示，設置複數個夾入透明薄膜12之寬度方向兩端部的挾持裝置32，並透過張力裝置34(第6圖中被省略)支撐於無接縫鏈條42上，該無接縫鏈條42係繞掛在配置於二根輥16,18間之一對皮帶輪38,40上。並將無接縫鏈條42之旋轉移動與透明薄膜12之輸送的速度設為相同。另外，挾持裝置32係在輥16之位置挾持透明薄膜12，並在輥18之位置解除此挾持。藉此，可使挾持裝置32與透明薄膜12之輸送一起移動。第6圖中，僅在透明薄膜12之寬度方向一方側圖示移動機構36，而省略了另一側。In order to move the stretching mechanism 26 while conveying the transparent film 12, it is necessary to move the tension device 34 together with the conveyance of the transparent film 12. Here, the moving mechanism 36 of the tenter device which laterally extends the film in Fig. 6 is suitably employed. That is, as shown in Fig. 6, a plurality of holding means 32 sandwiching both end portions in the width direction of the transparent film 12 are provided, and are supported by the tension member 34 (omitted in Fig. 6) on the seamless chain 42 The seamless chain 42 is wound around a pair of pulleys 38, 40 disposed between the two rollers 16, 18. The rotation speed of the seamless chain 42 and the conveying speed of the transparent film 12 are set to be the same. Further, the holding device 32 holds the transparent film 12 at the position of the roller 16, and releases the holding at the position of the roller 18. Thereby, the holding device 32 can be moved together with the conveyance of the transparent film 12. In Fig. 6, the moving mechanism 36 is shown only on one side in the width direction of the transparent film 12, and the other side is omitted.
另外，在將薄膜缺陷檢查裝置10設為上述專用裝置之情況，可於檢查中停止薄膜輸送，所以，在此情況時無需設置移動機構36。藉此，如第1圖所示，只要於薄膜寬度方向對向地設置一對挾持裝置32，並由各個張力裝置34進行拉伸即可，其中該挾持裝置32可於透明薄膜12之長度方向且以長尺寸進行挾持。Further, when the film defect inspection device 10 is used as the dedicated device, the film conveyance can be stopped during the inspection. Therefore, in this case, it is not necessary to provide the moving mechanism 36. Therefore, as shown in Fig. 1, a pair of holding devices 32 are provided opposite to each other in the film width direction, and stretching is performed by the respective tensioning devices 34, wherein the holding device 32 can be in the longitudinal direction of the transparent film 12. And hold it in a long size.
藉由設置此拉伸機構26，可一面將透明薄膜12朝其長度(輸送張力)及寬度方向(拉伸機構26)拉伸，以保持透明薄膜12之平面性，一面進行檢查，所以，即使在透明薄膜12之檢查區域面浮於空中的狀態，仍可以無皺紋或縱皺紋的狀態進行檢查。藉此，可更進一步提高檢查感度。By providing the stretching mechanism 26, the transparent film 12 can be stretched toward the length (transport tension) and the width direction (stretching mechanism 26) to maintain the planarity of the transparent film 12, so that even In the state where the inspection area of the transparent film 12 is floating in the air, it can be inspected without wrinkles or longitudinal wrinkles. Thereby, the inspection sensitivity can be further improved.
作為較佳之平面性的程度，在設透明薄膜12之高低0μm膜面為理想水平面44時，以因皺紋或縱皺紋而產生之膜面高低落在±150μm以內為較佳，更以落在±100μm以內為特佳。另外，以膜面與理想水平面44之傾斜度α為1°以內為較佳，更以0.5°以內為特佳。藉此，如習知，為了矯正透明薄膜12之皺紋或縱皺紋，亦可不用捲繞於輥上，所以可解決受光機24與被檢查之檢查區域面之距離不恆定的問題。As a preferred degree of planarity, when the film surface of the high and low 0 μm of the transparent film 12 is an ideal horizontal surface 44, it is preferable that the film surface height due to wrinkles or vertical wrinkles falls within ±150 μm, and more preferably falls within ± It is particularly good within 100 μm. Further, it is preferable that the inclination α of the film surface and the ideal horizontal surface 44 is 1 or less, and more preferably 0.5 or less. Therefore, as is conventionally known, in order to correct wrinkles or longitudinal wrinkles of the transparent film 12, it is not necessary to be wound around the roller, so that the problem that the distance between the photoreceiver 24 and the surface of the inspection region to be inspected is not constant can be solved.
第7圖顯示透明薄膜12面之傾斜度α為起因的反射散亂光之強度分布，與第3圖中之說明相同，箭頭a為正反射光，箭頭b為反射於受光機24之光軸方向的反射散亂光，箭頭c為其他之反射散亂光，較長之箭頭表示反射散亂光的強度強。Fig. 7 is a view showing the intensity distribution of the reflected scattered light of the surface of the transparent film 12 as the cause of the scattered light, which is the same as that described in Fig. 3, the arrow a is the regular reflection light, and the arrow b is the optical axis reflected by the light receiver 24. The reflection in the direction is scattered light, the arrow c is the other reflection scattered light, and the longer arrow indicates the intensity of the reflected scattered light.
從第7圖可知，當於透明薄膜12面具有傾斜度α時，因受光機24之光軸30與正反射光的角角θ增大，所以，反射於受光機24之光軸方向的箭頭b之長度變短，使得反射散亂光之強度減弱。第7圖中，雖描繪成透明薄膜12整體傾斜，但當顯微式地觀察皺紋或縱皺紋的部分時，可取作為膜面之傾斜，若具有皺紋或縱皺紋時，則檢測感度會降低。As can be seen from Fig. 7, when the inclination α is formed on the surface of the transparent film 12, since the angular angle θ of the optical axis 30 of the light receiver 24 and the specular reflection light increases, the arrow reflected in the optical axis direction of the light receiver 24 is reflected. The length of b is shortened, so that the intensity of the reflected scattered light is weakened. In Fig. 7, although the transparent film 12 is entirely inclined, when the wrinkles or the longitudinal wrinkles are observed microscopically, the film surface may be inclined, and if wrinkles or longitudinal wrinkles are formed, the detection sensitivity may be lowered.
另外，如第5圖所示，以在受光機24之透明薄膜12背面側設置光吸收箱46為較佳，該光吸收箱46用以防止透過透明薄膜12之檢查光20的反射。光吸收箱46例如被塗布有消除光澤的黑色塗料，而以光之反射率極低的方式所形成。藉此，可抑制透明薄膜12背面之散亂光被受光機24接收的情況。因此，可更進一步提高檢測感度。Further, as shown in Fig. 5, it is preferable to provide a light absorbing box 46 on the back side of the transparent film 12 of the light receiver 24 for preventing reflection of the inspection light 20 transmitted through the transparent film 12. The light absorbing box 46 is coated, for example, with a black paint that removes gloss, and is formed in such a manner that the reflectance of light is extremely low. Thereby, it is possible to suppress the scattered light on the back surface of the transparent film 12 from being received by the light receiver 24. Therefore, the detection sensitivity can be further improved.
又，在本實施形態中，雖以輸送之帶狀透明薄膜12的例子進行了說明，但本發明亦可應用於單片狀之透明薄膜12。另外，雖以透明薄膜12為例進行了說明，但亦可適用於不透明之薄膜。Further, in the present embodiment, the belt-shaped transparent film 12 to be conveyed has been described as an example, but the present invention can also be applied to the single-piece transparent film 12. Further, although the transparent film 12 has been described as an example, it may be applied to an opaque film.
其次，說明利用以下之條件實施的本發明之實施例及比較例。Next, examples and comparative examples of the present invention which are carried out under the following conditions will be described.
將藉由熔融製膜法所製成之三醋酸纖維素薄膜作為檢查對象，使用本發明之薄膜缺陷檢查裝置(實施例之裝置)或習知之薄膜缺陷檢查裝置(比較例之裝置)，對該薄膜表面所發現之微細傷痕(微細缺陷)進行檢查。傷口大小係寬度為10μm、長度為210μm、深度為0.05μm的極微細之傷痕，微細傷痕係被形成於熔融製膜之來自成形模具的擠壓方向、即薄膜運送方向。第9圖顯示第1～4實施例之檢查條件及第1～3比較例的檢查條件及檢查結果。The cellulose triacetate film produced by the melt film forming method is used as a test object, and the film defect inspection device (device of the embodiment) of the present invention or a conventional film defect inspection device (device of a comparative example) is used. Fine scratches (fine defects) found on the surface of the film were examined. The wound has a size of 10 μm, a length of 210 μm, and a very fine flaw of 0.05 μm. The fine flaw is formed in the extrusion direction of the molten film from the molding die, that is, the film transport direction. Fig. 9 shows the inspection conditions of the first to fourth embodiments and the inspection conditions and inspection results of the first to third comparative examples.
第1實施例係以與微細傷痕14之產生方向大致平行的方式配置投光機22及受光機24，並使用保持薄膜12之平面性的拉伸機構26。投光機22係使用棒狀之螢光燈，受光機24係使用CCD線型感測器，並將2根投光機22配置於受光機24的兩側。此時，薄膜12表面之照度為3500Lux。另外，設受光機24與正反射光之夾角θ為10°。另外，在運送輥16,18間之薄膜背面，並不特別設置支撐薄膜12用之構件，薄膜12係在空中輸送的途中被檢查。In the first embodiment, the light projector 22 and the light receiver 24 are disposed so as to be substantially parallel to the direction in which the fine flaws 14 are generated, and the flat stretching mechanism 26 that holds the film 12 is used. The projector 22 uses a rod-shaped fluorescent lamp, the receiver 24 uses a CCD line sensor, and the two projectors 22 are disposed on both sides of the receiver 24. At this time, the illuminance of the surface of the film 12 was 3,500 Lux. Further, the angle θ between the light receiver 24 and the specular reflected light is set to 10°. Further, the member for supporting the film 12 is not particularly provided on the back surface of the film between the transport rollers 16, 18, and the film 12 is inspected in the middle of air transport.
第2實施例在除投光機22之數量為1個，薄膜12表面之照度為1800Lux這一點及設受光機24與正反射光的夾角θ為5°這一點以外，其餘均與第1實施例之條件相同。In the second embodiment, the number of the light projectors 22 is one, the illuminance on the surface of the film 12 is 1800 Lux, and the angle θ between the light receiver 24 and the specular reflected light is 5°, and the other is the first embodiment. The conditions are the same.
第3實施例在除設受光機24與正反射光的夾角θ為10°這一點以外，其餘均與第2實施例之條件相同。In the third embodiment, the conditions of the second embodiment are the same except that the angle θ between the light receiver 24 and the specular reflected light is 10°.
第4實施例在除設受光機24與正反射光的夾角θ為20°這一點以外，其餘均與第2實施例之條件相同。In the fourth embodiment, the conditions of the second embodiment are the same except that the angle θ between the light receiver 24 and the specular reflected light is 20°.
第1比較例係以與微細傷痕14之產生方向大致垂直(正交)的方式配置投光機22及受光機24，並使用保持薄膜12之平面性的拉伸機構26。投光機22係使用1根棒狀之螢光燈，受光機24係使用CCD線型感測器。此時，薄膜表面之照度為1800Lux。另外，在運送輥16,18間之薄膜背面，並不特別設置支撐薄膜12用之構件，且薄膜12係在空中輸送的途中被檢查。即，第1比較例在以與微細傷痕14之產生方向大致垂直(正交)的方式配置投光機22及受光機24這一點上，不滿足本發明。In the first comparative example, the light projector 22 and the light receiver 24 are disposed so as to be substantially perpendicular (orthogonal) to the direction in which the fine flaws 14 are generated, and the flat stretching mechanism 26 that holds the film 12 is used. The projector 22 uses one rod-shaped fluorescent lamp, and the receiver 24 uses a CCD line sensor. At this time, the illuminance of the film surface was 1800 Lux. Further, the member for supporting the film 12 is not particularly provided on the back surface of the film between the transport rollers 16, 18, and the film 12 is inspected in the middle of air transport. In other words, the first comparative example does not satisfy the present invention in that the light projector 22 and the light receiver 24 are disposed so as to be substantially perpendicular (orthogonal) to the direction in which the fine flaws 14 are generated.
第2比較例係以與微細傷痕14之產生方向大致平行的方式配置投光機22及受光機24，但不使用保持薄膜12之平面性的拉伸機構26。投光機22係使用1根棒狀之螢光燈，受光機24係使用CCD線型感測器。此時，薄膜表面之照度為1800Lux。另外，設受光機24與正反射光之夾角θ為10°。並在運送輥16,18間之薄膜背面，並不特別設置支撐薄膜12用之構件，薄膜12係在空中輸送的途中被檢查。即，第2比較例在不使用拉伸機構26這一點上，不滿足本發明。In the second comparative example, the light projector 22 and the light receiver 24 are disposed so as to be substantially parallel to the direction in which the fine flaws 14 are generated, but the flat stretching mechanism 26 that holds the flatness of the film 12 is not used. The projector 22 uses one rod-shaped fluorescent lamp, and the receiver 24 uses a CCD line sensor. At this time, the illuminance of the film surface was 1800 Lux. Further, the angle θ between the light receiver 24 and the specular reflected light is set to 10°. Further, on the back surface of the film between the transport rollers 16, 18, members for supporting the film 12 are not particularly provided, and the film 12 is inspected on the way of air transport. That is, the second comparative example does not satisfy the present invention in that the stretching mechanism 26 is not used.
第3比較例係不使用拉伸機構26，取而代之在薄膜背面配置支撐輥以進行薄膜捲繞，藉以矯正薄膜12之皺紋或縱皺紋。其他之條件均與第2比較例相同。亦即，第3比較例在取代拉伸機構26而使用支撐輥這一點上，不滿足本發明。In the third comparative example, the stretching mechanism 26 is not used, and instead, a supporting roller is disposed on the back surface of the film to perform film winding, thereby correcting wrinkles or longitudinal wrinkles of the film 12. Other conditions are the same as in the second comparative example. That is, the third comparative example does not satisfy the present invention in that the support roller is used instead of the stretching mechanism 26.
然後，以能否確認微細傷痕14之缺陷信號來評價檢查性能。第9圖之◎表示完全無雜訊且能極為良好地確認缺陷信號，○表示幾乎無雜訊且能良好地確認缺陷信號。另外，△表示雜訊雖略有增加但能確認缺陷信號，是可使用之性能。×表示雜訊、皺紋或縱皺紋等之檢查障礙要因多，而無法確認缺陷信號或無法進行判別。Then, the inspection performance was evaluated by whether or not the defect signal of the fine flaw 14 was confirmed. The ◎ in Fig. 9 indicates that the defect signal is completely confirmed without noise, and ○ indicates that there is almost no noise and the defect signal can be satisfactorily confirmed. In addition, Δ indicates that although the noise is slightly increased, the defect signal can be confirmed, and the performance is usable. × indicates that there are many inspection obstacles such as noise, wrinkles, and longitudinal wrinkles, and it is impossible to confirm the defect signal or make it impossible to judge.
如於第9圖之項目「判斷」中結果的顯示，第1實施例為◎、第2及第3實施例為○、第4實施例為△之評價。As shown in the item "Judgment" in Fig. 9, the first embodiment is ◎, the second and third embodiments are ○, and the fourth embodiment is Δ.
相對於此，不滿足以本發明之基本構成進行檢查之條件的第1～第3比較例，全部為×評價，其中本發明之基本構成係一面保持(使用拉伸機構26)平面性，同時與微細傷痕14平行地配置投光機22及受光機24。On the other hand, the first to third comparative examples which do not satisfy the conditions for inspecting the basic configuration of the present invention are all evaluated as ×, and the basic configuration of the present invention maintains (using the stretching mechanism 26) planarity while being The fine flaws 14 are arranged in parallel with the light projector 22 and the light receiver 24.
10．．．薄膜缺陷檢查裝置10. . . Film defect inspection device
12．．．透明薄膜12. . . Transparent film
14．．．微細傷痕14. . . Fine scar
16,18．．．運送輥16,18. . . Transport roller
20．．．檢查光20. . . Check light
22．．．投光機twenty two. . . Projector
24．．．受光機twenty four. . . Light machine
26．．．拉伸機構26. . . Stretching mechanism
28．．．影像處理裝置28. . . Image processing device
30．．．受光機之光軸30. . . Optical axis of the receiver
32．．．挾持裝置32. . . Holding device
34．．．張力裝置34. . . Tension device
36．．．移動機構36. . . Mobile agency
38,40．．．皮帶輪38,40. . . Pulley
42．．．無接縫鏈條42. . . Seamless chain
44．．．理想水平面44. . . Ideal level
46．．．光吸收箱46. . . Light absorption box
第1圖為本發明之薄膜缺陷檢查裝置之概念圖。Fig. 1 is a conceptual diagram of a film defect inspection device of the present invention.
第2圖為說明投光機與受光機之位置關係的說明圖。Fig. 2 is an explanatory view showing the positional relationship between the light projector and the light receiver.
第3圖為投光機與受光機之位置關係的差異造成之反射散亂光的強度之說明圖。Fig. 3 is an explanatory view showing the intensity of the reflected scattered light caused by the difference in the positional relationship between the light projector and the light receiver.
第4圖為相對於受光機配置2個投光機的圖。Fig. 4 is a view showing the arrangement of two projectors with respect to the light receiver.
第5圖為薄膜缺陷檢查裝置之拉伸機構的說明圖。Fig. 5 is an explanatory view of a stretching mechanism of the film defect inspection device.
第6圖為構成拉伸機構之移動機構的說明圖。Fig. 6 is an explanatory view of a moving mechanism constituting the stretching mechanism.
第7圖為說明拉伸機構之作用的說明圖。Fig. 7 is an explanatory view for explaining the action of the stretching mechanism.
第8圖為習知之薄膜缺陷檢查裝置的概念圖。Fig. 8 is a conceptual diagram of a conventional film defect inspection device.
第9圖為本發明之實施例及比較例的圖表。Fig. 9 is a chart showing an embodiment and a comparative example of the present invention.
10．．．薄膜缺陷檢查裝置10. . . Film defect inspection device
12．．．透明薄膜12. . . Transparent film
14．．．微細傷痕14. . . Fine scar
14A．．．傷面14A. . . Wounded face
16,18．．．運送輥16,18. . . Transport roller
20．．．檢查光20. . . Check light
22．．．投光機twenty two. . . Projector
24．．．受光機twenty four. . . Light machine
26．．．拉伸機構26. . . Stretching mechanism
28．．．影像處理裝置28. . . Image processing device
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101551343B (en) | 2012-11-28 |
| JP5276875B2 (en) | 2013-08-28 |
| CN101551343A (en) | 2009-10-07 |
| JP2009244024A (en) | 2009-10-22 |
| TW200949238A (en) | 2009-12-01 |
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