TWI457181B - A discharge device for a liquid material, a coating apparatus and a coating method therefor - Google Patents
A discharge device for a liquid material, a coating apparatus and a coating method therefor Download PDFInfo
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- TWI457181B TWI457181B TW098105617A TW98105617A TWI457181B TW I457181 B TWI457181 B TW I457181B TW 098105617 A TW098105617 A TW 098105617A TW 98105617 A TW98105617 A TW 98105617A TW I457181 B TWI457181 B TW I457181B
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- liquid material
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- plunger
- metering
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1034—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
- B05C5/0229—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet the valve being a gate valve or a sliding valve
- B05C5/0233—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet the valve being a gate valve or a sliding valve rotating valve, e.g. rotating perforated cylinder
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
- B05C5/0275—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
本發明係關於一種精度佳地使液體材料微量滴下或飛滴而排出的裝置及方法,更具體而言,係關於一種在不降低排出精度下可使塗佈作業中之再抽吸動作達到最小極限的排出裝置及方法。The present invention relates to an apparatus and method for accurately discharging a droplet of liquid material or dropping it by droplets, and more particularly to minimizing the re-aspiration action in a coating operation without lowering the discharge precision. Limit discharge device and method.
作為精度佳地使液體材料微量滴下或飛滴而排出的習知裝置,例如本案申請人所開發之專利文獻1至4所揭示的裝置。Conventional devices which are excellent in the accuracy of dripping or dropping liquid materials, such as those disclosed in Patent Documents 1 to 4 developed by the applicant of the present invention.
上述習知排出裝置係藉由使抽吸於計量部中的液體材料,藉由水密不透水配置的柱塞進行間歇性複數次前進動作,在每次前進動作飛翔排出液滴的排出方式。In the above-described conventional discharge device, the liquid material sucked into the metering portion is intermittently moved forward by the plunger which is disposed in a watertight and impervious manner, and the discharge mode of the liquid droplets is discharged in each forward movement.
(專利文獻1)日本專利特開2003-190871號公報(Patent Document 1) Japanese Patent Laid-Open Publication No. 2003-190871
(專利文獻2)日本專利特開2004-160314號公報(Patent Document 2) Japanese Patent Laid-Open Publication No. 2004-160314
(專利文獻3)日本專利特開2004-160276號公報(Patent Document 3) Japanese Patent Laid-Open Publication No. 2004-160276
(專利文獻4)日本專利特開2005-40770號公報(Patent Document 4) Japanese Patent Laid-Open Publication No. 2005-40770
習知裝置之排出方式在抽吸於計量管的量受到限制,而有無法抽吸工件整體所需要量之液體材料的情況。在此情況下,必須在塗佈作業途中進行再抽吸動作,而有生產性降低的問題。The discharge mode of the conventional device is limited in the amount of suction to the measuring tube, and there is a case where the liquid material required for the entire workpiece cannot be sucked. In this case, it is necessary to perform the re-suction operation in the middle of the coating operation, and there is a problem that the productivity is lowered.
此處,當增大計量管之尺寸則會有如下問題:Here, when the size of the measuring tube is increased, there are the following problems:
亦即,當增大計量管之直徑而增加液體材料之吸入量,則柱塞之直徑亦必然變大,因而隨柱塞之稍微移動便會有大量液體材料滴下,結果會有難以進行微量排出的問題。That is, when the diameter of the measuring tube is increased to increase the suction amount of the liquid material, the diameter of the plunger is also inevitably enlarged, so that a large amount of liquid material is dripped with a slight movement of the plunger, and as a result, it is difficult to perform minute discharge. The problem.
另一方面,當增長計量管之長度,除會導致裝置大型化之外,亦會有難以提高排出精度的問題。On the other hand, when the length of the measuring tube is increased, in addition to the increase in size of the device, there is also a problem that it is difficult to improve the discharge accuracy.
本發明之目的在於提供一種不降低排出精度下即可使塗佈作業中之再抽吸動作達到最小極限的排出裝置及方法。It is an object of the present invention to provide a discharge apparatus and method that minimizes the re-suction operation during a coating operation without reducing the discharge accuracy.
本發明的裝置為如下構成。亦即:The apparatus of the present invention is constructed as follows. that is:
第1發明的液體材料之排出裝置,係具備有液體材料之儲存部、柱塞插通的複數計量部、柱塞驅動裝置、及與各計量部一對一對應的複數噴嘴;其將已充填至計量部的液體材料以複數次進行排出的液體材料之排出裝置;其特徵在於,上述柱塞驅動裝置為使全部柱塞同時進退移動的一柱塞驅動裝置。The liquid material discharge device according to the first aspect of the present invention includes a storage portion having a liquid material, a plurality of metering portions through which the plunger is inserted, a plunger driving device, and a plurality of nozzles corresponding to the respective metering portions in one-to-one correspondence; A liquid material discharge device that discharges the liquid material to the metering portion in plural times; wherein the plunger driving device is a plunger driving device that moves all the plungers forward and backward simultaneously.
第2發明係就第1發明中,上述計量部構成為全部相同容量。According to a second aspect of the invention, in the first aspect of the invention, the measuring unit is configured to have the same capacity.
第3發明係就第1或2發明中,分別對上述計量部設置有具有使計量部與噴嘴相連通的第一位置及使計量部與儲存部相連通的第二位置之切換閥,並設有可將各切換閥之位置同時進行切換的一閥驅動裝置。According to a third aspect of the invention, in the first or second aspect of the invention, the metering unit is provided with a switching valve having a first position that allows the metering unit to communicate with the nozzle and a second position that connects the metering unit and the storage unit, and is provided There is a valve drive device that can switch the positions of the respective switching valves at the same time.
第4發明係就第3發明中,上述柱塞驅動裝置及上述閥驅動裝置相對於上述複數計量部被配置在鉛直方向。According to a third aspect of the invention, the plunger driving device and the valve driving device are disposed in a vertical direction with respect to the plurality of measuring units.
第5發明係就第3或4發明中,其設置配設有上述切換閥的塊體,在該塊體設有從上述儲存容器朝各切換閥分支流入液體材料的流路。According to a fifth aspect of the present invention, in the third or fourth aspect of the present invention, a block body in which the switching valve is disposed is provided, and a flow path in which a liquid material flows from the storage container toward each switching valve branch is provided in the block body.
第6發明係就第5發明中,上述計量部由可裝接於上述塊體的計量管所構成,且為相互鄰接配置。According to a sixth aspect of the invention, the measuring unit is configured by a measuring tube attachable to the block, and is disposed adjacent to each other.
第7發明係就第5發明中,於上述塊體形成有計量部。According to a seventh aspect of the invention, in the fifth aspect, the measuring unit is formed in the block.
第8發明係就第7發明中,於上述塊體形成有儲存部。According to a seventh aspect of the invention, in the seventh aspect of the invention, the storage unit is formed in the block.
第9發明的塗佈裝置,係具備有設有平台的架台、及在架台上延伸且可朝一方向移動的框體,在該框體設有第1至8中任一發明的排出裝置。The coating device according to a ninth aspect of the invention includes a gantry having a platform, and a frame extending over the gantry and movable in one direction, and the casing is provided with the discharge device according to any one of the first to eighth aspects.
本發明的方法為如下構成。亦即:The method of the present invention is constructed as follows. that is:
第10發明的液體材料之排出方法,係從儲存部對插通柱塞的計量部內填充液體材料,藉由重複進行柱塞之進出移動與停止進出,而將上述計量部內之液體材料以複數次進行排出的液體材料之排出方法;其特徵在於,其設置有複數計量部及與各計量部一對一對應的複數噴嘴,並透過一柱塞驅動裝置使複數柱塞同時移動,藉此同時排出所有計量部內之液體材料。According to a tenth aspect of the present invention, in the method of discharging a liquid material, the liquid material is filled in the measuring portion of the insertion plunger from the storage portion, and the liquid material in the measuring portion is repeatedly used by repeatedly moving in and out of the plunger and stopping the inflow and out. a method for discharging a discharged liquid material; wherein a plurality of measuring portions and a plurality of nozzles corresponding to each of the measuring portions are provided, and a plurality of plungers are simultaneously moved by a plunger driving device, thereby simultaneously discharging Liquid material in all metering sections.
第11發明係就第10發明中,分別對上述計量部設有具有使計量部與噴嘴相連通的第一位置及使計量部與儲存部相連通的第二位置之切換閥,一邊透過一驅動裝置同時切換各切換閥,一邊排出液體材料。According to a tenth aspect of the invention, the metering unit is provided with a switching valve having a first position that allows the measuring unit to communicate with the nozzle and a second position that allows the measuring unit to communicate with the storage unit, and transmits the driving The device simultaneously switches the switching valves to discharge the liquid material.
根據本發明,可精度佳地從複數噴嘴滴下微量之液體材料。According to the present invention, a small amount of liquid material can be dripped from a plurality of nozzles with high precision.
再者,藉由二驅動源可構成裝置,更藉由將其縱向配置,可細長地構成裝置。Furthermore, the device can be constructed by two driving sources, and the device can be formed elongated by longitudinally arranging them.
再者,因為可使所供應之液體材料在裝置內分支而導入於複數計量部中,因而可減少儲存部內所殘留液體材料之量,可不浪費地使用液體材料。Further, since the supplied liquid material can be branched into the apparatus and introduced into the plurality of measuring portions, the amount of the liquid material remaining in the storage portion can be reduced, and the liquid material can be used without waste.
本發明之最佳形態,例如為一種具備有相鄰接配置之複數計量部的液體材料之排出裝置,其中,上述計量部分別具備有柱塞與噴嘴,且具備有使複數柱塞同時進退移動的驅動裝置。A preferred embodiment of the present invention is, for example, a liquid material discharge device including a plurality of metering portions arranged adjacent to each other, wherein the metering portion includes a plunger and a nozzle, and is provided with a plurality of plungers moving forward and backward simultaneously Drive unit.
上述計量部為暫時儲存經由柱塞之進出移動而從噴嘴排出液體材料之空間,其體積大小構成為適於精度佳地排出微量液體材料。計量部設置為複數的理由在於不是使單一計量部之體積變大,而是使計量部整體之體積變大。作為上述計量部之構成例如可揭示出以下態樣:複數計量部為裝接於閥體的複數計量管,閥體具備有從儲存容器使液體材料分支流入各計量管中的流路。作為上述計量部之其他構成,可揭示出在計量塊體中設置複數計量孔與從儲存容器使液體材料分支流入於各計量孔中的流路之態樣。不管何種態樣,噴嘴前端之水平方向位置均對齊配置。The measuring unit temporarily stores a space for discharging the liquid material from the nozzle through the movement of the plunger, and the volume is configured to be suitable for discharging a small amount of liquid material with high precision. The reason why the measuring unit is provided in plural is that the volume of the entire measuring unit is not increased, but the volume of the entire measuring unit is increased. For example, the configuration of the measuring unit may be such that the plurality of measuring units are a plurality of measuring tubes attached to the valve body, and the valve body includes a flow path for branching the liquid material into the respective measuring tubes from the storage container. As another configuration of the measuring unit, it is possible to disclose a configuration in which a plurality of metering holes are provided in the metering block and a flow path in which the liquid material branches into the metering holes from the storage container. Regardless of the aspect, the horizontal position of the front end of the nozzle is aligned.
使計量部與噴嘴一對一對應構成之理由在於就從一個計量部分支滴入二個噴嘴的態樣中,因計量部內由柱塞加壓的液體材料之微妙流體均衡,會有液體不會均等地流動於雙方之噴嘴的情況。針對此點,若構成為各計量部分別具有噴嘴,則可使從各計量部至噴嘴排出口的流路達到全部相同之封閉形狀(但,亦可介設切換閥),因此可精度佳地施行排出。The reason why the metering portion and the nozzle are configured in one-to-one correspondence is that in the case where two nozzles are dropped from one metering portion, the delicate fluid of the liquid material pressurized by the plunger in the metering portion is equalized, and liquid may not be present. The case where the nozzles flow equally on both nozzles. In this regard, when each of the measuring portions has a nozzle, the flow path from each of the measuring portions to the nozzle discharge port can be made to have the same closed shape (although a switching valve can be disposed), so that the accuracy can be accurately performed. Execution.
再者,當在液體材料充填時將柱塞前端與切換閥間的容量設為相等,則使在計量部內滑動的柱塞同時進出而施行排出,可使隨柱塞的進出所產生流路內之體積減少達到相同比例。亦可設為將所有計量部設為相同容量,從所有噴嘴同時排出同量之液體材料。Further, when the capacity between the plunger tip end and the switching valve is made equal when the liquid material is filled, the plunger sliding in the metering portion is simultaneously introduced and discharged, and the flow path can be generated as the plunger enters and exits. The volume reduction is up to the same ratio. It is also possible to set all the measuring sections to the same capacity and simultaneously discharge the same amount of liquid material from all the nozzles.
再者,若在柱塞之前端部設置較桿更寬的密封部(大徑突起部),則滑動面積縮小,因而可使柱塞高速移動。此時,使計量部與噴嘴相連通的流路最好構成為實質直線。Further, if a seal portion (large diameter projection portion) wider than the rod is provided at the end portion of the plunger, the sliding area is reduced, and the plunger can be moved at a high speed. At this time, it is preferable that the flow path that connects the metering portion and the nozzle is formed as a substantially straight line.
再者,最好上述計量部分別具備有切換閥,並具備有將各切換閥同時進行切換的驅動裝置。切換閥可為滑動型、單向旋轉型、或往復作動旋轉型之任一種。Further, it is preferable that each of the measuring units includes a switching valve and a driving device that simultaneously switches the switching valves. The switching valve may be of a sliding type, a one-way rotating type, or a reciprocating rotating type.
以下,利用實施例詳細說明本發明,惟本發明並不受該等實施例任何限制。Hereinafter, the present invention will be described in detail by way of examples, but the present invention is not limited by the examples.
由圖1至圖4說明本實施例之裝置。另外,圖4中,在柱塞B31之背面設有柱塞A30,在噴嘴B56之背面設有噴嘴A55,在閥B58之背面設有閥A57,在閥插設孔B62之背面設有閥插設孔A61。The apparatus of this embodiment will be described with reference to Figs. Further, in Fig. 4, a plunger A30 is provided on the back surface of the plunger B31, a nozzle A55 is provided on the back surface of the nozzle B56, a valve A57 is provided on the back surface of the valve B58, and a valve plug is provided on the back surface of the valve insertion hole B62. Set hole A61.
本實施例之排出裝置中,在基座10上安裝有板A11、板B12及板C13而構成框體,在上述框體配設[1]柱塞驅動部、[2]柱塞部、[3]液送部及[4]閥部。In the discharge device of the present embodiment, a plate A11, a plate B12, and a plate C13 are attached to the base 10 to form a frame, and the frame is provided with a [1] plunger driving portion, [2] a plunger portion, and [ 3] Liquid delivery section and [4] valve section.
[1]柱塞驅動部係由馬達A20、滑座21、及滑件22所構成。[1] The plunger drive unit is composed of a motor A20, a carriage 21, and a slider 22.
柱塞驅動部係構成藉由固定在板B12的馬達A20之旋轉驅動,使滑件22可在固定於基座10的滑座21上朝滑座21之延伸方向移動自如。柱塞驅動部之各元件係相對於基座10之中心軸成線對稱配置。The plunger driving portion is configured to be rotationally driven by the motor A20 fixed to the plate B12, so that the slider 22 can be moved in the extending direction of the slider 21 on the slider 21 fixed to the base 10. The components of the plunger drive portion are arranged in line symmetry with respect to the central axis of the base 10.
[2]柱塞一部分係由柱塞A30、柱塞B31、計量管A32、及計量管B33所構成。[2] A part of the plunger is composed of a plunger A30, a plunger B31, a measuring tube A32, and a measuring tube B33.
於柱塞部中,柱塞A30與柱塞B31分別經由螺絲A34與螺絲B35而各自固定於柱塞驅動部之滑件22。構成為柱塞A30可密接滑動地***至計量管A32之內壁面,柱塞B31可密接滑動地***至計量管B33之內壁面。In the plunger portion, the plunger A30 and the plunger B31 are respectively fixed to the slider 22 of the plunger driving portion via the screw A34 and the screw B35. The plunger A30 is slidably inserted into the inner wall surface of the measuring tube A32, and the plunger B31 is slidably inserted into the inner wall surface of the measuring tube B33.
計量管A32及計量管B33係裝接固定至閥體50上面所穿設的孔中,藉由馬達A20之驅動,使柱塞A30及柱塞B31分別密接於計量管A32及計量管B33之內壁面而進行滑動。The measuring tube A32 and the measuring tube B33 are attached and fixed to the holes formed in the valve body 50, and the plunger A30 and the plunger B31 are respectively tightly connected to the measuring tube A32 and the measuring tube B33 by the driving of the motor A20. Sliding on the wall.
此處,柱塞A30及柱塞B31各自之計量管側前端,為了確實地在計量管內密接,而可構成較柱塞軸本體部直徑更寬的直徑(亦即設置密封部)。Here, the tip end of each of the plunger A30 and the plunger B31 on the side of the measuring tube can be formed to have a larger diameter (that is, a sealing portion) than the diameter of the main body of the plunger shaft in order to be surely adhered to the inside of the measuring tube.
計量管A32與計量管B33係相對於基座10之中心軸成線對稱且相互接近保持配置。如此,於本實施例中不會使一個計量管增長或加寬,藉由設置複數而增加排出量,防止排出裝置之大型化。The metering tube A32 and the metering tube B33 are line-symmetrical with respect to the central axis of the base 10 and are disposed close to each other. Thus, in the present embodiment, one metering tube is not increased or widened, and the discharge amount is increased by providing a plurality of numbers to prevent an increase in size of the discharge device.
本實施例之裝置構成為藉由馬達A20之旋轉動作而使柱塞A30與柱塞B31同時在計量管內進行前進移動或後退移動狀態。亦即,當柱塞A30在計量管A32內進行前進移動時,柱塞B31亦會同時在計量管B33內進行前進移動,而當柱塞A30在計量管A32內進行後退移動時,柱塞B31亦會同時在計量管B33內進行後退移動。The apparatus of the present embodiment is configured such that the plunger A30 and the plunger B31 are simultaneously moved forward or backward in the measuring tube by the rotation of the motor A20. That is, when the plunger A30 moves forward in the measuring tube A32, the plunger B31 also moves forward in the measuring tube B33, and when the plunger A30 moves backward in the measuring tube A32, the plunger B31 At the same time, the retreating movement is performed in the measuring tube B33 at the same time.
[3]液送部係由儲存容器40及液體輸送管41所構成。[3] The liquid delivery unit is composed of a storage container 40 and a liquid delivery tube 41.
更詳言之,液送部係由儲存液體材料的儲存容器40、及使上述儲存容器40與閥體50相連通的液體輸送管41所構成。More specifically, the liquid delivery unit is composed of a storage container 40 that stores a liquid material, and a liquid delivery tube 41 that communicates the storage container 40 with the valve body 50.
液體輸送管41係連通於朝儲存容器40之底部延伸的液體輸送管43,藉由從到達儲存容器40上端之壓力供應管42所供應之空壓作用,將儲存容器40內所儲存之液體材料壓送至閥體50。The liquid delivery tube 41 is in communication with the liquid delivery tube 43 extending toward the bottom of the storage container 40, and the liquid material stored in the storage container 40 is stored by the air pressure supplied from the pressure supply tube 42 reaching the upper end of the storage container 40. The pressure is sent to the valve body 50.
儲存容器40係傾斜載置在板B12上,由板A11受支撐本體部而可裝卸地保持固定。The storage container 40 is placed on the plate B12 so as to be inclined, and the plate A11 is detachably held and fixed by being supported by the main body portion.
[4]閥部係由閥體50、馬達B51、齒輪組52、軸A53、軸B54、噴嘴A55、噴嘴B56、及旋轉檢測機構70所構成。[4] The valve portion is composed of a valve body 50, a motor B51, a gear train 52, a shaft A53, a shaft B54, a nozzle A55, a nozzle B56, and a rotation detecting mechanism 70.
閥部構成為藉由受基座10所支撐之馬達B51的旋轉驅動,經由齒輪組52,使並列配置的二個軸(即軸A53與軸B54)進行旋轉,並使固定在板C13之閥體50的閥插設孔A61及閥插設孔B62內所配設的二個閥(即閥A57與閥B58)可旋轉自如。各閥係具備有使各計量管與各噴嘴相連通的貫通孔、及在與該貫通孔正交之周面朝閥之長度方向(水平方向)延伸的溝槽,該各溝槽與各閥插設孔之內壁面互相作用而構成使各計量管與儲存容器40相連通的流路。The valve portion is configured to be rotated by the motor B51 supported by the susceptor 10, and the two shafts arranged in parallel (ie, the shaft A53 and the shaft B54) are rotated via the gear train 52, and the valve fixed to the plate C13 is fixed. The two valves (i.e., valve A57 and valve B58) disposed in the valve insertion hole A61 and the valve insertion hole B62 of the body 50 are rotatable. Each of the valves includes a through hole that allows each of the measuring tubes to communicate with each of the nozzles, and a groove that extends in a longitudinal direction (horizontal direction) of the valve on a circumferential surface orthogonal to the through hole, the grooves and valves The inner wall surfaces of the insertion holes interact to form a flow path for connecting the respective measuring tubes to the storage container 40.
旋轉檢測機構70係由感測器71與檢測板72所構成。檢測板72為具有缺口的圓盤,隨馬達B51之旋轉而進行旋轉。構成為檢測板72位於形成「」字狀之作為光感測器的感測器71之凹部。感測器71中,凹部上端為發光部,凹部下端則成為受光部,藉由檢測板72之缺口,可使由上述發光部所發出的光,對於上述受光部投光或遮光。藉此,根據來自發光部的光對感測器71之受光部開始遮光之位置、或開始投光之位置,而控制閥B58之旋轉位置。The rotation detecting mechanism 70 is composed of a sensor 71 and a detecting plate 72. The detecting plate 72 is a disk having a notch and is rotated in accordance with the rotation of the motor B51. The detection plate 72 is located in the formation The shape of the sensor 71 is a recess of the sensor 71. In the sensor 71, the upper end of the concave portion is a light-emitting portion, and the lower end of the concave portion serves as a light-receiving portion. By detecting the notch of the plate 72, the light emitted by the light-emitting portion can be lighted or blocked by the light-receiving portion. Thereby, the rotational position of the valve B58 is controlled based on the light from the light-emitting portion to the position at which the light-receiving portion of the sensor 71 starts to be shielded or the position at which the light-emitting is started.
在閥體50之底部可裝卸地配設噴嘴A55與噴嘴B56。A nozzle A55 and a nozzle B56 are detachably disposed at the bottom of the valve body 50.
在閥體50上面穿設的孔中,裝接固定計量管A與B。另外,當然在閥體50上面所穿設的孔本本體部亦可構成為計量管。In the holes penetrating the valve body 50, the metering tubes A and B are attached and fixed. Further, of course, the hole body portion that is bored on the valve body 50 may be configured as a metering tube.
閥體50中設置具有分支路徑的流路,該分支路徑用以將經與液體輸送管41相連通的液體材料供應口59所供應之液體材料,分別輸送至閥A57與閥B58。如此,因為構成為經所供應之閥體50分支而流入於計量管A與B,因此不需要設置複數儲存容器。The valve body 50 is provided with a flow path having a branch path for conveying the liquid material supplied through the liquid material supply port 59 communicating with the liquid delivery pipe 41 to the valve A57 and the valve B58, respectively. Thus, since it is configured to flow into the measuring tubes A and B via the branch of the supplied valve body 50, it is not necessary to provide a plurality of storage containers.
軸A53構成為可裝卸地連結於閥A57(另外,圖2及圖4中,軸A53係位於軸B54之背面)。閥A57藉由軸A53之旋轉動作,而可取得使計量管A32與液體輸送管41相連通的第一位置、及使計量管A32與噴嘴A55相連通的第二位置。The shaft A53 is configured to be detachably coupled to the valve A57 (in addition, in FIGS. 2 and 4, the shaft A53 is located on the back surface of the shaft B54). The valve A57 is rotated by the shaft A53 to obtain a first position in which the measuring tube A32 communicates with the liquid delivery tube 41 and a second position in which the measuring tube A32 communicates with the nozzle A55.
軸B54構成為可裝卸地連結於閥B58。閥B58藉由軸B54之旋轉動作,而可取得使計量管B33與液體輸送管41相連通的第一位置、及使計量管B33與噴嘴B56相連通的第二位置。The shaft B54 is configured to be detachably coupled to the valve B58. The valve B58 is rotated by the shaft B54 to obtain a first position that allows the metering tube B33 to communicate with the liquid delivery tube 41, and a second position that allows the metering tube B33 to communicate with the nozzle B56.
閥A57與閥B58構成為藉由馬達B51之旋轉動作,而可同時地在各自之第一位置與第二位置進行切換。The valve A57 and the valve B58 are configured to be simultaneously switched between the respective first and second positions by the rotation of the motor B51.
且言,馬達A20、馬達B51係連接於控制裝置60,根據上述控制裝置60之指令產生動作。In other words, the motor A20 and the motor B51 are connected to the control device 60, and operate according to the command of the control device 60.
如此,本實施例之裝置係具備有二個馬達。而且,由其一馬達使複數柱塞同時進行移動,並由另一馬達使複數閥同時產生動作。於如此構成中,馬達A20與馬達B51經由滑件而上下配置。藉由如此配置,便可將裝置細長地形成。另外,馬達A20與馬達B51最好配置於基座10之中心或中心附近之同軸上。Thus, the apparatus of this embodiment is provided with two motors. Moreover, the plurality of plungers are simultaneously moved by one of the motors, and the plurality of valves simultaneously act by the other motor. In such a configuration, the motor A20 and the motor B51 are vertically arranged via the slider. With this configuration, the device can be formed elongated. Further, the motor A20 and the motor B51 are preferably disposed coaxially on the center or near the center of the base 10.
當在沿XY方向移動的移動機器人搭載複數本滴下裝置時,此種細長構成可增加滴下裝置之搭載數量,因而較佳。When a plurality of drip devices are mounted on a mobile robot moving in the XY direction, such a slim configuration can increase the number of dripping devices, which is preferable.
再者,因為藉由二個馬達可使所有柱塞與所有閥產生動作,因而可輕量地構成裝置,在搭載有上述滴下裝置的塗佈裝置中,於使滴下裝置朝X方向或Y方向進行移動之情況時均達便利。Furthermore, since all the plungers and all the valves can be operated by the two motors, the device can be configured lightly, and in the coating device equipped with the dropping device, the dropping device is oriented in the X direction or the Y direction. It is convenient when moving.
使馬達B51進行轉動動作,將閥A57與閥B58設置於第一位置處,並使計量管A32及計量管B33分別連通於液體輸送管41。The motor B51 is rotated, the valve A57 and the valve B58 are placed at the first position, and the measuring tube A32 and the measuring tube B33 are respectively connected to the liquid delivery tube 41.
接著,使馬達A20產生旋轉動作,使柱塞A30與柱塞B31後退移動,在計量管A32及計量管B33中吸入必要量的液體材料。Next, the motor A20 is rotated, the plunger A30 and the plunger B31 are moved backward, and a necessary amount of liquid material is sucked into the measuring tube A32 and the measuring tube B33.
接著,使馬達B51產生動作以使閥A57及閥B58位於第2位置處,使計量管與噴嘴相連通。亦即,使計量管A32與噴嘴A55相連通,並使計量管B33與噴嘴B56相連通。Next, the motor B51 is operated to bring the valve A57 and the valve B58 to the second position, and the measuring tube is connected to the nozzle. That is, the metering tube A32 is communicated with the nozzle A55, and the metering tube B33 is communicated with the nozzle B56.
為了排出所希望量之液體材料,使馬達A20產生旋轉動作,使柱塞A30及柱塞B31前進移動規定量,從噴嘴A55及噴嘴B56排出液體材料。In order to discharge a desired amount of the liquid material, the motor A20 is rotated, and the plunger A30 and the plunger B31 are moved forward by a predetermined amount, and the liquid material is discharged from the nozzle A55 and the nozzle B56.
此時,柱塞A30及柱塞B31藉由急速前進後接續急遽停止,可精度佳地從噴嘴中滴下微少量之液體材料。藉由急速前進後接續急遽停止之動作,可連續地滴下液體材料。At this time, the plunger A30 and the plunger B31 are quickly stopped by the rapid advancement, and a small amount of the liquid material can be dripped from the nozzle with high precision. The liquid material can be continuously dropped by the rapid advancement and subsequent rapid stop action.
為可使液體材料連續滴下,當然事先必須抽吸必要量。In order to allow the liquid material to continuously drip, it is of course necessary to pump the necessary amount in advance.
此處,藉由柱塞之急遽前進後所接續之急遽停止,而精度佳地從噴嘴中滴下微少量之液體材料。例如藉由使密接於計量管之內壁面而進行滑動的柱塞之進出移動與停止進出,而調整從與上述計量管相連通的排出口所排出之液滴的排出量,如此液滴量之調整方法,為調整從上述進出移動的柱塞開始減速起至停止為止的移動速度以使從上述排出口所排出之液滴在每次排出時均保持一定量之液滴量之調整方法,此處,使上述柱塞後退移動而將液材從儲存容器中吸入於上述計量管內,藉由重複進行上述柱塞之進出移動與停止進出,而將上述計量管內之液體材料分開複數次進行排出。另外,關於該排出方法,本案申請人在專利文獻4已有所揭示。Here, by the rapid continuation of the rapid advancement of the plunger, a small amount of liquid material is dripped from the nozzle with high precision. For example, by moving the plunger in and out of the inner wall surface of the measuring tube to move in and out, the discharge amount of the liquid droplet discharged from the discharge port communicating with the measuring tube is adjusted, and thus the amount of liquid droplets is adjusted. The adjustment method is a method of adjusting the movement speed from the start of the deceleration to the stop of the plunger moving in and out, so that the droplet discharged from the discharge port maintains a certain amount of droplets per discharge. Removing the plunger to move the liquid material into the measuring tube from the storage container, and repeating the movement of the plunger in and out and stopping the inflow and out, thereby separating the liquid material in the measuring tube several times. discharge. Further, regarding the discharge method, the applicant of the present application has disclosed it in Patent Document 4.
在施行所希望次數之滴下動作後,再度使馬達B51進行轉動動作,將閥A57與閥B58設置於第一位置,並藉由重複上述所說明的動作,可連續施行排出作業。After the drip operation of the desired number of times is performed, the motor B51 is again rotated, the valve A57 and the valve B58 are set to the first position, and the discharge operation can be continuously performed by repeating the above-described operation.
搭載有複數本實施例滴下裝置1的塗佈裝置5,係如圖5所示。The coating device 5 equipped with a plurality of the dropping device 1 of the present embodiment is shown in Fig. 5 .
塗佈裝置5係具備有架台7、可動框體A81、及可動框體B82,該架台7係具有載置工件的平台6,該可動框體A81係由架台1上所固設的一對支撐體支撐,並橫跨架台1之短邊方向(X方向),該可動框體B82係同樣地橫跨架台1之X方向。在可動框體A81與可動框體B82之側面,經由可動件在X方向可移動自如地安裝有複數滴下裝置1。滴下裝置1由排出裝置與使排出裝置可朝上下方向(Z方向)移動自如的Z方向驅動裝置所構成。平台6藉由X導軌構成可朝X方向移動自如,又藉由配設有X導軌的Y滑件與Y導軌而構成可在Y方向移動自如。另外,亦可於平台6設置用以使工件朝θ軸方向移動而定位於既定角度的θ旋轉手段。作為X方向及Y方向之導軌,可例示出具備有線性馬達用磁鐵與線性滑軌之構成,惟不受限於此構成,例如亦可構成為在滑座具備有馬達與連動於馬達而進行旋轉的滾珠螺桿,在滑件具備有連動於滾珠螺桿的旋轉而進行直進移動的螺帽。The coating device 5 includes a gantry 7, a movable frame A81, and a movable frame B82. The gantry 7 has a platform 6 on which a workpiece is placed, and the movable frame A81 is supported by a pair of supports fixed on the gantry 1. The body is supported and spans the short side direction (X direction) of the gantry 1, and the movable frame B82 similarly straddles the X direction of the gantry 1. On the side faces of the movable frame body A81 and the movable frame body B82, a plurality of dropping devices 1 are movably attached via the movable member in the X direction. The drip device 1 is composed of a discharge device and a Z-direction drive device that can move the discharge device in the vertical direction (Z direction). The platform 6 is configured to be movable in the X direction by the X rail, and is configured to be movable in the Y direction by the Y slider and the Y rail provided with the X rail. Further, the platform 6 may be provided with a θ rotation means for moving the workpiece in the θ-axis direction and positioning at a predetermined angle. The rails in the X direction and the Y direction may be configured to include a linear motor magnet and a linear slide. However, the present invention is not limited thereto. For example, the slide may be provided with a motor and interlocked with the motor. The rotating ball screw has a nut that is linearly moved in conjunction with the rotation of the ball screw.
本實施例重要處在於非為從一計量管分支滴下於二噴嘴的態樣。亦即,噴嘴、計量管及柱塞構成為1個組合,排出裝置具備有複數此種組合。This embodiment is important in that it is not a drop from a metering tube branch to the two nozzles. That is, the nozzle, the measuring tube, and the plunger are configured in a single combination, and the discharge device is provided with a plurality of such combinations.
在從一計量管分支滴下於二噴嘴的態樣中,因計量管內經柱塞加壓的液體材料之微妙流體均衡,會有流體無法均等地流動至雙方噴嘴的情況,但藉由本實施例的構成,可確實地滴下液體材料。In the case where the branch is dropped from the measuring tube to the two nozzles, the delicate fluid of the liquid material pressurized by the plunger in the measuring tube is equalized, and the fluid cannot flow uniformly to both nozzles, but by the embodiment The composition can reliably drop the liquid material.
本實施例中,例示配置有二噴嘴的排出裝置構成,惟本實施例的技術思想當然亦涵蓋配置有二以上噴嘴的排出裝置態樣。In the present embodiment, a discharge device configured with two nozzles is exemplified, but the technical idea of the present embodiment naturally also covers a discharge device configuration in which two or more nozzles are disposed.
再者,因為噴嘴、計量管及柱塞為一個組合,因此當然亦需要與噴嘴數量相同數目的計量管與柱塞。Furthermore, since the nozzle, the metering tube and the plunger are a combination, it is of course also necessary to have the same number of metering tubes and plungers as the number of nozzles.
由圖6至圖8說明實施例2之裝置。另外,圖8中,在柱塞B31之背面具有柱塞A30,在噴嘴B56之背面具有噴嘴A55,在閥B58的背面具有閥A57,在閥插設孔B62之背面具有閥插設孔A61,在計量孔B65之背面具有計量孔A64。The apparatus of the second embodiment will be described with reference to Figs. 6 to 8 . Further, in Fig. 8, a plunger A30 is provided on the back surface of the plunger B31, a nozzle A55 is provided on the back surface of the nozzle B56, a valve A57 is provided on the back surface of the valve B58, and a valve insertion hole A61 is provided on the back surface of the valve insertion hole B62. A metering hole A64 is provided on the back side of the metering hole B65.
本實施例之排出裝置就具備有閥插設孔A61與B62、儲存部63、及形成有計量孔A64與B65的計量塊體36之處係不同於實施例1之排出裝置。The discharge device of the present embodiment is different from the discharge device of the first embodiment in that the valve insertion holes A61 and B62, the storage portion 63, and the metering block 36 in which the metering holes A64 and B65 are formed are provided.
計量塊體36係固定於板C13,上面設有供柱塞A31與B31***的孔,側面設有與液體輸送管41相連通的液體材料供應口59。從液體材料供應口59所供應的液體材料,暫時儲存於在計量塊體36內部所形成的儲存部63中。儲存部63中所儲存的液體材料係經由在閥A57與閥B58各自周面所形成的溝槽而輸送至計量孔A64與計量孔B65。本排出裝置的液體抽吸步驟與實施例1相同,儲存部63與計量孔A64及計量孔B65保持相連通狀態,利用馬達A20使柱塞A30與柱塞B31同時後退移動而施行。The metering block 36 is fixed to the plate C13, and is provided with a hole through which the plungers A31 and B31 are inserted, and a side surface provided with a liquid material supply port 59 communicating with the liquid delivery pipe 41. The liquid material supplied from the liquid material supply port 59 is temporarily stored in the storage portion 63 formed inside the metering block 36. The liquid material stored in the storage portion 63 is sent to the metering hole A64 and the metering hole B65 via the grooves formed on the respective circumferential surfaces of the valve A57 and the valve B58. The liquid suction step of the discharge device is the same as that of the first embodiment, and the storage portion 63 is kept in communication with the metering hole A64 and the metering hole B65, and the plunger A30 and the plunger B31 are simultaneously retracted and moved by the motor A20.
本排出裝置之液體排出步驟亦與實施例1相同。首先,藉由支撐於基座10的馬達B51之旋轉驅動,經由齒輪組52使並列配置的二軸(即軸A53與軸B54)進行旋轉,藉此使各計量孔與各噴嘴透過設於各閥的貫通孔相連通。然後,利用馬達A20使柱塞A30與柱塞B31同時急遽前進,接著急遽停止,藉此精度佳地從噴嘴滴下微少量之液體材料。此動作係重覆複數次而施行排出作業至經抽吸至計量孔A64與B65內的液體材料耗盡為止。The liquid discharge step of the discharge device is also the same as in the first embodiment. First, by rotating the motor B51 supported by the susceptor 10, the two shafts arranged in parallel (ie, the shaft A53 and the shaft B54) are rotated via the gear train 52, whereby the metering holes and the nozzles are respectively provided. The through holes of the valve are in communication. Then, the plunger A30 and the plunger B31 are simultaneously advanced by the motor A20, and then stopped abruptly, whereby a small amount of liquid material is dripped from the nozzle with high precision. This action is repeated several times to perform the discharge operation until the liquid material sucked into the metering holes A64 and B65 is exhausted.
在本實施例之排出裝置中亦可將計量孔、柱塞及噴嘴配置二個以上。又,本實施例之排出裝置當然亦可搭載於實施例1之塗佈裝置5。In the discharge device of this embodiment, two or more metering holes, plungers, and nozzles may be disposed. Further, the discharge device of the present embodiment can of course be mounted on the coating device 5 of the first embodiment.
本發明適用於平面顯示器製造步驟,例如液晶面板製造步驟中之液晶滴下步驟等領域。The present invention is applicable to a flat panel display manufacturing step, such as a liquid crystal dropping step in a liquid crystal panel manufacturing step.
1...滴下裝置1. . . Drip device
5...塗佈裝置5. . . Coating device
6...平台6. . . platform
7...架台7. . . shelf
10...基座10. . . Pedestal
11...板A11. . . Board A
12...板B12. . . Board B
13...板C13. . . Board C
20...馬達A20. . . Motor A
21...滑座twenty one. . . Slide
22...滑件twenty two. . . Slider
30...柱塞A30. . . Plunger A
31...柱塞B31. . . Plunger B
32...計量管A32. . . Measuring tube A
33...計量管B33. . . Metering tube B
34...螺絲A34. . . Screw A
35...螺絲B35. . . Screw B
36...計量塊體36. . . Metering block
40...儲存容器40. . . Storage container
41...液體輸送管41. . . Liquid delivery tube
42...壓力供應管42. . . Pressure supply pipe
43...液體輸送管43. . . Liquid delivery tube
44...液體材料44. . . Liquid material
50...閥體50. . . Valve body
51...馬達B51. . . Motor B
52...齒輪組52. . . Gear set
53...軸A53. . . Axis A
54...軸B54. . . Axis B
55...噴嘴A55. . . Nozzle A
56...噴嘴B56. . . Nozzle B
57...閥A57. . . Valve A
58...閥B58. . . Valve B
59...液體材料供應口59. . . Liquid material supply port
60...控制裝置60. . . Control device
61...閥插設孔A61. . . Valve insertion hole A
62...閥插設孔B62. . . Valve insertion hole B
63...儲存部63. . . Storage department
64...計量孔A64. . . Metering hole A
65...計量孔B65. . . Metering hole B
70...旋轉檢測機構70. . . Rotating detection mechanism
71...感測器71. . . Sensor
72‧‧‧檢測板72‧‧‧Test board
81‧‧‧可動框體A81‧‧‧ movable frame A
82‧‧‧可動框體B82‧‧‧ movable frame B
圖1為實施例1滴下裝置之正面外觀圖。Fig. 1 is a front elevational view showing the dripping device of the first embodiment.
圖2為圖1所示裝置之側面外觀圖。Figure 2 is a side elevational view of the apparatus of Figure 1.
圖3為圖2中虛線位置之正面剖視圖。Figure 3 is a front cross-sectional view of the position of the broken line in Figure 2.
圖4為圖1中虛線位置之側面剖視圖。Figure 4 is a side cross-sectional view of the position of the broken line in Figure 1.
圖5為搭載有圖1所示之滴下裝置的塗佈裝置之立體圖。Fig. 5 is a perspective view of a coating device on which the dropping device shown in Fig. 1 is mounted.
圖6為實施例2滴下裝置之正面外觀圖。Fig. 6 is a front elevational view showing the dripping device of the second embodiment.
圖7為圖6所示裝置之側面外觀圖。Figure 7 is a side elevational view of the apparatus of Figure 6.
圖8為圖7虛線位置之正面剖視圖。Figure 8 is a front cross-sectional view of the position of the broken line of Figure 7.
10‧‧‧基座10‧‧‧ Pedestal
11‧‧‧板A11‧‧‧ Board A
12‧‧‧板B12‧‧‧ Board B
13‧‧‧板C13‧‧‧ Board C
20‧‧‧馬達A20‧‧‧Motor A
21‧‧‧滑座21‧‧‧Slide
22‧‧‧滑件22‧‧‧Sliding parts
30‧‧‧柱塞A30‧‧‧Plunger A
31‧‧‧柱塞B31‧‧‧Plunger B
32‧‧‧計量管A32‧‧‧Measuring tube A
33‧‧‧計量管B33‧‧‧Measuring tube B
34‧‧‧螺絲A34‧‧‧ Screw A
35‧‧‧螺絲B35‧‧‧ Screw B
50‧‧‧閥體50‧‧‧ valve body
51‧‧‧馬達B51‧‧‧Motor B
55‧‧‧噴嘴A55‧‧‧Nozzle A
56‧‧‧噴嘴B56‧‧‧Nozzle B
57‧‧‧閥A57‧‧‧Valve A
58‧‧‧閥B58‧‧‧Valve B
Claims (13)
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JP2008039608 | 2008-02-21 |
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JP (1) | JP5340181B2 (en) |
KR (1) | KR101534118B1 (en) |
CN (1) | CN102006943B (en) |
HK (1) | HK1150996A1 (en) |
TW (1) | TWI457181B (en) |
WO (1) | WO2009104421A1 (en) |
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TWI717320B (en) * | 2014-06-06 | 2021-02-01 | 日商武藏工業股份有限公司 | Coating device and dropping method using the device |
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JP6006509B2 (en) * | 2012-03-08 | 2016-10-12 | 武蔵エンジニアリング株式会社 | Liquid dispensing apparatus and coating apparatus |
JP6364168B2 (en) | 2013-09-30 | 2018-07-25 | 武蔵エンジニアリング株式会社 | Liquid material discharging apparatus and coating method |
US9772524B2 (en) * | 2014-01-23 | 2017-09-26 | Sakai Display Products Corporation | Liquid crystal dropping device and method of manufacturing liquid crystal display apparatus |
CA3010332C (en) * | 2016-01-16 | 2023-12-19 | Musashi Engineering, Inc. | Liquid material ejection device |
JP6739786B2 (en) | 2016-05-30 | 2020-08-12 | 武蔵エンジニアリング株式会社 | Liquid material discharge device, coating device and coating method thereof |
JP6842152B2 (en) * | 2016-05-31 | 2021-03-17 | 武蔵エンジニアリング株式会社 | Liquid material discharge device, its coating device and coating method |
KR102391790B1 (en) * | 2016-12-22 | 2022-04-27 | 무사시 엔지니어링 가부시키가이샤 | Liquid discharging device, coating device provided with copper discharging device, and coating method therefor |
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JP6850502B2 (en) * | 2019-11-29 | 2021-03-31 | 武蔵エンジニアリング株式会社 | Liquid material discharge device and discharge method and coating device |
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Also Published As
Publication number | Publication date |
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KR20100116666A (en) | 2010-11-01 |
KR101534118B1 (en) | 2015-07-06 |
TW200946243A (en) | 2009-11-16 |
HK1150996A1 (en) | 2012-01-20 |
CN102006943B (en) | 2013-07-24 |
WO2009104421A1 (en) | 2009-08-27 |
JPWO2009104421A1 (en) | 2011-06-23 |
CN102006943A (en) | 2011-04-06 |
JP5340181B2 (en) | 2013-11-13 |
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