TWI455789B - - Google Patents
Info
- Publication number
- TWI455789B TWI455789B TW100142664A TW100142664A TWI455789B TW I455789 B TWI455789 B TW I455789B TW 100142664 A TW100142664 A TW 100142664A TW 100142664 A TW100142664 A TW 100142664A TW I455789 B TWI455789 B TW I455789B
- Authority
- TW
- Taiwan
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
CN201110451213.2A CN103137532B (zh) | 2011-11-22 | 2011-12-23 | 共平面三轴定位装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201321120A TW201321120A (zh) | 2013-06-01 |
TWI455789B true TWI455789B (zh) | 2014-10-11 |
Family
ID=48497169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN103137532B (zh) |
TW (1) | TW201321120A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725500B (zh) * | 2019-07-31 | 2021-04-21 | 和碩聯合科技股份有限公司 | 扭力測試設備及其待測物定位座 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201509587A (zh) * | 2013-09-05 | 2015-03-16 | yuan-long Lai | 多軸加工機 |
TWI487593B (zh) * | 2013-12-30 | 2015-06-11 | 中原大學 | 三軸共平面斜向驅動式平台 |
CN113691098B (zh) * | 2021-08-09 | 2023-01-24 | 中南大学 | 用于光电子器件封装的单边直线电机驱动的共面运动装置 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5163651A (en) * | 1990-03-13 | 1992-11-17 | Ntn Corporation | Movable table |
JP2001238485A (ja) * | 2000-02-21 | 2001-08-31 | Sharp Corp | ステージ装置 |
CN1921026A (zh) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子***技术有限公司 | X-Y-θ三自由度微动平台 |
TW200734112A (en) * | 2006-03-10 | 2007-09-16 | Icf Technology Co Ltd | Rotation module, sliding rotation module and double housing apparatus |
JP2007266585A (ja) * | 2006-03-02 | 2007-10-11 | Sumitomo Heavy Ind Ltd | ステージ装置 |
TWM324557U (en) * | 2007-06-08 | 2008-01-01 | Smart Chain Entpr Co Ltd | Linear moving apparatus of positioning theta angle of main axis |
EP1632953B1 (en) * | 2003-06-27 | 2010-05-05 | CKD Corporation | Supporting unit, and moving table device and linear-motion guiding device using the supporting unit |
CN201530059U (zh) * | 2009-04-30 | 2010-07-21 | 苏州德龙激光有限公司 | 新型应用于LED激光切割设备的X-Y-θ运动平台 |
TWM400904U (en) * | 2009-12-11 | 2011-04-01 | mao-xiang Wu | Alignment stage |
TWM408100U (en) * | 2007-01-17 | 2011-07-21 | Qiu Ren You | Four-drive alignment mechanism |
CN201954205U (zh) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | 精密气浮工作台 |
TW201129987A (en) * | 2007-01-17 | 2011-09-01 | Qiu Ren You | Rotation unit for 4-driving alignment mechanism |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2700050B2 (ja) * | 1994-10-04 | 1998-01-19 | ヒーハイスト精工株式会社 | 縦横移動旋回テーブル機構 |
WO2007049345A1 (ja) * | 2005-10-26 | 2007-05-03 | Iwasaki System Co., Ltd. | テーブルの位置決め制御装置 |
WO2007055339A1 (ja) * | 2005-11-11 | 2007-05-18 | Hephaist Seiko Co., Ltd. | 三次元位置決めテーブル |
JP2010274429A (ja) * | 2009-05-26 | 2010-12-09 | Ihi Corp | アライメントステージ |
-
2011
- 2011-11-22 TW TW100142664A patent/TW201321120A/zh unknown
- 2011-12-23 CN CN201110451213.2A patent/CN103137532B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5163651A (en) * | 1990-03-13 | 1992-11-17 | Ntn Corporation | Movable table |
JP2001238485A (ja) * | 2000-02-21 | 2001-08-31 | Sharp Corp | ステージ装置 |
EP1632953B1 (en) * | 2003-06-27 | 2010-05-05 | CKD Corporation | Supporting unit, and moving table device and linear-motion guiding device using the supporting unit |
CN1921026A (zh) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子***技术有限公司 | X-Y-θ三自由度微动平台 |
JP2007266585A (ja) * | 2006-03-02 | 2007-10-11 | Sumitomo Heavy Ind Ltd | ステージ装置 |
TW200734112A (en) * | 2006-03-10 | 2007-09-16 | Icf Technology Co Ltd | Rotation module, sliding rotation module and double housing apparatus |
TWM408100U (en) * | 2007-01-17 | 2011-07-21 | Qiu Ren You | Four-drive alignment mechanism |
TW201129987A (en) * | 2007-01-17 | 2011-09-01 | Qiu Ren You | Rotation unit for 4-driving alignment mechanism |
TWM324557U (en) * | 2007-06-08 | 2008-01-01 | Smart Chain Entpr Co Ltd | Linear moving apparatus of positioning theta angle of main axis |
CN201530059U (zh) * | 2009-04-30 | 2010-07-21 | 苏州德龙激光有限公司 | 新型应用于LED激光切割设备的X-Y-θ运动平台 |
TWM400904U (en) * | 2009-12-11 | 2011-04-01 | mao-xiang Wu | Alignment stage |
CN201954205U (zh) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | 精密气浮工作台 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725500B (zh) * | 2019-07-31 | 2021-04-21 | 和碩聯合科技股份有限公司 | 扭力測試設備及其待測物定位座 |
Also Published As
Publication number | Publication date |
---|---|
CN103137532B (zh) | 2015-10-21 |
TW201321120A (zh) | 2013-06-01 |
CN103137532A (zh) | 2013-06-05 |