TWI424153B - Micro-sensing clamping device - Google Patents
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Description
本發明係關於一種夾持裝置，詳言之，係關於一種微感知夾持裝置。The present invention relates to a clamping device, and more particularly to a micro-sensing clamping device.
在習知精微夾具的領域中，皆採用半導體製程所製作的微應變規夾持裝置作為夾持結構，感知的能力來自於夾持的過程中應變規的變形偵測。然而，這種習知夾具的夾持原理在處理微米級的元件時有一個很難克服的缺點，很難避免微小元件之間的黏滯力，容易造成夾持放鬆的過程中，微米元件黏滯於夾臂上，造成夾持取放的困難。In the field of conventional fine fixtures, the micro-strain gauge clamping device made by the semiconductor process is used as the clamping structure, and the sensing capability comes from the deformation detection of the strain gauge during the clamping process. However, the clamping principle of the conventional jig has a disadvantage that is difficult to overcome when processing micron-sized components. It is difficult to avoid the viscous force between the micro-components, and it is easy to cause the micro-component to stick during the process of clamping relaxation. It is stuck on the clamp arm, which makes it difficult to hold the handle.
以下為關於精微夾具之先前技術文獻。The following is a prior art document on fine fixtures.
先前技術文獻1(夾持裝置，中華民國專利公開第200923456號，鴻海精密工業股份有限公司)：Prior Art Document 1 (Clamping Device, Republic of China Patent Publication No. 200923456, Hon Hai Precision Industry Co., Ltd.):
該專利揭示一種夾持裝置，用於夾持具有一外圓周面之元件(如鏡片)，當利用夾持裝置對具有一外圓周面之元件進行夾持時，由於第一夾爪、第二夾爪及連接桿與元件之外圓周面形成三個不同之接觸位置，故該夾持裝置可顯著提高其對元件進行夾持時之操作穩定性。The patent discloses a clamping device for clamping an element (such as a lens) having an outer circumferential surface, when the component having an outer circumferential surface is clamped by the clamping device, due to the first jaw, the second The jaws and the connecting rod form three different contact positions with the outer circumferential surface of the component, so that the clamping device can significantly improve the operational stability when the component is clamped.
該專利所提出的夾持機構上並無整合力量感測器，因此無法得知並控制實際夾持時所施加的力量，在某些夾持應用中，可能會造成被夾持元件的變形。The clamping mechanism proposed in this patent does not have an integrated force sensor, so the force applied during actual clamping cannot be known and controlled, and in some clamping applications, deformation of the clamped component may occur.
先前技術文獻2(具有一整合力量感測器之夾緊元件，中華民國專利公告第I231244號，瑞士之艾斯克通商公司)：Prior Art Document 2 (clamping element with integrated force sensor, Republic of China Patent Publication No. I231244, Asker Trading Company of Switzerland):
該專利提出一種夾緊元件，能夠在基板傳送過程中探測出基板被掛住或卡住，而在基板受到損害之前停止傳送裝置。夾緊元件上的兩個支腿分別帶有用於夾緊基板的夾爪，這兩個夾爪都各有一個夾板，能夠相對於相應的支腿沿傳送方向移動，而感測器檢測第一夾板相對第一支腿的偏轉，一旦所測的偏轉超過一個預定臨界值，夾緊元件就會張開。This patent proposes a clamping element that detects that the substrate is caught or jammed during substrate transfer and stops the transfer device before the substrate is damaged. The two legs on the clamping element respectively have jaws for clamping the substrate, and each of the two jaws has a clamping plate which is movable in the conveying direction with respect to the corresponding leg, and the sensor detects the first The deflection of the splint relative to the first leg, the clamping element will open once the measured deflection exceeds a predetermined threshold.
該專利雖然可透過感測器監測夾持狀態，但對於特定的被夾持元件，在夾爪放開時，元件可能會附著在夾板上，而必須透過外力才能讓被夾持元件脫離夾板，此一現象在微米元件尤其明顯。Although the patent can monitor the clamping state through the sensor, for a specific clamped component, when the jaw is released, the component may adhere to the clamping plate, and the external force must be passed to release the clamped component from the clamping plate. This phenomenon is especially noticeable in micron components.
先前技術文獻3(微機電用夾爪構造，中華民國專利公告第I254697號，國立高雄應用科技大學)：Prior Art Document 3 (Micro-electromechanical jaw construction, Republic of China Patent Notice No. I254697, National Kaohsiung University of Applied Sciences):
該專利提出一種微機電用夾爪構造，由促動部輸出抵推動力，並由抵推部帶動側臂部並進一步造成夾持部連動，以完成夾取動作。此一構造可簡化操作夾取動作，免除傳統額外之齒輪或凸輪等傳動機構。The patent proposes a microelectromechanical jaw structure, wherein the actuation portion outputs an urging force, and the urging portion drives the side arm portion and further causes the nip portion to interlock to complete the gripping action. This configuration simplifies the operation of the gripping action, eliminating the need for conventional additional gears or cams.
該專利所提出的夾爪構造雖可夾持微米元件，但夾爪構造中同樣沒有整合力量感測器，無法有效控制夾持力道，且亦沒有對夾持微米元件所可能發生的黏滯問題提出解決辦法。Although the jaw structure proposed by the patent can hold the micro-components, the jaw structure also has no integrated force sensor, which can not effectively control the clamping force, and there is no viscous problem that may occur to clamp the micro-components. Propose a solution.
先前技術文獻4(一種壓電式柔性驅動放大可調量程微夾持手，中國大陸專利申請第01140450.7號，中國清華大學)：Prior Art Document 4 (a piezoelectric flexible drive amplification adjustable range micro-gripper, Chinese Patent Application No. 01140450.7, Tsinghua University, China):
該專利提出一種壓電式柔性驅動放大可調量程微夾持手，克服已有技術的不足之處，採用壓電驅動輸出位移，利用柔性鉸鏈新型機械增幅機構，按照槓桿原理對微位移進行定量放大，並使夾持範圍可調。The patent proposes a piezoelectric flexible drive amplification adjustable range micro-gripper to overcome the shortcomings of the prior art, adopting piezoelectric drive output displacement, and utilizing a flexible hinge new mechanical amplifying mechanism to quantify the micro-displacement according to the principle of leverage. Zoom in and make the clamping range adjustable.
該專利的提出的夾持構造中包括一尺寸預調機構，可對小尺寸範圍內不同尺寸量級和形狀的微器件進行操作，但夾爪構造中同樣沒有整合力量感測器，無法有效控制夾持力道。The proposed clamping structure of the patent includes a size pre-adjusting mechanism for operating micro-devices of different sizes and shapes in a small size range, but there is also no integrated force sensor in the jaw configuration, which cannot be effectively controlled. Clamp the force.
先前技術文獻5(靜電力驅動的三臂微型夾持裝置，中國大陸專利申請第200510094988.3號，中國科學技術大學)：Prior Art Document 5 (three-arm micro-clamping device driven by electrostatic force, Chinese Patent Application No. 200510094988.3, University of Science and Technology of China):
該專利提出由夾持機構與高頻驅動電源兩部分組成之靜電力驅動三臂微型夾持裝置，三根相互平行的夾持臂分別設有電極且與高頻驅動電源連通；高頻驅動電源在一個周期內三路相繼處於高電平，相位差120度，一個電壓周期內三路中只有一路處於高電平。The patent proposes an electrostatic force driven by a clamping mechanism and a high-frequency driving power source to drive a three-arm micro-clamping device, three mutually parallel clamping arms respectively provided with electrodes and connected with a high-frequency driving power source; Three channels are successively at a high level in one cycle, with a phase difference of 120 degrees, and only one of the three paths is at a high level in one voltage cycle.
該專利所提出的微型夾持裝置雖實際測試可應用於50微米小球的夾持，但夾持臂本身僅具有張開/合攏的動作，無有有效控制夾持力道，有可能會造成被夾持工件的塑性變形。Although the micro-clamping device proposed in the patent can be applied to the clamping of a 50 micrometer ball, the clamping arm itself only has an opening/closing action, and there is no effective control of the clamping force, which may cause Plastic deformation of the clamping workpiece.
先前技術文獻6(大範圍多尺度集成微力檢測與無線反饋的雙晶片微夾持器，中國大陸專利申請第200810117811.4號，北京理工大學)：Prior Art Document 6 (Wide-area multi-scale integrated micro-force detection and wireless feedback dual-wafer micro-gripper, Chinese Patent Application No. 200810117811.4, Beijing Institute of Technology):
該專利提出一種集成微力檢測與無線反饋的微夾持器，該夾持器可夾持0.1 mm以上的多尺度的零件，能滿足微操作系統對微夾持器的定位精度要求，可檢測微小的夾持力，並將檢測信號用無線通訊接口傳輸到上位機，由上位機輸出反饋控制信號，調節壓電陶瓷雙晶片的位移，保證能安全的夾緊零件。The patent proposes a micro-gripper that integrates micro-force detection and wireless feedback. The holder can hold multi-scale parts of 0.1 mm or more, which can meet the micro-operator's positioning accuracy requirements for micro-gripper, and can detect tiny The clamping force is transmitted to the upper computer by the wireless communication interface, and the feedback signal is outputted by the upper computer to adjust the displacement of the piezoelectric ceramic bimorph to ensure safe clamping of the parts.
該專利所提出的微夾持器可透過構造內的微力傳感模塊器監測夾持狀態，能確保可靠夾持且不會因夾持作用力過大而破壞工件，但沒有涉及夾持微米元件所可能發生的黏滯問題。The micro-gripper proposed by the patent can monitor the clamping state through the micro-force sensing module in the structure, can ensure reliable clamping and does not damage the workpiece due to excessive clamping force, but does not involve clamping the micro-component. Possible viscous problems.
因此，實有必要提供一種創新且具進步性的微感知夾持裝置，以解決上述問題。Therefore, it is necessary to provide an innovative and progressive micro-sensing clamping device to solve the above problems.
本發明提供一種微感知夾持裝置，包括：二夾持單元、一移動單元及一控制單元。該二夾持單元之至少其中之一包括一振盪裝置，該振盪裝置用以產生振盪。該移動單元連接該等夾持單元。該控制單元連接該等夾持單元及該移動單元，用以控制該振盪裝置產生振盪且監控該振盪裝置之振盪之頻率及/或振幅變化，以及依據該振盪裝置之振盪之頻率及/或振幅變化控制該移動單元移動該等夾持單元，以夾持、保持或放鬆一待夾持物件。The invention provides a micro-sensing clamping device, comprising: two clamping units, a moving unit and a control unit. At least one of the two clamping units includes an oscillating device for generating an oscillation. The mobile unit is connected to the clamping units. The control unit is connected to the clamping unit and the moving unit for controlling oscillation of the oscillating device and monitoring the frequency and/or amplitude variation of the oscillation of the oscillating device, and the frequency and/or amplitude of the oscillation according to the oscillating device The change controls the mobile unit to move the clamping units to grip, hold or relax a piece to be gripped.
在本發明之微感知夾持裝置中，至少其中之一夾持單元具有一音叉元件，由於音叉元件具有感知功能，故本發明之微感知夾持裝置不僅能夾取元件，並且能感知該等夾持單元是否有確實夾取到該待夾持物件，如此提高夾持的智能程度。並且，音叉元件可依據受到外力或變形而輸出不同大小之訊號，進而控制夾持力的大小，避免造成該待夾持物件因夾持力過大損壞或因夾持力不足造成脫離滑落的問題。In the micro-perceptive clamping device of the present invention, at least one of the clamping units has a tuning fork element, and the micro-perceptive clamping device of the present invention not only can grip the components, but also can sense the tuning fork components. Whether the clamping unit is actually gripped to the object to be clamped, thus improving the intelligence of the clamping. Moreover, the tuning fork component can output signals of different magnitudes according to external force or deformation, thereby controlling the magnitude of the clamping force, and avoiding the problem that the object to be clamped is damaged due to excessive clamping force or slipping off due to insufficient clamping force.
再者，本發明之微感知夾持裝置利用加大音叉元件之振幅，使得該等夾持單元能順利擺脫與該待夾持物件之間的表面黏滯力，使得該等夾持單元能順利的進行夾取、放鬆該待夾持物件，完全克服該待夾持物件的夾持問題，且可達到精密控制取放的目標。Furthermore, the micro-sensing clamping device of the present invention utilizes the amplitude of the tuning fork element to enable the clamping unit to smoothly get rid of the surface viscous force between the object to be clamped, so that the clamping unit can smoothly The clamping and relaxing of the object to be clamped completely overcomes the clamping problem of the object to be clamped, and the target of precise control of pick-and-place can be achieved.
另外，本發明之微感知夾持裝置相較於習知夾持裝置需要透過其他影像或是導電電路檢知裝置而言，具有較高之實用性。In addition, the micro-sensing clamping device of the present invention has higher practicability than other conventional images or conductive circuit detecting devices.
圖1顯示本發明微感知夾持裝置之示意圖。本發明之微感知夾持裝置1包括二夾持單元2、一移動單元3及一控制單元4。該二夾持單元2之至少其中之一包括一振盪裝置21，該振盪裝置21用以產生振盪。Figure 1 shows a schematic view of a micro-perceptual clamping device of the present invention. The micro-sensing clamping device 1 of the present invention comprises two clamping units 2, a moving unit 3 and a control unit 4. At least one of the two clamping units 2 includes an oscillating device 21 for generating oscillations.
在本實施例中，每一夾持單元2包括一個該振盪裝置21，且每一夾持單元2另包括一夾持臂22。該等夾持臂22之末端可為一膨大部，例如球形或矩形(如圖2a、2c所示)，或者，該等夾持臂22之末端可為一縮小部，例如尖錐形(如圖2b所示)。In the present embodiment, each of the clamping units 2 includes one of the oscillating devices 21, and each of the clamping units 2 further includes a clamping arm 22. The ends of the clamping arms 22 may be an enlarged portion, such as a spherical or rectangular shape (as shown in Figures 2a, 2c), or the ends of the clamping arms 22 may be a reduced portion, such as a pointed cone (e.g. Figure 2b).
在本實施例中，每一振盪裝置21係包括一振盪源211及一音叉元件212。該振盪源211可產生一固定頻率之振盪，該音叉元件212依據該振盪源211固定頻率之振盪而產生對應之振盪。In the present embodiment, each of the oscillating devices 21 includes an oscillating source 211 and a tuning fork member 212. The oscillating source 211 can generate an oscillation of a fixed frequency, and the tuning fork component 212 generates a corresponding oscillation according to the oscillation of the fixed frequency of the oscillating source 211.
該振盪源211可為壓電振盪元件。在本實施例中，該振盪源211係利用一頻率訊號產生器(圖中未示)輸出電子訊號，並搭配一壓電元件來產生物理振盪，但不以此為限。該振盪源211所輸出之振盪頻率可為該音叉元件212之共振頻率。每一夾持單元2之夾持臂22連接該音叉元件212，且與該音叉元件212產生相應之振盪。The oscillation source 211 can be a piezoelectric oscillating element. In this embodiment, the oscillation source 211 outputs an electronic signal by using a frequency signal generator (not shown), and is combined with a piezoelectric element to generate physical oscillation, but is not limited thereto. The oscillation frequency output by the oscillation source 211 may be the resonance frequency of the tuning fork element 212. The clamping arm 22 of each clamping unit 2 is coupled to the tuning fork member 212 and generates a corresponding oscillation with the tuning fork member 212.
在本實施例中，該移動單元3係為線性移動裝置。該移動單元3連接該等夾持單元2，用以移動該等夾持單元2，以調整該等音叉元件212間之距離，亦即調整該等夾持臂22間之距離。In the present embodiment, the mobile unit 3 is a linear mobile device. The moving unit 3 is connected to the clamping unit 2 for moving the clamping unit 2 to adjust the distance between the tuning fork elements 212, that is, to adjust the distance between the clamping arms 22.
該控制單元4連接該等夾持單元2及該移動單元3，用以控制該振盪裝置21產生振盪且監控該振盪裝置21之振盪之頻率及/或振幅變化，以及依據該振盪裝置21之振盪之頻率及/或振幅變化控制該移動單元3移動該等夾持單元2，以夾持、保持或放鬆一待夾持物件5。The control unit 4 is connected to the clamping unit 2 and the moving unit 3 for controlling the oscillation of the oscillating device 21 and monitoring the frequency and/or amplitude variation of the oscillation of the oscillating device 21, and the oscillation according to the oscillating device 21 The frequency and/or amplitude variation controls the mobile unit 3 to move the clamping units 2 to clamp, hold or relax a piece of object 5 to be held.
在本實施例中，該控制單元4連接該振盪源211及該音叉元件212，以控制該振盪源211之振盪頻率、振幅，以及偵測該音叉元件212所對應產生之振盪頻率、振幅，且對該振盪源211之振盪頻率及該音叉元件212之對應振盪頻率、振幅進行比對，以作為控制該移動單元3移動之參考。In this embodiment, the control unit 4 is connected to the oscillation source 211 and the tuning fork component 212 to control the oscillation frequency and amplitude of the oscillation source 211, and detect the oscillation frequency and amplitude generated by the tuning fork component 212, and The oscillation frequency of the oscillation source 211 and the corresponding oscillation frequency and amplitude of the tuning fork element 212 are compared as a reference for controlling the movement of the mobile unit 3.
當該等夾持單元2之夾持臂22與一待夾持物件5接觸(若無夾持臂22，則由音叉元件212與該待夾持物件接觸)時，接觸該待夾持物件5之音叉元件212所產生之振盪頻率與振幅即會改變，而該控制單元4即係藉由比對該振盪源211之振盪頻率及該音叉元件212之振盪頻率、振幅來判斷該音叉元件212與該待夾持物件5之間的接觸狀態。When the clamping arm 22 of the clamping unit 2 is in contact with a member to be clamped 5 (if the tuning fork member 22 is in contact with the object to be clamped without the clamping arm 22), the object to be clamped is contacted. The oscillation frequency and amplitude generated by the tuning fork component 212 are changed, and the control unit 4 determines the tuning fork component 212 by comparing the oscillation frequency of the oscillation source 211 with the oscillation frequency and amplitude of the tuning fork component 212. The state of contact between the articles 5 to be clamped.
當音叉元件212受到的外力越強或變形越大時，音叉元件212的輸出訊號將會進而改變，因此可藉由音叉元件212輸出的訊號大小，進而控制夾持力的大小。例如，當音叉元件212與該待夾持物件5之間的接觸力大小改變時，會影響音叉元件212之振盪頻率、振幅，藉由觀察音叉元件212輸出之頻率、振幅可達到控制音叉元件212之夾持力大小。當完成夾持並將該待夾持物件5移動至一預設位置後，加大振盪該等夾持臂22的振幅，克服該等夾持臂22與該待夾持物件5間的表面黏滯力，以放鬆該待夾持物件5。When the external force received by the tuning fork member 212 is stronger or the deformation is larger, the output signal of the tuning fork member 212 will be further changed, so that the magnitude of the signal can be controlled by the tuning fork member 212 to control the magnitude of the clamping force. For example, when the magnitude of the contact force between the tuning fork member 212 and the object to be clamped 5 is changed, the oscillation frequency and amplitude of the tuning fork member 212 are affected. By observing the frequency and amplitude of the output of the tuning fork member 212, the tuning fork member 212 can be controlled. The amount of clamping force. After the clamping is completed and the object to be clamped 5 is moved to a predetermined position, the amplitude of the clamping arms 22 is increased to overcome the surface adhesion between the clamping arms 22 and the object to be clamped 5. The stagnation force relaxes the object to be clamped 5.
藉此，本發明之微感知夾持裝置1可夾持500 μm以下之微小物件而不會有微元件夾持之黏滯問題。可理解的是，本發明之微感知夾持裝置1亦可夾持500 μm以上較大之物件。Thereby, the micro-perceptive clamping device 1 of the present invention can hold minute objects of 500 μm or less without the viscous problem of the micro-component clamping. It can be understood that the micro-perceptive clamping device 1 of the present invention can also clamp larger objects of 500 μm or more.
請參考圖3至圖5，本發明之微感知夾持裝置1之運作詳細說明如下：Referring to FIG. 3 to FIG. 5, the operation of the micro-sensing clamping device 1 of the present invention is described in detail as follows:
在未接觸該待夾持物件5之前，該等音叉元件212及該等夾持臂22係持續以一固定之振盪頻率進行振盪，且該振盪頻率並不會改變。該控制單元4控制該移動單元3之運動，以縮小該等夾持臂22間之夾持距離，至該等夾持臂22都接觸到該待夾持物件5，同時隨時監控該等音叉元件212的之振盪頻率及/或振幅變化(即該等夾持臂22之振盪頻率及/或振幅變化)。該等夾持臂22之振盪使得該等夾持臂22有感知能力。Before the object 5 to be clamped, the tuning fork member 212 and the clamping arms 22 continue to oscillate at a fixed oscillation frequency, and the oscillation frequency does not change. The control unit 4 controls the movement of the moving unit 3 to reduce the clamping distance between the clamping arms 22 until the clamping arms 22 are in contact with the object to be clamped 5, and the tuning fork components are monitored at any time. The oscillation frequency and/or amplitude variation of 212 (i.e., the oscillation frequency and/or amplitude of the clamping arms 22). The oscillation of the gripping arms 22 causes the gripping arms 22 to have a sensing capability.
可理解的是，在縮小該等夾持臂22間之夾持距離的動作中，可為同時移動二夾持臂22之方式，亦可為先移動一夾持臂22再移動另一夾持臂22之方式。It can be understood that in the action of reducing the clamping distance between the clamping arms 22, the two clamping arms 22 can be moved at the same time, or one clamping arm 22 can be moved first and then the other clamping can be moved. The way of the arm 22.
當該等夾持臂22都接觸到該待夾持物件5之後，振盪頻率及/或振幅產生變化，觀察該等音叉元件212所輸出之頻率、振幅大小，並依據輸出之頻率、振幅調整該移動單元3移動該等夾持臂22的速度，且持續慢速收縮該等夾持臂22間之距離，直到夾持該待夾持物件5之夾持力達到一預定夾持保持力，此時，即完成該待夾持物件5之夾持動作。接著，搬運該待夾持物件5至一預設位置。其中，當夾持該待夾持物件5之夾持力達到該預定夾持保持力時，較佳地，該等音叉元件212及該等夾持臂22係停止振盪。After the clamping arms 22 are in contact with the object to be clamped 5, the oscillation frequency and/or the amplitude are changed, and the frequency and amplitude of the output of the tuning fork member 212 are observed, and the frequency and amplitude are adjusted according to the output frequency and amplitude. The moving unit 3 moves the speed of the clamping arms 22 and continuously reduces the distance between the clamping arms 22 until the clamping force of the object to be clamped 5 reaches a predetermined clamping holding force. At this time, the clamping action of the object to be clamped 5 is completed. Next, the object to be clamped 5 is transported to a predetermined position. Wherein, when the clamping force for holding the object to be clamped 5 reaches the predetermined clamping holding force, preferably, the tuning fork member 212 and the clamping arms 22 stop oscillating.
當該待夾持物件5搬運至一預設位置之後，該控制單元4控制該移動單元3放鬆該等夾持臂22的夾持力直到脫離該待夾持物件5之表面，同時該控制單元4控制該振盪源211加大振盪該等音叉元件212的振幅(亦即加大振盪該等夾持臂22的振幅)，如此可克服該等夾持臂22與該待夾持物件5間的表面黏滯力，以順利放鬆該待夾持物件5。該等音叉元件212及該等夾持臂22在放鬆並振盪與準備夾持步驟中的振幅係為不同。After the object to be clamped 5 is transported to a predetermined position, the control unit 4 controls the moving unit 3 to relax the clamping force of the clamping arms 22 until the surface of the object to be clamped 5 is detached, and the control unit 4 controlling the oscillation source 211 to increase the amplitude of the tuning fork element 212 (ie, increasing the amplitude of the clamping arms 22), so as to overcome the between the clamping arms 22 and the object to be clamped 5 The surface is viscous to smoothly relax the object to be clamped 5. The tuning fork elements 212 and the clamping arms 22 are different in the amplitude of the relaxation and oscillation and the preparation of the clamping step.
在本發明之微感知夾持裝置1中，至少其中之一夾持單元2具有一音叉元件212，由於音叉元件212具有感知功能，故本發明之微感知夾持裝置1不僅能夾取元件，並且能感知該等夾持單元2是否有確實夾取到該待夾持物件5，如此提高夾持的智能程度。In the micro-perceptive clamping device 1 of the present invention, at least one of the clamping units 2 has a tuning fork member 212. Since the tuning fork member 212 has a sensing function, the micro-perceptive clamping device 1 of the present invention can not only grip components, Moreover, it can be sensed whether the clamping unit 2 is indeed clamped to the object to be clamped 5, thus improving the intelligence of the clamping.
再者，本發明之微感知夾持裝置1利用加大音叉元件212之振幅，使得該等夾持單元2能順利擺脫與該待夾持物件5之間的表面黏滯力(尤其微米元件)，使得該等夾持單元2能順利的進行夾取、放鬆該待夾持物件5，完全克服該待夾持物件5的夾持問題，且可達到精密控制取放的目標。Furthermore, the micro-sensing clamping device 1 of the present invention utilizes the amplitude of the tuning fork member 212 to enable the clamping unit 2 to smoothly get rid of the surface viscous force (especially the micro-component) between the object to be clamped 5 and the object to be clamped. Therefore, the clamping unit 2 can smoothly grip and loosen the object to be clamped 5, completely overcome the clamping problem of the object to be clamped 5, and can achieve the goal of precise control of pick-and-place.
另外，本發明之微感知夾持裝置1相較於習知夾持裝置需要透過其他影像或是導電電路檢知裝置而言，具有較高之實用性。並且，當音叉元件212受到的外力越強或變形越大時，音叉元件212的輸出訊號將會進而改變，因此可藉由音叉元件212輸出的訊號大小，進而控制夾持力的大小，避免造成該待夾持物件5因夾持力過大損壞或因夾持力不足造成脫離滑落的問題。In addition, the micro-sensing clamping device 1 of the present invention has higher practicability than other conventional images or conductive circuit detecting devices. Moreover, when the external force received by the tuning fork component 212 is stronger or the deformation is larger, the output signal of the tuning fork component 212 will be further changed. Therefore, the magnitude of the signal output by the tuning fork component 212 can be controlled to prevent the clamping force from being generated. The object to be clamped 5 has a problem that the clamping force is excessively damaged or the sliding force is insufficient due to insufficient clamping force.
上述實施例僅為說明本發明之原理及其功效，並非限制本發明。因此習於此技術之人士對上述實施例進行修改及變化仍不脫本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。The above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Therefore, those skilled in the art can make modifications and changes to the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims.
1．．．本發明之微感知夾持裝置1. . . Micro-perceptive clamping device of the invention
2．．．夾持單元2. . . Clamping unit
3．．．移動單元3. . . Mobile unit
4．．．控制單元4. . . control unit
5．．．待夾持物件5. . . Object to be clamped
21．．．振盪裝置twenty one. . . Oscillating device
22．．．夾持臂twenty two. . . Clamping arm
211．．．振盪源211. . . Oscillation source
212．．．音叉元件212. . . Tuning fork component
圖1顯示本發明微感知夾持裝置之示意圖；Figure 1 shows a schematic view of the micro-sensing clamping device of the present invention;
圖2a至2c顯示本發明三種具有不同末端形狀之夾持臂之示意圖；及Figures 2a to 2c show schematic views of three types of gripping arms having different end shapes of the present invention;
圖3至圖5顯示本發明微感知夾持裝置夾持、保持及放鬆一待夾持物件之動作示意圖。3 to 5 are views showing the action of the micro-perceptive clamping device of the present invention for holding, holding and relaxing a object to be clamped.
1．．．本發明之微感知夾持裝置1. . . Micro-perceptive clamping device of the invention
2．．．夾持單元2. . . Clamping unit
3．．．移動單元3. . . Mobile unit
4．．．控制單元4. . . control unit
5．．．待夾持物件5. . . Object to be clamped
21．．．振盪裝置twenty one. . . Oscillating device
22．．．夾持臂twenty two. . . Clamping arm
211．．．振盪源211. . . Oscillation source
212．．．音叉元件212. . . Tuning fork component
Claims (9)
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| TW99141828A TWI424153B (en) | 2010-12-02 | 2010-12-02 | Micro-sensing clamping device |
| CN2010106157094A CN102485439A (en) | 2010-12-02 | 2010-12-30 | Micro-sensing clamping device |
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| CN103252739B (en) * | 2013-05-17 | 2015-04-08 | 沈阳理工大学 | Vacuum absorption type small piece clamping device |
| CN107498574B (en) * | 2017-08-21 | 2019-06-18 | 东莞合安机电有限公司 | A kind of NC film gripping body |
| CN107263515B (en) * | 2017-08-21 | 2018-06-26 | 东莞合安机电有限公司 | A kind of NC films item folds up machine |
| CN108328569A (en) * | 2018-01-30 | 2018-07-27 | 北京理工大学 | A method of active release being carried out to small objects using fluid in microoperation |
| JP2022073193A (en) * | 2020-10-30 | 2022-05-17 | セイコーエプソン株式会社 | Driving method of hand, and the hand |
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| TW424155B (en) * | 1999-05-03 | 2001-03-01 | Ind Tech Res Inst | Beating mode near-field optical microscope |
| US20050161594A1 (en) * | 2004-01-02 | 2005-07-28 | Hollingsworth Russell E. | Plasmon enhanced near-field optical probes |
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| DE19639606C1 (en) * | 1996-09-26 | 1998-01-22 | Fraunhofer Ges Forschung | Gripper system for handling and fine positioning |
| DE10015102C2 (en) * | 2000-03-28 | 2002-11-21 | Fraunhofer Ges Forschung | Method and device for placing small objects, in particular microtechnical components |
| US7735358B2 (en) * | 2003-11-17 | 2010-06-15 | Insitutec, Inc. | Self-sensing tweezer devices and associated methods for micro and nano-scale manipulation and assembly |
| JP4806771B2 (en) * | 2006-04-10 | 2011-11-02 | 国立大学法人 香川大学 | Nano tweezers, gripping method, and gripping force detection device |
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| TW424155B (en) * | 1999-05-03 | 2001-03-01 | Ind Tech Res Inst | Beating mode near-field optical microscope |
| US20050161594A1 (en) * | 2004-01-02 | 2005-07-28 | Hollingsworth Russell E. | Plasmon enhanced near-field optical probes |
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| CN102485439A (en) | 2012-06-06 |
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