TWI418250B - Lighting device - Google Patents
Lighting device Download PDFInfo
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- TWI418250B TWI418250B TW098122296A TW98122296A TWI418250B TW I418250 B TWI418250 B TW I418250B TW 098122296 A TW098122296 A TW 098122296A TW 98122296 A TW98122296 A TW 98122296A TW I418250 B TWI418250 B TW I418250B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/2006—Lamp housings characterised by the light source
- G03B21/2026—Gas discharge type light sources, e.g. arcs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Description
本發明是關於一種具有兩端被密封，在內部相對配置有一對電極，而且至少封入有金屬的放電管，及設於放電管的外方的外管的高壓放電燈的點燈裝置。The present invention relates to a lighting apparatus having a high pressure discharge lamp in which both ends are sealed, a pair of electrodes are disposed opposite each other, and at least a metal discharge tube is sealed, and an outer tube provided outside the discharge tube is provided.
例如在接著劑等的樹脂的硬化處理或印刷基板等的曝光處理中，作為紫外線光源，例如使用著高壓放電燈(紫外線照射燈)。For example, in the curing treatment of a resin such as an adhesive or the exposure treatment of a printed board or the like, as the ultraviolet light source, for example, a high pressure discharge lamp (ultraviolet irradiation lamp) is used.
該高壓放電燈(紫外線照射燈)是在燈點燈時會成為高溫，而如專利文獻1所述地，被冷卻。This high-pressure discharge lamp (ultraviolet irradiation lamp) is heated when the lamp is lit, and is cooled as described in Patent Document 1.
在專利文獻1，記載著在放電管(以下，在專利文獻1中為發光管)的外方設置雙重管構造的水冷套，而在發光管與水冷套內管之間流著冷卻風的技術。Patent Document 1 describes a technique in which a water-cooling jacket having a double pipe structure is provided outside a discharge tube (hereinafter, in the case of an emission tube in Patent Document 1), and a cooling air flows between the arc tube and the water-cooling jacket inner tube. .
在第10圖表示圖示於專利文獻1的第1圖的光源。如同圖所示地，具備紫外線照射燈101與水冷套102及水冷套兩端的端蓋103a、103b。紫外線照射燈101是將一對電極密封於直管狀石英玻璃製發光管106的兩端，而在內部封裝稀有氣體與水銀及金屬鹵化物者。The light source shown in Fig. 1 of Patent Document 1 is shown in Fig. 10. As shown in the figure, the end faces 103a and 103b of the ultraviolet irradiation lamp 101, the water jacket 102, and both ends of the water jacket are provided. The ultraviolet ray irradiation lamp 101 is a case in which a pair of electrodes are sealed at both ends of a straight tubular quartz glass light-emitting tube 106, and a rare gas, mercury, and a metal halide are encapsulated therein.
水冷套102是圓筒狀石英玻璃等的透明材料所成，成為內管121與外管122所成的雙重管構造，又，通過設於兩端外周連接管123a、123b，冷卻水104從外部循環套內，而經由空氣層進行冷卻近接的發光管106，同時吸收從燈101所放射的熱。The water jacket 102 is made of a transparent material such as cylindrical quartz glass, and has a double pipe structure formed by the inner pipe 121 and the outer pipe 122. Further, the cooling water 104 is externally connected by the outer peripheral connecting pipes 123a and 123b. In the circulation sleeve, the adjacent arc tube 106 is cooled via the air layer while absorbing heat radiated from the lamp 101.
在水冷套102一方的端蓋103a設有冷氣的通風口131，而在另一方的端蓋103b設有排氣口132。又，從外部有冷卻風105以箭號所示地從通風口131進到水冷套102的內側，流在發光管106與水冷套102的內管121之空間，從發光管表面奪取熱俾冷卻發光管106。The end cover 103a of one of the water jackets 102 is provided with a vent 131 for cooling air, and the other end cover 103b is provided with an exhaust port 132. Further, from the outside, the cooling air 105 enters the inside of the water jacket 102 from the vent 131 as indicated by an arrow, flows in the space of the arc tube 106 and the inner tube 121 of the water jacket 102, and takes heat from the surface of the tube. Light tube 106.
由專利文獻1的段落號碼[0011]所述的數值例，專利文獻1所述者，可讀取例如發光管106的外徑是24mm，水冷套的內管121為26mm，而兩者的間隙為1mm(=1000μm)。According to the numerical example described in the paragraph number [0011] of Patent Document 1, as described in Patent Document 1, for example, the outer diameter of the arc tube 106 is 24 mm, and the inner tube 121 of the water jacket is 26 mm, and the gap between the two is 26 mm. It is 1 mm (= 1000 μm).
在第10(b)圖表示以垂直於管軸方向的平面切剖專利文獻1所述的發光管106與內管121的斷面圖。Fig. 10(b) is a cross-sectional view showing the arc tube 106 and the inner tube 121 described in Patent Document 1 in a plane perpendicular to the tube axis direction.
在專利文獻1所述的冷卻，因未能充分地冷卻高壓放電燈(紫外線照射燈)，因此在最近被開發了專利文獻2所述的技術。In the cooling described in Patent Document 1, since the high pressure discharge lamp (ultraviolet irradiation lamp) is not sufficiently cooled, the technique described in Patent Document 2 has recently been developed.
專利文獻2所述者，為將高壓放電燈作為雙重管構造，而近接放電管與位於其外方的外管之間隙，藉由流在外管外周的冷卻水，作成提高對放電管的卻冷效果者。According to Patent Document 2, in order to increase the pressure of the discharge tube, the high pressure discharge lamp has a double tube structure, and the gap between the adjacent discharge tube and the outer tube located outside the outlet tube is cooled by the cooling water flowing around the outer tube. Effect.
在第11圖表示圖示於專利文獻2的光照射裝置的斷面構成，而在第12圖表示圖示於第11圖的光照射裝置的放電管與外管的斷面構成。又，第12(b)圖是表示第12(a)圖的B-B線斷面圖。Fig. 11 is a cross-sectional view showing the light irradiation device of Patent Document 2, and Fig. 12 is a cross-sectional view showing the discharge tube and the outer tube of the light irradiation device shown in Fig. 11. Further, Fig. 12(b) is a cross-sectional view taken along line B-B of Fig. 12(a).
該光照射裝置是作為光源具備高壓放電燈10。高壓放電燈10是由全體為棒狀放電管11，及該放電管11配置於內部的例如石英玻璃所成的外管20所構成。This light irradiation device is provided with a high pressure discharge lamp 10 as a light source. The high pressure discharge lamp 10 is composed of an outer tube 20 made of, for example, quartz glass in which the entire rod discharge tube 11 and the discharge tube 11 are disposed inside.
放電管11是在兩端被密封的例如石英玻璃所成的直管狀的內管12內部，分別相對配置有例如鎢所成的一對棒狀電極16者，各電極16經由氣密地埋設於形成在內管12的棒狀密封部13的例如鉬所構成的金屬箔17電性地連接於比密封部13外端朝軸方向外方突出所延伸的外部導線18。The discharge tube 11 is a pair of rod-shaped electrodes 16 made of tungsten, for example, in a straight tubular inner tube 12 formed of quartz glass sealed at both ends, and each electrode 16 is hermetically embedded in the air. The metal foil 17 made of, for example, molybdenum, which is formed in the rod-shaped sealing portion 13 of the inner tube 12, is electrically connected to the outer lead wire 18 which protrudes outward in the axial direction from the outer end of the sealing portion 13.
在高壓放電燈10的放電管11與外管20之間的空隙，形成有空氣層或是利用適當的氣體所作的氣體層。In the gap between the discharge tube 11 and the outer tube 20 of the high pressure discharge lamp 10, an air layer or a gas layer made of a suitable gas is formed.
該光照射裝置是具有：沿著上述高壓放電燈10的管軸延伸地所設置，而在與高壓放電燈10的外周面之間形成冷卻水W所流過的冷卻水流過的冷卻水流路65的圓筒狀冷卻套60，及配置於高壓放電燈10及冷卻套60的兩端的內部空間連通於高壓放電燈10與冷卻套60之間的冷卻水流路65的冷卻水供應流路形成構件61及冷卻水排出流路形成構件62所構成的冷卻機構。The light irradiation device has a cooling water flow path 65 through which the cooling water flowing through the cooling water W is formed between the outer peripheral surface of the high pressure discharge lamp 10 and extending along the tube axis of the high pressure discharge lamp 10. The cylindrical cooling jacket 60 and the cooling water supply passage forming member 61 which is disposed in the internal space of both ends of the high pressure discharge lamp 10 and the cooling jacket 60 and communicates with the cooling water flow path 65 between the high pressure discharge lamp 10 and the cooling jacket 60 And a cooling mechanism constituted by the cooling water discharge flow path forming member 62.
又，在對於光照射方向(在第11圖，下方向)的高壓放電燈10的背面側，例如斷面具有拋物狀反射面71的槽狀反射鏡70，為其第1焦點與高壓放電燈10的中心(連結高壓放電燈10的一對電極16的中心的直線)一致的狀態下，沿著高壓放電燈10延伸地所配置，從高壓放電燈10所放射的光直接地或是利用反射鏡70所反射而作為平行光，經由被保持在光罩幕75的罩幕M，照射在被載置於工件平台76上的塗佈有例如光阻等的感光劑的液晶面板或半導體元件等的工件77。Further, in the back side of the high pressure discharge lamp 10 in the light irradiation direction (in the eleventh and lower directions), for example, the grooved mirror 70 having the parabolic reflecting surface 71 in the cross section is the first focus and the high pressure discharge lamp. The center of 10 (the straight line connecting the centers of the pair of electrodes 16 of the high pressure discharge lamp 10) is arranged to extend along the high pressure discharge lamp 10, and the light emitted from the high pressure discharge lamp 10 is directly or by reflection. The mirror 70 is reflected as parallel light, and is irradiated onto the liquid crystal panel or the semiconductor element coated with the photosensitive agent such as a photoresist or the like placed on the workpiece stage 76 via the mask M held by the mask 75. The workpiece 77.
在上述光照射裝置中，在點燈高壓放電燈10時，藉由未圖示的適當的冷卻水供應機構(泵)供應有冷卻水W。In the above-described light irradiation device, when the high pressure discharge lamp 10 is turned on, the cooling water W is supplied by an appropriate cooling water supply mechanism (pump) (not shown).
所供應的冷卻水W，是流過形成於高壓放電燈10與冷卻套60之間的冷卻水流路65內，流過高壓放電燈10的壁面，具體而言沿著外管20的外周面朝軸方向流過而冷卻高壓放電燈10全體之後，經由冷卻水排出流路形成構件62被排出。The supplied cooling water W flows through the cooling water flow path 65 formed between the high pressure discharge lamp 10 and the cooling jacket 60, and flows through the wall surface of the high pressure discharge lamp 10, specifically along the outer peripheral surface of the outer tube 20. After the entire axial direction of the high pressure discharge lamp 10 is cooled, the cooling water discharge flow path forming member 62 is discharged.
在此些高壓放電燈的放電管內，Hg，或與Hg一起封入有Fe、Tl、Sn、Zn、In等的陽離子，此些在燈點燈中被激勵而光被放射。In the discharge tubes of such high pressure discharge lamps, Hg, or cations of Fe, Tl, Sn, Zn, In, etc., are enclosed together with Hg, and these are excited in the lamp lighting to emit light.
專利文獻1：日本特開平06-267512號公報Patent Document 1: Japanese Patent Publication No. 06-267512
專利文獻2：日本特開2008-146962號公報Patent Document 2: Japanese Laid-Open Patent Publication No. 2008-146962
減小放電管，及與冷卻水流在外周面的外管之間的平均間隙，亦即，減小放電管的外徑與外管的內徑的相差，例如將平均間隙作為100μm以下，則放電管的長度方向的照度分布成為不均勻(所謂照度不均勻)的情形。此為在專利文獻1所述者的情形，不會發生者。Decreasing the average gap between the discharge tube and the outer tube of the cooling water flow on the outer peripheral surface, that is, reducing the difference between the outer diameter of the discharge tube and the inner diameter of the outer tube, for example, discharging the average gap as 100 μm or less The illuminance distribution in the longitudinal direction of the tube becomes uneven (so-called illuminance is uneven). This is the case of the one described in Patent Document 1, and does not occur.
本發明人等的專心檢討的結果，可知該情形為起因於將間隙作成比專利文獻1者還要小者。As a result of intensive review by the present inventors, it has been found that this case is caused by making the gap smaller than that of Patent Document 1.
具體而言，構成放電管與外管的構件是玻璃構件之故，因而其外面形狀是起伏地不均勻。所以，放電管與外管之間隙，是例如受到±100μm的變動，平均間隙為例如100μm以下時，則其間隙成為變動100%以上。Specifically, the members constituting the discharge tube and the outer tube are glass members, and thus the outer shape thereof is unevenly undulated. Therefore, when the gap between the discharge tube and the outer tube is changed by, for example, ±100 μm, and the average gap is, for example, 100 μm or less, the gap is changed by 100% or more.
亦即，放電管與外管是處處有抵接的部分，而在其他部位成為存在著例如200μm以下的間隙。若將冷卻水流在外管的外周面，則放電管為抵接部分有良好的熱傳導性，而有效率地被冷卻，對此間隙為200μm的部分是熱傳導性比抵接部分還要不好，而無法有效率地被冷卻。在放電管的長邊方向，也產生效率優異地被冷卻的部分，與未被冷卻部分。That is, the discharge tube and the outer tube are in contact with each other, and in other portions, there is a gap of, for example, 200 μm or less. When the cooling water flows on the outer peripheral surface of the outer tube, the discharge tube has good thermal conductivity in the abutting portion, and is efficiently cooled, and the portion having a gap of 200 μm is more thermally conductive than the abutting portion. Can't be cooled efficiently. In the longitudinal direction of the discharge tube, a portion that is cooled with excellent efficiency and a portion that is not cooled are also produced.
在放電管的內部，封入有Hg，或是與Hg一起封入有Fe、Tl等的陽離子。這些陽離子是在熱平衡狀態又溫度低的部分，密度變高，而在溫度高的部分密度變低之故，因而專利文獻2所述的高壓放電燈的情形，在其長度方向，有效率地被冷卻部分會使得陽離子的密度變高，而在未被冷卻的部分，則密度變低。如此地在放電管內的長度方向會使得陽離子的密度分布成為不均勻，而會把照度分布成為不均勻(照度不均勻)。In the inside of the discharge tube, Hg is enclosed, or a cation such as Fe or Tl is sealed together with Hg. These cations are in a portion where the temperature is low in the heat balance state, and the density becomes high, and the density at a portion where the temperature is high becomes low. Therefore, in the case of the high pressure discharge lamp described in Patent Document 2, it is efficiently in the longitudinal direction thereof. The cooling portion causes the density of the cation to become high, and in the portion that is not cooled, the density becomes low. Such a length direction in the discharge tube causes the density distribution of the cation to become uneven, and the illuminance distribution becomes uneven (irradiance is uneven).
又，專利文獻1的情形，平均間隙為1000μm，藉由放電管與外管之外面形狀有起伏，即使其間隙受到例如±100μm的變動，其間隙的變動也不過是10%左右。所以，專利文獻1所述的高壓放電燈，是在其長度方向的冷卻分布幾乎不會發生，也不會有照度分布成為不均勻(照度不均勻)的情形。Further, in the case of Patent Document 1, the average gap is 1000 μm, and the shape of the outer surface of the discharge tube and the outer tube is undulated, and even if the gap is changed by, for example, ±100 μm, the variation of the gap is only about 10%. Therefore, in the high-pressure discharge lamp described in Patent Document 1, the cooling distribution in the longitudinal direction hardly occurs, and the illuminance distribution does not become uneven (irradiance is uneven).
本發明是鑑於上述情況而創作者，本發明的目的是在於提供具備放電管，及設於其外方的外管，在外管的內徑與放電管的外徑幾乎相等，而外管與放電管的至少一部分接觸的高壓放電燈中，抑制照度不均勻的點燈裝置及點燈方法。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an outer tube provided with a discharge tube and an outer tube. The inner diameter of the outer tube is almost equal to the outer diameter of the discharge tube, and the outer tube and the discharge tube are discharged. In a high-pressure discharge lamp in which at least a part of the tube is in contact, a lighting device and a lighting method for suppressing uneven illuminance are suppressed.
在本發明中，作成如下地來解決上述課題。In the present invention, the above problems are solved as follows.
(1)具備兩端被密封，在內部相對配置有一對電極，而且至少封入有金屬所成的全體為棒狀放電管，及設於該放電管的外方的外管，外管的內徑與放電管的外徑大約相等，外管與放電管處處接觸，而外管的內徑與放電管的外徑之相差的平均值為如100μm左右的高壓放電燈，及沿著該高壓放電燈的管軸延伸地設置，而在與高壓放電燈的外管之間形成冷卻水所流過的流路的流路形成構件；及電性地連接於該一對電極而饋電於上述高壓放電燈的饋電部所構成的點燈裝置，而如下地構成饋電部。(1) A rod-shaped discharge tube having a pair of electrodes sealed at both ends and having at least a metal sealed therein, and an outer tube provided outside the discharge tube, the inner diameter of the outer tube The outer diameter of the discharge tube is approximately equal to the outer diameter of the discharge tube, and the outer tube is in contact with the discharge tube, and the average difference between the inner diameter of the outer tube and the outer diameter of the discharge tube is a high-pressure discharge lamp of about 100 μm, and along the high-pressure discharge lamp a tube shaft extendingly disposed to form a flow path forming member between the outer tube of the high pressure discharge lamp and a flow path through which the cooling water flows; and electrically connected to the pair of electrodes to feed the high voltage discharge The lighting device formed by the power feeding unit of the lamp constitutes a power feeding unit as follows.
亦即，生成具有用以點燈上述高壓放電燈的穩定點燈頻率f1的第1訊號，及具有比用以解決上述高壓放電燈的照度不均勻的該穩定點燈頻率f1還要低的頻率f2的第2訊號的訊號生成機構；及選擇性地輸出上述第1訊號或第2訊號的轉換機構；及藉由上述第1訊號或第2訊號所驅動，並將頻率f1或頻率f2的交流電壓供應於上述高壓放電燈的倒相電路所構成。如此，以穩定點燈頻率f1進行點燈高壓放電燈，而在發生照度不均勻之前，轉換成可解決照度不均勻的頻率比其還要低的頻率f2而進行點燈燈10。That is, a first signal having a stable lighting frequency f1 for lighting the high-pressure discharge lamp is generated, and a frequency lower than the stable lighting frequency f1 for solving the illuminance unevenness of the high-pressure discharge lamp is generated. a signal generating unit of the second signal of f2; and a converting mechanism for selectively outputting the first signal or the second signal; and the driving of the first signal or the second signal by the first signal or the second signal, and the frequency f1 or the frequency f2 The voltage is supplied to the inverter circuit of the above high pressure discharge lamp. In this manner, the high-pressure discharge lamp is turned on at the stable lighting frequency f1, and the lighting lamp 10 is turned into a frequency f2 which is lower than the frequency at which the illuminance unevenness is resolved before the illuminance is uneven.
(2)在上述(1)中，上述轉換機構是具有定時機構，藉由該定時機構，將頻率f1的交流電壓開始供應於放電燈經第1所定時間後，將供應於上述高壓放電燈的交流電壓的頻率從f1降低至f2，而在第2所定時間的期間將上述頻率f2的交流電壓供應於上述高壓放電燈。(2) In the above (1), the conversion mechanism has a timing mechanism, and the timing mechanism causes the AC voltage of the frequency f1 to be supplied to the discharge lamp to be supplied to the high-pressure discharge lamp after the first predetermined time period. The frequency of the alternating voltage is lowered from f1 to f2, and the alternating voltage of the above frequency f2 is supplied to the high pressure discharge lamp during the second predetermined time period.
(3)在上述(1)、(2)中，穩定點燈頻率f1[Hz]與頻率f2[Hz]之關係，是f2≦0.3f1。(3) In the above (1) and (2), the relationship between the stable lighting frequency f1 [Hz] and the frequency f2 [Hz] is f2 ≦ 0.3f1.
(4)在上述(1)、(2)、(3)中，在被封入於上述放電管內所成的金屬含有水銀，上述穩定點燈頻率f1[Hz]，是將被封入於放電管的水銀密度[mg/cm3 ]作為Hg，而將電極間距離[m]作為AL時，則作為f1<(Hg/30)-033 ×250/AL。(4) In the above (1), (2), and (3), the metal formed in the discharge tube contains mercury, and the stable lighting frequency f1 [Hz] is to be sealed in the discharge tube. When the mercury density [mg/cm 3 ] is Hg and the distance between electrodes [m] is AL, it is f1 < (Hg/30) - 033 × 250 / AL.
在本發明中，可得到以下的效果。In the present invention, the following effects can be obtained.
(1)生成具有穩定點燈頻率f1的第1訊號，及具有用以解決照度不均勻的f1還要低的頻率f2的第2訊號，而作成轉換上述第1訊號與第2訊號進行進行點燈高壓放電燈之故，因而可解決穩定點燈時所發生的陽離子的密度分布不均勻，可抑制照度分布成為不均勻(照度不均勻)的情形。(1) generating a first signal having a stable lighting frequency f1 and a second signal having a frequency f2 lower than f1 for solving illuminance unevenness, and converting the first signal and the second signal to perform a point The high-pressure discharge lamp of the lamp can solve the problem that the density distribution of the cation which occurs during stable lighting is uneven, and the illuminance distribution can be suppressed from being uneven (irradiance is uneven).
亦即，轉換成比頻率f1還要低的頻率f2，就可把陽離子拉向一方的電極側，而可解決在穩定點燈頻率f1進行點燈時所發生的陽離子的密度分布不均勻，並可抑制由此所作的照度不均勻。That is, by converting to a frequency f2 lower than the frequency f1, the cation can be pulled toward one of the electrode sides, and the density distribution of the cation which occurs when the stable lighting frequency f1 is turned on can be solved, and The illuminance unevenness thus made can be suppressed.
(2)使用定時機構，藉由轉換供應於上述高壓放電燈的交流電壓的頻率，以較簡單構成的機構，在實用上無妨礙程度地，可抑制照度分布不均勻(照度不均勻)。(2) By using the timing mechanism, by changing the frequency of the AC voltage supplied to the high-pressure discharge lamp, it is possible to suppress the uneven distribution of the illuminance (irradiation unevenness) with a relatively simple structure without any hindrance in practical use.
(3)藉由將穩定點燈頻率f1[Hz]與頻率f2[Hz]之關係作成f2≦0.3f1，可有效地解決照度不均勻的不均勻。(3) By making the relationship between the stable lighting frequency f1 [Hz] and the frequency f2 [Hz] as f2 ≦ 0.3f1, unevenness in illuminance unevenness can be effectively solved.
(4)穩定點燈頻率f1[Hz]是將被封入在放電管的水銀密度[mg/cm3 ]作為Hg，而將電極間距離[m]作為AL時，作成f1<(Hg/30)-0.33 ×250/AL，藉此可抑制音響共鳴，而可抑制利用氣體分布或發生離子的粗密駐波所作的色不均勻。(4) The stable lighting frequency f1 [Hz] is obtained by using the mercury density [mg/cm 3 ] enclosed in the discharge tube as Hg and the distance between electrodes [m] as AL, and making f1 < (Hg/30) -0.33 × 250 / AL, whereby acoustic resonance can be suppressed, and color unevenness by gas distribution or coarse standing waves in which ions are generated can be suppressed.
首先，針對於本發明作為對象的光照射裝置加以說明。First, a light irradiation device to which the present invention is applied will be described.
本發明的光照射裝置，是與表示於上述第11圖者同樣，具備高壓放電燈，並設有在進行點燈燈時，區劃冷卻燈的冷卻水沿著外管壁面所流過的流路的流路形成構件的構成者。The light irradiation device of the present invention is provided with a high-pressure discharge lamp similarly to that shown in the above-mentioned Fig. 11, and is provided with a flow path through which the cooling water of the cooling lamp flows along the outer tube wall surface when the lighting lamp is turned on. The constituents of the flow path forming member.
第1圖是表示本發明的實施形態的光照射裝置的構成的概略斷面圖，而第2圖是表示第1圖的A-A線斷面圖。Fig. 1 is a schematic cross-sectional view showing a configuration of a light irradiation device according to an embodiment of the present invention, and Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1 .
該光照射裝置是具備以高壓放電燈10作為光源，高壓放電燈10在***通於內部的狀態下沿著高壓放電燈10的管軸延伸地所設置，在與高壓放電燈10的外周面之間具有形成冷卻水W所流過的冷卻水流路65的流路形成構件的圓筒狀冷卻套60。This light irradiation device is provided with a high pressure discharge lamp 10 as a light source, and the high pressure discharge lamp 10 is provided along the tube axis of the high pressure discharge lamp 10 while being inserted inside, and is on the outer peripheral surface of the high pressure discharge lamp 10. A cylindrical cooling jacket 60 is formed between the flow path forming members that form the cooling water flow path 65 through which the cooling water W flows.
在高壓放電燈10及冷卻套60的兩端，配置有內部空間連通於高壓放電燈10與冷卻套60之間的冷卻水流路65的冷卻水供應流路形成構件61及冷卻水排出流路形成構件62，藉由此些來構成冷卻機構。At both ends of the high pressure discharge lamp 10 and the cooling jacket 60, a cooling water supply flow path forming member 61 and a cooling water discharge flow path in which the internal space communicates with the cooling water flow path 65 between the high pressure discharge lamp 10 and the cooling jacket 60 are disposed. The member 62 constitutes a cooling mechanism by this.
冷卻水供應流路形成構件61及冷卻水排出流路形成構件62是全體為大約L字形管狀，以例如管軸朝水平方向延伸的姿勢連接有高壓放電燈10及冷卻套60。The cooling water supply flow path forming member 61 and the cooling water discharge flow path forming member 62 are formed in a substantially L-shaped tubular shape, and the high pressure discharge lamp 10 and the cooling jacket 60 are connected in a posture in which, for example, the tube axis extends in the horizontal direction.
又，藉由軸方向內方側鎖緊口部63，例如經由O形環(未圖示)保持固定著冷卻套60的外周面，而且藉由軸方向外方側的鎖緊口部64例如經由O形環(未圖示)保持固定著高壓放電燈10的外周面。Moreover, the outer peripheral surface of the cooling jacket 60 is held and fixed by the O-ring (not shown), for example, by the O-ring (not shown) in the axial direction inner side locking opening portion 63, and the locking opening portion 64 on the outer side in the axial direction, for example. The outer peripheral surface of the high pressure discharge lamp 10 is held and fixed via an O-ring (not shown).
冷卻套60是藉由透射從高壓放電燈10所放射的紫外線的材料，例如石英玻璃所構成。The cooling jacket 60 is made of a material that transmits ultraviolet rays radiated from the high pressure discharge lamp 10, such as quartz glass.
對於光照射方向(在第1圖及第2圖為下方向)，在高壓放電燈10的背面側，以其第1焦點與高壓放電燈10的中心(以連結高壓放電燈10的一對電極16的中心的直線)一致的狀態，沿著高壓放電燈10延伸地配置有例如斷面具有拋物狀反射面71的槽狀反射鏡70。The light irradiation direction (the lower direction in the first drawing and the second drawing) is the first focus and the center of the high pressure discharge lamp 10 on the back side of the high pressure discharge lamp 10 (to connect a pair of electrodes of the high pressure discharge lamp 10) A grooved mirror 70 having a parabolic reflecting surface 71 in cross section is disposed along the high pressure discharge lamp 10 in a state in which the straight line of the center of 16 is aligned.
從高壓放電燈10所放射的光是直接地或是利用反射鏡70被反射而作為平行光，被照射在經由被保持於罩幕平台75的罩幕M而被載置於工件平台76上例如被塗佈有光阻等感光劑的液晶面板或半導體元件等的工件77。The light emitted from the high pressure discharge lamp 10 is directly or reflected by the mirror 70 as parallel light, and is irradiated onto the workpiece stage 76 via the mask M held by the mask stage 75, for example. A workpiece 77 such as a liquid crystal panel or a semiconductor element to which a photosensitive agent such as a photoresist is applied.
在此，反射面71是藉由交互地蒸鍍例如二氧化鈦及二氧化矽等不相同的反射層所形成的多層膜所形成。Here, the reflecting surface 71 is formed by alternately vapor-depositing a multilayer film formed of a different reflecting layer such as titanium dioxide or cerium oxide.
在高壓放電燈10的一對電極16，經由外部導線18電性地連接有饋電部1，而將交流電壓從饋電部1施加於一對電極間，藉此，高壓放電燈10是進行點燈。In the pair of electrodes 16 of the high pressure discharge lamp 10, the power feeding unit 1 is electrically connected via the external lead 18, and an alternating voltage is applied from the power feeding unit 1 between the pair of electrodes, whereby the high pressure discharge lamp 10 is performed. Light up.
在點燈高壓放電燈10時，冷卻水W藉由未圖示的適當冷卻水供應機構(泵)被供應。在此，冷卻高壓放電燈10，是藉由以例如5公升(1)/min的流量進行循環冷卻水W就可達成。When the high pressure discharge lamp 10 is turned on, the cooling water W is supplied by a suitable cooling water supply mechanism (pump) not shown. Here, cooling the high pressure discharge lamp 10 is achieved by circulating cooling water W at a flow rate of, for example, 5 liters (1)/min.
所供應的冷卻水W是沿著高壓放電燈10的壁面，具體為沿著外管20的外周面流經被形成於高壓放電燈10與冷卻套60之間的冷卻水流路65內。The supplied cooling water W flows along the wall surface of the high pressure discharge lamp 10, specifically, along the outer peripheral surface of the outer tube 20, through the cooling water flow path 65 formed between the high pressure discharge lamp 10 and the cooling jacket 60.
以下，針對於上述高壓放電燈10加以說明。Hereinafter, the above-described high pressure discharge lamp 10 will be described.
高壓放電燈10是外管20的內徑與放電管11的外徑大約相等，外管20與放電管11處處接觸，外管與放電管的平均間隙為被構成100μm以下的雙重管構造者。The high pressure discharge lamp 10 has an inner diameter of the outer tube 20 which is approximately equal to the outer diameter of the discharge tube 11, the outer tube 20 is in contact with the discharge tube 11, and the average gap between the outer tube and the discharge tube is a double tube structure which is configured to be 100 μm or less.
又，在此所說的平均間隙是指在裝配外管20與放電管11之前，在複數部位測定外管20的內徑L4與放電管11的外徑L5，而將其相差分量作1/2的平均值，指在有效發光領域的複數部位所測定的電極間的徑方向的間隙的平均值的情形。Here, the average gap means that the inner diameter L4 of the outer tube 20 and the outer diameter L5 of the discharge tube 11 are measured at a plurality of portions before the outer tube 20 and the discharge tube 11 are assembled, and the phase difference is made 1/ The average value of 2 refers to the average value of the gaps in the radial direction between the electrodes measured in the plurality of portions in the effective light-emitting region.
例如，外管20的內徑L4，是如以下地求出。For example, the inner diameter L4 of the outer tube 20 is obtained as follows.
測定裝配外管20與放電管11之前的外管20的外徑L1，並測定外管20的厚度較厚處的厚度L2與較薄處的厚度L3，利用L4=L1-L2-L3，求出外管20的內徑L4。The outer diameter L1 of the outer tube 20 before the outer tube 20 and the discharge tube 11 are assembled, and the thickness L2 at the thick portion of the outer tube 20 and the thickness L3 at the thin portion are measured, and L4=L1-L2-L3 is used. The inner diameter L4 of the outer tube 20 is taken out.
又，放電管11的外徑L5，是在裝配外管20與放電管11之前所測定的放電管11的外徑。Further, the outer diameter L5 of the discharge tube 11 is the outer diameter of the discharge tube 11 measured before the outer tube 20 and the discharge tube 11 are assembled.
第3圖是表示本發明的實施形態的高壓放電燈的構成的概略斷面圖。Fig. 3 is a schematic cross-sectional view showing the configuration of a high pressure discharge lamp according to an embodiment of the present invention.
與表示於上述第11圖者同樣，該高壓放電燈10是在兩端被密封的例如石英玻璃所成的直管狀內管12的內部，分別相對配置有例如鎢所成的一對棒狀電極16，經由氣密地埋設於各電極16形成於內管12的棒狀密封部13的例如鉬所成的金屬箔17電性地連接於從密封部13的外端朝軸方向外方突出所延伸的外部導線18所成的全體為棒狀放電管11，及該放電管11配置於內部的例如石英玻璃所成的外管20所構成。放電管11與外管20的兩端部分是經由燈座25藉由接著劑24被固定。The high-pressure discharge lamp 10 is a straight tubular inner tube 12 formed of, for example, quartz glass sealed at both ends, and is disposed opposite to each other with a pair of rod electrodes formed of tungsten, for example, as shown in the above-mentioned Fig. 11 . 16. The metal foil 17 made of, for example, molybdenum, which is formed in the rod-shaped sealing portion 13 of the inner tube 12, which is hermetically embedded in each of the electrodes 16, is electrically connected to the outer side of the sealing portion 13 so as to protrude outward in the axial direction. The entire outer lead 18 is formed by a rod-shaped discharge tube 11, and the discharge tube 11 is disposed inside an outer tube 20 made of, for example, quartz glass. Both end portions of the discharge tube 11 and the outer tube 20 are fixed by the adhesive 24 via the socket 25.
放電管11的密封部13是將例如內管12的構成材料的管體的兩端部作成熔融狀態而藉由減壓內部的收縮密封法所形成者，作成比放電管11的中央部(相當於發光領域的部分)還要小徑。The sealing portion 13 of the discharge tube 11 is formed by a shrinkage sealing method in which both end portions of the tube body of the constituent material of the inner tube 12 are made molten, and is formed in a central portion of the discharge tube 11 (corresponding to In the field of illuminating, there are still small paths.
該高壓放電燈10是高壓水銀燈或是金屬鹵素燈，在放電管11的內部，例如封入有1mg/mm3 以上的水銀，而且以適當量封入有氬氣體等的稀有氣體。又，與水銀(Hg)一起封入有鐵(Fe)、鉈(Tl)、錫(Sn)、鋅(Zn)、銦(In)等的鹵化合物也可以，又，也有未含有水銀(Hg)者。如此，例如放射包含波長為350～450nm的紫外線的光。The high-pressure discharge lamp 10 is a high-pressure mercury lamp or a metal halide lamp. For example, mercury of 1 mg/mm 3 or more is sealed inside the discharge tube 11, and a rare gas such as argon gas is sealed in an appropriate amount. Further, a halogen compound such as iron (Fe), strontium (Tl), tin (Sn), zinc (Zn), or indium (In) may be enclosed together with mercury (Hg), and mercury (Hg) may not be contained. By. Thus, for example, light containing ultraviolet rays having a wavelength of 350 to 450 nm is emitted.
如第1圖所示地，在高壓放電燈10的一對電極，電性地連接有饋電部1。As shown in Fig. 1, the feed unit 1 is electrically connected to a pair of electrodes of the high pressure discharge lamp 10.
第4圖是表示本發明的第1實施形態的饋電部的詳細構成圖。Fig. 4 is a view showing a detailed configuration of a power feeding unit according to the first embodiment of the present invention.
饋電部1是由：供應有直流電壓的昇壓整流電路2，及連接於昇壓整流電路2的輸出側並將直流電壓變更成交流電壓而供應於放電燈10的全橋接型倒相電路3，及在全橋接型倒相電路3與高壓放電燈10之間被串聯連接於高壓放電燈10的線圈LL1、起動線圈LL2及起動電路4，及控制全橋接型倒相電路3的開關元件(例如IGBT)的驅動的控制部5所構成。The power feeding unit 1 is a full-bridge inverter circuit in which a boost rectifier circuit 2 to which a DC voltage is supplied, and an output side connected to the boost rectifier circuit 2 and which changes a DC voltage to an AC voltage and supplies the same to the discharge lamp 10. 3, and a coil LL1, a start coil LL2, and a starter circuit 4 connected in series between the full bridge type inverter circuit 3 and the high pressure discharge lamp 10 to the high pressure discharge lamp 10, and a switching element for controlling the full bridge type inverter circuit 3 The control unit 5 for driving (for example, IGBT) is configured.
昇壓整流電路2是被連接於交流電源2a，為由昇壓變壓器T1、整流二極體D1、平滑電容器C1所構成的整流電路，將交流電壓轉換成直流電壓，而將其後的線圈LL3、開關元件S1、二極體D1、電容器C2所構成的昇壓斬波電路所昇壓的直流電壓供應於全橋接型倒相電路3。The boost rectifier circuit 2 is connected to the AC power supply 2a, and is a rectifier circuit including a step-up transformer T1, a rectifier diode D1, and a smoothing capacitor C1. The AC voltage is converted into a DC voltage, and the coil LL3 is followed. The DC voltage boosted by the boost chopper circuit formed by the switching element S1, the diode D1, and the capacitor C2 is supplied to the full bridge type inverter circuit 3.
在昇壓斬波電路的IGBT或FET等的開關元件S1連接有控制電路2b，藉由變更開關元件S1的開關頻率及開閉期間，成為可供應所期望的電壓。The control circuit 2b is connected to the switching element S1 such as the IGBT or the FET of the step-up chopper circuit, and the desired voltage can be supplied by changing the switching frequency and the opening and closing period of the switching element S1.
全橋接型倒相電路3是由橋接狀地連接的IGBT或FET等的開關元件Q1～Q4所構成。全橋接型倒相電路3的開關元件的開閉(ON、OFF)是藉由下述的驅動電路所驅動。The full bridge type inverter circuit 3 is composed of switching elements Q1 to Q4 such as IGBTs or FETs that are connected in a bridge shape. The opening and closing (ON, OFF) of the switching elements of the full bridge type inverter circuit 3 is driven by the following drive circuit.
全橋接型倒相電路3的動作，交互地重複開閉開關元件Q1、Q4與開關元件Q2、Q3。當導通開關元件Q2、Q3時，電流流在昇壓整流電路2→開關元件Q3→線圈LL1→起動線圈LL2→放電燈10→開關元件Q2→昇壓整流電路2。The operation of the full bridge type inverter circuit 3 alternately opens and closes the switching elements Q1 and Q4 and the switching elements Q2 and Q3. When the switching elements Q2 and Q3 are turned on, current flows in the boost rectifier circuit 2 → switching element Q3 → coil LL1 → start coil LL2 → discharge lamp 10 → switching element Q2 → boost rectifier circuit 2.
一方面，當開關元件Q1、Q4作成導通時，則將交流矩形波電流經昇壓整流電路2→開關元件Q1→放電燈10→起動線圈LL2→線圈LL1→開關元件Q4→昇壓整流電路2的路徑供應於放電燈10。On the one hand, when the switching elements Q1, Q4 are turned on, the alternating rectangular wave current is passed through the boost rectifier circuit 2 → switching element Q1 → discharge lamp 10 → starting coil LL2 → coil LL1 → switching element Q4 → boosting rectifier circuit 2 The path is supplied to the discharge lamp 10.
控制部5是由多諧振動器、LC振盪電路等所構成，由發訊基本振盪波形的訊號A的基本頻率振盪電路5a，及發訊比該訊號A還要低頻的訊號B的低頻振盪電路5c，及發訊在所定時間轉換開閉的定時訊號T的定時電路5b所構成。上述基本頻率振盪電路5a、定時電路5b、低頻振盪電路5c所輸出的各訊號A、T、B是以驅動電路5d所組合。The control unit 5 is composed of a multi-resonator, an LC oscillating circuit, or the like, and is configured by a fundamental frequency oscillating circuit 5a that signals the signal A of the basic oscillating waveform, and a low-frequency oscillating circuit that signals the signal B that is lower than the signal A. 5c, and a timing circuit 5b for transmitting a timing signal T that is turned on and off at a predetermined time. The signals A, T, and B output from the basic frequency oscillation circuit 5a, the timing circuit 5b, and the low frequency oscillation circuit 5c are combined by the drive circuit 5d.
針對於各訊號A、B、T被組合而用以控制全橋接型倒相電路3的訊號合成，使用第5圖至第7圖加以說明。The signal synthesis for controlling the full bridge type inverter circuit 3 for combining the respective signals A, B, and T is explained using FIGS. 5 to 7.
第5圖是表示驅動電路的詳細圖。Fig. 5 is a detailed view showing a drive circuit.
具有振盪電路5a所輸出的頻率f1的訊號A，是被輸入至邏輯電路L1(「及」電路)的一方的輸入端子，而在邏輯電路L1的另一方的輸入端子，輸入有定時電路5b的輸出訊號T。如下述的第7圖所示地，定時電路5b的輸出訊號T，是例如在訊號A的下降時從高位準(H位準)變更成低位準(L位準)，或是從低位準(L位準)變更成高位準(H位準)的訊號，訊號A的第1所定周期別地狀態從H變更成L位準，而訊號A的第2所定周期別地狀態從L變更成H位準。The signal A having the frequency f1 output from the oscillation circuit 5a is input to one input terminal of the logic circuit L1 ("AND" circuit), and the other input terminal of the logic circuit L1 is input with the timing circuit 5b. Output signal T. As shown in FIG. 7 below, the output signal T of the timing circuit 5b is changed from a high level (H level) to a low level (L level) or a low level (for example, when the signal A falls). The L level is changed to the high level (H level) signal, the first predetermined period of the signal A is changed from H to the L level, and the second predetermined period of the signal A is changed from L to H. Level.
邏輯電路L1是定時電路5b的輸出為H位準時，則輸出訊號A。When the output of the timing circuit 5b is the H level, the logic circuit L1 outputs the signal A.
又，定時電路5b的輸出訊號T是被輸入至邏輯電路L2(倒相電路)而被倒相，而被輸入至邏輯電路L3(「及」電路)的一方的輸入端子。在邏輯電路L3的另一方的輸入端子輸入有低頻振盪電路5c的輸出[具有頻率f2(f2<f1)的訊號B]。邏輯電路L3是定時電路5b的輸出訊號T為L位準時，輸出訊號B。Further, the output signal T of the timing circuit 5b is input to the logic circuit L2 (inverting circuit), inverted, and input to one of the input terminals of the logic circuit L3 ("AND" circuit). An output of the low frequency oscillation circuit 5c [signal B having a frequency f2 (f2 < f1)] is input to the other input terminal of the logic circuit L3. The logic circuit L3 is the output signal B when the output signal T of the timing circuit 5b is L level.
邏輯電路L1、L2的輸出是被輸入至邏輯電路L4(「或」電路)的輸入端子，而邏輯電路L4是當定時電路5b的輸出為H位準時，則輸出訊號A，而當定時電路5b的輸出為L位準時，則輸出訊號B。亦即，以定時電路5b與邏輯電路L1、L2、L3、L4構成轉換電路SL，而轉換電路SL是因應於定時電路5b的輸出訊號T，選擇性地輸出訊號A或訊號B。The outputs of the logic circuits L1, L2 are input to the input terminal of the logic circuit L4 ("OR" circuit), and the logic circuit L4 outputs the signal A when the output of the timing circuit 5b is H level, and the timing circuit 5b When the output is L-level, the signal B is output. That is, the conversion circuit SL is constituted by the timing circuit 5b and the logic circuits L1, L2, L3, and L4, and the conversion circuit SL selectively outputs the signal A or the signal B in response to the output signal T of the timing circuit 5b.
邏輯電路L4的輸出訊號C1是被輸入至延遲電路DD1，而延遲電路DD1是輸出延遲訊號C1的訊號C2。訊號C1、C2是被輸入至邏輯電路L5(「及」電路)的輸入端子，而邏輯電路L5是輸出其「及」訊號的訊號X。該訊號X是成為全橋接型倒相電路3的開關元件Q1、Q4的驅動訊號。The output signal C1 of the logic circuit L4 is input to the delay circuit DD1, and the delay circuit DD1 is the signal C2 outputting the delay signal C1. The signals C1 and C2 are input terminals input to the logic circuit L5 ("AND" circuit), and the logic circuit L5 is a signal X for outputting the "and" signal. This signal X is a drive signal for the switching elements Q1 and Q4 of the full bridge type inverter circuit 3.
又，訊號C1、C2是在邏輯電路L6、L7(倒相電路)被倒相，而被輸入至邏輯電路L8(「及」電路)的輸入端子，而邏輯電路L8是輸出其「及」訊號的訊號Y。該訊號Y是成為全橋接型倒相電路3的開關元件Q2、Q3的驅動訊號。Further, the signals C1 and C2 are inverted at the logic circuits L6 and L7 (inverting circuit), and are input to the input terminal of the logic circuit L8 ("AND" circuit), and the logic circuit L8 outputs the "and" signal. Signal Y. This signal Y is a drive signal for the switching elements Q2 and Q3 of the full bridge type inverter circuit 3.
第6圖是表示控制部的動作的流程圖，第7圖是表示控制部的時序圖，而利用第5圖、第6圖、第7圖來說明動作。Fig. 6 is a flowchart showing the operation of the control unit, and Fig. 7 is a timing chart showing the control unit, and the operation is explained using Figs. 5, 6 and 7.
首先，在步驟S1，從基本頻率振盪電路5a製作基本振盪波形的訊號A。First, in step S1, a signal A of a basic oscillation waveform is prepared from the basic frequency oscillation circuit 5a.
之後，在步驟S2，以基本振盪波形為基礎、生成頻率f1、f2的點燈波形、定時波形。亦即，以振盪電路5a所輸出的訊號A為基礎在低頻振盪電路5c，製作比訊號A還要低頻率的訊號B，又，使用訊號A在定時電路5b，製作在所定時間轉換開閉的定時訊號T。Thereafter, in step S2, the lighting waveforms and the timing waveforms of the frequencies f1 and f2 are generated based on the basic oscillation waveform. That is, based on the signal A output from the oscillation circuit 5a, the low frequency oscillation circuit 5c produces a signal B having a lower frequency than the signal A, and the signal A is used in the timing circuit 5b to prepare a timing for switching the opening and closing at a predetermined time. Signal T.
在步驟3，組合訊號A(頻率f1)、訊號B(頻率f2)及訊號T，而製作全橋接型倒相電路的IGBT等所構成的開關元件Q1～Q4的驅動訊號X、Y。In step 3, the signal A (frequency f1), the signal B (frequency f2), and the signal T are combined to form drive signals X and Y of the switching elements Q1 to Q4 formed by the IGBTs of the full bridge type inverter circuit.
在步驟4，依據X、Y波形，上述開關元件Q1～Q4被開閉，俾進行交流點燈。In step 4, the switching elements Q1 to Q4 are turned on and off in accordance with the X and Y waveforms, and the alternating current is turned on.
亦即，訊號T為H位準的期間，輸出穩定點燈頻率f1的訊號X、Y，以穩定點燈頻率f1進行點燈高壓放電燈。That is, when the signal T is at the H level, the signals X and Y of the stable lighting frequency f1 are output, and the high-pressure discharge lamp is turned on at the stable lighting frequency f1.
接著，以高壓放電燈發生照度不均勻之前的穩定點燈頻率f1開始點燈經所定時間後，以訊號T作為L位準，而以比穩定點燈頻率f1還要低的頻率f2進行點燈高壓放電燈。Then, after the steady lighting frequency f1 before the illuminance unevenness occurs in the high-pressure discharge lamp, the lighting is started for a predetermined period of time, and the signal T is used as the L level, and the lighting is performed at a frequency f2 lower than the stable lighting frequency f1. High pressure discharge lamp.
此時，高壓放電燈的放電管的陽離子，是低頻率被輸入，使得被拉向陰極的時間變久，而攪亂電漿中的陽離子。藉由其攪拌效果會把陽離子的分布成為一樣，比穩定點燈頻率f1被輸入時還可解決陽離子分布的不均勻，而可抑制照度不均勻。At this time, the cation of the discharge tube of the high pressure discharge lamp is input at a low frequency, so that the time taken to the cathode becomes long, and the cation in the plasma is disturbed. The cation distribution is made the same by the stirring effect, and the unevenness of the cation distribution can be solved when the stable lighting frequency f1 is input, and the illuminance unevenness can be suppressed.
又，在第5電路中，設置延遲電路DD1來生成延遲的訊號C2，來進行訊號C1與訊號C2(或是其倒相訊號)的邏輯積，而在訊號X的導通時與訊號Y的導通時之期間，設置雙方的訊號成為斬開的休止期間。此為，為了解決若開關元件Q1~Q4同時地被導通就被破壞的問題，而形成空檔時間者。Further, in the fifth circuit, the delay circuit DD1 is provided to generate the delayed signal C2 to perform a logical product of the signal C1 and the signal C2 (or its inverted signal), and the signal Y is turned on when the signal X is turned on. During the time period, the signals set by both parties become the rest period of the opening. This is to solve the problem that the switching elements Q1 to Q4 are broken when they are simultaneously turned on, and the neutral time is formed.
在本實施形態中，生成具有穩定點燈頻率f1的訊號A，及具有比f1還要低的頻率f2的訊號B，藉由定時電路5b所定時間別地轉換訊號A與訊號B，而藉由穩定點燈頻率f1的訊號，及可解決照度不均勻的比其頻率還要低的頻率f2的訊號來驅動全橋接型倒相電路3的開關元件Q1~Q4，作成進行點燈高壓放電燈之故，因而可解決發生在穩定點燈時的陽離子的密度分布不均勻，而可抑制照度分布成為不均勻(照度不均勻)的情形。In this embodiment, the signal A having the stable lighting frequency f1 and the signal B having the frequency f2 lower than f1 are generated, and the signal A and the signal B are converted by the timing of the timing circuit 5b. The signal of the stable lighting frequency f1 and the signal of the frequency f2 which can solve the uneven illumination with lower frequency than the frequency thereof drive the switching elements Q1~Q4 of the full bridge type inverter circuit 3 to be used for the lighting of the high voltage discharge lamp. Therefore, it is possible to solve the problem that the density distribution of the cations occurring at the time of stable lighting is uneven, and the illuminance distribution can be suppressed from being uneven (irradiance unevenness).
亦即，所定時間別地轉換成比穩定點燈頻率f1還要低的頻率f2，把陽離子拉向一方的電極側，而可解決在穩定點燈頻率f1所點燈時所發生的陽離子的密度分布不均勻，並可抑制由此所作的照度不均勻。That is, the predetermined time is converted to a frequency f2 lower than the stable lighting frequency f1, and the cation is pulled toward one of the electrode sides, thereby solving the density of the cation which occurs when the lighting is stabilized at the lighting frequency f1. The distribution is uneven, and the illuminance unevenness thus made can be suppressed.
又，事先知道高壓放電燈發生照度不均勻的時間之故，因而上述定時電路56的訊號T，是在照度不均勻發生在高壓放電燈之前的所定時間，被設定在轉換訊號A、B的時機。Further, it is known in advance that the illuminance unevenness occurs in the high pressure discharge lamp. Therefore, the signal T of the timing circuit 56 is set at the timing of the switching signals A and B at a predetermined time before the illuminance unevenness occurs before the high pressure discharge lamp. .
還有，如下述的實驗結果所示地，低頻率f2是5Hz以上，且若在穩定點燈頻率f1的30%以下，則一面可抑制電極變形，一面有效地可抑制照度不均勻。In addition, as shown in the following experimental results, the low frequency f2 is 5 Hz or more, and when the stable lighting frequency f1 is 30% or less, the electrode distortion can be suppressed, and illuminance unevenness can be effectively suppressed.
又，作為將低頻率f2***在穩定點燈頻率f1的時機，為在發生陽離子的不均勻分布之前實施較佳。所以，以穩定點燈頻率f1開始點燈之後10分鐘以內***低頻率f2較佳。Further, the timing at which the low frequency f2 is inserted at the stable lighting frequency f1 is preferably performed before the occurrence of uneven distribution of cations. Therefore, it is preferable to insert the low frequency f2 within 10 minutes after the start of lighting at the steady lighting frequency f1.
還有，低頻率f2被***的期間，是1周期至10周期(1周期是頻率f2的訊號的開閉期間)，以穩定點燈頻率f1點燈的期間，是作為時間為0.1～6秒鐘間的範圍較佳。In addition, the period in which the low frequency f2 is inserted is one cycle to ten cycles (one cycle is the opening and closing period of the signal of the frequency f2), and the period of lighting at the stable lighting frequency f1 is 0.1 to 6 seconds. The range between the two is better.
又，以低頻率f2進行點燈的期間及以低頻率f2進行點燈的周期，是依燈的規格、點燈條件、外管與發光管所抵接的面積或抵接的部分的數量等所決定者。In addition, the period in which the lighting is performed at the low frequency f2 and the period in which the lighting is performed at the low frequency f2 are based on the specifications of the lamp, the lighting conditions, the area where the outer tube and the arc tube abut, or the number of the portions to be abutted. Determined.
在此，在進行交流點燈的燈中，藉由音響共鳴，會發生照度不均勻為先前就知道(例如，參照日本特開昭63-285899號公報的第2頁左上欄的第15行～等)。Here, in the lamp that performs the AC lighting, the illuminance unevenness is known by the acoustic resonance (see, for example, the 15th line in the upper left column of the second page of JP-A-63-285899). Wait).
音響共鳴是以滿足下式(1)的條件所發生。又，在下式(1)所表示的fa是音響共鳴頻率，m是常數，V是音速(m/s)，AL是電極間距離[單位：m]。The acoustic resonance is caused by the condition of the following formula (1). Further, fa represented by the following formula (1) is an acoustic resonance frequency, m is a constant, V is a sound velocity (m/s), and AL is an interelectrode distance [unit: m].
fa=mv/2(2AL) …(1)Fa=mv/2(2AL) ...(1)
在滿足該(1)式的條件下，眾知在燈的軸方向發生氣體分子或電離離子的相密駐波(稱為「音響共鳴」)而發生顏色不均勻。Under the condition that the formula (1) is satisfied, it is known that a phase-dense standing wave of gas molecules or ionized ions (referred to as "acoustic resonance") occurs in the axial direction of the lamp, and color unevenness occurs.
在(1)式的音速V，一般以比熱比γ，密度p(單位：kg/m3 )及壓力ρ(單位：N/m2 )可表示示[參照次式(2)]。The sound velocity V of the formula (1) is generally expressed by a specific heat ratio γ, a density p (unit: kg/m 3 ), and a pressure ρ (unit: N/m 2 ) [refer to the following formula (2)].
v=(γp/ρ)05 …(2)v=(γp/ρ) 05 ...(2)
將(2)式代入(1)式，則成為次式(3)。Substituting equation (2) into equation (1) results in the following equation (3).
fa=m(γp/ρ)05 /(2AL) …(3)Fa=m(γp/ρ) 05 /(2AL) ...(3)
該音響共鳴頻率fa，是依存於封入物的蒸汽壓、氣體密度、溫度等。The acoustic resonance frequency fa depends on the vapor pressure, gas density, temperature, and the like of the enclosure.
在實際的燈，這些數值並不一樣，對燈尺寸(內徑、電極間距離，此些之比率)或點燈條件(輸入)，放電管的冷卻條件(內表面溫度等)有很大的依存分布之故，因而必須實驗式地嚴密地求出。In actual lamps, these values are not the same. For lamp size (inner diameter, inter-electrode distance, ratio of these) or lighting conditions (input), the discharge condition of the discharge tube (internal surface temperature, etc.) is very large. Depending on the distribution, it must be determined experimentally and rigorously.
本發明是以抑制照度不均勻作為目的，該照度不均勻是如上述地藉由音響共鳴也發生之故，因而也抑制音響共鳴較佳。The present invention has an object of suppressing illuminance unevenness, which is also caused by acoustic resonance as described above, and thus suppresses acoustic resonance.
於是，實驗性地求出本發明的穩定點燈頻率f1未滿足上述音響共鳴頻率fa的範圍。Then, it is experimentally found that the stable lighting frequency f1 of the present invention does not satisfy the range of the acoustic resonance frequency fa.
其結果，知道近似地成為以下的條件(4)。又，在條件(4)所表示的Hg是封入水銀密度(單位：mg/cm3 )。AL是與上述相同的電極間距離(單位：m)。As a result, it is known that the following condition (4) is approximated. Further, Hg represented by the condition (4) is a mercury density (unit: mg/cm 3 ) enclosed. AL is the same interelectrode distance (unit: m) as described above.
f1<(Hg/30)-0.33 ×250/AL …(4)F1<(Hg/30) -0.33 ×250/AL ...(4)
在第4圖的點燈裝置中，使用以所定時間轉換的定時電路5b與邏輯電路L1～L4所成的轉換電路SL進行訊號A與訊號B的轉換，惟作為轉換訊號A與訊號B的機構，並不被限定於定時電路者，使用以下所說明的機構也可以。In the lighting device of Fig. 4, the conversion of the signal A and the signal B is performed by using the timing circuit 5b converted by the predetermined time and the conversion circuit SL formed by the logic circuits L1 to L4, but as a mechanism for switching the signal A and the signal B. It is not limited to the timing circuit, and the mechanism described below may be used.
第8圖是表示本發明的第2實施形態的饋電部的構成圖，利用同圖來說明其他的構成例。Fig. 8 is a view showing a configuration of a power feeding unit according to a second embodiment of the present invention, and another configuration example will be described using the same drawing.
表示於第8圖的點燈裝置是沿著高壓放電燈的長度方向設置複數照度計PS1、PS2、PS3、……，並且設置互相地比較利用該照度計所作的測定結果的比較電路5e，及當其輸出的相差成為一定值以上，則轉換訊號A與訊號B的反饋控制電路5f。The lighting device shown in Fig. 8 is a comparison circuit 5e in which a plurality of illuminance meters PS1, PS2, PS3, ... are disposed along the longitudinal direction of the high pressure discharge lamp, and measurement results obtained by using the illuminometer are compared with each other, and When the phase difference of the output becomes a certain value or more, the feedback control circuit 5f of the signal A and the signal B is switched.
亦即，代替第4圖的定時電路5b，設置比較電路5e與反饋控制電路5f，而依據比較電路5e的比較結果，利用反饋控制電路5f來轉換訊號A與訊號B。That is, instead of the timing circuit 5b of Fig. 4, the comparison circuit 5e and the feedback control circuit 5f are provided, and based on the comparison result of the comparison circuit 5e, the signal A and the signal B are converted by the feedback control circuit 5f.
第8圖是僅生成將驅動電路4d予以動作的訊號T的電路有所不同，其他的構成，是與表示於第4圖者基本上相同，以下，僅說明與第4圖不相同之處。Fig. 8 shows a circuit in which only the signal T for operating the drive circuit 4d is generated. The other configuration is basically the same as that shown in Fig. 4. Hereinafter, only the difference from Fig. 4 will be described.
進行點燈燈時，位於高壓放電燈10的電極間的徑方向的方式，設有複數照度計PS1、PS2、PS3、……(以下作為設有3個照度計PS1、PS2、PS3的情形加以說明)。When the lighting is performed, a plurality of illuminance meters PS1, PS2, PS3, ... are provided in the radial direction between the electrodes of the high pressure discharge lamp 10 (hereinafter, as the case where three illuminometers PS1, PS2, and PS3 are provided) Description).
複數照度計PS1、PS2、PS3，是測定高壓放電燈10的長度方向的各照度計，並將其結果送訊至比較電路5e。在比較電路5e中，比較利用各照度計PS1、PS2、PS3、……所作的測定結果，而在測定結果，產生某一定值以上的偏差，則將轉換訊號D送訊至反饋控制電路5f。The illuminance meters PS1, PS2, and PS3 are illuminance meters for measuring the longitudinal direction of the high pressure discharge lamp 10, and the results are sent to the comparison circuit 5e. In the comparison circuit 5e, the measurement results by the illuminance meters PS1, PS2, PS3, ... are compared, and when a deviation of a certain value or more occurs in the measurement result, the conversion signal D is sent to the feedback control circuit 5f.
反饋控制電路5f是高壓放電燈10的長度方向的照度分布從所定範圍偏離時，則將轉換點燈頻率的訊號送訊至驅動電路5d。亦即，反饋控制電路5f是將訊號E作成L位準，而驅動電路5d是當該訊號E成為L位準。則將全橋接型倒相電路的開關元件Q1～Q4的驅動訊號X、Y的頻率從穩定點燈頻率f1轉換成f2。When the illuminance distribution in the longitudinal direction of the high pressure discharge lamp 10 deviates from the predetermined range, the feedback control circuit 5f transmits a signal for switching the lighting frequency to the drive circuit 5d. That is, the feedback control circuit 5f sets the signal E to the L level, and the drive circuit 5d sets the signal E to the L level. Then, the frequency of the driving signals X and Y of the switching elements Q1 to Q4 of the full bridge type inverter circuit is converted from the stable lighting frequency f1 to f2.
藉此，當解決上述照度計的測定結果的偏差，則比較電路5e是停止轉換訊號D的送訊，反饋控制電路5f是將訊號E作為H位準。驅動電路5d是當該訊號E成為H位準，則將反饋控制電路的開關元件Q1～Q4的驅動訊號X、Y的頻率恢復成穩定點燈頻率f1。Thereby, when the deviation of the measurement result of the illuminometer is solved, the comparison circuit 5e stops the transmission of the conversion signal D, and the feedback control circuit 5f sets the signal E as the H level. When the signal E becomes the H level, the drive circuit 5d restores the frequency of the drive signals X and Y of the switching elements Q1 to Q4 of the feedback control circuit to the stable lighting frequency f1.
在此所說的所定範圍，是指藉由來自高壓放電燈10的紫外線所照射的被照射物，有被容許的照度分布的均勻性，而可維持該容許的照度分布的均勻性的範圍，例如指±10%的照度分布的情形。The predetermined range as used herein refers to a range in which the uniformity of the allowable illuminance distribution can be maintained by the uniformity of the illuminance distribution that is allowed to be irradiated by the ultraviolet ray from the high pressure discharge lamp 10, and the uniformity of the allowable illuminance distribution can be maintained. For example, it refers to the case of ±10% illuminance distribution.
又，驅動電路的內部構成是基本上與表示於第5圖相同，其動作也如第7圖所示地，在第5圖中，上述訊號E被輸入至訊號T被輸入的端子。Further, the internal configuration of the drive circuit is basically the same as that shown in Fig. 5, and the operation is also as shown in Fig. 7. In Fig. 5, the signal E is input to the terminal to which the signal T is input.
上述第1實施形態與本實施形態的不相同處，是從穩定點燈頻率f1轉換成f2的時機，在第1實施形態為所定時間別地，而在本實施形態為是否從所定的照度分布偏離的情形上不同，其以外的作用，效果為共通。The first embodiment differs from the present embodiment in that it is converted from the stable lighting frequency f1 to f2, and the first embodiment is a predetermined time, and in the present embodiment, whether or not the illumination distribution is from a predetermined illuminance. The situation of deviation is different, and the effects other than the effect are common.
為了確認本發明的效果，進行以下的實驗。In order to confirm the effects of the present invention, the following experiment was conducted.
將使用於實驗的光照射裝置的構成表示於第9(a)圖，具有與表示於上述第1圖的光照射裝置同樣的構成，其規格是如下所述。The configuration of the light irradiation device used in the experiment is shown in Fig. 9(a), and has the same configuration as that of the light irradiation device shown in Fig. 1, and the specifications are as follows.
‧放電管(發光管)：內徑5.4mm 外徑9mm‧Discharge tube (light tube): inner diameter 5.4mm outer diameter 9mm
‧外管：內徑9.15mm 外徑12mm‧Outer tube: inner diameter 9.15mm outer diameter 12mm
‧電極間距離：500mm‧ Distance between electrodes: 500mm
‧封入物‧Enclosure
水銀密度5mg/cm3 Mercury density 5mg/cm 3
‧流在水冷套與外管之間的冷卻水的流量：20L/min使用於實驗的高壓放電燈的點燈條件，是輸入穩定點燈頻率f1 1秒鐘，之後將低頻率f2輸入1周期分量(以頻率f1的開閉作為1周期)的方式交互地輸入頻率f1與f2的訊號。亦即，穩定點燈頻率f1為1秒鐘→低頻率f2為1周期→穩定點燈頻率f1為1秒鐘→……(以下同樣)。‧ Flow of cooling water flowing between the water jacket and the outer tube: 20L/min The lighting condition of the high pressure discharge lamp used in the experiment is to input the stable lighting frequency f1 for 1 second, and then input the low frequency f2 to 1 cycle. The components of the frequencies f1 and f2 are interactively input in a manner of opening and closing the frequency f1 as one cycle. That is, the steady lighting frequency f1 is 1 second → the low frequency f2 is 1 cycle → the stable lighting frequency f1 is 1 second → (the same applies hereinafter).
點燈頻率是如以下。The lighting frequency is as follows.
‧穩定點燈頻率f1：100、500、800、1000Hz‧ Stable lighting frequency f1: 100, 500, 800, 1000Hz
‧低頻率f2：3、5、10、30、50、100、150、200、300、500Hz‧Low frequency f2: 3, 5, 10, 30, 50, 100, 150, 200, 300, 500 Hz
在使用於實驗的高壓放電燈的電極間的徑方向外方，經由冷卻套配置有複數照度計。該複數照度計是沿著高壓放電燈的長度方向所配置，而測定其長度方向的照度分布。A plurality of illuminometers were arranged via a cooling jacket outside the radial direction between the electrodes of the high pressure discharge lamp used in the experiment. The complex illuminance meter is arranged along the longitudinal direction of the high pressure discharge lamp, and the illuminance distribution in the longitudinal direction is measured.
該照度計是從電極前端朝軸方向距5cm之部位，以10mm間隔朝著高壓放電燈的長度方向所配置。The illuminance meter was placed at a distance of 5 cm from the tip end of the electrode in the axial direction, and was arranged at a distance of 10 mm toward the longitudinal direction of the high pressure discharge lamp.
又，藉由照度計測定從電極前端距5cm的位置朝軸方向1cm別地相對的電極的5cm前的照度，如第9(b)圖所示地，由各照度計所測定的各照度，求出平均值，進行觀察其平均值與各照度之偏差程度(亦即，照度不均勻)。Further, the illuminance of 5 cm before the electrode facing the axis direction of 1 cm from the position of the electrode tip at a distance of 5 cm was measured by an illuminometer, and the illuminance measured by each illuminometer was as shown in Fig. 9(b). The average value was obtained, and the degree of deviation between the average value and each illuminance was observed (that is, the illuminance was uneven).
將觀察的結果匯集在表1。在表1中，由平均值有最大15%以上的偏差程度時作為×，最大10%～15%之間的偏差程度時作為△，最大5%～10%之間的偏差程度時作為○，而最大不足5%的偏差程度時作為◎。The observed results are summarized in Table 1. In Table 1, when the degree of deviation of the average value is 15% or more, the degree of deviation is ×, and the degree of variation between 10% and 15% is Δ, and the degree of variation between 5% and 10% is ○. When the degree of deviation of less than 5% is maximum, it is ◎.
如表1所示地，低頻率f2為穩定點燈頻率f1的30%以下時，則可得到照度不均勻的抑制效果。As shown in Table 1, when the low frequency f2 is 30% or less of the stable lighting frequency f1, the effect of suppressing illuminance unevenness can be obtained.
但是，低頻率f2為3Hz時，發生電極變形。此為，從一方電極朝著另一方的電極流著電流之期間過久，亦即直流點燈期間過久之故，因而可能為一面地受到電子相撞的電極會變形者。所以，低頻率f2的較佳範圍為成為5≦f2≦0.3f1。However, when the low frequency f2 is 3 Hz, electrode deformation occurs. This is because the period during which the current flows from one electrode to the other electrode is too long, that is, the DC lighting period is too long, and thus the electrode that is subjected to electron collision on one side may be deformed. Therefore, the preferred range of the low frequency f2 is 5 ≦ f2 ≦ 0.3 f1.
又，在表1中，表示在穩定點燈頻率f1為1000Hz，都是△，對於此在穩定點燈頻率f1為800Hz以下的範圍，表示照度不均勻被抑制的情形。此為，f1：800Hz以下的範圍為相當於在上述所說的抑制音響共鳴所用的條件的(4)式的f1<(Hg/30)-033 ×250/AL，所以，可知可抑制利用音響共鳴所作的照度不均勻。In addition, in Table 1, it is shown that the steady lighting frequency f1 is 1000 Hz, and it is △. In this case, the illuminance unevenness is suppressed in the range where the stable lighting frequency f1 is 800 Hz or less. In the range of f1:800 Hz or less, f1 < (Hg/30) - 033 × 250 / AL corresponding to the condition (4) for suppressing the acoustic resonance described above, it is understood that the use of the sound can be suppressed. The illuminance made by the resonance is not uniform.
將燈的發光長(電極間距離)變更為1000mm，而與上述實驗例1同一條件下進行實驗。燈規格是如下所述。The experiment was carried out under the same conditions as in Experimental Example 1 except that the light emission length (interelectrode distance) of the lamp was changed to 1000 mm. The lamp specifications are as follows.
‧放電管(發光管)：內徑5.4mm外徑9mm‧Discharge tube (light tube): inner diameter 5.4mm outer diameter 9mm
‧外管：內徑9.15mm外徑12mm‧Outer tube: inner diameter 9.15mm outer diameter 12mm
‧發光長(電極間距離)：1000mm‧Light length (distance between electrodes): 1000mm
‧封入物‧Enclosure
水銀密度5mg/cm3 Mercury density 5mg/cm 3
‧流在水冷套與外管之間的冷卻水的流量：25L/min將其結果表示於表2。‧ Flow rate of cooling water flowing between the water jacket and the outer tube: 25 L/min. The results are shown in Table 2.
該情形，是在頻率f1為400Hz與500Hz之間，可知利用音響共鳴所作的照度不均勻的抑制有所作用。In this case, the frequency f1 is between 400 Hz and 500 Hz, and it is understood that the suppression of the illuminance unevenness by the acoustic resonance has an effect.
變更燈的封入物，使用金屬鹵素燈，與上述實驗例1同一條件下進行同樣的實驗。燈規格是如下所述。The same experiment was carried out under the same conditions as in Experimental Example 1 except that the seal of the lamp was changed. The lamp specifications are as follows.
‧放電管(發光管)：內徑4.6mm外徑10.3mm‧Discharge tube (light tube): inner diameter 4.6mm outer diameter 10.3mm
‧外管：內徑10.45mm外徑13mm‧Outer tube: inner diameter 10.45mm outer diameter 13mm
‧發光長(電極間距離)：500mm‧Light length (distance between electrodes): 500mm
‧封入物‧Enclosure
水銀密度2.5mg/cm3 Mercury density 2.5mg/cm 3
碘化鐵：0.45mg/cm3 Iron iodide: 0.45mg/cm 3
碘化鉈：0.06mg/cm3 Barium iodide: 0.06mg/cm 3
‧流在水冷套與外管之間的冷卻水的流量：20L/min將其結果表示於表3。‧ Flow rate of cooling water flowing between the water jacket and the outer tube: 20 L/min. The results are shown in Table 3.
該情形，是在頻率f1為1000Hz與1200Hz之間，可知利用音響共鳴所作的照度不均勻的抑制有所作用。亦即，與水銀以外的金屬的添加量相比較，若水銀的添加量較多時(比其他金屬多5倍左右以上)，可知可適用上述(4)式的f1<(Hg/30)-0.33 ×250×AL。In this case, the frequency f1 is between 1000 Hz and 1200 Hz, and it is understood that the suppression of illuminance unevenness by acoustic resonance has an effect. In other words, when the amount of mercury added is large (about 5 times more than other metals), it is known that f1 < (Hg/30) of the above formula (4) can be applied . 0.33 × 250 × AL.
又，由上述(2)-(3)的實驗結果，在實驗例1所得到的低頻f2的較佳的範圍的5≦f2≦0.3f1的式，被確認也可適用於其他的燈。Further, from the experimental results of the above (2) to (3), the formula of 5≦f2 ≦ 0.3f1 in the preferable range of the low frequency f2 obtained in Experimental Example 1 was confirmed to be applicable to other lamps.
1‧‧‧饋電部 1‧‧‧Feeding Department
2‧‧‧昇壓整流電路 2‧‧‧Boost rectifier circuit
2a‧‧‧交流電源 2a‧‧‧AC power supply
2b‧‧‧控制電路 2b‧‧‧Control circuit
3‧‧‧全橋接型倒相電路 3‧‧‧Full bridge type inverter circuit
4‧‧‧起動電路 4‧‧‧Starting circuit
5‧‧‧控制部 5‧‧‧Control Department
5a‧‧‧基本頻率振盪電路 5a‧‧‧Basic frequency oscillation circuit
5b‧‧‧定時電路 5b‧‧‧ Timing Circuit
5c‧‧‧低頻率振盪電路 5c‧‧‧Low frequency oscillator circuit
5d‧‧‧驅動電路 5d‧‧‧ drive circuit
5e‧‧‧比較電路 5e‧‧‧Comparative circuit
5f‧‧‧反饋控制電路 5f‧‧‧Feedback Control Circuit
10‧‧‧高壓放電燈 10‧‧‧High pressure discharge lamp
11‧‧‧放電管 11‧‧‧Discharge tube
12‧‧‧內管 12‧‧‧Inside
13‧‧‧密封部 13‧‧‧ Sealing Department
16‧‧‧電極 16‧‧‧Electrode
17‧‧‧金屬箔 17‧‧‧metal foil
18‧‧‧外部導線 18‧‧‧External wires
20‧‧‧外管 20‧‧‧External management
60‧‧‧冷卻套 60‧‧‧ Cooling sleeve
61‧‧‧冷卻水供應流路形成構件 61‧‧‧Cooling water supply flow path forming member
62‧‧‧冷卻水排出流路形成構件 62‧‧‧Cooling water discharge flow path forming member
63、64‧‧‧口鎖緊部 63, 64‧‧‧ mouth lock
65‧‧‧冷卻水流路 65‧‧‧Cooling water flow path
70‧‧‧反射鏡 70‧‧‧Mirror
75‧‧‧罩幕平台 75‧‧‧ Covering platform
76‧‧‧工件平台 76‧‧‧Workpiece platform
77‧‧‧工件 77‧‧‧Workpiece
T1‧‧‧昇壓變壓器 T1‧‧‧Step-up transformer
D1‧‧‧二極體 D1‧‧‧ diode
C1‧‧‧平滑電容器 C1‧‧‧Smoothing capacitor
C2‧‧‧電容器 C2‧‧‧ capacitor
LL1、LL3‧‧‧線圈 LL1, LL3‧‧‧ coil
S1‧‧‧開關元件 S1‧‧‧ switching components
SL‧‧‧轉換電路 SL‧‧‧ conversion circuit
DD1‧‧‧延遲電路 DD1‧‧‧ delay circuit
PS1、PS2、PS3‧‧‧照度計 PS1, PS2, PS3‧‧‧ illuminance meter
W‧‧‧冷卻水 W‧‧‧Cooling water
M‧‧‧罩幕 M‧‧‧ mask
Q1~Q4‧‧‧開關元件 Q1~Q4‧‧‧Switching elements
L1~L8‧‧‧邏輯電路L1~L8‧‧‧ logic circuit
第1圖是表示本發明的實施形態的高壓放電燈的構成的概略斷面圖。Fig. 1 is a schematic cross-sectional view showing the configuration of a high pressure discharge lamp according to an embodiment of the present invention.
第2圖是表示第1圖的A-A線斷面圖。Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1;
第3圖是表示本發明的實施形態的高壓放電燈的構成的概略斷面圖。Fig. 3 is a schematic cross-sectional view showing the configuration of a high pressure discharge lamp according to an embodiment of the present invention.
第4圖是表示本發明的第1實施形態的饋電部的詳細構成圖。Fig. 4 is a view showing a detailed configuration of a power feeding unit according to the first embodiment of the present invention.
第5圖是表示圖示於第4圖的控制部的驅動電路的詳細圖。Fig. 5 is a detailed view showing a drive circuit of the control unit shown in Fig. 4.
第6圖是表示控制部的動作的流程圖。Fig. 6 is a flow chart showing the operation of the control unit.
第7圖是表示用以說明控制部的動作的時序圖。Fig. 7 is a timing chart for explaining the operation of the control unit.
第8圖是表示本發明的第2實施形態的饋電部的構成圖。Fig. 8 is a configuration diagram of a power feeding unit according to a second embodiment of the present invention.
第9(a)圖及第9(b)圖是表示使用於實驗的光照射裝置的構成及測定位置與照度的圖式。Fig. 9(a) and Fig. 9(b) are diagrams showing the configuration of the light irradiation device used in the experiment, and the measurement position and illuminance.
第10(a)圖及第10(b)圖是表示習知的光源的構成的圖式。 10(a) and 10(b) are diagrams showing the configuration of a conventional light source.
第11圖是表示習知的光照射裝置的構成的圖式。 Fig. 11 is a view showing the configuration of a conventional light irradiation device.
第12(a)圖及第12(b)圖是表示圖示於第11圖的光照射裝置的放電管與外管的圖示。 Fig. 12(a) and Fig. 12(b) are diagrams showing the discharge tube and the outer tube of the light irradiation device shown in Fig. 11.
1．．．饋電部1. . . Feeding department
25．．．燈座25. . . Lamp holder
64．．．口鎖緊部64. . . Port lock
26．．．接著劑26. . . Follower
63．．．口鎖緊部63. . . Port lock
17．．．金屬箔17. . . Metal foil
65．．．冷卻水流路65. . . Cooling water flow path
A．．．轉換訊號A. . . Conversion signal
60．．．冷卻套60. . . Cooling sleeve
11．．．放電管11. . . Discharge tube
71．．．反射面71. . . Reflective surface
70．．．反射鏡70. . . Reflector
13．．．密封部13. . . Sealing part
18．．．外部導線18. . . External wire
61．．．冷卻水供應流路形成構件61. . . Cooling water supply flow path forming member
W．．．冷卻水W. . . Cooling water
16．．．電極16. . . electrode
20．．．外管20. . . Outer tube
12．．．內管12. . . Inner tube
10．．．高壓放電燈10. . . High pressure discharge lamp
62．．．冷卻水排出流路形成構件62. . . Cooling water discharge flow path forming member
75．．．罩幕平台75. . . Mask platform
M．．．罩幕M. . . Mask
77．．．工件77. . . Workpiece
76．．．工件平台76. . . Workpiece platform
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| CA3072617A1 (en) * | 2017-08-22 | 2019-02-28 | Photoscience Japan Corporation | Discharge lamp and discharge lamp apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW494440B (en) * | 1998-10-01 | 2002-07-11 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dimmable discharge-lamp for dielectric prevented discharges |
| JP2008084684A (en) * | 2006-09-27 | 2008-04-10 | Toshiba Lighting & Technology Corp | Discharge lamp lighting device and illumination device |
| TW200826744A (en) * | 2006-10-18 | 2008-06-16 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Ignition device of high pressure discharge lamp, high pressure discharge lamp and method of igniting gas discharge in high pressure discharge lamp |
| JP2008146962A (en) * | 2006-12-08 | 2008-06-26 | Ushio Inc | High-pressure discharge lamp, its manufacturing method, and light irradiation device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134494A (en) * | 1980-03-24 | 1981-10-21 | Toshiba Electric Equip | Device for firing discharge lamp |
| US4724361A (en) * | 1984-12-14 | 1988-02-09 | Matsushita Electric Works, Ltd. | High pressure discharge lamp |
| JPS61165999A (en) * | 1985-01-17 | 1986-07-26 | 松下電工株式会社 | High pressure discharge lamp |
| JP4190734B2 (en) * | 2001-01-15 | 2008-12-03 | ウシオ電機株式会社 | Dielectric barrier discharge lamp light source device |
-
2008
- 2008-09-11 JP JP2008233117A patent/JP5309819B2/en not_active Expired - Fee Related
-
2009
- 2009-07-01 TW TW098122296A patent/TWI418250B/en not_active IP Right Cessation
- 2009-07-16 KR KR1020090064990A patent/KR101246412B1/en active IP Right Grant
- 2009-09-10 CN CN2009101728960A patent/CN101711083B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW494440B (en) * | 1998-10-01 | 2002-07-11 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dimmable discharge-lamp for dielectric prevented discharges |
| JP2008084684A (en) * | 2006-09-27 | 2008-04-10 | Toshiba Lighting & Technology Corp | Discharge lamp lighting device and illumination device |
| TW200826744A (en) * | 2006-10-18 | 2008-06-16 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Ignition device of high pressure discharge lamp, high pressure discharge lamp and method of igniting gas discharge in high pressure discharge lamp |
| JP2008146962A (en) * | 2006-12-08 | 2008-06-26 | Ushio Inc | High-pressure discharge lamp, its manufacturing method, and light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101711083B (en) | 2013-08-14 |
| TW201012301A (en) | 2010-03-16 |
| CN101711083A (en) | 2010-05-19 |
| JP5309819B2 (en) | 2013-10-09 |
| JP2010067474A (en) | 2010-03-25 |
| KR20100031062A (en) | 2010-03-19 |
| KR101246412B1 (en) | 2013-03-21 |
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| Date | Code | Title | Description |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |