CN101711083B - Lighting apparatus - Google Patents
Lighting apparatus Download PDFInfo
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- CN101711083B CN101711083B CN2009101728960A CN200910172896A CN101711083B CN 101711083 B CN101711083 B CN 101711083B CN 2009101728960 A CN2009101728960 A CN 2009101728960A CN 200910172896 A CN200910172896 A CN 200910172896A CN 101711083 B CN101711083 B CN 101711083B
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- Prior art keywords
- discharge lamp
- frequency
- lamp
- signal
- pressure discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/2006—Lamp housings characterised by the light source
- G03B21/2026—Gas discharge type light sources, e.g. arcs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
The present invention relates to a lighting apparatus which is provided with a discharge tube outside an outside tube. The inner diameter of the outer tube is approximately equal with the outer diameter of the discharge tube. In a high-voltage discharge lamp which has an outer tube that contacts with at least one part of the discharge tube, the irradiation nonuniformity generated by the unequal surface temperature is restrained. The high-voltage discharge lamp (10) is composed of the discharge tube (11) and the outer tube (20). The lighting is performed through exerting AC voltage to one pair of electrodes (16) of the high-voltage discharge lamp (10). In lightening, the high-voltage discharge lamp (10) is cooled through circulating cooling water (W) in a cooling water flowpath (65). A power supply part (1) drives a phase inverter with a stable lighting frequency f1 for lighting the lamp (10). Before the irradiation nonuniformity is generated, the lamp (10) can be lighted with a frequency f2 which settles the irradiation nonuniformity and is lower than the frequency. Therefore the density distribution nonuniformity of the cations generated in stable lighting is settled, and a state of irradiation distribution nonuniformity can be restrained.
Description
Technical field
The present invention relates to that a kind of to have two ends sealed, dispose pair of electrodes in inside relatively, and enclose at least the discharge tube of metal is arranged, and be located at the ignition device of high-pressure discharge lamp of outer tube of the foreign side of discharge tube.
Background technology
The hardening of resin of for example bonding agent etc. handle or the exposure-processed of printed base plate etc. in, as ultraviolet light source, for example using high-pressure discharge lamp (ultraviolet radiator).
This high-pressure discharge lamp (ultraviolet radiator) is can become high temperature when lamp is lit a lamp, and as ground as described in the patent documentation 1, is cooled.
At patent documentation 1, putting down in writing the water collar that dual pipe structure is set in the foreign side of discharge tube (below, in patent documentation 1 for luminous tube), and in luminous tube and water collar, flowing the technology of cooling air between the pipe.
Be shown in the light source of Fig. 1 of patent documentation 1 at Figure 10 presentation graphs.Shown in figure, possess end cap 103a, the 103b at ultraviolet radiator 101 and water collar 102 and water collar two ends.Ultraviolet radiator 101 is sealed in the two ends of straight tube-like quartz glass luminous tube 106 processed with pair of electrodes, and at inside encapsulation rare gas and mercury and metal halide.
Be provided with the ventilating opening 131 of cold air at water collar 102 1 sides' end cap 103a, and be provided with exhaust outlet 132 at the opposing party's end cap 103b.And, cooling air 105 being arranged to enter the inboard of water collar 102 shown in the arrow from ventilating opening 131 from the outside, stream is captured heat and is cooled off luminous tube 106 from the luminous tube surface in the space of luminous tube 106 with the interior pipe 121 of water collar 102.
By the described numerical example of paragraph number [0011] of patent documentation 1, patent documentation 1 is described, for example can read that the external diameter of luminous tube 106 is 24mm, and the interior pipe 121 of water collar is 26mm, and the crack is 1mm (=1000 μ m) between the two.
In Figure 10 (b) expression with perpendicular to the plane sectility patent documentation 1 described luminous tube 106 of tube axial direction and the sectional drawing of interior pipe 121.
In patent documentation 1 described cooling, because failing to cool off high-pressure discharge lamp (ultraviolet radiator) fully, patent documentation 2 described technology therefore have been developed recently.
The section that is shown in the light irradiation device of patent documentation 2 at Figure 11 presentation graphs constitutes, and is shown in the section formation of discharge tube and outer tube of the light irradiation device of Figure 11 at Figure 12 presentation graphs.In addition, Figure 12 (b) is the B-B line sectional drawing of expression Figure 12 (a).
This light irradiation device is to possess high-pressure discharge lamp 10 as light source.High-pressure discharge lamp 10 is to be bar-shaped discharge tube 11 by all, and this discharge tube 11 is disposed at the outer tube 20 that inner for example quartz glass becomes and constitutes.
At the discharge tube 11 of high-pressure discharge lamp 10 and the space between the outer tube 20, the gas blanket that is formed with air layer or utilizes suitable gas to do.
This light irradiation device has: the tubular axis extension ground along above-mentioned high-pressure discharge lamp 10 is set, and and the outer peripheral face of high-pressure discharge lamp 10 between form the cylindric coolant jacket 60 of the cooling water stream 65 that cooling water that cooling water W flows through flows through, and the inner space that is disposed at the two ends of high-pressure discharge lamp 10 and the coolant jacket 60 chilled(cooling) water supply (CWS) stream that is communicated in the cooling water stream 65 between high-pressure discharge lamp 10 and the coolant jacket 60 forms member 61 and cooling water is discharged the cooling body that stream formation member 62 constitutes.
And, penetrating direction (at Figure 11 for illumination, the rear side of high-pressure discharge lamp 10 following direction), for example section has the groove shape speculum 70 of parabolical reflecting surface 71, under the center of its 1st focus and high-pressure discharge lamp 10 (straight line at center that links the pair of electrodes 16 of high-pressure discharge lamp 10) consistent state, extending ground along high-pressure discharge lamp 10 disposes, the light that radiates from high-pressure discharge lamp 10 directly or utilize speculum 70 to reflect and as directional light, via the cover curtain M that is maintained at light shield curtain 75, be radiated at by the liquid crystal panel that be coated with for example emulsion of photoresistance etc. of mounting on work piece platform 76 or the workpiece 77 of semiconductor element etc.
In above-mentioned light irradiation device, when lighting a lamp high-pressure discharge lamp 10, be supplied with cooling water W by not shown suitable chilled(cooling) water supply (CWS) mechanism (pump).
The cooling water W that supplies, be to flow through in the cooling water stream 65 that is formed between high-pressure discharge lamp 10 and the coolant jacket 60, flow through the wall of high-pressure discharge lamp 10, particularly flow through along the outer peripheral face of outer tube 20 towards direction of principal axis and cool off high-pressure discharge lamp 10 all after, discharge stream via cooling water and form member 62 and be discharged from.
In the discharge tube of these high-pressure discharge lamps, Hg, or enclose the cation of Fe, Tl, Sn, Zn, In etc. with Hg, these are energized in lamp is lit a lamp and light is radiated.
Patent documentation 1: Japanese kokai publication hei 06-267512 communique
Patent documentation 2: TOHKEMY 2008-146962 communique
Summary of the invention
Reduce discharge tube, and and the mean gap of cooling water flow between the outer tube of outer peripheral face, that is, reduce the differing of internal diameter of the external diameter of discharge tube and outer tube, for example with mean gap as below the 100 μ m, then the Illumination Distribution of the length direction of discharge tube becomes the situation of inhomogeneous (so-called uneven illumination even).This is the situation patent documentation 1 described person, can not take place.
The result of the inventor's etc. wholwe-hearted self-criticism, this situation is to result from the gap is made also little than patent documentation 1 record as can be known.
Particularly, the member that constitutes discharge tube and outer tube is glass component, thereby its outside shape is that rough ground is inhomogeneous, so crack between discharge tube and the outer tube is for example to be subjected to ± change of 100 μ m, mean gap is when for example 100 μ m are following, and then its gap becomes change more than 100%.
That is discharge tube and outer tube are the parts that there is butt in some place, and other positions become existence for example below the 200 μ m between the crack.If with the outer peripheral face of cooling water flow at outer tube, then discharge tube is that abutment portion has good heat conductivity, and is cooled efficiently, is that the part of 200 μ m is that heat conductivity is more bad than abutment portion to this gap, and can't be cooled efficiently.At the long side direction of discharge tube, also produce the part that efficient is cooled excellently, with the part that is not cooled.
In the inside of discharge tube, enclosing has Hg, or encloses the cation of Fe, Tl etc. with Hg.These cations are in the thermal equilibrium state low part of temperature again, density uprises, and in the event of the high partial density step-down of temperature, thereby the situation of patent documentation 2 described high-pressure discharge lamps, at its length direction, the part that is cooled efficiently can make cationic density uprise, and in the part that is not cooled, then the density step-down.So can to make that cationic density distribution becomes inhomogeneous for the length direction in discharge tube, and can become inhomogeneous (uneven illumination is even) to Illumination Distribution.
In addition, the situation of patent documentation 1, mean gap is 1000 μ m, the outside shape by discharge tube and outer tube has fluctuating, even its gap for example is subjected to ± change of 100 μ m, the change in its gap is about 10% only.So patent documentation 1 described high-pressure discharge lamp is to distribute in the cooling of its length direction can take place hardly, does not also have the situation that Illumination Distribution becomes inhomogeneous (uneven illumination is even).
The present invention In view of the foregoing creates, the object of the present invention is to provide and possess discharge tube, and be located at the outer tube of its foreign side, external diameter at the internal diameter of outer tube and discharge tube is almost equal, and in outer tube and the high-pressure discharge lamp that at least a portion of discharge tube contacts, suppress uneven illumination even ignition device and ignition method.
In the present invention, carry out following processing and solve above-mentioned problem.
(1) it is sealed to possess two ends, dispose pair of electrodes relatively in inside, and enclose have that metal becomes all at least and be bar-shaped discharge tube, and be located at the outer tube of the foreign side of this discharge tube, the internal diameter of outer tube approximately equates with the external diameter of discharge tube, some local contact of outer tube and discharge tube, and the mean value that differs of the external diameter of the internal diameter of outer tube and discharge tube is as the high-pressure discharge lamp about 100 μ m, and extend ground along the tubular axis of this high-pressure discharge lamp and arrange, and and the outer tube of high-pressure discharge lamp between form the stream that cooling water flows through stream form member; And be electrically connected on this pair of electrodes and be powered at the ignition device that the power supply of above-mentioned high-pressure discharge lamp constitutes, and constitute power supply as follows.
That is, generation has the 1st signal in order to the point of safes modulation frequency f1 of the above-mentioned high-pressure discharge lamp of lighting a lamp, and have than in order to even this point of safes modulation frequency f1 of the uneven illumination that solves above-mentioned high-pressure discharge lamp also the signal of the 2nd signal of low frequency f 2 generate mechanism; And the switching mechanism of optionally exporting above-mentioned the 1st signal or the 2nd signal; And drive by above-mentioned the 1st signal or the 2nd signal, and the phase inverter that the alternating voltage of frequency f 1 or frequency f 2 is supplied in above-mentioned high-pressure discharge lamp is constituted.So, with the point of safes modulation frequency f1 high-pressure discharge lamp of lighting a lamp, and take place uneven illumination even before, convert to can solve the even frequency ratio of uneven illumination its also will be low frequency f 2 and the lamp 10 of lighting a lamp.
(2) in above-mentioned (1), above-mentioned switching mechanism has timing mechanism, by this timing mechanism, the alternating voltage of frequency f 1 is supplied in discharge lamp to begin after the 1st scheduled time, the frequency that will be supplied in the alternating voltage of above-mentioned high-pressure discharge lamp is reduced to f2 from f1, and during the 2nd scheduled time alternating voltage of said frequencies f2 is supplied in above-mentioned high-pressure discharge lamp.
(3) in above-mentioned (1), (2), point of safes modulation frequency f1[Hz] with frequency f 2[Hz] relation, be f2≤0.3f1.
(4) in above-mentioned (1), (2), (3), the metal in being enclosed in above-mentioned discharge tube contains mercury, the aforementioned stable frequency f 1[Hz that lights a lamp], be to be enclosed in the mercury density [mg/cm of discharge tube
3] as Hg, and with interelectrode distance [m] during as AL, then as fl＜(Hg/30)
-0.33* 250/AL.
In the present invention, can obtain following effect.
(1) generates the 1st signal with point of safes modulation frequency f1, and have in order to solve the 2nd signal of the low frequency f 2 of the even f1 of uneven illumination, and make conversion above-mentioned the 1st signal and the 2nd signal high-pressure discharge lamp of lighting a lamp, thereby it is inhomogeneous to solve the stable cationic density distribution that takes place when lighting a lamp, and can suppress the situation that Illumination Distribution becomes inhomogeneous (uneven illumination is even).
That is, convert to than frequency f 1 low frequency f 2 also, just can pull to cation one side's electrode side, and it is inhomogeneous to solve the cationic density distribution that takes place when point of safes modulation frequency f1 lights a lamp, and the uneven illumination that can suppress to do thus is even.
(2) use timing mechanism, be supplied in the frequency of the alternating voltage of above-mentioned high-pressure discharge lamp by conversion, with the simple mechanism that constitutes, on the no obstruction degree of practicality ground, can suppress Illumination Distribution inhomogeneous (uneven illumination is spared).
(3) by with point of safes modulation frequency f1[Hz] with frequency f 2[Hz] relation make f2≤0.3f1, can solve even inhomogeneous of uneven illumination effectively.
(4) point of safes modulation frequency f1[Hz] be to be enclosed in the mercury density [mg/cm of discharge tube
3] as Hg, and with interelectrode distance [m] during as AL, make f1＜(Hg/30)
-0.33* 250/AL can suppress acoustic resonance thus, and the look that the thick close standing wave that can suppress to utilize distribution of gas or ion takes place is done is inhomogeneous.
Description of drawings
Fig. 1 is the broad cross-section map of formation of the high-pressure discharge lamp of expression example of the present invention.
Fig. 2 is the A-A line sectional drawing of presentation graphs 1.
Fig. 3 is the broad cross-section map of formation of the high-pressure discharge lamp of expression example of the present invention.
Fig. 4 is the detailed pie graph of the power supply of expression the 1st example of the present invention.
Fig. 5 is the details drawing of the drive circuit of the presentation graphs control part that is shown in Fig. 4.
Fig. 6 is the flow chart of the action of expression control part.
Fig. 7 is the sequential chart of representing in order to the action that control part is described.
Fig. 8 is the pie graph of the power supply of expression the 2nd example of the present invention.
Fig. 9 is the formation of the expression light irradiation device that is used in experiment and graphic with illumination of locating.
Figure 10 is formation graphic of the known light source of expression.
Figure 11 is formation graphic of the known light irradiation device of expression.
Figure 12 is the discharge tube of the presentation graphs light irradiation device that is shown in Figure 11 and the diagram of outer tube.
(main element symbol description)
1: power supply, 2: boost rectifying circuit, 2a: AC power, 2b: control circuit, 3: full bridge type phase inverter, 4: starting circuit, 5: control part, 5a: fundamental frequency oscillating circuit, 5b: timing circuit, 5c: low frequency oscillating circuit, 5d: drive circuit, 5e: comparison circuit, 5f: feedback control circuit, 10: high-pressure discharge lamp, 11: discharge tube, 12: interior pipe, 13: sealing, 16: electrode, 17: metal forming, 18: outer lead, 20: outer tube, 60: coolant jacket, 61: the chilled(cooling) water supply (CWS) stream forms member, and 62: cooling water is discharged stream and formed member, 63, the 64:123 tight lock part, 65: the cooling water stream, 70: speculum, 75 ' cover curtain platform, 76: work piece platform, 77: workpiece, T1: step-up transformer, D1: polar body, C1: smmothing capacitor, C2: capacitor, LL1, LL3: coil, S1: switch element, SL: change-over circuit, DD1: delay circuit, PS1, PS2, PS3: illuminance meter, W: cooling water, M: cover curtain, Q1～Q4: switch element, L1～L8: logical circuit.
Embodiment
At first, being directed to the present invention is illustrated as the light irradiation device of object.
Light irradiation device of the present invention, above-mentioned Figure 11 is same with being shown in, and possesses high-pressure discharge lamp, and is provided with when carrying out the lighting a lamp of lamp, and the stream of the stream that the cooling water of zoning cool down lamp flows through along the outer tube wall forms the formation of member.
Fig. 1 is the broad cross-section map of formation of the light irradiation device of expression example of the present invention, and Fig. 2 is the A-A line sectional drawing of presentation graphs 1.
This light irradiation device is to possess with high-pressure discharge lamp 10 as light source, high-pressure discharge lamp 10 leads under the state of inside that to extend ground along the tubular axis of high-pressure discharge lamp 10 set being inserted, and the outer peripheral face of high-pressure discharge lamp 10 between have the cylindric coolant jacket 60 that the stream that forms the cooling water stream 65 that cooling water W flows through forms member.
Two ends at high-pressure discharge lamp 10 and coolant jacket 60, dispose chilled(cooling) water supply (CWS) stream formation member 61 and cooling water discharge stream formation member 62 that the inner space is communicated in the cooling water stream 65 between high-pressure discharge lamp 10 and the coolant jacket 60, constitute cooling body by these.
The chilled(cooling) water supply (CWS) stream forms member 61 and cooling water and discharges stream to form member 62 are all L font tubuloses roughly of being, is connected with high-pressure discharge lamp 10 and coolant jacket 60 with tubular axis for example towards the posture of horizontal direction extension.
And, by the tight oral area 63 of square side chain in the direction of principal axis, for example keep fixing the outer peripheral face of coolant jacket 60 via O shape ring (not shown), and for example keep fixing the outer peripheral face of high-pressure discharge lamp 10 by the locking oral area 64 of direction of principal axis foreign side side via O shape ring (not shown).
Penetrate direction (being following direction at Fig. 1 and Fig. 2) for illumination, rear side at high-pressure discharge lamp 10, with the consistent state in the center of its 1st focus and high-pressure discharge lamp 10 (with the straight line at the center of the pair of electrodes 16 that links high-pressure discharge lamp 10), along high-pressure discharge lamp 10 extensions dispose the groove shape speculum 70 that section for example has parabolical reflecting surface 71.
From high-pressure discharge lamp 10 radiate only directly or utilize speculum 70 to be reflected and as directional light, be irradiated onto via the cover curtain M that is held in cover curtain platform 75 by mounting workpiece 77 of the applied liquid crystal panel that emulsion such as photoresistance arranged or semiconductor element etc. for example on work piece platform 76.
At this, reflecting surface 71 be by evaporation alternatively for example the formed multilayer film in reflector inequality such as titanium dioxide and silicon form.
Pair of electrodes 16 at high-pressure discharge lamp 10 is connected with power supply 1 electrically via outer lead 18, and alternating voltage is put between pair of electrodes from power supply 1, and thus, high-pressure discharge lamp 10 is lit a lamp.
When lighting a lamp high-pressure discharge lamp 10, cooling water W is supplied by not shown suitable chilled(cooling) water supply (CWS) mechanism (pump).At this, cooling high-pressure discharge lamp 10 is to carry out recirculated cooling water W by the flow with for example 5 liters of (L)/min just can reach.
The cooling water W that supplies is the wall along high-pressure discharge lamp 10, and being specially flows through along the outer peripheral face of outer tube 20 is formed in the cooling water stream 65 between high-pressure discharge lamp 10 and the coolant jacket 60.
Below being directed to above-mentioned high-pressure discharge lamp 10 is illustrated.
High-pressure discharge lamp 10 is that the internal diameter of outer tube 20 approximately equates with the external diameter of discharge tube 11, outer tube 20 and discharge tube 11 some local contact, and the mean gap of outer tube and discharge tube is to be configured the following dual pipe constructor of 100 μ m.
In addition, referred to before assembling outer tube 20 and discharge tube 11 at this said mean gap, measure the internal diameter L4 of outer tube 20 and the external diameter L5 of discharge tube 11 at plural position, and its phase difference component is made 1/2 mean value, refer to the situation of mean value in the gap of the interelectrode footpath direction measured at the plural position in effective luminous field.
For example, the internal diameter L4 of outer tube 20 obtains as follows.
Measure the external diameter L1 of assembling outer tube 20 and discharge tube 11 outer tube 20 before, and the thickness L2 of the thickness thicker part of mensuration outer tube 20 and the thickness L3 of thin location, utilize L4=L1-L2-L3, obtain the internal diameter L4 of outer tube 20.
In addition, the external diameter L5 of discharge tube 11 is at the external diameter that assembles the discharge tube of measuring before outer tube 20 and the discharge tube 11 11.
Fig. 3 is the broad cross-section map of formation of the high-pressure discharge lamp of expression example of the present invention.
With represented same of above-mentioned Figure 11, this high-pressure discharge lamp 10 is the inside of pipe 12 in the straight tube-like that the sealed for example quartz glass in two ends becomes, respectively with respect to disposing a pair of bar-shaped electrode 16 that tungsten for example becomes, via be embedded in airtightly each electrode 16 be formed in the metal forming 17 that becomes of for example molybdenum of pipe 12 bar-shaped sealing 13 be electrically connected on from the outer end of sealing 13 and be bar-shaped discharge tube 11 towards all of 18 one-tenth of the outstanding outer leads that extends of direction of principal axis foreign side, and this discharge tube 11 is disposed at the outer tube 20 that inner for example quartz glass becomes and constitutes.Discharge tube 11 is to be fixed by solid 24 via lamp socket 25 with the two end portions of outer tube 20.
The sealing 13 of discharge tube 11 is that the both ends with the body of the constituent material of pipe 12 in for example make molten condition and collapsed seal method by decompressing inner forms, and the central portion (part that is equivalent to luminous field) that makes than discharge tube 11 is wanted path.
This high-pressure discharge lamp 10 is high-pressure mercury-vapor lamp or metal halid lamp, and in the inside of discharge tube 11, for example enclosing has 1mg/mm
3Above mercury, and enclose the rare gas that argon gas body etc. is arranged with appropriate amount.In addition, there is the halogen compound of iron (Fe), thallium (Tl), tin (Sn), zinc (Zn), indium (In) etc. also passable with mercury (Hg) inclosure, and, the mercury of not containing (Hg) person is also arranged.So, for example radiation comprises the ultraviolet light that wavelength is 350～450nm.
As shown in Figure 1, in the pair of electrodes of high-pressure discharge lamp 10, be electrically connected with power supply 1.
Fig. 4 is the detailed pie graph of the power supply of expression the 1st example of the present invention.
Boost rectifying circuit 2 is to be connected to AC power 2a, it is the rectification circuit that is constituted by step-up transformer T1, rectification diode D1, smmothing capacitor C1, convert alternating voltage to direct voltage, and the direct voltage that the boost chopper that general coil LL3, switch element S1, diode D1, capacitor C2 thereafter constitutes boosts is supplied in full bridge type phase inverter 3.
Switch element S1 at the IGBT of boost chopper or FET etc. is connected with control circuit 2b, the switching frequency by alternation switch element S1 and open and close during, become and can supply desired voltage.
Full bridge type phase inverter 3 is that the switch element Q1～Q4 by the IGBT of bridge joint shape ground connection or FET etc. is constituted.The switching (ON, OFF) of the switch element of full bridge type phase inverter 3 drives by following drive circuit.
The action of full bridge type phase inverter 3 alternatively repeats on-off switch element Q1, Q4 and switch element Q2, Q3.When turn-on switch component Q2, Q3, electric current flows at boost rectifying circuit 2 → switch element Q3 → coil LL1 → actuating coil LL2 → discharge lamp 10 → switch element Q2 → boost rectifying circuit 2.
On the one hand, as switch element Q1, when Q4 makes conducting, then the ac square wave electric current is supplied in discharge lamp 10 through the path of boost rectifying circuit 2 → switch element Q1 → discharge lamp 10 → actuating coil LL2 → coil LL1 → switch element Q4 → boost rectifying circuit 2.
Control part 5 is to be made of institutes such as multivibrator, LC oscillating circuits, fundamental frequency oscillating circuit 5a by the signal A that sends the fundamental oscillation waveform, and send and also to want the low-frequency oscillatory network 5c of the signal B of low frequency than this signal A, and the timing circuit 5b that is sent in the timing signal T that changes switching of fixing time constitutes.Each signal A, T, B that above-mentioned fundamental frequency oscillating circuit 5a, timing circuit 5b, low-frequency oscillatory network 5c export are made up with drive circuit 5d.
Be directed to each signal A, B, T is combined and synthetic in order to the signal of controlling full bridge type phase inverter 3, uses Fig. 5 to Fig. 7 to be illustrated.
Fig. 5 is the details drawing of expression drive circuit.
Having the signal A of the frequency f 1 that oscillating circuit 5a exports, is the input terminal that is input to the side of logical circuit L1 ("AND" circuit), and at the opposing party's of logical circuit L1 input terminal, input has the output signal T of timing circuit 5b.Described as follows shown in Figure 7, the output signal T of timing circuit 5b, be for example when the decline of signal A, to be altered to low level (L position standard) from high levels (H position standard), or be altered to the signal of high levels (H position standard) from low level (L position standard), the 1st fixed cycle of signal A not state is altered to L position standard from H, and the 2nd fixed cycle of signal A not state be altered to H position standard from L.
It is punctual that logical circuit L1 is that timing circuit 5b is output as the H position, then output signal A.
And the output signal T of timing circuit 5b is input to logical circuit L2 (phase inverter) and by paraphase, and is input to the side's of logical circuit L3 ("AND" circuit) input terminal.The output [have frequency f 2 (the signal B of f2＜f1)] of low-frequency oscillatory network 5c is arranged in the opposing party's of logical circuit L3 input terminal input.Logical circuit L3 is that the output signal T of timing circuit 5b is that the L position is punctual, output signal B.
The output of logical circuit L1, L2 is the input terminal that is input to logical circuit L4 (OR circuit), and logical circuit L4 is that to be output as the H position punctual as timing circuit 5b, output signal A then, and to be output as the L position punctual as timing circuit 5b, then output signal B.That is, constitute change-over circuit SL with timing circuit 5b and logical circuit L1, L2, L3, L4, and change-over circuit SL is in response in the output signal T of timing circuit 5b, optionally output signal A or signal B.
The output signal C1 of logical circuit L4 is input to delay circuit DD1, and delay circuit DD1 is the signal C2 of output delay signal C1.Signal C1, C2 are the input terminals that is input to logical circuit L5 ("AND" circuit), and logical circuit L5 is the signal X of its coincidence AND signal of output.This signal X is the driving signal that becomes switch element Q1, the Q4 of full bridge type phase inverter 3.
And, signal C1, C2 are at logical circuit L6, L7 (phase inverter) is by paraphase, and be input to the input terminal of logical circuit L8 ("AND" circuit), and logical circuit L8 is the signal Y of its coincidence AND signal of output, and this signal Y is the driving signal that becomes switch element Q2, the Q3 of full bridge type phase inverter 3.
Fig. 6 is the flow chart of the action of expression control part, and Fig. 7 is the sequential chart of expression control part, and utilizes Fig. 5, Fig. 6, Fig. 7 that action is described.
At first, at step S1, make the signal A of fundamental oscillation waveform from fundamental frequency oscillating circuit 5a.
Afterwards, at step S2, based on fundamental oscillation waveform, the waveform of lighting a lamp of generated frequency f1, f2, timing waveform.That is, the signal A that is exported with oscillating circuit 5a serve as the basis at low-frequency oscillatory network 5c, make low-frequency signal B also than signal A, again, use signal A at timing circuit 5b, be produced on the fix time timing signal T of conversion switching of institute.
In step 3, composite signal A (frequency f 1), signal B (frequency f 2) and signal T, and driving signal X, the Y of switch element Q1～Q4 that IGBT that makes full bridge type phase inverter etc. constitutes.
In step 4, according to X, Y waveform, above-mentioned switch element Q1～Q4 is opened and closed, and exchanges and light a lamp.
That is, signal T be H position standard during, signal X, the Y of output point of safes modulation frequency f1 are with the point of safes modulation frequency f1 high-pressure discharge lamp of lighting a lamp.
Then, the point of safes modulation frequency f1 before even with high-pressure discharge lamp generation uneven illumination begin to light a lamp through fixed time after, with signal T as L position standard, and with the frequency f 2 lower than the point of safes modulation frequency f1 high-pressure discharge lamp of lighting a lamp.
At this moment, the cation of the discharge tube of high-pressure discharge lamp is that low frequency is transfused to, and makes the time that is pulled to negative electrode become for a long time, and confuses the cation in the plasma.Can become cationic distribution equally by its mixing effect, also can solve inhomogeneous that cation distributes when being transfused to than point of safes modulation frequency f1, and it is even to suppress uneven illumination.
In addition, in the 5th circuit, the signal C2 that delay circuit DD1 generates delay is set, carry out the logic product of signal C1 and signal C2 (or its reversed phase signal), and when the conducting of signal X and during the conducting of signal Y during, the signal that both sides are set became between the stand-down of closing.This is side by side to be switched on regard to ruined problem in order to solve as if switch element Q1～Q4, and forms time dead.
In this example, generation has the signal A of point of safes modulation frequency f1, and the signal B with frequency f 2 lower than f1, by timing circuit 5b, by each scheduled time switching signal A and signal B, and the signal by point of safes modulation frequency f1, and can solve uneven illumination even than its frequency also the signal of low frequency f 2 drive the switch element Q1～Q4 of full bridge type phase inverter 3, make the high-pressure discharge lamp of lighting a lamp, thereby the cationic density distribution that can solve when occurring in stable lighting a lamp is inhomogeneous, can suppress the situation that Illumination Distribution becomes inhomogeneous (uneven illumination is even).
That is, convert the frequency f 2 lower than point of safes modulation frequency f1 to by each scheduled time, cation is pulled to a side electrode side, and it is inhomogeneous to solve the cationic density distribution that takes place when point of safes modulation frequency f1 lights a lamp, and the uneven illumination that can suppress to do thus is even.
In addition, knowing the time that high-pressure discharge lamp generation uneven illumination is even in advance, thereby the signal T of above-mentioned timing circuit 5b, is in the scheduled time that uneven illumination is even before occurring in high-pressure discharge lamp, is set at the opportunity of switching signal A, B.
Also have, shown in the experimental result described as follows, low frequency f2 is more than the 5Hz, and if at below 30% of point of safes modulation frequency f1, then one side can suppress electrode deformation, and it is even that one side can suppress uneven illumination effectively.
And, as the opportunity that low frequency f2 is inserted in point of safes modulation frequency f1, preferable for before cationic uneven distribution takes place, implementing.So, with point of safes modulation frequency f1 begin to light a lamp after 10 minutes preferable with interior insertion low frequency f2.
Also have, low frequency f2 be inserted into during, be 1 cycle in cycle to 10 (1 cycle be the switching of signal of frequency f 2 during), with point of safes modulation frequency f1 light a lamp during, be to be that scope between 0.1～6 second is preferable as the time.
In addition, with low frequency f2 light a lamp during and cycle of lighting a lamp with low frequency f2, be the decision makers of institute such as quantity of the part of the area of the specification according to lamp, the condition of lighting a lamp, outer tube and luminous tube institute butt or butt.
At this, in exchanging the lamp of lighting a lamp, by acoustic resonance, can take place uneven illumination even for before just knew (for example, with reference to the 2nd page of upper left hurdle of Japanese kokai publication sho 63-285899 communique the 15th capable～etc.).
Acoustic resonance is that the condition that satisfies following formula (1) takes place.Wherein, represented fa is the acoustic resonance frequency at following formula (1), and m is constant, and V is velocity of sound (m/s), and AL is interelectrode distance (unit: m).
fa＝mv/(2AL) …(1)
Satisfy should the condition of (1) formula under, the crowd knows that at the direction of principal axis generation gas molecule of lamp or the mutually close standing wave of ionization ion (being called " acoustic resonance ") irregular colour to take place even.
At the velocity of sound V of (1) formula, generally with specific heat ratio γ, density p (unit: kg/m
3) and pressure ρ (unit: N/m
2) can represent [with reference to time formula (2)].
v＝(γp/ρ)
0.5 …(2)
With (2) formula substitution (1) formula, then become following formula (3).
fa＝m(γp/ρ)
0.5/(2AL) …(3)
This acoustic resonance frequency f a exists with ... the vapour pressure of enclosing thing, gas density, temperature etc.
At the lamp of reality, these numerical value are also different, and to lamp size (internal diameter, interelectrode distance, these ratio) or the condition of lighting a lamp (input), the cooling condition of discharge tube (internal surface temperature etc.) has very big interdependent distribution, thereby must obtain closely by sample plot.
The present invention suppresses uneven illumination to spare as purpose, and this uneven illumination is even to be former as also take place by acoustic resonance above-mentionedly, thereby it is preferable also to suppress acoustic resonance.
So, obtain the scope that point of safes modulation frequency f1 of the present invention does not satisfy above-mentioned acoustic resonance frequency f a experimentally.
Its result, knowing becomes following condition (4) approx.Wherein, be to enclose mercury density (unit: mg/cm at the represented Hg of condition (4)
3).AL is interelectrode distance (unit: m) same as described above.
f1＜(Hg/30)
-0.33×250/AL …(4)
In the ignition device of Fig. 4, use is carried out the conversion of signal A and signal B with the change-over circuit SL that become with logical circuit L1～L4 of timing circuit 5b of fixed time conversion, thought is as the mechanism of switching signal A and signal B, the person that is not defined to the timing circuit uses following illustrated mechanism also passable.
Fig. 8 is the pie graph of the power supply of expression the 2nd example of the present invention, and utilization illustrates other configuration example with figure.
The ignition device that is shown in Fig. 8 be the length direction along high-pressure discharge lamp arrange plural illuminance meter PS1, PS2, PS3 ... and the comparison circuit 5e relatively utilize the measurement result that this illuminance meter does mutually is set, and become more than the certain value feedback control circuit 5f of switching signal A and signal B then when differing of its output.
That is, replace the timing circuit 5b of Fig. 4, comparison circuit 5e and feedback control circuit 5f are set, and according to the comparative result of comparison circuit 5e, utilize feedback control circuit 5f to come switching signal A and signal B.
Fig. 8 is that only to generate the circuit of the signal T that drive circuit 4d is moved different, and other formation is with to be shown in Fig. 4 person substantially the same, below, only explanation and Fig. 4 part inequality.
When carrying out the lighting a lamp of lamp, be positioned at the mode of the interelectrode footpath direction of high-pressure discharge lamp 10, be provided with plural illuminance meter PS1, PS2, PS3 ... (situation that following conduct is provided with 3 illuminance meter PS1, PS2, PS3 is illustrated).
Plural number illuminance meter PS1, PS2, PS3 are each illuminance meters of measuring the length direction of high-pressure discharge lamp 10, and its result are delivered letters to comparison circuit 5e.In comparison circuit 5e, relatively utilize each illuminance meter PS1, PS2, PS3 ... the measurement result of doing, and in measurement result, produce the above deviation of certain certain value, then switching signal D is delivered letters to feedback control circuit 5f.
Feedback control circuit 5f is the Illumination Distribution of the length direction of high-pressure discharge lamp 10 when departing from from deciding scope, then the signal of transfer point modulation frequency is delivered letters to drive circuit 5d.That is feedback control circuit 5f makes L position standard with signal E, and drive circuit 5d becomes L position standard as this signal E.Then the frequency with driving signal X, the Y of the switch element Q1～Q4 of full bridge type phase inverter converts f2 to from point of safes modulation frequency f1.
Thus, when the deviation of the measurement result that solves above-mentioned illuminance meter, then comparison circuit 5e stops to deliver letters of switching signal D, feedback control circuit 5f with signal E as H position standard.Drive circuit 5d becomes H position standard as this signal E, and then the frequency retrieval with driving signal X, the Y of the switch element Q1～Q4 of full bridge type phase inverter becomes point of safes modulation frequency f1.
Saidly decide scope at this, refer to the shone thing that shines by from the ultraviolet ray of high-pressure discharge lamp 10, the uniformity of the Illumination Distribution of being allowed is arranged, and can keep the inhomogeneity scope of this Illumination Distribution of allowing, for example refer to ± situation of 10% Illumination Distribution.
In addition, it is basically with to be shown in Fig. 5 identical that the inside of drive circuit constitutes, and it moves also as illustrated in fig. 7, and in Fig. 5, above-mentioned signal E is input to the terminal that signal T is transfused to.
The place inequality of above-mentioned the 1st example and this example, it is the opportunity that converts f2 from point of safes modulation frequency f1 to, by being fixed time not, and different on by the situation that whether departs from from fixed Illumination Distribution at this example, effect, effect beyond it are common at the 1st example.
In order to confirm effect of the present invention, carry out following experiment.
(1) experimental example 1
The formation that is used in the light irradiation device of experiment is shown in Fig. 9 (a), has the formation same with the light irradiation device that is shown in above-mentioned Fig. 1, its specification is as described below.
Discharge tube (luminous tube): internal diameter 5.4mm external diameter 9mm
Outer tube: internal diameter 9.15mm external diameter 12mm
Interelectrode distance: 500mm
Enclose thing
Mercury density 5mg/cm
3
The flow of the cooling water of stream between water collar and outer tube: 20L/min
Being used in the condition of lighting a lamp of the high-pressure discharge lamp of experiment, is input point of safes modulation frequency f1 in 1 second, and the mode of afterwards low frequency f2 being imported 1 periodic component (with the switching of frequency f 1 as 1 cycle) is the signal of incoming frequency f1 and f2 alternatively.That is, point of safes modulation frequency f1 be 1 second → low frequency f2 be 1 cycle → point of safes modulation frequency f1 be 1 the second →) ... (following same).
The point modulation frequency is as follows.
Point of safes modulation frequency f1:100,500,800,1000Hz
Low frequency f2:3,5,10,30,50,100,150,200,300,500Hz
In the interelectrode footpath of the high-pressure discharge lamp that is used in experiment direction foreign side, dispose plural illuminance meter via coolant jacket.This plural number illuminance meter is that the length direction along high-pressure discharge lamp disposes, and measures the Illumination Distribution of its length direction.
This illuminance meter be from the electrode front end towards direction of principal axis apart from the position of 5cm, disposed towards the length direction of high-pressure discharge lamp at interval with 10mm.
And, measure position from the electrode front end apart from 5cm towards not other the illumination before the 5cm of electrode of opposite of direction of principal axis 1cm by illuminance meter, shown in Fig. 9 (b), each illumination of being measured by each illuminance meter, obtain mean value, observe the extent of deviation (that is uneven illumination is even) of its mean value and each illumination.
The result who observes is collected in table 1.In table 1, conduct when by mean value maximum extent of deviation 15% or more being arranged *, during extent of deviation between maximum 10%～15% as △, during extent of deviation between the maximum 5%～10% as zero, and during the extent of deviation of maximum less than 5% as ◎.
Table 1
| (explanation of mark) ◎: effect is big by zero: △ produces effect: some effect *: almost there is not effect |
As shown in table 1, low frequency f2 is 30% when following of point of safes modulation frequency f1, then can obtain the even inhibition of uneven illumination.
But, when low frequency f2 is 3Hz, the generating electrodes distortion.This is, from side's electrode towards the opposing party's electrode stream electric current during of a specified duration excessively, that is direct current is of a specified duration excessively during lighting a lamp, thereby may can be out of shape for simultaneously being subjected to the electrode that electronics bumps against.So the preferred range of low frequency f2 is 5≤f2≤0.3f1.
In addition, in table 1, being illustrated in point of safes modulation frequency f1 is 1000Hz, all is △, is scope below the 800Hz for this at point of safes modulation frequency f1, the even repressed situation of expression uneven illumination.This is, the following scope of f1:800Hz is the f1＜(Hg/30) that is equivalent in (4) formula of the used condition of above-mentioned said inhibition acoustic resonance
-0.33* 250/AL is so the uneven illumination that can suppress as can be known to utilize acoustic resonance to do is spared.
(2) experimental example 2
The luminous length (interelectrode distance) of lamp is changed to 1000mm, and with above-mentioned experimental example 1 identical conditions under experimentize.The lamp specification is as described below.
Discharge tube (luminous tube): internal diameter 5.4mm external diameter 9mm
Outer tube: internal diameter 9.15mm external diameter 12mm
Luminous length (interelectrode distance): 1000mm
Enclose thing
Mercury density 5mg/cm
3
The flow of the cooling water of stream between water collar and outer tube: 25L/min
Its result is shown in table 2.
This situation is between frequency f 1 is for 400Hz and 500Hz, and the even inhibition of uneven illumination that utilizes acoustic resonance to do as can be known acts on to some extent.
Table 2
| (explanation of mark) ◎: effect is big by zero: △ produces effect: some effect *: almost there is not effect |
(3) experimental example 3
The inclosure thing of change lamp uses metal halid lamp, and carries out same experiment under above-mentioned experimental example 1 identical conditions.The lamp specification is as described below.
Discharge tube (luminous tube): internal diameter 4.6mm external diameter 10.3mm
Outer tube: internal diameter 10.45mm external diameter 13mm
Luminous length (interelectrode distance): 500mm
Enclose thing
Mercury density 2.5mg/cm
3
Ferric iodide: 0.45mg/cm
3
Iodate is blunt: 0.06mg/cm
3
The flow of the cooling water of stream between water collar and outer tube: 20L/min is shown in table 3 with its result.
Table 3
| (explanation of mark) ◎: effect is big by zero: △ produces effect: some effect *: almost there is not effect |
This situation is between frequency f 1 is for 1000Hz and 1200Hz, and the even inhibition of uneven illumination that utilizes acoustic resonance to do as can be known acts on to some extent.That is, compare with the addition of metal beyond the mercury, if the addition of mercury (than other metals more than about 5 times) more for a long time, the f1 of applicable above-mentioned (4) formula＜(Hg/30) as can be known
-0.33* 250/AL.
In addition, by the experimental result of above-mentioned (2)-(3), in the formula of the 5≤f2≤0.3f1 of the preferable scope of experimental example 1 resulting low frequency f2, be identified also the lamp applicable to other.
Claims (5)
1. ignition device comprises:
High-pressure discharge lamp, it is sealed to possess two ends, dispose pair of electrodes in inside relatively, and enclose at least and have all that metal constitutes to be bar-shaped discharge tube, and be located at the foreign side of this discharge tube, be closely to connect the outer tube that the glass of configuration constitutes below the 100 μ m by the mean gap with discharge tube;
Stream forms member, extend ground along the tubular axis of above-mentioned high-pressure discharge lamp and arrange, and the outer tube of high-pressure discharge lamp between form the stream that cooling water flows through; And
Power supply is electrically connected on this pair of electrodes and to the power supply of above-mentioned high-pressure discharge lamp,
It is characterized by:
Above-mentioned power supply comprises:
Signal generates mechanism, generates the 1st signal that has for the point of safes modulation frequency f1 of above-mentioned high voltage discharge lamp lighting, and has the 2nd signal for the even frequency f 2 lower than this point of safes modulation frequency f1 of the uneven illumination that solves above-mentioned high-pressure discharge lamp;
Above-mentioned the 1st signal or the 2nd signal are optionally exported in switching mechanism; And
Phase inverter drives by above-mentioned the 1st signal or the 2nd signal, and the alternating voltage of frequency f 1 or frequency f 2 is supplied in above-mentioned high-pressure discharge lamp.
2. ignition device as claimed in claim 1,
Above-mentioned switching mechanism has timing mechanism, by this timing mechanism, the alternating voltage of frequency f 1 is supplied in discharge lamp to begin after the 1st scheduled time, the frequency that will be supplied in the alternating voltage of above-mentioned high-pressure discharge lamp is reduced to f2 from f1, and during the 2nd scheduled time alternating voltage of said frequencies f2 is supplied in above-mentioned high-pressure discharge lamp.
3. ignition device as claimed in claim 1 or 2, wherein,
The aforementioned stable frequency f 1[Hz that lights a lamp] with frequency f 2[Hz] relation, be f2≤0.3f1.
4. ignition device as claimed in claim 1 or 2,
The metal that is enclosed in the above-mentioned discharge tube contains mercury,
The aforementioned stable frequency f 1[Hz that lights a lamp], will be enclosed in the mercury density [mg/cm of discharge tube
3] as Hg, and with interelectrode distance [m] during as AL, then
f1<（Hg/30）
-0.33×250/AL。
5. ignition device as claimed in claim 3,
The metal that is enclosed in the above-mentioned discharge tube contains mercury,
The aforementioned stable frequency f 1[Hz that lights a lamp], will be enclosed in the mercury density [mg/cm of discharge tube
3] as Hg, and with interelectrode distance [m] during as AL, f1＜(Hg/30) then
-0.33* 250/AL.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008233117A JP5309819B2 (en) | 2008-09-11 | 2008-09-11 | Lighting device |
| JP233117/2008 | 2008-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101711083A CN101711083A (en) | 2010-05-19 |
| CN101711083B true CN101711083B (en) | 2013-08-14 |
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|---|---|---|---|
| CN2009101728960A Expired - Fee Related CN101711083B (en) | 2008-09-11 | 2009-09-10 | Lighting apparatus |
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| Country | Link |
|---|---|
| JP (1) | JP5309819B2 (en) |
| KR (1) | KR101246412B1 (en) |
| CN (1) | CN101711083B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2477463B (en) * | 2011-05-17 | 2013-01-16 | Greentek Green Solutions 2009 Ltd | System and method for ignition and operation of a high-intensity discharge lamp |
| CA3072617A1 (en) * | 2017-08-22 | 2019-02-28 | Photoscience Japan Corporation | Discharge lamp and discharge lamp apparatus |
| AU2022402162A1 (en) * | 2021-12-02 | 2024-05-23 | FLAXTEC GmbH | Gas-discharge lamp, lamp array for high operating voltages, and use of such lamps |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134494A (en) * | 1980-03-24 | 1981-10-21 | Toshiba Electric Equip | Device for firing discharge lamp |
| US4724361A (en) * | 1984-12-14 | 1988-02-09 | Matsushita Electric Works, Ltd. | High pressure discharge lamp |
| JPS61165999A (en) * | 1985-01-17 | 1986-07-26 | 松下電工株式会社 | High pressure discharge lamp |
| DE19845228A1 (en) * | 1998-10-01 | 2000-04-27 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dimmable discharge lamp for dielectric barrier discharges |
| JP4190734B2 (en) * | 2001-01-15 | 2008-12-03 | ウシオ電機株式会社 | Dielectric barrier discharge lamp light source device |
| JP2008084684A (en) * | 2006-09-27 | 2008-04-10 | Toshiba Lighting & Technology Corp | Discharge lamp lighting device and illumination device |
| DE102006049128A1 (en) * | 2006-10-18 | 2008-04-30 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Ignition device for a high-pressure discharge lamp and high-pressure discharge lamp and method for igniting a gas discharge in a high-pressure discharge lamp |
| JP4587130B2 (en) * | 2006-12-08 | 2010-11-24 | ウシオ電機株式会社 | High pressure discharge lamp, manufacturing method thereof, and light irradiation device |
-
2008
- 2008-09-11 JP JP2008233117A patent/JP5309819B2/en not_active Expired - Fee Related
-
2009
- 2009-07-01 TW TW098122296A patent/TWI418250B/en not_active IP Right Cessation
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| JP特开2008-146962A 2008.06.26 |
| JP特开2008-84684A 2008.04.10 |
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| TW201012301A (en) | 2010-03-16 |
| CN101711083A (en) | 2010-05-19 |
| JP5309819B2 (en) | 2013-10-09 |
| JP2010067474A (en) | 2010-03-25 |
| KR20100031062A (en) | 2010-03-19 |
| KR101246412B1 (en) | 2013-03-21 |
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