TWI412057B - Short arc discharge lamp - Google Patents
Short arc discharge lamp Download PDFInfo
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- TWI412057B TWI412057B TW99118385A TW99118385A TWI412057B TW I412057 B TWI412057 B TW I412057B TW 99118385 A TW99118385 A TW 99118385A TW 99118385 A TW99118385 A TW 99118385A TW I412057 B TWI412057 B TW I412057B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
Abstract
Description
本發明是關於短弧型放電燈，特別是有關：適用於半導體或液晶的製造領域等的曝光用光源或放映機的背光用光源的短弧型放電燈。The present invention relates to a short arc type discharge lamp, and more particularly to a short arc type discharge lamp which is suitable for use in an exposure light source such as a semiconductor or liquid crystal manufacturing field or a backlight source for a projector.
短弧型放電燈，由於被相對向配置於發光管內的一對電極之前端距離短且靠近點光源，故藉由與光學系的組合，作為「曝光裝置用或放映機的背光用」之光源而利用。Since the short arc type discharge lamp has a short distance from the front end of the pair of electrodes disposed in the arc tube and is close to the point light source, it is used as a "light source for the exposure device or the backlight of the projector" by the combination with the optical system. And use.
日本特開平10-188890號公報揭示習知的短弧型放電燈。Japanese Laid-Open Patent Publication No. Hei 10-188890 discloses a conventional short arc type discharge lamp.
第7圖中顯示該習知的短弧型放電燈，短弧型放電燈1的發光管10具備：位於中央且被形成略球狀的發光部11、和其兩端的封止部12。於發光管10內，將由鎢等所構成的陰極21和陽極31如互相面對面般地相對向配置，且於內部的發光空間S中封入水銀、氙等的發光物質。The conventional short-arc discharge lamp 10 is shown in Fig. 7. The arc tube 10 of the short-arc discharge lamp 1 is provided with a light-emitting portion 11 which is formed at a center and which is formed in a slightly spherical shape, and a sealing portion 12 at both ends thereof. In the arc tube 10, the cathode 21 and the anode 31 made of tungsten or the like are disposed to face each other as opposed to each other, and a light-emitting substance such as mercury or ruthenium is sealed in the internal light-emitting space S.
被連接設置於上述陰極21及陽極31的電極軸22、32是經由未圖示的金屬箔而封止在封止部12。The electrode shafts 22 and 32 connected to the cathode 21 and the anode 31 are sealed to the sealing portion 12 via a metal foil (not shown).
而且近年來，在半導體或液晶面板的製造步驟上所使用的上述短弧型放電燈，如日本特開2000-181075號公報所見，為了省電力化，並非經常以固定的電力來點燈，而是採用所謂「僅在曝光時以額定電力來點燈(一般性點燈)，在基板移動等的待機時，以小於前述額定電力之最小限度的電力來點燈(待機點燈)」的點燈方式(以下稱為「完全/待機點燈」)。Further, in recent years, the short-arc type discharge lamp used in the manufacturing process of a semiconductor or a liquid crystal panel, as seen in Japanese Laid-Open Patent Publication No. 2000-181075, is not always lit with a constant electric power in order to save power. It is a point of lighting (standby lighting) with a minimum power of less than the rated power during standby when the substrate is moved, such as when the substrate is moved, during the exposure. Light mode (hereinafter referred to as "full/standby lighting").
例如，反覆地在曝光時以額定電力點燈0.1～10秒，在待機時以小於額定電力的待機電力點燈0.1～100秒。For example, the rated power is turned on for 0.1 to 10 seconds at the time of exposure, and the standby power is less than the rated power for 0.1 to 100 seconds during standby.
但是，在「燈的點亮/熄滅時、或上述的完全/待機點燈時」之輸入電力的變動等時，由於從電弧往陽極流入的熱流束變化，故陽極溫度變化，且於陽極發生內部應力。However, when the input power changes during the "lighting/extinction of the lamp or the above-mentioned full/standby lighting", the heat flow from the arc to the anode changes, so the anode temperature changes and occurs at the anode. Internal stress.
此時，如第8(A)、(B)圖所示，面對電弧的陽極前端面的中央部50是溫度變化最大的部分，因此熱膨脹也變大。相對於此，在該中央部50之周邊的環狀部51溫度變化小於前述中央部50，其熱膨脹亦小。At this time, as shown in the eighth (A) and (B), the central portion 50 of the anode tip end surface facing the arc is the portion where the temperature changes the most, and therefore the thermal expansion is also increased. On the other hand, the temperature change of the annular portion 51 around the central portion 50 is smaller than that of the central portion 50, and the thermal expansion is also small.
因此，中央部50是由於該熱膨脹，而從其周邊環狀部51承受壓縮應力，結果從前端面突出而變形。Therefore, the central portion 50 receives compressive stress from the peripheral annular portion 51 due to the thermal expansion, and as a result, it protrudes from the distal end surface and is deformed.
這樣的突出為：於額定點燈時即便在陽極前端的溫度已經穩定後也不會完全地恢復原本的形狀而殘留下來的。除此之外，特別是在完全/待機點燈時，由於這樣的變形反覆產生，使突出被累積而肥大化。Such a protrusion is that, even when the temperature at the front end of the anode has stabilized at the rated lighting, the original shape is not completely restored and remains. In addition to this, particularly in the case of full/standby lighting, since such deformation occurs repeatedly, the protrusions are accumulated and enlarged.
於是，成為放電集中於已肥大化的突出部，使該突出部異常過熱，電極物質蒸發且附著於發光管內壁，該發光管內壁完全黑化，而有引起照度快速下降的問題。Then, the discharge is concentrated on the protruding portion which has been enlarged, and the protruding portion is abnormally overheated, and the electrode material evaporates and adheres to the inner wall of the arc tube, and the inner wall of the arc tube is completely blackened, which causes a problem that the illuminance rapidly decreases.
[先前技術文獻][Previous Technical Literature]
[專利文獻][Patent Literature]
[專利文獻1]日本特開平10-188890號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 10-188890
[專利文獻2]日本特開2000-181075號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-181075
本發明所欲解決的課題為：鑑於上述習知技術的問題點，特別針對採用完全/待機點燈方式的短弧型放電燈，提供一種具有陽極構造的短弧型放電燈，該陽極構造能緩和在陽極前端產生的熱應力，防止陽極前端的中央部分變形，且防止黑化。The problem to be solved by the present invention is to provide a short arc type discharge lamp having an anode structure in view of the problems of the above-mentioned prior art, particularly for a short arc type discharge lamp using a full/standby lighting method, the anode structure capable of The thermal stress generated at the front end of the anode is alleviated, the central portion of the front end of the anode is prevented from being deformed, and blackening is prevented.
為了解決上述課題，本發明的短弧型放電燈，是於陽極的前端中央部與其周邊環狀部之間，夾介有由較該陽極材料的降伏應力更小的金屬所構成的緩衝材。In order to solve the above problems, the short arc type discharge lamp of the present invention has a buffer material composed of a metal having a lower stress than the anode material between the center portion of the front end of the anode and the peripheral annular portion.
又，前述前端中央部是由獨立於陽極以外的***體所構成，該***體是夾介著前述緩衝材而***形成於陽極前端面的開口內。Further, the front end center portion is formed of an insert body other than the anode, and the insert body is inserted into the opening formed in the front end surface of the anode via the buffer material.
又，前述緩衝材是由金屬箔所構成，且被纏繞於前述***體。Further, the cushioning material is made of a metal foil and is wound around the insert.
又，前述***體是由環狀的第1***體、及夾介著緩衝材而***該第1***體的第2***體所構成。Further, the insert body is composed of a ring-shaped first insert body and a second insert body inserted into the first insert body via a cushioning material.
又，在前述環狀的第1***體之內周面，具有於陽極前端面朝半徑方向延伸的龜裂。Further, the inner circumferential surface of the annular first insertion body has a crack extending in the radial direction on the front end surface of the anode.
又，前述環狀的第1***體被分割成複數個。Further, the annular first insert is divided into a plurality of pieces.
又，前述開口為貫通至陽極之後端的貫通孔，前述***體是由電極軸所構成，該電極軸被***於前述貫通孔中，且其前端面對著電極的前端面。Further, the opening is a through hole penetrating to the rear end of the anode, and the insertion body is constituted by an electrode shaft that is inserted into the through hole and whose front end faces the front end surface of the electrode.
又，於前述陽極的前端面設置環狀的開口且形成前述前端中央部和周邊環狀部，於前述環狀開口內夾介有由燒結金屬所構成的緩衝材。Further, an annular opening is formed in the front end surface of the anode, and the front end central portion and the peripheral annular portion are formed, and a cushioning material made of sintered metal is interposed in the annular opening.
又，於前述開口的內表面或前述***體的外表面之至少其中一個，形成有前述金屬箔的餘隙槽(clearance groove)。Further, a clearance groove of the metal foil is formed on at least one of the inner surface of the opening or the outer surface of the insertion body.
又，前述餘隙槽被形成於周方向上。Further, the clearance groove is formed in the circumferential direction.
又，前述餘隙槽被形成於軸方向上。Further, the clearance groove is formed in the axial direction.
根據本發明的短弧型放電燈，因於陽極的前端中央部與其周邊環狀部之間，夾介有由較該陽極材料的降伏應力更小的金屬所構成的緩衝材，故特別在完全/待機點燈時等的期間，即使陽極前端部的溫度變化，由於前端中央部的熱變形被緩衝材所吸收，故不會產生變形而突出的現象，其結果，不會使前端中央部異常過熱，發光管的黑化不會發生。According to the short arc type discharge lamp of the present invention, since the central portion of the front end of the anode and the peripheral annular portion thereof are interposed with a cushioning material composed of a metal having a lower stress than the anode material, it is particularly complete. In the period of the standby lamp or the like, even if the temperature of the front end portion of the anode changes, the thermal deformation of the center portion of the distal end is absorbed by the cushioning material, so that the deformation does not occur and the phenomenon of protrusion does not occur. As a result, the central portion of the distal end is not abnormal. Overheating, blackening of the tube will not occur.
而且，即使該緩衝材因熱膨脹而塑性變形，因在前述***體與前述開口的至少其中一者上形成有餘隙槽，故成為緩衝材的膨脹部分侵入到該餘隙槽內，由於不會從陽極的前端面突出，且不會使該部分異常過熱，故發光管的黑化不會發生。Further, even if the cushioning material is plastically deformed by thermal expansion, a clearance groove is formed in at least one of the insertion body and the opening, so that the expanded portion of the cushioning material intrudes into the clearance groove, since it does not The front end surface of the anode protrudes without excessively overheating the portion, so blackening of the arc tube does not occur.
第1圖為顯示第1實施例的剖面圖，其中(A)為裝入的剖面圖，(B)為裝入步驟的說明圖。Fig. 1 is a cross-sectional view showing the first embodiment, in which (A) is a cross-sectional view of the loading, and (B) is an explanatory view of the loading step.
圖中，在陽極31的前端面33的中央部分，形成有朝該前端面開口的開口34。而且，將「為獨立於該陽極31以外的個體，且由與陽極相同材料所構成」的***體35成形為與前述開口34整合的形狀，且該***體35是將緩衝材36夾入其間，藉由敲入等的方式壓入/嵌插於前述開口34內。In the figure, an opening 34 opening toward the front end surface is formed in a central portion of the front end surface 33 of the anode 31. Further, the insert 35 which is "individually independent of the anode 31 and composed of the same material as the anode" is shaped into a shape integrated with the opening 34, and the insert 35 is sandwiched between the cushioning members 36. It is pressed/inserted into the opening 34 by means of knocking in or the like.
具體而言，於由鎢所構成的陽極31之前端面的開口34，***同樣由鎢所構成的***體35，為了使該***體35容易壓入，將該開口34及***體35做成前端略為尖細的錐狀為佳。Specifically, an insertion body 35 made of tungsten is inserted into the opening 34 of the front end surface of the anode 31 made of tungsten, and the opening 34 and the insertion body 35 are formed into a front end in order to facilitate the insertion of the insertion body 35. A slightly tapered cone is preferred.
緩衝材36是由：在相同溫度中，降伏應力較該陽極31及***體35更小的金屬材料所構成，具體而言，是由鉭、鉬、鈮或錸等所構成，於該實施例中為金屬箔，並被纏繞於前述***體35的外周，而與***體35同時嵌插於開口34內。The cushioning material 36 is composed of a metal material having a lowering stress than the anode 31 and the insert body 35 at the same temperature, and specifically, is composed of tantalum, molybdenum, niobium or tantalum, etc., in this embodiment. The middle is a metal foil and is wound around the outer periphery of the insert body 35, and is inserted into the opening 34 simultaneously with the insert body 35.
藉由上述方式，當構成陽極31之前端中央部的***體35熱膨脹時，該***體35與夾入於其周邊環狀部之間的緩衝材36發生高溫蠕變變形，成為吸收/緩和***體35之熱膨脹部分的形態，而不會由周邊環狀部承受壓縮應力。According to the above aspect, when the insert body 35 constituting the central portion of the front end of the anode 31 is thermally expanded, the insert body 35 and the cushioning material 36 sandwiched between the peripheral annular portions thereof are subjected to high-temperature creep deformation and become absorption/mitigation insertion. The shape of the thermally expanded portion of the body 35 is not subjected to compressive stress by the peripheral annular portion.
其結果，構成前端中央部的***體35不會變形，而且不會形成局部性的突出部。As a result, the insert body 35 constituting the center portion of the distal end is not deformed, and a local protruding portion is not formed.
因此，即使進行燈的點亮/熄滅、或長時間的完全/待機點燈，也可防止陽極前端中央部之局部性的突出，可抑制陽極材料的蒸發、及因陽極材料的蒸發所產生的照度降低。Therefore, even if the lamp is turned on/off or the long-time full/standby lighting is performed, local protrusion of the central portion of the front end of the anode can be prevented, and evaporation of the anode material and evaporation of the anode material can be suppressed. The illuminance is reduced.
第2圖為顯示第2實施例的剖面圖，其中(A)為裝入的剖面圖，(B)為裝入步驟的說明圖。Fig. 2 is a cross-sectional view showing a second embodiment, in which (A) is a cross-sectional view of the loading, and (B) is an explanatory view of the loading step.
於該實施例中，***體35是由第1***體37和第2***體38所構成。第1***體37於中央形成貫通口40且整體形成環狀，該第2***體38是夾介著緩衝材41而壓入/嵌插於該貫通口40。In this embodiment, the insertion body 35 is composed of the first insertion body 37 and the second insertion body 38. The first insertion body 37 has a through hole 40 formed in the center thereof and is formed in a ring shape as a whole, and the second insertion body 38 is press-fitted/inserted into the through hole 40 via the cushioning material 41.
將如上述方式所組成的***體35，於在外周設置緩衝材42的狀態下，壓入被形成於陽極31之前端面33的開口34。In the insert body 35 composed as described above, the opening 34 formed in the end surface 33 of the anode 31 is press-fitted in a state where the cushioning material 42 is provided on the outer circumference.
該第2實施例中之陽極31的開口34及第1***體37的貫通口40，是與上述第1實施例相同，做成若干的錐狀。又於該實施例中，緩衝材41、42是由金屬箔所構成，且分別被纏繞於第2***體38及第1***體37。The opening 34 of the anode 31 and the through hole 40 of the first insertion body 37 in the second embodiment are formed in a plurality of tapered shapes as in the first embodiment. Further, in this embodiment, the cushioning materials 41 and 42 are made of a metal foil and are wound around the second insert body 38 and the first insert body 37, respectively.
根據該實施例，由於在陽極31的前端中央部與其周邊環狀部之間夾入有2個緩衝材41、42，故對於「構成前端中央部之***體35的熱膨脹」之吸收作用發揮更進一步作用。According to this embodiment, since the two cushioning members 41 and 42 are interposed between the center portion of the front end of the anode 31 and the peripheral annular portion, the absorption of the "thermal expansion of the insertion body 35 constituting the center portion of the distal end" is further enhanced. Further role.
第3圖為顯示第3實施例的剖面圖，其中(A)為裝入的剖面圖，(B)為其重要部分的底面圖。Fig. 3 is a cross-sectional view showing a third embodiment, in which (A) is a cross-sectional view of the loading, and (B) is a bottom view of an important portion thereof.
圖中，於構成***體35之第1***體37的中央貫通口側，形成有外露於陽極31前端面且於半徑方向上呈放射狀走向的複數龜裂43。In the figure, a plurality of cracks 43 that are exposed on the front end surface of the anode 31 and radially extend in the radial direction are formed on the center through-hole side of the first insertion body 37 constituting the insertion body 35.
這樣的龜裂43是使用模擬燈具，且藉由面對上述陽極31相對向配置陰極，並於兩電極間在特定條件下放電而形成。其放電條件如下所述。Such a crack 43 is formed by using an analog lamp and by arranging the cathode opposite to the anode 31 and discharging it under specific conditions between the electrodes. The discharge conditions are as follows.
於氬氣環境中(1atm)，藉由以放電電流20A持續1秒鐘、以200A持續1秒鐘(0.5Hz)來進行10秒鐘放電，而對陽極賦予熱衝擊，促使龜裂(裂紋)產生。In an argon atmosphere (1 atm), discharge was performed for 10 seconds with a discharge current of 20 A for 1 second and 200 A for 1 second (0.5 Hz), thereby imparting thermal shock to the anode to promote cracking (cracking). produce.
藉由上述的放電，使得內側的第2***體38成為更高溫而向外側膨脹。此時，因外側的第1***體37之溫度上升不會大於第2***體38，故其熱膨脹量亦不大。因此，作為外側構件的第1***體37承受周方向的拉伸應力，一旦將其應力成為特定的大小就變得無法完全承受該應力，且有從內周朝向外周的龜裂發生。By the discharge described above, the inner second insertion body 38 is expanded to the outside at a higher temperature. At this time, since the temperature rise of the outer first insertion body 37 is not larger than the second insertion body 38, the amount of thermal expansion is not large. Therefore, the first insertion body 37 as the outer member receives the tensile stress in the circumferential direction, and when the stress is made to have a specific size, the stress cannot be completely received, and cracks from the inner circumference toward the outer circumference occur.
如上述方式所形成的龜裂43為例如：其間隙為70μm左右。The crack 43 formed as described above is, for example, a gap of about 70 μm.
根據該實施例，將陽極31的前端中央部快速地被加熱時，除了藉由緩衝材41、42對熱應力的吸收作用之外，還可緩和往周方向的熱應力，可更確實地避免該中央部的變形。According to this embodiment, when the central portion of the front end of the anode 31 is rapidly heated, in addition to the absorption of thermal stress by the cushioning members 41, 42, the thermal stress in the circumferential direction can be alleviated, which can be more reliably avoided. The deformation of the central part.
又，因為龜裂43是如朝向半徑方向延伸般地形成， 故不會對在陽極31前端之往半徑方向之熱傳導引起阻礙。Further, since the crack 43 is formed to extend in the radial direction, Therefore, the heat conduction in the radial direction at the front end of the anode 31 is not hindered.
第4圖為顯示第4實施例的剖面圖，其中(A)為裝入的剖面圖，(B)為其重要部分的底面圖。Fig. 4 is a cross-sectional view showing a fourth embodiment, in which (A) is a cross-sectional view of the loading, and (B) is a bottom view of an important portion thereof.
於該實施例中，將第1***體37朝半徑方向分割成複數個(於圖中例示4個)區塊37A，將上述區塊組合成第1***體37。在此，於各個分割區塊37A的彼此相鄰接部分形成若干的間隙44，該間隙44相當於上述第3實施例的龜裂43。In this embodiment, the first insert 37 is divided into a plurality of (four in the figure) blocks 37A in the radial direction, and the blocks are combined into the first insert 37. Here, a plurality of gaps 44 are formed in the adjacent portions of the respective divided blocks 37A, and the gaps 44 correspond to the cracks 43 of the third embodiment described above.
根據該實施例，可省略作成龜裂43之繁雜的作業，且可形成確實地於半徑方向上呈放射狀走向的間隙。According to this embodiment, the complicated work of forming the crack 43 can be omitted, and a gap which is surely radially extending in the radial direction can be formed.
第5圖為顯示第5實施例的剖面圖，於陽極31的前端中央部所形成的開口是貫通至其陽極31的後端的貫通孔45，前端部被形成略錐狀。而且，在已將由金屬箔所構成的緩衝材36纏繞於電極軸32的錐狀前端部32A的狀態下，從該貫通孔45的後方端側***，且將該前端部32A壓入陽極31，其前端面是面對著陽極31的前端面33。Fig. 5 is a cross-sectional view showing the fifth embodiment. The opening formed at the center of the front end of the anode 31 is a through hole 45 penetrating to the rear end of the anode 31, and the tip end portion is formed in a substantially tapered shape. In a state in which the cushioning material 36 made of a metal foil is wound around the tapered distal end portion 32A of the electrode shaft 32, the cushioning member 36 is inserted from the rear end side of the through hole 45, and the tip end portion 32A is pressed into the anode 31. Its front end face faces the front end face 33 of the anode 31.
根據該實施例，因***體35是由電極軸32所構成，故不用擔心前述***體自陽極31脫離，且成為：以所謂「電極軸32朝陽極31***」的一個步驟，同時將前端***體***，以謀求步驟數的減少。According to this embodiment, since the insertion body 35 is constituted by the electrode shaft 32, there is no fear that the insertion body is detached from the anode 31, and a step of inserting the electrode shaft 32 toward the anode 31 is performed while inserting the front end. Insert the body to reduce the number of steps.
而且，於上述第1圖~第5圖的實施例中，雖然緩衝材36、41、42是採用金屬箔來說明，卻不僅限於金屬箔，也可藉由將鉭粉末等作成膏狀物塗佈於***體35(第1 圖)、第1***體37及第2***體38(第2圖~第4圖)、或者電極軸32(第6圖)上，且將其***陽極31後，於真空容器中燒結而形成緩衝材。Further, in the above-described first to fifth embodiments, the cushioning members 36, 41, and 42 are described by using a metal foil, but they are not limited to the metal foil, and may be formed by applying a tantalum powder or the like as a paste. Cloth in the insert 35 (1st) Fig.), the first insert 37 and the second insert 38 (Fig. 2 to Fig. 4), or the electrode shaft 32 (Fig. 6), and inserted into the anode 31, and then sintered in a vacuum vessel to form Buffer material.
第6圖為顯示第6實施例，其中(A)為裝入的剖面圖，(B)為其底面圖。Fig. 6 is a view showing a sixth embodiment, in which (A) is a sectional view of the loading, and (B) is a bottom view thereof.
於該實施例中，於陽極31的前端面33形成有環狀的開口46，且於該陽極前端面形成前端中央部和周邊環狀部。而且，於該環狀開口46內，填充粉末的緩衝材料，藉由將其在真空中燒結而於前述前端中央部與周邊環狀部之間，形成緩衝材47。In this embodiment, an annular opening 46 is formed in the front end surface 33 of the anode 31, and a front end central portion and a peripheral annular portion are formed on the front end surface of the anode. Further, in the annular opening 46, a cushioning material 47 is formed between the front end center portion and the peripheral annular portion by sintering the buffer material of the powder in a vacuum.
根據該實施例，***於陽極31的前端部之獨立的***體並非特意成形，因此不會有其脫離之虞。According to this embodiment, the independent insert body inserted into the front end portion of the anode 31 is not intentionally formed, so that there is no detachment.
為了比較本發明與習知的陽極，進行關於以實施例1為基準之照度維持率的點燈試驗。In order to compare the present invention with a conventional anode, a lighting test regarding the illuminance maintenance rate based on Example 1 was carried out.
實驗中所用的燈為：封入水銀量30mg/cc，陽極的尺寸為直徑：25mm、全長：40mm、前端面：10mm。The lamp used in the experiment was: the amount of mercury enclosed was 30 mg/cc, and the size of the anode was 25 mm in diameter, 40 mm in total length, and the front end surface: 10mm.
使已形成於該燈之開口34的直徑(D)產生各種變化並進行實驗。The diameter (D) which has been formed in the opening 34 of the lamp was varied and experimented.
．點燈條件與評估. Lighting conditions and assessment
反覆地進行「以輸入電力5kW持續5秒、以3kW持續50秒」的點燈循環，評估在500小時點燈後之陽極前端面的突出部的高度：前端突出量(mm)。The lighting cycle of "input power of 5 kW for 5 seconds and 3 kW for 50 seconds" was repeatedly performed, and the height of the protruding portion of the anode front end surface after the 500-hour lighting was evaluated: the amount of protrusion of the front end (mm).
又，照度維持率，是以在同樣的點燈條件下之點燈開始時的波長365nm(i線)的紫外線照度為基準，計算出 500小時點燈後的照度維持率。In addition, the illuminance maintenance rate is calculated based on the ultraviolet illuminance at a wavelength of 365 nm (i line) at the start of lighting at the same lighting condition. Illumination maintenance rate after 500 hours of lighting.
本發明的燈為：以3mm、6mm、8mm作為形成於上述燈的陽極前端之開口的直徑而評估。The lamp of the present invention is evaluated by using 3 mm, 6 mm, and 8 mm as the diameter of the opening formed at the front end of the anode of the lamp.
於表1表示上述的實驗結果。The above experimental results are shown in Table 1.
由表1可得知，500小時點燈後之陽極前端的突出量，雖習知電極為0.94mm，但本發明的電極則減少為0.41~0.72mm，其結果，i線的照度維持率從習知電極的86%獲得大幅改善為89%~92%。As can be seen from Table 1, although the protrusion amount of the anode tip after 500 hours of lighting was 0.94 mm, the electrode of the present invention was reduced to 0.41 to 0.72 mm, and as a result, the illuminance maintenance rate of the i line was changed from 86% of the conventional electrode has been greatly improved to 89% to 92%.
如以上說明，由於本發明的短弧型放電燈，於陽極的前端中央部與其周邊環狀部之間，夾介有由較該陽極材料的降伏應力更小的金屬所構成的緩衝材，故特別是即使在採用完全/待機點燈方式時，也不會導致陽極前端的中央部被加熱而局部性地突出，且達到以下的效果，也就是所謂可抑制因中央部突出所引發的陽極材料的蒸發、及起因於「因陽極材料蒸發所引發之發光管的黑化」所導致的照度降低。As described above, in the short arc type discharge lamp of the present invention, a buffer material composed of a metal having a lower stress than the anode material is interposed between the central portion of the front end of the anode and the peripheral annular portion thereof. In particular, even when the full/standby lighting method is employed, the central portion of the front end of the anode is not heated and locally protruded, and the following effects are achieved, that is, the anode material caused by the protrusion of the central portion can be suppressed. Evaporation and illuminance caused by "blackening of the arc tube caused by evaporation of the anode material".
接著，針對本發明的第7實施例進行說明。本實施例是緩衝材為金屬箔時的應用例。Next, a seventh embodiment of the present invention will be described. This embodiment is an application example when the cushioning material is a metal foil.
第9圖為顯示第7實施例的剖面圖，其中(A)為裝入的剖面圖，(B)為裝入步驟的說明圖。Fig. 9 is a cross-sectional view showing the seventh embodiment, wherein (A) is a sectional view of the loading, and (B) is an explanatory view of the loading step.
圖中，於陽極31之前端面33的中央部分，形成有朝該前端面33開口的開口34。而且，將「為獨立於該陽極31以外的個體，且由與陽極相同材料所構成」的***體35成形為與前述開口34整合的形狀，且該***體35是將緩衝材36夾入其間，藉由敲入等的方式壓入/嵌插於前述開口34內。In the figure, an opening 34 opening toward the front end surface 33 is formed in a central portion of the end surface 33 of the anode 31. Further, the insert 35 which is "individually independent of the anode 31 and composed of the same material as the anode" is shaped into a shape integrated with the opening 34, and the insert 35 is sandwiched between the cushioning members 36. It is pressed/inserted into the opening 34 by means of knocking in or the like.
具體而言，是在由鎢所構成的陽極31之前端面的開口34，***同樣由鎢所構成的***體35，為了使該該***體35容易壓入，將該開口34及***體35做成前端略為尖細的錐狀為佳。Specifically, an insertion body 35 made of tungsten is inserted into the opening 34 of the end surface of the anode 31 made of tungsten. In order to facilitate the insertion of the insertion body 35, the opening 34 and the insertion body 35 are made. A tapered shape with a slightly tapered front end is preferred.
緩衝材36是由：在相同的溫度中，降伏應力較該陽極31及***體35更小的金屬材料所構成，具體而言，是由鉭、鉬、鈮或錸等所構成，於該實施例中為金屬箔，並被纏繞於前述***體35的外周，而與***體35同時嵌插於開口34內。The cushioning material 36 is composed of a metal material having a lowering stress than the anode 31 and the insert 35 at the same temperature, and specifically, is composed of tantalum, molybdenum, niobium or tantalum, and the like. In the example, a metal foil is wound around the outer circumference of the insert body 35, and is inserted into the opening 34 simultaneously with the insert body 35.
而且，在***體35的外周面被刻設有於周方向延伸之緩衝材的餘隙槽60。該餘隙槽60可為逐條獨立的圓周溝，也可為環繞成螺旋狀的螺旋溝。Further, the outer peripheral surface of the insert body 35 is engraved with the clearance groove 60 of the cushioning material extending in the circumferential direction. The clearance groove 60 may be a circumferential groove that is independent of each other, or may be a spiral groove that is spiraled around.
藉由上述方式，當構成陽極31之前端中央部的***體35熱膨脹時，該***體35與夾入於其周邊環狀部之間的緩衝材36發生高溫蠕變變形，成為吸收/緩和***體35的熱膨脹部分的形態，而不會由前述開口34之周邊的環狀部33a承受壓縮應力。According to the above aspect, when the insert body 35 constituting the central portion of the front end of the anode 31 is thermally expanded, the insert body 35 and the cushioning material 36 sandwiched between the peripheral annular portions thereof are subjected to high-temperature creep deformation and become absorption/mitigation insertion. The form of the thermally expanded portion of the body 35 is not subjected to compressive stress by the annular portion 33a around the opening 34.
其結果，也不會使構成前端中央部的***體35變形，且也不會形成局部性的突出部。As a result, the insert body 35 constituting the central portion of the distal end is not deformed, and a local protruding portion is not formed.
又，如第10圖顯示，即使緩衝材36因熱膨脹而導致塑性變形，由於其膨脹部分侵入***體35之外周面的餘隙槽60內而被吸收，故可緩和往軸方向的膨脹，其前端不會從陽極31之前端面33突出。Further, as shown in Fig. 10, even if the cushioning material 36 is plastically deformed by thermal expansion, the expanded portion is absorbed by the inflated portion of the outer peripheral surface of the insert body 35, so that the expansion in the axial direction can be alleviated. The front end does not protrude from the front end face 33 of the anode 31.
因此，即使進行燈的點亮/熄滅、或長時間的完全/待機點燈，因為可防止陽極前端中央部之局部性的突出而抑制陽極材料的蒸發，進而，防止緩衝材從陽極前端面的突出，而可抑制其蒸發，故可大幅地抑制伴隨著上述材料的蒸發所衍生的照度降低。Therefore, even if the lamp is turned on/off or the long-time full/standby lighting is performed, since the local protrusion of the central portion of the anode front end can be prevented, the evaporation of the anode material can be suppressed, and further, the buffer material can be prevented from the anode front end surface. The protrusion is suppressed, and evaporation can be suppressed, so that the illuminance reduction accompanying the evaporation of the above material can be greatly suppressed.
於上述實施例中，雖於***體35設置餘隙槽60，但第11圖所示的例子，是於陽極31之開口34的內表面刻設有餘隙槽61。In the above embodiment, the clearance groove 60 is provided in the insertion body 35. However, in the example shown in Fig. 11, the clearance groove 61 is formed on the inner surface of the opening 34 of the anode 31.
即使於該實施例中，該餘隙槽61與上述第1實施例的餘隙槽60同樣地作用，以該餘隙槽61吸收緩衝材36的熱膨脹而防止從陽極31之前端面33的突出。Even in this embodiment, the clearance groove 61 acts in the same manner as the clearance groove 60 of the first embodiment described above, and the clearance groove 61 absorbs the thermal expansion of the cushioning material 36 to prevent the protrusion from the front end surface 33 of the anode 31.
於上述第1圖～第3圖顯示的實施例中，雖然在周方向上形成有緩衝材的餘隙槽60、61，但於第12圖顯示的實施例中，是在***體35的外周面刻設有於軸方向延伸的餘隙槽62。In the embodiment shown in the first to third figures, the clearance grooves 60 and 61 of the cushioning material are formed in the circumferential direction. However, in the embodiment shown in Fig. 12, the outer periphery of the insertion body 35 is provided. A clearance groove 62 extending in the axial direction is provided in the face.
即使於該例中，「緩衝材36的熱膨脹部分侵入前述餘隙槽62內而被吸收，不會有從陽極31之前端面33的突出」的作用，是與前述實施例中周方向之餘隙槽60、61的情況相同。Even in this example, "the thermal expansion portion of the cushioning material 36 intrudes into the clearance groove 62 and is absorbed, and there is no effect of protruding from the front end surface 33 of the anode 31", which is the clearance in the circumferential direction from the foregoing embodiment. The same applies to the slots 60, 61.
當然，在該情況中，餘隙槽62亦可形成於開口34側，而非***體35側。Of course, in this case, the clearance groove 62 may also be formed on the side of the opening 34 instead of the side of the insertion body 35.
而且，雖然上述的餘隙槽60、61、62被記載成：刻設/形成於***體35的外表面、或者陽極31之開口34的內表面，但亦可分別形成於上述兩處。Further, although the above-described clearance grooves 60, 61, and 62 are described as being formed/formed on the outer surface of the insertion body 35 or the inner surface of the opening 34 of the anode 31, they may be formed in the above two places.
又，當成形上述餘隙槽時，在餘隙槽形成於***體35之外表面的情況中，例如，可藉由利用車床的切削加工、或者雷射加工等來形成，當在餘隙槽形成於陽極31的開口34之內表面的情況中，例如，可藉由利用車床的切削加工等來形成。Further, when the clearance groove is formed, in the case where the clearance groove is formed on the outer surface of the insertion body 35, for example, it can be formed by cutting processing using a lathe or laser processing or the like, when in the clearance groove. In the case of being formed on the inner surface of the opening 34 of the anode 31, for example, it can be formed by cutting processing using a lathe or the like.
而且，餘隙槽的剖面形狀亦可為三角形、梯形、圓形的一部分、或上述組合的其中任何一種。Further, the cross-sectional shape of the clearance groove may be a triangle, a trapezoid, a part of a circle, or any combination of the above.
為了比較本發明的陽極和習知的陽極及比較例的陽極，乃針對將基於實施例1的陽極作為本發明的陽極、和習知陽極及比較例的陽極，進行了關於前端突出量及照度維持率的點燈試驗。In order to compare the anode of the present invention with the conventional anode and the anode of the comparative example, the anode according to Example 1 was used as the anode of the present invention, and the anode of the conventional anode and the comparative example, regarding the amount of protrusion at the front end and the illuminance. A lighting test for maintenance rate.
實驗中所用的燈為：封入水銀量30mg/cc，陽極的尺寸為直徑：25mm、全長：40mm、前端面的半徑：Φ 8mm。The lamp used in the experiment was: the amount of mercury enclosed was 30 mg/cc, the size of the anode was 25 mm in diameter, the length was 40 mm, and the radius of the front end surface was Φ 8 mm.
此外，於本發明的陽極及習知申請案(比較例)的陽極所形成的開口34的直徑為Φ 7mm，***體35的長度為10mm。Further, the diameter of the opening 34 formed in the anode of the present invention and the anode of the prior application (comparative example) was Φ 7 mm, and the length of the insert 35 was 10 mm.
‧陽極‧anode
本發明的陽極A為：於***體35的外表面形成深度75μm、節距200μm的螺旋溝40的電極。(參照第9圖)The anode A of the present invention is an electrode which forms a spiral groove 40 having a depth of 75 μm and a pitch of 200 μm on the outer surface of the insert body 35. (Refer to Figure 9)
比較例的陽極B為：在***體35或開口34無餘隙槽的電極。(參照第1圖)The anode B of the comparative example is an electrode having no clearance groove in the insertion body 35 or the opening 34. (Refer to Figure 1)
習知例的陽極C為：無***體，且一體成形的電極。(參照第8圖)The anode C of the conventional example is an electrode having no insert and integrally formed. (Refer to Figure 8)
‧點燈條件與評估‧ lighting conditions and assessment
反覆地進行「以輸入電力4kW持續6秒、以2kW持續26秒」的點燈循環，且評估於500小時點燈後之陽極前端面的突出部的高度：前端突出量(mm)。The lighting cycle of "input electric power of 4 kW for 6 seconds and 2 kW for 26 seconds" was repeated, and the height of the protruding portion of the anode front end surface after 500 hours of lighting was evaluated: the amount of protrusion of the front end (mm).
又，照度維持率是以在同樣的點燈條件下之點燈開始時的波長365nm(i線)的紫外線照度為基準，計算出500小時點燈後的照度維持率。In addition, the illuminance maintenance rate is calculated based on the ultraviolet illuminance at a wavelength of 365 nm (i-line) at the start of lighting under the same lighting conditions, and the illuminance maintenance rate after lighting for 500 hours is calculated.
將上述的實驗結果表示於下表2，以及將其照度維持率顯示於第13圖。The above experimental results are shown in Table 2 below, and the illuminance maintenance ratio thereof is shown in Fig. 13.
由表2可得知，500小時點燈後之陽極前端的突出量：習知例的陽極C為0.94mm，比較例的陽極B改善為0.41mm，而本發明的陽極A則得知有更進一步改善且大幅地減少為0.2mm。As can be seen from Table 2, the amount of protrusion of the anode front end after 500 hours of lighting: the anode C of the conventional example was 0.94 mm, and the anode B of the comparative example was improved to 0.41 mm, while the anode A of the present invention was known to have more Further improved and greatly reduced to 0.2 mm.
其結果，如表2及第13圖所示，i線的照度維持率，雖然比較例之陽極B，是從習知例之陽極C的86%改善為92%，但本發明的陽極A則更進一步地大幅的改善為96%。As a result, as shown in Tables 2 and 13, the illuminance maintenance ratio of the i-line was improved from 86% of the anode C of the comparative example to 92% from the conventional example, but the anode A of the present invention was A further substantial improvement is 96%.
如以上說明，由於本發明的短弧型放電燈，其獨立於陽極以外的***體，是夾介著「由較該陽極材料的降伏應力更小的金屬所構成」的緩衝材，而***形成於前述陽極之前端中央部的開口內，且在前述陽極之開口的內表面或***體的外表面之至少其中一個，形成有緩衝材的餘隙槽，故特別是即使在採用完全/待機的點燈方式的情況下，不會有「陽極前端的中央部被加熱而局部性地突出」的情形，可抑制因中央部的突出所引起之陽極材料的蒸發、及因為陽極材料蒸發致使發光管黑化所引發的照度降低，且即使被***於***體與陽極開口之間的緩衝材熱膨脹，因為其膨脹部分侵入餘隙槽內而被吸收，而不會從陽極的前端面突出，故可達到防止該緩衝材異常過熱而蒸發的效果。As described above, the short arc type discharge lamp of the present invention is independent of the interposer other than the anode, and is interposed by forming a buffer material which is composed of a metal which is made of a metal having a lower stress than the anode material. In the opening in the central portion of the front end of the anode, and at least one of the inner surface of the opening of the anode or the outer surface of the insert body, a clearance groove of the cushioning material is formed, so that even in the case of using full/standby In the case of the lighting method, there is no case where the center portion of the anode tip is heated and locally protrudes, and evaporation of the anode material due to the protrusion of the center portion and evaporation of the anode material can be suppressed. The illuminance caused by the blackening is lowered, and even if the cushioning material inserted between the insertion body and the anode opening thermally expands, since the expanded portion thereof is intruded into the clearance groove and is absorbed, it does not protrude from the front end surface of the anode, so The effect of preventing the buffer material from being abnormally superheated and evaporating is achieved.
21．．．陰極twenty one. . . cathode
31．．．陽極31. . . anode
32．．．電極軸32. . . Electrode shaft
33．．．陽極前端面33. . . Anode front face
34．．．開口34. . . Opening
35．．．***體35. . . Insert
36．．．緩衝材36. . . Cushioning material
37．．．第1***體37. . . First insert
38．．．第2***體38. . . Second insert
41、42‧‧‧緩衝材41, 42‧‧‧ cushioning material
43‧‧‧龜裂43‧‧‧ cracking
44‧‧‧間隙44‧‧‧ gap
45‧‧‧貫通孔45‧‧‧through holes
46‧‧‧環狀開口46‧‧‧Circular opening
47‧‧‧緩衝材47‧‧‧ cushioning material
60‧‧‧***體之周方向的餘隙槽60‧‧‧The clearance groove in the circumferential direction of the insert
61‧‧‧開口之周方向的餘隙槽61‧‧‧The clearance slot in the circumferential direction of the opening
62‧‧‧***體之軸方向的餘隙槽62‧‧‧ clearance slot in the axial direction of the insert
[第1圖]本發明的短弧型放電燈的第1實施例的陽極之前端部的重要部分剖面圖。[Fig. 1] A cross-sectional view of an essential part of an anode front end portion of a first embodiment of a short arc type discharge lamp of the present invention.
[第2圖]第2實施例的重要部分剖面圖。[Fig. 2] A cross-sectional view of an essential part of a second embodiment.
[第3圖]第3實施例的重要部分剖面圖。[Fig. 3] A cross-sectional view of an essential part of a third embodiment.
[第4圖]第4實施例的重要部分剖面圖。[Fig. 4] A cross-sectional view of an essential part of the fourth embodiment.
[第5圖]第5實施例的重要部分剖面圖。[Fig. 5] A cross-sectional view of an essential part of a fifth embodiment.
[第6圖]第6實施例的重要部分剖面圖。[Fig. 6] A cross-sectional view of an essential part of a sixth embodiment.
[第7圖]習知技術的整體圖。[Fig. 7] An overall view of a conventional technique.
[第8圖]第7圖的重要部分說明圖。[Fig. 8] An explanatory diagram of an important part of Fig. 7.
[第9圖]第7實施例之陽極的重要部分剖面圖。[Fig. 9] A cross-sectional view of an important part of the anode of the seventh embodiment.
[第10圖]第9圖之前端部的放大剖面圖。[Fig. 10] An enlarged sectional view of the end portion before the ninth drawing.
[第11圖]第8實施例的重要部分剖面圖。[Fig. 11] A cross-sectional view of an essential part of the eighth embodiment.
[第12圖]第9實施例的重要部分剖面圖。[Fig. 12] A cross-sectional view of an essential part of a ninth embodiment.
[第13圖]顯示本發明之效果的圖表[Fig. 13] A graph showing the effects of the present invention
31．．．陽極31. . . anode
33．．．陽極前端面33. . . Anode front face
34．．．開口34. . . Opening
35．．．***體35. . . Insert
36．．．緩衝材36. . . Cushioning material
Claims (6)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009165272A JP5170573B2 (en) | 2009-07-14 | 2009-07-14 | Short arc type discharge lamp |
| JP2010029968A JP4900491B2 (en) | 2010-02-15 | 2010-02-15 | Short arc type discharge lamp |
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| Publication Number | Publication Date |
|---|---|
| TW201112303A TW201112303A (en) | 2011-04-01 |
| TWI412057B true TWI412057B (en) | 2013-10-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW99118385A TWI412057B (en) | 2009-07-14 | 2010-06-07 | Short arc discharge lamp |
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| KR (1) | KR101313513B1 (en) |
| CN (1) | CN101958221B (en) |
| DE (1) | DE102010026991B4 (en) |
| TW (1) | TWI412057B (en) |
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| US11939477B2 (en) | 2014-01-30 | 2024-03-26 | Monolith Materials, Inc. | High temperature heat integration method of making carbon black |
| US10370539B2 (en) | 2014-01-30 | 2019-08-06 | Monolith Materials, Inc. | System for high temperature chemical processing |
| PL3100597T3 (en) * | 2014-01-31 | 2023-10-23 | Monolith Materials, Inc. | Plasma torch with graphite electrodes |
| CA3055830A1 (en) | 2017-03-08 | 2018-09-13 | Monolith Materials, Inc. | Systems and methods of making carbon particles with thermal transfer gas |
| CN109427519A (en) * | 2017-08-28 | 2019-03-05 | 深圳凯世光研股份有限公司 | A kind of the recycling and reusing method and its anode electrode of short arc discharge lamp anode electrode |
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| US20010050536A1 (en) * | 1999-01-26 | 2001-12-13 | Hamamatsu Photonics K.K. | Electrode for discharge tube, and discharge tube using it |
| JP2008186790A (en) * | 2007-01-31 | 2008-08-14 | Yumex Inc | Electrode for discharge lamp, and its manufacturing method |
| TW200845100A (en) * | 2007-05-08 | 2008-11-16 | Orc Mfg Co Ltd | Electrode structure for discharge lamp |
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| JP2915368B2 (en) | 1996-12-25 | 1999-07-05 | ウシオ電機株式会社 | Short arc mercury lamp |
| DE19749908A1 (en) * | 1997-11-11 | 1999-05-12 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Electrode component for discharge lamps |
| JP2000181075A (en) | 1998-12-11 | 2000-06-30 | Ushio Inc | Lamp illumination control method of exposure device |
| JP3337658B2 (en) | 1999-01-26 | 2002-10-21 | 浜松ホトニクス株式会社 | Discharge tube electrode and discharge tube using the same |
| JP3953675B2 (en) * | 1999-03-08 | 2007-08-08 | 新日本無線株式会社 | Discharge tube |
| EP1149406B1 (en) * | 1999-11-11 | 2006-08-02 | Koninklijke Philips Electronics N.V. | High-pressure discharge lamp |
| JP3711838B2 (en) | 2000-05-11 | 2005-11-02 | ウシオ電機株式会社 | Method for producing cathode for discharge lamp |
| JP2004111235A (en) * | 2002-09-19 | 2004-04-08 | Ushio Inc | Discharge lamp |
| JP2007242469A (en) * | 2006-03-09 | 2007-09-20 | Ushio Inc | Discharge lamp |
| JP4797790B2 (en) * | 2006-05-22 | 2011-10-19 | ウシオ電機株式会社 | Discharge lamp |
| DE102006023970A1 (en) * | 2006-05-22 | 2007-11-29 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Electrode for a discharge lamp and a method for producing such an electrode |
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2010
- 2010-06-07 TW TW99118385A patent/TWI412057B/en not_active IP Right Cessation
- 2010-06-23 KR KR1020100059627A patent/KR101313513B1/en active IP Right Grant
- 2010-07-07 CN CN201010224850.1A patent/CN101958221B/en not_active Expired - Fee Related
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| US20010050536A1 (en) * | 1999-01-26 | 2001-12-13 | Hamamatsu Photonics K.K. | Electrode for discharge tube, and discharge tube using it |
| TW451251B (en) * | 1999-07-05 | 2001-08-21 | Ushio Electric Inc | Discharge lamp |
| JP2008186790A (en) * | 2007-01-31 | 2008-08-14 | Yumex Inc | Electrode for discharge lamp, and its manufacturing method |
| TW200845100A (en) * | 2007-05-08 | 2008-11-16 | Orc Mfg Co Ltd | Electrode structure for discharge lamp |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201112303A (en) | 2011-04-01 |
| CN101958221A (en) | 2011-01-26 |
| CN101958221B (en) | 2014-10-15 |
| DE102010026991A1 (en) | 2011-01-20 |
| KR20110006605A (en) | 2011-01-20 |
| KR101313513B1 (en) | 2013-10-01 |
| DE102010026991B4 (en) | 2016-05-12 |
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