JP3337658B2 - Discharge tube electrode and discharge tube using the same - Google Patents
Discharge tube electrode and discharge tube using the sameInfo
- Publication number
- JP3337658B2 JP3337658B2 JP01730099A JP1730099A JP3337658B2 JP 3337658 B2 JP3337658 B2 JP 3337658B2 JP 01730099 A JP01730099 A JP 01730099A JP 1730099 A JP1730099 A JP 1730099A JP 3337658 B2 JP3337658 B2 JP 3337658B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- main body
- electrode
- cathode
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
Landscapes
- Discharge Lamp (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、放電管用電極及び
これを用いた放電管に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge tube electrode and a discharge tube using the same.
【０００２】[0002]
【従来の技術】照明用、計測機器用の光源として、放電
管が広く用いられている。放電管は、陰極と陽極とを対
向させて放電ガス雰囲気中に封入し、陰極と陽極との間
でアーク放電を行わせることによって光を発する光源で
ある。かかる放電管には、例えば実公平４−３３８８号
公報に開示されているような電極が設けられている。す
なわち、高融点金属棒の先端に、多孔質高融点金属に易
電子放射物質を含浸させたキャップ形状の含浸型電極を
かぶせた電極である。上記電極の如く、多孔質高融点金
属に易電子放射物質を含浸させた電極を用いることで、
容易に電子放射が得られるとともに、電極先端の損傷も
少なくなる。2. Description of the Related Art Discharge tubes are widely used as light sources for lighting and measuring instruments. The discharge tube is a light source that emits light by causing a cathode and an anode to face each other and sealed in a discharge gas atmosphere and causing arc discharge between the cathode and the anode. Such a discharge tube is provided with an electrode as disclosed in, for example, Japanese Utility Model Publication No. 4-3388. That is, it is an electrode in which a cap-shaped impregnated electrode obtained by impregnating a porous high-melting-point metal with an electron-emitting substance is covered on the tip of a high-melting-point metal rod. By using an electrode obtained by impregnating a porous refractory metal with an electron-emitting substance, as in the above-described electrode,
Electron emission is easily obtained, and damage to the electrode tip is reduced.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記放電管、
特に上記放電管に用いられる上記電極には、以下に示す
ような問題点があった。すなわち上記電極は、電極の基
体部として棒状部材、すなわち高融点金属棒を用いてい
るため、電極の本体部である含浸型電極と高融点金属棒
との接触面積が小さく、含浸型電極と高融点金属との間
の熱伝達効率が著しく低い。従って、含浸型電極で発生
した熱を効率良く放散することができない。However, the above-mentioned discharge tube,
In particular, the electrode used for the discharge tube has the following problems. That is, since the electrode uses a rod-shaped member, that is, a high-melting-point metal rod as a base portion of the electrode, the contact area between the impregnated electrode, which is the main body of the electrode, and the high-melting-point metal rod is small, The heat transfer efficiency with the melting point metal is extremely low. Therefore, heat generated in the impregnated electrode cannot be efficiently dissipated.
【０００４】かかる問題点を解決すべく、電極の基体部
に凸部が形成された端面を設けて当該凸部を電極の本体
部の挿入穴に挿入し、電極の基体部と本体部との接触面
積を大きくすることにより放熱効率を高める電極が考え
られる。In order to solve such a problem, an end face having a convex portion is provided on the base portion of the electrode, and the convex portion is inserted into an insertion hole of the main body portion of the electrode, so that the base portion of the electrode and the main body portion are connected to each other. An electrode that increases the heat radiation efficiency by increasing the contact area can be considered.
【０００５】しかし上記電極においても、電極の基体部
と本体部との間にはわずかな間隙が生じ、放熱効率が十
分ではない。また、かかる間隙が生じている場合は、こ
の間隙に残留した易電子放射物質が放電管使用時の温度
上昇に伴って蒸発し、放電管の壁面に付着する。その結
果、放電管の出力光量が低下し、放電管の寿命が短くな
る。However, even in the above electrode, a slight gap is formed between the base portion and the main body of the electrode, and the heat radiation efficiency is not sufficient. When such a gap is formed, the electron-emitting substance remaining in the gap evaporates as the temperature rises when the discharge tube is used, and adheres to the wall surface of the discharge tube. As a result, the output light quantity of the discharge tube is reduced, and the life of the discharge tube is shortened.
【０００６】そこで本発明は、上記問題点を解決し、放
熱効率が高く、寿命の長い放電管及びこれに用いる放電
管用電極を提供することを課題とする。Accordingly, an object of the present invention is to solve the above-mentioned problems and to provide a discharge tube having a high heat radiation efficiency and a long life, and an electrode for a discharge tube used therefor.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
に、本発明の放電管用電極は、陰極と陽極とを対向させ
て放電ガス雰囲気中に封入し、陰極と陽極との間でアー
ク放電を行わせる放電管に用いられる放電管用電極にお
いて、高融点金属によって形成され、凸部が形成された
端面を有する基体部と、高融点金属に易電子放射物質を
含有させて形成され、一端に尖頭を有するとともに、他
端に基体部の凸部を挿入する挿入穴が形成された端面を
有する本体部とを備え、基体部の端面と本体部の端面と
の間隙をろう材で塞いでおり、基体部の端面は、本体部
の端面よりも大きいことを特徴としている。In order to solve the above-mentioned problems, a discharge tube electrode of the present invention is sealed in a discharge gas atmosphere with a cathode and an anode facing each other, and an arc discharge is formed between the cathode and the anode. In a discharge tube electrode used for a discharge tube, a base portion formed of a high melting point metal and having an end surface on which a convex portion is formed, and a high melting point metal containing an electron emitting material and formed at one end. A main body having a pointed end and an end face formed with an insertion hole for inserting the projection of the base at the other end, and closing a gap between the end of the base and the end of the main body with a brazing filler metal. The end surface of the base portion is larger than the end surface of the main body portion.
【０００８】基体部の凸部を本体部の挿入穴に挿入する
ことで、凸部が形成された基体部の端面と、挿入穴が形
成された本体部の端面とが対向する。ここで、基体部の
上記端面と本体部の上記端面との間隙をろう材で塞ぐこ
とで、本体部と基体部との間の熱伝達効率が向上する。
また、基体部の上記端面と本体部の上記端面との間隙を
ろう材で塞ぐことで、易電子放射物質が外部から当該間
隙に進入することが防止されるとともに、本体部から当
該間隙に易電子放射物質がしみ出たとしても、かかる易
電子放射物質が当該間隙から外部に出ることが防止され
る。また、基体部の上記端面を本体部の上記端面よりも
大きくすることで、本体部の放熱効率が向上する。By inserting the projection of the base into the insertion hole of the main body, the end face of the base where the projection is formed is opposed to the end face of the main body where the insertion hole is formed. Here, by closing the gap between the end face of the base portion and the end face of the main body portion with a brazing material, the heat transfer efficiency between the main body portion and the base portion is improved.
In addition, by closing the gap between the end face of the base portion and the end face of the main body portion with a brazing material, it is possible to prevent the electron-emitting substance from entering the gap from the outside and to easily enter the gap from the main body portion. Even if the electron emitting material exudes, such an electron emitting material is prevented from going outside through the gap. Further, by making the end surface of the base portion larger than the end surface of the main body portion, the heat radiation efficiency of the main body portion is improved.
【０００９】また、本発明に係る放電管用電極は、陰極
と陽極とを対向させて放電ガス雰囲気中に封入し、陰極
と陽極との間でアーク放電を行わせる放電管に用いられ
る放電管用電極において、高融点金属によって形成さ
れ、凸部が形成された端面を有する基体部と、高融点金
属に易電子放射物質を含有させて形成され、一端に尖頭
を有するとともに、他端に基体部の凸部を挿入する挿入
穴が形成された端面を有する本体部とを備え、基体部の
端面と本体部の端面との間隙をろう材で塞いでおり、ろ
う材は、間隙から本体部の側面に延びて設けられている
ことを特徴としてもよい。A discharge tube electrode according to the present invention is used for a discharge tube used for a discharge tube in which a cathode and an anode are opposed to each other and sealed in a discharge gas atmosphere, and arc discharge is performed between the cathode and the anode. A base portion formed of a high-melting-point metal and having an end surface on which a convex portion is formed, and a high-melting-point metal formed to contain an electron-emitting substance, having a peak at one end and a base portion at the other end. A main body having an end surface formed with an insertion hole for inserting the convex portion of the base portion, and a gap between the end surface of the base portion and the end surface of the main body portion is closed with a brazing material. It may be characterized in that it is provided to extend to the side surface.
【００１０】ろう材が、上記間隙から本体部の側面に延
びて設けられていることで、本体部の側面からしみ出た
易電子放射性物質が外部に出ることが防止される。[0010] Since the brazing material is provided to extend from the gap to the side surface of the main body portion, it is possible to prevent the easy-to-emit radioactive material that has exuded from the side surface of the main body portion from going outside.
【００１１】本発明の放電管用電極においては、ろう材
は、上記間隙に充填されていることを特徴としてもよ
い。In the discharge tube electrode according to the present invention, the brazing material may be filled in the gap.
【００１２】ろう材が間隙に充填されていることで、当
該ろう材を介して本体部と基体部との間の熱伝達効率が
さらに向上する。By filling the gap with the brazing material, the efficiency of heat transfer between the main body and the base portion is further improved through the brazing material.
【００１３】[0013]
【００１４】[0014]
【００１５】また、本発明の放電管用電極においては、
本体部は、多孔質の高融点金属に易電子放射物質を含浸
させた含浸型金属からなることを特徴としてもよい。Further, in the discharge tube electrode of the present invention,
The main body may be made of an impregnated metal obtained by impregnating a porous refractory metal with an electron-emitting material.
【００１６】本体部を、多孔質の高融点金属に易電子放
射物質を含浸させた含浸型金属とすることで、易電子放
射物質が本体部に均一に含有されることになり、出力光
の均一性が増す。また、含浸によって易電子放射物質を
本体部に含有させる場合は、通常、基体部の凸部を本体
部の挿入穴に挿入したあとで易電子放射物質を含浸させ
ることになるが、基体部の上記端面と本体部の上記端面
との間隙をろう材で塞いでいるため、易電子放射物質の
含浸時においても、当該易電子放射物質が上記間隙に進
入することが防止される。Since the main body is made of an impregnated metal in which a porous high melting point metal is impregnated with an electron emitting material, the electron emitting material is uniformly contained in the main body, and the output light is reduced. Increases uniformity. In addition, when the electron-emitting material is contained in the main body by impregnation, the electron-emitting material is usually impregnated after the projection of the base is inserted into the insertion hole of the main body. Since the gap between the end face and the end face of the main body is closed with the brazing filler metal, even when the electron-emitting material is impregnated, the electron-emitting substance is prevented from entering the gap.
【００１７】また、本発明の放電管用電極においては、
ろう材は、本体部及び基体部のいずれの融点よりも低
く、かつ、本体部に易電子放射物質を含浸させる含浸温
度よりも高い融点を有する材料からなることを特徴とし
てもよい。In the electrode for a discharge tube of the present invention,
The brazing material may be characterized by being made of a material having a melting point lower than both the melting points of the main body portion and the base portion and higher than an impregnation temperature at which the main body portion is impregnated with the electron emitting material.
【００１８】本体部及び基体部のいずれの融点よりも低
い融点を有するろう材を用いることで、ろう材を加熱し
て融解させ、上記間隙を塞ぐ際においても、本体部及び
基体部の形状は確保される。また、含浸温度よりも高い
融点を有するろう材を用いることで、含浸時にろう材が
蒸散したり、変形したりすることが無くなる。By using a brazing material having a melting point lower than the melting points of the main body and the base, even when the brazing material is heated and melted to close the gap, the shapes of the main body and the base are maintained. Secured. Further, by using a brazing material having a melting point higher than the impregnation temperature, the brazing material does not evaporate or deform during the impregnation.
【００１９】本発明の放電管用電極においては、ろう材
は、モリブデン−ルテニウムろう材であることを特徴と
してもよい。In the discharge tube electrode of the present invention, the brazing material may be a molybdenum-ruthenium brazing material.
【００２０】また、本発明の放電管用電極においては、
易電子放射物質は、アルカリ土類金属の単体若しくは酸
化物を含んで形成されることを特徴としてもよい。In the electrode for a discharge tube of the present invention,
The electron-emissive substance may be characterized in that it is formed of a simple substance or an oxide of an alkaline earth metal.
【００２１】易電子放射物質として、アルカリ土類金属
の単体若しくは酸化物を用いることで、本体部の仕事関
数を効果的に小さくすることが可能となる。By using a simple substance or an oxide of an alkaline earth metal as the electron emitting material, the work function of the main body can be effectively reduced.
【００２２】また、本発明の放電管用電極においては、
本体部の尖頭の先端を露出させるとともに、本体部の表
面を被覆する高融点金属からなる被膜をさらに備えたこ
とを特徴としてもよい。Also, in the discharge tube electrode of the present invention,
The semiconductor device may further include a coating made of a high melting point metal that exposes the tip of the cusp of the main body and coats the surface of the main body.
【００２３】かかる被膜を備えることで、本体部の側面
からしみ出した易電子放射性物質の外部への蒸散をより
効果的に防止できる。By providing such a coating, it is possible to more effectively prevent the emissive radioactive substance oozing out from the side surface of the main body from evaporating to the outside.
【００２４】上記課題を解決するために、本発明の放電
管は、陰極と陽極とを対向させて放電ガス雰囲気中に封
入し、陰極と陽極との間でアーク放電を行わせる放電管
であって、陰極と陽極との少なくとも一方は、上記いず
れかの放電管用電極であることを特徴としている。In order to solve the above-mentioned problems, a discharge tube according to the present invention is a discharge tube in which a cathode and an anode are opposed to each other, sealed in a discharge gas atmosphere, and arc discharge is performed between the cathode and the anode. Further, at least one of the cathode and the anode is any one of the electrodes for a discharge tube described above.
【００２５】上記いずれかの電極を用いることで、基体
部の上記端面と本体部の上記端面との間隙に、外部から
易電子放射物質が進入することが防止されるとともに、
本体部から当該間隙に易電子放射物質がしみ出たとして
も、かかる易電子放射物質が当該間隙から外部に出るこ
とが防止される。By using any one of the above electrodes, it is possible to prevent an electron-emitting substance from entering the gap between the end face of the base portion and the end face of the main body portion from the outside.
Even if the electron-emissive substance seeps out of the main body into the gap, the electron-emissive substance is prevented from leaking out of the gap.
【００２６】[0026]
【発明の実施の形態】本発明の実施形態に係る放電管に
ついて、図面を参照して説明する。なお、本発明の実施
形態にかかる放電管用電極は、本実施形態にかかる放電
管に含まれる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A discharge tube according to an embodiment of the present invention will be described with reference to the drawings. The discharge tube electrode according to the embodiment of the present invention is included in the discharge tube according to the embodiment.
【００２７】まず、本実施形態に係る放電管の構成につ
いて説明する。図１は、本実施形態に係る放電管の断面
図である。本実施形態にかかる放電管１０は、ガラスバ
ルブ１２、陰極１４及び陽極１６を備えて構成される。First, the configuration of the discharge tube according to the present embodiment will be described. FIG. 1 is a sectional view of a discharge tube according to the present embodiment. The discharge tube 10 according to the present embodiment includes a glass bulb 12, a cathode 14, and an anode 16.
【００２８】ガラスバルブ１２は石英から形成され、略
棒状の形状を有している。ガラスバルブ１２の中間部に
は、中空のガス封入部１２ａが形成され、この内部にキ
セノンなどの放電ガスが封入されている。ガス封入部１
２ａの内部には、陰極１４と陽極１６とが互いに対向し
て配置されている。陰極１４と陽極１６はそれぞれ、ガ
ラスバルブ１２の両端部に設けられた外部端子１８，２
０に電気的に接続されている。かかる外部端子１８，２
０を介して陰極１４と陽極１６との間に電圧を印加する
ことで、陰極１４と陽極１６との間にアーク放電が発生
し、光が発せられる。The glass bulb 12 is formed of quartz and has a substantially rod shape. A hollow gas sealing portion 12a is formed in the middle of the glass bulb 12, and a discharge gas such as xenon is sealed inside the hollow gas sealing portion 12a. Gas filling part 1
A cathode 14 and an anode 16 are arranged inside 2a so as to face each other. The cathode 14 and the anode 16 are connected to external terminals 18 and 2 provided at both ends of the glass bulb 12, respectively.
0 is electrically connected. Such external terminals 18 and 2
When a voltage is applied between the cathode 14 and the anode 16 via 0, an arc discharge occurs between the cathode 14 and the anode 16 and light is emitted.
【００２９】図２は、一方の電極である陰極１４の断面
図である。陰極１４は、陰極先端部２２（本体部）とリ
ード棒２４（基体部）とを備えて構成される。リード棒
２４は、モリブデン（高融点金属）によって形成されて
おり、円柱状に延びる形状を有している。ここで、リー
ド棒２４の一方の端面２４ａには、円柱状の凸部２４ｂ
が形成されている。FIG. 2 is a sectional view of the cathode 14, which is one electrode. The cathode 14 includes a cathode tip 22 (main body) and a lead rod 24 (base). The lead rod 24 is formed of molybdenum (a high melting point metal) and has a shape extending in a columnar shape. Here, one end surface 24a of the lead rod 24 has a columnar convex portion 24b.
Is formed.
【００３０】陰極先端部２２は、多孔質のタングステン
（高融点金属）にバリウム（易電子放射物質）を含浸さ
せて形成される。アルカリ土類金属であるバリウムを含
浸させることで、陰極先端部２２の仕事関数を小さくす
ることができ、電子の放出が容易となる。また、陰極先
端部２２は、陽極１６に対向する一方の端部側に設けら
れた円錐状の尖頭２２ａと、他方の端部側に設けられた
円柱状の基部２２ｂとからなる砲弾形状を有している。
ここで特に、基部２２ｂの端面２２ｃには、リード棒２
４の凸部２４ｂを挿入する円柱状の挿入穴２２ｄが形成
されている。The cathode tip 22 is formed by impregnating porous tungsten (high melting point metal) with barium (electron emitting material). By impregnating barium, which is an alkaline earth metal, the work function of the cathode tip 22 can be reduced, and electrons can be easily emitted. Further, the cathode tip portion 22 has a shell shape comprising a conical point 22a provided on one end side facing the anode 16 and a cylindrical base portion 22b provided on the other end side. Have.
Here, in particular, the lead rod 2 is attached to the end face 22c of the base 22b.
A cylindrical insertion hole 22d into which the fourth protrusion 24b is inserted is formed.
【００３１】リード棒２４の凸部２４ａは、陰極先端部
２２の挿入穴２２ｄに挿入されており、リード棒２４の
端面２４ａと陰極先端部２２の端面２２ｃとは対向して
いる。ここで特に、リード棒２４の端面２４ａは、陰極
先端部２２の端面２２ｃよりも大きくなっている。ま
た、リード棒２４の凸部２４ｂの外径と陰極先端部２２
の挿入穴２２ｄの内径とは略同一となっており、リード
棒２４の凸部２４ｂを陰極先端部２２の挿入穴２２ｄに
圧入することによって、リード棒２４と陰極先端部２２
とが結合される。The protrusion 24a of the lead rod 24 is inserted into the insertion hole 22d of the cathode tip 22, and the end face 24a of the lead rod 24 and the end face 22c of the cathode tip 22 face each other. Here, in particular, the end face 24a of the lead rod 24 is larger than the end face 22c of the cathode tip 22. Also, the outer diameter of the projection 24b of the lead rod 24 and the cathode tip 22
The inner diameter of the insertion hole 22d is substantially the same as the inner diameter of the insertion hole 22d, and the protrusion 24b of the lead rod 24 is press-fitted into the insertion hole 22d of the cathode tip 22 so that the lead rod 24 and the cathode tip 22 have the same diameter.
And are combined.
【００３２】リード棒２４の端面２４ａと陰極先端部２
２の端面２２ｃとの間隙は、モリブデン−ルテニウムろ
う材２６によって塞がれており、当該間隙と外部とを隔
絶する。より詳細には、当該間隙にモリブデン−ルテニ
ウムろう材２６が充填されており、さらにモリブデン−
ルテニウムろう材２６は、リード棒２４の端面２４ａの
うち陰極先端部２２の端面２２ｃに対面しない部分、及
び、陰極先端部２２の側面にまで延びるように設けられ
ている。ここで特に、モリブデン−ルテニウムろう材２
６の融点は１９５０°であり、陰極先端部２２の材料で
あるタングステンの融点（３４１０℃）、及び、リード
棒２４の材料であるモリブデンの融点（２６２０℃）の
いずれよりも低く、また、陰極先端部２２にバリウムを
含浸させる含浸温度（約１５００℃）よりも高くなって
いる。The end face 24a of the lead rod 24 and the cathode tip 2
The gap between the second end face 22c and the second end face 22c is closed by a molybdenum-ruthenium brazing material 26 to isolate the gap from the outside. More specifically, the gap is filled with a molybdenum-ruthenium brazing filler metal 26,
The ruthenium brazing material 26 is provided so as to extend to a portion of the end surface 24 a of the lead rod 24 that does not face the end surface 22 c of the cathode tip portion 22 and to the side surface of the cathode tip portion 22. Here, in particular, the molybdenum-ruthenium brazing material 2
6 has a melting point of 1950 °, which is lower than the melting point of tungsten (3410 ° C.), which is the material of the cathode tip 22, and the melting point (2620 ° C.) of molybdenum, which is the material of the lead rod 24. The temperature is higher than the impregnation temperature (about 1500 ° C.) at which the tip 22 is impregnated with barium.
【００３３】陽極１６は、タングステンによって形成さ
れており、図１に示すように、陰極１４に対向する一方
の端部側に設けられた円錐台状の先端部を円柱状の基部
に接続させた形状を有している。The anode 16 is made of tungsten. As shown in FIG. 1, a frustoconical tip provided at one end facing the cathode 14 is connected to a columnar base. It has a shape.
【００３４】続いて、本実施形態にかかる放電管の１つ
の特徴部分である陰極１４の製造方法について説明す
る。図３は、陰極１４の製造工程図である。陰極１４を
製造するにはまず、図３（ａ）に示すように、リード棒
２４の端面２４ａに形成された凸部２４ｂを、陰極先端
部２２の端面２２ｃに形成された挿入穴２２ｄに圧入・
固定する。Next, a method for manufacturing the cathode 14, which is one characteristic part of the discharge tube according to the present embodiment, will be described. FIG. 3 is a manufacturing process diagram of the cathode 14. In order to manufacture the cathode 14, first, as shown in FIG. 3A, a convex portion 24b formed on the end surface 24a of the lead rod 24 is pressed into an insertion hole 22d formed on an end surface 22c of the cathode tip portion 22.・
Fix it.
【００３５】その後、図３（ｂ）に示すように、筒状に
成形されたモリブデン−ルテニウムろう材２６を、陰極
先端部２２の基部２２ｂの外周とリード棒２４の端面２
４ａとの双方に接するように配置する。Then, as shown in FIG. 3B, the molybdenum-ruthenium brazing material 26 formed into a cylindrical shape is attached to the outer periphery of the base 22b of the cathode tip 22 and the end face 2 of the lead rod 24.
4a.
【００３６】さらにその後、モリブデン−ルテニウムろ
う材２６を加熱すると、図３（ｃ）に示すように、リー
ド棒２４の端面２４ａと陰極先端部２２の端面２２ｃと
の間隙にモリブデン−ルテニウムろう材２６が充填され
る。ここで、モリブデン−ルテニウムろう材２６の量を
適宜調節することで、モリブデン−ルテニウムろう材２
６を、リード棒２４の端面２４ａのうち陰極先端部２２
の端面２２ｃに対面しない部分、及び、陰極先端部２２
の側面にまで延びるように設けることができる。また、
陰極先端部２２及びリード棒２４を構成する材料の融点
がモリブデン−ルテニウムろう材２６の融点よりも高い
ことから、モリブデン−ルテニウムろう材２６を加熱し
て融解させる際の陰極先端部２２及びリード棒２４の熱
変形が防止される。Thereafter, when the molybdenum-ruthenium brazing material 26 is heated, as shown in FIG. 3 (c), the molybdenum-ruthenium brazing material 26 is placed in the gap between the end face 24a of the lead rod 24 and the end face 22c of the cathode tip 22. Is filled. Here, by appropriately adjusting the amount of the molybdenum-ruthenium brazing material 26, the molybdenum-ruthenium brazing material 2
6 to the cathode tip 22 of the end face 24 a of the lead rod 24.
Not facing the end face 22c of the cathode, and the cathode tip 22
Can be provided so as to extend to the side surface. Also,
Since the melting point of the material forming the cathode tip 22 and the lead rod 24 is higher than the melting point of the molybdenum-ruthenium brazing material 26, the cathode tip 22 and the lead rod when the molybdenum-ruthenium brazing material 26 is heated and melted. 24 is prevented from being thermally deformed.
【００３７】その後、図３（ｄ）に示すように、約１５
００℃の雰囲気下で、陰極先端部２２にバリウム２８を
含浸させる。ここで、モリブデン−ルテニウムろう材２
６の融点が含浸温度よりも高いことから、バリウム２８
の含浸時にモリブデン−ルテニウムろう材２６が蒸散し
たり、変形したりすることが防止される。また、易電子
放射物質であるバリウム２８を含浸によって陰極先端部
２２に含有させることで、バリウム２８が陰極先端部２
２に均一に含有されることになり、出力光の均一性が増
す。Thereafter, as shown in FIG.
The barium 28 is impregnated into the cathode tip 22 in an atmosphere of 00 ° C. Here, molybdenum-ruthenium brazing material 2
6 has a higher melting point than the impregnation temperature.
Prevents the molybdenum-ruthenium brazing material 26 from evaporating or deforming. In addition, barium 28, which is an electron-emitting material, is contained in the cathode tip 22 by impregnation, so that barium 28 is
2, the uniformity of the output light increases.
【００３８】続いて、本実施形態にかかる放電管の作用
及び効果について説明する。本実施形態にかかる放電管
１０は、陰極１４において、リード棒２４の端面２４ａ
と陰極先端部２２の端面２２ｃとの間隙をモリブデン−
ルテニウムろう材２６によって塞いでおり、特に当該間
隙にモリブデン−ルテニウムろう材２６を充填すること
によって当該間隙を塞いでいる。従って、バリウム等の
易電子放射物質が外部から当該間隙に進入することが防
止される。よって、放電管１０の使用時に、周囲温度が
上昇しても、易電子放射物質が蒸発して放電管１０の壁
面に付着することはない。その結果、放電管１０の出力
光量を長期間良好に維持することが可能となり、放電管
１０の寿命を長くすることが可能となる。Next, the operation and effects of the discharge tube according to this embodiment will be described. In the discharge tube 10 according to the present embodiment, the cathode 14 has an end face 24 a of a lead rod 24.
And a gap between the end face 22c of the cathode tip 22 and the molybdenum
The gap is closed by filling the gap with a molybdenum-ruthenium brazing material 26, in particular. Therefore, entry of an electron-emitting material such as barium from the outside into the gap is prevented. Therefore, even when the ambient temperature rises when the discharge tube 10 is used, the electron emitting material does not evaporate and adhere to the wall surface of the discharge tube 10. As a result, it becomes possible to maintain the output light quantity of the discharge tube 10 satisfactorily for a long period of time, and to prolong the life of the discharge tube 10.
【００３９】本実施形態にかかる放電管１０はさらに、
モリブデン−ルテニウムろう材２６を、リード棒２４の
端面２４ａのうち陰極先端部２２の端面２２ｃに対面し
ない部分、及び、陰極先端部２２の側面にまで延びるよ
うに設けている。従って、陰極先端部２２の基部２２ｂ
の側面から易電子放射物質がしみ出たとしても、かかる
易電子放射物質が外部に出ることが防止される。その結
果、放電管の寿命をさらに長くすることが可能となる。The discharge tube 10 according to this embodiment further includes
The molybdenum-ruthenium brazing material 26 is provided so as to extend to a portion of the end surface 24a of the lead rod 24 that does not face the end surface 22c of the cathode tip 22 and the side surface of the cathode tip 22. Therefore, the base 22b of the cathode tip 22
Even if the electron-emitting material exudes from the side surface, the electron-emitting material is prevented from going outside. As a result, the life of the discharge tube can be further extended.
【００４０】図４は、本実施形態にかかる放電管１０
（図４中のＡ）と比較対象にかかる放電管（図４中の
Ｂ）とについて、その出力の経時的変化を示すグラフで
ある。ここで、比較対象にかかる放電管とは、リード棒
の端面と陰極先端部の端面との間隙にモリブデン−ルテ
ニウムろう材が充填されていない陰極を有する放電管を
言う。図４から明らかなように、比較対象にかかる放電
管は、１０００時間動作させると光出力が初期の７０％
程度まで低下するのに対し、本実施形態にかかる放電管
１０は、１０００時間動作させても初期の８０％以上の
光出力を維持することができる。FIG. 4 shows a discharge tube 10 according to this embodiment.
5 is a graph showing the change over time of the output of (A in FIG. 4) and a discharge tube (B in FIG. 4) as a comparison object. Here, the discharge tube according to the comparative example refers to a discharge tube having a cathode in which a gap between an end surface of a lead rod and an end surface of a cathode tip portion is not filled with a molybdenum-ruthenium brazing filler material. As is clear from FIG. 4, when the discharge tube according to the comparative example is operated for 1000 hours, the light output becomes 70% of the initial value.
On the other hand, the discharge tube 10 according to the present embodiment can maintain the light output of 80% or more of the initial value even after operating for 1000 hours.
【００４１】さらに、本実施形態にかかる放電管１０
は、リード棒２４の端面２４ａと陰極先端部２２の端面
２２ｃとの間隙をモリブデン−ルテニウムろう材２６に
よって塞いでおり、特に当該間隙にモリブデン−ルテニ
ウムろう材２６を充填していることで、モリブデン−ル
テニウムろう材２６を介して陰極先端部２２とリード棒
２４との熱伝達効率が向上する。その結果、陰極先端部
２２で発生した熱を効果的にリード棒２４に逃がすこと
が可能となり、放電管１０の温度上昇を効果的に防止す
ることが可能となる。また、本実施形態にかかる放電管
１０は特に、リード棒２４の端面２４ａを陰極先端部２
２の端面２２ｃよりも大きくすることで、陰極先端部２
２の放熱効率を向上させている。Further, the discharge tube 10 according to the present embodiment
In this method, the gap between the end face 24a of the lead rod 24 and the end face 22c of the cathode tip 22 is closed with a molybdenum-ruthenium brazing filler metal 26, and in particular, by filling the gap with the molybdenum-ruthenium brazing filler metal 26, -The efficiency of heat transfer between the cathode tip 22 and the lead rod 24 via the ruthenium brazing material 26 is improved. As a result, the heat generated at the cathode tip 22 can be effectively released to the lead rod 24, and the temperature rise of the discharge tube 10 can be effectively prevented. Further, the discharge tube 10 according to the present embodiment is particularly configured such that the end face 24 a of the lead rod 24 is
2 is larger than the end face 22c of the cathode 2 so that the cathode tip 2
2 improves the heat radiation efficiency.
【００４２】また、本実施形態にかかる放電管１０にお
いては、陰極先端部２２に易電子放射物質を含浸させる
前にリード棒２４の端面２４ａと陰極先端部２２の端面
２２ｃとの間隙をモリブデン−ルテニウムろう材２６に
よって塞ぐことで、かかる間隙に易電子放射物質が侵入
することが防止される。その結果、易電子放射物質の使
用量を減らすことが可能となる。Further, in the discharge tube 10 according to the present embodiment, the gap between the end face 24a of the lead rod 24 and the end face 22c of the cathode tip 22 is impregnated with molybdenum before the cathode tip 22 is impregnated with the electron emitting material. By closing with the ruthenium brazing material 26, the invasion of the electron-emitting substance into the gap is prevented. As a result, it is possible to reduce the amount of the electron-emitting material.
【００４３】また、本実施形態にかかる放電管１０は、
リード棒２４の端面２４ａと陰極先端部２２の端面２２
ｃとの間隙にモリブデン−ルテニウムろう材２６を充填
することで、ロッド間での放熱効率のばらつきの発生を
防止し、均一な性能の放電管を製造することが可能とな
る。Further, the discharge tube 10 according to the present embodiment
End face 24a of lead rod 24 and end face 22 of cathode tip 22
By filling the gap with c with the molybdenum-ruthenium brazing filler metal 26, it is possible to prevent a variation in heat radiation efficiency between the rods, and to manufacture a discharge tube with uniform performance.
【００４４】上記実施形態にかかる放電管１０の陰極
は、図５に示すような陰極３０であっても良い。すなわ
ち、上記実施形態にかかる陰極１４のリード棒２４が円
柱形状を有していたのに対し、当該陰極３０に用いるリ
ード棒３２は、陰極先端部２２の端面２２ｃに対向し
て、これより大きい端面３２ａを有するとともに、後端
部は径が小さい棒状になっている。リード棒３２をこの
ような形状としても、陰極先端部２２とリード棒３２と
の熱伝達効率を向上させることができ、放電管１０の温
度上昇を効果的に防止することが可能となる。The cathode of the discharge tube 10 according to the above embodiment may be a cathode 30 as shown in FIG. That is, while the lead rod 24 of the cathode 14 according to the above embodiment has a cylindrical shape, the lead rod 32 used for the cathode 30 faces the end face 22c of the cathode tip portion 22 and is larger than this. It has an end face 32a, and its rear end is shaped like a bar with a small diameter. Even when the lead rod 32 has such a shape, the heat transfer efficiency between the cathode tip 22 and the lead rod 32 can be improved, and the temperature rise of the discharge tube 10 can be effectively prevented.
【００４５】上記実施形態にかかる放電管１０の陰極
は、図６に示すような陰極３４であっても良い。すなわ
ち陰極３４は、上記陰極１４と比較して、陰極先端部２
２の尖頭２２ａの先端を露出させるとともに、陰極先端
部２２の表面を被覆するイリジウム（高融点金属）から
なる金属被膜３６をさらに備えている。金属被膜３６
は、ＣＶＤ法、スパッタ法などで陰極先端部２２の表面
にイリジウムを２０００Å程度堆積させた後、陰極先端
部２２の尖頭２２ａの先端に位置する金属被膜３６をサ
ンドペーパによる研磨処理、レーザ光によるアブレーシ
ョン処理等によって除去することで容易に得られる。金
属被膜３６を備えることで、陰極先端部２２の側面から
しみ出した易電子放射物質の蒸散をさらに効果的に防止
することが可能となる。また、リード棒２４に接する程
度の広範囲を被覆するように金属被膜３６を設けること
で、陰極先端部２２からリード棒２４への熱伝達効率が
向上し、放電管１０の温度上昇を効果的に防止すること
ができる。The cathode of the discharge tube 10 according to the above embodiment may be a cathode 34 as shown in FIG. In other words, the cathode 34 is different from the cathode 14 in that the cathode tip 2
Further, a metal coating 36 made of iridium (high-melting-point metal) that exposes the tip of the second cusp 22 a and coats the surface of the cathode tip 22 is further provided. Metal coating 36
After depositing iridium on the surface of the cathode tip 22 by about 2000 ° by a CVD method, a sputtering method, or the like, the metal coating 36 located at the tip of the tip 22a of the cathode tip 22 is polished by a sandpaper, and a laser beam is used. It can be easily obtained by removing by ablation treatment or the like. The provision of the metal film 36 makes it possible to more effectively prevent evaporation of the electron-emitting substance that has exuded from the side surface of the cathode tip 22. Further, by providing the metal coating 36 so as to cover a wide area in contact with the lead rod 24, the heat transfer efficiency from the cathode tip 22 to the lead rod 24 is improved, and the temperature rise of the discharge tube 10 is effectively prevented. Can be prevented.
【００４６】上記実施形態にかかる放電管１０において
は、陰極先端部２２はタングステン、リード棒２４はモ
リブデンによって形成されていたが、その他にレニウ
ム、タンタル等を用いても良い。また、陰極先端部２２
を形成する材料とリード棒２４を形成する材料とは同じ
ものであっても異なるものであっても良い。In the discharge tube 10 according to the above embodiment, the cathode tip 22 is made of tungsten, and the lead bar 24 is made of molybdenum. However, rhenium, tantalum or the like may be used. In addition, the cathode tip 22
And the material forming the lead rod 24 may be the same or different.
【００４７】また、上記実施形態にかかる放電管１０に
おいては、易電子放射物質としてバリウムを用いていた
が、その他にもカルシウム、ストロンチウムなどのアル
カリ土類金属の単体若しくはこれらの酸化物を用いても
良い。また、２種以上の上記単体あるいは酸化物を混合
させたものを易電子放射物質として用いてもよい。In the discharge tube 10 according to the above-described embodiment, barium is used as the electron-emitting material. Alternatively, a simple substance of an alkaline earth metal such as calcium or strontium or an oxide thereof may be used. Is also good. Further, a mixture of two or more of the above simple substances or oxides may be used as the electron emitting material.
【００４８】また、上記実施形態にかかる放電管１０に
おいては、易電子放射物質を含浸によって含有させた含
浸型の陰極先端部２２を用いていたが、これは、タング
ステン等の高融点金属の粉末とバリウム等の易電子放射
物質の粉末とを同時に焼結させた焼結型の陰極先端部を
用いてもよい。In the discharge tube 10 according to the above-described embodiment, the impregnated cathode tip 22 impregnated with the electron-emitting material is used. Alternatively, a sintered-type cathode tip portion obtained by simultaneously sintering and a powder of an electron-emitting material such as barium may be used.
【００４９】また、上記実施形態にかかる放電管１０に
おいては、リード棒２４の端面２４ａと陰極先端部２２
の端面２２ｃとの間隙にモリブデン−ルテニウムろう材
２６を充填していたが、これは、リード棒２４の端面２
４ａと陰極先端部２２の端面２２ｃとの間隙を塞いで外
部と隔絶すれば良く、必ずしも隙間無く充填されていな
くてもよい。In the discharge tube 10 according to the above embodiment, the end face 24a of the lead rod 24 and the cathode tip 22
Is filled with a molybdenum-ruthenium brazing filler metal 26 in the gap with the end face 22 c of the lead rod 24.
It is only necessary to close the gap between 4a and the end face 22c of the cathode tip 22 so as to isolate it from the outside.
【００５０】[0050]
【発明の効果】本発明の放電管用電極は、基体部の上記
端面と本体部の上記端面とを対向させ、この間隙をろう
材で塞ぐことで、本体部と基体部との間の熱伝達効率が
向上する。その結果、放電管の放熱効率が高くなる。According to the discharge tube electrode of the present invention, the heat transfer between the main body and the base portion is achieved by making the end surface of the base portion face the end surface of the main body portion and closing the gap with a brazing material. Efficiency is improved. As a result, the radiation efficiency of the discharge tube increases.
【００５１】また、上記間隙をろう材で塞ぐことで、易
電子放射物質が外部から当該間隙に進入することが防止
されるとともに、本体部から当該間隙に易電子放射物質
がしみ出したとしても、かかる易電子放射物質が当該間
隙から外部に出ることが防止される。よって、放電管の
使用時に、周囲温度が上昇しても、易電子放射物質が蒸
発して放電管の壁面に付着することはない。その結果、
放電管の出力光量を長期間良好に維持することが可能と
なり、放電管の寿命を長くすることが可能となる。Further, by closing the gap with the brazing material, it is possible to prevent the electron-emitting material from entering the gap from the outside and to prevent the electron-emitting material from seeping into the gap from the main body. This prevents the electron emitting material from going out of the gap. Therefore, when the discharge tube is used, even if the ambient temperature increases, the electron-emitting material does not evaporate and adhere to the wall surface of the discharge tube. as a result,
It is possible to maintain the output light quantity of the discharge tube satisfactorily for a long period of time, and to prolong the life of the discharge tube.
【００５２】また、本発明の放電管用電極においては、
ろう材を上記間隙に充填すること、あるいは、基体部の
上記端面を本体部の上記端面よりも大きくすることで、
本体部と基体部との間の熱伝達効率をさらに向上させる
ことができる。その結果、本体部で発生した熱を効果的
に基体部に逃がすことが可能となり、放電管の温度上昇
を効果的に防止することが可能となる。In the discharge tube electrode of the present invention,
By filling the gap with the brazing material, or by making the end face of the base part larger than the end face of the main body part,
The heat transfer efficiency between the main body and the base can be further improved. As a result, heat generated in the main body can be effectively released to the base, and a rise in the temperature of the discharge tube can be effectively prevented.
【００５３】さらに、本発明の放電管用電極において
は、ろう材が、上記間隙から本体部の側面に延びて設け
られていることで、本体部の側面からしみ出した易電子
放射性物質が外部に出ることが防止される。その結果、
放電管の寿命をさらに長くすることが可能となる。Further, in the discharge tube electrode of the present invention, since the brazing filler metal is provided to extend from the gap to the side surface of the main body, the electron-emitting material that has exuded from the side surface of the main body is externally provided. Exit is prevented. as a result,
It is possible to further extend the life of the discharge tube.
【図１】放電管の断面図である。FIG. 1 is a sectional view of a discharge tube.
【図２】電極の断面図である。FIG. 2 is a sectional view of an electrode.
【図３】電極の製造工程図である。FIG. 3 is a manufacturing process diagram of an electrode.
【図４】放電管の出力の経時的変化を示すグラフであ
る。FIG. 4 is a graph showing a change over time in the output of a discharge tube.
【図５】電極の断面図である。FIG. 5 is a sectional view of an electrode.
【図６】電極の断面図である。FIG. 6 is a sectional view of an electrode.
１０…放電管、１２…ガラスバルブ、１４，３０，３４
…陰極、１６…陽極、１８，２０…外部端子、２２…陰
極先端部、２４，３２…リード棒、２６…モリブデン−
ルテニウムろう材、２８…バリウム、３６…金属被膜10 discharge tube, 12 glass bulb, 14, 30, 34
... Cathode, 16 ... Anode, 18, 20 ... External terminal, 22 ... Cathode tip, 24, 32 ... Lead rod, 26 ... Molybdenum
Ruthenium brazing material, 28 ... Barium, 36 ... Metal coating
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 61/073 H01J 9/02 H01J 61/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H01J 61/073 H01J 9/02 H01J 61/06
Claims (9)
気中に封入し、前記陰極と前記陽極との間でアーク放電
を行わせる放電管に用いられる放電管用電極において、 高融点金属によって形成され、凸部が形成された端面を
有する基体部と、 高融点金属に易電子放射物質を含有させて形成され、一
端に尖頭を有するとともに、他端に前記基体部の前記凸
部を挿入する挿入穴が形成された端面を有する本体部と を備え、 前記基体部の前記端面と前記本体部の前記端面との間隙
をろう材で塞いでおり、 前記基体部の前記端面は、前記本体部の前記端面よりも
大きいことを特徴とする放電管用電極。An electrode for a discharge tube used for a discharge tube in which a cathode and an anode are opposed to each other and sealed in a discharge gas atmosphere to cause an arc discharge between the cathode and the anode. A base portion having an end surface on which a convex portion is formed, and a high melting point metal formed to contain an electron-emitting material, having a sharp end at one end and inserting the convex portion of the base portion at the other end. A main body having an end surface having an insertion hole formed therein, wherein a gap between the end surface of the base portion and the end surface of the main body portion is closed with a brazing material, and the end surface of the base portion is the main body. An electrode for a discharge tube, which is larger than the end face of the portion.
気中に封入し、前記陰極と前記陽極との間でアーク放電
を行わせる放電管に用いられる放電管用電極において、 高融点金属によって形成され、凸部が形成された端面を
有する基体部と、 高融点金属に易電子放射物質を含有させて形成され、一
端に尖頭を有するとともに、他端に前記基体部の前記凸
部を挿入する挿入穴が形成された端面を有する本体部と
を備え、 前記基体部の前記端面と前記本体部の前記端面との間隙
をろう材で塞いでおり、 前記ろう材は、前記間隙から前記本体部の側面に延びて
設けられていることを特徴とする放電管用電極。2. A discharge tube electrode for use in a discharge tube, wherein a cathode and an anode are opposed to each other and sealed in a discharge gas atmosphere to cause an arc discharge between the cathode and the anode. A base portion having an end surface on which a convex portion is formed, and a high melting point metal formed to contain an electron-emitting material, having a sharp end at one end and inserting the convex portion of the base portion at the other end. A main body portion having an end surface having an insertion hole formed therein, wherein a gap between the end surface of the base portion and the end surface of the main body portion is closed with a brazing material. An electrode for a discharge tube, which is provided to extend to a side surface of a portion.
ることを特徴とする請求項１または請求項２に記載の放
電管用電極。3. The electrode for a discharge tube according to claim 1, wherein the brazing material is filled in the gap.
電子放射物質を含浸させた含浸型金属からなることを特
徴とする請求項１〜３のいずれか１項に記載の放電管用
電極。4. The discharge tube according to claim 1, wherein the main body is made of an impregnated metal obtained by impregnating a porous refractory metal with an electron emitting material. electrode.
部のいずれの融点よりも低く、かつ、前記本体部に前記
易電子放射物質を含浸させる含浸温度よりも高い融点を
有する材料からなることを特徴とする請求項４に記載の
放電管用電極。5. The brazing material is made of a material having a melting point lower than a melting point of any of the main body and the base, and a melting point higher than an impregnation temperature at which the main body is impregnated with the electron emitting material. The electrode for a discharge tube according to claim 4, characterized in that:
ろう材であることを特徴とする請求項５に記載の放電管
用電極。6. The discharge tube electrode according to claim 5, wherein the brazing material is a molybdenum-ruthenium brazing material.
属の単体若しくは酸化物を含んで形成されることを特徴
とする請求項１〜６のいずれか１項に記載の放電管用電
極。7. The discharge tube electrode according to claim 1, wherein the electron-emitting material is formed of a simple substance or an oxide of an alkaline earth metal.
るとともに、前記本体部の表面を被覆する高融点金属か
らなる被膜をさらに備えたことを特徴とする請求項１〜
７のいずれか１項に記載の放電管用電極。8. The apparatus according to claim 1, further comprising a coating made of a high melting point metal that exposes a tip of the cusp of the main body and coats a surface of the main body.
8. The electrode for a discharge tube according to any one of items 7 to 7.
気中に封入し、前記陰極と前記陽極との間でアーク放電
を行わせる放電管において、 前記陰極と前記陽極との少なくとも一方は、請求項１〜
８のいずれか１項に記載された放電管用電極であること
を特徴とする放電管。9. A discharge tube in which a cathode and an anode are opposed to each other and sealed in a discharge gas atmosphere to cause an arc discharge between the cathode and the anode, wherein at least one of the cathode and the anode is: Claim 1
A discharge tube, which is the discharge tube electrode according to any one of claims 8 to 13.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01730099A JP3337658B2 (en) | 1999-01-26 | 1999-01-26 | Discharge tube electrode and discharge tube using the same |
| EP00901905A EP1150335B1 (en) | 1999-01-26 | 2000-01-26 | Electrode for discharge tube and discharge tube using it |
| PCT/JP2000/000383 WO2000045418A1 (en) | 1999-01-26 | 2000-01-26 | Electrode for discharge tube and discharge tube using it |
| AU23188/00A AU2318800A (en) | 1999-01-26 | 2000-01-26 | Electrode for discharge tube and discharge tube using it |
| DE60044667T DE60044667D1 (en) | 1999-01-26 | 2000-01-26 | ELECTRODE FOR DISCHARGE TUBES AND DISCHARGES THEREFORE EQUIPPED |
| US09/912,384 US6664733B2 (en) | 1999-01-26 | 2001-07-26 | Electrode for discharge tube, and discharge tube using it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01730099A JP3337658B2 (en) | 1999-01-26 | 1999-01-26 | Discharge tube electrode and discharge tube using the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002129005A Division JP4283492B2 (en) | 2002-04-30 | 2002-04-30 | Electrode for discharge tube, method for producing the same, and discharge tube using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000215845A JP2000215845A (en) | 2000-08-04 |
| JP3337658B2 true JP3337658B2 (en) | 2002-10-21 |
Family
ID=11940163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01730099A Expired - Fee Related JP3337658B2 (en) | 1999-01-26 | 1999-01-26 | Discharge tube electrode and discharge tube using the same |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6664733B2 (en) |
| EP (1) | EP1150335B1 (en) |
| JP (1) | JP3337658B2 (en) |
| AU (1) | AU2318800A (en) |
| DE (1) | DE60044667D1 (en) |
| WO (1) | WO2000045418A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004111235A (en) * | 2002-09-19 | 2004-04-08 | Ushio Inc | Discharge lamp |
| US7652430B1 (en) | 2005-07-11 | 2010-01-26 | Kla-Tencor Technologies Corporation | Broadband plasma light sources with cone-shaped electrode for substrate processing |
| DE102006007218A1 (en) | 2006-02-15 | 2007-08-16 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | High pressure discharge lamp |
| ITMI20061195A1 (en) * | 2006-06-21 | 2007-12-22 | Siviero Enrico | METHOD AND EQUIPMENT WITH LOBATE NOZZLES FOR THE MIXING OF REACTIVE CHEMICAL COMPONENTS |
| TWI412057B (en) | 2009-07-14 | 2013-10-11 | Ushio Electric Inc | Short arc discharge lamp |
| JP5423240B2 (en) * | 2009-08-24 | 2014-02-19 | パナソニック株式会社 | Electrode for flash discharge tube and flash discharge tube |
| JP5765953B2 (en) * | 2010-10-21 | 2015-08-19 | 株式会社ユメックス | Cathode for short arc discharge lamp and arc discharge method |
| KR102083286B1 (en) * | 2012-09-21 | 2020-03-02 | 가부시키가이샤 오크세이사쿠쇼 | Method for manufacturing discharge lamp electrode |
| CN105359252B (en) * | 2013-10-02 | 2017-11-10 | 优志旺电机株式会社 | The manufacture method of the negative electrode of short arc discharge lamp and short arc discharge lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61233960A (en) * | 1985-04-10 | 1986-10-18 | Hamamatsu Photonics Kk | Discharge tube for light source |
| JPS62241254A (en) * | 1986-04-10 | 1987-10-21 | Ushio Inc | Discharge lamp |
| JPS63119130A (en) * | 1986-07-28 | 1988-05-23 | New Japan Radio Co Ltd | Impregnated type cathode with conductive support and its manufacture |
| JP2732452B2 (en) * | 1989-01-18 | 1998-03-30 | ウシオ電機株式会社 | Discharge lamp electrode and method of manufacturing the same |
| JP3000618B2 (en) | 1990-04-20 | 2000-01-17 | ソニー株式会社 | Recording and playback device |
| KR0173691B1 (en) * | 1993-07-07 | 1999-02-01 | 카나이 쯔또무 | Magnetron with feed through capacitor and filter |
-
1999
- 1999-01-26 JP JP01730099A patent/JP3337658B2/en not_active Expired - Fee Related
-
2000
- 2000-01-26 EP EP00901905A patent/EP1150335B1/en not_active Expired - Lifetime
- 2000-01-26 WO PCT/JP2000/000383 patent/WO2000045418A1/en active Application Filing
- 2000-01-26 DE DE60044667T patent/DE60044667D1/en not_active Expired - Lifetime
- 2000-01-26 AU AU23188/00A patent/AU2318800A/en not_active Abandoned
-
2001
- 2001-07-26 US US09/912,384 patent/US6664733B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1150335A1 (en) | 2001-10-31 |
| WO2000045418A1 (en) | 2000-08-03 |
| DE60044667D1 (en) | 2010-08-26 |
| EP1150335B1 (en) | 2010-07-14 |
| JP2000215845A (en) | 2000-08-04 |
| EP1150335A4 (en) | 2004-09-29 |
| AU2318800A (en) | 2000-08-18 |
| US20010052755A1 (en) | 2001-12-20 |
| US6664733B2 (en) | 2003-12-16 |
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