TWI409449B - Bio-detecting device with adjustable micro-concave mirror - Google Patents
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本發明係有關一種生物檢測裝置，尤指一種具有可調式微凹面鏡的生物檢測裝置，其兼具可大幅提高細胞檢測之準確度與可調整聚焦光束之焦距等功效。The invention relates to a biological detecting device, in particular to a biological detecting device with an adjustable micro concave mirror, which has the functions of greatly improving the accuracy of cell detection and adjusting the focal length of the focused beam.
參閱第八A圖，傳統生物檢測裝置係包括一細胞晶片81、一雷射裝置82、一控制部83及一檢測裝置84；該細胞晶片81係供複數個帶有螢光化合物之細胞91在其微流道811之流體911內流動以供檢測；微流道811之流道寬度W2係大於細胞91之細胞直徑D3；控制部83係控制雷射裝置82朝微流道811發出雷射光束821，光束直徑D4係大於流道寬度W2；並以雷射光束821照射細胞91，使其螢光化合物吸收光能而發出螢光，而據以提高該檢測裝置84檢測之準確度。Referring to FIG. 8A, the conventional biological detecting device comprises a cell wafer 81, a laser device 82, a control portion 83 and a detecting device 84. The cell wafer 81 is provided with a plurality of cells 91 with fluorescent compounds. The flow channel 911 of the microchannel 811 flows for detection; the channel width W2 of the microchannel 811 is larger than the cell diameter D3 of the cell 91; and the control unit 83 controls the laser device 82 to emit a laser beam toward the microchannel 811. 821, the beam diameter D4 is greater than the flow path width W2; and the laser 91 is irradiated with the laser beam 821 to cause the fluorescent compound to absorb the light energy to emit fluorescence, thereby improving the accuracy of the detection by the detecting device 84.
傳統結構產生以下缺失：The traditional structure produces the following deficiencies:
[1]細胞檢測之準確度低。假設傳統雷射光束之圓面積為785000μm2 (以光束直徑1000μm計算)，而微流道被雷射光束照到的面積只有2500μm2 (以流道寬度50μm計算)。代表圓面積785000μm2 的雷射光束中的光能，只有面積2500μm2 (只有而已)的光能留在微流道上而己，細胞上的螢光化合物所能激發出之螢光必然有限(如第八B圖所示，最高的峰值頂多3.8mv，而雜訊的峰值高達3~3.2mv，無法分得相當清楚)，加上外界光線干擾產生的雜訊，使檢測到的結果有時分不清是細胞發出的螢光，還是外界的光線，影響細胞檢測之準確度。[1] The accuracy of cell detection is low. Suppose a conventional circular area of the laser beam is 785000μm 2 (calculated beam diameter 1000μm), while the micro-channel is the area of laser beam strikes only 2500μm 2 (50μm calculated in the flow channel width). The light energy in the laser beam representing a circular area of 785000 μm 2 has an area of only 2500 μm 2 (only The light energy left on the microchannel, the fluorescence of the fluorescent compound on the cell is bound to be limited (as shown in Figure B, the highest peak is at most 3.8mv, and the peak of the noise Up to 3~3.2mv, can't be quite clearly), plus the noise generated by external light interference, so that the detected result is sometimes confused by the fluorescence emitted by the cells, or the external light, affecting the accuracy of cell detection. degree.
[2]無法調整雷射光束照射的位置。傳統生物檢測裝置單純以雷射裝置直接朝細胞晶片發出雷射光束，完全沒有任何的調整裝置，故，無法調整雷射光束照射在細胞晶片上的位置，也無法依細胞晶片裝設的位置，而隨時改變雷射光束照射的方向。[2] The position of the laser beam illumination cannot be adjusted. The conventional biological detecting device directly emits a laser beam directly toward the cell wafer by the laser device, and there is no adjustment device at all. Therefore, the position where the laser beam is irradiated on the cell wafer cannot be adjusted, and the position of the cell wafer cannot be installed. And change the direction of the laser beam at any time.
有鑑於此，必需研發出可解決上述習用缺點之技術。In view of this, it is necessary to develop a technique that can solve the above disadvantages.
本發明之目的，在於提供一種具有可調式微凹面鏡的生物檢測裝置，其兼具可大幅提高細胞檢測之準確度與可調整聚焦光束之焦距之優點。特別是，本發明所欲解決之問題包括：細胞檢測之準確度低與無法調整雷射光束照射的位置等問題。It is an object of the present invention to provide a biodetection device having an adjustable micro concave mirror which has the advantages of greatly improving the accuracy of cell detection and adjusting the focal length of the focused beam. In particular, the problems to be solved by the present invention include problems such as low accuracy of cell detection and inability to adjust the position of laser beam irradiation.
解決上述問題之技術手段係提供一種具有可調式微凹面鏡的生物檢測裝置，其包括：一細胞晶片，係具有至少一微流道之透光結構，其用以供複數個帶有螢光化合物之細胞在微流道中的流體內，沿一流動方向流動以供檢測；該微流道具有一流道寬度；該每一細胞係具有一細胞直徑，該流道寬度係大於該細胞直徑；一雷射裝置，係用以發出一雷射光束，該雷射光束具有一光束直徑，該光束直徑係大於該流道寬度；一微凹面鏡部，係具有一中心部、複數個微凹面鏡、複數個微致動器及一虛擬中心軸；複數個微凹面鏡係概呈放射狀的連結於該中心部週圍，該複數個微致動器係分別控制該複數個微凹面鏡，使該複數個微凹面鏡與該中心部可以該虛擬中心軸為中心而改變其表面曲率；一控制部，係用以控制該微致動器動作；一檢測裝置，係位於該細胞晶片之上方，用以向下檢測該複數個細胞；藉此，當該微致動器控制而調整該中心部及該複數個微凹面鏡之表面曲率，該雷射光束係照射於該中心部及該複數個微凹面鏡而反射出一聚焦光束，並向上聚焦照射於該微流道之光照位置，當細胞通過該光照位置而被聚焦光束照射到，其螢光化合物因吸收聚焦光束之強大光能而激發出強烈的螢光，即可提高該檢測裝置檢測之準確度；其中，該微凹面鏡部係包括在一多晶矽結構表面沉積一反光薄膜；該中心部及複數個微凹面鏡係與該雷射光束間係具有一入射角，且該中心部及複數個微凹面鏡係與該聚焦光束間係具有一反射角；又該入射角係於該反射角；該微致動器係為壓電式微致動器。A technical means for solving the above problems is to provide a biodetection device having an adjustable micro concave mirror, comprising: a cell wafer having a light transmissive structure having at least one microchannel for supplying a plurality of fluorescent compounds The cells flow in a flow direction in the fluid in the microchannel for detection; the microchannel has a first-order track width; each cell line has a cell diameter, the channel width is greater than the cell diameter; a laser The device is configured to emit a laser beam having a beam diameter, the beam diameter being greater than the channel width; a micro concave mirror portion having a central portion, a plurality of micro concave mirrors, and a plurality of microscopic And a virtual central axis; a plurality of micro concave mirrors are radially connected around the central portion, and the plurality of microactuators respectively control the plurality of micro concave mirrors to make the plurality of micro concave mirrors and the center The portion may change its surface curvature centered on the virtual central axis; a control portion for controlling the operation of the microactuator; and a detecting device located at the cell wafer a side for detecting the plurality of cells downwardly; thereby, when the microactuator controls to adjust a surface curvature of the central portion and the plurality of micro concave mirrors, the laser beam is irradiated to the central portion and the plurality a micro concave mirror reflects a focused beam and focuses upwardly on the illumination position of the microchannel. When the cell passes through the illumination position, the focused beam is illuminated, and the fluorescent compound is excited by absorbing the powerful light energy of the focused beam. The intensity of the detection device can be improved by the strong fluorescence; wherein the micro concave mirror portion comprises a reflective film deposited on the surface of a polycrystalline structure; the central portion and the plurality of micro concave mirror systems and the laser beam The system has an incident angle, and the central portion and the plurality of micro concave mirrors have a reflection angle with the focused beam; the incident angle is at the reflection angle; the microactuator is a piezoelectric microactuator .
本發明之上述目的與優點，不難從下述所選用實施例之 詳細說明與附圖中，獲得深入瞭解。The above objects and advantages of the present invention are not difficult to be selected from the following selected embodiments. A detailed understanding of the detailed description and the drawings is obtained.
茲以下列實施例並配合圖式詳細說明本發明於後：The invention will be described in detail in the following examples in conjunction with the drawings:
本發明係為一種具有可調式微凹面鏡的生物檢測裝置，參閱第一、第二及第三A圖，其包括：一細胞晶片10，係具有至少一微流道11之透光結構，其用以供複數個帶有螢光化合物之細胞91在微流道11中的流體911內，沿一流動方向A(如第四圖所示)流動以供檢測；該微流道11具有一流道寬度W1；該每一細胞91係具有一細胞直徑D1，該流道寬度W1係大於該細胞直徑D1；一雷射裝置20，係用以發出一雷射光束21，該雷射光束21具有一光束直徑D2，該光束直徑D2係大於該流道寬度W1；一微凹面鏡部30，係具有一中心部31、複數個微凹面鏡32、複數個微致動器33及一虛擬中心軸X；複數個微凹面鏡32係概呈放射狀的連結於該中心部31週圍，該複數個微致動器33係分別控制該複數個微凹面鏡32，使該複數個微凹面鏡32與該中心部31可以該虛擬中心軸X為中心而改變其表面曲率；一控制部40，係用以控制該微致動器33動作；一檢測裝置50，係位於該細胞晶片10之上方，用以向下檢測該複數個細胞91； 藉此，當該微致動器33控制而調整該中心部31及該複數個微凹面鏡32之表面曲率，該雷射光束21係照射於該中心部31及該複數個微凹面鏡32而反射出一聚焦光束30A，並向上聚焦照射於該微流道11之光照位置P1(如第四圖所示)，當細胞91通過該光照位置P1而被聚焦光束30A照射到，其螢光化合物因吸收聚焦光束30A之強大光能而激發出強烈的螢光，即可提高該檢測裝置50檢測之準確度(如第三B圖所示)；其中，該微凹面鏡部30係包括在一多晶矽結構30B表面沉積一反光薄膜30C；該中心部31及複數個微凹面鏡32係與該雷射光束21間係具有一入射角θ 1(以及θ 3)；且該中心部31及複數個微凹面鏡32係與該聚焦光束30A間係具有一反射角θ 2(以及θ 4)，又該入射角θ 1(以及θ 3)係等於該反射角θ 2(以及θ 4)；該微致動器33係為壓電式微致動器。The present invention is a biodetection device with an adjustable micro concave mirror. Referring to the first, second and third A diagrams, the invention comprises: a cell wafer 10 having a light transmissive structure with at least one microchannel 11 for use. For a plurality of cells 91 with fluorescent compounds in the fluid 911 in the microchannel 11, flow in a flow direction A (as shown in the fourth figure) for detection; the microchannel 11 has a first-class width W1; each of the cells 91 has a cell diameter D1, the channel width W1 being greater than the cell diameter D1; a laser device 20 for emitting a laser beam 21 having a beam a diameter D2, the beam diameter D2 is greater than the flow path width W1; a micro concave mirror portion 30 having a central portion 31, a plurality of micro concave mirrors 32, a plurality of microactuators 33, and a virtual central axis X; The micro concave mirror 32 is radially connected around the central portion 31. The plurality of microactuators 33 respectively control the plurality of micro concave mirrors 32, so that the plurality of micro concave mirrors 32 and the central portion 31 can be virtualized. The central axis X is centered to change its surface curvature; a control unit 40, for controlling the action of the microactuator 33; a detecting device 50 is located above the cell wafer 10 for detecting the plurality of cells 91 downward; Thereby, when the microactuator 33 controls to adjust the surface curvature of the central portion 31 and the plurality of micro concave mirrors 32, the laser beam 21 is irradiated to the central portion 31 and the plurality of micro concave mirrors 32 to reflect A focused beam 30A is focused upwardly to the illumination position P1 of the microchannel 11 (as shown in the fourth figure), and when the cell 91 passes through the illumination position P1, the focused beam 30A is irradiated, and the fluorescent compound is absorbed by the fluorescent compound. Focusing on the strong light energy of the beam 30A to excite strong fluorescence, the accuracy of the detection by the detecting device 50 can be improved (as shown in FIG. 3B); wherein the micro concave mirror portion 30 is included in a polycrystalline structure 30B. a reflective film 30C is deposited on the surface; the central portion 31 and the plurality of micro concave mirrors 32 have an incident angle θ 1 (and θ 3 ) between the laser beam 21; and the central portion 31 and the plurality of micro concave mirrors 32 There is a reflection angle θ 2 (and θ 4) between the focused beam 30A, and the incident angle θ 1 (and θ 3) is equal to the reflection angle θ 2 (and θ 4); the microactuator 33 is It is a piezoelectric microactuator.
實務上，該細胞晶片10係為玻璃。In practice, the cell wafer 10 is made of glass.
該微凹面鏡部30係具有一鏡部直徑D5(大約為800μm)。The micro concave mirror portion 30 has a mirror portion diameter D5 (about 800 μm).
該流道寬度W1係為50μm。This flow path width W1 is 50 μm.
該細胞直徑D1係介於6um(例如細胞核)~30μm(多數的真核動物細胞)之間。The cell diameter D1 is between 6 um (eg, nucleus) ~ 30 μm (most eukaryotic animal cells).
該光束直徑D2係為1000μm。The beam diameter D2 is 1000 μm.
參閱第六A圖，熱微致動器係由兩種熱膨脹係數結構33A、33B配合一加溫裝置33C所組成，兩種熱膨脹係數結構33A、33B的一端連結相對應的微凹面鏡32，另端則連結該加溫裝置33C，當加溫裝置33C對兩種熱膨脹係數結構33A、33B施予0~350℃之工作溫度(如第六B圖所示)，兩種熱膨脹係數結構33A、33B可調整該中心部31及該複數個微凹面鏡32之表面曲率，使聚焦光束30A之焦距在0~2400μm間變化。Referring to FIG. 6A, the thermal microactuator is composed of two thermal expansion coefficient structures 33A, 33B combined with a warming device 33C. One end of the two thermal expansion coefficient structures 33A, 33B is connected to the corresponding micro concave mirror 32, and the other end Then, the heating device 33C is connected, and when the heating device 33C applies an operating temperature of 0 to 350 ° C to the two thermal expansion coefficient structures 33A, 33B (as shown in FIG. 6B), the two thermal expansion coefficient structures 33A, 33B can be The surface curvature of the central portion 31 and the plurality of micro concave mirrors 32 is adjusted such that the focal length of the focused beam 30A varies from 0 to 2400 μm.
參閱第七A圖，壓電式微致動器係由壓電結構33D配合一供電結構33E所組成，壓電結構33D的一端連結相對應的微凹面鏡32，另端則連結該供電結構33E，當供電結構33E對壓電結構33D施予0~150V之工作電壓(如第七B圖所示)，壓電結構33D可調整該中心部31及該複數個微凹面鏡32之表面曲率，使聚焦光束30A之焦距在300~425μm間變化。Referring to FIG. 7A, the piezoelectric microactuator is composed of a piezoelectric structure 33D coupled with a power supply structure 33E. One end of the piezoelectric structure 33D is coupled to the corresponding micro concave mirror 32, and the other end is coupled to the power supply structure 33E. The power supply structure 33E applies an operating voltage of 0 to 150 V to the piezoelectric structure 33D (as shown in FIG. 7B), and the piezoelectric structure 33D can adjust the surface curvature of the central portion 31 and the plurality of micro concave mirrors 32 to focus the beam. The focal length of 30A varies between 300 and 425 μm.
本發明之操作方式係如下所述：啟動該雷射裝置20，使其朝該微凹面鏡部30之中心部31與複數個微凹面鏡32照射一雷射光束21，並控制該微致動器33以調整複數個微凹面鏡32與中心部31之表面曲率，而反射一聚焦光束30A(如第五圖所示，假設分別調整中心部31與複數個微凹面鏡32為第一、第二與第三表面曲率S1、S2與S3，分別可反射聚焦光束30A而照射在光照位置P1、第二位置P2與第三位置P3，其中光照位置P1是照射在細胞晶片10之微流道11上)聚焦照射 在微流道11之光照位置P1上，當帶有螢光化合物之細胞91流過光照位置P1而受到聚焦光束30A照射，其螢光化合物即激發出強烈的螢光，檢測裝置50只要檢測到發出強烈螢光的細胞91，就會產生相當高之振幅信號。The operation mode of the present invention is as follows: the laser device 20 is activated to illuminate a laser beam 21 toward a central portion 31 of the micro concave mirror portion 30 and a plurality of micro concave mirrors 32, and the microactuator 33 is controlled. To adjust the surface curvature of the plurality of micro concave mirrors 32 and the central portion 31, and to reflect a focused beam 30A (as shown in the fifth figure, it is assumed that the central portion 31 and the plurality of micro concave mirrors 32 are respectively adjusted to be the first, second, and third. The surface curvatures S1, S2 and S3 respectively reflect the focused beam 30A and are irradiated at the illumination position P1, the second position P2 and the third position P3, wherein the illumination position P1 is irradiated on the microchannel 11 of the cell wafer 10) focused illumination At the illumination position P1 of the microchannel 11, when the cell 91 with the fluorescent compound flows through the illumination position P1 and is irradiated by the focused beam 30A, the fluorescent compound excites strong fluorescence, and the detecting device 50 detects only Cells 91 that emit intense fluorescence produce a fairly high amplitude signal.
更詳細的講，雷射光束21之圓面積為785000μm2 (以光束直徑1000μm計算)，微凹面鏡部30之圓面積為502400μm2 (以鏡部直徑800μm計算)，並假設微流道11被聚焦光束30A照到的面積為2500μm2 (以流道寬度50μm計算)。代表圓面積785000μm2 的雷射光束21至少有502400μm2 被微凹面鏡30反射，並照射至微流道30A的2500μm2 面積上，這2500μm2 面積上即具有圓面積502400μm2 之雷射光束21的光能，可使細胞91上之螢光化合物激發強烈的螢光，使檢測裝置50可檢測到如第三B圖所示高達8mv的振幅信號，而外界光線干擾之振幅信號頂多只有2mv上下而已，差異是4倍，相當明顯，極易判讀。In more detail, the circular area of the laser beam 21 is 785000 μm 2 (calculated as a beam diameter of 1000 μm), and the circular area of the micro concave mirror portion 30 is 502400 μm 2 (calculated as a mirror portion diameter of 800 μm), and it is assumed that the micro flow path 11 is focused. The area irradiated by the light beam 30A was 2,500 μm 2 (calculated as a flow path width of 50 μm). Representative 785000μm circular area 21 of laser beam 2 has at least 30 micro-concave mirrors 502400μm 2 is reflected and irradiated onto an area of 2500 m 2 micro channel 30A, and this area of 2500 m 2 i.e. having a circular area of the laser beam 502400μm 2 21 The light energy can cause the fluorescent compound on the cell 91 to excite strong fluorescence, so that the detecting device 50 can detect the amplitude signal of up to 8 mv as shown in the third B picture, and the amplitude signal of the external light interference is only 2 mv at most. However, the difference is 4 times, quite obvious, and easy to interpret.
當然，即使該細胞晶片10位於該雷射光束21直接照射的範圍內，亦不影響檢測結果。Of course, even if the cell wafer 10 is located within the range in which the laser beam 21 is directly irradiated, the detection result is not affected.
本發明之優點及功效可歸納如下：The advantages and effects of the present invention can be summarized as follows:
[1]可大幅提高細胞檢測之準確度。本發明設置微凹面鏡部(圓面積為502400μm2 )反射雷射光束(圓面積為785000μm2 )大部份的光(佔785000μm2 中的502400μm2 )，並照射至微流道，使微流道被照射的2500μm2 面積中具有圓面 積502400μm2 之雷射光束的光能，當帶有螢光化合物之細胞被具有強大光能之聚焦光束照射，其螢光化合物即激發出強烈的螢光(照射的光能愈高，螢光愈強)，使檢測裝置檢測到細胞的強烈螢光而產生強烈之振幅信號(高達8mv)，進而提高細胞檢測之準確度(靈敏度增加350%)。[1] can greatly improve the accuracy of cell detection. According to the present invention, a micro-concave mirror portion (circular area of 502400 μm 2 ) is disposed to reflect a large portion of light of a laser beam (round area of 785000 μm 2 ) (502400 μm 2 in 785000 μm 2 ), and is irradiated to the micro flow path to make the micro flow path 2 2500μm illuminated area having a circular area 502400μm energy of the laser beam 2, when the strong fluorescence of the cells with a fluorescent compound having a strong focusing light energy beam is irradiated, i.e. compounds which stimulate fluorescence ( The higher the luminous energy of the illumination, the stronger the fluorescence, so that the detection device detects the intense fluorescence of the cells and generates a strong amplitude signal (up to 8 mv), thereby improving the accuracy of the cell detection (the sensitivity is increased by 350%).
[2]可調整聚焦光束之焦距。本發明之微凹面鏡部係由中心部、複數個微凹面鏡與複數個微致動器組成，控制複數個微致動器動作，即可調整複數個微凹面鏡與中心部之表面曲率，進而調整聚焦光束之焦距，可隨實際細胞晶片的設置位置調整焦距。[2] The focal length of the focused beam can be adjusted. The micro-concave mirror part of the invention consists of a central part, a plurality of micro concave mirrors and a plurality of microactuators, and controls a plurality of microactuators to adjust the surface curvature of the plurality of micro concave mirrors and the central part, thereby adjusting the focus. The focal length of the beam can be adjusted to the focal length of the actual cell wafer.
以上僅是藉由較佳實施例詳細說明本發明，對於該實施例所做的任何簡單修改與變化，皆不脫離本發明之精神與範圍。The present invention has been described in detail with reference to the preferred embodiments of the present invention, without departing from the spirit and scope of the invention.
10、81‧‧‧細胞晶片10, 81‧‧‧ cell wafer
11、811‧‧‧微流道11, 811‧‧‧ micro-channel
20、82‧‧‧雷射裝置20, 82‧‧ ‧ laser device
21、821‧‧‧雷射光束21, 821‧‧ ‧ laser beam
30‧‧‧微凹面鏡部30‧‧‧Micro concave mirror
30A‧‧‧聚焦光束30A‧‧‧focus beam
30B‧‧‧多晶矽結構30B‧‧‧Polysilicon structure
30C‧‧‧反光薄膜30C‧‧‧Reflective film
31‧‧‧中心部31‧‧‧ Central Department
32‧‧‧微凹面鏡32‧‧‧micro concave mirror
33‧‧‧微致動器33‧‧‧Micro Actuator
33A、33B‧‧‧熱膨脹係數結構33A, 33B‧‧‧ Thermal expansion coefficient structure
33C‧‧‧加溫裝置33C‧‧‧heating device
33D‧‧‧壓電結構33D‧‧‧Piezoelectric structure
33E‧‧‧供電結構33E‧‧‧Power supply structure
40、83‧‧‧控制部40, 83‧‧‧Control Department
50、84‧‧‧檢測裝置50, 84‧‧‧Detection device
91‧‧‧細胞91‧‧‧ cells
911‧‧‧流體911‧‧‧ fluid
X‧‧‧虛擬中心軸X‧‧‧Virtual Center Axis
A‧‧‧流動方向A‧‧‧flow direction
W1、W2‧‧‧流道寬度W1, W2‧‧‧ flow path width
D1、D3‧‧‧細胞直徑D1, D3‧‧‧ cell diameter
D2、D4‧‧‧光束直徑D2, D4‧‧‧ beam diameter
D5‧‧‧鏡部直徑D5‧‧‧Mirror diameter
P1‧‧‧光照位置P1‧‧‧Light position
P2‧‧‧第二位置P2‧‧‧ second position
P3‧‧‧第三位置P3‧‧‧ third position
θ 1、θ 3‧‧‧入射角θ 1 , θ 3‧‧‧ incident angle
θ 2、θ 4‧‧‧反射角θ 2, θ 4‧‧‧ reflection angle
S1‧‧‧第一表面曲率S1‧‧‧ first surface curvature
S2‧‧‧第二表面曲率S2‧‧‧second surface curvature
S3‧‧‧第三表面曲率S3‧‧‧ Third surface curvature
第一圖係本發明之應用例之示意圖The first figure is a schematic diagram of an application example of the present invention
第二圖係本發明之主要結構之示意圖The second figure is a schematic diagram of the main structure of the present invention.
第三A圖係第二圖之部分結構之放大之示意圖The third A diagram is an enlarged schematic view of a part of the structure of the second figure
第三B圖係第三A圖之檢測細胞之波形圖The third B picture is the waveform diagram of the detection cell of the third A picture
第四圖係本發明之聚焦光束照射細胞與檢測細胞之示意圖The fourth figure is a schematic diagram of the focused beam irradiating cells and detecting cells of the present invention.
第五圖係本發明之微凹面鏡部調整作動之示意圖The fifth figure is a schematic diagram of the adjustment operation of the micro concave mirror portion of the present invention.
第六A圖係本發明之微致動器之第一種應用例之示意圖Figure 6A is a schematic view showing a first application example of the microactuator of the present invention
第六B圖係第六A圖之溫度與焦距之曲線圖Figure 6 is a graph of temperature and focal length of Figure 6A.
第七A圖係本發明之微致動器之第二種應用例之示意圖Figure 7A is a schematic view showing a second application example of the microactuator of the present invention
第七B圖係第七A圖之電壓與焦距之曲線圖Figure 7 is a graph of the voltage and focal length of Figure 7A.
第八A圖係傳統生物檢測裝置之示意圖Figure 8A is a schematic diagram of a conventional biological detection device
第八B圖係第八A圖之檢測細胞之波形圖Figure 8 is a waveform diagram of the cells detected in Figure 8A.
10．．．細胞晶片10. . . Cell wafer
11．．．微流道11. . . Microchannel
20．．．雷射裝置20. . . Laser device
21．．．雷射光束twenty one. . . Laser beam
30．．．微凹面鏡部30. . . Micro concave mirror
30A．．．聚焦光束30A. . . Focus beam
31．．．中心部31. . . Central department
32．．．微凹面鏡32. . . Micro concave mirror
40．．．控制部40. . . Control department
50．．．檢測裝置50. . . Testing device
91．．．細胞91. . . cell
911．．．流體911. . . fluid
X．．．虛擬中心軸X. . . Virtual central axis
W1．．．流道寬度W1. . . Runner width
D1．．．細胞直徑D1. . . Cell diameter
D2．．．光束直徑D2. . . Beam diameter
D5．．．鏡部直徑D5. . . Mirror diameter
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| TW98143253A TWI409449B (en) | 2009-12-16 | 2009-12-16 | Bio-detecting device with adjustable micro-concave mirror |
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| TW98143253A TWI409449B (en) | 2009-12-16 | 2009-12-16 | Bio-detecting device with adjustable micro-concave mirror |
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| TWI409449B true TWI409449B (en) | 2013-09-21 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200619678A (en) * | 2004-11-02 | 2006-06-16 | Stereo Display Inc | Beam focusing and scanning system using micromirror array lens |
| TW200912282A (en) * | 2007-09-14 | 2009-03-16 | Univ Nat Cheng Kung | Florescence analyzer for microfluidic chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200619678A (en) * | 2004-11-02 | 2006-06-16 | Stereo Display Inc | Beam focusing and scanning system using micromirror array lens |
| TW200912282A (en) * | 2007-09-14 | 2009-03-16 | Univ Nat Cheng Kung | Florescence analyzer for microfluidic chip |
Non-Patent Citations (1)
| Title |
|---|
| Ju-Nan Kuo,Gwo-Bin Lee, Wen-Feng Pan, and Huei-Huang Lee, Japanese Journal of Applied Physics Vol.44, No.10,October 2005, pp.7571-7576. * |
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