TWI399518B - Corner prismatic polarized light interference system - Google Patents
Corner prismatic polarized light interference system Download PDFInfo
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Description
本發明係關於一種多光束干涉系統，尤指一種共光程且具抗傾角效果的角隅稜鏡式偏振光干涉系統。The invention relates to a multi-beam interference system, in particular to a corner-type polarized light interference system with a common optical path and anti-tilting effect.
在精密工業與光電產業中發展高精度之檢測設備已成為研發的重點，其中在光電式精密位移檢測儀器中，可依照檢測的方法而區分為雷射探頭與干涉式測距儀兩種類型，既有干涉式測距儀係可分為雙頻干涉儀及單頻干涉儀兩種，其中單頻干涉儀最常見的形式係為麥克森式架構，由於其係為一非共光程的架構，因此，條紋的可視度低且容易受到環境擾動、振動及溫度的熱流效應等的影響；既有共光程架構的多光束干涉儀，係可改善上述之缺點，藉以提高干涉儀的穩定性，既有多光束干涉儀產生的干涉條紋非常細銳且能量集中，且亮紋與亮紋之間沒有訊號，所以條紋的對比度很高，可精密地測定亮紋確切的位置，既有共光程結構之干涉儀主要係藉由兩相平行之鏡面來進行檢測，然而，當移動其中一鏡面之距離過長時(較大之檢測距離)，則容易使兩鏡面間因角度偏擺而產生傾斜不平行之情況時，此時所產生的干涉條紋的間距及對比度都會受到影響，進而使干涉條紋變模糊甚至無法產生干涉條紋，明顯會影響檢測結果之準確度，誠有加以改進之處。The development of high-precision testing equipment in the precision industrial and optoelectronic industry has become the focus of research and development. Among the photoelectric precision displacement detecting instruments, it can be divided into two types: laser probe and interferometric range finder according to the detection method. The existing interferometric range finder can be divided into two types: dual-frequency interferometer and single-frequency interferometer. The most common form of single-frequency interferometer is the McKesson architecture, because it is a non-common optical path architecture. Therefore, the visibility of the stripe is low and is susceptible to environmental disturbances, vibration and temperature heat flow effects, etc. The multi-beam interferometer with a common optical path architecture can improve the above disadvantages, thereby improving the stability of the interferometer. The interference fringes generated by the multi-beam interferometer are very sharp and energy concentrated, and there is no signal between the bright and bright lines, so the contrast of the stripe is very high, and the exact position of the bright lines can be accurately determined, and there is a common light. The interferometer of the process structure is mainly detected by two parallel mirrors. However, when the distance of one of the mirrors is too long (large detection distance), it is easy to make the two mirrors When the tilt is not parallel due to the angular yaw, the pitch and contrast of the interference fringes generated at this time are affected, and the interference fringes are blurred or even interference fringes are not generated, which obviously affects the accuracy of the detection result. There are improvements.
因此，本發明有鑑於既有共光程結構干涉儀兩鏡面容易因操作或外在環境而產生傾斜不平行，進而影響檢測準確度之缺失，特經過不斷的試驗與研究，終於發展出一種能改進現有缺失之本發明。Therefore, the present invention has been developed in view of the fact that the two mirrors of the common optical path structure interferometer are easily tilted and not parallel due to operation or external environment, thereby affecting the lack of detection accuracy, and finally through continuous experiment and research, finally developed a kind of energy. The invention of the existing deficiency is improved.
本發明主要在於提供一種角隅稜鏡式偏振光干涉系統，其係可不受傾角的影響下，產生清晰的干涉條紋，藉以提供一共光程且具抗傾角效果的角隅稜鏡式偏振光干涉系統之目的者。The invention mainly provides an angular 偏振-type polarized light interference system, which can generate clear interference fringes under the influence of the inclination angle, thereby providing a common optical path and angular tilt-type polarization interference with anti-tilt effect. The purpose of the system.
基於上述目的，本發明之主要技術手段在於提供一種角隅稜鏡式偏振光干涉系統，其係包含有一光源組、一干涉組及一訊號處理組，其中：該光源組係設有一光源，該光源係為一雷射光源；該干涉組係接收光源組的光源且設有一偏振分光鏡、一鍍膜玻璃平板、一反射鏡、一延遲片及一角隅稜鏡，該偏振分光鏡係接收雷射光源，該鍍膜玻璃平板與偏振分光鏡異於光源的一側面相結合且接收雷射光源而形成反射與透射，該反射鏡係與鍍膜玻璃平板底端相結合，該延遲片係位於鍍膜玻璃平板異於偏振分光鏡的一側並接收穿透鍍膜玻璃平板的透射光束，該角隅稜鏡位於延遲片異於鍍膜玻璃平板的一側並接收經過延遲片的透射光束及反射鏡的反射光束，另該角隅稜鏡異於延遲片的後側面係與一待測物相結合；以及該訊號處理組係用以接收干涉組的光束且設有一分光鏡、兩位置靈敏檢測器及一類比訊號處理模組，該分光鏡係與偏振分光鏡及反射鏡相結合，用以接收經偏振分光鏡反射所產生的干涉條紋並將其均分為兩道光束，而兩位置靈敏檢測器係分別接收兩道光束，該類比訊號處理模組係與兩位置靈敏檢測器相電性連接並對於干涉訊號進行檢測，藉以求出位於角隅稜鏡上待測物在光軸方向上的移動量。Based on the above objective, the main technical means of the present invention is to provide a corner-type polarized light interference system, which comprises a light source group, an interference group and a signal processing group, wherein: the light source group is provided with a light source, The light source is a laser light source; the interference group receives the light source of the light source group and is provided with a polarization beam splitter, a coated glass plate, a mirror, a retarder and a corner, and the polarization beam splitter receives the laser a light source, the coated glass plate is combined with a polarization beam splitter different from a side of the light source and receives a laser light source to form a reflection and transmission. The mirror is combined with a bottom end of the coated glass plate, and the retardation film is located on the coated glass plate. Different from the side of the polarizing beam splitter and receiving the transmitted light beam penetrating through the coated glass plate, the corner is located on the side of the retarder different from the coated glass plate and receives the transmitted beam passing through the retarder and the reflected beam of the mirror. The corner is different from the back side of the retarder and is combined with a test object; and the signal processing group is configured to receive the beam of the interference group and is provided a beam splitter, a two-position sensitive detector and a analog signal processing module, the beam splitter combined with a polarizing beam splitter and a mirror for receiving interference fringes generated by polarization beam splitter and dividing the two into two The two-position sensitive detector receives two beams, and the analog signal processing module is electrically connected to the two-position sensitive detector and detects the interference signal, thereby obtaining the angle 隅稜鏡The amount of movement of the object in the direction of the optical axis.
進一步，經反射鏡反射後由角隅稜鏡與延遲片而射向鍍膜玻璃平板的反射光束，會再度形成反射與透射，其中該透射光束會射向偏振分光鏡中，進而在鍍膜玻璃平板、反射鏡及角隅稜鏡間形成一干涉條紋的共振腔。Further, the reflected beam that is reflected by the mirror and then directed toward the coated glass plate by the corner 隅稜鏡 and the retarder will reflect and transmit again, wherein the transmitted beam will be directed into the polarizing beam splitter, and then on the coated glass plate, A resonant cavity of interference fringes is formed between the mirror and the corner.
再進一步，該光源組係設有一擴束鏡及一隔離器，其中該擴束鏡係用以接收光源，使光源經過擴束鏡後可增大光束直徑且同時增加條紋間距，而該隔離器係用以接收經擴束鏡擴束作用的雷射光源，可防止光束因逆回而影響光源，而該偏振分光鏡係用以接收通過隔離器的雷射光源。Still further, the light source group is provided with a beam expander mirror and an isolator, wherein the beam expander mirror is configured to receive the light source, so that the light source passes through the beam expander mirror to increase the beam diameter and simultaneously increase the stripe pitch, and the isolator The laser light source for receiving the beam expander expansion beam prevents the light beam from affecting the light source due to the reverse return, and the polarization beam splitter is for receiving the laser light source through the isolator.
較佳地，該延遲片係為一水平偏振夾45度角的四分之一延遲片。Preferably, the retarder is a quarter retarder having a horizontal polarization of 45 degrees.
較佳地，使兩位置靈敏檢測器的位置相位差為90度，進而產生一對正交訊號，且其中一位置靈敏檢測器係以重心位置接收光束，而另一位置靈敏檢測器係以重心位置偏移的位置接收光束，其中L為一光強公式推算出的光學解析度。Preferably, the positional difference between the two position sensitive detectors is 90 degrees, thereby generating a pair of orthogonal signals, and wherein one of the position sensitive detectors receives the light beam at the center of gravity position, and the other position sensitive detector is centered on the center of gravity. Position offset The position receives the beam, where L is the optical resolution derived from a light intensity formula.
較佳地，該雷射光源係為一於真空中之波長為632.8奈米(nm)的氦氖雷射(He-Ne Laser)。Preferably, the laser source is a He-Ne Laser having a wavelength of 632.8 nanometers (nm) in a vacuum.
藉由上述之技術手段，本發明角隅稜鏡式偏振光干涉系統，不僅可由光強公式推算出光學解析度為158.2奈米(nm)，且可搭配一解析度為四分之一週期計數卡，即可得 解析度約為40奈米(nm)的干涉系統，大幅提高光學的解析度，且可透過角隅稜鏡的特性來抵消所產生的傾角，進而在鍍膜玻璃平板、反射鏡與角隅稜鏡不平行的情況下進行待測物的位移檢測，藉以提供一共光程且具抗傾角效果的角隅稜鏡式偏振光干涉系統者。According to the above technical means, the angular 偏振-type polarized light interference system of the present invention can not only calculate the optical resolution of 158.2 nm (nm) by the light intensity formula, but can also count with a resolution of one quarter cycle. Card, you can get An interferometric system with a resolution of approximately 40 nanometers (nm) greatly increases the resolution of the optics and offsets the resulting tilt angle through the properties of the corners, and in the coated glass plates, mirrors and corners The displacement detection of the object to be tested is performed in a non-parallel manner, thereby providing a corner-type polarized light interference system having a total optical path and anti-tilting effect.
為能詳細瞭解本發明的技術特徵及實用功效，並可依照說明書的內容來實施，玆進一步以如圖式所示的較佳實施例，詳細說明如后，請參閱如第一圖所示，本發明之角隅稜鏡式偏振光干涉系統，其係包含有一光源組(10)、一干涉組(20)及一訊號處理組(30)，其中：該光源組(10)係設有一光源(11)、一擴束鏡(12)及一隔離器(13)，其中該光源(11)係為一雷射光源，較佳地，該雷射光源係為一氦氖雷射(He-Ne Laser)，其中該氦氖雷射於真空中之波長係為632.8奈米(nm)，該擴束鏡(12)係用以接收光源(11)，使光源(11)經過擴束鏡(12)後可增大光束直徑且同時增加條紋間距，而該隔離器(13)係用以接收經擴束鏡(12)擴束作用的雷射光源，可防止光束因逆回而影響光源(11)；該干涉組(20)係用以接收光源組(10)的光源(11)且設有一偏振分光鏡(21)、一鍍膜玻璃平板(22)、一反射鏡(23)、一延遲片(24)及一角隅稜鏡(25)，其中該偏振分光鏡(21)係用以接收通過隔離器(13)的雷射光源，該鍍膜玻璃平板(22)係為一反射率為R且與偏振分光鏡(21)異於隔離器(13)的一側面相結合，用以接收雷射光源而形成反射與透 射，其中該反射的光束係射向偏振分光鏡(22)並由隔離器(13)吸收，該反射鏡(23)係與鍍膜玻璃平板(22)底端相結合，而該延遲片(24)係位於鍍膜玻璃平板(22)異於偏振分光鏡(21)的一側，用以接收穿透過鍍膜玻璃平板(22)的透射光束，較佳地，該延遲片(24)係如第二圖所示為一水平偏振夾45度角的四分之一延遲片；該角隅稜鏡(25)位於延遲片(24)異於鍍膜玻璃平板(22)的一側，且接收經過延遲片(24)的透射光束及反射鏡(23)的反射光束，其中經反射鏡(23)反射後由角隅稜鏡(25)與延遲片(24)而射向鍍膜玻璃平板(22)的反射光束，會再度形成反射與透射，其中該透射光束會射向偏振分光鏡(22)中，進而在鍍膜玻璃平板(22)、反射鏡(23)及角隅稜鏡(25)間形成一干涉條紋的共振腔，另該角隅稜鏡(25)異於延遲片(24)的後側面係與一待測物(40)相結合；以及該訊號處理組(30)係用以接收干涉組(20)的光束且設有一分光鏡(31)、兩位置靈敏檢測器(Position Sensitive Detector；PSD)(32)及一類比訊號處理模組(33)，其中該分光鏡(31)與偏振分光鏡(21)及反射鏡(23)相結合，用以接收經偏振分光鏡(21)反射所產生的干涉條紋並將其均分為兩道光束；兩位置靈敏檢測器(32)係分別用以接收兩道光束，較佳地，使兩位置靈敏檢測器(32)的位置相位差為90度，進而產生一對正交訊號，另請配合如第三圖所示，其中一位置靈敏檢測器(32)係以重心位置接收光束，而另一位置靈敏檢測器(32)係以重心位置偏移的位置接收光束，其中L 為一光強公式推算出的光學解析度，而該類比訊號處理模組(33)係與兩位置靈敏檢測器(32)相電性連接並對於干涉訊號進行檢測，藉以求出位於角隅稜鏡(25)上待測物(40)在光軸方向上的移動量。In order to understand the technical features and practical functions of the present invention in detail, and in accordance with the contents of the specification, the following is further illustrated in the preferred embodiment shown in the drawings, as shown in the first figure. The corner-type polarized light interference system of the present invention comprises a light source group (10), an interference group (20) and a signal processing group (30), wherein: the light source group (10) is provided with a light source (11), a beam expander (12) and an isolator (13), wherein the light source (11) is a laser light source, preferably the laser light source is a laser (He- Ne Laser), wherein the laser beam is in a vacuum at a wavelength of 632.8 nanometers (nm), and the beam expander (12) is configured to receive the light source (11) and pass the light source (11) through the beam expander ( 12) can increase the beam diameter and increase the stripe spacing at the same time, and the isolator (13) is used to receive the laser source expanded by the beam expander (12), which can prevent the beam from affecting the light source due to the reverse ( 11); the interference group (20) is for receiving the light source (11) of the light source group (10) and is provided with a polarization beam splitter (21), a coated glass plate (22), a mirror (23), a delay sheet (24) and a corner 隅稜鏡 (25), wherein the polarizing beam splitter (21) is configured to receive a laser light source passing through the isolator (13), the coated glass plate (22) having a reflectivity R and In combination with a polarization beam splitter (21) different from a side of the isolator (13) for receiving a laser source to form reflection and transmission, wherein the reflected beam is directed toward the polarization beam splitter (22) and is provided by the isolator (13) absorption, the mirror (23) is combined with the bottom end of the coated glass plate (22), and the retarder (24) is located on the side of the coated glass plate (22) different from the polarization beam splitter (21) For receiving a transmitted light beam that has passed through the coated glass plate (22), preferably, the retarder (24) is a quarter-rate retarder having a horizontal polarization of 45 degrees as shown in the second figure; The corner file (25) is located on one side of the retarder (24) different from the coated glass plate (22), and receives the transmitted beam passing through the retarder (24) and the reflected beam of the mirror (23), wherein the mirror is reflected by the mirror (23) The reflected beam that is reflected by the corner 隅稜鏡 (25) and the retarder (24) toward the coated glass plate (22) will reflect and transmit again, wherein the transmitted beam will be fired. In the polarization beam splitter (22), a resonant cavity of interference fringes is formed between the coated glass plate (22), the mirror (23) and the corners (25), and the corners (25) are different. The back side of the retarder (24) is coupled to an object to be tested (40); and the signal processing group (30) is for receiving the beam of the interference group (20) and is provided with a beam splitter (31), two a Position Sensitive Detector (PSD) (32) and a analog signal processing module (33), wherein the beam splitter (31) is combined with a polarizing beam splitter (21) and a mirror (23) for Receiving the interference fringes generated by the polarization beam splitter (21) and dividing it into two beams; the two-position sensitive detectors (32) are respectively for receiving two beams, preferably for two-position sensitive detection The positional difference of the position of the device (32) is 90 degrees, thereby generating a pair of orthogonal signals, and as shown in the third figure, one position sensitive detector (32) receives the light beam at the center of gravity position, and the other position Sensitive detector (32) is offset by center of gravity The position receives the light beam, where L is the optical resolution calculated by a light intensity formula, and the analog signal processing module (33) is electrically connected to the two-position sensitive detector (32) and detects the interference signal. The amount of movement of the object (40) on the corner 隅稜鏡 (25) in the direction of the optical axis is obtained.
本發明角隅稜鏡式偏振光干涉系統於使用時係如第一圖所示，其中光源(11)經過擴束鏡(12)後增大光束直徑同時增加條紋間距，再通過隔離器(13)防止光束逆回影響光源，此時旋轉偏振分光鏡(21)使光束偏振方向與偏振分光鏡(21)同相，光束通過偏振分光鏡(21)後，假設穿透過偏振分光鏡(21)的光束為水平偏振(此處不論是水平偏振的光束穿透或是垂直偏振的光束穿透，只需改變水平與垂直偏振光的順序即可)，該水平偏振光束係射向鍍膜玻璃平板(22)，在鍍膜玻璃平板(22)上形成反射與透射，其中反射的光束係射向偏振分光鏡(21)，穿透後被隔離器(13)擋下防止光束逆回影響光源；而另一道穿透鍍膜玻璃平板(22)的光束會通過與水平偏振夾45度角的四分之一延遲片(24)，使該水平偏振光束轉為一正旋圓偏振光束，經過反射鏡變為一逆旋圓偏振光束，再經過延遲片(24)轉變為一垂直偏振光束，並穿透鍍膜玻璃平板(22)再度形成反射與透射，其中透射光束係射向偏振分光鏡(21)後會反射進入該訊號處理組(30)中，而再度形成反射的光束會持續重複前述的步驟，在鍍膜玻璃平板(22)、角隅稜鏡(25)與反射鏡(23)來回反射與穿透，由此方法所得到的干涉光束，藉由訊號處理組(30)的分光鏡(31)將干涉光束分離為兩道光束，進而透過兩位置靈敏感 測元件(32)及類比訊號處理模組(33)來檢測，其中該干涉法係為一多重干涉且可透過調整鍍膜玻璃平板(22)的反射率(R)來決定干涉條紋的細銳度；其中假設位移量d=0,0.1..632.8，鍍膜玻璃平板(22)的反射率R=0.9，而透射率T=1-R，光源(11)的波長λ =632.8，經推導後可得到光強公式，由光強公式可得到如第四圖所示之本發明角隅稜鏡式偏振光干涉系統的光學解析度為158.2奈米(nm)；當該訊號處理組(30)接收到干涉組(20)的光束後，在處理信號時係採用數位處理的方法，請配合參看如第五圖所示，其主要係將大於0伏特(V)的信號以1表示，而小於伏特(V)的信號以0表示，並且以位置靈敏檢測器(32)的零點差動信號為基準，再比較上一個的狀態即可算出向左或向右移動，其中若是符合正向移動的碼則表示正的方向增加了一個計數單位；反之，若符合反向移動的碼則減去一個計數單位，如此可以完成一個增量計數的工作，藉此得到一如第六圖所示之四分之一的電子解析度，因此，本發明角隅稜鏡式偏振光干涉系統，不僅可由光強公式推算出光學解析度(L)為158.2奈米(nm)，且可搭配一解析度為四分之一週期計數卡，即可得解析度約為40奈米(nm)的干涉系統，大幅提高光學的解析度；再則，該角隅稜鏡(25)係可使入射光束係與反射光束間互相平行，進而確保入射光束與反射光束的平行度，因此，當將角隅稜鏡(25)與一待測物(40)相結合而進行移動 時，即使在移動待測物(40)時產生傾角誤差，造成鍍膜玻璃平板(22)及反射鏡(23)與角隅稜鏡(25)間不再呈一平行之型態，也不會影響清晰干涉條紋的產生情況，所以當待測物(40)在移動時發生角度偏擺時，係可透過角隅稜鏡(25)的特性來抵消所產生的傾角，所以本發明角隅稜鏡式偏振光干涉系統，可在鍍膜玻璃平板(22)、反射鏡(23)與角隅稜鏡(25)不平行的情況下進行待測物(40)的位移檢測，藉以提供一共光程且具抗傾角效果的角隅稜鏡式偏振光干涉系統者。The angle-angled polarization interference system of the present invention is as shown in the first figure, wherein the light source (11) increases the beam diameter and increases the stripe pitch after passing through the beam expander (12), and then passes through the isolator (13). Preventing the beam from reversing back to affect the light source. At this time, the rotating polarization beam splitter (21) makes the beam polarization direction in phase with the polarization beam splitter (21). After the beam passes through the polarization beam splitter (21), it is assumed that the beam passes through the polarization beam splitter (21). The beam is horizontally polarized (here, whether horizontally polarized or vertically polarized, only need to change the order of horizontal and vertical polarization), the horizontally polarized beam is directed at the coated glass plate (22 Forming a reflection and transmission on the coated glass plate (22), wherein the reflected beam is directed toward the polarization beam splitter (21), penetrated by the isolator (13) to prevent the beam from reversing back to affect the light source; and another The beam that penetrates the coated glass plate (22) passes through a quarter of the retarder (24) at a 45 degree angle to the horizontal polarization, causing the horizontally polarized beam to be converted into a positively circularly polarized beam, which becomes a mirror through the mirror. Reverse circularly polarized beam, then pass through the retarder (24) Is a vertically polarized beam, and penetrates the coated glass plate (22) to form reflection and transmission again, wherein the transmitted beam is reflected into the polarization beam splitter (21) and then reflected into the signal processing group (30) to form a reflection again. The beam will continue to repeat the foregoing steps, reflecting and penetrating back and forth on the coated glass plate (22), corners (25) and mirrors (23), and the interference beam obtained by the method is processed by the signal processing group. The beam splitter (31) of (30) separates the interference beam into two beams, which are detected by two position sensitive measuring elements (32) and an analog signal processing module (33), wherein the interfering method is a multiple Interference and adjustment of the reflectivity (R) of the coated glass plate (22) to determine the fineness of the interference fringes; wherein the displacement amount d = 0, 0.1.. 632.8, the reflectivity of the coated glass plate (22) R = 0.9, and the transmittance T = 1 - R, the wavelength of the light source (11) λ = 632.8, after derivation, the light intensity formula can be obtained According to the light intensity formula, the optical resolution of the angular-angle polarized light interference system of the present invention as shown in the fourth figure is 158.2 nm (nm); when the signal processing group (30) receives the interference group ( 20) After the beam, the digital processing method is used when processing the signal. Please refer to the figure as shown in the fifth figure. The signal is mainly greater than 0 volt (V) and 1 is less than volt (V). The signal is represented by 0, and based on the zero differential signal of the position sensitive detector (32), the leftward or rightward movement can be calculated by comparing the previous state, wherein if the code conforms to the forward movement, the positive value is indicated. The direction is increased by one counting unit; conversely, if the counter-moving code is subtracted by one counting unit, an incremental counting operation can be completed, thereby obtaining a quarter of the electrons as shown in the sixth figure. The resolution, therefore, the angle-angled polarization interference system of the present invention can not only calculate the optical resolution (L) of 158.2 nm (nm) by the light intensity formula, but can be matched with a resolution of a quarter period. Counting card, you can get a resolution of about 40 nm (nm) Involving the system, greatly improving the resolution of the optical; in addition, the angle 隅稜鏡(25) is such that the incident beam and the reflected beam are parallel to each other, thereby ensuring the parallelism between the incident beam and the reflected beam, and therefore, when the angle is When 隅稜鏡(25) is moved in combination with a test object (40), even if the object to be tested (40) is moved, a tilt error occurs, causing the coated glass plate (22) and the mirror (23) and the corner.隅稜鏡(25) no longer has a parallel pattern, and it will not affect the occurrence of clear interference fringes. Therefore, when the object to be tested (40) is angularly yawed while moving, it is transparent. The characteristics of the mirror (25) counteract the resulting tilt angle, so the angled-type polarized light interference system of the present invention can be non-parallel to the coated glass plate (22), the mirror (23) and the corners (25). In the case of the displacement detection of the object (40), a corner-type polarized light interference system having a common optical path and anti-tilting effect is provided.
以上所述，僅是本發明的較佳實施例，並非對本發明作任何形式上的限制，任何所屬技術領域中具有通常知識者，若在不脫離本發明所提技術方案的範圍內，利用本發明所揭示技術內容所作出局部更動或修飾的等效實施例，並且未脫離本發明的技術方案內容，均仍屬於本發明技術方案的範圍內。The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the invention may be made without departing from the technical scope of the present invention.
(10)‧‧‧光源組(10) ‧‧‧Light source group
(11)‧‧‧光源(11) ‧‧‧Light source
(12)‧‧‧擴束鏡(12) ‧ ‧ beam expander
(13)‧‧‧隔離器(13)‧‧‧Isolator
(20)‧‧‧干涉組(20) ‧‧‧Interference group
(21)‧‧‧偏振分光鏡(21)‧‧‧Polarizing beam splitter
(22)‧‧‧鍍膜玻璃平板(22)‧‧‧coated glass plate
(23)‧‧‧反射鏡(23)‧‧‧Mirror
(24)‧‧‧延遲片(24) ‧‧‧Relay
(25)‧‧‧角隅稜鏡(25)‧‧‧Corner
(30)‧‧‧訊號處理組(30) ‧‧‧Signal Processing Group
(31)‧‧‧分光鏡(31)‧‧‧beam splitter
(32)‧‧‧位置靈敏檢測器(32) ‧‧‧ position sensitive detector
(33)‧‧‧類比訊號處理模組(33) ‧‧‧ analog signal processing module
(40)‧‧‧待測物(40) ‧‧‧Test objects
第一圖係本發明角隅稜鏡式偏振光干涉系統之操作原理示意圖。The first figure is a schematic diagram of the operation principle of the corner-type polarized light interference system of the present invention.
第二圖係本發明延遲片之操作原理示意圖。The second figure is a schematic diagram of the operation principle of the retarder of the present invention.
第三圖係本發明訊號處理組之局部放大示意圖。The third figure is a partially enlarged schematic view of the signal processing group of the present invention.
第四圖係本發明光強度與位移量之關係圖。The fourth graph is a graph showing the relationship between the light intensity and the displacement amount of the present invention.
第五圖係本發明正交信號之數位處理示意圖。The fifth figure is a schematic diagram of the digital processing of the quadrature signal of the present invention.
第六圖係本發明數位訊號邏輯關係示意圖。The sixth figure is a schematic diagram of the logical relationship of the digital signal of the present invention.
(10)．．．光源組(10). . . Light source group
(11)．．．光源(11). . . light source
(12)．．．擴束鏡(12). . . Beam expander
(13)．．．隔離器(13). . . Isolator
(20)．．．干涉組(20). . . Interference group
(21)．．．偏振分光鏡(twenty one). . . Polarizing beam splitter
(22)．．．鍍膜玻璃平板(twenty two). . . Coated glass plate
(23)．．．反射鏡(twenty three). . . Reflector
(24)．．．延遲片(twenty four). . . Delay slice
(25)．．．角隅稜鏡(25). . . Horn
(30)．．．訊號處理組(30). . . Signal processing group
(31)．．．分光鏡(31). . . Beam splitter
(32)．．．位置靈敏檢測器(32). . . Position sensitive detector
(33)．．．類比訊號處理模組(33). . . Analog signal processing module
(40)．．．待測物(40). . . Analyte
Claims (9)
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| TW99100913A TWI399518B (en) | 2010-01-14 | 2010-01-14 | Corner prismatic polarized light interference system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198574B1 (en) * | 1999-08-27 | 2001-03-06 | Zygo Corporation | Polarization preserving optical systems |
| TW539852B (en) * | 2001-12-18 | 2003-07-01 | Cheng Jou | Device and method for detecting surface plasma resonance by extrapolation interference |
| TWI274150B (en) * | 2006-03-10 | 2007-02-21 | Univ Nat Formosa | Angular deflection microscope and method |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198574B1 (en) * | 1999-08-27 | 2001-03-06 | Zygo Corporation | Polarization preserving optical systems |
| TW539852B (en) * | 2001-12-18 | 2003-07-01 | Cheng Jou | Device and method for detecting surface plasma resonance by extrapolation interference |
| TWI274150B (en) * | 2006-03-10 | 2007-02-21 | Univ Nat Formosa | Angular deflection microscope and method |
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