TWI388802B - Multiple-beam interferometric displacement measurement system - Google Patents
Multiple-beam interferometric displacement measurement system Download PDFInfo
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Description
本發明係關於一種多重干涉位移量測系統，尤指一種不受倾角及環境干擾之多重干涉位移量測系統。The invention relates to a multiple interference displacement measuring system, in particular to a multiple interference displacement measuring system which is free from inclination and environmental interference.
按，在精密工業與光電產業中，發展高精度之檢測設備已成為研發的重點，其中在光電式精密位移量測儀器中，依照量測方法可分為雷射探頭與干涉式測距儀兩類，其中干涉式測距儀又可分為雙頻干涉儀及單頻干涉儀兩種，然而，單頻干涉儀最常見的係為麥克森式的架構，由於其為非共光程的架構，所以條紋的可視度低且容易受到環境擾動、振動以及溫度的熱流效應等的影響；而共光程架構之多光束干涉儀係可改善上述之缺點，藉以提高干涉儀的穩定性，其中多光束干涉儀產生的干涉條紋非常細銳且能量集中，且亮紋與亮紋之間沒有訊號，所以條紋的對比度很高，可精密地測定亮紋確切的位置，既有共光程結構之干涉儀主要係藉由兩相平行之鏡面來進行檢測，然而，當移動其中一鏡面之距離過長時(較大之量測距離)，則容易使兩鏡面間因角度偏擺而產生傾斜不平行之情況時，此時所產生之干涉條紋的間距及對比度都會受到影響，進而使干涉條紋變模糊甚至無法產生干涉條紋，明顯會影響檢測結果之準確度，誠有加以改進之處。According to the precision industrial and optoelectronic industry, the development of high-precision testing equipment has become the focus of research and development. Among the photoelectric precision displacement measuring instruments, according to the measuring method, it can be divided into laser probe and interferometric range finder. Class, wherein the interferometric range finder can be divided into two-frequency interferometer and single-frequency interferometer. However, the most common single-frequency interferometer is the McKesson architecture, because it is a non-co-optical architecture. Therefore, the visibility of the stripe is low and is susceptible to environmental disturbances, vibrations, and heat flow effects of temperature; and the multi-beam interferometer of the common optical path architecture can improve the above disadvantages, thereby improving the stability of the interferometer, among which many The interference fringes produced by the beam interferometer are very sharp and concentrated, and there is no signal between the bright and bright lines, so the contrast of the stripe is very high, and the exact position of the bright lines can be accurately determined, which has the interference of the common optical path structure. The instrument is mainly detected by two parallel mirrors. However, when the distance between one of the mirrors is too long (larger distance), it is easy to make the two mirrors angle-biased. When the tilt is not parallel, the pitch and contrast of the interference fringes generated at this time will be affected, and the interference fringes will be blurred or even the interference fringes will not be generated, which will obviously affect the accuracy of the detection result. .
因此，本發明有鑑於既有共光程結構干涉儀兩鏡面容易因操作或外在環境而產生傾斜不平行，進而影響檢測準確度之缺失，特經過不斷的試驗與研究，終於發展出一種能改進現有缺失之本發明。Therefore, the present invention has been developed in view of the fact that the two mirrors of the common optical path structure interferometer are easily tilted and not parallel due to operation or external environment, thereby affecting the lack of detection accuracy, and finally through continuous experiment and research, finally developed a kind of energy. The invention of the existing deficiency is improved.
本發明主要在於提供一種多重干涉位移量測系統，其係可不受外在環境及傾角的影響下，產生清晰的干涉條紋，藉以提供一可抗傾角及環境干擾且可準確檢測之多重干涉位移量測系統之目的者。The invention mainly provides a multi-interference displacement measuring system, which can generate clear interference fringes under the influence of the external environment and the inclination angle, thereby providing a multi-interference displacement amount which can resist the inclination and environmental interference and can be accurately detected. The purpose of the measurement system.
基於上述目的，本發明之主要技術手段在於提供一種多重干涉位移量測系統，其係包含有一光源、一干涉儀組及一訊號處理組，其中：該光源係為一雷射光源；該干涉儀組係用以接收光源且設有一固定鏡、一反射鏡及一移動鏡，其中該固定鏡係用以接收雷射光源且為一分光鏡，該固定鏡在背向光源的後側面係局部塗佈有一反射膜，該反射鏡係與固定鏡後側面相固設結合而位於反射膜的下方處，而該移動鏡係為一用以接收固定鏡及反射鏡的透射光束及反射光束的角隅稜鏡，該角隅稜鏡係設有三片互相呈直角配置的反射鏡面所組成；以及該訊號處理組係用以接收該干涉儀組所產生的干涉條紋且設有一分光鏡及兩位移靈敏檢測器，其中該分光鏡係用以接收固定鏡及移動鏡間所產生的干涉條紋並將均分為兩道光束，而兩位移靈敏檢測器係分別用以接收由分光鏡分出的兩道光束，藉以進行干涉訊號的檢測。Based on the above object, the main technical means of the present invention is to provide a multiple interference displacement measuring system, which comprises a light source, an interferometer group and a signal processing group, wherein: the light source is a laser light source; the interferometer The system is configured to receive a light source and is provided with a fixed mirror, a mirror and a moving mirror, wherein the fixed mirror is for receiving the laser light source and is a beam splitter, and the fixed mirror is partially coated on the back side facing away from the light source. The cloth has a reflective film which is fixedly disposed on the rear side of the fixed mirror and located below the reflective film, and the moving mirror is a corner of the transmitted beam and the reflected beam for receiving the fixed mirror and the mirror. The horn system is composed of three mirror surfaces arranged at right angles to each other; and the signal processing group is configured to receive the interference fringes generated by the interferometer group and is provided with a beam splitter and two displacement sensitive detections. The beam splitter is configured to receive the interference fringes generated between the fixed mirror and the moving mirror and divide the beam into two beams, and the two displacement sensitive detectors are respectively used to receive the points. Mirror separated two light beams, thereby detecting the interference signals.
進一步，兩位移靈敏檢測器的相位差為90度，進而產生一正交訊號，並透過一數位訊號處理器處理並分割該正交訊號。Further, the two displacement sensitive detectors have a phase difference of 90 degrees, thereby generating an orthogonal signal, and processing and dividing the orthogonal signals by a digital signal processor.
再進一步，該移動鏡係藉由一單軸的微步進馬達進行移動。Still further, the moving mirror is moved by a single-axis microstepping motor.
較佳地，該雷射光源係為一氦氖雷射，該氦氖雷射之真空波長係為632.9907奈米，經由擴束與準直作用後，使雷射光束的直徑為6mm。Preferably, the laser light source is a laser beam having a vacuum wavelength of 632.9907 nm, and the laser beam has a diameter of 6 mm after being expanded and collimated.
藉由上述之技術手段，本發明多重干涉位移量測系統，主要係藉由於移動鏡上設置三個相互垂直配置的反射鏡面的方式，讓入射光可與反射光互相平行，因此，當固定鏡與移動鏡之間因移動誤差或環境干擾而不相互平行時，亦可產生清晰的干涉條紋進行位移檢测，進而提供一可抗傾角及環境干擾且可準確檢測之多重干涉位移量測系統者。According to the above technical means, the multiple interference displacement measuring system of the present invention mainly makes the incident light parallel to the reflected light by means of three mirror surfaces arranged on the moving mirror, so that the fixed mirror When the moving mirror is not parallel to each other due to movement error or environmental interference, it can also generate clear interference fringes for displacement detection, thereby providing a multi-interference displacement measuring system capable of resisting tilt and environmental interference and accurately detecting. .
為能詳細瞭解本發明的技術特徵及實用功效，並可依照說明書的內容來實施，玆進一步以如圖式所示的較佳實施例，詳細說明如后，請參閱如第一圖所示，本發明之多重干涉位移量測系統，其包含有一光源(10)、一干涉儀組(20)及一訊號處理組(30)，其中：該光源(10)係為一雷射光源，較佳地，該雷射光源係為一氦氖雷射(He-Ne Laser)，其中該氦氖雷射之真空波長係為632.9907奈米(nm)，且經由擴束與準直作用後，使雷射光束的直徑為6mm；該干涉儀組(20)係用以接收光源(10)且設有一固定鏡(21)、一反射鏡(22)及一移動鏡(23)，其中該固定鏡(21)係用以接收雷射光源且為一分光鏡，該固定鏡(21)在背向光源(10)的後側面係局部塗佈有一反射膜(211)，該反射鏡(22)係與固定鏡(21)後側面相固設結合而位於反射膜(211)的下方處，而該移動鏡(23)係為一用以接收固定鏡(21)及反射鏡(22)的透射光束及反射光束的角隅稜鏡，其中該角隅稜鏡係設有三片互相呈直角配置的反射鏡面(231)所組成，較佳地，該移動鏡(23)係可藉由一單軸的微步進馬達進行移動；以及該訊號處理組(30)係用以接收該干涉儀組(20)所產生的干涉條紋且設有一分光鏡(31)及兩位移靈敏檢測器(32)(Position Sensitive Detector；PSD)，其中該分光鏡(31)係用以接收固定鏡(21)及移動鏡(23)間所產生的干涉條紋並將均分為兩道光束，而兩位移靈敏檢測器(32)係分別用以接收由分光鏡(31)分出的兩道光束，藉以進行干涉訊號的檢測，較佳地，兩位移靈敏檢測器(32)的相位差為90度，進而產生一如第二圖所示的正交訊號，並透過一數位訊號處理器(Digital Signal Processor；DSP)處理並分割該正交訊號。In order to understand the technical features and practical functions of the present invention in detail, and in accordance with the contents of the specification, the following is further illustrated in the preferred embodiment shown in the drawings, as shown in the first figure. The multiple interference displacement measuring system of the present invention comprises a light source (10), an interferometer group (20) and a signal processing group (30), wherein: the light source (10) is a laser light source, preferably The laser source is a He-Ne Laser, wherein the laser has a vacuum wavelength of 632.9907 nm (nm), and after being expanded and collimated, the thunder is made. The beam has a diameter of 6 mm; the interferometer group (20) is for receiving the light source (10) and is provided with a fixed mirror (21), a mirror (22) and a moving mirror (23), wherein the fixed mirror (23) 21) for receiving a laser light source and being a beam splitter, the fixed mirror (21) is partially coated with a reflective film (211) on the back side facing away from the light source (10), the mirror (22) is The rear side of the fixed mirror (21) is fixedly coupled to be located below the reflective film (211), and the moving mirror (23) is for receiving the fixed mirror (21) and the mirror (22). a corner of the transmitted beam and the reflected beam, wherein the corner is composed of three mirror surfaces (231) arranged at right angles to each other. Preferably, the moving mirror (23) is provided by a single The microstepping motor of the shaft moves; and the signal processing group (30) is configured to receive interference fringes generated by the interferometer group (20) and is provided with a beam splitter (31) and two displacement sensitive detectors (32) (Position Sensitive Detector; PSD), wherein the beam splitter (31) is used to receive the interference fringes generated between the fixed mirror (21) and the moving mirror (23) and is equally divided into two beams, and the two displacement sensitive detection The device (32) is configured to receive the two beams separated by the beam splitter (31) for detecting the interference signal. Preferably, the phase difference of the two displacement sensitive detectors (32) is 90 degrees, thereby generating The orthogonal signal is shown in the second figure, and the orthogonal signal is processed and divided by a digital signal processor (DSP).
本發明多重干涉位移量測系統於使用時係如第一圖所示，其中該光源(10)的雷射光束係射入固定鏡(21)中，並穿過固定鏡(21)射向反射膜(211)，在反射膜(211)上同時形成反射與透射，其中反射的光束係射向訊號處理組(30)的分光鏡(31)中，經由分光鏡(31)分別反射射入兩位移靈敏檢測器(32)，另一道穿透反射膜(211)的光束係射入角隅稜鏡中，由角隅稜鏡反射180度射向設於固定鏡(21)上的反射鏡(22)，並由反射鏡(22)反射回角隅稜鏡再經由反射膜(211)再度形成反射與透射，其中透射的光束係射向訊號處理組(30)的分光鏡(31)，經由分光鏡(31)反射射入兩位移靈敏檢測器(32)中，而反射的光束係重複前述的路徑經過角隅稜鏡反射180度射向反射鏡(22)，進行無限的循環，直到光束衰退至一對系統無影響之極小值，進而產生一多重干涉且可透過調整反射膜(211)的反射率來改變干涉條紋的細銳度。The multiple interference displacement measuring system of the present invention is used as shown in the first figure, wherein the laser beam of the light source (10) is incident on the fixed mirror (21) and is reflected by the fixed mirror (21). The film (211) simultaneously forms reflection and transmission on the reflective film (211), wherein the reflected beam is incident on the beam splitter (31) of the signal processing group (30), and is respectively reflected by the beam splitter (31). The displacement sensitive detector (32), another beam penetrating the reflection film (211) is incident into the corner ,, and is reflected by the corner 180 180 degrees toward the mirror provided on the fixed mirror (21) ( 22), and reflected back to the corner by the mirror (22) and then reflected and transmitted again through the reflective film (211), wherein the transmitted beam is directed to the beam splitter (31) of the signal processing group (30), via The beam splitter (31) reflects into the two displacement sensitive detectors (32), and the reflected beam repeats the aforementioned path through a corner reflection 180 degrees toward the mirror (22) for infinite loops until the beam Declining to a minimum of no effect on a pair of systems, which in turn creates a multiple interference and can change the interference fringe by adjusting the reflectivity of the reflective film (211) The sharpness of the grain.
另請再配合參看如第三圖所示，其中作為移動鏡(23)的角隅稜鏡，係由三個夾角分別為90°的反射鏡面(231)所組成，其中依據依據反射定律：Please also refer to the third figure, which is the corner of the moving mirror (23), which consists of three mirror surfaces (231) with angles of 90°, according to the law of reflection:
∠1=∠2；以及∠3=∠4且∠2+∠3=90°；∠1=∠2; and ∠3=∠4 and ∠2+∠3=90°;
可推得∠1+∠2+∠3+∠4=180°，即表示入射光係與反射光互相平行，因此，如第四圖所示，當將作為移動鏡(23)的角偶稜鏡架設在一精密平台上進行移動時，即使在移動時有傾角誤差，而造成固定鏡(21)與移動鏡(23)間不再呈一平行之型態，也不會影響清晰干涉條紋的產生情況，因此仍可在固定鏡(21)與移動鏡(23)不平行的情況下進行位移檢測，藉以提供一可抗傾角及環境干擾且可準確檢測之多重干涉位移量測系統者。It can be deduced that ∠1+∠2+∠3+∠4=180°, that is, the incident light system and the reflected light are parallel to each other, and therefore, as shown in the fourth figure, when the angle is the horn of the moving mirror (23) When the frame is moved on a precision platform, even if there is a tilt error during the movement, the fixed mirror (21) and the moving mirror (23) are no longer in a parallel pattern, and the clear interference fringes are not affected. The situation is generated, so that the displacement detection can still be performed without the parallel movement of the fixed mirror (21) and the moving mirror (23), thereby providing a multi-interference displacement measuring system capable of resisting inclination and environmental interference and accurately detecting.
以上所述，僅是本發明的較佳實施例，並非對本發明作任何形式上的限制，任何所屬技術領域中具有通常知識者，若在不脫離本發明所提技術方案的範圍內，利用本發明所揭示技術內容所作出局部更動或修飾的等效實施例，並且未脫離本發明的技術方案內容，均仍屬於本發明技術方案的範圍內。The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the invention may be made without departing from the technical scope of the present invention.
(10)．．．光源(10). . . light source
(20)．．．干涉儀組(20). . . Interferometer group
(21)．．．固定鏡(twenty one). . . Fixed mirror
(211)．．．反射膜(211). . . Reflective film
(22)．．．反射鏡(twenty two). . . Reflector
(23)．．．移動鏡(twenty three). . . Moving mirror
(231)．．．反射鏡面(231). . . Mirror surface
(30)．．．訊號處理組(30). . . Signal processing group
(31)．．．分光鏡(31). . . Beam splitter
(32)．．．位移靈敏檢測器(32). . . Displacement sensitive detector
第一圖係本發明之多重干涉位移量測系統之操作流程圖。The first figure is an operational flow chart of the multiple interference displacement measuring system of the present invention.
第二圖係本發明經兩位移靈敏檢測器擷取後的正交信號示意圖。The second figure is a schematic diagram of the orthogonal signal obtained by the two displacement sensitive detectors of the present invention.
第三圖係本發明角偶稜鏡操作原理之示意圖。The third figure is a schematic diagram of the operation principle of the corner 稜鏡 of the present invention.
第四圖係本發明移動鏡產生傾角時之操作示意圖。The fourth figure is a schematic diagram of the operation when the moving mirror of the present invention produces a tilt angle.
(10)．．．光源(10). . . light source
(20)．．．干涉儀組(20). . . Interferometer group
(21)．．．固定鏡(twenty one). . . Fixed mirror
(211)．．．反射膜(211). . . Reflective film
(22)．．．反射鏡(twenty two). . . Reflector
(23)．．．移動鏡(twenty three). . . Moving mirror
(231)．．．反射鏡面(231). . . Mirror surface
(30)．．．訊號處理組(30). . . Signal processing group
(31)．．．分光鏡(31). . . Beam splitter
(32)．．．位移靈敏檢測器(32). . . Displacement sensitive detector
Claims (5)
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| TW98127836A TWI388802B (en) | 2009-08-19 | 2009-08-19 | Multiple-beam interferometric displacement measurement system |
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| Application Number | Priority Date | Filing Date | Title |
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| TW98127836A TWI388802B (en) | 2009-08-19 | 2009-08-19 | Multiple-beam interferometric displacement measurement system |
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| TW201107710A TW201107710A (en) | 2011-03-01 |
| TWI388802B true TWI388802B (en) | 2013-03-11 |
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| TW98127836A TWI388802B (en) | 2009-08-19 | 2009-08-19 | Multiple-beam interferometric displacement measurement system |
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