TWI392846B - Method for predicting conformability of a sheet of material to a reference surface - Google Patents
Method for predicting conformability of a sheet of material to a reference surface Download PDFInfo
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- TWI392846B TWI392846B TW98106291A TW98106291A TWI392846B TW I392846 B TWI392846 B TW I392846B TW 98106291 A TW98106291 A TW 98106291A TW 98106291 A TW98106291 A TW 98106291A TW I392846 B TWI392846 B TW I392846B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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Description
本發明係關於預測任意形狀材料片狀物對參考表面順應之方法。特別是,本發明係關於預測玻璃片(例如適合使用於平板顯示器玻璃片)順應於支撐表面之能力之方法,該支撐表面能夠使用於片狀物處理過程中。The present invention is directed to a method of predicting the conformation of a sheet of any shape material to a reference surface. In particular, the present invention is directed to a method of predicting the ability of a glass sheet (e.g., suitable for use in a flat panel glass sheet) to conform to a support surface that can be used during sheet processing.
很多對環境敏感的電子或光子裝置從可密閉性密封玻璃封裝的使用可獲得不少好處。這種裝置包括光伏打裝置,有機發光二極體(OLED)顯示器,OLED發光面板,電漿顯示器,表面傳導電子發射器顯示器(SED)及電場發射顯示器(FED)等。例如,液晶顯示器(LCD)是被動的平板顯示器,依靠外部的照明光源。一般是製造成分段的顯示器,或兩種基本設計之一。基板需要兩種不同的陣列型態(除了要透明之外,在顯示器處理期間還可以承受所暴露的化學條件)。第一種型態是內部定址的陣列,根據液晶材料的低限值特性。第二種是外部定址的陣列或主動定址的陣列,在這裡二極體陣列,金屬-絕緣體-金屬(MIM)裝置或薄膜電晶體(TFTs)提供每個像素電子開關。在這兩種情況,兩片玻璃形成顯示器的結構。兩片玻璃間的間隔是關鍵性的間隙大小約為5-10μm。各個基板玻璃片通常小於約0.7mm的厚度。Many environmentally sensitive electronic or photonic devices can benefit from the use of hermetic sealed glass packages. Such devices include photovoltaic devices, organic light emitting diode (OLED) displays, OLED light panels, plasma displays, surface conduction electron emitter displays (SED), and electric field emission displays (FED). For example, a liquid crystal display (LCD) is a passive flat panel display that relies on an external illumination source. It is generally a display that produces segments, or one of two basic designs. The substrate requires two different array types (in addition to being transparent, it can withstand the exposed chemical conditions during display processing). The first type is an internally addressed array based on the low limit characteristics of the liquid crystal material. The second is an externally addressed array or an actively addressed array where a diode array, metal-insulator-metal (MIM) device or thin film transistor (TFTs) is provided for each pixel electronic switch. In both cases, two sheets of glass form the structure of the display. The spacing between the two sheets of glass is a critical gap size of about 5-10 μm. Each substrate glass piece is typically less than about 0.7 mm thick.
針對顯示器或發光面板的大型電子裝置的玻璃片處理 需要玻璃片順應符合平面形狀。一般可藉著真空輕擊玻璃片成平面形狀。這種玻璃片雖然有嚴格的製造處理和規格,可以大到10平方公尺或以上,但不是完美的平面狀。因此,當強制順應符合支撐表面時就可能發生輕擊錯誤而造成玻璃片無法完整放在平面內。當玻璃片不是純粹可發展的形狀尤其是支撐表面本身不是平面狀時,這是的確會發生的。Glass processing for large electronic devices for displays or light panels The glass piece is required to conform to the planar shape. Generally, the glass piece can be lightly pressed into a planar shape. Although the glass sheet has strict manufacturing process and specifications, it can be as large as 10 square meters or more, but it is not perfect flat. Therefore, when the forced compliance conforms to the support surface, a tap error may occur and the glass piece may not be completely placed in the plane. This does happen when the glass piece is not a purely developable shape, especially if the support surface itself is not planar.
以較廣的特性來看,本發明說明了決定玻璃片對表面順應性的方法包括決定玻璃片形狀,利用形狀在玻璃片的多個點來計算高斯曲率值,從對應的支撐表面之高斯曲率值減去玻璃片的多個高斯曲率值以決定玻璃片上多個點的各點的高斯曲率值差,從多個高斯曲率值差選擇玻璃片之最大的高斯曲率值差,比較最大高斯曲率值差和既定的最大低限值,假使最大高斯曲率值等於或小於最大低限值值就將此玻璃片歸類為可接受,假使最大高斯曲率值大於最大低限值就將此玻璃片歸類為不可接受。In view of the broader nature, the present invention illustrates a method for determining the surface compliance of a glass sheet comprising determining the shape of the glass sheet, using a shape at a plurality of points on the glass sheet to calculate a Gaussian curvature value, and a Gaussian curvature from the corresponding support surface. The value is subtracted from the plurality of Gaussian curvature values of the glass piece to determine the Gaussian curvature value difference of each point of the plurality of points on the glass piece, and the maximum Gaussian curvature value difference of the glass piece is selected from the plurality of Gaussian curvature value differences, and the maximum Gaussian curvature value is compared. The difference and the set maximum low limit value. If the maximum Gaussian curvature value is equal to or less than the maximum low limit value, the glass piece is classified as acceptable. If the maximum Gaussian curvature value is greater than the maximum low limit value, the glass piece is classified. To be unacceptable.
在一些實施例中,玻璃片形狀的特徵分類可經由無重力的方法,譬如將玻璃片置放在中等密度的流體,或在可調式支撐床上支撐玻璃片,譬如可調式針銷。In some embodiments, the feature classification of the glass sheet shape can be via a gravity-free method, such as placing the glass sheet in a medium density fluid, or supporting a glass sheet on an adjustable support bed, such as an adjustable pin.
經由下列範例性說明以及參考附圖本發明更容易瞭解以及本發明其他目標,特性,詳細情況以及優點將變為 更清楚,任何情況其並不意含限制用途。預期所有這些其他系統,方法特性以及優點將包含於該說明中,為本發明之範圍,以及受到申請專利範圍保護。The invention will be more readily understood and other objects, features, details and advantages of the invention will be It is clear that in any case it is not intended to limit the use. All such other systems, method features, and advantages are intended to be included within the scope of the invention and the scope of the invention.
在下列詳細說明中,揭示出許多特定詳細說明以提供完全瞭解本發明,其作為說明用途以及並非作為限制用。不過,業界熟知此技術者將受益於這些揭示內容,本發明能夠實施於其他脫離在此所揭示特定細節之其他實施例中。除此,為人所熟知的裝置,方法以及材料之詳細說明加以省略而並不會模糊本發明之說明。最後,儘可能地,相同的參考數字代表相同的或類似的元件。In the following detailed description, numerous specific details are set forth However, it will be apparent to those skilled in the art that <RTIgt;the</RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; In addition, detailed descriptions of well-known devices, methods, and materials are omitted so as not to obscure the description of the invention. Finally, as far as possible, the same reference numerals are used to refer to the same or similar elements.
製造平面玻璃片的一種方法是所謂的熔融向下抽拉方法。在形成玻璃帶狀物的熔融溢流向下抽拉處理中,例如圖1所示,形成楔形20的溢流槽元件包括由壁板部分24在楔形20之縱向邊上為界的向上開放的通道22,在相反的縱向延伸溢流唇或堰26的上方中止。堰26和楔形元件20之相反的外部帶狀物形成表面連接。如圖所示,楔形元件20提供一對實質上垂直的形成表面部分28,表面部分28和堰26連接,和一對向下傾斜聚集表面部分30,在形成直的玻璃抽拉線的實質上水平下方頂點或根部32中止。應該要瞭解在楔形20之各個縱向邊提供表面部分28,30。One method of making flat glass sheets is the so-called melt down draw method. In a molten overflow down draw process forming a glass ribbon, such as shown in Figure 1, the overflow trough member forming the wedge 20 includes an upwardly open passage bounded by the wall portion 24 on the longitudinal side of the wedge 20. 22, suspended above the opposite longitudinally extending overflow lip or weir 26. The outer band of the opposite of the weir 26 and the wedge member 20 forms a surface connection. As shown, the wedge member 20 provides a pair of substantially perpendicular forming surface portions 28, the surface portion 28 and the weir 26 are joined, and a pair of downwardly sloping gathered surface portions 30, substantially in the form of a straight glass draw line. The vertices or roots 32 below the level are aborted. It should be understood that the surface portions 28, 30 are provided at each longitudinal edge of the wedge 20.
熔融玻璃34藉由與通道22連接的輸送管道36進料到 通道22。進料到通道22可以是單端,或如果想要的話,也可以是雙端。在鄰接通道22之各端的溢流堰26上方提供一對用來限制的壩38以引導在溢流堰26上方的熔融玻璃34之自由表面40的溢流作為分開流,向下到相反的形成表面部分28,30而到達根部32,在該處該等分開流如鏈條線所示,彙集以形成初始表面玻璃42的帶狀物。拖拉滾輪44置放在楔形元件20之根部32的下游處且用來調整玻璃之形成帶狀物離開彙集形成表面的速度,因而決定帶狀物之標稱上的厚度。The molten glass 34 is fed to the transfer conduit 36 connected to the passage 22 to Channel 22. Feed to channel 22 can be single ended or, if desired, double ended. A pair of dams 38 for restriction are provided over the weirs 26 adjacent the respective ends of the channels 22 to direct the overflow of the free surface 40 of the molten glass 34 above the weir 26 as a separate flow, down to the opposite formation The surface portions 28, 30 reach the root portion 32 where they are gathered to form a ribbon of the initial surface glass 42 as shown by the chain lines. The draw roller 44 is placed downstream of the root 32 of the wedge member 20 and serves to adjust the speed at which the glass forming ribbon exits the collection forming surface, thereby determining the nominal thickness of the ribbon.
最好設計拖拉滾輪在其外部邊緣接觸玻璃帶狀物,明確地說,是在帶狀物邊緣加厚的焊珠狀內側區域。接觸拖拉滾輪的玻璃邊緣部分待會將從玻璃片移除。在帶狀物的每個邊緣,提供一對相對的反向旋轉的拖拉滾輪。Preferably, the trailing roller is designed to contact the glass ribbon at its outer edge, specifically, a beaded inner region that is thickened at the edge of the ribbon. The edge portion of the glass that contacts the drag roller will be removed from the glass sheet. At each edge of the ribbon, a pair of opposing counter-rotating pull rollers are provided.
玻璃帶狀物42通過設備的抽拉部分向下,帶狀物歷經錯綜複雜的結構變化,不只在物理上的維度而且在分子層次。例如,在形成楔形根部從厚的液體形式變化成大約半公釐厚的堅硬帶狀物,這是藉著仔細選擇溫度場或溫度分佈,小心平衡機械型和化學性的需求以完成從液體或黏性狀態到固體或彈性狀態的轉換。在彈性溫度區域內的一點處,在切割線48切割帶狀物以形成玻璃片或面板50。The glass ribbon 42 is pulled down through the pull-out portion of the device, and the ribbon undergoes intricate structural changes, not only in physical dimensions but also at the molecular level. For example, in forming a wedge-shaped root that changes from a thick liquid form to a hard band about half-millimeter thick, by carefully selecting the temperature field or temperature distribution, carefully balancing the mechanical and chemical requirements to complete the liquid or The transition from a viscous state to a solid or elastic state. At a point within the elastic temperature region, the ribbon is cut at the cutting line 48 to form a glass sheet or panel 50.
雖然玻璃製造商使用了像是上述處理過程的嚴格製造控制以形成玻璃,但這些玻璃可能不是完美的平面形狀。例如在上述熔融抽拉處理中,藉由只接觸帶狀物邊 緣部份的滾輪從形成楔形抽拉的玻璃帶狀物可能使帶狀物的中央部份翹曲。這種翹曲可能是帶狀物的移動造成的,也可能因帶狀物內各種熱應力的相互影響。例如,向下切割處理對帶狀物產生的振動可能向上傳播到帶狀物的黏彈性區,凍結成片狀,證實彈性條帶平面性的偏差。整個帶狀物寬度和/或長度溫度的變化也可能導致平面性的偏差。的確,當各片玻璃從帶狀物切割時,可能部份紓解帶狀物凍結的應力,或許造成不平的表面。簡而言之,源自於帶狀物的玻璃片形狀是根據帶狀物經過黏彈性區域的轉換期間,帶狀物的熱歷史紀錄而定,而這個熱歷史紀錄也可能會有所變化。這種應力和/或形狀的改變可能對依賴尺寸穩定性的處理過程是有傷害的,譬如電路沉積到基板上就像在液晶顯示器的製造上看到的。例如,在液晶顯示器的製造上,切割自抽拉玻璃帶狀物的大型玻璃片本身可以再切割成多個較小的區段。每塊因此可造成應力再分佈的紓解,因而是形狀的改變。因此,當產生的玻璃片大致被認為是平面時,玻璃片的表面事實上會顯示出波幅和波谷,接下的處理期間可能會干擾玻璃的平坦化。因此此方法最好設計成可精準決定切割自帶狀物的玻璃片形狀。因而可利用獲得的資訊來修改抽拉玻璃帶狀物的熱經歷紀錄。While glass manufacturers use strict manufacturing controls like the one described above to form glass, these glasses may not be perfect planar shapes. For example, in the above melt drawing process, by only contacting the strip side The roller of the edge portion may warp the central portion of the ribbon from the glass ribbon that is drawn by the wedge. This warpage may be caused by the movement of the ribbon or by the interaction of various thermal stresses within the ribbon. For example, the vibration generated by the downward cutting process on the ribbon may propagate upward to the viscoelastic region of the ribbon, freezing into a sheet shape, confirming the deviation of the planarity of the elastic strip. Variations in the overall ribbon width and/or length temperature may also result in variations in planarity. Indeed, when each piece of glass is cut from the strip, it may partially relieve the stress of the ribbon freezing, perhaps resulting in an uneven surface. In short, the shape of the glass sheet derived from the ribbon is determined by the thermal history of the ribbon during the transition of the ribbon through the viscoelastic region, and this thermal history may also vary. Such changes in stress and/or shape may be detrimental to processes that rely on dimensional stability, such as the deposition of circuitry onto a substrate as seen in the fabrication of liquid crystal displays. For example, in the manufacture of liquid crystal displays, large glass sheets that are cut from a drawn glass ribbon can themselves be cut into a plurality of smaller sections. Each block can therefore cause a re-distribution of the stress redistribution and thus a change in shape. Thus, when the resulting glass sheet is generally considered to be planar, the surface of the glass sheet will actually exhibit amplitudes and troughs that may interfere with the planarization of the glass during subsequent processing. Therefore, this method is preferably designed to accurately determine the shape of the glass sheet that is cut from the strip. The information obtained can thus be used to modify the thermal history of the drawn glass ribbon.
顯示器製造商從玻璃製造商接收玻璃薄片,並更進一步處理玻璃片以形成顯示器裝置,或其他包含玻璃片的裝置。例如,在圖2所示的有機發光二極體顯示器的製 造,在第一玻璃片56(譬如基板56)上沉積一層或以上的有機材料層54。第一玻璃片通常被稱作背板。背板56也可包含薄膜電晶體(TFTs)和電極(未顯示出)以供應有機層電流,並使其發光。然而,因為有機材料層54對於像是濕氣和氧氣等各種環境因素敏感,有機層必須緊密地和周圍環境隔離。因此,有機層緊密地密封在背板56和有時也稱做蓋板的第二玻璃片58所形成的玻璃封套內,而密封材料60置放在背板和蓋板玻璃片之間。The display manufacturer receives the glass flakes from the glass manufacturer and further processes the glass flakes to form a display device, or other device that includes a glass sheet. For example, the system of the organic light emitting diode display shown in FIG. One or more layers of organic material 54 are deposited on the first glass sheet 56 (e.g., substrate 56). The first piece of glass is often referred to as the backing plate. Backsheet 56 may also include thin film transistors (TFTs) and electrodes (not shown) to supply organic layer current and cause it to illuminate. However, since the organic material layer 54 is sensitive to various environmental factors such as moisture and oxygen, the organic layer must be closely isolated from the surrounding environment. Thus, the organic layer is tightly sealed within the glass envelope formed by the backsheet 56 and the second glass sheet 58, sometimes also referred to as a cover, and the sealing material 60 is placed between the backsheet and the cover glass.
可以使用數種密封的方法來連結背板和蓋板玻璃片,其包括使用黏著劑。黏著劑很容易施加和使用,但必須容許所需的緊密性以確保裝置可在失效之前顯示業界可實行的使用壽命。也就是說,濕氣和/或氧氣最後可能穿透黏著的密封,導致有機層和顯示器裝置劣化。A number of sealing methods can be used to join the backsheet and cover glass sheets, including the use of an adhesive. Adhesives are easy to apply and use, but must be tolerant of the tightness required to ensure that the device can exhibit an industrially viable service life before failure. That is, moisture and/or oxygen may eventually penetrate the adhesive seal, causing degradation of the organic layer and display device.
一種更可實行的方式是在背板和蓋板玻璃片之間形成玻璃料密封。依據這個方式,玻璃料密封材料的線以迴路或框架的形式分配在蓋板,在這之後加熱玻璃料蓋板使玻璃料黏著到蓋板。然後將蓋板58放在背板56上,其間放置玻璃料60(和有機層54)。然後加熱玻璃料60,譬如以雷射64發射雷射束66,軟化玻璃料並形成背板56和蓋板58之間的緊密密封。A more practicable way is to form a frit seal between the backsheet and the cover glass. In this way, the strands of the frit seal material are distributed in the form of a loop or frame to the cover, after which the frit cover is heated to adhere the frit to the cover. The cover 58 is then placed on the backing plate 56 with the frit 60 (and the organic layer 54) placed therebetween. The frit 60 is then heated, such as by launching a laser beam 66 with a laser 64, softening the frit and forming a tight seal between the backing plate 56 and the cover plate 58.
從以上的說明可以想像,在有機層和TFT的各種沉積處理以及玻璃片的連結和密封期間,需要精準對齊背板和/或蓋板。一般而言,在這種形成處理期間,基板需要是平面的。例如,背面基板通常要真空至平面的支撐表 面,用來加以處理。It is conceivable from the above description that during the various deposition processes of the organic layer and the TFT and the joining and sealing of the glass sheets, it is necessary to precisely align the back sheets and/or the cover sheets. In general, the substrate needs to be planar during this forming process. For example, the back substrate usually has a vacuum to a flat support table. Face, used to deal with.
目前用來計量平面玻璃平坦度的一種方式是測量玻璃最大的"翹曲"。也就是測量玻璃片表面多個點的距離(或偏差),這是根據參考表面來決定,距離的偏差代表玻璃片形狀和真實平面的偏差即玻璃片的翹曲。確然後可利用最大的翹曲來測量玻璃片的形狀(譬如玻璃片的平坦度),雖然可能不太精確。One way to measure the flatness of flat glass is to measure the maximum "warpage" of the glass. That is, measuring the distance (or deviation) of a plurality of points on the surface of the glass sheet, which is determined according to the reference surface, and the deviation of the distance represents the deviation of the shape of the glass sheet from the true plane, that is, the warpage of the glass sheet. It is then possible to use the maximum warpage to measure the shape of the glass sheet (such as the flatness of the glass sheet), although it may not be accurate.
圖3顯示依據本發明實施例決定譬如玻璃片的玻璃製品形狀的方法。依據圖3的本發明實施例,一般表示為參考編號68,將玻璃片70置放在包含流體74的容器72。玻璃片70可以置放在流體的表面,或沉浸在流體內,如同以下較詳盡的說明。玻璃片有預定的平均密度和預定的平均折射率。流體也有預定的平均密度和預定的平均折射率。流體的平均密度最好是至少約玻璃片平均密度的85%;更好是至少約90%;再更好是至少約95%。當流體的平均密度至少是約85%的玻璃片平均密度時,可以說流體74相對於玻璃片70是中等密度,此玻璃片被認為是中等能漂浮的,因此玻璃片應該會維持在流體74內的一個固定位置,而不需要機械性支撐就有足夠的時間來完成所要的測量。例如,適合的流體可取自Cargille Inc.公司,這是一間製造折射率匹配液體,沉浸液體,光耦合液體,折射計液體和其他特殊的液體。這些液體是很有益處的,因為通常沒有毒性,而且很容易調整流體密度,譬如增加或減少蒸發的濃度。流體密 度的調整也可藉由混合兩種以上不同密度的流體以達到所需的混合物預定平均密度。例如,由Corning Incorporated公司製造的Eagle2000玻璃平均密度約2.37g/cc。可以有效的量混合數種流體譬如平均密度2.35g/cc的第一流體,以及平均密度2.45g/cc的第二流體以得到平均密度等於2.37g/cc的第三流體。熟悉此項技術的人可以瞭解,可使用所需要密度性質的任何流體。Figure 3 illustrates a method of determining the shape of a glass article such as a glass sheet in accordance with an embodiment of the present invention. In accordance with the embodiment of the invention of FIG. 3, generally designated reference numeral 68, a glass sheet 70 is placed in a container 72 containing a fluid 74. The glass sheet 70 can be placed on the surface of the fluid or immersed in the fluid, as described in more detail below. The glass sheet has a predetermined average density and a predetermined average refractive index. The fluid also has a predetermined average density and a predetermined average refractive index. Preferably, the fluid has an average density of at least about 85% of the average density of the glass sheets; more preferably at least about 90%; still more preferably at least about 95%. When the average density of the fluid is at least about 85% of the average density of the glass sheets, it can be said that the fluid 74 is of medium density relative to the glass sheet 70. The glass sheet is considered to be moderately floating, so the glass sheet should be maintained in the fluid 74. A fixed position inside, without the need for mechanical support, has enough time to complete the desired measurement. For example, a suitable fluid is available from Cargille Inc., which is a refractive index matching liquid, immersion liquid, light coupling liquid, refractometer liquid, and other special liquids. These liquids are very beneficial because they are generally non-toxic and it is easy to adjust the fluid density, such as increasing or decreasing the concentration of evaporation. Fluid tight The degree of adjustment can also be achieved by mixing two or more fluids of different densities to achieve a desired average density of the mixture. For example, Eagle 2000 glass manufactured by Corning Incorporated has an average density of about 2.37 g/cc. A plurality of fluids such as a first fluid having an average density of 2.35 g/cc and a second fluid having an average density of 2.45 g/cc can be mixed in an effective amount to obtain a third fluid having an average density of 2.37 g/cc. Those skilled in the art will appreciate that any fluid of the desired density properties can be used.
繼續再看圖3,可使用感測器76來測量感測器到玻璃片表面的距離。玻璃片70包括面對感測器76的第一面78(感測器面),和不面對感測器的第二面80。在目前的實施例中,感測器面78可稱為頂部面78,而非感測器面80可稱為底部面80。為了確保玻璃表面可由感測器76偵測出,流體74的平均折射率最好可偵測出不同於玻璃片70的平均折射率。流體平均折射率和玻璃片平均折射率之間可允許的差異是由譬如感測器76敏感度的因素來決定。或者,假使某個感測器無法區別玻璃片平均折射率和流體平均折射率之間的差異,可以在玻璃片70的表面塗覆薄膜或塗層(未顯示出),最好塗覆在玻璃片的底部面,以得到感測器和玻璃塗層介面之間測量的距離。假使塗層緊黏到頂部面78(感測器面),塗層本身的測量也可能導致錯誤的測量,因為那樣會測量到薄膜表面,而不是玻璃表面。雖然不是必要,但塗層最好是不透明的,而且可包含墨水或色料的塗料。我們發現白色不透明的塗層可達到最佳的效果。然而,任何可測得 折射率不同於流體折射率的塗層都是可接受的。例如,塗層可包含聚合物薄膜,這裡聚合物可測得的平均折射率不同於流體的平均折射率。任何施加塗層到玻璃片70的應力最好是不足以額外導致玻璃片的畸形。為了這個原因,可以不連續的方式塗覆塗層到玻璃片,譬如以一系列點,線或其他形狀的方式。或者,也可測量玻璃片的厚度為玻璃片上位置的函數,再結合薄膜-玻璃介面的距離資料以產生玻璃片感測器面的外形表面。Continuing with Figure 3, sensor 76 can be used to measure the distance of the sensor from the surface of the glass sheet. The glass sheet 70 includes a first face 78 (sensor face) facing the sensor 76 and a second face 80 that does not face the sensor. In the current embodiment, the sensor face 78 may be referred to as a top face 78 and the non-sensor face 80 may be referred to as a bottom face 80. To ensure that the glass surface is detectable by the sensor 76, the average refractive index of the fluid 74 preferably detects an average refractive index different from that of the glass sheet 70. The allowable difference between the average refractive index of the fluid and the average refractive index of the glass sheet is determined by factors such as the sensitivity of the sensor 76. Alternatively, if a sensor cannot distinguish the difference between the average refractive index of the glass sheet and the average refractive index of the fluid, a film or coating (not shown) may be applied to the surface of the glass sheet 70, preferably coated on the glass. The bottom side of the sheet is used to obtain the distance measured between the sensor and the glass coating interface. If the coating is tightly adhered to the top surface 78 (sensor surface), measurement of the coating itself may also result in erroneous measurements, as that would measure the surface of the film rather than the surface of the glass. Although not required, the coating is preferably opaque and may comprise a coating of ink or colorant. We found a white opaque coating for optimum results. However, any measurable Coatings having a refractive index different from the refractive index of the fluid are acceptable. For example, the coating can comprise a polymeric film where the average refractive index of the polymer can be measured differently than the average refractive index of the fluid. Any stress applied to the glass sheet 70 is preferably insufficient to additionally cause malformation of the glass sheet. For this reason, the coating can be applied to the glass sheet in a discontinuous manner, such as in a series of dots, lines or other shapes. Alternatively, the thickness of the glass sheet can be measured as a function of the position on the glass sheet, combined with the distance data of the film-glass interface to create the contoured surface of the glass sheet sensor surface.
依據實施例,一旦玻璃片70置放在流體74中,可利用感測器76來測量從感測器到玻璃片之表面的距離。可利用感測器76來測量感測器和玻璃片之頂部面78之間的距離d1 ,或者可使用感測器76來測量感測器和玻璃片之底部面80之間的距離d2 。可使用感測器76來測量d1 和d2 ,從這裡可決定玻璃片在任何點的厚度為t=d2 -d1 。例如,感測器76可包含雷射移位感測器。然而,感測器76也可包含此項技術中已知的其他裝置,譬如聲音的感測器作為測量之用。雷射裝置可包括簡單的雷射測距裝置,或更精密的裝置,譬如Michelson干涉儀。感測器可以是以時間為根據的,在這裡像是聲音,在流體中有已知速度的感測能量是有時間性的。一種適合的感測器是由美國Keyence Corporation公司所製造,共焦的雷射移位感測器LT8110。雖然感測器76可置放在流體表面之上,但感測器最好接觸流體,因而可有助益的消除流體表面82的空氣-流體界面。感測器76也可完全 浸沒在流體中。Depending on the embodiment, once the glass sheet 70 is placed in the fluid 74, the sensor 76 can be utilized to measure the distance from the sensor to the surface of the glass sheet. The sensor 76 can be utilized to measure the distance d 1 between the sensor and the top surface 78 of the glass sheet, or the sensor 76 can be used to measure the distance d 2 between the sensor and the bottom surface 80 of the glass sheet. . The sensor 76 can be used to measure d 1 and d 2 , from which it can be determined that the thickness of the glass sheet at any point is t = d 2 - d 1 . For example, sensor 76 can include a laser shift sensor. However, sensor 76 may also include other devices known in the art, such as a sensor for sound as a measurement. The laser device can include a simple laser ranging device, or a more sophisticated device such as a Michelson interferometer. The sensor can be time-based, here like sound, and the sensing energy with a known velocity in the fluid is temporal. One suitable sensor is the LT8110, a laser-shifted sensor that is manufactured by Keyence Corporation of the United States. While the sensor 76 can be placed over the surface of the fluid, the sensor preferably contacts the fluid, thereby advantageously eliminating the air-fluid interface of the fluid surface 82. The sensor 76 can also be completely submerged in the fluid.
另一種決定無重力形狀的方法是使用所謂的釘床(BoN)測量系統,如圖4所描繪。在BoN測量系統中,玻璃片是由下面的一組針銷支撐。這種針銷可垂直移動也可測量玻璃片的支撐力。也可測得每個針銷移動。Another way to determine the shape without gravity is to use a so-called nail bed (BoN) measurement system, as depicted in Figure 4. In the BoN measurement system, the glass piece is supported by the following set of pins. This pin can move vertically and measure the support of the glass piece. It is also possible to measure the movement of each pin.
可調整針銷的高度,直到每個針銷支撐了特定的目標重量。例如,一個平面基板放在同等分佈的針銷上,其目標重量就等於基板整個重量的同等分數。然而,每個目標重量有可能不等於下一個,目標重量的決定是根據有限元素分析的應力分析。當所有的針銷都是以特定的重量,所支撐的基板就是其無重力的形狀。以其無重力位置的針銷陣列可藉由光學方式掃瞄基板表面和測量針銷上和其間整個表面的高度以測量無重力的形狀。The height of the pins can be adjusted until each pin supports a specific target weight. For example, a planar substrate placed on an equally distributed pin has a target weight equal to the equivalent fraction of the entire weight of the substrate. However, each target weight may not equal the next one, and the target weight is determined based on the stress analysis of the finite element analysis. When all the pins are of a specific weight, the supported substrate is its gravity-free shape. The pin array with its gravity-free position can measure the gravity-free shape by optically scanning the surface of the substrate and measuring the height of the entire surface of the pin and the pinch therebetween.
BoN測量儀器的問題是:改變單一個針銷的高度有可能會改變在所有其他針銷上的重量。例如一個極端的例子是,有一個針銷被提升高到足以提升基板到配合的針銷頂端之上,配合的針銷就不用承擔任何重量,所以不會接觸到基板。因此,當這個針銷的高度被調整時,支撐的目標重量會立即改變,當另一個針銷的高度改變時,所支撐的重量又會改變。假使系統是由人工調整,就會需要大量的時間來調整針銷。假使系統是自動化,就需要演算法來調整針銷。The problem with BoN measuring instruments is that changing the height of a single pin may change the weight on all other pins. An extreme example, for example, is that a pin is lifted high enough to lift the substrate onto the top of the mating pin. The mating pins do not bear any weight and therefore do not touch the substrate. Therefore, when the height of the pin is adjusted, the target weight of the support changes immediately, and when the height of the other pin changes, the supported weight changes. If the system is manually adjusted, it will take a lot of time to adjust the pin. If the system is automated, an algorithm is needed to adjust the pin.
在早先的系統是以人工調整,分別調整每一個針銷。調整每一個針銷的高度直到達到目標重量。這種調整動 作一次調整一個針銷,從第一個針銷到最後一個針銷。然而因為調整一個針銷會改變所有其他針銷的負載,這種程式必須一次又一次的重複,每個循環校正前一次循環引起的小偏差。In the earlier system, the manual adjustment was made to adjust each pin separately. Adjust the height of each pin until the target weight is reached. This adjustment Make one adjustment of the pin at a time, from the first pin to the last pin. However, since adjusting one pin will change the load of all other pins, this program must be repeated over and over again, each cycle correcting small deviations caused by the previous cycle.
依據一個或多個的實施例中,本發明包括調整針銷的高度以同時支撐所有針銷的目標重量。尤其,提供針銷陣列適當針銷高度調整的系統的計算和執行。當所有針銷都在特定的高度時,其高度就是那個基板的無重力高度。無重力高度的針銷陣列提供無重力形狀的測量,如果有的話,還有潛在的形狀扭曲。針銷的高度調整器也可以記錄針銷的高度,排除另外的高度測量方式譬如光學掃瞄器。In accordance with one or more embodiments, the present invention includes adjusting the height of the pin to simultaneously support the target weight of all of the pins. In particular, the calculation and execution of a system of pin pin arrays with appropriate pin height adjustment is provided. When all the pins are at a certain height, the height is the gravity-free height of that substrate. The gravity-free pin array provides a gravity-free shape measurement, if any, with potential shape distortion. The height adjuster of the pin can also record the height of the pin and eliminate additional height measurement methods such as optical scanners.
然而,所有針銷可同時調整。不需要評估針銷的力量,一直到所有針銷同時調整好為止。如果針銷沒有移動的話,針銷的力是針銷向上的力量等於針銷所支撐向下的力量。藉著調整一整組針銷,此處理說明了調整一個針銷會影響所有其他針銷的事實。於是,在幾乎每個範例中可實現在所有針銷上達到目標針銷力的好處。However, all pins can be adjusted at the same time. There is no need to evaluate the power of the pin until all pins are adjusted at the same time. If the pin does not move, the force of the pin is the upward force of the pin equal to the downward force supported by the pin. By adjusting a full set of pins, this process illustrates the fact that adjusting one pin affects all other pins. Thus, the benefits of achieving the target pin force on all pins can be achieved in almost every example.
參考圖4,圖示的是依據本發明一個或多個實施範例的釘床形狀測量儀100。BoN測量儀可包括複數個針銷110,至少有3個針銷110,測量儀基座120,和處理器130。拿一個彈性板狀的物件當作測量主體140,這裡是描述成玻璃基板140。基板140放在該複數個針銷110之頂端,當測量主體140在重力下屈曲,每個針銷110 會承受特定的重量。每個針銷110包括一個負載元件112以測量針銷110支撐的重量。負載元件112可以放在高度調整器114的上方,這個裝置最好是以馬達自動化,用已知的方式來調整針銷110的高度。也可以使用其他的安排譬如讓負載元件112在下方以負擔高度調整器114的重量。Referring to Figure 4, illustrated is a nail bed shape meter 100 in accordance with one or more embodiments of the present invention. The BoN meter can include a plurality of pins 110, at least three pins 110, a meter base 120, and a processor 130. An elastic plate-like object is taken as the measuring body 140, which is described herein as a glass substrate 140. The substrate 140 is placed at the top end of the plurality of pins 110, and when the measuring body 140 is flexed under gravity, each pin 110 Will bear a specific weight. Each pin 110 includes a load element 112 to measure the weight supported by the pin 110. The load element 112 can be placed above the height adjuster 114. This device is preferably automated with a motor to adjust the height of the pin 110 in a known manner. Other arrangements, such as having the load element 112 underneath to burden the height adjuster 114, may also be used.
負載元件112可經由電路116傳輸和測得針銷力相關的測量訊號132到處理器130,然後處理器130執行演算法計算出每個針銷110所需的高度調整。處理器130可經由電路116傳輸調整訊號134到高度調整器114以執行計算出的高度調整。通常的情況是,演算法越好,負載元件112就可以越快讀取目標負載。The load element 112 can transmit and measure the pin force related measurement signal 132 to the processor 130 via the circuit 116, and the processor 130 then performs an algorithm to calculate the height adjustment required for each pin 110. The processor 130 can transmit the adjustment signal 134 to the height adjuster 114 via the circuit 116 to perform the calculated height adjustment. It is often the case that the better the algorithm, the faster the load component 112 can read the target load.
本發明利用了改變一個針銷110的高度通常會改變所有針銷110的負載這個事實。在測量儀100使用到N個針銷110。目的是找出針銷高度,使得每個針銷110的力量在某特定值。例如,在一個相當均勻厚度和密度的實質上平面基板140,可假設質量近似相等分佈,假定有N個針銷110是相等的分佈,使得特定的重量值是等於基板重量的1/N。The present invention takes advantage of the fact that changing the height of one of the pins 110 generally changes the load of all of the pins 110. N pins 110 are used in the gauge 100. The purpose is to find the pin height so that the force of each pin 110 is at a certain value. For example, in a substantially planar substrate 140 of relatively uniform thickness and density, it can be assumed that the masses are approximately equally distributed, assuming that there are N pins 110 that are equally distributed such that a particular weight value is equal to 1/N of the weight of the substrate.
依據一項實施例,不會調整其中3個針銷110,因此在每個循環這些都是不動的。這3個不動的針銷110固定參考平面,因此這3個針銷110不應該在一直線上。在每個循環中,這3個針銷都維持固定。可在接續的循環調整。因此,可以如下列的計算調整所有剩下的N-3 個針銷110也用來支撐特定的重量。According to one embodiment, three of the pins 110 are not adjusted, so these are not moving in each cycle. The three stationary pins 110 are fixed to the reference plane, so the three pins 110 should not be in a straight line. These three pins remain fixed in each cycle. Can be adjusted in the continuous cycle. Therefore, all remaining N-3s can be adjusted as described below. A pin 110 is also used to support a particular weight.
計算剩下N-3個針銷110的針銷高度調整可以考慮成一組聯立方程式,有N-3個方程式和N-3個未知數,用來表示針銷高度改變和針銷重量改變的關聯。3個固定的針銷針對方程式的關聯定義出參考平面。從物理的觀點來看,力量的總和,某個軸力矩的總和,和另一個軸力矩的總和表示必須滿足的3個方程式。固定這3個針銷,藉由調整其他針銷可系統化滿足這3個針銷的目標重量,也因而滿足這些針銷的目標重量。從幾何的觀點來看,沒有固定這3個點,雖然不太理想,但剛性運動是可能的。剛性運動可以平移基板,並沿著兩個不同的軸旋轉,針對針銷高度調整方程組產生超過一組解。因此,固定這3個點,以致針對針銷高度調整方程組只有一組解。Calculating the pin height adjustment of the remaining N-3 pins 110 can be considered as a set of simultaneous equations, with N-3 equations and N-3 unknowns, used to indicate the association between pin height change and pin weight change. . The three fixed pins define the reference plane for the association of the equations. From a physical point of view, the sum of the forces, the sum of one of the axle moments, and the sum of the other axle moments represent the three equations that must be met. By fixing the three pins, the target weight of the three pins can be systematically satisfied by adjusting other pins, and thus the target weight of the pins is satisfied. From a geometric point of view, these three points are not fixed, although less than ideal, rigid motion is possible. Rigid motion can translate the substrate and rotate along two different axes, producing more than one set of solutions for the pin height adjustment equations. Therefore, these three points are fixed so that there is only one set of solutions for the pin height adjustment equations.
剛才描述的翹曲測量只能簡單表示玻璃片的表面形貌,因此其本身使玻璃片扁平的能力是很弱的指標,譬如將玻璃片真空成平面台座。例如,譬如薄玻璃片的材料片200包含縱向的脊部202,縱向的脊部202沿著「片」的長度延伸,使平行於玻璃片的一邊,脊部從參考平面204的最大偏差值是L+δ,如圖5所示。假定脊部的形狀像是包含圓柱形的一部分。第二片材料片206在材料片的表面包含一個凹面208(譬如小丘或泡狀物),如圖6所示,這裡的凹面到同樣參考平面204的最大偏差值也是L+δ。兩片玻璃顯示相同的最大翹曲(δ)。然而,因 為材料片200包含圓柱形狀脊部(圖5)是可展開的,比具有凹面的材料片206更容易平坦化。The warpage measurement just described can only simply indicate the surface topography of the glass sheet, so the ability to flatten the glass sheet itself is a weak indicator, such as vacuuming the glass sheet into a flat pedestal. For example, a sheet of material 200, such as a thin glass sheet, includes a longitudinal ridge 202 that extends along the length of the "sheet" such that the maximum deviation of the ridge from the reference plane 204 is parallel to one side of the sheet. L + δ, as shown in Figure 5. It is assumed that the shape of the ridge is like a part containing a cylindrical shape. The second sheet of material 206 comprises a concave surface 208 (such as a hillock or bubble) on the surface of the sheet of material, as shown in Figure 6, where the maximum deviation from the concave surface to the same reference plane 204 is also L + δ. Two sheets of glass show the same maximum warpage (δ). However, due to The inclusion of a cylindrical shaped ridge (Fig. 5) for the sheet of material 200 is expandable and is easier to planarize than a sheet of material 206 having a concave surface.
可展開的表面是不需延展,壓縮或撕裂的表面就可平坦化表面。例如,如圖7A和以上討論的圓柱形,包含可展開的表面,因為圓柱形的表面可以滾平而無需延展或撕裂的表面(圖7B)。換句話說,球形表面(圖8A)是不可展開的。試著要平坦化球形的一部分,譬如半球體,此半球體必須沿著多個邊緣延展或撕裂以順應(圖8B)。因此,在先前的實施例中,具有圓柱形狀脊部的玻璃片可壓平成平面台座而無需使材料片畸形,而順應第二個範例材料片至台座需畸形或撕裂材料片。The expandable surface is a surface that does not need to be stretched, compressed or torn to flatten the surface. For example, as shown in Figure 7A and the cylindrical shape discussed above, the expandable surface is included because the cylindrical surface can be flattened without the need to stretch or tear the surface (Figure 7B). In other words, the spherical surface (Fig. 8A) is not expandable. Try to flatten a portion of the sphere, such as a hemisphere, which must extend or tear along multiple edges to conform (Figure 8B). Thus, in the previous embodiment, a glass sheet having a cylindrical ridge may be flattened into a planar pedestal without deforming the sheet of material, but conforming to the second exemplary sheet of material to the pedestal requires deforming or tearing the sheet of material.
可展開的表面是可藉著保留角度和距離轉換成平面表面。當可展開的表面轉換成平面表面時,不會引進應變到表面內。或者,可展開的表面是可從平面表面形成,而不需延展,壓縮或撕裂的表面。明白地說,藉著最大翹曲作為特徵的玻璃片可能足以說明玻璃片是不平的,但相當不適合拿來測量玻璃片要如何強制變成平面的設計。The expandable surface is convertible into a planar surface by retaining angles and distances. When the deployable surface is converted into a planar surface, no strain is introduced into the surface. Alternatively, the deployable surface is a surface that can be formed from a planar surface without the need to stretch, compress or tear. It is clear that the glass sheet characterized by maximum warpage may be sufficient to show that the glass sheet is not flat, but it is quite unsuitable for measuring how the glass sheet is forced to become a flat design.
表面的高斯曲率K是表面內部的幾何性質且定義為表面上某一點主要的曲率k1 和k2 的乘積。也就是說,K=k1 k2 。實際上,高斯曲率是描述表面如何偏移平面表面。高斯曲率的數學推導是為人所知的將不會在此廣泛地涵蓋。考慮高斯曲率的實用意義將更具啟發性。首先,只根據如何在表面上測量距離和角度。例如,假使表面 的高斯曲率是正值,在那點的表面會包含凸塊或尖波峰;假使高斯曲率是負值,表面會包含一個鞍點。然而,假使高斯曲率是零,那點的表面是等於平坦的表面。一個簡單的實驗可用來說明這種差異。在球形表面(正高斯曲率)所畫出三角形的角度總和是大於180度,而在圓柱形(高斯曲率=0)所畫出類似三角形的角度總和必須等於180度。可展開的表面高斯曲率是零,可被轉換成平面表面,而不需延展,壓縮或撕裂。假使可以平坦化表面,而不會引起應變,那麼高斯曲率則維持固定。因此知道表面之高斯曲率的大小是具啟發性的,可瞭解某個表面順應另一個表面的程度。The Gaussian curvature K of the surface is the geometric property inside the surface and is defined as the product of the major curvatures k 1 and k 2 at a point on the surface. That is, K = k 1 k 2 . In fact, the Gaussian curvature is a description of how the surface is offset from the planar surface. The mathematical derivation of Gaussian curvature is well known and will not be widely covered here. It is more instructive to consider the practical significance of Gaussian curvature. First, just measure the distance and angle on the surface. For example, if the Gaussian curvature of the surface is positive, the surface at that point will contain bumps or sharp peaks; if the Gaussian curvature is negative, the surface will contain a saddle point. However, if the Gaussian curvature is zero, the surface at that point is equal to the flat surface. A simple experiment can be used to illustrate this difference. The sum of the angles of the triangles drawn on the spherical surface (positive Gaussian curvature) is greater than 180 degrees, and the sum of the angles of the triangles drawn in the cylindrical (Gaussian curvature = 0) must be equal to 180 degrees. The expandable surface Gaussian curvature is zero and can be converted to a planar surface without the need to stretch, compress or tear. If the surface can be flattened without causing strain, the Gaussian curvature remains fixed. It is therefore instructive to know the size of the Gaussian curvature of the surface to understand the extent to which one surface conforms to the other.
依據本發明的一個實施例,可以利用高斯曲率來描述玻璃片對參考表面譬如支撐玻璃片表面的順應性。玻璃片最好可以真正順應支撐表面,意味著玻璃片每一點上的高斯曲率幅度符合,或近乎符合支撐表面每一點上的高斯曲率幅度。假使參考表面是平面,玻璃片在表面上的每一點應該也有零值的高斯曲率以準確順應參考(譬如支撐)表面。各個高斯曲率之間差異的量值越大,玻璃片顯示順應性的抵抗力量越大。以另一種方式來說,玻璃片上每一點的高斯曲率值和支撐表面對應點之間的差異應該等於或小於預定的最大差異(△K=∥Ksheet |-|Ksupport ∥≦G,這裡G是預定的最大值。G通常是根據玻璃片的應用可以從實驗或模型來決定)。對應點是指當玻璃片壓向支撐表面時,玻璃片上一點和支撐表面一點重 疊的點。假使△K大於G,玻璃片可能不夠順應支撐表面。在平坦化玻璃時,玻璃內產生的應變能量可能導致玻璃內的屈曲或應力量誘發的雙折射性。In accordance with an embodiment of the present invention, Gaussian curvature can be utilized to describe the compliance of a glass sheet to a reference surface, such as a surface of a supporting glass sheet. The glass sheet preferably conforms to the support surface, meaning that the Gaussian curvature at each point of the glass sheet conforms to, or nearly conforms to, the Gaussian curvature at each point of the support surface. If the reference surface is planar, the glass sheet should also have a zero Gaussian curvature at each point on the surface to accurately conform to the reference (eg, support) surface. The greater the magnitude of the difference between the Gaussian curvatures, the greater the resistance of the glass sheet to compliance. In another way, the difference between the Gaussian curvature value at each point on the glass sheet and the corresponding point on the support surface should be equal to or less than the predetermined maximum difference (ΔK=∥K sheet |-|K support ∥≦G, where G It is the predetermined maximum value. G is usually determined from experiments or models depending on the application of the glass sheet. Corresponding points refer to the point at which a point on the glass sheet overlaps the support surface a little when the glass sheet is pressed against the support surface. If ΔK is greater than G, the glass sheet may not be sufficient to conform to the support surface. When flattening the glass, the strain energy generated in the glass may cause buckling or stress-induced birefringence in the glass.
從以上看來,譬如圖5所示顯示了玻璃片置放在譬如平坦表面的支撐表面,假使玻璃片只遭受重力量和台座的反作用力量,我們可以期望單波峰或波谷的高斯曲率值不會改變太多。這在高斯曲率值增加時愈為真實。當高斯曲率值增加時,玻璃片對平坦化的抵抗力量也愈增加,必須使用更大的力量來平坦化玻璃片。如以上所述,這會導致增加損害的效應(屈曲,應力量等)可能影響特定的製造處理過程。相反地,高斯曲率值越大就需要更多的力量來平坦化玻璃片。首先在有可展開形狀的區域出現玻璃片的彎曲,因為這比不可展開形狀的區域需要較少的能量。圖9顯示的是玻璃片平坦度和必須施加以達到對應平坦度的力量之間的關係。垂直虛線左邊的表面是表示可展開的形狀,而線右邊的表面則是表示不可展開的形狀。如圖所顯示的,繪圖曲線可展開的表面的區域210只以少許的力量就可輕易平坦化,平坦化的唯一抵抗性是來自表面的堅硬度。換句話說,不可展開的表面需要較多的力量。在繪圖曲線的區域210有可能發生表面的屈曲,而當平坦化的力量增加時,在區域214會產生大的薄膜力量和力量矩。為了大的高斯曲率值的奇異點,當施加相對弱的力量時(譬如只有重力量),我們希望不會影響到高斯曲率值的奇異點。From the above point, as shown in Figure 5, the glass sheet is placed on a support surface such as a flat surface. If the glass sheet is only subjected to heavy forces and the reaction force of the pedestal, we can expect that the Gaussian curvature value of a single peak or trough will not Change too much. This is more realistic as the Gaussian curvature increases. As the Gaussian curvature increases, the resistance of the glass sheet to flattening increases, and more force must be used to flatten the glass. As described above, this can lead to increased damage effects (buckling, stress, etc.) that can affect a particular manufacturing process. Conversely, a larger Gaussian curvature value requires more force to flatten the glass sheet. First, the curvature of the glass sheet appears in the area with the expandable shape because it requires less energy than the area of the non-expandable shape. Figure 9 shows the relationship between the flatness of the glass sheet and the force that must be applied to achieve the corresponding flatness. The surface to the left of the vertical dashed line represents the expandable shape, while the surface to the right of the line represents the shape that is not expandable. As shown, the area 210 of the expandable surface of the plot curve can be easily flattened with only a small amount of force, and the only resistance to flattening is the stiffness from the surface. In other words, an unexpandable surface requires more power. The buckling of the surface may occur in the region 210 of the plotting curve, and as the force of the flattening increases, a large film force and force moment are produced in the region 214. For large singular points of Gaussian curvature values, when applying relatively weak forces (such as only heavy forces), we hope that the singular points of Gaussian curvature values will not be affected.
為了善加利用高斯曲率,我們最好瞭解玻璃片的無重力形狀。也就是玻璃片的形狀要在無重力的狀態取得。當在地球上要達到真正的無重力狀態時,可以近似化無重力狀態的條件。例如,我們可使用中等的密度系統。In order to make good use of Gaussian curvature, we better understand the gravity-free shape of the glass piece. That is, the shape of the glass piece is to be obtained without gravity. When the true gravity-free state is to be achieved on Earth, the condition of the gravity-free state can be approximated. For example, we can use a medium density system.
一旦決定了玻璃片的形狀譬如透過無重力玻璃片形狀測量方法以決定參考平面多個點的偏差就可以在每個點決定玻璃片的高斯曲率。例如,可以使用密切拋物面的方法來決定玻璃片局部區域的高斯曲率。高斯曲率K,平均曲率H,拋物面2z=ax2 +bxy+cy2 在其頂點K=ac-b2 ,而H是(a+c)/2。拋物面和法面在其頂點P的交點是拋物線,在P的曲率是kn =k1 cox2 θ+k2 sin2 θ,這裡k1 和k2 是方程式k2 -2Hk+K=0的根,而θ是此平面和kn 達到其最大值(或最小值)之間的角度。Kn ,k1 和k2 的極端值是先前描述的主要曲率。使用密切拋物面來決定高斯曲率是已知的方法,這裡將不再進一步涵蓋說明。Once the shape of the glass sheet is determined, such as by a gravity-free glass sheet shape measurement method to determine the deviation of a plurality of points in the reference plane, the Gaussian curvature of the glass sheet can be determined at each point. For example, a close paraboloid approach can be used to determine the Gaussian curvature of a localized area of the glass sheet. Gaussian curvature K, mean curvature H, paraboloid 2z = ax 2 + bxy + cy 2 at its vertex K = ac - b 2 , and H is (a + c) / 2. The intersection of the paraboloid and the normal at its apex P is a parabola, and the curvature at P is k n =k 1 cox 2 θ+k 2 sin 2 θ, where k 1 and k 2 are equations k 2 -2Hk+K=0 root, and this plane is θ and an angle between k n reaches its maximum (or minimum). The extreme values of K n , k 1 and k 2 are the principal curvatures previously described. The use of close paraboloids to determine Gaussian curvature is a known method and will not be further covered here.
或者,部份玻璃片,或整個玻璃片能夠藉由連續性函數例如z=f(x,y)來標定。在玻璃片上任一點之高斯曲率變為K =(f xx f yy -f 2 xy )/(1+f 2 x +f 2 y )2 1Alternatively, a portion of the glass sheet, or the entire sheet of glass, can be calibrated by a continuity function such as z = f(x, y). The Gaussian curvature at any point on the glass sheet becomes K = ( f xx f yy - f 2 xy ) / (1 + f 2 x + f 2 y ) 2 1
其中,,,,及。among them , , , ,and .
除了玻璃片包含奇異點(非常小的區域,這裡玻璃片區域和對應支撐區域之間的高斯曲率差異可能很大)的範例,玻璃片可能包括具有小但有限△K的相對大型區
域。在這個範例中,使低量值的大型區域平坦將在大型區域加總導致相同的損害效應。為了說明和小量值△K相關的大型區域,必須在表面移動的視窗上積分△K的絕對值,並將結果正規化到積分的區域。然後可使用結果的精分值K(Kint
)作為玻璃片形狀的測量。即
應該很明顯的是,假使支撐已知為平坦的(K在各處是0),那麼玻璃片每一點上的△K僅是決定玻璃片高斯曲率的每一點的高斯曲率值。接著可以很容易決定△K,而不需要擔心玻璃片和支撐之間點對點的對應。例如在顯示器面板的TFT沉積期間可能發生這種情況。這種沉積處理的支撐可能重好幾噸,可被切割成極度的高容限。It should be apparent that if the support is known to be flat (K is 0 everywhere), then ΔK at each point of the glass piece is only the Gaussian curvature value that determines each point of the Gaussian curvature of the glass piece. It is then easy to determine ΔK without worrying about the point-to-point correspondence between the glass sheet and the support. This may occur, for example, during TFT deposition of a display panel. This deposition treatment may weigh several tons and can be cut to extreme high tolerances.
假使支撐表面不是平面的就必須執行支撐表面的類似分析以決定支撐表面在對應決定高斯曲率玻璃片上點的高斯曲率。If the support surface is not planar, a similar analysis of the support surface must be performed to determine the Gaussian curvature of the support surface at the point corresponding to the Gaussian curvature glass sheet.
圖11所顯示為非平坦玻璃片之三維模擬曲線,其包含由下列公式所界定出泡狀物(尖峰)
以上的等式4證明延長形的泡狀物,譬如b>>a時的泡狀物,比同樣高度對稱形的泡狀物(b=a)更容易平坦化,因為泡狀物最大的高斯曲率變低。圖13顯示高斯曲率為1x10-8 /mm2 的對稱形泡狀物,直徑對高度關係的圖。高度-直徑位在曲線右邊的泡狀物容易顯示出優良的輕擊行為(很容易經由真空輕擊在平坦的支撐上平坦化),而高度-直徑關係在在曲線左邊的泡狀物容易顯示出不佳的輕擊效能(譬如真空裂縫,不完全的平坦等等)。圖13顯示某個直徑泡狀物應該在特定的高度以下才可有效平坦化。實驗工作證實最大的高斯曲率值1x10-8 /mm2 是顯示器的薄片玻璃最大高斯曲率值的上限低限值(其厚度為小於1mm)。Equation 4 above demonstrates that the elongated bubble, such as b>>a, is easier to planarize than the equally highly symmetrical bubble (b=a) because the largest Gaussian bubble The curvature becomes lower. Figure 13 shows a graph of diameter versus height for a symmetrical bubble having a Gaussian curvature of 1 x 10 -8 /mm 2 . The height-diameter bubble on the right side of the curve tends to show excellent light strike behavior (it is easy to flatten on a flat support via a vacuum tap), while the height-diameter relationship is easy to display on the bubble to the left of the curve. Poor tapping performance (such as vacuum cracks, incomplete flatness, etc.). Figure 13 shows that a certain diameter bubble should be effectively planarized below a certain height. Experimental work confirmed that the maximum Gaussian curvature value of 1x10 -8 /mm 2 is the upper limit low limit of the maximum Gaussian curvature value of the sheet glass of the display (its thickness is less than 1 mm).
使用高斯曲率作為材料片順應性的特徵,尤其在譬如薄片玻璃的彈性材料片可用來:描述薄片玻璃變形成任何既定形狀的可能,此種方法不限定在平坦和水平支撐的設計;可用來幫忙瞭解玻璃片輕擊的行為最佳化輕擊的方法,因為依據高斯曲率的知識了解放在平坦工作台上的薄玻璃片大多數靠在可展開表面的區域上;可幫助玻璃片形狀規格的發展,最好是和玻璃片輕擊行為相連結,而不是翹曲單一最大值; 可幫忙估計輕擊時應變和總高度的變化。Gaussian curvature is used as a feature of material sheet compliance, especially in sheets of elastic material such as sheet glass, which can be used to describe the possibility of sheet glass being deformed into any given shape. This method is not limited to flat and horizontally supported designs; it can be used to help Understand the behavior of glass flicks to optimize the tapping method, because according to the knowledge of Gaussian curvature, it is known that the thin glass sheets placed on the flat table mostly rest on the area of the expandable surface; Development, preferably linked to the glass flick behavior, rather than warping a single maximum; Can help estimate changes in strain and total height at the time of tapping.
必需強調本發明上述所說明實施例特別是"優先"實施例只是實施可能的範例,揭示出內容只作為清楚地瞭解本發明之原理。本發明上述所說明實施例能夠作許多變化及改變而並不會脫離本發明之精神及原理。例如,雖然在此所顯示範例性實施例為垂直配置,本發明在水平指向同樣地有效。預期所有這些改變及變化包含於所揭示範圍內以及本發明受到下列申請專利範圍保護。It is to be understood that the above-described embodiments of the invention, particularly, "preferred" The above-described embodiments of the present invention are capable of many changes and modifications without departing from the spirit and scope of the invention. For example, although the exemplary embodiment shown herein is a vertical configuration, the present invention is equally effective in horizontal pointing. All such changes and modifications are intended to be included within the scope of the disclosure and the invention is protected by the following claims.
20‧‧‧楔形/楔形元件20‧‧‧Wedge/Wedge Element
22‧‧‧通道22‧‧‧ channel
24‧‧‧壁板部分24‧‧‧ siding section
26‧‧‧溢流堰26‧‧‧Overflow
28,30‧‧‧形成表面部分28, 30‧‧‧ forming the surface part
32‧‧‧根部32‧‧‧ Root
34‧‧‧熔融玻璃34‧‧‧Solid glass
36‧‧‧輸送管道36‧‧‧Transportation pipeline
38‧‧‧壩38‧‧‧ dam
40‧‧‧自由表面40‧‧‧Free surface
42‧‧‧初始表面玻璃/玻璃帶狀物42‧‧‧Initial surface glass/glass ribbon
44‧‧‧拖拉滾輪44‧‧‧Drag roller
48‧‧‧切割線48‧‧‧ cutting line
50‧‧‧面板50‧‧‧ panel
54‧‧‧有機材料層/有機層54‧‧‧Organic material layer/organic layer
56‧‧‧第一玻璃片/基板/背板56‧‧‧First glass/substrate/backplane
58‧‧‧第二玻璃片/蓋板58‧‧‧Second glass piece/cover
60‧‧‧密封材料/玻璃料60‧‧‧Sealing material/glass frit
64‧‧‧雷射64‧‧‧Laser
66‧‧‧雷射束66‧‧‧Ray beam
68‧‧‧量測片狀物之裝置68‧‧‧Measurement device
70‧‧‧玻璃片70‧‧‧Stainless glass
72‧‧‧容器72‧‧‧ Container
74‧‧‧流體74‧‧‧ fluid
76‧‧‧感測器76‧‧‧Sensor
78‧‧‧感測器面/頂部面/第一面78‧‧‧Sensor/top/first side
80‧‧‧非感測器面/底部面/第二面80‧‧‧Non-sensing surface/bottom surface/second surface
82‧‧‧流體表面82‧‧‧ fluid surface
100‧‧‧BoN測量儀100‧‧‧BoN measuring instrument
110‧‧‧針銷110‧‧‧ Pin
112‧‧‧負載元件112‧‧‧Load components
114‧‧‧高度調整器114‧‧‧ Height adjuster
116‧‧‧電路116‧‧‧ Circuitry
120‧‧‧測量儀基座120‧‧‧Measurer base
130‧‧‧處理器130‧‧‧Processor
132‧‧‧測量訊號132‧‧‧Measurement signal
134‧‧‧調整訊號134‧‧‧Adjust the signal
140‧‧‧測量主體/玻璃基板140‧‧‧Measuring body/glass substrate
200,206‧‧‧材料片200,206‧‧‧Materials
202‧‧‧脊部202‧‧‧ ridge
204‧‧‧參考平面204‧‧‧ reference plane
206‧‧‧第二片材料片206‧‧‧Second piece of material
208‧‧‧凹面208‧‧‧ concave
210,212,214‧‧‧區域210,212,214‧‧‧Area
圖1為透視圖,其顯示出形成薄玻璃片融合向下抽拉裝置之部份斷面。Figure 1 is a perspective view showing a partial section of a thin glass sheet fused downward drawing device.
圖2為玻璃組件之斷側視面圖,其包含利用雷射密封之玻璃料密封。2 is a broken side elevational view of a glass assembly including a frit seal using a laser seal.
圖3為在中等密度無重力環境中量測片狀物或材料(例如為玻璃片)形狀之裝置的斷側視面圖。3 is a side elevational view of a device for measuring the shape of a sheet or material, such as a glass sheet, in a medium density, non-gravity environment.
圖4為使用"釘床"量測無重力片狀物或材料(例如為玻璃片)形狀之裝置的斷側視面圖。4 is a side elevational view of a device for measuring the shape of a gravity-free sheet or material, such as a glass sheet, using a "nail bed."
圖5為材料片狀物之透視圖,其包含縱向***物位於平坦參考表面上,具有***物之材料片狀物代表可展開之表面。Figure 5 is a perspective view of a sheet of material comprising a longitudinal ridge on a flat reference surface and a sheet of material having a ridge representing a deployable surface.
圖6為材料片狀物之透視圖,其包含中央尖峰或泡狀物位於平坦參考表面上,具有尖峰之材料片狀物代表不可展開之表面。Figure 6 is a perspective view of a sheet of material comprising a central peak or bubble on a flat reference surface, the sheet of material having a peak representing an unexpandable surface.
圖7A及7B為可展開圓柱形表面(圖7A)之透視圖,該表面能夠為未滾壓為平坦(平面性)表面如圖7B透視圖所示。Figures 7A and 7B are perspective views of an expandable cylindrical surface (Figure 7A) that can be unrolled into a flat (planar) surface as shown in a perspective view of Figure 7B.
圖8A為未展開球形之透視圖。Figure 8A is a perspective view of an unexpanded sphere.
圖8B為撕開之透視圖,其將圖8A球形一半(半球形)平坦化必定發生,形成未展開半球形。Figure 8B is a perspective view of a tear that would necessarily occur in the planar half (hemispherical) of Figure 8A, forming an undeployed hemisphere.
圖9為可展開及不可展開材料片狀物(例如玻璃片)平坦化力量之曲線圖。Figure 9 is a graph of the flattening force of a sheet of expandable and non-expandable material, such as a glass sheet.
圖10為顯示材料片狀物高斯曲率移動視窗之透視圖,其具有寬廣扭曲但是為低程度扭曲。Figure 10 is a perspective view showing a Gaussian curvature moving window of a sheet of material having a wide twist but a low degree of distortion.
圖11為包含Z-軸非平坦材料片狀物之三維曲線圖。Figure 11 is a three-dimensional graph of a sheet comprising a Z-axis of non-planar material.
圖12為圖9表面之高斯曲率三維曲線圖。Figure 12 is a three-dimensional graph of the Gaussian curvature of the surface of Figure 9.
圖13為曲線圖,其顯示出對稱泡狀物高度與側向尺寸關係,泡狀物具有最大高斯曲率值為1x10-8 /mm2 。Figure 13 is a graph showing the relationship between the height of the symmetrical bubble and the lateral dimension, the bubble having a maximum Gaussian curvature value of 1 x 10 -8 /mm 2 .
68‧‧‧量測片狀物之裝置68‧‧‧Measurement device
70‧‧‧玻璃片70‧‧‧Stainless glass
72‧‧‧容器72‧‧‧ Container
74‧‧‧流體74‧‧‧ fluid
76‧‧‧感測器76‧‧‧Sensor
78‧‧‧感測器面(頂部面)78‧‧‧Sensor surface (top surface)
80‧‧‧非感測器面(底部面)80‧‧‧ Non-sensing surface (bottom side)
82‧‧‧流體表面82‧‧‧ fluid surface
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US8973402B2 (en) * | 2010-10-29 | 2015-03-10 | Corning Incorporated | Overflow down-draw with improved glass melt velocity and thickness distribution |
KR102035859B1 (en) * | 2014-05-28 | 2019-10-25 | 주식회사 펨토바이오메드 | Process for Measuring Viscosity |
KR102499831B1 (en) | 2016-05-23 | 2023-02-14 | 코닝 인코포레이티드 | Method of predicting gravity-free shape of glass sheet and method of managing quality of a glass sheet based on gravity-free shape |
CN113468782B (en) * | 2021-06-21 | 2023-04-07 | 上汽大众汽车有限公司 | Finite element modeling method for laminated glass for vehicle collision assessment |
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JP4773713B2 (en) | 2004-11-17 | 2011-09-14 | 三菱重工業株式会社 | Shape determination method of mold model |
US7225665B2 (en) * | 2005-07-27 | 2007-06-05 | Corning Incorporated | Process and apparatus for measuring the shape of an article |
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US5573446A (en) * | 1995-02-16 | 1996-11-12 | Eastman Kodak Company | Abrasive air spray shaping of optical surfaces |
EP0977009A1 (en) * | 1997-04-25 | 2000-02-02 | Riken | Method of discriminating shape errors of free-form curved surface |
EP1030162A1 (en) * | 1998-08-19 | 2000-08-23 | Riken | Method for evaluating error in shape of free curved surface |
JP2004145674A (en) * | 2002-10-25 | 2004-05-20 | Nippon Sheet Glass Co Ltd | Method for designing mold surface of press bending form block |
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