TWI388795B - Geometric error detection device - Google Patents
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本發明係關於一種幾何誤差檢測裝置，特別是指一種採用光學非接觸式檢測，以達成得到機具誤差與機具架設之高精確度的誤差檢測裝置。The invention relates to a geometric error detecting device, in particular to an error detecting device which adopts optical non-contact detecting to obtain high precision of machine tool error and machine erection.
機具幾何誤差檢測大多採用雷射干涉儀為主要之檢測儀器，也因此雷射干涉儀被公認為最精密的檢測儀器之一；此外，雷射干涉儀兼具大檢測範圍與奈米等級解析度等特點，因而被廣泛的應用在各種精密機具的檢測，包括電腦數值工具機(CNC)、三次元量床(CMM)、高精度磨床、半導體設備等高精度機具。Laser geometry error detection mostly uses laser interferometer as the main detection instrument, so the laser interferometer is recognized as one of the most sophisticated detection instruments; in addition, the laser interferometer has a large detection range and nanometer resolution And so on, it is widely used in the detection of a variety of precision machinery, including computer numerical tools (CNC), three-dimensional measuring bed (CMM), high-precision grinding machines, semiconductor equipment and other high-precision equipment.
但是，雷射干涉儀仍無法大量的被應用於一般的加工廠，主要是其價格過高，一套雷射干涉儀基本模組(即僅有位置誤差檢測功能)之售價皆在新台幣六十萬，一般加工廠無法負擔，此外，尚有角度誤差檢測模組、直度誤差檢測模組、垂直度誤差檢測模組、誤差檢測模組等，一套檢測儀器成本超過新台幣一百五十萬元；此外，每個模組僅能檢測單一誤差，且其架設方式皆不同，也直接影響業者的使用意願。However, the laser interferometer is still not widely used in general processing plants, mainly because its price is too high. The price of a basic module of a laser interferometer (that is, only the position error detection function) is in NTD. 600,000, the general processing factory can not afford, in addition, there are angle error detection module, straightness error detection module, verticality error detection module, error detection module, etc., a set of testing equipment costs more than NT$100 In addition, each module can only detect a single error, and its erection method is different, which also directly affects the willingness of the operators.
雷射干涉儀由於一次安裝，只能測量一種誤差要素，並且在每項測量前的安裝和雷射道路調整是費時的。因此，一些開發方法與測量系統已經能在工作同時測量多個幾何學誤差以加快量測速率。此外利用大反射鏡的觀念已被提出，使得位移路徑不受單一直線所限制，但是在架設時，大反射鏡必須與雷射光線垂直，此外，架構本身有其他的限制尚未克服。The laser interferometer can only measure one error factor in one installation, and the installation and laser road adjustments before each measurement are time consuming. Therefore, some development methods and measurement systems have been able to measure multiple geometric errors simultaneously while working to speed up the measurement rate. In addition, the concept of using large mirrors has been proposed such that the displacement path is not limited by a single line, but when erected, the large mirror must be perpendicular to the laser beam. In addition, other limitations of the architecture itself have not been overcome.
因此，本發明為開發一套簡易式機具幾何誤差檢測系統，應用光電感測器與準直光源的結合，建構一套可檢測直度、垂直度、角度等誤差之系統，以大幅降低成本。Therefore, the present invention develops a simple geometrical error detection system for a machine tool, and combines a photo-electrical sensor with a collimated light source to construct a system that can detect errors such as straightness, verticality, and angle, thereby greatly reducing the cost.
本發明並依使用者之需求，分別建構直度誤差檢測模組、垂直度誤差檢測模組、角度誤差檢測模組等，以簡化檢測程序與步驟，方便使用者進行機具檢測。According to the user's needs, the straightness error detection module, the verticality error detection module and the angle error detection module are respectively constructed to simplify the detection procedure and the steps, and the user is convenient to perform the tool detection.
本發明之目的即在於提供一種幾何誤差檢測裝置，以達成高精確度要求之簡易式機具檢測系統之裝置。SUMMARY OF THE INVENTION It is an object of the present invention to provide a device for detecting a geometrical error detecting device to achieve a high precision requirement for a simple implement detecting system.
本發明之次一目的係在於提供一種光學式儀器具有高解析度，而且並不會受到磁場的干擾造成量測的誤差的檢測機具誤差之裝置。A second object of the present invention is to provide an apparatus for detecting an instrument error in which an optical instrument has high resolution and is not subject to measurement errors due to disturbance of a magnetic field.
本發明之另一目的係在於提供一種可以利用於各種工作場合上，並具有低成本、高精確度、體積小、攜帶方便、架設簡易及檢測迅速等特性的檢測機具誤差之裝置。Another object of the present invention is to provide a device that can be utilized in various workplaces and has the advantages of low cost, high precision, small size, convenient carrying, simple erection, and rapid detection.
可達成上述發明目的之幾何誤差檢測裝置，包括有：檢測模組，係由發射裝置產生至少一光束輸出；至少一光電感測器，用以接收光束；其中，該光束輸出方向與檢測方向相互平行，若檢測後無誤差產生，則檢測光點位置與起始光點位置相同；反之，若檢測後有誤差產生，則檢測光點位置會隨著誤差的變化改變。The geometric error detecting device capable of achieving the above object includes: a detecting module, wherein at least one beam output is generated by the transmitting device; and at least one photoinductor for receiving the light beam; wherein the beam output direction and the detecting direction are mutually Parallel, if no error occurs after the detection, the position of the detection spot is the same as the position of the starting spot; conversely, if an error occurs after the detection, the position of the detected spot changes with the change of the error.
該檢測模組用於直度檢測，係由單個光電感測器所構成，用於接收檢測模組發射之準直光束，以檢測單一軸向之兩個直度誤差；該檢測模組用於角度檢測，係由一光電式感測器與一個透鏡所構成，用於接收檢測模組發射之準直光束，以檢測單一軸向之兩個角度誤差；該檢測模組用於平行度及橫轉角度檢測，係由二光電感測器所構成，用於接收檢測模組發射之準直光束，以檢測單一軸向橫轉角度與平行度。The detection module is used for straightness detection and is composed of a single optical inductance detector for receiving a collimated beam emitted by the detection module to detect two straightness errors of a single axis; the detection module is used for The angle detection is composed of a photoelectric sensor and a lens for receiving the collimated beam emitted by the detection module to detect two angle errors of a single axis; the detection module is used for parallelism and horizontal The rotation angle detection is composed of a two-optical sensor for receiving the collimated beam emitted by the detection module to detect a single axial transverse angle and parallelism.
請參閱圖一，本發明所提供之幾何誤差檢測裝置，主要包括有：一檢測模組1，係由發射裝置產生至少一光束輸出；至少一光電感測器2，用以接收光束；其中，該光束輸出方向與檢測方向相互平行，若檢測後無誤差產生，則檢測光點位置與起始光點位置相同；反之，若檢測後有誤差產生，則檢測光點位置會隨著誤差的變化改變。Referring to FIG. 1 , the geometric error detecting device provided by the present invention mainly includes: a detecting module 1 that generates at least one beam output by the transmitting device; and at least one photo-inductor 2 for receiving the light beam; The output direction of the beam is parallel to the detection direction. If no error occurs after the detection, the position of the detection spot is the same as the position of the starting spot; otherwise, if an error occurs after the detection, the position of the detected spot will change with the error. change.
前述發射裝置為一雷射光源、或一準直光源、或一光源11經介質透鏡分解成二或三光束；其中，該介質透鏡為分光鏡12、聚焦透鏡、準直透鏡。The transmitting device is a laser light source, or a collimated light source, or a light source 11 is decomposed into two or three light beams by a dielectric lens; wherein the dielectric lens is a beam splitter 12, a focusing lens, and a collimating lens.
如圖一所示，當機台進行單一軸向(X軸)運動時，分別對另外兩個軸向(Y軸與Z軸)產生平移現象，此稱為直度誤差；本發明為利用二維光電感測器2，配合檢測模組1內的準直光源11，建構一直度誤差檢測模組1，以簡化直度檢測之程序；本發明的發射裝置為將一準直光源11輸出一光束，如圖二所示，該光束入射於移動端上的光電感測器2，且該光束輸出方向與光電感測器2的檢測方向相互平行，經由起始光點位置與檢測光點位置是否相同，以檢測移動端的直度誤差。利用二維光電感測器2之特性，在單一次檢測程序中，即可獲得二個軸向(Y軸與Z軸)的直度誤差，大幅減少檢測時間。該移動端為移動主軸或是移動床台As shown in Fig. 1, when the machine performs a single axial (X-axis) motion, a translational phenomenon is generated for the other two axial directions (Y-axis and Z-axis), which is called a straightness error; The photovoltaic detector 2 cooperates with the collimated light source 11 in the detection module 1 to construct the continuity error detection module 1 to simplify the procedure of the straightness detection; the emission device of the present invention outputs a collimated light source 11 The light beam, as shown in FIG. 2, is incident on the photodetector 2 on the moving end, and the beam output direction is parallel to the detection direction of the photodetector 2, via the starting spot position and the detecting spot position. Is it the same to detect the straightness error of the mobile end. By utilizing the characteristics of the two-dimensional photo-electrical sensor 2, the straightness error of the two axial directions (Y-axis and Z-axis) can be obtained in a single detection procedure, which greatly reduces the detection time. The mobile terminal is a moving spindle or a moving bed
該直度誤差檢測之架設方式有二，分別為：該檢測模組1架設於待測機台之固定端，該二維光電感測器2架設於待測機台之移動端；準直光源11之方向與機台移動方向平行；該檢測模組1架設於待測機台之移動端，該二維光電感測器2架設於待測機台之固定端。The straightness error detection is set up in two ways: the detection module 1 is mounted on the fixed end of the machine to be tested, and the two-dimensional optical sensor 2 is mounted on the moving end of the machine to be tested; the collimated light source The direction of the 11 is parallel to the moving direction of the machine; the detecting module 1 is mounted on the moving end of the machine to be tested, and the two-dimensional optical sensor 2 is mounted on the fixed end of the machine to be tested.
在檢測時，準直光源11之方向與機台移動方向相互平行。在檢測時，若無直度誤差產生，則檢測光點位置與起始光點位置點相同；反之，則檢測光點位置會隨著誤差的變化，改變，如圖三所示。最後再經由公式之計算，即可獲得待測機台之兩個軸向直度誤差。At the time of detection, the direction of the collimated light source 11 and the moving direction of the machine are parallel to each other. In the detection, if no straightness error occurs, the position of the detection spot is the same as the position of the starting spot; otherwise, the position of the detected spot changes with the error, as shown in Figure 3. Finally, through the calculation of the formula, the two axial straightness errors of the machine under test can be obtained.
機具在組裝時，由於各個因素的影響，導致三個線性軸(X、Y與Z軸)無法完全垂直地被組裝。如圖四與圖五所示，本發明為利用二維光電感測器2，配合檢測模組1內的準直光源11與分光鏡12，建構一垂直度誤差檢測模組1，其中該發射裝置為將準直光源11入射一分光鏡12，使之產生互為垂直之穿透光與反射光，利用此兩道光束入射於移動端上互為垂直的二光電感測器2，經由起始光點位置與檢測光點位置是否相同，以檢測移動端的垂直度誤差。When the machine is assembled, due to various factors, the three linear axes (X, Y and Z axes) cannot be assembled completely vertically. As shown in FIG. 4 and FIG. 5 , the present invention constructs a verticality error detecting module 1 by using a two-dimensional optical sensor 2 and a collimated light source 11 and a beam splitter 12 in the detecting module 1 , wherein the transmitting is performed. The device is configured to inject the collimated light source 11 into a beam splitter 12 to generate perpendicular and transparent light and reflected light, and the two light beams are incident on the moving end of the two-photon sensor 2, which are perpendicular to each other. Whether the position of the starting point is the same as the position of the detecting spot to detect the perpendicularity error of the moving end.
如圖六所示，該發射裝置能為二垂直設置的雷射光源11或準直光源11，二雷射光源11或二準直光源11亦能產生互為垂直的二光束。As shown in FIG. 6, the transmitting device can be two vertically disposed laser light sources 11 or collimated light sources 11, and the two laser light sources 11 or the two collimated light sources 11 can also generate two light beams that are perpendicular to each other.
如圖七所示，亦可利用準直光源11入射一分光鏡12的光路設計，將準直光源11分為二道互為垂直之光束。As shown in FIG. 7, the collimated light source 11 can also be used to enter the optical path design of a beam splitter 12, and the collimated light source 11 can be divided into two mutually perpendicular beams.
如圖八所示，亦可利用準直光源11入射二分光鏡12的光路設計，將準直光源11分為三道互為垂直之光束，即可檢測機具三軸之垂直度。As shown in FIG. 8, the collimated light source 11 can also be used to enter the optical path design of the dichroic mirror 12, and the collimated light source 11 can be divided into three mutually perpendicular beams to detect the perpendicularity of the three axes of the implement.
如圖九所示，該發射裝置能為三垂直設置的準直光源11，三準直光源11亦能產生互為垂直的三光束，以檢測機具三軸之垂直度。As shown in FIG. 9, the launching device can be a three-collimated collimated light source 11, and the three collimated light sources 11 can also generate three beams perpendicular to each other to detect the perpendicularity of the three axes of the implement.
該移動端為移動主軸或是移動床台，其垂直度檢測程序為如下：The moving end is a moving spindle or a moving bed, and the verticality detecting procedure is as follows:
1.將檢測模組1架設於機具之主軸上；1. The detection module 1 is mounted on the main shaft of the machine;
2.架設光電感測器2於對應光束之機台上；2. erecting the photo-electrical sensor 2 on the machine corresponding to the beam;
3.光束入射光電感測器2；3. Beam incident photoinductor 2;
4.將光電感測器2測得之數據導入計算後，即可獲得對應軸的垂直度誤差。4. After the data measured by the photo-electrical sensor 2 is imported into the calculation, the perpendicularity error of the corresponding axis can be obtained.
機具之角度誤差包括俯仰角度(Pitch)、搖擺角度(Yaw)與橫轉角度(Roll)等。本發明依檢測角度不同，可分為二個部分，第一部分為俯仰角度與搖擺角度的檢測，而第二部分為橫轉角度的檢測。The angular error of the implement includes pitch angle (Pitch), swing angle (Yaw), and roll angle (Roll). The invention can be divided into two parts according to different detection angles, the first part is the detection of the pitch angle and the swing angle, and the second part is the detection of the transverse angle.
如圖十所示，該檢測模組1內的發射裝置為準直光源11所輸出一光束，且其中該光電感測器2進而於輸入端前增設一聚焦透鏡21，使該光束入射於移動端上的聚焦透鏡21與光電感測器2後，該光束輸出方向與光電感測器2的檢測方向相互平行，並應用視準儀原理消除發射裝置與光電感測器2距離變化之影響，經由起始光點位置與檢測光點位置是否相同，以檢測移動端的俯仰角度與搖擺角度誤差。其架設與檢測程序為：As shown in FIG. 10, the transmitting device in the detecting module 1 outputs a light beam from the collimated light source 11, and the photo-electrical sensor 2 further adds a focusing lens 21 in front of the input end to make the light beam incident on the moving After the focusing lens 21 and the photo-sensing device 2 on the end, the beam output direction is parallel to the detecting direction of the photo-sensing device 2, and the influence of the distance between the transmitting device and the photo-inductor 2 is eliminated by applying the collimator principle. Whether the pitch angle and the swing angle error of the moving end are detected via the starting spot position and the detecting spot position are the same. Its erection and testing procedures are:
1.將檢測模組1架設於機具固定端，並調整光束方向為待測機具之檢測軸方向(即移動軸之方向)；1. The detection module 1 is erected on the fixed end of the implement, and the direction of the beam is adjusted to the direction of the detection axis of the tool to be tested (ie, the direction of the moving axis);
2.將光電感測器2固定於相對檢測模組1之光束之機具移動端；2. Fixing the photo-electrical sensor 2 to the moving end of the implement of the light beam of the detecting module 1;
3.移動機具進行檢測。3. Mobile equipment for testing.
如圖十一與圖十二所示，該檢測模組1內的發射裝置為將準直光源11入射複數分光鏡12，以產生兩道光束入射於移動端上互為平行的二光電感測器2，當橫轉角度誤差產生時，檢測模組1會沿著光電感測器2移動方向旋轉，藉由起始光點位置與檢測光點位置是否相同以檢測移動端的橫轉角度誤差。圖十四為準直光源11入射複數分光鏡12，以產生兩道相互垂直光束之示意圖，以提供同時量測二個線性軸(X軸與Y軸、Y軸與Z軸、Z軸與X軸)。As shown in FIG. 11 and FIG. 12, the detecting device in the detecting module 1 is configured to inject the collimated light source 11 into the plurality of beam splitters 12 to generate two light beams which are incident on the moving end and are parallel to each other. 2. When the traverse angle error is generated, the detecting module 1 rotates along the moving direction of the photodetector 2, and detects whether the traverse angle error of the moving end is the same by the position of the starting spot and the position of the detecting spot. Figure 14 is a schematic diagram of the collimated light source 11 incident on the plurality of beamsplitters 12 to produce two mutually perpendicular beams to provide simultaneous measurement of two linear axes (X-axis and Y-axis, Y-axis and Z-axis, Z-axis and X). axis).
如圖十一與圖十三所示，該檢測模組1內的發射裝置為將二準直光源11產生兩道光束入射於移動端上互為平行的二光電感測器2，當橫轉角度誤差產生時，檢測模組1會沿著光電感測器2移動方向旋轉，藉由起始光點位置與檢測光點位置是否相同以檢測移動端的橫轉角度誤差。As shown in FIG. 11 and FIG. 13 , the detecting device in the detecting module 1 is configured to generate two beams of light generated by the two collimating light sources 11 and are incident on the moving end, and the two photo-electrical sensors 2 are parallel to each other. When the angle error is generated, the detecting module 1 rotates along the moving direction of the photodetector 2, and the running angle position and the detecting spot position are the same to detect the transverse angle error of the moving end.
當橫轉角度誤差產生時，機具會沿著移動軸旋轉，因此，藉由二組光電感測器2，即可檢測出橫轉角度誤差。其架設與檢測程序為：When the traverse angle error is generated, the implement rotates along the moving axis. Therefore, the traverse angle error can be detected by the two sets of photodetectors 2. Its erection and testing procedures are:
1.將檢測模組1架設於機具固定端，並調整光束方向為待測機具之檢測軸方向(即移動軸之方向)；1. The detection module 1 is erected on the fixed end of the implement, and the direction of the beam is adjusted to the direction of the detection axis of the tool to be tested (ie, the direction of the moving axis);
2.將二光電感測器2固定於相對檢測模組1之光束之機具移動端；2. Fixing the two-optical sensor 2 to the moving end of the implement of the light beam of the detecting module 1;
3.移動機具進行檢測。3. Mobile equipment for testing.
在檢測時，準直光源11之方向與機台移動方向相互平行。在檢測時，若無角度誤差產生，則檢測光點位置與起始光點位置點相同；反之，則檢測光點位置會隨著誤差的變化，改變，如圖三所示。最後再經由公式之計算，即可獲得待測機台之角度誤差。At the time of detection, the direction of the collimated light source 11 and the moving direction of the machine are parallel to each other. In the detection, if there is no angle error, the position of the detection spot is the same as the position of the starting spot; otherwise, the position of the detected spot changes with the error, as shown in Figure 3. Finally, through the calculation of the formula, the angular error of the machine to be tested can be obtained.
綜上所述，本案不但在空間型態上確屬創新，並能較習用物品增進上述多項功效，應已充分符合新穎性及進步性之法定發明專利要件，爰依法提出申請，懇請 貴局核准本件發明專利申請案，以勵發明，至感德便。In summary, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple functions compared with the customary items. It should fully meet the statutory invention patent requirements of novelty and progressiveness, and apply for it according to law. This invention patent application, in order to invent invention, to the sense of virtue.
1．．．檢測模組1. . . Detection module
11．．．光源11. . . light source
12．．．分光鏡12. . . Beam splitter
2．．．光電感測器2. . . Photoelectric detector
21．．．聚焦透鏡twenty one. . . Focusing lens
圖一為發射裝置以一光束入射光電感測器檢測直度誤差的立體示意圖；Figure 1 is a perspective view of the launching device detecting a straightness error by a light incident optical detector;
圖二為發射裝置以雷射光源或準直光源射出一光束之視圖；2 is a view of a launching device emitting a light beam by a laser light source or a collimated light source;
圖三為該光電感測器上檢測光點位置會隨著誤差變化的示意圖；Figure 3 is a schematic diagram showing the position of the detected spot on the photo-electrical sensor as a function of error;
圖四與圖五為發射裝置產生互為垂直的光束於二光電感測器檢測垂直度誤差的立體示意圖；FIG. 4 and FIG. 5 are schematic perspective views showing that the transmitting device generates mutually perpendicular beams to detect the verticality error of the two photo-electric detectors;
圖六為發射裝置以二垂直設置的雷射光源或準直光源射出二光束之示意圖；Figure 6 is a schematic diagram of the launching device emitting two beams by two vertically disposed laser light sources or collimated light sources;
圖七為發射裝置以雷射光源或準直光源入射一介質透鏡，並分為二道互為垂直光束之示意圖；Figure 7 is a schematic diagram of a transmitting device that is incident on a dielectric lens by a laser source or a collimated light source, and is divided into two vertical beams;
圖八為該發射裝置以雷射光源或準直光源入射複數介質透鏡，並分為三道互為垂直光束之示意圖；FIG. 8 is a schematic diagram of the transmitting device entering a plurality of dielectric lenses by a laser light source or a collimated light source, and dividing into three vertical beams;
圖九為發射裝置以三垂直設置的雷射光源或準直光源，產生互為垂直的三道光束之示意圖；Figure 9 is a schematic diagram showing three vertical beams of laser beams or collimated light sources arranged vertically by the launching device;
圖十為發射裝置輸出一光束並入射聚焦透鏡與光電感測器以檢測俯仰角度與搖擺角度誤差的立體示意圖；Figure 10 is a perspective view of the transmitting device outputting a light beam and entering the focusing lens and the photoinductor to detect the pitch angle and the swing angle error;
圖十一為發射裝置輸出二光束並入射二光電感測器以檢測橫轉角度誤差的立體示意圖；Figure 11 is a perspective view of the transmitting device outputting two beams and incident on the two-photon sensor to detect the transverse angle error;
圖十二為該發射裝置以雷射光源或準直光源入射複數介質透鏡，以提供二道互為平行光束之示意圖；Figure 12 is a schematic diagram of the transmitting device injecting a plurality of dielectric lenses with a laser light source or a collimated light source to provide two mutually parallel beams;
圖十三為發射裝置以二平行設置的雷射光源或準直光源射出二光束之示意圖；Figure 13 is a schematic view showing the launching device emitting two beams by two parallel laser light sources or collimated light sources;
圖十四為該發射裝置以雷射光源或準直光源入射複數介質透鏡，以提供相互垂直二道光束之示意圖。Figure 14 is a schematic diagram of the transmitting device injecting a plurality of dielectric lenses with a laser source or a collimated source to provide two mutually perpendicular beams.
1．．．檢測模組1. . . Detection module
2．．．光電感測器2. . . Photoelectric detector
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