CN107228638B - The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously - Google Patents
The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously Download PDFInfo
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- CN107228638B CN107228638B CN201710423368.2A CN201710423368A CN107228638B CN 107228638 B CN107228638 B CN 107228638B CN 201710423368 A CN201710423368 A CN 201710423368A CN 107228638 B CN107228638 B CN 107228638B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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Abstract
The invention proposes a kind of method and apparatus that the five degree of freedom error based on beam drift compensation measures simultaneously, and the high-precision while measurement method measurement accuracy to solve existing guide rail five degree of freedom are low, measurement range is small, poor anti jamming capability problem；Collimation lens, prism assemblies, polarization splitting prism, quarter-wave plate are set between laser and the right-angle prism for being coated with beam splitting coating, realize the processing to incident light and reflected light, by the information of reflected light and transmitted light after 4 quadrant detector and Position-Sensitive Detector reception and measurement beam splitting, the measurement of pitch angle, deflection angle and rolling angle error, horizontal direction straightness error, vertical direction straightness error and light drift compensation is realized.The present invention utilizes dual-beam variate, realizes error separate, enhances anti-interference ability, few using optical device, light source power is low, low in cost；Optical texture is simple, easy to operate, and movable part can be convenient for in-site measurement without cable；Angle resolution is higher.
Description
Technical field
The present invention relates to the technical fields of Photoelectric Detection, and in particular to a kind of five degree of freedom mistake based on beam drift compensation
The method and apparatus of difference measurement simultaneously, may be implemented the measurement for being particularly difficult to the rolling angle error of measurement.
Background technique
Mechanical guide kinematic pair all includes three linearity errors: directly along axial location error and perpendicular to axial two
Dimension error and the angular error of three pivotings: pitch angle, deflection angle and roll angle.If instrument and lathe are at this
There is Abbe arm on a little corresponding directions of geometric moving error, these geometric moving errors will result in Abbe error and influence them
Processing or measurement accuracy.Abbe arm mainly is reduced from structure, is mentioned by not Lay grace suggestion currently, reducing or eliminating Abbe error
High guide rail kinematic accuracy and error correction, and the influence of Abbe error is reduced or eliminated by Ai Pengsitan principle from structure.
Due to the limitation of mechanical structure and geometric dimension, almost all of three coordinate measuring machine and lathe have Abbe arm.Therefore, accurately
Measurement these geometric moving errors the accuracy assessment and error correction of instrument and lathe are very important.Using right angle
The lathe or three coordinate measuring machine of coordinate system share 21 geometric error parameters, wherein 18 errors can use ready-made interference
Instrument measurement, 3 rolling angle errors including being most difficult to measurement.
There are following several optical means for the high-acruracy survey of guide rail five degree of freedom:
1. the mensuration based on diffractive technology, five degree of freedom simultaneous measurement method based on hololens [JBergin M T,
Bartolotta C S.Multi-axis optical alignment system including A spatial
Filter, U.S. Patent number: 3701602.1972], this method is simple, element is few, at low cost, but the measurement pair of its roll angle
The stability requirement of light beam is very high, and measurement accuracy is not high.Five degree of freedom based on plane diffraction grating while measurement method
[Miller J M, Barton R O.Multi-axis alignment apparatus, U.S. Patent number:
4804270.1989] low measurement accuracy moves fixed cell connecting cable, limits the convenience of measurement.What Kim was proposed
Six degree of freedom based on diffraction grating while measurement method [Kim J A, Kim K C, Bae E W, et al.Six-degree-
of-freedom displacement measurement system using a diffraction grating[J]
.Review of Scientific Instruments, 2000] low measurement accuracy, and the diverging of diffraction light leads to system
Measurement range only has several millimeters, is not suitable for in-site measurement.
2. the measurement method based on laser interference and collimation, Bruce L. et al. propose a kind of five based on 2 directional lights from
By degree while measuring system [Thomas B L, Bass H M, Loftus L K, et al.Laser aligned five-axis
Position measurement device, U.S. Patent number: US5798828.1998.], this method system structure is simply, only
It adjusts the distance between detector i.e. and can reach different Measurement Resolutions.But the collimation of two-beam line and hot spot consistency are very
Hardly possible adjustment will cause measurement error, and mobile fixed cell tape cable, it has not been convenient to which the dynamic of High Speed NC Machine Tools measures.Lau is mentioned
A kind of measuring system [Lau K C, the Liu Y Q.Five-axis/six-axis simultaneously of five degree of freedom or six degree of freedom out
Laser measuring system:EP, U.S. Patent number: US6049377 [P] .2000], it is mesh that the measuring precision is high
Unique commercial multiple degrees of freedom while measuring system on former world, but system mobile unit tape cable connects, discomfort is on site
High speed and long range measurements, while the rolling angle measurement of the system also needs electrolevel, cannot apply in vertical axes
The measurement of roll angle, and involve great expense.Method [Liu C H, the Jywe W that a kind of six degree of freedom that Liu is proposed measures simultaneously
Y,Hsu C C,et al.Development of a laser-based high-precision six-degrees-of-
freedom motion errors measuring system for linear stage[J].Review of
Scientific Instruments, 2005] and a kind of five degree of freedom for proposing of Kuang C et al. measurement method [Kuang simultaneously
C,Hong E,Ni J.A high-precision five-degree-of-freedom measurement system
based on laser collimator and interferometry techniques[J].Review of
Scientific Instruments, 2007] and a kind of method that measures simultaneously of five degree of freedom for proposing of Huang P et al.
[Huang P,Li Y,Wei H,et al.Five-degrees-of-freedom measurement system based on
a monolithic prism and phase-sensitive detection technique.[J].Applied
Optics, 2013], the measurement method that these methods are also based on laser interference and laser alignment combines have measurement accuracy compared with
Height, integrated level is higher, and measurement range is big, but measuring system volume is big, the persistent fever of light source can cause laser drift and
The problems such as anti-interference ability is poor.
3. Liu C H et al. proposes a kind of five degree of freedom while the side of measurement based on the measurement method of laser grating interference
Method [Liu C H, Huang H L, Lee H W.Five-degrees-of-freedom diffractive laser
Encoder. [J] .Applied Optics, 2009] and a kind of simple six degree of freedom for proposing of Lee measurement method [Lee simultaneously
C B,Kim G H,Lee S K.Design and construction of a single unit multi-function
optical encoder for a six-degree-of-freedom motion error measurement in an
Ultraprecision linear stage [J] .Measurement Science&Technology, 2011], the above method
It is based on laser grating interference technique, measuring principle and system structure are simpler, but the size of accurate diffraction grating is limited, because
This measurement range is smaller.
Summary of the invention
For existing guide rail five degree of freedom high-precision measuring method measurement accuracy is low, measurement range is small, anti-interference ability
The problems such as poor, the present invention propose a kind of five degree of freedom error compensated based on beam drift while the method and apparatus measured, light
Learn it is simple and compact for structure, be convenient for practical operation, precision, stability and economy are preferable.
In order to solve the above-mentioned technical problem, the technical scheme is that a kind of five based on beam drift compensation is free
The method that error measures simultaneously is spent, its step are as follows:
Step 1: laser issues laser, is emitted after collimation lens collimates；Light beam after collimation lens collimates
After Amici prism is emitted, light beam is incident on by isolator, polarization splitting prism, quarter-wave plate positioned at test platform
On the right-angle prism for being coated with beam splitting coating inclined edge surfaces on；
Step 2: the reflected beams for being coated with the right-angle prism of beam splitting coating return, the light beam polarization after quarter-wave plate
Direction changes, and then again after polarization splitting prism beam splitting, the position sensing by being located at condenser lens focal plane is detected
Device receives, when pitching and beat occur for platform to be measured, focus spot position hair of the reflected beams on Position-Sensitive Detector
Changing, the photosignal of Position-Sensitive Detector output are sent into processing terminal and are obtained comprising swashing after signal processing circuit
Pitch angle and the deflection angle error measure to be measured of light light beam drift error；
Step 3: the transmitted light beam after beam splitting is carried out into the right-angle prism for being coated with beam splitting coating, through being coated with the right angle of beam splitting coating
It is projected after the right-angle side refraction of prism, reaches 4 quadrant detector after optical splitter beam splitting, when straightness error to be measured occurs,
Facula position of the transmitted light beam on 4 quadrant detector changes, and the photosignal of 4 quadrant detector output passes through signal
After processing circuit, it is sent into processing terminal and obtains the horizontal direction straightness error value to be measured comprising laser beam drift；
Step 4: it is penetrated by the reflected beams for being coated with the right-angle prism of beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
Transmitted light beam out is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light after beam splitting
Beam realizes rolling angle measurement after calculus of differences；
Step 5: it is penetrated by the reflected beams for being coated with the right-angle prism of beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
Transmitted light beam out is split through different beam splitters respectively, and light beam arrives separately at two positioned at two condenser lens focal planes
A Position-Sensitive Detector simultaneously carries out receiving area's reason, and light drift amount is obtained after calculus of differences, realizes light drift compensation；
Step 6: the right-angle prism for being coated with beam splitting coating is rotated by 90 °, and laser issues laser, is collimated by collimation lens
After be emitted, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro
Prism, quarter-wave plate are incident on the inclined edge surfaces of the right-angle prism for being coated with beam splitting coating on test platform, through being coated with
After the right-angle prism transmission of beam splitting coating, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Limit detector simultaneously receives processing, realizes the measurement of vertical direction straightness error.
The method of the measurement of the horizontal direction straightness error are as follows: when the right-angle prism for being coated with beam splitting coating is moved along guide rail is surveyed
When dynamic, the straightness error Δ x of tested guide rail will make the right-angle prism for being coated with beam splitting coating that corresponding displacement Δ x occur, by right-angled edge
Mirror characteristic is it is found that spot displacement of the collimated light beam returned through its transmission on 4 quadrant detector is 2 Δ x.
Vertical line degree is contained in the light beam returned after being coated with the right-angle prism transmission of beam splitting coating in the step 6
Information, when the right-angle prism for being coated with beam splitting coating is moved along survey guide rail, the straightness error Δ y of tested guide rail will make to be coated with beam splitting
Corresponding displacement Δ y occurs for the right-angle prism of film；By right-angle prism characteristic it is found that the right-angle prism transmission for being coated with beam splitting coating returns
Collimated light beam again through quarter-wave plate, polarization splitting prism, beam splitter, received by 4 quadrant detector, four-quadrant visit
The spot displacement for surveying the generation on device is 2 Δ y, realizes the measurement of vertical line degree.
A kind of device that the five degree of freedom error compensated based on beam drift is measured simultaneously, including fixed cell and mobile list
Member, mobile unit are fixed on test platform；The mobile unit includes the right-angle prism for being coated with beam splitting coating, is coated with beam splitting coating
Right-angle prism is fixed on along the measuring table that guide rail moves；The fixed cell includes by laser, collimation lens, prism group
Part, quarter-wave plate, isolator, beam splitter, 4 quadrant detector, Position-Sensitive Detector, focuses thoroughly polarization splitting prism
Mirror and signal processing circuit, collimation lens, prism assemblies, isolator, polarization splitting prism and quarter-wave plate are set gradually
On light between laser and the right-angle prism for being coated with beam splitting coating；The beam splitter includes beam splitter I and beam splitter II, and four
Quadrant detector includes 4 quadrant detector I and 4 quadrant detector II, and Position-Sensitive Detector includes Position-Sensitive Detector I
With Position-Sensitive Detector II, condenser lens includes condenser lens I and condenser lens II, and beam splitter I and condenser lens I are successively set
It sets on the light of the transmitted light beam for the right-angle prism for being coated with beam splitting coating, the coke of condenser lens I is arranged in Position-Sensitive Detector I
In plane, 4 quadrant detector II is arranged in the optical path of beam splitter I；Beam splitter II and the setting of 4 quadrant detector I are polarizing
In the optical path of Amici prism, condenser lens II and Position-Sensitive Detector II are arranged in the optical path of beam splitter II, position sensing
Detector II is arranged on the focal plane of condenser lens II；The Position-Sensitive Detector I, Position-Sensitive Detector II, four-quadrant
Limit detector I and 4 quadrant detector II are connected with signal processing circuit, and signal processing circuit is connected with processing terminal.
The right-angle prism for being coated with beam splitting coating is fixed on the rotating device that can be rotated by 90 °, and rotating device is fixed on survey
It measures on platform.
The prism assemblies include Amici prism and right-angle prism, and the top of Amici prism is arranged in right-angle prism.
The laser is the laser of He-Ne laser or semiconductor laser；The collimation lens be simple lens or
Lens group.
Collimation lens, prism assemblies, polarization point is arranged in the present invention between laser and the right-angle prism for being coated with beam splitting coating
Light prism, quarter-wave plate realize the processing to incident light and reflected light, are detected by 4 quadrant detector and position sensing
The information of reflected light and transmitted light after device reception and measurement beam splitting realizes pitch angle, deflection angle and rolling angle error, level side
To the measurement of straightness error, vertical direction straightness error and light drift compensation.The present invention is coated with the straight of beam splitting coating using one
Angle prism is Sensitive Apparatus, using dual-beam variate, realizes error separate, enhances anti-interference ability；Position is used
Sensing detector is set, light drift compensation is realized；90 degree of a right-angle prism fixed rotating devices have been used, vertical direction is realized
The measurement of straightness error；Few using optical device, light source power is low, low in cost；Optical texture is simple and compact, operation side
Just, movable part can be convenient for in-site measurement without cable；Angle resolution is up to 0.3 ", it is even higher.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the positive structure diagram that the right-angle prism of Fig. 1 of the present invention is rotated by 90 °.
Fig. 3 is the partial elevational enlarged diagram of Fig. 2 of the present invention.
In figure, 1 is laser, and 2 be collimation lens, and 3 be prism assemblies, and 31 Amici prisms, 32 right-angle prisms, 4 be polarization
Amici prism, 5 be quarter-wave plate, and 6 be the right-angle prism for being coated with beam splitting coating, and 7 be beam splitter I, and 8 be condenser lens I, and 9 are
Position-Sensitive Detector I, 10 be beam splitter II, and 11 be 4 quadrant detector I, and 12 be 4 quadrant detector II, and 13 is saturating to focus
Mirror II, 14 be Position-Sensitive Detector II, and 15 be isolator, and 16 be signal processing circuit, and 17 be computer, and 101 be fixed single
Member, 102 be mobile unit.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under that premise of not paying creative labor
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, a kind of method that the five degree of freedom error based on beam drift compensation measures simultaneously, step is such as
Under:
Step 1: laser issues laser, is emitted after collimation lens collimates；Light beam after collimation lens collimates
After Amici prism is emitted, light beam is incident on by isolator, polarization splitting prism, quarter-wave plate positioned at test platform
On the right-angle prism for being coated with beam splitting coating inclined edge surfaces on.
As depicted in figs. 1 and 2, the right-angle prism 6 for being coated with beam splitting coating is fixed on test platform, can be along tested straight
The movement of line guide rail, beam splitting coating is positioned only at the side being coated on the bevel edge of the right-angle prism 6 of beam splitting coating, equipped with the straight of beam splitting coating
Incident beam can be divided into two beams by the side of angle prism 6: a branch of reflected light and through Beam.The laser that laser 1 issues,
By collimation lens 2 collimation outgoing after, respectively through 31 beam splitting of Amici prism, isolator 15 selection at this time needed for through light beam, partially
The outgoing of vibration Amici prism 4, quarter-wave plate 5 are impinged perpendicularly on and are coated on the right-angle prism 6 of beam splitting coating.Into being coated with beam splitting coating
Right-angle prism 6 on incident beam can be by beam splitting, the inclined edge surfaces reflection of a branch of right-angle prism 6 for being coated with beam splitting coating directly be returned
It returns, contains pitch angle and beat angle information；It transmits, passes through after the inclined edge surfaces for the right-angle prism 6 that another beam entrance is coated with beam splitting coating
It being transmitted after crossing the right-angle side refraction for being coated with the right-angle prism 6 of beam splitting coating from its inclined edge surfaces, the light beam is parallel with incident ray,
It comprises light drift informations caused by roll angle, pitch angle, horizontal linear degree and environment.
If the direction vector for impinging perpendicularly on the incident light being coated on the right-angle prism 6 of beam splitting coating is I0=[0 0-1]T,
By Nen Method of Using Vector-matrix it is found that when measuring table rest, light after being coated with the reflection and transmission of the right-angle prism 6 of beam splitting coating
The direction vector of beam is respectively as follows:
I1=[0 0 1]T, (1),
I2=[0 0 1]T, (2)；
When measuring table occurs mobile, the right-angle prism 6 for being coated with beam splitting coating is moved, if it distinguishes around x, y, z axis
There are the rotation angle of α, β, γ, α is pitch angle, β is deflection angle, γ is roll angle, and the positive and negative of corner around reference axis defers to the right side
Hand rule.Spin matrix of the right-angle prism 6 of beam splitting coating on x, y, z axis is coated with to be respectively as follows:
In the case where α, β, γ equal very little, the influence of rotational order is negligible, omit high-order it is a small amount of after, be coated with beam splitting coating
Right-angle prism 6 spin matrix are as follows:
If the normal direction vector for being coated with each reflecting surface of the right-angle prism 6 of beam splitting coating is N=[Nx, Ny, Nz], reflection
Matrix are as follows:
After measuring table is mobile, there is NR=RN, the then the reflected beams after reflectingDirection vector are as follows:
Wherein,For the vector of the first row composition in reflection matrix M.Incident light I0It is being coated with point for n into refractive index
After the right-angle prism 6 of beam film, direction vector are as follows:
Direction vector in the right-angle prism 6 for being coated with beam splitting coating after primary event are as follows:
Direction vector in the right-angle prism 6 for being coated with beam splitting coating after two secondary reflections are as follows:
It is coated with the transmitted light beam that the right-angle prism 6 of beam splitting coating returnsDirection vector are as follows:
Step 2: the reflected beams for being coated with the right-angle prism 6 of beam splitting coating return through quarter-wave plate 5 and polarization spectro
After prism 4, the Position-Sensitive Detector II 14 by being located at 13 focal plane of condenser lens receives, it can be achieved that pitch angle and deflection angle miss
Difference measurements.
The reflected beams are reflected after quarter-wave plate 5 and polarization splitting prism 4 return by polarization splitting prism 4, enter
Beam splitter II 10, by condenser lens II 8, in-position sensing detector II 14 receives the directional light of II 10 beam splitting of beam splitter.
The reflected beams for being coated with the right-angle prism of beam splitting coating contain pitch angle, beat angle information, move when along tested guide rail
Pitching or beat, contrast equation (1) and (6) formula occur for the dynamic right-angle prism for being coated with beam splitting coating, then the light beam reflected through it
Its 2 times angle deflection will occur, in the picture point on Position-Sensitive Detector corresponding displacement occurs for line focus lens focus,
Have:
dy≈2fα,dx≈2fβ, (11)
In formula, f is the focal length of lens, dxAnd dyThe respectively displacement of picture point x-axis and y-axis direction on Position-Sensitive Detector.
The photosignal of Position-Sensitive Detector output is sent into processing terminal and is obtained and float comprising laser beam after signal processing circuit
Pitch angle and the deflection angle error measure to be measured of shift error.Then:
α≈dy/ (2f), β ≈ dx/ (2f), (12)
Pitch angle and beat angular measurement can be realized by (12) formula.
Step 3: the transmitted light beam after beam splitting is carried out into the right-angle prism for being coated with beam splitting coating, through being coated with the right angle of beam splitting coating
It is projected after the right-angle side refraction of prism, 4 quadrant detector is reached after optical splitter beam splitting and carries out receiving area's reason, realized horizontal
The measurement of direction straightness error.
The transmitted light of the return of right-angle prism 6 of beam splitting coating is coated with through I 7 beam splitting of beam splitter, the vertical light after beam splitting reaches four
Quadrant detector II 12.When straightness error to be measured occurs, facula position of the transmitted light beam on 4 quadrant detector occurs
Variation, for the photosignal of 4 quadrant detector output after signal processing circuit, being sent into processing terminal and obtaining includes laser light
The horizontal direction straightness error value to be measured of line drift.
When the right-angle prism for being coated with beam splitting coating is moved along tested guide rail, the straightness error Δ x of tested guide rail will make to plate
There is the right-angle prism of beam splitting coating that corresponding displacement Δ x occurs, by right-angle prism characteristic it is found that the collimated light beam returned through its transmission exists
Spot displacement on 4 quadrant detector is 2 Δ x, and measurement can be realized in horizontal linear degree.
Step 4: it is penetrated by the reflected beams for being coated with the right-angle prism of beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
Transmitted light beam out is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light after beam splitting
Beam realizes rolling angle measurement after calculus of differences.
Be coated with beam splitting coating right-angle prism 6 transmit after project the light beam of return, contain roll angle, pitch angle, horizontal straight
Light drift information caused by dimension and environment.If being coated with the bevel edge a length of L, incident light I of the right-angle prism 6 of beam splitting coating0With go out
Penetrate light I2Between distance be d, by formula (2), (7)~(9) formula it is found that transmitted light beam after measuring table is mobileInjection is coated with point
When the right-angle prism 6 of beam film, in the direction y displacement are as follows:
Δ y=d γ-L α/n； (13).
If the initial distance for the 4 quadrant detector II 12 being coated on the right-angle prism 6 to transmitted light beam of beam splitting coating is z0,
It is Δ z, contrast equation (2) and (9) formula it is found that being coated with the right-angle prism 6 of beam splitting coating with measurement that measuring table, which is moved along the z-axis distance,
After platform is mobile, transmitted light beamSame the reflected beamsThe variation of -2 α pitch angles equally has occurred, reaches Quadrant detector
In the displacement in the direction y when device II 12 are as follows:
Δy1=Δ y+ (z0+ Δ z) (- 2 α)=d γ+Δ y2(14),
In formula, Δ y2=(- 2 α) (z0+Δz+L/2n) (15)。
By formula (1) and (6) formula it is found that Δ y2Can by with the right-angled edge that is coated with beam splitting coating, 6 at a distance of z0+ Δ z+L/2n's is anti-
4 quadrant detector I 11 on irradiating light beam receives the reflected beamsIt obtains, then:Realize rolling angle measurement.
Step 5: it is penetrated by the reflected beams for being coated with the right-angle prism of beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
Transmitted light beam out is split through different beam splitters respectively, and two light beams are arrived separately at positioned at two condenser lens focal planes
Two Position-Sensitive Detectors and carry out receiving area's reason, angular light drift amount is obtained after calculus of differences, is then surveyed in former each error
Measurement error caused by angular light drift amount on the basis of magnitude obtains high-precision error measuring value, and then realizes light drift compensation.
Step 6: the right-angle prism for being coated with beam splitting coating is rotated by 90 °, and laser issues laser, is collimated by collimation lens
After be emitted, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro
Prism, quarter-wave plate are incident on the inclined edge surfaces of the right-angle prism for being coated with beam splitting coating on test platform, through being coated with
After the right-angle prism transmission of beam splitting coating, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Limit detector simultaneously receives processing, realizes the measurement of vertical direction straightness error.
As shown in figure 3, isolator 15 moves up, the rear side of the horizontal direction of right-angle prism 32 is set.Laser 1 is sent out
After the collimated collimation of lens 2 outgoing of laser out, which impinges perpendicularly on rotation 90 through prism assemblies 3, quarter-wave plate 5
On the right-angle prism 6 for being coated with beam splitting coating of degree.It is contained in the light beam returned after being coated with the transmission of right-angle prism 6 of beam splitting coating vertical
Straight straightness information, when the right-angle prism 6 for being coated with beam splitting coating is moved along survey guide rail, the straightness error Δ y of tested guide rail will
Make the right-angle prism 6 for being coated with beam splitting coating that corresponding displacement Δ y occur.By right-angle prism characteristic it is found that through being coated with the right angle of beam splitting coating
The collimated light beam that the transmission of prism 6 returns is visited again through quarter-wave plate 5, polarization splitting prism 4, beam splitter II 10 by four-quadrant
It surveys device and receives I 11, the spot displacement of the generation on 4 quadrant detector I 11 is 2 Δ y, realizes the measurement of vertical line degree.
A kind of device that the five degree of freedom error based on beam drift compensation measures simultaneously, including fixed cell 101 and shifting
Moving cell 102, mobile unit 102 are fixed on test platform；The mobile unit 102 includes the right-angle prism for being coated with beam splitting coating
6, the right-angle prism 6 for being coated with beam splitting coating is fixed on along the measuring table that guide rail moves；The fixed cell 101 includes by laser
Device 1, collimation lens 2, prism assemblies 3, polarization splitting prism 4, quarter-wave plate 5, isolator 15, beam splitter, four-quadrant are visited
Survey device, Position-Sensitive Detector, condenser lens and signal processing circuit 16, collimation lens 2, prism assemblies 3, isolator 15, partially
Vibration Amici prism 4 and quarter-wave plate 5 are successively set on the light between laser 1 and the right-angle prism 6 for being coated with beam splitting coating
On；The beam splitter includes beam splitter I 7 and beam splitter II 10, and 4 quadrant detector includes 4 quadrant detector I 11 and four-quadrant
Detector II 12, Position-Sensitive Detector include Position-Sensitive Detector I 9 and Position-Sensitive Detector II 14, condenser lens packet
Condenser lens I 8 and condenser lens II 13 are included, beam splitter I 7 and condenser lens I 8 are successively set on the right-angle prism for being coated with beam splitting coating
On the light of 6 transmitted light beam, Position-Sensitive Detector I 9 is arranged on the focal plane of condenser lens I 8,4 quadrant detector II
12 are arranged in the optical path of beam splitter I 7；The optical path of polarization splitting prism 4 is arranged in beam splitter II 10 and 4 quadrant detector I 11
On, condenser lens II 13 and Position-Sensitive Detector II 14 are arranged in the optical path of beam splitter II 10, Position-Sensitive Detector II
14 are arranged on the focal plane of condenser lens II 13；The Position-Sensitive Detector I 9, Position-Sensitive Detector II 14, four-quadrant
Detector I 11 and 4 quadrant detector II 12 are connected with signal processing circuit 16, signal processing circuit 16 and computer 17
It is connected.
Preferably, the right-angle prism 6 for being coated with beam splitting coating is fixed on the rotating device that can be rotated by 90 °, and rotating device is fixed
On measuring table, the right-angle prism 6 for being coated with beam splitting coating can be rotated by 90 ° by rotating device.The prism assemblies 3 include point
The top of Amici prism 31 is arranged in light prism 31 and right-angle prism 32, right-angle prism 32.Institute's laser 1 is He-Ne laser
Or the laser of semiconductor laser；The collimation lens 2 is simple lens or lens group.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of method that the five degree of freedom error based on beam drift compensation measures simultaneously, which is characterized in that its step are as follows:
Step 1: laser issues laser, is emitted after collimation lens collimates；Light beam after collimation lens collimates passes through
After Amici prism outgoing, light beam is incident on platform to be tested by isolator, polarization splitting prism, quarter-wave plate
The right-angle prism for being coated with beam splitting coating inclined edge surfaces on；
Step 2: the reflected beams for being coated with the right-angle prism of beam splitting coating return, the light beam polarization direction after quarter-wave plate
It changes, then again after polarization splitting prism reflects, the Position-Sensitive Detector by being located at condenser lens focal plane is connect
It receives, when pitching and beat occur for test platform, focus spot position of the reflected beams on Position-Sensitive Detector becomes
Change, for the photosignal of Position-Sensitive Detector output after signal processing circuit, being sent into processing terminal and obtaining includes laser light
The error measure of the pitch angle and deflection angle to be measured of line drift error；
Step 3: the transmitted light beam after beam splitting enters the right-angle prism for being coated with beam splitting coating, through being coated with the right-angle prism of beam splitting coating
Right-angle side reflection is projected, and 4 quadrant detector II is reached after beam splitter I beam splitting, when straightness error to be measured occurs, transmission
Facula position of the light beam on 4 quadrant detector II changes, and the photosignal of 4 quadrant detector II output passes through signal
After processing circuit, it is sent into processing terminal and obtains the horizontal direction straightness error value to be measured comprising laser beam drift；
Step 4: by the reflected beams that are coated with the right-angle prism of beam splitting coating and enter to be coated with and projected after the right-angle prism of beam splitting coating
Transmitted light beam is split through different beam splitter I and beam splitter II respectively, two different 4 quadrant detector I and four-quadrant
Detector II receives the reflected beams after beam splitting respectively, realizes rolling angle measurement after calculus of differences；
Step 5: by the reflected beams that are coated with the right-angle prism of beam splitting coating and enter to be coated with and projected after the right-angle prism of beam splitting coating
Transmitted light beam is split through different beam splitter I and beam splitter II respectively, the transmission after beam splitter I and beam splitter II beam splitting
Light beam arrives separately at two Position-Sensitive Detectors positioned at two condenser lens focal planes and carries out receiving area's reason, calculus of differences
After obtain light drift amount, realize light drift compensation；
Step 6: the right-angle prism for being coated with beam splitting coating is rotated by 90 °, and laser issues laser, is gone out after collimation lens collimates
It penetrates, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro rib
Mirror, quarter-wave plate are incident on the inclined edge surfaces of the right-angle prism for being coated with beam splitting coating on test platform, are coated with point
After the right-angle prism transmission of beam film, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Detector I simultaneously receives processing, realizes the measurement of vertical direction straightness error.
2. the method that the five degree of freedom error according to claim 1 based on beam drift compensation measures simultaneously, feature
It is, the method for the measurement of the horizontal direction straightness error are as follows: when the right-angle prism for being coated with beam splitting coating is moved along tested guide rail
When dynamic, the straightness error of tested guide railIt will make the right-angle prism for being coated with beam splitting coating that corresponding displacement occur, by right-angled edge
Mirror characteristic is it is found that spot displacement of the collimated light beam returned through its transmission on 4 quadrant detector II is 2。
3. the method that the five degree of freedom error according to claim 1 based on beam drift compensation measures simultaneously, feature
It is, contains vertical line degree letter in the light beam returned after the right-angle prism transmission of beam splitting coating is coated in the step 6
Breath, when the right-angle prism for being coated with beam splitting coating is moved along tested guide rail, the straightness error of tested guide railIt will make to be coated with beam splitting
Corresponding displacement occurs for the right-angle prism of film；By right-angle prism characteristic it is found that the right-angle prism transmission for being coated with beam splitting coating returns
Collimated light beam again through quarter-wave plate, polarization splitting prism, beam splitter, received by 4 quadrant detector I, four-quadrant visit
The spot displacement for surveying the generation on device I is 2, realize the measurement of vertical line degree.
4. a kind of device that the five degree of freedom error based on beam drift compensation measures simultaneously, which is characterized in that including fixed single
First (101) and mobile unit (102), mobile unit (102) are fixed on test platform；The mobile unit (102) includes plating
There is the right-angle prism (6) of beam splitting coating, the right-angle prism (6) for being coated with beam splitting coating is fixed on along the test platform that guide rail moves；Institute
State fixed cell (101) include by laser (1), collimation lens (2), prism assemblies (3), polarization splitting prism (4), four/
One wave plate (5), isolator (15), beam splitter, 4 quadrant detector, Position-Sensitive Detector, condenser lens and signal processing electricity
Road (16), collimation lens (2), prism assemblies (3), isolator (15), polarization splitting prism (4) and quarter-wave plate (5) according to
On the secondary light being arranged between laser (1) and the right-angle prism (6) for being coated with beam splitting coating；The beam splitter includes beam splitter I
(7) and beam splitter II (10), 4 quadrant detector include 4 quadrant detector I (11) and 4 quadrant detector II (12), position
Sensing detector includes Position-Sensitive Detector I (9) and Position-Sensitive Detector II (14), and condenser lens includes condenser lens I
(8) and condenser lens II (13), beam splitter I (7) and condenser lens I (8) are successively set on the right-angle prism (6) for being coated with beam splitting coating
Transmitted light beam light on, Position-Sensitive Detector I (9) be arranged on the focal plane of condenser lens I (8), Quadrant detector
Device II (12) is arranged on the reflected light path of beam splitter I (7)；Beam splitter II (10) and 4 quadrant detector I (11) are arranged inclined
It shakes on the reflected light path of Amici prism (4), condenser lens II (13) and Position-Sensitive Detector II (14) are arranged in beam splitter II
(10) on reflected light path, Position-Sensitive Detector II (14) is arranged on the focal plane of condenser lens II (13)；The position
Sensing detector I (9), Position-Sensitive Detector II (14), 4 quadrant detector I (11) and 4 quadrant detector II (12) with
Signal processing circuit (16) is connected, and signal processing circuit (16) is connected with processing terminal (17).
5. the device that the five degree of freedom error according to claim 4 based on beam drift compensation measures simultaneously, feature
It is, the right-angle prism (6) for being coated with beam splitting coating is fixed on the rotating device that can be rotated by 90 °, and rotating device is fixed on survey
It tries on platform.
6. the device that the five degree of freedom error according to claim 4 based on beam drift compensation measures simultaneously, feature
It is, the prism assemblies (3) include Amici prism (31) and right-angle prism (32), and right-angle prism (32) is arranged in Amici prism
(31) top.
7. the device that the five degree of freedom error according to claim 4 based on beam drift compensation measures simultaneously, feature
It is, the laser (1) is the laser of He-Ne laser or semiconductor laser；The collimation lens (2) is simple lens
Or lens group.
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