1380010 MCPOO03 29l88twf.doc/n 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種取樣裝置以及取樣方法，且特別 是有關於一種液體的取樣裝置以及取樣方法。 【先前技術】 對於半導體產業與光電產業而言，產品的良率除了仰 賴相關技術的精益求精外，更與周邊的相關配合系統技術 息息相關。舉例來說，隨著元件的複雜度與積集度的升高， 晶圓表面的微小缺陷（minute defects)和微量雜質（trace impurities)可能會嚴重影響晶圓的良率。因此，在半導體製 私·中’使用純水去除附者於晶片上或玻璃上的殘餘酸驗、 有機物、外來之雜質或微粒。此外，純水也普遍應用於工 業、醫學以及學術等研究機構中，故各領域對於純水的品 質控管具有高度的需求。 為了確保純水的品質，會使用水質監測器來監測純水 的潔淨度。舉例來說，會在純水的出口管路截一活检 (Cock) ’之後經由軟管直接與水質監測器連接，以監測 水質的變化。然而，純水的出口管路處的壓力往往過大， 使得測定出來的測定值容易受到氣泡的干擾或者是具有水 壓不穩定的問題。此外，直接由墨力管截取，過大的壓力 也容易對水質監測器造成損害。如此一來，導致水質監測 器的使用年限縮短以及純水的品質無法控管。另外，取樣 時須使用取樣泵，不但浪費動能，還會使運轉成本提高。1380010 MCPOO03 29l88twf.doc/n VI. Description of the Invention: [Technical Field] The present invention relates to a sampling device and a sampling method, and more particularly to a liquid sampling device and sampling method. [Prior Art] For the semiconductor industry and the optoelectronics industry, the yield of products depends on the excellence of related technologies, and is closely related to the surrounding system technology. For example, as component complexity and accumulation increase, minute defects and trace impurities on the wafer surface can severely affect wafer yield. Therefore, in the semiconductor manufacturing, pure water is used to remove residual acid, organic matter, foreign matter or particles attached to the wafer or glass. In addition, pure water is also commonly used in industrial, medical, and academic research institutions, so there is a high demand for quality control of pure water in various fields. To ensure the quality of pure water, a water quality monitor is used to monitor the cleanliness of pure water. For example, a biopsy (Cock) will be placed in the outlet line of pure water to connect directly to the water quality monitor via a hose to monitor changes in water quality. However, the pressure at the outlet line of pure water tends to be too large, so that the measured value is easily disturbed by bubbles or has a problem of water pressure instability. In addition, it is directly intercepted by the ink tube, and excessive pressure can easily damage the water quality monitor. As a result, the life of the water quality monitor is shortened and the quality of pure water cannot be controlled. In addition, the sampling pump must be used for sampling, which not only wastes kinetic energy, but also increases operating costs.
McP〇003 29188twf.doc/n 口此’此領域亟需—種取樣裝置，能降低取樣時對檢測單 :所造成㈣響’以提升檢測單元量财_準確性 精碹柹。 【發明内容】 本發明提供-種取樣裝置，以重力進流的方式來進行 液體的取樣。 本發明另提供一種取樣方法，利用上述取樣裝置來進 行液體的取樣。 ^發明提出-種取樣裝置，其包括腔體、進流水管、 取樣官、放流水管以及連通管。腔體分隔成第一腔室與第 二腔室。進流水管位於第一腔室的頂部，用以將液體導入 第一腔至。取樣管位於第一腔室的側壁，用以將液體導出 第一腔室，其中進流水管的出水口的位置高於取樣管的進 水口的位置。放流水管位於第二腔室的側壁，用以將液體 導出第二腔室。連通管設置於腔體内部，用以連通第一腔 室以及第二腔室，並將液體由第一腔室導入第二腔室，且 連通管的進水口的位置高於進流水管的出水口的位置。 在本發明之一實施例中，上述之液體包括回收水、純 水以及超純水。 在本發明之一實施例中’上述之第一腔室更包括氣體 注入口’氣體注入口位於第〆腔室的頂部。 在本發明之一實施例中，經由上述之氣體注入口所注 入的氣體包括氮氣。 MCP0003 29188twf.doc/i 在本發明之一實施例中，上述之連通管的出水口處具 有至少一散氣孔。 在本發明之一實施例中’上述之放流水管的進水口的 位置高於連通管的出水口的位置。 在本發明之一實施例中，取樣裝置更包括一破虹吸 管’破虹吸管連接於放流水管的側壁。 在本發明之一實施例中’取樣裝置更包括第一法蘭、 第二法蘭以及法蘭墊片’其中第一法蘭以及第二法蘭分別 連接第一腔室與第二腔室，法蘭墊片位於第一法蘭與第二 法蘭之間。 在本發明之一實施例中，上述之取樣管與檢測單元連 接’檢測單元檢測取樣管所取樣的液體。 本發明另提出一種取樣方法。首先’提供取樣裝置。 取樣裝置包括腔體、進流水管、取樣管、放流水管以及連 通管。腔體分隔成第一腔室與第二腔室。進流水管位於第 一腔室的頂部。取樣管位於第一腔室的側壁，其中進流水 官的出水口的位置高於取樣管的進水口的位置。放流水管 位於第二腔室的側壁。連通管設置於腔體内部，用以連通 第一腔室以及第二腔室，且連通管的進水口的位置高於進 流水管的出水口的位置。接著，將一液體經由進流水管導 入第一腔室，當第一腔室内的液體到達取樣管的進水口 時，經由取樣管取得液體。 在本發明之一實施例中，當第一腔室内的液體到達連 通管的進水口時’液體經由連通管導入第二腔室。 MCP0003 29l88twf.doc/i 在本發明之一實施例中，當第二腔室内的液體到達放 流水管的進水口時，放流水管將液體導出第二腔室。 在本發明之一實施例中，液體包括回收水、純水以及 超純水。 在本發明之一實施例中’更包括經由氣體注入口注入 氮氣’以氮封腔體中的液體，其中氣體注入口位於第一腔 室的頂部。 在本發明之一實施例中，更包括經由散氣孔排氣，其 中散氣孔位於連通管的出水口。 在本發明之一實施例中，更包括以檢測單元檢測取樣 管所取樣的液體。 在本發明之一實施例中，檢測單元檢測與取樣管連 隹本^明之一實施例中，放流水管的進水口的位 於連通管的出水口的位置。 问 —在本發明之一實施例中，上述之取樣裝置更包括破虹 吸管’破虹吸管連接於放流水管的侧壁。 、+在本發明之一實施例中，上述之取樣裝置更包括第一 法蘭、第二法蘭以及法蘭墊片’其中第一法蘭 蘭分別連接第-腔室與第二腔室，法蘭塾片 ’ 與第二法蘭之間。 、弟一法蘭 在本發明之-實施例中，上述之取樣管與撿 接，檢測單元檢測取樣管所取樣的液體。 基於上述，本發明之取樣裝置與取樣方法是以重力進 1380010 MCP0003 29188twf.doc/n 流的方式來進行液體的取樣，由於在定容定壓下取樣，因 此使得與取樣裝置所連接的檢測單元能夠維持穩定性，以 大幅提升檢測單元量測液體的準確性與精確性。 此外’本發明之取樣裝置具有氮封功能，可以避免液 體受到外界干擾’因此檢測單元量測液體的準確性高，且 本發明之取樣裝置的適用範圍廣。 為讓本發明之上述特徵和優點能更明顯易懂，下文特 舉實施例，並配合所附圖式作詳細說明如下。 【實施方式】 圖1是依照本發明一實施例之取樣裝置的示意圖。 請參照圖1 ’本實施例之取樣裝置1〇〇包括腔體11〇、 進流水管120、取樣管130、放流水管14〇以及連通管15〇。 腔體no分隔成第一腔室112與第二腔室114。腔體 110的材質例如是PPC、PVC或其他合適的材質。在本實 施中，取樣裝置100 S包括第一法蘭160、第二法蘭162 以及法蘭墊片164 ’其中第一法蘭16〇以及第二法蘭162 分別連接第-腔室112與第二腔室114，法蘭塾片164位 於第-法蘭160與第二法蘭162之間。第一法蘭與第 二法蘭162與第-腔冑112以及第二腔室114的連接方式 可以是焊接、黏合或其他連接方式。 進流水管120位於第—腔室112的頂部_，用以將 液體導入弟-腔室112。舉職說，進流水管12()的進水 口偷例如是與水處理系統(未緣示)的出水管路連接以 8 MCP0003 29188twf.doc/n 將水處理系統處理過的液體經由進流水管12〇的進水口 120a導入第一腔室112。液體例如是回收水、純水以及超 純水。 取樣管130位於第一腔室112的側壁U2b，包括進水 口 130a與出水口 13〇b。其中，進流水管12〇的出水口 12〇b 的位置高於取樣管130的進水口 13〇a的位置，兩者之間的 距離例如是10mm。因此，當經由進流水管12〇導入第一 腔至112的液體逐漸充滿第一腔室112且液面高於取樣管 130的進水口 130a時，液體流入取樣管13〇中。在本實施 例中，取樣管130例如是與檢測單元2〇〇連接，使所取樣 的液體能夠進入檢測單元200進行分析。檢測單元2〇〇例 如疋水貝監測器，其可根據液體中的電阻值、納離子濃度 以及删離子濃度等參數作為監測水質的指標。 在本實施例中，第一腔室112更包括氣體注入口 116, 其位於第一腔室112的頂部112a。經由氣體注入口 116進 入腔體110的氣體例如是氮氣，用以氮封腔體u〇中的液 體。如此一來，進入腔體n〇的液體不會因為接觸到空氣 而變質，可確保取樣的品質。 放流水管140位於第二腔室114的側壁114a，用以將 液體導出第二腔室114。在本實施例中，取樣裝置⑺…更 包括破虹吸管17〇，其連接於放流水管14〇的侧壁142。 連通管150設置於腔體11〇内部，用以連通第一腔室 U2以及第二腔室114’並將液體由第_腔室112導入第二 腔室114。詳言之，連通管15〇的進水口 15〇a位於第一腔 1380010 MCP0003 29188twf.doc/n 室112，連通管150的出水口 150b位於第二腔室114，且 連通管150的進水口 150a的位置高於進流水管12〇的出水 口 120b的位置。因此’當液體經由進流水管〗2〇導入第一 腔室112後’液體會逐漸充滿第一腔室112，當液體的液 面高於連通管150的進水口 150a，液體就會經由連通管150 進入第二腔室114。當液體逐漸充滿第二腔室U4且液體 的液面高於放流水管140的進水口 140a時，液體就會經由 放流水管140的出水口 140b離開取樣裝置1〇〇。.在本實施 例中，出流水管140的進水口 140a的位置例如是高於連通 管150的出水口 150b的位置。特別一提的是，在本實施例 中，連通管150的出水口 15〇b處例如是具有多個散氣孔 152。詳言之’第二腔室114具有水封的功能，而用以氮封 的氮氣可能會沿著連通管150進入第二腔室114而劇烈擾 動液面’有破水封的疑慮。因此，利用散氣孔152來幫助 排氣，以維持取樣裝置100的穩定。 利用上述取樣裝置來對液體進行取樣的取樣方法如 下所述。圖2是依照本發明一實施例之取樣方法的流程示 意圖。 請同時參照圖1與圖2，首先，進行步驟S300，提供 取樣裝置100。取樣裝置100包括腔體110、進流水管12〇、 取樣管130、放流水管140以及連通管150。腔體11〇分隔 成第一腔室112與第二腔室114。進流水管120位於第_ 腔室112的頂部112a。取樣管130位於第一腔室112的側 壁112 ’其中進流水管120的出水口 120b的位置高於取樣 1380010 MCP0003 29I88twf.doc/n 管130的進水口 130a的位置。放流水管i4〇位於第二 114的側壁114a。連通管15〇設置於腔體11〇内部，用以 連通第-腔室m以及第二腔室114，且連通管15〇的進 水口⑽的位置高於進流水管的出水π 12〇b的位 置。取^置1GG的結構可參照前文所述，於此不費述。 接著，進行步驟S310，將液體經由進流水管丨2〇導入 第一腔室112 ’當第一腔室112内的液體到達取樣管 的進水口 130a時，經由取樣管13〇取得液體。詳言之例 如是將進流水管120與水處理系統(未繪示）的出水管路連 接，使得經水處理系統處理過的液體經由進流水管12〇進 入第一腔室112。液體會逐漸充滿第一腔室112，當第一腔 至112内的液體的液面南於取樣管13〇的進水口 時， 液體在重力作用下會流入取樣管13〇。而後，例如是以檢 測單兀200檢測取樣管13〇所取樣的液體。其中，取樣管 130例如是與檢測單元2〇〇連接。因此’所取樣的液體能 夠進入檢測單元200進行分析，以監控經由水處理系統處 理過後之液體的水質。 而後’當第一腔室112内的液體到達連通管15〇的進 水口 150a時’液體經由連通管15〇導入第二腔室η*。以 及，g苐一腔室114内的液體到達放流水管14〇的進水口 140a時，放流水管14〇將液體導出第二腔室114。 在本實施例中’取樣方法更包括經由氣體注入口 n6 注入氮氣，以氮封腔體11〇中的液體，使液體與空氣隔絕。 以及’經由散氣孔152排氣’以避免經由連通管15〇進入 11 1380010 MCP0003 29I88twf.doc/n 第二腔室114的氣體優動第二腔室u4中的 裝置100處於穩定的狀態。 吏取樣 在本實施例之取樣裝置令，液體是經由重力 入取樣管令’以完成液體的取樣。因此，相較於二淹 需額外使用取樣録進行取樣的取樣方法，能』t種 樣所需耗費的運轉成本。再者，本發明之取樣裝在取 容定塵下取樣，使得與取樣褒置連接的檢 =定 疋性^大幅提升檢測單元量測水質的準確性與精確t穩 ，，示上所述，本㈣之取樣裝置以及取财 : 進流的方式對液體進行取樣，由於在定容定壓下取^重^ 力或是氣泡對與取樣裝置所連接的檢= 成干擾或疋損害。如此—來，檢測單元能夠維持穩定^ 提升檢解元量财_準確性與精雜 檢測早元的使用壽命。 延長 且’取樣裝置能適用的範圍相當廣闊，包括 水會故能與現有的多種水處理裝置進二 i免液施例中’取樣裝置具有氮封功能，可以 質量測的^^界干擾’以確保取樣的品質，進而提升水 太恭Γ然本發明已以實施例揭露如上，然其並非用以限定 本^明技術領域中具有通常知識者，在不脫離 又；:月神和範圍内，當可作些許之更動與潤飾，故太 七明之保護範®轉後附之巾請專利範圍所界定者為準。 12 1380010 MCP0003 29188twf.doc/n 【圖式簡單說明】 圖1是依照本發明一實施例之取樣裝置的示意圖。 圖2是依照本發明一實施例之取樣方法的流程示意 圖。 【主要元件符號說明】 100 :取樣裝置 110 :腔體 112 :第一腔室 112a :頂部 112b :側壁 114 :第二腔室 114a :侧壁 116 :氣體注入口 120 :進流水管 120a :進水口 120b :出水口 130 :取樣管 130a :進水口 130b :出水口 140 :放流水管 140a :進水口 140b :出水口 142 :侧壁 13 1380010 MCP0003 29188twf.doc/n 150 :連通管 150a :進水口 150b :出水口 152 :散氣孔 160 :第一法蘭 162 ··第二法蘭 164 :法蘭墊片 170 :破虹吸管 200 :檢測單元 S300、S302 :步驟McP〇003 29188twf.doc/n This is a need for a sampling device in this field, which can reduce the number of samples generated during the sampling: (four) ring to improve the quality of the detection unit _ accuracy. SUMMARY OF THE INVENTION The present invention provides a sampling device for sampling a liquid by means of gravity inflow. The present invention further provides a sampling method for sampling a liquid using the above sampling device. The invention proposes a sampling device comprising a cavity, an inlet pipe, a sampling officer, a discharge pipe, and a communication pipe. The cavity is divided into a first chamber and a second chamber. An inlet tube is located at the top of the first chamber for directing liquid into the first chamber. A sampling tube is located on a sidewall of the first chamber for directing liquid out of the first chamber, wherein the outlet of the inlet tube is positioned higher than the inlet of the sampling tube. A drain pipe is located on the side wall of the second chamber for directing liquid out of the second chamber. The communication tube is disposed inside the cavity for communicating the first chamber and the second chamber, and introducing the liquid from the first chamber into the second chamber, and the position of the water inlet of the communication tube is higher than the outlet of the inlet pipe The location of the nozzle. In an embodiment of the invention, the liquid comprises recovered water, purified water, and ultrapure water. In one embodiment of the invention, the first chamber described above further includes a gas injection port. The gas injection port is located at the top of the second chamber. In an embodiment of the invention, the gas injected through the gas injection port described above includes nitrogen. MCP0003 29188twf.doc/i In one embodiment of the invention, the water outlet of the communication tube has at least one air vent. In an embodiment of the invention, the position of the water inlet of the discharge pipe is higher than the position of the water outlet of the communication pipe. In one embodiment of the invention, the sampling device further includes a broken siphon tube. The broken siphon is coupled to the side wall of the drain pipe. In one embodiment of the present invention, the 'sampling device further includes a first flange, a second flange, and a flange gasket, wherein the first flange and the second flange are respectively connected to the first chamber and the second chamber, The flange gasket is located between the first flange and the second flange. In an embodiment of the invention, the sampling tube is coupled to the detecting unit and the detecting unit detects the liquid sampled by the sampling tube. The invention further proposes a sampling method. First, a sampling device is provided. The sampling device includes a cavity, an inlet pipe, a sampling pipe, a discharge pipe, and a connecting pipe. The cavity is divided into a first chamber and a second chamber. The inlet pipe is located at the top of the first chamber. The sampling tube is located on the side wall of the first chamber, wherein the inlet of the inflowing water is positioned higher than the inlet of the sampling tube. The drain pipe is located on the side wall of the second chamber. The communication tube is disposed inside the cavity for communicating the first chamber and the second chamber, and the position of the water inlet of the communication tube is higher than the position of the water outlet of the inlet water pipe. Next, a liquid is introduced into the first chamber via the inlet pipe, and when the liquid in the first chamber reaches the water inlet of the sampling tube, the liquid is taken through the sampling tube. In an embodiment of the invention, the liquid is introduced into the second chamber via the communication tube when the liquid in the first chamber reaches the water inlet of the communication tube. MCP0003 29l88twf.doc/i In one embodiment of the invention, the discharge water conduit directs the liquid out of the second chamber when the liquid in the second chamber reaches the water inlet of the discharge pipe. In an embodiment of the invention, the liquid comprises recycled water, pure water, and ultrapure water. In one embodiment of the invention, the invention further includes injecting nitrogen gas through a gas injection port to seal the liquid in the chamber with nitrogen, wherein the gas injection port is located at the top of the first chamber. In an embodiment of the invention, the exhausting is further included via a diffusing hole, wherein the diffusing hole is located at a water outlet of the communicating pipe. In an embodiment of the invention, the detecting unit further comprises detecting the liquid sampled by the sampling tube. In an embodiment of the present invention, the detecting unit detects the position of the water inlet of the discharge pipe in the embodiment of the present invention. Q. In one embodiment of the invention, the sampling device further includes a broken siphon 'broken siphon connected to the side wall of the discharge pipe. In one embodiment of the present invention, the sampling device further includes a first flange, a second flange, and a flange gasket, wherein the first flange is connected to the first chamber and the second chamber, respectively. Between the flanged piece ' and the second flange. In the embodiment of the present invention, the sampling tube is connected to the sampling tube, and the detecting unit detects the liquid sampled by the sampling tube. Based on the above, the sampling device and the sampling method of the present invention perform sampling of the liquid by means of gravity into the flow of 1380010 MCP0003 29188 twf.doc/n, and the sampling unit connected to the sampling device is made due to sampling under constant volume and constant pressure. It maintains stability and greatly improves the accuracy and accuracy of the measurement unit. Further, the sampling device of the present invention has a nitrogen sealing function to prevent the liquid from being disturbed by the outside. Therefore, the accuracy of the measuring unit for measuring the liquid is high, and the sampling device of the present invention has a wide application range. The above described features and advantages of the present invention will become more apparent from the description of the appended claims. Embodiments Fig. 1 is a schematic view of a sampling device in accordance with an embodiment of the present invention. Referring to Fig. 1, the sampling device 1 of the present embodiment includes a cavity 11A, a water inlet pipe 120, a sampling pipe 130, a discharge pipe 14A, and a communication pipe 15A. The cavity no is divided into a first chamber 112 and a second chamber 114. The material of the cavity 110 is, for example, PPC, PVC or other suitable material. In the present embodiment, the sampling device 100 S includes a first flange 160, a second flange 162, and a flange gasket 164 ' wherein the first flange 16 〇 and the second flange 162 are connected to the first chamber 112 and the first The two chambers 114, the flange 164 are located between the first flange 160 and the second flange 162. The first flange and the second flange 162 may be coupled to the first cavity 112 and the second chamber 114 by welding, bonding or other means of attachment. The inlet pipe 120 is located at the top of the first chamber 112 for introducing liquid into the chamber 112. It is said that the water inlet of the inlet pipe 12 () is, for example, connected to the water outlet of the water treatment system (not shown). 8 MCP0003 29188twf.doc/n The liquid treated by the water treatment system is passed through the inlet pipe. A 12-inch water inlet 120a is introduced into the first chamber 112. The liquid is, for example, recycled water, pure water, and ultrapure water. The sampling tube 130 is located at the side wall U2b of the first chamber 112 and includes a water inlet 130a and a water outlet 13b. The position of the water outlet 12〇b of the inlet pipe 12〇 is higher than the position of the water inlet 13〇a of the sampling pipe 130, and the distance between the two is, for example, 10 mm. Therefore, when the liquid introduced into the first chamber to 112 via the inlet pipe 12〇 gradually fills the first chamber 112 and the liquid level is higher than the water inlet 130a of the sampling pipe 130, the liquid flows into the sampling pipe 13〇. In the present embodiment, the sampling tube 130 is, for example, connected to the detecting unit 2, so that the sampled liquid can enter the detecting unit 200 for analysis. For example, the detection unit 2 can be used as an indicator for monitoring water quality according to parameters such as resistance value, nano ion concentration and ion concentration in the liquid. In the present embodiment, the first chamber 112 further includes a gas injection port 116 located at the top 112a of the first chamber 112. The gas entering the chamber 110 via the gas injection port 116 is, for example, nitrogen gas, for nitrogen sealing the liquid in the chamber. In this way, the liquid entering the cavity n〇 does not deteriorate due to contact with the air, and the quality of the sampling can be ensured. A drain pipe 140 is located in the side wall 114a of the second chamber 114 for directing liquid out of the second chamber 114. In the present embodiment, the sampling device (7) ... further includes a broken siphon 17 连接 which is connected to the side wall 142 of the discharge water pipe 14 . The communication tube 150 is disposed inside the cavity 11〇 for communicating the first chamber U2 and the second chamber 114' and introducing the liquid from the first chamber 112 into the second chamber 114. In detail, the water inlet 15〇a of the communication tube 15〇 is located in the first chamber 1380010 MCP0003 29188twf.doc/n chamber 112, the water outlet 150b of the communication tube 150 is located in the second chamber 114, and the water inlet 150a of the communication tube 150 is connected. The position is higher than the position of the water outlet 120b of the inlet pipe 12〇. Therefore, 'the liquid gradually fills the first chamber 112 after the liquid is introduced into the first chamber 112 via the inlet pipe 2', and when the liquid level of the liquid is higher than the water inlet 150a of the communication pipe 150, the liquid passes through the communication pipe. 150 enters the second chamber 114. When the liquid gradually fills the second chamber U4 and the liquid level of the liquid is higher than the water inlet 140a of the discharge water pipe 140, the liquid leaves the sampling device 1 through the water outlet 140b of the discharge water pipe 140. In the present embodiment, the position of the water inlet 140a of the outflow pipe 140 is, for example, higher than the position of the water outlet 150b of the communication pipe 150. In particular, in the present embodiment, the water outlet 15b of the communication pipe 150 has, for example, a plurality of air holes 152. In detail, the second chamber 114 has the function of a water seal, and the nitrogen gas for nitrogen sealing may enter the second chamber 114 along the communication tube 150 to severely disturb the liquid level. Therefore, the air vent 152 is utilized to assist in venting to maintain the stability of the sampling device 100. A sampling method for sampling a liquid using the above sampling device is as follows. 2 is a schematic flow diagram of a sampling method in accordance with an embodiment of the present invention. Referring to Fig. 1 and Fig. 2 together, first, step S300 is performed to provide the sampling device 100. The sampling device 100 includes a cavity 110, a water inlet pipe 12, a sampling tube 130, a drain pipe 140, and a communication pipe 150. The cavity 11 is partitioned into a first chamber 112 and a second chamber 114. The inlet pipe 120 is located at the top 112a of the first chamber 112. The sampling tube 130 is located at the side wall 112' of the first chamber 112 where the position of the water outlet 120b of the inlet pipe 120 is higher than the position of the water inlet 130a of the sample 1380010 MCP0003 29I88twf.doc/n. The drain pipe i4 is located at the side wall 114a of the second 114. The communication tube 15 is disposed inside the cavity 11〇 for communicating the first chamber m and the second chamber 114, and the position of the water inlet (10) of the communication tube 15〇 is higher than the water output of the inlet water pipe π 12〇b position. The structure of the 1GG can be referred to the foregoing, and will not be described here. Next, in step S310, the liquid is introduced into the first chamber 112' via the inlet pipe 2'. When the liquid in the first chamber 112 reaches the water inlet 130a of the sampling tube, the liquid is taken through the sampling tube 13. In the example, the inlet pipe 120 is connected to the outlet pipe of the water treatment system (not shown) such that the liquid treated by the water treatment system is drawn into the first chamber 112 via the inlet pipe 12. The liquid gradually fills the first chamber 112. When the liquid level of the liquid in the first chamber to 112 is souther than the water inlet of the sampling tube 13, the liquid flows into the sampling tube 13 by gravity. Then, for example, the liquid sampled by the sampling tube 13 is detected by the inspection unit 200. The sampling tube 130 is connected to the detecting unit 2, for example. Therefore, the sampled liquid can enter the detection unit 200 for analysis to monitor the water quality of the liquid treated by the water treatment system. Then, when the liquid in the first chamber 112 reaches the water inlet 150a of the communication tube 15', the liquid is introduced into the second chamber η* via the communication tube 15A. And, when the liquid in the chamber 114 reaches the water inlet 140a of the discharge pipe 14〇, the discharge pipe 14 turns the liquid out of the second chamber 114. In the present embodiment, the sampling method further includes injecting nitrogen gas through the gas injection port n6 to seal the liquid in the cavity 11〇 with nitrogen to insulate the liquid from the air. And 'venting through the air vent 152' to avoid the device 100 in the gas-optimized second chamber u4 entering the second chamber 114 via the communication tube 15 处于 in a stable state.吏 Sampling In the sampling device of this embodiment, the liquid is fed into the sampling tube by gravity to complete the sampling of the liquid. Therefore, compared to the second sampling method, which requires additional sampling for sampling, it can cost a lot of running costs. Furthermore, the sampling device of the present invention is sampled under the capacity of the sampling dust, so that the detection of the connection with the sampling device greatly improves the accuracy and accuracy of the water quality of the detecting unit, as shown above. Sampling device of this (4) and fortune: The liquid is sampled by the inflow method, because the force is taken under constant constant pressure or the bubble is interfered with or interfered with by the sampling device. In this way, the detection unit can maintain the stability of the 检 检 检 元 _ _ _ 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 准确性 。 。 The extended and 'sampling device can be applied in a wide range, including the water can be combined with the existing multiple water treatment devices. The sampling device has a nitrogen seal function, which can be used to measure the quality of the interference. The quality of the sampling is ensured, and the water is enhanced. The present invention has been disclosed in the above embodiments, but it is not intended to limit the ordinary knowledge in the technical field of the present invention, and does not deviate from; When a little change and retouching can be made, the protection of the Taiqiming Protection Fan® will be subject to the patent scope. 12 1380010 MCP0003 29188twf.doc/n BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a sampling device in accordance with an embodiment of the present invention. 2 is a flow chart showing a sampling method in accordance with an embodiment of the present invention. [Main component symbol description] 100: sampling device 110: cavity 112: first chamber 112a: top 112b: side wall 114: second chamber 114a: side wall 116: gas injection port 120: inlet water pipe 120a: water inlet 120b: water outlet 130: sampling tube 130a: water inlet 130b: water outlet 140: discharge water pipe 140a: water inlet 140b: water outlet 142: side wall 13 1380010 MCP0003 29188twf.doc/n 150: communication pipe 150a: water inlet 150b: Water outlet 152: air vent 160: first flange 162 · second flange 164: flange gasket 170: broken siphon 200: detection unit S300, S302: steps