TWI365112B - Apparatus for treating a substrate - Google Patents
Apparatus for treating a substrateInfo
- Publication number
- TWI365112B TWI365112B TW098130893A TW98130893A TWI365112B TW I365112 B TWI365112 B TW I365112B TW 098130893 A TW098130893 A TW 098130893A TW 98130893 A TW98130893 A TW 98130893A TW I365112 B TWI365112 B TW I365112B
- Authority
- TW
- Taiwan
- Prior art keywords
- treating
- substrate
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008265847 | 2008-10-15 | ||
JP2009178644A JP5290081B2 (ja) | 2008-10-15 | 2009-07-31 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201026405A TW201026405A (en) | 2010-07-16 |
TWI365112B true TWI365112B (en) | 2012-06-01 |
Family
ID=42306083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098130893A TWI365112B (en) | 2008-10-15 | 2009-09-14 | Apparatus for treating a substrate |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5290081B2 (zh) |
TW (1) | TWI365112B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6133120B2 (ja) | 2012-05-17 | 2017-05-24 | 株式会社荏原製作所 | 基板洗浄装置 |
KR101341937B1 (ko) * | 2012-05-30 | 2013-12-17 | 엑스탈테크놀로지 주식회사 | 갈륨비소 다결정 잉곳 화학 에칭 세정장치 |
CN102825108A (zh) * | 2012-09-04 | 2012-12-19 | 无锡金龙川村精管有限公司 | 在线清洗精整装置 |
JP6317941B2 (ja) * | 2014-02-07 | 2018-04-25 | 株式会社ディスコ | 切削装置 |
JP6367763B2 (ja) | 2015-06-22 | 2018-08-01 | 株式会社荏原製作所 | ウェーハ乾燥装置およびウェーハ乾燥方法 |
JP6088099B1 (ja) * | 2016-07-06 | 2017-03-01 | 株式会社荏原製作所 | 洗浄装置、これを備えためっき装置、及び洗浄方法 |
TWI629116B (zh) | 2016-06-28 | 2018-07-11 | 荏原製作所股份有限公司 | 清洗裝置、具備該清洗裝置之鍍覆裝置、以及清洗方法 |
JP2018065109A (ja) * | 2016-10-20 | 2018-04-26 | 東京応化工業株式会社 | 洗浄装置および洗浄方法 |
KR102176209B1 (ko) * | 2018-12-13 | 2020-11-09 | 주식회사 제우스 | 이물질 제거용 기판처리장치 |
CN112696908B (zh) * | 2020-12-25 | 2023-06-23 | 苏州市康普来新材料有限公司 | 一种金属工件清洗烘干一体化设备 |
CN114985349B (zh) * | 2022-05-26 | 2023-06-02 | 梁锋 | 一种采掘钻头冲洗装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0982678A (ja) * | 1995-09-13 | 1997-03-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2004095926A (ja) * | 2002-09-02 | 2004-03-25 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2004273984A (ja) * | 2003-03-12 | 2004-09-30 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP4997080B2 (ja) * | 2007-11-28 | 2012-08-08 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
2009
- 2009-07-31 JP JP2009178644A patent/JP5290081B2/ja active Active
- 2009-09-14 TW TW098130893A patent/TWI365112B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP2010118644A (ja) | 2010-05-27 |
JP5290081B2 (ja) | 2013-09-18 |
TW201026405A (en) | 2010-07-16 |
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