JP6367763B2 - ウェーハ乾燥装置およびウェーハ乾燥方法 - Google Patents
ウェーハ乾燥装置およびウェーハ乾燥方法 Download PDFInfo
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- F26—DRYING
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Description
本発明の好ましい態様は、前記不活性ガス噴射ノズルは、ウェーハの直径よりも長いスリットノズルから構成されることを特徴とする。
本発明の好ましい態様は、前記不活性ガス噴射ノズルは、前記搬送機構によって搬送されるときのウェーハの表面に対して、45度〜85度の範囲内の角度で傾斜していることを特徴とする。
本発明の好ましい態様は、前記不活性ガス噴射ノズルは、前記搬送機構によって搬送されるときのウェーハの表面から1mm〜4mmの距離に位置していることを特徴とする。
本発明の好ましい態様は、前記乾燥室内の酸素濃度を0.5%以下に維持することを特徴とする。
図1は、本発明の一実施形態に係るウェーハ乾燥装置を備えたウェーハ処理装置の全体を示す模式図である。ウェーハ処理装置は、ウェーハWを研磨する研磨ユニット1と、研磨されたウェーハWを洗浄する洗浄ユニット2と、洗浄されたウェーハWを乾燥させる乾燥ユニット3とを備えている。乾燥ユニット3は、ウェーハ乾燥装置の一実施形態である。
2 洗浄ユニット
3 乾燥ユニット
10 研磨パッド
11 研磨テーブル
12 研磨ヘッド
15 研磨液供給ノズル
30 トランスポータ
32 入口ローラコンベア
33 出口ローラコンベア
35,36 ローラ
40 薬液洗浄部
41 薬液洗浄室
42 構造体
43 ローラコンベヤ
44 ローラ
46 薬液供給ノズル
47 純水供給ノズル
50 二流体洗浄部
51 二流体洗浄室
52 構造体
53 ローラコンベヤ
54 ローラ
56 二流体噴流ノズル
57 純水供給ノズル
60 超音波洗浄部
61 超音波洗浄室
62 構造体
63 ローラコンベヤ
64 ローラ
65 上側液体供給ノズル
66 超音波振動子
67 下側液体供給ノズル
71 乾燥室
72 構造体
73 ローラコンベヤ
74 ローラ
74a ウェーハ支持面
75 上側不活性ガス噴射ノズル
76 下側不活性ガス噴射ノズル
81 液吸引ノズル(下流側液吸引ノズル)
85,86 流量制御器
88 酸素濃度計測器
90 液膜
91 上流側液吸引ノズル
Claims (8)
- 乾燥室内でウェーハを搬送する搬送機構と、
前記搬送機構の上方に配置され、不活性ガスの下降噴流を形成する不活性ガス噴射ノズルと、
前記ウェーハの搬送方向に関して前記不活性ガス噴射ノズルの上流側に配置された下流側液吸引ノズルと、前記下流側液吸引ノズルの上流側に配置された上流側液吸引ノズルとを備え、
前記下流側液吸引ノズルおよび前記上流側液吸引ノズルと、前記搬送機構によって搬送されるときのウェーハの表面との距離は、1mm〜2mmであり、
前記下流側液吸引ノズルと前記上流側液吸引ノズルとの間の距離は、ウェーハの直径の3分の1〜ウェーハの直径の2分の1であることを特徴とするウェーハ乾燥装置。 - 前記液吸引ノズルは円筒状であることを特徴とする請求項1に記載のウェーハ乾燥装置。
- 前記不活性ガス噴射ノズルは、ウェーハの直径よりも長いスリットノズルから構成されることを特徴とする請求項1または2に記載のウェーハ乾燥装置。
- 前記不活性ガス噴射ノズルは、前記搬送機構によって搬送されるときのウェーハの表面に対して、45度〜85度の範囲内の角度で傾斜していることを特徴とする請求項1乃至3のいずれか一項に記載のウェーハ乾燥装置。
- 前記不活性ガス噴射ノズルは、前記搬送機構によって搬送されるときのウェーハの表面から1mm〜4mmの距離に位置していることを特徴とする請求項1乃至4のいずれか一項に記載のウェーハ乾燥装置。
- 不活性ガスが供給された乾燥室内でウェーハを搬送する搬送機構と、
前記搬送機構の上方に配置され、ウェーハに対して不活性ガスの下降噴流を形成するための不活性ガス噴射ノズルと、
ウェーハの搬送方向に関して前記不活性ガス噴射ノズルの上流側に配置された下流側液吸引ノズルと、前記下流側液吸引ノズルの上流側に配置された上流側液吸引ノズルとを備え、
前記下流側液吸引ノズルと前記不活性ガス噴射ノズルとの距離が、1mm〜5mmであり、
前記下流側液吸引ノズルと前記上流側液吸引ノズルとの間の距離は、ウェーハの直径の3分の1〜ウェーハの直径の2分の1であることを特徴とするウェーハ乾燥装置。 - 乾燥室内に不活性ガスの下降噴流を形成し、
表面に液膜が存在するウェーハを前記乾燥室内で搬送しながら、前記液膜を、下流側液吸引ノズルで吸引するとともに、上流側液吸引ノズルで吸引することで、前記液膜の厚さを2mm以下にし、
前記不活性ガスの下降噴流によって前記液膜をウェーハから押し出し、
前記下流側液吸引ノズルと前記上流側液吸引ノズルとの間の距離は、ウェーハの直径の3分の1〜ウェーハの直径の2分の1であることを特徴とするウェーハ乾燥方法。 - 前記乾燥室内の酸素濃度を0.5%以下に維持することを特徴とする請求項7に記載のウェーハ乾燥方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2015124538A JP6367763B2 (ja) | 2015-06-22 | 2015-06-22 | ウェーハ乾燥装置およびウェーハ乾燥方法 |
US15/186,352 US10229841B2 (en) | 2015-06-22 | 2016-06-17 | Wafer drying apparatus and wafer drying method |
SG10201605035VA SG10201605035VA (en) | 2015-06-22 | 2016-06-20 | Wafer drying apparatus and wafer drying method |
KR1020160077579A KR20160150601A (ko) | 2015-06-22 | 2016-06-21 | 웨이퍼 건조 장치 및 웨이퍼 건조 방법 |
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JP2015124538A JP6367763B2 (ja) | 2015-06-22 | 2015-06-22 | ウェーハ乾燥装置およびウェーハ乾燥方法 |
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JP2017011083A JP2017011083A (ja) | 2017-01-12 |
JP2017011083A5 JP2017011083A5 (ja) | 2017-11-02 |
JP6367763B2 true JP6367763B2 (ja) | 2018-08-01 |
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JP6367763B2 (ja) * | 2015-06-22 | 2018-08-01 | 株式会社荏原製作所 | ウェーハ乾燥装置およびウェーハ乾燥方法 |
BR112018013095B1 (pt) * | 2016-03-29 | 2023-04-18 | Nippon Steel Corporation | Método para remoção de líquidos |
KR102326012B1 (ko) * | 2019-12-13 | 2021-11-15 | 세메스 주식회사 | 박막 식각 방법 및 장치 |
CN111463152B (zh) * | 2020-04-17 | 2023-03-14 | 重庆芯洁科技有限公司 | 半导体衬底的高压水洗设备及其使用方法 |
JP7451324B2 (ja) * | 2020-06-26 | 2024-03-18 | 株式会社荏原製作所 | 基板処理装置および基板処理方法 |
CN112665324B (zh) * | 2020-12-28 | 2022-04-15 | 安徽省元进金元钙业有限公司 | 一种用于生石灰生产的原料干燥流水线 |
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CN114562874B (zh) * | 2022-03-02 | 2023-07-04 | 浙江光特科技有限公司 | 一种用于晶圆清洗后烘干处理装置 |
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US20160372344A1 (en) | 2016-12-22 |
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SG10201605035VA (en) | 2017-01-27 |
JP2017011083A (ja) | 2017-01-12 |
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