1359775 100年丨2月6日修正替換百 九、發明說明： 、 【發明所屬之技術領域】 . 本發明係關於在製造壓電振動器等電子元件之製程中 收容電子元件的托盤。 【先前技術】 例如於壓電振動器的製造過程中，爲了對收容壓電振 動片之多個較小的基座進行批次處理，如圖6所示，係使 •用形成有多個收納部31，31之平板狀托盤32，該收納部31 31由分別收容具有壓電振動片之各振動器底座3〇, 3〇的凹 部構成。 將上述壓電振動片等電子元件（以下稱爲工件），在其製 造過程中加以保持、收容的托盤，爲了防止因靜電引起之 工件破損、被吸附至托盤，必須是表面電阻率低者，此外， 亦要求高加工精度、對於製造過程中高溫、氣體、藥品等 的耐熱性、耐蝕性等化學穩定性、對於滑動、摩擦等= ®磨性:f物理特性。 ^ f請人公司前曾開發出在成形加工成所需形狀的母材 表面’形成硬質被膜的托盤（參照專利文獻丨），已廣泛地 用化》 s /實 但是，如圖7所示，工件33多為將複數個構件33~ 3% 以黏著劑34加以彼此貼合的結構，有時會從剛貼合構件3 33b後的工件33周邊溢出多餘的黏著劑34而附著在收納部’ 31的内壁31a。又，作爲上述工件，有在以例如由陶瓷、^ 1359775 .± 100年12月6曰修正替換頁 成樹脂、非鐵金屬、玻璃等形成之作為上部構件…之 體的下部，泰著以玻璃、非鐵金屬'合成樹脂等作爲2 :料之作為下部構件33b的蓋者，作爲黏著劑，有為進二 =柄者、例如㈣點玻璃㈣金屬礦物類黏著劍、 r m等的合成樹脂類黏著劑，亦有 著的錫谭、銀痒等金屬類黏著劑。 電子方式點 作爲電子元件的工件，其加工、保f、 潔淨度非常高的環境下進 ^ 要在 上㈣h… 出工件後的收納部内壁 =奢並殘留有黏著劑時，會對產品品f管理帶來重 良景H黏著劑㈣在内壁的狀 納部31進行工件33之取出與置入時之障礙，=對收 進:加工時降低定位精度的原因，亦即成爲産生不良= 耗費ΪΓ 後之托盤完成除去黏著劑的步驟非常 耗費：力’將成爲導致電子元件製造成本增加的原因“ 開2003 - 192086(第1〜7頁、圖卜13) 【發明内容】 本發明之目的在提供一種 從作爲被收容物之I# d 疋牛收容用托盤，即使 附著並殘留在收納部内壁的^黏著劑，也不會有黏著劑 办度，且能相對收執部順暢 寻托盤之… 及正確的定位。 牛之取出與置入、以 爲解決上述問題，本發明請求 $ 1之托盤，其上面具 1359775 . 100年12月6 a修正替換頁 #用以收容電子it件的多個收納部；各收納部具備用以支 . 撐電子元件底部的支撐機構，與限制收納部内電子元件之 水平方向運動的水平運動限制機構；於該水平運動限制機 構與該支樓機構之間形成橫槽部，即使從收容於收納部内 之=子元件溢出在該電子元件《製造時所使用之黏著劑， 該橫槽部構成為黏著劑之排出部，以避免黏著劑附著在托 盤。 本發明請求項2之托盤中’該收納部之内壁，上部形 成朝向上方外側擴展的傾斜面’於下部形成有該橫槽部； 以該傾斜面之下邊部與橫槽部之上邊部間之向内側突出的 部分構成該水平運動限制機構。 本發明請求項3之托盤中，該支撐機構形成在較收納 部内底面高的位置。 根據本發明，即使從收容於收納部内之工件周邊溢出 黏：劑，由於收納部之内壁下部為橫槽部而凹陷，因而幾 g 乎沒有直接附著在托盤上的問題。 因此，能防止因黏著劑之附著所引起之工件污染、取 出置入工件時工件、托盤的損傷，順暢地進行工件加工。 此外，將支撐機構設在較收納部内底面更高的位置， 可幾乎完全消除黏著劑附著至收納部内底面的問題，並且 在收容底面具有端子的電子元件時，亦具有防止端子與收 納部内底面直接接觸、從而防止端子損傷的優點。、 【實施方式】 1359775 100年12月6日修正替換頁 以下，根據附圖所示之具體例詳細說明本發明之實施 例。 本實施例之托盤i，在作爲母材之鋁等金屬板、玻璃板 或合成樹脂板之上面，如圖丨〜圖3所示，設有由用以分別 收容多個工件2, 2(電子元件）之凹部才籌成之多數的小收納部 3’ 3,如圖2放大所示，各收納部3形成為如工件周邊形狀 的大致長方形’在四角及長邊中央分別形成有圓弧狀的缺 口部4, 4’此外，在收納部中央形成有連通托盤上下面的孔 5 ° 又，工件相對托盤1之取出與置入原則上係以自動化 機械進行，但設有上述缺口部4, 4以便操作人㈣用鎮子 等治具取出與置入工件。 又，在上述各收納部3内，工件2之支撐機構的支撐 段部6係設在較内底面3&高的位置，於該支撐段部6與内 2面3a之間設有引導傾斜部7,該引導傾斜部7係傾斜收 容工件時用以將工件導向支撐段部上。 從上述支撐段部6向上方立起之内壁8，其上部形成為 向上方擴張的錐面9,下部則設置具有向下方擴張之傾斜面 的橫槽部1 〇 ^ 上述錐面9之傾斜，係為了在收納部3中收容工件2 時旎順利進行.引導而設，相對於垂直軸例如形成3。左右的 傾斜度。 、 又，上述橫槽部10之傾斜，係設置成傾斜面不致與從 工件2之上部構件2a與下部構件孔間之接合部向周邊部溢 1359775 100年12月6日修正替換頁 出之黏者劑11接觸程度的傾斜，例如設置成相對垂直抽成 10左右的傾斜度’此傾斜度，係根據卫件部之尺寸、上部 構件與下部構件之結合部在的上下方向之位置、以及可能 從工件周邊部溢出之黏著劑溢出尺寸來適t地加以設定。 形成於錐面9於橫槽部10間之稜線部12，其向收納部 中央方向最為突出，該稜線部12係作用為限制工件之水平 方向運動的水平運動限制機構。 又，本實施例中，雖係以稜線部12構成上述水平運動 限制機構，工件與水平運動限制機構進行線接觸，但亦可 作成為在上述錐面9與橫槽部10之間設置垂直表面部而進 行面接觸，亦可對上述稜線部賦予凹凸以進行點接觸。 此外，雖省略圖示，但在托盤丨的整個表面形成有厚 度約為0.2〜30// m之金屬被膜，並進一步在該金屬被膜外 側以大約0.5〜5 μ m之均勻厚度形成有由以氮化物之 ON、TiN ' TiAIN構成的氮化物被膜。 上述金屬被膜，係由N i形成之金屬被膜與在其外側由 Cr形成之金屬被膜構成，又，上述氮化物被膜係由較軟質 的CrN、TiN、TiAlN薄膜與較其硬質的CrN薄膜交互貼附， 且在最外側進一步覆蓋硬質的精加工用CrN、TiN、TiAIN 薄膜的積層膜構成^ •.如上所述地在托盤1表面形成金屬被膜與氮化物被膜 時’金屬被膜會良好的密合於托盤之母材，且氮化物薄膜 中較軟質的CrN、TiN、TiAIN薄膜其對金屬被膜表面之密 合性良好’藉由在其上積層硬質的CrN薄膜，即能獲得整 9 1359775 100年12月6日修正替換頁 體可發揮所欲之的良好機械特性與化學敎性、且密合性 良好的氮化物被膜’藉由以氮化物被膜覆蓋金屬被膜，即 能解決在母材表面上僅形成金屬被膜時所產生之高溫下的 被膜變色、剥離以及裂紋等問題。另外，亦有僅以奶被膜 構成金屬被膜之情形。1359775 100 丨 丨 丨 丨 丨 百 、 、 、 、 、 、 、 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] For example, in the manufacturing process of the piezoelectric vibrator, in order to batch-process a plurality of small susceptors that house the piezoelectric vibrating piece, as shown in FIG. The flat trays 32 of the portions 31 and 31 are constituted by recesses for accommodating the vibrator bases 3, 3, respectively, of the piezoelectric vibrating reed. The electronic component (hereinafter referred to as a workpiece) such as the piezoelectric vibrating piece is held and stored in a tray during the manufacturing process, and in order to prevent damage to the workpiece due to static electricity and to be adsorbed to the tray, it is necessary to have a low surface resistivity. In addition, high processing precision, chemical stability such as heat resistance and corrosion resistance of high temperature, gas, and chemicals in the manufacturing process, and sliding properties such as sliding, friction, and the like are required. ^ f Please ask the company to develop a tray that forms a hard film on the surface of the base material that is formed into a desired shape (refer to the patent document 丨), which has been widely used. s / real, however, as shown in Figure 7, In the workpiece 33, a plurality of members 33 to 3% are bonded to each other by the adhesive 34, and the excess adhesive 34 may be overflowed from the periphery of the workpiece 33 immediately after the bonding member 33b to adhere to the housing portion. The inner wall 31a of 31. Further, as the above-mentioned workpiece, there is a lower portion which is formed of a resin, a non-ferrous metal, a glass, or the like, which is formed of, for example, ceramic, ^1359775. Non-ferrous metal 'synthetic resin, etc. as the cover of the lower member 33b as the second material, as the adhesive, there are synthetic resin such as (for) four-handle, for example, (four) point glass (four) metal mineral-based adhesive sword, rm, etc. Adhesives, also have a metal adhesive such as tin tan, silver itching. The electronic method is used as the workpiece of the electronic component, and the processing, the f, and the cleanliness are very high. The upper part (4) h... The inner wall of the accommodating part after the workpiece is released. If the adhesive remains on the luxury product, the product f The management brings about a good view H adhesive (4) Obstacles when the workpiece 33 is taken out and placed in the inner wall portion 31. = Retraction: The reason for lowering the positioning accuracy during processing, that is, the defect is generated = the cost is ΪΓ The step of removing the adhesive from the tray is very expensive: the force 'will be the cause of the increase in the manufacturing cost of the electronic component." Open 2003 - 192086 (pages 1 to 7, FIG. 13) [Invention] The object of the present invention is to provide a From the I# d yak-receiving tray as the contained object, even if the adhesive adheres to the inner wall of the accommodating portion, there is no adhesive agent, and the tray can be smoothly found with respect to the receiving portion... The present invention requests a tray of $1, and the upper mask 1359775. The middle portion has a support mechanism for supporting the bottom of the electronic component, and a horizontal motion restricting mechanism for restricting the horizontal movement of the electronic component in the storage portion; a horizontal groove portion is formed between the horizontal motion restricting mechanism and the branch mechanism, even if The sub-element contained in the accommodating portion overflows the adhesive used in the production of the electronic component, and the lateral groove portion is configured as a discharge portion of the adhesive to prevent the adhesive from adhering to the tray. The tray of claim 2 of the present invention The inner wall of the accommodating portion is formed with an inclined surface that extends toward the upper side in the upper portion, and the lateral groove portion is formed in the lower portion; and a portion that protrudes inward between the lower edge portion of the inclined surface and the upper side portion of the lateral groove portion The horizontal movement restricting mechanism. In the tray of claim 3, the support mechanism is formed at a position higher than the inner bottom surface of the accommodating portion. According to the present invention, even if the adhesive is spilled from the periphery of the workpiece accommodated in the accommodating portion, the inner wall of the accommodating portion The lower portion is recessed by the lateral groove portion, so that there is a problem that there is no direct attachment to the tray. Therefore, it is possible to prevent the attachment due to the adhesive. The workpiece is contaminated, the workpiece and the tray are damaged when the workpiece is placed, and the workpiece is smoothly processed. Further, the support mechanism is disposed at a higher position than the bottom surface of the housing portion, and the adhesion of the adhesive to the bottom surface of the housing portion can be almost completely eliminated. The problem is that when the electronic component having the terminal on the bottom surface is housed, it also has the advantage of preventing the terminal from directly contacting the inner bottom surface of the accommodating portion, thereby preventing the terminal from being damaged. [Embodiment] 1359775 December 6, 100 revised replacement page below, according to The embodiment of the present invention will be described in detail with reference to the specific examples shown in the drawings. The tray i of the present embodiment is shown on the top of a metal plate such as aluminum as a base material, a glass plate or a synthetic resin plate, as shown in FIG. A small accommodating portion 3' 3 which is formed by a plurality of recesses for accommodating a plurality of workpieces 2, 2 (electronic components) is provided, and as shown in an enlarged view in FIG. 2, each accommodating portion 3 is formed in a shape like a periphery of a workpiece. The substantially rectangular shape is formed with arc-shaped notches 4, 4' at the center of the four corners and the long sides, and a hole 5 is formed in the center of the storage portion to connect the upper and lower sides of the tray. The work pallet 1 relative to the automated machinery for extraction based on the principle of placement, but is provided with the notch portions 4, 4 to the operator (iv) taking out the town and the like into the workpiece fixture. Further, in each of the accommodating portions 3, the support portion 6 of the support mechanism of the workpiece 2 is disposed at a position higher than the inner bottom surface 3', and a guide inclined portion is provided between the support portion 6 and the inner 2 surface 3a. 7. The guiding inclined portion 7 is for guiding the workpiece to the supporting section when the workpiece is tilted. The inner wall 8 which rises upward from the support segment portion 6 is formed with a tapered surface 9 which is expanded upward, and a lower portion of the lower surface portion 1 which has an inclined surface which is expanded downward, and the inclination of the tapered surface 9 is When the workpiece 2 is housed in the accommodating portion 3, it is smoothly guided and guided, and is formed, for example, by 3 with respect to the vertical axis. The inclination of the left and right. Further, the inclination of the lateral groove portion 10 is such that the inclined surface does not overlap with the peripheral portion from the joint portion between the upper member 2a and the lower member hole of the workpiece 2 to the peripheral portion, and the adhesive sheet is replaced by the replacement page on December 6, 100. The inclination of the contact degree of the agent 11 is, for example, set to be inclined to about 10 degrees with respect to the vertical direction. This inclination is based on the size of the guard portion, the position of the joint portion of the upper member and the lower member in the up and down direction, and possibly The size of the adhesive overflow from the peripheral portion of the workpiece is appropriately set. The ridge line portion 12 formed between the tapered surface 9 and the lateral groove portion 10 protrudes most toward the center of the accommodating portion, and the ridge portion 12 functions as a horizontal motion restricting mechanism that restricts the horizontal movement of the workpiece. Further, in the present embodiment, the horizontal movement restricting mechanism is constituted by the ridge portion 12, and the workpiece is in line contact with the horizontal movement restricting mechanism, but a vertical surface may be provided between the tapered surface 9 and the lateral groove portion 10. The surface contact is performed, and the ridge line portion may be provided with irregularities for point contact. Further, although not shown in the drawings, a metal film having a thickness of about 0.2 to 30/m is formed on the entire surface of the tray, and further formed with a uniform thickness of about 0.5 to 5 μm outside the metal film. A nitride film composed of nitride ON and TiN 'TiAIN. The metal film is composed of a metal film formed of Ni and a metal film formed of Cr on the outer side thereof, and the nitride film is made of a relatively soft CrN, TiN, TiAlN film and a relatively hard CrN film. In addition, the laminated film structure of the CrN, TiN, and TiAIN film for hard finishing is further covered on the outermost side. When the metal film and the nitride film are formed on the surface of the tray 1 as described above, the metal film is well adhered. In the base material of the tray, the softer CrN, TiN, and TiAIN films in the nitride film have good adhesion to the surface of the metal film. By stacking a hard CrN film thereon, the whole 9 1359775 100 years can be obtained. On December 6th, the replacement of the replacement page body can achieve the desired good mechanical properties and chemical properties, and the nitride film with good adhesion can be solved on the surface of the base material by covering the metal film with a nitride film. Problems such as discoloration, peeling, and cracking of the film at a high temperature generated when only the metal film is formed. Further, there is a case where the metal film is formed only by the milk film.
上述本發明之托盤，係藉由在收納部3之下半部向外 :則擴張之橫槽部10’來防止從工件2之接合部溢出的黏著 :黏耆於托盤’亦即，橫槽部1〇能發揮排出黏著劑之排出 部的作用，消除因黏著劑附著在托盤而引起的問題。 /丨血因此，本發明之托盤的橫槽部，不-定須如上述實施 1::構成為具有向下方擴張之傾斜面的形狀，只要是能 '為#著劑之排出部即可’例如，如圖4所示，可構成 二：截面形狀爲凹陷成圓弧狀的橫槽部U，亦可如圖5所 π ’形成為方槽狀的橫槽部14。 【圖式簡單說明】 圖1係顯示本發明托盤之實施例的俯視圖。 圖2係收納部的放大俯視圖。 圓3係圖2之III一 ΙΠ線縱截面圖。 圖4顯示本發明托盤另-例之收納部的放大縱截面圖。 圖5係顯示本發明托盤再一例'之放納部的放大縱截面 圖6係顯示習知托盤例的俯視圖。 圖7係顯示習知托盤之收納部部分的放大縱截面圖。 1359775 « · · 曰修正替換頁 * 100年12月The above-described tray of the present invention prevents adhesion from the joint portion of the workpiece 2 by the outwardly extending half of the accommodating portion 3: the expanded lateral groove portion 10': sticking to the tray', that is, the transverse groove The portion 1 can function as a discharge portion for discharging the adhesive, thereby eliminating problems caused by adhesion of the adhesive to the tray. / 丨 因此 因此 因此 因此 因此 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘 托盘For example, as shown in FIG. 4, the transverse groove portion U having a cross-sectional shape which is recessed into an arc shape may be formed, and the lateral groove portion 14 may be formed in a square groove shape as shown in FIG. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an embodiment of a tray of the present invention. Fig. 2 is an enlarged plan view of the accommodating portion. Circle 3 is a longitudinal section of the 一 line of Figure III. Fig. 4 is an enlarged longitudinal sectional view showing a housing portion of another embodiment of the tray of the present invention. Fig. 5 is an enlarged longitudinal sectional view showing a portion of the tray of the present invention. Fig. 6 is a plan view showing an example of a conventional tray. Fig. 7 is an enlarged longitudinal sectional view showing a portion of a accommodating portion of a conventional tray. 1359775 « · · 曰Revision replacement page * December, 100
【主要元件符號說明】 1 托盤 2 工件 3 收納部 4 缺口部 5 孔 6 支撐段部 7 引導傾斜部 8 内壁 9 錐面 10， 13， 14 橫槽部 11 黏著劑 12 棱線部[Description of main component symbols] 1 Tray 2 Workpiece 3 Storage part 4 Notch part 5 Hole 6 Support section 7 Guide inclined part 8 Inner wall 9 Conical surface 10, 13, 14 Horizontal groove part 11 Adhesive agent 12 Ripple part