JP2001223252A - Suctionless hand of robot - Google Patents
Suctionless hand of robotInfo
- Publication number
- JP2001223252A JP2001223252A JP2000029284A JP2000029284A JP2001223252A JP 2001223252 A JP2001223252 A JP 2001223252A JP 2000029284 A JP2000029284 A JP 2000029284A JP 2000029284 A JP2000029284 A JP 2000029284A JP 2001223252 A JP2001223252 A JP 2001223252A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hand
- slip
- holding
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、ガラス基板やウ
ェハ等の基板を保持して搬送するロボットのハンドにお
いて、基板を吸着することなく保持できるロボットの吸
着レスハンドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot hand for holding and transporting a substrate such as a glass substrate or a wafer, and more particularly to a suction-less hand for a robot capable of holding a substrate without suction.
【０００２】[0002]
【従来の技術】ロボットのハンドは、カセット内に収納
されているガラス基板やウェハ等の基板、又は処理ステ
ージに載置されている基板を保持して搬送するために、
ロボットのアームに連結されて駆動されている。ハンド
は、一般に、ロボットのアームに枢着される元部と基板
を保持する基板保持部とを有して形成されている。従来
から採用されている主なるハンド２０は、図７に示すよ
うに、基板保持部２２に空気用パイプ２４に接続された
複数の吸着パット２３を設けて基板Ｗを吸着するように
構成されたり、別のハンド２５は、図８に示すように、
基板保持部２７に凹部２８を形成して凹部２８内に基板
Ｗを落し込み、基板端を保持できるように構成されてい
た。2. Description of the Related Art A robot hand holds and transports a substrate such as a glass substrate or a wafer stored in a cassette or a substrate placed on a processing stage.
It is connected to and driven by a robot arm. The hand is generally formed to have a base unit pivotally attached to an arm of a robot and a substrate holding unit for holding a substrate. As shown in FIG. 7, a main hand 20 conventionally used is configured to provide a plurality of suction pads 23 connected to an air pipe 24 in a substrate holding unit 22 to suction a substrate W. , Another hand 25, as shown in FIG.
The concave portion 28 is formed in the substrate holding portion 27, the substrate W is dropped into the concave portion 28, and the edge of the substrate can be held.
【０００３】[0003]
【発明が解決しようとする課題】しかし、基板は各種の
加工工程で処理されて搬送されるので、各加工工程によ
っては、例えば、成膜処理加工された基板は、熱の影響
で基板自体が撓みを有したままで搬送されることがあ
る。また、特に大型化されたガラス基板では、重量によ
り自然に下方に撓んでいる。従って、上記のような撓み
のある基板を搬送する場合、ガラス基板やウェハ等の基
板を吸着するように構成された従来のハンド２０では、
基板Ｗの吸着面は、ハンド２０の基板保持部２２に形成
された吸着パット２３に必ずしも全面的に接していると
は限らない。このような場合、空気漏れが生じて基板Ｗ
を保持しにくく、搬送途中に基板Ｗがずれたりまたは落
下してしまうおそれがあった。However, since the substrate is processed and transported in various processing steps, depending on each processing step, for example, a substrate that has been subjected to a film forming process may be affected by heat. In some cases, the sheet may be conveyed while being bent. Further, especially in a large-sized glass substrate, the glass substrate naturally bends downward due to its weight. Therefore, in the case of transporting a substrate having the above-described bending, the conventional hand 20 configured to adsorb a substrate such as a glass substrate or a wafer,
The suction surface of the substrate W does not always completely contact the suction pad 23 formed on the substrate holding portion 22 of the hand 20. In such a case, air leakage occurs and the substrate W
Is difficult to hold, and the substrate W may shift or drop during the transfer.
【０００４】また、ハンド２５の基板保持部２７に凹部
２８を形成して基板Ｗを落し込むように形成したハンド
２５では、撓みのある基板Ｗは、基板端で保持されず
に、基板端より内部で支持されるため、基板Ｗを傷つけ
やすかった。Further, in the hand 25 in which the concave portion 28 is formed in the substrate holding portion 27 of the hand 25 so that the substrate W is dropped, the bent substrate W is not held at the substrate end, but is held at the substrate end. Because it was supported inside, the substrate W was easily damaged.
【０００５】この発明は、上述の課題を解決するもので
あり、基板が反って撓んでいても基板を傷つけることな
く確実に保持して搬送できるロボットの吸着レスハンド
を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problem, and an object of the present invention is to provide a suctionless hand of a robot capable of securely holding and transporting a substrate without damaging the substrate even if the substrate is warped and bent. .
【０００６】[0006]
【課題を解決するための手段】この発明にかかわるロボ
ットの吸着レスハンドでは、上記の課題を解決するため
に、以下のように構成するものである。すなわち、基板
を保持するハンド上に、基板保持部材が配設され、前記
基板保持部材に、滑り止め部が形成されていることを特
徴とするものである。SUMMARY OF THE INVENTION A suctionless hand of a robot according to the present invention has the following configuration to solve the above-mentioned problems. That is, a substrate holding member is provided on a hand for holding a substrate, and the substrate holding member is formed with a non-slip portion.
【０００７】また、前記滑り止め部が、凹凸状に形成さ
れていることが望ましい。Further, it is desirable that the anti-slip portion is formed in an uneven shape.
【０００８】さらに、前記基板保持部材が、前記ハンド
に着脱可能に配設されていればなおよい。Furthermore, it is more preferable that the substrate holding member is detachably provided on the hand.
【０００９】[0009]
【発明の効果】本発明によれば、ロボットの吸着レスハ
ンドは、上述のように、ハンド上に滑り止め部を有する
基板保持部材を設けて基板を保持するように構成してい
る。そのため、熱の影響や大型のガラス基板のように撓
みのある基板を、撓んだ状態のまま基板の位置ずれを起
こすことなく安定して保持することが可能となる。しか
も、ハンドの内部に空気通路を形成することがないた
め、ハンド自体を薄形状に形成することができる。According to the present invention, the suctionless hand of the robot is configured to hold a substrate by providing a substrate holding member having a non-slip portion on the hand as described above. Therefore, it is possible to stably hold a flexible substrate such as a large glass substrate due to the influence of heat without causing a displacement of the substrate in a bent state. In addition, since no air passage is formed inside the hand, the hand itself can be formed in a thin shape.
【００１０】また、滑り止め部の上面を凹凸状に形成す
れば、基板の保持面に対して接触面積を小さくできるの
で、摩擦抵抗を大きくして基板のずれを防止し、安定し
た基板の保持を行なうことができる。If the upper surface of the non-slip portion is formed in an uneven shape, the contact area with respect to the holding surface of the substrate can be reduced, so that the frictional resistance can be increased to prevent the substrate from shifting and to stably hold the substrate. Can be performed.
【００１１】さらに、基板保持部材をハンドに着脱可能
に装着して、ハンドに基板保持部材の取付位置を適宜変
更できるようにすれば、基板を保持する幅の位置を調整
することができる。Further, if the substrate holding member is detachably mounted on the hand so that the mounting position of the substrate holding member on the hand can be appropriately changed, the position of the width for holding the substrate can be adjusted.
【００１２】[0012]
【発明の実施の形態】以下、この発明の一実施の形態を
図面に基づいて説明する。以下に説明するロボットの吸
着レスハンド（以下、ハンド１という）は、ガラス基板
を保持して搬送するのに好適なハンドであり、図１に示
すように、図示しないロボットのアームに枢着される元
部２と元部２から二分岐されて先端に向かって延設され
基板Ｗの下面を保持する基板保持部３とを有している。
二分岐された各基板保持部３の先端部と中央部には、基
板Ｗずれ防止用の滑り止め部１０ａを上部に有する基板
保持部材（以下滑り止めシート１０という）が各２か所
づつ幅方向に並設するように装着されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. A suctionless hand (hereinafter referred to as a hand 1) of a robot described below is a hand suitable for holding and transporting a glass substrate, and is pivotally attached to a robot arm (not shown) as shown in FIG. And a substrate holding portion 3 that is bifurcated from the base portion 2 and extends toward the front end to hold the lower surface of the substrate W.
A substrate holding member (hereinafter referred to as a non-slip sheet 10) having a non-slip portion 10a for preventing the substrate W from slipping is provided at each of two ends of the bifurcated substrate holding portion 3 at the front end portion and the central portion thereof. It is mounted so as to be juxtaposed in the direction.
【００１３】滑り止めシート１０は、熱安定性がよい弾
性部材、例えば、シリコーンゴム等を有して形成され、
基板Ｗを傷つけることなく基板Ｗに対して摩擦力を有し
ている。この滑り止めシート１０は、円板状に形成さ
れ、図２（ａ）に示すように、基板保持部３の上面に形
成された凹部３１に接着して取り付けられるか、また
は、図２（ｂ）に示すように、凹部３１にねじ止めで取
りつけられ、その上面はハンド１の基板保持部３の上面
より上方に突出している。The anti-slip sheet 10 is formed of an elastic member having good thermal stability, for example, silicone rubber or the like.
It has a frictional force on the substrate W without damaging the substrate W. This non-slip sheet 10 is formed in a disk shape and is attached by bonding to a concave portion 31 formed on the upper surface of the substrate holding portion 3 as shown in FIG. As shown in ()), it is attached to the recess 31 by screwing, and its upper surface protrudes above the upper surface of the substrate holding portion 3 of the hand 1.
【００１４】図２（ａ）のように、基板保持部３の凹部
３１に接着して取り付ける場合には、滑り止めシート１
０は滑り止め部１０ａを含んで弾性部材で一体的に形成
されている。As shown in FIG. 2A, in the case where the anti-slip sheet 1 is attached to the concave portion 31 of the substrate holding portion 3 by adhesion.
Numeral 0 is integrally formed of an elastic member including the non-slip portion 10a.
【００１５】図２（ｂ）のように、ねじ止めで取りつけ
る場合、滑り止めシート１０は、上部に弾性部材で配置
された滑り止め部１０ａと下部に配置する金属製の取付
部１０ｂを接着することによって形成され、基板保持部
３の下面から挿入するねじが取付部１０ｂに螺着できる
ように形成されている。そのため、このねじ止めの滑り
止めシート１０は、取り外しが可能であり、基板Ｗが大
型の場合には、例えば、並設された２か所のうち、それ
ぞれ内側に配置された滑り止めシート１０を外して外側
に配置された滑り止めシート１０だけを取り付けておけ
ば、基板Ｗの撓みに合わせて広幅の状態で保持すること
ができる。As shown in FIG. 2 (b), when mounting with a screw, the non-slip sheet 10 is bonded to a non-slip portion 10a which is disposed on the upper portion by an elastic member and a metal mounting portion 10b which is disposed on the lower portion. This is formed so that a screw inserted from the lower surface of the substrate holding section 3 can be screwed to the mounting section 10b. For this reason, the screw-fastened non-slip sheet 10 can be removed, and in the case where the substrate W is large, for example, the two non-slip anti-slip sheets 10 are arranged inside each other. If only the non-slip sheet 10 disposed outside is attached and removed, it can be held in a wide state in accordance with the bending of the substrate W.
【００１６】滑り止めシート１０の滑り止め部１０ａに
は、上面に凹凸部が形成され、接触する基板Ｗとの摩擦
抵抗を大きくするように形成されている。凹凸部の形状
は、例えば、図３（ａ）のように小円柱突起１１を多数
配列させてもよく、また、図３（ｂ）のように縦、横い
ずれか一方の方向に溝１２を形成するようにしてもよ
く、さらに図３（ｃ）のように、縦方向と横方向にそれ
ぞれ小溝１３、１３を形成して碁盤状にしてもよい。も
ちろん平面状でも構わない。The anti-slip portion 10a of the anti-slip sheet 10 is formed with an uneven portion on the upper surface so as to increase the frictional resistance with the substrate W with which the anti-slip portion 10a comes into contact. For example, as shown in FIG. 3A, a large number of small columnar projections 11 may be arranged in the shape of the uneven portion, and the grooves 12 may be arranged in one of the vertical and horizontal directions as shown in FIG. Alternatively, as shown in FIG. 3C, small grooves 13 may be formed in the vertical and horizontal directions, respectively, to form a grid. Of course, it may be flat.
【００１７】また、滑り止めシート１０の滑り止め部１
０ａの断面形状は、図４（ａ）に示すように、角山１４
形状でもよく、図４（ｂ）のように、先細り山１５形状
でもよい。The anti-slip portion 1 of the anti-slip sheet 10
As shown in FIG.
4 (b), and may be a tapered mountain 15 shape.
【００１８】基板Ｗが、ウェハや小型のガラス基板であ
れば、基板Ｗ自体の撓みは少なく、その下面はほぼ平面
状であるため、上記の滑り止めシート１０は、滑り止め
部１０の上面全体で基板Ｗを保持することができる。When the substrate W is a wafer or a small glass substrate, the substrate W itself is less bent and its lower surface is substantially flat. Can hold the substrate W.
【００１９】一方、基板Ｗが大型のガラス基板や、熱の
影響により反りのある基板であれば、図５に示すよう
に、基板Ｗが撓みにより傾斜面を有するため、滑り止め
シート１０は、滑り止め部１０ａの一端で保持すること
になる。この状態では、滑り止め部１０ａは、基板Ｗに
対して接触する面が小さく摩擦角を有することになるの
で、摩擦抵抗を大きくし基板Ｗのずれ防止をさらに向上
させる。しかも、滑り止め部１０ａが弾性体で形成して
いるために、基板Ｗとの接触面積が小さくても基板Ｗを
傷つけることはない。On the other hand, if the substrate W is a large glass substrate or a substrate warped by the influence of heat, as shown in FIG. 5, since the substrate W has an inclined surface due to bending, the non-slip sheet 10 It will be held at one end of the non-slip portion 10a. In this state, the non-slip portion 10a has a small frictional angle on the surface contacting the substrate W, so that the frictional resistance is increased and the prevention of the displacement of the substrate W is further improved. Moreover, since the non-slip portion 10a is formed of an elastic body, the substrate W is not damaged even if the contact area with the substrate W is small.
【００２０】ハンド１の基板保持部３に、上記のような
滑り止めシート１０を設けることによって、基板Ｗの保
持する位置の幅を調整することが可能である。特に、撓
みのある基板Ｗをそのままの状態（平面状に修正せず）
で搬送したいという要望がある場合、滑り止めシート１
０の滑り止め部１０ｂは、基板Ｗを接触面積を小さくし
て保持するために、基板Ｗを吸着して保持する方法に比
べて、保持する幅を広くしても安定した状態で保持でき
る。そのために、例えば、ハンド１の基板保持部３を元
部２に対して幅方向に移動可能に構成してもよく、ま
た、前述のように幅方向に複数の滑り止めシート１０を
並設させておけば、いずれかの滑り止めシート１０を選
択して保持するようにすることもできる。さらに、ハン
ド１の基板保持部３に幅方向に長穴を形成して、滑り止
めシート１０を幅方向に移動調整可能に取り付けること
も可能である。The width of the position where the substrate W is held can be adjusted by providing the anti-slip sheet 10 on the substrate holding section 3 of the hand 1 as described above. In particular, a state in which the bent substrate W is left as it is (not corrected to a planar shape)
Non-slip sheet 1
In order to hold the substrate W with a small contact area, the non-slip portion 10b can hold the substrate W in a stable state even when the holding width is widened, as compared with a method of holding the substrate W by suction. For this purpose, for example, the substrate holding unit 3 of the hand 1 may be configured to be movable in the width direction with respect to the base unit 2, and a plurality of anti-slip sheets 10 are arranged in the width direction as described above. If so, any one of the non-slip sheets 10 can be selected and held. Furthermore, it is also possible to form an elongated hole in the width direction in the substrate holding part 3 of the hand 1 and attach the anti-slip sheet 10 so as to be movable and adjustable in the width direction.
【００２１】上記のように構成されたハンド１は、図６
に示すように、図示しないロボットにより作動させ、ハ
ンド１をカセット５内に挿入する。この際、ハンド１は
ロボットの作動により、ハンド１の基板保持部３が基板
Ｗの下方に位置するように上下方向に位置調整される。
基板Ｗの大きさによって、二分岐された基板保持部３に
配置されるそれぞれの滑り止めシート１０、１０間は、
適宜な寸法の幅になるように、幅方向に位置調整されて
いる。The hand 1 configured as described above is similar to the hand 1 shown in FIG.
As shown in (2), the hand 1 is inserted into the cassette 5 by being operated by a robot (not shown). At this time, the position of the hand 1 is adjusted vertically by the operation of the robot such that the substrate holding unit 3 of the hand 1 is positioned below the substrate W.
Depending on the size of the substrate W, each of the non-slip sheets 10 and 10 arranged on the bifurcated substrate holding unit 3 has
The position is adjusted in the width direction so that the width has an appropriate dimension.
【００２２】ハンド１が、基板Ｗの下方で基板Ｗを保持
する位置に達すると、ハンド１は図示しないロボットの
作用で微速で上昇する。ハンド１の上昇によって、滑り
止めシート１０の滑り止め部１０ａが基板Ｗの下面に接
触し基板Ｗを持ち上げる。この際、基板Ｗが撓みのない
状態でハンド１に保持される場合には、滑り止めシート
１０は滑り止め部１０ａの上面全体で基板Ｗを保持し、
基板Ｗが撓みを有していれば、滑り止め部１０ａは摩擦
角を有して基板Ｗを保持することになる。When the hand 1 reaches a position below the substrate W to hold the substrate W, the hand 1 moves up at a very low speed by the action of a robot (not shown). As the hand 1 rises, the non-slip portion 10a of the non-slip sheet 10 contacts the lower surface of the substrate W and lifts the substrate W. At this time, when the substrate W is held by the hand 1 without bending, the non-slip sheet 10 holds the substrate W on the entire upper surface of the non-slip portion 10a,
If the substrate W has a bend, the non-slip portion 10a will hold the substrate W with a friction angle.
【００２３】基板Ｗは重量があるため、摩擦角を有して
保持する滑り止めシート１０の摩擦抵抗をさらに大きく
して、基板Ｗの安定した保持を行なう。Since the substrate W is heavy, the friction resistance of the non-slip sheet 10 held with a friction angle is further increased to stably hold the substrate W.
【００２４】上記のように、ハンド１の保持部に滑り止
めシート１０を設けて基板Ｗを保持するようにすれば、
熱の影響や大型のガラス基板Ｗのように撓みのある基板
Ｗを、撓んだ状態のまま安定して保持することが可能と
なる。しかも、ハンド１の内部に空気通路を形成するこ
とがないため、ハンド１自体を薄形状に形成することが
できる。As described above, if the non-slip sheet 10 is provided on the holding portion of the hand 1 to hold the substrate W,
It is possible to stably hold a substrate W that is bent, such as the influence of heat or a large glass substrate W, in a bent state. Moreover, since no air passage is formed inside the hand 1, the hand 1 itself can be formed in a thin shape.
【００２５】また、滑り止め部１０ａの上面を凹凸状に
形成すれば、基板Ｗの保持面に対して接触面積を小さく
できるので、摩擦抵抗を大きくして基板Ｗのずれを防止
し、安定した基板Ｗの保持を行なうことができる。Further, if the upper surface of the anti-slip portion 10a is formed in an uneven shape, the contact area with respect to the holding surface of the substrate W can be reduced. The substrate W can be held.
【００２６】さらに、滑り止めシート１０を着脱可能に
装着して、ハンドに基板保持部材の取付位置を適宜変更
できるようにすれば、基板Ｗを保持する幅の位置を調整
することができる。Further, if the non-slip sheet 10 is removably mounted so that the mounting position of the substrate holding member on the hand can be changed as appropriate, the position of the width for holding the substrate W can be adjusted.
【００２７】なお、滑り止めシート１０は、その形状や
取付位置は、上記に限るものではない。例えば、外径を
角状に形成してもよく、また上面を基板Ｗの撓み状態に
合わせて傾斜面にしてもよい。いずれも基板Ｗを傷つけ
ない材質であればよい。The shape and the mounting position of the non-slip sheet 10 are not limited to those described above. For example, the outer diameter may be formed in a square shape, and the upper surface may be formed as an inclined surface in accordance with the bent state of the substrate W. Any material may be used as long as it does not damage the substrate W.
【図１】本発明の一形態のハンドを示す平面図FIG. 1 is a plan view illustrating a hand of one embodiment of the present invention.
【図２】滑り止めシートの各装着状態を示す一部断面図FIG. 2 is a partial cross-sectional view showing each mounting state of a non-slip sheet.
【図３】滑り止めシートの各凹凸形状をを示す平面図FIG. 3 is a plan view showing each uneven shape of the anti-slip sheet.
【図４】滑り止めシートの各凹凸形状を示す一部断面図FIG. 4 is a partial cross-sectional view showing each uneven shape of the anti-slip sheet.
【図５】撓みのある基板を滑り止めシートで保持する状
態を示す説明図FIG. 5 is an explanatory view showing a state in which a flexible substrate is held by a non-slip sheet.
【図６】カセット内に収納されている基板を保持する状
態を示す正面断面図FIG. 6 is a front sectional view showing a state of holding a substrate housed in a cassette;
【図７】従来の吸着タイプのハンドを示す一部断面図FIG. 7 is a partial sectional view showing a conventional suction type hand.
【図８】従来の落し込みタイプのハンドを示す一部断面
図FIG. 8 is a partial cross-sectional view showing a conventional drop type hand.
１…ハンド ２…元部 ３…基板保持部 ５…カセット １０…滑り止めシート １０ａ…滑り止め部 １１…小円柱突起部 １２、１３…溝 Ｗ…基板 DESCRIPTION OF SYMBOLS 1 ... Hand 2 ... Base part 3 ... Substrate holding part 5 ... Cassette 10 ... Non-slip sheet 10a ... Non-slip part 11 ... Small cylindrical protrusion part 12, 13 ... Groove W ... Substrate
フロントページの続き Ｆターム(参考） 3C007 DS01 ES02 EV05 EV10 EV16 NS09 NS11 NS17 3F061 AA01 BA02 BE05 BE16 BE26 DB00 DB04 DB06 5F031 CA02 CA05 GA05 GA08 PA13 PA18 Continued on front page F term (reference) 3C007 DS01 ES02 EV05 EV10 EV16 NS09 NS11 NS17 3F061 AA01 BA02 BE05 BE16 BE26 DB00 DB04 DB06 5F031 CA02 CA05 GA05 GA08 PA13 PA18
Claims (3)
材が配設され、前記基板保持部材に、基板ずれ防止用の
滑り止め部が形成されていることを特徴とするロボット
の吸着レスハンド。1. A suctionless hand for a robot, wherein a substrate holding member is provided on a hand for holding a substrate, and a slip preventing portion for preventing substrate displacement is formed on the substrate holding member. .
いることを特徴とする請求項１記載のロボットの吸着レ
スハンド。2. The suctionless hand of a robot according to claim 1, wherein the non-slip portion is formed in an uneven shape.
可能に配設されていることを特徴とする請求項１記載の
ロボットの吸着レスハンド。3. The suctionless hand of a robot according to claim 1, wherein the substrate holding member is detachably provided on the hand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000029284A JP2001223252A (en) | 2000-02-07 | 2000-02-07 | Suctionless hand of robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000029284A JP2001223252A (en) | 2000-02-07 | 2000-02-07 | Suctionless hand of robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001223252A true JP2001223252A (en) | 2001-08-17 |
Family
ID=18554568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000029284A Pending JP2001223252A (en) | 2000-02-07 | 2000-02-07 | Suctionless hand of robot |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001223252A (en) |
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| JP2006261377A (en) * | 2005-03-17 | 2006-09-28 | Ulvac Japan Ltd | Substrate conveyance robot and substrate conveyance system provided with same |
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