TWI342299B - - Google Patents

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TWI342299B
TWI342299B TW95146748A TW95146748A TWI342299B TW I342299 B TWI342299 B TW I342299B TW 95146748 A TW95146748 A TW 95146748A TW 95146748 A TW95146748 A TW 95146748A TW I342299 B TWI342299 B TW I342299B
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Taiwan
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powder
waste liquid
waste
item
electrophoretic deposition
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TW95146748A
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Chinese (zh)
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TW200825027A (en
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Metal Ind Res & Dev Ct
Univ Nat Central
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九、發明說明: 【發明所屬之技術領域】 本發明尤指其提供—種可於廢财_ 而達到貧源再回收利用之回收系統及其方法。 貝源進 【先前技術】 A近年來油價高漲,替代能源的需求日益迫切,造就今 =電產業賴紐展,由於太陽能光電產業與半導體 皆 大量_晶材料’致使全_晶材料嚴重短缺,而半導體 ΐ 仏日日棒鑛切成晶片、乃至於後續“ ί之ϊϋ 原晶棒約3 〇%〜4 〇%之碎晶材料,此等損 形式存在於廢液中,賴廢液巾含有非常 導體工廠近年來,積極投資用水回收設備 ::ΐ、ί== 呈所排放之廢水,其主要的回收標的都是 日收,而並無針對廢液中之微粉體作有效的回收利用。 堂目源的回收技術,係級廢液中分離出粉體及水資源, 紹及二^.祕鐵 '氣化亞鐵、硫酸亞鐵、多元氣化 ίϋίί :活性白土、聚丙稀醯胺等,進行化學混凝, 〇%左右的㈣;另有以柱槽浮選方式結合溶氣壓 的ί2ΐ體’不過可分離出的粉體小於9⑽;此外,更常見 写,過翻方法分離粉體,目前含树的廢水經過過滤 、i^目水和贿縮液,純水回流至I賴續使用,而石夕 ΐ 技術,因未達到再資源化的標準而難以回收再利 = 術發展有所謂結合化學混凝與過⑽、統的複合分離 化學混凝後再流經過渡系統,由於化學混凝係 縮液中的石夕沉澱,其雖可得更高純度的石夕,但 凝法為基無法再利用’因此以化學混 由早的&體分離技術’發展至複合的粉體分離技術,觀察這些 1342299 技術發展的歷程,其目標雖然都在於提高廢液中粉體的回收率, 但其終極目的都是在水資源的回收,對於回收後之粉體,不是未 達到再資源化的標準,就是產生化學變化無法作後續的再利用, 而必須以事業廢棄物的方式進行處理,如此的處理方式,對於資 源的再利用仍有加以改善的空間。 、Nine, the invention description: [Technical field to which the invention pertains] The present invention particularly relates to a recovery system and method thereof that can be used for waste recycling. Bei Yuanjin [Prior Art] In recent years, oil prices have risen, and the demand for alternative energy sources has become increasingly urgent. This is the result of the current industry, the electric power industry and semiconductors are a large number of crystal materials, resulting in a serious shortage of all-crystalline materials. The semiconductor ΐ 仏 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒 棒In recent years, the conductor factory has actively invested in water recycling equipment: ΐ, ί== Wastewater discharged, the main recycling targets are daily harvest, and there is no effective recycling of the fine powder in the waste liquid. The recovery technology of the target source, the powder and water resources are separated from the waste liquid of the system grade, and the second iron, the ferrous iron, the ferrous sulfate, the multi-gasification ίϋίί: the activated clay, the polyacrylamide, etc. Chemical coagulation, about 〇% (4); another column-flotation flotation method combined with dissolved gas pressure ΐ2 ' body's but the separable powder is less than 9 (10); in addition, more common writing, over-pour method to separate powder, currently Tree-containing wastewater is filtered , i ^ eye water and bribe shrinkage liquid, pure water back to I continue to use, and Shi Xixi technology, because it does not reach the standard of re-resources, it is difficult to recycle and re-profit = technical development has so-called combined chemical coagulation and over (10) The compound separation chemical coagulation and then flow through the transition system. Due to the precipitation of the stone in the chemical coagulation system, although it can obtain a higher purity, the condensation method can not be reused. Chemical mixing from early & body separation technology to the development of composite powder separation technology, observe the history of these 1342299 technology development, although the goal is to improve the recovery rate of powder in waste liquid, but its ultimate goal is The recycling of water resources is not a standard for re-recycling of the recovered powder, or the chemical change cannot be reused in the future, but must be treated as a business waste. Such a treatment method is for resources. There is still room for improvement in the reuse.

因此若能將粉體增列為回收再利用的標的,以發展出固狀矽 的新回收技術,使其不僅可將水資源的回收利用率提高,且使回 收矽不產生化學變化,將可改善全球矽晶材料短料之問題,而節 省大量水資源亦可使產業對環境友善度提高,因此這種新回收技 術是值得產業所期待的’以及符合世界環保的潮流。 有鑑於此,本發明人遂以其多年從事相關行業的研發與製作 經驗,針對目前所面臨之問題深入研究,經過長期努力之研究與 試作,終究研創出一種利用磁力、電化學及物理過濾之多階段& 離技術,而可回收獲致不會產生化學變化之粉體及潔淨之水資 源,進而充分達到資源再回收利用的效益,以大幅改盖習 弊’此即為本發明之設計宗旨。 °式之缺 【發明内容】 本發明之主要目的係提供一種廢液中粉體之回收系統及其方 法,其係將廢液流經可控制磁場強度之流道,而利用磁力吸^ 定廢液中之金屬粉體,接著將廢液導入電泳沈積裝置,再施以 壓使電泳沈積裝置產生電場作用,而以電泳沈積法將帶電之 體粒子吸附沈積於電極板上,即可於電極板上蒐集矽粉體粒子^ 最後再將廢液放流至下游端之過濾裝置;藉此,利用磁力、 學及物理過濾之多階段分離技術,即可於廢液中獲致金 不會產生化學變化之矽材料粉體,以供回收或再精煉使用^ 游端潔淨之水資源,則可供循環制用,進純分達 收利用及符合世界環保的潮流的效益。 丨貝源再口 本發明之次一目的係提供一種廢液中粉體之回收 法,其係於電泳沈魏置之下游流道±裝設有_裝置、,以監測 6 1342299 廢液中的粉體顆粒濃声,a 磁場強度之流道及ίς沈時的溶ί、’繼續回流至可控制 至下游之^Γί ΪΓΐ粉體,當粉體濃度降低時,便放^ 體及石夕材料粉體,“大巾5二僅可由f液中充分葱集到金屬粉 去除率達9 9%以上,m南下游過濾器的使用壽命,使濁度 太發明^ 下游處即可獲致潔淨之水資源。 法,其係於可供—種廢液中粉體之回收系統及其方 裝到除機構,道及電泳沈積裝置之電極片上加 體,供回收或再精煉動集中已吸附固定之粉 提高回收使収$並可有效保持吸_能力,進而有效 【實施方式】 管^·= ί審查委μ對本發明作更進—步之瞭解,轉-較佳 實轭例並配合圖式,說明如后: 平办:佳 本發明係利用磁力、電化學以及物理過滤等多階 屬粉體及無化學變化之材料粉體, =煉 於下游频致料之水資源;縣閱第]、 ϋ 了晶材料為例’其於半導體及太陽能光 晶片、乃至於後績拋光製程等,這些製程中曰曰 二0%〜4 0%之石夕晶材料’因此廢液中存在有3 ◦= 糾$細龍力制手段,而麟11上魏設可控制 磁^強度之磁力吸附裝置i 〇,將該廢液流經 = 2道’,磁,裝置丄0之磁力,將廢液中導 理=固定,接著湘電泳沈積手段’而於情端以電化學為學 J基礎’將廢液導人電泳沈積裝置2 Q,該電泳沈積裝置2二Therefore, if the powder can be added as a target for recycling, to develop a new recycling technology for solid waste, so that it can not only improve the recycling rate of water resources, but also make chemical recovery without recycling. Improving the problem of short-term materials in global twinning materials, and saving a lot of water resources can also make the industry more environmentally friendly, so this new recycling technology is worthy of the industry's expectations and the trend of environmental protection in the world. In view of this, the inventor has been engaged in research and development and production experience in related industries for many years, and has conducted in-depth research on the problems currently faced. After long-term efforts and research, he has finally developed a magnetic, electrochemical and physical filtration. Multi-stage & technology, and can recover the powder and clean water that will not produce chemical changes, and fully realize the benefits of resource recycling, so as to greatly modify the disadvantages. This is the design purpose of the invention. . SUMMARY OF THE INVENTION The main object of the present invention is to provide a waste liquid recovery system and a method thereof, which are used to flow waste liquid through a flow path capable of controlling magnetic field strength, and use magnetic force to absorb waste. The metal powder in the liquid, and then the waste liquid is introduced into the electrophoretic deposition device, and then the pressure is applied to cause the electrophoretic deposition device to generate an electric field, and the charged body particles are adsorbed and deposited on the electrode plate by electrophoretic deposition, that is, the electrode plate Collecting powder particles on the surface and finally discharging the waste liquid to the downstream filter unit; thereby, the multi-stage separation technology of magnetic force, learning and physical filtration can obtain gold in the waste liquid without chemical change.矽Material powder for recycling or re-refining. ^ Clean water for swimming, it can be used for recycling, and it can be used for pure utilization and meet the trend of world environmental protection. The second objective of the present invention is to provide a method for recovering powder in waste liquid, which is installed in the downstream flow channel of the electrophoresis sediment, and is equipped with a device to monitor the liquid in the waste liquid of 6 1342299. The powder particles are thick, the magnetic field strength of the flow path and the ς 时 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Powder, "The big towel 5 can only be obtained from the full onion in the f liquid to the metal powder removal rate of more than 9 9%, the service life of the filter in the south and south of the m, so that the turbidity is too invented ^ the clean water can be obtained downstream The method is applied to the recovery system of the powder in the waste liquid and the addition to the electrode sheet of the mechanism, the channel and the electrophoretic deposition device for recovery or re-refining. Improve recycling to make $ and can effectively maintain the ability to absorb, and then effective [Implementation] Tube ^·= 审查 Review Committee μ to further understand the invention, turn----------------------- As after: Ping: Jiaben invention uses magnetic, electrochemical and physical filtration Multi-order powders and powders with no chemical changes, = water resources for refining downstream frequency materials; county reading], ϋ crystal materials for example 'its semiconductor and solar wafers, and even polished Process, etc., in these processes, 曰曰2%~40% of Shixijing material's therefore there are 3 ◦ = $ $ fine dragon force means in the waste liquid, and Lin 11 can control the magnetic strength The magnetic adsorption device i 〇, the waste liquid flows through the = 2 way ', magnetic, the magnetic force of the device 丄 0, the guidance in the waste liquid = fixed, followed by the electrophoretic deposition method of the 'electrophoresis' The basic 'lead waste liquid electrophoretic deposition device 2 Q, the electrophoretic deposition device 2

Jiiil(electrophoretic dep〇siti〇n, epd) ^ 粒子沈積在電極板21上,由於帶電之固體粒 子又到外加電場之影響時,雜子本身會在廢 7 1342299 :或負電)的石夕粒子於廢液中受到外加電場的作 =而朝π負電(或正電)之電極板2 i方向運動,因 直7獅ϋ於電極板2 1-^射晶誠,彻電泳沈積法, 等率快、電泳材質不受拘束 抑,、计ί备ίί優最重要的還有經此技術分離所得之石夕 產生化學變化,而有利於石夕晶粉體之回收再利用; 隹f理職及化學手段,將廢液放流至下游端之過漁裝 fnt理過濾’而廢液中之化學添加劑的去除,係業者習 ίϋί ίϊΐ述;另於電泳沈積裝置2 ◦與過遽裝=〇 ==以〇,以監測廢液中的粉體=ίΐ ΐ:ΐ=,時,可使廢液繼續回流至磁力吸附裝置1 0 及電泳沈積裝置2 Q巾,以反覆進行磁力韻及電泳沈積 專=驟’持績吸附以分離廢液中之粉體,t粉體濃度降低至言凡定 值=、,,可將廢液放流至下游之過遽裝置3 ◦,此即可大幅二高 下游過滤裝置3 0的伽壽命,錢得職去除率 =?ίί1!=游處便可獲致潔淨之水= 寸裝置10及電泳沈積裝置2 〇之電極板2丄上 世界環保的潮流的效益,實用及符: 【圖式簡單說明】 8 1342299 第1圖:本發明之流程示意圖。 第2圖:本發明之架構示意圖。 【主要元件符號說明】 本發明部分: 10:磁力吸附裝置 21:電極板 2 0 :電泳沈積裝置 3 0 :過濾裝置 4 0 偵測裝置 5 0 :刮除機構Jiiil(electrophoretic dep〇siti〇n, epd) ^ The particles are deposited on the electrode plate 21. Since the charged solid particles are affected by the applied electric field, the heterons themselves will be in the waste 7 1342299 : or negatively charged The waste liquid is subjected to an applied electric field = and moves toward the π negative (or positive) electrode plate 2 i direction, because the straight 7 lion is on the electrode plate 2 1-^ 射晶诚, the electrophoretic deposition method, the rate is fast The electrophoresis material is not subject to restraint, and the most important thing is the chemical change caused by the separation of the technology, which is beneficial to the recycling and reuse of Shi Xijing powder; 隹fli & chemistry Means, the waste liquid is discharged to the downstream end of the fishing gear fnt filter 'and the removal of chemical additives in the waste liquid, the system is used by the manufacturer; another electrophoretic deposition device 2 ◦ and over-armor = 〇 == 〇, to monitor the powder in the waste liquid = ΐ ΐ ΐ: ΐ =, when the waste liquid can continue to reflux to the magnetic adsorption device 10 and the electrophoretic deposition device 2 Q towel, in order to repeat the magnetic rhyme and electrophoretic deposition special = 'Persistent adsorption to separate the powder in the waste liquid, t powder concentration decreased to the words The fixed value =,,, can discharge the waste liquid to the downstream pass-through device 3 ◦, which can greatly increase the gamma life of the downstream filter device 30, and the money removal rate =? ίί1! Clean water = Inch device 10 and electrophoretic deposition device 2 Electrode plate 2 效益 The benefits of the world's environmental trend, practical and symbol: [Simple description] 8 1342299 Figure 1: Schematic diagram of the process of the present invention. Figure 2: Schematic diagram of the architecture of the present invention. [Description of main component symbols] Part of the invention: 10: Magnetic adsorption device 21: Electrode plate 2 0: Electrophoretic deposition device 3 0: Filter device 4 0 Detection device 5 0 : Scraping mechanism

99

Claims (1)

、申請專利範圍: .一種廢液中粉體之回收系統,其係包括有: 磁力吸附裝置,其係設於廢液流道之上游端, 廢液中之導磁性金屬粉體吸附固定; ’ 電泳沈積裝置,其係設於廢液流道之中游端,且 裝置具料極板,使魏極板產生電場伽,將廢中之 電矽粉體粒子吸附沈積於該電極板上。 •依申請專利範圍第1項所述之廢液中粉體之回 含於f電泳沈積裝置之下游额道上裝設 ^式^ 顆粒濃度_裝置,以監測該廢液中的粉 體 •依申請專利範圍第i項所述之廢液中粉體之回收=,盆 中,該磁力吸附裝置係可調整控制磁場之強度。、、'、 •依申請專概圍第1項所述之廢液巾粉體之回 勺 ==吸附裝置上裝設刮除機構’以將附著固定之 •依申請補範_1項所狀舰愤叙 ,該電泳沈積裝置之電極板上褒設刮 3 ^ 定之矽粉體刮除。 丹从將附者固 .請專纖ϋ第1項所述之廢财粉體之 =該廢液流道之下游端裝設過渡裝置,以分離=液2 •一種廢液中粉體之回收方法,其係包括有: 磁力吸附手段’其係使驗巾之導雜金屬 手&,其係以電泳沈積方式分離出廢 此」以多階段分離技術回收廢液中之粉體。1 電之矽粉體粒子吸附沈積在該電極板上。^ 91342299 方法,更包 金屬粉體。 *μ廢液經该磁力吸附手段時所固著之 1 〇 第7項所述之廢液咖之回收方法,更 之石夕粉體。n赚該驗賴電狄積手段所沈積 顆粒濃度 液中粉體之回收方法,更 …一咖奴度制手段,以監_舰中的粉體 12 1中,f第1 1項所述之廢液中粉體之回收方法, 13 14 粉體滚度_裝置_二二先學反射式之 •依申杜衰刹πίίΓ廢中的粉體顆粒濃度。 第1 1項所述之廢液中粉體之回收方法, =濃度_手段時,若監測該廢液 f该磁力吸附手段及該電泳沈積手段,持續吸附固2 ·=請專利範圍第i i項所述之廢液中粉體之回收_, Ϊ二體濃度偵測手段時’若監測該廢液 $碰齡4雜至蚊該紐放流至g •,申請專利範圍第7項所述之廢液中粉體之回收方 包含有過滤及化學手段,以使經該磁力吸附手段及^ 沈積手段之廢液,再經該過濾及該化學手段分離兮 之粉體及去除該廢液中之化學添加劑。 -廢液中 15Patent application scope: A recycling system for powder in waste liquid, comprising: a magnetic adsorption device, which is disposed at an upstream end of the waste liquid flow channel, and the magnetic conductive metal powder in the waste liquid is adsorbed and fixed; The electrophoretic deposition device is disposed in the swimming end of the waste liquid flow channel, and the device has a material plate, so that the Wei plate generates an electric field gamma, and the waste electric powder particles are adsorbed and deposited on the electrode plate. • According to the application of the patent scope, the powder in the waste liquid is contained in the downstream channel of the f-electrophoretic deposition apparatus, and the particle concentration_device is installed to monitor the powder in the waste liquid. The recovery of the powder in the waste liquid described in the item i of the patent range =, in the basin, the magnetic adsorption device can adjust the strength of the control magnetic field. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The ship is indignant, and the electrode plate of the electrophoretic deposition device is scraped with a scraping powder. Dan will be attached to the solid. Please use the waste material mentioned in item 1 = the downstream end of the waste stream is equipped with a transition device to separate = liquid 2 • the recovery of powder in a waste liquid The method comprises the following steps: a magnetic adsorption means 'which is used to make a miscellaneous metal hand of the test towel and which is separated by electrophoretic deposition" to recover the powder in the waste liquid by a multi-stage separation technique. 1 Electrolytic powder particles are adsorbed and deposited on the electrode plate. ^ 91342299 method, more metal powder. * The method of recovering the waste liquid coffee described in item 7 of the μ waste liquid which is fixed by the magnetic adsorption means, and the Shishi powder. n earning the method of recovering the powder in the liquid concentration of the sediment deposited by the Di Di product, and more... a method of coffee nurturing, to supervise the powder in the ship 12 1 , f as described in item 11. Method for recovering powder in waste liquid, 13 14 Powder rolling degree_Device_二二先学反射式•依申杜衰刹πίίΓ The powder particle concentration in waste. In the method for recovering the powder in the waste liquid according to item 1, the concentration _ means, if the waste liquid f is monitored, the magnetic adsorption means and the electrophoretic deposition means continue to adsorb the solid 2 ·= please patent range item ii The recovery of the powder in the waste liquid_, the detection method of the second body concentration, if the waste liquid is monitored, the age of the waste liquid is 4, and the mosquito is discharged to the g. The recovery of the liquid powder comprises filtering and chemical means for separating the waste liquid by the magnetic adsorption means and the deposition means, and then separating the powder of the crucible by the filtration and the chemical means and removing the chemical in the waste liquid. additive. - in the waste liquid 15
TW095146748A 2006-12-13 2006-12-13 Recycling system of pulverulent body in waste liquor and the method thereof TW200825027A (en)

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TW095146748A TW200825027A (en) 2006-12-13 2006-12-13 Recycling system of pulverulent body in waste liquor and the method thereof

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TWI669273B (en) * 2014-09-01 2019-08-21 日商迪思科股份有限公司 Tantalum powder recovery method and tantalum powder recovery device

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