1325499 九、發明說明： 【發明所屬之技術領域】 山本發明是關於檢查印刷於液晶面板用陣列玻璃基板的 端子用導電圖案的短路狀態、開路狀態、TFT特性以及像 素特性之液晶面板用檢查裝置。 【先前技術】 習知的液晶面板用檢查裝置之大致結構，係如第3圖 以及第4圖所示，係令探針塊體（]^〇1^151沉幻1的探針2抵 接於液晶面板用陣列玻璃基板3的端子用導電圖案4，使 測試器（tester)本體7經由探針2、一端連接於探針2的撓 性基板5以及連接於撓性基板5的另一端之配接板6，而 讀取來自端子料電圖案4的信號，以檢查端子用導電圖 案4的短路狀態、開路狀態、TFT特性以及像素特性。 此時，探針塊體1係具備抵接於測試液晶面板用陣列 玻璃基板3的端子用導電圖案4之複數支探針2，並且因 應端子用導電圖案4的塊體數而配設複數個探針塊體工（參 照第4圖）。在複數個探針塊體〗的每個塊體中，設有探針 2與撓性基板5 ’探針2係分別抵接於端子用導電圖案4 的奇數號碼以及偶數號碼的配線，而撓性基板5係由電性 連接-端的奇數對應撓性基&5a以及純對應撓性基板 5b所構成。 而且’撓性基才反5的另一端係使各奇數肖應撓性基板 5a以及偶數對應撓性基板5b的另一端分別連接於具備有 位址變換功能的配接板6内的奇數對應位址部仏以及偶數 315762 6 1325499 對應位址部6b，以使每一探針塊體1連接於配接板6。 測試器本體7設有多支探針針體（probe pin)P(例如 1200至2000根）’此探針針體P係抵接於配設於配接板6 的同數目的銲墊（land)L，以謀求與配接板6的電性連接。 此外，第3圖中元件符號21係支持探針塊體1的支持框。 於檢查構成液晶面板的TFT陣列基板之性能時，在組 合捲▼自動結合TAB(Tape Automated Bonding)以及印刷 電路板PCB(組裝印刷電路板）以作為驅動面板點亮用之大 型積體電路LSI(Large Scale Integration)的前製程中，將電 壓施加於液晶面板用陣列玻璃基板3的像素信號端子用導 電圖案4的每一條線路，以檢查面板之性能。 此項檢查因使用與像素信號端子用導電圖案數同數目 的探針2，故在配設有液晶面板用陣列玻璃基板3的端子 用V電圖案4之處，安裝多數個具有複數支探針2的探針 塊體1。而且，在檢查中將像素檢查信號分送至奇數號碼 像素端子與偶數號碼像素端子。 這種探針塊體已揭示於第5圖所示的探針塊體1 (例如 日本特開平8-222299號公報（第3頁、第4頁、第⑽）） 所揭不。 此探針塊體！之大致結構，係藉由以㈣板狀絕緣遷 支持探針2，該探針2係用以接觸配設於液晶茂 陣列破璃基板3的像素之複數個端子 母一條線路。 π宅u禾外π 此時探針2係如第 圖所不’分成分別對應端子用導 315762 7 1325499 電圖案4的奇數號碼以及偶數號碼之兩線L卜L2(參照第6 圖）’再者每一條線L1、L2各配設成鑛齒狀。而且，探針 2係延伸成使突出於上側的複數支導電性針狀體的奇數號 碼的導電性針狀體11a比偶數號碼的導電性針狀體llb更 向上侧突出’而兩者之間於突出方向形成高度不同之段 差。探針2係以導電性螺旋彈簧14連結上側的各導電性針 狀體11a、lib與下側的導電性針狀體1〇而成。檢查時， 各導電性針狀體10係接觸配設於液晶面板3的像素之複數 個端子用導電圖案4的每一條線路。 而且’在下側絕緣板13之上重疊有上侧絕緣板丨2， 俾使較長的奇數號碼導電性針狀體lla，接觸貼附於上側 絕緣板12底面的奇數對應撓性基板5a的奇數號碼用信號 傳送用導電圖案8 ’較短的偶數號碼導電性針狀體〗1 b則 接觸貼附於下側絕緣板丨3底面的偶數對應撓性基板5b的 偶數號碼用信號傳送用導電圖案9。 欲使用以上述方式所構成的探針塊體1來組成液晶面 板用檢查裝置時，其整體結構須包括：應將探針2與端子 用導電圖案4设置成相同之數目，例如，並排地安裝所需 數1之作成具有與TAB大致相同寬度尺寸（1個塊體）之小 單兀化的探針塊體1於支持框21(參照第3圖），並且將連 、.°於各探針塊體1的撓性基板5 a以及5 b，分別連接於區 刀成可數號碼與偶數號碼的配接板6的奇數對應位址部 6a，以及偶數對應位址部6b，並且經由此配接板6連接於 測試器本體7。 315762 8 π在以上述方式構成的習知液晶面板用檢查裝置中，因 :十刀成刀別對應端子用導電圖案4的奇數號碼以及 2號碼之兩線路L1、L2，每—線路以心各配設成鑛 狀’故可充分對應端子用導電圖案4的窄間距(pitch) =准因連接撓性基板5與配接板6的線路分成奇數與偶 第圖所示，因係以構成配接板6的印刷電路板上 的配線15來連接，故當端子用導電圖案4的塊體數增加而 出現配線15彼此交又之狀態時，或有/以及前述圖案4的 每一塊體的^配線數的增加時，即有無法因應之問題。 而且，别述配線15彼此交又狀態之問題雖可經由增加 構成配接板6的印刷電路板層數、鑽設通孔(through hole) 等方式以凋整各層之配線丨5而解決，但增加印刷電路板 層數，則會產生製造困難、成本提高以及重量增加等問題。 另外省知裝置之配接板6，係6至8層的多層印刷 電路板。 因此，本發明之目的為提供一種液晶面板用檢查裝 置，其配線不會因構成配接板的多層印刷電路板疊層片數 增加而變多，並且，可完全因應端子用導電圖案塊體數之 增加’或者/以及前述圖案的每一塊體配線數的增加。 【發明内容】 本發明之主要目的為解決上述各項課題。 本發明液晶面板用檢查裝置，係具備抵接於測試液晶 面板用陣列玻璃基板的端子用導電圖案之複數支探針的探 針塊體，對應前述端子用導電圖案的塊體數而配設有複數 315762 9 1325499 而且，奇數（偶數）對應撓性基板具有足以連接被連接探針 塊體與被連接奇數（偶數）對應位址部之間之充分的長度， 而可藉由其中間部的彎曲容易進行前述區分，據此，^逐 漸接近當作標的之被連接奇數（偶數）對應位址部。 從下列之發明詳細說明中上述技術内容與本發明的其 他目的、特徵及優點，則可獲得更深入之理解。 【實施方式】 以下將詳細說明本發明的實施形態。此外，本發明不 受限於該實施形態。 依照所附圖式以及以下所示的實施形態說明本發明液 晶面板用檢查裝置。 以下根據圖式說明本發明的實施形態。其中與前述第 3圖至第6圖所示者為相同之構件以及具有相同功能的構 件係標示相同之元件符號。 、本發明液晶©板用檢查裝置，除了撓性基板與配接板 的連接機構不同之外，整體的連接系統係與習知裝置為相 第1圖是顯示本發明一 的連接結構。 實施形態的撓性基板與配接板[Technical Field of the Invention] The present invention relates to a liquid crystal panel inspection apparatus for inspecting a short-circuit state, an open state, a TFT characteristic, and a pixel characteristic of a conductive pattern for a terminal printed on an array glass substrate for a liquid crystal panel. [Prior Art] The general structure of a conventional inspection device for a liquid crystal panel is as shown in Figs. 3 and 4, and the probe 2 of the probe block (1) 151 is abutted. The tester main body 7 is connected to the flexible substrate 5 of the probe 2 via the probe 2 at one end of the array glass substrate 3 for the liquid crystal panel, and the other end of the flexible substrate 5 is connected. The board 6 is connected to read the signal from the terminal material pattern 4 to check the short-circuit state, the open state, the TFT characteristics, and the pixel characteristics of the terminal conductive pattern 4. At this time, the probe block 1 is provided with abutting The plurality of probes 2 for the terminal conductive patterns 4 of the array glass substrate 3 for a liquid crystal panel are tested, and a plurality of probe block bodies are disposed in accordance with the number of blocks of the terminal conductive patterns 4 (see FIG. 4). In each of the plurality of probe blocks, the probe 2 and the flexible substrate 5' probe 2 are respectively connected to the odd-numbered and even-numbered wirings of the terminal conductive pattern 4, and the flexibility is obtained. The substrate 5 is electrically connected - the odd-numbered corresponding flexible base & 5a and pure The flexible substrate 5b is formed. Further, the other end of the flexible substrate 5 is connected to the other end of each of the odd-numbered flexible substrate 5a and the even-numbered corresponding flexible substrate 5b, and is provided with an address conversion function. The odd-numbered corresponding address portion 仏 and the even-numbered 315762 6 1325499 corresponding to the address portion 6b in the board 6 are such that each probe block 1 is connected to the mating plate 6. The tester body 7 is provided with a plurality of probe pins (probe pin) P (for example, 1200 to 2000) 'This probe pin P is abutted against the same number of land L disposed on the mating plate 6 to obtain electricity with the mating plate 6. In addition, the component symbol 21 in Fig. 3 supports the support frame of the probe block 1. When the performance of the TFT array substrate constituting the liquid crystal panel is checked, TAB (Tape Automated Bonding) and printing are automatically combined in the combined roll ▼ In a pre-process of a large-scale integrated circuit LSI (Large Scale Integration) for driving a panel to be lighted, a circuit board PCB (assembled printed circuit board) is applied to a pixel signal terminal conductive pattern of the array glass substrate 3 for a liquid crystal panel. 4 lines for each inspection panel This test uses the same number of probes 2 as the number of conductive patterns for the pixel signal terminals. Therefore, when the V-electric pattern 4 for the terminal of the array glass substrate 3 for a liquid crystal panel is disposed, a plurality of the plurality of terminals are mounted. Probe block 1 of probe 2. Moreover, the pixel inspection signal is distributed to the odd number pixel terminal and the even number pixel terminal during the inspection. This probe block has been disclosed in the probe block shown in Fig. 5. The body 1 (for example, Japanese Patent Laid-Open No. Hei 8-222299 (page 3, page 4, (10))) is not disclosed. The general structure of the probe block is supported by (4) plate-shaped insulation The needle 2 is used to contact a plurality of terminal mother lines of pixels arranged in the liquid crystal cell array glass substrate 3. π 宅 禾 π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π Each of the lines L1 and L2 is provided with a mineral tooth shape. Further, the probe 2 is extended such that the odd-numbered conductive needle-like body 11a protruding from the upper plurality of conductive needle-like bodies protrudes more upward than the even-numbered conductive needle-shaped body 11b. A step difference in height is formed in the protruding direction. The probe 2 is formed by connecting the conductive needles 11a and 11b on the upper side and the conductive needles on the lower side by a conductive coil spring 14. At the time of inspection, each of the conductive needle-shaped bodies 10 is in contact with each of a plurality of terminal conductive patterns 4 disposed in the pixels of the liquid crystal panel 3. Further, the upper insulating sheet 2 is superposed on the lower insulating sheet 13, and the long odd-numbered conductive needles 11a are contacted to contact the odd-numbered corresponding flexible substrates 5a attached to the bottom surface of the upper insulating sheet 12. The number-conducting conductive pattern 8 'the shorter even-numbered conductive needle-shaped body' 1b contacts the even-numbered signal-transferring conductive pattern attached to the even-numbered corresponding flexible substrate 5b of the lower surface of the lower insulating sheet 3 9. When the probe block 1 constructed as described above is used to constitute the inspection device for a liquid crystal panel, the overall structure thereof must include that the probe 2 and the terminal conductive pattern 4 should be disposed in the same number, for example, side by side. The required number 1 is made into a small single-turned probe block 1 having a width dimension (one block) substantially the same as the TAB in the support frame 21 (refer to FIG. 3), and will be connected to each other. The flexible substrates 5a and 5b of the needle block 1 are respectively connected to the odd-numbered corresponding address portion 6a of the patch panel 6 of the countable number and the even-numbered number, and the even-numbered corresponding address portion 6b, and The mating plate 6 is connected to the tester body 7. 315762 8 π In the conventional inspection apparatus for liquid crystal panel constructed as described above, the odd-numbered number of the conductive pattern 4 for the terminal and the two lines L1 and L2 of the two numbers are used for each of the lines. The distribution of the ore-like shape can sufficiently correspond to the narrow pitch of the conductive pattern 4 for the terminal. The line connecting the flexible substrate 5 and the mating plate 6 is divided into odd and even patterns, and The wiring 15 on the printed circuit board of the board 6 is connected, so that when the number of blocks of the conductive pattern 4 for the terminal is increased and the wirings 15 are in a state of being overlapped with each other, or each of the blocks of the pattern 4 is present. When the number of wirings increases, there is a problem that cannot be dealt with. Further, the problem that the wirings 15 are in a state of being in contact with each other can be solved by increasing the number of printed circuit boards constituting the mating plate 6, and drilling through holes, etc., to eliminate the wiring turns 5 of the respective layers, but Increasing the number of printed circuit board layers creates problems such as manufacturing difficulties, cost increases, and weight gain. Further, the mating plate 6 of the device is a multi-layer printed circuit board of 6 to 8 layers. Therefore, an object of the present invention is to provide an inspection apparatus for a liquid crystal panel, in which wiring is not increased by the number of laminated multilayer printed circuit boards constituting the adapter board, and the number of conductive pattern blocks for the terminal can be fully satisfied. This increases the 'or/and the number of wirings per block of the aforementioned pattern. SUMMARY OF THE INVENTION The main object of the present invention is to solve the above problems. The inspection apparatus for a liquid crystal panel according to the present invention includes a probe block body that is in contact with a plurality of probes for testing a terminal conductive pattern of an array glass substrate for a liquid crystal panel, and is provided corresponding to the number of blocks of the terminal conductive pattern. Plural 315762 9 1325499 Moreover, the odd (even) corresponding flexible substrate has a sufficient length to connect between the connected probe block and the odd (even) corresponding address portion, and can be bent by the middle portion thereof. It is easy to make the above distinction, and accordingly, ^ is gradually approached to the odd-numbered (even-numbered) corresponding address portion to which the target is connected. A more in-depth understanding of the above-described technical aspects and other objects, features and advantages of the present invention will become apparent from the Detailed Description. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail. Further, the present invention is not limited to the embodiment. The inspection apparatus for a liquid crystal panel of the present invention will be described with reference to the drawings and the embodiments shown below. Embodiments of the present invention will be described below based on the drawings. The components that are the same as those shown in the above-mentioned FIGS. 3 to 6 and the components having the same functions are denoted by the same reference numerals. In the inspection apparatus for a liquid crystal panel according to the present invention, the entire connection system is different from the conventional device except that the connection mechanism between the flexible substrate and the adapter plate is different. Fig. 1 is a view showing the connection structure of the first invention. Flexible substrate and adapter plate of embodiment
本發明液晶面板用檢查裝i的整體連接系統，係如第 3圖所示，使探針塊體1的探針2抵接於液晶面板用陣列 玻璃基板3的端子用導電圖案4’並且經由探針2、一端連 的另一端 電圖案4 315762 11 1325499 的信號’以檢查端子用導電圖案4的短路狀態、開路狀態、 TFT特性以及像素特性。 一 此時，探針塊體1具備抵接於試驗液晶面板用陣列玻 璃基板3的端子用導電圖案4之複數支探針2，對應端子 用導電圖案4的塊體數（例如8個塊體），而配設有複數支 (8個塊體時為8支）（參照第丨圖）。複數個探針塊體丨係安 裝在支持框（參照第3圖中的支持框21)，而組裝於檢查裝 置内。 在複數個探針塊體1的每個塊體中，設有探針2與撓 性基板5，探針2係分別抵接於端子用導電圖案4的奇數 號碼以及偶數號碼的配線，而撓性基板5係由電性連接一 端的奇數對應撓性基板5a以及偶數對應撓性基板5b所構 成。 而且，撓性基板5的另一端，係依照配接板6内的奇 數對應位址部6a以及偶數對應位址部6b的設置位置，而 分為奇數對應撓性基板5a以及偶數對應撓性基板5b，並 且使奇數對應撓性基板與偶數對應位址部之各連接端部 5A、5B，以分別逐漸接近奇數對應位址部6a以及偶數對 應位址部6b之方式進行連接，以令每一探針塊體丨連接於 前述配接板6。 此時’構成撓性基板5的奇數對應撓性基板5a，以及 偶數對應撓性基板5b係具有足以連接被連接探針塊體1 與被連接奇數（偶數）對應位址部6a(6b)之間之充分的長 度。前述撓性基板的區分可藉由使撓性基板交叉而施行， 12 315762 “本實施形態可藉由其中間部的彎曲部5c轉換方向，可 稭由該方向轉換更容易進行前述區分。此外，，彎曲部5c 係由被連接探㈣體1與被連接核⑽數）對應位址部 6a(6b)的位置關係而決定，雖然可直線連接時則不需該響 曲部5c’但在其他情況時則形成兩個以上的彎曲部氕，以 便於區分。 而且’奇數對應撓性基板5a以及偶數對應挽性基板％ 的各連接端部5A、5B，係藉由配設於配接板6上的配線 而刀別連接於奇數對應位址部0a以及偶數對應位址部· 具體上如第2圖所示，分別連接有連接端部5A、5B =接器係配設於配接板6上。在第2圖中為了使說明簡 早見’配没有分別對應兩個探針塊體ι的四個連接器 C2 C3 C4，並且配接板6是以一片兩面印刷電路 ，構成it接杰C1、C3係各探針塊體！的奇數對應撓性 土板5績連接的奇數對應連接H，連接S C2、C4係各探 針塊體1的偶數對應撓性基板分所連接的偶數對應連接 器。 此外在第2圖（a)中實線係顯示配設於配接板6表面 =配線15,虛線係顯示配設於配接板6背面的配線15，數 予[1]至[24]係顯示位址，在第2圖⑻中配接板6的厚度 方向的實線係電性連接分別配設於表、背面的配線15彼此 的通孔h ’在第2圖⑷、⑻中，符號L係形成於配接板^ 背面的各配線15的銲塾。例如位址[13]表面的配線Η，係 315762 13 1325499 孔h而連接於背面的配線⑴位址m表面的配線 命係經由通孔h連接於背面的配線15，兩者看起來像虛 線與'線交叉在平面上’但因配接板6的配線面不同而能 避免實際的交又。 ^在如此構成的配接板6中，兩個探針塊體1之内，配 汉於-方的探針塊體丨的奇數㈣撓性基板5a以及偶數對 應撓性基板5b係分別連接於連接器C1以及C2，配設於 另一方的探針塊體丨的奇數對應撓性基板5a以及偶數對應 撓性基板5b，係分別連接於連接器C3以及C4。連接器 C1以及C3的配線15係連接於奇數對應位址部以的銲墊 γ，連接器C2以及C4的配線15，係連接於偶數對應位址 部6b的銲墊l。而且，藉由此銲墊L抵接於測試器本體7 所具備的探針體（參照第3圖中的探針體p)，使配接板6 與測試器本體7電性連接。 貫際上，配接板6係包括：使用配線丨5以及適宜配設 通孔h的複數片多層印刷電路板，並且在最頂面配設連接 益Cl、C2...，且在最底面配設具有銲墊[的位址部6a、 6b ° 在如此構成的液晶面板用檢查裝置中，由於將撓性基 板5區分為奇數5a、偶數5b，故撓性基板5(5&、5b)彼此 雖有交又’但不會因該交又而產生問題’而且使奇數對應 捷性基板5a與偶數對應撓性基板5b之連接端部5 A、5B 逐漸接近奇數對應位址部6a，以及偶數對應位址部6b，可 將其連接配線15設為極短’而達到簡化配線15的目的。 315762 14 1325499 因此，配接板ό因對應端子用導電圖案4的塊體數的.-增加，或者/以及前述圖案4的每一塊體的配線數的增加。.-- 而且，配接板6因使撓性基板5彼此交叉，故可簡化 習知各層配線15的調整步驟，據此，可藉由極少層數的印 刷電路板來構成。例如液晶面板用陣列玻璃基板3的端子 用導電圖案4的塊體數為8塊體時，相對於習知裝置中需 要積層6至8片玻璃基板來構成配接板6之情形，本裝置 之配接板6 ’則僅需積層2至4片的玻璃基板。 如以上所說明的如果依照本發明，因各探針塊體依照 · 配接板内的奇數對應位址部以及偶數對應位址部的設置位 置，而分為奇數對應撓性基板以及偶數對應撓性基板，可 將連接奇數對應撓性基板以及偶數對應撓性基板的各連接 端部、奇數對應位址部以及偶數對應位址部的連接配線設 為極短’以避免前述連接配線出現交叉之狀態，而達到簡 化之目的，據此可減少構成配接板的多層印刷電路板的積 層數’進而可谋求製造的容易化、裝置的輕量化以及降低鲁 成本。 而且’亦具有能夠因應構成配接板的多層印刷電路板 的疊層片數較少的部分、端子用導電圖案塊體數的增加， 或者/以及前述圖案的每一塊體的配線數的增加之優點。 再者’以彎曲前述各撓性基板之方式’即容易區分出 奇數對應撓性基板與偶數對應撓性基板。 (產業上的可利用性） 如以上所述，本發明液晶面板用檢查裝置，因撓性基 315762 1325499 ^的端子用導電圖案的狀態說明圖。 【主要元件符號說明】 3 探針塊體 2 探針 4 液晶面板用陣列玻璃基板 T 5 5b 端子用導電圖案 撓性基板 5a 奇數對應撓性基板 5八、5B 6 偶數對應撓性基板 連接端部 5c 彎曲部 6b 配接板 6 a 奇數對應位址部 7 偶數對應位址部 測試器本艚 奇數號碼用信號傳送用導電圖案 9 偶數號碼用信號傳送用導電圖案 lQ、lla、lib 導電性針狀體 12 14 20 21Cl、C2、 h L1、L2As shown in FIG. 3, the probe 2 of the probe block 1 is brought into contact with the terminal conductive pattern 4' of the array glass substrate 3 for a liquid crystal panel, and is via the terminal connection system of the liquid crystal panel. The probe 2 is connected to the signal of the other end of the electrical pattern 4 315762 11 1325499 to check the short-circuit state, the open state, the TFT characteristics, and the pixel characteristics of the conductive pattern 4 for the terminal. In this case, the probe block 1 includes a plurality of probes 2 that abut against the terminal conductive patterns 4 of the array glass substrate 3 for a test liquid crystal panel, and the number of blocks corresponding to the terminal conductive patterns 4 (for example, eight blocks) ), and a plurality of branches (eight for 8 blocks) (see the figure). A plurality of probe block tethers are mounted on the support frame (see support frame 21 in Fig. 3) and assembled in the inspection device. Each of the plurality of probe blocks 1 is provided with a probe 2 and a flexible substrate 5, and the probe 2 abuts the odd-numbered and even-numbered wirings of the terminal conductive pattern 4, respectively. The substrate 5 is composed of an odd-numbered corresponding flexible substrate 5a and an even-numbered corresponding flexible substrate 5b electrically connected to one end. Further, the other end of the flexible substrate 5 is divided into an odd-numbered corresponding flexible substrate 5a and an even-numbered corresponding flexible substrate in accordance with the arrangement positions of the odd-numbered corresponding address portion 6a and the even-numbered corresponding address portion 6b in the mating plate 6. 5b, and connecting each of the connection end portions 5A, 5B of the odd-numbered corresponding flexible substrate and the even-numbered corresponding address portion so as to gradually approach the odd-numbered corresponding address portion 6a and the even-numbered corresponding address portion 6b, respectively, so that each The probe block body is connected to the aforementioned mating plate 6. At this time, the odd-numbered flexible substrate 5a constituting the flexible substrate 5 and the even-numbered corresponding flexible substrate 5b are sufficient to connect the connected probe block 1 to the odd-numbered (even-numbered) corresponding address portion 6a (6b). The full length of the room. The distinction between the flexible substrates can be performed by intersecting the flexible substrates, and 12 315762 "This embodiment can change the direction by the curved portion 5c of the intermediate portion thereof, and the above-described division can be easily performed by the conversion of the straw. The curved portion 5c is determined by the positional relationship between the connected probe body (four) body 1 and the number of connected cores (10) corresponding to the address portion 6a (6b), and the linear portion may not be required for the curved portion 5c' but other In the case of the case, two or more bent portions are formed to facilitate the distinction. Further, the respective connecting end portions 5A and 5B of the odd-numbered flexible substrate 5a and the even-numbered corresponding printed substrate % are disposed on the mating plate 6 The upper wiring is connected to the odd-numbered corresponding address portion 0a and the even-numbered corresponding address portion. Specifically, as shown in FIG. 2, the connecting end portions 5A and 5B are respectively connected to the connector system. In the second figure, in order to make the description short, see that there are four connectors C2 C3 C4 that do not correspond to the two probe block bodies ι, respectively, and the mating plate 6 is a two-sided printed circuit, which constitutes it. , the C3 system of each probe block! The odd number corresponds to the flexible soil board 5 The odd-numbered corresponding connection H is connected to the even-numbered corresponding connector to which the even-numbered flexible substrate of each of the probe blocks 1 of the S C2 and C4 systems is connected. Further, in Fig. 2(a), the solid line display is arranged The surface of the mating plate 6 is the wiring 15 and the broken line shows the wiring 15 disposed on the back surface of the mating plate 6, and the number is shown in [1] to [24], and the thickness of the mating plate 6 is shown in Fig. 2 (8). The solid line in the direction is electrically connected to the through holes h' of the wirings 15 on the front and back sides, respectively. In the second drawings (4) and (8), the symbol L is a solder fillet formed on each of the wirings 15 on the back surface of the mating plate. For example, the wiring Η on the surface of the address [13] is 315762 13 1325499 hole h and is connected to the wiring on the back surface (1) The wiring line on the surface of the address m is connected to the wiring 15 on the back side via the via hole h, which looks like a dotted line. It is possible to avoid the actual crossover due to the difference in the wiring surface of the mating plate 6. However, in the mating plate 6 thus constructed, the two probe blocks 1 are fitted with The odd-numbered (four) flexible substrate 5a and the even-numbered corresponding flexible substrate 5b are connected to the connectors C1 and C2, respectively, and are disposed in the other The odd-numbered probe block body corresponds to the flexible substrate 5a and the even-numbered corresponding flexible substrate 5b, and is connected to the connectors C3 and C4, respectively. The wires 15 of the connectors C1 and C3 are connected to the odd-numbered address portions. The pad γ and the wiring 15 of the connectors C2 and C4 are connected to the pad 1 of the even-numbered address portion 6b. Further, the pad L is in contact with the probe body provided in the tester body 7 (see The probe body p) in Fig. 3 electrically connects the mating plate 6 and the tester body 7. In a continuous manner, the mating plate 6 includes: a plurality of pieces using the wiring 丨 5 and a suitable through hole h a multi-layer printed circuit board, and the connection of the top surface is provided with a benefit of Cl, C2, ..., and the address portion 6a, 6b is provided on the bottom surface of the liquid crystal panel. Since the flexible substrate 5 is divided into an odd number 5a and an even number 5b, the flexible substrates 5 (5 & 5b) have an intersection with each other, but there is no problem due to the intersection, and the odd number corresponds to the abundance substrate 5a. The connection end portions 5 A, 5B of the flexible substrate 5b corresponding to the even number gradually approach the odd-numbered corresponding address portion 6a, and the even number Should address portion 6b, it can be set to a very short connecting line 15 'to achieve the purpose of simplifying the wiring 15. 315762 14 1325499 Therefore, the mating plate 增加 is increased by the number of blocks corresponding to the conductive pattern 4 for the terminal, or/and the number of wires of each block of the aforementioned pattern 4 is increased. Further, since the adapter board 6 crosses the flexible boards 5, the adjustment steps of the conventional layer wirings 15 can be simplified, and accordingly, it can be constituted by a printed circuit board having a very small number of layers. For example, when the number of blocks of the terminal conductive pattern 4 of the array glass substrate 3 for a liquid crystal panel is eight, it is necessary to laminate 6 to 8 glass substrates to form the mating plate 6 in the conventional device. The mating plate 6' requires only two to four glass substrates to be laminated. As described above, according to the present invention, each probe block is divided into an odd-numbered corresponding flexible substrate and an even-numbered corresponding scratch according to the arrangement positions of the odd-numbered corresponding address portion and the even-numbered corresponding address portion in the mating plate. The substrate can be made extremely short by connecting the connection terminals of the odd-numbered corresponding flexible substrate and the even-numbered corresponding flexible substrate, the odd-numbered corresponding address portion, and the even-numbered corresponding address portion to avoid the intersection of the aforementioned connection wires. In the state of simplification, the number of layers of the multilayer printed circuit board constituting the adapter plate can be reduced, and the manufacturing can be facilitated, the weight of the device can be reduced, and the cost of the device can be reduced. In addition, there is also a portion in which the number of laminated sheets of the multilayer printed wiring board constituting the mating plate is small, an increase in the number of conductive pattern blocks for the terminal, or an increase in the number of wirings per block of the pattern. advantage. Further, it is easy to distinguish between the odd-numbered corresponding flexible substrate and the even-numbered corresponding flexible substrate by bending the respective flexible substrates. (Industrial Applicability) As described above, the inspection apparatus for a liquid crystal panel of the present invention has a state of a conductive pattern for a terminal of a flexible base 315762 1325499. [Explanation of main component symbols] 3 Probe block 2 Probe 4 Array glass substrate for liquid crystal panel T 5 5b Conductive pattern flexible substrate for terminal 5a Odd number corresponding to flexible substrate 5, 5B 6 Even-numbered flexible substrate connection end 5c Bending portion 6b Adapter plate 6 a Odd number corresponding address portion 7 Even number corresponding address portion Tester 艚 Odd number number signal transmission conductive pattern 9 Even number signal transmission conductive pattern lQ, 11a, lib Conductive needle shape Body 12 14 20 21Cl, C2, h L1, L2
上側絕緣板13 螺旋彈簧 15 絕緣體之本體 支持框 [1]至[24] C3、C4連接器 通孔 L 線 P 下側絕緣板 配線 位址 銲墊 探針銷 315762 17Upper Insulation Board 13 Coil Spring 15 Insulator Body Support Frame [1] to [24] C3, C4 Connector Through Hole L Line P Lower Insulation Board Wiring Address Pads Probe Pins 315762 17