6361 九 、發明說明： 【發明所屬之技術領域】 本發明係有關於一種用於消除靜電之系統，特別指一 結合靜電消除器與機器手臂用以消除大璃^ 面靜電之祕。 了麵基板表 【先前技術】 隨著輕、薄、高解析、低輻射的產品趨勢與需求，電 敷顯示面板(PDP)、液晶顯示面板(LCD)、有機發光面板 (OLED)等平面顯示ϋ也日益受到消費者的青睞，而為了獲 得良好的製造品質與產能良率，每個製程環節均非常重要。 以薄膜電晶體液晶顯示面板(TFT-LCD)的製造過裎為 例，由於玻璃基板表面在各製程間的輸送傳遞經常會因為 接觸或摩擦而產生靜電，即使是微量靜電的產生，亦將造 成電場吸附周遭之微粒物質而造成污染。此外，靜電會導 致電荷的累積，所以當靜電累積到一定程度之後，經常會 產生巨大之瞬間放電，因而造成設置於玻璃基板上之半導 體元件的損壞。因此，在玻璃基板的製造過程中’必須經 常進行靜電的消除程序。再者，由於玻璃基板係存放於卡 g(cassette)中，卡&在搬運及傳送過程中就有可能產生靜 -1306361 電，而且在生產平面顯示器的過程中，卡匣係被放置放在 製程機0的卡匣存放區（cassette station)，一個卡匣存放區 =兩對應二至四個卡匣埠(cassettep〇rt)，然後再由機械手 ί執行取片及置片的動作。通常在此一過程中便非常容易 έ導靜電的發生。因此，習知現有技術係在卡匿蟑周圍都 裝置有一桿狀靜電消除器，而且不論該卡匣埠是否有卡匣 在製程中，靜電消除器都會一直維持在啟動的狀態。 第1圖係為習知桿狀靜電消除器之示意圖。如第1圖 所示，桿狀靜電消除器2係將交流高壓4施加在針狀電極 6,藉由電針6與接地面間的電暈放電而產生離子。然後再 才干内通入之南塵乾燥氣體（compressive dry air, CDA )， 乂將電針6所產生之離子喷灑至玻璃基板8表面，透過電 性中和的方式消除玻璃基板8表面之靜電。 以習知現有技術而言，桿狀靜電消除器的配置取決於 玻璃基板面積大小、桿狀靜電消除器與玻璃基板之間的距 離、桿狀靜電消除器涵蓋角度等因素。因此，在玻璃基板 尺寸不斷加大的情形下，桿狀靜電消除器配置的數量將相 對增加，同時CDA的用量也與桿徑體積成正比而增加。然 而，增加桿狀靜電消除器數量除了會增加成本外，同時也 會影響卡匣存放區上空間的配置應用。此外，CDA用量的 增加不僅會使耗能增加，同時更將造成無塵室溫濕度控制 6 1306361 上的困難。因此，平面顯示器產業對於靜電消除器的要求 已不只在於有效去除靜電，同時更要求降低成本與節省能 源。 【發明内容】 本發明係有關於一種用於消除靜電之系統，特別指一 Φ 種結合靜電消除器與機器手臂用以消除大尺寸玻璃基板表 面靜電之系統。 有鑑於上述習知技術所遭遇的問題，本發明揭露一種用 於消除靜電之系統，其包含一機械手臂、一設置於該機械 手臂前端之夾爪、一設置於該機械手臂上之連桿組，以及 一設置於該連桿組上之靜電消除器，其中該靜電消除器可 藉由該連桿組在一固定範圍内往復移動，以消除靜電。 本發明另揭露一種用於消除靜電之系統，其包含一機械 手臂、一設置於該機械手臂前端之夾爪，以及一設置於該 機械手臂上之桿狀式靜電消除器。 本發明更揭露一種用於消除靜電之系統，其包含一第一 機械手臂、一設置於該第一機械手臂前端之夾爪、一第二 ， 機械手臂、一設置於該第二機械手臂前端之平台，以及一 1306361 設置於平台上之靜電消除器，其中該第二機械手臂可在一 固定範圍内往復移動，以消除靜電。 由於本發明係將靜電消除器裝置於機器手臂上，故可大 幅降低安裝空間大小之要求，有效減少靜電消除器之安裝 數量與CDA使用量，並且能快速直接地消除大尺寸玻璃基 板之表面靜電。此外，本發明可以在極佳時機去除靜電， 以針對產品有剝離的行為以及尖端接近時作除靜電的動 作，因此又能有效達到靜電防護之目的。 以下為本發明之詳細說明與附圖。然而，所附圖式僅供 參考與說明之用，並非用來對本發明加以限制。 【實施方式】 第2圖為本發明第一較佳實施例所提出之用於消除靜 電之系統裝置示意圖。如第2圖所示，消除靜電系統10包 含有一機械手臂12，且機械手臂12前端具有一用於取放 玻璃基板13之夾爪(fork) 14,而靜電消除器16則係藉由連 桿組18架設在機械手臂12上。其中，本較佳實施例所使 用之靜電消除器16可為桿狀式、風扇式、高週波式、光照 射式等各類型靜電消除器設備，而夾爪14另包含複數根托 臂（arm)15，用來托住玻璃基板13。連接靜電消除器16之 8 μ * 1306361 連桿組18具有兩個樞軸點2〇，並藉由框轴點2〇上的第一 伺服馬達22與第二舰馬達24來控制連桿組18，帶動靜 電消除器16呈直線往復運動，以使靜電消除器16可掃猫 整個玻璃基板13。在本較佳實施例中，當機械手臂12執 行取放片動作時會啟動靜電消除器16，並由連桿組18帶 動靜電消除器16掃瞄玻璃基板13，進而消除玻璃基板13 之表面靜電。 第3圖為本發明第二較佳實施例所提出之用於消除靜 電之系統裝置示意圖。如第3圖所示，消除靜電系統30包 含有—機械手臂32，該機械手臂32前端具有一用於取放 玻璃基板33且包含複數根托臂35之夾爪34，而靜電消除 器36係藉由連桿組38架設在機械手臂32上，其所使用之 靜電消除器36亦可為桿狀式、風扇式、高週波式、光照射 式等各類型靜電消除器設備。其中，與第一較佳實施例不 同之處在於：連桿組38包含分別設置於夾爪34兩侧之托 臂35上之滑軌4〇，兩端分別與滑轨40與靜電消除器36 連接之固定連桿42,以及設置於固定連桿42其中之一上 之伺服馬達39。在本較隹實施例中，當機械手臂32執行 取放片動作時會啟動靜電消除器36，並由連桿組38帶動 靜電消除器36沿著滑軌40之方向往復掃瞄玻璃基板33， 進而消除玻螭基板之33表面靜電。在此需注意的是：圖中 所示係以三個托臂為例，但托臂的設置個數不以此為限； 1306361 本發明實則涵蓋運用不同托臂數目的實施方式。 . 第4圖至第6圖為本發明第三較佳實施例所提出之用 : 於消除靜電之系統裝置示意圖。如第4圖所示，消除靜電 系統50包含有一機械手臂52，且機械手臂52前端具有— 用於取放玻璃基板53並包含複數根托臂之夾爪54，而靜 電消除器56係藉由固定座58架設安裝在機械手臂52上。 • 本較佳實施例所使用之靜電消除器56可為桿狀式、風扇 式、高週波式、光照射式等之各類型靜電消除器設備。以 桿狀式靜電消除器為例，當機械手臂52執行取放片動作時 會啟動靜電消除器56，使靜電消除器56之桿體内通有高 壓氣體’並施加一交流電壓，使靜電消除器56之桿體内之 放電針(如第1圖所示）產生電暈放電，再藉由帶正負離子 氣體的吹送，以中和玻璃基板53表面之靜電。如第5圖所 φ 示’為控制靜電消除器56有效涵蓋角度，可調整固定座 58於一特定角度，以使氣體吹送的角度產生交疊，進而將 正負離子涵蓋至整個玻璃基板53表面，藉以消除玻璃基板 53之表面靜電。此外，依不同涵蓋角度需求及玻璃面積大 小’本較佳實施例更可選擇適當數量之靜電消除裝置56安 裝並調整其安裝的位置。如第6圖所示，可選擇性地將靜 電消除器66架設安裝在機械手臂62下端之固定座68上， ， 使靜電消除器66直接作用在玻璃基板63下方，消除玻璃 基板63之底面靜電。除第6圖所示設置方式外，另可將靜 1306361 電消除器66同時架設安裝在機械手臂62的上端及下端， 以同步消除玻璃基板63之表面與底面的靜電。 第7圖為本發明第四較佳實施例所提出之用於消除靜 電之系統裝置示意圖。如第7圖所示，消除靜電系統70包 含一第一機械手臂72、一第二機械手臂76、一設置於第二 機械手臂76之前端之平台78，以及至少一設置於平台上 之靜電消除器80。第一機械手臂72前端具有一用於取放 玻璃基板73並包含複數根托臂75之夾爪74。靜電消除器 80可為桿狀式、風扇式、高週波式、光照射式等業界所知 悉之靜電消除器；因此，本發明並不受限於使用特定種類 的靜電消除器。在第一機械手臂72執行取放片動作前，第 二機械手臂76可先伸至玻璃基板73下緣或上緣，進行靜 電消除動作，亦或當第一機械手臂72執行取放片動作時， 第二機械手臂76可同時與第一機械手臂72進行動作，以 同步達到靜電消除的功能。 綜上所述，本發明用於消除靜電之系統與習知技術相 較具有下列之優點： 1. 可直接使用現有的靜電消除設備及技術，例如將靜電消 除器之結構與機械手臂直接結合，或於機械手臂主體上 安裝靜電消除器等。 2. 可以在極佳時機去除靜電，例如針對產品有剝離的行為 13〇636i 以及有尖端接近等時機，才進行除靜電的動作，因此可 更有效達到靜電防護之目的。 不需使用CDA或僅需使用少量CDA。由於靜電去除設 備係直接針對靜電產生區域(例如坡璃基板之表面與底 面）進行靜電之消除，而且距離彼近，因此可利用環境6361 IX. Description of the Invention: [Technical Field] The present invention relates to a system for eliminating static electricity, and particularly to a combination of a static eliminator and a robot arm for eliminating static electricity from a large surface. Surface Substrate Table [Prior Art] With the trend and demand of light, thin, high resolution, low radiation products, flat display of electroplated display panel (PDP), liquid crystal display panel (LCD), organic light emitting panel (OLED), etc. It is also increasingly favored by consumers, and in order to obtain good manufacturing quality and productivity, each process is very important. For example, in the manufacture of a thin film transistor liquid crystal display panel (TFT-LCD), since the surface of the glass substrate is transported between processes, static electricity is generated due to contact or friction, and even a small amount of static electricity is generated. The electric field adsorbs surrounding particulate matter and causes pollution. In addition, static electricity causes accumulation of electric charges, so when static electricity is accumulated to a certain extent, a large instantaneous discharge is often generated, thereby causing damage to the semiconductor elements provided on the glass substrate. Therefore, the static elimination process must be performed frequently during the manufacture of the glass substrate. Furthermore, since the glass substrate is stored in the card (cassette), the card & during the handling and transport process may generate static -1,306,361, and during the production of the flat panel display, the cassette is placed The cassette storage area of the processing machine 0, one cassette storage area=two corresponding to two to four cassettes (cassettep〇rt), and then the robot ί performs the action of taking and placing the sheets. It is usually very easy to induce static electricity in this process. Therefore, the prior art has a rod-shaped static eliminator around the occlusion, and the static eliminator remains in the activated state regardless of whether or not the cassette is stuck in the process. Figure 1 is a schematic view of a conventional rod-shaped static eliminator. As shown in Fig. 1, the rod-shaped static eliminator 2 applies an alternating current high voltage 4 to the needle electrode 6, and generates ions by corona discharge between the electric needle 6 and the ground plane. Then, the compressed dry air (CDA) is introduced into the inside, and the ions generated by the electro-acupuncture 6 are sprayed onto the surface of the glass substrate 8, and the static electricity on the surface of the glass substrate 8 is eliminated by electrical neutralization. . In the prior art, the configuration of the rod-shaped static eliminator depends on the size of the glass substrate, the distance between the rod-shaped static eliminator and the glass substrate, and the angle of the rod-shaped static eliminator. Therefore, in the case where the size of the glass substrate is continuously increased, the number of rod-shaped static eliminators is relatively increased, and the amount of CDA is also increased in proportion to the diameter of the rod. However, increasing the number of rod-shaped static eliminators not only increases the cost, but also affects the configuration of the space on the cassette storage area. In addition, an increase in the amount of CDA will not only increase the energy consumption, but will also cause difficulties in dust-free room temperature humidity control 6 1306361. Therefore, the flat panel display industry's requirements for static eliminators are not only to effectively remove static electricity, but also to reduce costs and save energy. SUMMARY OF THE INVENTION The present invention relates to a system for eliminating static electricity, and more particularly to a system for combining static eliminators and robotic arms to eliminate static electricity on the surface of large-sized glass substrates. In view of the problems encountered in the prior art, the present invention discloses a system for eliminating static electricity, comprising a mechanical arm, a jaw disposed at the front end of the robot arm, and a linkage set disposed on the robot arm. And a static eliminator disposed on the link set, wherein the static eliminator is reciprocally movable within a fixed range by the link set to eliminate static electricity. The invention further discloses a system for eliminating static electricity, comprising a mechanical arm, a jaw disposed at the front end of the robot arm, and a rod-shaped static eliminator disposed on the robot arm. The invention further discloses a system for eliminating static electricity, comprising a first mechanical arm, a clamping jaw disposed at the front end of the first mechanical arm, a second mechanical arm, and a front end disposed on the front end of the second mechanical arm. The platform, and a 1306361 static eliminator disposed on the platform, wherein the second mechanical arm reciprocates within a fixed range to eliminate static electricity. Since the invention installs the static eliminator on the robot arm, the requirement of the installation space size can be greatly reduced, the installation amount of the static eliminator and the amount of CDA can be effectively reduced, and the surface static electricity of the large-sized glass substrate can be quickly and directly eliminated. . In addition, the present invention can remove static electricity at an excellent timing to perform the action of removing electricity against the product and the action of removing static electricity when the tip is approached, thereby effectively achieving the purpose of electrostatic protection. The following is a detailed description of the invention and the accompanying drawings. However, the drawings are for illustrative purposes only and are not intended to limit the invention. [Embodiment] FIG. 2 is a schematic view of a system apparatus for eliminating static electricity according to a first preferred embodiment of the present invention. As shown in FIG. 2, the static elimination system 10 includes a mechanical arm 12, and the front end of the robot arm 12 has a fork 14 for picking up the glass substrate 13, and the static eliminator 16 is connected by a connecting rod. Group 18 is mounted on the robot arm 12. The static eliminator 16 used in the preferred embodiment may be various types of static eliminator devices, such as a rod type, a fan type, a high frequency type, and a light illuminating type, and the clamping jaw 14 further includes a plurality of root supporting arms (arm). ) 15 for holding the glass substrate 13. The 8 μ * 1306361 link set 18 that connects the static eliminator 16 has two pivot points 2 〇 and controls the link set 18 by the first servo motor 22 and the second ship motor 24 on the frame axis point 2〇. The static eliminator 16 is driven to reciprocate linearly so that the static eliminator 16 can sweep the entire glass substrate 13 of the cat. In the preferred embodiment, when the robot arm 12 performs the pick and place operation, the static eliminator 16 is activated, and the static electricity eliminator 16 is driven by the link group 18 to scan the glass substrate 13, thereby eliminating the static electricity on the surface of the glass substrate 13. . Figure 3 is a schematic diagram of a system apparatus for eliminating static electricity according to a second preferred embodiment of the present invention. As shown in FIG. 3, the static elimination system 30 includes a mechanical arm 32 having a chuck 34 for receiving and placing the glass substrate 33 and including a plurality of tray arms 35, and the static eliminator 36 is attached. The static eliminator 36 used by the link group 38 is mounted on the robot arm 32, and can also be various types of static eliminator devices such as a rod type, a fan type, a high frequency type, and a light irradiation type. The difference between the first preferred embodiment and the first preferred embodiment is that the connecting rod set 38 includes the sliding rails 4 分别 respectively disposed on the supporting arms 35 on both sides of the clamping jaws 34, and the two ends are respectively associated with the sliding rail 40 and the static eliminator 36. A fixed link 42 is connected, and a servo motor 39 is provided on one of the fixed links 42. In the present embodiment, the static eliminator 36 is activated when the robot arm 32 performs the pick and place operation, and the static eliminator 36 drives the static eliminator 36 to scan the glass substrate 33 in the direction of the slide rail 40. Further, the surface static electricity of the glass substrate 33 is eliminated. It should be noted here that the three bracket arms are exemplified in the figure, but the number of the bracket arms is not limited thereto; 1306361 The present invention actually covers an embodiment using different number of pallet arms. 4 to 6 are schematic views of a system device for eliminating static electricity according to a third preferred embodiment of the present invention. As shown in FIG. 4, the static elimination system 50 includes a mechanical arm 52, and the front end of the robot arm 52 has a jaw 54 for receiving and placing the glass substrate 53 and including a plurality of carrier arms, and the static eliminator 56 is The mount 58 is mounted on the robot arm 52. The static eliminator 56 used in the preferred embodiment may be various types of static eliminator devices such as a rod type, a fan type, a high frequency type, and a light irradiation type. Taking the rod-shaped static eliminator as an example, when the robot arm 52 performs the pick-and-place operation, the static eliminator 56 is activated, so that the high-pressure gas is applied to the rod of the static eliminator 56 and an alternating voltage is applied to eliminate the static electricity. The discharge needle in the rod of the device 56 (shown in Fig. 1) generates a corona discharge, and is then blown with a positive and negative ion gas to neutralize the static electricity on the surface of the glass substrate 53. As shown in FIG. 5, in order to control the static eliminator 56 to effectively cover the angle, the fixing seat 58 can be adjusted at a specific angle so that the angles of the gas blowing overlap, and the positive and negative ions are covered to the entire surface of the glass substrate 53, Thereby, the surface of the glass substrate 53 is electrostatically removed. In addition, depending on the different angle requirements and the size of the glass area, the preferred embodiment may further select an appropriate number of static elimination devices 56 to mount and adjust the position at which they are mounted. As shown in FIG. 6, the static eliminator 66 can be selectively mounted on the fixing base 68 at the lower end of the mechanical arm 62, so that the static eliminator 66 directly acts under the glass substrate 63 to eliminate the static electricity on the bottom surface of the glass substrate 63. . In addition to the arrangement shown in FIG. 6, the static 1306361 electric eliminator 66 can be simultaneously mounted on the upper and lower ends of the robot arm 62 to synchronously eliminate static electricity on the surface and the bottom surface of the glass substrate 63. Figure 7 is a schematic diagram of a system apparatus for eliminating static electricity according to a fourth preferred embodiment of the present invention. As shown in FIG. 7, the static elimination system 70 includes a first mechanical arm 72, a second mechanical arm 76, a platform 78 disposed at the front end of the second robot arm 76, and at least one static elimination disposed on the platform. 80. The front end of the first robot arm 72 has a jaw 74 for receiving and detaching the glass substrate 73 and including a plurality of pallet arms 75. The static eliminator 80 may be a static eliminator known in the art such as a rod type, a fan type, a high frequency type, or a light illuminating type; therefore, the present invention is not limited to the use of a specific type of static eliminator. Before the first robot arm 72 performs the pick and place operation, the second robot arm 76 can first extend to the lower edge or the upper edge of the glass substrate 73 to perform the static elimination operation, or when the first robot arm 72 performs the pick and place operation. The second robot arm 76 can simultaneously operate with the first robot arm 72 to synchronously achieve the function of static elimination. In summary, the system for eliminating static electricity of the present invention has the following advantages compared with the prior art: 1. The existing static elimination device and technology can be directly used, for example, the structure of the static eliminator is directly combined with the mechanical arm. Or install a static eliminator or the like on the main body of the robot. 2. It is possible to remove static electricity at an excellent time. For example, if the product has a peeling behavior 13〇636i and a tip-to-close timing, the static elimination action can be performed, so that the purpose of static electricity protection can be more effectively achieved. No need to use CDA or just use a small amount of CDA. Since the static electricity removing device directly removes static electricity against the static electricity generating region (for example, the surface and the bottom surface of the glass substrate), and the distance is close to each other, the environment can be utilized.
4. 氣机而不需使用CDA ’以降低無塵室溫濕度控制上的 困難度’並減少耗能；此外’若需更快速的消除靜電， 則可藉由供給少量的CDA而達到更佳的效果。 將靜電消除||直接裝設於機械手臂上，可有 之要求，以解決習知奸存放區上空間配置應 用的問題’並減少靜電消除H之轉數量，降低成本。 ^上所述僅為本㈣之較健實施例，凡依本發明4. The air machine does not need to use CDA 'to reduce the difficulty of dust-free room temperature humidity control' and reduce energy consumption; in addition, 'If you need to eliminate static electricity more quickly, you can achieve better by supplying a small amount of CDA. Effect. The static elimination||installation directly on the robot arm can be required to solve the problem of space allocation application in the conventional storage area' and reduce the number of static elimination H and reduce the cost. ^The above is only a more robust embodiment of the present (four), according to the present invention
申明專利_所做之均等變化與修飾，皆應屬本發明 蓋之範圍。 4 【圖式簡單說明】 第1圖係為習知桿狀靜電消除器之示意圖。 之用於消除靜電之 之用於消除靜電之 第2圖為本發明第一較佳實施例所提出 系統裝置示意圖。 第3圖為本發明第二較佳實施例所提出 系統裝置示意圖。 之用於消 第4圖至第6圖為本發明第三較佳實施例所提出 1306361 除靜電之系統裝置示意圖。 第7圖為本發明第四較佳實施例所提出之用於消除靜電之 系統裝置示意圖。 【主要元件符號說明】 2 桿狀靜電消除器 4 交流高壓 6 電針 8 玻璃基板 10 消除靜電系統 12 機械手臂 13 玻璃基板 14 夾爪 15 托臂 16 靜電消除器 18 連桿組 20 樞軸點 22 第一伺服馬達 24 第二伺服馬 30 消除靜電系統 32 機械手臂 33 玻璃基板 34 央爪 35 托臂 36 靜電消除器 38 連桿組 39 伺服馬達 40 滑軌 42 固定連桿 50 消除靜電系統 52 機械手臂 53 玻璃基板 54 夾爪 55 托臂 56 靜電消除器 58 固定座 62 機械手臂 63 玻璃基板 66 靜電消除器 1306361 68 固定座 70 消除靜電系統 72 第一機械手臂 73 玻璃基板 74 夾爪 75 托臂 76 第二機械手臂 78 平台 80 靜電消除器 14All changes and modifications made to the patent _ are intended to fall within the scope of the invention. 4 [Simple description of the drawing] Fig. 1 is a schematic view of a conventional rod-shaped static eliminator. The second figure for eliminating static electricity is used to eliminate static electricity. Fig. 2 is a schematic view of the system apparatus proposed in the first preferred embodiment of the present invention. Figure 3 is a schematic diagram of the system apparatus proposed in the second preferred embodiment of the present invention. 4 to 6 are schematic views of a system for removing static electricity of the 1306361 according to the third preferred embodiment of the present invention. Figure 7 is a schematic view of a system apparatus for eliminating static electricity according to a fourth preferred embodiment of the present invention. [Main component symbol description] 2 Rod static eliminator 4 AC high voltage 6 Electric needle 8 Glass substrate 10 Electrostatic elimination system 12 Robot arm 13 Glass substrate 14 Clamp 15 Support arm 16 Static eliminator 18 Link group 20 Pivot point 22 First servo motor 24 Second servo horse 30 Electrostatic elimination system 32 Robot arm 33 Glass substrate 34 Central claw 35 Support arm 36 Static eliminator 38 Connecting rod set 39 Servo motor 40 Slide rail 42 Fixed link 50 Elimination of static system 52 Robot arm 53 Glass substrate 54 Clamps 55 Support arm 56 Static eliminator 58 Mounting bracket 62 Robot arm 63 Glass substrate 66 Static eliminator 1306361 68 Mounting bracket 70 Static elimination system 72 First robot arm 73 Glass substrate 74 Claw 75 Support arm 76 Two robotic arm 78 platform 80 static eliminator 14