1299800 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於，使探針接觸液晶面板之電極，檢查該 液晶面板之檢查裝置。尤其是關於用以抑制液晶面板的溫 度上升之構造有特徵之液晶面板檢查裝置。 【先前技術】 實施液晶面板的點燈檢查時，在從液晶面板的背面側 以背光照明之狀態下，於液晶面板之複數的電極施加特定 之電壓，檢查液晶面板之各晶胞點燈的狀態。此液晶面板 檢查裝置，係例如，開示於以下的專利文獻1。 〔專利文獻1〕日本特開2003-24 1 68 1號公報。 【發明內容】 於此液晶面板檢查裝置中，藉由背光的照明，液晶面 • 板的溫度會上升。例如，假定背光的亮度爲約兩萬cd， 玻璃之熱膨脹係數爲約9 p p m的話，於3 0吋之液晶面板的 場合，背光係於點燈之檢查平台裝載上液晶面板經過20 分鐘，液晶面板係僅上升約15 °C。藉由此溫度上升，3 0 吋之液晶面板的長邊係僅熱膨脹約8 0 // m。於更大型的5 0 • 吋之液晶面板，長邊係熱膨脹約1 4 0 μ m。液晶面板係如 此熱膨脹的話，在液晶面板的複數之電極與對應複數之電 極的複數之探針之間，發生位置偏離，而產生電極與探針 之接觸不良。 -5- (2) 1299800 本發明，係爲解決此問題點者，其目的爲提供可抑制 液晶面板的溫度升高之液晶面板檢查裝置。 〔用以解決課題之手段〕 本發明的液晶面板檢查裝置係具備下記（1)至（6) 之構造。（1 )檢查平台，以液晶面板之周邊部支撐液晶 面板，並具有露出液晶面板的背面之至少一部分的內部空 間。（2 )氣體吹附裝置，具有開口於前述內部空間之氣 體導入口，且吹附氣體至前述檢查平台所支撐之液晶面板 的背面。（3 )探針平台，具有可接觸於於前述檢查平台 所支撐之液晶面板的複數之電極的探針。（4 )背光裝置 ，從背面照明前述檢查平台所支撐之液晶面板。（5 )進 而，前述檢查平台係具備用以支撐矩形之液晶面板的四邊 之四個支撐部，並於前述支撐部中，在液晶面板與前述支 撐部之間，形成用以從前述內部空間使氣體排出之氣體排 出口。（6)前述四個支撐部之中，於鄰接之兩個支撐部 設置前述氣體吹附裝置，於其他兩個支撐部形成前述氣體 排出口。 如此，因使氣體吹附於液晶面板的背面，於以背光照 明液晶面板時，可抑制液晶面板的溫度上升。 於前述檢查平台，係可設置排出吹附氣體的氣體排出 口。良卩，檢查平台，係具備用以支撐矩形之液晶面板的四 邊之四個支撐部，並至少於一個支撐部中，於液晶面板與 前述支撐部之間，可設置用以從前述內部空間使氣體排出 -6 - (3) 1299800 之氣體排出口。 前述四個支撐部之中，可於鄰接之兩個支撐部設置前 述氣體吹附裝置，於其他兩個支撐部可設置前述氣體排出 口。 作爲吹附氣體之場所，不僅只有液晶面板的背面，也 可吹附至液晶面板的前面。 ' 作爲吹附至液晶面板之氣體，也可爲含有離子之氣體 φ 。即，也可爲以離子產生器產生之離子化空氣。於液晶面 板吹附含有離子之氣體，可去除液晶面板之靜電。 本發明者所知範圍內，於液晶面板檢查裝置中，至此 ，還未見到於液晶面板吹附空氣來防止液晶面板的溫度上 升之技術。但是，於使用液晶板檢查印刷電路配線板之短 路處的裝置中，爲維持液晶板之理想溫度，而於液晶板吹 附特定溫度的空氣之技術，可見於以下之專利文獻2。 〔專利文獻2〕日本特開昭64-66567號公報。 • 比較本發明與專利文獻2的技術的話，本發明係作爲 檢查對象之液晶面板（探針針腳係接觸其電極）係防止藉 由背光而溫度上升者，該點與專利文獻2的技術相異。於 專利文獻2中，檢查對象係印刷電路配線板，液晶面板係 ' 作爲用以找出印刷電路配線板的短路處之手段。 〔發明的效果〕 依據本發明，因吹附空氣於檢查平台上之液晶面板， 即使背光之光照射於液晶面板，也可抑制液晶面板的溫度 1299800 (4) 上升。 【實施方式】 以下，參照圖面詳細說明本發明的實施例。圖1係於 本發明的液晶面板檢查裝置之一的實施例中，檢查平台及 調整平台的立體圖。該液晶面板檢查裝置係具備有：具備 探針針腳之探針平台（未圖示）、與支撐液晶面板之檢查 平台10、與使檢查平台移動之調整平台12。檢查平台10 係由面板承受器1 4與基座1 6所構成。於矩形的基座1 6 上固定有框狀的面板承受器1 4。以全體來看外形爲長方 形的面板承受器14，係由第1支撐部18、第2支撐部20 、第3支撐部22及第4支撐部24所構成。第1支撐部18 與第3支撐部22係構成長方形的長邊，第2支撐部20與 第4支撐部24係構成長方形的寬邊。相互鄰接之第1支 撐部18與弟2支撐部20’係其上面爲特定之高度，另一 方面’相互鄰接之第3支撐部22與第4支撐部24，係其 上面較特定之高度爲低。然後，於第3支撐部22之上面 與第4支撐部24之上面，係個別裝載複數之間隔物26。 間隔物26之上面的高度，係與第1支撐部18及第2支撐 部2 0之上面的高度在同樣之位置。複數的間隔物2 6之間 的排出空間2 8，係如後述般，爲空氣的排出口。 調整平台1 2係由上基座30、支柱32、背光裝置34 ( 參照圖4 )、下基座36及XYZ 0平台38所構成。XYZ 0 平台38，係可使下基座36在水平面內於相互直交之X方 -8- (5) 1299800 向與Y方向移動，進一步，可使下基座36於z方向（上 下方向）移動，更進一步，可使下基座36於與z方向平 行之迴轉軸周圍Θ迴轉。於下基座36之上，固定有背光 裝置34 (參照圖4 )。又，於下基座36之上，站有複數 ' 之支柱32，於支柱32之上端固定有上基座30。而於上基 座30上，固定有檢查平台10之基座16。 圖2係揭示擴大圖1的A部之擴大立體圖。於面板承 φ 受器之第1支撐部18設置有推進裝置40。推進裝置40係 具備有軌道42，對於該軌道42，滑件44係可滑動地結合 。於滑件44之上面，係可自由迴轉地設置推進滾輪46。 滑件4 4係藉由氣缸（未圖示）於Y方向前進後退，藉此 ，推進滾輪46也於Y方向前進後退。如使推進滾輪46向 箭頭5 0之方向移動，推進滾輪46係與液晶面板4 8的側 線接觸。回到圖1，於面板承受器的第3支撐部22之上 面，係可迴轉地設置止動滾輪52。藉由推進滾輪46推向 φ 箭頭50方向之液晶面板，係以止動滾輪52使其停止，藉 此決定液晶面板之Y方向的位置。同樣地，於面板承受器 的第2支撐部20也有推進滾輪54，於與其相對之第4支 撐部24有止動滾輪56 (也揭示於圖2 )。也藉由這些推 ' 進滾輪54與止動滾輪56，決定液晶面板之X方向的位置 • 。回到圖2，於第1支撐部18的外面，係固定有供給空 氣用之連接器58。於該連接器58連接有管60。由壓力空 氣源供給室溫之空氣於該管6 0。且空氣之供給壓力係0.1 0 · 2 Μ P a。 (6) 1299800 圖3係揭示於圖1之檢查平台的平面圖。於長方形的 基座1 6上裝載有長方狀的面板承受器1 4。於面板承受器 14的第1支撐部1 8，係附屬有兩個推進滾輪46，於第2 支撐部20係附屬有一個推進滾輪54。於第3支撐部22， 係附屬有兩個止動滾輪5 2，於第4支撐部2 4，係附屬有 有兩個止動滾輪5 2。於第3支撐部22之上面，係裝載有 三個間隔物26，與第4支撐部24之上面，係也裝載三個 間隔物26。於第1支撐部18與第2支撐部20之上面，係 形成有吸著溝（未圖示），以供給負壓於該吸著溝，使液 晶面板48可吸著保持於面板承受器14之上。 圖4係圖3之4-4線剖面圖。於XYZ 0平台38之上 ，固定有下基座36，於下基座36與上基座30之間有支 柱32。於下基座36之上，裝載有背光裝置34。背光裝置 34係具備有複數之螢光管35。於面板承受器14之內部係 設置有擴散板66。從背光裝置34之光係於擴散板66擴 散，成爲相同之照明光，照亮液晶面板48之背面。於面 板承受器1 4的第2支撐部20，係固定有供給空氣用之連 接器58，於該連接器58連接噴嘴62。噴嘴62，係貫通第 2支撐部20，開口於面板承受器14之內部空間64。於圖 4，可見到設置於第1支撐部之四個噴嘴62的先端部。因 面板承受器1 4係爲框狀，所以液晶面板48之背面中，周 邊部（以面板承受器14支撐之部分）以外的中央部份係 露出於內部空間64。噴嘴62之內徑係i.〇〜 i.4mm程度。 內部空間6 4之厚度，即，液晶面板4 8的背面與擴散板的 -10- (7) 1299800 係 60 台 第 物 面 由 側 檢 嘴 間 上 液 氣 間 22 部 14 擴 冷 上面之間的距離，係例如2〜4mm。噴嘴62於本發明中 該當氣體導入口。然後，由噴嘴62與連接器58與管 所成之構造，該當於本發明中之氣體吹附裝置。 圖5係圖3之5 - 5線剖面圖。但是，僅揭示檢查平 。圖的右半部，係爲讓第4支撐部24通過而切斷。於 4支撐部24之上面，置載有間隔物26，於鄰接之間隔 2 6間之中，於液晶面板4 8之背面與第4支撐部24之上 之間，形成排出空間28。該排出空間28，係用以排出 噴嘴62供給至內部空間64內之空氣至外部的空間。 圖6係擴大揭示圖4之第2支撐部20的附近（左 )與第4支撐部24的附近（右側）之剖面圖。而省略 查平台之中央部的圖示。於第1支撐部20係貫通有噴 62。噴嘴62之出口，係突出於面板承受器14之內部空 ，而讓內部空間4 8之背面接觸到空氣，出口係較爲向 仰。從噴嘴62係流出室溫之空氣68，該空氣係吹附至 晶面板48的背面。沿著液晶面板48之背面流動之空 68，係從第4支撐部24之上面與液晶面板48之背面之 所形成之排出空間2 8排出至外部。又，於第3支撐部 (參照圖2)之處，也同樣，從排出空間排出空氣至外 。面板承受器1 4之內部空間64，係四方以面板承受器 之四個支撐部包圍，上部係以液晶面板48，下部係以 散板όό包圍。 接著，參照圖6，說明該液晶面板檢查裝置的面板 卻作用。於面板承受器14之上，吸著保持液晶面板48 -11 - (8) 1299800 在由背光裝置34 (參照圖4 )之照明光照於液晶面板之背 面之狀態下，探針平台之複數之探針針腳係接觸液晶面板 4 8之複數之電極，實施液晶面板的點燈檢查。以背光裝 置照明間，係由噴嘴62之室溫空氣係向液晶面板48之背 面吹附。所以，起因於背光裝置之照明光的液晶面板48 之溫度上升係僅爲少量。例如，於3 0吋之液晶面板之場 > 合，於不吹附空氣之習知裝置係。如於背光點燈之檢查平 | 台，裝載液晶面板經過20分鐘，液晶面板之溫度上升係 約15 °C。對此，此實施例之場合，係於同樣之條件下， 液晶面板之溫度上升係5〜8 t。如上，因溫度上升係僅 爲少量，液晶面板48之熱膨脹量也係僅爲少量，於液晶 面板之複數之電極與探針平台之複數之探針針腳之間的位 置偏離，係於不會造成問題之程度。又，由噴嘴62所流 出之空氣，係冷卻至較室溫爲低者也可。但是，冷卻空氣 時，必須於不讓液晶面板結露程度之溫度下進行，例如， > 較室溫低5〜1 0 °C程度之溫度。 圖7係說明間隔物26之作用的剖面圖。於（A )及（ B )中，圖之左側係揭示第1支撐部1 8附近的剖面，圖之 右側係揭示第3支撐部22附近的剖面。液晶面板48係成 ^ ，於下玻璃板70 ( TFT形成之玻璃板）與上玻璃板72 ( •彩色濾光片形成之玻璃板）之間，封入液晶之構造。圖7 (A )，係於液晶面板48之下玻璃板70的下面，不存在 下側偏光板時之間隔物配置例，圖7 ( B )係於下玻璃板 70的下面，存在下側偏光板時之間隔物配置例。而關於 -12- (9) 1299800 上側偏光板，因與間隔物無關，係所以於圖示省略。 於圖7 ( A )中，間隔物26的厚度係爲tl。該tl係 與，第1支撐部18之上面的高度與第3支撐部22之上面 的高度之差相同。該tl係與排出空間28 (參照圖6 )的 厚度相同。另一方面，如圖7 ( B )所揭示，有下側偏光 板74時，係變更間隔物26的厚度爲t2。該t2係等於由 前述之11減掉下側偏光板7 4的厚度。下側偏光板7 4之 外緣，係於有電極之邊（裝載第1支撐部18側），從下 玻璃板70之外緣後退，而於無電極之邊（裝載第3支撐 部22側）延伸至下玻璃板70之外緣。 圖8，係揭示本發明的液晶面板檢查裝置之第2實施 例者’從上方僅見探針平台與檢查平台上之液晶面板48 之平面圖。探針平台，係具備第1探針基座76、第2探 針基座78、第1對向基座80 (對向於第1探針基座76 ) 、及第2對向基座82 (對向於第2探針基座78 )。第1 探針基座76與第1對向基座80係向Y方向延伸，第2探 針基座7 8與第2對向基座82係向X方向延伸。X方向與 Y方向係相互直交。液晶面板48係爲長方形，延著其一 短邊84配列複數閘極電極，又，沿著一長邊86配列資料 電極。 於第1探針基座76，係搭載閘極側探針單元88。於 該閘極側探針單元88，係固定有複數之探針區塊90。於 各探針區塊90，係係設置複數之探針針腳92。探針92係 接觸液晶面板48之閘極電極。於第2探針基座78，係搭 -13- (10) 1299800 載資料側探針單元94。於該資料側探針單元94，也設置 複數之探針區塊9 5與附屬之探針針腳。其探針針腳係接 觸液晶面板48之資料電極。 於第1對向基座8 0與第2 ·對向基座8 2，係個別設置 複數之上部噴嘴9 6。由這些上部噴嘴9 6係流出室溫空氣 ，其空氣係沿著液晶面板4 8之前面（上面）流動，防止 液晶面板48之上面的溫度上升。上部噴嘴96，係該當於 本發明中之第2氣體吹附裝置。 圖9係以圖8之9-9線切斷之剖面圖，也圖示探針平 台之下方之檢查平台與調整平台。檢查平台與調整平台之 剖面部分係與圖4相同。可見到固定於閘極側探針單元 88之探針區塊90與固定於資料側探針單元94之探針區 塊95。然後，於第1對向基座80，係固定有上部噴嘴96 。又，液晶面板48之背面也以由噴嘴62流出之空氣冷卻 ，而關於背面之冷卻係與第1實施例相同。 該第2實施例，係因吹附空氣於液晶面板48之背面 與前面之兩方，所以較第1實施例可抑制液晶面板48的 溫度上升。 關於吹附至液晶面板之上面的空氣’也可用由離子產 生器流出之離子化空氣。離子產生器係使空氣中之氣體分 子帶電有正及負之離子者’由離子產生器流出之空氣係含 有大量之正負離子。如吹附此離子化空氣於液晶面板之前 面，帶電於液晶面板之前面之靜電係被除電，防止液晶面 板上之電路的靜電破壞。又’吹附至液晶面板之背面之空 -14- (11) 1299800 氣也可使用離子化空氣。 【圖式簡單說明】 〔圖1〕圖1係於本發明的液晶面板檢查裝置之一的 實施例中，檢查平台及調整平台的立體圖。 〔圖2〕圖2係揭示擴大圖1的A部之擴大立體圖。 〔圖3〕圖3係揭示於圖1之檢查平台的平面圖。 〔圖4〕圖3之4-4線剖面圖。 〔圖5〕圖3之5-5線剖面圖。 〔圖6〕擴大揭示圖4之第2支撐部20的附近（左 側）與第4支撐部24的附近（右側）之剖面圖。 〔圖7〕圖7 ( a )、 （ b )係說明間隔物％之作用的 剖面圖。 〔圖8〕第2實施例之平面圖。 〔圖9〕以圖8之9 - 9線切斷之剖面圖。 【主要元件符號說明】 10 檢 查 平 台 12 調 整 平 台 12 面 板 承 受 器 16 基 座 18 第 1 支 撐 部 20 第 2 支 撐 部 22 第 3 支 撐 部 -15- 1299800 (12) 24 第4支撐 26 間隔物 28 排出空間 34 背光裝置 4 8 液晶面板 58 連接器 60 管 62 噴嘴 64 內部空間 66 擴散板 68 空氣 90 探針區塊 92 探針 95 探針區塊 96 上部噴嘴 -16-1299800 (1) Description of the Invention [Technical Field] The present invention relates to an inspection apparatus for inspecting a liquid crystal panel by contacting a probe with an electrode of a liquid crystal panel. In particular, it relates to a liquid crystal panel inspection device which is characterized by a structure for suppressing an increase in temperature of a liquid crystal panel. [Prior Art] When performing the lighting inspection of the liquid crystal panel, a specific voltage is applied to the plurality of electrodes of the liquid crystal panel in a state where the backlight is illuminated from the back side of the liquid crystal panel, and the state of each of the liquid crystal panels is checked. . This liquid crystal panel inspection device is disclosed, for example, in Patent Document 1 below. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-24 1 68 No. 1. SUMMARY OF THE INVENTION In the liquid crystal panel inspection device, the temperature of the liquid crystal panel increases due to illumination of the backlight. For example, if the brightness of the backlight is about 20,000 cd and the thermal expansion coefficient of the glass is about 9 ppm, in the case of a liquid crystal panel of 30 Å, the backlight is mounted on the inspection platform for lighting for 20 minutes, and the liquid crystal panel is mounted. The system only rises by about 15 °C. By this temperature rise, the long side of the liquid crystal panel of 30 仅 only thermally expands by about 80 // m. For larger 5 0 • 液晶 LCD panels, the long side is thermally expanded by approximately 140 μm. When the liquid crystal panel is thermally expanded, a positional deviation occurs between the plurality of electrodes of the liquid crystal panel and the plurality of probes corresponding to the plurality of electrodes, resulting in poor contact between the electrodes and the probe. -5- (2) 1299800 The present invention has been made to solve the problem, and an object thereof is to provide a liquid crystal panel inspection apparatus capable of suppressing an increase in temperature of a liquid crystal panel. [Means for Solving the Problem] The liquid crystal panel inspection device of the present invention has the structures (1) to (6) below. (1) The inspection platform supports the liquid crystal panel with a peripheral portion of the liquid crystal panel and has an inner space exposing at least a portion of the back surface of the liquid crystal panel. (2) The gas blowing device has a gas introduction port that is opened in the internal space, and the gas is blown to the back surface of the liquid crystal panel supported by the inspection platform. (3) A probe platform having probes that are in contact with a plurality of electrodes of a liquid crystal panel supported by the inspection platform. (4) A backlight device that illuminates the liquid crystal panel supported by the inspection platform from the back. (5) Further, the inspection platform is provided with four support portions for supporting four sides of a rectangular liquid crystal panel, and is formed between the liquid crystal panel and the support portion in the support portion to be formed from the internal space. The gas discharge port through which the gas is discharged. (6) Among the four support portions, the gas blowing means is provided in the adjacent two supporting portions, and the gas discharge ports are formed in the other two supporting portions. In this manner, when the gas is blown onto the back surface of the liquid crystal panel, when the liquid crystal panel is illuminated by the backlight, the temperature rise of the liquid crystal panel can be suppressed. In the aforementioned inspection platform, a gas discharge port for discharging the blown gas may be provided. The 卩 , the inspection platform is provided with four support portions for supporting four sides of the rectangular liquid crystal panel, and at least one support portion is disposed between the liquid crystal panel and the support portion to be provided from the aforementioned internal space. Gas discharge -6 - (3) 1299800 gas discharge port. Among the four support portions, the gas blowing means may be provided in the adjacent two supporting portions, and the gas discharge ports may be provided in the other two supporting portions. As a place where the gas is blown, not only the back surface of the liquid crystal panel but also the front surface of the liquid crystal panel can be attached. ' As a gas to be attached to the liquid crystal panel, it may be a gas containing φ. That is, it can also be ionized air generated by an ion generator. The liquid crystal panel is blown with a gas containing ions to remove static electricity from the liquid crystal panel. As far as the inventors are aware, in the liquid crystal panel inspection apparatus, the technique in which the liquid crystal panel is blown with air to prevent the temperature of the liquid crystal panel from rising has not been seen so far. However, in the apparatus for inspecting the short circuit of the printed circuit board using the liquid crystal panel, the technique of blowing air of a specific temperature to the liquid crystal panel in order to maintain the desired temperature of the liquid crystal panel can be found in Patent Document 2 below. [Patent Document 2] Japanese Laid-Open Patent Publication No. SHO 64-66567. When the technique of the present invention and the technique of Patent Document 2 are compared, the present invention is a liquid crystal panel to be inspected (the probe pins are in contact with the electrodes thereof) to prevent the temperature from rising by the backlight, which is different from the technique of Patent Document 2. . In Patent Document 2, the inspection target is a printed circuit wiring board, and the liquid crystal panel is used as a means for finding a short-circuited portion of the printed circuit board. [Effects of the Invention] According to the present invention, since the liquid crystal panel that blows air on the inspection platform can suppress the temperature of the liquid crystal panel from rising to 1299800 (4) even if the backlight light is applied to the liquid crystal panel. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 is a perspective view of an inspection platform and an adjustment platform in an embodiment of one of the liquid crystal panel inspection devices of the present invention. The liquid crystal panel inspection apparatus includes a probe platform (not shown) including probe pins, an inspection platform 10 for supporting the liquid crystal panel, and an adjustment stage 12 for moving the inspection platform. The inspection platform 10 is composed of a panel susceptor 14 and a pedestal 16. A frame-shaped panel susceptor 14 is fixed to the rectangular base 16. The panel susceptor 14 having a rectangular outer shape as a whole is composed of the first support portion 18, the second support portion 20, the third support portion 22, and the fourth support portion 24. The first support portion 18 and the third support portion 22 constitute a rectangular long side, and the second support portion 20 and the fourth support portion 24 constitute a rectangular wide side. The first support portion 18 and the second support portion 20' adjacent to each other have a specific height on the upper surface thereof, and the third support portion 22 and the fourth support portion 24 adjacent to each other have a specific height on the upper surface thereof. low. Then, a plurality of spacers 26 are individually mounted on the upper surface of the third support portion 22 and the upper surface of the fourth support portion 24. The height of the upper surface of the spacer 26 is at the same position as the height of the upper surface of the first support portion 18 and the second support portion 20. The discharge space 28 between the plurality of spacers 26 is an air discharge port as will be described later. The adjustment platform 12 is composed of an upper base 30, a support 32, a backlight 34 (see FIG. 4), a lower base 36, and an XYZ 0 platform 38. The XYZ 0 platform 38 is configured such that the lower base 36 can move in the Y direction in the horizontal direction of the X-square -8-(5) 1299800 which is orthogonal to each other, and further, the lower base 36 can be moved in the z direction (up and down direction). Further, the lower base 36 can be rotated about the axis of rotation parallel to the z direction. On the lower base 36, a backlight unit 34 (see Fig. 4) is fixed. Further, on the lower base 36, a plurality of pillars 32 are stood, and the upper base 30 is fixed to the upper end of the pillar 32. On the upper base 30, a base 16 for the inspection platform 10 is fixed. Fig. 2 is an enlarged perspective view showing an enlarged portion A of Fig. 1. A propulsion device 40 is provided on the first support portion 18 of the panel receiving φ receiver. The propulsion device 40 is provided with a rail 42 to which the slider 44 is slidably coupled. Above the slider 44, a pusher roller 46 is rotatably provided. The slider 44 is advanced and retracted in the Y direction by a cylinder (not shown), whereby the propulsion roller 46 is also moved forward and backward in the Y direction. When the advance roller 46 is moved in the direction of the arrow 50, the push roller 46 is in contact with the side line of the liquid crystal panel 48. Referring back to Fig. 1, the stopper roller 52 is rotatably provided above the third support portion 22 of the panel receiver. By pushing the roller 46 toward the liquid crystal panel in the direction of the φ arrow 50, the stop roller 52 is stopped to thereby determine the position of the liquid crystal panel in the Y direction. Similarly, the second support portion 20 of the panel receiver has a push roller 54, and the fourth support portion 24 faces the stop roller 56 (also shown in Fig. 2). The position of the liquid crystal panel in the X direction is also determined by the push roller 54 and the stop roller 56. Referring back to Fig. 2, a connector 58 for supplying air is fixed to the outside of the first support portion 18. A pipe 60 is connected to the connector 58. Room temperature air is supplied to the tube 60 from a pressurized air source. And the supply pressure of the air is 0.1 0 · 2 Μ P a. (6) 1299800 Figure 3 is a plan view of the inspection platform disclosed in Figure 1. A rectangular panel susceptor 14 is mounted on a rectangular base 16. Two propulsion rollers 46 are attached to the first support portion 18 of the panel receiver 14, and a propulsion roller 54 is attached to the second support portion 20. Two stopper rollers 52 are attached to the third support portion 22, and two stopper rollers 52 are attached to the fourth support portion 24. Three spacers 26 are placed on the upper surface of the third support portion 22, and three spacers 26 are mounted on the upper surface of the fourth support portion 24. A suction groove (not shown) is formed on the upper surface of the first support portion 18 and the second support portion 20 to supply a negative pressure to the suction groove, so that the liquid crystal panel 48 can be sucked and held by the panel receiver 14 Above. Figure 4 is a cross-sectional view taken along line 4-4 of Figure 3. Above the XYZ 0 platform 38, a lower base 36 is secured, with a post 32 between the lower base 36 and the upper base 30. Above the lower base 36, a backlight 34 is mounted. The backlight unit 34 is provided with a plurality of fluorescent tubes 35. A diffuser plate 66 is disposed inside the panel susceptor 14. The light from the backlight unit 34 is diffused on the diffusing plate 66 to become the same illumination light, and the back surface of the liquid crystal panel 48 is illuminated. A connector 58 for supplying air is fixed to the second support portion 20 of the panel receiver 14, and a nozzle 62 is connected to the connector 58. The nozzle 62 penetrates the second support portion 20 and opens into the internal space 64 of the panel receiver 14. In Fig. 4, the tip end portions of the four nozzles 62 provided in the first support portion can be seen. Since the panel susceptor 14 has a frame shape, a central portion other than the peripheral portion (portion supported by the panel susceptor 14) is exposed to the internal space 64 in the back surface of the liquid crystal panel 48. The inner diameter of the nozzle 62 is i.〇~i.4mm. The thickness of the internal space 64, that is, the back surface of the liquid crystal panel 48 and the diffusion plate -10- (7) 1299800 series 60 of the first object surface between the side nozzles between the liquid and gas compartment 22 14 The distance is, for example, 2 to 4 mm. The nozzle 62 is a gas introduction port in the present invention. Then, it is constructed by the nozzle 62 and the connector 58 and the tube, which is the gas blowing device in the present invention. Figure 5 is a sectional view taken along line 5 - 5 of Figure 3. However, only revealing the check is flat. The right half of the figure is cut so that the fourth support portion 24 passes. A spacer 26 is placed on the upper surface of the support portion 24, and a discharge space 28 is formed between the back surface of the liquid crystal panel 48 and the fourth support portion 24 between the adjacent spaces. The discharge space 28 is for discharging the air supplied from the nozzle 62 into the internal space 64 to the outside. Fig. 6 is a cross-sectional view showing the vicinity (left) of the second support portion 20 of Fig. 4 and the vicinity (right side) of the fourth support portion 24. The illustration of the central part of the platform is omitted. A spray 62 is passed through the first support portion 20. The outlet of the nozzle 62 protrudes from the inner space of the panel susceptor 14, and the back of the inner space 48 is in contact with the air, and the outlet is relatively inclined. The ambient air 68 is discharged from the nozzle 62, and the air is blown to the back surface of the crystal panel 48. The space 68 flowing along the back surface of the liquid crystal panel 48 is discharged to the outside from the upper surface of the fourth support portion 24 and the discharge space 28 formed on the back surface of the liquid crystal panel 48. Further, in the same manner as in the third support portion (see Fig. 2), air is discharged from the discharge space to the outside. The inner space 64 of the panel susceptor 14 is surrounded by four support portions of the panel susceptor, and the liquid crystal panel 48 is attached to the upper portion and the lower portion is surrounded by the slab. Next, the panel of the liquid crystal panel inspection device will be described with reference to Fig. 6 . On the panel susceptor 14, absorbing and holding the liquid crystal panel 48 -11 - (8) 1299800 in the state of illumination by the backlight 34 (refer to FIG. 4) on the back side of the liquid crystal panel, the probe platform The needle pins contact the plurality of electrodes of the liquid crystal panel 48 to perform the lighting inspection of the liquid crystal panel. The illumination room in the backlight unit is blown to the back surface of the liquid crystal panel 48 by the room temperature air of the nozzle 62. Therefore, the temperature rise of the liquid crystal panel 48 due to the illumination light of the backlight device is only a small amount. For example, in the field of LCD panels of 30 &, the conventional device system that does not blow air. For example, after checking the backlight lighting, the LCD panel is loaded for 20 minutes, and the temperature rise of the LCD panel is about 15 °C. In this case, in the case of this embodiment, the temperature rise of the liquid crystal panel is 5 to 8 t under the same conditions. As described above, since the temperature rise is only a small amount, the amount of thermal expansion of the liquid crystal panel 48 is also small, and the positional deviation between the plurality of electrodes of the liquid crystal panel and the probe pins of the probe platform is not caused. The extent of the problem. Further, the air discharged from the nozzle 62 may be cooled to a temperature lower than room temperature. However, when cooling the air, it must be carried out at a temperature that does not allow the liquid crystal panel to dew condensation, for example, > a temperature lower than room temperature by 5 to 10 °C. Figure 7 is a cross-sectional view showing the action of the spacer 26. In (A) and (B), the left side of the figure discloses a cross section in the vicinity of the first support portion 18, and the right side of the figure discloses a cross section in the vicinity of the third support portion 22. The liquid crystal panel 48 is structured such that a liquid crystal is sealed between the lower glass plate 70 (the glass plate formed by the TFT) and the upper glass plate 72 (the glass plate formed by the color filter). Fig. 7 (A) is a spacer arrangement example in the lower surface of the glass plate 70 below the liquid crystal panel 48, and there is no lower polarizing plate, and Fig. 7 (B) is below the lower glass plate 70, and there is a lower side polarized light. Example of spacer arrangement at the time of board. Regarding the -12-(9) 1299800 upper polarizing plate, it is omitted from the illustration because it is independent of the spacer. In FIG. 7(A), the thickness of the spacer 26 is t1. The tl is the same as the difference between the height of the upper surface of the first support portion 18 and the height of the upper surface of the third support portion 22. This tl is the same as the thickness of the discharge space 28 (see Fig. 6). On the other hand, as shown in Fig. 7(B), when the lower polarizing plate 74 is present, the thickness of the spacer 26 is changed to t2. This t2 is equal to the thickness of the lower polarizing plate 74 reduced by the aforementioned 11. The outer edge of the lower polarizing plate 7 4 is attached to the side of the electrode (on the side of the first support portion 18), and is retracted from the outer edge of the lower glass plate 70, and is placed on the side of the electrodeless side (the third support portion 22 is loaded) ) extends to the outer edge of the lower glass plate 70. Fig. 8 is a plan view showing a second embodiment of the liquid crystal panel inspection apparatus of the present invention. Only the probe stage and the liquid crystal panel 48 on the inspection stage are seen from above. The probe platform includes a first probe base 76, a second probe base 78, a first counter base 80 (opposing the first probe base 76), and a second counter base 82. (opposing the second probe base 78). The first probe base 76 and the first counter base 80 extend in the Y direction, and the second probe base 78 and the second counter base 82 extend in the X direction. The X direction and the Y direction are orthogonal to each other. The liquid crystal panel 48 is rectangular, with a plurality of gate electrodes extending along a short side 84 thereof, and a data electrode along a long side 86. The gate side probe unit 88 is mounted on the first probe base 76. A plurality of probe blocks 90 are fixed to the gate side probe unit 88. In each of the probe blocks 90, a plurality of probe pins 92 are provided. The probe 92 is in contact with the gate electrode of the liquid crystal panel 48. On the second probe base 78, the data side probe unit 94 is mounted on the -13-(10) 1299800. A plurality of probe blocks 9.5 and associated probe pins are also provided to the data side probe unit 94. The probe pins are in contact with the data electrodes of the liquid crystal panel 48. A plurality of upper nozzles 96 are separately provided in the first counter pedestal 80 and the second counter pedestal 8 2 . The room temperature air flows out from the upper nozzles 96, and the air flows along the front surface (upper surface) of the liquid crystal panel 48 to prevent the temperature above the liquid crystal panel 48 from rising. The upper nozzle 96 is the second gas blowing device in the present invention. Fig. 9 is a cross-sectional view taken along line 9-9 of Fig. 8, and also shows an inspection platform and an adjustment platform below the probe platform. The section of the inspection platform and the adjustment platform is the same as that of Figure 4. The probe block 90 fixed to the gate side probe unit 88 and the probe block 95 fixed to the data side probe unit 94 can be seen. Then, the upper nozzle 96 is fixed to the first opposing base 80. Further, the back surface of the liquid crystal panel 48 is also cooled by the air flowing out of the nozzle 62, and the cooling system for the back surface is the same as that of the first embodiment. In the second embodiment, since the air is blown on both the back surface and the front surface of the liquid crystal panel 48, the temperature rise of the liquid crystal panel 48 can be suppressed as compared with the first embodiment. The air 'adsorbed to the upper surface of the liquid crystal panel' may also be ionized air flowing out from the ion generator. The ion generator is such that the gas molecules in the air are charged with positive and negative ions. The air flowing out of the ion generator contains a large amount of positive and negative ions. If the ionized air is blown to the front of the liquid crystal panel, the static electricity charged on the front side of the liquid crystal panel is neutralized to prevent electrostatic breakdown of the circuit on the liquid crystal panel. Also, the air blown to the back of the liquid crystal panel -14- (11) 1299800 gas can also use ionized air. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of an inspection platform and an adjustment platform in an embodiment of one of the liquid crystal panel inspection devices of the present invention. Fig. 2 is an enlarged perspective view showing an enlarged portion A of Fig. 1. [Fig. 3] Fig. 3 is a plan view of the inspection platform disclosed in Fig. 1. [Fig. 4] A cross-sectional view taken along line 4-4 of Fig. 3. [Fig. 5] A cross-sectional view taken along line 5-5 of Fig. 3. Fig. 6 is a cross-sectional view showing the vicinity (left side) of the second support portion 20 of Fig. 4 and the vicinity (right side) of the fourth support portion 24. Fig. 7 (a) and (b) are cross-sectional views showing the action of the spacer %. Fig. 8 is a plan view showing a second embodiment. Fig. 9 is a cross-sectional view taken along line 9-9 of Fig. 8. [Main component symbol description] 10 Inspection platform 12 Adjustment platform 12 Panel susceptor 16 Base 18 First support portion 20 Second support portion 22 Third support portion -15- 1299800 (12) 24 Fourth support 26 Spacer 28 Discharge Space 34 Backlight 4 8 Liquid crystal panel 58 Connector 60 Tube 62 Nozzle 64 Internal space 66 Diffusion plate 68 Air 90 Probe block 92 Probe 95 Probe block 96 Upper nozzle-16-