1294970 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種電壓施加裝置，例如用於積體電路 器，根據設定電壓與回饋之輪出電壓的電壓差，在控制輪/雷^ 的電壓施加裝置内，能形成幾乎以直線狀增大的上升電壓波形， 【先前技術】 積體電路測試器，例如對記憶體積體電路等受測試 下簡稱DUT)給予輸人模式，並比較從DUT的輸出 ^ = 形來判定Dur的㈣。然後，要求積體電路職器以與 際使用狀_ _條件來進行職。近年來，記憶 二1294970 IX. Description of the Invention: [Technical Field] The present invention relates to a voltage application device, for example, for an integrated circuit device, based on a voltage difference between a set voltage and a feedback output voltage, in a control wheel/ray In the voltage application device, a rising voltage waveform that increases almost linearly can be formed. [Prior Art] An integrated circuit tester, for example, a DUT for a memory volume circuit or the like, is given an input mode, and compared with the DUT. The output ^ = shape to determine Dur's (four). Then, the integrated circuit processor is required to perform the job in the condition of __. In recent years, memory two
於電源電壓上升時間延遲達於數十_、的情況增多。因此電H ίΐίϊ:前更加延遲的上升時間進行電壓調整的須求。以下: 在圖1中，電源供給單元10供給DUT2〇The delay in the rise of the power supply voltage is increased by several tens of _. Therefore, the electric H ίΐίϊ: the need for voltage adjustment before the more delayed rise time. Hereinafter: In Fig. 1, the power supply unit 10 supplies DUT2〇
Wit 10 〇 電^^ 12的—端接於數位/類比變換器11的輸出端。^ 12的另1。絲放大㈣在餘U的另^ 知接反轉輸人端子，非反轉輸人端子 另 差動放大㈣_反翻^端子，一端接 藉由使可變電容器15的雷^;Γ/'15構成時間常數電路，並 。設電阻13的電阻值為R、 數的目的 常數r = RxC。電流測定用電阻16 :端^^為^ =間 端，另一端接DUHO。二搞辦17、1δ、接差動放大斋14的輪出 定用電阻16並聯接以互相相反的方向與電流測 圖示的裝置，ΐ^Γ定,。、义，，_朗電阻16，並以“ 用電阻16的另一放大器 19的輪入端接電流測定 H力為，輪出端接電阻13的另一遮。 疋 像讀的裝置其動作說明如 : 固2乃如圖1所示之電源供 1294970 (A) π ^ 屢波形ΐ ( ) ’（B)則為施加於DUT20的電 換器n的輸U出立即ί升轴為^值於，為時間。縱數位/類比變 阻13與可變加於DUT20的電壓波形卻因為電 藉由調整可變的時間常數電路而延遲上升。又可 二Γ二 使上升時間由U變化到C。 開公報第Μ先前敎獻，有例如日本專利公 題。然而’像這樣的電源縣單元1〇，存在有下述必須解決的問 整供元^可藉調整可變電容器15來調 積體電路電源電壓施力波形。蓋記憶體 而無法滿足這樣的要、=疋要求軸直線上升的波形的， 认银的要衣成為必須被解決的問題。 【發明内容】 本發明欲解決的課題為··提帝 幾乎以直線狀增大上升的電壓種电£知加叙置’其能形成 【實施方式】 以下本發明以圖示詳細 施加裝置的-實施範例構造圖。二。不，士發明之電壓 樣符號表示，其說明省略之。 〃圖1之要素相同者以同 圖3中，電壓供給單元3〇 10的構造幾乎相同，用以供置’與紐供給單元 接差動放大器14的反轉輪‘^開關31 -端 器15而^，其-端接_ 31二—^^3=為代替可變電容 大器14的軸。織 1294970 路 下~^ II關 為N°以下就開關31設以⑽的情況 ft數位/類比變換器11，藉未經圖示表示的控制部，; 壓i开如i〇//s)以一定比例增大的梯級狀電 的時候，數位概變換器11的輸出呈梯級狀變化 射/又為供給dut20的電壓到達幾乎ι〇0%的時間。 形盘二®4表示__變換㈣的輸出波 換ίΓ的於屮iif皮形。圖中虛線波形41表示數位/類比變 t； !2 if 42 DUT2° ^ 〇 X , 示之。電P13的電阻值相同’波形41乃以反轉極性的方式表 5V) 表示變化速率為5〇〇V/SeC ( 10mS内由〇V變化到 MSiH ^例。如波形41所示，數位/類比變換器11形成每10 ί =於:定Γ。該波形以時間常數電路去除t ^ 時間當數、，:L在#内剛好追上數位/類比變換器11輸出的 =數故供給而丁20的電源電壓（波形42)呈現非梯級肤的 ;V/4n^^T雖然省略中間過程，但由於間隔數高達1000 (=、 )才°的關係，故能得到良好的直線性。 固定m ί示變化速率為2蕭咖時的波形例。階躍時間 此時:於二η數"立/類比變換器11令輸出的階躍電壓為2.5mV。 變換t的源電壓在10#8内剛好追上數位/類比 性。i因現!弟級狀波形，而亦能得到良好的直線 且因間隔數咼達2000 (=5V/2.5mV)格。 變換了得到的變化^率，而將數位/類比 ts ^Γΐ5 的例示。由於供給DUT20的電源電麗在1〇 ，達到4乎安定的狀態，而在波形42巾產生平 故然法传到良好的直線性。相反的，若階躍時間比心$刀更 1294970 短％，由於供應給DUT2〇的 ‘ 11的輸出就變化了，故而料彳’數位/類比變換器 然後，在不調整變化速、率U良好的直線性。 ^的控制部給予數位/類換^為OFF ’未經 而電源 器11將輸出階躍時間固定，l 電屋波形，數位/類比變換 供給DUT2G的電源娜賴間隔幅度。如此-來’使 成近乎直線狀上升的電壓波带^的=劇=變化的部份’進而能形 情況，可藉適當的改變電壓的間隔#^；^以外振幅波形的 圖3所示，雖然乃的方式貫現之。 器32，並與電阻13、、、一起幵f 14的，迴路内***電容 間常數電路配置於立他部1亦;曰實施範例，然將該時 與 元供給單 輸出立而則接電阻12的一端。 勺另一食而，其 時門乃以電阻51與電容器53形成時間常數電路，兮 =常數電路插人於數位/類轉鮮u 1 術匕’配置於數位/類比變換器二 ΖΤΖΖ^1ξΤ^λ ° ^ μ 入H㈣放大器19的輪出入端、差動放大器 右欲輸出變化速率小的波形，亦即上升遲緩的 e生階躍電壓在數位/類比變換器η之解析度 ^ ^ 情形下，通常只要增大_、32、53的容量以增 1294970 升^日回由於係輸出變化速率大的波形，亦即上 ΐΐ ΐϊΐ,係，故間隔數會變少而直線性會惡化。 所亍又=數’適#更換即可。其實施範例如圖6 f素相同者關樣符縣示，其說明省略之。 元30播\幽丄’4電屋供給單元6〇乃電壓施加裝置’與電流供給單 開關Vfii ^同:供ίDUT20固定的電壓。開關61乃為代替 器62乃成二麩 ^大益14的反轉輪入端子接可動接點a。電容 二端接#^1^各^ 32所設’—端接開關61的固定接點C，另 接的輸出端。餘1163 —端接賴61的固定 哭62 m/，f差動放大為M的輪出端。然後，電阻13與電容 财數電路。例如’奴電容器62容量二倍於 63 . ^ 且階躍時間為1〇/ZS時’開關61會選擇電容器 63，20//S日守則會選擇電容器62。 1 25 置^似明如下。以上升時間為1Gms，奴電麼變更為 1.25〜5V，就供給DUT20電源電壓的情況說明之。 〜wH解析度為Μ·的數位/類比變換器，在設定賴為 哭62 ίί下」f關61的可動接點&跳固定接點C以選擇電容 = 圖'爾制部以階躍時叫s、間隔數到 开/，此，當设定電壓為2V時，為了使間隔數到達5〇〇，配合2 5 Γ t5^L的階躍雜輸出2V_壓。結果，即使設定電餅 低，亦犯確保間隔數，而達到近乎直線狀上升的目的。 ，门ί ’在設定電屢為2·5〜5¥的情況下，開關61的可動接點a ^疋接以選擇電容11 63。然後，讓未經圖示的控制部即比 躍日巧10#S、間隔數到1〇00、階躍電壓2·5或5mV工:: k換裔11輸出梯級狀的波形。同樣的，當設、' 了使間隔數到達圆，而配合2.5 mV或5mv的^$ =壓。結果，即使設定電壓高，也能而達到近乎直線狀=的 1294970 然後，在不調整變化速率的情況下， J定=b。未經圖示的控制部供給數 a跳 電路’然而用、以 號中的尚頻率部分而變換成平滑波形的構造即可狀之電墨信 ^ ’雖然使用作為產生梯級狀電壓褒置的數位 ，Μ而不一定是數位/類比變換器也可以。只〜 >換器11 的階躍電壓而能產生梯級狀波形，躍時 壓的電壓產生部即可。 」改、交该階躍電 又，電流測定用電阻16、二極體17、18 定的話就不需要。 要疋不進行電流測 又，雖然顯示出設置了開關31、61的構妙 、61的構造亦可。只是這樣就冑 =，又有開關31 了。 犹又成了請調整變化速率的構造 又，雖然顯示出以電源供給單元3〇、5〇 源的構造，然而非限定這些物件， D师0電 的裝置的話，任何物件都可以。要有*要舰速率電壓 i以ίίίίΐ上可變電容器以變更時間常數的構造亦可。 2明顯可知，依本發明而有如次效果。 種展置，/、基於設定電壓與回饋之輸出電壓的雷题罢如 輸出電壓的電壓施加裝置内，以設於該電壓產出敗ΐ =輸出電壓回饋路徑内之時間常數電路，除去階 輪出，級狀變化波形之電壓產生部輸出的高頻率部分。3内 藉縮短，定ρ皆躍時間而增加間隔數，能供給近似 的波形。又措改變階躍電壓，能簡單的使變化速率可變動。曰大 又，因，時間常數電路的時間常數至少能夠二梯級切 係’故能在廣範圍内形成近乎直線狀增大的上升電壓波形換胃 又’因為電壓產生部輸出在階躍時間内產生梯級狀變化 10 1294970 ‘的電壓，並以分壓電阻與電 而輸出電摩的闕係，故能輪；^夺間常數電路除去高頻率部分 、直線狀增大的上升電壓波形。 【圖式簡單說明】 供給單元之構成圖。 圖3係顯示本發明之—f f ‘ 係顯示圖3所示裝置之特性的圖式。 不本發明之第2實施範例的構成圖。 圖係顯示本發明之第3實施範例的構成圖。 【主要元件符號說明】 10 11 12 13 14 15 16 17 18 19 20 30 31 32 50 51 52 電源供給單元 數位/類比變換器 電阻 電阻 差動放大器 可變電容器 電流測定用電阻 二極體 二極體 緩衝放大器 受測試對象 電源供給單元 開關 電容器 電源供給單元 電阻 開關 11 1294970 • 53 :電容器 54 :緩衝放大器 60 :電源供給單元 61 :開關 62 :電容器 63 :電容器The Wit 10 〇 is connected to the output of the digital/analog converter 11. ^ 1 of the other 12. Wire amplification (4) In the other part of the remaining U, the input terminal is reversed, the non-inverting input terminal is differentially amplified (4) _ reversed to the ^ terminal, and one end is connected by the variable capacitor 15; 15 constitutes a time constant circuit, and. Let the resistance value of the resistor 13 be the target constant of R and the number r = RxC. The current measuring resistor 16 is terminated by ^^ and the other end is connected to DUHO. Second, do 17, 1δ, the differential amplification of the 14 round of the use of the resistor 16 and connect the opposite direction and current measurement device, ΐ ^ Γ,. , meaning,, _ 朗 resistor 16, and "measuring the H force with the wheel-in termination current of the other amplifier 19 of the resistor 16 as the other cover of the terminal resistor 13 is turned off. For example: Solid 2 is the power supply shown in Figure 1 for 1294970 (A) π ^ Repeated waveform ΐ ( ) '(B) is the output of the electric converter n applied to the DUT20. Immediately, the axis is ^ For the time, the vertical digit/analog varistor 13 and the voltage waveform that is variably applied to the DUT 20 are delayed due to the adjustment of the variable time constant circuit by electricity. The rise time can be changed from U to C by the second. For example, there is a Japanese patent publication. However, the power supply unit unit like this has the following problem that must be solved: the variable capacitor 15 can be used to adjust the body circuit. The voltage of the power supply voltage is applied to the memory, and it is impossible to satisfy the above-mentioned problem that the required axis is required to rise, and the silver-coated clothing is a problem that must be solved. [Disclosure] The problem to be solved by the present invention is · Titian almost increases the voltage of the rising voltage in a straight line. [Embodiment] Hereinafter, the present invention will be described with reference to a configuration example of a detailed application device. Second, the voltage-like symbol of the invention is indicated, and the description thereof is omitted. The same elements of FIG. 1 are the same as those in FIG. The configuration of the voltage supply unit 3〇10 is almost the same, and is used to supply the 'inverting wheel' of the differential amplifier 14 to the new supply unit, and the switch 31-terminal 15 is connected to the terminal _ 31 two-^ ^3=Instead of the axis of the variable capacitance device 14. Weaving 1294970 is down~^ II is off N°, and the switch 31 is set to (10). The ft digital/analog converter 11 is controlled by a not shown. When the pressure i is increased, such as i〇//s), the output of the digital converter 11 changes in a stepwise manner, and the voltage supplied to the dut20 reaches almost ι〇0%. The time of the plate II®4 indicates that the output wave of the __transform (4) is changed to the shape of the 屮iif skin. The dotted line waveform 41 in the figure indicates the digit/analog ratio t; !2 if 42 DUT2° ^ 〇X , which is shown. The resistance value of the electric P13 is the same 'waveform 41 is in the form of reverse polarity. Table 5V) indicates that the rate of change is 5〇〇V/SeC (within 10mS) From 〇V to MSiH^. As shown by waveform 41, the digital/analog converter 11 is formed every 10 ί = :: 波形. The waveform is removed by time constant circuit by t ^ time when, , , , , , , Just as the number of output of the digital/analog converter 11 is caught up, the power supply voltage (waveform 42) of the supply 20 (the waveform 42) is non-stepped; the V/4n^^T omits the intermediate process, but the interval is as high as 1000 (= , ), the relationship between °, so you can get a good linearity. Fixed m ί shows the waveform example when the rate of change is 2 Xiaocha. Step time At this point: the two η number " vertical / analog converter 11 makes the output step voltage is 2.5mV. The source voltage of the transform t just catches up with the digit/analog in 10#8. Because of the current waveform, you can get a good straight line and the number of intervals is up to 2000 (=5V/2.5mV). The obtained change rate is transformed, and the digit/analog ratio ts ^ Γΐ 5 is exemplified. Since the power supply to the DUT 20 is at 1 〇, it reaches a state of 4 stability, and in the waveform 42 the film is flat and the good linearity is transmitted. Conversely, if the step time is 1294970 shorter than the heart $ knife, the output of '11 is changed due to the supply to DUT2〇, so the 'digital/analog converter is then adjusted, and the rate of change is not good. Straightness. The control unit of ^ gives the digit/class change to OFF'. Otherwise, the power supply 11 fixes the output step time, and the electric house waveform, digital/analog conversion supplies the power supply interval of the DUT2G. In this way, 'the part of the voltage wave band ^ which is nearly linearly rising can be changed, and the shape can be changed, as shown in Fig. 3 of the amplitude waveform outside the interval of the appropriate voltage change. Although it is the way it is. The device 32 is connected to the resistors 13, and 幵f 14 , and the inter-capacitor constant circuit is disposed in the circuit 1 in the circuit; in the embodiment, the output is connected to the unit and the resistor 12 is connected. One end. Another spoon, the time gate is formed by the resistor 51 and the capacitor 53 to form a time constant circuit, 兮 = constant circuit inserted in the digital / class transfer fresh u 1 匕 'disposed in the digital / analog converter two ΖΤΖΖ ^ 1 ξΤ ^ λ ° ^ μ into the input and output of the H (four) amplifier 19, the waveform of the differential amplifier with a small output change rate, that is, the e-step voltage of the sluggish rise in the resolution of the digital/analog converter η ^ ^ Usually, as long as the capacity of _, 32, and 53 is increased to increase by 1,294,970 liters, the waveform with a large change rate of the output, that is, the upper ΐΐ, is the number of intervals, and the linearity is deteriorated. The 亍 亍 = number 'suit # can be replaced. The implementation example is shown in Fig. 6 as the same as the case of the county, and the description is omitted. Yuan 30 broadcast \ 丄 丄 '4 electric house supply unit 6 〇 is the voltage application device 'and the current supply single switch Vfii ^ same: for the ίDUT20 fixed voltage. The switch 61 is a reverse contact wheel terminal of the substitute 62 which is a double bran. Capacitor Two terminals #^1^ Each 32 is set as the fixed contact C of the termination switch 61, and the other output terminal. The remaining 1163 - the termination of the fixed lie 61 crying 62 m /, f differential amplification is the round end of M. Then, the resistor 13 and the capacitance circuit. For example, if the capacity of the slave capacitor 62 is twice that of 63. ^ and the step time is 1〇/ZS, the switch 61 selects the capacitor 63, and the 20//S day code selects the capacitor 62. 1 25 is shown as follows. The case where the rise time is 1 Gms and the slave power is changed to 1.25 to 5 V is explained in the case where the power supply voltage of the DUT 20 is supplied. ~wH is a digital/analog converter with a resolution of Μ·, set the movable contact of the closing 61 and the fixed contact C to select the capacitor = the step of the step Call s, the number of intervals to open /, this, when the set voltage is 2V, in order to make the number of intervals reach 5 〇〇, with the step of 2 5 Γ t5 ^ L output 2V_ pressure. As a result, even if the electric cake is set low, the number of intervals is ensured, and the purpose of almost linear rise is achieved. When the setting voltage is 2·5 to 5¥, the movable contact a of the switch 61 is connected to select the capacitor 11 63. Then, let the control unit not shown in the figure be a jumper 10#S, an interval number to 1〇00, a step voltage of 2·5 or 5 mV: k convert the 11th output ladder-like waveform. Similarly, when ', set the interval to the circle, and match ^m = 2.5 mV or 5mv. As a result, even if the set voltage is high, it can reach a nearly linear = 1294970. Then, without changing the rate of change, J = b. The control unit (not shown) supplies the number a hopping circuit. However, the electro-acoustic signal that is converted into a smooth waveform by the frequency portion of the number is used as a digital position for generating a stepped voltage device. , Μ not necessarily a digital/analog converter is also possible. It is only necessary to generate a step-like waveform with the step voltage of the converter 11 and the voltage generating portion of the time-varying voltage. If the current measuring resistor 16 or the diodes 17 and 18 are used, the current measuring resistor 16 and the diodes 17 and 18 are not required. In order to prevent the current from being measured, it is also possible to display the configuration of the switches 31 and 61 and the structure of the 61. Just like this, 胄 =, there is switch 31 again. In addition, it is a structure that adjusts the rate of change. Although the structure of the power supply unit 3〇, 5〇 is shown, any object can be used without limiting the objects. It is also necessary to have a *ship speed voltage i to change the time constant with a variable capacitor. 2 It is apparent that there is a secondary effect according to the present invention. Excavation, /, based on the voltage of the set voltage and the feedback output voltage, such as the output voltage of the voltage application device, the time constant circuit provided in the voltage output failure = output voltage feedback path, remove the step wheel The high frequency portion of the voltage generating portion of the level change waveform is output. 3 By shortening, the ρ is jumped to increase the interval, and an approximate waveform can be supplied. By changing the step voltage, it is easy to change the rate of change.曰大,,,,,, the time constant of the time constant circuit can be at least two steps of the cut system, so it can form a nearly linear increase in the rising voltage waveform in a wide range and change the stomach and The step-like change of the voltage of 10 1294970 ', and the output of the electric motor by the voltage dividing resistor and the electric power, so that the wheel can be used to remove the high-frequency portion and the linearly increasing rising voltage waveform. [Simple diagram of the diagram] The composition diagram of the supply unit. Fig. 3 is a view showing the characteristics of the apparatus shown in Fig. 3 of the present invention. The configuration diagram of the second embodiment of the present invention is not shown. The figure shows a configuration diagram of a third embodiment of the present invention. [Main component symbol description] 10 11 12 13 14 15 16 17 18 19 20 30 31 32 50 51 52 Power supply unit digital/analog converter resistance resistance differential amplifier variable capacitor current measurement resistor diode diode buffer Amplifier subject to test power supply unit switching capacitor power supply unit resistance switch 11 1294970 • 53 : capacitor 54 : buffer amplifier 60 : power supply unit 61 : switch 62 : capacitor 63 : capacitor