1290855 玖、發明說明： (一）發明所屬之技術領域 本發明係關聯於開縫塗層式裝置，係供給塗布液於開縫 塗層式塗布裝置及附有塗布液供給裝置。 例如在基板上塗布規定量抗蝕劑（r e s i s t)液等液體於規定 厚度的開縫塗層式塗布裝置’自先前即爲眾所周知。先前 之開縫塗層式塗布裝置，具備有相對於基板所配置具開縫 狀開口的塗布頭。從塗布液供給裝置供給規定量的塗布液鲁 於塗布頭，基板及塗布頭之任一側對另一側以規定速度所 移動間，由塗布頭的開縫狀開口將規定量之塗布液塗布規 定之厚度於基板上。 上述塗布液，對基板自塗布頭開始塗布塗布液，至塗布 於基板上的塗布液厚度穩定在所希望的一定厚度（亦即，從 塗布頭的塗布液流出量成爲所希望的一定量）需要比較多 的時間。第1圖表示此狀況。 因而，在基板上所希望的區域欲塗布塗布液於所希望的 I 一定厚度時，於上述所希望的區域從較塗布塗布液之開始 位置前方需要開始塗布塗布液。 此狀況係使基板之材料及塗布液使用量產生了白費。此 白費，於塗布裝置的塗布作業速度愈大會變愈多。 由上述塗布裝置在基板上塗布所希望的一定厚度塗布液 1¾ ’加以測定基板上塗布液的厚度。 發現基板上之塗布液厚度有產生白費時，爲了發現其原 1290855 因’停止上述塗布裝置之動作。在此狀況，自發現塗布液 · 厚度有白費的基板由上述塗布裝置，位於至現在進行塗布 作業的基板或上述塗布作業結束之後不久的其板間所有基 板’及由上述塗布裝置進彳了現在塗布作業的基板或上述塗. 布作業結束之後不久的基板’產生塗布液厚度白費的可能 性非常大。因而，所有產生塗布液厚度白費可能性非常大 的此等基板，乃予以廢棄。 此狀況，係意味著於塗布裝置的塗布作業速度愈變大，· 在塗布液厚度產生白費時必須廢棄的基板數變愈多。 (一）先前技術1290855 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明For example, a slit coating type coating apparatus which applies a liquid such as a predetermined amount of a resist (r e s i s t) liquid to a predetermined thickness on a substrate has been known from the prior art. The prior slit coating coating apparatus is provided with a coating head having a slit-like opening disposed with respect to the substrate. A predetermined amount of the coating liquid is supplied from the coating liquid supply device to the coating head, and the substrate and the coating head are moved to each other at a predetermined speed, and a predetermined amount of the coating liquid is applied from the slit opening of the coating head. The specified thickness is on the substrate. In the coating liquid, the coating liquid is applied from the coating head to the substrate, and the thickness of the coating liquid applied to the substrate is stabilized to a desired constant thickness (that is, the amount of the coating liquid flowing from the coating head becomes a desired constant amount). More time. Figure 1 shows this situation. Therefore, when a desired area on the substrate is to be applied to a desired thickness of the coating layer, it is necessary to start coating the coating liquid from the start position of the coating liquid in the desired region. This condition causes a waste of material and coating liquid usage of the substrate. This is in vain, and the coating operation speed of the coating device becomes more and more. The thickness of the coating liquid on the substrate was measured by applying a desired coating liquid of a predetermined thickness to the substrate by the above coating apparatus. When the thickness of the coating liquid on the substrate was found to be in vain, the operation of the coating apparatus was stopped in order to find the original 1290855. In this case, the substrate from which the coating liquid and the thickness are found to be in vain is present by the coating apparatus, and the substrate which is currently subjected to the coating operation or all the substrates between the sheets after the end of the coating operation and the coating apparatus are now It is highly probable that the thickness of the coating liquid will be inconspicuous in the substrate of the coating operation or the substrate immediately after the completion of the coating operation. Therefore, all such substrates which are extremely unlikely to be present in the thickness of the coating liquid are discarded. In this case, it means that the coating operation speed of the coating device becomes larger, and the number of substrates that must be discarded becomes more and more when the thickness of the coating liquid is in vain. (a) prior art
本發明之目的，在於提供塗布液供給裝置及附有此種裝 置的開縫塗層式塗布裝置，係於開縫塗層式塗布裝置從開 始塗布作業之後不久經常確實地在基板上規定之區域可塗 布所希望一定厚度的塗布液，此結果顯著的可減低比上述 先前的基板材料及塗布液使用量的白費。 I 本發明之再一目的，在於提供塗布液供給裝置及附有此 種裝置的開縫塗層式塗布裝置，係由開縫塗層式塗布裝置 對基板上的塗布液之塗布作業中，可檢測塗布在基板上的 塗布液厚度之白費，由於產生塗布液厚度的白費使不得不 廢棄的基板數，非常地可比上所述的先前者加以削減。 (三）發明內容 最初爲了達成上所述目的，按照本發明的塗布液供給裝 置’係具備有相對於其板所配置具開縫狀開口的塗布頭， 1290855 與由於使該塗布頭及該基板之一任一側對另一側相對的移 動’對該基板將規定量之塗布液塗布於規定厚度的開縫塗 層式塗布裝置組合使用，對該塗布頭供給規定量塗布液的 塗布液供給裝置，其特徵爲具備有： 塗布液供給手段，延伸於塗布液源及該開縫塗層式塗布 裝置的該塗布頭之間； 泵，存在著於該塗布液供給手段用來加壓該塗布液供給 手段中的塗布液； 開閉閥’於該塗布液供給手段存在著於該栗及該塗布頭 之間； 塗布液壓力檢測手段，檢測由栗所加壓的塗布液壓力予 以輸出塗布液壓力信號；及 塗布液壓力控制手段，輸入該塗布液壓力檢測手段檢測 的塗布液壓力信號’由該塗布頭對該基板爲了將規定量之 塗布液塗布於規定之厚度，於開放該開閉閥之後不久由該 泵所加壓的塗布液壓力’控制該泵之動作成爲所希望的値。 在最初爲了達成上所述目的，按照本發明的開縫塗層式 塗布裝置具備： 相對於基板所配置具開縫狀開口的塗布頭；及對該塗布 頭供給規定量塗布液的塗布液供給裝置，、由於使該塗布頭 及該基板之任一側對另〜側相對的移動，對該基板將規定 量之塗布液塗布於規定_度的開縫塗層式塗布裝置，其特 徵爲該塗布液供給裝置具備有： 塗布液/Τ、δ手，延伸於塗布、丨仪源及該開縫塗層式塗布 -9 - 129〇855 裝置的該塗布頭之間； 栗’存在著於該塗布液供給手段用來加壓該塗布液供給 手段中的塗布液； 開閉閥’於該塗布液供給手段存在著於該泵及該塗布頭 之間； 塗布液壓力檢測手段，檢測由該泵所加壓的塗布液壓力 輸入塗布液壓力信號；及 塗布液壓力控制手段，輸入該塗布液壓力檢測手段所檢 測到塗布液壓力’由該塗布頭爲了對該基板將規定量之塗 布液塗布等規定厚度，於開放該開閉閥之後不久使用該泵 加壓的塗布液壓力，控制該泵之動作成爲所希望的値。 其次爲了達成上所述目的，按照本發明的塗布液供給裝 置具備z 相對於基板所配置具開縫狀開口的塗布頭，由於使該塗 布頭及該基板任一側對另一側相對的移動，對該基板與將 規定量之塗布液塗布於規定厚度的開縫塗層式塗布裝置組 合使用’對該塗布頭供給規定量塗布液的塗布液供給裝置 ，其特徵爲具備有： 塗布液供給手段，延伸於塗布液源及該開縫塗層式塗布 裝置的該塗布頭之間； 泵’存在著在該塗布液供給手段用來加壓該塗布液供給 手段中的塗布液； 開閉閥，於該塗布液供給手段存在著於該泵及該塗布頭 之間； -10- 1290855 塗布液壓力檢測手段，檢測由該泵加壓的塗布液壓力予 以輸出塗布液壓力信號；及 塗布液壓力不良警報手段，輸入該塗布液壓力檢測手段 所檢測的塗布液壓力信號，由於該泵所加壓的塗布液壓力 脫離所希望値之幅度，予以發出警報。 尙此塗布液供給裝置，可再具備達成在最初上所述目的 ，按照本發明塗布液供給裝置之該塗布液壓力控制手段。 其次爲了達成上所述目的，按照本發明的開縫塗層式塗 布裝置具備： 相對於基板所配置具開縫狀開口的塗布頭；及對該塗布 頭供給規定量塗布液的塗布液供給裝置，由於使該塗布頭 及該基板之任一側對另一側相對的移動，對該基板將規定 量塗布液塗布於規定厚度的開縫塗層式塗布裝置，其特徵 爲該塗布液供給裝置具備有： 塗布液供給手段，延伸於塗布液源及該開縫塗層式塗布 裝置的該塗布頭之間； 泵’存在著在該塗布液供給手段用來加壓該塗布液供給 手段中的塗布液； 開閉閥，於該塗布液供給裝置存在著於該泵及該塗布頭 之間； 塗布液壓力檢測手段，檢測由該泵所加壓塗布液之壓力 予以輸出塗布液壓力信號；及 塗布液壓力不良警報手段，輸入該塗布液壓力檢測手段 檢測的塗布液壓力信號，將該泵所加壓的塗布液壓力，由 -11- 1290855 於脫離所希望値之幅度發出警報。 尙此開縫塗層式塗布裝置’可再具備達成在最初上所述 目的，按照本發明開縫塗層式塗布裝置的該塗布液供給裝 置之該塗布液壓力控制手段。 (四）實施方式 [第1實施例] 首先最初參第2圖至第7圖，詳細說明按照本發明第1 貫施形悲附有塗布液供給裝置的開縫塗層（s 1 i t c 〇 a t)式塗 布裝置。 第2圖係按照本發明第1實施形態的附有塗布液供給裝 置1 0之開縫塗層式塗布裝置1 2，槪略的表示全體之構成。 開縫塗層式塗布裝置12，具備有具開縫（si it)狀開口 14a 的塗布頭（h e a d ) 1 4。塗布液供給裝置1 〇係對塗布頭1 4供 給規定量的塗布液。 塗布頭14係至少在第1位置（後述的對模擬件（dummy) 塗布輥子的塗布液塗布位置）1 6及第2位置（後述的對基板 的塗布液塗布位置）1 8之間爲移動自如。在第2位置1 8 ’ 塗布頭1 4係將開縫狀開口 1 4 a對基板2 0之規定區域相對 ，由於使塗布頭1 4及基板2 0之任一側對另一側相對的移 動，塗布頭1 4之開縫狀開口 1 4 a係從基板2 0之規定區域 一端掃描至另一端。然後自此掃描之開始時期至結束時期 ，由於從塗布頭1 4之開縫狀開口 1 4 a將規定量之塗布液’ 隨著規定之壓力流出，使塗布液對基板2 0規定之區域從規 定區域之一端至另一端可塗布於規定之厚度。 -12- 1290855 於此實施形態，開縫塗層式塗布裝置1 2係列入爲了液晶 裝置之濾色器（c ο 1 0 r f i 11 e r)製程中，而且塗布液係爲了至少 在基板2 0上形成1層所使用例如爲抗触劑（r e s i s t)液。 塗布液供給裝置1 0，係具備有延伸於塗布液源1 〇a及開 縫塗層式塗布裝置1 2之塗布頭1 4之間，例如管的塗布液 供給手段1 0 b。在塗布液供給手段1 0 b存在著加壓塗布液 供給手段l〇b中塗布液的泵（pump) 10c。塗布液供給手段i〇b 又於塗布液供給手段10b在泵10c及塗布頭14之間存在著 有開閉閥1 0 d。在此實施形態開閉閥1 〇 d由空氣驅動式開 閉閥所構成。再者，於塗布液供給手段1 0 b在塗布頭1 4及 開閉閥l〇d之間存在著有過濾器l〇e。 塗布液供給裝置1 0，亦具備有檢測由泵1 〇c所加壓塗布 液之壓力加以輸出塗布液壓力信號的塗布液壓力檢測手段 1 Of。 塗布液供給裝置1 0再具備有，輸入塗布液壓力檢測手段 1 〇 f所檢測塗布液壓力信號的塗布液壓力控制手段1 0 g。塗 布液壓力控制手段1 0 g，係由塗布頭1 4對基板2 0爲了將 規定量的塗布液塗布於規定之厚度，於開放開閉閥1 0 d之 後不久由泵1 〇 c所加壓的塗布液壓力成爲所希望値，加以 控制泵之動作。 於此實施形態，塗布液供給裝置1 〇之泵1 〇 C爲膜片泵 (diaphragm pump)，於塗布液供給裝置} 〇之塗布液供給手 段1 〇 b在膜片泵之上游側存在著有止回閥丨0 h。 膜片泵1 〇 c之膜片D，係由於藉作動油傳達未圖示的膜 -13- 1290855 片驅動手段D D活塞之往復動。膜片驅動手段D D之動作係 由塗布液壓力控制手段1 0 g所控制。 於此實施形態，塗布液壓力檢測手段1 0 f，係由於檢測膜 片驅動手段D D的上述作動油壓力由膜片泵1 〇 c間接的檢 測所加壓的塗布液壓力。 自膜片泵1 0 c之塗布液流入流出室c分岐有充滿塗布液 的塗布液分岐手段1 0 i。於此實施形態塗布液分岐手段i i 係構成爲彎曲（bent)管，在彎曲管存在著彎曲閥BV。通常 彎曲閥B V爲關閉者。 於弟1位置16’開縫塗層式塗布裝置12的塗布頭14之 開縫狀開口 1 4a ’如第3圖中所示相對於模擬件塗布輥子 1 6 a外周面。模擬件塗布輥子1 6 a之外周面大致下半部分乃 浸入洗淨液槽1 6 b中的洗淨液W L。在洗淨液槽1 6 b配置有 排浅管（d r a i n p i p e ) 1 6 c 及溢流管（〇 v e r f 1 〇 w p i p e ) 1 6 d。 模擬件塗布輥子1 6a係於規定方向（第3圖中箭頭所表示） 以規定速度可旋轉。於模擬件塗布輥子1 6 a外周面的大致 上半部分，在比模擬件塗布輥子1 6 a外周面上端較上述規 定的旋轉方向上游側的規定位置，相對有乾燥用氣體噴嘴 (g a s η ο z z 1 e ) 1 6 e。於模擬件塗布輥子1 6 a外周面的大致上半 部分’對乾燥用氣體噴嘴相對位置在鄰接上述規定旋轉方 向之上游側位置，接觸有刮片（d 〇 c t 〇 r b 1 a d e ) 1 6 f。 其次參照第2圖及第3圖如上所述，說明列入濾色器製 程中的附有塗布液供給裝置1 0的開縫塗層式塗布裝置i 2 之動作。 善 1290855 開縫塗層式塗布裝置1 2之塗布頭1 4，如於第2圖以實 線所示’配置在第1位置1 6時，充滿塗布液於塗布液供給 手段1 0 b。 於第2圖塗布頭1 4如2點鏈線所示，移動於第2位置 1 8在塗布塗布液於基板2 0上之前，配置於第1位置1 6的 塗布頭1 4，係一旦以規定時間開放塗布液供給手段丨〇b之 開閉閥1 0 d ’由栗1 0 c加壓的塗布液流出於模擬件塗布輥 子16a之外周面上端。 在此間模擬件塗布輥子1 6 a，以上述規定之旋轉速度向 上述規定之旋轉方向旋轉。由於流出於旋轉的模擬件塗布 輥子1 6 a外周面上的大部分塗布液，乃穿過洗淨液槽〗6b 中的洗淨液WL與從上述外周面分離。自洗淨液WL離開 殘留在上述外周面上的塗布液，係由刮片1 6f所扒落。然 後該外周面於最後’從乾燥用氣體噴嘴1 6e所噴射氣體， 例如由氮氣所乾燥。 於第1位置1 6，由泵1 〇c將所加壓的塗布液從流出於模 擬件塗布輥子16a外周面上端的塗布頭14開縫狀開口 l4a ，予以廢棄到現在之間露出在開縫狀開口 1 4 a，有自外氣 混入異物可能性的塗布液部分。又同時，充滿新鮮的塗布 液於開縫狀開口 1 4 a。 此後立即關閉塗布液供給手段1 〇 b的開閉閥1 〇 d，由泵 1 〇 C所加壓的塗布液在泵1 0 c及開閉閥1 0 d之間，其塗布液 壓力控制手段1 0 g予以控制泵1 0 C之動作至成爲所希望壓 力之値。在此實施例，此間的上述所加壓的塗布液壓力’ -15- 1290855 係由於塗布液壓力檢測手段1 〇 f檢測膜片驅動手段D D之上 述作動油壓力，間接的檢測。而且塗布液壓力檢測手段1 〇 f ，係向塗布液壓力控制手段1 〇 g輸出對應所檢測作動油壓 力（亦即，上述所加壓塗布液之壓力）的塗布液壓力信號。 如上所述關閉開閉閥1 〇 d的同時，移動塗布頭1 4於第2 位置1 8，相對開縫狀開口 1 4 a於第2位置1 8之基板2 0上 規定區域之一端（亦即，塗布開始位置）。 塗布液壓力控制手段1 〇 g檢測的作動油壓力（亦即，上述 所加壓的塗布液壓力）爲上述所希望之値時，塗布液壓力控 制手段1 〇g乃開放開閉閥1 〇d。此結果，保持壓力於上述 所希望的値，以自泵1 〇c至塗布頭1 4開縫狀開口 1 4a之間 充滿在塗布液供給手段1 0 b的規定量塗布液，從開縫狀開 口 1 4 a保持規定之壓力壓出於基板2 0規定之區域上。 與開放開閉閥1 〇 d之同時，塗布頭1 4及基板2 0之任一 側係對另一側相對的以規定速度移動。因而，從開縫狀開 口 14a保持在規定壓力（亦即，保持規定的流出量）的規定 量塗布液，自第2位置基板2 〇上之規定區域一端（亦即， 塗布開始位置）至另一端（亦即，塗布結束位置）以規定厚度 塗布。 此後，塗布頭1 4係返回第丨位置丨6，爲了對下一個基 板2 0塗布液塗布，反覆上所述步驟。 依如上所述構成如上所述動作的附有塗布液供給裝置1 〇 的開縫塗層式塗布裝置1 2，與第1圖同樣的如第4圖中所 示，與第1圖所示的先前之狀況比較，對基板2 0塗布頭 -16- 1290855 1 4自開始塗布塗布液以更短時間塗布在基板2 0上的塗布 液厚度，穩定於所希望的一定厚度（亦即，從塗布頭1 4之 塗布液流山量爲所希望的一定量）° · 這樣的效果，予以對比第5圖與第6圖也可明瞭。 ， 第5圖係於先前之開縫塗層式塗布裝置的塗布液供給裝 置之塗布液供給手段（管），從塗布液塗布開始前（亦即，塗 布液流出前）至塗布液塗布開始後（亦即’塗布液流出後）’ 表示在塗布液壓力泵及塗布頭之間所測定的塗布液壓力値 之變化。 於此塗布液，係塗布塗布液至開始時爲了均勻塗布未由 塗布液壓力泵加壓爲必要的所希望壓力之値。因而塗布液 之壓力，在塗布液塗布開始之後不久由於自塗布頭之開縫 狀開口開始流出塗布液，一旦下低。其後同時與多少的時 間經過塗布液壓力泵的加壓影響，漸漸地到達爲了均勻的 塗布所必要希望値之塗布液壓力。亦即，自開始塗布塗布 液，從塗布頭之開縫狀開口的塗布液流出量至成爲所希望 値，比較的需要時間。 第6圖係於上所示第1實施形態之開縫塗層式塗布裝置 1 2之塗布液供給裝置i 〇的塗布液供給手段（管）丨〇b，從開 始塗布塗布液前（亦即，流出塗布液前）至塗布液開始塗布 後（亦即’塗布液流出後），表示在泵1 〇 c及開閉閥丨〇 d之 間（亦即，在塗布液壓力檢測手段1 〇 f)測定的塗布液壓力値 之變化。 於此塗布液之上述壓力，係爲了至開始塗布塗布液之後 -17- 1290855 不久（亦即，開放開閉閥1 0 d之後不久）均勻的塗布，乃保 ?寸K較必要的所希望之値大的所希望預壓之値。而且塗布 液之壓力’係於塗布塗布液開始之後不久（亦即，開放開閉 閥i〇d之後不久），由於從塗布頭14之開縫狀開口 l4a開 始流出塗布液，一旦下低。可是立即由泵1 〇 C的預加壓影 響使塗布液之壓力穩定在所希望之値。亦即，自開始塗布 塗布液立即地，從塗布頭之開縫狀開口的塗布液流出量就 穩定在所希望之値。 上所述效果亦看第7圖即可明瞭。 在第7圖，由上所述第1實施形態之開縫塗層式塗布裝 置1 2，依塗布在基板2 0規定區域的塗布液形成於上述規 定區域的塗布液之膜厚度，表示自塗布液之塗布開始位置 的距離變化狀況，同時由上所述先前之開縫塗層式塗布裝 置塗布在基板規定區域的塗布液，形成於上述規定區域的 塗布液膜之厚度，表示由自塗布液之塗布開始位置之距離 變化的狀況。 於此使用先前的開縫塗層式塗布裝置時’對基板之規定 區域從開始塗布塗布液而塗布在上述規定區域的 '塗布 '液之 膜厚度，至到穩定於所希望的一定厚度爲止需要比較長的 時間（亦即，自塗布開始位置比較長的距離）° 對於此，使用上所述第1實施形態之開縫塗層式塗布裝 置1 2時，對基板2 〇規定之區域從開始塗布塗布液後立即 塗布於該規定區域的塗布液膜之厚度會穩定在所希望的一 定厚度。 -18- 1290855 [第1實施形態之變形例] 、 尙寥照弟2圖至_ 7圖於上所述按照本發明之第1實施 开^態的塗布液供給裝置1 0 ’係由於塗布液壓力檢測手段1 〇 f 檢測膜片驅動手段D D之作動油壓力，來檢測膜片栗丨〇 ^ 所加壓的塗布液壓力，但如依第2圖中2點鏈線表示，亦 可設置塗布液壓力檢測手段l(Tf於從膜片泵l〇c之塗布液 流入流出室C分岐的塗布液分岐手段1 〇 i。 在此狀況’可與上所述按照本發明之第丨實施形態塗布 $ 液供給裝置1 〇獲得同樣效果。 [第2實施形態] 其次參照第8圖至第1 5圖，詳細說明按照本發明之第2 實施形態的附有塗布液供給裝置的開縫塗層式塗布裝置。 第8圖係按照本發明之第2實施形態附有塗布液供給裝 置1 0 ’的開縫塗層式塗布裝置1 2 ’的全體構成以實線槪略的 表示。 按照第2實施形態附有塗布液供給裝置1 〇 ·的開縫塗層式 φ 塗布裝置1 2'之一部分複數構成構件，係與參照第1圖至第 7圖所說明按照本發明第1實施形態附有塗布液供給裝置 1 0的開縫塗層式塗布裝置1 2 —部分複數構成構件相同。 因而’按照第2實施形態附有塗布液供給裝置1 0 ’的開縫塗 層式塗布裝置1 2 ’的如複數構成構件之這樣的一部分，係於 按照本發明第1實施形態附有塗布液供給裝置1 0的開縫塗 層式塗布裝置1 2的複數構成構件，附與附在對應構成構件 的參照符號爲同樣符號，省略對於該等一部分之構成構件 -19- 1290855 詳細的說明。 尙亦於此實施形態，開縫塗層式塗布裝置1 2,，乃列入爲 了液晶福不之濾色益製程中’而且爲了塗布液在基板2 〇上 至少形成濾色器之1層所使用，例如爲抗触劑液者。 按照第2實施形態的塗布液供給裝置1 Q，與按照第1眚施 形態的塗布液供給裝置1 0不同的地方，係由塗布液壓力檢 測手段1 0 f檢測的泵所加壓塗布液的壓力，在於具備有由 於脫離所希望値之幅度發出警報的塗布液壓力不良警報手 段22。 塗布液壓力不良警報手段2 2，係對來自塗布液壓力檢測 手段1 〇 f之塗布液壓力信號及塗布液壓力不良警報手段2 2 ’包含藉由比較器2 2 a輸入預先所設定所希望塗布液壓力 之上限値及下限値的壓力不良警報控制部22b。 在壓力不良警報控制部22b，連接有一種警報產生裝置 的警報器22c。壓力不良警報控制部22b，更可使用爲控制 全體開縫塗層式塗布裝置1 2 1動作的C P U顯示裝置D S P作 爲一種警報產生手段。 其次，參照第9圖所示流程圖說明按照第2實施形態在 塗布液供給裝置1 (V持有之壓力不良警報控制部22b之動作。 移動開縫塗層式塗布裝置1 2 ’之塗布頭1 4至第2位置1 8 ，由塗布頭對基板2 0規定之區域開始塗布塗布液作業時， 於比較器2 2 a予以比較從塗布液壓力檢測手段1 〇 f之塗布 液壓力信號，及預先設定於塗布液壓力不良警報手段22的 所希望塗布液壓力上限値及下限値。 -20- 1290855 尙壓力不良警報控制部22b以上述比較爲基礎實際地實 行壓力不良警報作業，係爲自開始塗布液塗布作業至經過 預先設定的規定時間後者。上述規定之時間，係從開始塗 布液塗布作業其塗布頭1 4所流出塗布液之壓力，至穩定於 規定之一定値止所要的時間。 塗布液壓力信號在上述上限値與上述下限値之範圍內， 則該塗布液塗布作業係續行至基板20規定區域之終端（亦 即，至結束塗布液塗布作業）。在此間，可顯示塗布液塗布 作業續行顯示在CPU之顯示裝置DSP。 上述比較，繼續至結束塗布液塗布作業者。 在塗布液塗布作業中塗布液壓力信號超過上述上限値， 或變成低於上述下限値時，塗布液壓力不良警報手段2 2乃 使警報器2 2 c產生警報。在此狀況，此實施例之塗布液壓 力不良警報手段22，乃可以將塗布液壓力異常裝置於CPU 之顯示裝置D S P，亦可以由C P U停止塗布液塗布作業。 如第8圖中以一點鏈線所示，按照第2實施形態的塗布 液供給裝置1 0'亦可以列入第2圖中所示的按照第1實施例 的塗布液供給裝置1 〇所具備的塗布液壓力控制手段1 〇 g _ 成。 再者，塗布液壓力檢測手段1 0 f，亦可以變更爲設置於塗 布液分岐手段1 〇 i的塗布液壓力檢測手段1 〇，f。 第1 〇圖，係於上述塗布液塗布作業，開始後自塗布液壓 力不良警報手段22之控制部22b開始動作，至結束該動作 之間控制部2 2 b來檢測塗布液壓力不良，未發出塗布液丨壓 -21- 1290855 力不良警報時，表示由塗布液壓力檢測手段1 〇 f隨著塗布 -液壓力檢測經過時間的塗布液壓力變化狀況。 而弟11圖係於弟10圖時’表不對基板20規定之區域隨 著塗布長度的塗布液膜厚之變化狀況。自第1 1圖係在第 1 0圖狀況’係對基板2 0之規定區域從開始塗布作業至結 束之間，可知道在該規定之區域形成所希望厚度之塗布液 膜。 第1 2圖，係該塗布液塗布作業之開始後塗布液壓力不良 警報手段22之控制部22b開始動作之後不久，控制部22b 檢測塗布液壓力不良發出塗布液壓力不良警報時，表示由 塗布液壓力檢測手段1 0 f隨著塗布液壓力檢測經過時間的 塗布液壓力變化狀況。 這樣的狀況，係於該塗布液塗布作業的開始後由泵的塗 布液壓力不足爲原因。 而第1 3圖係於第1 2圖時，表示對基板2 0之規定區域隨 著塗布長度的塗布液膜厚變化狀況。自第1 3圖係在第1 2 φ 圖之狀況，知道對基板2 0之規定區域的塗布作業開始之後 不久不形成所希望厚度之塗布液膜。 第1 4圖係該塗布液塗布作業開始後自塗布液壓力不良 警報手段2 2之控制部2 2 b開始動作至結束該動作之間’控 制邰2 2 b檢測塗布液壓力不良發出塗布液壓力不良警紐’ 表示由塗布液壓力檢測手段1 0 f隨著塗布液壓力檢測經過 時間的塗布液壓力變化狀態。 在這樣的狀況，至少於上述之間的塗布液供給手段1 0 b -22- 1290855 上的種種構件（例如，止回閥1 0 h或泵1 0 C或開閉閥1 〇 d或 過濾器），或塗布液供給手段1 0 b本身，或塗布頭1 4之任 一的動作不良爲原因。 而第1 5圖係於第1 4圖之狀況，表示對基板2 0之規定區 域隨著塗布長度的塗布液膜厚之變化狀況。自第1 5圖係在 第1 4圖時，對基板2 0之規定區域在塗布作業之間知道不 形成爲所希望厚度的塗布液膜。 (五）圖式簡單說明 第1圖係於附有先前塗布液供給裝置的先前開縫塗層式 塗布裝置，隨著塗布開始之經過時間槪略表示從塗布頭變 化塗布液流出量狀況圖； 第2圖係按照本發明第1實施形態附有塗布液供給裝置 開縫塗層式塗布裝置構成，槪赂表示列入濾色器製程狀態 圖； 第3圖槪略的表示第2圖之濾、色器製程之第1位置構成 圖； 第4圖於附有第2圖塗布液供給裝置的開縫塗層式塗布 裝置，槪略的表示隨著從塗布開始的經過時間自塗布頭之 塗布液變化流量狀況圖； 第5圖於附有先前塗布液供給裝置的先前開縫塗層式塗 布裝置，槪略的表示在塗布開始的前後塗布液之壓力變化 狀況圖； 第6圖於附有第2圖塗布液供給裝置的開縫塗層式塗布 裝置，在塗布開始前後槪略的表示塗布液壓力變化狀況圖； -23- 1290855 第7圖由附有先前塗布液供給裝置的先前開縫塗層式塗 布裝置，槪略的表示形成於基板上的塗布液膜之厚度從塗 布開始時期作變化狀況’同時亦槪略的表示由附有第2圖 塗布液供給裝置的開縫塗層式塗布裝置，形成在基板上的 塗布液之β吴厚度從塗布開始時期變化的狀況圖； 第8圖依實線將按照本發明第2實施形態附有塗布液供 給裝置的開縫塗層式塗布裝置構成，列入濾色器製程狀態 以槪略的表示，又同時依一點鏈線，在第2圖中所示具備 有按照第1實施形態的塗布液供給裝置之塗布液壓力控制 手段構成，槪略的表示列入按照上述第2實施形態的塗布 液供給裝置狀況圖； 第9圖按照第2實施形態槪略的表示塗布液供給裝置特 有之壓力不良警報控制手段控制部之動作流程圖； 第1 〇圖在塗布作業之開始後塗布液壓力不良警報手段 之控制部自開始動作至結束該動作之間，控制部未檢測塗 布液壓力不良未發出塗布液壓力不良警報時，表示由塗布 液壓力檢測手段隨著塗布液壓力檢測經過時間的塗布液壓 力變化狀況圖； 第1 1圖係於第1 0圖之狀況，表示對基板之規定區域隨 著塗布長度的塗布液膜厚變化之狀況圖； 第1 2圖於塗布作業開始後塗布液壓力不良警報手段之 控制部開始動作之後不久控制部檢測塗布液壓力不良未發 出塗布液壓力不良警報時，表示依塗布液壓力檢測手段隨 著塗布液壓力檢測經過時間的塗布液壓力變化之狀況圖； - 24- 1290855 第1 3圖於第1 2圖之狀況，表示對基板規定之區域隨著 塗布長度的塗布液膜厚變化之狀況圖； 第1 4圖於塗布作業開始後塗布液壓力不良警報手段之 控制部開始動作，至結束該動作之間，控制部檢測塗布液 壓力不良發出塗布液壓力不良警報時，表示依塗布液壓力 檢測手段隨著塗布液壓力檢測經過時間的塗布液壓力之變 化狀況圖；及 第1 5圖係於第1 4圖之狀況，表示對基板規定之區域隨 著塗布長度的塗布液膜厚之變化狀況圖； 主要部分之代表符號說明 10、1 0' 塗 布 液 供 給 裝 置 10a 塗 布 液 源 1 Ob 塗 布 液 供 給 手 段 10c 膜 片 泵 1 0d 開 閉 閥 1 Oe 過 濾 器 1 Of、1 0，f 塗 布 液 壓 力 檢 測 手 段 1 〇g 塗 布 液 壓 力 控 制 手 段 1 Oh 止 回 閥 1 Oi 塗 布 液 分 岐 手 段 1 2、12' 開 縫 塗 層 式 塗 布 裝 置 14 塗 布 頭 14a 開 縫 狀 開 □ 16 第 1 位 置 -25- 1290855 18 第 2 位 置 20 基 板 22 塗 布 液 壓 力 不 良 敏 22a 比 較 器 22b 壓 力 不 良 璧 報 控 制 22c 塾 報 機 C 塗 布 液 流 入 流 出 室 D 膜 片 DD 膜 片 驅 動 手 段 報手段 部An object of the present invention is to provide a coating liquid supply device and a slit coating type coating device with such a device, which are used in a slit coating coating device to be surely specified on a substrate from a short time after the start of the coating operation. It is possible to apply a coating liquid having a desired thickness, and this result remarkably reduces the amount of use of the above-mentioned substrate material and coating liquid. A further object of the present invention is to provide a coating liquid supply device and a slit coating coating device with such a device, which are capable of coating a coating liquid on a substrate by a slit coating coating device. The whiteness of the thickness of the coating liquid applied to the substrate is measured, and the number of substrates that have to be discarded is inevitably caused by the thickness of the coating liquid, which is very much smaller than the above-described prior art. (III) SUMMARY OF THE INVENTION In order to achieve the above object, a coating liquid supply device according to the present invention is provided with a coating head having a slit-like opening disposed with respect to a plate thereof, 1290855 and the coating head and the substrate a coating liquid supply device that supplies a predetermined amount of coating liquid to the coating head by using a slit coating coating device in which a predetermined amount of the coating liquid is applied to the substrate to a predetermined thickness The coating liquid supply means is provided between the coating liquid source and the coating head of the slit coating type coating device; and the pump is present in the coating liquid supply means for pressurizing the coating liquid a coating liquid in the supply means; an opening and closing valve in the coating liquid supply means existing between the pump and the coating head; and a coating liquid pressure detecting means for detecting a pressure of the coating liquid pressurized by the pump to output a coating liquid pressure signal And the coating liquid pressure control means, inputting the coating liquid pressure signal detected by the coating liquid pressure detecting means, the predetermined amount is applied to the substrate by the coating head Cloth was applied to a predetermined thickness of, in following the opening of the on-off valve near the pump is pressurized by a hydraulic pressure applied 'to control the operation of the pump into the desired Zhi. In order to achieve the above-described object, a slit coating type coating apparatus according to the present invention includes: a coating head having a slit-like opening disposed on a substrate; and a coating liquid supply for supplying a predetermined amount of the coating liquid to the coating head In the device, a coating liquid having a predetermined amount of the coating liquid applied to the substrate in a predetermined thickness is applied to the substrate by moving the coating head and the substrate to the other side. The coating liquid supply device includes: a coating liquid/Τ, a δ hand extending between the coating, the sputum source, and the coating head of the slit coating type -9-129〇855 device; a coating liquid supply means for pressurizing the coating liquid in the coating liquid supply means; an opening and closing valve 'between the coating liquid supply means between the pump and the coating head; and a coating liquid pressure detecting means for detecting the pumping means Pressurizing the coating liquid pressure to input the coating liquid pressure signal; and the coating liquid pressure control means, inputting the coating liquid pressure detecting means to detect the coating liquid pressure 'by the coating head for coating the predetermined amount of the substrate A predetermined thickness such as the liquid coating is applied, and the pressure of the coating liquid pressurized by the pump is used shortly after opening the opening and closing valve, and the operation of the pump is controlled to become a desired enthalpy. Next, in order to achieve the above object, the coating liquid supply device according to the present invention includes a coating head having a slit opening with respect to the substrate, and the coating head and the substrate are moved to the other side. A coating liquid supply device that supplies a predetermined amount of the coating liquid to the coating head in combination with a slit coating layer coating apparatus that applies a predetermined amount of the coating liquid to a predetermined thickness, and is characterized in that the coating liquid is supplied The method extends between the coating liquid source and the coating head of the slit coating coating device; the pump has a coating liquid for applying the coating liquid supply means in the coating liquid supply means; The coating liquid supply means exists between the pump and the coating head; -10- 1290855 The coating liquid pressure detecting means detects the pressure of the coating liquid pressurized by the pump to output a coating liquid pressure signal; and the coating liquid pressure is poor The alarm means inputs the pressure signal of the coating liquid detected by the coating liquid pressure detecting means, and the pressure of the coating liquid pressurized by the pump is out of the desired range. Alert it. The coating liquid supply device may further include the coating liquid pressure control means for achieving the coating liquid supply device according to the present invention for the purpose as described above. Next, in order to achieve the above object, a slit coating type coating apparatus according to the present invention includes: a coating head having a slit-like opening disposed on a substrate; and a coating liquid supply device that supplies a predetermined amount of the coating liquid to the coating head A coating liquid supply device that applies a predetermined amount of the coating liquid to a predetermined thickness of the slit coating layer coating apparatus on the substrate by moving the coating head and the substrate to the other side. The coating liquid supply means extends between the coating liquid source and the coating head of the slit coating coating apparatus; and the pump is present in the coating liquid supply means for pressurizing the coating liquid supply means a coating liquid; an opening and closing valve, wherein the coating liquid supply device is present between the pump and the coating head; and a coating liquid pressure detecting means for detecting a pressure of the coating liquid pressurized by the pump to output a coating liquid pressure signal; and coating The hydraulic pressure failure warning means inputs the pressure signal of the coating liquid detected by the coating liquid pressure detecting means, and pressurizes the pressure of the coating liquid pressurized by the pump from -11 to 1290855 The magnitude of the desired Zhi alert. The slit coating type coating apparatus' may further include the coating liquid pressure control means for achieving the coating liquid supply apparatus of the slit coating type coating apparatus according to the present invention. (4) Embodiments [First Embodiment] First, referring to Figs. 2 to 7 in detail, a slit coating (s 1 itc 〇at) in which a coating liquid supply device is attached according to the first embodiment of the present invention will be described in detail. ) coating device. Fig. 2 is a slit coating type coating apparatus 1 2 with a coating liquid supply device 10 according to the first embodiment of the present invention, and the overall configuration is shown. The slit coating coating apparatus 12 is provided with a coating head (h e a d ) 14 having a si it-like opening 14a. The coating liquid supply device 1 supplies a predetermined amount of the coating liquid to the coating head 14 . The coating head 14 is movable at least between the first position (a coating liquid application position to a dummy coating roller to be described later) 16 and a second position (a coating liquid application position of a counter substrate to be described later). . In the second position 1 8 ', the coating head 14 has a slit-like opening 14a opposed to a predetermined region of the substrate 20, and the opposite side of the coating head 14 and the substrate 20 is moved to the other side. The slit opening 1 4 a of the coating head 14 is scanned from one end of the predetermined region of the substrate 20 to the other end. Then, from the start to the end of the scanning, a predetermined amount of the coating liquid 'flows out from the slit opening 14 4 of the coating head 14 with a predetermined pressure, so that the area of the coating liquid to the substrate 20 is specified. One end to the other end of the prescribed area can be applied to a prescribed thickness. -12- 1290855 In this embodiment, the slit coating type coating apparatus 1 2 is incorporated into a color filter (c ο 1 0 rfi 11 er) process of a liquid crystal device, and the coating liquid is at least on the substrate 20 For example, a resist liquid is used to form one layer. The coating liquid supply device 10 is provided with a coating liquid supply means 10b extending between the coating liquid source 1A and the coating head coating apparatus 1 of the slit coating type coating apparatus 12, for example, a tube. In the coating liquid supply means 10b, there is a pump 10c for applying a liquid in the pressurized coating liquid supply means 10b. The coating liquid supply means i〇b also has an opening and closing valve 10d between the pump 10c and the coating head 14 in the coating liquid supply means 10b. In this embodiment, the on-off valve 1 〇 d is constituted by an air-driven opening and closing valve. Further, a filter 10e is present between the coating head 14 and the opening and closing valve 10d in the coating liquid supply means 10b. The coating liquid supply device 10 also includes a coating liquid pressure detecting means 1 Of which detects the pressure of the coating liquid pressurized by the pump 1 〇c and outputs a coating liquid pressure signal. The coating liquid supply device 10 is further provided with a coating liquid pressure control means 10 g which is input to the coating liquid pressure detecting means 1 〇 f to detect the coating liquid pressure signal. The coating liquid pressure control means 10 g is applied by the coating head 14 to the substrate 20 in order to apply a predetermined amount of the coating liquid to a predetermined thickness, and is pressurized by the pump 1 〇c shortly after the opening and closing valve 10 d is opened. The pressure of the coating liquid becomes a desired enthalpy, and the action of the pump is controlled. In this embodiment, the pump 1 〇C of the coating liquid supply device 1 is a diaphragm pump, and the coating liquid supply means 1 〇b of the coating liquid supply device 存在b exists on the upstream side of the diaphragm pump. Check valve 丨0 h. The diaphragm D of the diaphragm pump 1 〇 c is used to transmit a film (not shown) by the action of the oil - 13 - 1290855 sheet driving means D D piston reciprocating motion. The operation of the diaphragm driving means D D is controlled by the coating liquid pressure control means 10 g. In this embodiment, the coating liquid pressure detecting means 10f is a coating liquid pressure which is pressurized by the diaphragm pump 1 〇 c indirectly by detecting the operating oil pressure of the diaphragm driving means D D. The coating liquid from the diaphragm pump 10c flows into the outflow chamber c, and the coating liquid separating means 10i filled with the coating liquid is branched. In the embodiment, the coating liquid branching means i is configured as a bent tube, and the bending tube BV is present in the curved tube. Usually the bending valve B V is a closed person. The slit-like opening 1 4a' of the coating head 14 of the 16'-slotted coating apparatus 12 at the position of the first position is applied to the outer peripheral surface of the roller 16 a with respect to the dummy as shown in Fig. 3. The lower half of the outer peripheral surface of the dummy coating roller 1 6 a is the washing liquid W L immersed in the cleaning liquid tank 1 6 b. In the cleaning solution tank 1 6 b, a shallow tube (d r a i n p i p e ) 16 c and an overflow tube (〇 v e r f 1 〇 w p i p e ) 16 6 are disposed. The dummy coating roller 16a is rotatable at a predetermined speed in a predetermined direction (indicated by an arrow in Fig. 3). In a substantially upper half of the outer peripheral surface of the dummy coating roller 170 a, a drying gas nozzle (gas η ο ) is provided at a predetermined position on the outer circumferential surface of the dummy coating roller 16 6 from the upstream side in the predetermined rotation direction. Zz 1 e ) 1 6 e. In the substantially upper half of the outer peripheral surface of the dummy coating roller 116a, the relative position of the drying gas nozzle is adjacent to the upstream side of the predetermined rotation direction, and is in contact with the blade (d 〇 ct 〇 rb 1 ade ) 1 6 f . Next, the operation of the slit coating type coating apparatus i 2 with the coating liquid supply device 10 incorporated in the color filter process will be described with reference to Figs. 2 and 3 as described above. Good 1290855 The coating head 14 of the slit coating apparatus 1 2 is placed at the first position 16 as shown by the solid line in Fig. 2, and is filled with the coating liquid supply means 10b. In the second embodiment, the coating head 14 is moved at the second position 18 before the coating liquid is applied onto the substrate 20, and is disposed at the coating head 14 of the first position 16 in the second position 18. The opening and closing valve of the coating liquid supply means 丨〇b is opened for a predetermined period of time. The coating liquid pressurized by the pump 1 0 c flows out of the outer peripheral surface of the dummy coating roller 16a. Here, the dummy coating roller 16a is rotated in the predetermined rotation direction at the predetermined rotation speed. Most of the coating liquid that has flowed out of the outer surface of the rotating coating coating roller 16 a is passed through the cleaning liquid WL in the cleaning liquid tank 6b and separated from the outer peripheral surface. The coating liquid remaining on the outer peripheral surface of the cleaning liquid WL is separated by the blade 16f. Then, the outer peripheral surface is finally ejected from the drying gas nozzle 16e, for example, by nitrogen gas. At the first position 16, the pressurized coating liquid is discharged from the coating head 14 which flows out of the outer peripheral surface of the dummy coating roller 16a by the pump 1 〇c, and is discarded until now. The opening 1 4 a has a portion of the coating liquid which is likely to be contaminated with foreign matter from the outside air. At the same time, it is filled with fresh coating liquid at the slit opening 1 4 a. Immediately thereafter, the opening and closing valve 1 〇d of the coating liquid supply means 1 〇b is closed, and the coating liquid pressurized by the pump 1 〇C is between the pump 10 c and the opening and closing valve 10 d, and the coating liquid pressure control means 10 g controls the action of the pump 10 C to become the desired pressure. In this embodiment, the above-mentioned pressurized coating liquid pressure ' -15 - 1290855 is indirectly detected by the coating liquid pressure detecting means 1 〇 f detecting the diaphragm driving means D D as the hydraulic oil pressure. Further, the coating liquid pressure detecting means 1 〇 f outputs a coating liquid pressure signal corresponding to the detected hydraulic oil pressure (i.e., the pressure of the pressurized coating liquid) to the coating liquid pressure control means 1 〇 g. When the opening and closing valve 1 〇d is closed as described above, the coating head 14 is moved at the second position 18, and the one end of the predetermined area on the substrate 20 of the second position 18 is opposite to the slit opening 14a (ie, , coating start position). When the operating oil pressure (i.e., the pressure of the pressurized coating liquid) detected by the coating liquid pressure control means 1 〇 g is the desired enthalpy, the coating liquid pressure control means 1 〇g opens the opening and closing valve 1 〇d. As a result, the pressure is maintained at the desired enthalpy, and a predetermined amount of the coating liquid is applied from the pump 1 〇c to the slit opening 14a of the coating head 14 to the coating liquid supply means 10b, from the slit shape. The opening 14 4 is maintained at a predetermined pressure on the area defined by the substrate 20. Simultaneously with the opening and closing valve 1 〇 d, either side of the coating head 14 and the substrate 20 is moved at a predetermined speed with respect to the other side. Therefore, a predetermined amount of the coating liquid is held at a predetermined pressure (that is, a predetermined outflow amount) from the slit-like opening 14a, from one end of the predetermined region on the second position substrate 2 (that is, the coating start position) to the other One end (that is, the coating end position) is applied at a prescribed thickness. Thereafter, the coating head 14 is returned to the second position 丨6, and in order to apply the coating liquid to the next substrate 20, the above steps are repeated. The slit coating type coating apparatus 1 2 with the coating liquid supply device 1 动作 configured as described above is configured as shown in FIG. 4 and the first FIG. In comparison with the previous conditions, the thickness of the coating liquid applied to the substrate 20 from the start coating coating liquid for a shorter period of time from the start of the coating of the substrate 20 is stabilized to a desired thickness (i.e., from coating) The flow rate of the coating liquid of the first 14 is a desired amount). · Such an effect can be compared with the fifth and sixth figures. 5 is a coating liquid supply means (tube) of the coating liquid supply device of the previous slit coating coating apparatus, from the start of application of the coating liquid (that is, before the coating liquid flows out) to the start of coating liquid application. (i.e., 'after the coating liquid flows out') indicates the change in the pressure of the coating liquid measured between the coating liquid pressure pump and the coating head. The coating liquid is applied to the coating liquid at the beginning to uniformly apply a desired pressure which is not required to be pressurized by the coating liquid pressure pump. Therefore, the pressure of the coating liquid starts to flow out of the coating liquid from the slit opening of the coating head shortly after the application of the coating liquid starts, and is lowered thereafter. At the same time, the amount of time and the pressure of the coating liquid pressure pump are gradually affected, and the pressure of the coating liquid which is necessary for uniform coating is gradually reached. That is, from the start of application of the coating liquid, the amount of the coating liquid flowing out of the slit opening of the coating head is required to be a desired enthalpy, and it takes time to compare. Fig. 6 is a coating liquid supply means (tube) 丨〇b of the coating liquid supply device i of the slit coating type coating apparatus 1 of the first embodiment shown in the above, before the coating liquid is applied (i.e., Before the coating liquid flows out) until the coating liquid starts to be applied (that is, after the coating liquid flows out), it is expressed between the pump 1 〇c and the opening and closing valve 丨〇d (that is, at the coating liquid pressure detecting means 1 〇f) The measured change in the pressure of the coating liquid. The above pressure of the coating liquid is uniform until 1.7 to 1290855 (i.e., shortly after opening the opening and closing valve 10 d) after the start of application of the coating liquid, and it is necessary to maintain the desired size. The big hope of pre-pressing. Further, the pressure of the coating liquid is shortly after the start of the application of the coating liquid (i.e., shortly after the opening and closing of the opening and closing valve i〇d), and the coating liquid is discharged from the slit-like opening l4a of the coating head 14, and is lowered. However, the pressure of the coating liquid is stabilized at the desired pressure by the pre-pressurization of the pump 1 〇 C immediately. That is, immediately after the application of the coating liquid, the amount of the coating liquid flowing out from the slit-like opening of the coating head is stabilized at a desired level. The effect described above can also be seen in Figure 7. In the slit coating layer coating apparatus 1 2 of the first embodiment, the coating thickness of the coating liquid formed in the predetermined region by the coating liquid applied to the predetermined region of the substrate 20 indicates the self-coating. The coating liquid which is applied to the predetermined region of the substrate by the previous slit coating coating apparatus described above, and the thickness of the coating liquid film formed in the predetermined region, which is indicated by the self-coating liquid The situation in which the distance from the coating start position changes. When the conventional slit coating type coating apparatus is used as described above, the film thickness of the 'coating liquid applied to the predetermined region from the start of application of the coating liquid to a predetermined region of the substrate is required to be stabilized at a desired thickness. For a relatively long period of time (that is, a relatively long distance from the coating start position). When the slit coating type coating apparatus 1 of the first embodiment described above is used, the predetermined area of the substrate 2 is started. The thickness of the coating liquid film applied to the predetermined region immediately after the application of the coating liquid is stabilized to a desired thickness. -18- 1290855 [Modification of the first embodiment], and the coating liquid supply device according to the first embodiment of the present invention described above is a coating liquid. The pressure detecting means 1 〇f detects the hydraulic oil pressure of the diaphragm driving means DD to detect the pressure of the coating liquid pressurized by the diaphragm, but can also be coated as indicated by the 2-point chain line in Fig. 2 The liquid pressure detecting means 1 (Tf is applied to the coating liquid branching means 1 〇i which is branched from the coating liquid of the diaphragm pump 10c into the outflow chamber C. In this case, it can be coated with the first embodiment according to the present invention as described above. The liquid supply device 1 has the same effect. [Second embodiment] Next, a slit coating type with a coating liquid supply device according to a second embodiment of the present invention will be described in detail with reference to Figs. 8 to 15 . In the eighth embodiment, the overall configuration of the slit coating type coating apparatus 1 2 ' to which the coating liquid supply device 10 ' is attached according to the second embodiment of the present invention is schematically indicated by a solid line. The slit coating type φ coating with the coating liquid supply device 1 〇· In the first embodiment of the present invention, a slit coating type coating apparatus 1 2 with a coating liquid supply device 10 according to a first embodiment of the present invention is described with reference to FIGS. 1 to 7 . The constituent members are the same. Therefore, a part of the plurality of constituent members of the slit coating type coating apparatus 1 2 ' with the coating liquid supply device 10' according to the second embodiment is according to the first embodiment of the present invention. The plural constituent members of the slit coating type coating apparatus 1 2 to which the coating liquid supply device 10 is attached are denoted by the same reference numerals as those of the corresponding constituent members, and the constituent members of the parts are omitted -19 - 1290855 In the embodiment, the slit coating coating device 12 is included in the process of filtering the liquid crystal for the liquid crystal, and at least the color filter is formed on the substrate 2 for the coating liquid. The coating liquid supply device 1 Q according to the second embodiment is different from the coating liquid supply device 10 according to the first embodiment, and is subjected to a pressure test of the coating liquid. The pressure of the pump-pressurized coating liquid detected by the means 10f is provided with a coating liquid pressure failure warning means 22 for giving an alarm due to the detachment of the desired enthalpy. The coating liquid pressure failure warning means 2 2 is for applying the coating liquid. The coating liquid pressure signal and the coating liquid pressure failure warning means 2 2 ' of the pressure detecting means 1 包含f include a pressure failure alarm control unit that inputs the upper limit 値 and the lower limit 预先 of the predetermined desired coating liquid pressure by the comparator 2 2 a. 22b. The pressure failure alarm control unit 22b is connected to an alarm device 22c of an alarm generation device. The pressure failure alarm control unit 22b can further use a CPU display device DSP for controlling the operation of the entire slit coating type coating device 1 2 1 . As a means of generating alarms. Next, the operation of the coating liquid supply device 1 (the operation of the pressure failure alarm control unit 22 held by V) according to the second embodiment will be described with reference to the flow chart shown in Fig. 9. The coating head of the movable slit coating type coating device 1 2 ' is moved. When the application of the coating liquid is started in the region defined by the coating head to the substrate 20 by the coating head, the coating liquid pressure signal from the coating liquid pressure detecting means 1 〇f is compared with the comparator 2 2 a, and The upper limit of the desired application liquid pressure and the lower limit 値 are set in advance in the coating liquid pressure failure warning means 22. -20 - 1290855 The pressure failure alarm control unit 22b actually performs the pressure failure alarm operation based on the above comparison, and starts from the start. The coating liquid is applied to the latter for a predetermined period of time. The predetermined period of time is the time from the start of the coating liquid coating operation to the pressure of the coating liquid flowing out of the coating head 14 to a predetermined period of time. When the liquid pressure signal is within the range of the upper limit 値 and the lower limit 上述, the coating liquid coating operation is continued to the terminal of the predetermined region of the substrate 20 (ie, In the meantime, the coating liquid application operation is continued to be displayed on the display device DSP of the CPU. The above comparison continues until the coating liquid application operation is completed. The coating liquid pressure signal exceeds the above in the coating liquid application operation. When the upper limit 値 is lower than the lower limit 値, the coating liquid pressure failure warning means 2 2 causes the alarm 2 2 c to generate an alarm. In this case, the coating liquid pressure failure warning means 22 of this embodiment can be coated. The liquid pressure abnormality device may be stopped by the CPU in the display device DSP of the CPU. The coating liquid supply device 10' according to the second embodiment may be included as indicated by a one-dot chain line in Fig. 8. The coating liquid pressure control means 1 provided in the coating liquid supply apparatus 1 of the first embodiment shown in Fig. 2 is formed. Further, the coating liquid pressure detecting means 10f may be changed to the setting. The coating liquid pressure detecting means 1 of the coating liquid separation means 1 〇i 1 〇, f. The first drawing is the coating liquid coating operation, and the self-coating liquid pressure is bad after the start. The control unit 22b of the reporting means 22 starts the operation, and the control unit 2 2 b detects the poor pressure of the coating liquid until the end of the operation, and the coating liquid pressure detecting means is not issued when the coating liquid pressure is not detected. 1 〇f The change in the pressure of the coating liquid with the elapsed time of the coating-liquid pressure detection. The figure of the 11f is shown in the figure of the 10th sheet, which indicates the change in the thickness of the coating liquid depending on the coating length in the area defined by the substrate 20. It is understood that a coating liquid film having a desired thickness is formed in the predetermined region from the start of the coating operation to the end of the predetermined region of the substrate 20 in the first embodiment of Fig. 1 . When the control unit 22b detects the coating liquid pressure failure to issue the coating liquid pressure failure alarm shortly after the start of the operation of the coating liquid pressure failure warning means 22 after the start of the coating liquid coating operation, the coating liquid pressure detecting means 1 0 f The change in the pressure of the coating liquid with the elapsed time of the coating liquid pressure detection. Such a condition is caused by insufficient pressure of the coating liquid of the pump after the start of the coating liquid application operation. On the other hand, in the case of Fig. 12, the film thickness of the coating liquid with respect to the coating length of the predetermined region of the substrate 20 is changed. In the case of the 1st φ diagram, it is known that the coating liquid film of a desired thickness is not formed shortly after the start of the coating operation in the predetermined region of the substrate 20. In the first drawing, after the application of the coating liquid application operation, the control unit 2 2 b from the coating liquid pressure failure warning means 2 2 starts the operation until the end of the operation. 'Control 邰 2 2 b Detects the pressure of the coating liquid to discharge the coating liquid pressure. The "bad alarm" indicates the state of change of the coating liquid pressure by the coating liquid pressure detecting means 10 f with the elapsed time of the coating liquid pressure. In such a case, at least the various components on the coating liquid supply means 1 0 b -22 - 1290855 (for example, the check valve 10 h or the pump 1 0 C or the opening and closing valve 1 〇d or the filter) Or the coating liquid supply means 10b itself or the malfunction of any of the coating heads 14 is a cause. On the other hand, in the case of Fig. 14, the change in the film thickness of the coating liquid in the predetermined region of the substrate 20 with respect to the coating length is shown. In the case of Fig. 14 in Fig. 14, the coating liquid film which is not formed into a desired thickness is known between the coating operations in a predetermined region of the substrate 20. (5) Brief Description of the Drawings Fig. 1 is a view showing a prior slit coating type coating apparatus with a previous coating liquid supply device, and a graph showing a change in the amount of the coating liquid outflow from the coating head as the elapsed time from the start of coating; Fig. 2 is a view showing a configuration in which a coating liquid supply device is provided with a slit coating type coating apparatus according to a first embodiment of the present invention, wherein the image is shown in a color filter process state diagram; and the third diagram is a filter diagram showing the second image. FIG. 4 is a slit coating type coating apparatus with a coating liquid supply device attached to FIG. 2, and schematically shows coating from a coating head with elapsed time from the start of coating. Fig. 5 is a view showing a pressure change state of the coating liquid before and after the start of coating; Fig. 6 is attached to a previously opened coating coating apparatus with a previous coating liquid supply device; Fig. 2 is a view showing a state in which a pressure change of a coating liquid is applied before and after the start of coating; -23 - 1290855 Fig. 7 is a previous slit by a previous coating liquid supply device coating In the coating apparatus, the thickness of the coating liquid film formed on the substrate is changed from the coating start timing, and the slit coating coating apparatus attached to the coating liquid supply apparatus of FIG. 2 is also schematically shown. FIG. 8 is a view showing a state in which the thickness of the coating liquid formed on the substrate changes from the coating start timing; and FIG. 8 is a slit-coated coating apparatus in which the coating liquid supply device is attached according to the second embodiment of the present invention. In addition, the color filter process state is shown in a schematic manner, and the coating liquid pressure control means according to the coating liquid supply device according to the first embodiment is provided in the second embodiment. FIG. 9 is a flow chart showing the operation of the pressure liquid supply control device control unit unique to the coating liquid supply device according to the second embodiment; In the control unit of the coating liquid pressure failure warning means after the start of the coating operation, the control unit does not detect that the coating liquid pressure is not good between the start operation and the end of the operation. When the coating liquid pressure failure alarm is issued, the coating liquid pressure detecting means changes the pressure of the coating liquid with the elapsed time of the coating liquid pressure detection; FIG. 1 is a view showing the predetermined area of the substrate in the case of FIG. FIG. 2 is a diagram showing the change in the thickness of the coating liquid of the coating length; FIG. 2 is a view showing that the control unit detects that the coating liquid pressure is not good and the coating liquid pressure failure alarm is not issued immediately after the start of the coating operation by the control unit of the coating liquid pressure failure warning means. In the case of the coating liquid pressure detecting means, the pressure of the coating liquid is changed according to the elapsed time of the coating liquid pressure detection; - 24- 1290855 Fig. 1 3 shows the condition of the substrate, and the area defined by the substrate is The control unit of the coating liquid pressure failure warning means starts operating after the start of the coating operation, and the control unit detects the coating liquid pressure failure to emit the coating liquid. In the case of a poor pressure alarm, the coating hydraulic pressure is detected according to the elapsed time of the coating liquid pressure detecting means with the coating liquid pressure. The change state diagram; and the 15th figure are the conditions of the figure of FIG. 14, which shows the change of the film thickness of the coating liquid with respect to the coating length of the area specified by the board|substrate; Coating liquid supply device 10a Coating liquid source 1 Ob Coating liquid supply means 10c Diaphragm pump 1 0d Opening and closing valve 1 Oe Filter 1 Of, 10, f Coating liquid pressure detecting means 1 〇g Coating liquid pressure control means 1 Oh Back Valve 1 Oi Coating liquid separation means 1 2, 12' Slotted coating type coating device 14 Coating head 14a Slotted opening □ 16 1st position -25 - 1290855 18 2nd position 20 Substrate 22 Coating liquid pressure sensitivity 22a Comparison 22b pressure failure report control 22c 塾 machine C coating liquid inflow and outflow chamber D diaphragm DD diaphragm drive means reporting means
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