1285674 A7 — _B7_ 五、發明説明（彳） 【發明所屬技術領域】 本發明係關於使用於玻璃等硏磨之鈽系硏磨材料及其 製造方法，更詳細而言，使用於玻璃製硬碟基板或液晶板 用玻璃基板等之高精度玻璃基板之加工硏磨上，且以氧化 鈽作爲主要成分者。 【先前技術】 近年來，.玻璃材料使用於種種用途上，故表面硏磨成 爲必要的步驟。例如對光學鏡片用玻璃基板或光學鏡片而 言表面精度被要求至如鏡面。特別對光碟或磁碟用玻璃基 板、薄膜晶體管（TFT )型LCD或TN型LCD等之液晶用玻 璃基板、液晶TV用濾色器、LSI光掩膜用玻璃基板等，因 要求平坦性或較小表面粗糙及無缺陷，故必須要有高精度 之表面硏磨。 對於液晶用玻璃基板而言，因後步驟的熱處理溫度較 高故要求要有較高耐熱性，又因要輕量化故必須進行薄型 化。對於磁碟用玻璃基板而言，亦年年被嚴格要求需具 有，可抵抗伴隨輕量化之薄型化，或高迴轉時的磁碟起伏 等機械特性、特別爲較高剛性等。 欲滿足這些薄型化或機械特性，改良玻璃的化學組成 或製法，作爲玻璃基板以含鋁矽酸鹽作爲主成分者使用於 液晶用或磁碟上。又，作爲磁碟用玻璃基板，亦開發以鋰 矽酸鹽作爲主要成分之結晶化玻璃基板或石英結晶占大部 分之結晶化玻璃基板。但這些基板玻璃的加工性非常差， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 衣·1285674 A7 - _B7_ V. OBJECT OF THE INVENTION (Technical Field of the Invention) The present invention relates to a honing honing material used for honing such as glass and a method of manufacturing the same, and more particularly to a glass hard disk substrate. Or the liquid crystal panel is processed by a high-precision glass substrate such as a glass substrate, and ruthenium oxide is used as a main component. [Prior Art] In recent years, glass materials have been used for various purposes, so surface honing has become a necessary step. For example, for a glass substrate or an optical lens for an optical lens, surface precision is required to be as a mirror surface. In particular, glass substrates for optical disks or disks, glass substrates for liquid crystals such as thin film transistor (TFT) type LCDs and TN type LCDs, color filters for liquid crystal TVs, glass substrates for LSI photomasks, etc., require flatness or The small surface is rough and flawless, so it is necessary to have high-precision surface honing. In the case of a glass substrate for liquid crystal, since the heat treatment temperature in the subsequent step is high, high heat resistance is required, and since it is light, it is required to be thinned. The glass substrate for a magnetic disk is also required to be strictly required for many years, and it is resistant to mechanical properties such as thinning with light weight, disk fluctuation during high rotation, and particularly high rigidity. In order to satisfy these thinning or mechanical properties, the chemical composition or production method of the glass is improved, and the glass substrate is used for liquid crystal or magnetic disk using aluminosilicate as a main component. Further, as a glass substrate for a magnetic disk, a crystallized glass substrate containing lithium niobate as a main component or a crystallized glass substrate containing a large portion of quartz crystals has been developed. However, the processing quality of these substrate glass is very poor. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). (Please read the notes on the back and fill out this page.)
、1T 經濟部智慧財產局員工消費合作社印製 -4 - 1285674 A7 ________B7 五、發明説明（2) 且先前的硏磨材料會使加工速度下降且生產性惡化，故同 時要求必須要有高精度的表面硏磨性能與高硏磨速度。 作爲使用於玻璃基板的表面硏磨之硏磨材料，由與氧 化鐵或氧化銷、或二氧化矽比較上具有數倍優良的硏磨速 度爲理由，使用稀土類氧化物，特別使用以氧化铈作爲主 要成分之硏磨材料。這些硏磨材料中，一般使用砥粒分散 於水等液體者，但先前的氧化鈽系硏磨材料具有如上述對 硬質的玻璃基板而言硏磨速度較爲慢之問題。 雖對於氧化鈽系硏磨材料的硏磨機制而言雖未充分解 明，但經由對具有氧化鈽的玻璃之化學效果，與引起氧化 鈽粒子本身硬化的機械效果之複合效果可進行硏磨加工， 此確認爲一種現象論。但，含鋁矽酸鹽作爲主成分之玻璃 基板或含鋰矽酸鹽作爲主成分之結晶化玻璃基板，因具有 優良耐藥性故無法充分發揮硏磨材料所具有的化學效果。 又，因這些玻璃基板（被加工物）爲硬質物，故容易 引起硏磨材料粒子的破碎，無法充分維持對玻璃的機械效 果使得加工速度迅速下降。 欲能長期維持機械效果，考慮於硏磨材料組成物中添 加鋁或鍩等的具有被加工物以上硬度之粉末粒子，但因氧 化鈽粒子的濃度會相對地下降，其化學效果會不充分。 又，藉由具有硬度的粉末粒子於玻璃表面（被加工物表 面）會產生凹痕或傷痕等缺陷。 【發明所要解決的課題】 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐] (請先閱讀背面之注意事項再填寫本頁) '0聲 、11 經濟部智慧財產局員工消費合作社印製 -5- 1285674 A7 _____B7_ 五、發明説明（3) (請先閱讀背面之注意事項再填寫本頁) 本發明係爲解決如上述先前技術的課題，本發明的目 的爲提供一種鈽系硏磨材料的製造方法及铈系硏磨材料， 此硏磨材料對硬質且難到達快速硏磨速度的玻璃而言，可 經長時間維持當初的硏磨速度，且於玻璃等被加工物的表 面上不會產生凹痕、傷痕等缺陷，具有優良的硏磨後品 質、便宜且良好生產效率者。 【解決課題之方法】 本發明者欲解決上述課題仔細、努力討論結果，完成 本發明。即本發明係關於下述者。 (1) 一種姉系硏磨材料，其爲含有氟之鈽系硏磨材料， 其特徵爲鈽系硏磨材料實際上由立體複合氧化稀土類及複 合氧氟化稀土類所成，鈽系硏磨材料中的全稀土類元素含 有量爲氧化物換算下90質量％以上，全稀土類元素中的姉 含有量爲氧化物換算下55質量％以上者。 經濟部智慧財產局員工消費合作社印製 (2) 如上述（1 )所記載的鈽系硏磨材料，其中鈽系硏磨 材料以X光繞射測定時，由氧化鈽引起的主要波峰爲，20 下28.2度以上者。 (3) 如上述（1 )或（2 )所記載的鈽系硏磨材料，其中 對鈽系硏磨材料以X光繞射測定時的立方晶體複合氧化稀 土類之主要波峰而言，氧氟化稀土類的主要波峰之強度比 爲0.2〜1的範圍內。 (4) 如上述（1 )或（2 )所記載的鈽系硏磨材料，其中 ~次粒子徑爲10nm〜50nm範圍內，比表面積爲2m2/g〜 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -6 - 1285674 A7 B7 五、發明説明（4 ) 1 0m2/g範圍內。 (請先閲讀背面之注意事項再填寫本頁) (5) —種鈽系硏磨材料的製造方法，其特徵爲含有由具 稀土類元素的礦石中，化學性地分離去除稀土類元素以外 之雜質，與中重稀土類及Nd所得到之混合輕稀土類類化合 物.，於500〜1，100°C下烘烤成爲混合氧化稀土之步驟。 (6) —種鈽系硏磨材料的製造方法，其特徵爲由含稀土 類元素礦石中，化學性地分離去除稀土類元素以外之雜 質，與中重稀土類及Nd所得到之混合輕稀土類類化合物， 於500〜1，100°C下烘烤成爲混合氧化稀土，於此中添加以 鈽爲主要成分之氟化稀土類，經濕式粉碎、乾燥、烘烤、 解碎、分級得到鈽系硏磨材料者。 經濟部智慧財產局員工消費合作社印製 (7) —種鈽系硏磨材料的製造方法，其特徵爲由含稀土 類元素礦石中，化學性地分離去除稀土類元素以外之雜 質，與中重稀土類及Nd所得到之混合輕稀土類類化合物， 於500〜l，l〇〇°C下烘烤成爲混合氧化稀土，該混合氧化稀 土中，添加碳酸化的該混合輕稀土，與以鈽爲主要成分之 氟化稀土類，經濕式粉碎、乾燥、烘烤、解碎、分級得到 鈽系硏磨材料者。 (8) 如（6 )或（7 )所記載的姉系硏磨材料之製造方 法’其中氟化稀土類爲以鈽爲主要成分之混合輕稀土類化 合物的氟化物，且混合輕稀土類化合物中添加氟化物後， 於400°C以下做熱處理形成氟化稀土類。 (9) 如（5 )至（7 )中任一項所記載的鈽系硏磨材料之 製造方法，其中鈽系硏磨材料之氟含有量爲5〜10質量％ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1285674 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（5) 範圍內。 (10) 如（5)至（7)中任一項所記載的鈽系硏磨材料之 製造方法，其中500〜1，1001下的烘烤，於大氣中使用烘 烤爐進行2小時至36小時的範圍內者。 (11) 如（5)至（7)中任一項所記載的鈽系硏磨材料之 製造方法，其中中500〜1，100°C下的烘烤，於大氣中使用 電爐握推壓爐，進行2小時至3 6小時的範圍內者。 【發明的實施型態】 以下對本發明做詳細說明 本發明的鈽系硏磨材料係爲含氟鈽系硏磨材料，鈽系 硏磨材料實際上係由立方晶體複合氧化稀土及複合氧化氟 稀土所成，铈系硏磨材料中的全稀土類元素含有量由氧化 物換算爲90質量％以上，全稀土類元素中的鈽含有量由氧 化物換算爲55質量％以上爲特徵。 本發明的鈽系硏磨材料之氟含有量以5〜10質量％範 圍內爲佳。氟含有量較5質量％低時硏磨速度會變慢，若 高於10質量％時會殘留氟化稀土而降低硏磨速度成爲擦傷 產生的原因。 所謂立方晶體複合氧化稀土，稀土類元素以RE做表 示’例如REaCh表示化合物，所謂複合氧化氟稀土例如爲 REOF · REO所表示的化合物。本發明的鈽系硏磨材料必須 實質上由這些化合物所構成。實際上結晶構造爲基本由這 些化合物所構成，經硏磨材料的X光繞射測定，這些化合 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)1T Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 4 - 1285674 A7 ________B7 V. Invention Description (2) And the previous honing material will reduce the processing speed and deteriorate the productivity, so it is required to have high precision. Surface honing performance and high honing speed. As a honing material for surface honing of a glass substrate, a rare earth oxide is used for the reason that the honing speed is several times superior to that of iron oxide or an oxidized pin or cerium oxide, and cerium oxide is particularly used. A honing material as a main component. Among these honing materials, those in which cerium particles are dispersed in a liquid such as water are generally used. However, the prior cerium oxide honing material has a problem that the honing speed is relatively slow as described above for a hard glass substrate. Although the honing mechanism of the yttrium oxide honing material is not fully explained, the honing process can be performed by a combination of the chemical effect of the glass having cerium oxide and the mechanical effect of causing the cerium oxide particle itself to harden. This confirmation is a phenomenon theory. However, a glass substrate containing aluminosilicate as a main component or a crystallized glass substrate containing a lithium niobate as a main component cannot sufficiently exhibit the chemical effects of the honing material because of excellent chemical resistance. Further, since these glass substrates (objects to be processed) are hard, it is easy to cause breakage of the honing material particles, and the mechanical effect on the glass cannot be sufficiently maintained, so that the processing speed is rapidly lowered. In order to maintain the mechanical effect for a long period of time, it is considered that a powder particle having a hardness equal to or higher than the workpiece to be added to the honing material composition is added, but the concentration of the cerium oxide particles is relatively lowered, and the chemical effect is insufficient. Further, defects such as dents or scratches are generated on the surface of the glass (the surface of the workpiece) by the powder particles having hardness. [Problems to be Solved by the Invention] This paper scale applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the note on the back and fill in this page) '0 Sound, 11 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumption Cooperative Printing -5 - 1285674 A7 _____B7_ V. INSTRUCTIONS (3) (Please read the note on the back and then fill out this page) The present invention is to solve the problems of the prior art as described above, and an object of the present invention is to provide a 钸 system A method for manufacturing a grinding material and a honing material for a glass which is hard and difficult to reach a rapid honing speed, can maintain the original honing speed for a long time, and is on the surface of a workpiece such as glass In the present invention, the inventors of the present invention have completed the present invention by carefully and diligently discussing the results of the above-mentioned problems, which are excellent in the quality of the honing, and which are excellent in productivity. The present invention relates to the following: (1) A lanthanum honing material which is a lanthanum honing material containing fluorine, and is characterized in that the lanthanum honing material is actually a three-dimensional complex The content of the total rare earth element in the lanthanum honing material is 90% by mass or more in terms of oxides, and the lanthanum content in the total rare earth element is converted into oxides. 55% by mass or more. Printed by the Ministry of Economic Affairs, Intellectual Property Office, and the Consumer Cooperatives. (2) The honing material as described in (1) above, in which the lanthanum honing material is measured by X-ray diffraction. The main peak caused by the above is 28.2 degrees or more. (3) The tantalum honing material as described in (1) or (2) above, in which the tantalum honing material is measured by X-ray diffraction. In the main peak of the crystal composite rare earth oxide, the intensity ratio of the main peak of the oxyfluorinated rare earth is in the range of 0.2 to 1. (4) The lanthanum honing material as described in the above (1) or (2) , wherein the ~sub-particle diameter is in the range of 10 nm to 50 nm, and the specific surface area is 2 m2/g~ This paper scale is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) -6 - 1285674 A7 B7 V. Description of invention ( 4) Within 1 0m2/g (Please read the notes on the back first) (5) A method for producing a lanthanum honing material, which is characterized by chemically separating and removing impurities other than rare earth elements from ores having rare earth elements, and medium-heavy rare earths and Nd The obtained mixed light rare earth compound is baked at 500 to 1, 100 ° C to form a mixed rare earth oxide. (6) A method for producing a lanthanum honing material characterized by containing rare earths In the elemental ore, the impurities other than the rare earth elements are chemically separated and removed, and the light rare earth compound obtained by the medium and heavy rare earths and Nd is baked at 500 to 1, 100 ° C to form a mixed rare earth oxide. Among them, a rare earth fluoride containing ruthenium as a main component is added, and the lanthanum honing material is obtained by wet pulverization, drying, baking, pulverization, and classification. Printed by the Ministry of Economic Affairs, Intellectual Property Bureau, Staff and Consumers Cooperative (7) - A method for manufacturing lanthanum honing materials, characterized by chemically separating and removing impurities other than rare earth elements from ore containing rare earth elements, and medium weight The mixed light rare earth compound obtained by the rare earth and Nd is baked at 500 ° l, l ° ° C to form a mixed rare earth oxide, and the mixed rare earth oxide is added with carbonized mixed rare earth, The main components of the fluorinated rare earths are wet pulverized, dried, baked, pulverized, and classified to obtain lanthanide honing materials. (8) The method for producing a lanthanum honing material as described in (6) or (7) wherein the rare earth fluoride is a fluoride of a mixed light rare earth compound containing cerium as a main component, and the light rare earth compound is mixed After adding fluoride, the heat treatment is performed at 400 ° C or lower to form a rare earth fluoride. (9) The method for producing a lanthanum honing material according to any one of (5) to (7), wherein the lanthanum honing material has a fluorine content of 5 to 10% by mass. (CNS) A4 specification (210X297 mm) 1285674 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed A7 B7 V. Invention description (5). (10) The method for producing a lanthanum honing material according to any one of (5) to (7), wherein baking at 500 to 1,1001 is performed in a baking oven for 2 hours to 36 hours in the atmosphere. Within the range of hours. (11) The method for producing a lanthanum honing material according to any one of (5) to (7), wherein the baking is performed at 500 to 1,100 ° C, and the electric furnace is used in the atmosphere. , for those who are in the range of 2 hours to 36 hours. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the lanthanum honing material of the present invention is a fluorine-containing lanthanum honing material, and the lanthanum honing material is actually a cubic crystal composite oxidized rare earth and composite oxyfluoride rare earth. The content of the total rare earth element in the lanthanum honing material is 90% by mass or more in terms of oxide, and the cerium content in the entire rare earth element is characterized by an oxide equivalent of 55% by mass or more. The cerium-based honing material of the present invention preferably has a fluorine content of from 5 to 10% by mass. When the fluorine content is lower than 5% by mass, the honing speed is slow, and if it is more than 10% by mass, the rare earth fluoride remains and the honing speed is lowered to cause scratching. The cubic crystal composite rare earth element, and the rare earth element is represented by RE. For example, REaCh represents a compound, and the composite oxyfluoride rare earth is, for example, a compound represented by REOF·REO. The lanthanide honing material of the present invention must consist essentially of these compounds. In fact, the crystal structure is basically composed of these compounds, and the X-ray diffraction of the honing material is measured. These composite paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the back note first) Fill in this page again)
-8- 1285674 經濟·部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（6) 物以外的結晶波峰表示，以一般的測定下幾乎無法檢測出 來。且，對硏磨材料之添加劑等由稀土類元素化合物以外 者引起的結晶波峰並未包含於上述的結晶波峰中。 又，本發明中鈽系硏磨材料中的全稀土類元素含有量 由氧化物換算爲90質量％以上，較佳爲95質量％以上， 全稀土類元素中的鈽含有量由氧化物換算爲55質量％以 上，較佳爲60質量％以上。鈽系硏磨材料中的全稀土類元 素含有量之測定可藉由ICP分析或螢光X光分析之機器分 析進行。此時氧化物換算量的算出，係藉由硏磨材料中稀 土類元素含有量由上述機器分析測定出，其元素含有量換 算成氧化物而進行。 本發明的鈽系硏磨材料中的全稀土類元素含有量由氧 化物換算時比90質量％爲低，又全稀土類元素中的鈽含有 量由氧化物換算時比5 5質量％爲低，則對硏磨不佳的粒子 會增加，成爲硏磨速度變慢或對硏磨中被硏磨材料擦傷產 生之原因。 本發明的鈽系硏磨材料，X光繞射測定進行時的立方晶 體複合氧化稀土引起的主要波峰（2 0 )以28.2度以上時爲 佳。一般的氧化鈽引起的X光繞射之主要波峰雖會出現 27.8度，但本發明的該主要波峰出現於高角度邊〇.4度以上 之變化位置。其原因爲氧化铈以外的稀土成分之氧化鑭、 氧化鐯等被包含於氧化铈中使結晶間距離產生變化，因使 用可得到如此繞射波峰的鈽系硏磨材料，可得到較高硏磨 速度時產生較少硏磨時的擦傷之效果。 本紙張尺度適用中.國國家標準（CNS ) A4規格（210X297公慶） (請先閱讀背面之注意事項再填寫本頁)-8- 1285674 Printed by the Ministry of Economy, Intellectual Property, and Staff Consumer Cooperatives A7 B7 V. Inventive Note (6) Crystalline peaks other than the material are almost impossible to detect under normal measurement. Further, a crystallization peak caused by a rare earth element compound or the like to an additive such as a honing material is not included in the above-described crystallization peak. In the present invention, the total rare earth element content in the lanthanum honing material is 90% by mass or more, preferably 95% by mass or more, based on the oxide, and the lanthanum content in the total rare earth element is converted into oxide. 55 mass% or more, preferably 60 mass% or more. The measurement of the total rare earth element content in the lanthanum honing material can be carried out by machine analysis by ICP analysis or fluorescent X-ray analysis. In this case, the amount of the oxide-converted amount is calculated by the above-described analysis of the content of the rare earth element in the honing material, and the element content is converted into an oxide. The content of the total rare earth element in the lanthanum honing material of the present invention is lower than 90% by mass in terms of oxide, and the cerium content in the total rare earth element is lower than 5% by mass in terms of oxide. , the particles that are poorly honed will increase, and the honing speed will be slower or the abrasion of the honing material in the honing will occur. In the lanthanum honing material of the present invention, the main peak (20) caused by the cubic crystal composite oxidized rare earth during the X-ray diffraction measurement is preferably 28.2 or more. Although the main peak of X-ray diffraction caused by general yttrium oxide appears to be 27.8 degrees, the main peak of the present invention appears at a position where the high angle side 〇.4 degrees or more. The reason is that cerium oxide, cerium oxide, or the like, which is a rare earth component other than cerium oxide, is contained in cerium oxide to change the distance between crystals, and a lanthanum honing material which can obtain such a diffraction peak can be used to obtain a higher honing. At the speed, it produces less scratching when honing. This paper scale applies to the National Standard (CNS) A4 specification (210X297 public celebration) (please read the notes on the back and fill out this page)
-9- 1285674 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（7) 本發明的鈽系硏磨材料之X光繞射測定，例如 裝置：（股）理學製X光繞射測定裝置中產生X光的電 壓：40kV 電流·· 30Ma 掃描速度：4.0度/分 測定間隔：0.02度/分 縫隙·· D S發光縫隙=1 RS受光縫隙=0.3 SS散光縫隙=1 條件下進行。 且，因嚴格規定本發明的X光繞射下之波峰位置，作 簋_ X光繞射下的測定條件，X光管球使用Cu陽極、過濾 使用鎳箔，藉由CuK α光淮行Μ宙亦可。 本發明的铈系硏磨材料X光繞射測定下，對於立方晶 體複合氧化稀土的主要波峰，氧氟化稀土的主要波峰之強 度比爲0·2〜1的範圍內，較佳爲〇·3〜0.6的範圍內。姉系 硏磨材料的X光繞射下，立方晶體複合氧化稀土的主要波 峰（2 0 )、及氧氟化稀土的主要波峰分別會出現於2 8 _ 2度 與26·7度附近。波峰的強度表示繞射強度之最大値。對於 立方晶體複合氧化稀土的主要波峰，氧氟化稀土的主要波 峰之強度比比0.2低時，無法充分抑制含於鈽系硏磨材料的 氧化鑭之壞影響，使硏磨速度降低，硏磨材料的壽命亦會 減短。又，強度比高於1時使硏磨能力劣化之氧氟化物的 量會增加使硏磨速度降低。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)-9- 1285674 Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed A7 B7 V. INSTRUCTIONS (7) X-ray diffraction measurement of the enamel honing material of the present invention, for example, device: (stock) X-ray diffraction Voltage for generating X-rays in the measuring device: 40 kV current · · 30 Ma Scanning speed: 4.0 degrees / minute Measurement interval: 0.02 degrees / minute slit · · DS light-emitting slit = 1 RS light-splitting slit = 0.3 SS astigmatism slit = 1 condition. Moreover, since the peak position under the X-ray diffraction of the present invention is strictly defined, the measurement conditions under the 簋X X-ray diffraction are used, the X-ray tube ball uses a Cu anode, and the filter uses a nickel foil, and the CuK α ray is used. The universe can also. In the X-ray diffraction measurement of the lanthanum honing material of the present invention, for the main peak of the cubic crystal composite oxidized rare earth, the intensity ratio of the main peak of the oxyfluorinated rare earth is in the range of 0·2 〜1, preferably 〇· 3 to 0.6 within the range. Under the X-ray diffraction of the lanthanum honing material, the main peaks of the cubic crystal composite oxidized rare earth (20) and the main peaks of the oxyfluoride rare earth will appear near 2 8 _ 2 degrees and 26·7 degrees, respectively. The intensity of the peak indicates the maximum 绕 of the diffraction intensity. For the main peak of the cubic crystal composite oxidized rare earth, when the intensity ratio of the main peak of the oxyfluorinated rare earth is lower than 0.2, the bad influence of the cerium oxide contained in the lanthanum honing material cannot be sufficiently suppressed, the honing speed is lowered, and the honing material is lowered. The life expectancy will also be shortened. Further, when the strength ratio is higher than 1, the amount of oxyfluoride which deteriorates the honing ability is increased to lower the honing speed. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the notes on the back and fill out this page)
-10- 1285674 A7 B7 五、發明説明（8 ) (請先閱讀背面之注意事項再填寫本頁) 本發明的铈系硏磨材料之一次粒子徑爲l〇nm〜50nm的 範圍內，比表面積爲2m2/g〜8m2/g的範圍內爲佳。一次粒子 徑的測定由X光繞射波峰之半寬度的結晶子徑計算出，比 表面積的測定則經BET法進行。 經濟部智慧財產局員工消費合作社印製 本發明的鈽系硏磨材料之一次粒子徑若比1 〇nm低時， 氧化鈽或氧氟化物的結晶化會不充分，使機械性硏磨力變 弱’若高於50nm時因太硬而成爲大結晶，故成爲擦傷的原 因。又比表面積低於2m2/g時如結晶子徑爲50nm以上的狀 況一樣成爲產生擦傷的原因，若高於8m2/g時會降低硏磨速 度。本發明的鈽系硏磨材料之製造方法，其含有由天然存 在’包含鈽（Ce)、鑭（La)、鐯（Pr)及銳（Nd)等多 數的礦石（稀土精礦）中，化學性分離除去鹼金屬及鹼土 金屬、放射線物質等稀土類以外的成分、或中重稀土與Nd 之稀土成分，降低這些含有量之鈽作爲主成分的混合碳酸 稀土、混合氫氧化稀土等的混合輕稀土類化合物作爲主原 料，這些於500〜1，100°C下烘烤成爲混合氧化稀土之步驟 爲佳。其中所謂中重稀土，其爲比Pm (鉅）的原子號碼高 之稀土類者。 作爲化學性分離除去鹼金屬及鹼土金屬、放射性物質 等之稀土類外的成分之方法，一般爲經由稀土精礦的硫酸 烘烤之方法，作爲中重稀土與Nd的稀土成分之化學性分離 除去方法，一般爲溶媒萃取法。 例如，本發明所使用的主原料之混合輕稀土類化合物 係由，天然存在，包含鈽、鑭、鉅及銨等多成分的稀土精 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -11 - 1285674 Α7 Β7 五、發明説明（9) 礦經粉碎後，.與硫酸一起烘烤後溶於水，鹼金屬及鹼土金 屬、放射性物質等之稀土類外的成分作爲不溶物而除去 後，經由溶媒萃取法將中重稀土與Nd的稀土成分以化學性 分離除去後，使用*或硝酸等成爲碳酸鹽而獲得。其中所 得之混合輕稀土類化合物中，全稀土類的含有量由氧化物 換算下爲45〜55質量％、全稀土類中的鈽含有量由氧化物 換算下爲55〜63質量％，非稀土類成分含量爲〇.5質量％ 以下，其餘爲碳酸。 又，本發明係關於鈽系硏磨材料之製造方法，其特徵 爲由含有稀土類元素的稀土精礦（礦石）中，化學性分離 除去稀土類元素以外的不純物、中重稀土及Nd所得之混合 經稀土類化合物，於500〜1，100°C下烘烤成爲混合氧化稀 土，其中添加鈽作爲主成分之氟化稀土類，經由濕式粉 碎、乾燥、烘烤、解碎、分級得到鈽系硏磨材料。 鈽爲主成分之氟化稀土類，由含有天然存在的鈽、 鑭、鉅及銨等多成分之稀土精礦，以化學性分離除去鹼金 屬及鹼土類金屬、放射線物質等稀土類以外的成分，或需 要時爲中重稀土及Nd，減低這些含有量之混合輕稀土類化 合物後，使用氟酸、氟化銨及氧化氟化銨等氟素源經氟化 後，以400°C以下溫度做熱處理再粉碎所得到者爲佳。此所 得到以铈作爲主成分之氟化稀土類，全稀土類含有量由氧 化物換算爲60〜90質量％程度，氟含量爲20〜30質量％時 爲佳。又，以鈽爲主成分時全稀土類含有量中的鈽含有量 由氧化物換算爲40質量％以上，較佳爲60質量％以上。 本ϋ尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ~ -12- (請先閱讀背面之注意事項再填寫本頁) 衣· 訂 經濟部智慧財產局員工消費合作社印製 1285674 A7 _B7_ 五、發明説明（1〇) (請先閲讀背面之注意事項再填、寫本頁> 以上步驟中若氟化後的熱處理溫度超過400°C時，氧f匕 稀土等稀土類化合物與氟素之反應性較爲差，烘烤時會有 硬塊出現。此爲擦傷原因之粒子，又經由此無法達到硏磨t 速度之提高。因此，熱處理溫度必須爲400°C以下。 本發明中，主原料之混合輕稀土類化合物以5 00〜 1，100 °C烘烤成爲混合氧化稀土。此混合氧化稀土與副原料 之鈽做爲原料的氟化稀土類以一定比例混合後，做濕式微 粉碎。此時的混合比率以對應最終產品所要求的氟素含有 量，適當地決定者。由此本發明中，經由改變以鈽作爲主 成分之氟化稀土類的混合比率，含於最終製品中的氟素量 可容易變化。粉碎係使用濕式球磨機等的介質磨機而進 行。本發明中粉碎後的粒子以平均粒徑爲〇·5〜3.0/z m較 佳。 · 經濟部智慧財產局員工消費合作社印製 其次，經濕式粉碎之混合氧化稀土與鈽作爲主成分之 氟化稀土類的混合泥漿經乾燥後烘烤。烘烤溫度爲600〜 1，100°C，較佳爲800〜1，000°C。在進行冷卻、解碎、分及 操作，可得到鈽系硏磨材料。此硏磨材料的平均粒徑爲0.5 〜3 · 0 // m較佳。又，此硏磨材料中，氟素以1 · 0〜1 〇質量 %爲佳，較佳爲氟素爲5〜10質量％之範圍內含有。 本發明中，上述混合輕稀土類化合物於500〜1，100°C 下烘烤成爲混合氧化稀土中，使用烘烤前的混合輕稀土類 化合物經碳酸而成爲混合碳酸稀土，及使用混合以姉作爲 主成分之氟化稀土類爲佳。此狀況下氟化稀土類中的氟素 經與混合氧化稀土及混合碳酸稀土中之鑭進行反應成爲氟 本紙張尺度適用中.國國家標準（CNS ) A4規格（210'〆297公釐） -13- 1285674 A7 __B7 五、發明説明（Ή) 化鑭。又於混合氧化稀土內混入混合碳酸稀土，使氟素與 鑭反應可促進成爲氟化鑭的反應。 硏磨材料中的氧化鑭之鹼性較爲強，此氧化鑭於硏磨 時會產生硏磨台的堵塞，硏磨面之由硏磨材料水性泥漿循 環的更新會有不良影響。特別爲低鈽系硏磨材料中，鑭含 有量較爲高故較易產生上述的問題。本發明中混合氧化稀 土中混合混合碳酸稀土、及以姉爲主成分的氯化稀土類， 再經濕式粉碎、乾燥、烘烤、解碎、分級後，氧化鑭由氟 化鑭取代，可抑制上述硏磨時的壞影響。 本發明的鈽系硏磨材料可一般的粉末狀態下處理，但 作爲硏磨材料使用時，一般爲水性分散液的型態下使用於 光學鏡片用玻璃基板、光碟吼磁碟片用玻璃基板、液晶用 玻璃基板等，各種玻璃材料或玻璃製品等的加工處理硏磨 上。 例如，分散於水等分散劑，使用5〜30質量％程度之 泥漿狀態。作爲本發明中較佳的分散劑，可舉出水或水溶 性有機溶劑。作爲有機溶劑，可舉例醇類、多元醇、丙 酮、四氫呋喃等。一般以使用水爲多。 使用本發明鈽系硏磨材料經硏磨的玻璃基材等，不會· 產生凹痕、傷等表面缺陷，得到優良品質的硏磨表面。 本發明的鈽系硏磨材料，可由使用公知的製造裝S $ 據本發明的製造方法製造出。 【實施例1】 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） " ^-- -14- (請先閲讀背面之注意事項再填寫本I) 本· 訂 經濟部智慧財產局員工消費合作社印製 1285674 A7 B7 五、發明説明（12) (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 含有氧化物換算爲47質量％的稀土類元素，53質量％ 的稀土類元素以外之雜質、氧化物換算爲2質量％的中重 稀土類、氧化物換算爲8質量％的Nd之稀土精礦（礦石） 經處理，稀土類元素以外的雜質減低至1質量％以下、中 重稀土類減低至氧化物換算爲1質量％以下、Nd減低至氧 化物換算爲1質量％以下成爲混合輕稀土類化合物後，使 用碳酸氫銨做碳酸化，得到混合碳酸稀土。所製得之混合 碳酸稀土中，全稀土類含有量由氧化物換算爲49質量％、 全稀土類含有量中的鈽含有量由氧化物換算爲60質量％。 將2kg的混合氧化稀土中添加，加入300g的該混合輕稀土 類化合物中添加氟酸於400°C下進行2小時的熱處理所製得 之以鈽爲主成分的氟化稀土類（全稀土類含有量由氧化物 換算爲85質量％、全稀土類含有量中的鈽含有量由氧化物 換算爲45質量％、氟素含有量爲27質量％)，以濕式囚 磨機下粉碎、成爲含有平均粒徑（D50)爲1.5// m粉體之 泥漿。乾燥此泥漿，使用電爐於900°C下烘烤2小時後，進 行冷卻、解碎、分級操作，而製造出鈽系硏磨材料。惟， 此平均粒徑（D50 )爲使用庫爾特multisaizer (克路達 (股）製造）以30 // m細孔試管下測試，相當於體積分佈 累積値50%的粒子徑。 其次，所得之鈽系硏磨材料分散於水中作爲10質量％ 濃度泥漿。使用此泥漿狀硏磨液，硏磨薄膜晶體管（TFT ) 面板用無鹼性玻璃，進行硏磨狀態評估。惟，如下述硏磨 條件。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -15- 1285674 A7 __B7___ 五、發明説明（13) (硏磨條件） (請先閱讀背面之注意事項再填寫本頁) 硏磨機·· 4way type兩面硏磨機 加工物：5cm角無驗性玻璃，面積25cm2 加工片數：3片/批X 2批 硏磨台：聚氨酯泡沬台（LP-77、羅蕾斯製造） 底定盤迴轉數·· 90rpm 泥漿供給量：60ml/分 加工壓力：156g/cm2 硏磨時間：30分鐘 且，6片TFT面板用無鹼性玻璃，每1片各4點（處） 以微測定儀測定硏磨前後厚度，由4點X 6片之平均測定値 求得硏磨速度（/z m/分）。又，使用20萬勤之鹵素燈作爲 光源，玻璃表面以目視觀察，求得有擦傷的數目。又，玻 璃表面的中心線平均粗度以藍克天模森公司製的計數器測 定。 經濟部智慧財產局員工消費合作社印製 所得之結果，硏磨材料之平均粒徑（D50 )、硏磨速 度、中心線平均粗度Ra皆表示於表1。又，X光繞射測定 結果如表2，硏磨材料之物理性値如表1。 【實施例2】 實施例1中，作爲主原料使用40質量份的混合氧化稀 土，由8 0重量份的烘烤前混合輕稀土類化合物經碳酸化作 爲混合碳酸稀土者取代，作爲混合氧化稀土與混合碳酸稀 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' -16- 1285674 A7 B7 五、發明説明（14) 土之混合物以外皆與實施例1時相同，得到铈系硏磨材 料。且，混合輕稀土類化合物的碳酸化係藉由重碳酸銨進 行。 與實施例1相同，使用所得之鈽系硏磨材料進行硏 磨.，進行硏磨狀態之評價。其結果如表1所示。 【比較例1】 對於實施例1而言，混合碳酸稀土的烘烤溫度改爲 1 200°C以外其他與實施例1相同，得到鈽系硏磨材料。 與實施例1相同，使用所得之鈽系硏磨材料進行硏 磨，進行硏磨狀態之評價。其結果如表1所示，X光繞射 測定之結果如表3所示。 【比較例2】 對於實施例1而言，以鈽作爲主成分的氟化稀土類的 烘烤溫度改爲800°C以外其他與實施例1相同，得到鈽系硏 磨材料。 與實施例1相同，使用所得之鈽系硏磨材料進行硏 磨，進行硏磨狀態之評價。其結果如表1所示， 由表1明瞭可知，實施例1及2可得到硏磨速度較 高，且作爲被硏磨體之無鹼性玻璃表面並無產生擦傷，表 面粗糙度較少，品質良好之硏磨面的氧化鈽系硏磨材料。 另一方面，比較例1中，因混合輕稀土類化合物的烘 烤溫度較爲高，與添加的氟化稀土並無充分反應，故殘留 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 衣· 經濟部智慧財產局員工消費合作社印製 -17- 1285674 A7 B7 五、發明説明（15) 氟化稀土。又，硏磨速度低、擦傷亦產生，表面粗糙變 大。 比較例2中，因所添加的混合氟化稀土之熱處理溫度 較高，使平均粒徑變大，硏磨速度的提升效果降低。又， 產生擦傷，表面粗糙變大，硏磨面品質亦差。 【發明的效果】 如以上說明，本發明的鈽系硏磨材料之製造方法，生 產效率佳，且可控制製造成本爲最低。又，經由使用本發 明的鈽系硏磨材料，可使硏磨速度變快，且經硏磨的被硏 磨物，可得到傷痕較少發生，表面粗度較小，品質良好的 硏磨面。 (請先閱讀背面之注意事項再填寫本頁) 衣.-10- 1285674 A7 B7 V. INSTRUCTIONS (8) (Please read the precautions on the back and fill in this page.) The primary particle diameter of the lanthanum honing material of the present invention is in the range of l〇nm~50nm, and the specific surface area It is preferably in the range of 2 m 2 /g to 8 m 2 /g. The measurement of the primary particle diameter was calculated from the crystallite diameter of the half width of the X-ray diffraction peak, and the measurement of the specific surface area was carried out by the BET method. When the primary particle diameter of the lanthanum honing material of the present invention is less than 1 〇nm, the crystallization of cerium oxide or oxyfluoride may be insufficient, and the mechanical honing force may be changed. If it is weaker than 50 nm, it becomes too hard and becomes a large crystal, so it is a cause of scratching. Further, when the specific surface area is less than 2 m2/g, the cause of scratching is caused as in the case where the crystallite diameter is 50 nm or more, and if it is higher than 8 m2/g, the honing speed is lowered. The method for producing a lanthanum honing material according to the present invention, which comprises a mineral (rare earth concentrate) containing a large number of natural inclusions (Ce), lanthanum (La), praseodymium (Pr) and sharp (Nd), chemical Separation and removal of components other than rare earths such as alkali metals, alkaline earth metals, and radiation materials, or rare earth components of medium-heavy rare earths and Nd, and mixing of such rare earth carbonates and mixed rare earth hydroxides as main components As the main raw material, the rare earth compound is preferably baked at 500 to 1, and 100 ° C to form a mixed rare earth oxide. Among them, a medium-weight rare earth is a rare earth having a higher atomic number than Pm (giant). The method of chemically separating and removing a rare earth component such as an alkali metal, an alkaline earth metal, or a radioactive substance is generally a chemical separation of a rare earth component of a medium-heavy rare earth and Nd by a method of sulfuric acid baking by a rare earth concentrate. The method is generally a solvent extraction method. For example, the mixed light rare earth compound of the main raw material used in the present invention is naturally occurring, and the rare earth fine paper containing multi-components such as lanthanum, cerium, giant and ammonium is applicable to the Chinese National Standard (CNS) A4 specification (210 X). 297 mm) -11 - 1285674 Α7 Β7 V. Description of invention (9) After crushing the ore, it is dissolved in water together with sulfuric acid, and the components other than rare earths such as alkali metals, alkaline earth metals, and radioactive substances are insoluble. After removing the substance, the rare earth component of the medium heavy rare earth and Nd is chemically separated and removed by a solvent extraction method, and then obtained by using * or nitric acid or the like as a carbonate. In the mixed light rare earth compound obtained, the total rare earth content is 45 to 55 mass% in terms of oxide, and the total lanthanum content in the total rare earth is 55 to 63 mass% in terms of oxide, and non-rare earth. The content of the component is 〇.5% by mass or less, and the rest is carbonic acid. Moreover, the present invention relates to a method for producing a lanthanum honing material, which is characterized in that a rare earth concentrate (ore) containing a rare earth element is chemically separated and removed from impurities other than rare earth elements, medium and heavy rare earths, and Nd. The rare earth compound is mixed and baked at 500 to 1,100 ° C to form a mixed rare earth oxide, wherein the rare earth fluoride is added as a main component, and wet pulverization, drying, baking, pulverization, and classification are carried out to obtain ruthenium. It is a honing material. A rare earth concentrate containing ruthenium, osmium, mega, and ammonium, which are naturally occurring as a main component, chemically separates and removes components other than rare earths such as alkali metals, alkaline earth metals, and radiation substances. Or if necessary, it is a medium-weight rare earth and Nd. After reducing the content of the mixed light rare earth compound, it is fluorinated with a fluorine source such as hydrofluoric acid, ammonium fluoride or ammonium oxyfluoride, and the temperature is below 400 ° C. It is better to do the heat treatment and then pulverize it. In this case, a rare earth fluoride having ruthenium as a main component is obtained, and the total rare earth content is preferably 60 to 90% by mass in terms of oxide, and preferably 20 to 30% by mass in terms of fluorine content. In addition, the cerium content in the total rare earth content in the case of the cerium as a main component is 40% by mass or more, preferably 60% by mass or more, in terms of oxide. This scale applies to China National Standard (CNS) A4 specification (210X297 mm) ~ -12- (Please read the note on the back and fill out this page) Clothing · Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1256756 A7 _B7_ V. Description of invention (1〇) (Please read the notes on the back and fill in and write this page.) If the heat treatment temperature after fluorination exceeds 400 °C in the above steps, rare earth compounds such as oxygen f匕 rare earth and fluorine The reactivity of the element is relatively poor, and a hard block appears during baking. This is a particle of scratching, and the speed of the honing t cannot be increased by this. Therefore, the heat treatment temperature must be 400 ° C or less. The mixed light rare earth compound of the main raw material is baked at 500 to 1,100 ° C to form a mixed rare earth oxide. The mixed rare earth oxide and the rare earth fluoride as a raw material are mixed in a certain ratio, and then wet micro The mixing ratio at this time is appropriately determined in accordance with the fluorine content required for the final product. Thus, in the present invention, by changing the mixing ratio of the rare earth fluoride containing cerium as a main component, The amount of fluorine in the final product can be easily changed. The pulverization is carried out using a media mill such as a wet ball mill. In the present invention, the pulverized particles preferably have an average particle diameter of 〇·5 to 3.0/zm. The Intellectual Property Bureau employee consumption cooperative printed the second, and the mixed mud of the fluorinated rare earth mixed with the oxidized rare earth and cerium as the main component was dried and baked. The baking temperature was 600~1100 °C. Preferably, the temperature is 800 to 1,000 ° C. The cooling, disintegration, and separation operations can be carried out to obtain a lanthanum honing material. The average granule diameter of the honing material is preferably 0.5 to 3 · 0 / m. In the honing material, fluorine is preferably 1 to 0% by mass, more preferably 5 to 10% by mass of fluorine. In the present invention, the above mixed light rare earth compound is in 500~ In the case of baking at 1,100 ° C to form a mixed rare earth oxide, it is preferred to use a mixed rare earth compound before baking to form a mixed rare earth carbonate by carbonic acid, and to use a mixed rare earth element containing cerium as a main component. Fluorine in rare earth fluorides and mixed rare earth oxides The mixed rare earth carbonate is reacted to become the fluorine paper. The national standard (CNS) A4 specification (210'〆297 mm) -13-1285674 A7 __B7 V. Invention description (Ή) 镧. The mixed rare earth oxide is mixed with rare earth carbonate to make the reaction between fluorine and cerium promote the reaction of cerium fluoride. The cerium oxide in the honing material has a strong basicity, and the cerium oxide generates a honing table during honing. The clogging, the honing surface is adversely affected by the renewal of the water-based mud circulation of the honing material. Especially for the low lanthanum honing material, the cerium content is relatively high, so the above problems are more likely to occur. The rare earth is mixed with rare earth carbonate and rare earth chloride which is mainly composed of cerium. After wet pulverization, drying, baking, pulverization and classification, cerium oxide is replaced by lanthanum fluoride, which can suppress the above honing. Bad influence. The lanthanum honing material of the present invention can be treated in a general powder state, but when used as a honing material, it is generally used in the form of an aqueous dispersion for a glass substrate for an optical lens, a glass substrate for an optical disk, and a glass substrate for a disk. For glass substrates for liquid crystals, etc., various glass materials, glass products, and the like are processed and honed. For example, it is dispersed in a dispersing agent such as water, and a slurry state of about 5 to 30% by mass is used. Preferred examples of the dispersant in the present invention include water or a water-soluble organic solvent. As the organic solvent, an alcohol, a polyhydric alcohol, a acetone, a tetrahydrofuran or the like can be exemplified. Generally, water is used. By using the honed glass substrate or the like of the enamel-based honing material of the present invention, surface defects such as dents and scratches are not generated, and a honed surface of excellent quality is obtained. The lanthanum honing material of the present invention can be produced by using the known manufacturing method of the present invention. [Example 1] This paper scale is applicable to China National Standard (CNS) A4 specification (210X297 mm) " ^-- -14- (Please read the note on the back and fill in this I) Bureau employee consumption cooperative printed 1256574 A7 B7 V. Invention description (12) (Please read the note on the back and fill out this page.) Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed rare earths containing 47% by mass of oxides. Element, 53% by mass of impurities other than rare earth elements, medium-weight rare earths in which oxides are converted to 2% by mass, and rare earth concentrates (ores) of Nd in terms of oxides in terms of 8% by mass, other than rare earth elements When the amount of the impurities is reduced to 1% by mass or less, the medium and heavy rare earths are reduced to 1% by mass or less in terms of oxides, and the Nd is reduced to 1% by mass or less in terms of oxides to form a mixed light rare earth compound, and then ammonium hydrogencarbonate is used for carbonation. A mixed rare earth carbonate is obtained. In the mixed rare earth carbonate, the total rare earth content was 49% by mass in terms of oxide, and the total lanthanum content in the total rare earth content was 60% by mass in terms of oxide. 2 kg of mixed rare earth oxides are added, and 300 g of the mixed light rare earth compound is added to the mixed rare earth compound, and the fluorinated rare earths (all rare earths) mainly composed of cerium are obtained by heat treatment at 400 ° C for 2 hours. The content is 5% by mass in terms of oxide, the cerium content in the total rare earth content is 45% by mass in terms of oxide, and the fluorine content is 27% by mass, and is pulverized by a wet ball mill. A slurry containing a powder having an average particle diameter (D50) of 1.5 / / m. The slurry was dried, baked at 900 ° C for 2 hours in an electric furnace, and then cooled, pulverized, and classified to produce a lanthanum honing material. However, this average particle diameter (D50) was measured using a Coulter multisaizer (manufactured by Kludner Co., Ltd.) in a 30/5 m fine-pore test tube, which corresponds to a particle diameter cumulative by 50%. Next, the obtained cerium-based honing material was dispersed in water as a 10% by mass concentration slurry. Using this slurry honing fluid, the honed thin film transistor (TFT) panel was evaluated for honing condition with alkali-free glass. However, the following conditions are honed. This paper scale applies to China National Standard (CNS) A4 specification (210X 297 mm) -15- 1285674 A7 __B7___ V. Invention description (13) (honing condition) (Please read the note on the back and fill in this page) 硏Mill ·· 4way type two-side honing machine processing: 5cm angle non-inspective glass, area 25cm2 Processing number: 3 pieces / batch X 2 batch honing table: polyurethane foaming table (LP-77, manufactured by Loris ) Number of rotations of the bottom plate ···90rpm Mud supply: 60ml/min Processing pressure: 156g/cm2 Honing time: 30 minutes and 6 pieces of TFT panel with no alkali glass, each piece is 4 points each The micrometer was used to measure the thickness before and after honing, and the honing speed (/zm/min) was determined from the average of 4 points X 6 pieces. Further, a halogen lamp of 200,000 minutes was used as a light source, and the surface of the glass was visually observed to obtain the number of scratches. Further, the average thickness of the center line of the glass surface was measured by a counter manufactured by Lanke Tianmensen Co., Ltd. As a result of printing by the Intellectual Property Office of the Ministry of Economic Affairs, the average particle size (D50), honing speed, and centerline average roughness Ra of the honing materials are shown in Table 1. Further, the results of X-ray diffraction measurement are shown in Table 2, and the physical properties of the honing material are shown in Table 1. [Example 2] In Example 1, 40 parts by mass of mixed rare earth oxide was used as a main raw material, and 80 parts by weight of a pre-baking light rare earth compound was substituted by carbonation as a mixed rare earth carbonate as a mixed rare earth oxide. For the mixed carbonic acid paper scale, the Chinese National Standard (CNS) A4 specification (210X297 mm) is used. -16- 1285674 A7 B7 5. Inventive Note (14) The mixture of soil is the same as in the case of Example 1, and the system is obtained. Honing materials. Further, the carbonation of the mixed light rare earth compound is carried out by ammonium bicarbonate. In the same manner as in Example 1, the obtained lanthanum honing material was used for honing, and the honing state was evaluated. The results are shown in Table 1. [Comparative Example 1] In the same manner as in Example 1, except that the baking temperature of the mixed rare earth carbonate was changed to 1,200 °C, a lanthanum honing material was obtained. In the same manner as in Example 1, the obtained lanthanum honing material was used for honing, and the honing state was evaluated. The results are shown in Table 1, and the results of X-ray diffraction measurement are shown in Table 3. [Comparative Example 2] The ruthenium honing material was obtained in the same manner as in Example 1 except that the baking temperature of the rare earth fluorides containing ruthenium as a main component was changed to 800 °C. In the same manner as in Example 1, the obtained lanthanum honing material was used for honing, and the honing state was evaluated. The results are shown in Table 1. As is clear from Table 1, in Examples 1 and 2, the honing speed was high, and the surface of the alkali-free glass as the honed body was not scratched, and the surface roughness was small. A cerium oxide honing material with a good quality finish. On the other hand, in Comparative Example 1, since the baking temperature of the mixed light rare earth compound is relatively high and does not sufficiently react with the added rare earth fluoride, the residual paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). PCT) (Please read the notes on the back and fill out this page.) 衣·Industrial Intellectual Property Office of the Ministry of Economic Affairs, Employees' Consumption Cooperative Printed -17- 1285674 A7 B7 V. Description of Invention (15) Rare Earth Fluoride. Moreover, the honing speed is low, the scratches are also generated, and the surface roughness is increased. In Comparative Example 2, since the heat treatment temperature of the mixed rare earth fluoride to be added was high, the average particle diameter was increased, and the effect of improving the honing speed was lowered. In addition, scratches occur, the surface roughness becomes large, and the quality of the honing surface is also poor. [Effect of the Invention] As described above, the method for producing a lanthanum honing material of the present invention has a high production efficiency and can control the manufacturing cost to a minimum. Further, by using the enamel-based honing material of the present invention, the honing speed can be increased, and the honed honed object can obtain a honing surface with less occurrence of scratches, a small surface roughness, and good quality. . (Please read the notes on the back and then fill out this page) Clothing.
*1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中.國國家標準（CNS ) Α4規格（210X297公釐） -18-*1T Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing This paper scale applies to the national standard (CNS) Α4 specification (210X297 mm) -18-