TWI280991B - Method of improving uniformity of nano carbon tube electrical emitting source fabricated by electrophoretic deposition - Google Patents

Abstract

A method of improving uniformity of nano carbon tube electrical emitting source fabricated by electrophoretic deposition is provided. The method firstly provides a semi-finished cathode structure, and the cathode structure and a metal plate are connected to cathode of electrophoresis electrode. After the connection, one side of the cathode structure to be electrophoretically deposited is placed parallel to the metal plate with a fixed interval, then placed in an electrophoretic solution, anode and cathode are provided with a pulsed DC voltage by power supply to form an electric field, and the nano carbon tube electrophoretic deposition is fabricated on cathode electrode to form the electric emitting source. After the deposition, the cathode structure is drawn out and baked in low temperature to remove exceeding water solution on the cathode structure. At this time, the auxiliary indium chlorate and hydrolyzed hydroxyl iron is formed to indium hydroxide, then sintering process is performed, the indium hydroxide on the cathode electrode layer will be oxidized to indium oxide, to enhance electron conduction relationship between the nano carbon tube and the cathode electrode layer.

Description

1280991 五、發明說明（1) ~ 【發明所屬之技術領域】 又本發明係有關一種改善以電泳沉積製作奈米碳管電子 f射源均勻性的方法，尤指一種以特定之電泳奈米碳管水 令液之電泳條件，以改善電弧放電製作之奈米碳管於電泳 水容液中之分散特性，並解決電泳於陰極結構之均勻性， 以开》成一良好之電泳沉積效果。 【先前技術】 習知之三極場發射顯示器，其結構主要係包含陽極結 b構與陰極結構，陽極結構與陰極結構之間設置有支撐器（s Pacer)，提供為陽極結構與陰極結構間真空區域之間隔， j 7為陽極結構與陰極結構間之支撐，該陽極結構係包含 '^陽極基板、一陽極電極層及一螢光粉體層（ph〇sph〇rs ayer)。；而該陰極結構則包含一陰極基板、一陰極電極層 电子發射源層、一介電層及一閘極層；其中該閘極層 ，被提供一電位差以汲引電子發射源層之電子射出，藉由 •陽極電極層所提供之高電壓，以提供電子束之加速，^使 電子有足夠的動能撞擊（impinge)陽極結構上之螢光粉體 層激發而使其發光。據此，為了使電子在場發射顯示器中 擊移動，需以真空設備將顯示器保持至少1〇_5托（t〇rr)以下 之度，使電子獲得一良好的平均自由動徑（mean free path) ’、同時應避免電子發射源和螢光粉區的污染及毒化 右另商合=電子有足夠能量去撞擊榮光粉，⑨在兩板間需 =二二隙，使電子有足夠的加速空間來撞擊螢光粉體， 達到使赏光粉體能充分產生發光效應。1280991 V. INSTRUCTION DESCRIPTION (1) ~ [Technical Field to Be Invented] The present invention relates to a method for improving the uniformity of electron photon sources of carbon nanotubes by electrophoretic deposition, especially a specific electrophoretic nanocarbon The electrophoresis conditions of the water-repellent liquid to improve the dispersion characteristics of the carbon nanotubes produced by the arc discharge in the electrophoresis water liquid, and to solve the uniformity of the electrophoresis in the cathode structure, to achieve a good electrophoretic deposition effect. [Prior Art] A conventional three-pole field emission display mainly comprises an anode junction b structure and a cathode structure, and a support (s Pacer) is provided between the anode structure and the cathode structure, and is provided as a vacuum between the anode structure and the cathode structure. The spacing between the regions, j 7 is the support between the anode structure and the cathode structure, and the anode structure comprises an 'anode substrate, an anode electrode layer and a phosphor powder layer (ph〇sph〇rs ayer). The cathode structure comprises a cathode substrate, a cathode electrode layer electron emission source layer, a dielectric layer and a gate layer; wherein the gate layer is provided with a potential difference to induce electron emission from the electron emission source layer, The high voltage provided by the anode electrode layer is used to provide acceleration of the electron beam, so that the electrons have sufficient kinetic energy to impinge on the phosphor layer of the anode structure to excite and illuminate. Accordingly, in order to make the electrons move in the field emission display, it is necessary to maintain the display at least 1 〇 5 Torr (t〇rr) with a vacuum device, so that the electrons obtain a good mean free path (mean free path). ' At the same time, it should avoid the pollution and poisoning of the electron emission source and the phosphor powder area. The right side is the same. = The electron has enough energy to hit the glory powder. 9 The two plates need to have two or two gaps, so that the electrons have enough acceleration space. To hit the fluorescent powder, so that the glazing powder can fully produce the luminescent effect.

第6頁 1280991 五、發明說明（2) 其中所謂的電子發射源層係以奈米碳管為主成八 於奈米碳管（Carbon nano tubes)自 1991 年被iijima二，由 (Nature 354，5 6 ( 1 9 9 1 ))具備極高的電子特性/並出後 被多種電子元件内所使用’而奈米碳管可以有报高 比（aspect ratio)大於500以上，和高的剛性其 食見Page 6 1280991 V. Description of the invention (2) The so-called electron emission source layer is mainly composed of carbon nanotubes and carbon nanotubes. Since 1991, it has been IIjima II, (Nature 354, 5 6 (1 9 9 1 )) has extremely high electronic properties / is used in a variety of electronic components after being discharged, and the carbon nanotubes can have an aspect ratio of more than 500, and a high rigidity. See you

多在lOOOGPn以上，而奈米碳管之尖端或缺陷處均_ 級規模的露出，以上這些特性因此被認為一種理相于 子發射源（electron field emitter)材料，例如二種二1 ^顯示器之陰極結構上之電子發射源之利用。由於琢上 官具備以上所示之物理特性，因此也可被設計為多ς ^二 如，網印或薄膜製程等以圖騰化於電子元件使用。衣私 '然就其中所謂的陰極結構製作技藝，係將奈米炉其 為電子發源材料實施製作於陰極電極層上，坌製^I 真空沉積则於各該陰極像素内之陰極電極層可 直接成長奈米碳官，或是一種可以感光曰 ，，製作於各該像素内之陰極電極層上，亦可為火；= = 製作，不過依據前述三極場發射顯示 二== 將奈米碳管實施製作各像素内之 以上述各該製作方法仍有製作成本及立 將更難以達成。尤…尺寸之電子發射源之均勾性 近來二種所謂的電泳沉積EpD(Electr〇ph〇resis Μρ =1 1 on技術陸績被提出，如美國考 ^ 聽。3/(H〇22m"虎之「奈米結構材料沉積中方； 第7頁 1280991 五、發明說明（3) 專利案’此案係將奈米碳管配製為醇類懸浮溶液，並利用 艤 _、紀、|g等離子鹽類作為輔助鹽（C h a r g e r)，製作 為電泳溶液，將欲備沉積之陰極結構，與一電極銜接至於 該電泳溶液中，藉由一直流或交流電壓提供，於溶液中形 ，電場，利用輔助鹽於溶液中解離為離子以附著於奈米碳 管粉體藉由電場形成以電泳動^“以⑺讪町““^^^^夂 協助奈米碳管沉積於一特定電極，如此可將奈米碳管沉積 圖，化於電極上，利用前述技藝所謂的電泳沉積技術，可 除以簡易的將奈米碳管實施沉積於電極層上，並可避免因三 極場發射顯示器於陰極結構上之限制，因此本技蓺已: 被應用於陰極板結構上之製作。 a 氧心 不過以電泳沉積製作技術，雖已被廣泛應用，狹1 機制仍需被探討改善，首先，以電泳之實施機制 I柃1、一直流或交流電壓於溶液中以形成電場， 為極板上，然對於所使用之粉體： 定區Ξ Ϊ見 米碳管，奈米碳管易於沉積於某特 姆Γ二或結構上，如，液面與空氣間之交界處，或各S円 樣化區诗酤位4感々田、皇 ^ 4谷该圖 L保濩層之周邊，如此易造成沉積之不均， •-子發射源層之厚度不均，致使電子產生之均勾：使 溶液以二藝；=溶劑選定係依奈米碳管多於；類 ”之實施多以醇類③液為±，然：：叙 =量大，對於未來大尺寸及量產性實』 保問崎之限制，不過若以低成本之水為溶液，在溶More than lOOOOGPn, and the tip or defect of the carbon nanotubes are exposed to the scale of the scale, these characteristics are therefore considered to be a phase in the electron field emitter material, such as two kinds of two 1 ^ display Use of an electron emission source on a cathode structure. Because the upper officer has the physical characteristics shown above, it can also be designed to be more than two. For example, screen printing or film processing is used for electronic components. In the case of the so-called cathode structure manufacturing technology, the nano furnace is made of an electron source material on the cathode electrode layer, and the vacuum deposition is performed on the cathode electrode layer in each cathode pixel. The growth of nano carbon official, or a photosensitive electrode, can be made on the cathode electrode layer in each pixel, or fire; = = production, but according to the aforementioned three-pole field emission display two == nano carbon It is still more difficult to achieve the production cost of each of the above-described fabrication methods in the production of each pixel. In particular, the size of the electron emission source is similar. Recently, two kinds of so-called electrophoretic deposition EpD (Electr〇ph〇resis Μρ =1 1 on technology has been proposed, such as the United States test ^. 3 / (H〇22m" Tiger "Nano structural material deposition Chinese; page 7 1280991 V. Invention description (3) Patent case" This case is to prepare the carbon nanotubes as an alcohol suspension solution, and use 舣_, 纪, | g plasma salts As an auxiliary salt (Charger), it is prepared as an electrophoresis solution, and the cathode structure to be deposited is connected to an electrode in the electrophoresis solution, and is supplied by a DC or AC voltage, in a solution, an electric field, and an auxiliary salt. Dissociation into ions in solution to adhere to the carbon nanotube powder is formed by electrophoresis by electrophoresis. "(^)讪^"夂 assists the deposition of carbon nanotubes on a specific electrode, so that The carbon nanotube deposition pattern is formed on the electrode, and the so-called electrophoretic deposition technique of the foregoing technique can be used to deposit the carbon nanotubes on the electrode layer in a simple manner, and the three-pole field emission display can be avoided on the cathode structure. Limit, so this technology : It is applied to the fabrication of cathode plate structure. a Oxygen is not widely used in electrophoretic deposition technology. However, the mechanism of Narrow 1 needs to be explored and improved. First, the mechanism of electrophoresis is implemented. The alternating voltage is in the solution to form an electric field, which is the plate, but for the powder used: the zone Ξ 米 see the carbon nanotubes, the carbon nanotubes are easy to deposit on a certain timan or structure, such as liquid At the junction between the surface and the air, or the poems in the S-like area, the four senses of the 々田, the Emperor^4 valley, the periphery of the L-protected layer, so easy to cause uneven deposition, •-------- The thickness is not uniform, resulting in the homogenization of electrons: the solution is in the second art; = the solvent is selected to be more than the inner carbon nanotubes; the implementation of the class is mostly the alcohol 3 liquid is ±, then:: For the future large size and mass production, the guarantee is limited, but if the solution is low-cost water, it is dissolved.

第8頁 1280991Page 8 1280991

五、發明說明（4) 有兩大處理關鍵 應，於電極上一 管沉積；二、奈 另外，習知 類溶液中之應用 著之功效。 【發明内容】 本發明之主 ，失存在，本發明 方法’係提供於 ’及一特定輔助 液’並以電泳沉 製之奈米碳管粉 易於凝聚為奈米 超音波震盪分散 於電泳水溶液中 於電泳過程導致 輔助鹽於電解離 發明採用之奈 果更佳，可免於 為達上述之 碳管電子發射源 ’將進行陰極結 陰極結構之陰極 需被克服··一、 產生氫氣或氧氣 米碳管於水溶液 技藝一種以提供 ，然僅提作為一 電泳過程產生電解 ，此將影響電泳之 中之分散特性仍需 一種交流電場模式 種沉積方式，但未 水之效 奈米碳 解決。 ，於醇 見其顯 要目的，在於解 設計一可適用於 水溶液之電泳一 鹽類可達成，可 積於陰極結構上 體’由於製程限 碳管欉（Bundle) ’及利用分散劑 並不利於分散劑 其他電化學反應 後之離子正可以 米碳管粉體於水 分散劑之選用困 目的’本發明之 均勻性的方法， 構之奈米碳管電 電極層藉陰極導 決上述傳 水溶液之 適當直流 以使奈米 ’同時採 制所成長 ’配置於 以維持其 之添加， 之發生， 產生離子 或乙醇電 擾。 改善以電 將陰極結 子發射源 線與電泳 統缺失， 電泳奈米 脈衝電場 碳管調製 用以電狐 之奈米碳 水溶液中 分散效果 此將影響 所以選用 分散效果 泳溶液中 泳沉積製 構半成品 沉積製作 電極之陰 避免缺 碳管之^ 於電極 於水溶 放電產 管粉體 需藉以 ，不過 分散劑 適當之 ，可使 分散效 作奈米 完成後 ，係將 極相連V. INSTRUCTIONS (4) There are two major processing key points: one tube deposition on the electrode; two, nai, in addition, the application of the effect in the class of solutions. SUMMARY OF THE INVENTION The main problem of the present invention is that the method of the present invention is provided in 'and a specific auxiliary liquid' and the nano-carbon tube powder which is electrophoresed and precipitated is easily condensed into nano-sonic vibration and dispersed in an electrophoretic aqueous solution. In the electrophoresis process, the auxiliary salt is better used in the electrolysis of the invention, and the cathode for the cathode cathode structure of the carbon nanotube electron emission source can be prevented from being overcome. 1. Hydrogen or oxygen carbon is generated. In the case of an aqueous solution, it is only provided as an electrophoresis process to produce electrolysis, which will affect the dispersion characteristics in electrophoresis. Still need an AC electric field mode deposition method, but the effect of water without water is solved. The main purpose of the alcohol is to solve the design. An electrophoresis salt suitable for aqueous solution can be achieved. It can be accumulated on the cathode structure. The process is limited by the process of carbon nanotubes (Bundle) and the use of dispersants is not conducive to dispersion. The other ions after the electrochemical reaction can be used in the selection of the water dispersant of the carbon nanotube powder. The method of uniformity of the present invention, the carbon nanotube electrode layer of the structure is suitable for the above aqueous solution by the cathode. The direct current is generated so that the nano's simultaneous growth is configured to maintain the addition thereof, and ion or ethanol electrical disturbance is generated. Improve the electrocautery of the cathode ion emission source line and the electrophoresis system. The electrophoresis nano-pulse electric field carbon tube modulation is used to disperse the nano-carbon solution in the electric fox. This will affect the deposition of semi-finished products in the swimming solution. Make the electrode of the cathode to avoid the carbon-deficient tube. The electrode should be used for the water-soluble discharge tube powder. However, if the dispersing agent is suitable, the dispersion effect can be completed after the nano-finished.

第9頁 1280991 五、發明說明（5) 接，電泳電極之陽極與金屬面板連結，· 平行結構與金屬面板間保持-固定距離後， I，放电冰槽中，以電源供應器提供 電壓以形成一㈣，將奈米石炭 :脈衝 層以形成電子發射源 知衣作於陰極電極 待上述積後之陰極結構，取出接生 了除於陰極結構上之多餘水溶；後=== 程:、陰' = ; = 化銦，之後再進：燒結製 仏栈電極層上之虱乳化銦將再氧化為氧化 ，.因具導電特性，因此沉積於陰極射 义奈米碳管外並具一導電性氧化鋼；；，二 石反官與陰極電極層之電子傳導關係。 乂曰凰不未 【實施方式】 明^有關本發明之技術内容及詳細說明’現配合圖式說 請參閱「第一圖（a)〜（g)所 ，总士 2义 構半成品製作流程示意圖。如圖所丄：太：明之陰極結 h士 ~ %作不未&笔子發射源均勻性的方法，主要是以 •寺寸疋之電泳奈米碳管水溶液雷 主要疋以 Γ製作之奈米碳管於電泳水；；改善電弧放電 於陰極結構之均勾性，以开tl”分散特性，並解決電泳 、，4 1 J r以形成一良好之電泳沉積效果。 百先’於玻璃基板i表面上形成有一陰極電極層2， 表面形成有-閉極層4 =二電f:，再於介電層3 透過4衫技術於閘極層4表面 第10頁 1280991 五、發明說明（6) 形成有一供介電層3外露之凹陷區4丄，再於閘極層 表面形成有一保護層5，透過蝕刻技術將介電層3表 成有一供陰極電極層2外露之凹陷區3丄，再 4 進行剝離作業後，再將另一保護層6塗布包覆於;電~ 5 及閘極層4上，即完成陰極結構半成品結構。 s 請^閱「第二〜四圖所示」，係本發明之陰極結構制 作電子杳射源流程及陰極結構與金屬面板連接與連接| = :丁電泳j技術示意圖。如圖所示：待上述之陰極結‘ 完成後，將進行陰極結構之奈米碳管電子發射源沉積 首先’進行電泳溶液調t，以純水為溶劑，電泳之 子發射源材料係採用一種以電弧放電 其：r=長;5㈣下，平均碳管管==v，，之 種夕重土之不米石反官結構，其重量 (但以0.02%為最佳），再以 曲又π·17° υ·0 0 5% C ^ ,ΧΟ 01%Λ - ^ 再以添加重ι濃度約0.1%〜0.0 0 5¾Page 9 1280991 V. Invention Description (5) Connect, the anode of the electrophoretic electrode is connected with the metal panel, · After the parallel structure and the metal panel are kept at a fixed distance, I, in the discharge ice trough, the voltage is supplied by the power supply to form (4), the nano-carbon charcoal: the pulse layer is formed into an electron-emitting source, and the cathode structure is formed on the cathode electrode to be deposited, and the excess water dissolved in the cathode structure is taken out; then === Cheng: Yin = ; = Indium, and then re-introduction: the bismuth emulsified indium on the sintered electrode layer will be reoxidized to oxidation. Because of its conductive properties, it is deposited on the cathode of the cathode carbon nanotube and has a conductive oxidation. Steel;;, the electronic conduction relationship between the two stone anti-official and cathode electrode layers.乂曰 不 不 不 [Implementation] Ming ^ related to the technical content and detailed description of the present invention, please refer to the "first picture (a) ~ (g), the general plan As shown in the figure: Tai: Ming cathode cathode h ~ ~ do not not & the method of uniformity of the pen source, mainly based on the electrophoresis of carbon nanotubes The carbon nanotubes are used in electrophoresis water; the uniformity of the arc discharge in the cathode structure is improved, the dispersion property is opened, and the electrophoresis, 4 1 J r is solved to form a good electrophoretic deposition effect. A first electrode layer 2 is formed on the surface of the glass substrate i, and a surface is formed with a closed layer 4 = two electric f:, and then a dielectric layer 3 is applied through the four-layer technology on the surface of the gate layer 4, page 10, 1280991 5. Description of the Invention (6) A recessed region 4 is formed for the dielectric layer 3 to be exposed, and a protective layer 5 is formed on the surface of the gate layer. The dielectric layer 3 is formed by etching to expose the cathode electrode layer 2 The recessed area is 3丄, and after the stripping operation is performed, another protective layer 6 is coated and coated on the electric layer 5 and the gate layer 4 to complete the cathode structure semi-finished structure. s Please read "2nd to 4th", which is the cathode structure of the present invention for the production of an electron beam source and the connection and connection of the cathode structure and the metal panel | = : Schematic diagram of the technology of the electrophoresis. As shown in the figure: after the cathode junction of the above is completed, the carbon nanotube electron emission source deposition of the cathode structure is first performed, and the electrophoresis solution is adjusted, using pure water as a solvent, and the electrophoretic sub-emissive source material is one. Arc discharge: r = long; 5 (four), the average carbon tube == v,, the species of the sturdy earth is not the reverse structure of the earth, its weight (but 0.02% is the best), and then 曲 and π ·17° υ·0 0 5% C ^ , ΧΟ 01%Λ - ^ Then add a concentration of about 0.1%~0.0 0 53⁄4

(〇· 1為取么）之辅助鹽（Charger)類，此輔助 harger)類係選用於電洗户可γ A、曰=^貝此稍助鹽（C 者，如氧仆· Λ 形成具導電性之金屬氧化鹽 >前述之調製完成之溶液倒入於電泳槽7中任υ將 待上述之電泳溶液調製完成後，進 係將場發射陰極結構丄〇 ^包冰，儿積技術 i與電泳電極8之陰i =陰極導… 2與金屬面板9連妹mm冰電極8之陽極8 屬面板或者網版之任一=之至屬面板9可為白金或鈦金 第11頁 1280991 ------- 五、發明說明（7) A 1待，上述陰極結構1 〇與金屬面；9 4 b i # 欲被電泳沉積之陰極結構 連一成後，將 -固定距離配置，在置放電；至屬：板9平订保持 陰陽極-直流脈衝電壓以；巧源供應器提供 沉積製作於陰極電極以形】===:炭管電泳 示）； 又电于兔射源2 1 (如第五圖所 待上述沉積後之陰極社 fc培烤，以移除於陰極結構3上：以以低溫80。。簡單 ^氯化銦，盥水解之新I她之夕餘水洛液，此時辅助 行400它燒結制程以摔基碓子型成氫氧化銦，之後再進 之氫氧化銦將再氧化Ύ早化5層6，亚且陰極電極層2上 因此在製作_枉雷朽思^ 由於氧化銦具導電特性， 碳4;:口=::電子發射源21上除了奈米 辅助鹽之鎂鹽類僅提供電泳動之功；所使用 陰極電極層之電子傳導關係。之力此亚增盈奈米碳管與 發射源層，太$:ί::f採用電泳沉積之奈米碳管電子 ，所提供之“：=Ϊ平貼覆於陰極電極表面，由於 板表面之沉積效應， 二二克服電冰於面 改善電極表面之斧紐一:不厌官沉積均勻性，另，可 之附著，影塑均應，氣泡產生而影響奈米碳管 .結後2;;::層；平均厚度可控制在^以下，而ί 不“官與氧化銦之鹽類共沉積並形 ： 1280991 五、發明說明（8) 著效果，不易脫落 用之^ ^ ~步，在於奈米碳管電泳溶液分I 4 鼠化鎂辅助鹽之電泳溶液，比八丑欢果佳，以習 位面積250 "®2内，仍可發現15%以上大、文特性於平均單 凝團，而改w 士政πΡΪ七发A上上 、 "m之奈米石炭營 、 本赉明之虱化銦辅助鹽之奈米碳管雷、、 J可改善1 〇 //in之奈米碳管凝團控制在5%以下。彳7心'彳( 上述僅為本發明之較佳實施例而已，並非用來限定 發明實施範圍。即凡依本發明申請專利範圍所做的^ $織 ^匕與修飾’皆為本發明專利範圍所涵蓋。· 丈(〇·1 is taken), the auxiliary salt (Charger) class, this auxiliary gearer class is selected for electric washing households, γ A, 曰 = ^ 贝, this slightly help salt (C, such as oxygen servant Λ formation Conductive metal oxide salt> The previously prepared solution is poured into the electrophoresis tank 7. After the electrophoresis solution is prepared, the field emission cathode structure is immersed in ice, and the product is i. The cathode i with the electrophoretic electrode 8 = cathode lead... 2 with the metal panel 9 connected to the anode of the mm ice electrode 8 8 of the panel or screen version = the panel 9 can be white gold or titanium gold page 11 1280991 - ------ V. Invention description (7) A 1 wait, the above cathode structure 1 〇 and metal surface; 9 4 bi # After the cathode structure to be electrophoretically deposited, the fixed-distance configuration Discharge; to the genus: plate 9 flat to maintain the anode and cathode - DC pulse voltage; Qiao source supply provides deposition in the cathode electrode to form] ===: carbon tube electrophoresis); and electricity in rabbit source 2 1 ( As shown in the fifth figure, the cathode of the cathode after the deposition is baked to be removed on the cathode structure 3 to a low temperature of 80. Simple indium chloride, Hydrolysis of the new I her eve yue Lok Lok, at this time the auxiliary line 400 its sintering process to break the scorpion type into indium hydroxide, and then into the indium hydroxide will re-oxidize Ύ early 5 layers 6 On the cathode electrode layer 2, therefore, in the production of 枉 枉 朽 ^ 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于The electron conduction relationship of the cathode electrode layer used. The force of this sub-enrichment nanocarbon tube and the emission source layer, too $:ί::f using electrophoretic deposition of carbon nanotube electrons, provided by: ": = Ϊ flat Adhered to the surface of the cathode electrode, due to the deposition effect of the surface of the plate, the two-two overcome the electric ice on the surface to improve the surface of the electrode: the uniformity of deposition, and the adhesion, shadow and plastic, should be affected by bubbles. Nano carbon tube. After the junction 2;;:: layer; the average thickness can be controlled below ^, and ί not "the official and the indium oxide salt co-deposit and shape: 1280991 five, invention description (8) effect, not easy The ^ ^ ~ step for shedding is based on the electrophoresis solution of the nano-tube electrophoresis solution divided into I 4 magnesium-assisted salt. Ugly Huanjia, with the area of 250 "®2, can still find more than 15% of the large, textual characteristics of the average monocondensate group, and change the w 士政 ΡΪ ΡΪ 发 发 发 、 、 & & & & & & The carbon nanotubes of the charcoal camp, Benxi Ming's indium bismuth auxiliary salt, and J can improve the carbon nanotube condensation of 1 〇//in to less than 5%. 彳7心'彳 (The above is only The preferred embodiments of the invention are not intended to limit the scope of the invention, that is, the scope of the invention is covered by the scope of the invention.

第13頁 1280991Page 13 1280991

【圖式簡單說明】 弟 圖（a )〜（g ) ’係本發明之岭κ处上社 意圖。 陰極…構半成品製作流程示 ，圖，係本發明之陰極結構製作電子發 射源流程示意[Simple description of the schema] The brothers (a) to (g) are the intentions of the ridge at the κ of the present invention. Cathode ... fabrication process of semi-finished products, diagram, diagram showing the flow of electron emission source for cathode structure of the present invention

第 二 圖 5 係 本發 第 四 圖 9 係 本發 沉 積 技 術 示 意圖 第 五 圖 ， 係 本發 圖 0 [ 主 要 元 件 符號 陰 極 結 構 • 玻 璃 基 板 • 陰 極 電 極 層 電 子 發 射 源 介 電 層 參 閘 極 層 • 凹 陷 1¾ • 保 護 層 修 電 泳 槽 • 陰 極 導 線 電 泳 電 極 陰 極 • • 明之陰極結構與 明之陰極結構與 〇 明以電弧放電方 說明】 極· · 金屬面板連接示意圖。 金屬面板連接後進行電、、永 法製作奈米碳營 元成示意The second figure is the fifth picture of the present invention, which is the fifth picture of the present invention. The main picture symbol cathode structure • glass substrate • cathode electrode layer electron emission source dielectric layer ginseng layer • Depression 13⁄4 • Protective layer for electrophoresis tank • Cathode wire electrophoresis electrode cathode • • Cathode structure and bright cathode structure and explanation for arc discharge] Pole · · Metal panel connection diagram. After the metal panels are connected, electricity, and permanent production of nano carbon camp Yuan Cheng

第14頁 1280991Page 14 1280991

第15頁Page 15

Claims (1)

12809911280991 六、申請專利範圍 1 、一種改善以電泳沉穑意】午 勻性的方法，該方法包括有，衣作示“管電子發射源均 a )、先取一陰極結構半成品； 將阶ϋ構：i ί陰極 '，構半成品進行電泳沉積技術，係 肝陰極結構及金屬面板與電泳電極相連接； 電泳：i之=極結構與金屬面板連結完成後，將欲被 配置，力署妨Φ、、 I、至屬面板平行保持一固定距離 -直产iC之溶液中’以電源供應器提供陰陽極 Ιΐ-Η以形成一電場’將奈米碳管電泳沉積製作 哈極電極以形成電子發射源； 單“)，以Ϊ i述沉積後之陰極結構，取出後先以低溫簡 = 上之多”溶液，此時輔助鹽 燒結制矛口 一除 虱氧土子型成氩氧化銦，之後再進行 以，米碳管與陰極電極層之電4=為…’ 作奈】碳項所述之改善以電泳沉積製 半成品製；均勻性的方法，其中’該陰極結構 1極電璃f板表面上形成有-陰極電極層，於陰 -閘極；】ΐ形成有一介電層，再於介電層表面形成有 層外露^再透過微影技術於閘極層表面形成有一供介電 ° 凹陷區； 術將ί於間極層表面形成有—保護|，透過钱刻技 电層表面形成有一供陰極電極外露之凹陷區，再將Sixth, the scope of application for patents 1, a method for improving the uniformity of electrophoresis, including the method of "coating electron emission source a), taking a cathode structure semi-finished product; ί Cathode ', semi-finished product for electrophoretic deposition technology, the liver cathode structure and metal panel and electrophoresis electrode are connected; Electrophoresis: i = pole structure and metal panel connection is completed, will be configured, force 妨,, I Dependent on the panel to maintain a fixed distance in parallel - in the solution of the direct production iC 'provide the anode and cathode Ιΐ-Η with the power supply to form an electric field'. The nanotube is electrophoretically deposited to form a harp electrode to form an electron emission source; "), the cathode structure after deposition is described, and after taking out, the solution is low in temperature and low in number. At this time, the auxiliary salt is sintered to make a spear, and the argon-oxygen is formed into argon-doped indium oxide, and then , the carbon carbon tube and the cathode electrode layer of electricity 4 = is ... 'Now】 the improvement of the carbon term by electrophoretic deposition of semi-finished products; uniformity method, wherein the cathode structure 1 pole glass fr Have- a pole electrode layer, a cathode-gate; a germanium is formed with a dielectric layer, and a layer is exposed on the surface of the dielectric layer, and a dielectric layer is formed on the surface of the gate layer by a lithography technique; ί forms a protective layer on the surface of the interpolar layer, and a recessed area for the cathode electrode to be exposed is formed on the surface of the electrotechnical layer, and then 第16頁Page 16 1280991 六、申請專利範圍 保護層進行剝離作業； C )、再將另一保護層塗布包覆於介電層及閘極層上 即兀成陰極結構半成品製作。 3、 如申請專利範圍第1項所述之改善以電泳沉積製 作奈米碳管電子發射源均勻性的方法，其中，該陰極結構 之陰極電極層藉陰極導線與電泳電極之陰極相連接，電泳 電極之陽極與金屬面板連^。 4、 如申請專利範圍第1項所述之改善以電泳沉積製 作奈米碳管電子發射源均勻性的方法，其中，該金屬面板 1可為白金或鈦金屬面板或者網版之任〆種。 5、 如申請專利範圊篦1珀所述之改善以電泳沉積製 作奈米碳管電子發射法，其中，該電場強度 約0·5〜10V/cm，脈衝頻率為3〇〇HZ。 6、 如申請專利範圍第5項所述之改善以迅/永沉積製 作奈米碳管電子發射源均勻性的方法，其中’該電場強度 為以2V/cm為最佳。 7、 如申請專利範圍第丄項所述之改善以電泳沉積製 作奈米碳管電子發射源均勻性的方法，其中，該電弧放電 ►製作之奈米碳管，其平均碳管長度5 βπι以下，平均碳管管 徑在lOOmn以下，之—種多重壁之奈米碳管、结構。 8、 如申請專利範圍第丄"*項所述之改善以電泳沉積製 作奈米碳管電子發射源均勻性的方法，其中，該電泳槽中 所添加之溶液包括有：純水、奈米碳管粉體、輔助鹽（Cha rger)類 °1280991 VI. Patent application scope The protective layer is subjected to the stripping operation; C), and another protective layer is coated on the dielectric layer and the gate layer, that is, the cathode structure is fabricated into a semi-finished product. 3. The method for improving the uniformity of a carbon nanotube electron emission source by electrophoretic deposition according to the first aspect of the patent application, wherein the cathode electrode layer of the cathode structure is connected to the cathode of the electrophoresis electrode by a cathode lead, and electrophoresis The anode of the electrode is connected to the metal panel. 4. The method of improving the uniformity of a carbon nanotube electron emission source by electrophoretic deposition as described in claim 1, wherein the metal panel 1 can be a platinum or titanium metal panel or a screen type. 5. The improvement as described in the patent application 圊篦 圊篦 1 pe is produced by electrophoretic deposition of a carbon nanotube electron emission method, wherein the electric field intensity is about 0.5 to 10 V/cm, and the pulse frequency is 3 〇〇HZ. 6. The method of improving the homogeneity of a carbon nanotube electron emission source by rapid/permanent deposition as described in claim 5, wherein the electric field strength is preferably 2 V/cm. 7. The method of improving the uniformity of a carbon nanotube electron emission source by electrophoretic deposition as described in the scope of the patent application, wherein the arc discharge is made of a carbon nanotube having an average carbon tube length of 5 βπι or less. The average carbon tube diameter is below 100 nm, which is a multi-walled carbon nanotube and structure. 8. The method of improving the uniformity of a carbon nanotube electron emission source by electrophoretic deposition according to the application of the patent scope "*, wherein the solution added in the electrophoresis tank comprises: pure water, nanometer Carbon tube powder, auxiliary salt (Cha rger) class ° 第17頁 1280991 六、申請專利範圍 9 、如申請專利範圍第8項所述 作奈米碳管電子發射源均勻性的方法 粉體添加重量濃度約0. 1 %〜0. 0 0 5%。 1 0、如申請專利範圍第9項所 製作奈米碳管電子發射源均勻性的方 奈米碳管粉體濃度以0. 02%為最佳。 1 1 、如申請專利範圍第8項所 製作奈米碳管電子發射源均勻性的方 類添加重量濃度約0. 1 %〜0. 0 0 5%。 B 1 2、如申請專利範圍第1 1項 積製作奈米碳管電子發射源均勻性的 之輔助鹽類以0. 0 1 %為最佳。 1 3、如申請專利範圍第1 1項 積製作奈米碳管電子發射源均勻性的 鹽類係選用於電泳后可形成具導電性 氯化銦，和破酸銦，或其他如錫之任 1 4、如申請專利範圍第1項所 製作奈米碳管電子發射源均勻性的方 I以8 0 °C進行簡單焙烤。 1 5、如申請專利範圍第1項所 製作奈米碳管電子發射源均勻性的方 以4 0 0 °C進行燒結製程。 1 6、如申請專利範圍第1項所 製作奈米碳管電子發射源均勻性的方 之改善以電泳 ，其中，該奈 述之改善以電 法，其中，該 述之改善以電 法，其中，該 所述之改善以 方法，其中， 所述之改善以 方法，其中， 之金屬氧化鹽 一種鹽類。 述之改善以電 法，其中，該 述之改善以電 法，其中，該 述之改善以電 法，其中5該 沉積製 米碳管 泳沉積 添加之 泳沉積 輔助鹽 電泳沉 該添加 電泳沉 該輔助 者，如 泳沉積 低溫是 泳沉積 燒結是 泳沉積 氧化銦。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 02% is the best. The concentration of the carbon nanotubes of the carbon nanotubes is as follows. 1 〜 0. 0 0 5%。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 B 1 2. The auxiliary salt for the uniformity of the electron emission source of the carbon nanotubes is preferably 0.01% as the best in the patent application. 1 3, as in the scope of the patent application, the salt of the electron emission source uniformity of the carbon nanotubes is selected to be used for electrophoresis to form conductive indium chloride, and indium hydride, or other such as tin. 1 4. The square I of the uniformity of the electron emission source of the carbon nanotube produced in the first paragraph of the patent application is simply baked at 80 °C. 1 5. If the uniformity of the electron emission source of the carbon nanotubes produced in the first paragraph of the patent application is made, the sintering process is carried out at 400 °C. 1 6. The improvement of the homogeneity of the electron emission source of the carbon nanotube produced by the first application of the patent scope is electrophoresis, wherein the improvement of the expression is by an electric method, wherein the improvement is by an electric method, wherein The method of improving the method, wherein the method of improving the method, wherein the metal oxide salt is a salt. The improvement is by an electrical method, wherein the improvement is by an electrical method, wherein the improvement is by an electrical method, wherein 5 the deposition of the carbon nanotubes is deposited by adding a bath deposition auxiliary salt to the electrophoresis Auxiliary, such as swimming deposition, low temperature, swimming deposition, sintering, swimming deposition of indium oxide 第18頁 1280991 六、申請專利範圍 ：因此沉積於陰極電極層時，電子…二 = 電性氧化銦粒子，】= 嘈之冤子傳導關係。 吕 1 7、如申請專利範 製作奈米碳管電子發射源均匕=之：善峨 沉積之奈米碳管電子發 =^法，其中，採用電泳 陰極電極表面，由於；提供二電；d:平貼覆於 ，可以克服電泳於面板表面種直流脈衝電壓 沉積均勻性，另，可改盖Φ ^儿積效應，以改善奈米碳管 丨產生而影響奈米碳管之；；極解溶液效應之氣泡 r技術易於形成一均句：奈沉；：；声藉電泳 在2 # m以下，而燒結後之夺 淬日千均厗度可控制 並形成-良好的附著效果，不I:落 之鹽類共沉積 平輔…= 邝％以上大於1〇心之奈米石户==積250㈣2内，仍可發現 之奈米碳管電泳溶液則可二:’而改以氯化銦辅助鹽 5 %以下。 夜貝】了改善1 0 ^之奈米碳管凝團控制在Page 18 1280991 VI. Scope of application: Therefore, when deposited on the cathode electrode layer, the electrons ... 2 = electrical indium oxide particles,] = the conduction relationship of the scorpion. Lv 1 7. If the patent application is made, the electron emission source of the carbon nanotubes is uniform: the carbon nanotubes of the good-selling deposits are electronically generated, wherein the surface of the electrophoretic cathode electrode is used, because two electrodes are provided; : Flat coating can overcome the uniformity of DC pulse voltage deposition on the surface of the panel by electrophoresis. In addition, it can change the Φ ^ product effect to improve the production of carbon nanotubes and affect the carbon nanotubes; The solution effect bubble r technology is easy to form a uniform sentence: Nai Shen;:; Acoustic electrophoresis is below 2 # m, and the quenching and quenching day after sintering can be controlled and formed - good adhesion effect, not I: Falling salt co-deposition flat auxiliary...= 邝% is greater than 1 〇 之 奈 奈 奈 ================================================================================== Salt below 5%. Night Shell] improved the carbon nanotube condensation control of 1 0 ^