TWI270670B

TWI270670B - Lighting apparatus for inspecting substrate

Info

Publication number: TWI270670B
Application number: TW92124874A
Authority: TW
Inventors: Gung-Bok Nam; Chang-Hyun Park; Kee-Sun Bae; Jae-Sin Sim; Hyun-Soo Kim
Original assignee: De & T Co Ltd
Priority date: 2003-05-12
Filing date: 2003-09-09
Publication date: 2007-01-11
Also published as: CN1292246C; TW200424510A; CN1548947A

Abstract

Lighting apparatus for inspecting a substrate for providing optimal optical conditions for inspecting a surface of a large sized substrate, including a plurality of mirrors for respectively reflecting lights from a plurality of light sources moving on a curved surface in at least one direction of left/right and up/down directions, and Fresnel lenses for focusing divergent lights reflected at the mirrors onto one focal point, and illuminating the substrate on a stage, thereby simplifying a moving structure of the lighting apparatus and permitting a worker to carry out the inspection at one focal point without having movement of the focal point by illuminating a large area of a large sized substrate with a plurality of lights.

Description

1270670 案號 92124874 曰修正五、發明說明（1) 【發明所屬之本發明是度基板上以藉【先前技術】藉由肉眼片、L C D基板上的灰塵或汗一光檢測裝置反射的光線以傳統的光鏡(Fresnel 導至基板以均請參閱曰報，其揭露了此方法係利用表面所反射回技術領域種光檢測裝置，用以導入光線至大尺由肉眼檢測基板的瑕疵。有關一檢視的 • PDP 基點），發出光檢測基檢測裝 lens) 勻照亮本特許一個檢投射光來的光請參考第一圖所測裝置局部示意圖，微鏡，由一接物鏡、如第一圖所示，一反射鏡1 2以反射光 1 3以將自反射鏡1 2所線，一下菲涅爾透鏡光線至平台2 0上的基視覺檢測法一般是用於檢測半導體晶板或EL基板上的瑕疵（如殘留在基板而為了要便利肉眼檢測，通常係利用線以均勻照亮整個基板，並利用基板板上疋否有汗點或瑕疲。置係透過一光源發出光線至菲涅爾透 ’藉由菲涅爾透鏡聚焦後，再將光線基板。公開字號第2 0 0 0 - 1 3 1 2 2 6號之專利公測PDP背面螢光劑塗佈狀態的方法，線至欲檢測物體的表面，再藉由量測線之強度變化以對其表面進行檢測。示係為一傳統用於檢測基板的光檢此光撿測裝置的主要原理係類似一顯一鏡道及一接目鏡所構成。此用於檢測基板的光檢測裝置包括有源1 1所發出的光線，一上菲涅爾透鏡反射出的發散光線會聚為平行的光 1 4以會聚穿過上菲涅爾透鏡i 3的平行板1 0，以及一設於下菲涅爾透鏡1 4的1270670 Case No. 92124874 曰 Amendment 5, Invention Description (1) The invention according to the invention is a conventional substrate which is conventionally reflected by a naked eye piece, a dust on a LCD substrate or a sweat-light detecting device. The light mirror (Fresnel is guided to the substrate, please refer to the report, which discloses that the method uses the surface to reflect back to the technical field of light detecting device for introducing light to the large scale to detect the flaw of the substrate by the naked eye. • PDP base point), emits a light detection base detection device.) illuminate the light. For the light of the inspection projection light, please refer to the partial diagram of the device measured in the first figure. The micromirror is connected by an objective lens, as shown in the first figure. It is shown that a mirror 1 2 is used to detect the semiconductor crystal plate or the EL substrate by reflecting the light 1 3 to line the self-reflecting mirror 12 and the Fresnel lens light onto the platform 20 . The ruthenium (such as residual on the substrate and in order to facilitate visual inspection, usually uses a line to evenly illuminate the entire substrate, and use the substrate board to see if there is sweat or fatigue. Light is emitted through a light source to Fresnel through the focus of the Fresnel lens, and then the light substrate. Patented No. 2 0 0 0 - 1 3 1 2 2 6 patented PDP backside phosphor coating The method of the state, the line to the surface of the object to be inspected, and the surface of the measuring line is detected by the intensity change of the measuring line. The display system is a conventional optical inspection for detecting the substrate. The main principle of the optical measuring device is similar. The light detecting device for detecting the substrate comprises light emitted by the active 11 , and the divergent light reflected by the upper Fresnel lens is concentrated into parallel light 14 Converging through the parallel plates 10 of the upper Fresnel lens i 3 and one of the lower Fresnel lenses 14

12706701270670

案號 92124874 五、發明說明（2) 液晶面板1 5，此液晶面板1 5可藉由電六似— 不透明狀態以產生直行光或散射光。力仏應轉換為透明或此上菲淫爾透鏡13的功用係如顯微鏡的 =爾透鏡14的功用則如顯微鏡的接物鏡，此外、兄上:: 爾透鏡1 3及下菲涅爾透鏡1 4間的空間則非& 道。 Ί則可視作顯微鏡的鏡此傳統的基板光檢測裝置，係自弁線，並透過反射鏡1 2反射至上菲涅爾透鏡丨3 : ^政的光 ;圼爾透鏡13將光線會聚為平行的光線，然後再藉=亡：爾透鏡1 4將光線再會聚到平台2 0上的基板i 〇。 9 非& 從而，透過將基板10自焦點綢勻照亮 1 0上的瑕疵。」找出基板 οί =下菲淫爾透鏡14底部的液晶面板15,係可藉由電力的ί、應控制轉換為透明或不透明狀態，例如當控制+ η=關16關閉以士刀斷電'也17供應'電力s夺，液“ 、^線7散射而不會照亮基板1〇,反之當開關16開啟以又付包/所供應的電力時，液晶面板即會傳送光線以照亮基板10，而此種配置模式即在於確保只有當使用者在檢測基板1 0時，光線才會照亮基板1 〇。一然而，隨著平面顯示器（如LCD、pDp)的螢幕尺寸愈來愈大以及晝素尺寸愈來愈小，要製作一個毫無瑕疵的產品也愈來愈難，此外要同時用光線照亮整個基板也愈加困難。舉例來說’吾人可在不移動光檢測裝置的情況下，利Case No. 92124874 V. Description of the Invention (2) Liquid crystal panel 15 can be made to generate straight or scattered light by means of electricity-like opaque state. The force should be converted into a transparent or the function of the upper lens 13 such as a microscope. The function of the lens 14 is as a microscope objective, in addition, the brother:: the lens 13 and the lower Fresnel lens 1 The space between the 4 rooms is not & The conventional substrate light detecting device can be regarded as a mirror of the microscope, which is self-twisted and reflected by the mirror 12 to the upper Fresnel lens 圼3: ^ 政光; the 透镜 lens 13 converges the light into parallel And then borrow = die: er lens 14 to converge the light again onto the substrate i on the platform 20 〇. 9 Non & Thus, by illuminating the substrate 10 from the focus, the 瑕疵 on the 10 瑕疵 is illuminated. Locating the substrate οί = the liquid crystal panel 15 at the bottom of the Philippine lens 14 can be converted into a transparent or opaque state by the control of the power, for example, when the control + η = off 16 turns off the knife to power off ' Also, 17 supplies 'power s, liquid', and liquid 7 scatter without illuminating the substrate 1 〇, whereas when the switch 16 is turned on to pay the supplied/supplied power, the liquid crystal panel transmits light to illuminate the substrate. 10, and this configuration mode is to ensure that the light will illuminate the substrate 1 only when the user is detecting the substrate 10. However, as the screen size of the flat display (such as LCD, pDp) is getting larger and larger As the size of the enamel is getting smaller and smaller, it is more and more difficult to make a flawless product. In addition, it is more difficult to illuminate the entire substrate with light at the same time. For example, 'we can move the light detection device without moving. Next, profit

第8頁 t號 92124874 五、發明說明（3)Page 8 t number 92124874 V. Description of invention (3)

jpQ —光檢測裝置照亮一長寬3 7 0mnix 4 7 Omm的LCD基板（如第 2B圖所示），但是若基板的長寬變為n〇〇mmx 125〇mm B寸’則用傳統的方法即很難進行量測。通常一光檢測裝置可檢測的基板寬度係介於4 0 0mm至 5 〇之間，所以在進行大尺度基板的表面檢測時，可藉由移動一光檢測裝置作上下左右方向的位移（如第3A、3B 圖所不），或是藉由移動兩個光檢測裝置作上下方向的位移（如第4A、4B圖所示）來進行檢測。、在利用一個光檢測裝置以檢測基板時，為了要提高檢 1的精確度，通常每移動光檢測裝置作上下左右方向位移時’即調整光線的入射角、反射角、波長、強度、散射情況及極化方向以最佳化受測物體的光學情況。然而，傳統的基板光檢測裝置卻存有下列的缺失： ^ 、（一）、首先，如第3A、3B圖所示藉由上下左右位移光檢測裝置以檢測大尺寸基板的方法，由於光檢測裝置一次只能照亮基板的部分區域，往往拉長了大尺寸基板的檢 =時間，並由於基板係切割為多個區域依序進行檢測，不jpQ—The light detecting device illuminates an LCD substrate with a length of 3 7 0mnix 4 7 Omm (as shown in Figure 2B), but if the length and width of the substrate become n〇〇mmx 125〇mm B inch, then the traditional The method is difficult to measure. Generally, the width of the substrate detectable by a light detecting device is between 400 mm and 5 ,. Therefore, when performing surface detection of a large-scale substrate, the displacement of the upper and lower directions can be performed by moving a photodetecting device (eg, 3A, 3B, or not, or by moving two photodetecting devices for displacement in the up and down direction (as shown in Figs. 4A and 4B). When using a light detecting device to detect the substrate, in order to improve the accuracy of the detection 1, generally every time the moving light detecting device is displaced in the up, down, left, and right directions, the incident angle, the reflection angle, the wavelength, the intensity, and the scattering of the light are adjusted. And the direction of polarization to optimize the optical condition of the object under test. However, the conventional substrate photodetecting device has the following defects: ^, (a), first, as shown in Figs. 3A and 3B, the method of detecting a large-sized substrate by the upper and lower left and right displacement photodetecting devices, due to photodetection The device can only illuminate a part of the substrate at a time, and often lengthens the inspection time of the large-sized substrate, and the substrate is cut into multiple regions in sequence, and is not detected.

降低了檢測的精準度。而且，在操作此種方法（如第3A ，所示，）時，使用者需隨著焦點從‘ s，變換到‘ s，，而跟著作移動。、目t (二）、在第4A、4B圖中所示的利用一個以上的光檢置以檢測大面積基板的方法雖可有效解決在第3Α、3β :所存在的時間及空間上的問冑’但是在兩個光檢測裝 "P存在有個光線未此照射到的黑暗區土或，使得此黑Reduce the accuracy of detection. Moreover, in operating such a method (as shown in Figure 3A), the user has to move as the focus changes from 's to s'. (b), the method of detecting a large-area substrate by using one or more photodetectors shown in FIGS. 4A and 4B can effectively solve the time and space in the third Α, 3β:胄 'But in the two light detection devices, there is a dark area where the light is not irradiated, so that this black

第9頁 1270670 修正 f號 92124874 五、發明說明（4) 暗區域成為檢測上的盲點。 (三）、此種利用一個以上的光檢測裝置以檢測大面積尺寸基板的方法，在二光檢測裝置作左右平向位移（如第3A、3B圖所示）或作上下垂直位移（如第4Α、4β圖所示）時，使用者的焦點往往須依據基板的位置從‘ s，位到 ‘ s，，〇【發明内容】有鑑於上述習知技術所產生之問題，本發明之主要目的在於提供一種基板的光檢測裝置，藉以解決前述傳統技術所造成的缺失與限制。本舍明之第一目的在於提供一種基板之光檢測裝置，此光檢測裝置可提供最佳的光學效益以檢測大尺寸的基板0 本赉明之第二目的在於提供一種基板之光檢測裝置，使使用者在不需位移焦點的情況下，即可檢測基板上的污點及瑕疵。本發明之第四目的在於提供一種基板之光檢測裝置，可在不降低生產量的情況下增加基板的照亮面積，從而生產出可靠的高品質基板。 ' 為達上述之目的，本發明之基板光檢測裝置係包括有複數個反射鏡以反射自複數個光源所發出的光線，以及一透鏡以將自反射鏡所反射出的光線聚焦至一隹 '古一平台上的基板。，、、、·，、、亚a冗一此外，聚焦並照亮基板的光線係於各相鄰光線之間部Page 9 1270670 Amendment f No. 92124874 V. Description of invention (4) Dark areas become blind spots on detection. (3) such a method of detecting a large-area size substrate by using one or more photodetecting devices, performing horizontal displacement in the left and right directions (as shown in Figs. 3A and 3B) or vertical displacement in the second light detecting device (such as In the case of 4Α, 4β, the user's focus often depends on the position of the substrate from 's, bit to 's, 〇 [Abstract] In view of the problems caused by the above-mentioned prior art, the main purpose of the present invention It is to provide a light detecting device for a substrate, thereby solving the defects and limitations caused by the aforementioned conventional techniques. The first object of the present invention is to provide a substrate light detecting device which can provide optimal optical efficiency for detecting a large-sized substrate. The second object of the present invention is to provide a substrate light detecting device for use. The stain and flaw on the substrate can be detected without shifting the focus. A fourth object of the present invention is to provide a light detecting device for a substrate which can increase the illumination area of the substrate without reducing the throughput, thereby producing a reliable high quality substrate. For the above purposes, the substrate photodetecting device of the present invention includes a plurality of mirrors for reflecting light emitted from a plurality of light sources, and a lens for focusing the light reflected from the mirrors to a frame. The substrate on the ancient platform. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,

1270670 _案號92124874_年月曰修正_ 五、發明說明（5) 分重疊。另外，光檢測裝置係透過位移至少一反射鏡及透鏡以調整自光源所發出光線的入射角或反射角，從而將光線聚焦在一焦點。1270670 _ Case No. 92124874_Yearly 曰 Amendment _ V. Invention Description (5) Sub-overlap. In addition, the light detecting means adjusts the incident angle or the reflected angle of the light emitted from the light source by shifting at least one of the mirror and the lens to focus the light at a focus.

本發明基板光檢測裝置的第二實施例係包括有一反射鏡以反射自一光源所發出的光線，且此光源係在一曲面上作上下左右至少一方向的位移，以及一透鏡以將自反射鏡所反射出的光線聚焦至一焦點並照亮一平台上的基板。此外，此光檢測裝置至少包括有一光源、一反射鏡及一透鏡。本發明基板光檢測裝置的第三實施例係包括有複數個反射鏡以反射自複數個光源所發出的光線，且光源係在一曲面上作上下左右至少一方向的位移，以及一透鏡以將自反射鏡所反射的光線進行相鄰光線的部分重疊，並將光線聚焦至一焦點以照亮一平台上的基板。A second embodiment of the substrate light detecting device of the present invention includes a mirror for reflecting light emitted from a light source, and the light source is displaced on at least one direction of up, down, left and right, and a lens to self-reflect The light reflected by the mirror is focused to a focus and illuminates the substrate on a platform. Furthermore, the light detecting device comprises at least a light source, a mirror and a lens. A third embodiment of the substrate light detecting device of the present invention includes a plurality of mirrors for reflecting light emitted from a plurality of light sources, and the light source is displaced on at least one direction of the upper and lower sides on a curved surface, and a lens to The light reflected from the mirror partially overlaps adjacent rays and focuses the light to a focus to illuminate the substrate on a platform.

而透鏡係包括有一上透鏡以將自反射鏡所反射出的光線會聚為平行光；一下透鏡以將穿過上透鏡的平行光聚焦至一焦點並照亮基板；以及一液晶面板以連接至下透鏡，藉由控制電力供應可轉換液晶面板為透明狀態或不透明狀態並從而產生直行光線或散射光線。本發明的光檢測裝置更包括有一電連接至液晶面板之電池，藉由此電池以供應電力至液晶面板，以及一開關，藉由開啟或關閉電池的電力供應以控制液晶面板。為使對本發明的目的、構造特徵及其功能有進一步的The lens system includes an upper lens to concentrate the light reflected from the mirror into parallel light; a lower lens to focus the parallel light passing through the upper lens to a focus and illuminate the substrate; and a liquid crystal panel to connect to the lower The lens, by controlling the power supply, converts the liquid crystal panel into a transparent state or an opaque state and thereby generates straight or scattered light. The photodetecting device of the present invention further includes a battery electrically connected to the liquid crystal panel, whereby the battery supplies power to the liquid crystal panel, and a switch controls the liquid crystal panel by turning on or off the power supply of the battery. In order to further improve the object, structural features and functions of the present invention

第11頁 1270670 案號 92124874 五、發明說明（6) 了解，茲配合圖示詳細說明如下：【實施方式】個光檢測裝置「第5 A、5 B圖」所示為本發明僅以進行基板檢測之第一實施例示意圖如「第5A圖」所示，此基板光檢測裝置係包括有一反射鏡1 2 0以反射自光源1 1 〇發出之反射光，此光^係可在一曲面上作上下左右方向的位移；以及一菲涅爾透'鏡2〇〇，以將自反射鏡1 20反射的發散光線聚焦在—焦點？上，並照亮平台上的基板3 0 0。 ' _ ...... #、如第5Β圖所示，自反射鏡120反射的發散光線係透過非〉圼爾透鏡2 0 0聚焦到基板3 0 0上，且照射到基板3 〇〇上的光線可藉由移動光檢測裝置而作上下左右方向的位移。光檢測裝置可藉由移動光源在曲面上作上下左^方向的位移而將光線聚焦在一焦點ρ，以利使用者在不兩動焦點的情況下在一固定焦點§檢測基板。而夕一立「第6Α、6Β圖」所示為本發明之基板光檢測裝置結構 :意^及本發明利用複數個光檢測裝置以進行基板檢測之弟-貫施例不意圖。、如「第6Α圖」所示，此基板光檢測裝置包括有複數個個=鏡1 2〇以反射自複數個光源11 0發出之反射光，此複數個^源110係可在-曲面上作上下左右方向的位移 =數個菲淫爾透鏡2 0 0,以將自反射〇反聚焦在：焦點吐一’並照亮平台上的基板3。。。政先線如弟圖所不，自反射鏡1 2 0反射的發散光線係透過Page 11 1270670 Case No. 92124874 V. Description of the Invention (6) The following is a detailed description of the following: [Embodiment] A photodetecting device "Fig. 5A, 5B" shows the present invention only for the substrate. A schematic diagram of the first embodiment of the detection is shown in FIG. 5A. The substrate photodetecting device includes a mirror 120 for reflecting reflected light from the light source 1 1 , and the light can be on a curved surface. Displacement in the up, down, left, and right directions; and a Fresnel through the mirror 2〇〇 to focus the divergent rays reflected from the mirror 120 at the focus. On, and illuminate the substrate 300 on the platform. ' _ ...... #, as shown in Figure 5, the divergent light reflected from the mirror 120 is focused onto the substrate 300 through the non- 圼透镜 lens 200 and illuminates the substrate 3 〇〇 The upper light can be displaced in the up, down, left, and right directions by moving the light detecting means. The light detecting device can focus the light on a focus ρ by moving the light source on the curved surface in the left and right directions, so that the user can detect the substrate at a fixed focus without moving the focus. The present invention is based on the structure of the substrate photodetecting device of the present invention. It is intended that the present invention utilizes a plurality of photodetecting devices for substrate detection. As shown in FIG. 6 , the substrate photodetecting device includes a plurality of mirrors 1 2 〇 to reflect the reflected light from the plurality of light sources 110 , and the plurality of sources 110 can be on the curved surface. Displacement in the up, down, left, and right directions = a number of Philippine lenses 200 to refocus the self-reflecting cymbals at the focus: and illuminate the substrate 3 on the platform. . . Political line, as the younger brother does not, the divergent light reflected from the mirror 120 is transmitted through

案號 92] 24只74 1270670Case No. 92] 24 only 74 1270670

五、發明說明（7) ^ ^~§-隻I 菲淫爾透鏡2 0 0聚焦到基板3〇〇上 m上的光線可藉由移動光檢„大面積，且^射到基板位移。夏向作上下左右方向的藉由此複數個光檢測裝置即可昭真一使得吾人僅需移動光檢測裝置 :a 基板， …、儿王個基板，且光檢測裝置在兄刀時可將光線聚焦在一焦點p。上作上下方向的位移當光檢測裝置在曲面上位移聚焦到基板300的光線係作上下左透過非還爾透鏡200 一隹卧P ^ ^ 卜左右方向的位移以聚舞到焦點P ’亚使使用者不需位移隹 A 、、、測基板。 .’、、、.，、、έ即可在一固定焦點S檢干立H f二：圖」所不為本發明之基板光檢測裝置結構及本發明利用複數個光檢測裝置以進行基：弟二貫施例示意圖，置中在筐、彳之口，、T在如乐6圖所不的多光檢測裴置 ::f相象光檢測裝置間的黑暗區域（如第6圖所示）係予縮小以均勻照亮大尺寸的基板。 W ^ ^ Μ圖」所*，此基板光檢測裝置包括有複數個反射鏡1 以分別反射自複數個光源丨丨〇所發出的光線；以及複數個菲涅爾透鏡2〇〇以將自反射鏡12〇反射的發散光線中，j鄰的光線作局部重疊，並將發散光線聚焦在焦點p 以照亮平台上的基板3 〇〇。如第Μ圖所示，在此實施例中照射到基板3 〇〇的相鄰發散^線係在第一菲涅爾透鏡2 〇〇及第二菲涅爾透鏡2 〇〇 (相W於第一菲涅爾透鏡）之間局部重疊，從而消除原本V. INSTRUCTIONS (7) ^ ^~§- Only I Philippine lens 20 0 0 Focusing on the substrate 3 The light on the m can be detected by moving the light „large area, and ^ shot to the substrate displacement. The plurality of light detecting devices can be moved in the up, down, left, and right directions, so that we only need to move the light detecting device: a substrate, ..., a king substrate, and the light detecting device can focus the light at the time of the brother knife a focus p. The displacement in the up and down direction is when the light detecting device shifts the light on the curved surface to the substrate 300, and the light is transmitted through the non-reserving lens 200, and the displacement in the left and right direction is concentrated to the focus. P 'Asian user does not need to displace 隹A,,, and the substrate. ., , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The structure of the light detecting device and the present invention utilize a plurality of light detecting devices to perform the base: a schematic diagram of the second embodiment of the second embodiment, which is placed in the basket, the mouth of the skull, and the multi-light detection device of the T in the picture 6: The dark area between the f-phase photodetecting devices (as shown in Figure 6) is reduced Uniformly illuminating a large-sized substrate. The substrate photodetecting device includes a plurality of mirrors 1 for respectively reflecting light emitted from a plurality of light sources ;; and a plurality of Fresnel lenses 2 将 for self-reflecting In the divergent rays reflected by the mirror 12, the neighboring rays are partially overlapped, and the divergent rays are focused on the focus p to illuminate the substrate 3 on the platform. As shown in the figure, the adjacent divergence lines that are irradiated to the substrate 3 in this embodiment are in the first Fresnel lens 2 〇〇 and the second Fresnel lens 2 〇〇 (phase W in the first Partial overlap between a Fresnel lens), thereby eliminating the original

第13頁 1270670 __案號 92124874 # ^ s | 正_ 五、發明說明（8) 存在於複數個菲涅爾透鏡2 〇〇間的黑暗區域。此複數個光檢測裝置為了要將各入射到複數個菲涅爾透鏡2 0 0的發散光線聚焦至一焦點係設置於一曲面上，且各個光檢測裝置係分別包括有一光源1丨0、一反射鏡1 2 〇以及一菲涅爾透鏡2 0 0。此外，至少移動反射鏡1 2 0或菲涅爾透鏡2 0 0的位置以改變自光源發出光線的入射角或反射角以局部重疊相鄰的發散光線。 ^ 如第8圖所示，此複數個菲涅爾透鏡2 0 0係包括有一上菲 >圼爾透鏡2 0 1以將發散光線會聚為平行光線；一下菲涅爾透鏡2 0 3以會聚自上菲涅爾透鏡2〇1所發出的平行光，並從而照+亮基板3 0 0; —連接至下菲淫爾透鏡2〇3的液晶面板 =0 5以/藉由電力的控制而改變其本身透明或不透明的狀 ς ^而產生直線的光線或散射的光線；一控制液晶面板扯^ +開關4 〇〇，以及一電池5 〇〇，係透過開關4 0 0的控制來供應電力至液晶面板2 0 5。本發明基板之光檢測裝置的操作方式將配合圖示說明 =考「第5Α、5Β圖所示」’在此實施例中僅應用一置自f源110所發出的光線係為發散，並藉由反射鏡120將光線反射至菲涅爾透鏡2〇〇。 2 〇 i /Λ鏡1 2 〇所反射出的發散光線係藉由上菲淫爾透鏡 z U i曰聚為平行光線，再藉由平台上的基板3 0 0。下非&爾透鏡203會聚並照亮因此，藉由移動光檢測裝置在曲面上作上下左右方向Page 13 1270670 __ Case No. 92124874 # ^ s | 正_ V. Description of invention (8) The dark area between a plurality of Fresnel lenses 2 〇〇. The plurality of photodetecting devices are disposed on a curved surface for focusing the divergent rays incident on the plurality of Fresnel lenses 200, and each of the photodetecting devices includes a light source 1丨0 and a The mirror 1 2 〇 and a Fresnel lens 200. In addition, at least the position of the mirror 120 or Fresnel lens 200 is moved to change the angle of incidence or angle of reflection from the source to partially overlap adjacent divergent rays. ^ As shown in Fig. 8, the plurality of Fresnel lenses 200 includes an upper Philippine lens 20 1 1 to converge the divergent rays into parallel rays; a Fresnel lens 2 0 3 to converge Parallel light emitted from the upper Fresnel lens 2〇1, and thus the light substrate 3 0 0; — the liquid crystal panel connected to the lower Philippine lens 2〇3 = 5 / by power control Change its transparent or opaque shape to produce a straight line of light or scattered light; a control panel + + switch 4 〇〇, and a battery 5 〇〇, through the control of the switch 400 to supply power To the LCD panel 2 0 5. The operation mode of the photodetecting device of the substrate of the present invention will be described in conjunction with the following description: "5th, 5th, and 5". In this embodiment, only the light emitted from the f source 110 is diverged and borrowed. Light is reflected by the mirror 120 to the Fresnel lens 2〇〇. 2 〇 i / Λ mirror 1 2 〇 The divergent light reflected by the 菲淫淫淫 z z z z z z z z z z z 平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行平行The lower non-amplifier lens 203 converges and illuminates. Therefore, the moving light detecting device is used to make up, down, left, and right directions on the curved surface.

第14頁 1270670Page 14 1270670

畫號 92124S74 五、發明說明（9) 的位移’即可透過光檢測裝 ^ 裝置在曲面上位移s寺，使用去：：整個基板，而當光檢測在一固定點S透過自隹點p# f β不移動焦點的情況下，此外，藉由開關…二鏡2 0 3的液晶顯示面板2 0 5電力應至位於下菲淫爾透透明或不透明狀態，並從而晶顯示面板205的時，才會有光線照射到基板有虽使用者在檢測基板也說當開關40 0切斷自電池5〇〇的電力供應時，液晶面板2 0 5即會將光線散射 μ 曰/ η _从ώ + L f 乂避免照射到基板3 0 0，而當開關4 0 0開啟自電池5 0 0的電力供座 ,.^ 。Λ c、，α77 一刀供應時，光線材可以穿過液晶面板2 0 5亚照允基板3 0 0。移動光檢測裝置在曲面上作上下左右方向位移時，即调整光線的入射角、反射备 ,in 月汉耵角、波長、強度、散射及極化方向以在隶佳化的光學情況下檢測基板。福I f者，請參考「第6A、6B、7A、7_所示」，係應用為了說明上的方便，係假定兩光 Λ、、兩反射鏡及兩菲涅爾透鏡係完全相同。 — 自> 第一光源11 0及第二光源1 2 0發射出發散的光線，並错=第一反射鏡1 3 0及第二反射鏡1 4 〇的反射，將光線反射至第一菲涅爾透鏡20 0及第二菲涅爾透鏡210。第一及第二反射鏡1 3 〇、1 4 0所反射的發散光線，係透過第一及第二菲涅爾透鏡200、210的上菲涅爾透鏡201會 +為平行光，並再透過下菲涅爾透鏡2 0 3會聚並照亮基板 1 0 〇〇Drawing No. 92124S74 V. Description of the invention (9) The displacement ' can be transmitted through the light detecting device on the curved surface of the temple, using:: the entire substrate, and when the light is detected at a fixed point S through the self-defect point p# In the case where f β does not move the focus, in addition, when the liquid crystal display panel of the second mirror 2 0 3 is turned on, the power is placed in a transparent or opaque state, and thus the panel 205 is crystallized. Only when the light is irradiated onto the substrate, although the user detects the substrate and also says that when the switch 40 0 cuts off the power supply from the battery 5, the liquid crystal panel 200 will scatter the light μ 曰 / η _ from ώ + L f 乂 avoids illumination to the substrate 300, and when the switch 400 turns on the power supply from the battery 500, . Λ c,, α77 When a knife is supplied, the light material can pass through the liquid crystal panel 2 0 5 sub-lighting substrate 300. When the moving light detecting device is displaced in the up, down, left, and right directions on the curved surface, the incident angle of the light, the reflection preparation, the inflection angle, the wavelength, the intensity, the scattering, and the polarization direction are adjusted to detect the substrate under the optimized optical condition. . For the sake of F, please refer to "6A, 6B, 7A, 7_". For the convenience of explanation, it is assumed that the two diaphragms, the two mirrors and the two Fresnel lens systems are identical. — from > the first light source 11 0 and the second light source 1 2 0 emit light that is scattered, and the error of the first mirror 1 130 and the second mirror 14 4 反射 reflects the light to the first phenanthrene Nyer lens 20 0 and second Fresnel lens 210. The divergent rays reflected by the first and second mirrors 1 3 〇, 1 40 are transmitted through the upper Fresnel lens 201 of the first and second Fresnel lenses 200, 210 to be parallel light, and then transmitted again. Lower Fresnel lens 2 0 3 converges and illuminates the substrate 1 0 〇〇

第15頁 1270670 案號92124874 年月曰修正五、發明說明（10) 在此實施例中，為防止相鄰菲涅爾透鏡2 0 0、2 1 0之間形成黑暗區域，穿過第一菲涅爾透鏡2 0 0及第二菲涅爾透鏡2 1 0 (相鄰於第一菲涅爾透鏡2 0 0)的發散光線係部份重疊後再照射至基板1 0 0。光檢測裝置藉由在曲面上作上下移動以照亮整個基板表面，並將光線聚焦在一焦點P，則使用者可藉由反射光在不移動焦點的情況下，以一固定焦點S來觀測基板。Page 15 1270670 Case No. 92124874 Issue 5, Invention Description (10) In this embodiment, in order to prevent the formation of dark areas between adjacent Fresnel lenses 2 0 0, 2 1 0, through the first Philippine The divergent rays of the Neel lens 200 and the second Fresnel lens 2 1 0 (adjacent to the first Fresnel lens 200) are partially overlapped and then irradiated to the substrate 100. The light detecting device illuminates the entire substrate surface by moving up and down on the curved surface, and focuses the light on a focus P. The user can observe the fixed focus S by the reflected light without moving the focus. Substrate.

此外，藉由開關3 0 0控制電力供應至位於下菲涅爾透鏡2 0 3的液晶顯示面板2 0 5，即可控制液晶顯示面板2 0 5的透明或不透明狀態，並從而控制只有當使用者在檢測基板時，才會有光線照射到基板。當開關3 0 0切斷自電池4 0 0的電力供應時，液晶面板 2 0 5即會將光線散射以避免照射到基板3 0 0，而當開關3 0 0 開啟自電池4 0 0的電力供應時，光線才可以穿過液晶面板 2 0 5並照亮基板1 0 0。移動光檢測裝置在曲面上作上下方向位移時，即調整光線的入射角、反射角、波長、強度、散射及極化方向以在最佳化的光學情況下檢測基板，即可將整個基板照亮以檢測汙點及瑕疵。In addition, by controlling the power supply to the liquid crystal display panel 205 located at the lower Fresnel lens 203 by the switch 300, the transparent or opaque state of the liquid crystal display panel 205 can be controlled, and thus the control can be controlled only when used. When the substrate is detected, light is irradiated onto the substrate. When the switch 300 is cut off from the power supply of the battery 400, the liquid crystal panel 200 will scatter light to avoid illuminating the substrate 300, and when the switch 300 turns on the power from the battery 400. When supplied, light can pass through the LCD panel 205 and illuminate the substrate 100. When the moving light detecting device is displaced in the up and down direction on the curved surface, that is, adjusting the incident angle, the reflection angle, the wavelength, the intensity, the scattering, and the polarization direction of the light to detect the substrate under the optimized optical condition, the entire substrate can be illuminated. Bright to detect stains and blemishes.

綜上所述，本發明的光檢測裝置實具有下述的優點： (一）、利用複數個光源以照亮大尺寸面積的基板可簡化光檢測裝置的位移系統，並讓使用者可在不移動焦點的情況下，以一固定焦點檢測基板表面。 (二）、應用複數個光檢測裝置以抑制照亮的基板上In summary, the photodetecting device of the present invention has the following advantages: (1) simplifying the displacement system of the photodetecting device by using a plurality of light sources to illuminate the substrate of a large size, and allowing the user to In the case of moving the focus, the surface of the substrate is detected with a fixed focus. (2) applying a plurality of photodetecting devices to suppress the illuminated substrate

第16頁 1270670 _案號92124874_年月曰修正_ 五、發明說明（11) 黑暗區域的存在，可增加大尺寸基板檢測的可靠度，並在不降低產能的情況下增加產品的品質及良率。雖然本發明以前述之較佳實施例揭露如上，然其並非用以限定本發明的實施範圍，任何熟習相像技藝者，在不脫離本發明之精神和申請專利範圍内所作的均等變化及修飾，皆為本發明專利範圍所涵蓋，因此本發明之專利保護範圍需視本說明書所附之申請專利範圍所界定者為準。Page 16 1270670 _ Case No. 92124874_ Year Month 曰 Amendment _ V. Invention Description (11) The presence of dark areas can increase the reliability of large-size substrate inspection and increase the quality and quality of products without reducing productivity. rate. While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the scope of the present invention, and the equivalents and modifications may be made without departing from the spirit and scope of the invention. The scope of the invention is covered by the scope of the invention, and the scope of patent protection of the invention is defined by the scope of the patent application attached to the specification.

第17頁 1270670 案號 92124874 年月曰修正圖式簡單說明第1圖，係為一傳統用於檢測基板的光檢測裝置局部示意圖；第2 A、2 B圖，係為一傳統的光檢測裝置在檢測基板之第一實施例結構示意圖；第3 A、3 B圖，係為一傳統的光檢測裝置在檢測基板之第二實施例結構示意圖；第4 A、4 B圖，係為一傳統的光檢測裝置在檢測基板之第三實施例結構示意圖；第5 A、5 B圖，係為本發明基板光檢測裝置的第一實施例示意圖；第6 A、6 B圖，係為本發明基板光檢測裝置的第二實施例示意圖；第7 A、7 B圖，係為本發明基板光檢測裝置的第三貫施例不意圖，以及第8圖，係為本發明基板光檢測裝置内菲涅爾透鏡的較佳實施例示意圖。【圖式符號說明】 1 0、3 0 0 基板 11、 110 光源 12、 12〇、130、140 反射鏡 13、 14、2〇〇、201、 2 0 3 、2 1〇菲涅爾透鏡 1 5 、2 0 5 液晶面板 1 6 、4 0 0 開關Page 17 1270670 Case No. 92124874 Year of the Moon Correction Diagram Brief Description Figure 1 is a partial schematic view of a conventional light detecting device for detecting a substrate; Figure 2A, 2B is a conventional light detecting device FIG. 3A and FIG. 3B are structural diagrams of a second embodiment of a conventional photodetecting device in detecting a substrate; FIGS. 4A and 4B are a conventional FIG. 5A and FIG. 5B are schematic diagrams showing a first embodiment of the substrate photodetecting device of the present invention; FIGS. 6A and 6B are diagrams of the present invention. A schematic diagram of a second embodiment of a substrate light detecting device; FIGS. 7A and 7B are a third embodiment of the substrate photodetecting device of the present invention, and FIG. 8 is a substrate photodetecting device of the present invention. A schematic representation of a preferred embodiment of a Fresnel lens. [Description of Symbols] 1 0, 3 0 0 Substrate 11, 110 Light source 12, 12〇, 130, 140 Mirror 13, 14, 2, 201, 2 0 3, 2 1 〇 Fresnel lens 1 5 , 2 0 5 LCD panel 1 6 , 4 0 0 switch

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Claims

1270670 案號 92124874 r 六、申請專利範圍 1 、一種基板之光檢測複數個反射鏡所發出的光線，且該光一方向的位移；以及一透鏡，係用線聚焦至一焦點，並照其中該透鏡包會聚為平行光光聚焦至一焦之液晶面板，明狀態或不透〇請專利範圍第焦並照亮基板出的鏡的該下面板散射 2、其中分重3、其中以調將該4、其中光線平行透鏡為透光線如申該聚疊。如申該光整自光線如申請專檢測該等聚焦請專源所利範裝置光源在一利範該光源所發出 5、一種基板之光一反射鏡線，且該光源係在圍第係透所發焦點圍第的光檢測，係一曲裝置，其包括有：，係分別用以反射自複數個光源源係在一曲面上作上下左右至少以將自該等反射鏡所反射出的光亮一平台上的基板；括有一用以將自該反射鏡所反射之上透鏡、一用以將穿過該上透點並照亮該基板、以及一連接至藉由控制電力供應可轉換該液晶明狀態，並從而產生直行光線或 1項所述之基板之光檢測裝置，的光線係於各該相鄰光線之間部 1項所述之基板之光檢測裝置，過位移至少一該反射鏡及該透鏡出光線的入射角或反射角，從而〇 1項所述之基板之光檢測裝置，線係為發散光線。裝置，其包括有：用以反射自一光源所發出的光面上作上下左右至少一方向的位1270670 Case No. 92124874 r VI. Patent Application No. 1. A light of a substrate detects light emitted by a plurality of mirrors, and the light is displaced in one direction; and a lens is focused to a focus by a lens, and the lens is photographed therein The package converges into a parallel liquid light focusing to a focal liquid crystal panel, in a clear state or not, please circumscribe the patent range and focus on the lower panel of the mirror that illuminates the substrate, wherein the weight is 3, wherein the weight is 3 Wherein the light parallel lens is a light transmission line, such as the application of the stack. Such as the application of the light from the light, such as the application for the detection of the focus, please use the source of the device, a light source, a light source, a mirror, and a source of light, and the light source is in the focus of the surrounding system. The surrounding light detection is a curved device comprising: a system for reflecting a plurality of light source sources on a curved surface for at least up and down, at least to reflect light reflected from the mirrors on a platform. a substrate; a lens for reflecting the upper lens from the mirror, a lens for passing through the upper transparent point and illuminating the substrate, and a connection for switching the liquid crystal state by controlling power supply, And a light detecting device for generating a straight light or a light detecting device of the substrate, wherein the light is applied to the light detecting device of the substrate between the adjacent light rays, and at least one of the mirror and the lens are over-displaced The incident angle or the angle of reflection of the light, so that the light detecting device of the substrate of the item 1 is a divergent light. The device includes: a bit for reflecting at least one direction of up, down, left, and right from a light surface emitted from a light source

第20頁 1270670 案號 92124874 A_ 修正六、申請專利範圍移；以及聚焦6、其中鏡。 7、其中作上8、其中至一焦點如申請專該光檢測一透鏡，係用，並照亮利範圍第裝置至少以將自該反射鏡所反射出的光線一平台上的基板。 5項所述之基板之光檢測裝置，包括有一光源反射鏡及一透如申請專利範圍第該照亮基板之光線下左右方向的位移如申請專利範圍第該光源所發出的光如申請專利範圍第該透鏡包括有：透鏡，係光；透鏡，係照亮該基一液晶面板，該液晶面光線或散其中線會聚為平行一上一下焦至一焦點並力供從而10 裝置該電啟或應可產生、如，其池以關閉轉換直行申請專利範圍中更包括一電供應該電電力至該池的電力 5項所述之基板之光檢測裝置，係隨著該光源在該曲面上位移而 0 5項所述之基板之光檢測裝置，線係為發散光線。 5項所述之基板之光檢測裝置，用以將自該反射鏡所反射出的光用以將穿過該上透鏡的平行光聚板；以及係連接至該下透鏡，藉由控制電板為透明狀態或不透明狀態，並射光線。第1或9項所述之基板之光檢測連接至該液晶面板之電池’精由液晶面板’以及一開關’错由開供應以控制該液晶面板。Page 20 1270670 Case No. 92124874 A_ Amendment VI. Patent application scope shift; and Focus 6, which mirror. 7. Among them, the focus is as follows. For example, the application of the light detection lens is used, and the illumination device is illuminated to at least the light reflected from the mirror as a substrate on the platform. The light detecting device of the substrate according to the fifth aspect includes a light source mirror and a displacement in the left and right direction of the light illuminating the substrate as disclosed in the patent application scope. The lens includes: a lens, a light; a lens that illuminates the liquid crystal panel, the liquid crystal light or the scattered line converges into a parallel, a focus, and a focus, and the device is powered by the device. It should be possible to generate, for example, a light detecting device of the substrate of the fifth item of the power supply that supplies the electric power to the pool in a closed-loop conversion patent application range, as the light source is displaced on the curved surface In the light detecting device of the substrate according to Item 05, the line is divergent light. The light detecting device of the substrate of claim 5, wherein the light reflected from the mirror is used to pass the parallel light collecting plate passing through the upper lens; and the system is connected to the lower lens by controlling the electric board It is transparent or opaque and emits light. Photodetection of the substrate according to item 1 or 9 The battery connected to the liquid crystal panel is supplied by a liquid crystal panel and a switch to control the liquid crystal panel.

第21頁 1270670 案號 92124874 曰修正六、申請專利範圍 1 、一所發 -方行相亮一 1 2 置，等光相鄰.3 置，的光14 置，波長性0 出的向的鄰光平台、如其中源所的光、如其中線作、如其中、強種基複數光線位移一透線的上的申請藉由發出線部申請藉由上下申請藉由度、板之個反，且 ;以鏡，部分基板專利位移至少份重專利該等方向專利調整散射光檢測射鏡，該光源及係用以重疊，裝置，其包括有：係分別用以反射自複數個光源係在一曲面上作上下左右至少將自該反射鏡所反射的光線進並將該光線聚焦至一焦點以照範圍第1 1項所述之基板之光檢測裝至少一該反射鏡或該透鏡以調整自該一光線的入射角及反射角，從而將該疊。範圍第光源在的位移範圍第該照亮以及極 1 1項所述之基板之光檢測裝該曲面上位移以將該照亮基板 0 1 1項所述之基板之光檢測裝基板光線的入射角、反射角、化方向，即可增加檢測的準確Page 21 1270670 Case No. 92124874 曰 Amendment VI, the scope of application for patents 1, one issued - the square line is brighter and one set, the equal light is adjacent to the .3 set, the light 14 is set, and the wavelength is 0. The application of the platform, such as the light in the source, such as the line, such as the strong-based complex light-shifting-through line, is applied by the line-up application by means of the degree and the plate, and By mirror, part of the substrate patent displacement is at least the weight of the patented patent-adjusted scattered light detection mirror, the light source and the system are used for overlapping, the device comprises: a system for respectively reflecting from a plurality of light sources to a curved surface Up and down, left and right, at least the light reflected from the mirror is incident and the light is focused to a focus to detect at least one of the mirrors or the lens of the substrate according to the range of item 1 to be adjusted The angle of incidence of a ray and the angle of reflection, thereby the stack. The range of the range of the first light source is illuminating and the light detecting of the substrate of the pole item 1 is displaced on the curved surface to illuminate the light of the light detecting substrate of the substrate of the substrate 119 Angle, reflection angle, and direction can increase the accuracy of detection

第22頁 1270670 案號 92124874 曰修正六、指定代表圖 (一）、本案代表圖為：第„_5Α_____圖 (二）、本案代表圖之元件代表符號簡單說明 3 0 0 基板 1 1 〇光源 1 2 〇反射鏡 2 0 0 菲涅爾透鏡 Ρ 焦點Page 22 1270670 Case No. 92124874 曰 Amendment 6. Designated representative diagram (1) The representative figure of the case is: „_5Α_____ diagram (2), the representative figure of the representative figure is a simple description of the symbol 3 0 0 Substrate 1 1 〇 light source 1 2 〇Mirror 2 0 0 Fresnel lens Ρ Focus

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