TWI266885B - Inspection apparatus and inspection method - Google Patents

Abstract

This invention provides an inspection apparatus and inspection method capable of high-speed inspection of every kind of circuit wiring. An inspection apparatus (1) supplies an inspection signal from probes (21a to e) to one end of circuit wiring (101a to e) and reads a voltage change of the other end of the circuit wiring (101a to e) by sensors (22a to e), so that signals from the sensors (22) are amplified by amplifiers (23a to e) and peak hold circuits (24a to e) extract and hold the maximum signal values amplified. After this, the peak value (maximum value) for each of the circuit wiring held by the peak hold circuits (24a to e) is selected via a selector (25) and sent to an A/D conversion circuit (26), so that it is converted into a corresponding digital value which is fetched by a computer (27). The computer (27) detects malfunction of the circuit wiring (101a to e) in accordance with the output value from the A/D conversion circuit (26).

Description

Ϊ266885 五、發明說明（1) tgg詳細說明 【發明所屬技術領域】 本發明係關於檢查電路配線的檢查裝置及檢查方法。 【習知之技術】 在電路基板的製造中，於基板上施行電路配線之後，必 須檢查此電路配線是否有斷線。此基板檢查方法之一，在 此之前便已知有對電路配線的一端施加電子信號，再利用 挪置另一端的電子變化而檢查電路配線的方法（如日本專 利特開平1 0 - 2 3 9 3 71號、日本專利特開平丨〇 - 2 3 9 3 7 2號公 報）。 習知的檢查方法係利用具有如圖6所示構造的檢查裝置 而執行的。在圖6中，檢查裝置係具備有··分別接觸於電路 f板1 0 0上之電路配線1 〇 1 一端的探針6丨；在複數探針6〗内 選擇出施加電壓之探針的開關電路62 ;偵測出從電路配線 101另一端所被施加電壓的偵測器63 ;來自偵測器63之電 子信號=，放大的放大器64 ;篩選出經放大器64所放大過 =電子#號最大值的峰值（peak hold)電路65 ;以及從所 篩選出的最大值，偵測出電路配線不佳的電腦66。 電腦66尚且控制著開關電路62，並對探針61依序施加電 壓。利用從探針61供應給電路配線1〇1的電壓，經由偵測 器63偵測出在電路配線101上所產生的電壓變化，並在利 用放大器64進行放大後，再利用峰值維持電路“筛選出最 大值並輸入於電腦66中。電腦66便從由峰值維持電路“所 輸入的電壓波形，偵測在哪一電路配線中存在有問題。Ϊ 266885 V. DESCRIPTION OF THE INVENTION (1) Detailed Description of TGG BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus and an inspection method for inspecting circuit wiring. [Technical Technology] In the manufacture of a circuit board, after the circuit wiring is applied to the substrate, it is necessary to check whether or not the circuit wiring is broken. One of the substrate inspection methods has been known before, by applying an electronic signal to one end of the circuit wiring, and then checking the circuit wiring by using the electronic change at the other end (for example, Japanese Patent Laid-Open No. 1 0 - 2 3 9 No. 3, 71, Japanese Patent Laid-Open No. - 2 3 9 3 7 2). The conventional inspection method is performed using an inspection apparatus having the configuration shown in Fig. 6. In Fig. 6, the inspection apparatus is provided with a probe 6 接触 which is in contact with one end of the circuit wiring 1 〇 1 on the circuit f board 100, and a probe for applying a voltage in the complex probe 6 The switch circuit 62 detects the detector 63 from which the voltage is applied from the other end of the circuit wiring 101; the electronic signal from the detector 63 = the amplified amplifier 64; the filtered output amplified by the amplifier 64 = the electronic ## A maximum peak hold circuit 65; and a computer 66 that detects poor circuit wiring from the filtered maximum value. The computer 66 also controls the switch circuit 62 and sequentially applies a voltage to the probe 61. Using the voltage supplied from the probe 61 to the circuit wiring 101, the voltage change generated on the circuit wiring 101 is detected via the detector 63, and after being amplified by the amplifier 64, the peak sustaining circuit is used. The maximum value is selected and input to the computer 66. The computer 66 detects a problem in which circuit wiring from the voltage waveform input by the peak hold circuit.

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【發明欲解決之課題】 五、發明說明（2) 能:二’^述習知方法中，因為在-次的電壓施加中僅 便將夂個電路配線，因此電路配線越多的話，檢查時間 的此夕因卜此偵測器 '放大器、峰值維持電路係屬於單- 偵，出至到底屬於哪-分叉上存在有問題，而。係無法 本發明乃為解決上述習知技術者， 對所謂的電路配線可高速檢杳的 1杳於提供-種 【解決課題之手段】-的檢查裝置及檢查方法。 下D、:為f上述目的，相關本發明之裝置係譬如具備以 杳對^路路的檢查装置’係具備有:可從檢 構;近供應檢查信號的供應機 攸檢查對象電路配線之另一她糾< ^ 上述供應機構所供應的上述檢查之測出可經由 經上述伯測機構ί ί ί、，+° 機構係包含有篩選出 值篩選機構；將經上述最大值選最大值的最大 當作檢查結果，當上述另一在師選出的最大值 構。 知叹置上述谓測機構與上述最大值筛選機 然後’譬如上述偵測機構係可 近的方式偵測上述檢查信號。非接觸於上述另-端附 C:\2D-C0DE\9l-07\9ll08084.ptd 麵 第5頁 1266885 五、發明說明（3) 讀K上構係蜂值維持電路，直到 篩選出的峰值Γ、 /、〜的檢查信號為止，均保持著所 的時端與上述另-端存在有複數個 個上述其中一：供=係可同時將檢查信編^ 個另-端W檢=測機構係可同時從複數個上述各 信號當作』：：η::查裴置，係具備有··可將脈衝 端附近的供應機構；可從二對4電路配線之其中一 附近偵測出上、十、认太述檢查對象電路配線的另一端 號供應前的上；：測機構；以及將上述檢查信 後的上述偵測信號供應 正常電路配線時的偵測姓Μχ並在將比較結果與 象電路配線之良否的判；機構：比較之後，再判斷檢查對 然後，譬如更具備右斿* 號，並將收集信號的平集上述债測機構的檢查信 構；上述判斷機構係將上杳^肖果之檢查結&決定機 果，r乍上述㈣構偵：：=;=構物結 再者，檢查電路配線的檢查n 2 可從檢查對象電路配線之:;一 * :有: 供應機構；可從檢查對象電：配：=3應檢查信號的 可經由上述供應機構所供廊、^之另一柒附近，偵測出 以及複數次收集上述伯^槿述檢查信號之偵測機構； 則機構的檢查信號，並將收集信號 C:\2D-C0DE\91-07\91108084.ptd 第6頁 1266885 五、發明說明（4) 的T均當作偵测結果之 譬如上述檢查結果結定c構。 .的複數檢查信號之最 =上述痛測機構 偵：結果的平均值，且將其ί二=切，並求取其： 言如上述檢查結果決定機構、二=果用的檢查方法。 偵測結I，轉•為所對應t數位t;將上述谓測機構的 經上述A/D轉換部所轉換的 的A/D轉換部；並將 ，!）轉換部係在利用上述偵測果；上 偵測處理時，可複數保持著經A/D轉換過的上查信號的 偵測值，並在偵測處理結束後，出二偵測機構之 再者，電路配線的檢查裝置之檢查方法，。[Problems to be Solved by the Invention] V. Description of the Invention (2) Yes: In the conventional method, since only one circuit is wired during the application of the voltage, the more the circuit wiring, the inspection time In this case, the detector's amplifier and peak-maintaining circuit belong to the single-detection, and there is a problem with the fork-to-fork. In the meantime, the present invention is an inspection apparatus and an inspection method for providing a high-speed inspection of so-called circuit wiring, which provides a method for solving the problem. In the following D, the device according to the present invention is provided with an inspection device having a 杳 ^ ^ 路 系 具备 可 可 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; 近 近 近 近 近 近 近 近The correction of the above-mentioned inspections supplied by the above-mentioned supply organization may include the screening value screening mechanism via the above-mentioned inspection organization ί ί , , +° mechanism; the maximum value is selected by the above maximum value The maximum is taken as the result of the inspection, when the above-mentioned other maximum value is selected by the division. The above-mentioned detection mechanism is detected by the above-mentioned detection mechanism and the above-mentioned maximum value screening machine, and then the detection signal is detected in a manner similar to the above detection mechanism. Non-contact with the above-mentioned other end-end C:\2D-C0DE\9l-07\9ll08084.ptd page 51266895 V. Invention description (3) Read the K-structured bee value maintenance circuit until the selected peak valueΓ The check signals of , /, and ~ remain at the time end and the other end has a plurality of the above ones: the supply system can simultaneously edit the check letter, and the other end - W test = test mechanism It can be used as a 』::η:: 裴 裴 , , , , , , , , , , , , , , , 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 10. The upper part of the circuit wiring of the inspection object is the upper part of the supply; the measuring mechanism; and the detection of the detection signal after the above-mentioned inspection signal is supplied to the normal circuit wiring, and the comparison result is compared with the image The judgment of the circuit wiring is good or not; the organization: after the comparison, the judgment is checked, and then, if there is a right 斿*, and the collected signal is collected, the inspection information of the above-mentioned debt testing institution; the above-mentioned judging mechanism will be on the 杳^ Xiao Guozhi's check knot & decides the result, r乍 the above (four) structure detect: =; = structure junction, check the wiring of the circuit inspection n 2 can be wired from the inspection object circuit: a *: there is: supply mechanism; can be from the inspection object electricity: with: = 3 should check the signal can be through the above The detection mechanism of the above-mentioned inspection report signal is detected and collected several times in the vicinity of the gallery provided by the supply organization; the inspection signal of the mechanism is collected, and the signal C:\2D-C0DE\91 is collected. -07\91108084.ptd Page 6 1266885 V. Inventive Note (4) The T is regarded as the detection result, and the result of the above inspection is determined. The most of the complex check signals = the above-mentioned pain test mechanism Detect: the average value of the results, and the ί2 = cut, and find it: If the above test results determine the mechanism, the second = the use of the test method. Detecting the node I, turning to the corresponding t-digit t; the A/D conversion unit converted by the A/D conversion unit of the pre-measurement mechanism; and the !) conversion unit is used for the detection If the detection process is performed, the detected value of the A/D converted check signal may be maintained in plurality, and after the detection process is finished, the second detection mechanism is further removed, and the circuit wiring inspection device is Inspection Method,.

有：將脈衝信號當作檢查信號並供應給檢查對象電路W 之其中一端附近的供應步驟·，從上述檢查對象電路/綠 另一端附近，偵測出經上述供應步驟所供應之檢查啼 偵測步驟；以及將上述檢查信號供應前的上述偵測二^之 情測結果，與上述檢查信號供應後的上述偵測步驟^伯 結果進行比較，旅將比較結果與正常電路配線時的、^ 果進行比較，而判斷檢查對象電路之良否的檢查姓 '二= 步驟。 一、…果決疋 譬如上述檢查、结果決定步驟係複數次執行利用上述偵測 步驟的檢查信號之彳貞測’並將複數次偵測結果的平約^作 偵測結果的檢查方法。 田 再者，檢查電路配線之檢查裝置的檢查方法，係包人 有：將檢查信號供應給檢查對象電路配線之其中—妒 W附迎There is: a supply step in which the pulse signal is regarded as an inspection signal and supplied to one end of the inspection target circuit W, and the inspection detection supplied from the supply step is detected from the vicinity of the other end of the inspection target circuit/green And comparing the result of the detecting of the detection signal before the supply of the inspection signal with the result of the detecting step after the supply of the inspection signal, and comparing the result with the normal circuit wiring For comparison, it is judged whether the inspection target circuit is good or not, and the last name is 'two= steps. 1. The decision is as follows. For example, the above-mentioned inspection and result determination steps are performed in a plurality of times to perform the detection of the inspection signal using the above-mentioned detection step and to check the result of the detection of the plurality of detection results. In addition, inspecting the inspection method of the circuit wiring inspection device, the package person has: the inspection signal is supplied to the inspection target circuit wiring - 妒 W

的of

1266885 五、發明說明（5) 的供應步㉝；從上述撿查對象電 測出經上述供應步驟所供應之檢查作以一端附近，谓 利用上述偵測步驟執行複數次檢^ ^ ^的偵測步驟；以及 數次偵測結果平均當作偵測結人的偵測，然後將複 譬如上述檢查結果決定步“將=2果決定步驟。 的複數檢查信號之最大值盥最小 述谓测步驟所偵測出 偵測結果的平均值，且 ^杏你、予以去除，並求取其餘 【發明實施形態】 田作谓測結果用。 以下’蒼恥圖& ’針對本發明較佳〜 的詳細說明。其中，此實施形態中 ^ ^怨進行例示性 配置、數值等，在無特別記載的前提；f牛的相對 不僅限於此。 本發明的範圍並 (第1實施形態） 本發明之第1實施形態，如圖2 ， :上所印刷之無分又電路配線10u'〜亍檢杳 置進行說明。 "欢旦日:Ϊ彳欢置辰 檢=。供概檢二電路基板10°上之電路配線… 檢查裝置1係具備有··供將檢查信號供應給電路配線丨〇ia 〜e之一端的探針21 a〜e ;讀取電路配線i 〇丨a〜e另一端之 電壓變化的讀取偵測器22a〜e ;將從偵測器22所輸出的信 號予以放大之放大器2 3 a〜e ;篩選出經放大器2 3 a〜e所放 大信號的最大值之峰值保持電路24a〜e ;選擇峰值保持電 路24a〜e的輸出值之選擇器25 ;將從選擇器25所選擇到的1266885 V. Supply step 33 of the invention description (5); electrically detecting from the above-mentioned inspection object that the inspection supplied by the supply step is near one end, that is, using the above detection step to perform the detection of the plurality of inspections ^ ^ ^ Steps; and the average number of detection results is used as the detection of the detection of the person, and then the recovery is determined as the above-mentioned inspection result step "will = 2 fruit decision step. The maximum value of the complex check signal 盥 minimum said test step The average value of the detection results is detected, and the apricots are removed, and the remaining [inventions] are used for the results of the field test. The following 'shame maps> are preferred for the present invention. In the above-described embodiment, the exemplary arrangement, the numerical value, and the like are not specifically described. The relative range of the f cattle is not limited thereto. The scope of the present invention (first embodiment) The first aspect of the present invention In the embodiment, as shown in Fig. 2, the printed circuit 10u'~亍 杳 杳 上 & & & & & & & & & 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢 欢Circuit wiring... inspection device The 1st system includes probes 21a to e for supplying an inspection signal to one end of the circuit wiring 丨〇ia to e; and a reading detector for reading a voltage change at the other end of the circuit wiring i 〇丨a to e 22a~e; an amplifier 2 3 a~e for amplifying the signal output from the detector 22; screening the peak hold circuits 24a to e of the maximum value of the signal amplified by the amplifiers 2 3 a to e; selecting the peak hold a selector 25 for the output values of the circuits 24a to e; selected from the selector 25

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五、發明說明（6) 輸出值，轉換為數位值的A/D轉換電路26 ;以及 換電路26的輸出值，偵測出電路 D轉 的電腦2 7。 e ^不佳狀況 放可i專屬設計的電腦，亦可為通用的個人電腦。 ΪΪΓΙ 保持電路24、選擇器25及A/D轉換電路26 亦可組裝於電腦2 7中。 、冤路2 6 信ΐ Ί:對2:2二1 ί將提供給電路配線101的電* 電路用之選擇信;; 著選擇取出信號的峰值保持 ::加的電子信號可為電流或電壓中之任一冑 :弦=矩形”衝波等任何波形。在此則採用電：： 薄內的i ΐ限疋仏號的極性，因此可將電路設計為在偵測 純内的電^方向限定於單一方向，俾使電路設計變得較單 $針21a〜e係前端分別接觸到電路基板丨〇〇上的電路配 〜e之一端，並同時對所有電路配線……供應電 藉此電路配線l〇la〜e上的電壓將產生變化，而讀取偵 測器22a〜e便讀取此變化。讀取偵測器22a〜e係連接於電 ，基板100之電路配線101a〜e上的金屬板’並偵測電路配 線1 01上的電壓。 對電路配線1 〇 1 a〜e所施加的電壓，係如同實際動作時 的非常微小電壓。因為讀取偵測器22a〜e所產生的電壓亦 較微小，因此便經由放大器23a〜e放大，並利用峰值保持V. Description of the Invention (6) The output value, the A/D conversion circuit 26 converted to a digital value, and the output value of the circuit 26 are detected, and the computer T 7 of the circuit D is detected. e ^ Poor condition A computer designed for exclusive use, or a general-purpose personal computer. The hold circuit 24, the selector 25, and the A/D conversion circuit 26 can also be incorporated in the computer 27. , 冤路2 6 ΐ Ί 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择Any of the following: chord = rectangular "wave" and other waveforms. Here, the electric:: The polarity of the 疋仏 疋仏 薄 in the thin, so the circuit can be designed to detect the pure electric direction Limited to a single direction, so that the circuit design becomes more than a single $ pin 21a~e front end respectively contact one end of the circuit on the circuit board 〜, and at the same time supply all the circuit wiring... The voltages on the wirings 10a to e will change, and the read detectors 22a to e will read the changes. The read detectors 22a to e are connected to the electric circuit, and the circuit wirings 101a to e of the substrate 100 are connected. The metal plate 'detects the voltage on the circuit wiring 101. The voltage applied to the circuit wiring 1 〇1 a to e is like a very small voltage during actual operation. Because the read detectors 22a to e are generated The voltage is also small, so it is amplified by amplifiers 23a to e and is maintained by peaks.

C: \2D-CODE\9l .〇7\9U ⑽ 84.ptd 第9頁 1266885 五、發明說明（7) 電路24a〜e保持著最大值。 選擇器25係從峰值保持 A/D轉換電路26的峰佶仅杜+ &擇連接於 〜 峰值保持電路。從複數峰值保持電路24a 腦2 7所彳丘/« 個的順序取出最大值的方式，根據從電 斤i、應的控制信號進行選擇。 而2 =持電路所輸出的最大值將經由A/D轉換電路26 對應的數位信號，並輸入電腦27中。在電腦 輸入的數位信號是否屬於正常值。譬如與既定 到觥2厘堅值進行比較’當大於臨限電壓值之情況時，便 ’J斷為屬於無電線斷線等情況的正常電路配線；反之，當 丄於臨限電壓值的情況時’ I判斷所對應的電路配 存在斷線。 另外’摘測器2 2亦可非接觸的配置於電路配線丨〇 1的相 對向位置處。此情況下，偵測器2 2與電路配線〗〇 1的間隔 最^在〇: 05mm以下。此外，亦可包夾介電質絕緣材料而密 接^。藉由此種構造，便形成與電路配線丨〇 1靜電結合的 狀態’俾可從偵測器偵測出電路配線101的脈衝狀電壓變 化0 此外’在圖2的電路基板丨00中，雖假設僅在單面上設置 電路配線1 0 1的情況，但是即便在雙面上均設有電路配線 1 0 1的電路基板仍可進行檢查。此情況下，只要在上下採 用二組偵測器2 2，並配置呈將電路基板包夾成三明治狀態 便可進行檢查。 其次’採用圖3，針對電腦27的詳細說明構造例進行說C: \2D-CODE\9l .〇7\9U (10) 84.ptd Page 9 1266885 V. Description of the Invention (7) Circuits 24a to ee maintain the maximum value. The selector 25 is connected from the peak of the peak-holding A/D conversion circuit 26 to only the ++amp; The method of extracting the maximum value from the order of the peaks/« of the brains of the complex peak hold circuit 24a is selected based on the control signal from the battery i. The maximum value output by 2 = holding circuit will be input to the computer 27 via the digital signal corresponding to the A/D conversion circuit 26. Whether the digital signal input to the computer is a normal value. For example, when compared with the established value of 厘2 PCT, when it is greater than the threshold voltage value, then 'J breaks the normal circuit wiring that belongs to the situation of no wire breakage; otherwise, when it is at the threshold voltage value At the time of 'I judge the circuit corresponding to the disconnection. Further, the picker 2 2 may be disposed in a non-contact manner at a position opposite to the circuit wiring 丨〇 1. In this case, the interval between the detector 2 2 and the circuit wiring 〇 1 is at most 05: 05 mm or less. In addition, the dielectric insulating material may be sandwiched and bonded. With such a configuration, a state in which the circuit wiring 丨〇1 is electrostatically coupled is formed. 脉冲 A pulse voltage change of the circuit wiring 101 can be detected from the detector. 0 In addition, in the circuit board 丨00 of FIG. 2, It is assumed that the circuit wiring 1 0 1 is provided only on one side, but the circuit board provided with the circuit wiring 1 0 1 on both sides can be inspected. In this case, as long as the two sets of detectors 2 2 are used up and down, and the circuit board is sandwiched and sandwiched, the inspection can be performed. Next, using FIG. 3, a detailed description of the structure of the computer 27 will be described.

1266885 五、發明說明（8) ' *- 明。圖3為電腦2 7的概略硬體構造方塊圖。 在圖3中，211係控制著電腦27整體演算、控制用的 CPU，212係儲存著利用cpu211所執行之程式或固定值等的 ROM ° 214係一時記憶用的RAM，含有儲存載入程式之程 !域和由A/D轉換電路26所受信之數位信號的記惊 等。 215係外部記憶裝置的硬碟。216可抽取 取裝置之CD-ROM驅動器。 I·心嫘肢的喂 浐H詈2=輸出入介面。透過輸出入介面217而主司著 輸入裝置的鍵盤218、滑鼠219、探 者 轉中之間的介面，並執行各種信號= 在HD215中儲存著包含選擇器控制 選擇器控制程式、及顯示設計上之 資料，亦可利用讀取⑶―R〇M而安裝， 兄線形狀的影像 他媒體中進行讀取，亦可透過網路進從⑽或叭!）等其 如上述，依照本實施形態的話，因^ 载。 有峰值保持電路，因此同一電路迴路=對各電路配線均設 行測量，所以可達檢查的高速化。 的偵測器可同時進 再者，如圖4所示，即便在中途便分 如藉由在每個分叉處設置讀取偵測器刀的電路配線，譬 ° &〜e、放大器23a1266885 V. Description of invention (8) ' *- Ming. 3 is a block diagram showing a schematic hardware structure of the computer 27. In FIG. 3, the 211 is a CPU for controlling the overall calculation and control of the computer 27, and the 212 is a ROM for storing a program or a fixed value by the CPU 214, and a RAM for storing the load program. The range and the digital signal received by the A/D conversion circuit 26 are recorded. 215 is a hard drive for external memory devices. The 216 can extract the CD-ROM drive of the device. I. Feeding of the heart and limbs 浐H詈2=Import and output interface. Through the input and output interface 217, the main interface of the input device's keyboard 218, the mouse 219, and the probe is transferred, and various signals are executed. Included in the HD215 is a selector control selector control program and display design. The above information can also be installed by reading (3) - R〇M, the image of the shape of the brother line is read in the media, and can also be read through the network (10) or lap!), etc. as described above, according to the embodiment If it is, because of ^. Since there is a peak hold circuit, the same circuit loop = measurement is performed for each circuit wiring, so that the inspection speed can be increased. The detector can be simultaneously input, as shown in Fig. 4, even in the middle of the process, by setting the circuit wiring for reading the detector knife at each branch, 譬 ° &~e, amplifier 23a

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e、峰值保持電路24a〜e，便可檢測一個分又 存在有不佳情況。 在以上所說明的本實施形態中，雖偵測出電路配線的電 1 ’但是亦可偵測從電路配線所放射出的電磁波量與放射 形狀。此情況下，若偵測既定電磁波的量與形狀的話，便 可判斷電路配線屬於正常的連接。若偵測出的量少於或不 1於既疋電磁波的量或形狀不同既定 形狀之 時，便判斷電路配線中途有分離或脫落。 再者，在以上所說明的本實施形態中，雖使探針接觸到 :路配線端部附近，但是亦可從電路配線起點便採用非接 觸端子供應檢查信號。 (第2實施形態） 其-人，採用圖5，針對本發明之第2實施形態的檢查裝 進行說明。 第2只鉍形態的檢查裝置，不同於上述第丨實施形態之 j在於對各峰值保持電路24a〜e分別裝設轉換電路 、—a〜e。當屬於第2實施形態的構造之情況時，因為可將 複數數位k號並聯的輸入於電腦2 7中，因此不需選擇器 因為其他的構造要件均如同上述第丨實施形態，相同的 要件便賦予相同元件編號並省略說明。 另外’在圖式中，雖將A/D轉換電路2 e 刀別各自利用一條配線與電腦2 7相連接。e. The peak hold circuits 24a to e can detect that there is a problem with one minute. In the present embodiment described above, the amount of electromagnetic waves radiated from the circuit wiring and the radiation shape can be detected while detecting the electric power of the circuit wiring. In this case, if the amount and shape of a predetermined electromagnetic wave are detected, it can be judged that the circuit wiring is a normal connection. If the detected amount is less than or not equal to the predetermined shape of the electromagnetic wave or the shape, it is judged that the circuit wiring is separated or dropped in the middle. Further, in the present embodiment described above, the probe is brought into contact with the vicinity of the end portion of the wiring line, but the inspection signal can be supplied from the starting point of the circuit wiring using the non-contact terminal. (Second Embodiment) An inspection apparatus according to a second embodiment of the present invention will be described with reference to Fig. 5 . The second cymbal inspection apparatus differs from the above-described third embodiment in that a conversion circuit, -a to e, is provided for each of the peak hold circuits 24a to 24e. In the case of the configuration of the second embodiment, since the plurality of k numbers can be input in parallel to the computer 27, the selector is not required because the other structural elements are the same as the above-described third embodiment, and the same elements are provided. The same component numbers are given and the description is omitted. Further, in the drawing, the A/D conversion circuit 2 e is connected to the computer 27 by a single wire.

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需 性 依照第2實施形態的話’因為可免除選擇器，因此便不 要如上述第1實施形態的訊號切換等控制，可提升生 (第3實施形態）In the case of the second embodiment, since the selector can be dispensed with, it is not necessary to control the signal switching or the like in the first embodiment, and the user can be promoted (third embodiment).

路並使峰值保持於其中’然後將料值利射/==6電 進仃A/D轉換之後，再傳送給電腦27。惟本發明並非僅限 於上述例子，當電腦端的處理能力尚有充裕的情況時，亦 可形成將偵測器的偵測信號利用A/D轉換器26直接進行 轉換，然後再將A/D轉換器26的數位信號直接讀入電腦 中，之後再利用信號處理檢查電路配線狀態的構造。 即，在上述實施形態中，若從偵測器將雜音成分重最 =峰值保持電路的情況時，便有將此雜音成分當作ς加 電壓而偵測的可能性。在第3實施形態中，為使即便雜立 成分重疊的情況下亦不致受影響，而可確實的谓測電路曰配 線的施加電壓，因此便具備有如以下所說明之圖7構造。 圖7係說明本發明第3實施形態之檢查裝置構造的方塊圖。 在圖7中，與圖1相同的構造便賦予相同元件編號，且= 不同構造進行說。 Τ对The road maintains the peak therein and then transmits the value to the computer 27 after the A/D conversion. However, the present invention is not limited to the above example. When the processing capability of the computer end is sufficient, the detection signal of the detector can be directly converted by the A/D converter 26, and then the A/D conversion is performed. The digital signal of the device 26 is directly read into the computer, and then the signal processing is used to check the structure of the wiring state of the circuit. That is, in the above embodiment, when the noise component of the detector is reset to the maximum value of the peak hold circuit, the noise component is detected as a voltage applied thereto. In the third embodiment, in order to prevent the influence of the voltage applied to the circuit 曰 when the dummy components are overlapped, the structure of Fig. 7 as described below is provided. Fig. 7 is a block diagram showing the structure of an inspection apparatus according to a third embodiment of the present invention. In Fig. 7, the same configurations as those in Fig. 1 are given the same component numbers, and = different configurations are said. Right

圖7所不第3實施形態，相較於圖丨所示第j實施形態下， 省略峰值保持電路，取而代之改為利用A/D轉換器26與電 腦2 7進行電路配線的偵測位準監視。 /、 在第3實施形態中，a/D轉換器26係將A/D轉換結果保持 於既定量，並依照電腦27的讀取控制，將數位轉°換值/時序In the third embodiment, as shown in Fig. 7, the peak hold circuit is omitted, and the detection level monitoring of the circuit wiring is performed by the A/D converter 26 and the computer 27 instead. . In the third embodiment, the a/D converter 26 maintains the A/D conversion result in a predetermined amount, and converts the digits to the value/time according to the read control of the computer 27.

12668851266885

列的輸出給電腦2 7。 二檢查控制程式儲存於電腦27中，並執行該程式，依序 對每個配線圖案執行以下所說明的電壓施加步驟，並將檢 查結果保持於A / D轉換器2 6中。 抑首先丄輸出A/D轉換器26的動作許可信號而驅動A/D轉換 裔2 6。藉此便可在爾後每當輸入轉換信號指示信號之時， 便轉換為此時所輸入類比信號所對應的數位信號，並保持 住0 在經過A/D轉換器26動作穩定的時間之後，譬如經過3〇 # s時間之後，於將檢查用電壓施加給探針2〗&〜e之前， 便將所有配線圖案的偵測結果供應給A / D轉換器2 6，並利 用A/D轉換器26施行既定次數（譬如2 //s間隔）的數次（嬖如 5次）A/D轉換，並複數次收集偵測器22a〜e的偵測結果， 然後保持對應於各债測器2 2 a〜e之類比電壓輸出值（低位 準值）的數位值。 - 此步驟係依每個電路配線切換選擇器2 5，並將各電路配 線之每個偵測器的信號供應給A/D轉換器26，且執行A/D轉 換’並時序列的記錄著記錄結果。 在此檢查用電壓施加前的A / D轉換處理結束之後，便對 探針2 1 a〜e施加檢查用電壓。當檢查用電壓施加給雷 線之時，在經過既定遲滯時間之後，便利用如偵测器2 2 〜e而偵測檢查用電壓信號。 因此，在經過偵測器22a〜e的偵測信號穩定之時間後， 便使A/D轉換器26執行既定次數（譬如數次）的A/D轉換，、,The output of the column is given to the computer 2 7. The second check control program is stored in the computer 27, and executes the program, and the voltage application steps described below are sequentially performed for each of the wiring patterns, and the inspection results are held in the A/D converter 26. First, the operation permission signal of the A/D converter 26 is outputted to drive the A/D conversion. Therefore, each time the conversion signal indication signal is input, it is converted to the digital signal corresponding to the analog signal input at this time, and is held at 0 after the time when the A/D converter 26 operates stably, for example. After 3 〇 # s time, before the inspection voltage is applied to the probe 2 &~e, the detection results of all the wiring patterns are supplied to the A/D converter 26, and the A/D conversion is utilized. The device 26 performs a number of times (for example, 5 times) of A/D conversion for a predetermined number of times (for example, 2 //s intervals), and collects the detection results of the detectors 22a to e multiple times, and then keeps corresponding to the debt detectors. 2 2 a ~ e such as the digital output value (low level value) of the digital value. - This step switches the selector 25 according to each circuit wiring, supplies the signal of each detector of each circuit wiring to the A/D converter 26, and performs A/D conversion's recording of the time series. Record the results. After the A/D conversion process before the application of the voltage for inspection is completed, the voltage for inspection is applied to the probes 2 1 a to e. When the voltage for inspection is applied to the lightning line, it is convenient to detect the voltage signal for inspection by, for example, the detectors 2 2 to e after a predetermined lag time elapses. Therefore, after the detection signals of the detectors 22a to ee are stabilized, the A/D converter 26 is caused to perform A/D conversion for a predetermined number of times (for example, several times),

C:\2D-CQDE\91-07\91108084.ptd ' 第 14 頁 " " "------ 1266885 五、發明說明（12) „ 對應各電路配線之每個檢查用信號價測結果的轉換 以上控制係依每個電路配線而執行。當 的檢查信號施加、偵測器22a〜e偵 ' 斤有電路配線 26轉換為數位信號與記憶轉換值結束利用A/D轉換器 電路26讀取每個配線圖案的轉換數位值後並=A/D轉換 加前的债測器偵測值與電壓施加後的 f :=電壓施 然後再判斷偵測器是否有偵測出施加電壓益偵測值之差， 具體而言，為使即便在雜音成分重^ 影響並可確實债測出電路配線的施 下，仍不受 憶的複數次檢查結果予以平均化， 因此便將所記 果。 並§作偵測器偵測結 心與可將數次轉換值t的 ^將所計算出的平均換值的平均 稭此便可更加減少雜音等的影響。·勺偵測斋偵測值。 電腦2 7係依每個雷败邮μ ^、曰， 值，與施加後的偵測值。然後凋：查電壓施加前的偵測 (標準配線圖案）的伯測值_比=基準工作 的話’便判斷屬於正常的電路：玦差在既定範圍内 的轉換值偏小的情況時斷屈之，譬如當施加後 再者，當依每個電路配電路配線斷線。 況時，或當亦可從檢查電壓f J序點施加檢查電壓之情 测到轉換值之情況時y : σ “路配線相鄰電路配線偵 或從未施加檢i電恩之相_電路酉己 1266885 五、發明說明（13) 線的偵測器，伯測出較大值的轉換值之情況時，測到 已施加檢查電壓之電路配峻所相都的 > 、 电路配綠所相一的較咼轉換值的電路配 線之情況呀，便判斷屬於短路的情況。 依照如以上所說明的第3實施形態的言舌，藉由積極的使 用，腦27，在傷測較高位準值之上，便不再需要利用峰值 保持電路，便可偵測複數高位準值，並計算出其平均值。 吕如即便電路配線有雜音重疊的情況時，#可將影響壓抑 至最小。因此便可實現更高可靠性的電路配線檢查。 (第4實施形態） _ 以上利用電腦27的控制，並不僅限於圖7所示狀態。即 便上述第2實施形態的圖5所示構造中亦仍可適用。在圖5 所示構造中，利用第3實施形態相同的電腦2 7構成可偵測 出间位準值、低位準值的檢查裝置構造，參照圖8進行以 下的說明。圖8係有關本發明第4實施形態的檢查裝置構造 說明圖。C:\2D-CQDE\91-07\91108084.ptd ' Page 14 """------ 1266885 V. Invention description (12) „ Corresponding to the price of each inspection wiring The above control is performed according to each circuit wiring. When the inspection signal is applied, the detector 22a~e detects that the circuit wiring 26 is converted into a digital signal and the memory conversion value ends using the A/D converter circuit. 26 After reading the conversion digit value of each wiring pattern and ==A/D conversion plus the demodulator detection value and the voltage after the application of f:= voltage, then determine whether the detector detects the applied voltage Specifically, in order to make even if the noise component is affected and the circuit wiring is measured, the result of the multiple inspections is not averaged, so it will be recorded. § Detecting the center of the detector and the average value of the converted value of the converted value t can reduce the influence of noise, etc. The value of the computer 2 7 is based on each of the mines, μ, 曰, value, and the detected value after the application. Then : Checking the value of the detection (standard wiring pattern) before the voltage is applied _ ratio = the reference work, then it is judged to be a normal circuit: if the 玦 difference is small within a predetermined range, the value is broken, such as When it is applied, when the circuit is disconnected according to each circuit, or when the conversion value can be measured by applying the check voltage from the check voltage f J, the y: σ "road wiring phase Neighboring circuit wiring detection or never applied to check the phase of the electricity _ circuit 酉 126 12668855 V. Invention description (13) Line detector, when the measured value of the larger value of the conversion, it has been detected When the voltage circuit is matched with the phase of the phase, and the circuit is matched with the green circuit, the circuit wiring of the conversion value is judged to be a short circuit. According to the tongue of the third embodiment as described above, by actively using the brain 27, above the higher level value of the injury, it is no longer necessary to use the peak hold circuit to detect the complex high level value. And calculate the average. Lu Ru can suppress the influence to a minimum even if the circuit wiring has noise overlap. Therefore, it is possible to achieve higher reliability circuit wiring inspection. (Fourth Embodiment) The above control by the computer 27 is not limited to the state shown in Fig. 7. Even in the structure shown in Fig. 5 of the second embodiment described above, it is still applicable. In the configuration shown in Fig. 5, the structure of the inspection apparatus capable of detecting the inter-level value and the low-level value by the computer 27 having the same configuration as in the third embodiment will be described below with reference to Fig. 8 . Fig. 8 is a structural explanatory view of an inspection apparatus according to a fourth embodiment of the present invention.

在第4實施形態中，將各偵測器2 2a〜e的偵測類比信 號’經由各自的放大器23a〜e進行放大，並傳送給a/d轉 換器26a〜e，在此譬如首先對各Α/Ε)轉換器26a〜e、或僅 對所需的A/D轉換器輸出動作許可信號，而啟動A/D轉換 器。藉此爾後被提供動作許可信號的A/D轉換器，便將輸 入類比信號轉換為所對應的數位信號並保持住。 在經過A/D轉換器26動作穩定的時間之後，譬如經過3〇 // s時間之後，於將檢查用電壓施加給探針2丨&〜e之前， 便將所對應配線圖案的偵測結果利用A/D轉換器26a〜e進In the fourth embodiment, the detection analog signal ' of each of the detectors 2 2a to e is amplified by the respective amplifiers 23a to e and transmitted to the a/d converters 26a to e, for example, first for each The converters 26a to 26b or the operation enable signals are output only to the required A/D converters to activate the A/D converter. The A/D converter, which is then provided with the action permission signal, converts the input analog signal into the corresponding digital signal and holds it. After the operation of the A/D converter 26 is stabilized, for example, after the lapse of 3 〇//s, the detection of the corresponding wiring pattern is performed before the inspection voltage is applied to the probes 2丨&~e. The result is made using A/D converters 26a~e

C:\2D-CODE\91-07\91108084.ptd 第16頁 1266885C:\2D-CODE\91-07\91108084.ptd Page 16 1266885

行A/D轉換並保持。另外，如同第3實施形態，利用A/D轉 換器26a〜e施行既定次數（譬如2 間隔）的數次（譬如5 -人）A / D轉換’並保持著對應各偵測器2 2 a〜e之類比電壓輸 出值（低位準值）的數位值。 別 在此檢查用電壓施加前的A/D轉換處理結束之後，便對 探針21a〜e施加檢查用電壓。當檢查用電壓施加給電路配 線之時，在經過既定遲滞時間之後，便利用如偵測器22& 〜e而偵測檢查用電壓信號。Line A/D conversion and hold. Further, as in the third embodiment, the A/D converters 26a to 26e are used for a predetermined number of times (e.g., 2 intervals) for a predetermined number (e.g., 5-person) A/D conversion' and are held corresponding to the respective detectors 2 2 a The value of the digital output value (low level value) such as ~e. When the A/D conversion process before the voltage application is completed, the test voltages are applied to the probes 21a to 21e. When the voltage for inspection is applied to the circuit wiring, it is convenient to detect the voltage signal for inspection by, for example, the detectors 22&~e after a predetermined lag time has elapsed.

因此，在經過偵測器22a〜e的偵測信號穩定之時間後， 便使A/D轉換器26a〜e執行既定次數（譬如數次）的A/D轉 換，並保持著對應各電路配線之每個檢查用信 的轉換數位值。 ° # 然後’當偵測器22a〜e偵測信號利用A/D轉換器26a〜e ♦轉換為數位信號與記憶轉換值結束之後，便從a/d轉換 二路26a〜e項取每個配線圖案的轉換數位值，並篩選出電 ，施的偵測器偵測值與電壓施加後的偵測器偵測值之 二：Ϊ ί判斷偵測器是否有偵測出施加電壓。另外，檢 土了果的師選方法當然亦可採用如同上述第3實施形態的Therefore, after the detection signals of the detectors 22a to 22e are stabilized, the A/D converters 26a to e are subjected to A/D conversion for a predetermined number of times (for example, several times), and the corresponding circuit wirings are maintained. Each of the check signals is converted to a digital value. ° # Then 'When the detectors 22a to e detect signals are converted to digital signals by the A/D converters 26a to e ♦ and the memory conversion values are completed, each of the two channels 26a to e is taken from the a/d conversion. The wiring pattern is converted to a digital value, and the power is detected, and the detector detection value and the detector detection value after the voltage application are two: Ϊ ί, whether the detector detects the applied voltage. In addition, the method of selecting the soiled fruit may of course adopt the third embodiment as described above.

=以上所說明的第4實施形態的話，便可使利用A/Dj Α η益絲的讀取控制變為更容易化。亦可單僅利用從 二上㈣卜6的依序讀取’便可取出每個電路配線的 偵測裔2 2 a〜e之偵測結果。 (苐5實施形態）When the fourth embodiment described above is used, the reading control by the A/Dj 益 η wire can be made easier. Alternatively, the detection result of the detected person 2 2 a~e of each circuit wiring can be taken out by using only the sequential reading from the second (four) b. (苐5 implementation form)

1266885 五、發明說明（15) 以上說明雖將同日4 杰％各， 明，但是第3與第4:以電路配線的情況為例進行說 器輸出值與已施加檢杳二中j施加檢查信號時的读測 制，可減少雜音成以Γ夺的偵，出值之決定控 果。此摘測器輸出值的“，獲付南可靠性的檢查結 接於電路配線之情況外，一港表?置4的’丨月況，除賴測器電性連 依靜電結合的非接觸气構用於將偵測器與電路配線 :二Γίί線上的偵測器輸出值之決定控制方 檢查結果。 ’而獲得較高可靠性的 2查信號亦可採用如脈衝信號。相㈣測器 與，路，線依非接觸的靜電結合所構成之本發明第5實施 形悲’多照圖9進行說明。圖9所示係供說明第5實施形態 之偵測器22a〜e偵測控制用的時序表。另，其他檢查裝置 的構造可採用上述實施形態的構造。以下就與上述實施形 態不同的部分進行說明。 即便在第5實施形態中，在電腦27中儲存著檢查控制程 式，並執行該程式，若屬於圖7構造的話，便依每個電路 配線切換選擇器2 5，並將每個電路配線的轉換結果，時序 列的記錄於A/D轉換器26中。待結束對所有電路配線的控 制之後，便執行以下所示的讀取控制。 首先’輸出如圖9所示A/D轉換器26的動作許可信號，而 啟動A / D轉換器2 6並控制為可動作狀態。藉此爾後每當輸1266885 V. INSTRUCTIONS (15) Although the above description will be the same on the same day, the third and the fourth: in the case of circuit wiring, the output value of the speaker and the applied test signal are applied. When the reading system is used, it can reduce the noise and the smuggling, and the value of the decision is controlled. The output value of this squirrel is ", and the inspection of the reliability of the South is connected to the wiring of the circuit, and the condition of the port of the port is set to 4", except for the non-contact of the electrostatic connection of the detector. The gas structure is used to connect the detector to the circuit: the detector output value on the line is determined by the control side. 'The high reliability 2 check signal can also be used as a pulse signal. Phase (four) detector The fifth embodiment of the present invention, which is composed of a non-contact electrostatic connection, is described with reference to Fig. 9. The detection of the detectors 22a to e of the fifth embodiment is shown. In addition, the structure of the above-described embodiment can be different from the above-described embodiment. In the fifth embodiment, the inspection control program is stored in the computer 27, When the program is executed, if it is constructed as shown in Fig. 7, the selector 25 is switched for each circuit wiring, and the conversion result of each circuit wiring is time-series recorded in the A/D converter 26. Control of all circuit wiring Thereafter, the read control shown below is executed. First, the operation permission signal of the A/D converter 26 shown in Fig. 9 is output, and the A/D converter 26 is activated and controlled to an operable state. Whenever lost

C:\2D-CODE\91-07\91108084.ptd 第18頁 1266885 五、發明說明（16) 入轉換指示信號時，便可將此時的輸 對應的數位信號並保持住。 貝比L就轉換為所 換益26動作穩疋、且偵測器偵測信 = (譬如經過3“s時間）之後（經過L〇w 丰亦知疋的時間 A / D轉換器2 6執行既定次數（孽如2 & ^ 更使 次)A/D轉換，並保持各個轉‘數 曰’隔）的數次(譬如5 譬如調查複數基準電果此低⑽)時間係 II冰的桡置結果， 之後再決定的話便可。 Α檢狱知宜、纟。果 偵測器22a〜e的偵測類比信號係如（ 圖9中將A/D轉換時序（平均範圍）表示為橢圓。w y 上匕A: DA換/理結束後’於(B )所示時序點將檢查用脈 二=也σ，，’〇木針21 a〜e。當檢查用脈衝信號施加給 西=\日守，於經過既定遲滯時間之後，利用偵測器^〜e侦 測（C)所示的波形。 、 因此，當經過被施加檢查用脈衝信號後的偵測器22a〜 e，於们則信號波形的變化率呈穩定的日寺間（#如1〇〇" 間）後（經過High時間範圍後），便使A/D轉換器26執行既定C:\2D-CODE\91-07\91108084.ptd Page 18 1266885 V. INSTRUCTIONS (16) When the conversion indication signal is input, the digital signal corresponding to the input at this time can be held. Bebe L is converted to the benefit of 26, and the detector detects the signal = (for example, after 3 "s time) (after L〇w Feng knows the time A / D converter 2 6 The number of times (such as 2 & ^ more times) A / D conversion, and keep each turn 'number 曰 ' interval) several times (such as 5 譬 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 调查 II II II II II II II II II II II After the result is set, it can be determined later. The detection of the inspector is as follows: The detection analog signals of the detectors 22a to 22e are as shown in Fig. 9 (the A/D conversion timing (average range) is represented as an ellipse. Wy upper A: DA change / after the end of the time point shown in (B) will check the pulse II = also σ,, '〇木针 21 a ~ e. When the inspection pulse signal is applied to the west = \ 日守After the predetermined lag time, the detector (0) is used to detect the waveform shown by (C). Therefore, when the detectors 22a to e after the pulse signal for inspection are applied, the signal waveforms are used. After the rate of change is stable between the Japanese temples (#1〇〇") (after the High time range), the A/D converter 26 is executed.

-人^，譬如數次A/D轉換，然後保持著各轉換數位值。 均範圍係同樣的表示為橢圓。 此High時間範圍係只要調查譬如複數基準電路配線的檢 一、果，並檢查偵測器輸出變化率較少的時間帶，使檢查 信號的偵測波形值保持一定以上的位準1時求 ； 少的時間帶並決定之的話便可。 干平乂- People ^, such as several A/D conversions, and then maintain the value of each conversion digit. The average range is expressed as an ellipse. The High time range is to investigate, for example, the check and the fruit of the plurality of reference circuit wirings, and check the time zone in which the detector output change rate is small, so that the detection waveform value of the inspection signal is maintained at a level above a certain level; Less time to bring and decide what to do. Dry flat

1266885 五、發明說明（17) 固ί ，夺間範圍、或_時間範圍亦可非如上述 ，亦可操作者依每個檢查進行變更者。此情 況下，最好執仃對基準電路配線的檢 的臨限電壓值。 I，六疋刦断良莠 所藉由在非接觸到電路配線之偵測器㈣ 述檢查結果決定處理’便可獲得更高可 (其他實施形態） 在以上的說明中，雖例示依每個電路 器的例子進行說明，但是第3盥第4啻絲场丨配置偵測 ♦你渔枯糾斗μ k 1_疋笫弟4貝靶形態的低位準值與 问位皁值的计异控制，即便採用獨立採用其他的 置所Γ乃；等影響’獲得高可靠性的檢查：果。 所以，猎由對如圖6所示構造的檢查裝置 4實施形態的低位準值與高位準值的計算控β仃第與弟 測器偵測值，便可獲得高可靠性的檢查結二 而決疋偵 量的轉換值保持於A/D轉換器中，在結束對/此將既定 查電壓施加控制之後，便可統籌一次/取對^配線的檢 當電腦在處理上尚有充裕能力時，便可計算出〜果，因為 因此亦可壓抑電腦性能而提供廉價的檢查J檢查結果， 【發明之效果】 ~、夏。 依上述所說明的本發明，可提供對所謂 ^ 速檢查的檢查裝置及檢查方法。 〜路配線可南 【元件編號說明】 1 檢查裝置1266885 V. INSTRUCTIONS (17) The ί, the range, or the _ time range may not be as above, or the operator may change according to each inspection. In this case, it is best to perform a threshold voltage value for the inspection of the reference circuit wiring. I. Six 疋 疋 莠 莠 莠 莠 疋 疋 疋 疋 疋 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非The example of the circuit is explained, but the third 盥 4th 啻 丨 丨 丨 丨 ♦ ♦ ♦ 渔 渔 渔 渔 渔 渔 渔 渔 渔 k k k k k 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 Even if it adopts other independent use of the other; it affects 'checks for high reliability: fruit. Therefore, the hunting and the detection of the low level value and the high level value of the inspection apparatus 4 constructed as shown in FIG. 6 can be used to obtain the high reliability check result. The conversion value of the 疋 疋 保持 保持 保持 保持 保持 保持 保持 保持 保持 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋, you can calculate the fruit, because it can also suppress the performance of the computer and provide an inexpensive inspection J inspection results, [effects of the invention] ~, summer. According to the invention as described above, an inspection apparatus and an inspection method for so-called speed inspection can be provided. ~ Road wiring can be south [component number description] 1 inspection device

C:\2D-C0DE\91-07\91108084.ptd 第20頁 1266885 20 檢查裝置 21 探針 2 1 a〜 探針 22a〜 偵測器 23a〜 放大器 24a〜 峰值保持電路 25 選擇器 26 A/D轉換電路 27 電腦 28 鍵盤 61 探針 62 開關電路 63 偵測器 64 放大器 65 峰值維持電路 66 電腦 100 電路基板 101 電路配線 101a 〜e 電路配線 211 CPU 212 ROM 214 RAM 215 硬碟 216 CD-ROM驅動器C:\2D-C0DE\91-07\91108084.ptd Page 20 1668885 20 Inspection device 21 Probe 2 1 a~ Probe 22a~ Detector 23a~ Amplifier 24a~ Peak hold circuit 25 Selector 26 A/D Conversion circuit 27 Computer 28 Keyboard 61 Probe 62 Switch circuit 63 Detector 64 Amplifier 65 Peak hold circuit 66 Computer 100 Circuit board 101 Circuit wiring 101a ~ e Circuit wiring 211 CPU 212 ROM 214 RAM 215 Hard disk 216 CD-ROM drive

C:\2D-C0DE\91-07\91108084.ptd 第21頁 1266885 五、發明說明（19) 217 輸出入介面 219 滑鼠 ϋ__Ι C:\2D-C0DE\91-07\91108084.ptd 第22頁 1266885 "^式 一 " ~ 圖1為本發明第1實施形態之檢查裝置的概略構造圖。 圖2為本發明第1實施形態之檢查對象的電路基板構造 圖。 圖3為本發明第1實施形態的檢查裝置電腦之概略硬體構 造方塊圖。 圖4為利用本發明第1實施形態之檢查裝置，執行具分叉 之電路配線檢查的模式圖。 圖5為本發明第2實施形態之檢查對象的概略構造圖。 圖6為習知檢查裝置的概略圖。C:\2D-C0DE\91-07\91108084.ptd Page 21 1668885 V. Invention description (19) 217 Input and output interface 219 Mouse ϋ__Ι C:\2D-C0DE\91-07\91108084.ptd Page 22 1266885 "^式一" ~ Fig. 1 is a schematic structural view of an inspection apparatus according to a first embodiment of the present invention. Fig. 2 is a structural diagram of a circuit board of an inspection object according to the first embodiment of the present invention. Fig. 3 is a block diagram showing a schematic hardware configuration of an inspection apparatus computer according to a first embodiment of the present invention. Fig. 4 is a schematic view showing the inspection of a circuit wiring having a bifurcation by the inspection apparatus according to the first embodiment of the present invention. Fig. 5 is a schematic structural view of an inspection object according to a second embodiment of the present invention. Fig. 6 is a schematic view of a conventional inspection device.

圖7為供說明本發明第3實施形態之檢查裝置構造用的方 塊圖。 圖8為說明本發明第4實施形態的檢查裝置構造圖。 圖9為供說明本發明第5實施形態之偵測器偵測控制用的 曰序表。Fig. 7 is a block diagram for explaining the structure of an inspection apparatus according to a third embodiment of the present invention. Fig. 8 is a structural view showing an inspection apparatus according to a fourth embodiment of the present invention. Fig. 9 is a timing chart for explaining the detection of the detector of the fifth embodiment of the present invention.

C:\2D-00DE\91-07\91108084.ptd 第23頁C:\2D-00DE\91-07\91108084.ptd Page 23

Claims (1)

1266885 六、申請專利範圍1266885 VI. Application for patent scope 修正_ 193. 5. 2^ 丨餐换本 1.-有： 可將 線之其 可從 偵測出 將上 述檢查 在將比 後，再 經過 並將收 以及 上述 當作上 2. 一 有： 可從 供應機 可從 測出上 經過 並將收 種檢查 脈信 中一端 上述檢 上述檢 述檢查 信號供 較結果 判斷檢 一定時 集信號 判斷機 述偵測 種檢查 檢查對 構； 檢查對 述檢查 一定時 集信號 如申請專 裝置，係檢查電路配線的 號當作檢查信 附近的供應機 查對象電路配 查心號的偵測 信號供應前的 應後的上述偵 與正常電路配 查對象電路配 間後複數次收 的平均當作谓 號’並供應 構； 線的另一端 機構； 上述偵測機 測機構偵測 線時的偵測 線之良否的 集上述偵測 測結果之檢 構係將上述檢查結 機構偵測結果並 '、疋 裝置，係檢杳電路BP ^理 一电峪配線的 象電路配線之其中 檢查裝置，具備 給檢查對象電路配 附近以非接觸方式 構偵測結果，與上 結果進行比較，並 結果進行比較之 判斷機構； 機構的檢查信號， 查結果決定機構； 機構的偵測結果， 〇 檢查裝置，具備 端附近供應檢查信號的 象電路配線之另—端 信號之偵測機構；月I，以非接觸方式 間後複數次收集 的平均當作谓測結= 利範圍第1或2項之檢= 偵 機構的檢查信號， 查結果決定機構。 置’其中’上述檢Amendment _ 193. 5. 2^ 丨 换 换 1. 1. 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有The supply machine can pass the measurement and the end of the inspection pulse signal can be used to check the above-mentioned inspection inspection signal for comparison with the result judgment, and the set signal is judged to be the detection type check inspection check; When a certain time set signal is applied for a special device, it is checked that the circuit wiring number is used as the inspection machine near the inspection letter. The circuit is matched with the detection signal of the heart. The average number of times after the collection is used as the predicate' and the supply structure; the other end of the line; the above detection system detects the quality of the detection line when the line is detected. The detection system of the above detection results will be The above-mentioned inspection result of the detection mechanism and the ', 疋 device, is an inspection device of the circuit wiring of the circuit BP BP BP , , , , , , , 具备 具备 具备 具备 具备Method for detecting the result, comparing with the result, and comparing the result with the judgment mechanism; the inspection signal of the mechanism, the result determination mechanism; the detection result of the mechanism, the inspection device, and the image circuit wiring for supplying the inspection signal near the end The detection mechanism of the other end signal; the monthly I, the average of the multiple collections after the non-contact method is the measurement node = the inspection of the first or second category of the profit range = the inspection signal of the investigation agency, the result determination mechanism . Set 'in the above' (：:\總檔\91\91108084\91108084(替換)-l.pt 第24頁 % 丄勒⑽5 Λ ------^_9Π08084 一修正 曰 六、申請專彻® ' — __ 查結果決定機構係將上 ' '~ 號之最大值與最小值予以^剩機構所偵測出的複數檢查信 均值並當作偵測結果。 除’再求取其餘偵測結果的平 查結果決定：以:1 有或2:之檢查裝置，其*，上述檢 換為所對應之數位信 、上述偵測機構的偵測結果，轉 部所轉換的數位值 火轉換部；並將經上述A/D轉換 上述A/D轉換部係貞剛結果； 號的偵測處理時，可 述谓測機構進行上述檢查信 機構之偵測值，並在& 持著經A/D轉換過的上述伯測 結果。 尤在谓測處理結束後’輸出所保持的轉換 5· 一種檢查方法，#於在 法，包含有： “欢—電路配線之檢查裝置的檢查方 將脈衝信號當作檢杳作 其:一端附近的供❹驟供應給檢查對象電路配線之 偵Ξ ΐ ϊ ί i ί ff路配線之另—端附近’以非接觸方式 、且備將上ϊ:ί驟所供應之檢查信號的偵測步驟； 果二上，查信號供應後的上述偵測步驟之偵測結果進 =李乂，並將比較結果與正常電路配線時的偵測結果進行 '較，而判斷檢查對象電路之良否的檢查結果決定步驟； 以及 上述檢查結果決定步驟係複數次執行利用上述偵測步驟 的檢查信號之偵測，並將經過一定時間後之複數次偵測結 \\八326\總檔\91\91108084\91108084(替換)-l.ptc 第25頁 1266885 _案號91108084_年月曰 修正_ 六、申請專利範圍 果的平均當作偵測結果。 6. —種檢查方法，係檢查電路配線之檢查裝置的檢查方 法，包含有： 將檢查信號供應給檢查對象電路配線之其中一端附近的 供應步驟； 從上述檢查對象電路配線之另一端附近，以非接觸方式 偵測出經上述供應步驟所供應之檢查信號的偵測步驟；以 及 複數次執行上述偵測步驟的檢查信號偵測，並將經過一 定時間後之複數次偵測結果的平均當作偵測結果的檢查結 果決定步驟。 7. 如申請專利範圍第5或6項之檢查方法，其中，上述檢 查結果決定步驟係將上述偵測步驟所偵測出的複數檢查信 號之最大值與最小值予以去除，並求取其餘偵測結果的平 均值，且將其當作偵測結果。(::\总档\91\91108084\91108084 (replace)-l.pt Page 24% 丄勒(10)5 Λ ------^_9Π08084 A revision 曰6, application for the full ® ' — __ check results The institution will use the maximum and minimum values of the ''~ number to determine the average value of the complex inspection signals detected by the remaining institutions as the detection result. In addition to the result of the 'request for the remaining detection results, the decision is made: :1 with or 2: the inspection device, *, the above-mentioned detection is the corresponding digital letter, the detection result of the detection mechanism, the digital value fire conversion unit converted by the rotation portion; and the above A/D Converting the A/D conversion unit to the result of the detection; when detecting the number, the detecting mechanism may perform the detection value of the inspection signal mechanism, and hold the A/D converted result of the above-mentioned test result in & Especially after the end of the measurement process, the output is maintained. 5. An inspection method, #在法, includes: "Happiness - the inspection device of the circuit wiring inspection device uses the pulse signal as the inspection: one end The nearby supply is supplied to the inspection circuit wiring. ΐ ϊ ί i ί ff In the vicinity of the other end, the detection step of the inspection signal supplied by the non-contact method is prepared in the non-contact mode; And comparing the result of the comparison with the detection result of the normal circuit wiring, and determining the result of the inspection result of the inspection target circuit; and the step of determining the inspection result is performed by the inspection signal using the detection step in plurality of times Detect, and after a certain period of time, multiple times to detect the knot \\ eight 326 \ total file \91\91108084\91108084 (replace) - l.ptc page 25 1668885 _ case number 91108084_ year month 曰 correction _ six The average value of the patent application range is taken as the detection result. 6. The inspection method is an inspection method for inspecting the circuit wiring inspection device, and includes: supplying the inspection signal to the supply step near one end of the inspection target circuit wiring a detection step of detecting the inspection signal supplied through the supply step in a non-contact manner from the vicinity of the other end of the inspection target circuit wiring; and a plurality of times The detection signal detection of the above detection step is performed, and the average of the plurality of detection results after a certain period of time is used as the inspection result determination step of the detection result. 7. The inspection method of the fifth or sixth application scope of the patent application The checking result determining step removes the maximum value and the minimum value of the plurality of check signals detected by the detecting step, and obtains an average value of the remaining detecting results, and uses the same as the detection result. . \\A326\總檔\91\91108084\91108084(替換)-l.ptc 第26頁\\A326\Total file\91\91108084\91108084 (replace)-l.ptc Page 26