1258430 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種使微液滴成臈平坦之方法及裝置， 係可應用於製造彩色滤光片、平面自發光顯示器（pled OLED)、生醫檢測晶片（Bj0chip)、印刷電路板（pcB)等微 液滴喷印製程，尤指一種在微液滴噴塗至基板後藉提升其 黏度以便在固化使成膜平坦之技術。 【先前技術】 喷墨列印為一種精細、再現性高的塗佈製程，主要工 作原理是將流體區分為細小等份而形成微液滴，再由喷印 頭驅動至特定的基材上，流體區分等份越細小，解析度高 ，即能夠製作比較精確的圖案。而喷印頭驅動流體的方式 則包括有：熱氣泡式、壓電式喷印等；其中，所謂的熱氣 泡式喷印頭，其動作原理為電訊號在電阻元件轉成熱能， 熱能將流體蒸發為汽態，液態轉成汽態時形成大量的膨脹 而將喷嘴附近的流體推出。而壓電式喷印頭之動作原理為 則由電訊號使壓電元件產生形變，造成腔體的體積變化將 噴嘴附近的流體推出。 然而，微流體喷出形成微液滴之後，經由固化形成圖 、因此八"IL體中的溶劑（水、有機溶劑等）將揮發掉。 如為一般的紙張列印，則溶劑尚可由紙張本身所吸收擴散 仁對於功能性產品（如半導體基材、電路板）即僅能以 揮發的途徑移除溶劑，以致衍生了一些問題： 1258430 微液滴在基材上具有固態、液態、汽態等三個相，其 中固態與液態接觸線的區域能量比液態與汽態接觸線區域 的能量低（散熱快），此外固態與液態接觸線的區域蒸汽 壓比液態與汽態接觸線區域的蒸汽壓低，因此產生液滴周 圍比液滴中心容易固化的現象。此種中心低而四周高起的 狀態，一般稱為咖啡環（coffee ring)。此種不平坦的結構 對於功能性元件具有嚴重的傷害，W001/70506A2專利案 即指出：利用喷墨方法製作元件，會造成兩個嚴重的問題 ，第一個是薄膜（Film)的inhomogeneous問題，第二個問 題是在喷墨塗佈乾燥的過程中，導致的Phase Separation 問題。 為進一步闡釋前述的咖啡環現象，參考文獻（Robert D· Deegan，Olgica Bakajin et al_，“Capillary Flow as the Cause of Ring Stains From Dried Liquid Drops”， Nature，ν〇Ι·389，1997.)解釋了在自然現象中，含有固態 溶質的液體在乾涸後產生咖啡環的現象。其假設在墨水液 滴（Ink Drop)圓周部分的乾涸速度較快，而形成contactBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for flattening microdroplets, which can be applied to the manufacture of color filters, planar self-luminous displays (pled OLEDs), A micro-droplet printing process such as a medical test wafer (Bj0chip) or a printed circuit board (PCB), in particular, a technique in which a micro-droplet is sprayed onto a substrate to enhance the viscosity thereof to cure the film. [Prior Art] Inkjet printing is a fine and highly reproducible coating process. The main working principle is to divide the fluid into small aliquots to form microdroplets, which are then driven by the jetting head onto a specific substrate. The smaller the fluid aliquot is and the higher the resolution, the more accurate the pattern can be produced. The manner in which the printing head drives the fluid includes: thermal bubble type, piezoelectric type printing, etc., wherein the so-called hot bubble type printing head operates on the principle that the electrical signal is converted into thermal energy in the resistive element, and the thermal energy is fluid. Evaporation to a vapor state, a large amount of expansion is formed when the liquid is turned into a vapor state to push out the fluid near the nozzle. The principle of the piezoelectric print head is that the piezoelectric element is deformed by the electric signal, and the volume change of the cavity pushes out the fluid near the nozzle. However, after the microfluid is ejected to form microdroplets, the solvent is formed via solidification, and thus the solvent (water, organic solvent, etc.) in the <"> IL body will volatilize. For general paper printing, the solvent can be absorbed by the paper itself. For functional products (such as semiconductor substrates, circuit boards), the solvent can only be removed by volatilization, which causes some problems: 1258430 The droplet has three phases of solid, liquid, vapor and the like on the substrate, wherein the energy of the solid-liquid contact line is lower than that of the liquid-vapor contact line region (heat dissipation is fast), and the solid-liquid contact line The vapor pressure in the region is lower than the vapor pressure in the liquid and vapor contact line regions, thus producing a phenomenon in which the periphery of the droplet is more easily solidified than the center of the droplet. Such a state in which the center is low and the periphery is raised is generally called a coffee ring. Such an uneven structure has serious damage to functional components. The W001/70506A2 patent indicates that the production of components by the inkjet method causes two serious problems, the first being the inhomogeneous problem of the film. The second problem is the Phase Separation problem caused by the inkjet coating drying process. To further illustrate the aforementioned coffee ring phenomenon, the reference (Robert D. Deegan, Olgica Bakajin et al_, "Capillary Flow as the Cause of Ring Stains From Dried Liquid Drops", Nature, ν〇Ι·389, 1997.) explains In natural phenomena, a liquid containing a solid solute produces a coffee ring after drying. It assumes that the drying speed in the circumferential portion of the ink droplet (Ink Drop) is faster, forming a contact
Line，因而導致毛細現象的產生，造成液滴中央部分的流 體侷限於Free Surface，復因毛細力的拉扯而Replenish 到圓周部分，形成一個類似在中心擠壓（Squeeze)流體向 外的作用，如第六圖所示，揭露有咖啡環的形成過程，當 微液滴70喷塗至一基板80表面，因微液滴70圓周處較 快乾涸’故形成Contact Line 71，且隨著微液滴70的逐 漸固定，Contact Line 71逐漸加厚，終至形成一中央低四 1258430 周南的咖啡環。如第七圖及第八圖所示，其分別揭示一種 發光溶液PF在丨丁〇膜上乾涸後的成膜形狀，其中第七圖 為俯視角度的成膜形狀，第八圖為成膜的剖面厚度示意， 由前列圖中可以明顯看出該咖啡環的具體型態。 而前述參考文獻認為這個機制基本上可以用能量定律 (Power Law)解釋溶質聚集（Mass Dense)在圓周對時間的 關係，只要符合 1·溶劑在基板上的Contact Angle关0。 2·液滴在基板形成Contact Line (亦即含有溶質）。 3·溶劑蒸發（Solvent Evaporation)。 只要符合前列三個條件，即符合這個假說。此外，與 毛細力相比，表面張力梯度（Surface Tension Gradients) 、溶質擴散（Solute Diffusion)、靜電效應（Electrostatic Effect)、地心引力效應（Gravity Effect)等均可忽略。 根據這個假說，模型的邊界條件為：液滴表面的FreeLine, thus causing capillary phenomenon, causing the fluid in the central part of the droplet to be confined to the Free Surface, re-pulling the Replenish to the circumferential portion due to the pulling of the capillary force, forming a similar effect to the outward flow of the Squeeze fluid, such as As shown in the sixth figure, the formation process of the coffee ring is disclosed. When the micro-droplet 70 is sprayed onto the surface of a substrate 80, the contact line 71 is formed due to the faster drying at the circumference of the micro-droplet 70, and the micro-droplet is formed. The gradual fixation of 70, Contact Line 71 gradually thickened, and finally formed a central low four 1258430 Zhounan coffee ring. As shown in the seventh and eighth figures, respectively, the film formation shape of the luminescent solution PF after drying on the ruthenium film is disclosed, wherein the seventh figure is a film formation shape in a plan view angle, and the eighth picture is a film formation. The thickness of the section is indicated, and the specific type of the coffee ring can be clearly seen from the front panel. The foregoing reference suggests that this mechanism can basically use the Power Law to explain the relationship of the mass of the solute (Mass Dense) in the circumference to the time, as long as the contact angle of the solvent on the substrate is zero. 2. The droplet forms a Contact Line on the substrate (ie, contains a solute). 3. Solvent Evaporation. As long as the three conditions listed above are met, this hypothesis is met. In addition, Surface Tension Gradients, Solute Diffusion, Electrostatic Effect, Gravity Effect, etc. can be ignored compared to capillary forces. According to this hypothesis, the boundary condition of the model is: Free of the surface of the droplet
Surface 及圓周的 Contact Line。Evaporation Flux J(r) = -DV φ (r)，其中，D 為 Diffusivity of the Vapor in Air， Φ (r)為Concentration Profile，在離表面無窮遠處，邊界 條件為Φ 00，如接觸基板的表面，則邊界條件為Φ (r) = 〇。 求解後的 J(r)正比於（R_r广λ，λ = (72:-26^)/(272:-20 0， 0 C為接觸角。0 c· 40，λ +1/2。最後導出累積在咖啡環 圓周上的物質（Mass)之方程式為M(R，t) = M(r，0)t2/(1 + A)。當 時間逐漸拉長，液體逐漸乾涸，這個假說的假設過程中， Replenish 的量是固定的（=Constant Evaporation Rate 1258430 J(r)，）。 而前述的假說提供了幾個重要的方向： 1 ·在微液滴喷塗初期，Contact Line將近形成時，微 液滴中的溶質累積現象是可以被忽略的，其意味著蒸發速 度越快越好。 2_黏度（Viscosity)越高，流動的速度越慢，咖啡環的 厚度較寬平，意味著黏性可以稍稍調整。 3. Contact Angle大（表面張力大），蒸發率（Surface and Circle Contact Line. Evaporation Flux J(r) = -DV φ (r), where D is Diffusivity of the Vapor in Air, Φ (r) is Concentration Profile, at infinity from the surface, the boundary condition is Φ 00, such as contact with the substrate For the surface, the boundary condition is Φ (r) = 〇. The solved J(r) is proportional to (R_r λ, λ = (72:-26^)/(272:-20 0, 0 C is the contact angle. 0 c· 40, λ + 1/2. Finally derived The equation for the mass accumulated on the circumference of the coffee ring is M(R,t) = M(r,0)t2/(1 + A). As the time gradually elongates, the liquid gradually dries, the hypothetical process of this hypothesis The amount of Replenish is fixed (=Constant Evaporation Rate 1258430 J(r),). The aforementioned hypothesis provides several important directions: 1 · In the initial stage of micro-droplet spraying, when the Contact Line is near, micro The accumulation of solute in the droplets can be neglected, which means that the faster the evaporation rate, the better. 2_Viscosity, the slower the flow rate, the wider the thickness of the coffee ring, meaning stickiness Can be adjusted slightly. 3. Contact Angle is large (large surface tension), evaporation rate (
Evaporation Rate )越大，溶質流動速度遠小於溶液蒸發 速度，因此溶質在未形成咖啡環前即成膜，因此較不易形 成咖啡環。 4. 液滴濃度越高，會造成成膜厚度增加的不明顯咖啡 環。 而前述的W001/70506A2專利案為解決喷塗液滴的咖 啡環現象，其揭示一種利用吹送氣流的方式以改變微液滴 溶劑的蒸汽濃度梯度，期使邊緣固化速度快，不會形成咖 啡環的結構。此一解決方案呼應了前述假說的第彳個方向 〇 而利用吹送氣流的方式固然克服了咖啡環的困擾，但 微液滴從喷墨頭到達基板之前，其處在半空中時極容易為 陕速的氣流吹到別的位置，造成定位控制的困擾。且氣流 亦谷易4成喷墨頭乾燥，一般來說喷墨頭的噴嘴孔直徑極 小’大部分為10um〜100um之間，因此若一段時間不使用 ’則嘴孔表面因溶液的揮發使得溶質凝固，造成阻塞物而 1258430 阻礙了噴孔的喷墨動作，從而影響到喷墨品質，特別是當 7出的是以有機溶液為溶劑的高分子發光材料，其噴出： 質的良窳更直接影響所製作元件的效率。 由上述可知，喷墨列印方式在喷塗時衍生的咖啡環現 象，就則述專利案提供的技術，雖可獲得解決，但另外衍 生了其他負面問題’顯見該等技術手段仍未盡實用，有關 喷墨列印方式所產生的咖啡環現象，仍有待進一步謀求更 有效的解決方案。 【發明内容】 因此，本發明主要目的在提供一種使微液滴成膜平坦 之方法，主要係令噴塗至不特定基板上的微液滴之黏度提 升，以減緩其溶質的擴散速度，有效地避免或改善在微液 滴圓周累積溶質而形成咖啡環者。 為達成前述目的採取的主要技術手段係令前述方法包 括下列步驟： 提供一基板； 將含有溶質的微液滴喷塗於前述基板上； 對前述基板執行一低溫控制手段，使其表面溫度降低 從而使其表面的微液滴亦降低其溫度； 微液滴在低溫狀態下於基板表面完成固化成膜； 在如述方法中’基板上的微液滴因在低溫控制下，將 造成黏度愈高，表面張力愈低，並使微液滴中的溶質擴散 速度減緩，進而使擴散的毛細力減弱，如此即可有效避免 1258430 微液滴在固化過程中形成咖啡環；利用此一 ’不僅可 解決咖啡環效應’更無已知技術將影響 頭乾燥等問題。 -易使噴墨 前述的低溫控制手段係令一基板置於一調節溫卢的承 載平台上’並與其表面貼合，而該承載平台係可調^表 面溫度’以便使基板溫度降低者。 前述的低溫控制手段係將微液滴溫度冷卻至常溫以下 本發明次一目的在提供一種使微液滴成膜平垣之裝置 ，尤指一種在基板上形成薄膜的裝置。 t 前述薄膜形成裝置至少包括有： 一微液滴產生模組，係用以將流體進一步細微化而產 生微液滴並予喷塗者； 一承載平台，係供容置固定利用喷塗方式形成薄膜的 基板’其位置係相對於前述的微液滴產生模組； 一降溫模組，係對喷塗至基板上的微液滴進行冷卻降 溫，使微液滴溫度低於喷塗前之溫度，以改變微液滴固化 後的成膜型態。 刚述降溫模組係採取熱對流方式使基板上的微液滴溫 度下降。 刖述降溫模組係可降低環境氣體之溫度者。 前述的微液滴產生模組可分別由熱氣泡式喷墨頭、壓 電式喷墨頭、點陣機（Arrayer)、連續式喷墨裝置 (Continuous lnk_Jet)、Liquid Toner、micro_contact 等可 1258430 以產生微小液滴的裝置構成。 程中經由黏度提升而 濾光元件或電連接元 本發明再一星鼓係可應用於在製 具平坦成膜的元件，可為發光元件、 件等。 【實施方式】 首先本發月^供一使微液滴成膜平坦之裝置，具體 而言，係-在基板上形成薄膜的裝置，如第一圖所示:、其 至少包括有： -微液滴產生模組""，係可將流體進一步細微 化以產生微液滴並予喷塗者；其可分別由熱氣泡式喷墨頭 、壓電式喷墨頭、點陣機（Arrayer)、連續式喷墨裝置 (Continuous Ink-Jet)、Liquid Toner、micro_contact 等可 以產生微小液滴的裝置構成； 一承載平台（1 2 )，係供一預定利用喷塗方式形成 薄膜的基板谷置固定其上，其位置係相對於前述的微液滴 產生模組（1 1 ); 一黏度提升升手段，係使滴落基板上的微滴液黏度提 升，於本實施例中，係以一降溫模組對喷塗至基板上的微 液滴進行冷卻降溫，使微液滴溫度低於喷塗前之溫度，以 改變微液滴固化後的成膜型態；該降溫模組可採取熱對流 方式成熱傳導方式使微液滴溫度下降，於本實施例中，其 係透過熱傳導方式降低承載平台（1 2 )的溫度，以間接 地使基板上的微液滴冷卻。 11 1258430 在具體實施例方面，係令一具有圖案設計的基板（2 〇)固定於前述的承載平台（12)上，該承載平台（1 $ )透過降溫模組的冷卻控制，使其表面溫度低於常溫（ 較佳者為2(TC以下），經過—段時間後，基板（2 〇 )的 溫度亦低於常溫，接著含有微粒子的溶液送入微液滴產生 松”且（1 1 )以產生微液滴（丄丄〇 )，而微液滴產生模 組（1 1 )的喷墨頭經施予適當的能量後將含有微粒子的 微液滴（1 1 0 )釋出’而喷塗在基板（2 〇 )的圖案上 ，經揮發乾燥後可形成一層咖啡環現象較不顯著的均勻薄 膜。 如第二圖所不，為高分子發光材料DB_PPV溫度與黏 度之關係圖，由圖中曲線可以明顯看出其溫度越低，黏度 就相對越高，因此，透過前述對於微液滴的降溫冷卻手段 ，可使其黏度提高，從而減緩其溶質的擴散速度，並不易 為毛細力所拉引，以有效改善咖啡環現象。 又如第三圖所示，係本發明一具體可行的實施例，其 用以製作高分子有機發光二極體，主要係於一玻璃基板（ 3 0) ( Deckglaser cover glasses 22X22mm)上覆蓋一 層氧化銦錫膜（3 1 ) ( Indium Tin Oxide，ITO)，接著 將玻璃基板（30)放置固定於受低溫控制的承載平台（ 12)上’承載平台（12)設定溫度12 °C，氧化銦錫膜 (3 1 )表面經溫度量測為14.2°C ;又由熱氣泡式工業用 喷墨頭構成的微液滴產生模組（1 1 )其喷墨卡流道内 係填入調配成溶液狀的高分子發光材料，該高分子發光溶 12 1258430 液為 Dow Chemical 公司之綠色 PF (Poly-fluorescent)， 以〇_7wt%的濃度配置於Anisole溶劑中。經過微液滴產生 模組（1 1 )對噴墨頭施以適當的能量使其作動後，將發 光溶液以85p丨體積大小的微液滴（3 2 )釋出於玻璃基板 (3〇)上的氧化銦錫膜（3 1)表面，釋出微液滴（3 2 )接觸到氧化銦錫膜（3 1 )的低溫表面後，隨即造成 點度提南’經過揮發後，即成一較無咖啡環之成膜形狀， 如第四圖所示係其成膜的輪廓形狀，第五圖則揭示其剖面 厚度的檢測結果，就與前述第八圖所示傳統喷印方式構成 的圖案比較’其成膜表面已顯著的平坦化，而相對的咖啡 環即較不顯著。 透過前述技術可廣泛的應用在大多數利用喷印方式製 作薄膜的場合，就已知技術而言，其大致可應用在下列領 域： 液晶顯示器的彩色濾光片製程與設備。 平面自發光顯示器（PLED, OLED)、主動式發光元件的 製程與設備。 生醫檢測晶片製程與設備。 印刷電路板（PCB)製程與設備。 在前述實施例中，已經揭露了本發明應用在高分子發 光二極體時之薄膜製作，有關發光二極體之製作，以發光 二極體的基本型態，其至少包括有一基板、一佈設於前述 基板上的下電極、一經過平坦化步驟而位於下電極上的發 光薄膜、一與前述發光薄膜電連接的上電極。 13 1258430 上又本發明用於製作遽光元件時，錢提供—基板並 在忒基板上噴印複數的濾光薄膜，而該濾光薄膜在製程中 係經提升溶液的黏度，而使成膜趨於平坦化。 •除則述發光/濾光元件的製作外，本發明亦直接用於 製作構成圖案的可導電元件（如線路、焊墊）等。 由上述可知，本發明主要技術特徵在提供一種物理性 时法以解決噴印微液滴於成膜後產生咖啡環的問題，當 微小的液滴由微液滴產生模組中產生後，並喷塗在承載= 台的基板上，利用降溫模組使微液滴溶液中的溶質擴散速 度減緩，使液滴在乾㈣過程中，其表面張力與黏度受到 此物理性作用力的影響，能維持住大部分的溶質，使其不 致為毛細力吸引到CGntact Line，以破壞其Rep|e_、的 機制’以獲致較為平坦的薄膜。故以前述之發明内容相較 於W〇〇1/70506A2專利案，不致衍生微液滴喷印過程遭快 速氣流吹送易位及喷墨頭容易乾酒之問題，故已具備突出 ^特徵與顯然的進步’並符合發明專利要件，爰依法 甲請。 【圖式簡單說明】 (一）圖式部分 第一圖：係本發明之系統架構示意圖。 第二圖：係高分子發光材料DV_PPV以Anjs〇|e溶劑 成溶液時溫度與黏度之關係曲線圖。 第三圖：係本發明之實施例示意圖。 1258430 第四圖：係前述實施例完成之成膜照片。 第五圖：係前述實施例完成之成膜厚度測試曲線圖。 第六圖：係薄膜上咖啡環的形成過程示意圖。 第七圖：係具咖啡環之成膜照片。 第八圖：係具咖啡環成膜之厚度測試曲線圖。 (二）元件代表符號 (1 1)微液滴產生模組 (1 1 0 )微液滴 (1 2 )承載平台 ⑩ (2 0 )基板 - (3 0 )玻璃基板 (3 1 )氧化銦錫膜 (3 2 )微液滴The larger the Evaporation Rate, the much faster the solute flow rate is than the solution evaporation rate, so the solute forms a film before the coffee ring is formed, so it is less likely to form a coffee ring. 4. The higher the droplet concentration, the less pronounced coffee ring that causes an increase in film thickness. The aforementioned W001/70506A2 patent is a coffee ring phenomenon for spraying droplets, which discloses a method of using a blowing airflow to change the vapor concentration gradient of the microdroplet solvent, so that the edge curing speed is fast, and no coffee ring is formed. Structure. This solution echoes the first direction of the above hypothesis and uses the method of blowing air to overcome the trouble of the coffee ring. However, before the droplet reaches the substrate from the inkjet head, it is easy to be in the middle of the air. The rapid airflow blows to other locations, causing troubles in positioning control. And the airflow is also easy to dry 40% of the inkjet head. Generally speaking, the nozzle hole diameter of the inkjet head is extremely small 'mostly between 10um and 100um, so if it is not used for a period of time, the surface of the nozzle hole is evaporated due to the evaporation of the solution. Solidification, causing obstructions and 1258430 hinder the inkjet action of the orifice, thus affecting the quality of the inkjet, especially when the polymer luminescent material is a solvent based on an organic solution, and the squirting: the quality of the sputum is more direct Affect the efficiency of the components produced. It can be seen from the above that the phenomenon of the coffee ring derived from the inkjet printing method during the spraying process, although the technology provided by the patent case can be solved, but other negative problems have been derived. It is obvious that the technical means are still not practical. Regarding the coffee ring phenomenon caused by the inkjet printing method, it is still necessary to further seek a more effective solution. SUMMARY OF THE INVENTION Accordingly, it is a primary object of the present invention to provide a method for flattening microdroplets into a film, mainly to increase the viscosity of microdroplets sprayed onto an unspecified substrate to slow down the diffusion rate of the solute thereof, effectively Avoid or improve the accumulation of solutes on the circumference of the microdroplets to form a coffee ring. The main technical means for achieving the foregoing object is that the method comprises the steps of: providing a substrate; spraying a droplet containing solute onto the substrate; performing a low temperature control on the substrate to lower the surface temperature thereof The micro-droplets on the surface also reduce the temperature thereof; the micro-droplets are solidified to form a film on the surface of the substrate at a low temperature; in the method as described, the micro-droplets on the substrate will cause higher viscosity due to low temperature control. The lower the surface tension, the slower the diffusion rate of the solute in the microdroplets, and the weaker the capillary force of the diffusion, so that the 1258430 microdroplets can be effectively prevented from forming a coffee ring during the curing process; The coffee ring effect 'is less known to affect the head drying and other issues. - Easily make the ink jet The aforementioned low temperature control means that a substrate is placed on a load-bearing platform of the temperate and adhered to the surface thereof, and the load-bearing platform is adjusted to the surface temperature to lower the temperature of the substrate. The aforementioned low temperature control means cools the temperature of the microdroplet to below normal temperature. The second object of the present invention is to provide a device for forming a film into a flat film, in particular, a device for forming a film on a substrate. The foregoing film forming apparatus comprises at least: a micro-droplet generating module for further miniaturizing the fluid to generate micro-droplets and pre-spraying; a carrying platform for accommodating and fixing by spraying The substrate of the film is positioned relative to the micro-droplet generation module described above; a cooling module cools and cools the micro-droplets sprayed onto the substrate, so that the temperature of the micro-droplet is lower than the temperature before spraying To change the film formation pattern after the micro droplets are solidified. Just as the cooling module is in thermal convection, the temperature of the microdroplets on the substrate is lowered. The cooling module is used to reduce the temperature of the ambient gas. The aforementioned micro-droplet generating module can be respectively composed of a thermal bubble type inkjet head, a piezoelectric inkjet head, an arrayer, an continuous inkjet device (Continuous lnk_Jet), a Liquid Toner, a micro_contact, etc., 1258430 A device that produces tiny droplets. In the process, the filter element or the electrical connection element is improved by the viscosity. The further one of the present invention can be applied to an element which is formed into a flat film, and can be a light-emitting element, a member or the like. [Embodiment] Firstly, the present invention provides a device for flattening microdroplets, specifically, a device for forming a thin film on a substrate, as shown in the first figure: at least: The droplet generation module "" can further refine the fluid to produce micro-droplets and pre-spray; respectively, which can be composed of a thermal bubble type inkjet head, a piezoelectric inkjet head, and a dot matrix machine ( Arrayer), continuous inkjet device (Continuous Ink-Jet), Liquid Toner, micro_contact, etc., which can produce tiny droplets; a carrier platform (12) for a substrate valley that is intended to be formed by spraying Positioned thereon, the position is relative to the aforementioned micro-droplet generating module (1 1 ); a viscosity lifting and raising means is to increase the viscosity of the droplets on the dripping substrate, in this embodiment, a cooling module cools and cools the micro-droplets sprayed onto the substrate, so that the temperature of the micro-droplets is lower than the temperature before spraying, to change the film-forming pattern after the micro-droplets are solidified; the cooling module can be adopted Thermal convection is a way of heat conduction to lower the temperature of the microdroplets In this embodiment, the temperature of the carrier platform (12) is lowered by thermal conduction to indirectly cool the droplets on the substrate. 11 1258430 In a specific embodiment, a patterned substrate (2 〇) is fixed on the aforementioned carrying platform (12), and the carrying platform (1$) passes through the cooling control of the cooling module to make the surface temperature thereof Below normal temperature (preferably 2 (TC or less), after a period of time, the temperature of the substrate (2 〇) is also lower than normal temperature, and then the solution containing the microparticles is sent to the micro droplets to produce looseness and (1 1 ) Producing micro-droplets (丄丄〇), and the ink-jet head of the micro-droplet generating module (1 1 ) releases the micro-droplets (1 1 0 ) containing microparticles after applying appropriate energy On the pattern of the substrate (2 〇), after evaporation and drying, a uniform film with less pronounced coffee ring phenomenon can be formed. As shown in the second figure, the relationship between temperature and viscosity of the polymer luminescent material DB_PPV is shown in the figure. It can be clearly seen from the curve that the lower the temperature, the higher the viscosity. Therefore, the above-mentioned cooling means for the micro-droplets can increase the viscosity, thereby slowing the diffusion rate of the solute, and is not easy to be pulled by the capillary force. Lead to effective improvement of coffee As shown in the third figure, a specific feasible embodiment of the present invention is used for fabricating a polymer organic light-emitting diode, mainly on a glass substrate (30) (deckglaser cover glasses 22X22mm). Covering a layer of Indium Tin Oxide (ITO), and then placing the glass substrate (30) on the low temperature controlled load bearing platform (12). The carrying platform (12) is set at a temperature of 12 °C. The surface of the indium tin oxide film (3 1 ) is measured by a temperature measurement of 14.2 ° C; and the micro-droplet generation module (1 1 ) composed of a thermal bubble type industrial inkjet head is filled in the inkjet card flow channel. A solution-like polymer luminescent material, the polymer luminescent solution 12 1258430 is a green PF (Poly-fluorescent) of Dow Chemical Co., Ltd., and is disposed in an Anisole solvent at a concentration of 〇7 wt%. (1 1 ) After applying an appropriate energy to the ink jet head to actuate, the luminescent solution is released into the indium tin oxide film on the glass substrate (3 〇) by the micro droplets (3 2 ) of the volume of 85 丨 ( 3 1) Surface, releasing micro-droplets (3 2 ) into contact with indium tin oxide film ( After the low temperature surface of 3 1 ), it will cause the degree of mentioning the south. After volatilization, it will form a film shape with no coffee ring. As shown in the fourth figure, the contour shape of the film is formed. The fifth figure reveals its shape. The detection result of the section thickness is compared with the pattern formed by the conventional printing method shown in the eighth figure, 'the film-forming surface has been significantly flattened, and the opposite coffee ring is less noticeable. The above technology can be widely applied. In most cases where a film is produced by a printing method, it is generally applicable to the following fields in the known art: color filter process and equipment for liquid crystal displays. Process and equipment for planar self-luminous displays (PLED, OLED), active light-emitting components. Biomedical testing wafer processing and equipment. Printed circuit board (PCB) processes and equipment. In the foregoing embodiments, the film fabrication of the present invention applied to a polymer light-emitting diode has been disclosed. With regard to the fabrication of the light-emitting diode, the basic form of the light-emitting diode includes at least one substrate and one layout. a lower electrode on the substrate, a light-emitting film on the lower electrode through a planarization step, and an upper electrode electrically connected to the light-emitting film. 13 1258430 In the invention, when the invention is used for fabricating a calendering component, the substrate is provided and a plurality of filter films are printed on the substrate, and the filter film is cured by the viscosity of the solution during the process. It tends to be flat. • In addition to the fabrication of the illuminating/filtering elements, the present invention is also directly used to fabricate conductive elements (e.g., wiring, pads) that form a pattern. It can be seen from the above that the main technical feature of the present invention is to provide a physical time method to solve the problem that the printed droplets generate a coffee ring after film formation, when tiny droplets are generated by the microdroplet generating module, and Spraying on the substrate of the load-bearing table, using the cooling module to slow down the diffusion rate of the solute in the micro-droplet solution, so that the surface tension and viscosity of the droplet during the dry (four) process are affected by the physical force. Most of the solutes are maintained so that they do not attract capillary forces to the CGntact Line to destroy the mechanism of their Rep|e_, to achieve a flatter film. Therefore, compared with the W〇〇1/70506A2 patent case, the above-mentioned invention does not cause the problem that the derivative micro-droplet printing process is blown by the rapid airflow and the inkjet head is easy to dry, so it has outstanding features and obvious The progress 'and meet the requirements of the invention patent, 爰 legally please. [Simple diagram of the diagram] (1) Schematic part The first diagram is a schematic diagram of the system architecture of the present invention. The second figure is a graph showing the relationship between temperature and viscosity when the polymer luminescent material DV_PPV is dissolved in Anjs〇|e solvent. Third Figure: is a schematic view of an embodiment of the present invention. 1258430 The fourth figure is a film-forming photograph completed in the foregoing embodiment. Fig. 5 is a graph showing the film thickness test performed in the foregoing embodiment. Figure 6: Schematic diagram of the formation process of the coffee ring on the film. Figure 7: Filming photo of the coffee ring. Figure 8: Thickness test curve of the film formed by the coffee ring. (2) Component Representation Symbol (1 1) Microdroplet Generation Module (1 1 0) Microdroplet (1 2 ) Carrying Platform 10 (20) Substrate - (3 0) Glass Substrate (3 1 ) Indium Tin Oxide Membrane (3 2 ) microdroplets
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