TWI239872B

TWI239872B - Method for washing reverse osmosis membrane, and waste water recovering method using this method

Info

Publication number: TWI239872B
Application number: TW92130005A
Authority: TW
Inventors: Kai-Yi Liu; Qua-Lin Chen; Kuo-Min Hsu
Original assignee: Winbond Electronics Corp
Priority date: 2003-10-29
Filing date: 2003-10-29
Publication date: 2005-09-21
Also published as: JP4180019B2; TW200514629A; JP2005131630A

Abstract

A method for washing the reverse osmosis membrane comprises the steps of: feeding a chemical into a reverse osmosis membrane; allowing the reverse osmosis membrane containing the chemical to stand; conducting flushing the reverse osmosis membrane at a low pressure and then at a high pressure; and causing a microvibrating phenomenon of the reverse osmosis membrane while maintaining the high pressure state. A method for recovering waste water is also disclosed.

Description

12398721239872

發明所屬之技術領域：本發明係有關於一種半導體 :是有關於-種快速清洗廢水回以: 之處理程序，特之逆滲透膜的方先前技術：半導體製程的廢水係分成I c製、生生的廢水，在1C製造時，由於產品===封裝製程中所產不相同’因此’排出的廢水中所含化；2雜，冑程組合多當複雜，其中大部分是以純水清洗f:物質種類變化也相溫室效應氣體燃燒破壞之洗滌等程=、去光阻、蝕刻及分為酸鹼廢水及含氟廢水，其中主排放的，一般可略離子、懸浮固冑、強氧化物2氟離J。份為有機物、金屬另外，在IC封裝的過程中割、電鍍、浸錫、清洗過程所分成研磨廢水、脫脂廢水、酸屬廢水等，而水中主要的污染脂、有機物及重金屬（Cu、N i) 所產生的污染廢水則包括切產生的廢水，依廢水種類可驗廢水、氰化物廢水及重金物質包括了懸浮固體、油上述的製程廢水，若能透過有效的廢水回收系統加以處理，將可恢復產生水質合乎標準的回收水，繼續供應廠區例如製程用水、間接冷卻用水、產品與半成品或原料清洗用水、空間與生產機械清洗用水、傳輸用水、原料用水、鍋爐用水、直接冷卻用水、空調或溫濕度控制用水等的使用，而大幅降低I c製造業的生產成本，並避免對環境的嚴重危害。The technical field to which the invention belongs: The present invention relates to a semiconductor: a process for quickly cleaning waste water and returning it to: a process for reverse osmosis membranes. Prior art: The waste water system of the semiconductor process is divided into I c and In the manufacture of 1C, because the product === is produced in the packaging process is not the same as the 'so' contained in the discharged wastewater; 2 miscellaneous, the process combination is more complicated, most of which is washed with pure water f : The change in the type of substance is also equivalent to the washing process of greenhouse gas combustion and destruction =, photoresist removal, etching, and divided into acid and alkali wastewater and fluorine-containing wastewater, of which the main emissions are generally slightly ionized, suspended solids, strong oxides 2Fluoride from J. It is divided into organic matter and metal. In addition, it is divided into grinding wastewater, degreasing wastewater, acid wastewater, etc. in the process of IC packaging, cutting, electroplating, tin dipping, and cleaning. The major pollutants in the water, organic matter and heavy metals (Cu, Ni, etc.) ) The polluted wastewater produced includes the wastewater generated by cutting. The wastewater that can be inspected according to the type of wastewater, cyanide wastewater and heavy gold materials include suspended solids and oil. The above-mentioned process wastewater can be treated through an effective wastewater recovery system. Recovered water with qualified water quality will be recovered and continue to be supplied to plant areas such as process water, indirect cooling water, products and semi-finished products or raw material cleaning water, space and production machinery cleaning water, transmission water, raw material water, boiler water, direct cooling water, air-conditioning or Temperature and humidity control the use of water, etc., and greatly reduce the production cost of I c manufacturing, and avoid serious harm to the environment.

0492-10245TWF(N1);92-027;DAVID.ptd0492-10245TWF (N1); 92-027; DAVID.ptd

1239872 過濾塔及該粒的雜質’ 濾塔流出之逆渗透膜為因此，可獲此一製程廢系統中的逆成結垢而阻的技術，將回收系統的先，將逆滲為一特定濃體需要一曰洗逆滲透膜洗步驟’由於清洗完成濟又無效率須更大用水，半導體薇區所使。首先，將一製程渡塔濾膜的孔洞尺一過濾塔流出之過過濾塔’而該第二一孔洞得水質水的回滲透膜塞濾膜使濾膜運作。透膜通度的強的時間，而完於前後後，該的清洗量的同用的廢水回收系統，包括廢水導入一第一過濾塔寸大體為20〜100毫米，接濾液續導入另一過濾塔過渡塔滤膜的孔洞尺寸大濾程序後，原廢可被初步的濾除。接著，逆滲透膜的過濾之濾膜系統，例再利用標準的回五、發明說明（2) 一般來說下列數個步驟中，該第一過自該第，即一第二為2〜1 0毫米經該第一較大顆第二過由於該 10埃，而完成 .因回收極易形滲透膜響整體述，首藥劑可統上大快壓沖上述的清時間，且經常實為一既不經曰益繁複，亟第二過濾、塔的過應大體過濾液續導入一尺寸更微合乎製程收程序。的高頻率，此時若的壽命因習知清洗入一藥劑鹼，接著，之後，成此一清過程大體濾膜仍存方法。面時，勢必使用，遂在孔洞無法提供一有效此快速終止，而逆滲透膜的方法 ’大體2 0分鐘，，靜置該逆滲透先以慢壓沖洗，洗程序。需要耗費兩曰的有阻塞的現象，對半導體的製程要開發出一種有1239872 Filter tower and the impurities of the pellet 'The reverse osmosis membrane flowing out of the filter tower is therefore, the technology of reverse scale formation in the process waste system can be obtained, and the reverse osmosis of the system will be reversed to a specific concentration. The body requires a step of washing the reverse osmosis membrane, 'because the washing is completed and inefficient, more water is required, which is caused by the semiconductor region. Firstly, the hole diameter of a process membrane of a process tower and the flow out of a filter tower pass through the filter tower ', and the second hole obtains the water quality and the water back of the permeation membrane and plugs the filter membrane to operate the filter membrane. The time of strong permeability of the membrane, after the completion of the before and after, the same amount of wastewater recovery system used for the cleaning amount, including the introduction of wastewater into a first filter tower is generally 20 ~ 100 mm, followed by the filtrate to another filter After the pore size of the filter membrane of the tower transition tower is large, the original waste can be filtered out initially. Next, the filtration membrane system of the reverse osmosis membrane is exemplified by the standard. Back to the fifth, the description of the invention (2) Generally, in the following steps, the first pass from the first, that is, the second is 2 ~ 1 0 mm is completed by the first larger particle due to the 10 angstrom. Due to the recovery of the highly permeable membrane, the first agent can be used to quickly flush the above clearing time, and it is often one. It is neither complicated nor complicated, and the second filtration and the filtration of the tower should be generally introduced into a filtration solution with a size that is more in line with the process collection procedure. High frequency, at this time if the life is due to the conventional cleaning into a drug alkali, and then, after this, the process of cleaning the filter membrane generally remains the method. It is bound to be used when it is on the surface, so it can not provide an effective fast termination in the hole, and the reverse osmosis membrane method is generally 20 minutes, and the reverse osmosis is left to stand. Rinse with slow pressure first, washing procedure. It takes two days, there is a blocking phenomenon. For the semiconductor process, a kind of

I 0492-10245TWF(Nl)；92-027;DAVID.ptd 第6頁 1239872 五、發明說明（3) 效清洗逆滲透膜的方法，使濾膜雖因負載水量的增加，由於實施一有效、得宜的清洗步驟，仍可在廢水回收的系統中繼續提供可過濾水質的功能。目前諸多半導體廠，為延長逆滲透膜壽命，降低其對雜質的負載程度，在前處理階段例如上述所提之第一過濾塔以及第二過濾塔過濾程序的前後，會加設如活性碳塔、離子父換樹脂塔、微過濾膜、超過滤膜或紫外光燈等的設備’以期提升過濾液於此階段時的水質。但同時卻須負擔支曰加a又備及操作運轉上額外多出的成本或是如活性碳、離子父換樹脂塔、微過濾膜、超過濾膜等耗材的大量使用，此些均不符合產業上要求低成本的考量。發明内容： ^鑑於此，本發明的目的在於提供一種對逆滲透膜的術，除可大幅改善清洗效果，⑨長濾膜的使用損免去加設其他過濾儀器造成的繁複程序及成技術本I明Ϊ:一種清洗逆滲透膜的方法，藉特殊的清洗根據上述目的，本發明提；其=慮水功效。法’包括下列步驟：將二二：：種清洗逆渗透膜的方該藥劑之該逆渗透膜靜置處」，；；逆=膜中，將含有壓’進行對該逆渗透膜之沖洗，由低壓至高態，並使該逆㈣膜產生—微震=’ m料-高壓狀之同時，進行對排出水質導電j:i、;且於產生微震現象第7頁 0492-10245TWF(Nl);92-027;DAVID.ptd 1239872 五、發明說明（4) 本發明清洗逆滲透腺Μ 〜〜- 間，與習知技術動軏—、、^驟，大體僅耗費兩小時的日士時、高效率的優點，且清先時間相較，實具τ 根據上述目的，“ίίΐ較傳統方法為佳。包括下列步驟：將廢水‘提供-種廢水回收的方法，系統之廢水導入一逆匕裝i，續將流出該過％系統汰換之逆滲透膜，且該該逆滲透膜係為—純水驟之清洗而達到再利用t =可藉由-快迷清洗步該逆滲透膜過濾後所得之回:。=廢水經該過濾裝置以及水回收之程序。 7導入一產水塔，以完成廢 -過濾塔』1ΐ】於：J理階段的過濾系統，，包括-第無在其中加設上極=的過滤單元，並膜、超過遽膜或紫外光；；任f奥樹脂塔、微過滤降低製程操作上的成本，4任何額外的過遽設備，明顯可此=，由於使用的逆滲透膜為一純水系統汰換的濾、丄不僅無須購置新的逆滲透膜組件，最終濾出的回收水 κ貝亦可獲得更佳品質的保證，此係由於純水系統的濾膜均較一般廢水系統所使用的濾膜具更細微之過濾孔洞。為讓本發明之上述目的、特徵和優點能更明顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳細說明如下：實施方式：實施例請參閱第2圖，根據本發明之一實施例，清洗逆滲透 ml 0492-10245TWF(Nl);92-027;DAVID.ptd 第8頁 1239872 五、發明說明（5) 膜的方法。本方法在清洗逆滲透膜丨2〇之前，合一清洗藥劑的準備工作，#驟如下所述，首先，曰啟」丁幫浦20 0 ’並開啟閥1，使過濾液25〇流：广逆滲透膜120-1。愛力錶P1 ’進入若此時自逆滲透膜120-1排出之過濾液的水程用水的標準，則直接經閥丨丨通過流量計F4，入σ ^旦儲=，⑽製程上使用，或是由*支管線（經閥8通過 ΓΛ及^10)，進人暫存塔140儲存，期間亦可開啟 V,丄t 一中和廢水處理系統150。其餘無法通過逆二，膜120-1之廢液則繼續導入另一逆滲透膜i2〇—2再過濾一次，此時自逆滲透膜丨2 〇 — 2排出之過濾液導入上述逆 /夕透膜1 2 0 1排出之過據液中’另無法通過逆滲透膜1 2 〇一 2 之廢液，則經閥3、流量計F 1以及閥4流入一中和廢水處理系統150 °另一分支管線經閥5、流量計F2以及閥6注入一〉月洗塔230 ’作為清洗逆滲透膜1 20時使用。清洗藥劑2 40 準備工作的前置作業是清洗清洗塔2 30，開啟閥5，使流經閥5、流量計F 2以及閥6進入一清洗塔2 3 0，同時開啟閥 1 6 °上述過程中將調整閥5，使流量計F2的計數範圍保持在3〜5噸/小時，較佳值為4噸/小時。待清洗塔2 3 0内壁無積垢且流入塔内的過濾液無氣泡時’可進行下一步驟。以上清洗清洗塔2 3 〇的時間，大體為0 . 5〜3小時，較佳控制在】小時。接著，調製特定濃度的清洗藥劑24〇存放於清洗塔230 中，步驟如下，首先，關閉閥16，待流入清洗塔23 0中之I 0492-10245TWF (Nl); 92-027; DAVID.ptd Page 6 12398872 V. Description of the invention (3) The method of cleaning the reverse osmosis membrane efficiently, so that the filter membrane is effective and appropriate due to the increase in the amount of water loaded. The cleaning step can still provide the function of filtering water quality in the wastewater recovery system. At present, many semiconductor factories, in order to extend the life of the reverse osmosis membrane and reduce its load on impurities, such as the first filter tower and the second filter tower mentioned above before and after the filtration process, will be installed such as activated carbon tower The equipment of ion exchange resin tower, micro-filtration membrane, ultra-filtration membrane or ultraviolet lamp 'is used to improve the water quality of the filtering liquid at this stage. But at the same time, it must bear the additional costs of preparation and operation, or the large use of consumables such as activated carbon, ion-exchange resin tower, microfiltration membrane, ultrafiltration membrane, etc., which do not meet the requirements. Industry requires low cost considerations. Summary of the invention: ^ In view of this, the object of the present invention is to provide a technique for reverse osmosis membrane, which can greatly improve the cleaning effect. The use of long filter membranes avoids the complicated procedures and technical costs caused by adding other filter instruments. I. Ming: A method for cleaning reverse osmosis membranes. According to the above purpose, the present invention is provided by special cleaning. The method includes the following steps: the second and the second: a method for cleaning the reverse osmosis membrane, where the reverse osmosis membrane of the agent is left at rest ";; the reverse = membrane, which contains pressure, to rinse the reverse osmosis membrane, From low pressure to high state, and make the inverse diaphragm produce-micro-vibration = 'm material-high-pressure, at the same time, conduct conductivity to the discharged water quality j: i ,; and generate micro-vibration phenomenon page 7 0492-10245TWF (Nl); 92 -027; DAVID.ptd 1239872 V. Description of the invention (4) The present invention cleans the reverse osmosis gland M ~~-, and uses conventional techniques to move on,-, and ^ -steps, which generally takes only two hours of Japanese Shishi, high efficiency According to the above purpose, "ί“ is better than the traditional method. It includes the following steps: waste water is provided-a method of waste water recovery, and the waste water of the system is introduced into a reverse dipper. The reverse osmosis membrane replaced by the over% system will continue to flow out, and the reverse osmosis membrane is-pure water cleaning to achieve reuse t = can be obtained by-quick cleaning step after the reverse osmosis membrane filtration Back:. = The wastewater is passed through the filtration device and the water recovery process. 7 Into a water production tower In order to complete the waste-filtration tower "1ΐ" in: the filtration system in the J-stage, including-the first filter unit with an upper pole = added, and the membrane, exceeding the membrane or ultraviolet light; Towers and microfiltration reduce the cost of process operation. 4 Any additional filtration equipment can obviously do this. Since the reverse osmosis membrane used is a pure water system, the filtration and membrane filtration do not only need to purchase a new reverse osmosis membrane module. The final filtered recycled water κ shell can also obtain better quality assurance, because the filter membranes of the pure water system have finer filter holes than the filter membranes used in general wastewater systems. The purpose, features and advantages can be more clearly understood. The following is a detailed description of a preferred embodiment and the accompanying drawings as follows: Implementation: Please refer to FIG. 2 for an embodiment. According to an embodiment of the present invention, , Cleaning reverse osmosis ml 0492-10245TWF (Nl); 92-027; DAVID.ptd page 8 12389872 5. Description of the invention (5) membrane method. This method combines cleaning agents before cleaning reverse osmosis membrane 20 Of the preparation work, as described below, First, said Kai "butoxy pump 200 'and open the valve 1, so that filtrate flows 25〇: 120-1 wide reverse osmosis membrane. Love table P1 'If it enters the standard of water used in the filtration process discharged from the reverse osmosis membrane 120-1 at this time, it will directly pass through the valve through the flow meter F4, and enter σ ^ denier =, for use in the production process, Or it can enter the temporary storage tower 140 for storage through the * branch pipeline (passing through ΓΛ and ^ 10 through valve 8), and V, 丄 t can be turned on to neutralize the wastewater treatment system 150 during the period. The rest cannot pass through the reverse second, the waste liquid of the membrane 120-1 continues to be introduced into another reverse osmosis membrane i20-2 and filtered again, at this time, the filtered liquid discharged from the reverse osmosis membrane 20-2 is introduced into the above reverse / night osmosis. Membrane 1 2 0 1 discharged in the liquid according to the other 'would not be able to pass through the reverse osmosis membrane 1 2 0 2 waste liquid, then flow through valve 3, flowmeter F 1 and valve 4 into a neutral wastewater treatment system 150 ° another The branch line is injected into valve 1 through the valve 5, the flowmeter F2, and the valve 6> The month washing tower 230 'is used to clean the reverse osmosis membrane 120. Cleaning agent 2 40 The preparatory work for the preparation is cleaning the cleaning tower 2 30, opening the valve 5 to flow through the valve 5, the flowmeter F 2 and the valve 6 into a cleaning tower 2 30, and simultaneously opening the valve 16 °. The intermediate control valve 5 adjusts the counting range of the flow meter F2 to 3 to 5 tons / hour, and the preferred value is 4 tons / hour. When the inner wall of the cleaning tower 230 has no scale and the filtered liquid flowing into the tower has no bubbles', the next step can be performed. The time for cleaning the cleaning tower 2 300 above is generally 0.5 to 3 hours, and is preferably controlled to】 hours. Next, a specific concentration of cleaning agent 24 is prepared and stored in the cleaning tower 230. The steps are as follows. First, the valve 16 is closed, and it flows into the cleaning tower 230.

0492-10245™F(Nl);92-027;DAVID.ptd 第9頁 1239872 五、發明說明（6) 過滤液體積累積至大體1 0 0 0〜1 4 0 0升時，再關閉閥5，續開啟閥15，加入大體60〜100升，較佳為8〇升的清洗藥劑2 4() 於清洗塔230中，加入清洗藥劑2 40的體積量，可由加藥機的設定加以控制，例如加藥速率4升/分鐘，持續2 0分鐘。之後，關閉加藥機及閥1 5。此處所使用的清洗藥劑2 4 0，原為例如氫氧化鈉 (NaOH)或氫氧化鉀（KOH)等的強鹼，經稀釋調製後始成為酸鹼度大體介於12〜14，重量百分濃度大體介於2〜5 %，較佳為2. 8 %的清洗藥劑24 0。之後’關閉閥1 2 ’開啟閥1 3、閥1 4以及清洗幫浦 2 2 0，進行一内循環程序，以使清洗塔2 3 0中的清洗藥劑 2 4 0得以充分混合’持續大體5〜1 0分鐘，完成後關閉清洗幫浦22 0。以上即完成此清洗藥劑24 0的準備工作。接下來，開始進行對逆滲透膜1 20的清洗程序，首先，進行通藥，關閉閥1、閥3、閥8、閥11及閥13，開啟閥2、閥5及閥1 2，確認所有閥開、關無誤，再開啟清洗幫浦2 2 0，使清洗藥劑2 4 0進入逆滲透膜系統1 2 0，為避免清洗藥劑240流入產水塔130破壞水質，關閉閥3，開啟閥5，可使清洗藥劑240導回清洗塔230得以在此循環的迴路中徹底執行清洗的工作，此通藥步驟歷時大體2 0〜4 0分鐘，清洗幫浦的工作功率大體為7〜1 0嘲/小時。隨後，關閉清洗幫浦22 0，靜置含有清洗藥劑240的逆滲透膜120大體20〜分鐘，之後，開啟閥1 6排水。續藉由對閥1的調整，達到進水壓力P1逐步升高的效0492-10245 ™ F (Nl); 92-027; DAVID.ptd Page 91239875 V. Description of the invention (6) When the volume of the filtering fluid has accumulated to approximately 1 0 0 0 ~ 1 4 0 0 liters, the valve 5 is then closed, Continue to open the valve 15, and add 60 ~ 100 liters, preferably 80 liters of cleaning agent 2 4 () to the cleaning tower 230, and add the volume of the cleaning agent 2 40, which can be controlled by the setting of the dosing machine, for example Dosing rate is 4 liters / minute for 20 minutes. After that, close the dosing machine and valve 15. The cleaning agent 2 40 used here is originally a strong base such as sodium hydroxide (NaOH) or potassium hydroxide (KOH). After dilution and preparation, it will have a pH of approximately 12-14 and a concentration of approximately 100% by weight. 8% 的 cleaning agents 24 0。 Between 2 ~ 5%, preferably 2.8% of cleaning agents. Then 'close valve 1 2' open valve 1 3, valve 1 4 and cleaning pump 2 2 0, and perform an internal circulation process so that the cleaning agent 2 4 0 in the cleaning tower 2 3 0 can be fully mixed 'continued to roughly 5 ~ 10 minutes, close the cleaning pump 22 0 after completion. This completes the preparation of the cleaning agent 240. Next, start the cleaning procedure for the reverse osmosis membrane 120. First, perform the medicine flow, close valve 1, valve 3, valve 8, valve 11, and valve 13, open valve 2, valve 5, and valve 12, and confirm all The valve is opened and closed correctly, and then the cleaning pump 2 2 0 is opened, so that the cleaning agent 2 4 0 enters the reverse osmosis membrane system 1 2 0. In order to prevent the cleaning agent 240 from flowing into the water production tower 130 to damage the water quality, the valve 3 is closed and the valve 5 is opened. The cleaning agent 240 can be led back to the cleaning tower 230 to thoroughly perform the cleaning work in the loop of this cycle. This medicine passing step takes approximately 20 to 40 minutes, and the working power of the cleaning pump is generally 7 to 10. hour. Subsequently, the cleaning pump 220 is closed, and the reverse osmosis membrane 120 containing the cleaning agent 240 is left to stand for approximately 20 minutes, and then the valve 16 is opened to drain water. Continued to adjust the valve 1 to achieve the effect of gradually increasing the inlet pressure P1

0492-10245TW(Nl);92-027;DAVID.ptd 第 10 頁 12398720492-10245TW (Nl); 92-027; DAVID.ptd page 10 1239872

皮！閉閥2，開啟高壓幫浦200及閥1，#中對閥1 ϊ ⑴壓力:3〜7公斤/平方厘米力· = ·7〜10公斤/平方厘米，時間：2〜5分鐘。（3)壓 F2内的^方f米，時間：2〜5分鐘。同時觀察流量計 P比f^ Γ ^，若由淡變濃再變淡’則表示已完成此一周即。隨即關閉閥5，開啟閥3排水，將清洗藥 M240及处滲透膜12〇上的雜質一併排出。士 μ 著，將閥1丨微開，並調整閥1，使壓力錶1"1維持在〜13公斤/平方厘米持續大體0· 5〜1· 5小時，此時，甘於閥11的開啟’逆滲透膜組件1 20會產生微震現象並將上的結垢物同時帶出。上述清洗程序大體少於一天，較佳控制為40分鐘〜2小時。 & —期Fj間隔一段時間後，可開啟閥5大體5秒再關閉，讓流經流量計F2之結構物沉積再觀察流量計F2内的結垢物是否逐漸變少’並對水質進行導電度的觀察，若導電度計量測值介於250〜35 0毫秒/厘米，較佳為250毫秒/厘米以下時’即表示完成此一逆滲透膜丨2 〇的清洗工作。待該逆滲透膜1 2 〇的清洗工作完成後，繼續進行一廢水回收的程序。請參閱第1圖，廢水回收的方法，包括下列步驟：首先，將製程廢水丨〇導入一過濾裝置丨〇〇，該過濾裝置1 0 0係為此廢水回收程序的前處理階段。過濾裝置 1 0 0係由一第一過濾塔丨0 5以及一第二過濾塔丨丨〇所組成，且第二過濾塔11 0係連接於第一過濾塔1〇5之後，其中第一過濾塔105濾膜的孔洞尺寸大體為2〇〜1〇〇毫米，第二過濾skin! Close the valve 2, open the high-pressure pump 200 and the valve 1, ### Pair the valve 1 ϊ ⑴ Pressure: 3 ~ 7 kg / cm² Force · = 7 ~ 10 kg / cm², Time: 2 ~ 5 minutes. (3) ^ square f meters within F2, time: 2 to 5 minutes. At the same time, observe the flowmeter P ratio f ^ Γ ^. If it changes from lighter to thicker and lighter, it means that this week has been completed. Then, the valve 5 is closed and the valve 3 is opened to drain water, and the impurities on the osmosis membrane 120 and the cleaning medicine M240 are discharged together. With the μ μ, slightly open the valve 1 丨 and adjust the valve 1 so that the pressure gauge 1 " 1 is maintained at ~ 13 kg / cm2 for approximately 0.5 to 1.5 hours, at this time, it is willing to open the valve 11 ' The reverse osmosis membrane module 1 20 will generate a micro-shock phenomenon and carry out the scale on it at the same time. The above cleaning procedure is generally less than one day, and the better control is 40 minutes to 2 hours. & — After a period of time Fj, the valve can be opened for approximately 5 seconds and then closed to allow the structure flowing through the flowmeter F2 to deposit and then observe whether the scale in the flowmeter F2 has gradually become smaller 'and conduct water quality. Observation, if the measured value of the conductivity is between 250 ~ 350 ms / cm, preferably below 250 ms / cm, it means that the cleaning of this reverse osmosis membrane is completed. After the cleaning of the reverse osmosis membrane 120 is completed, a waste water recovery process is continued. Please refer to Fig. 1. The method for wastewater recovery includes the following steps: First, the process wastewater is introduced into a filtration device, which is a pre-treatment stage of the wastewater recovery process. The filtering device 100 is composed of a first filtering tower 丨 05 and a second filtering tower 丨丨, and the second filtering tower 110 is connected to the first filtering tower 105, where the first filtering The pore size of the filter membrane of the tower 105 is generally 20 to 100 mm, and the second filtration

1239872 五、發明說明（8) --- 塔1 1 〇濾膜的孔洞尺寸大體為2〜丨〇毫米。製程廢水1 0的組成分係包含例如金屬離子、酸性物、驗性物、有機物、強氧化物或懸浮固體物等物質，且其電度係不小於100毫秒/厘米，總有機碳含量（t〇c)係不小於1厘克/升，酸鹼值大體介於2〜4，強氧化物含量如雙二、水不小於1厘克/升。上述酸性物係包含如磷酸、硝酸、虱* 酸或鹽酸，金屬離子包含如各種鹼金屬離子、重金屬及t 他金屬離子，鹼性物係包含如氨水或甲基氨，有機物係^ 含如光阻液、顯影液、清洗液、甲醇或異丙醇，強氧化= 包含如雙氧水或臭氧，而懸浮固體物係包含如二氧化石夕、氧化鍺、氧化鎢、氟化矽、氧化硼、氧化鋁、氧化磷、晶圓破片或清洗液。經第一過濾塔1 0 5及第二過濾塔丨1 0的過濾程序後，原製程廢水1 〇中的較大顆粒的雜質，應大體可被初步的據除。另在過濾裝置1 0 0中並無加設額外的過濾設備例如活性碳塔、離子交換樹脂塔、微過濾膜、超過濾膜或紫外光燈，以簡化前處理階段的步驟，節省成本及運作時間。接著，將自第二過濾塔11 〇排出之過濾液導入一逆滲透膜系統1 2 0，以進行另一過濾程序。該等逆滲透膜丨2 〇係取自純水系統汰換的濾膜，其中該純水系統係指一可將自來水過濾為純水的過濾系統，而逆滲透膜1 2 0的材質可例如為聚醯胺（polyamide，PA)。一般來說，純水系統濾膜的孔洞尺寸會較廢水系統濾膜的孔洞尺寸為小，因此，使用純水系統濾膜過濾製程廢1239872 V. Description of the invention (8) --- The pore size of the tower 1 10 filter membrane is approximately 2 mm. The composition line of process wastewater 10 includes, for example, metal ions, acidic substances, test substances, organic substances, strong oxides or suspended solids, etc., and its electric power is not less than 100 milliseconds / cm, and the total organic carbon content (t 〇c) is not less than 1 centigram per liter, the pH value is generally between 2 and 4, the content of strong oxides such as double second, and water is not less than 1 centigram per liter. The above-mentioned acidic systems include, for example, phosphoric acid, nitric acid, lice * acid or hydrochloric acid, the metal ions include, for example, various alkali metal ions, heavy metals and other metal ions, the basic systems include, for example, ammonia water or methyl ammonia, and the organic systems include such as light Barrier liquid, developing solution, cleaning solution, methanol or isopropanol, strong oxidation = contains, for example, hydrogen peroxide or ozone, and suspended solids systems, such as stone dioxide, germanium oxide, tungsten oxide, silicon fluoride, boron oxide, oxidation Aluminum, phosphorous oxide, wafer breaks or cleaning fluids. After the filtration process of the first filter tower 105 and the second filter tower 10, the larger particles of impurities in the original process wastewater 10 should be roughly eliminated initially. In addition, no additional filtering equipment such as activated carbon tower, ion exchange resin tower, microfiltration membrane, ultrafiltration membrane or ultraviolet light was installed in the filtering device 100 to simplify the steps in the pretreatment stage, saving costs and operation. time. Then, the filtered liquid discharged from the second filtering tower 110 was introduced into a reverse osmosis membrane system 120 to perform another filtering procedure. The reverse osmosis membranes 20 are filter membranes obtained from the replacement of pure water systems, where the pure water system refers to a filtration system that can filter tap water into pure water, and the material of the reverse osmosis membrane 1 2 0 can be, for example, Polyamide (PA). In general, the pore size of the filter membrane of the pure water system is smaller than the pore size of the filter membrane of the waste water system.

0492-10245TWF(Nl)；92-027;DAVID.ptd 第 12 頁 1239872 五、發明說明（9) 水1 0時，理當用已屆ί太換階亦可大幅降低使用逆滲的延展而再度述快速、有效回4旻其原本的的時間，與習省時、高效率佳。最後，將過濾後所得之回收的程序。雖然本發限定本發明，神和範圍内，當視後附之申可獲得一水質較佳的過濾液，且本發明係使段的逆滲透膜1 2 0，而不須另購新的滤膜，在選材、購材上的成本。透膜1 2 0過濾的過程中，雜質會隨過濾時間累積、阻塞在濾膜的孔洞處，此時，透過上的清洗逆滲透膜的技術，可使逆滲透膜迅速濾水功效。此清洗技術大體僅須耗費兩小時知技術動概一、兩天的清洗時間相較，實具的優點’且清洗完後之效果亦較傳統方法為製私廢水1 0經過濾裝置1 0 0以及逆滲透膜1 2 〇回收水導入一產水塔1 30，即完成此一廢水明已以較佳實施例揭露如上，然其並非用以 I:何熟習此項技藝者，纟不脫離本發明之精 :ΐ Γ丨5動與潤飾，因此本發明之保護範圍吞月專利範圍所界定者為準。 ❿0492-10245TWF (Nl); 92-027; DAVID.ptd Page 12 12378872 V. Description of the invention (9) When the water is 10, it is reasonable to use the already-changed stage to significantly reduce the extension of reverse osmosis and repeat it. Quickly and effectively return to the original time, save time, and have good efficiency. Finally, the procedure of recycling after filtering is obtained. Although the present invention is limited to the present invention, within the scope of Shenhe, a filter with better water quality can be obtained according to the attached application, and the present invention is a reverse osmosis membrane of section 1, 20, without the need to purchase a new filter. Membrane, cost in selecting and purchasing materials. During the filtration of the permeable membrane 120, impurities will accumulate with the filtration time and become blocked in the pores of the filtration membrane. At this time, the technology of cleaning the reverse osmosis membrane through the above can make the reverse osmosis membrane quickly filter water. This cleaning technology generally only takes two hours. Knowing the technology, one or two days of cleaning time, compared with the actual advantages, and the effect after cleaning is also compared to the traditional method for the production of private wastewater 1 0 through the filtering device 1 0 0 And the reverse osmosis membrane 120 recycled water is introduced into a water production tower 130, and this waste water is completed. It has been disclosed above in a preferred embodiment, but it is not intended to be used by I: He is skilled in this art, and will not depart from the present invention. The essence: ΐ Γ 丨 5 movement and retouching, so the scope of protection of the present invention is defined by the scope of the swallowing patent. ❿

第13頁 1239872 圖式簡單說明第1圖係為本發明之一實施例，廢水回收系統之示意圖。第2圖係為本發明之一實施例，逆滲透膜之清洗機構圖。符號說明： 1 0 0〜過濾裝置； 1 0 5、11 0〜過濾塔； 1 2 0〜逆滲透膜； 1 3 0〜產水塔；Page 13 1239872 Brief Description of Drawings Figure 1 is a schematic diagram of a wastewater recovery system according to an embodiment of the present invention. Fig. 2 is a cleaning mechanism diagram of a reverse osmosis membrane according to an embodiment of the present invention. Explanation of symbols: 100 ~ filtration device; 105, 110 ~ filtration tower; 120 ~ reverse osmosis membrane; 130 ~ water production tower;

1 4 0〜暫存塔； 1 5 0〜中和廢水處理系統； 20 0〜高壓幫浦； 22 0〜清洗幫浦； 2 3 0〜清洗塔； 2 4 0〜清洗藥劑； 2 5 0〜過濾、水； FI、F2、F3、F4〜流量計； P1〜壓力錶； VI〜V16〜操作閥。1 40 ~ temporary storage tower; 150 ~ neutralizing wastewater treatment system; 20 ~ high pressure pump; 22 ~~ cleaning pump; 230 ~~ cleaning tower; 240 ~~ cleaning agent; 250 ~ Filtration, water; FI, F2, F3, F4 ~ flowmeter; P1 ~ pressure gauge; VI ~ V16 ~ operation valve.

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Claims

1239872 、申凊專利範圍 1 · 一種清洗逆滲透膜之方法，包括下列步驟·· 將一藥劑通入一逆滲透膜中；將含有該藥劑之該逆滲透模靜置處理，· 依序由低壓至高壓，進行對該逆滲透膜之沖洗；以及維持一高壓狀態，並使該逆滲透膜產生一微震現象。法 2 ·如申請專利範圍第1項所述之清洗逆滲透膜之方 ’其中該通入之藥劑係為一強鹼。 3 ·如申請專利範圍第1項所述之清洗逆滲透膜之方 ’其中該逆滲透膜之材質係為聚醯胺（p〇lyamide，法 4·如申請專利範圍第1項所述之清洗逆滲透膜之方其中該逆滲透膜大體靜置2〇〜4〇分鐘。法 5·如申請專利範圍第1項所述之清洗逆滲透膜之方其中該沖洗步驟大體少於一天。法 6 ·如申請專利範圍第1項所述之清洗逆滲透膜之方其中該沖洗步驟大體介於4 0分鐘〜2小時。法 7 ·如申請專利範圍第1項所述之清洗逆滲透膜之方其中更包括於產生微震現象之同時，進行對排出水質導電度之量測。 8·如申請專利範圍第7項所述之清洗逆滲透膜之方法，其中更包括量測之導電度值小於2 5 0宅移/厘米時，停止該清洗步驟。 9 · 一種廢水回收之方法，包括下列步驟· 將廢水導入一過濾裝置； 0492-10245TWF(Nl);92-027;DAVID.ptd 第15頁 1239872 夂、申請專利範圍逆滲』：：：2濾裝置之廢水導入-逆渗透與， # t出、為一純水系統沃換之逆滲透膜，I 4，其令讀系！過申請專利範圍第〗項之清洗方法處理；垓逆滲透螟你J廢水經該過濾系統以及該逆滲透臈過Ά及收水導入一產水塔，以完成廢水回收之程;屢後所得之回 I 0 ·如申睛專利範圍第9項所述之廢水回收 /廢水之組成分係包含酸、驗性、去，其化物、金屬離子或懸浮固體物。有機物、強氣其 II ·如申請專利範圍第9項所述之廢水回收中該廢水之導電度值係不小於10()毫秒/厘米。方法，其 • 1 2 ·如申請專利範圍第9項所述之廢水回收之方法，中該廢水之總有機碳含量係不小於1厘克/升。 ’ ’ 1 3 ·如申請專利範圍第丨〇項所述之廢水回收之方法其中該酸性物係包含磷酸、硝酸、硫酸或鹽酸。其 1 4 ·如申請專利範圍第9項所述之廢水回收之方法，中6亥廢水之強氧化物含量係不小於1厘克/升。 1 5 ·如申請專利範圍第1 〇項所述之廢水回收之方法，其中該鹼性物係包含氨水或甲基氨。 1 6 ·如申請專利範圍第丨〇項所述之廢水回收之方法，其中該金屬離子係包含各種驗金族金屬、重金屬及其他金屬離子。 1 7 ·如申請專利範圍第丨〇項所述之廢水回收之方法，其中該有機物係包含光阻液、顯影液、清洗液、甲醇或異丙醇。 mm 0492-10245TWF(Nl)；92-027;DAVID.ptd 第16頁 1239872 六、申請專利範圍 1 8.如申請專利範圍第1 0項所述之廢水回收之方法，其中該強氧化物係包含雙氧水或臭氧。 1 9.如申請專利範圍第1 0項所述之廢水回收之方法，其中該懸浮固體物係包含二氧化矽、氧化鍺、氧化鎢、氟化矽、氧化硼、氧化鋁、氧化磷、矽晶圓破片或清洗液。 2 0 .如申請專利範圍第9項所述之廢水回收之方法，其中該過濾系統係包括一第一過濾塔以及一第二過濾塔。 2 1.如申請專利範圍第1 6項所述之廢水回收之方法，其中該第一過濾塔之濾網尺寸係不大於1 00毫米。 2 2.如申請專利範圍第1 6項所述之廢水回收之方法，其中該第二過濾塔之濾網尺寸係不大於1 0毫米。 2 3.如申請專利範圍第9項所述之廢水回收方法，其中該純水系統係指將自來水過濾為純水。 24.如申請專利範圍第9項所述之廢水回收之方法，其中該逆滲透膜之材質係為聚醯胺。 2 5.如申請專利範圍第9項所述之廢水回收之方法，其中該通入之藥劑係為一強驗。 2 6.如申請專利範圍第9項所述之廢水回收之方法，其中該逆滲透膜大體靜置20〜40分鐘。 2 7.如申請專利範圍第9項所述之廢水回收之方法，其中該沖洗步驟大體少於一天。 2 8.如申請專利範圍第9項所述之廢水回收之方法，其中該該沖洗步驟大體介於40分鐘〜2小時。 2 9 .如申請專利範圍第9項所述之廢水回收之方法，其1239872, Shenyang Patent Scope 1 · A method for cleaning a reverse osmosis membrane, including the following steps: · passing a medicine into a reverse osmosis membrane; leaving the reverse osmosis mold containing the medicine to stand, and sequentially lowering it by low pressure To high pressure, washing the reverse osmosis membrane; and maintaining a high pressure state, and causing the reverse osmosis membrane to generate a micro-shock phenomenon. Method 2 · The method for cleaning reverse osmosis membranes as described in item 1 of the scope of the patent application ′, wherein the introduced agent is a strong base. 3. The method of cleaning reverse osmosis membranes as described in item 1 of the scope of the patent application, wherein the material of the reverse osmosis membrane is polyamide (Method 0). The method of the reverse osmosis membrane, wherein the reverse osmosis membrane is generally left to stand for 20 to 40 minutes. Method 5. The method of cleaning the reverse osmosis membrane described in item 1 of the scope of patent application, wherein the rinsing step is substantially less than one day. Method 6 · The method for cleaning reverse osmosis membranes as described in item 1 of the scope of patent application, wherein the washing step is generally between 40 minutes and 2 hours. Method 7 · The method for cleaning the reverse osmosis membranes as described in item 1 of the scope of patent application It also includes measuring the conductivity of the discharged water while generating microseismism. 8. The method for cleaning reverse osmosis membranes as described in item 7 of the scope of patent application, which also includes a measured conductivity value of less than 2 The washing step is stopped at 50 pm / cm. 9 · A method of wastewater recovery, including the following steps · Introducing wastewater to a filtration device; 0492-10245TWF (Nl); 92-027; DAVID.ptd Page 151239872范围 Scope of patent application Reverse osmosis "::: 2 wastewater introduction-reverse osmosis of the filter device, # t outlet, is a pure water system for the exchange of reverse osmosis membrane, I 4, which reads the system! After the cleaning of the scope of the application for the patent Method treatment; 垓 reverse osmosis 螟 your waste water through the filtration system and the reverse osmosis 臈臈 and the water received into a water production tower to complete the process of waste water recovery; repeated returns I 0 The waste water recovery / wastewater composition system described in item 9 includes acid, test, dehydration, its compounds, metal ions, or suspended solids. Organic matter, strong gas, etc. II · Wastewater recovery as described in item 9 of the scope of patent application The conductivity value of the wastewater is not less than 10 () milliseconds / cm. Method, which • 1 2 • The method of wastewater recovery as described in item 9 of the scope of patent application, the total organic carbon content of the wastewater is not less than 1 centigram per liter. '' 1 3 · The method of waste water recovery as described in item No. 丨 0 of the scope of the patent application, wherein the acidic system comprises phosphoric acid, nitric acid, sulfuric acid or hydrochloric acid. The method of waste water recovery as described in the above item, The content of strong oxides in the wastewater of Zhonghaihai is not less than 1 centigram per liter. 1 5. The method for wastewater recovery as described in item 10 of the patent application scope, wherein the alkaline substance comprises ammonia or methyl ammonia. 16 · The method for waste water recovery as described in the scope of the patent application, wherein the metal ions include various metallurgical group metals, heavy metals and other metal ions. 1 7 · As described in the scope of the patent application, A method for recycling waste water, wherein the organic substance comprises a photoresist solution, a developing solution, a cleaning solution, methanol or isopropanol. Mm 0492-10245TWF (Nl); 92-027; DAVID.ptd page 161239872 6. Application for patent Scope 1 8. The method for waste water recovery as described in item 10 of the scope of patent application, wherein the strong oxide system comprises hydrogen peroxide or ozone. 19. The method for wastewater recovery as described in item 10 of the scope of the patent application, wherein the suspended solids include silicon dioxide, germanium oxide, tungsten oxide, silicon fluoride, boron oxide, aluminum oxide, phosphorus oxide, silicon Wafer chipping or cleaning fluid. 20. The method for wastewater recovery according to item 9 of the scope of the patent application, wherein the filtration system includes a first filtration tower and a second filtration tower. 2 1. The method for waste water recovery as described in item 16 of the scope of patent application, wherein the size of the screen of the first filter tower is not greater than 100 mm. 2 2. The method for waste water recovery as described in item 16 of the scope of patent application, wherein the size of the screen of the second filter tower is not more than 10 mm. 2 3. The wastewater recovery method according to item 9 of the scope of the patent application, wherein the pure water system refers to filtering tap water into pure water. 24. The method for wastewater recovery as described in item 9 of the scope of the patent application, wherein the material of the reverse osmosis membrane is polyamine. 2 5. The method for wastewater recovery as described in item 9 of the scope of patent application, wherein the imported medicine is a strong test. 2 6. The method for wastewater recovery as described in item 9 of the scope of the patent application, wherein the reverse osmosis membrane is left standing for about 20 to 40 minutes. 2 7. The method for wastewater recovery as described in item 9 of the scope of the patent application, wherein the washing step is substantially less than one day. 2 8. The method for wastewater recovery as described in item 9 of the scope of the patent application, wherein the washing step is generally between 40 minutes and 2 hours. 29. The method for wastewater recovery as described in item 9 of the scope of patent application, which

0492-10245TWF(N1);92-027;DAVID.p t d 第17頁 1239872 六、申請專利範圍中更包括於產生微震現象之同時，進行對排出水質導電度之量測。 3 0 .如申請專利範圍第2 5項所述之廢水回收之方法，其中更包括量測之導電度值小於2 5 0毫秒/厘米時，停止該清洗步驟。0492-10245TWF (N1); 92-027; DAVID.p t d p.17 1239872 6. The scope of patent application includes the measurement of the conductivity of the discharged water while generating the microseismic phenomenon. 30. The method for waste water recovery as described in item 25 of the scope of patent application, further comprising stopping the cleaning step when the measured conductivity value is less than 250 milliseconds / cm.

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