TWI236692B

TWI236692B - Vacuum switchgear

Info

Publication number: TWI236692B
Application number: TW093106480A
Authority: TW
Inventors: Yoshiki Sakamoto; Kenji Tsuchiya; Shuichi Kikugawa; Takuya Kiyono; Kozo Kato
Original assignee: Hitachi Ltd
Priority date: 2003-04-03
Filing date: 2004-03-11
Publication date: 2005-07-21
Also published as: JP2004312824A; JP4218018B2; KR20040086824A; CN100347799C; TW200428444A; KR101018342B1; CN1538477A

Abstract

The purpose of the present invention is to prevent the wear debris from being diffused in a vacuum vessel as metals rub each other when the operation force of an operation unit is reduced. A plurality of inner vacuum vessels 70, 72, 74 are housed in an outer vacuum vessel 10. Movable electrodes 118, 120, and 122 connected to movable electrode rods 30, 32, and 34 are housed along with fixed electrodes 124, 126, and 128 connected to the fixed electrode rods 60, 62, and 64 in the inner vacuum vessels 70, 72, and 74, with the movable electrode rods 30, 32, and 34 connected each other through a flexible conductor 130. A plurality of copper plates 132 and stainless plates 134 with different lengths are alternately laminated to constitute the flexible conductor 130. A gap is formed between the copper plate 132 and the stainless plate 134 at a bent part of the flexible conductor 130 to reduce the abrasion between the copper plates 132 and the stainless plates 134, preventing the occurrence of wear debris.

Description

1236692 玫、發明說明：【發明所屬之技術領域】發明係關於真空配電器，特別係關於具有收容於真空二内之多數開關’適合使用作為電力系統之受配電設備之真空配電器。【先前技術】電力系統中，在配電系統通常設有供々 φ又，配私為作為受配電設二元件。以往，此種配電器多半採用氣中絕緣方式 :::器’但為謀求小型化’已逐漸採用使用％氣作為絕體二之氣體絕緣方式之配電器。但使用SF6氣作為絕緣媒採有造成不良影響之虞，故近年來，有人提案抹用使用真空絕緣作為絕緣媒體口口心具工絕緣方式之配電杰〇 ::真空絕緣方式之配電器’例如有在真空容器内收容口疋电極與可動電極相對向配置之多數對主電路開關部，可動電極連接於母線側導體，固、 u疋私極連接於負載側導 …电弧屏蔽板覆蓋各主電路開關冑，經由可撓性導體連接各母線側導體所構成之配電器（參照專利文獻1)。依據此配電器，由於採用真空絕缝 L ^ ^ έ、毒方式，故其絕緣距離比氣體絕緣方式短，可將配電器小型化。 [專利文獻1 ] 曰本特開2__26δ685號公報（第3頁〜第^、圖卜圖3) [發明所欲解決之問題] 在上述以往技術中，各母線側導體係經由可撓性導體（軟.1236692 Description of the invention: [Technical field to which the invention belongs] The invention relates to a vacuum distributor, and more particularly to a vacuum distributor having a plurality of switches housed in a vacuum chamber, which is suitable for use as a power distribution device in a power system. [Prior technology] In the power system, the power distribution system is usually provided with power supply φ, and private distribution is used as the second component of the power distribution system. In the past, most of this type of distributors used the gas-insulation method ::: device ', but for the sake of miniaturization, they have gradually adopted the gas-insulation method that uses% gas as the insulation type 2. However, the use of SF6 gas as an insulating medium may cause adverse effects. Therefore, in recent years, some people have proposed the use of vacuum insulation as a dielectric medium. Insulation methods such as electrical distribution. There are many pairs of main circuit switch parts in the vacuum container, where the 疋 electrode and the movable electrode are opposite to each other. The movable electrode is connected to the bus-side conductor, and the solid and u 疋 private poles are connected to the load-side guide. The arc shielding plate covers each main. The circuit breaker 胄 is a power distribution device in which each bus-side conductor is connected via a flexible conductor (see Patent Document 1). According to this distributor, because the vacuum insulation seam L ^ ^ is used, the insulation method is shorter than the gas insulation method, which can reduce the size of the distributor. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2__26δ685 (Page 3 to ^, Figure 3) [Problems to be Solved by the Invention] In the above-mentioned conventional technology, each bus-side guide system passes through a flexible conductor ( soft.

O ^JI'VIOJO DOC 1236692 性導體）連接，由於可撓性導體係以單-板材所構成，故難以降低操作可動電極用之操作器之操作力。、因此，為降低操作器之操作力，有人嘗試❹多數導+ 性板材或多數導電性絞合線構成可撓性半導體。卜使: 多數導電性板材或多數導電性絞合線構成可撓性半導體之 :形，在可撓性半導體響應來自操作器之操作力而變形 ¥，有可能因金屬彼此之摩擦產生摩耗粉。本發明之課題在於··在降低操作器之操作力之際可防止金屬彼此之摩擦導致摩耗粉擴散至真空容器内。【發明内容】 [解決問題之手段] 為解決前述課題，本發明之真空配電器係包含：作為接地對象之外側真空容器、收容於前述外側真空容器内之多數内側真空容器、使保持於可動電極桿之可動電極與保持於固定電極桿之固定電極相冑向而分別分散配置於前述多數内側真空容器内之多數開關、及使前述多數開關之可動電極ί干互相連結之軟性導體（可撓性導體）；前述軟性導體係包含長度相異之多數導電性板材，前述多數導電性板材係互相隔離所疊層而成。在構成前述真空配電器之際，可使用多數導電性絞合線取代多數導電性板材。又，以多數導電性板材構成軟性導體時，若採用在連結各導電性板材與各可動電極桿之連結部中，於各導電性板材間***隔片之構成，則即使使用長度相異或長度相同之導電性板材作為多數導電性板材，也O ^ JI'VIOJO DOC 1236692 (Conductive Conductor) connection, because the flexible guide system is composed of single-plate material, it is difficult to reduce the operating force of the manipulator used to move the electrode. Therefore, in order to reduce the operating force of the manipulator, some people have tried to form flexible semiconductors with most conductive plates or most conductive stranded wires. Emissary: Most conductive plates or most conductive strands constitute flexible semiconductors. The flexible semiconductors are deformed in response to the operating force from the manipulator. There may be friction powder due to the friction between metals. The object of the present invention is to prevent the frictional powder from spreading into the vacuum container when the operating force of the manipulator is reduced. [Summary of the Problem] [Means for Solving the Problems] In order to solve the aforementioned problems, the vacuum distributor of the present invention includes an outer vacuum container as a grounding object, a plurality of inner vacuum containers housed in the outer vacuum container, and held on a movable electrode. The movable electrodes of the rod and the fixed electrodes held on the fixed electrode rod face each other and are dispersedly disposed in the majority of the plurality of inside vacuum containers, and the flexible conductors that connect the movable electrodes of the plurality of switches to each other (flexible) (Conductor); the above-mentioned flexible conductive system includes a plurality of conductive plates having different lengths, and the foregoing plurality of conductive plates are laminated and separated from each other. In constructing the aforementioned vacuum distributor, a plurality of conductive stranded wires may be used instead of a plurality of conductive plate materials. Moreover, when a flexible conductor is composed of a plurality of conductive plates, if a configuration is used in which a spacer is inserted between the conductive plates in a connecting portion connecting the conductive plates and the movable electrode rods, the lengths are different or the lengths are different. The same conductive sheet as most conductive sheets, also

O:\9I\9I630 DOC 1236692 夾在中間而互相隔離地疊可在多數導電性板材間將各隔片八’ μ夕數導電性绶人多σ線構成時，可採用裝定有以密閉數導私性絞合線周圍中 fI 爻各了動電極扣間之區域之狀態膜盒之構成。此時，可在膜盒形成排氣孔，或、麗内，真空度設定於低於外側真空容器内之真空度。、二、且層夕數導電性板材而構成軟性導體時，也可取 =述同狀膜盒’ @改用覆蓋多數導電性板材周圍中之多 f生板材與各可動電極桿間之連結部下側區域之半分 •膜1或覆盍多數導電性板材中不含各可動電極桿間之中門邛之區域之下部側之區域之水閘形狀之屏蔽板。依據上述手段’即使在軟性導體響應來自操作器之操作 4,也由於各導電性板材間形成有間隙，可減少金屬彼此間之摩擦’防止摩耗粉飛濺至真空容器内。又，在軟性導體裝定有膜盒或屏蔽板，即使由軟性導體產生摩耗泰’也可防止摩耗粉等異物擴散至真空容器内。【實施方式】乂下依據圖式說明本發明之一實施形態。圖1係表示本 ‘月之真空配電器之一實施形態之要部剖面正面圖。在圖1 中，真空配電器係作為配電系統之受配電設備之一種元件’而由具有不銹鋼製之外側真空容器10所構成。外側真空容器10具有上部板材12、下部板材14及側部板材16，將各板材之周圍（緣）互相焊接接合，並與設備本體共同接地。在上部板材12形成貫通孔18、20、22，在各貫通孔18、O: \ 9I \ 9I630 DOC 1236692 is sandwiched in the middle and isolated from each other. Each spacer can be composed of eight 'μx number of conductive conductive 绶 many σ lines between most conductive plates. The structure of the state capsule in which the fI 绞 around the conductive stranded wire has a region between the movable electrode buttons. At this time, exhaust holes can be formed in the capsule, or the vacuum degree is set lower than the vacuum degree in the outer vacuum container. When two or more layers of conductive plates are used to form a flexible conductor, the same shape of the membrane box can be used. @Switch to the lower side of the connection between the green plate and the movable electrode rods that cover the majority of the conductive plate. Half of the area • Membrane 1 or covering most conductive plates does not include a sluice-shaped shield plate on the lower side of the area on the lower side of the door hinge in the middle of each movable electrode rod. According to the above-mentioned means 'even if the flexible conductor responds to the operation 4 from the manipulator 4, gaps are formed between the conductive plates to reduce the friction between the metals' and prevent the abrasion powder from splashing into the vacuum container. In addition, the flexible conductor is provided with a membrane box or a shielding plate, and even if the friction conductor is generated by the flexible conductor, foreign matter such as friction powder can be prevented from diffusing into the vacuum container. [Embodiment] One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional front view showing a main part of one embodiment of the vacuum distributor of this month. In Fig. 1, a vacuum distributor is a component of a power distribution system of a power distribution system, and includes a vacuum container 10 made of stainless steel. The outer vacuum container 10 has an upper plate 12, a lower plate 14, and a side plate 16, and the surroundings (edges) of the plates are welded to each other and grounded together with the equipment body. Through holes 18, 20, and 22 are formed in the upper plate material 12.

O:\9I\9I630 DOC 1236692 2 Ο、2 2之緣，以覆 ♦ 底板24、26、28。而貝通孔1δ、20、22方式固定環狀之向’在形成於各底板24、26、28之中央之圓形空間部往返 . (上下移動）自如地***圓柱狀之可動電極桿30、32、34 ^ Ρ，各貫通孔18、20、22係被底板、、28、可動電極桿3〇、32、34所閉塞。可動電極桿30、32、3 产从y丨士斗之軸方向端部（上部側）連結於設置在外側真空容器1〇之外刼作器（電磁操作器）。又，在上邠板材12之下部側 σ者各貝通孔18、20' 22之緣往返移移動）自如地配置各 40之軸方向之一端側固^皿36、38、4〇’各膜盒36、38、疋於上部板材12之下部側，軸方向之他端側裝定於各可龢+, 轴方向不疋於各可動電極桿3〇、32、34 為使外側真空容1 ° 厂， 22之緣”久閉構造，在各貫通孔m 22之、、彖，口者各可動電極桿％ 38> 40〇 V y- 2、34之軸方向配置膜盒36、 δ 在上部板材12連結排氣管(省略圖示), 排乳官將外側真空容器10真空排氣。，、貫=二在下部板材14形成貫通孔42、-1,在各门一 46之緣’以覆蓋各貫通孔42、44、46方十固疋絕緣性套管48、5〇 6方式側固定環狀之絕緣性底板54、56、= s 48 50、52之底部 56、58之t央之圓形空間。而，在各底板54、 W***圓柱狀之固定雷 62、64。即在形成於下部板材14之貫通孔42、广6〇、別被套管48、50、52 广4 44、46係分 2、底板54、56、58 62、64所閉塞。而，疋屯極桿6〇、 ^疋电極桿6〇、62、64夕虹側連接於配置在外側直之軸方向一端 ”…丨〇外部之境線(配電線）。O: \ 9I \ 9I630 DOC 1236692 2 0, 2 2 to cover the base plate 24, 26, 28. The Beton holes 1δ, 20, and 22 are fixed in a ring-like direction. They move back and forth in a circular space formed in the center of each of the bottom plates 24, 26, and 28. (Move up and down) Insert a cylindrical movable electrode rod 30, 32, 34 ^ P, and each of the through holes 18, 20, and 22 is closed by the bottom plate, 28, and the movable electrode rods 30, 32, and 34, respectively. The movable electrode rods 30, 32, and 3 are connected from an end (upper side) in the axial direction of the bucket to an actuator (electromagnetic actuator) provided outside the vacuum container 10. In addition, the edges of each of the through holes 18 and 20 '22 on the lower side σ of the upper slab 12 are moved back and forth). One end of each 40 in the axial direction is freely arranged. The boxes 36, 38, are placed on the lower side of the upper plate 12, and the other ends in the axial direction are set to each other +, and the axial direction is not less than each movable electrode rod 30, 32, 34 in order to make the outer vacuum capacity 1 ° Plant, “Edge of 22” has a long-closed structure. In each of the through holes m 22, 彖, and 口, the movable electrode rods are located in the mouth.% 38> 40V y- 2, 34 are arranged in the axis direction of the capsule 36, δ on the upper plate 12 is connected to an exhaust pipe (not shown), and the milk exhausting official evacuates the outer vacuum container 10 to form a through hole 42 and -1 in the lower plate 14 to cover the edges of each door 46. Each through hole 42, 44 and 46 are square solid insulation bushings 48, 506. The side is fixed with a ring-shaped insulating base plate 54, 56, = the bottom of the bottom of the 50, 52 of the 50, 52, and the center of the circle. And a cylindrical fixed mine 62, 64 is inserted into each of the bottom plates 54, W. That is, the through holes 42, 60, and 48, 50, 52, and 4, 44, 46 are formed in the lower plate 14, respectively. Divided by 2, bottom plate 54, 56, 58 62, 64. In addition, the side of the pole pole 60, the electrode pole 60, 62, 64 is connected to one end arranged on the outside in the direction of the straight axis "... 丨〇 External boundary lines (distribution lines).

0 \9IWI630 DOC -10- 1236692 在外側真空容器1 〇内部收容著構成開關之斷路器之本體内側真空谷器7〇、72、74，在各内側真空容器7〇、72、 74分別分散收容著作為開關之斷路器。内側真空容器70、72、74係由形成圓筒狀之陶瓷製之絕緣性屏蔽板76、78、80、82、84、86、形成大致呈碗狀之不秀鋼‘之可動電極側金屬板88、90、92、形成大致呈圓板狀之不誘鋼製之固定電極側金屬板94、96、98所構成。另外，在内側真空容器70、72、74收容有膜盒1〇6、丨〇8、 1〇私極屏蔽板112、114、116，並收容著可動電極118、 120、122、固定電極124、126、128。 '▲106、1〇8、11〇係沿著可動電極桿3〇、32、34之轴向被配置’其軸彳向之-端側被固定於金屬板88、90、之底部側，他端側被裝定於可動電極桿30、32、34之外 =。電極屏蔽板112、114、116係利用不銹鋼形成大致呈筒狀，而被配置呈覆蓋各可動電極118、12〇、m、固定 ° 126、128之狀態，其中間部外周側分別被絕緣性> 敝板76與絕緣性屏蔽板78、絕緣性屏蔽板⑽與絕緣性屏, 板82、絕緣性屏蔽板84與絕緣性屏蔽板86所支持。即，， °井蔽板112、114、116係被配置成在電流切斷時，可防由可動電極118、120、122、固定電極l24、126、⑶所』生之金屬蒸氣飛濺至内側真空容器70、72、74之外部又可動％極118、120、122係分別固定於可動電極桿3〇、 3=方向端部’固定電择124、126、喝分別固定於[ 疋电極桿60、62、64之軸方向端部。0 \ 9IWI630 DOC -10- 1236692 Inside the outer vacuum container 1 〇 The inside of the main body of the circuit breaker that constitutes the switch is inside the vacuum trough 70, 72, 74, and the inner vacuum containers 7 0, 72, 74 respectively contain the works Circuit breaker for the switch. The inner vacuum containers 70, 72, and 74 are metal plates formed of cylindrical insulating ceramic shields 76, 78, 80, 82, 84, and 86, and are formed of a bowl-shaped stainless steel. 88, 90, and 92 are formed into a generally circular plate-like fixed electrode-side metal plate 94, 96, and 98 made of steel. In addition, the inner vacuum containers 70, 72, and 74 contain the capsules 106, 108, and 10, and the shields 112, 114, and 116, and the movable electrodes 118, 120, 122, and the fixed electrodes 124, 126, 128. '▲ 106, 108, and 11 are arranged along the axial direction of the movable electrode rods 30, 32, and 34.' The axial direction of the poles is fixed to the bottom side of the metal plates 88, 90, and The end sides are fixed outside the movable electrode rods 30, 32, and 34. The electrode shield plates 112, 114, and 116 are formed into a substantially cylindrical shape by using stainless steel, and are arranged to cover each of the movable electrodes 118, 120, m, and a fixed angle of 126, 128. The outer periphery of the middle portion is insulated, respectively.> The cymbal plate 76 and the insulating shielding plate 78, the insulating shielding plate ⑽ and the insulating screen, the plate 82, the insulating shielding plate 84, and the insulating shielding plate 86 are supported. That is, the well shield plates 112, 114, and 116 are configured to prevent metal vapors generated by the movable electrodes 118, 120, 122, and the fixed electrodes 124, 126, and ⑶ from splashing into the inside vacuum when the current is cut off. The outer parts of the containers 70, 72, and 74 are also movable. The poles 118, 120, and 122 are respectively fixed to the movable electrode rods 30, 3 = direction ends, the fixed electric selection 124, 126, and the drinks are respectively fixed to the [疋 electrode rod 60 , 62, 64 axial ends.

〇 '^1\9|63〇 D〇C 1236692 各可動電極桿30、32、34係經由具有2個體（可撓性導=上土 _，^生^體）130而互相連、结。此軟性導體13〇如圖2所係又互$層多數片在軸方向具有2個彎曲部之作為導電眭板材之銅板132與不錄鋼板m所構成。在銅板⑶與鋼板134分別形成有貫通細、U8、140,貫通孔136中插入可動電極桿30’貫通孔138中插人可動電極桿32，貫通孔 140中***可動電極桿34。而，各貫通孔叫、138、_之 =圍係連結於可動電極桿3G、32、34，以作為與可動電極 #3〇、32、34之連結部。此時’各銅板132與不錢鋼板⑼ 係依照疊層順序形成各片相異之長度。即，各銅板⑴與不錄鋼板134之軸方向長度係依照疊層順序形成分別短 AL=〇.3。因此，在各銅板132與不銹鋼板134中貫通孔I% 與貫通孔138之間（可動電極桿3〇與可動電極桿调）及貫通孔13 8與貫通孔i 4 〇之間(可動電極桿3 2與可動電極桿3 4 間）’分別形成内徑逐次增大之.f曲部，並在各銅板132與不錄鋼板134間形成間隙’而將各銅板132與不錄鋼板⑴疊層成為互相隔離之狀態。依據本實施形態’可利用長度相異之銅板132與不錄鋼板 134構成在軸方向具有2個彎曲部之軟性導體13〇，並將各銅板132與各不銹鋼板丨34疊層成互相隔離，故可降低操作器之=作力’且在軟性導體13G響應來自操作器之操作力而變形蚪，可減少各銅板132與各不銹鋼板134間摩此之摩擦)，防止由各銅板132與各不鱗鋼板134產(生：粉，並可防止摩耗粉飛濺至外側真空容器丨〇内。更可防止〇 '^ 1 \ 9 | 63〇 D〇C 1236692 Each of the movable electrode rods 30, 32, and 34 is connected and connected to each other through a body 130 (flexible guide = upper soil _, ^^^). This flexible conductor 13 is composed of a copper plate 132 as a conductive concrete plate and a non-recording steel plate m having two bent portions in the axial direction as shown in FIG. The copper plate ⑶ and the steel plate 134 are formed with through holes U8, 140, a movable electrode rod 30 'is inserted into the through hole 136, a movable electrode rod 32 is inserted into the through hole 138, and a movable electrode rod 34 is inserted into the through hole 140. In addition, each of the through holes is called, 138, _ = is connected to the movable electrode rods 3G, 32, and 34 as connection portions with the movable electrodes # 3〇, 32, and 34. At this time, each of the copper plates 132 and the stainless steel plates are formed in different lengths in accordance with the lamination order. That is, the lengths in the axial direction of each copper plate ⑴ and the non-recording steel plate 134 are formed to be short AL = 0.3 in accordance with the lamination order. Therefore, between the through-hole I% and the through-hole 138 in each copper plate 132 and stainless steel plate 134 (adjustable between the movable electrode rod 30 and the movable electrode rod) and between the through-hole 138 and the through-hole i 4 〇 (movable electrode rod 3 2 and the movable electrode rod 3 4) 'The inner diameters are increased one by one. The f-curved portion is formed, and a gap is formed between each copper plate 132 and the non-recorded steel plate 134', and each copper plate 132 is laminated with the non-recorded steel plate ⑴ Become isolated from each other. According to this embodiment, the copper plate 132 and the non-recording steel plate 134 having different lengths can be used to form a flexible conductor 13 having two bent portions in the axial direction, and each copper plate 132 and each stainless steel plate 34 are laminated to isolate each other. Therefore, it can reduce the operating force of the manipulator and deform the flexible conductor 13G in response to the operating force from the manipulator. It can reduce the friction between each copper plate 132 and each stainless steel plate 134), and prevent each copper plate 132 and each Non-scale steel plate 134 produces (raw: powder, and can prevent abrasion powder from splashing into the outer vacuum container). It can also prevent

O:\9I\9I630 DOC -12- 1236692 摩耗叙而發生接地障礙現象，可有助於可靠性之提高。 …其-人，依照圖3及圖4說明本發明之第2實施形態，本實施形態係利用長度相異之銅板132多數片疊層而構成在軸方向具有2個弯曲部之軟性導體13〇，並在各銅板132之貫通孔 136 U8、140之周圍裝定不銹鋼製之隔片142、144、146，將隔片M2、i44、146插人各銅板132間，在各銅板132令不含銅板132與各可動電極桿3G、32、34之連結部之區域中，以在各銅板U2間形成間隙148方式疊層各銅板132，其他構成與圖1之情形相同。依據本實施形態，可利用長度相異之銅板132多數片疊層而構成在轴方向具有2料曲部之軟性導體130,並將各銅板132疊層成互相隔離，故可降低操作器之操作力，且在軟性導體⑽響應來自操作器之操作力而變形時，可減少各銅板132間之摩擦（金屬彼此之摩擦），防止由各銅板132產生摩耗粉，並可防止摩耗粉飛进至外側真空容器⑺内。更可防止因摩耗粉而發生接地障礙現象，可有助於可靠性之提高。其次，依照圖5及圖6說明本發明之第3實施形態，本實施形態係利用相同長度之銅板132多數片疊層而構成在轴方向具有2個彎曲部之軟性導體13〇，並在各銅板132之貫通孔 136、138、14G之關插人不錄鋼構成之環狀隔片15〇,在銅板132中不含銅板132與各可動電極桿3〇、32、34之連結部之區域中’在各銅板132間形成間隙148，其他構成與圖】之情形相同。依據本實施形態可利用長度相同之銅板1 32多數片疊層 O:\9I\91630 DOC -13- 1236692 而構成在軸方向具有2個彎曲部之軟性導體π〇，並將各銅板丨32疊層成互相隔離，故可降低操作器之操作力，且在軟性導體130響應來自操作器之操作力而變形時，可減少各銅板32間之摩擦（金屬彼此之摩擦），防止由各銅板132產生摩耗畚，並可防止摩耗粉飛濺至外側真空容器1 〇内。更可防止因摩耗粉而發生接地障礙現象，可有助於可靠性之提高。其次，依照圖7及圖8說明本發明之第4實施形態，本實施开u利用多數銅板132與不錄鋼板134疊層而構成在轴方向具有2個彎曲部之軟性導體13()，並在此等導電性板材中不含導電性板材與各可動電極桿3G、32、34之連結部之區域之區域t ’裝定2個覆蓋各可動電極桿間（各貫通孔間）之中間部區域之下部側之半分狀之膜盒152，其他構成與^ 之情形相同。又，也可使用圓筒狀之膜盒取代分狀之膜盒152。依據本貫施形態，可利用長度相異之銅板132與不錄鋼板 134疊層而構成在軸方向具有2個彎曲部之軟性導體⑽，並將各銅板132與各不錄鋼板134疊層成互相隔離，更以半分狀之膜盒152覆蓋軟性導體13〇中各可動電極桿間之中間部區域之下部側之區$ ’故可降低操作器之操作力，且在軟性導體1 30響應來自择作51 > y A丄讀力而變形時，可減少各銅板132與各不錄鋼板134間之摩擦（金屬彼此之摩捧），防止由錢板U2與各不錄鋼板134產生摩絲，並可防止摩耗粉錢至外側真空容器_。更可防止因摩耗粉而發生接地障礙現象，可有助於可靠性之提高。O: \ 9I \ 9I630 DOC -12- 1236692 Ground fault phenomenon caused by friction loss can help improve reliability. ... its person, the second embodiment of the present invention will be described with reference to Figs. 3 and 4. In this embodiment, a plurality of copper plates 132 having different lengths are laminated to form a flexible conductor 13 having two bent portions in the axial direction. , And the stainless steel spacers 142, 144, and 146 are installed around the through holes 136 U8 and 140 of each copper plate 132, and the spacers M2, i44, and 146 are inserted between the copper plates 132, and the copper plates 132 are not included. In the region where the copper plate 132 is connected to each of the movable electrode rods 3G, 32, and 34, the copper plates 132 are laminated so as to form a gap 148 between the copper plates U2, and other structures are the same as those in FIG. 1. According to this embodiment, a plurality of copper plates 132 having different lengths can be laminated to form a flexible conductor 130 having two curved portions in the axial direction, and the copper plates 132 can be laminated to isolate each other, so that the operation of the operator can be reduced. When the flexible conductor 变形 deforms in response to the operating force from the operator, it can reduce the friction between the copper plates 132 (friction between metals), prevent the friction powder from being generated by each copper plate 132, and prevent the friction powder from flying into the Inside the outer vacuum vessel. It can also prevent the occurrence of ground faults due to friction powder, which can help improve reliability. Next, a third embodiment of the present invention will be described with reference to FIGS. 5 and 6. In this embodiment, a plurality of copper plates 132 of the same length are laminated to form a flexible conductor 13 having two bent portions in the axial direction. The through holes 136, 138, and 14G of the copper plate 132 are inserted into a ring-shaped spacer 15 made of non-recorded steel. The copper plate 132 does not include the area where the copper plate 132 and the joints of the movable electrode rods 30, 32, and 34 are included. In the middle, a gap 148 is formed between the copper plates 132, and other configurations are the same as those in the figure. According to this embodiment, a plurality of 32 copper plates of the same length can be used to stack O: \ 9I \ 91630 DOC -13-1236692 to form a flexible conductor π with two bends in the axial direction, and each copper plate 32 can be stacked. The layers are isolated from each other, so the operating force of the manipulator can be reduced, and when the flexible conductor 130 is deformed in response to the operating force from the manipulator, the friction between the copper plates 32 (the friction between the metals) can be reduced, and the copper plates 132 can be prevented. It generates abrasion dust and prevents the abrasion powder from splashing into the outer vacuum container 10. It can also prevent the occurrence of ground faults due to friction powder, which can help improve reliability. Next, a fourth embodiment of the present invention will be described with reference to Figs. 7 and 8. In this embodiment, a flexible conductor 13 () having two bent portions in the axial direction is formed by laminating a large number of copper plates 132 and non-recording steel plates 134, and The area t 'where the area where the conductive plate and the movable electrode rods 3G, 32, and 34 are connected is not included in these conductive plates. Two intermediate portions covering the movable electrode rods (between the through holes) are set. The other semi-divided capsule 152 on the lower side of the area is the same as the case of ^. Alternatively, a cylindrical capsule can be used instead of the split capsule 152. According to the present embodiment, a flexible conductor 具有 having two bent portions in the axial direction can be formed by stacking copper plates 132 and non-recording steel plates 134 having different lengths, and stacking each copper plate 132 and each non-recording steel plate 134. It is isolated from each other, and the half-divided membrane box 152 covers the lower area of the middle portion between the movable electrode rods in the flexible conductor 13. Therefore, the operating force of the manipulator can be reduced, and the response of the flexible conductor 1 30 comes from Selecting 51 > y A 丄 When the reading force is deformed, the friction between the copper plates 132 and the non-recording steel plates 134 can be reduced (the metal is rubbed against each other), and mousse can be prevented from being generated by the money plate U2 and the non-recording steel plates 134. , And can prevent the consumption of powder money to the outside vacuum container _. It can also prevent the ground fault caused by abrasion powder, which can help improve the reliability.

Ο \91\9I630 DOC -14- 1236692 其次’依照圖9及圖1〇說明本發明之第5實施形態，施形態係利用多數銅板132與不銹鋼板134疊層而構成在輛方向具有2個青曲部之軟性導體13〇,並在軟性導體⑽裝定覆蓋銅板U2或不錢鋼板134中不含各可動電極桿間之：：部之區域之下部側之區域之水閘形狀之屏蔽板154,其他構成與圖1之情形相同。此屏蔽板m係利用不錢鋼構成，在銅板132與不錄鋼板 134之貫通孔136、14〇之周圍裝定i個屏蔽板⑸，在貫通孔 13 8之周圍反方向排列裝定2個屏蔽板154。依少據本實施形態’可利用長度相異之銅板132與不鱗鋼板 134多數片構成在軸方向具有2個彎曲部之軟性導體，並將各銅板132與各不銹鋼板134疊層成互相隔離，更以水閘形狀之屏蔽板154覆蓋軟性導體丨3〇中不含各可動電極桿間之中間部之區域之下部側之區域，故可降低操作器之操作力，且在軟性導體130響應來自操作器之操作力而變形時，可減 > 各銅板132或各不銹鋼板134間之摩擦（金屬彼此之摩擦），防止由各銅板132或各不銹鋼板134產生摩耗粉，並可防止摩耗粉飛濺至外側真空容器1〇内。更可防止因摩耗粉而發生接地障礙現象，可有助於可靠性之提高。其次，依照圖11及圖12說明本發明之第6實施形態，本實把形恶係利用多數銅線絞合而成之絞合線1 55構成軟性導體I 3 0並將2個在絞合線1 5 5中以密閉各可動電極桿間（各貫通孔間）之中間部區域之狀態所覆蓋之筒狀之膜盒156，藉硬焊固定於軟性導體130，其他構成與圖〗之情形相同。〇 \9I\9I630 DOC -15- !236692 本實施形態之軟性導體1 30也可在多數銅線絞合而構成之絞合線1 55中，採用施行以電鍍為首之表面處理之絞合線 1 55。更具體而言，可列舉鍍鉻，為確保鍍鉻與絞合線之密接性，可先在絞合線155施以鍍鎳，其次施行鍍鉻。電錢之作用在於防止未處理之銅絞合線在真空下操作過程令發生凝著現象，絞合線155之表面處理可藉軟性導體13()之可動條件，設定於最適化狀態。〇 \ 91 \ 9I630 DOC -14- 1236692 Next, the fifth embodiment of the present invention will be described in accordance with FIG. 9 and FIG. 10. The embodiment uses two copper plates 132 and stainless steel plates 134 to be laminated to form two green plates in the vehicle direction. The flexible conductor 13 of the curved part, and the flexible conductor assembly is intended to cover the copper plate U2 or the stainless steel plate 134 without the movable electrode rods :: sluice-shaped shielding plate 154 in the area below the area on the lower side. The other configurations are the same as those in the case of FIG. 1. This shielding plate m is made of stainless steel, i shielding plates ⑸ are set around the through holes 136 and 14 of the copper plate 132 and the non-recording steel plate 134, and two are arranged in the opposite direction around the through holes 138. Shield plate 154. According to this embodiment, a plurality of copper plates 132 and non-scale steel plates 134 having different lengths can be used to form a flexible conductor having two bent portions in the axial direction, and each copper plate 132 and each stainless steel plate 134 can be laminated to isolate each other. In addition, a shield plate 154 in the shape of a sluice covers the flexible conductor. The area on the lower side of the area that does not include the middle portion between the movable electrode rods, so the operating force of the operator can be reduced, and the response of the flexible conductor 130 comes from When the operating force of the manipulator is deformed, the friction between the copper plates 132 or the stainless steel plates 134 (the friction between the metals) can be reduced, and the friction powder can be prevented from being generated by the copper plates 132 or the stainless steel plates 134. Splashed into the outer vacuum container 10. It can also prevent the occurrence of ground faults due to friction powder, which can help improve reliability. Next, a sixth embodiment of the present invention will be described with reference to FIG. 11 and FIG. 12. In the present embodiment, a flexible conductor I 3 0 is formed of a twisted wire 1 55 formed by twisting a large number of copper wires, and two are twisted. In the case of line 1 5 5, a cylindrical membrane box 156 covered with a state in which the middle region between the movable electrode rods (between the through holes) is sealed is fixed to the flexible conductor 130 by brazing, and other structures and drawings the same. 〇 \ 9I \ 9I630 DOC -15-! 236692 The flexible conductor 1 30 in this embodiment can also be used in the stranded wire 1 55 formed by twisting most copper wires, and the stranded wire 1 which is subjected to surface treatment including electroplating is used. 55. More specifically, chrome plating may be mentioned. In order to ensure the adhesion between the chrome plating and the stranded wire, nickel plating may be applied to the stranded wire 155 first, followed by chrome plating. The function of the electric money is to prevent the untreated copper stranded wire from operating under vacuum to cause condensation. The surface treatment of the stranded wire 155 can be set to an optimal state by the movable conditions of the flexible conductor 13 ().

又’絞合線155在連接於各可動電極桿3〇〜34用之端部具有貫通孔（與前述銅板132同樣作用之貫通孔136、138、 140)。更具體而言，最好使用具有貫通孔之構造之端子板，將絞合線155之端部機械的或金屬的結合於具有貫通孔之構造之端子板。此時’利用-面對被施以電錢等表面處理The 'stranded wire 155' has through-holes (through-holes 136, 138, and 140 which function in the same manner as the copper plate 132) at the ends connected to the movable electrode rods 30 to 34. More specifically, it is preferable to use a terminal plate having a through-hole structure and mechanically or metally bond the ends of the stranded wires 155 to the terminal plate having a through-hole structure. At this time, the surface treatment such as electricity is applied to the use-face

之絞合線155、施行金屬的結合用之硬焊材料、及具有貫通孔之構造之端子板三者加壓，一面加熱使其成為一體時，可降低接觸電阻，故甚為合適。作為加熱手段，最好使用電阻加熱、雷射、電子束、電弧等可在短時間結合之手段。此等手段可有效防止硬焊材料藉毛細管現象在絞合線155 之端部異常擴散而拘束軟性導體13〇之移動，以致於增大可動應力。本貫施形態之膜盒156内之直允厭士 /吉介在、〆 n心具工壓力（真空度）係設定於比外側真空容器10内更低之直*。 4 μ 士 ^ ^ 例如，外側真空容器1 〇内之真空壓力為10一 7〜10-6 τ 々，人 10ΓΓ日守，各膜盒150内之真空壓力設定於 10-1 〜10—5 Τοιτ。將膜盒156内之真空壓力Γ首允 (〆、王度）設定於比外側真空容器The stranded wire 155, the brazing material used for the combination of metals, and the terminal plate with a through-hole structure are pressurized, and the contact resistance can be reduced when one side is heated to form one body, which is very suitable. As the heating means, it is preferable to use means that can be combined in a short time, such as resistance heating, laser, electron beam, and arc. These methods can effectively prevent the brazing material from restricting the movement of the flexible conductor 130 by the abnormal diffusion of the capillary phenomenon at the end of the stranded wire 155, so as to increase the movable stress. The straight allowable tirelessness / Ji Jiezai in the membrane box 156 of this embodiment is set to a lower straight pressure * than the inside of the outer vacuum container 10. 4 μ person ^ ^ For example, the vacuum pressure in the outer vacuum container 10 is 10-7 ~ 10-6 τ 々, person 10ΓΓ day guard, the vacuum pressure in each capsule 150 is set to 10-1 ～ 10-5 Τοιτ . Set the vacuum pressure Γ in the capsule 156 first (允, 王度) to the outer vacuum container

〇：\9|\91630 DOC -16- 1236692 人内更低之真工日守，可防止各絞合線1中膜盒1兄内之絞夂155之减著。另外’使膜盒1 56内之真空壓力成為低直空時，萬一膜盒156破裂日寺，也可減少對外側真空容器_ 之真空壓力之影響。、依據本實施形態’利用裸線徑0.12(裸線直徑0.12 _) 、下之，，X。線1 55構成軟性導體i 3G，並以膜盒i 56密閉絞合㈣5中各可動電極桿間之中間部區域之狀態加以覆蓋，故比前述各實施形態更能降低操作器之操作力，且在軟性導體130響應來自操作器之操作力而變形時，即使由絞合線 155產生摩耗粉，也可防止摩耗粉飛濺至外側真空容器内。更可防止因摩㈣而發生接地障礙現象，可有助於可罪性之提高。其次，依照圖13及圖14說明本發明之第7實施形態，本實 «態係在膜M56之軸方向__端側形成排氣孔158，將膜盒156之軸方向兩端側藉硬焊固定於絞合線155之際，經由排氣孔158將膜盒156内部排氣，其他構成與圖丨丨及圖a之情形相同。依據本實施形態，利用絞合線155構成軟性導體13〇，並以膜盒156密閉絞合線155中各可動電極桿間（各貫通孔間）之中間部區域之狀態加以覆蓋，故比前述各實施形態更能降低操作器之操作力，且在軟性導體13〇響應來自操作器之操作力而變形時，即使由絞合線155產生摩耗粉，也可防止摩耗粉飛飛至外側真空容器1〇内。更可防止因摩耗粉而發生接地障礙現象，可有助於可靠性之提高。 O\9l\9l630.DOC 17- 1236692 又’作為前述各實施形態之軟性導體丨3 〇，如圖丨5 (a)所不’也可採用利用在軸方向具有3個彎曲部之單一銅板1 6〇加以構成，且將銅板1 6〇之軸方向兩端連結於具有貫通孔之連結板162、164之構成。此時，需將銅板16〇退火，並將應力設定於5〜7 kgf，以防止銅板160被加工硬化。又，為取代銅板160，如圖15(b)所示，也可採用以使在軸方向具有5個彎曲部之銅板1 6 6、1 6 8相對向之狀態連結於連結板162、164之構成。將銅板166、168退火，並將應力設定於5〜7 kgf。又’在構成軟性導體130之際，如圖16所示，也可採用下列構成：即，利用長度相異之銅板132與不銹鋼板134，使减著防止用之不銹鋼板1 3 4僅位於擦動部，而將不銹鋼板 1 34長度設定於短於銅板丨32，交互地疊層銅板丨32與不銹鋼板134 ’以點焊等將不銹鋼板丨34固定於銅板132，將疊層之板材中之銅板13 2之兩端部鉚接，在真空中予以加熱之構成。此時，利用銅板132彼此之固相擴散接合，進一步提高接合力。又，如圖16(e)所示，作為銅板132與不銹鋼板134，使用長度相等之板材，交互地疊層銅板丨32與不銹鋼板 1 34 ’並構成將疊層之各板材之剖面之外周側在全體上形成圓形形狀時，即可將銅板132與不銹鋼板134收容於直徑小的膜盒156内。 [發明之效果] 如上所述，依據本發明，可防止摩耗粉等異物擴散至真空容器内。〇: \ 9 | \ 91630 DOC -16- 1236692 The lower real work day guard in people can prevent the twist in the membrane box 1 of each twisted wire 兄 155 from decreasing. In addition, when the vacuum pressure in the capsule 156 is made to be low, in the event that the capsule 156 ruptures, it can also reduce the influence of the vacuum pressure on the outer vacuum container. According to the present embodiment ', a bare wire diameter of 0.12 (bare wire diameter of 0.12 _) is used, and the next, X. The wire 1 55 constitutes a flexible conductor i 3G, and is covered by the state of the middle area between the movable electrode rods in the capsule i 56 closed stranded ㈣ 5, so that the operating force of the manipulator can be reduced more than the previous embodiments, and When the flexible conductor 130 is deformed in response to the operating force from the operator, even if the abrasion powder is generated by the stranded wire 155, the abrasion powder can be prevented from splashing into the outer vacuum container. It can also prevent grounding obstacles caused by Capricorn, which can contribute to the improvement of guilt. Next, a seventh embodiment of the present invention will be described with reference to FIG. 13 and FIG. 14. In this embodiment, an exhaust hole 158 is formed on the axial direction __end side of the film M56, and both ends of the axial direction of the film box 156 are borrowed. When it is welded and fixed to the stranded wire 155, the inside of the capsule 156 is exhausted through the exhaust hole 158, and the other structures are the same as those in FIG. 丨 and FIG. According to this embodiment, the flexible conductor 13 is constituted by the stranded wire 155, and the intermediate region of the movable electrode rods (between the through-holes) in the stranded wire 155 is sealed by the capsule 156, so it is more than Each embodiment can further reduce the operating force of the manipulator. When the flexible conductor 13 is deformed in response to the operating force from the manipulator, even if the abrasion powder is generated by the stranded wire 155, the abrasion powder can be prevented from flying to the outside vacuum container. Within 10. It can also prevent the ground fault caused by abrasion powder, which can help improve the reliability. O \ 9l \ 9l630.DOC 17-1236692 is also used as the flexible conductor of the previous embodiments, as shown in Figure 5 (a). A single copper plate with three bends in the axial direction can also be used. It is configured such that both ends in the axial direction of the copper plate 160 are connected to the connecting plates 162 and 164 having through holes. At this time, the copper plate 160 needs to be annealed and the stress is set to 5 to 7 kgf to prevent the copper plate 160 from being worked hardened. Further, instead of the copper plate 160, as shown in FIG. 15 (b), a copper plate 1 6 6 and 1 6 8 having five bent portions in the axial direction may be connected to the connecting plates 162 and 164 so as to face each other. Make up. The copper plates 166 and 168 are annealed and the stress is set to 5 to 7 kgf. Also, when forming the flexible conductor 130, as shown in FIG. 16, the following configuration may be adopted: That is, a copper plate 132 and a stainless steel plate 134 having different lengths may be used, so that the stainless steel plate 1 3 4 for reduction prevention is located only at the wiper. The length of the stainless steel plate 1 34 is set to be shorter than the copper plate 丨 32, and the copper plate 丨 32 and the stainless steel plate 134 are alternately laminated. The stainless steel plate 丨 34 is fixed to the copper plate 132 by spot welding, etc. Both ends of the copper plate 132 are riveted and heated in a vacuum. At this time, the solid-phase diffusion bonding of the copper plates 132 is performed to further increase the bonding force. As shown in FIG. 16 (e), as the copper plate 132 and the stainless steel plate 134, a plate having the same length is used, and the copper plate 32 and the stainless steel plate 1 34 'are alternately laminated to form the outer periphery of the cross section of each laminated plate. When the side is formed in a circular shape as a whole, the copper plate 132 and the stainless steel plate 134 can be housed in a small-diameter capsule 156. [Effects of the Invention] As described above, according to the present invention, it is possible to prevent foreign matter such as abrasion powder from diffusing into a vacuum container.

0 \9|\9I630 DOC -18 - 1236692 【圖式簡單說明】她形恶之真空配電器之要部剖圖1係表示本發明之第1實面正面圖。體之要部放大圖2(a)係軟性導體之正面圖’ (b)係軟性導正面圖，（C)係軟性導體之平面圖。器之要部剖圖3係表示本發明之第2實施形態之真空配電面正面圖。圖顿軟性導體之要部放大圖，(b)係圖，⑷係軟性導體之正面圖，⑷係隔片之正面圖。之正面面=示本發明之第3實施形態之真空配電器之要部剖圖6(a)係軟性導體之|立# 圖，…& .()係軟性導體之正面 c ’丁、軟性導體之正面圖，⑷係隔片之正面圖。態之真空配電器之要部剖圖7係表示本發明之第4實施形面正面圖。圖8(a)係軟性導體之正面圖，⑻係沿著⑷所示之a 之剖面圖，（c)係沿著（a)所示之Β_β線之剖面圖。 '、、圖9係表示本發明之第5實施形態之真空配電面正面圖。又I 口j 圖圖10(a)係水閘形狀之屏蔽板之平面圖，（…係係側面圖。、明之第6實施形態之真空配電器之要部圖11係表示本發剖面正面圖。圖12係圓筒狀膜盒之構成圖〇 W|\9|630 DOC； -19- 1236692 形態之真空配電器之要部圖1 3係表示本發明之第7實施别面正面圖。圖14(a)係膜盒之構成圖，（]3)係膜盒之要部放大圖。以圖15⑷係以單—銅板構成軟性導體時之構成圖，（ 2片銅板構成軟性導體時之構成圖。 ’、圖16(a)係軟性導體之另一實施形態之構成圖，⑻係銅板之平面圖，(c)係不銹鋼板之平面圖，⑷係安裝於銅板之不鏑鋼板之平面圖，（e)雜板與不錢鋼板之剖面圖。【圖式代表符號說明】 10 外側真空容器 12 上部板材 14 下部板材 30, 32, 34 可動電極桿 36, 38, 40 膜盒 60, 62, 64 固定電極桿 70, 72, 74 内側真空容器 76，78，80，82，84，86 絕緣性屏蔽板 88, 90, 92 可動電極側金屬板 94, 96, 98 固定電極側金屬板 100, 102, 104 貫通孔 106， 108， 110 膜盒 112, 114, 116 電極屏蔽板 118， 120， 122 可動電極 124， 126, 128 固定電極 630 DOC -20- 1236692 130 軟性導體 132 銅板 134 不銹鋼板 136, 138, 140 貫通孔 142, 144, 146 隔片 148 間隙 150 隔片 152 半分狀膜盒 154 水閘形狀之屏蔽板 155 絞合線 156 圓筒狀之膜盒 158 排氣孔 160, 166, 168 銅板 0A9IW1630 DOC - 210 \ 9 | \ 9I630 DOC -18-1236692 [Brief description of the figure] Sectional view of the main part of a vacuum distributor of the evil shape Fig. 1 is a front view showing the first real aspect of the present invention. The main part of the body is enlarged. Fig. 2 (a) is a front view of the flexible conductor '(b) is a front view of the flexible conductor, and (C) is a plan view of the flexible conductor. Fig. 3 is a front view showing a vacuum power distribution surface of a second embodiment of the present invention. An enlarged view of the main part of a Tuton flexible conductor, (b) is a diagram, a front view of the flexible conductor is a front view of the flexible conductor, and a front view of a diaphragm is a ⑷. Front surface = cross-sectional view of the main part of the vacuum distributor according to the third embodiment of the present invention. 6 (a) is a flexible conductor. | ##, ... &(;) is a front surface of the flexible conductor. Front view of the conductor, front view of the diaphragm. Fig. 7 is a front elevational view showing a fourth embodiment of the present invention. Fig. 8 (a) is a front view of the flexible conductor, ⑻ is a cross-sectional view along a shown by a, and (c) is a cross-sectional view along line B_β shown in (a). Fig. 9 is a front view showing a vacuum power distribution surface according to a fifth embodiment of the present invention. Fig. 10 (a) is a plan view of a shield plate in the shape of a sluice, (... is a side view. Fig. 11 is a front view of the main part of the vacuum distributor of the sixth embodiment of the invention. Figure 12 shows the structure of a cylindrical capsule 〇W | \ 9 | 630 DOC; -19- 1236692 The main part of a vacuum distributor in the form of Figure 13 shows a front view of the seventh embodiment of the present invention. Figure 14 ( a) Structure diagram of the membrane box, (] 3) Enlarged view of the main parts of the membrane box. Figure 15⑷ is a structure diagram when the flexible conductor is composed of a single-copper plate, and (a structure diagram when the two copper plates constitute the flexible conductor. ', Figure 16 (a) is a structural view of another embodiment of a flexible conductor, ⑻ is a plan view of a copper plate, (c) is a plan view of a stainless steel plate, ⑷ is a plan view of a non-steel steel plate mounted on a copper plate, and (e) miscellaneous Sectional view of plate and stainless steel plate. [Description of Symbols in the Drawings] 10 Outer vacuum container 12 Upper plate 14 Lower plate 30, 32, 34 Movable electrode rod 36, 38, 40 Capsule 60, 62, 64 Fixed electrode rod 70 , 72, 74 Inner vacuum container 76, 78, 80, 82, 84, 86 Insulating shield 88, 90 , 92 movable electrode side metal plate 94, 96, 98 fixed electrode side metal plate 100, 102, 104 through hole 106, 108, 110 capsule 112, 114, 116 electrode shield plate 118, 120, 122 movable electrode 124, 126, 128 Fixed electrode 630 DOC -20- 1236692 130 Flexible conductor 132 Copper plate 134 Stainless steel plate 136, 138, 140 Through hole 142, 144, 146 Separator 148 Gap 150 Separator 152 Semi-divided membrane box 154 Water shield shaped shield plate 155 Twisted Line 156 Cylindrical diaphragm box 158 Exhaust hole 160, 166, 168 Copper plate 0A9IW1630 DOC-21

Claims

1236692 拾、申請專利範圍： i. -種真空配電器’其係包含：作為接地對象之外側真空 =器、收容於前述外側真空容器内之多數内側真空= 為、使保持於可動電極桿之可動電極與保持於固定電極才干之固定電極相對向而分別分散配置於前述多數内側真空容器内之多數開關、及使前述多數開關之可動電極桿互相連結之軟性導體；前述軟性導體包含長度相異之：數導電性板材，前述多數導電性夕料^板材係互相隔離所疊層真空配電H，其係包含：作為接地對象之外側真 :益、收容於前述外側真空容器内之多數内側真空器、使保持於可動電極桿之可動電極與保持於固定； :二固：電極相對向而分別分散配置於前述多數内： r内之多數開關、及使前述多數開關之可動電極 :連結之軟性導體；前述軟性導體包含長度相異之動；二板材、在連結前述多數導電性板材與前述各1 二于之連結部中***前述各導電性板材間之多數R ’…數導電性板材係以前述各隔片為中 : 隔離所疊層而成者。木 3. 一種真空配電器，農及A人 ^ 容器、收容於前述包含··作為接地對象之外側真空器、使保持於可動：#|真空容器内之多數内側真空容桿之固定電極相對=之L動電極與！持於固定電極空容器内之多數開閼刀別刀放配置於則述多數内側真哥、及使前述多數開關之可動電極桿 0 \91\9I630 DOC ^36692 相連結之軟性導^^ . 數導電性板材、：；，：述軟性導體包含長度相等之多極桿之連結部中插二夕數導電性板材與前述各可動電前述則述各導電性板材間之多數隔片，夕數導琶性板材係一所疊層而成者。…述…為中間而互相隔離 4.如申請專利範圍第丨中在义、I 次3員中任一項之真空配電器，其〒在則述多數導電性板周m中^ fr、t k 液有覆现可述多數導電性板材 j图〒除刖迷各可動雷 5· 側之μ μ動包極才干間之中間部外之區域之下部 =之£域之槽利蔽板所構成者。一種真空配電器，里沒容 ’、，、匕έ •作為接地對象之外側真空各為、收谷於前述外側直六六的哭、#佴姓 …工谷态内之多數内側真空容口口、使保持於可動雷 # °干孓可動電極與保持於固定電極才干之固定電極相對向而分別空容器内之多數開關、及二述側真互相連結之軟性導體.〜數開關之可動電極桿板… 述軟性導體係疊層多數導電性材所構成，在前述多數導 _ 電性板材㈣中密f4n_r#/有以前述多數導覆宴之、别述各可動電極桿間之區域之狀態 6. |之同狀膜盒所構成者。 ::真電器，其係包含:作為接地對象之外側真空哭二:於前述外側真空容器内之多數内側真空容 :保持於可動電極桿之可動電極與保持卜之固定電極相對向而分別分散配：枉空容器内之夕罝歹、則迷夕數内側真互相連“之二二幻“述多數開關之可動電極桿叙性導體，前述軟性導體包含多數導電性铲〇 '9IWI630 DOC 1236692 5琛，在前述多數導電絞合線周圍中穷閉^夕数導電性閉刚述各可動電極桿間之區域之狀態覆盖之筒狀膜盒所構成者。 7.如申請專利範圍第5項之真空配侍由乒痄h ，、中別述軟性導體係由長度相等、材質相異導成，A展夕々省 ^ ^〖生板材,父互疊層所構 ^之“電性板材之剖面係其外形所構成者。版成圓 8·如申請專利範圍第5項之直成排氣孔所構成者。…、，其令在前述膜盒形 9·範圍第5、6或8項中任-項之真空配電器，1 广、益内之真空度係比前述外側真空容器内之直* 度低地設定所!構成者。 …二 1〇·^料利範圍第6項之真空配電器，其中前述多數導， ,，〜、線係使用裸線直徑0.12以下者所構成者。电 11 · 一種真空配電器，兑传#合容写^ 八糸。3 .作為接地對象之外側真空谷於前述外側真空容器内之多數内側真空容 : <保持於可動電極桿之可動電極與保持於固定 #之固定電極相對向空容器内之W 彳刀政配置於則述多數内側真夕數開關、及使前述多數開互相連結之軟性慕駟· a , 」動私極桿導體，則述軟性導體係疊層-多數導♦从反材所構成，在前述多數導包板材周圍中覆蓋前述各可動電極桿間之中間側之區域之開,合狀膜盒所構成者。 #之下部 1 2 · —種真空配電器，苴，、係匕έ :作為接地對象之外側真空〇 \91\9!630 DOC 1236692 !器、收容於前述外側真空容器内之多數内側真空容 :、使保持於可動電極桿之可動電極與保持於固定電極桿之固定電極相变+ τ、办—π相對向而分別分散配置於前述多數内側真二谷為内之多數開關、互相連使則述多數開關之可動電極桿 °人性導體；前述軟性導體俜晶犀义|w 板材所構成，在前述多數導，生板=:層夕數導電性導電性板材周圍中除前材’'有覆蓋前述多數區域之下部側之區〜可動電極桿間之中間部外之 Q或之槽形屏蔽板所構成者。 0 \9I\9I630 DOC1236692 Patent application scope: i.-A type of vacuum distributor, which includes: outside vacuum as a grounding object, most of the inside vacuum contained in the above-mentioned outside vacuum container = for keeping the movable electrode rod movable. The electrodes and the fixed electrodes held by the fixed electrodes are opposite to each other, and the plurality of switches arranged in the plurality of inside vacuum containers and the flexible conductors that connect the movable electrode rods of the plurality of switches to each other; the flexible conductors include different lengths. ： Number of conductive plates, most of the aforementioned conductive materials ^ The plates are separated from each other by the stacked vacuum power distribution H, which includes: as the grounding object, the outer side is true: most of the inner vacuums housed in the outer vacuum container, The movable electrode held on the movable electrode rod and the fixed electrode are fixed; the two solids: the electrodes are oppositely disposed separately and arranged in the aforementioned majority: the majority of switches in r, and the movable electrodes of the aforementioned majority of switches: a flexible conductor connected; The aforementioned flexible conductor includes movements of different lengths; 1 of each plate and the two connecting portions in the majority of R is inserted between each of the conductive plate '... the number of lines to the conductive plate as in the foregoing separator: The stack formed by the isolation. Wooden 3. A vacuum distributor, a container for farmers and A ^, which is contained in the aforementioned vacuum, which is the grounding object, and is held in a movable position: # | The fixed electrode of most of the inside vacuum containers in the vacuum container is relatively = The L moving electrode with! The majority of the open-ended knives held in the fixed electrode empty container are placed on the inside of the majority of the brothers, and the flexible guides that connect the movable electrode rods of the above-mentioned most switches 0 \ 91 \ 9I630 DOC ^ 36692 ^ ^. Conductive plate :: The flexible conductor contains a plurality of poles of equal length and is inserted in the connecting portion between the conductive plate and each of the movable electricity. The foregoing describes most of the spacers between the conductive plates. Pai sheet is a laminate. … Described… for the middle and isolated from each other 4. For example, in the scope of the patent application, the vacuum distribution device of any one of the meanings, I, 3 times, it is described in most of the conductive plate perimeter m fr, tk liquid It can be described that most of the conductive plates are formed by the grooved shield plate in the lower part of the area except the middle part of the μ μ side of the movable bag of the movable thunder. A vacuum power distribution device with no capacity in the inside and outside • As the grounding object, the outside vacuum is divided into the above-mentioned outer straight six six cry, # 哭 surname ... most of the inner vacuum containment mouths in the industrial valley state 、 Make most movable switches in the empty container facing the movable electrode and the fixed electrode capable of holding the fixed electrode facing each other and separate the majority of the switches in the empty container, and the flexible conductors that are connected to each other. Plate ... The flexible conductive system is composed of a stack of most conductive materials. In the foregoing conductive material, the dense f4n_r # / is covered by the foregoing conductive material, and the state of the region between the movable electrode rods 6 . | The same shape of the capsule. :: Zhendian, which includes: the outer side of the vacuum object as the grounding object 2: most of the inner vacuum volume in the aforementioned outer vacuum container: the movable electrode held on the movable electrode rod and the fixed electrode held on the opposite side are separately distributed ： Even in the empty container, the inside of the imaginary number is really connected to each other. The "two-two magic" describes the narrative conductor of the movable electrode rod of most switches. The aforementioned flexible conductor contains most of the conductive shovel. 0'9IWI630 DOC 1236692 5chen In the above-mentioned plurality of conductive stranded wires, the conductive membrane is composed of a cylindrical membrane case that covers the state of the region between the movable electrode rods. 7. If the vacuum service of item 5 in the patent application scope is made of ping 痄 h, the soft guide system mentioned in the above is made up of equal lengths and different materials, and the province of A will be ^ ^ 〖Green board, parent laminated each other The section of the “electrical plate” constituted by ^ is the shape of its outer shape. Version into a circle 8 · As in the patent application scope No. 5 by the straight exhaust holes.... · Vacuum distributors in any of the items 5, 6, or 8 of the range, the vacuum degree of the wide and the benefit is set lower than the degree of straightness * in the outer vacuum container as described above. The vacuum distributor of item 6 of the material benefit range, in which most of the above-mentioned conductors are composed of those with a bare wire diameter of 0.12 or less. Electricity 11 · A vacuum distributor, duanchuan # 合容写 ^ 糸3. Most of the inside vacuum capacity of the outside vacuum valley as the grounding object in the aforementioned outside vacuum container: < The movable electrode held on the movable electrode rod and the fixed electrode held on the fixed # are opposed to the W inside the empty container. It is arranged on the inside of the majority of the real number switch, and the majority is turned on The connected flexible mu 驷 · a, ”movable and private pole conductors, then the flexible conductor system is laminated-most conductors are composed of anti-material, covering the middle of the aforementioned movable electrode rods around the majority of the guide plate material. The side area is opened, which is composed of a closed capsule. # 下部 1 2 · —Vacuum distributors, 苴 ,,, and daggers: as the grounding object, the outside vacuum is 〇 \ 91 \ 9! 630 DOC 1236692! Most of the inside vacuum containers contained in the aforementioned outside vacuum container: The phase change of the movable electrode held by the movable electrode rod and the fixed electrode held by the fixed electrode rod + τ, —-π are opposite to each other, and most of the switches are dispersedly arranged inside the above-mentioned true two valleys. The movable electrode rod of most switches described above is a human conductor; the soft conductor is composed of the above-mentioned material; w is composed of the plate. In the above-mentioned majority of the conductors, the green plate =: layer and the number of conductive conductive plates is excluding the front material. The area from the lower part of most of the aforementioned areas to the Q or groove-shaped shield plate outside the middle part between the movable electrode rods. 0 \ 9I \ 9I630 DOC