TWI229186B - Dual-view-angle 3D figure image line-scan inspection device - Google Patents
Dual-view-angle 3D figure image line-scan inspection device Download PDFInfo
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五、發明說明（1) 【發明所屬之技術領域】 本發明係有關一種線性掃描（Line scan)光幾a、 置，特別是有關一種雙視角之線性掃描光學檢測^測裝 係利用不同視角之兩個成像裝置搭配一斜向光源^ ，其 測物體表面缺陷之大小、形狀及其高度，達到二Ί斷待 像檢測之效果。 維形貌影 【先前技術】 自動化光學檢測是指一個能自動提供待測物體表面缺 陷資訊的影像分析器，經由影像偵測器，從待測物體擷取 原始影像，並分析可取得的影像資訊後，將所得結果以數 位或類比方式輸出，可用於自動檢測、分類、加工，亦稱 之為「機器視覺」。自動化光學檢測系統應用的領域相當 廣泛’幾乎涵蓋所有工業，其中以製造方面的應用比例最 兩’其次是機器人和航太方面，再次是研發和醫療方面的 應用。V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a linear scanning (line scan) optical device a, and particularly to a dual-view linear scanning optical detection system. The two imaging devices are equipped with an oblique light source ^, which measures the size, shape, and height of the surface defects of the object, and achieves the effect of two-point detection of pending images. Dimensional Shape Shadow [Previous Technology] Automated optical inspection refers to an image analyzer that can automatically provide information on the surface defect of the object to be tested. Through the image detector, the original image is acquired from the object to be tested and the available image information is analyzed. After that, the obtained results are output in digital or analog mode, which can be used for automatic detection, classification, and processing, also known as "machine vision". The field of application of automated optical inspection systems is quite wide, covering almost all industries, of which the application proportion in manufacturing is the second most, followed by robotics and aerospace, and R & D and medical applications.
Ik著電子業元件小型化和細線化的趨勢，以及生產線 ，度需求日益增快，人工目視已無法符合檢測要求，尤其 是IC：全製程各階段均需要自動化光學檢測，例如晶圓製 造、半導體封裝、球閘陣列封裝（Ball Grid Array，BGA)、雷射刻印（Laser Mark)，以及各式顯示器如 LED、LCD、PDP、0LED等均需倚靠自動化光學檢測儀器來 進行產品缺陷之判斷與產品良率提昇之研究依據。 傳統之線性掃描光學檢測系統，如圖一A所示，其係Ik follows the trend of miniaturization and thinning of components in the electronics industry, as well as the increasing demand for production lines. Manual visual inspection is no longer able to meet inspection requirements, especially IC: automated optical inspection is required at all stages of the entire process, such as wafer manufacturing, semiconductors Packaging, Ball Grid Array (BGA), Laser Mark, and various displays such as LEDs, LCDs, PDPs, 0LEDs, etc. all rely on automated optical inspection equipment to determine product defects and products. Research basis for yield improvement. The traditional linear scanning optical detection system is shown in Figure 1A.
1229186 五、發明說明（2) 先將一待測物體11置於一底座平台1 2上，而待測物體11上 方適當距離處則設置有一成像裝置1 3，此外成像裝置1 3前 端或是旁邊則設置有一光源裝置1 4，其可提供待測測物體 11所需之光線並產生近似同軸光源（coaxial lighting)的 效果。光線經由待測物體11表面反射後將入射至成像裝置 1 3内，若待測物體11表面含有外來物或缺陷，則照射至外 來物或缺陷的光線便可散射進入成像裝置丨3内，如此一 來’待測物體1 4表面之外來物或缺陷則可清楚地被發現。 此時再以一驅動裝置（圖例未標示）驅動成像裝置丨3，使其 以線性等速行進之方式線性掃描整個待測物體，亦或固定 成像裝置13不動，此時再以一驅動裝置（圖例未標示）驅動 底座平台1 2 ’使其以線性等速移動進行線性掃描整個待檢 測物體，則待測物體整個表面之外來物和缺陷的位置及豆 他資訊即可完整地紀錄下來。 八 、除了上述之系統外，如圖一B所示，其係利用斜視 之成像裝置13,與一同側之斜向光源14，來檢測待測物體 ^，’ λ樣—驅動裝置（圖例未標示）驅動成像裝置 仃、，，掃描，而以此構造所得到待側物體表面< 清楚而利於影像=斷其對比反差uQntFast)有可能比較 成像裝置之另，眘C,所不’其係為習知技術中利用斜視角 ’像裝置之另f施方式。與前述之實施1229186 V. Description of the invention (2) First place an object 11 to be tested on a base platform 12 and an imaging device 13 is arranged at an appropriate distance above the object 11 to be measured. In addition, the imaging device 1 3 is at the front or side Then, a light source device 14 is provided, which can provide the light required by the object 11 to be measured and produce an effect similar to coaxial lighting. The light reflected on the surface of the object to be measured 11 will be incident into the imaging device 13. If the surface of the object 11 to be tested contains foreign objects or defects, the light irradiated to the foreign objects or defects can be scattered into the imaging device 3, so In the first place, foreign objects or defects on the surface of the object to be measured can be clearly found. At this time, a driving device (not shown in the figure) is used to drive the imaging device 3, so that the entire object to be measured is scanned linearly at a constant speed, or the imaging device 13 is fixed, and a driving device ( The legend is not shown.) Drive the base platform 1 2 'to linearly scan the entire object to be inspected at a constant linear velocity, and then the position of foreign objects and defects on the entire surface of the object to be inspected and the other information can be completely recorded. 8. In addition to the above-mentioned system, as shown in FIG. 1B, it uses a squinting imaging device 13 and an oblique light source 14 on the same side to detect the object to be measured ^, 'λ-like-driving device (not shown in the legend) ) Drive the imaging device 仃 ,,, and scan, and the surface of the object to be obtained with this structure is clear and conducive to the image = breaking its contrast uQntFast) It is possible to compare the imaging device with another, be careful C, so it is not Another method of using an oblique view imaging device in the conventional technology. And the aforementioned implementation
疋，此實施*式所利用之光源14，，係與成像裝上3 L 要疋可形成亮度較強的反射光而可能產生較 MB I麵Alas, the light source 14, which is used in this implementation, is installed with 3 L of imaging. It is necessary to form a brighter reflected light, which may produce a MB I surface.
第6頁 1229186 五、發明說明（3) 大之對比反差變化， 較容易顯現出來。 然以上述所有方 陷落於待測物體表面 小，至於此外來物或 狀結構均無從準確判 要倚靠三維形貌之光 檢測系統需利用較複 各個方向的掃描判讀 的時間太長亦是一大 說的確不切實際。因 法而能達成三維形貌 造廠商所欲積極研發 董士於吸光材質或著刻痕等缺陷可以比 式所得之資 <相對位置 &陷之立體 別。因此， $撿測系統 #之干涉光 ’除了設備 問題，對於 此’如何設 影像估算之 之標的。 料，僅可判 ’及其單方 形狀、高度 為達上述之 。惟現行之 學方法與成 花費昂貴外 一高速的三 計以一簡易 系統’實為 斷外來 向截面 甚至是 功效， 三維形 像裝置 ，其掃 維形貌 型線性 現今高 物或缺 之大 凹或凸 勢必需 貌光學 以進行 描檢測 檢測來 掃描方 科技製 【發明内容】 本發明之主要目 線性掃描檢測裝置， 影像之功效。 的係提供一種雙視角之三維形貌影像 乂達成估真待測物體表面之三維形貌Page 6 1229186 V. Description of the invention (3) Large contrast changes are relatively easy to show. However, it is small that all of the above sides fall on the surface of the object to be measured. As for the other objects or structures, it is impossible to accurately determine the light detection system that depends on the three-dimensional topography. It takes a long time to scan in various directions. It is indeed unrealistic. Can achieve three-dimensional topography due to law Manufacturers want to actively develop R & D Tung's light absorption material or defects such as scratches can be compared with the resulting < relative position & trapped stereoscopic difference. Therefore, in addition to the equipment problem, the $ Interfering light of the pick-up system # is the target of how to set the image estimation. It can only be judged that ′ and its unilateral shape and height are up to the above. However, the current academic method and the costly, high-speed, high-speed, three-pronged, simple system are actually broken external cross-sections and even functions. The three-dimensional imaging device has a linear shape and shape that is currently high or missing. Or the convex potential must be optically scanned for scanning detection. [Summary of the Invention] The main objective of the present invention is a linear scanning detection device, and the effect of the image. The system provides a three-dimensional topographic image of two perspectives.
本發明之又-目的係提供一種雙視角之三維形貌影像 線性掃描檢測裝置，以達成判斷待測物體表面之缺陷與外 來物的相對位置及其高度、體積與形狀等各項參數之功 效。 為達上述之目的，本發明一種雙視角之三維形貌影像 線性掃描檢測裝置係包含一正視角線性掃描裝置、一斜視Another object of the present invention is to provide a dual-view three-dimensional topographic image linear scanning detection device, so as to achieve the function of judging the relative position of a defect on the surface of an object to be measured and a foreign object, and its height, volume and shape. To achieve the above-mentioned object, a three-dimensional topographic image of a dual-viewpoint linear scanning detection device of the present invention includes a positive-viewpoint linear scan device and a squint.
1229186 五、發明說明（4) 角線性掃描裝置以及一光源裝置。其中該正視角線性 裝置上乃裝有至少-主成像裝置，此一正視角線性掃田 置係相距待檢測物體一適當之高度，而該待檢測物體則: 放置於（placed on) —底座平台上方。主成像裝置之光轴疋 係垂直，或約略垂直於底座平台所處之平面，且其取像 (imaging)方向係正對準待檢測物體。此外，藉由'一驅 裝置可使此正視角線性掃描裝置與光源裝置及9斜視 掃描裝置同步運動，在相對於該底座平台之一平面上進— 平行等速直線運動，進而完成雙視角之線性掃描；亦2 ^定正視角線性掃描裝置、光源裝置及斜視角線 裝置不動，再藉由一驅動裝置驅動底座平台，使 台相對於上方固定不動裝置進行平行等速直線運動:^二 成雙視角之線性掃描。 ％ 而：視角線性掃描裝置丨’則裝有至少一斜 =置，此一斜視角線性掃描裝置相對於前述之正視 = 光Ϊ if 傾斜有一第一傾斜角’介於斜視角成像裝置之 ί Ϊ = ΐ像裝置之光轴間的夾角即為該第一傾斜角% =角度約略為4。至8。度角之間。此外，藉由_ =裝： 視角線性掃描裝置與正視角線性 = 在相對於該底座平台之-平面上進％ 梦罟奴 ，亦可改為固定正視角線性掃描裝置、光 底座平台相對於上方固定不動以：平:使其 動’以完成雙視角之線性等速直線運 ΙΗί^ ΪΗ 第8頁 1229186 五、發明說明（5) 至於光源裝置，則是用 置係相對於正視角線性掃描 該第二傾斜角則可大於或小 由一驅動裝置可使此光源襄 視角線性掃描裝置同步運動 面上進行平行等速直線運動 描裝置、光源裝置及斜視角 動裝置，使其底座平台相對 等速直線運動，以完成雙視 為達上述之目的，本發 線性掃描檢測裝置之另一實 與斜視角線性掃描裝置係可 體，並藉由同一驅動裝置於 等速直線運動。而斜視角線 由一連結裝置將其連結為一 所在之平面上同時進行平行 置更可整合於斜視角成像裝 其所發射出的斜視角光源形 來照射待檢測物體，此光源裝 裝置傾斜有一第二傾斜角，而 於該第一傾斜角，且其係可藉 置與斜視角線性掃描裝置及正 ’在相對於該底座平台之一平 ’亦可改為固定正視角線性掃 線性描裝置不動，再藉由一驅 於上方固定不動裝置進行平行 角之線性掃描。 明一種雙視角之三維形貌影像 施例中，正視角線性掃描裝置 利用一連結裝置將其連結為一 其所在之平面上同時進行平行 性掃描裝置亦可與光源裝置經 ，、’並藉由同一驅動裝置於其 :速直線運動。此夕卜，光源裝 置上，面向該待檢測物體，使 成一同轴光源。1229186 V. Description of the invention (4) Angular linear scanning device and a light source device. The positive-view linear device is equipped with at least a main imaging device. The positive-view linear field sweeping system is located at an appropriate height from the object to be detected, and the object to be detected is: placed on-a base platform Up. The optical axis 疋 of the main imaging device is vertical, or approximately perpendicular to the plane on which the base platform is located, and its imaging direction is directly aligned with the object to be detected. In addition, the 'one-drive device' can be used to synchronize the forward-view linear scanning device with the light source device and the 9-squint scanning device, moving in a plane relative to the base platform-parallel and constant-speed linear motion, thereby completing the dual-view angle Linear scanning; also 2 ^ fixed positive viewing angle linear scanning device, light source device and oblique viewing angle line device do not move, and then drive the base platform by a driving device, so that the table performs a parallel constant velocity linear motion relative to the fixed fixed device above: ^ 20% Dual-view linear scanning. % And: the linear viewing angle scanning device is equipped with at least one oblique = set, this oblique viewing linear scanning device is opposite to the aforementioned front view = light Ϊ if tilted with a first tilt angle 'is between the oblique viewing angle imaging device Ϊ Ϊ = The included angle between the optical axes of the imaging device is the first tilt angle% = the angle is approximately 4. To 8. Between degrees. In addition, with _ = installed: linear scanning device of viewing angle and linear view of positive angle = advance on the -plane relative to the base platform% Nightmare, can also be fixed to a linear scanning device of positive viewing angle, the optical base platform is relative to the top Fixed and fixed: flat: make it move 'to complete the linear constant-speed straight-line operation of the double angle of view Η Η ^ ^ Page 8 1229186 V. Description of the invention (5) As for the light source device, the position is scanned linearly with respect to the positive angle of view. The second inclination angle can be larger or smaller. A driving device can make the light source view the linear scanning device to perform a parallel constant velocity linear motion tracing device, a light source device and an oblique viewing angle motion device on the synchronous moving surface, so that the base platform is relatively constant velocity. To achieve the above-mentioned purpose, the linear motion is completed. The other real linear scanning device of the present invention and the oblique-angle linear scanning device are body-shaped, and move linearly at the same speed by the same driving device. The oblique view line is connected by a connecting device to a plane on which it is located and placed in parallel. It can be integrated into the oblique view imaging device to emit the oblique view light source shape to illuminate the object to be detected. The second inclination angle, and at the first inclination angle, it can be borrowed with a linear scanning device with an oblique viewing angle, and can be changed to a fixed positive viewing angle linear scanning linear tracing device that is 'in a plane relative to the base platform'. Then, a linear fixed scan of parallel angle is performed by a fixed fixed device on the top. In the example of a two-dimensional three-dimensional topographic image, a positive-view linear scanning device uses a connecting device to connect it to a plane on which it is located. At the same time, the parallel scanning device can also pass through the light source device. The same driving device: its linear speed. In addition, the light source device faces the object to be detected and forms a coaxial light source.
【實施方式】 明雙視角之三 動作方式、達 維 成 二維形貌影像[Embodiment] The third way of the dual perspective of Ming Dynasty
以下將舉出較佳實施例以詳細說 形貌影像線性掃描檢測裝置的 功效以及本發明的其他技術特徵二" 圖二A與圖二”為本發明—種雙視負 1229186 五、發明說明（6) 線性掃描檢測裝置之一較佳實施例示意圖，其主要係由一 正視角線性掃描裝置21、一斜視角線性掃描裝置22以及一 光源裝置23所組成。如圖所示，其中待檢測物體24係固 於底座平台25之上，正視角線性掃描裝置21設置於距 待檢測物體24上方有一適當之距離，此正視角線性掃描Λ 置21上則裝有一到多個主成像裝置⑸。主成像裝置⑼心 線掃描相機（line-scan camera)，其中之感光元件係可為 CCD感光元件或CM〇s感光元件，其係用來接收自待測物體… 2 4反射後之光線以成像於其感光元件中。主成像裝置2 6 可為一般面掃描（Area scan) CCD相機或面掃描（ha ’、 scarOCMOS相機。主成像裝置26之光轴261係垂直，或約略 垂直該底座平台25，且其鏡頭乃對準待檢測物體24，此 ^卜署驅動裝置（圖中未標*)可使此正視角線性掃描 裝置21與光源裝置23及斜視角線性掃描裝置22同步 ^ =於底座平台25之—平面上進行平行等速直線運動進 =、雙視角之線性掃描；亦可改為固定正視角線性掃 二1、光源裝置23及斜視角線性掃描裝置22不動，再葬 由—驅動裝置驅動底座平台25,使其底座平台相對於上^ Ξίί動裝置進行平行等速直線運動，以完成雙視角之線 斜視角線性掃描裝置22上裝有一到多個斜視角 ’此斜視角線性掃描裝置22相對於正視角線性掃描 主#:Ϊ有一角度Θ，而斜視角成像裝置27之光軸271鱼該 成像裝置26之光轴261間的夾角即為θ，該θ約略為4〇至In the following, the preferred embodiment will be described in detail to describe the efficacy of the topographic image linear scanning detection device and other technical features of the present invention. "Figure 2A and Figure 2" is the present invention-a kind of double vision negative 1229186. 5. Description of the invention (6) A schematic diagram of a preferred embodiment of a linear scanning detection device, which is mainly composed of a positive-view linear scanning device 21, an oblique-view linear scanning device 22, and a light source device 23. As shown in the figure, The object 24 is fixed on the base platform 25. The positive-view linear scanning device 21 is disposed at an appropriate distance from the object 24 to be detected. The positive-view linear scanning device 21 is equipped with one or more main imaging devices ⑸. The main imaging device is a line-scan camera. The photosensitive element can be a CCD sensor or a CMOS sensor, which is used to receive the reflected light from the object to be measured ... 2 4 In its photosensitive element. The main imaging device 26 can be a general area scan CCD camera or an area scan (ha ', scarOCMOS camera. The optical axis 261 of the main imaging device 26 is vertical, or The base platform 25 is slightly vertical, and its lens is aimed at the object 24 to be detected. This driving device (not shown in the figure) enables the positive-view linear scanning device 21, the light source device 23, and the oblique-view linear scanning device. 22 Synchronization ^ = Parallel constant velocity linear motion advancement on the plane of the base platform 25-, dual-view linear scanning; can also be changed to fixed positive-view linear scanning II 1. Light source device 23 and oblique-view linear scanning device 22 do not move The re-burial is driven by the driving device to drive the base platform 25 so that the base platform moves in parallel and constant linear motion relative to the moving device to complete the line of the two-angle oblique view. The linear scanning device 22 is equipped with one or more oblique views. 'This oblique-view linear scanning device 22 scans with respect to the positive-view linear scanning main #: Ϊ has an angle Θ, and the angle between the optical axis 271 of the oblique-view imaging device 27 and the optical axis 261 of the imaging device 26 is θ, where θ Approximately 40 to
1229186 五、發明說明（7) ’其鏡頭乃斜視角對準待檢測物體24，並愈主成像 6之鏡頭對準同-區域。此外，藉由—驅動裝二(成圖像 中未標7F)可使此斜視角線性掃描袭置挦 描裝置21及光源裝置23同步運 、視角線f生知 -平面上進行平行等速直線=該底座平台之 驅動裝置(圖中未標示），使其底座平台上 線性掃描。 订十仃等速直㈣動，以完成雙視角之 、、序维Ϊ爻裝置23係用來提供待檢測物體所需之光源，此光 角線性掃描裝置傾斜有 二了大於或小於該Θ角’且其係可藉由一驅動 / 2可使此光源裝置23與斜視角線性 未 角線性掃描裝置21同步運動，在相對於該底座平台之一視 ί ΐ ΐ直線運動’亦可改為固定正視角線性掃 2裝置(圖中未標示），使其底座平台相對： ^不動裝置進行平行等速直線運動，以完成雙視角之線 婦描。 始旦/二t考圖二Α及圖三Β ’其係、為本發明雙視角之三維形 貌衫像線性掃描檢測裝置用於檢測時之示意圖，若1229186 V. Description of the invention (7) ′ The lens is aimed at the object 24 at an oblique angle, and the lens of the main imaging 6 is aimed at the same-area. In addition, by driving the device 2 (not marked with 7F in the image), the oblique viewing linear scanning and scanning device 21 and the light source device 23 can be synchronized, and the viewing angle line f is known-a parallel constant velocity straight line on the plane = The driving device (not shown in the figure) of the base platform makes the base platform scan linearly. Order ten times at a constant speed to complete the dual-view, sequential dimensioning device 23 is used to provide the required light source for the object to be detected. The light angle linear scanning device is tilted more than or less than the Θ angle. 'And it can make this light source device 23 move synchronously with the oblique view linear non-angle linear scanning device 21 by a drive / 2, and it can be changed to fixed when viewed from one of the base platforms. Positive-view linear scanning 2 device (not shown in the figure), with its base platform facing: ^ Fixed device performs parallel constant-speed linear motion to complete dual-view line drawing. Shidan / Two t test Figures two A and three B 'This is a schematic diagram of the three-dimensional topography shirt linear scanning detection device of the present invention when used for detection, if
來物241落於待測物舰上方，則利用一斜向光源23大 所^的光線’可將外來物241投影於待測物體24表面而 形成-陰影242 ’料由主成像裝置⑼所感應的影像中，IThe incoming object 241 falls above the object to be measured, and then a foreign light 241 is used to project the foreign object 241 onto the surface of the object 24 to be formed by using an oblique light source 23. The shadow 242 is detected by the main imaging device ⑼ In the image, I
第11頁 1229186 五、發明說明（8) 區將呈現陰暗狀態而I I區將呈現光亮之狀態。若如圖r B 所示，待測物體24上方之缺陷係為一凹陷結構241，，則經 由斜向光源2 3所照射後’其直接被照射之區域乃呈現齐部 242’ ，在主成像裝置26所感應的影像中，I區將呈現光^ 狀態而11區則會呈現陰暗狀態。由此可知，藉由主成像^ 置26所得到之暗部、亮部甚至亮度分布情況f便可以判斷 待測物體24表面缺陷為凸出亦或是凹陷。此外，纟士人由主 成像裝置2 6所感測得到的正視角截面加上經由斜視角成像 裝置27所感測得到之待測物體的斜視截面，更可估笞 (estimate)待測物體表面外來物甚至是待測物本身表面輪 廓之高度分佈。而由此兩樣成像裝置所得到之影像經由^ 當之交叉運算後，亦能估算其三維形貌之影像進而推曾出 其待測物體表面外來物之大致體積、大致的截面形狀^高 本發明之又一較佳實施例中，正視角線性掃描 ΪΓ見=掃描裝置22係可利用一連結裝置將其連結為 产由同一驅動裝置於其所在之平面上同時進行平 订等速直線運動。而斜視角線性掃描裝置 =經由-連結裝置將其連結為-體，藉由同一驅= 在之平面上同時進行平行等速直線 為一趙，並藉由：====裝 i底同時進行平行等速直線運動，此 处、固疋不動狀態，以完成雙視角之線性掃 第12頁 1229186Page 11 1229186 V. Description of the invention (8) The area will appear dark and the I I area will appear bright. If, as shown in FIG. RB, the defect above the object 24 to be tested is a recessed structure 241, then after being illuminated by the oblique light source 23, 'the area directly irradiated is a uniform part 242', and the main imaging In the image sensed by the device 26, the area I will appear light and the area 11 will appear dark. From this, it can be known that the dark, bright, and even brightness distribution f obtained by the main imaging unit 26 can determine whether the surface defect of the object 24 to be measured is convex or concave. In addition, the normal viewing angle section sensed by the main imaging device 26 and the oblique view section of the object to be measured detected through the oblique viewing angle imaging device 27 can further estimate the foreign object on the surface of the object to be measured. Even the height distribution of the surface contour of the test object itself. The images obtained by the two imaging devices can also be used to estimate the three-dimensional shape of the image after cross-calculation, and then the approximate volume and approximate cross-sectional shape of the foreign object on the surface of the object to be measured can be derived. In yet another preferred embodiment, the linear scanning of the normal viewing angle 见 Γ = = The scanning device 22 can be connected by a connecting device to produce the same driving linear motion at the same time on the same plane by the same driving device. The oblique-view linear scanning device = connects it to -body through the -connecting device, and uses the same drive = to perform parallel constant velocity straight lines on the plane at the same time as a Zhao, and simultaneously: Parallel constant velocity linear motion, here, fixed in a stationary state to complete the linear sweep of the dual perspective. Page 1212186
五、發明說明（9) T丄另:卜，底座平台25亦可於其所處之相對 進行平行等速直線運動，此時= =…描装置處於固定狀態’以完成雙視角 直往ΪΪ ’光源裝置亦可以整合至斜視角成像裝置27上， 其：可針對斜視角成像裝置2?形成一同轴光源(coaxW hatlng)，如圖四A所示，利用一分光鏡（beani 斜放於斜視角成像裝置27接收端之前方， η邊光源裝置23,所發出之光線入射至分光鏡28並經 裝置：ί ϊ ί二先線進行之方向係可轉為與斜視角成像 供正視角線性掃描裝置21所需的斜向光源外， =像裝置2: 一同轴光源，以避免因光源入射 夕、t : ^同所形成之側向陰影及散射會進而增加影像判斷 :複雜度，如圖四B所示。其中較佳者，分光㈣之透射 為50%，其除了可提供半反射鏡功能使得側邊光 、 所發出光源得以轉向入射至待測物體表面外， :f測物體表面反射之光線亦可穿透此分光鏡2 8以進入並 成像於斜視角成像裝置27中。 w·这叫參考圖i ’其係為本發明雙視角之三維形貌影像線 =知描檢測裝置之又一實施例。在本實施例中主要係由一 線性掃描裝置31、H性掃描裝置32以及__反射 鏡組33所組成。其中待檢測物體34乃固定於底座 35之 上，而第-線性掃描裝置31則設置於距離該待檢測：體％V. Description of the invention (9) T 丄 Another: Bu, the base platform 25 can also perform parallel, constant-speed, linear movements relative to where it is located, at this time = = ... the tracing device is in a fixed state 'to complete the dual-angle view straight to ΪΪ' The light source device can also be integrated into the oblique-view imaging device 27, which can form a coaxial light source (coaxW hatlng) for the oblique-view imaging device 2 ?, as shown in FIG. 4A, using a beam splitter (beani obliquely placed in squint) In front of the receiving end of the angle imaging device 27, the η edge light source device 23, the light emitted is incident on the beam splitter 28 and passes through the device: ϊ ί The direction of the two forward lines can be converted to oblique viewing angle imaging for positive scanning linear scanning Outside of the oblique light source required by the device 21, = image device 2: a coaxial light source, to avoid side shadows and scattering caused by the light source incident, t: ^ and the resulting shadow and scattering will increase the image judgment: complexity, as shown in the figure It is shown in Figure B. Among the better, the transmission of the spectroscope is 50%. In addition to providing a semi-reflective function to enable side light and the emitted light source to be incident on the surface of the object to be measured,: f measures the surface reflection of the object. Light can also penetrate this beam The mirror 28 is entered and imaged in the oblique viewing angle imaging device 27. This is referred to as the reference figure i ', which is another embodiment of the three-dimensional topographic image line of the present invention with two perspectives. The example is mainly composed of a linear scanning device 31, an H-scanning device 32, and a __reflector group 33. The object to be detected 34 is fixed on the base 35, and the first linear scanning device 31 is set at a distance The to be detected: body%
第13頁 1229186 五、發明說明（10) 上方有一適當之距離，此第一線性掃描裝置31上還裝有一 到多個主成像裝置36。主成像裝置36之光軸361係垂直， 或約略垂直該底座平台3 5，且其鏡頭乃正視角對準待檢測 物體3 4 ’此外，藉由一驅動裝置（圖中未標示）可使此第一 線性掃描裝置3 1與光源裝置3 8及第二線性掃描裝置3 2及反 射鏡組33同步運動，在相對於底座平台35之一平面上進行 平行等速直線運動進而完成雙視角之線性掃描；亦可改為 固定第一線性掃描裝置31、光源裝置38及第二線性掃描裝 置32及反射鏡組33不動，再藉由一驅動裝置（圖中未標示） 驅動底座平台35，使其底座平台相對於上方固定不動裝置 進行平行等速直線運動，以完成雙視角之線性掃描。 第二線性掃描裝置32包含至少一側成像裝置37，此一 第二線性掃描裝置32係設置於該第一線性掃描裝置31旁邊 並/、其相平行，而側成像裝置37之光轴371與該主成像裝 置36之光轴361亦可以約略互相平行（may be 座平台3 5方向之頂端則裝有一 一同轴光源裝置38，此外，藉Page 13 1229186 V. Description of the invention (10) There is an appropriate distance above the first linear scanning device 31 and one or more main imaging devices 36 are also installed. The optical axis 361 of the main imaging device 36 is vertical, or approximately perpendicular to the base platform 35, and its lens is directed at the object to be detected 3 4 '. In addition, this can be achieved by a driving device (not shown). The first linear scanning device 31 moves synchronously with the light source device 38, the second linear scanning device 32, and the mirror group 33, and performs a parallel constant-speed linear motion on a plane relative to the base platform 35 to complete the dual-viewing angle. Linear scanning; the first linear scanning device 31, the light source device 38, the second linear scanning device 32, and the mirror group 33 can be fixed instead, and then the base platform 35 is driven by a driving device (not shown in the figure), Make its base platform perform parallel and constant-speed linear motion relative to the fixed fixed device above to complete the linear scanning of dual angles of view. The second linear scanning device 32 includes at least one side imaging device 37. The second linear scanning device 32 is disposed beside and parallel to the first linear scanning device 31, and the optical axis 371 of the side imaging device 37 The optical axis 361 of the main imaging device 36 may also be approximately parallel to each other (a coaxial light source device 38 is installed at the top of the may platform 35 direction).
appr〇ximately parallel)，該側成像裝置π正對於該底 !229186 五、發明說明（11) 直線運動，以完成雙視角之線性掃描。 f ”33則是設置於側成像裝置37與待測物體“之 間，其係洛於光轴371之光路徑上並傾斜有一適當之角 J ’自同軸光源裝置38所發出之光線經由反射鏡田㈣反射 :、’係可以-入射角0射向該待檢測物體34，如此便 成與上述之較佳實施例中相同之功能。 同樣地，纟此-較佳實施例中，第—線性掃描裝㈣ :第二線性掃描裝置32係可利用一連結裝置將其連結為一 並藉由同-驅動裝置分別於其所在之相對於底 35之平面上同時進行平行等速直線運動，此時底座平台 $固定不動狀態，以完成雙視角之線性掃描。而第 知描裝置32亦可與反射鏡組33經由一連結 社 -體’藉由同-驅動裝置分別於其所在之相對於底匕f ^之平面上同時進行平行等速直線運動。另外，底座平: 35亦可於其所處之相對上方掃描裝置之平面上進行平^ 迷直線運動，此時位於底座平台上方之掃描裝置處於 不動狀態’以完成雙視角之線性掃描。 請參考B1六’其係為本發明一種雙視角之三維形 ^線性掃描㉟測裝置之又一較佳實施例的結構示意圖。= 圖所示，本實施例中主要係由一第一線性掃描裝置“、一 第二線性掃描裝置42、一分光鏡（beain spliUer)43w 一光源裝置48所組成。其中待檢測物體44乃固定於底座 台45之上’而第-線性掃描裝置41則設置於距離該待 物體44上方有一適當之距離，此第一線性掃描裝置“上還Approximately parallel), the side imaging device π is facing the base! 229186 V. Description of the invention (11) Straight-line movement to complete the dual-view linear scanning. f "33 is located between the side imaging device 37 and the object to be measured", which is located on the light path of the optical axis 371 and inclined at an appropriate angle J '. The light emitted from the coaxial light source device 38 passes through the mirror field ㈣Reflection :, 'Can be-the incident angle 0 is directed to the object to be detected 34, so as to have the same function as in the preferred embodiment described above. Similarly, in this preferred embodiment, the first linear scanning device: the second linear scanning device 32 can be connected to each other by a linking device, and the same-drive device is respectively opposite to where it is located. At the same time, the planes of the base 35 are performing parallel and constant-speed linear movements at this time. At this time, the base platform $ is fixed and stationary, so as to complete the linear scanning of the dual viewing angles. The first scanning device 32 and the mirror group 33 can also perform parallel, constant-speed, linear motions simultaneously on a plane relative to the bottom plane f and the same through the same driving mechanism through a connecting body. In addition, the base flat: 35 can also perform linear motion on the plane where the scanning device is located relative to the upper scanning device. At this time, the scanning device located above the base platform is in a stationary state 'to complete the dual-view linear scanning. Please refer to B1 Six ′, which is a schematic structural diagram of another preferred embodiment of a three-dimensional shape of a dual-view linear scanning detection device according to the present invention. As shown in the figure, this embodiment is mainly composed of a first linear scanning device, a second linear scanning device 42, a beam splitter 43w, and a light source device 48. The object to be detected 44 is It is fixed on the base table 45 ', and the first linear scanning device 41 is disposed at a proper distance from the object 44 above.
1229186 五、發明說明（12) 裝有一到多個主成像裝置46。主成像裝置46之光轴461係 垂直，或約略垂直該底座平台45，且其鏡頭乃正視角對準 待檢測物體44。此外，藉由一驅動裝置（圖中未標示）可使 此第一線性掃描裝置41與光源裝置48及第二線性掃描裝置 42及分光鏡43同步運動，在相對於底座平台之一平面上 進行平行等速直線運動進而完成雙視角之線性掃描；亦可 改為固定第一線性掃描裝置41、光源裝置48及第二線性掃 描裝置42及分光鏡4 3不動，再藉由一驅動裝置（圖中未標 示）驅動底座平台45，使其底座平台相對於上方固定不動 裝置進行平行等速直線運動，以完成雙視角之線性掃描。 第二線性掃描裝置42包含至少一側成像裝置47，此一 第二線性掃描裝置42係設置於該第一線性掃描裝置4丨旁邊 並與其相平行’而側成像裝置47之光轴471與該主成像裝 置46之光轴461則約略互相平行（may be appr〇ximately、 parallel)。此外，藉由一驅動裝置（圖中未標示）可使此 第二線性掃描裝置42與光源裝置48及第一線性掃描震置 及分光鏡4 3同步運動，在相對於底座平台45之一平面上 行平行等速直線運動進而完成雙視角之線性掃描；亦可 為固定第一線性掃描裝置41、光源裝置48及第二線性 裝置42及分光鏡43不動’再藉由一驅動裝置（圖中未 驅動底座平㈣，使其底座平台相對於上方(固Y不未動 進行平行等速直線運動，以完成雙視角之線性掃描。 光源裝置48係相對於該侧成像裝置47正視角之光軸 471傾斜有一適當之角度，該光源裝置48可提供一側向光1229186 V. Description of the invention (12) One or more main imaging devices 46 are installed. The optical axis 461 of the main imaging device 46 is vertical, or approximately vertical, to the base platform 45, and its lens is directed at the object 44 to be detected at a positive viewing angle. In addition, the first linear scanning device 41 can be synchronized with the light source device 48, the second linear scanning device 42 and the beam splitter 43 by a driving device (not shown in the figure) on a plane relative to the base platform. Carry out parallel constant-speed linear motion to complete the dual-view linear scanning; the first linear scanning device 41, the light source device 48, the second linear scanning device 42 and the beam splitter 4 3 can be fixed instead, and then a driving device is used. (Not shown in the figure) The base platform 45 is driven to make the base platform perform parallel and constant-speed linear movement relative to the fixed fixed device above to complete the linear scanning of the two viewing angles. The second linear scanning device 42 includes at least one imaging device 47. The second linear scanning device 42 is disposed beside and parallel to the first linear scanning device 4 and the optical axis 471 of the side imaging device 47 and The optical axes 461 of the main imaging device 46 are approximately parallel to each other. In addition, by a driving device (not shown in the figure), the second linear scanning device 42 can be synchronized with the light source device 48 and the first linear scanning vibrating device and the beam splitter 43, and can move relative to one of the base platforms 45. Plane upward parallel parallel constant-speed linear motion to complete the dual-view linear scanning; it can also be fixed first linear scanning device 41, light source device 48 and second linear device 42 and beam splitter 43 without moving a 'drive device (Figure The base is not driven horizontally, so that the base platform relative to the top (fixed Y does not move to perform parallel constant velocity linear motion to complete the linear scanning of dual viewing angles. The light source device 48 is a light with a positive viewing angle relative to the imaging device 47 on the side. The shaft 471 is inclined at an appropriate angle, and the light source device 48 can provide lateral light
第16頁 1229186 五、發明說明（13) 線來照射該待檢測物體，且藉由一驅動裝置（圖中未標示） 可使此第二線性掃描裝置42與光源裝置48及第一線性掃描 裝置41及分光鏡4 3同步運動，在相對於底座平台45之一平 面上進行平行等速直線運動進而完成雙視角之線性掃描； 亦I改為固定第一線性掃描裝置41、光源裝置48及第二線 性掃描裝置42及分光鏡43不動，再藉由一驅動裝置（圖中 未標示）驅動底座平台35，使其底座平台相對於上方固定 不動裝置進行平行等速直線運動，以完成雙視角之線性掃 描。 ,分光鏡43係設置於側成像裝置47與待測物體44之間， 且光源裝置48所發射之侧向光線可部份穿透此分光鏡^以 一入射角Θ射向待檢測物體44。此分光鏡“可為一半穿透 =反射鏡4即其透射率與反射率可分別約略為5〇%。此 :2 斜有一適當之角度’可使入射待檢測物體44 後之反射先線經由該分光鏡43部份反射後，沿著光 Ϊ = ”裝二7，如此便可達成與上述之較佳實施例 :二置48所提供之側向光線在此即作 同樣地，在此一較佳實施例中， 與第二線性掃描裝置42係可利用一、查=壯線11知描裝置41 和廿n m 連結裝置將其連結為- ^並错由同一驅動裝置分別於其所在之相對於底座平二 45之平面上同時進行平行等速直線 ;命= 線性掃描。而第二線性 知描裝置42亦可與分光鏡43經由一連結裝置將其連結為一Page 16 1229186 V. Description of the invention (13) Line to illuminate the object to be detected, and the second linear scanning device 42 and the light source device 48 and the first linear scanning can be made by a driving device (not shown in the figure). The device 41 and the beam splitter 43 are moved synchronously to perform parallel, constant-speed, linear motion on a plane relative to the base platform 45 to complete the linear scanning at two angles of view. Also, the first linear scanning device 41 and the light source device 48 are fixed. And the second linear scanning device 42 and the beam splitter 43 are not moved, and then the base platform 35 is driven by a driving device (not shown in the figure), so that the base platform performs parallel and constant linear motion with respect to the fixed fixed device above to complete the double Linear scanning of perspective. The beam splitter 43 is disposed between the side imaging device 47 and the object 44 to be measured, and the lateral light emitted by the light source device 48 can partially penetrate the beam splitter ^ and is incident on the object 44 to be detected at an incident angle Θ. This beamsplitter "can be half-transmissive = mirror 4 that its transmittance and reflectance can be approximately 50% respectively. This: 2 oblique at an appropriate angle 'allows the reflection of the incident incident object 44 to pass through first. After the beam splitter 43 is partially reflected, two 7's are installed along the light beam = "", so that the above-mentioned preferred embodiment can be achieved: the lateral light provided by the second set 48 is the same as here. In a preferred embodiment, the second linear scanning device 42 can be connected to the scanning device 41 and the 廿 nm linking device by using the first scanning line 11 and the 廿 nm linking device. Simultaneously perform a parallel constant velocity straight line on the plane of the base plane 45; f = linear scanning. The second linear scanning device 42 can also be connected with the beam splitter 43 as a
第17頁 1229186Page 17 1229186
體，藉由同一驅動裝置於其 面上同時進行平行等逮直^ 於其所處之相對上方掃描襄 運動’此時位於底座平台上 悲’以完成雙視角之線性掃 所在之相對於底座平台45之平 運動。另外，底座平台45亦可 置之平面上進行平行等速直線 方之掃描裝置處於固定不動狀 描0 總之，以上所述者 當不能以之限定本發明所；；：：：”佳實施例而已， =圍=之=變化與修飾，皆應仍屬於本發二;: =，祀圍内，謹請貴審查委員明鑑，並祈惠准，是寻所利 1229186 圖式簡單說明 【圖示簡單說明】 本發明之前述與复 說明及所附圖示後，^ 、、特徵及優點，在配合下列 圖m Λ 可獲得更好的理解。 圖一B i斧丨爾、、性掃描光學檢測系統之示意圖。 測系統之示意圖。成像裝置之傳統線性掃描光學檢 刺糸：之1為利由用斜視角成像裝置之傳統線性掃描光學檢 測系統^另一實施方式的示意圖。 从这f :A與圖二β為本發明-種雙視角之三維形貌影像線 一、衣置《第一較佳實施例的結構示意圖。 、圖二Α為本發明一種雙視角之三維形貌影像線性掃描 檢測裝i用於檢測凸出夕卜來物之示意圖。 圖一B為本發明一種雙視角之三維形貌影像線性掃描 檢測裝置用於檢測凹陷結構之示意圖。 圖四A為本發明中以一分光鏡和一光源裝置所形成之 同軸光源的結構示意圖。 圖四B為本發明一種雙視角之三維形貌影像線性掃描 檢測裝置之另一較佳實施例的結構示意圖。 圖五為本發明一種雙視角之三維形貌影像線性掃描檢 測裝置之另一較佳實施例的結構示意圖。 圖六為本發明一種雙視角之三維形貌影像線性掃描檢 測裝置之又一較佳實施例的結構示意圖。 圖號說明：The body is driven by the same drive device on its surface to perform parallel and parallel captures at the same time. ^ Scan the movement above it at the same time as it is located on the base platform at this time to complete the dual-view linear scan relative to the base platform. 45's flat movement. In addition, the base platform 45 can also be placed on a plane to perform parallel, constant-speed, linear scanning devices in a fixed state. In short, the foregoing should not be used to limit the invention ;; :: " ， = 围 = 之 = Changes and modifications should still belong to this issue;: =, Inside the ceremonial fence, I would like to ask your reviewing committee to make a clear reference, and pray for your favor. It is a matter of interest. 1229186 Schematic illustration [simple illustration Description] After the foregoing and re-explanations of the present invention and the accompanying drawings, ^,, features, and advantages can be better understood in conjunction with the following figure m Λ. Figure 1 Optical scanning optical detection system Schematic diagram of the measurement system. Conventional linear scanning optical inspection of imaging devices. The first is a schematic diagram of another embodiment of the conventional linear scanning optical detection system using an oblique viewing angle imaging device. From this f: A and Fig. 2 β is a three-dimensional topographic image line of the present invention-a dual-view image. I. Structure diagram of the first preferred embodiment. Fig. 2A is a dual-view three-dimensional topographic image linear scanning detection device of the present invention. i is used for inspection Schematic diagram of protruding objects. Figure 1B is a schematic diagram of a dual-view three-dimensional topographic image linear scanning detection device for detecting a depressed structure. Figure 4A is a beam splitter and a light source device in the present invention. Schematic diagram of the formed coaxial light source. Figure 4B is a schematic diagram of another preferred embodiment of a dual-view three-dimensional topographic image linear scanning detection device of the present invention. Figure 5 is a dual-view three-dimensional topography of the present invention Schematic diagram of another preferred embodiment of an image linear scanning detection device. Figure 6 is a schematic diagram of another preferred embodiment of a dual-view three-dimensional topographic image linear scanning detection device according to the present invention.
第19 I19th I
1229186 圖式簡單說明 11 ~待測物體 it成像裝置 -斜視角之成像裝置 1 3”斜視角之成像裝置 2 1 -正視角線性掃描裝置 23-光源裝置 24 -待測物體 241-突起外來物 241’ -凹陷結構 25- 底座平台 26- 主成像裝置 27- 斜視角成像裝置 2 8 -分光鏡 31 -第一線性掃描裝置 3 3 -反射鏡組 35- 底座平台 36- 主成像裝置 37- 側成像裝置 38- 同轴光源裝置 41 -第一線性掃描裝置 4 3 -分光鏡 45- 底座平台 46- 主成像裝置 4 7 -侧成像裝置 12-底座平台 14-光源裝置 1 4 -同側斜向光源裝置 14π -異側斜向光源裝置 22-斜視角線性掃描裝 2 3 ’ -側邊光源裝置 2 4 2 -陰暗部 2 4 2 ’ -亮部 26卜主成像裝置之光軸 27卜斜視角成像裝置之光軸 32-第二線性掃描裝置 3 4 -待測物體 361-主成像裝置之 37卜侧成像裝置之光$ 4 2 -第二線性掃插类 44-待測物體描袭置 461-主成像裝置之光軸 47卜側成像裝置之光軸1229186 Schematic illustration 11 ~ Object to be measured imaging device-imaging device with oblique viewing angle 1 3 "imaging device with oblique viewing angle 2 1-linear scanning device with positive viewing angle 23-light source device 24-object under test 241-protruding foreign object 241 '-Recessed structure 25-base platform 26-main imaging device 27-oblique viewing angle imaging device 2 8-beam splitter 31-first linear scanning device 3 3-mirror group 35-base platform 36-main imaging device 37-side Imaging device 38- Coaxial light source device 41-First linear scanning device 4 3-Beamsplitter 45-Base platform 46-Main imaging device 4 7-Side imaging device 12-Base platform 14-Light source device 1 4-Same oblique Light source device 14π-Diagonal oblique light source device 22-Oblique viewing angle linear scanning device 2 3 ′-Side light source device 2 4 2-Shadowy part 2 4 2 '-Bright part 26, optical axis 27, main imaging device, oblique view Optical axis of angle imaging device 32-second linear scanning device 3 4-object to be measured 361-light of main imaging device 37 side imaging device $ 4 2-second linear scanning and insertion type 44-tracing object to be measured 461- Optical axis of main imaging device 47 Optical axis of b side imaging device
國 第20頁 1229186 圖式簡單說明 4 8 -光源裝置 第21頁Country Page 20 1229186 Schematic illustration 4 8 -Light source unit Page 21
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US7986402B2 (en) | 2008-11-21 | 2011-07-26 | Industrial Technology Research Institute | Three dimensional profile inspecting apparatus |
| USRE43925E1 (en) | 2008-11-21 | 2013-01-15 | Industrial Technology Research Institute | Three dimensional profile inspecting apparatus |
| TWI461662B (en) * | 2010-10-01 | 2014-11-21 | B & M Optics Co Ltd | Optical measurement system |
| CN110554046A (en) * | 2019-09-05 | 2019-12-10 | 西安多维机器视觉检测技术有限公司 | detection system and method for pins of electronic components |
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| TWI472711B (en) * | 2012-10-30 | 2015-02-11 | Ind Tech Res Inst | Method and device for measuring 3-d article without contacting |
| TWI468642B (en) * | 2012-11-01 | 2015-01-11 | Univ Southern Taiwan Sci & Tec | Three-dimensional contact type scanning probe |
| TWI481814B (en) * | 2013-04-03 | 2015-04-21 | Ckd Corp | Three dimensional measuring device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US7986402B2 (en) | 2008-11-21 | 2011-07-26 | Industrial Technology Research Institute | Three dimensional profile inspecting apparatus |
| USRE43925E1 (en) | 2008-11-21 | 2013-01-15 | Industrial Technology Research Institute | Three dimensional profile inspecting apparatus |
| TWI461662B (en) * | 2010-10-01 | 2014-11-21 | B & M Optics Co Ltd | Optical measurement system |
| CN110554046A (en) * | 2019-09-05 | 2019-12-10 | 西安多维机器视觉检测技术有限公司 | detection system and method for pins of electronic components |
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| TW200532187A (en) | 2005-10-01 |
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