TWD210155S - A vessel for plasma processing device - Google Patents

A vessel for plasma processing device Download PDF

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Publication number
TWD210155S
TWD210155S TW109300766D01F TW109300766D01F TWD210155S TW D210155 S TWD210155 S TW D210155S TW 109300766D01 F TW109300766D01 F TW 109300766D01F TW 109300766D01 F TW109300766D01 F TW 109300766D01F TW D210155 S TWD210155 S TW D210155S
Authority
TW
Taiwan
Prior art keywords
processing device
plasma processing
vessel
design
container
Prior art date
Application number
TW109300766D01F
Other languages
Chinese (zh)
Inventor
蔡熙星
金亨源
鄭熙錫
Original Assignee
南韓商吉佳藍科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商吉佳藍科技股份有限公司 filed Critical 南韓商吉佳藍科技股份有限公司
Publication of TWD210155S publication Critical patent/TWD210155S/en

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Abstract

【物品用途】;本設計係關於一種等離子體處理裝置用容器之設計，特別是有關於一種用於等離子體處理半導體製造基板裝置中的容器。;【設計說明】;無。[Use of article]; This design is about a container for a plasma processing device, especially a container used in a plasma processing device for semiconductor manufacturing substrates. ;[Design description];None.

Description

等離子體處理裝置用容器Container for plasma processing device

本設計係關於一種等離子體處理裝置用容器之設計，特別是有關於一種用於等離子體處理半導體製造基板裝置中的容器。This design is related to the design of a container used in a plasma processing device, especially a container used in a plasma processing semiconductor manufacturing substrate device.

無。no.

TW109300766D01F 2019-08-20 2020-02-19 A vessel for plasma processing device TWD210155S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR30-2019-0039751 2019-08-20
KR20190039751 2019-08-20

Publications (1)

Publication Number Publication Date
TWD210155S true TWD210155S (en) 2021-03-01

Family

ID=88966491

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109300766D01F TWD210155S (en) 2019-08-20 2020-02-19 A vessel for plasma processing device

Country Status (1)

Country Link
TW (1) TWD210155S (en)

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