TWD198931S - 基板搬運用保持墊之部分 - Google Patents
基板搬運用保持墊之部分Info
- Publication number
- TWD198931S TWD198931S TW107305935F TW107305935F TWD198931S TW D198931 S TWD198931 S TW D198931S TW 107305935 F TW107305935 F TW 107305935F TW 107305935 F TW107305935 F TW 107305935F TW D198931 S TWD198931 S TW D198931S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- design
- article
- case
- holding
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 7
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000007779 soft material Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是在半導體製造裝置中，配置在搬運半導體晶圓之類的基板用的搬運支臂上來使用的保持墊。本物品，係如「使用狀態之參考圖」所示，為配置在搬運支臂的基板保持部，抵接於所搬運的基板之邊緣部而予以吸附保持，當搬運支臂動作時，可防止基板從保持位置偏移或脫落。本物品，係由橡膠之類的柔軟素材所製成，正面部為略圓錐狀，在其底部設置具有縫隙的環狀凸部。藉此，本物品，係如「使用狀態之參考剖面圖」所示，能夠使略圓錐狀部沿著基板面撓曲變形，將環狀凸部抵接在基板而予以吸附保持，也能確實地保持住反翹撓曲的基板。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;「參考立體圖」中，施以薄墨的部分係為用來表現主張設計之部分。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-8792F JP1625995S (zh) | 2018-04-20 | 2018-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD198931S true TWD198931S (zh) | 2019-08-01 |
Family
ID=65519211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107305935F TWD198931S (zh) | 2018-04-20 | 2018-10-08 | 基板搬運用保持墊之部分 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD909603S1 (zh) |
| JP (1) | JP1625995S (zh) |
| TW (1) | TWD198931S (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD973609S1 (en) | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1705915S (zh) * | 2021-07-09 | 2022-01-25 | ||
| JP1705916S (zh) * | 2021-07-09 | 2022-01-25 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD453000S1 (en) * | 2000-05-11 | 2002-01-22 | Yugenkaisha Shinjo Seisakusho | Clinch nut |
| USD451374S1 (en) * | 2000-05-18 | 2001-12-04 | Yugenkaisha Shinjo Seisakusho | Clinch nut |
| USD463968S1 (en) * | 2001-02-08 | 2002-10-08 | Emhart Llc | Deadbolt |
| USD559994S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD560284S1 (en) * | 2005-03-30 | 2008-01-22 | Tokyo Electron Limited | Cover ring |
| USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD619700S1 (en) * | 2006-10-27 | 2010-07-13 | Resmed Motor Technologies Inc. | Motor housing |
| CN101808584B (zh) * | 2007-05-02 | 2012-12-19 | 精密医疗设备有限公司 | 非气动止血带装置 |
| USD679013S1 (en) * | 2008-05-02 | 2013-03-26 | Precision Medical Devices, Llc | Non-pneumatic tourniquet device |
| USD635246S1 (en) * | 2010-03-26 | 2011-03-29 | Oriel Therapeutics, Inc. | Dose disk for dry powder inhalers |
| US20110259457A1 (en) * | 2010-04-23 | 2011-10-27 | Wen-Tsung Lin | Joint Structure for Controlling Water Flow |
| USD736261S1 (en) * | 2012-11-29 | 2015-08-11 | Cummins Inc. | Shroud |
| USD705438S1 (en) * | 2013-03-14 | 2014-05-20 | Charles River Laboratories, Inc. | Base |
| USD738491S1 (en) * | 2013-11-08 | 2015-09-08 | Medline Industries, Inc. | Guide wire bowl |
| USD738935S1 (en) * | 2014-07-15 | 2015-09-15 | Henry C. Chu | Cap for air compressor |
| USD755038S1 (en) * | 2014-08-13 | 2016-05-03 | Luke Bolton | Multi-fit cover plate |
| TWD168721S (zh) * | 2014-10-09 | 2015-07-01 | 台灣福興工業股份有限公司 | 鎖具蓋 |
| JP1579613S (zh) * | 2017-01-25 | 2017-06-19 | ||
| USD867576S1 (en) * | 2017-05-24 | 2019-11-19 | Christina Hewitt | Cap for medical breathing apparatuses |
| USD878548S1 (en) * | 2018-11-16 | 2020-03-17 | Brandi Lane | Side indent nasal airway |
-
2018
- 2018-04-20 JP JPD2018-8792F patent/JP1625995S/ja active Active
- 2018-10-08 US US29/665,837 patent/USD909603S1/en active Active
- 2018-10-08 TW TW107305935F patent/TWD198931S/zh unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD973609S1 (en) | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| USD909603S1 (en) | 2021-02-02 |
| JP1625995S (zh) | 2019-03-04 |
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